CN118046499A - Tile boat and processing method thereof - Google Patents

Abstract

The invention discloses a tile boat and a processing method thereof, wherein the processing method comprises the following steps: s1, providing a blank and a first quartz plate; s2, vertically fixing the blank on a workbench of a linear cutting machine, cutting the contour of the linear cutting machine along the vertical direction of the tile boat, and dividing the blank into a tile boat semi-finished product, a first jig positioned at the inner side of the tile boat semi-finished product and a second jig positioned at the outer side of the tile boat semi-finished product; the semi-finished tile boat can be completely matched with the jig, the jig surface is completely attached to the tile boat, the processing stability is improved, and the quality of the tile boat is improved.

Description

Tile boat and processing method thereof

Technical Field

The invention relates to the technical field of silicon boat machining, in particular to a tile boat and a machining method of the tile boat.

Background

Silicon wafers are one of the main substrate materials of modern chips, the process is various, the heat treatment of the silicon wafers is an important procedure in the chip processing process, a carrier for loading the silicon wafers is needed at the moment, the silicon wafers are placed on the carrier and then placed into a heat treatment furnace for treatment, and the carrier is called a tile boat.

Currently, tile boats commonly used in the market can be classified into quartz boats, silicon carbide boats and high-purity siliceous tile boats according to materials. The quartz boat material is different with the silicon chip material, and the coefficient of thermal expansion and shrinkage is different, can influence the quality of silicon chip. In high temperature treatment, the silicon carbide boat may undergo oxidation reaction, which may affect the quality of the silicon wafer. The high-purity siliceous tile boat has excellent stability at high temperature, and the same material as the silicon wafer can reduce the stress difference during temperature rise and reduction, thereby ensuring the quality of the silicon wafer. Therefore, the high-purity siliceous tile boat has good application prospect. However, the siliceous tile boat is a brittle material and can only be prepared by removing the allowance through a grinding method.

In the prior art, the siliceous tile boat is usually manufactured by using a machining center and a grooving machine to perform a few-pass material reduction machining, in order to prevent cracking and breakage of the tile boat, at least one matched jig is usually manufactured, the material strength of the jig cannot be lower than that of the tile boat, and a certain tolerance exists between each tile boat, so that the jigs with various tolerances have to be manufactured for adapting each tile boat, and the efficiency of manufacturing the tile boat is lower.

Disclosure of Invention

In order to solve at least one technical problem mentioned in the background art, the invention aims to provide a processing method of a tile boat and the tile boat, which can prepare a jig for adapting to the tile boat while improving the efficiency of processing the tile boat.

In order to achieve the above purpose, the present invention provides the following technical solutions:

a processing method of a tile boat comprises the following steps:

s1, providing a blank and a first quartz plate;

S2, vertically fixing the blank on a workbench of a linear cutting machine, cutting the contour of the linear cutting machine along the vertical direction of the tile boat, and dividing the blank into a tile boat semi-finished product, a first jig positioned at the inner side of the tile boat semi-finished product and a second jig positioned at the outer side of the tile boat semi-finished product;

S3, bonding the tile boat semi-finished product with a first jig;

s4, vertically adhering an assembly of the tile boat semi-finished product and the first jig to a first quartz plate;

s5, fixing the first quartz plate on a workbench of a machining center, and machining the outer wall of the tile boat semi-finished product;

S6, separating the assembly of the tile boat semi-finished product and the first jig from the first quartz plate, and horizontally adhering the first jig to the first quartz plate so that the inner wall of the tile boat semi-finished product faces the first quartz plate;

S7, fixing the first quartz plate on a workbench of a machining center, and machining a through groove of a semi-finished tile boat;

s8, mutually separating the tile boat semi-finished product from the first jig and the first jig from the first quartz plate;

S9, bonding the tile boat semi-finished product with a second jig;

s10, horizontally adhering a second jig on the first quartz plate to enable the outer wall of the tile boat semi-finished product to face the first quartz plate;

s11, fixing a first quartz plate on a workbench of a machining center, and machining the inner wall of a tile boat semi-finished product;

S12, mutually separating the tile boat semi-finished product from the second jig and the second jig from the first quartz plate;

s13, obtaining a tile boat finished product.

