CN118102154A - Bone voiceprint sensor - Google Patents

Bone voiceprint sensor Download PDF

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Publication number
CN118102154A
CN118102154A CN202410458547.XA CN202410458547A CN118102154A CN 118102154 A CN118102154 A CN 118102154A CN 202410458547 A CN202410458547 A CN 202410458547A CN 118102154 A CN118102154 A CN 118102154A
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CN
China
Prior art keywords
opening
substrate
cavity
channel
vibration
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CN202410458547.XA
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Chinese (zh)
Inventor
缪建民
王志宏
王炳洲
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Sv Senstech Wuxi Co ltd
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Sv Senstech Wuxi Co ltd
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Priority to CN202410458547.XA priority Critical patent/CN118102154A/en
Publication of CN118102154A publication Critical patent/CN118102154A/en
Pending legal-status Critical Current

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Abstract

The invention belongs to the technical field of sensors, and discloses a bone voiceprint sensor. The bone voiceprint sensor includes a substrate, a vibration assembly, and a microphone assembly. A first opening and a second opening are arranged on one side face of the substrate at intervals, a channel is formed in the substrate, the channel is communicated with the first opening and the second opening to form a first cavity, the vibration component is arranged above the first opening on the substrate through the annular base to form a second cavity, and the microphone component is at least partially arranged above the second opening of the substrate to form a third cavity. The first cavity is communicated with the second cavity and the third cavity to form a closed cavity, the vibration component can sense external vibration signals and drive air flow in the closed cavity to change, and the microphone component can sense air flow in the closed cavity to change so as to convert the vibration signals into electric signals. The bone voiceprint sensor realizes the same-side encapsulation of the vibration component and the microphone component, simplifies the encapsulation mode, reduces the encapsulation cost and realizes the miniaturization and miniaturization of the bone voiceprint sensor.

