CN118033292A - Low-temperature electrical property test board for small sample - Google Patents
Low-temperature electrical property test board for small sample Download PDFInfo
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- CN118033292A CN118033292A CN202410334832.0A CN202410334832A CN118033292A CN 118033292 A CN118033292 A CN 118033292A CN 202410334832 A CN202410334832 A CN 202410334832A CN 118033292 A CN118033292 A CN 118033292A
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- 238000012360 testing method Methods 0.000 title claims abstract description 60
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 208
- 239000000523 sample Substances 0.000 claims abstract description 106
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 104
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 71
- 229910052802 copper Inorganic materials 0.000 claims abstract description 71
- 239000010949 copper Substances 0.000 claims abstract description 71
- 239000007788 liquid Substances 0.000 claims abstract description 56
- 238000012546 transfer Methods 0.000 claims abstract description 14
- 239000000919 ceramic Substances 0.000 claims abstract description 13
- 238000003780 insertion Methods 0.000 claims abstract description 13
- 230000037431 insertion Effects 0.000 claims abstract description 13
- 239000000463 material Substances 0.000 claims abstract description 10
- 238000000034 method Methods 0.000 claims abstract description 10
- 238000011056 performance test Methods 0.000 claims abstract description 8
- 238000010438 heat treatment Methods 0.000 claims description 30
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims description 3
- -1 polytetrafluoroethylene Polymers 0.000 claims description 3
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 3
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 3
- 238000004321 preservation Methods 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims description 2
- 238000009413 insulation Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 4
- 230000005684 electric field Effects 0.000 abstract description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 229910010293 ceramic material Inorganic materials 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- 239000012535 impurity Substances 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- 241000270722 Crocodylidae Species 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- LNNWVNGFPYWNQE-GMIGKAJZSA-N desomorphine Chemical compound C1C2=CC=C(O)C3=C2[C@]24CCN(C)[C@H]1[C@@H]2CCC[C@@H]4O3 LNNWVNGFPYWNQE-GMIGKAJZSA-N 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/003—Environmental or reliability tests
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
A small sample low-temperature electrical property test board relates to a low-temperature test board for testing the electrical property of materials. The invention aims to solve the problem that the existing method cannot test the electrical low-temperature test data of the electrical card effect of the functional ceramic with thin thickness and small size. The low-temperature electrical performance test board for the small sample comprises a temperature control system and a sample test system to be tested; the temperature control system comprises an assembly lower base, an assembly vertical plate, a nitrogen input hole, a threading hole, an oblique square air outlet hole, an operation table outer cover, an operation table air outlet hole, a thermocouple insertion port, an assembly upper cover plate, an internal sealed heat-insulating liquid nitrogen barrel, a multi-layer dumbbell-shaped heat conduction structure, a heat conduction connecting rod, a plate-shaped copper block with a groove and an operation table cavity upper cover; the sample testing system to be tested comprises a rocker probe and a transfer rack wire-fixing device. The invention has the advantages that the invention is suitable for the test of samples with the thickness as low as 0.05mm, the withstand electric field of 33kV/cm and the strength under the external force of 10N at low temperature.
Description
Technical Field
The invention relates to a low-temperature table for testing the electrical performance of a material, in particular to a low-temperature table for electrical testing of a small sample.
Background
The functional ceramics are widely applied to the technical fields of aerospace, energy transmission, signal detection and the like due to the properties of sound, light, heat, electricity and magnetism. Therefore, the detection of the service temperature range of the functional ceramic material, the ferroelectric performance and the electric card effect under different service temperatures is a key part for analyzing the material performance and determining the material selection.
The electrical properties such as pressure resistance of the functional ceramic material are closely related to the size of the functional ceramic material, and the smaller the size of the ceramic is, the weaker the pressure resistance of the functional ceramic material is; functional ceramics with thin thickness and small size are widely applied in the fields of miniature electronic equipment, sensors and the like along with the increasing demands for high performance, miniaturization and integration of electronic devices. At the same time, the associated detection equipment is critical to ensure that the performance and quality of these micro-ceramics reach the desired level. Accordingly, researchers are actively exploring various manufacturing processes and inspection methods to achieve this goal and drive the development of microelectronic devices.
Disclosure of Invention
The invention aims to solve the problem that the existing low-temperature test equipment such as dielectric, ferroelectric and electric card effects is complex in structure, and provides a low-temperature dielectric test system which does not need a vacuum pump and can be used for small-size and thin samples.
