CN118023640A - Deep small hole machining device and method - Google Patents

Abstract

The invention relates to a deep small hole machining device and a deep small hole machining method, wherein the deep small hole machining device comprises a vertical moving mechanism, the vertical moving mechanism is connected with an ultrasonic main shaft assembly, the ultrasonic main shaft assembly is connected with an ultrasonic generator, a punching part is fixed at the bottom end of the ultrasonic main shaft assembly, the punching part comprises a grinding part and an electrode part which are sequentially arranged from top to bottom, a two-shaft linkage mechanism is arranged below the punching part, and the two-shaft linkage mechanism is connected with a workbench for fixing a workpiece.

Description

Deep small hole machining device and method

Technical Field

The invention relates to the technical field of machining, in particular to a deep small hole machining device and method.

Background

The statements herein merely provide background information related to the present disclosure and may not necessarily constitute prior art.

In the field of aerospace gas turbines, a large number of precision parts need to be machined with deep small holes (the ratio of the hole depth to the hole diameter is greater than 5 and the hole diameter is less than 1 mm), which require high surface quality and high precision. Although conventional deep-hole machining methods, such as electric discharge machining, have met the industrial needs to some extent, there are still some limitations. With continuous updating and iteration of high-temperature alloy, more advanced and efficient processing methods are urgently needed to meet the processing requirements of high-precision parts in the aerospace field. As a thermal processing method, electric discharge machining is a method of processing deep pinholes which have defects such as microcracks and recast layers which have a great influence on the surface stress state of the deep pinholes. And the electric spark machining is affected by the discharge gap and electrode loss, so that the precision of the machined hole is difficult to reach higher requirements.

Disclosure of Invention

Aiming at the defects existing in the prior art, the invention aims to provide a deep small hole processing device and method, which can remove defects existing on the surface of a deep small hole and improve the processing quality and the processing precision.

In order to achieve the above object, the present invention is realized by the following technical scheme:

In a first aspect, an embodiment of the invention provides a deep hole processing device, which comprises a vertical moving mechanism, wherein the vertical moving mechanism is connected with an ultrasonic main shaft assembly, the ultrasonic main shaft assembly is connected with an ultrasonic generator, a punching part is fixed at the bottom end of the ultrasonic main shaft assembly, the punching part comprises a grinding part and an electrode part which are sequentially arranged from top to bottom, a two-shaft linkage mechanism is further arranged below the punching part, and the two-shaft linkage mechanism is connected with a workbench for fixing a workpiece.

Optionally, the grinding part comprises a matrix, diamond abrasive particles are electroplated on the peripheral surface of the matrix, and the bottom end of the matrix is fixed with the top end of the solid electrode.

Optionally, the substrate adopts a columnar structure made of tungsten, and the solid electrode adopts a columnar solid red copper electrode.

Optionally, the punching component comprises a rod body, the rod body is divided into a grinding part area and an electrode part area which are arranged up and down, the periphery of the grinding part area is electroplated with diamond abrasive particles to form a grinding part, and the periphery of the electrode part area is sheathed and fixed with an electrode tube to form an electrode part.

Optionally, the rod body adopts a columnar structure made of tungsten, and the electrode tube adopts a copper tube electrode.

Optionally, the ultrasonic spindle assembly is connected with a cooling mechanism, and the ultrasonic spindle assembly is cooled by the cooling mechanism.

Optionally, the cooling mechanism comprises a water pump, a water inlet of the water pump is connected with the water tank through a water pipe, a water outlet of the water pump is connected with a water inlet of the ultrasonic main shaft assembly through a water pipe, and a water outlet of the ultrasonic main shaft assembly is connected with the water tank through a water pipe.

Optionally, the two-axis linkage mechanism comprises a first horizontal moving mechanism, the first horizontal moving mechanism and the second horizontal moving mechanism drive the second horizontal moving mechanism to move along a horizontal first direction, and the second horizontal moving mechanism is connected with the workbench to drive the workbench to move along a horizontal second direction perpendicular to the horizontal first direction.

