CN117727609A - Scanning compensation method and system based on vibration relaxation and electronic equipment - Google Patents
Scanning compensation method and system based on vibration relaxation and electronic equipment Download PDFInfo
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Abstract
The application provides a scanning compensation method, a system and electronic equipment based on vibration relaxation, comprising the following steps: generating a positioning action instruction based on the starting positioning signal; based on the positioning action instruction, controlling the workpiece table to move and judging whether the workpiece table moves to a vibration compensation range; under the condition that the workpiece table moves to a vibration compensation range, controlling the workpiece table to move in a vibration mode of a preset vibration relaxation model so as to determine a first position deviation in the movement process of the workpiece table; generating a scan compensation signal based on the first positional deviation; and carrying out electron beam scanning based on the scanning compensation signal, wherein the scanning compensation signal drives the electron beam to move relative to the workpiece table in the electron beam scanning process. According to the vibration relaxation-based scanning compensation method, the problem of image quality reduction caused by vibration relaxation in electron beam scanning imaging is reduced by optimizing the positioning flow of the workpiece table, the resolution of a scanning image is improved, and the imaging speed and the overall productivity of equipment are improved.
Description
Technical Field
The present disclosure relates to the field of electron beam scanning imaging, and in particular, to a scanning compensation method and system based on vibration relaxation, and an electronic device.
Background
The electron beam scanning imaging device mainly comprises a scanning electron microscope, an electron beam defect detection device, an electron beam critical dimension measurement device and the like. In the scanning imaging process of an electron beam scanning imaging device, when a sample area to be scanned is not covered by an electron beam scanning range (or referred to as a field of view), the sample needs to be carried by a workpiece stage to be moved to a specified target position.
After the stage reaches the vicinity of the target position, the stage undergoes a process from motion to relatively stationary. In this process, the stage position undergoes reciprocating motion (or referred to as damped vibration, vibration relaxation, or the like) with an amplitude gradually attenuated with respect to the target position, during which scanning imaging in a normal state cannot be obtained because the sample position is not fixed. This process typically requires a time of hundreds of milliseconds to a few seconds (referred to as settling time).
For application scenes requiring higher imaging speed, the detection efficiency is greatly reduced, and the whole scanning speed (or productivity) of the equipment is affected. According to the published data, the transient unreliable technical scheme can effectively utilize the stabilization time. The existing electron beam scanning imaging equipment mainly reduces the influence of vibration relaxation on scanning imaging by waiting for a workpiece table to enter a quasi-static state (vibration amplitude is smaller than a certain degree, such as within 10nm or 3nm, and the like), isolating external vibration from external vibration, or performing image compensation on inherent vibration (which does not change along with a motion state) of a system and other technologies. However, the method can not realize the utilization of time loss in the vibration relaxation process of the workpiece table, and can not effectively improve the scanning imaging efficiency of the electron beam.
Disclosure of Invention
The application provides a scanning compensation method, a scanning compensation system and electronic equipment based on vibration relaxation, which are used for solving the technical problems that the electron beam scanning imaging technology in the prior art can not realize the utilization of time loss in the vibration relaxation process of a workpiece table and can not effectively improve the scanning imaging efficiency of the electron beam.
According to a first aspect of the present application, there is provided a vibration relaxation based scan compensation method comprising: generating a positioning action instruction based on the starting positioning signal; based on the positioning action instruction, controlling the workpiece table to move and judging whether the workpiece table moves to a vibration compensation range; under the condition that the workpiece table moves to a vibration compensation range, controlling the workpiece table to move in a vibration mode of a preset vibration relaxation model so as to determine a first position deviation in the movement process of the workpiece table; generating a scan compensation signal based on the first positional deviation; and carrying out electron beam scanning based on the scanning compensation signal, wherein the scanning compensation signal drives the electron beam to move relative to the workpiece table in the electron beam scanning process.
In some embodiments, the positioning action instruction includes a start position of the workpiece stage and a target position, where the start position is a current position of a center of the workpiece stage, and the target position is a position of a center of an electron beam scan field of view, and based on the positioning action instruction, controlling the workpiece stage to move and determining whether to move to a vibration compensation range includes: controlling the workpiece table to move towards the target position based on the initial position and the target position of the workpiece table so as to determine second position deviation in the movement process of the workpiece table; and under the condition that the second position deviation is smaller than a preset threshold value, determining that the workpiece table moves to a vibration compensation range.
In some embodiments, the vibration compensation range is determined based on a scan range of the electron beam scan field of view and a vibration range corresponding to the vibration relaxation model.
In some embodiments, when the workpiece stage moves to the vibration compensation range, the workpiece stage is controlled to move in a vibration form of a preset vibration relaxation model to determine a first position deviation during the movement of the workpiece stage, including: acquiring the current position of the center of a workpiece table in real time in the process of controlling the workpiece table to move in a vibration mode of a preset vibration relaxation model; and determining the current first position deviation based on the current position of the center of the workpiece table and the target position.