Compared with the prior art, the invention has the beneficial effects that:

The blank is directly and simultaneously cut out the semi-finished product of the tile boat, the first jig and the second jig, so that the time for manufacturing the jig is shortened, meanwhile, the semi-finished product of the tile boat and the jig can be completely matched, the jig surface and the tile boat are completely attached, the processing stability is improved, and the quality of the tile boat is improved; because the two sides of the tile boat are arc-shaped, more waste materials are generated when the tile boat is cut on the blanks, and the waste materials are fully utilized on the jig, so that the materials are fully utilized, and the production cost of the tile boat is effectively reduced; the wire cutting is used for machining the profile, so that the number of machining tools is reduced, the tool changing time is saved, and the machining efficiency is improved.

Preferably, before step S1, a tile boat raw material with a proper size is selected, and the blank is obtained by cutting the raw material according to the size of the tile boat.

Preferably, a second quartz plate is further provided, and the blank is fixed on the second quartz plate, and the second quartz plate is fixed on a wire cutting machine table before the step of S2 is performed, and then the blank is cut.

Preferably, in step S5, the first plane and the vertical holes of the tile boat semi-finished product are machined separately.

Preferably, after the first plane and the vertical hole are processed, the assembly of the half-finished tile boat and the first jig is separated from the first quartz plate, then the assembly of the half-finished tile boat and the first jig is turned upside down, the upper side of the assembly of the half-finished tile boat and the first jig is adhered to the first quartz plate, and the second plane and the third plane of the half-finished tile boat are processed respectively.

Preferably, after the step S8 is completed, the tile boat semi-finished product is boiled, washed, detected and sandblasted.

Preferably, in the step S11, the machining center is a groove cutting machine, the first quartz plate is fixed on a groove cutting machine workbench, and the circular saw blade is used for machining groove teeth on the tile boat semi-finished product.

Preferably, after step S12 is completed, the tile boat semi-finished product is boiled and washed, detected, carved and chemically washed.

Preferably, the tile boat semi-finished product, the first jig, the second jig, the first quartz plate and the second quartz plate are bonded through wax or glue; when wax is selected as the bonding material, the tile boat semi-finished product, the first jig, the second jig, the first quartz plate and the second quartz plate which need to be bonded are heated before bonding, and the tile boat semi-finished product, the first jig, the second jig, the first quartz plate and the second quartz plate which need to be separated are heated before separation.

The utility model provides a tile boat, includes the tile boat body, the outside of tile boat body is equipped with a plurality of first lug and a plurality of second lug, has seted up vertical hole on the first lug and the second lug that are located both sides, a plurality of logical groove has been seted up on the tile boat body, the inboard of tile boat body is equipped with a plurality of ditch stick, a plurality of ditch tooth has been seted up on the ditch stick.

Drawings

FIG. 1 is a schematic diagram of the structure of the present invention before cutting in step S2;

FIG. 2 is a schematic diagram of the structure after cutting in step S2 of the present invention;

FIG. 3 is an exploded view of the half-finished tile boat, the first jig and the second jig according to the present invention;

FIG. 4 is a schematic diagram of the structure of the present invention after S4 bonding;

FIG. 5 is a schematic view of the structure after the first plane and the vertical hole are processed in the step S5 of the present invention;

FIG. 6 is a schematic diagram of the structure after the second plane and the third plane are processed in the step S5 of the present invention;

FIG. 7 is a schematic diagram of the structure of the present invention after S6 bonding;

FIG. 8 is a schematic diagram of the structure after finishing the processing of the through groove in the step S7 of the present invention;

FIG. 9 is a schematic diagram of the structure of the present invention after bonding in step S10;

FIG. 10 is a schematic diagram of the structure of step S11 of the present invention;

FIG. 11 is a schematic view of the structure of the final tile boat of the present invention;

In the figure:

1. Blank material; 11. tile boat semi-finished product; 110. a vertical hole; 111. a first plane; 112. a second plane; 113. a third plane; 114. a through groove; 115. a groove tooth; 101. tile boat finished product; 1010. a tile boat body; 1011. a first bump; 1012. a second bump; 1014. a ditch bar; 12. a first jig; 13. a second jig; 2. a second quartz plate; 3. a first quartz plate; 4. a circular saw blade.