In a second aspect, an embodiment of the present invention provides a working method of the deep hole processing apparatus according to the first aspect, including the steps of:

The ultrasonic generator works, and the ultrasonic spindle assembly drives the punching component to rotate and simultaneously applies ultrasonic vibration to the punching component;

The punching component in an ultrasonic vibration state moves under the drive of the vertical moving mechanism, and the electrode part of the punching component is used for carrying out electric spark pre-punching on the workpiece;

after the pre-punching is completed, the punching component in an ultrasonic vibration state moves under the drive of the vertical moving mechanism, and meanwhile, the two-axis linkage mechanism drives the workpiece to do circular motion, and the grinding part of the punching component is utilized to conduct rotary-cut grinding on the wall of the pre-punched hole.

Optionally, after pre-punching, the vertical moving mechanism drives the punching component to vertically reciprocate so as to finish multiple rotary cutting grinding.

The beneficial effects of the invention are as follows:

1. the deep small hole processing device comprises a grinding part and an electrode part, wherein the grinding part and the electrode part are arranged from top to bottom, a workbench is arranged below the punching part and is connected with a two-shaft linkage mechanism, the two-shaft linkage mechanism can drive the workbench to do circular motion, during processing, firstly, electric spark pre-punching is carried out by using the electrode part, then, rotary cutting grinding is carried out on the pre-punching by using the grinding part and the two-shaft linkage mechanism, so that microcracks and recasting layers formed by the electric spark pre-punching are removed, defects on the electric spark processing surface are removed, and meanwhile, the size precision of holes is improved.

2. According to the deep hole machining device, the punching component is connected with the ultrasonic main shaft assembly, the ultrasonic main shaft assembly is connected with the ultrasonic generator, ultrasonic vibration is applied to the punching component through the ultrasonic generator and the ultrasonic main shaft assembly during electric spark machining, machining scraps in deep holes during electric spark machining can be promoted to be discharged, machining speed is improved, ultrasonic vibration is applied to the punching component during rotary cutting and grinding, cutting force during machining is reduced, and service life of a grinding head is prolonged.

3. According to the deep small hole processing device, the punching part comprises the grinding part and the electrode part, so that electric spark processing and grinding processing can be realized at the same time, a grinding head does not need to be replaced in two different processing, the use is convenient, and the processing efficiency is improved.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention.

FIG. 1 is a schematic diagram showing the overall structure of embodiment 1 of the present invention;

FIG. 2 is a front view showing the overall structure of embodiment 1 of the present invention;

FIG. 3 is a schematic diagram showing the overall structure of embodiment 1 of the present invention;

FIG. 4 is a schematic view of a punching part according to embodiment 1 of the present invention;

FIG. 5 is a schematic view of the ultrasonic spindle assembly and electrode power supply of example 1 of the present invention;

FIG. 6 is a schematic view of a cooling mechanism according to embodiment 1 of the present invention;

FIG. 7 is a schematic diagram of the pre-punching process according to embodiment 2 of the present invention;

FIG. 8 is a schematic diagram of the rotary-cut grinding process according to example 2 of the present invention;

FIG. 9 is a schematic diagram of a rotary-cut grinding process according to example 2 of the present invention;

FIG. 10 is a schematic diagram of the rotary-cut grinding according to example 2 of the present invention;

FIG. 11 is a schematic view showing a punching part according to embodiment 3 of the present invention;

The hydraulic pump comprises a 1.Z shaft moving platform, 2 parts for punching, 3 two-shaft linkage mechanisms, 4 parts for ultrasonic spindle assembly, 5 parts for punching, 6 parts for ultrasonic spindle assembly, 7 parts for working platform, 8 parts for control system, 9 parts for matrix, 10 parts for solid red copper electrode, 11 parts for grinding, 12 parts for red copper electrode, 13 parts for fixing, 14 parts for coupling switch, 15 parts for grounding, 16 parts for ultrasonic generator power supply, 17 parts for ultrasonic generator, 18 parts for electric spark, 19 parts for electric spark recasting, 20 parts for diamond abrasive particles and ground materials, 21 parts for water tank, 22 parts for water pump, 23 parts for water outlet pipe, 24 parts for water inlet pipe, 25 parts for Z-shaft displacement driving assembly and 26 parts for negative pole frame

Detailed Description

For convenience of description, the words "upper" and "lower" in the present invention, if they mean only the directions of the words corresponding to the upper and lower directions of the drawings, are not limited to the directions, but are merely for convenience of description and simplification of description, and do not indicate or imply that the apparatus or element to be referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention.