In some embodiments, before the controlling the movement of the stage in the form of vibrations of the preset vibration relaxation model to determine the first positional deviation during the movement of the stage, the method further comprises: the workpiece table is controlled to perform simulated motion so as to acquire the real-time position of the center of the workpiece table at any moment; determining a position deviation corresponding to any moment based on the target position and the real-time position of the center of the workpiece table at any moment; fitting the vibration relaxation model formed by time and position deviation according to any time and the corresponding position deviation.
In some embodiments, the generating a scan compensation signal based on the first positional deviation includes: determining vibration compensation parameters according to the current first position deviation and a preset vibration compensation model at any moment; determining a vibration compensation waveform according to the vibration compensation parameter; a scan compensation signal is generated based on the vibration compensation waveform.
In some embodiments, before the generating a scan compensation signal based on the first positional deviation, the method further comprises: and determining the vibration compensation model based on the vibration relaxation model, wherein corresponding vibration compensation parameters in the vibration compensation model have a corresponding relation with corresponding position deviations in the vibration relaxation model.
According to a second aspect of the present application, there is provided a vibration relaxation based scan compensation system comprising: the industrial personal computer is used for generating a positioning action instruction based on the starting positioning signal; the workpiece table controller is used for controlling the workpiece table to move and judging whether the workpiece table moves to a vibration compensation range or not based on the positioning action instruction, and controlling the workpiece table to move in a vibration mode of a preset vibration relaxation model under the condition that the workpiece table moves to the vibration compensation range so as to determine a first position deviation in the movement process of the workpiece table; a drive compensation module for generating a scan compensation signal based on the first positional deviation; and the scanning module is used for scanning based on the scanning compensation signal, and the scanning compensation signal drives the electron beam to move relative to the workpiece table in the electron beam scanning process.
In some embodiments, the drive compensation module includes a dynamic compensation circuit module, a scan waveform generator, and a drive deflector; the dynamic compensation circuit module is configured with a vibration compensation model for determining vibration compensation parameters based on the first position deviation; the scanning waveform generator is used for determining a vibration compensation waveform based on the vibration compensation parameter; the driving deflector is used for generating a scanning compensation signal based on the vibration compensation waveform.
According to a third aspect of the present application, there is provided an electronic apparatus, comprising: one or more processors, a memory, and one or more programs, wherein the one or more programs are stored in the memory and configured to be executed by the one or more processors, the one or more programs comprising a scan compensation method for performing the vibration relaxation based scan compensation method described above.
In summary, the scanning compensation method, the system and the electronic device based on vibration relaxation provided by the application have at least the following beneficial effects:
in the vibration relaxation-based scanning compensation method, a workpiece table positioning process is optimized, a difference value (namely, first position deviation) between the current position of the center of the workpiece table and a target position is obtained in real time in the workpiece table positioning process, and a scanning compensation signal is generated based on the first position deviation, so that an electron beam is driven to move relative to the workpiece table based on the generated scanning compensation signal in the electron beam scanning process. And the distance of the scanning compensation signal driving the electron beam to move relative to the workpiece table is consistent with the first position deviation, so that the compensation effect in the positioning process is realized, the problem of image quality reduction caused by vibration in the electron beam scanning imaging is reduced, the image resolution is improved, and the imaging speed and the whole productivity of the equipment are improved. Meanwhile, the time consumed in the workpiece stage positioning process in the prior art is greatly reduced, the scanning can be started under the condition that the positioning window range is larger than the scanning range in the prior art, and the waiting time in the scanning process is saved. The method is suitable for the common stepping imaging mode, and can effectively improve the detection speed and the productivity of equipment for the compensation method of vibration in the vibration relaxation process of the workpiece table.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present application, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a flow chart of a scan compensation method based on vibration relaxation provided in an embodiment of the present application;
FIG. 2 is a graph of vibration of a workpiece stage oscillating reciprocally about a zero point in a scan compensation method based on vibration relaxation according to an embodiment of the present application;
FIG. 3 is a graph of vibration of a workpiece table in a situation of overall negative deviation from zero in a vibration relaxation-based scan compensation method according to an embodiment of the present application;
FIG. 4 is a schematic diagram of a normal scan image in a vibration-free state in a scan compensation method based on vibration relaxation according to an embodiment of the present application;
FIG. 5 is a schematic diagram of a scanned image in a vibration state in a scanning compensation method based on vibration relaxation according to an embodiment of the present application;
FIG. 6 is a schematic diagram of a typical scan pattern of electron beam scanning imaging in a vibration relaxation based scan compensation method according to an embodiment of the present application;
FIG. 7 is a schematic diagram of an electron beam scanning imaging device in a scanning compensation method based on vibration relaxation according to an embodiment of the present application;
FIG. 8 is a flow chart of a prior art middle stage positioning and scanning process in an embodiment of the present application;
FIG. 9 is a block diagram of a vibration relaxation based scan compensation system provided by an embodiment of the present application;
fig. 10 is a block diagram of an electronic device according to an embodiment of the present application.
