CN118098913A - Compensation method and device for scanning electron microscope image, storage medium and scanning electron microscope - Google Patents
Compensation method and device for scanning electron microscope image, storage medium and scanning electron microscope Download PDFInfo
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Abstract
The invention discloses a scanning electron microscope image compensation method and device, a storage medium and a scanning electron microscope, wherein the method comprises the following steps: according to the scanning condition of a scanning electron microscope on a target sample, carrying out on-off control on an electron beam reaching the target sample through an electron beam gate; the method comprises the steps of respectively obtaining a first electric signal generated when an electron beam is disconnected and a second electric signal generated when the electron beam is conducted by using a detector; and compensating a second electric signal adjacent to the first electric signal according to the first electric signal and the target offset value, and generating a scanning electron microscope image of the target sample according to the compensated second electric signal. According to the method, the first electric signal generated by the detector when the electron beam is disconnected and the second electric signal generated by the detector when the electron beam brake is conducted are obtained, the second electric signal adjacent to the first electric signal is compensated according to the first electric signal and the target offset value, and the problem that the image acquisition effect of the scanning electron microscope is abnormal when the scanning operation is just started is solved.
Description
Technical Field
The present invention relates to the field of image processing technologies, and in particular, to a method and apparatus for compensating a scanning electron microscope image, a storage medium, and a scanning electron microscope.
Background
When scanning the electron microscope and obtaining electron microscope image data of the sample, the first lines of the first image collected in the signal reverse mode have the phenomenon of low brightness, and the first lines of the first image collected in the signal forward mode have the phenomenon of high brightness.
Disclosure of Invention
The present invention aims to solve at least one of the technical problems in the related art to some extent. Therefore, an object of the present invention is to provide a method for compensating an image of a scanning electron microscope, which solves the problem that the image acquisition effect of the scanning electron microscope is abnormal when the scanning operation is just started.
A second object of the present invention is to provide a method for compensating a scanning electron microscope image.
A third object of the present invention is to propose a computer readable storage medium.
A fourth object of the present invention is to provide a scanning electron microscope.
To achieve the above object, an embodiment of a first aspect of the present invention provides a method for compensating an image of a scanning electron microscope, where the scanning electron microscope includes an electron beam shutter and a detector, the method including: according to the scanning condition of the scanning electron microscope on the target sample, the electron beam which reaches the target sample is controlled to be on-off through the electron beam gate; the detector is used for respectively obtaining a first electric signal generated when the electron beam is disconnected and a second electric signal generated when the electron beam is conducted; and compensating the second electric signal adjacent to the first electric signal according to the first electric signal and the target bias value, and generating a scanning electron microscope image of the target sample according to the compensated second electric signal.
According to the compensation method for the scanning electron microscope image, the first electric signal generated by the detector when the electron beam is disconnected and the second electric signal generated by the detector when the electron beam gate is conducted are obtained, and the compensation value of the second electric signal adjacent to the first electric signal is obtained according to the first electric signal and the target offset value, so that the compensation value obtained when the adjacent electron beam is disconnected is used for compensating the alternating current signal of an effective sample image when the electron beam is conducted, and the problem that the image acquisition effect of the scanning electron microscope is abnormal when the scanning operation is just started is solved.
In addition, the compensation method for the scanning electron microscope image provided by the embodiment of the invention can also have the following additional technical characteristics:
according to one embodiment of the present invention, the scanning manner of the scanning electron microscope is to scan repeatedly in one direction to obtain scanning electron microscope images of one line and one line, and the on-off control of the electron beam reaching the target sample by the electron beam gate according to the scanning condition of the scanning electron microscope on the target sample includes:
when the scanning sites of the scanning electron microscope are scanned to the end position of the right end of each row of the target sample, the electron beam which reaches the target sample is controlled to be disconnected through the electron beam brake;
And resetting the scanning site to the left side of the target sample, and conducting control on the electron beam reaching the target sample through the electron beam gate when the scanning site deflects downwards to the starting position at the left side of the next row.