Description

Bone voiceprint sensor
Technical Field
The invention relates to the technical field of sensors, in particular to a bone voiceprint sensor.
Background
The bone voiceprint sensor is a sensor that uses an acoustic membrane to vibrate to drive air flow and thereby detect a flow signal. The bone voiceprint sensor generally includes a vibration assembly for sensing an external vibration signal and converting an air flow change generated when vibrating into an electrical signal through the microphone assembly, thereby expressing the vibration signal.
In the prior art, the vibration component and the microphone component of the bone voiceprint sensor are generally arranged on two sides of the substrate, and the vibration component and the microphone component are packaged into a whole by a multilayer superposition lamination process, so that the manufacturing process is complex, and the height of the whole sensor is limited by the multilayer superposition structure, thus being unfavorable for miniaturization and miniaturization of intelligent products.
Accordingly, there is a need to provide a bone voiceprint sensor that addresses the above-described issues.
Disclosure of Invention
The invention aims to provide a bone voiceprint sensor, which can realize the same-side encapsulation of a vibration component and a microphone component, simplify the encapsulation mode, reduce the encapsulation cost and realize the miniaturization and the miniaturization of the bone voiceprint sensor.
To achieve the purpose, the invention adopts the following technical scheme: the bone voiceprint sensor comprises a substrate, wherein a first opening and a second opening are formed in one side surface of the substrate at intervals, a channel is formed in the substrate, and the channel is communicated with the first opening and the second opening to form a first cavity; the vibration assembly comprises a vibrating diaphragm and a mass block, wherein the vibrating diaphragm is arranged above the first opening on the substrate through an annular base to form a second cavity, and the mass block is arranged on one side, close to the substrate, of the vibrating diaphragm; a microphone assembly disposed at least partially over the second opening of the substrate to form a third chamber; the first cavity is communicated with the second cavity and the third cavity to form a closed cavity, the vibration component can sense external vibration signals and drive air flow in the closed cavity to change, and the microphone component can sense air flow change in the closed cavity to convert the vibration signals into electric signals.
Preferably, the channels include a first channel extending in a first direction and communicating with the first opening, a second channel extending in the first direction and communicating with the second opening, and a third channel extending in a second direction and communicating with both the first channel and the second channel, the first direction being perpendicular to the second direction.
Preferably, the diaphragm is provided with a first through hole, the mass block is provided with a second through hole, and the first through hole and the second through hole are communicated and jointly form a vent hole.
Preferably, the vibration assembly comprises a sealing shell, and the sealing shell is covered above the annular base, the vibrating diaphragm and the mass block.
Preferably, the vibration assembly includes a sealing case disposed above the annular base to cover the diaphragm and the mass.
Preferably, the microphone assembly includes a MEMS chip disposed over the second opening of the substrate.
Preferably, the microphone assembly further comprises an ASIC chip, the ASIC chip is disposed on the substrate, and the ASIC chip is electrically connected to the MEMS chip.
Preferably, the bone voiceprint sensor includes a housing, a placement cavity is formed between the housing and the substrate, and the vibration component and the microphone component are both disposed in the placement cavity.
Preferably, the casing is provided with a pressure release hole.
The beneficial effects are that: the bone voiceprint sensor includes a substrate, a vibration assembly, and a microphone assembly. A first opening and a second opening are arranged on one side face of the substrate at intervals, a channel is formed in the substrate, the channel is communicated with the first opening and the second opening to form a first cavity, the vibration component is arranged above the first opening on the substrate through the annular base to form a second cavity, and the microphone component is at least partially arranged above the second opening of the substrate to form a third cavity. The first cavity is communicated with the second cavity and the third cavity to form a closed cavity, the vibration component can sense external vibration signals and drive air flow in the closed cavity to change, and the microphone component can sense air flow in the closed cavity to change so as to convert the vibration signals into electric signals.
Through the mode of seting up first cavity on the base plate for vibration subassembly and microphone subassembly can set up the homonymy at the base plate, and form airtight chamber through the intercommunication effect of first cavity between the two, make when vibration subassembly senses external vibration signal back drive airtight intracavity air current and produce the change, the microphone subassembly can sense the air current and change in order to change vibration signal into the electrical signal. The same-side packaging of the vibration component and the microphone component is realized, the packaging mode is simplified, the packaging efficiency is improved, the packaging cost is reduced, the height of a product is reduced, and the miniaturization and miniaturization of the bone voiceprint sensor are realized.
Drawings