The low-temperature electrical performance test board for the small sample comprises a temperature control system and a sample test system to be tested;
The temperature control system comprises an assembly lower base 1, 4 assembly risers 2, a dry nitrogen input hole 3, a threading hole 5, an oblique square air outlet hole 7, an operation desk outer cover 8, an operation desk air outlet hole 9, a thermocouple insertion port 10, an assembly upper cover plate 11, an internal closed heat-insulating liquid nitrogen barrel 12, a multi-layer dumbbell-shaped heat conducting structure 13, a heat conducting connecting rod 14, a plate-shaped copper block 15 with a groove and an operation desk cavity upper cover 16;
the base 1 and the upper assembly cover plate 11 are both rectangular; screw holes 3 are formed in the base 1, the assembly upper cover plate 11 and the 4 assembly vertical plates 2; 4 assembly vertical plates 2 are connected into a frame through screw holes 3 in a bolt mode, and then are connected with a base 1 and an assembly upper cover plate 11 through screw holes 3 in a bolt mode to form a test bench;
The assembly upper cover plate 11 is provided with a dry nitrogen input hole 3, a thermocouple insertion port 10 and an operation desk outer cover 8; a PVC pipe passes through the dry nitrogen input hole 3 to convey the dry nitrogen into the internal sealed heat-preserving liquid nitrogen barrel 12, so that the internal positive pressure is maintained in the experimental process; the operation table outer cover 8 is arranged at the center of the upper surface of the assembly upper cover plate 11, an operation table cavity upper cover 16 is arranged on the operation table outer cover 8, an oblique square air outlet hole 7 is arranged at the center of the operation table outer cover 8, and an operation table air outlet hole 9 is arranged outside the oblique square air outlet hole 7; the oblique square air outlet hole 7 is communicated with the internal closed heat-preserving liquid nitrogen barrel 12, dry nitrogen enters the internal closed heat-preserving liquid nitrogen barrel 12 through the dry nitrogen input hole 3, enters the operation desk outer cover 8 through the operation desk air outlet hole 9 after being cooled by liquid nitrogen in the internal closed heat-preserving liquid nitrogen barrel 12, fills the operation desk space, maintains the temperature around a sample to be detected to be-150 ℃, and is finally discharged from the oblique square air outlet hole 7;
The lower part of the plate-shaped copper block 15 with the groove is arranged in a hole formed in the upper assembly cover plate 11, and the upper part of the plate-shaped copper block 15 with the groove is higher than the upper assembly cover plate 11 and is arranged in the space of the operating platform; the thermocouple is inserted into the test bench through the thermocouple insertion port 10 and sleeved on the top of the middle bulge of the plate-shaped copper block 15 with the groove so as to measure the temperature of the sample 17 to be measured; the heating ring is sleeved at the bottom of the middle bulge of the plate-shaped copper block 15 with the groove; the multi-layer dumbbell-shaped heat conducting structure 13 is arranged inside the sealed heat-insulating liquid nitrogen barrel 12, and the multi-layer dumbbell-shaped heat conducting structure 13 is connected with the plate-shaped copper block 15 with the groove through the heat conducting connecting rod 14, so that heat is conveniently transmitted;
The sample testing system to be tested comprises a rocker probe 4 and a transfer rack wire-fixing device 6; the transfer frame wire-fixing device 6 is a junction of external voltage, a wire is fixed on the transfer frame wire-fixing device 6, wherein an anode wire is connected with the rocker probe 4, and a cathode wire passes through the threading hole 5 and is connected with the plate-shaped copper block 15 with the groove to provide voltage for testing a sample to be tested;
The rocker probe 4 is used as an upper electrode, and a plate-shaped copper block 15 with a groove is used as a lower electrode; the sample 17 to be measured is placed between the rocker probe 4 and the grooved plate-like copper block 15.