Detailed Description
To further clarify the above and other features and advantages of the present application, a further description of the present application is provided below with reference to the appended drawings. It should be understood that the specific embodiments described herein are for illustrative purposes only and are not limiting, as to those skilled in the art.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. However, it will be apparent to one skilled in the art that the specific details need not be employed to practice the present application. In other instances, well-known steps or operations have not been described in detail in order to avoid obscuring the present application.
The vibration relaxation-based scan compensation method provided by the embodiment of the application can be executed by the vibration relaxation-based scan compensation system provided by the embodiment of the application, and the system can be configured in electronic equipment.
Referring to fig. 1, the present application provides a vibration relaxation based scan compensation method comprising steps 301-305.
Step 301, based on the start positioning signal, a positioning action instruction is generated.
Specifically, the starting positioning signal can be acquired through the upper computer or the central control computer, after the starting positioning signal is acquired, the positioning information of the workpiece table can be acquired through the corresponding sensor and sent to the upper computer or the central control computer, and then the upper computer or the central control computer generates a positioning action instruction according to the received positioning information of the workpiece table and sends the positioning action instruction to the dynamic compensation circuit module or the workpiece table controller.
In addition, the positioning action instruction at least comprises parameters such as positioning information of the workpiece table, movement time of the workpiece table and the like, and the positioning information of the workpiece table can specifically comprise parameters such as a starting position of the workpiece table, a target position and the like, wherein the starting position is a current position of the center of the workpiece table, and the target position is a position of the center of the electron beam scanning view field.
Step 302, based on the positioning action instruction, controlling the workpiece stage to move and judging whether the workpiece stage moves to the vibration compensation range.
In some embodiments, the vibration compensation range is determined based on a scan range of the electron beam scan field of view and a vibration range corresponding to the vibration relaxation model.
For example, the maximum field of view (scan range, FOV) of an electron beam scanning imaging device is denoted as F max I.e. the electron beam scan field has a scan range F max (typically on the order of tens of micrometers to millimeters); the imaging field of view of the actual imaging setup is denoted as F img Scanning range F of electron beam scanning field of view max And imaging field of view F img The difference between the two can determine the maximum positioning window range (also called ideal maximum compensation range) d capable of realizing vibration compensation max ，d max Namely the vibration range corresponding to the vibration relaxation model. Then according to the maximum positioning window range d max Determining the vibration compensation range D max D is max The range of (2) must contain d max Is not limited in terms of the range of (a).
Step 303, in the case that the workpiece table moves to the vibration compensation range, controlling the workpiece table to move in a vibration mode of a preset vibration relaxation model so as to determine a first position deviation in the movement process of the workpiece table.
Referring to fig. 8, according to some prior art techniques, before an electron beam scanning imaging device performs scanning imaging, a sample to be scanned is moved into an electron beam imaging range, which generally selects an electron beam scanning field of view, and the sample is moved into the electron beam imaging range, that is, the sample to be scanned is moved to coincide with the center of the electron beam scanning field of view. The positioning execution flow of this process may be represented by flow 200, including: 205, sending a starting instruction from an upper computer; 210 controlling the workpiece stage to displace toward a designated position or a target position; 215 the workpiece table reaches the vicinity of the designated position, and the position sensor feeds back the position information; 220 determining whether the positional deviation is less than a specified value d;230 fine-tuning the workpiece table according to the position sensor when the position deviation is not smaller than a specified value d;230 completing positioning when the position deviation is smaller than a specified value d; 235 initiates electron beam scanning imaging.
It follows that the prior art fails to effectively compensate for vibration relaxation during stage positioning, and scan imaging must be initiated after stage position adjustment is in place. In the stage position adjustment process, the corresponding steps 215-230 need to be repeatedly performed, and the required stabilization time will affect the overall scanning imaging speed or throughput of the electron beam scanning imaging device. Referring to FIG. 2, a value d is shown in the positioning window range 1 >d 2 Corresponding to the stable time t 1 <t 2 . It can be seen that the larger the positioning window range d, the shorter the time required. Since d is typically set to the nanometer scale, the corresponding settling time t is typically on the order of hundreds of milliseconds to seconds.
In order to reduce the time consumed by the process 200 in the positioning process of the workpiece table in the prior art, the scanning compensation method based on vibration relaxation can start scanning in the positioning process of the workpiece table by optimizing the positioning process of the workpiece table, so that the waiting time is saved.
In some embodiments, in a case where the workpiece stage moves to the vibration compensation range, controlling the workpiece stage to move in a vibration form of a preset vibration relaxation model to determine a first positional deviation during the movement of the workpiece stage includes: acquiring the current position of the center of the workpiece table in real time in the process of controlling the workpiece table to move in a vibration mode of a preset vibration relaxation model; a current first positional deviation is determined based on the current position of the center of the workpiece stage and the target position.
Step 304, generating a scan compensation signal based on the first positional deviation.
It can be understood that the first position deviation is the difference between the current position of the center of the workpiece table and the target position, and the scan compensation signal is the scan signal with the compensation function.
In step 305, electron beam scanning is performed based on the scanning compensation signal, and the scanning compensation signal drives the electron beam to move relative to the workpiece stage during the electron beam scanning process.