FIG. 1 is a cross-sectional view of a bone voiceprint sensor provided in accordance with one embodiment of the present invention; FIG. 2 is a cross-sectional view of a bone voiceprint sensor according to a second embodiment of the present invention; fig. 3 is a cross-sectional view of a bone voiceprint sensor provided in accordance with a third embodiment of the present invention.
In the figure: 1. a substrate; 11. a channel; 111. a first channel; 112. a second channel; 113. a third channel; 2. a vibration assembly; 21. a vibrating diaphragm; 22. a mass block; 3. an annular base; 4. a microphone assembly; 41. a MEMS chip; 42. an ASIC chip; 5. a sealed housing; 6. a housing; 61. a pressure relief hole; 7. the cavity is placed.
Detailed Description
The invention is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting thereof. It should be further noted that, for convenience of description, only some, but not all of the structures related to the present invention are shown in the drawings.
In the description of the present invention, unless explicitly stated and limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
In the present invention, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.
In the description of the present embodiment, the terms "upper", "lower", "right", etc. orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are merely for convenience of description and simplicity of operation, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the invention. Furthermore, the terms "first," "second," and the like, are used merely for distinguishing between descriptions and not for distinguishing between them.
The technical scheme of the invention is further described below by the specific embodiments with reference to the accompanying drawings.
Example 1
The bone voiceprint sensor is a sensor that uses an acoustic membrane to vibrate to drive air flow and thereby detect a flow signal. The bone voiceprint sensor generally includes a vibration assembly 2 and a microphone assembly 4, wherein the vibration assembly 2 is used for sensing an external vibration signal, and converting a change of air flow generated during vibration into an electrical signal through the microphone assembly 4, thereby expressing the vibration signal. In the prior art, the vibration component 2 and the microphone component 4 of the bone voiceprint sensor are generally arranged on two sides of the substrate 1, and the vibration component and the microphone component are packaged into a whole by a multilayer superposition lamination process, so that the manufacturing process is complex, and the height of the whole sensor is limited by the multilayer superposition structure, which is not beneficial to miniaturization and miniaturization of intelligent products.
In order to solve the above problems, referring to fig. 1, the present embodiment discloses a bone voiceprint sensor. The bone voiceprint sensor includes a substrate 1, a vibration assembly 2, and a microphone assembly 4. A first opening and a second opening are arranged on one side surface of the substrate 1 at intervals, a channel 11 is arranged in the substrate 1, the channel 11 is communicated with the first opening and the second opening to form a first chamber, the vibration component 2 is arranged above the first opening on the substrate 1 through the annular base 3 to form a second chamber, and the microphone component 4 is at least partially arranged above the second opening of the substrate 1 to form a third chamber. The first cavity is communicated with the second cavity and the third cavity to form a closed cavity, the vibration component 2 can sense external vibration signals and drive air flow in the closed cavity to change, and the microphone component 4 can sense air flow in the closed cavity to change so as to convert the vibration signals into electric signals.
By means of the first cavity formed in the substrate 1, the vibration assembly 2 and the microphone assembly 4 can be arranged on the same side of the substrate 1, and a closed cavity is formed through the communication effect of the first cavity, so that when the vibration assembly 2 senses an external vibration signal and then drives airflow in the closed cavity to change, the microphone assembly 4 can sense the airflow change to convert the vibration signal into an electric signal. The same-side packaging of the vibration component 2 and the microphone component 4 is realized, the packaging mode is simplified, the packaging efficiency is improved, the packaging cost is reduced, the height of a product is reduced, and the miniaturization and miniaturization of the bone voiceprint sensor are realized.
In this embodiment, the substrate 1 is a PCB board.
In the present embodiment, as shown in fig. 1, the passage 11 includes a first passage 111, a second passage 112, and a third passage 113, the first passage 111 extends in the first direction and communicates with the first opening, the third passage 113 extends in the first direction and communicates with the second opening, and the second passage 112 extends in the second direction and communicates with both the first passage 111 and the second passage 112. Wherein the first direction is perpendicular to the second direction. Illustratively, as shown in fig. 1, the first direction is the thickness direction of the substrate 1, and the second direction is the length direction of the substrate 1. In a specific implementation process, the second channel 112 is first pre-buried in the substrate 1, and then two spaced blind holes are drilled on one side of the substrate 1 to form the first channel 111 and the third channel 113.
In other embodiments, the channel 11 may be provided as a polygonal line or a curved shape as long as it can communicate the first opening and the second opening, and the specific shape and the manner of opening thereof are determined according to actual needs, which is not limited in this embodiment.
