CN118032287A - Optical measurement device, optical measurement method and related device - Google Patents

Abstract

The embodiment of the application discloses an optical measurement device, a defocus amount measurement method and a related device, wherein the optical measurement device comprises: a first lens, a second lens, a plane mirror, a variable focal length element, a first collimating element, a beam splitter, and a photosensor; the light beam emitted by the light source passes through the spectroscope, the variable focal length element and the first collimating element and then passes through the second lens, wherein the first collimating element collimates the light beam into first parallel light, the second lens focuses the first parallel light on the plane mirror, the first lens collimates the light passing through the plane mirror into second parallel light, and the second parallel light is converged on the surface of an object to be detected through the optical converging element of the laser head or the optical converging element independent of the laser head; light source measuring light reflected by the surface of the object to be measured reversely enters the optical measuring equipment through the optical converging element, and passes through the first lens, the plane mirror, the second lens, the first collimating element, the variable focal length element and the spectroscope to the photoelectric sensor. The method is beneficial to improving the accuracy of the measured defocus.

Description

Optical measurement device, optical measurement method and related device

Technical Field

The present application relates to the field of laser processing technologies, and in particular, to an optical measurement device, an optical measurement method, and a related apparatus.

Background

In recent years, laser processing has been used by more and more processing enterprises, and has become a standard method in manufacturing workpieces. The laser confocal measurement method is widely applied to laser processing defocusing detection due to the advantages of high precision, high resolution and the like.

The principle of the laser confocal measurement method is shown in fig. 1, a light source 30 is connected to an optical fiber circulator 28 through a third optical fiber 43, then connected to a laser zooming module 80 through a second optical fiber 42 and an optical fiber coupling point 27 to generate a laser beam 70, the laser beam 70 is collimated into parallel light through a first collimating element 22, the parallel light passes through a variable focusing element 21 to a second lens 23a, the laser beam is focused on a plane mirror 24 through the second lens 23a, and then is re-collimated through a first lens 23b, and is focused and acted on the surface of a workpiece through a turning back lens 12 and an optical converging element 13 in the laser head. The laser is reflected on the surface of the workpiece, the reflected light enters the laser zooming module 80 through the optical converging element 13 and the foldback lens 12, is converged to the optical fiber coupling point 27 through the first lens 23b, the plane mirror 24, the second lens 23a, the variable focusing element 21 and the first collimating element 22 in the laser zooming module 80, and is transmitted to the photoelectric sensor 26 through the second optical fiber 42, the optical fiber circulator 28 and the first optical fiber 41. When the working distance of the laser welding system is determined, the focal length of the laser zooming module 80 is adjusted in the range of the minimum focal length and the maximum focal length, and when the laser focal point is positioned on the surface of the workpiece, the light intensity amplitude of the light signal detected by the photoelectric sensor 26 is the maximum, and at this time, the working distance of the laser welding system is the distance between the laser head and the surface of the object to be measured.

In the above process, the disturbance signal is introduced due to the jitter of the second optical fiber 42 and/or the first optical fiber 41, resulting in the inaccuracy of the light intensity signal detected by the photosensor 26, and thus the inaccuracy of the determined defocus amount of the laser welding system.

Disclosure of Invention

The application provides optical measurement equipment, an optical measurement method and a related device, which are beneficial to improving the precision of the defocus amount of measurement.

The application is realized by adopting the following technical scheme.

In a first aspect, an embodiment of the present application provides an optical measurement device, including: the device comprises a variable focal length module, a measuring module and a light source, wherein the variable focal length module comprises a first lens, a second lens, a plane mirror, a variable focal length element and a first collimating element; the measuring module comprises a spectroscope and a photoelectric sensor;

The light beam emitted by the light source passes through the spectroscope, the variable focal length element and the first collimating element and then passes through the second lens, wherein the first collimating element collimates the light beam into first parallel light, the second lens focuses the first parallel light on the plane mirror, the first lens collimates the light passing through the plane mirror into second parallel light, and the second parallel light is converged on the surface of an object to be detected through the optical converging element of the laser head or the optical converging element independent of the laser head; light source measuring light reflected by the surface of the object to be measured reversely enters the optical measuring equipment through the optical converging element, and passes through the first lens, the plane mirror, the second lens, the first collimating element, the variable focal length element and the spectroscope to the photoelectric sensor.

It can be seen that, compared with the prior art, the measurement module does not comprise an optical fiber coupling point and an optical fiber circulator, so that optical fiber connection is not required to be introduced, interference signals are prevented from being introduced due to shaking of optical fibers, the situation that the light intensity signals detected by the photoelectric sensor are inaccurate is avoided, and the accuracy of the follow-up defocusing amount determined based on the light intensity value is improved.

With reference to the first aspect, in one possible implementation, the variable focusing element and the first collimating element are located between the beam splitter and the second lens, wherein the variable focusing element is before the first collimating element or the collimating element is before the variable focusing element. In other words, the position of the variable focusing element and the position of the first collimating element are interchangeable. By the arrangement mode, the optical element in the optical measurement device is more compact, and the volume of the optical measurement device is reduced.

With reference to the first aspect, in one possible implementation manner, the beam splitter is one or more of a plane mirror, a beam splitting prism, an intensity beam splitter, or a polarization beam splitter.

With reference to the first aspect, in one possible implementation, the variable focusing element is a liquid lens.

With reference to the first aspect, in one possible implementation manner, the first lens and the second lens are convex lenses with the same focal length, a distance between the first lens and the second lens is within a distance range, a difference between an upper limit of the distance range and twice of the focal length of the first lens is smaller than a preset value, and a difference between twice of the focal length of the first lens and a lower limit of the distance range is smaller than the preset value. In other words, the distance between the first lens and the second lens may be twice the focal length of the first lens, or may be slightly larger than twice the distance between the first lens and the second lens, or may be slightly smaller than twice the distance between the first lens and the second lens. The focal point of the first lens and/or the second lens is arranged between the two side surfaces of the plane mirror.