According to one embodiment of the invention, the first electrical signal is acquired at a first preset frequency and the second electrical signal is acquired at a second preset frequency, the first preset frequency being greater than the second preset frequency.
According to one embodiment of the present invention, when the second preset frequency is smaller than a preset scanning frequency threshold, the first preset frequency is set so that the first preset frequency is greater than or equal to the preset scanning frequency threshold, where the preset scanning frequency threshold is determined by at least the number of the first electric signals to be acquired, a current scanning reset time and a switching transient duration to be removed.
According to one embodiment of the present invention, the compensating the second electrical signal adjacent to the first electrical signal according to the first electrical signal and a target bias value includes: calculating an average value of the first electric signals acquired at the first preset frequency; and compensating the second electric signal adjacent to the first electric signal according to the average value and the target bias value.
According to one embodiment of the present invention, before the compensating the second electrical signal adjacent to the first electrical signal according to the first electrical signal and the target bias value, the method further includes: determining that the off-time of the electron beam reaching the target sample is controlled by the electron beam shutter to reach a preset time.
According to one embodiment of the present invention, the target bias value is determined according to an electric signal obtained by using the detector when the brightness of the scanning electron microscope image is restored to a preset target brightness.
To achieve the above object, an embodiment of a second aspect of the present invention provides a compensation device for a scanning electron microscope image, the scanning electron microscope including an electron beam shutter and a detector, the device comprising: the control module is used for controlling on-off of the electron beam reaching the target sample through the electron beam gate according to the scanning condition of the scanning electron microscope on the target sample; the generating module is used for respectively obtaining a first electric signal generated when the electron beam is disconnected and a second electric signal generated when the electron beam is conducted by using the detector; and the compensation module is used for compensating the second electric signal adjacent to the first electric signal according to the first electric signal and the target offset value, and generating a scanning electron microscope image of the target sample according to the compensated second electric signal.
To achieve the above object, an embodiment of a third aspect of the present invention provides a computer-readable storage medium having a computer program stored thereon, which when executed by a processor, implements a compensation method for a scanning electron microscope image as provided in the embodiment of the first aspect of the present invention.
In order to achieve the above object, a fourth aspect of the present invention provides a scanning electron microscope, including an electron beam shutter, a detector, and a controller, where the controller is connected to the electron beam shutter and the detector, respectively, and includes a memory and a processor, where the memory stores a computer program, and the computer program implements the method for compensating a scanning electron microscope image according to the first aspect of the present invention when executed by the processor.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
FIG. 1 is a schematic diagram of a scanning electron microscope according to an embodiment of the present invention;
FIG. 2 is a flow chart of a method of compensating a scanning electron microscope image according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of the signal amplifier electrical signals during scanning by a scanning electron microscope in accordance with one embodiment of the present invention;
FIG. 4 is an enlarged schematic diagram of the electrical signal at A in FIG. 3;
FIG. 5 is an enlarged schematic diagram of the electrical signal at A compensated using an embodiment of the present invention;
FIG. 6 is a schematic diagram of a scanning mode of a scanning electron microscope according to an embodiment of the present invention;
FIG. 7 is a schematic diagram of the signal amplifier electrical signals during scanning by a scanning electron microscope in accordance with an embodiment of the present invention;
FIG. 8 is a schematic diagram showing the relationship between the acquisition of the electrical signals and the control of the electron beam shutter during scanning of a scanning electron microscope in accordance with one embodiment of the present invention;
FIG. 9 (a) is a graph showing the effect of signal inversion mode uncompensated according to one embodiment of the invention;
FIG. 9 (b) is a graph of the effect of signal inversion mode compensation according to one embodiment of the invention;
FIG. 10 (a) is a graph showing the effect of signal forward mode uncompensated according to one embodiment of the invention;
FIG. 10 (b) is a graph of the effect of signal forward mode compensation according to one embodiment of the present invention;
FIG. 11 is a schematic diagram of a compensation device for scanning electron microscope images according to an embodiment of the present invention;
Fig. 12 is a block diagram of a controller according to an embodiment of the present invention.