The test principle of the invention:
1. Cooling the sample: when the dry nitrogen is conveyed to the dry nitrogen input hole 3, the dry nitrogen input hole 3 is connected with the internal sealed heat-preserving liquid nitrogen barrel 12, and the liquid nitrogen in the internal sealed heat-preserving liquid nitrogen barrel 12 absorbs the heat of the dry nitrogen input from the dry nitrogen input hole 3, so that the temperature of the liquid nitrogen is rapidly reduced to be consistent with the temperature of the liquid nitrogen; meanwhile, the newly input dry nitrogen can slightly increase the internal air pressure of the internal closed heat-preserving liquid nitrogen barrel 12 and slightly exceed the external air pressure, so that the original low-temperature gas in the internal closed heat-preserving liquid nitrogen barrel 12 is discharged to an operation table, the sample to be tested is cooled and the air is discharged, and after the operation table is fully filled with the dry nitrogen, the dry nitrogen finally escapes from the inclined air outlet 7; the liquid nitrogen in the internal sealed heat-insulating liquid nitrogen barrel 12 is contacted with a plurality of layers of dumbbell-shaped heat conducting structures 13, the plurality of layers of dumbbell-shaped heat conducting structures 13 are connected with a heat conducting connecting rod 14 and a plate-shaped copper block 15 with a groove, the heat conducting connecting rod is directly contacted with the plate-shaped copper block 15 with the groove and a sample 17 to be tested, and the sample is cooled by utilizing the good heat conducting property of copper in the process;
2. Heating the sample 17 to be measured and detecting the temperature of the sample 17 to be measured: sleeving a commercial annular aluminum oxide heating ring on the middle of the plate-shaped copper block 15 with the groove, wherein the height of the plate-shaped copper block at the bottom of the middle bulge is 4mm, the height of the heating ring is 1mm, heating the plate-shaped copper block 15 with the groove by using the commercial annular aluminum oxide heating ring, cooling a sample 17 to be detected by using dry nitrogen, and heating the sample 17 to be detected by using the heating ring, so that the temperature of the sample 17 to be detected can be controlled by adjusting the heating rate of the heating ring, and monitoring the temperature of the sample by using a thermocouple in the aspect of temperature detection; the thermocouple is connected with an annular metal ring joint which is sleeved on the top plate-shaped copper block with the groove 15, the height of the annular metal ring is 4mm, and the distance between the annular metal ring and the heating ring is 2mm, so that the temperature of the sample 17 to be detected is detected.
The application method of the invention comprises the following steps:
Placing the small sample low-temperature electrical performance test bench on a flat table top, sealing a dry nitrogen input hole 3, taking down an assembled upper cover plate 11, and fixing a commercial annular aluminum oxide heating ring and an annular metal ring connected with a thermocouple on a plate-shaped copper block 15 with a groove; fixing a lead on a transfer rack wire-fixing device 6, wherein an anode lead is connected with a rocker probe 4, and a cathode lead passes through a threading hole 5 and is connected with a plate-shaped copper block 15 with a groove; pouring liquid nitrogen into the internal sealed heat-preserving liquid nitrogen barrel 12, and fixing the assembled upper cover plate 11; placing a sample 17 to be tested between the rocker probe 4 and the plate-shaped copper block 15 with the groove; the test is conducted to provide high-voltage power supply and commercial ring heating ring power supply, the thermocouple power supply is turned on, the dry nitrogen input hole 3 is opened, dry nitrogen is slowly conveyed, air in the operation table of the test table is discharged, and the test can be started after 30 seconds.