In a second aspect, an embodiment of the present application provides an optical measurement method, and an industrial computer. The industrial control computer executes the following operations:

Acquiring a first light intensity value, a second light intensity value and a third light intensity value, wherein the first light intensity value and the second light intensity value are light intensity values of light reflected by a light source through the left plane and the right plane of a plane mirror in the optical measurement device according to any one of the first aspect, and the third light intensity value is the light intensity value of the light source reflected by the surface of the object to be measured after the light source irradiates the surface of the object to be measured through the optical measurement device according to any one of the first aspect and is acquired by a photoelectric sensor in a variable focal length module in the optical measurement device according to any one of the first aspect; acquiring a first distance and a second distance, and determining a third distance based on a third light intensity value and a relation table of the light intensity value and the distance, wherein the first distance is the distance between the left plane of the plane mirror and the reference object, the second distance is the distance between the right plane of the plane mirror and the reference object, and the third distance is the distance between an imaging point of the first lens and the reference object when the focal length of the liquid lens is changed, wherein the imaging point of the first lens is a focusing point optical object image corresponding point where second parallel light is converged on the surface of the object to be measured; and determining the distance between the focal point of the optical converging element and the surface of the object to be measured when the light source is incident on the surface of the object to be measured through the optical measuring device and the laser head shown in fig. 2a or 2b based on the first distance, the second distance and the third distance.

The distance between the focal point of the optical converging element and the surface of the object to be measured is the defocus amount of the laser head when the surface of the object to be measured is processed by the laser head.

By measuring the light intensity value based on the optical measurement device according to any one of the first aspect, an accurate first distance, second distance, and third distance can be obtained, and an accurate defocus amount can be obtained based on the accurate first distance, second distance, and third distance.

Optionally, the reference is a light source, a main surface of the first lens, a main surface of the second lens or other devices in the optical measurement apparatus according to the first aspect.

With reference to the second aspect, in one possible implementation, the defocus amount of the laser head isWherein, the S1 and the S2 are respectively a first distance and a second distance, and S is a third distance; and 2L is the distance between the left plane and the right plane of the plane mirror and imaging under an optical system consisting of the optical converging element, the first lens and the optical converging element.

With reference to the second aspect, in one possible implementation manner, the method of this embodiment further includes:

Before laser processing, the industrial computer compares the defocusing amount of the laser head with a standard defocusing amount range, and if the defocusing amount of the laser head is within the standard defocusing amount range, the defocusing amount of the laser head is adopted to process the object to be detected; and if the defocus amount of the laser head is not in the standard defocus amount range, the industrial control computer adjusts the distance between the laser head and the surface of the object to be measured until the defocus amount of the laser head is in the standard defocus amount range.

Before laser processing is carried out on a workpiece, focus measurement is carried out, whether the defocus amount of the laser head is qualified or not is determined, if the measurement result is qualified, laser processing is carried out, if the measurement result is unqualified, the height position of the laser head or a standard part to be measured is adjusted until the defocus amount measurement result is qualified, and then laser processing is carried out, so that the condition that the laser processing quality is unqualified due to unqualified defocus amount can be effectively avoided.

With reference to the second aspect, in one possible implementation manner, the method of this embodiment further includes:

The industrial control computer acquires a reference electric signal, wherein the reference electric signal is an electric signal corresponding to an optical signal radiated by a standard component with qualified processing quality during processing; the method comprises the steps that an industrial control computer obtains a plurality of electric signals corresponding to optical signals radiated by a standard component when the standard component is processed under a plurality of determined first defocus amounts, the plurality of electric signals correspond to the plurality of determined first defocus amounts, and obtains a plurality of second defocus amounts from the plurality of determined first defocus amounts based on the plurality of electric signals and a reference electric signal, wherein the second defocus amounts are defocus amounts matched with the reference electric signal and corresponding electric signals in the plurality of determined first defocus amounts; the industrial control computer determines a standard defocus amount range based on the plurality of second defocus amounts, wherein the upper limit and the lower limit of the standard defocus amount range are the maximum value and the minimum value of the plurality of second defocus amounts.

In a third aspect, an embodiment of the present application provides an industrial personal computer, including an obtaining unit and a determining unit. The acquisition unit and the determination unit are adapted to implement the method provided by any one of the second aspects.

In a fourth aspect, an embodiment of the present application provides an industrial control computer, including: and a processor connected to a memory for storing a computer program, the processor being configured to execute the computer program stored in the memory, to cause the industrial personal computer to perform the method as provided in any one of the second aspects.

In a fifth aspect, an embodiment of the present application provides an optical measurement system comprising a laser head, an optical measurement device according to any one of the first aspects, and an industrial control computer, wherein the industrial control computer is configured to perform the method according to any one of the second aspects.

In a sixth aspect, embodiments of the present application provide a computer-readable storage medium storing a computer program that causes a computer to perform the method as provided in any one of the second aspects.

In a seventh aspect, embodiments of the present application provide a computer program product comprising a non-transitory computer readable storage medium storing a computer program, the computer being operable to cause a computer to perform the method according to the second aspect.

It will be appreciated that the industrial personal computer according to the third and fourth aspects, the laser processing control system according to the fifth aspect, the computer storage medium according to the sixth aspect or the computer program product according to the seventh aspect provided above are each adapted to implement the method provided in any one of the first aspects. Therefore, the advantages achieved by the method can be referred to as the advantages of the corresponding method, and will not be described herein.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the embodiments of the present invention will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention and that other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic diagram of a laser confocal measurement method.

Fig. 2a is a schematic diagram of a system structure according to an embodiment of the present application.

Fig. 2b is a schematic diagram of another system structure according to an embodiment of the present application.

Fig. 3a is a schematic diagram of a light intensity signal collected by the photosensor.

Fig. 3b is a schematic diagram of another light intensity signal collected by the photosensor.

Fig. 4 is a schematic flow chart of an optical measurement method according to an embodiment of the present application.

Fig. 5 is a schematic diagram of another system structure according to an embodiment of the present application.

Fig. 6 is a schematic structural diagram of an industrial personal computer according to an embodiment of the present application.

Fig. 7 is a schematic structural diagram of another industrial personal computer according to an embodiment of the present application.

Detailed Description

The following description of the embodiments of the present application will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present application, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.