In the vibration relaxation-based scanning compensation method, a workpiece table positioning process is optimized, a difference value (namely, first position deviation) between the current position of the center of the workpiece table and a target position is obtained in real time in the workpiece table positioning process, and a scanning compensation signal is generated based on the first position deviation, so that an electron beam is driven to move relative to the workpiece table based on the generated scanning compensation signal in the electron beam scanning process. And the distance of the scanning compensation signal driving the electron beam to move relative to the workpiece table is consistent with the first position deviation, so that the compensation effect in the positioning process is realized, the problem of image quality reduction caused by vibration in the electron beam scanning imaging is reduced, the image resolution is improved, and the imaging speed and the whole productivity of the equipment are improved. Meanwhile, the time consumed in the workpiece stage positioning process in the prior art is greatly reduced, the scanning can be started under the condition that the positioning window range is larger than the scanning range in the prior art, and the waiting time in the scanning process is saved. The method is suitable for the common stepping imaging mode, and can effectively improve the detection speed and the productivity of equipment for the compensation method of vibration in the vibration relaxation process of the workpiece table.
One embodiment of a vibration relaxation based scan compensation method is provided herein below and includes steps 401-405.
Step 401, generating a positioning action instruction based on the start positioning signal.
Step 402, controlling the workpiece table to move towards the target position based on the initial position and the target position of the workpiece table so as to determine a second position deviation in the movement process of the workpiece table; and under the condition that the second position deviation is smaller than a preset threshold value, determining that the workpiece table moves to a vibration compensation range.
For example, to ensure validity of the determination, the second position deviation value D may be a set of data (D1, D2, …) acquired during a certain period of time (sampling period), and the workpiece stage movement to the vibration compensation range may be determined when the maximum value is smaller than a preset threshold D (the preset threshold D is also referred to as a positioning window size). During the movement of the workpiece table, the second positional deviation generally exhibits a gradual decreasing trend.
It should be noted that, referring to fig. 4-5, in the case that the workpiece stage has not moved to the vibration compensation range, the scanning imaging is started, the image deviation may be caused by the large deviation of the workpiece stage, and the phenomenon represented by the image positioning deviation may also be characterized by the relaxation of the vibration. The sampling period is chosen to take into account that it is possible to cover the period of mechanical vibrations that may affect the imaging.
It is understood that in the case that the second position deviation is smaller than the preset threshold, it is determined that the workpiece stage is not moved to the vibration compensation range, and at the same time, the steps of controlling the movement of the workpiece stage and determining whether to move to the vibration compensation range are continuously performed.
For example, when the workpiece stage moves near the vibration compensation range, high-precision positioning of the workpiece stage is obtained (the high-precision range generally requires precision reaching submicron to nanometer level), and whether the second position deviation (obtained by differentiating the positioning information fed back by the position sensor and the target position information, including the deviation caused by vibration) is smaller than the preset threshold d is continuously determined. If the judgment result is that the second position deviation is larger than or equal to the preset threshold value, the workpiece table does not move to the vibration compensation range, the workpiece table is required to be controlled to move continuously, and the step of judging whether to move to the vibration compensation range is repeated until the judgment result is yes, namely, the workpiece table is considered to move to the vibration compensation range when the judgment result is that the second position deviation is smaller than the preset threshold value.
Step 403, under the condition that the workpiece table moves to a vibration compensation range, controlling the workpiece table to move in a vibration mode of a preset vibration relaxation model so as to determine a first position deviation in the movement process of the workpiece table;
step 404, generating a scan compensation signal based on the first position deviation;
step 405, performing electron beam scanning based on the scanning compensation signal, where the scanning compensation signal drives the electron beam to move relative to the workpiece stage during the electron beam scanning process.
For example, when the current position of the stage at time t1 is (x 1, y 1), the actual deflection position of the electron beam relative to the stage motion is (x 1, y 1). In the process of positioning movement of the workpiece table, scanning imaging is performed simultaneously to achieve a compensation effect in the positioning process, so that the problem of image quality degradation caused by vibration in electron beam scanning imaging is reduced.
It will be appreciated that in the stationary state, the electron beam scanning is typically vector scanning. Referring to fig. 6, fig. 6 is a diagram of a more common progressive scan mode, such as a fast scan in the row direction and a slow scan in the column direction. In order to ensure continuous compensation, the scanning compensation signal needs to superimpose a normal vector scanning signal and a workpiece stage displacement signal so as to ensure that the compensated electron beam focusing point coincides with the position to be scanned of the workpiece stage, thereby realizing the compensation effect in the positioning process.