The invention has the advantages that:
1. Copper has good heat conduction performance, and the larger the contact area between the copper and the high-temperature end and the copper and the contact area between the copper and the low-temperature end are in the heat conduction process, the higher the heat conduction efficiency of the copper is; the multi-layer dumbbell-shaped heat conduction structure 13 is used, so that the contact area with liquid nitrogen is increased, and the heat conduction efficiency is much higher than that of a single copper rod;
2. The invention has the advantages that the invention is suitable for the test of samples with small sample thickness as low as 0.05mm, the withstand electric field at low temperature reaching 33kV/cm and the strength under external force below 10N. At present, other low-temperature electrical test tables at home and abroad cannot test samples with low thickness and low strength. When the thickness of the functional ceramic sample is reduced to below 200 mu m, the strength of the functional ceramic sample is greatly reduced, and the sample is easily damaged by adopting the crocodile clip and the spring probe, while the invention has the advantages that the rocker probe 4 is used as an upper electrode, the activity is flexible, the whole body is light, the pressure applied to the sample is small, and the replacement is convenient. In addition, the water vapor in the air is easy to liquefy and condense in the sample cavity at low temperature, and as condensed water or ice contains certain impurities, the conductivity of the water or ice is enhanced, and the voltage range of the test is reduced. The invention adopts liquid nitrogen to cool the sample and the sample table and introduces dry nitrogen into the sample cavity from bottom to top, and keeps the sample cavity at a certain positive pressure, and the air is discharged by means of dry nitrogen blowing, so that the sample is in a full dry nitrogen protection environment, thereby avoiding the problems; the voltage range tested by the small sample low-temperature electrical property test bench is 0-33 kV/cm;
3. According to the invention, the plate-shaped copper block 15 with the groove can be expected to be cooled to 110K within 3 minutes by conveying liquid nitrogen into the internal sealed heat-preserving liquid nitrogen barrel 12, and the liquid nitrogen in the internal sealed heat-preserving liquid nitrogen barrel 12 can be completely boiled in the latter 10 minutes, so that the test bench can be kept stable for 10 minutes at the low temperature of 110K under the condition of not additionally conveying the liquid nitrogen; after cooling the grooved plate-like copper block 15 to a low temperature, the temperature can be controlled at-150 ℃ to 80 ℃ by a heating belt at a rate of 5+/-1K/min or faster; stabilization in the range of 1K for at least 3 minutes can be achieved.
4. According to the invention, the air in the operation table is discharged in a mode of purging dry nitrogen, so that the sample to be tested is in a full dry nitrogen protection environment. The vacuum pump is not needed to vacuumize the cavity of the operation table, the structure is simple, the problem that the test at low temperature cannot be completed because the anode and the cathode of the power supply are easily conducted and cannot be loaded with voltage due to the fact that the vapor in the sample cavity of the operation table is liquefied and solidified is avoided.
Drawings
FIG. 1 is a top view of a small sample low temperature electrical performance test bench according to the present invention;
FIG. 2 is a cross-sectional view taken along line A-A' of FIG. 1;
fig. 3 is a schematic structural view of a plate-shaped copper block with grooves;
fig. 4 is a photograph of a heating ring.
Detailed Description
The first embodiment is as follows: the embodiment is a small sample low-temperature electrical performance test board, which comprises a temperature control system and a sample test system to be tested;
The temperature control system comprises an assembly lower base 1, 4 assembly risers 2, a dry nitrogen input hole 3, a threading hole 5, an oblique square air outlet hole 7, an operation desk outer cover 8, an operation desk air outlet hole 9, a thermocouple insertion port 10, an assembly upper cover plate 11, an internal closed heat-insulating liquid nitrogen barrel 12, a multi-layer dumbbell-shaped heat conducting structure 13, a heat conducting connecting rod 14, a plate-shaped copper block 15 with a groove and an operation desk cavity upper cover 16;
the base 1 and the upper assembly cover plate 11 are both rectangular; screw holes 3 are formed in the base 1, the assembly upper cover plate 11 and the 4 assembly vertical plates 2; 4 assembly vertical plates 2 are connected into a frame through screw holes 3 in a bolt mode, and then are connected with a base 1 and an assembly upper cover plate 11 through screw holes 3 in a bolt mode to form a test bench;