The terminology used in the embodiments of the application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used in the examples of the application, the description of the drawings, and the claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It should be understood that the term "and/or" as used herein is merely one relationship describing the association of the associated objects, meaning that there may be three relationships, e.g., a and/or B, may represent: a exists alone, A and B exist together, and B exists alone. In addition, the character "/" herein generally indicates that the front and rear associated objects are an "or" relationship. It should be understood that although the terms "first," "second," and the like may be used in embodiments of the present application, the terms "first," "second," and the like do not denote any order, quantity, or importance, but rather are used to distinguish one element from another. Likewise, the terms "a" or "an" and the like do not denote a limitation of quantity, but rather denote the presence of at least one. The term "plurality" in the embodiments of the present application means greater than or equal to two.

Referring to fig. 2a, fig. 2a is a schematic diagram of a system structure according to an embodiment of the present application. As shown in fig. 2a, the system comprises a laser head 10, an optical measuring device 20 and an industrial computer 40.

The laser head 10 comprises a second collimating element 11, a turning back lens 12 and an optical converging element 13. Optionally, the laser head 10 further comprises a vibrating mirror, not illustrated in fig. 2a or 2 b. By introducing the vibrating mirror into the laser head, the defocusing amount can be ensured to be the defocusing amount corresponding to the processing part during processing, so that the processing quality qualification rate of the processing part is ensured. And because of the flexibility of the vibrating mirror, not only the defocus amount corresponding to the part can be measured, but also the defocus amount corresponding to the vicinity of the processing part can be measured.

The optical measuring device 20 comprises a variable focal length module 50, a measuring module 60 and a light source 30, it being understood that the light source 30 may be a laser light source or an LED light source.

Alternatively, as shown in FIG. 2a, the measurement module 60 includes a beam splitter 25 and a photosensor 26, or as shown in FIG. 2b, the measurement module 60 includes a fiber coupling point 27, a fiber circulator 28, and a photosensor 26. The variable focal length module 50 includes a first lens 23b, a second lens 23a, a plane mirror 24, a variable focal length element 21, and a first collimating element 22. Wherein the first lens 23b and the second lens 23a are capable of changing the magnification of the light beam. The plane mirror 24 has a certain proportion of transmission and reflection. The focal length variation of the variable focal length element 21 is controllable and periodic.

In one example, the first lens 23b and the second lens 23a are each a double cemented achromat with a focal length of 19mm, and the beam magnification is 1.

In one example, the flat mirror 24 is a flat piece of quartz glass without a coating, with 4% reflectivity on each side, and the thickness of the flat mirror 24 is 1.5mm.

In one example, the planar mirror 24 is located between the first lens 23b and the second lens 23a, the first collimating element 22 is located between the second lens 23a and the variable focusing element 21, and the variable focusing element 21 is located between the first collimating element 22 and the measurement module 60. Specifically, the measurement module 60 shown in fig. 2a includes a beam splitter 25 and a photoelectric sensor 26, and the variable focusing element 21 is located between the first collimating element 22 and the measurement module 60, specifically, the variable focusing element 21 is located between the first collimating element 22 and the beam splitter 25. The measurement module 60 shown in fig. 2b comprises a fiber coupling point 27, a fiber ring 28 and a photoelectric sensor 26, and the positioning of the variable focusing element 21 between the first collimating element 22 and the measurement module 60 means in particular that the variable focusing element 21 is positioned between the first collimating element 22 and the fiber ring 28. Compared with the prior art that the variable focusing element 21 is positioned between the first collimating element 22 and the second lens 23a, the variable focusing element 21 is arranged between the first collimating element 22 and the measuring module 60, so that the optical elements in the optical measuring device 20 are more compact, and the volume of the optical measuring device 20 is reduced. And compared with the prior art, the measuring module 60 does not comprise the optical fiber coupling point 27 and the optical fiber circulator 28, so that optical fiber connection is not required to be introduced, the situation that an interference signal is introduced due to the shake of an optical fiber, so that an inaccurate light intensity signal detected by the photoelectric sensor 26 occurs is avoided, and the accuracy of the follow-up defocusing amount determined based on the light intensity value is improved.

In one example, the variable focal length element 21 is a liquid lens. The focal length of the liquid lens is adjustable, depending on the magnitude of the input current.

Alternatively, the plane mirror 24 is a plane mirror, a beam splitter prism, an intensity beam splitter, a polarization beam splitter, or other optical devices, which are not limited herein.

Optionally, the optical measurement device 20 further comprises a light source 30.

As shown in fig. 2a, the light beam emitted by the light source 30 passes through the beam splitter 25, the variable focusing element 21 and the first collimating element 22, and then passes through the second lens 23a, the first collimating element 22 collimates the light beam into first parallel light, the second lens 23a focuses the first parallel light on the plane mirror 24, the first lens 23b collimates the light beam passing through the plane mirror 24 into second parallel light, and then the second parallel light is focused on the surface of the object to be measured through the optical converging element 13 in the laser head 10 or independent of the optical converging element 13 outside the laser head; it will be appreciated that the optical convergence element 13 may be a focusing lens or lens group.

The light source measuring light reflected by the surface of the object to be measured reversely enters the optical measuring device 20 through the optical converging element 13, and passes through the first lens 23b, the plane mirror 24, the second lens 23a, the first collimating element 22, the variable focusing element 21 and the spectroscope 25 to the photoelectric sensor 26.

As shown in fig. 2b, the laser beam emitted by the light source 30 enters the variable focal length module 50 through the optical fiber circulator 28 and the optical fiber coupling point 27, the laser beam is collimated into first parallel light by the variable focal length element 21 to the first collimating element 22 in the variable focal length module 50, the first parallel light is focused on the plane mirror 24 by the first collimating element 22, the laser beam collimated into second parallel light by the plane mirror 24 is input to the laser head 10 by the first lens 23b, and then the second parallel light is focused on the surface of the object to be measured through the optical converging element 13 in the laser head 10 or independent of the optical converging element outside the laser head;

The light source measuring light reflected by the surface of the object to be measured reversely enters the optical measuring device 20 through the optical converging element 13, passes through the first lens 23b, the plane mirror 24, the second lens 23a, the first collimating element 22, the variable focusing element 21 to the optical fiber coupling point 27, and passes through the optical fiber circulator 28 to the photoelectric sensor 26.