Specifically, as shown in fig. 1, the vibration assembly 2 includes a diaphragm 21 and a mass block 22, the diaphragm 21 is disposed on the annular base 3, and the mass block 22 is disposed on a side of the diaphragm 21 close to the substrate 1. The mass block 22 is helpful to increase the vibration amplitude of the vibration component 2, so that the airflow change in the closed cavity can be driven well, and the microphone component 4 can sense the airflow change conveniently, so as to convert the vibration signal into an electrical signal.
It should be noted that, in order to make the transmission of the airflow variation more precise, referring to fig. 1, in the present embodiment, the size of the first opening depends on the size of the mass 22, and the projection of the mass 22 along the first direction is in the first opening. At this time, when the mass block 22 vibrates along the first direction, there is no risk of interference with the substrate 1, so that the mass block 22 and the diaphragm 21 can vibrate better, thereby better driving the airflow in the closed cavity to change, and improving the accuracy of the microphone assembly 4 in sensing the airflow change.
Specifically, as shown in fig. 1, the microphone assembly 4 includes a MEMS chip 41, and the MEMS chip 41 is disposed above the second opening of the substrate 1. When the bone voiceprint sensor senses external vibration, the mass 22 moves relatively, thereby compressing air in the closed cavity, and then the MEMS chip 41 senses fluctuation of the air in the closed cavity.
Still further, with continued reference to fig. 1, the microphone assembly 4 further includes an ASIC chip 42, the ASIC chip 42 being disposed on the substrate 1, the ASIC chip 42 being electrically connected to the MEMS chip 41. The capacitance of the MEMS chip 41 will change correspondingly with the fluctuation of air, and the ASIC chip 42 is used to amplify and output the changed capacitance signal, so as to pick up the sound, which enables the microphone assembly 4 to convert the vibration signal into an electrical signal.
Specifically, the ASIC chip 42 is electrically connected to the substrate 1. Illustratively, the ASIC chip 42 is connected with the bonding pad of the substrate 1 through a gold wire, so that the electrical connection between the ASIC chip 42 and the PCB board is very stable, which is helpful for realizing signal transmission between the microphone assembly 4 and the bonding pad of the substrate 1.
Preferably, as shown in fig. 1, the bone voiceprint sensor includes a housing 6, a placement cavity 7 is formed between the housing 6 and the substrate 1, and the vibration component 2 and the microphone component 4 are both disposed in the placement cavity 7. The housing 6 can protect the vibration assembly 2 and the microphone assembly 4 from external physical injuries such as impact, friction, etc. And the shell 6 can also effectively isolate external environment noise, ensure that the vibration assembly 2 can accurately capture and identify bone vibration signals, thereby improving the quality and accuracy of the signals.
Further, the casing 6 is provided with a pressure release hole 61. The pressure relief holes 61 help to better balance the air pressure in the placement cavity 7, effectively prevent the bone voiceprint sensor from bursting during packaging, and improve the use safety of the bone voiceprint sensor. The bone voiceprint sensor can block the pressure relief hole 61 when in use.
Example two
The present embodiment provides a bone voiceprint sensor, and the specific structure of the bone voiceprint sensor provided in the present embodiment is substantially the same as that of the first embodiment. The specific structure of the bone voiceprint sensor provided in this embodiment is different from that of the first embodiment in that: the structure of the vibration assembly 2 is different.
Referring to fig. 2, in the present embodiment, a first through hole is formed in the diaphragm 21, a second through hole is formed in the mass block 22, and the first through hole and the second through hole are communicated and jointly form a vent hole. The air flow inside and outside the closed cavity is balanced through the vent hole, so that the bone voiceprint sensor explosion shell during backflow is prevented.
It will be appreciated that, at this time, the closed cavity is communicated with the placing cavity 7 through the vent hole, so as to ensure that the mass block 22 better drives the airflow in the closed cavity to change, so that the microphone assembly 4 can better sense air fluctuation and output an electric signal, as shown in fig. 2, in this embodiment, the vibration assembly 2 includes a sealing shell 5, and the sealing shell 5 is covered above the annular base 3, the diaphragm 21 and the mass block 22. That is, by providing the sealing case 5 to reduce the space where the placement chamber 7 communicates with the closed chamber, the mass 22 and the diaphragm 21 can vibrate well in the sealing chamber, so that the airflow in the vibration chamber can be driven to change better, and the accuracy of sensing the airflow change by the microphone assembly 4 can be improved.
Example III
The embodiment provides a bone voiceprint sensor, and the specific structure of the bone voiceprint sensor provided in this embodiment is substantially the same as that of the second embodiment. The specific structure of the bone voiceprint sensor provided in this embodiment is different from that of the second embodiment in that: the sealing shells 5 are arranged in different ways.
As shown in fig. 3, in the present embodiment, the seal housing 5 is disposed above the annular base 3 to cover the diaphragm 21 and the mass block 22. It will be appreciated that by this arrangement the volume of the bone voiceprint sensor can be further reduced.
It is to be understood that the above examples of the present invention are provided for clarity of illustration only and are not limiting of the embodiments of the present invention. Various obvious changes, rearrangements and substitutions can be made by those skilled in the art without departing from the scope of the invention. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the invention are desired to be protected by the following claims.