The assembly upper cover plate 11 is provided with a dry nitrogen input hole 3, a thermocouple insertion port 10 and an operation desk outer cover 8; a PVC pipe passes through the dry nitrogen input hole 3 to convey the dry nitrogen into the internal sealed heat-preserving liquid nitrogen barrel 12, so that the internal positive pressure is maintained in the experimental process; the operation table outer cover 8 is arranged at the center of the upper surface of the assembly upper cover plate 11, an operation table cavity upper cover 16 is arranged on the operation table outer cover 8, an oblique square air outlet hole 7 is arranged at the center of the operation table outer cover 8, and an operation table air outlet hole 9 is arranged outside the oblique square air outlet hole 7; the oblique square air outlet hole 7 is communicated with the internal closed heat-preserving liquid nitrogen barrel 12, dry nitrogen enters the internal closed heat-preserving liquid nitrogen barrel 12 through the dry nitrogen input hole 3, enters the operation desk outer cover 8 through the operation desk air outlet hole 9 after being cooled by liquid nitrogen in the internal closed heat-preserving liquid nitrogen barrel 12, fills the operation desk space, maintains the temperature around a sample to be detected to be-150 ℃, and is finally discharged from the oblique square air outlet hole 7;
The lower part of the plate-shaped copper block 15 with the groove is arranged in a hole formed in the upper assembly cover plate 11, and the upper part of the plate-shaped copper block 15 with the groove is higher than the upper assembly cover plate 11 and is arranged in the space of the operating platform; the thermocouple is inserted into the test bench through the thermocouple insertion port 10 and sleeved on the top of the middle bulge of the plate-shaped copper block 15 with the groove so as to measure the temperature of the sample 17 to be measured; the heating ring is sleeved at the bottom of the middle bulge of the plate-shaped copper block 15 with the groove; the multi-layer dumbbell-shaped heat conducting structure 13 is arranged inside the sealed heat-insulating liquid nitrogen barrel 12, and the multi-layer dumbbell-shaped heat conducting structure 13 is connected with the plate-shaped copper block 15 with the groove through the heat conducting connecting rod 14, so that heat is conveniently transmitted;
The sample testing system to be tested comprises a rocker probe 4 and a transfer rack wire-fixing device 6; the transfer frame wire-fixing device 6 is a junction of external voltage, a wire is fixed on the transfer frame wire-fixing device 6, wherein an anode wire is connected with the rocker probe 4, and a cathode wire passes through the threading hole 5 and is connected with the plate-shaped copper block 15 with the groove to provide voltage for testing a sample to be tested;
The rocker probe 4 is used as an upper electrode, and a plate-shaped copper block 15 with a groove is used as a lower electrode; the sample 17 to be measured is placed between the rocker probe 4 and the grooved plate-like copper block 15.
The second embodiment is as follows: the present embodiment differs from the specific embodiment in that: the base 1, the assembly vertical plate 2, the operation desk outer cover 8 and the internal sealing heat preservation liquid nitrogen barrel 12 are made of polytetrafluoroethylene materials. The other steps are the same as in the first embodiment.
And a third specific embodiment: this embodiment differs from the first or second embodiment in that: the internal closed heat-insulating liquid nitrogen barrel 12 is a barrel with the diameter of 10cm and the height of 10cm, the upper cover of the barrel is provided with three reserved holes, and the holes on two sides are respectively communicated with the dry nitrogen input hole 3 and the air outlet hole 9 of the operating platform; the thermally conductive connecting rod 14 passes through the middle aperture. The other steps are the same as those of the first or second embodiment.
The specific embodiment IV is as follows: one difference between this embodiment and the first to third embodiments is that: the multi-layer dumbbell-shaped heat conducting structure 13, the heat conducting connecting rod 14 and the plate-shaped copper block 15 with grooves are made of copper. The other steps are the same as those of the first to third embodiments.
Fifth embodiment: one to four differences between the present embodiment and the specific embodiment are: the rocker probe 4 is a rod-shaped conductor, the diameter is 1.7mm, the length is 30mm, the weight is 0.44g, the material is copper, the contact is a plane or a hemispherical surface, and the pressure applied to a sample to be tested is 0N-10N. Other steps are the same as those of the first to fourth embodiments.
Specific embodiment six: the present embodiment differs from the first to fifth embodiments in that: the adapter bracket wire-fixing device 6 is made of copper. Other steps are the same as those of the first to fifth embodiments.
Seventh embodiment: one difference between the present embodiment and the first to sixth embodiments is that: the sample 17 to be measured is made of ferroelectric ceramic or piezoelectric ceramic, and the thickness is 0.05 mm-30 mm. Other steps are the same as those of embodiments one to six.
Eighth embodiment: one difference between the present embodiment and the first to seventh embodiments is that: the heating ring is an alumina annular heating ring, the inner diameter of the heating ring is 22mm, the outer diameter is 40mm, and the thickness is 1mm. The other steps are the same as those of embodiments one to seven.
Detailed description nine: one difference between the present embodiment and the first to seventh embodiments is that: the operating platform has a simple structure and does not need a vacuum pump system. Other steps are the same as those of embodiments one to eight.