For the structure shown in fig. 2a or fig. 2b, after the light source 30 emits the laser light, the photosensor 26 will collect two light intensity peaks, which are collected by the photosensor 26 respectively by the left and right plane reflection lasers of the plane mirror 24, as shown in fig. 3a, the corresponding light intensity value of point N in fig. 3a is collected by the photosensor 26 by the left plane reflection lasers of the plane mirror 24; the corresponding intensity value at point P in fig. 3a is collected by the photosensor 26 from the right plane reflected laser light from the mirror 24.

When the focal point of the laser head 10 is located on the surface of the object to be measured, the laser reflected by the surface of the object to be measured is collected by the photoelectric sensor 26 to obtain a new light intensity peak value, and the new light intensity peak value is located between the light intensity value corresponding to the N point and the light intensity value corresponding to the P point in time, as shown in fig. 3b, and the light intensity value corresponding to the S point is the new light intensity peak value.

The industrial control computer 40 acquires the light intensity value acquired by the photoelectric sensor 26. When the industrial control computer 40 obtains the light intensity value corresponding to the S point, it is determined that the distance between the laser head 10 and the surface of the object to be measured is the working distance of the laser head 10. It should be understood that the working distance of the laser head 10 is the distance between the focal point of the laser head 10 and the laser head 10. The industrial control computer 40 can also determine the distance between the focal point of the optical converging element 13 and the surface of the object to be measured when the light source is incident on the surface of the object to be measured through the optical measuring device 20 based on the light intensity value corresponding to the N point, the light intensity value corresponding to the P point and the light intensity value corresponding to the S point, that is, the defocus amount of the laser head when the laser head processes the surface of the object to be measured, and the specific process is described in relation to the embodiment shown in fig. 4, and will not be described herein.

The following describes the aspects of the application in detail.

Referring to fig. 4, fig. 4 is a schematic flow chart of an optical measurement method according to an embodiment of the application. As shown in fig. 4, the method includes:

s401, the industrial control computer acquires a first light intensity value, a second light intensity value and a third light intensity value.

The first light intensity value and the second light intensity value are light intensity values of light reflected by the left plane and the right plane of the plane mirror 24 in fig. 2a or fig. 2b by the photoelectric sensor 26, and the third light intensity value is light intensity value of light reflected by the surface of the object to be measured after the light source irradiates the surface of the object to be measured through the optical measuring device 20 and the laser head 10, and the light source reflected by the surface of the object to be measured is collected by the photoelectric sensor 26 in the measuring module 60 through the laser head and the variable focal length module 50.

In other words, the first light intensity value, the second light intensity value, and the third light intensity value are the light intensity value corresponding to the N point, the light intensity value corresponding to the P point, and the light intensity value corresponding to the S point in fig. 3b, respectively.

S402, the industrial personal computer acquires the first distance and the second distance, and determines a third distance based on a third light intensity value and a corresponding relation table between the light intensity value and the distance.

The first distance is the distance between the left plane of the plane mirror and the reference object, the second distance is the distance between the right plane of the plane mirror and the reference object, and the third distance is the distance between an imaging point of the first lens and the reference object when the focal length of the liquid lens changes, wherein the imaging point of the first lens is a focusing point optical object image corresponding point where the second parallel light is converged on the surface of the object to be measured.

Specifically, the industrial personal computer stores a table of correspondence between light intensity values and distances, where the distances refer to distances between imaging points of the first lens and the reference object. The industrial control computer determines a third distance based on a table of correspondence between the third light intensity value and the distance.

Alternatively, the reference object is the first lens 23b, the second lens 23a or other devices in fig. 2a or fig. 2b, which are not limited herein.

It should be noted that the table of correspondence between the light intensity value and the distance is a correspondence between the third light intensity value set by the processing person based on the history experience and the distance between the imaging point of the first lens and the reference object.

S403, the industrial personal computer determines the defocus amount of the laser head based on the first distance, the second distance and the third distance.

Specifically, the industrial control computer acquires a target optical path; determining a first value based on the target optical path and the third distance; determining a second value based on the first distance, the second distance, and the target optical path; and calculating the defocus amount of the laser head based on the first value, the second value, the first distance and the second distance.

The object optical path is the distance between the left and right planes of the plane mirror and imaging under the optical system composed of the optical converging element 13, the first lens and the turning-back lens 12. As shown in fig. 5, N 'and P' respectively represent imaging of the left and right planes of the plane mirror under the optical system composed of the optical converging element 13, the first lens and the return lens 12, and the target optical path is the distance between N 'and P', and is identified by 2L.

In one example, the defocus amount d of the laser head satisfies the following formula:

Wherein S1 and S2 are a first distance and a second distance respectively, and S is a third distance; 2LS is a first value and L (S1+S2) is a second value. 2L is the target optical path.

Because the first distance, the second distance and the third distance are influenced by the working temperature, when the working temperature changes, the first distance, the second distance and the third distance are increased or reduced simultaneously, the denominator in the formula is set to be 2LS-L (S1+S2), and when the working temperature changes, the 2LS-L (S1+S2) is a relative value and cannot change, so that the defocus d of the laser head calculated based on the formula cannot change due to temperature change, and the precision of the defocus d of the laser head is further ensured.

Before laser processing, determining the defocus amount of a laser head according to the industrial computer, and comparing the defocus amount of the laser head with a standard defocus amount range; if the defocusing amount of the laser head is within the standard defocusing amount range, processing the object to be detected by adopting the defocusing amount of the laser head; if the defocusing amount of the laser head is not in the standard defocusing amount range, the industrial control computer adjusts the distance between the laser head and the surface of the object to be measured until the defocusing amount of the laser head is in the standard defocusing amount range. In one example, the industrial control computer sends indication information to the terminal device of the processing personnel for instructing the processing personnel to adjust the defocus amount of the laser head. In another example, the industrial control computer directly adjusts the defocus amount of the laser head.

In one possible implementation, the standard defocus amount range is obtained by:

The industrial control computer acquires a reference electric signal, wherein the reference electric signal is an electric signal corresponding to an optical signal radiated by a standard component with qualified processing quality during processing; acquiring a plurality of electric signals corresponding to optical signals radiated by a standard component when the standard component is processed under a plurality of determined first defocus amounts, wherein the plurality of electric signals correspond to the plurality of determined first defocus amounts, acquiring a plurality of second defocus amounts from the plurality of determined first defocus amounts based on the plurality of electric signals and a reference electric signal, and the second defocus amounts are defocus amounts matched with the reference electric signal and corresponding electric signals in the plurality of determined first defocus amounts; a standard defocus amount range is determined based on the plurality of second defocus amounts, the upper and lower limits of the standard defocus amount range being maximum and minimum values of the plurality of second defocus amounts.