According to the vibration relaxation-based scanning compensation method, according to the initial position and the target position of the workpiece table, the workpiece table is controlled to move towards the target position so as to determine second position deviation in the moving process of the workpiece table, and whether the workpiece table moves to a vibration compensation range is determined through the relation between the second position deviation and a preset threshold value. After the workpiece table moves to the vibration compensation range, the workpiece table is controlled to move in a vibration mode of a preset vibration relaxation model, and in the vibration relaxation process of the workpiece table, the electron beam is driven to move by generating a scanning compensation signal, so that the compensation effect in the positioning process is realized; meanwhile, as the compensation mechanism is started after the workpiece table moves to the vibration compensation range, the position precision of the workpiece table in the positioning process can be improved, the accuracy and the effectiveness of each data in the compensation process are ensured, and the compensation effect in the positioning process is further improved.
A further implementation of a vibration relaxation based scan compensation method is provided herein as follows, the method comprising steps 501-506.
Step 501, a positioning action instruction is generated based on the start positioning signal.
Step 502, based on the positioning action instruction, controlling the workpiece stage to move and judging whether the workpiece stage moves to the vibration compensation range.
Step 503, controlling the workpiece table to perform simulated motion so as to obtain the real-time position of the center of the workpiece table at any moment; determining a position deviation corresponding to any moment based on the target position and the real-time position of the center of the workpiece table at any moment; fitting a vibration relaxation model formed by time and position deviation according to any time and the corresponding position deviation.
It will be appreciated that the vibration relaxation model may be a function of time as a function of positional deviation.
In step 504, when the workpiece stage moves to the vibration compensation range, the workpiece stage is controlled to move in a vibration mode of a preset vibration relaxation model so as to determine a first position deviation in the movement process of the workpiece stage.
It will be appreciated that, with reference to fig. 2-3, during stage positioning, the first positional deviation oscillates back and forth (possibly exhibiting a positive deviation, defined as crossing the target position, or a negative deviation, defined as not reaching the target position) during the approach to the 0 point (target position), and the amplitude decays over time, in a form resembling damped oscillatory relaxation. Depending on the differences in stage positioning control design, the usual oscillatory relaxation regime generally has two typical characteristics, one is oscillating reciprocally around the 0 point as shown in FIG. 2; another form is shown in fig. 3, approaching the 0 point in the form of an overall negative bias.
For both types, the first positional deviation can be expressed as a function of time as follows.
D=f (t), equation (1)
Wherein D is a first position deviation value, t is time, and the function f is related to mechanical characteristics, control algorithm, motion characteristics and the like of the workpiece table. For a workpiece table and control system of a fixed design, the function f is related to the distance of movement, the speed of movement, and the acceleration during start and stop. The function f can be used for extracting the mathematical form of the function through fitting experimental data, namely the function f is a vibration relaxation model formed by fitting time and position deviation.
Specifically, after the electron beam imaging device completes integrated debugging, data collection of a vibration relaxation process can be performed through a large number of experiments, and then a function relation between a deviation value, a set parameter and time is generated through data statistics and fitting so as to fit a vibration relaxation model formed by time and position deviation.
For example, assume that the start point coordinates are (x s ,y s ) The target point is (x 0 ,y 0 ). During the movement of the workpiece stage, at any time point t i Corresponding stage coordinates (x i ,y i ) The displacement of the workpiece table relative to the target position can be obtained through a position sensor, and the displacement can be represented through vectors: (Deltax) i ,Δy i )＝(x i -x 0 ,y i -y 0 ). Over time, (x) i ,y i ) Closer to (x) 0 ,y 0 ) I.e. (Deltax) i ,Δy i ) Approach (0, 0). In rectangular coordinates, the deviation function d=f (t) can be decomposed into D along the x-axis x ＝f x (t) and in the y-axis direction D y ＝f y (t). By setting a higher sampling rate (sampling frequency>>Relaxation oscillation frequency), the time and coordinate positioning bias can be recorded as t i -Δx i 、t i -Δy i Two sets of data, each set of data is used for fitting a deviation function D x ＝f x (t)、D y ＝f y (t)。
Taking the case of the reciprocating oscillation of the stage near the target point as shown in fig. 2 as an example, the relaxation oscillation form in some cases exhibits a sine wave characteristic of a single frequency. The bias function can be expressed as:
D x ＝f x (t)＝A x (t)sin(ωt+φ)+O x (t)，
D y ＝f y (t)＝A y (t)sin(ωt+φ)+O y (t)，
wherein A is x (t)、A y (t) is x and y amplitude values, ω is oscillation frequency, O x (t)、O y (t) fitting higher order terms to the function, taking up less so that they are truncated.
Commonly, according to the fourier transform principle:
the fitted deviation function can be represented by several trigonometric lower-order terms:
D x ＝f x (t)＝A x1 (t)sin(ω 1 t+φ 1 )+A x2 (t)sin(ω 2 t+φ 2 ) + … formula (2)
D y ＝f y (t)＝A y1 (t)sin(ω 1 t+φ 1 )+A y2 (t)sin(ω 2 t+φ 2 ) + … formula (2)
In some embodiments, in the case where the stage moves to the vibration compensation range, the stage controller controls the stage to move in accordance with the vibration form of the vibration relaxation model of the formula (2) to drive the stage to approach toward the target position.
In some embodiments, when the stage is not moved to the vibration compensation range, the step of controlling the stage to move and determining whether to move to the vibration compensation range based on the positioning motion command is continued.