Detailed Description
Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative and intended to explain the present invention and should not be construed as limiting the invention.
The following describes in detail a method and apparatus for compensating a scanning electron microscope image, a storage medium, and a scanning electron microscope according to embodiments of the present invention with reference to fig. 1 to 12 of the accompanying drawings and specific embodiments.
The scanning electron microscope (scanning electron microscope) in the scanning electron microscope image compensation method according to the embodiment of the invention can comprise a scanning deflector, an electron beam shutter, a detector, a signal amplifier, an analog-to-digital converter and a digital signal processing module (Field Programmable GATE ARRAY, FPGA).
As shown in fig. 1, a scanning electron microscope image of a target sample is generated, a scanning deflector of the scanning electron microscope controls an electron beam to scan point by point on the surface of the target sample, a secondary particle signal generated after the electron beam interacts with the target sample is captured by a detector, and the detector generates a current signal (alternating current signal) based on the captured secondary particle. The current signal is amplified and converted by a pre-amplifier to form a voltage signal, the voltage signal is input to a signal amplifier, the alternating current signal of the effective image is amplified and then input to an analog-to-digital converter, the alternating current signal is converted into a digital signal, namely image data, and the digital signal is input to a digital signal processing module to generate an electron microscope image through processing according to the image data.
In the process of generating a scanning electron microscope image, in order to protect a sensitive sample from being damaged, an electron beam shutter is required to be used for turning off an electron beam. The electron beam shutter is a pair of parallel plates symmetrically arranged on the axis of the electron-optical column. When the electron beam is turned off by the electron beam shutter, a proper voltage is applied to the electron beam shutter, and the electron beam passing through the electrode plate deflects and cannot reach the surface of the target sample, so that the electron beam is turned off.
Since the current signal generated by the detector based on the captured secondary particles is an alternating current signal. In order to obtain a purer alternating current signal, the influence of the direct current signal is isolated, and the signal amplifier is generally provided with an alternating current coupling circuit at the front end for receiving the alternating current signal sent by the pre-amplifier so as to be beneficial to the acquisition of the contrast information of the scanning electron microscope image.
Through analysis and testing, it was found that the problems noted in the background art occurred because: for a signal amplifier with an alternating current coupling circuit, when an electron beam gate is in an 'off' state for a long time, a signal input by a detector has only a floating voltage and belongs to a direct current signal, the alternating current coupling circuit can 'block direct current', and a capacitor in the alternating current coupling circuit can be charged; when the electron beam gate is turned on, the signal input by the detector is a voltage containing a secondary particle signal, and belongs to an alternating current signal, the alternating current coupling circuit is turned on and the capacitor in the alternating current coupling circuit is discharged. Since the reference voltage raised by the long-term charge exists when the electron beam shutter is turned "on", the signal intensity outputted from the signal amplifier does not immediately coincide with the measured value, but gradually decreases. This results in the first few lines of acquired image data when the beam lock has just been switched "on": in the signal inversion mode, the brightness is lower and gradually rises to the normal brightness: in the signal forward mode, the brightness is higher and gradually reduced to normal brightness. The higher the output voltage in the signal inversion mode, the lower the brightness; the higher the output voltage in the signal forward mode, the higher the brightness.
In order to solve the above problems, the method for compensating the scanning electron microscope image provided by the embodiment of the invention can optimize the problem that the image acquisition effect is abnormal when the scanning operation is started after the electron beam gate is turned off for a long time.
Fig. 2 is a flowchart of a method of compensating a scanning electron microscope image according to an embodiment of the present invention. As shown in fig. 2, the compensation method of the scanning electron microscope image may include:
s101, controlling on-off of an electron beam reaching a target sample through an electron beam gate according to the scanning condition of a scanning electron microscope on the target sample;
S102, respectively obtaining a first electric signal generated when the electron beam is disconnected and a second electric signal generated when the electron beam is conducted by using a detector;
And S103, compensating a second electric signal adjacent to the first electric signal according to the first electric signal and the target offset value, and generating a scanning electron microscope image of the target sample according to the compensated second electric signal.