Specifically, the industrial control computer acquires a plurality of electrical signals corresponding to optical signals radiated by a plurality of standard components when the standard components are processed, and acquires processing results of the standard components; the processing results of the standard components can be determined manually, or the processing results of the standard components can be determined by an industrial control computer based on metallographic images of processing parts of the standard components, or the processing results of the standard components can be determined based on the depth and/or the width of the melting column corresponding to the processing parts. Of course, it may be determined in other ways, not limited herein. The processing result includes qualified processing quality and unqualified processing quality. And the industrial control computer acquires an electric signal corresponding to the optical signal radiated by the standard component with qualified processing quality from the plurality of electric signals based on the processing result, and takes the electric signal as a reference electric signal.

Processing the same standard component under a plurality of determined first defocus amounts by a laser head respectively, and acquiring a plurality of electric signals corresponding to optical signals radiated by the standard component when the standard component is processed under the plurality of determined first defocus amounts by an industrial control computer; the plurality of electrical signals corresponds to the plurality of determined first defocus amounts. The industrial control computer respectively matches the plurality of electric signals with the reference electric signals to determine whether the processing quality of the standard component is qualified under a plurality of determined first defocusing amounts; for example, calculating the similarity between a plurality of electric signals and reference electric signals respectively; and if the similarity is greater than the similarity threshold, determining that the processing quality is qualified. The industrial control computer selects a plurality of second defocus amounts which enable the standard component to be qualified in processing quality from the plurality of determined defocus amounts, and determines a standard defocus amount range based on the plurality of second defocus amounts, wherein the upper limit and the lower limit of the standard defocus amount range are the maximum value and the minimum value in the plurality of second defocus amounts.

According to the method, before laser processing is carried out on a workpiece, focus measurement is carried out, whether the defocusing amount of the laser head is qualified or not is determined, if the measurement result is qualified, laser processing is carried out, if the measurement result is unqualified, the height position of the laser head or a standard part to be tested is adjusted until the defocusing amount measurement result is qualified, and then laser processing is carried out, so that the condition that the laser processing quality is unqualified due to the unqualified defocusing amount can be effectively avoided.

Referring to fig. 6, an embodiment of the present application provides a schematic structural diagram of an industrial personal computer. As shown in fig. 6, the industrial control computer 600 includes:

an obtaining unit 601, configured to obtain a first light intensity value, a second light intensity value, and a third light intensity value, where the first light intensity value and the second light intensity value are light intensity values obtained by collecting light reflected by a light source through two left and right planes of a plane mirror in an optical measurement device as shown in fig. 2a or fig. 2b by a photoelectric sensor, and the third light intensity value is a light intensity value obtained by collecting light reflected by a light source through a laser head and a variable focal length module in an optical measurement device as shown in fig. 2a or fig. 2b by a photoelectric sensor in a measurement module after the light source irradiates the surface of an object to be measured through the optical measurement device as shown in fig. 2a or fig. 2 b; acquiring a first distance and a second distance, wherein the first distance is the distance between the left plane of the plane mirror and the reference object, and the second distance is the distance between the right plane of the plane mirror and the reference object;

The determining unit 602 is configured to determine a third distance based on a third light intensity value and a relationship table between the light intensity value and the distance, where the third distance is a distance between an imaging point of the first lens and the reference object when the focal length of the liquid lens changes, and the imaging point of the first lens is a focal point optical object image corresponding point where the second parallel light is converged on the surface of the object to be measured; the distance between the focal point of the optical converging element 13 and the surface of the object to be measured is determined based on the first distance, the second distance and the third distance when the light source is incident on the surface of the object to be measured via the optical measuring device and the laser head shown in fig. 2a or fig. 2 b.

Wherein the distance between the focal point of the optical converging element 13 and the surface of the object to be measured is the defocus amount of the laser head when the surface of the object to be measured is processed by the laser head

In one possible implementation, the determining unit 602 is specifically configured to:

acquiring a target optical path, wherein the target optical path is the distance between the left plane and the right plane of a plane mirror and imaging under an optical system consisting of an optical converging element 13, a first lens and a turning-back lens 12; determining a first value based on the target optical path and the third distance; determining a second value based on the first distance, the second distance, and the target optical path; and calculating the defocus amount of the laser head based on the first value, the second value, the first distance and the second distance.

Wherein, the defocusing amount of the laser head isWherein, the S1 and the S2 are respectively a first distance and a second distance, and S is a third distance; 2L is the distance between the left and right planes of the plane mirror and imaging under the optical system composed of the optical convergence element 13, the first lens and the optical convergence element 13.

In one possible implementation manner, the determining unit 602 is further configured to, before performing laser processing, compare the defocus amount of the laser head with a standard defocus amount range by using the industrial control computer, and determine to process the object to be detected by using the defocus amount of the laser head if the defocus amount of the laser head is within the standard defocus amount range;

the industrial computer 600 further includes:

And the adjusting unit 603 is configured to adjust the distance between the laser head and the surface of the object to be measured by the industrial computer if the defocus amount of the laser head is not within the standard defocus amount range until the defocus amount of the laser head is within the standard defocus amount range.

In one possible implementation manner, the obtaining unit 601 is further configured to obtain a reference electrical signal, where the reference electrical signal is an electrical signal corresponding to an optical signal radiated by a standard part with qualified processing quality during processing; acquiring a plurality of electrical signals corresponding to optical signals radiated by the standard component when the standard component is processed under a plurality of determined first defocus amounts, wherein the plurality of electrical signals correspond to the plurality of determined first defocus amounts;

the determining unit 602 is further configured to obtain a plurality of second defocus amounts from the plurality of determined first defocus amounts based on the plurality of electrical signals and the reference electrical signal, where the second defocus amounts are defocus amounts in which corresponding electrical signals in the plurality of determined first defocus amounts match the reference electrical signal; a standard defocus amount range is determined based on the plurality of second defocus amounts, the upper and lower limits of the standard defocus amount range being maximum and minimum values of the plurality of second defocus amounts.