Claims (9)

1. A bone voiceprint sensor comprising:
The device comprises a substrate (1), wherein a first opening and a second opening are formed in one side surface of the substrate (1) at intervals, a channel (11) is formed in the substrate (1), and the channel (11) is communicated with the first opening and the second opening to form a first cavity;
The vibration assembly (2) comprises a vibrating diaphragm (21) and a mass block (22), wherein the vibrating diaphragm (21) is arranged above the first opening on the substrate (1) through an annular base (3) to form a second cavity, and the mass block (22) is arranged on one side, close to the substrate (1), of the vibrating diaphragm (21);
-a microphone assembly (4), the microphone assembly (4) being at least partially arranged above the second opening of the substrate (1) to form a third chamber;
the first cavity is communicated with the second cavity and the third cavity to form a closed cavity, the vibration component (2) can sense external vibration signals and drive air flow in the closed cavity to change, and the microphone component (4) can sense air flow change in the closed cavity to convert the vibration signals into electric signals.
2. The bone voiceprint sensor according to claim 1, wherein the channel (11) comprises a first channel (111), a second channel (112), and a third channel (113), the first channel (111) extending in a first direction and communicating with the first opening, the third channel (113) extending in the first direction and communicating with the second opening, the second channel (112) extending in a second direction and communicating with both the first channel (111) and the second channel (112), the first direction being perpendicular to the second direction.
3. The bone voiceprint sensor according to claim 1, wherein the diaphragm (21) is provided with a first through hole, the mass (22) is provided with a second through hole, and the first through hole and the second through hole are communicated and jointly form a vent hole.
4. A bone voiceprint sensor according to claim 3, wherein the vibration assembly (2) comprises:
the sealing shell (5), the sealing shell (5) covers the annular base (3), the vibrating diaphragm (21) and the upper part of the mass block (22).
5. A bone voiceprint sensor according to claim 3, wherein the vibration assembly (2) comprises:
the sealing shell (5) is arranged above the annular base (3) to cover the vibrating diaphragm (21) and the mass block (22).
6. Bone voiceprint sensor according to any one of claims 1 to 5, wherein the microphone assembly (4) comprises a MEMS chip (41), the MEMS chip (41) being disposed over the second opening of the substrate (1).
7. The bone voiceprint sensor according to claim 6, wherein the microphone assembly (4) further comprises an ASIC chip (42), the ASIC chip (42) being provided to the substrate (1), the ASIC chip (42) being electrically connected with the MEMS chip (41).
8. The bone voiceprint sensor of claim 1, wherein the bone voiceprint sensor comprises:
the shell (6), form between shell (6) with base plate (1) and place chamber (7), vibration subassembly (2) with microphone subassembly (4) all set up in place in chamber (7).
9. Bone voiceprint sensor according to claim 8, wherein the housing (6) is provided with a pressure relief hole (61).
CN202410458547.XA 2024-04-17 2024-04-17 Bone voiceprint sensor Pending CN118102154A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202410458547.XA CN118102154A (en) 2024-04-17 2024-04-17 Bone voiceprint sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202410458547.XA CN118102154A (en) 2024-04-17 2024-04-17 Bone voiceprint sensor

Publications (1)

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CN118102154A true CN118102154A (en) 2024-05-28

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Application Number Title Priority Date Filing Date
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130070951A1 (en) * 2010-06-01 2013-03-21 Funai Electric Co., Ltd. Microphone unit and sound input device incorporating same
CN212086490U (en) * 2020-06-16 2020-12-04 荣成歌尔电子科技有限公司 Vibration sensor and electronic device
CN212393006U (en) * 2020-08-13 2021-01-22 青岛歌尔智能传感器有限公司 Bone voiceprint sensor and electronic device
CN114401478A (en) * 2021-12-24 2022-04-26 歌尔微电子股份有限公司 Bone voiceprint sensor
CN115278478A (en) * 2022-05-30 2022-11-01 青岛歌尔智能传感器有限公司 Bone voiceprint sensor and electronic equipment

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130070951A1 (en) * 2010-06-01 2013-03-21 Funai Electric Co., Ltd. Microphone unit and sound input device incorporating same
CN212086490U (en) * 2020-06-16 2020-12-04 荣成歌尔电子科技有限公司 Vibration sensor and electronic device
CN212393006U (en) * 2020-08-13 2021-01-22 青岛歌尔智能传感器有限公司 Bone voiceprint sensor and electronic device
CN114401478A (en) * 2021-12-24 2022-04-26 歌尔微电子股份有限公司 Bone voiceprint sensor
CN115278478A (en) * 2022-05-30 2022-11-01 青岛歌尔智能传感器有限公司 Bone voiceprint sensor and electronic equipment

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