The following examples are used to verify the benefits of the present invention:
Example 1: the low-temperature electrical performance test board for the small sample comprises a temperature control system and a sample test system to be tested;
The temperature control system comprises an assembly lower base 1, 4 assembly risers 2, a dry nitrogen input hole 3, a threading hole 5, an oblique square air outlet hole 7, an operation desk outer cover 8, an operation desk air outlet hole 9, a thermocouple insertion port 10, an assembly upper cover plate 11, an internal closed heat-insulating liquid nitrogen barrel 12, a multi-layer dumbbell-shaped heat conducting structure 13, a heat conducting connecting rod 14, a plate-shaped copper block 15 with a groove and an operation desk cavity upper cover 16;
the base 1 and the upper assembly cover plate 11 are both rectangular; screw holes 3 are formed in the base 1, the assembly upper cover plate 11 and the 4 assembly vertical plates 2; 4 assembly vertical plates 2 are connected into a frame through screw holes 3 in a bolt mode, and then are connected with a base 1 and an assembly upper cover plate 11 through screw holes 3 in a bolt mode to form a test bench;
The assembly upper cover plate 11 is provided with a dry nitrogen input hole 3, a thermocouple insertion port 10 and an operation desk outer cover 8; a PVC pipe passes through the dry nitrogen input hole 3 to convey the dry nitrogen into the internal sealed heat-preserving liquid nitrogen barrel 12, so that the internal positive pressure is maintained in the experimental process; the operation table outer cover 8 is arranged at the center of the upper surface of the assembly upper cover plate 11, an operation table cavity upper cover 16 is arranged on the operation table outer cover 8, an oblique square air outlet hole 7 is arranged at the center of the operation table outer cover 8, and an operation table air outlet hole 9 is arranged outside the oblique square air outlet hole 7; the oblique square air outlet hole 7 is communicated with the internal closed heat-preserving liquid nitrogen barrel 12, dry nitrogen enters the internal closed heat-preserving liquid nitrogen barrel 12 through the dry nitrogen input hole 3, enters the operation desk outer cover 8 through the operation desk air outlet hole 9 after being cooled by liquid nitrogen in the internal closed heat-preserving liquid nitrogen barrel 12, fills the operation desk space, maintains the temperature around a sample to be detected to be-150 ℃, and is finally discharged from the oblique square air outlet hole 7;
The lower part of the plate-shaped copper block 15 with the groove is arranged in a hole formed in the upper assembly cover plate 11, and the upper part of the plate-shaped copper block 15 with the groove is higher than the upper assembly cover plate 11 and is arranged in the space of the operating platform; the thermocouple is inserted into the test bench through the thermocouple insertion port 10 and sleeved on the top of the middle bulge of the plate-shaped copper block 15 with the groove so as to measure the temperature of the sample 17 to be measured; the heating ring is sleeved at the bottom of the middle bulge of the plate-shaped copper block 15 with the groove; the multi-layer dumbbell-shaped heat conducting structure 13 is arranged inside the sealed heat-insulating liquid nitrogen barrel 12, and the multi-layer dumbbell-shaped heat conducting structure 13 is connected with the plate-shaped copper block 15 with the groove through the heat conducting connecting rod 14, so that heat is conveniently transmitted;
The sample testing system to be tested comprises a rocker probe 4 and a transfer rack wire-fixing device 6; the transfer frame wire-fixing device 6 is a junction of external voltage, a wire is fixed on the transfer frame wire-fixing device 6, wherein an anode wire is connected with the rocker probe 4, and a cathode wire passes through the threading hole 5 and is connected with the plate-shaped copper block 15 with the groove to provide voltage for testing a sample to be tested;
The rocker probe 4 is used as an upper electrode, and a plate-shaped copper block 15 with a groove is used as a lower electrode; the sample 17 to be measured is placed between the rocker probe 4 and the plate-shaped copper block 15 with the groove;
the base 1, the assembly vertical plate 2, the operating platform outer cover 8 and the internal closed heat-insulating liquid nitrogen barrel 12 are made of polytetrafluoroethylene materials;
The internal closed heat-insulating liquid nitrogen barrel 12 is a barrel with the diameter of 10cm and the height of 10cm, the upper cover of the barrel is provided with three reserved holes, and the holes on two sides are respectively communicated with the dry nitrogen input hole 3 and the air outlet hole 9 of the operating platform; the thermally conductive connecting rod 14 passes through the middle hole;
The multi-layer dumbbell-shaped heat conducting structure 13, the heat conducting connecting rod 14 and the plate-shaped copper block 15 with the groove are made of copper;
The rocker probe 4 is a bar-shaped conductor, has the diameter of 1.7mm, the length of 30mm, the weight of 0.44g, the material of copper and the contact of hemispherical surface, and the pressure applied to the sample to be tested is below 10N, so that the damage to the sample to be tested is avoided;
the adapter bracket wire-fixing device 6 is made of copper;
The sample 17 to be measured is made of ferroelectric ceramic or piezoelectric ceramic, and the thickness is 0.2mm;
The heating ring is an alumina annular heating ring, the inner diameter of the heating ring is 22mm, the outer diameter is 40mm, and the thickness is 1mm.