Note that the above-described units (the acquisition unit 601, the determination unit 602, and the adjustment unit 603) are configured to perform the relevant steps of the above-described method. Each unit or module in the industrial personal computer 600 may be combined into one or several other units or modules, or some unit(s) or module(s) may be further split into multiple units or modules with smaller functions, which may achieve the same operation without affecting the implementation of the technical effects of the embodiments of the present invention. The above units or modules are divided based on logic functions, and in practical applications, the functions of one unit (or module) may be implemented by a plurality of units (or modules), or the functions of a plurality of units (or modules) may be implemented by one unit (or module).

Based on the description of the method embodiment and the apparatus embodiment, please refer to fig. 7, a schematic structural diagram of an industrial personal computer 700 is further provided in the embodiment of the present invention. The industrial personal computer 700 shown in fig. 7 (the industrial personal computer 700 may be a computer device specifically) includes a memory 701, a processor 702, a communication interface 703, and a bus 704. The memory 701, the processor 702, and the communication interface 703 are connected to each other by a bus 704.

The Memory 701 may be a Read Only Memory (ROM), a static storage device, a dynamic storage device, or a random access Memory (Random Access Memory, RAM).

The memory 701 may store a program, and when the program stored in the memory 701 is executed by the processor 702, the processor 702 and the communication interface 703 are used to perform the respective steps of the optical measurement method of the embodiment of the present application.

The processor 702 may employ a general-purpose central processing unit (Central Processing Unit, CPU), microprocessor, application SPECIFIC INTEGRATED Circuit (ASIC), graphics processor (graphics processing unit, GPU) or one or more integrated circuits for executing associated programs to perform functions required by the elements in the industrial computer 600 of the present application or to perform optical measurement methods of the present application.

The processor 702 may also be an integrated circuit chip with signal processing capabilities. In implementation, the steps of the optical measurement method of the present application may be performed by integrated logic circuitry of hardware in the processor 702 or by instructions in the form of software. The processor 702 may also be a general purpose processor, a digital signal processor (DIGITAL SIGNAL Processing unit, DSP), an Application Specific Integrated Circuit (ASIC), an off-the-shelf programmable gate array (Field Programmable GATE ARRAY, FPGA) or other programmable logic device, discrete gate or transistor logic device, discrete hardware components. The disclosed methods, steps, and logic blocks in the embodiments of the present application may be implemented or performed. A general purpose processor may be a microprocessor or the processor may be any conventional processor or the like. The steps of the method disclosed in connection with the embodiments of the present application may be embodied directly in the execution of a hardware decoding processor, or in the execution of a combination of hardware and software modules in a decoding processor. The software modules may be located in a random access memory, flash memory, read only memory, programmable read only memory, or electrically erasable programmable memory, registers, etc. as well known in the art. The storage medium is located in the memory 701, and the processor 702 reads the information in the memory 701, and combines the hardware thereof to perform the functions required to be performed by the units included in the industrial personal computer 700 according to the embodiment of the present application, or perform the optical measurement method according to the embodiment of the present application.

The communication interface 703 enables communication between the industrial personal computer 700 and other devices or communication networks using a transceiver device such as, but not limited to, a transceiver. For example, data may be acquired through the communication interface 703.

Bus 704 may include a path for transferring information between components of industrial personal computer 700 (e.g., memory 701, processor 702, communication interface 703).

It should be noted that although the industrial personal computer 700 shown in fig. 7 only shows a memory, a processor, and a communication interface, those skilled in the art will appreciate that in the specific implementation, the industrial personal computer 700 also includes other devices necessary to achieve normal operation. Also, as will be appreciated by those skilled in the art, the industrial personal computer 700 may also include hardware devices that perform other additional functions, as desired. Furthermore, those skilled in the art will appreciate that the industrial personal computer 700 may also include only the necessary components to implement embodiments of the present application, and not necessarily all of the components shown in FIG. 7.

The embodiment of the application also provides a chip, which comprises a processor and a data interface, wherein the processor reads the instructions stored in the memory through the data interface so as to realize the optical measurement method.

Optionally, as an implementation manner, the chip may further include a memory, where the memory stores instructions, and the processor is configured to execute the instructions stored on the memory, and when the instructions are executed, the processor is configured to execute the optical measurement method.

Embodiments of the present application also provide a computer-readable storage medium having instructions stored therein, which when run on a computer or processor, cause the computer or processor to perform one or more steps of any of the methods described above.

Embodiments of the present application also provide a computer program product comprising instructions. The computer program product, when run on a computer or processor, causes the computer or processor to perform one or more steps of any of the methods described above.

Those of skill in the art will appreciate that the functions described in connection with the various illustrative logical blocks, modules, and algorithm steps described in connection with the disclosure herein may be implemented as hardware, software, firmware, or any combination thereof. If implemented in software, the functions described by the various illustrative logical blocks, modules, and steps may be stored on a computer readable medium or transmitted as one or more instructions or code and executed by a hardware-based processing unit. Computer-readable media may include computer-readable storage media corresponding to tangible media, such as data storage media, or communication media including any medium that facilitates transfer of a computer program from one place to another (e.g., based on a communication protocol). In this manner, a computer-readable medium may generally correspond to (1) a non-transitory tangible computer-readable storage medium, or (2) a communication medium, such as a signal or carrier wave. Data storage media may be any available media that can be accessed by one or more computers or one or more processors to retrieve instructions, code and/or data structures for implementing the techniques described in this disclosure. The computer program product may include a computer-readable medium.

By way of example, and not limitation, such computer-readable storage media can comprise RAM, ROM, EEPROM, CD-ROM or other optical disk storage, magnetic disk storage or other magnetic storage devices, flash memory, or any other medium that can be used to store desired program code in the form of instructions or data structures and that can be accessed by a computer. Also, any connection is properly termed a computer-readable medium. For example, if the instructions are transmitted from a website, server, or other remote source using a coaxial cable, fiber optic cable, twisted pair, digital Subscriber Line (DSL), or wireless technologies such as infrared, radio, and microwave, then the coaxial cable, fiber optic cable, twisted pair, DSL, or wireless technologies such as infrared, radio, and microwave are included in the definition of medium. It should be understood that the computer-readable storage medium and data storage medium do not include connections, carrier waves, signals, or other transitory media, but are actually directed to non-transitory tangible storage media. Disk and disc, as used herein, includes Compact Disc (CD), laser disc, optical disc, digital Versatile Disc (DVD), and blu-ray disc where disks usually reproduce data magnetically, while discs reproduce data optically with lasers. Combinations of the above should also be included within the scope of computer-readable media.