Example 1

The embodiment provides a deep hole processing device, as shown in fig. 1-3, the deep hole processing device comprises a vertical moving mechanism, the vertical moving mechanism adopts a Z-axis displacement driving mechanism of an existing electric spark puncher, the Z-axis displacement driving mechanism comprises a Z-axis displacement driving assembly 25 and a Z-axis moving platform 1, wherein a Z axis is a vertical axis, the specific structure of the vertical moving mechanism is realized by adopting the prior art, the specific structure of the vertical moving mechanism is not described in detail herein, and the vertical moving mechanism can output vertical lifting motion.

The Z-axis moving platform 1 is fixedly provided with an ultrasonic main shaft assembly support 4, the ultrasonic main shaft assembly support is fixedly provided with an ultrasonic main shaft assembly 6, the axis of the ultrasonic main shaft assembly 6 is vertically arranged, and the vertical moving mechanism can drive the ultrasonic main shaft assembly 6 to vertically lift.

The ultrasonic spindle assembly 6 may be an existing device, and includes a spindle and a power mechanism capable of driving the spindle to rotate, and its specific structure is not described in detail herein.

The ultrasonic spindle assembly 6 is connected with an ultrasonic generator 17, and the ultrasonic generator 17 can apply ultrasonic vibration to the ultrasonic spindle assembly 6.

The connection between the ultrasonic spindle assembly 6 and the ultrasonic generator 17 is conventional, and will not be described in detail here.

As shown in fig. 5, the ultrasonic generator 17 is connected to the ultrasonic generator power supply 16 via a power supply circuit, and is supplied with power by the ultrasonic generator power supply 16.

The bottom of ultrasonic main shaft assembly 6 passes through fixed establishment 13 and is connected with part 2 punches, and part 2 punches is used for punching the work piece.

The fixing mechanism 13 may be a conventional structure, and the specific structure thereof will not be described in detail herein.

As shown in fig. 4, the punching member 2 has a columnar structure including grinding portions and electrode portions distributed from top to bottom.

The electrode part is used for carrying out spark erosion on a workpiece, the grinding part is used for carrying out rotary cutting grinding on a pre-punched hole formed by workpiece electric spark machining, the punching part comprises the grinding part and the electrode part, electric spark machining and grinding machining can be simultaneously realized, a grinding head does not need to be replaced in two different machining processes, the use is convenient, and the machining efficiency is improved.

In this embodiment, the grinding portion includes a base 9, where the base 9 is used as the grinding portion, and an electrode is coaxially disposed at the bottom end of the base, and the electrode is used as the electrode portion.

The substrate 9 is made of tungsten material, has a diameter of 0.3-1mm, preferably 0.6mm, a length of 5-10mm, preferably 8mm, and has diamond abrasive grains plated on its outer peripheral surface, preferably 300-1500 mesh, preferably 1200 mesh.

The diameter of the electrode is 0.3-1mm, compared with the base body, the diameter of the electrode is 0.05-1mm smaller than the base body, the diameter of the electrode is preferably 0.5mm, the length of the electrode is 3-10mm, the electrode adopts a solid columnar structure, preferably, a solid red copper electrode 10 is adopted, and the electrode is welded and fixed with the base body 9.

The fixing mechanism 13 of the ultrasonic main shaft assembly 6 is in sliding fit with one end of an iron column, the other end of the iron column is fixed with the negative electrode frame 26, and the negative electrode frame 26 is fixed on a working platform of the electric spark puncher.