Detailed Description

The following description of the embodiments of the present invention will be made clearly and completely, and it is apparent that the described embodiments are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

Referring to fig. 1-11, the present embodiment provides a processing method of a tile boat, the processing method includes:

S1, selecting a tile boat raw material with a proper size, cutting a blank 1 according to the size of the tile boat (the width of the blank 1 is larger than the thickness of the tile boat, the height of the blank 1 is not smaller than the length of the tile boat, and the length of the blank 1 is not smaller than the width of the tile boat), and providing a second quartz plate 2 and a first quartz plate 3;

S2, fixing the blank 1 on a second quartz plate 2 through wax or glue, fixing the second quartz plate 2 on a workbench of a linear cutting machine, vertically placing the blank 1 (shown in figure 1), cutting the contour of the linear cutting machine along the vertical direction (length direction) of a tile boat (shown in figure 2), dividing the blank 1 into a tile boat semi-finished product 11, a first jig 12 positioned at the inner side of the tile boat semi-finished product 11 and a second jig 13 positioned at the outer side of the tile boat semi-finished product 11 (shown in figures 2 and 3), wherein the tile boat semi-finished product 11 is provided with a plurality of bulges except two cambered surfaces, and the bulges extend along the axial direction of the tile boat semi-finished product 11 and can be provided with bulges with different sizes and positions and radians of the inner wall and the outer wall of the tile boat semi-finished product 11 according to actual size requirements;

s3, the tile boat semi-finished product 11 and the first jig 12 are adhered by wax or glue;

S4, vertically adhering an assembly of the tile boat semi-finished product 11 and the first jig 12 to the first quartz plate 3 through wax or glue (as shown in FIG. 4);

S5, fixing the first quartz plate 3 on a workbench of a machining center, machining the outer wall of the tile boat semi-finished product 11, and respectively machining a first plane 111 and a vertical hole 110 of the tile boat semi-finished product 11; cutting off part of the protrusions on the outer wall of the tile boat semi-finished product 11 to obtain a first plane 111, wherein the first plane 111 is positioned on the upper side of the position of the tile boat semi-finished product 11 at the moment; vertically punching the protrusions on the outer wall of the tile boat semi-finished product 11 to form vertical holes 110 (as shown in fig. 5), and forming first planes 111 and vertical holes 110 with different sizes and positions according to actual size requirements;

in order to facilitate the processing of the plane at the lower side of the half-finished tile boat 11 at the present position, separating the assembly of the half-finished tile boat 11 and the first jig 12 from the first quartz plate 3, turning over the assembly of the half-finished tile boat 11 and the first jig 12 up and down, and respectively processing the second plane 112 and the third plane 113 of the half-finished tile boat 11 by wax or adhesion of the assembly of the half-finished tile boat 11 and the first jig 12 on the first quartz plate 3 (at the present time, the lower side of the half-finished tile boat 11 is the upper side of the half-finished tile boat 11 at the previous position); cutting part of the bulges on the outer wall of the tile boat semi-finished product 11 to obtain a second plane 112 and a third plane 113, wherein the second plane 112 is positioned on the upper side of the position of the tile boat semi-finished product 11, the third plane 113 is positioned in the middle of the tile boat semi-finished product 11, and the third plane 113 can be processed in the former position; the half-finished tile boat 11 thus obtained is shown in fig. 6;

S6, separating the assembly of the tile boat semi-finished product 11 and the first jig 12 from the first quartz plate 3, and horizontally adhering the first jig 12 to the first quartz plate 3 through wax or glue to enable the inner wall of the tile boat semi-finished product 11 to face the first quartz plate 3 (as shown in FIG. 7);

S7, fixing the first quartz plate 3 on a workbench of a machining center, machining the through groove 114 (shown in FIG. 8) of the tile boat semi-finished product 11, wherein the through groove 114 is more suitable for horizontal machining from the viewpoints of stress and the like, cracking of the tile boat semi-finished product 11 caused by brittleness of the material is prevented, the through groove 114 is easy to cut to the first jig 12, and therefore the through groove 114 is placed in the last step of machining the outer wall of the tile boat semi-finished product 11;

s8, mutually separating the tile boat semi-finished product 11 from the first jig 12 and separating the first jig 12 from the first quartz plate 3, and performing preparation work before grooving on the tile boat semi-finished product 11, specifically, procedures such as boiling, cleaning, detecting, sand blasting and the like, so as to meet the grooving requirement;

s9, the tile boat semi-finished product 11 and the second jig 13 are adhered by wax or glue;

s10, horizontally adhering the second jig 13 to the first quartz plate 3 through wax or glue, so that the outer wall of the tile boat semi-finished product 11 faces the first quartz plate 3 (as shown in FIG. 9, the inner wall of the tile boat semi-finished product 11 faces upwards);

s11, fixing the first quartz plate 3 on a workbench of a machining center, wherein the machining center is a groove cutting machine, fixing the first quartz plate 3 on the workbench of the groove cutting machine, machining the inner wall of the tile boat semi-finished product 11, and machining groove teeth 115 (shown in figure 10) on the tile boat semi-finished product 11 by using a circular saw blade 4;

S12, separating the tile boat semi-finished product 11 from the second jig 13 and separating the second jig 13 from the first quartz plate 3, and performing procedures such as boiling cleaning, detection, lettering, chemical cleaning and the like on the tile boat semi-finished product 11;

s13, obtaining a tile boat finished product 101 (as shown in FIG. 11).