For example, when the workpiece table moves near the vibration compensation range, the position sensor acquires high-precision positioning of the workpiece table (the high-precision range generally requires precision reaching submicron to nanometer level), and the positioning control module determines whether a first position deviation (the first position deviation D is obtained by differentiating the positioning information fed back by the position sensor and the target position information, including deviation caused by vibration) is smaller than a preset threshold D (the preset threshold D is also called a positioning window size) so as to further determine whether the workpiece table moves within the vibration compensation range.
Step 505, determining vibration compensation parameters based on the current first position deviation and a preset vibration compensation model at any moment; determining a vibration compensation waveform according to the vibration compensation parameter; based on the vibration compensation waveform, a scan compensation signal is generated.
It will be appreciated that the predetermined vibration compensation model is a model matching the above formula (2) for determining vibration compensation parameters to generate the scan compensation signal. The scan compensation signal may be an electric field, a magnetic field, or an electromagnetic magnetic field composite signal. The scanning compensation signal drives the imaging electron beam to move towards the direction of the positioning deviation so that the moving distance is consistent with the positioning deviation, and therefore the scanning compensation effect in the vibration relaxation process of the workpiece table is achieved.
Further, generating a scan compensation signal based on the vibration compensation waveform, comprising: performing signal amplification processing on the vibration compensation waveform; a scan compensation signal is generated based on the vibration compensation waveform after the signal amplification processing.
Step 506, performing electron beam scanning based on the scanning compensation signal, wherein the scanning compensation signal drives the electron beam to move relative to the workpiece table during the electron beam scanning process.
According to the vibration relaxation-based scanning compensation method, under the condition that the workpiece table moves to a vibration compensation range, the workpiece table is controlled to move in a vibration mode of a preset vibration relaxation model, so that first position deviation in the movement process of the workpiece table is determined. Because the corresponding vibration compensation parameters in the preset vibration compensation model have a corresponding relation with the corresponding position deviation in the vibration relaxation model, the vibration compensation parameters can be determined based on the first position deviation, the vibration compensation waveform can be determined based on the vibration compensation parameters, and the scanning compensation signal is generated based on the vibration compensation waveform, so that the electron beam can be driven to move through the scanning compensation signal in the vibration relaxation process of the workpiece table, and the accuracy of image compensation is improved.
Referring to fig. 9, the present application provides a vibration relaxation based scan compensation system comprising: the industrial personal computer 910, configured to generate a positioning action instruction based on the start positioning signal; the workpiece stage controller 920 is configured to control the workpiece stage to move and determine whether to move to the vibration compensation range based on the positioning motion instruction, and to control the workpiece stage to move in a vibration form of a preset vibration relaxation model to determine a first position deviation during the movement of the workpiece stage when the workpiece stage moves to the vibration compensation range; a drive compensation module 930 configured to generate a scan compensation signal based on the first position deviation; and a scanning module 940 for scanning based on a scanning compensation signal that drives the electron beam to move relative to the workpiece stage during the electron beam scanning process.
In the vibration relaxation-based scanning compensation system, the compensation effect in the positioning process is achieved based on the cooperation among the industrial personal computer 910, the workpiece table controller 920, the driving compensation module 930 and the scanning module 940.
In some embodiments, the drive compensation module 930 includes a dynamic compensation circuit module 931, a scan waveform generator 932, a drive deflector 933, and a signal amplifier 935. The dynamic compensation circuit module 931 is configured with a vibration compensation model for determining a vibration compensation parameter based on the first positional deviation; the scan waveform generator 932 is configured to determine a vibration compensation waveform based on the vibration compensation parameter; the driving deflector 933 is used for generating a scanning compensation signal based on the vibration compensation waveform; the signal amplifier 935 is for performing signal amplification processing on the vibration compensation waveform.
In some embodiments, the vibration relaxation based scan compensation system of the present application further comprises a positioning signal processing circuit module (not shown) for processing the actual position information measured by the position sensor 122. The positioning signal processing circuit module may be an independent module or may be integrated into the workpiece stage controller 920.
In this embodiment, the industrial personal computer 910 generates a positioning action command based on the start positioning signal and sends the positioning action command to the dynamic compensation circuit module 931 or the workpiece stage controller 920, the workpiece stage controller 920 drives the workpiece stage to move based on the positioning action command, the workpiece stage controller 920 or the dynamic compensation circuit module 931 controls the workpiece stage to move toward the target position based on the positioning signal processing circuit module, the start position and the target position of the workpiece stage, and sends a position deviation signal to the driving compensation module 930, the driving compensation module 930 sends a vibration compensation signal to the scanning waveform generator 932 based on the above formula (2) and the position deviation signal, the scanning waveform generator 932 determines a vibration compensation waveform, and the driving deflector 933 generates a scanning compensation signal to realize scanning compensation of the workpiece stage based on vibration relaxation.
In some embodiments, drive compensation module 930 further includes a beam brake controller 934 that drives the beam brake, beam brake controller 934 being configured to drive the beam brake to control whether the electron beam reaches the sample.