Specifically, in the process of scanning a target sample, in order to protect a sensitive sample from being damaged, a preset voltage is applied to an electron beam gate during the switching, and an electron beam deflects and cannot reach the surface of the target sample, so that the disconnection of the electron beam reaching the target sample is controlled. When the scanning electron microscope is successful in line feed, the preset voltage applied to the electron beam gate is disconnected, and under the condition that the electron beam gate does not apply voltage, the electron beam reaches the target sample, so that the electron beam reaching the target sample is controlled to be conducted.
The first electrical signal (direct current signal) generated by the detector when the electron beam is turned off and the second electrical signal (alternating current signal) generated by the detector when the electron beam is turned on are obtained. In a similar time, the value of the electrical signal obtained when the electron beam gate is turned "on" is higher, and the value of the electrical signal obtained when the electron beam gate is turned "off" is also higher. Therefore, the signal value is higher when the electron beam gate is turned "off" is known, and the signal value is higher when the electron beam gate is turned "on" in the adjacent time is also known. Since the detector generates a dc signal when the beam gate is "off", it is relatively easy to obtain a compensation value that is higher in value.
Therefore, the compensation value obtained by calculation of the DC signal (first electric signal) generated by the detector when the electron beam shutter is turned "off" can be used to compensate the AC signal when the electron beam shutter is turned "off" in the adjacent time. Specifically, the second electric signal adjacent to the first electric signal is compensated according to the first electric signal and the target offset value, and the scanning electron microscope image of the target sample is generated according to the compensated second electric signal, so that the problem that the image acquisition effect of the scanning electron microscope is abnormal when the scanning operation is just started is solved.
In one embodiment of the invention, the target bias value is determined from an electrical signal obtained by the detector when the brightness of the scanning electron microscope image is restored to a preset target brightness.
Specifically, when the target bias value is obtained, a direct current signal of a stable region when the electron beam gate is turned "off" is obtained, and the target bias value is obtained. As shown in fig. 3, the stable region refers to a region where brightness is recovered to be normal after the beam gate is turned on/off for a certain period of time.
In the embodiment of the invention, the target bias value can be obtained by calculation according to set parameters (brightness, contrast and the like), and can also be obtained by taking average of multiple actual measurement samples of the stable region under the same parameters.
The electron beam in the embodiments of the present invention is performed in an alternating manner of "on" and "off".
When the scanning electron microscope image of the target sample is generated, the embodiment of the invention acquires the first electric signal generated by the detector when the electron beam brake is turned off and the second electric signal generated by the detector when the electron beam brake is turned on, and obtains the compensation value of the second electric signal adjacent to the first electric signal according to the first electric signal and the target bias value, so that the compensation value obtained when the electron beam brake is turned on is used for compensating the alternating current signal of the effective sample image when the adjacent electron beam brake is turned off.
In an embodiment of the present invention, as shown in fig. 4, it may be "on" and "off", so that the compensation value obtained by each "off" is used to compensate the ac signal of the effective sample image obtained by the previous "on". Or, unlike the previous figures, it may be "off" and then "on", so that the compensation value obtained by each "off" is used to compensate the ac signal of the effective sample image obtained by the "on" next. Wherein the compensated second electrical signal is shown in fig. 5.
As an embodiment, as shown in fig. 6, the scanning mode of the scanning electron microscope is to scan repeatedly in one direction to obtain scanning electron mirror images of one line and one line, and the on-off control of the electron beam reaching the target sample by the electron beam gate according to the scanning condition of the scanning electron microscope on the target sample may include:
when the scanning sites of the scanning electron microscope are scanned to the end position of the right end of each row of the target sample, the electron beam reaching the target sample is controlled to be disconnected through an electron beam brake;
When the scanning site is reset to the left side of the target sample and deflected downwards to the left starting position of the next row, the electron beam reaching the target sample is conducted and controlled through the electron beam brake.