The vertical dimension of the fixing mechanism 13 is larger than the vertical movement stroke of the ultrasonic main shaft assembly 6 in the machining process, so that an iron column can be always attached to the fixing mechanism 13 in the machining process of the ultrasonic main shaft assembly 6.

The iron column is connected with the negative electrode of the power supply 15 through a power supply circuit and used for connecting the solid red copper electrode 10 with the negative electrode of the power supply 15, the positive electrode of the power supply 15 is used for being connected with a workpiece through the power supply circuit, and the power supply circuit is provided with a coupling switch 14 for controlling the on and off of the power supply circuit.

The ultrasonic spindle assembly 6 is connected with a cooling mechanism, the cooling mechanism is used for cooling the ultrasonic spindle assembly 6, as shown in fig. 6, the cooling mechanism comprises a water pump 22, a water inlet of the water pump 22 is connected with a water tank 21 through a water pipe, deionized water is contained in the water tank 21, a water outlet of a water pump 30 is connected with the water inlet of the ultrasonic spindle assembly 6 through a water inlet pipe 24, and then is connected with an inner cavity of the ultrasonic spindle assembly 6, so that deionized water in the water tank 21 can be pumped into the inner cavity of the ultrasonic spindle assembly 6 to cool the ultrasonic spindle assembly 6.

The water outlet of the ultrasonic main shaft assembly 6 is connected with the water tank 21 through the water outlet pipe 23, so that the circulating flow of the cooling deionized water is realized.

The connection of inlet 24 and outlet 23 to ultrasonic spindle assembly 6 is accomplished in a manner known in the art and will not be described in detail herein.

The lower part of the punching part 2 is provided with a two-shaft linkage mechanism 3 which is arranged on a working platform of the electric spark punching machine.

The two-axis linkage mechanism 3 comprises a first horizontal moving mechanism, the first horizontal moving mechanism is connected with a second horizontal moving mechanism, the second horizontal moving mechanism can be driven to move along a first horizontal direction, the second horizontal moving mechanism is connected with the workbench 7, and the workbench 7 can be driven to move along a second horizontal direction perpendicular to the first horizontal direction.

The workbench 7 can be driven to move along the circumference through the cooperative work of the first horizontal moving mechanism and the second horizontal moving mechanism.

The first horizontal moving mechanism and the second horizontal moving mechanism adopt the existing screw rod transmission mechanism, the first horizontal moving mechanism comprises a first motor, the first motor is connected with a first screw rod, the axis of the first screw rod is arranged along the first horizontal direction, the first screw rod is rotationally connected with a bearing seat, the bearing seat is fixed on a working platform of the electric spark perforating machine, the first screw rod is supported by the bearing seat, a first sliding block is in threaded connection with the first screw rod, the first sliding block is fixedly connected with a supporting frame and is in sliding connection with the working platform of the electric spark perforating machine, a second motor is fixed on the supporting frame, the second motor is connected with one end of a second screw rod, the second screw rod is rotationally connected with the supporting frame through the bearing seat, the axis of the second screw rod is arranged along the second horizontal direction, a second sliding block is in threaded connection with the second sliding block on the second screw rod, and the top surface of the second sliding block is fixedly provided with a working platform 7.

In this embodiment, the first horizontal movement direction is defined as the X direction, and the second horizontal movement direction is defined as the Y direction.

The workbench 7 is provided with a tool matched with the workpiece for fixing the workpiece to be processed.

The fixture adopts a fixed block, the top surface of fixed block is equipped with the fixed slot, and the lateral part grooved surface threaded connection of fixed slot has fixing bolt, and fixing bolt's pole portion stretches into the part in the fixed slot and is equipped with the clamp plate, rotates fixing bolt, thereby can compress tightly the work piece on the lateral part grooved surface of fixed slot through the clamp plate and realize the fixed of work piece, when the work piece is fixed, reserve the settlement distance between the bottom surface of work piece and the bottom grooved surface of fixed slot.