The instructions may be executed by one or more processors, such as one or more Digital Signal Processors (DSPs), general purpose microprocessors, application Specific Integrated Circuits (ASICs), field programmable logic arrays (FPGAs), or other equivalent integrated or discrete logic circuitry. Thus, the term "processor" as used herein may refer to any of the foregoing structure or any other structure suitable for implementation of the techniques described herein. Additionally, in some aspects, the functions described by the various illustrative logical blocks, modules, and steps described herein may be provided within dedicated hardware and/or software modules configured for encoding and decoding, or incorporated in a combination codec. Moreover, the techniques may be fully implemented in one or more circuits or logic elements.

The techniques of this disclosure may be implemented in a wide variety of devices or apparatuses, including a wireless handset, an Integrated Circuit (IC), or a set of ICs (e.g., a chipset). The various components, modules, or units are described in this disclosure in order to emphasize functional aspects of the devices for performing the disclosed techniques, but do not necessarily require realization by different hardware units. Indeed, as described above, the various units may be combined in an encoded hardware unit in combination with suitable software and/or firmware, or provided by interoperating hardware units, including one or more processors as described above.

It will be clear to those skilled in the art that, for convenience and brevity of description, specific working procedures of the above-described systems, apparatuses and units may refer to specific descriptions of corresponding step procedures in the foregoing method embodiments, and are not repeated herein.

It should be understood that in the description of the present application, "/" means that the associated objects are in a "or" relationship, unless otherwise specified, for example, a/B may represent a or B; wherein A, B may be singular or plural. Also, in the description of the present application, unless otherwise indicated, "a plurality" means two or more than two. "at least one of" or the like means any combination of these items, including any combination of single item(s) or plural items(s). For example, at least one (one) of a, b, or c may represent: a, b, c, a-b, a-c, b-c, or a-b-c, wherein a, b, c may be single or plural. In addition, in order to facilitate the clear description of the technical solution of the embodiments of the present application, in the embodiments of the present application, the words "first", "second", etc. are used to distinguish the same item or similar items having substantially the same function and effect. It will be appreciated by those of skill in the art that the words "first," "second," and the like do not limit the amount and order of execution, and that the words "first," "second," and the like do not necessarily differ. Meanwhile, in the embodiments of the present application, words such as "exemplary" or "such as" are used to mean serving as examples, illustrations or explanations. Any embodiment or design described herein as "exemplary" or "e.g." in an embodiment should not be taken as preferred or advantageous over other embodiments or designs. Rather, the use of words such as "exemplary" or "such as" is intended to present related concepts in a concrete fashion that may be readily understood.

In the several embodiments provided by the present application, it should be understood that the disclosed systems, devices, and methods may be implemented in other manners. For example, the division of the unit is merely a logic function division, and there may be another division manner when actually implemented, for example, a plurality of units or components may be combined or may be integrated into another system, or some features may be omitted or not performed. The coupling or direct coupling or communication connection shown or discussed with each other may be through some interface, device or unit indirect coupling or communication connection, which may be in electrical, mechanical or other form.

The units described as separate units may or may not be physically separate, and units shown as units may or may not be physical units, may be located in one place, or may be distributed over a plurality of network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

In the above embodiments, it may be implemented in whole or in part by software, hardware, firmware, or any combination thereof. When implemented in software, may be implemented in whole or in part in the form of a computer program product. The computer program product includes one or more computer instructions. When loaded and executed on a computer, produces a flow or function in accordance with embodiments of the application, in whole or in part. The computer may be a general purpose computer, a special purpose computer, a computer network, or other programmable apparatus. The computer instructions may be stored in or transmitted across a computer-readable storage medium. The computer instructions may be transmitted from one website, computer, server, or data center to another website, computer, server, or data center by a wired (e.g., coaxial cable, fiber optic, digital subscriber line (digital subscriber line, DSL)), or wireless (e.g., infrared, wireless, microwave, etc.). The computer readable storage medium may be any available medium that can be accessed by a computer or a data storage device such as a server, data center, etc. that contains an integration of one or more available media. The usable medium may be a read-only memory (ROM), or a random-access memory (random access memory, RAM), or a magnetic medium such as a floppy disk, a hard disk, a magnetic tape, a magnetic disk, or an optical medium such as a digital versatile disk (DIGITAL VERSATILEDISC, DVD), or a semiconductor medium such as a Solid State Disk (SSD), or the like.

The foregoing is merely a specific implementation of the embodiment of the present application, but the protection scope of the embodiment of the present application is not limited to this, and any changes or substitutions within the technical scope disclosed in the embodiment of the present application should be covered in the protection scope of the embodiment of the present application. Therefore, the protection scope of the embodiments of the present application shall be subject to the protection scope of the claims.

The apparatus embodiments described above are merely illustrative, wherein the units and modules illustrated as separate components may or may not be physically separate. In addition, some or all of the units and modules can be selected according to actual needs to achieve the purpose of the embodiment scheme. Those of ordinary skill in the art will understand and implement the present invention without undue burden.

The foregoing is merely illustrative of the embodiments of this application and it will be appreciated by those skilled in the art that variations and modifications may be made without departing from the principles of the application, and it is intended to cover all modifications and variations as fall within the scope of the application.

Claims (14)

1. An optical measurement device, characterized in that the optical measurement device comprises: the system comprises a variable focal length module, a measuring module and a light source, wherein the variable focal length module comprises a first lens, a second lens, a plane mirror, a variable focal length element and a first collimating element; the measuring module comprises a spectroscope and a photoelectric sensor;

the light beam emitted by the light source passes through the spectroscope, the variable focal length element and the first collimating element and then passes through the second lens;

the first collimating element collimates the light beam into first parallel light, the second lens focuses the first parallel light on the plane mirror, and after the first lens collimates the light passing through the plane mirror into second parallel light, the second parallel light is converged on the surface of the object to be detected through the optical converging element of the laser head or independent of the optical converging element outside the laser head;

Light source measuring light reflected by the surface of the object to be measured reversely enters the optical measuring equipment through the optical converging element, and reaches the photoelectric sensor through the first lens, the plane mirror, the second lens, the first collimating element, the variable focal length element and the spectroscope.