Referring again to fig. 7, in some embodiments, the scanning module 940 of the vibration relaxation based scanning compensation system of the present application further includes an electron beam scanning imaging device for performing electron beam imaging. Further, the electron beam scanning imaging device includes, but is not limited to, the following main parts: an electron beam scanning imaging module 100 for scanning imaging, which comprises an electron gun 101, wherein the electron gun 101 is used for generating electron beams; a focusing lens(s) 102 for adjusting the lens convergence; a beam shutter 103 for controlling whether or not the electron beam reaches the surface of the sample; an aberration controller (e.g., an astigmatic device) 104 for controlling electron beam imaging aberrations; a diaphragm 105 for controlling the electron beam spot and beam current; a detector 106 for detecting secondary electrons, backscattered electrons and generating an image signal; an objective lens 107 for converging the electron beam to the sample surface; a deflector 108 for scanning the electron beam; a sample 120 and a stage 121 for carrying the sample (typically having two or more axes of freedom of movement); position sensor 122 (which may be implemented using a variety of mechanisms including, but not limited to, laser interferometric ranging sensors, grating scales, capacitive ranging sensors, electro-optical ranging sensors, etc.) for workpiece stage positioning; a vacuum chamber 130 for maintaining a vacuum state of a working environment, and a vibration isolator 131 for suppressing and isolating external vibrations; a device bracket 132 for supporting a device main body; an image signal processing circuit module 143 for image signal processing; a lens control module 144 for driving the lens; an electron gun control module for controlling the electron gun and a power supply 145; an aberration controller circuit module 146 driving the aberration controller positioning signal processing. In addition, there are vacuum pump group and coupling assembling, sample adsorption device, sample transfer device, power supply, etc. for getting vacuum, because of low correlation with this patent technology, it is not listed one by one in the figure.
In some embodiments, the present application sets parameters via the industrial personal computer 910 and the workpiece stage controller 920, such as: start point, velocity or acceleration, etc. The actual position information (based on which the first position deviation D is calculated) is measured by the position sensor 122 and the relevant data points are synchronized by the system clock to ensure a real-time one-to-one match.
It will be appreciated that the specific features, operations and details described herein before with respect to the methods of the present application may also be similarly applied to the devices and systems of the present application, or vice versa. Additionally, each step of the methods of the present application described above may be performed by a corresponding component or unit of the apparatus or system of the present application.
It is to be understood that the various modules/units of the apparatus of the present application may be implemented in whole or in part by software, hardware, firmware, or a combination thereof. Each module/unit may be embedded in a processor of the electronic device in hardware or firmware or may be independent of the processor, or may be stored in a memory of the electronic device in software for the processor to call to perform the operations of each module/unit. Each module/unit may be implemented as a separate component or module, or two or more modules/units may be implemented as a single component or module.
Referring to fig. 10, the present application provides an electronic device 1000 comprising a processor 1010 and a memory 1020 storing computer program instructions. Wherein the processor 1010, when executing the computer program instructions, implements the steps of the vibration relaxation based scan compensation method described above. The electronic device 1000 may be broadly a server, a terminal, or any other electronic device having the necessary computing and/or processing capabilities.
In one embodiment, the electronic device 1000 may include processors, memory, network interfaces, communication interfaces, etc. that are connected by a system bus. The processor of the electronic device 1000 may be operative to provide the necessary computing, processing, and/or control capabilities. The memory of the electronic device 1000 may include non-volatile storage media and internal memory. The non-volatile storage medium may store an operating system, computer programs, and the like. The internal memory may provide an environment for the operation of the operating system and computer programs in the non-volatile storage media. The network interface and communication interface of the electronic device 1000 may be used to connect and communicate with external devices via a network. Which when executed by a processor performs the steps of the methods of the present application.
The present application provides a computer readable storage medium having stored thereon computer program instructions which, when executed by a processor, implement the above-described vibration relaxation based scan compensation method.
Those skilled in the art will appreciate that the method steps of the present application may be performed by a computer program to instruct related hardware such as the electronic device 1000 or the processor, and the computer program may be stored in a non-transitory computer readable storage medium, which when executed causes the steps of the present application to be performed. Any reference herein to memory, storage, or other medium may include non-volatile or volatile memory, as the case may be. Examples of nonvolatile memory include Read Only Memory (ROM), programmable ROM (PROM), electrically Programmable ROM (EPROM), electrically Erasable Programmable ROM (EEPROM), flash memory, magnetic tape, floppy disk, magneto-optical data storage, hard disk, solid state disk, and the like. Examples of volatile memory include Random Access Memory (RAM), external cache memory, and the like.
The technical features described above may be arbitrarily combined. Although not all possible combinations of features are described, any combination of features should be considered to be covered by the description provided that such combinations are not inconsistent.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present application, and not for limiting the same; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art will appreciate that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present application.