The two-axis linkage mechanism 3, the ultrasonic generator 17 and the water pump 20 are all connected with the control system 8 of the electric spark perforating machine, and the work of the two-axis linkage mechanism is controlled by the control system 8.

Example 2

The present embodiment provides a working method of the deep hole processing device described in embodiment 1, including the following steps:

Step 1: the vibration frequency of the ultrasonic main shaft assembly is set to be 20kHz through an ultrasonic generator, the rotation speed of the ultrasonic main shaft assembly 6 is 10000r/min, the coupling switch 14 is turned on, the electric spark perforating machine perforating program is started, and the perforating speed is set to be 5mm/min.

The cooling mechanism of the ultrasonic main shaft assembly is started, the water pump 22 is started, the flow speed of deionized water driven by the water pump 22 is 0.5L/min, the deionized water in the water tank 21 firstly enters the cavity of the ultrasonic main shaft assembly 6 through the water inlet pipe 24, circulates in the cavity, and then flows into the water tank 21 through the water outlet pipe 23.

Step 2: as shown in fig. 7, the pre-punching is performed by means of spark-ignition punching.

Specifically, the vertical moving mechanism drives the punching part 2 to move towards the workpiece, the solid red copper electrode 10 of the punching part 2 is contacted with the workpiece to generate an electric spark 18, the vertical moving mechanism drives the punching part to move downwards at the speed of 5mm/s to perform electric spark pre-punching, the ultrasonic main shaft assembly 6 drives the punching part to vibrate at high frequency, the high-frequency vibration of the solid red copper electrode 10 can promote the discharge of an in-hole machining product, namely an electric spark recasting layer 19, so that the electric spark machining speed is improved, the solid red copper electrode 10 is worn along with the increase of the depth of a machining hole, the electrode is shortened, when the bottom end of the electrode is exposed from the lower part of the machining hole, the pre-punching is completed, the power supply 16 of the ultrasonic generator 17 is turned off, and the water pump 22 is turned off.

Step 3: as shown in fig. 8-9, the pre-punch is subjected to rotary-cut grinding.

After the pre-punching is completed, the vertical moving mechanism drives the punching component 2 to move upwards, so that the bottom end of the grinding part of the punching component 2 is positioned at the top of a pre-punching processing inlet, an ultrasonic generator power supply 16 is started, the vibration frequency of the ultrasonic main shaft assembly 6 is set to be 20kHz, the rotating speed of the ultrasonic main shaft assembly 6 is set to be 10000r/min, a water pump 22 is started, deionized water in the water tank 21 firstly enters the cavity of the ultrasonic main shaft assembly 6 through a water inlet pipe 24, and after the deionized water circulates in the cavity, the deionized water flows into the water tank 21 through a water outlet pipe.

The vertical moving mechanism drives the punching part 2 to move downwards at a speed of 0.5 mm/min.

The grinding part of the punching part 2 is contacted with the surface of the deep small hole pre-punched by electric spark, a rotary cutting procedure is started, and the rotation speed of the two-axis linkage mechanism 3 is set to be 100r/min.

Firstly, the first step is carried out, the biaxial linkage mechanism 3 is controlled to drive the workbench 7 to do linear motion along the positive direction of the Y direction, and the motion travel is 0.05mm.

And then, performing a second step, wherein the first horizontal moving mechanism and the second horizontal moving mechanism of the two-axis linkage mechanism 3 are matched, so that the workbench performs anticlockwise circular motion at the speed of 100r/min, and the deep small hole is subjected to rotary cutting grinding through the grinding part.

The diamond abrasive particles on the grinding section substrate mainly participate in the grinding process of the hole, as shown in fig. 10, during the process, the diamond abrasive particles are dropped, the workpiece material is ground off, and the diamond abrasive particles and the ground material 20 are carried away from the hole along with the high-frequency vibration of the ultrasonic spindle assembly.