It is noted that, setting the axis direction of the blank 1, the tile boat semi-finished product 11, the first jig 12 and the second jig 13 to be parallel to the axis direction of the tile boat finished product 101, the above-mentioned vertical placement, the vertical direction, etc. refer to the axis direction being perpendicular to the plane of the second quartz plate 2, the first quartz plate 3 or the machine tool table, and the above-mentioned horizontal direction refers to the axis direction being parallel to the plane of the second quartz plate 2, the first quartz plate 3 or the machine tool table; the thickness of the tile boat is the arch distance of the arc surface of the tile boat, the length direction of the tile boat is parallel to the axis direction, and the length of the tile boat is the straight line distance of the arc surface of the tile boat; the side of the arc surface of the tile boat, which faces the center of the circle, is the inner side of the tile boat semi-finished product 11, and the surface corresponding to the inner side is the inner wall of the tile boat semi-finished product 11; the side of the arc surface of the tile boat, which is away from the circle center, is the outer side of the tile boat semi-finished product 11, and the surface corresponding to the outer side is the outer wall of the tile boat semi-finished product 11.

In this embodiment, the above-mentioned adhesion, bonding, etc. are all performed by using wax or glue as a bonding medium; when wax is selected as the bonding material, the tile boat semi-finished product 11, the first jig 12, the second jig 13, the first quartz plate 3 and the second quartz plate 2 to be bonded are heated before bonding, and the tile boat semi-finished product 11, the first jig 12, the second jig 13, the first quartz plate 3 and the second quartz plate 2 to be separated are heated before separation.

In the embodiment, the wire diameter of the wire cutting machine tool used in the step S2 is not more than 0.2mm, when the semi-finished product 11 of the tile boat is cut out by the wire, the rest part of the blank 1 is matched with the contour of the tile boat, so that the blank can be used as a jig for the subsequent working procedure, the material is completely utilized, and compared with the conventional machining center method, the material is saved by 50%, the machining time is shortened by 50%, and the cutter loss is greatly reduced; because the wire diameter used in the wire cutting is very small, the right angle characteristic can be made during processing, and the right angle is not made by the processing center, so that the machinability of the tile boat is greatly expanded. And the linear cutting is cut along the contour of the tile boat, the tile boat is formed at one time, the processing surface is uniform and consistent, no tool mark is generated, the surface quality is good, compared with the conventional processing center method, when the tools are connected, the tool mark is easily generated, the appearance of the processing surface is inconsistent, the quality of the surface of the tile boat is improved, meanwhile, the number of the tools on the processing center and the processing time are reduced, and the cost is saved. Compared with the conventional machining center method for respectively machining the jig and the tile boat, the jig surface and the tile boat are completely attached when wax is adhered, so that the stability of subsequent machining is improved.

Referring to fig. 11, the present embodiment provides a tile boat, which includes a tile boat body 1010, wherein a plurality of first protrusions 1011 and a plurality of second protrusions 1012 are provided on the outer side of the tile boat body 1010, vertical holes 110 are provided on the first protrusions 1011 and the second protrusions 1012 on both sides, a plurality of through slots 114 are provided on the tile boat body 1010, a plurality of groove bars 1014 are provided on the inner side of the tile boat body 1010, and a plurality of groove teeth 115 are provided on the groove bars 1014; in the steps of performing S1 and S2, the profile in the vertical direction of the tile boat body 1010, the profiles in the vertical direction of the first projections 1011 and the second projections 1012, and the trench bars 1014 can be cut out; when the outside of the tile boat is processed, the first plane 111, the second plane 112 and the third plane 113 can be cut out to obtain the profiles of the first projections 1011 and the second projections 1012 in the horizontal direction, and the vertical holes 110 processed before the step are naturally formed on the first projections 1011 and the second projections 1012 on both sides; in the processing step S7, a through groove 114 is obtained; when machining the inside of the tile boat, the groove teeth 115 (vertical and horizontal directions in this embodiment are shown with respect to fig. 11) are cut out with a groove cutter.

It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.