2. The apparatus of claim 1, wherein the variable focusing element and the first collimating element are located between the beam splitter and the second lens, wherein the variable focusing element is before the first collimating element or the first collimating element is before the variable focusing element.

3. The apparatus of any one of claims 1-2, wherein the beam splitter is one or more of a flat mirror, a beam splitting prism, an intensity beam splitter, or a polarizing beam splitter.

4. A device according to any one of claims 1-3, characterized in that the variable focusing element is a liquid lens.

5. A device according to any one of claims 1-3, characterized in that the first lens and the second lens are convex lenses of the same focal length, the distance between the first lens and the second lens being within a distance range, the difference between the upper limit of the distance range and twice the focal length of the first lens being smaller than a preset value, the difference between the twice the focal length of the first lens and the lower limit of the distance range being smaller than the preset value, the focal point of the first lens and/or the second lens being arranged between the two side surfaces of the plane mirror.

6. An optical measurement method, comprising:

Acquiring a first light intensity value, a second light intensity value and a third light intensity value, wherein the first light intensity value and the second light intensity value are light intensity values of light reflected by a left plane and a right plane of a plane mirror in the optical measurement device according to any one of claims 1-5 by the photoelectric sensor, and the third light intensity value is a light intensity value of light reflected by the surface of the object to be measured by the light source after the light source irradiates the surface of the object to be measured by the optical measurement device according to any one of claims 1-5 and is acquired by the photoelectric sensor in the measurement module by the variable focal length module in the optical measurement device according to any one of claims 1-5;

Acquiring a first distance and a second distance, and determining a third distance based on a third light intensity value and a relation table of the light intensity value and the distance, wherein the first distance is the distance between the left plane of the plane mirror and a reference object, and the second distance is the distance between the right plane of the plane mirror and the reference object; the third distance is a distance between an imaging point of the first lens and the reference object when the focal length of the liquid lens is changed, wherein the imaging point of the first lens is a focusing point optical object image corresponding point where the second parallel light is converged on the surface of the object to be detected;

And determining the distance between the focal point of the optical converging element and the surface of the object to be measured when the light source is incident to the surface of the object to be measured through the optical measuring equipment and the laser head based on the first distance, the second distance and the third distance.

7. The method of claim 6, wherein the distance between the focal point of the optical focusing element and the surface of the object is an amount of defocus of the laser head when the surface of the object is processed by the laser head.

8. The method of claim 7 wherein the defocus amount of the laser head isWherein, the S1 and the S2 are the first distance and the second distance respectively, and the S is the third distance; and 2L is the distance between the left plane and the right plane of the plane mirror and imaging under an optical system consisting of the optical converging element, the first lens and the optical converging element.

9. The method according to any one of claims 6-8, further comprising:

Before laser processing, comparing the defocus amount of the laser head with a standard defocus amount range, and processing the object to be detected by adopting the defocus amount of the laser head if the defocus amount of the laser head is within the standard defocus amount range;

and if the defocus amount of the laser head is not in the standard defocus amount range, adjusting the distance between the laser head and the surface of the object to be measured until the defocus amount of the laser head is in the standard defocus amount range.

10. The method according to claim 9, wherein the method further comprises:

Acquiring a reference electric signal, wherein the reference electric signal is an electric signal corresponding to an optical signal radiated by a standard component with qualified processing quality during processing;

Acquiring a plurality of electrical signals corresponding to optical signals radiated by the standard component when the standard component is processed under a plurality of determined first defocus amounts, wherein the plurality of electrical signals correspond to the plurality of determined first defocus amounts,

Acquiring a plurality of second defocus amounts from the plurality of determined first defocus amounts based on the plurality of electrical signals and the reference electrical signal, wherein the second defocus amounts are defocus amounts in which corresponding electrical signals in the plurality of determined first defocus amounts are matched with the reference electrical signal;

The standard defocus amount range is determined based on the plurality of second defocus amounts, and an upper limit and a lower limit of the standard defocus amount range are a maximum value and a minimum value of the plurality of second defocus amounts.

11. An industrial control computer, comprising:

An obtaining unit, configured to obtain a first light intensity value, a second light intensity value, and a third light intensity value, where the first light intensity value and the second light intensity value are light intensity values that light reflected by a light source through two left and right planes of a plane mirror in the optical measurement device according to any one of claims 1 to 5 is collected by the photoelectric sensor, and the third light intensity value is a light intensity value that light reflected by a surface of an object to be measured after the light source irradiates the surface of the object to be measured through the optical measurement device according to any one of claims 1 to 5 and the laser head, where the light reflected by the surface of the object to be measured is collected by the photoelectric sensor in the measurement module through the laser head and the variable focal length module in the optical measurement device according to any one of claims 1 to 5;

The acquisition unit is also used for acquiring the first distance and the second distance; the first distance is the distance between the left plane of the plane mirror and the reference object, and the second distance is the distance between the right plane of the plane mirror and the reference object;

The determining unit is used for determining a third distance based on a third light intensity value and a relation table of the light intensity value and the distance, wherein the third distance is the distance between an imaging point of the first lens and the reference object when the focal length of the liquid lens is changed, and the imaging point of the first lens is a focusing point optical object image corresponding point where the second parallel light is converged on the surface of the object to be detected; determining a defocus amount of the laser head based on the first distance, the second distance, and the third distance.

12. An industrial personal computer, characterized by comprising a processor, said processor being connected to a memory for storing a computer program, said processor being adapted to execute the computer program stored in said memory, to cause said industrial personal computer to perform the method according to any one of claims 6-10.

13. An optical measurement system, comprising: laser head, optical measuring device according to any of claims 1-5 and industrial control computer, characterized in that the industrial control computer is adapted to perform the method according to any of claims 6-10.

14. A computer readable storage medium, characterized in that the computer readable storage medium stores a computer program, which is executed by a processor to implement the method of any of claims 6-10.