The vertical moving mechanism drives the punching part to move downwards at the speed of 0.5mm/min, and diamond abrasive particles and tungsten materials of the grinding part are contacted with the surface of the deep small hole to grind the surface of the hole, so that rotary cutting type grinding of the surface of the deep small hole is realized.

When the bottom end of the grinding part leaks from the lower part of the deep small hole, one rotary cutting grinding is completed, the grinding part 9 is shown in the figure, and the vertical moving mechanism stops moving.

In order to further improve the surface processing quality, the second rotary cutting and grinding is carried out, the vertical moving mechanism drives the punching part 2 to move upwards at the speed of 0.5mm/min, the moving speed and the moving direction of the two-axis linkage mechanism 3 are set to be the same as those of the first rotary cutting and grinding, the ultrasonic main shaft assembly 6 is set to have the vibration frequency of 20kHz through the ultrasonic generator 17, the rotating speed of the ultrasonic main shaft assembly 6 is 10000r/min, and the second rotary cutting and grinding is carried out on deep holes by adopting the same method.

Example 3

The present embodiment provides a deep hole processing apparatus, which is different from embodiment 1 in that only the punching member is different, and as shown in fig. 11, the punching member 5 includes a rod body divided into a grinding portion region and an electrode portion region which are disposed up and down, the outer periphery of the grinding portion region is electroplated with a diamond abrasive grain forming grinding portion 11, and the outer periphery of the electrode portion region is fixedly sleeved with an electrode tube forming electrode portion.

The rod body is made of tungsten material, wherein the length of the electrode part area of the rod body is 10mm, the diameter of the electrode part area is 3mm, and an electrode tube with the wall thickness of 0.1mm is sleeved on the periphery of the electrode tube, and preferably, the electrode tube adopts a copper tube electrode 12.

The length of the grinding part of the rod body is 10mm, and the diameter of the grinding part is 0.5mm.

The remaining structure of this embodiment is the same as that of embodiment 1, and a repetitive description thereof will not be given here.

Example 4:

The present embodiment provides a method of the deep down hole processing apparatus of embodiment 3: the method is used for processing the rectangular block of the nickel-based single crystal alloy I C with the thickness of 6mm, the length of 20mm and the width of 15mm, and deep small holes with the length of 6mm are required to be processed, and comprises the following steps:

step 1: the water pump 22 was started and the water flow rate was set to 0.5L/min, and the water inlet pipe 24 and the water outlet pipe 23 were observed to operate normally. The ultrasonic main shaft assembly 6 is set to have a vibration frequency of 20kHz by the ultrasonic generator 17, the rotation speed of the ultrasonic main shaft assembly is 5000r/min, and the power supply 16 of the ultrasonic generator is turned on.

Step 2: the pre-punching is carried out, the coupling switch 14 is opened, the machining speed of the downward movement of the vertical moving mechanism is set to be 6mm/min, firstly, the copper pipe electrode 12 is utilized to carry out electric spark punching on the workpiece, when the copper pipe electrode is exposed from the lower part of the workpiece, after the punching is finished, the vertical moving mechanism is retracted upwards at the speed of 1mm/min, and the bottom end of the grinding part 11 is positioned at the inlet of the hole.

Step 3: starting a two-axis linkage mechanism 3, enabling the two-axis linkage mechanism 3 to drive a workbench and a workpiece to do linear motion towards the positive direction, enabling the motion distance to be 0.05mm, enabling the workbench to do anticlockwise circular motion, enabling a vertical moving mechanism to drive a punching part to move downwards at the speed of 1mm/min, performing rotary-cut grinding operation on a deep small hole, enabling the vertical moving mechanism to stop working when the junction position of a grinding part and an electrode part is exposed below the deep lower hole, and enabling the punching part to move upwards at the speed of 1mm/min, so that secondary rotary-cut grinding is achieved. When the junction position of the grinding part and the electrode part exposes the deep small hole again, the vertical moving mechanism stops working, and the two-axis linkage mechanism stops working.