Claims (10)

1. The processing method of the tile boat is characterized by comprising the following steps of:

s1, providing a blank (1) and a first quartz plate (3);

S2, vertically fixing the blank (1) on a workbench of a linear cutting machine, cutting the linear cutting machine along the contour of the tile boat in the vertical direction, and dividing the blank (1) into a tile boat semi-finished product (11), a first jig (12) positioned at the inner side of the tile boat semi-finished product (11) and a second jig (13) positioned at the outer side of the tile boat semi-finished product (11);

s3, bonding the tile boat semi-finished product (11) with a first jig (12);

S4, vertically adhering an assembly of the tile boat semi-finished product (11) and the first jig (12) to the first quartz plate (3);

S5, fixing the first quartz plate (3) on a workbench of a machining center, and machining the outer wall of a tile boat semi-finished product (11);

S6, separating the assembly of the tile boat semi-finished product (11) and the first jig (12) from the first quartz plate (3), and horizontally adhering the first jig (12) to the first quartz plate (3) to enable the inner wall of the tile boat semi-finished product (11) to face the first quartz plate (3);

S7, fixing the first quartz plate (3) on a workbench of a machining center, and machining a through groove (114) of a tile boat semi-finished product (11);

s8, mutually separating the tile boat semi-finished product (11) from the first jig (12), and separating the first jig (12) from the first quartz plate (3);

s9, bonding the tile boat semi-finished product (11) with a second jig (13);

s10, horizontally adhering a second jig (13) to the first quartz plate (3) to enable the outer wall of the tile boat semi-finished product (11) to face the first quartz plate (3);

S11, fixing a first quartz plate (3) on a workbench of a machining center, and machining the inner wall of a tile boat semi-finished product (11);

S12, mutually separating the tile boat semi-finished product (11) from the second jig (13), and separating the second jig (13) from the first quartz plate (3);

S13, obtaining a tile boat finished product (101).

2. The method according to claim 1, wherein the raw material of the tile boat of a proper size is selected before the step S1, and the blank (1) is obtained by cutting the raw material according to the size of the tile boat.

3. The tile boat processing method according to claim 1, further comprising the step of providing a second quartz plate (2), fixing the blank (1) on the second quartz plate (2), fixing the second quartz plate (2) on a table of a wire cutting machine, and cutting the blank (1) before the step of S2.

4. The method of claim 1, wherein in step S5, the first plane (111) and the vertical hole (110) of the tile boat blank (11) are processed separately.

5. The method according to claim 4, wherein after the first plane (111) and the vertical hole (110) are machined, the assembly of the half-finished tile boat (11) and the first jig (12) is separated from the first quartz plate (3), the assembly of the half-finished tile boat (11) and the first jig (12) is turned upside down, and the upper side of the assembly of the half-finished tile boat (11) and the first jig (12) is adhered to the first quartz plate (3), so that the second plane (112) and the third plane (113) of the half-finished tile boat (11) are machined respectively.

6. The method according to claim 1, wherein after step S8, the tile boat semi-finished product (11) is boiled, washed, inspected, and sandblasted.

7. The method according to claim 1, wherein in step S11, the machining center is a grooving machine, the first quartz plate (3) is fixed on a grooving machine table, and the circular saw blade (4) is used to machine the groove teeth (115) on the tile boat semifinished product (11).

8. The method according to claim 7, wherein after step S12 is completed, the semi-finished tile boat (11) is boiled, washed, inspected, engraved, and chemically washed.

9. The method for processing a tile boat according to any one of claims 1 to 8, wherein the tile boat semifinished product (11), the first jig (12), the second jig (13), the first quartz plate (3) and the second quartz plate (2) are bonded by wax or glue; when wax is selected as the bonding material, the tile boat semi-finished product (11), the first jig (12), the second jig (13), the first quartz plate (3) and the second quartz plate (2) which need to be bonded are heated before bonding, and the tile boat semi-finished product (11), the first jig (12), the second jig (13), the first quartz plate (3) and the second quartz plate (2) which need to be separated are heated before separation.

10. The utility model provides a tile boat, its characterized in that, includes tile boat body (1010), the outside of tile boat body (1010) is equipped with a plurality of first lug (1011) and a plurality of second lug (1012), has seted up vertical hole (110) on first lug (1011) and second lug (1012) that are located both sides, a plurality of logical groove (114) have been seted up on tile boat body (1010), the inboard of tile boat body (1010) is equipped with a plurality of ditch stick (1014), a plurality of ditch tooth (115) have been seted up on ditch stick (1014).