Claims (10)
1. A vibration relaxation-based scan compensation method, comprising:
generating a positioning action instruction based on the starting positioning signal;
based on the positioning action instruction, controlling the workpiece table to move and judging whether the workpiece table moves to a vibration compensation range;
under the condition that the workpiece table moves to a vibration compensation range, controlling the workpiece table to move in a vibration mode of a preset vibration relaxation model so as to determine a first position deviation in the movement process of the workpiece table;
generating a scan compensation signal based on the first positional deviation;
and carrying out electron beam scanning based on the scanning compensation signal, wherein the scanning compensation signal drives the electron beam to move relative to the workpiece table in the electron beam scanning process.
2. The vibration relaxation based scan compensation method of claim 1, wherein the positioning action instruction includes a start position and a target position of the workpiece stage, the start position is a position where a center of the workpiece stage is currently located, the target position is a position where a center of an electron beam scan field of view is located, the controlling the workpiece stage to move and determining whether to move to a vibration compensation range based on the positioning action instruction includes:
controlling the workpiece table to move towards the target position based on the initial position and the target position of the workpiece table so as to determine second position deviation in the movement process of the workpiece table;
and under the condition that the second position deviation is smaller than a preset threshold value, determining that the workpiece table moves to a vibration compensation range.
3. The vibration relaxation-based scan compensation method of claim 2, wherein said vibration compensation range is determined based on a scan range of said electron beam scan field of view and a vibration range corresponding to said vibration relaxation model.
4. The vibration relaxation-based scan compensation method of claim 1, wherein said controlling the stage to move in a vibration form of a preset vibration relaxation model to determine a first positional deviation during the stage movement in the case that the stage moves to the vibration compensation range comprises:
acquiring the current position of the center of a workpiece table in real time in the process of controlling the workpiece table to move in a vibration mode of a preset vibration relaxation model;
and determining the current first position deviation based on the current position of the center of the workpiece table and the target position.
5. The vibration relaxation-based scan compensation method of claim 2, wherein before said controlling the stage to move in a vibrational form of a preset vibration relaxation model to determine a first positional deviation during the stage movement, said method further comprises:
the workpiece table is controlled to perform simulated motion so as to acquire the real-time position of the center of the workpiece table at any moment;
determining a position deviation corresponding to any moment based on the target position and the real-time position of the center of the workpiece table at any moment;
fitting the vibration relaxation model formed by time and position deviation according to any time and the corresponding position deviation.
6. The vibration relaxation based scan compensation method of claim 5, wherein said generating a scan compensation signal based on said first positional deviation comprises:
determining vibration compensation parameters according to the current first position deviation and a preset vibration compensation model at any moment;
determining a vibration compensation waveform according to the vibration compensation parameter;
a scan compensation signal is generated based on the vibration compensation waveform.
7. The vibration relaxation based scan compensation method of claim 6, wherein prior to said generating a scan compensation signal based on said first positional deviation, said method further comprises:
and determining the vibration compensation model based on the vibration relaxation model, wherein corresponding vibration compensation parameters in the vibration compensation model have a corresponding relation with corresponding position deviations in the vibration relaxation model.
8. A vibration relaxation-based scan compensation system, comprising:
the industrial personal computer is used for generating a positioning action instruction based on the starting positioning signal;
the workpiece table controller is used for controlling the workpiece table to move and judging whether the workpiece table moves to a vibration compensation range or not based on the positioning action instruction, and controlling the workpiece table to move in a vibration mode of a preset vibration relaxation model under the condition that the workpiece table moves to the vibration compensation range so as to determine a first position deviation in the movement process of the workpiece table;
a drive compensation module for generating a scan compensation signal based on the first positional deviation; and
and the scanning module is used for scanning based on the scanning compensation signal, and the scanning compensation signal drives the electron beam to move relative to the workpiece table in the electron beam scanning process.
9. The vibration relaxation based scan compensation system of claim 8, wherein,
the driving compensation module comprises a dynamic compensation circuit module, a scanning waveform generator and a driving deflector;
the dynamic compensation circuit module is configured with a vibration compensation model for determining vibration compensation parameters based on the first position deviation;
the scanning waveform generator is used for determining a vibration compensation waveform based on the vibration compensation parameter;
the driving deflector is used for generating a scanning compensation signal based on the vibration compensation waveform.
10. An electronic device, comprising: one or more processors, memory, and one or more programs, wherein the one or more programs are stored in the memory and configured to be executed by the one or more processors, the one or more programs comprising instructions for performing the vibration relaxation based scan compensation method of any of claims 1-7.
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| CN118098913A (en) * | 2024-04-23 | 2024-05-28 | 国仪量子技术(合肥)股份有限公司 | Compensation method and device for scanning electron microscope image, storage medium and scanning electron microscope |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN118098913A (en) * | 2024-04-23 | 2024-05-28 | 国仪量子技术(合肥)股份有限公司 | Compensation method and device for scanning electron microscope image, storage medium and scanning electron microscope |
| CN118098913B (en) * | 2024-04-23 | 2024-07-16 | 国仪量子技术(合肥)股份有限公司 | Compensation method and device for scanning electron microscope image, storage medium and scanning electron microscope |
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