Specifically, when the scanning mode of the scanning electron microscope is to scan in one direction repeatedly, an image of one line and one line is obtained. For example, scanning from left to right is performed continuously, images of each line are obtained, and the images of each line are superimposed to finally form a scanning electron microscope image of the target sample. In the above scanning operation, when each line is scanned to the right end, a preset voltage needs to be applied to the electron beam gate to control the electron beam reaching the target sample to be disconnected. The scanning site is reset to the left side, and deflected downwards to the left starting position of the next row, the application of preset voltage to the electron beam gate is disconnected, and the electron beam is controlled to reach the target sample.
As shown in fig. 7, the first electric signal generated by the detector when the electron beam shutter is "off" during the reset period of each line of scanning sites is used to compensate the ac signal of the effective sample image obtained by each adjacent line of scanning according to the first electric signal and the target bias value.
In one embodiment of the invention, the first electrical signal is acquired at a first predetermined frequency and the second electrical signal is acquired at a second predetermined frequency, the first predetermined frequency being greater than the second predetermined frequency.
As shown in fig. 8, in the conventional common scanning operation, the deflection voltage change rate is large during deflection reset, so that the deflection voltage is quickly reset to improve the scanning efficiency.
Because the electron beam gate is shorter in time length, the sampling points of the obtained direct current signals are fewer, and the direct current signals also have certain fluctuation. If the sampling frequency is identical when the electron beam brake is turned "off" and when the electron beam brake is turned "on", if the sampling frequency is too low or the time when the electron beam brake is turned "off" is too short (i.e. the scan reset speed is too fast), the dc signal value when the electron beam brake is turned "off" may not be obtained, or the obtained compensation value is inaccurate (the dc signal also fluctuates to some extent, and the sampling number is too small and errors easily occur).
In order to solve the above-mentioned problem, the embodiment of the invention samples according to a first preset frequency when the electron beam gate is turned "off", and samples according to a second preset frequency when the electron beam gate is turned "on", wherein the first preset frequency is greater than the second preset frequency.
It will be appreciated that in the above embodiments, the shorter the "on" and "off" times, the better the compensation effect.
In one embodiment of the present invention, when the second preset frequency is smaller than the preset scanning frequency threshold, the first preset frequency is set so that the first preset frequency is greater than or equal to the preset scanning frequency threshold, where the preset scanning frequency threshold is determined by at least the number of first electrical signals to be acquired, the current scanning reset time and the switching transient duration to be removed.
In one embodiment of the present invention, before compensating the second electrical signal adjacent to the first electrical signal according to the first electrical signal and the target bias value, the method further comprises:
It is determined that the duration of the turning-off of the electron beam reaching the target sample by the electron beam shutter control reaches a preset time.
It should be noted that the image signal has hysteresis at the moment of "on-off" switching of the beam gate. Therefore, when the DC signal of the stable region is obtained when the electron beam gate is turned "off", the edge signal of the instant when the electron beam gate is turned "on" needs to be avoided or abandoned so as not to interfere with the accuracy of the average value.
In order to ensure that the scanning obtains the consistency of the image signals of the effective sample, the scanning can be deflection movement scanning when the electron beam gate is turned on, and the scanning does not deflect movement when the electron beam gate is turned off, and the scanning is only used for obtaining the compensation value. Particularly in combination with the scanning action of a scanning electron microscope.
Specifically, if at least N dc signal values are required to be obtained according to experience to ensure accuracy of the compensation value, and if the instant duration delta of the on-off switching of the electron beam gate is required to be removed under the condition that the current scan reset time is t, the first frequency f cannot be smaller than。
In an embodiment of the present invention, if the normal scan operation is performed, the second frequency of the scan samples is smaller thanThe first frequency is required to be set so that the sampling frequency is higher than that of ON when the electron beam gate is ON and the first frequency cannot be smaller than/>。
In an embodiment of the present invention, if the normal scan operation is performed, the second frequency of the scan samples is greater thanThe first frequency is not required to be set specially, and the unified frequency can be directly adopted when the electron beam gate is turned on and off.