By adopting the processing device of the embodiment, during processing, firstly, electric spark pre-punching is performed by utilizing the electrode part, then rotary cutting grinding is performed on the pre-punching by utilizing the grinding part and the two-shaft linkage mechanism, so that microcracks and recasting layers formed by the electric spark pre-punching are removed, defects on the surface of electric spark processing are removed, the size precision of holes is improved, during electric spark processing, ultrasonic vibration is applied to the punching part through the ultrasonic generator and the ultrasonic spindle assembly, the discharge of processing scraps in the electric spark processing deep hole can be promoted, the processing speed is improved, and during rotary cutting grinding, the cutting force during processing is reduced by applying ultrasonic vibration to the punching part, and the service life of the grinding head is prolonged.

The above description is only of the preferred embodiments of the present application and is not intended to limit the present application, but various modifications and variations can be made to the present application by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims (10)

1. The deep small hole machining device is characterized by comprising a vertical moving mechanism, wherein the vertical moving mechanism is connected with an ultrasonic main shaft assembly, the ultrasonic main shaft assembly is connected with an ultrasonic generator, a punching part is fixed at the bottom end of the ultrasonic main shaft assembly and comprises a grinding part and an electrode part which are sequentially arranged from top to bottom, a two-shaft linkage mechanism is further arranged below the punching part, and the two-shaft linkage mechanism is connected with a workbench for fixing a workpiece.

2. The deep hole processing apparatus according to claim 1, wherein the grinding section comprises a base body, diamond abrasive grains are electroplated on the outer peripheral surface of the base body, and the bottom end of the base body is fixed with the top end of the solid electrode.

3. The deep hole processing apparatus of claim 2, wherein the substrate is a columnar structure made of tungsten, and the solid electrode is a columnar solid red copper electrode.

4. The deep hole processing apparatus according to claim 1, wherein the punching member comprises a rod body divided into a grinding portion area and an electrode portion area which are arranged up and down, the outer periphery of the grinding portion area is electroplated with diamond abrasive grains to form a grinding portion, and the outer periphery of the electrode portion area is sleeved and fixed with an electrode tube to form an electrode portion.

5. The deep hole processing apparatus according to claim 4, wherein the rod body is a columnar structure made of tungsten, and the electrode tube is a copper tube electrode.

6. A deep hole machining apparatus according to claim 1, wherein the ultrasonic spindle assembly is connected to a cooling mechanism for cooling the ultrasonic spindle assembly.

7. The deep hole processing apparatus of claim 6, wherein the cooling mechanism comprises a water pump, a water inlet of the water pump is connected with the water tank through a water pipe, a water outlet of the water pump is connected with a water inlet of the ultrasonic main shaft assembly through a water pipe, and a water outlet of the ultrasonic main shaft assembly is connected with the water tank through a water pipe.

8. The deep hole processing device according to claim 1, wherein the two-axis linkage mechanism comprises a first horizontal moving mechanism and a second horizontal moving mechanism, the first horizontal moving mechanism and the second horizontal moving mechanism drive the second horizontal moving mechanism to move along a first horizontal direction, and the second horizontal moving mechanism is connected with the workbench to drive the workbench to move along a second horizontal direction perpendicular to the first horizontal direction.

9. A method of operating a deep hole machining apparatus according to any one of claims 1 to 8, comprising the steps of:

The ultrasonic generator works, and the ultrasonic spindle assembly drives the punching component to rotate and simultaneously applies ultrasonic vibration to the punching component;

The punching component in an ultrasonic vibration state moves under the drive of the vertical moving mechanism, and the electrode part of the punching component is used for carrying out electric spark pre-punching on the workpiece;

after the pre-punching is completed, the punching component in an ultrasonic vibration state moves under the drive of the vertical moving mechanism, and meanwhile, the two-axis linkage mechanism drives the workpiece to do circular motion, and the grinding part of the punching component is utilized to conduct rotary-cut grinding on the wall of the pre-punched hole.

10. The method of claim 9, wherein the vertical moving mechanism drives the punch member to reciprocate vertically after the pre-punch to perform the multiple rotary cutting and grinding.