FIG. 1 is a top view of a small sample low temperature electrical performance test bench according to the present invention;
FIG. 2 is a cross-sectional view taken along line A-A' of FIG. 1;
fig. 3 is a schematic structural view of a plate-shaped copper block with grooves;
FIG. 4 is a photograph of a heating ring;
The PVC pipe, thermocouple, heating ring are not shown in fig. 1 and 2.
It is expected that the grooved plate-like copper block 15 could be cooled to 110K within 3 minutes by feeding liquid nitrogen into the internally closed insulated liquid nitrogen tank 12 of example 1, and that the tank would boil all over the last 10 minutes, so that the device could be held at a low temperature of 110K for 10 minutes without additional feeding of liquid nitrogen. After cooling the grooved plate-shaped copper block 15 to a low temperature, it is possible to stabilize in the range of 1K for at least 3 minutes by controlling the temperature at-150℃to 80℃by a heating ring at a rate of 5.+ -. 1K/min or more.
The ferroelectric test was performed on a thin sample having a thickness of 100 μm to 200 μm using a small sample low temperature electric property test bench of example 1 at room temperature, and smooth completion of the test was ensured by using the rocker probe 4. However, the method of connecting electrodes using wire bonding or spring probes causes local damage to the surface of the sample or excessive pressure to cause breakage, and thus the test cannot be performed.
The dry nitrogen introduced in example 1 has exhausted air before testing, so that the sample to be tested is in a full dry nitrogen protection environment, and the problem that high voltage cannot be loaded is avoided. And when no dry nitrogen is added for purging, the test is carried out at low temperature, and the water vapor in the sample cavity of the operation table is liquefied and solidified, so that the anode and the cathode of the power supply are easily conducted and cannot load voltage due to the fact that liquefied water drops or solidified ice particles contain impurities, and the low-temperature test cannot be completed.
Claims (9)
1. The small sample low-temperature electrical performance test bench is characterized by comprising a temperature control system and a sample test system to be tested;
The temperature control system comprises an assembly lower base (1), 4 assembly risers (2), a nitrogen input hole (3), a threading hole (5), an oblique square air outlet hole (7), an operation table outer cover (8), an operation table air outlet hole (9), a thermocouple insertion port (10), an assembly upper cover plate (11), an internal closed heat insulation liquid nitrogen barrel (12), a multi-layer dumbbell-shaped heat conduction structure (13), a heat conduction connecting rod (14), a plate-shaped copper block (15) with a groove and an operation table cavity upper cover (16);
The base (1) and the upper assembly cover plate (11) are both rectangular; screw holes (3) are formed in the base (1), the upper assembly cover plate (11) and the 4 assembly vertical plates (2); 4 assembly vertical plates (2) are connected into a frame through screw holes (3) in a bolt mode, and then are connected with a base (1) and an assembly upper cover plate (11) through screw holes (3) in a bolt mode to form a test board;
The assembly upper cover plate (11) is provided with a nitrogen input hole (3), a thermocouple insertion opening (10) and an operation desk outer cover (8); a PVC pipe passes through the nitrogen input hole (3) to convey nitrogen into the internal sealed heat-preserving liquid nitrogen barrel (12), so that internal positive pressure is maintained in the experimental process; the operation table outer cover (8) is arranged at the center of the upper surface of the assembly upper cover plate (11), an operation table cavity upper cover (16) is arranged on the operation table outer cover (8), an oblique square air outlet hole (7) is arranged at the center of the operation table outer cover (8), and an operation table air outlet hole (9) is arranged outside the oblique square air outlet hole (7); the oblique square air outlet hole (7) is communicated with the internal closed heat-preserving liquid nitrogen barrel (12), nitrogen enters the internal closed heat-preserving liquid nitrogen barrel (12) through the nitrogen input hole (3), is cooled by liquid nitrogen in the internal closed heat-preserving liquid nitrogen barrel (12), enters the operation desk outer cover (8) through the operation desk air outlet hole (9), fills the operation desk space, maintains the temperature around a sample to be detected to be-150 ℃, and is finally discharged from the oblique square air outlet hole (7);