In one embodiment of the invention, compensating a second electrical signal adjacent to the first electrical signal based on the first electrical signal and the target bias value comprises:
calculating an average value of the first electric signals acquired at a first preset frequency;
And compensating the second electric signal adjacent to the first electric signal according to the average value and the target offset value.
Since there is a degree of fluctuation even in the dc signal when the beam gate is "off", the deviation value can be determined in an averaging manner. Specifically, a first electric signal acquired at a first preset frequency during the "off period of the electron beam gate is recorded, the average value of the acquired first electric signal is calculated, and a second electric signal adjacent to the first electric signal is compensated according to the average value of the first electric signal and a target offset value.
The compensation method of the scanning electron microscope image is a pure digital compensation mode, can be completed in a digital signal processing module (FPGA), does not need to change hardware, and has lower realization cost. The process can be performed in real time, can be well adapted to the existing signal acquisition, data transmission and data processing systems and methods, and cannot influence the data processing efficiency.
The digital direct current compensation method of the embodiment of the invention is simple to realize in the FPGA, can acquire and calculate in real time, does not need to consume extra processing time, can ensure that the data bandwidth and the image frame rate are consistent with those before compensation processing, and finally can achieve the compensation effect in the signal reverse mode as shown in fig. 9 (b), wherein fig. 9 (a) is a graph without the compensation effect in the signal reverse mode. In the signal forward mode, the compensation effect can be achieved as shown in fig. 10 (b), where fig. 10 (a) is a graph of no compensation effect in the signal forward mode.
The compensation method of the scanning electron microscope image at least partially optimizes the problem that the image acquisition effect is abnormal when the scanning operation is just started after the electron beam gate is turned off for a long time.
The compensation method of the scanning electron microscope image of the embodiment of the invention carries out digital compensation at the rear end of the signal amplifier, combines a specific scanning sampling mode, utilizes the short-time 'off' signal of the electron beam gate to acquire the required compensation quantity, compensates the adjacent effective image area and can be realized through the digital real-time processing of the FPGA.
The invention provides a compensation device for scanning electron microscope images.
In the scanning electron microscope image compensation device of the embodiment of the invention, the scanning electron microscope comprises an electron beam shutter and a detector.
Fig. 11 is a schematic diagram of a compensation apparatus for scanning electron microscope images according to an embodiment of the present invention. As shown in fig. 11, the compensation apparatus 100 for scanning electron microscope images may include a control module 10, a generation module 20, and a compensation module 30.
The control module 10 is used for controlling on-off of an electron beam reaching the target sample through an electron beam gate according to the scanning condition of the scanning electron microscope on the target sample; the generating module 20 is configured to obtain, by using the detector, a first electrical signal generated when the electron beam is turned off and a second electrical signal generated when the electron beam is turned on, respectively; the compensation module 30 is configured to compensate a second electrical signal adjacent to the first electrical signal according to the first electrical signal and the target bias value, and generate a scanning electron microscope image of the target sample according to the compensated second electrical signal.
It should be noted that, other specific implementations of the scanning electron microscope image compensation device provided by the embodiment of the present invention can refer to other specific implementations of the scanning electron microscope image compensation method of the foregoing embodiment of the present invention.
According to the compensation device for the scanning electron microscope image, when the scanning electron microscope image of the target sample is generated, the first electric signal generated by the detector when the electron beam brake is turned off and the second electric signal generated by the detector when the electron beam brake is turned on are obtained, and the compensation value of the second electric signal adjacent to the first electric signal is obtained according to the first electric signal and the target bias value, so that the compensation value obtained when the electron beam brake is turned on is used for compensating the alternating current signal of the effective sample image when the adjacent electron beam brake is turned off, and the problem that the image acquisition effect of the scanning electron microscope is abnormal when the scanning operation is just started is solved.
The invention provides a computer readable storage medium.
In this embodiment, a computer program is stored on a computer readable storage medium, and when the computer program is executed by a processor, the compensation method for scanning electron microscope images as described above is implemented.
The invention provides a scanning electron microscope.
In this embodiment, the scanning electron microscope may include an electron beam shutter, a detector, and a controller, where the controller is connected to the electron beam shutter and the detector, respectively, and includes a memory, and a processor, where the memory stores a computer program, and when the computer program is executed by the processor, the compensation method for the scanning electron microscope image is implemented as described above.
Fig. 12 is a block diagram of a controller according to an embodiment of the present invention.
As shown in fig. 12, the controller 500 includes: a processor 501 and a memory 503. The processor 501 is coupled to a memory 503, such as via a bus 502. Optionally, the controller 500 may also include a transceiver 504. It should be noted that, in practical applications, the transceiver 504 is not limited to one, and the structure of the controller 500 is not limited to the embodiment of the present invention.
The Processor 501 may be a CPU (Central Processing Unit ), general purpose Processor, DSP (DIGITAL SIGNAL Processor, data signal Processor), ASIC (Application SPECIFIC INTEGRATED Circuit), FPGA (Field Programmable GATE ARRAY ) or other programmable logic device, transistor logic device, hardware component, or any combination thereof. Which may implement or perform the various exemplary logical blocks, modules, and circuits described in connection with the present disclosure. The processor 501 may also be a combination that implements computing functionality, such as a combination comprising one or more microprocessors, a combination of a DSP and a microprocessor, and the like.
Bus 502 may include a path to transfer information between the components. Bus 502 may be a PCI (PERIPHERAL COMPONENT INTERCONNECT, peripheral component interconnect standard) bus, or an EISA (Extended Industry Standard Architecture ) bus, or the like. The bus 502 may be divided into an address bus, a data bus, a control bus, and the like. For ease of illustration, only one thick line is shown in fig. 12, but not only one bus or one type of bus.
The memory 503 is used to store a computer program corresponding to the compensation method of the scanning electron microscope image of the above embodiment of the present invention, which is controlled to be executed by the processor 501. The processor 501 is configured to execute a computer program stored in the memory 503 to implement what is shown in the foregoing method embodiments. The controller 500 shown in fig. 12 is only an example and should not be construed as limiting the functionality and scope of use of the embodiments of the present invention.
The computer readable storage medium and the scanning electron microscope of the embodiment of the invention solve the problem that the image acquisition effect of the scanning electron microscope is abnormal when the scanning operation is just started by using the compensation method of the scanning electron microscope image.
It should be noted that the logic and/or steps represented in the flowcharts or otherwise described herein, for example, may be considered as a ordered listing of executable instructions for implementing logical functions, and may be embodied in any computer-readable medium for use by or in connection with an instruction execution system, apparatus, or device, such as a computer-based system, processor-containing system, or other system that can fetch the instructions from the instruction execution system, apparatus, or device and execute the instructions. For the purposes of this description, a "computer-readable medium" can be any means that can contain, store, communicate, propagate, or transport the program for use by or in connection with the instruction execution system, apparatus, or device. More specific examples (a non-exhaustive list) of the computer-readable medium would include the following: an electrical connection (electronic device) having one or more wires, a portable computer diskette (magnetic device), a Random Access Memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber device, and a portable compact disc read-only memory (CDROM). In addition, the computer readable medium may even be paper or other suitable medium on which the program is printed, as the program may be electronically captured, via, for instance, optical scanning of the paper or other medium, then compiled, interpreted or otherwise processed in a suitable manner, if necessary, and then stored in a computer memory.
It is to be understood that portions of the present invention may be implemented in hardware, software, firmware, or a combination thereof. In the above-described embodiments, the various steps or methods may be implemented in software or firmware stored in a memory and executed by a suitable instruction execution system. For example, if implemented in hardware, as in another embodiment, may be implemented using any one or combination of the following techniques, as is well known in the art: discrete logic circuits having logic gates for implementing logic functions on data signals, application specific integrated circuits having suitable combinational logic gates, programmable Gate Arrays (PGAs), field Programmable Gate Arrays (FPGAs), and the like.