The lower part of the plate-shaped copper block (15) with the groove is arranged in a hole formed in the upper assembly cover plate (11), and the upper part of the plate-shaped copper block (15) with the groove is higher than the upper assembly cover plate (11) and is arranged in the space of the operating platform; the thermocouple is inserted into the test bench through the thermocouple insertion port (10) and sleeved on the top of the middle bulge of the plate-shaped copper block (15) with the groove so as to measure the temperature of the sample (17) to be measured; the heating ring is sleeved at the bottom of the middle bulge of the plate-shaped copper block (15) with the groove; the multi-layer dumbbell-shaped heat conducting structure (13) is arranged inside the internally-sealed heat-insulating liquid nitrogen barrel (12), and the multi-layer dumbbell-shaped heat conducting structure (13) is connected with the plate-shaped copper block (15) with the groove through the heat conducting connecting rod (14) so as to facilitate heat transmission;
The sample testing system to be tested comprises a rocker probe (4) and a transfer rack wire-fixing device (6); the transfer frame wire-fixing device (6) is a junction of external voltage, a wire is fixed on the transfer frame wire-fixing device (6), wherein an anode wire is connected with the rocker probe (4), and a cathode wire passes through the threading hole (5) to be connected with the plate-shaped copper block (15) with the groove, so that voltage is provided for testing a sample to be tested;
the rocker type probe (4) is used as an upper electrode, and a plate-shaped copper block (15) with a groove is used as a lower electrode; the sample (17) to be measured is placed between the rocker probe (4) and the plate-shaped copper block (15) with the groove.
2. The small sample low-temperature electrical property test bench according to claim 1, wherein the base (1), the assembling vertical plate (2), the operating platform outer cover (8) and the internal sealing heat preservation liquid nitrogen barrel (12) are made of polytetrafluoroethylene materials.
3. The low-temperature electrical property test stand for small samples according to claim 1, wherein the internal closed heat-preservation liquid nitrogen barrel (12) is a barrel with the diameter of 10cm and the height of 10cm, the upper cover of the barrel is provided with three reserved holes, and the holes on two sides are respectively communicated with the nitrogen input hole (3) and the air outlet hole (9) of the operating platform; a thermally conductive connecting rod (14) passes through the intermediate aperture.
4. The small sample low-temperature electrical property test bench according to claim 1, wherein the multi-layer dumbbell-shaped heat conducting structure (13), the heat conducting connecting rod (14) and the plate-shaped copper block (15) with grooves are made of copper.
5. The low-temperature electrical property test bench for small samples according to claim 1, wherein the rocker-type probe (4) is a rod-shaped conductor, the diameter is 1.7mm, the length is 30mm, the weight is 0.44g, the material is copper, the contact is a plane or hemispherical surface, and the pressure applied to a sample to be tested is 0N-10N.
6. The small sample low-temperature electrical property test bench according to claim 1, wherein the adapter bracket wire-fixing device (6) is made of copper.
7. The low-temperature electrical property test stand for small samples according to claim 1, wherein the sample (17) to be tested is made of ferroelectric ceramic or piezoelectric ceramic and has a thickness of 0.05 mm-30 mm.
8. The low-temperature electrical property test stand for the small sample according to claim 1, wherein the heating ring is an alumina annular heating ring, the inner diameter of the heating ring is 22mm, the outer diameter is 40mm, and the thickness is 1mm.
9. The small sample low-temperature electrical property test bench according to claim 1, wherein said operation bench has a simple structure without a vacuum pump system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410334832.0A CN118033292A (en) | 2024-03-22 | 2024-03-22 | Low-temperature electrical property test board for small sample |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410334832.0A CN118033292A (en) | 2024-03-22 | 2024-03-22 | Low-temperature electrical property test board for small sample |
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|---|---|
| CN118033292A true CN118033292A (en) | 2024-05-14 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202410334832.0A Pending CN118033292A (en) | 2024-03-22 | 2024-03-22 | Low-temperature electrical property test board for small sample |
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| Country | Link |
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| CN (1) | CN118033292A (en) |
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- 2024-03-22 CN CN202410334832.0A patent/CN118033292A/en active Pending
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