In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present invention, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.
In the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
In the present invention, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.
While embodiments of the present invention have been shown and described above, it will be understood that the above embodiments are illustrative and not to be construed as limiting the invention, and that variations, modifications, alternatives and variations may be made to the above embodiments by one of ordinary skill in the art within the scope of the invention.
Claims (10)
1. A method of compensating a scanning electron microscope image, the scanning electron microscope comprising an electron beam shutter and a detector, the method comprising:
according to the scanning condition of the scanning electron microscope on the target sample, the electron beam which reaches the target sample is controlled to be on-off through the electron beam gate;
The detector is used for respectively obtaining a first electric signal generated when the electron beam is disconnected and a second electric signal generated when the electron beam is conducted;
and compensating the second electric signal adjacent to the first electric signal according to the first electric signal and the target bias value, and generating a scanning electron microscope image of the target sample according to the compensated second electric signal.
2. The method for compensating a scanning electron microscope image according to claim 1, wherein the scanning mode of the scanning electron microscope is to scan and acquire scanning electron microscope images line by line in a direction repeatedly, and the on-off control of the electron beam reaching the target sample is performed through the electron beam shutter according to the scanning condition of the scanning electron microscope on the target sample, comprising:
when the scanning sites of the scanning electron microscope are scanned to the end position of the right end of each row of the target sample, the electron beam which reaches the target sample is controlled to be disconnected through the electron beam brake;
And resetting the scanning site to the left side of the target sample, and conducting control on the electron beam reaching the target sample through the electron beam gate when the scanning site deflects downwards to the starting position at the left side of the next row.
3. The method of claim 2, wherein the first electrical signal is acquired at a first predetermined frequency and the second electrical signal is acquired at a second predetermined frequency, the first predetermined frequency being greater than the second predetermined frequency.
4. A method for compensating a scanning electron microscope image according to claim 3, wherein,
When the second preset frequency is smaller than a preset scanning frequency threshold, setting the first preset frequency to enable the first preset frequency to be larger than or equal to the preset scanning frequency threshold, wherein the preset scanning frequency threshold is determined by at least the number of first electric signals to be acquired, the current scanning reset time and the switching transient time to be removed.
5. The method according to claim 3 or 4, wherein the compensating the second electrical signal adjacent to the first electrical signal according to the first electrical signal and a target bias value comprises:
calculating an average value of the first electric signals acquired at the first preset frequency;
and compensating the second electric signal adjacent to the first electric signal according to the average value and the target bias value.
6. The method of claim 2, wherein before compensating the second electrical signal adjacent to the first electrical signal according to the first electrical signal and a target bias value, the method further comprises:
determining that the off-time of the electron beam reaching the target sample is controlled by the electron beam shutter to reach a preset time.
7. The method according to claim 6, wherein the target bias value is determined based on an electric signal obtained by the detector when the brightness of the sem image is restored to a preset target brightness.
8. A compensation device for scanning electron microscope images, wherein the scanning electron microscope comprises an electron beam shutter and a detector, the device comprising:
The control module is used for controlling on-off of the electron beam reaching the target sample through the electron beam gate according to the scanning condition of the scanning electron microscope on the target sample;
The generating module is used for respectively obtaining a first electric signal generated when the electron beam is disconnected and a second electric signal generated when the electron beam is conducted by using the detector;
And the compensation module is used for compensating the second electric signal adjacent to the first electric signal according to the first electric signal and the target offset value, and generating a scanning electron microscope image of the target sample according to the compensated second electric signal.
9. A computer readable storage medium, on which a computer program is stored, characterized in that the computer program, when being executed by a processor, implements a method of compensating a scanning electron microscope image according to any of claims 1-7.
10. The scanning electron microscope is characterized by comprising an electron beam gate, a detector and a controller, wherein the controller is respectively connected with the electron beam gate and the detector and comprises a memory and a processor, and the memory is stored with a computer program which is executed by the processor to realize the scanning electron microscope image compensation method according to any one of claims 1-7.
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