CN118016686A - Image sensor and method for manufacturing the same - Google Patents

Image sensor and method for manufacturing the same Download PDF

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Publication number
CN118016686A
CN118016686A CN202410253992.2A CN202410253992A CN118016686A CN 118016686 A CN118016686 A CN 118016686A CN 202410253992 A CN202410253992 A CN 202410253992A CN 118016686 A CN118016686 A CN 118016686A
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substrate
photosensitive
photosensitive chip
area
image sensor
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吴玉森
杨孝东
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Omnivision Semiconductor Shanghai Co Ltd
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Omnivision Semiconductor Shanghai Co Ltd
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/805Coatings
    • H10F39/8057Optical shielding
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011Manufacture or treatment of image sensors covered by group H10F39/12
    • H10F39/024Manufacture or treatment of image sensors covered by group H10F39/12 of coatings or optical elements
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/805Coatings
    • H10F39/8053Colour filters

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  • Solid State Image Pick-Up Elements (AREA)

Abstract

本发明提供一种图像传感器及其制作方法,感光芯片的背面固定于基板上,感光芯片的正面具有感光区。基板上的焊盘与感光芯片的焊垫通过导线对应电连接;滤光片和基板围合成一容纳空间,感光芯片置于容纳空间内。滤光片远离感光芯片的一侧表面设置有第一遮光层;第一遮光层在基板上的投影覆盖感光区的周边与容纳空间侧壁之间的第一环形区域;滤光片靠近感光芯片的一侧表面设置有第二遮光层;第二遮光层在感光芯片上的投影至少覆盖感光区的周边与导线在焊垫上的压焊点之间的第二环形区域。本发明在不增大感光芯片自身尺寸且不增大图像传感器封装尺寸的情况下,通过双面遮光层有效做到遮挡耀光和杂讯光,提高产品成像品质的同时又提高了产品可靠性。

The present invention provides an image sensor and a manufacturing method thereof, wherein the back of a photosensitive chip is fixed on a substrate, and the front of the photosensitive chip has a photosensitive area. The pads on the substrate are electrically connected to the pads of the photosensitive chip through wires; the filter and the substrate enclose a storage space, and the photosensitive chip is placed in the storage space. A first light-shielding layer is provided on the surface of the filter away from the photosensitive chip; the projection of the first light-shielding layer on the substrate covers the first annular area between the periphery of the photosensitive area and the side wall of the storage space; a second light-shielding layer is provided on the surface of the filter close to the photosensitive chip; the projection of the second light-shielding layer on the photosensitive chip at least covers the second annular area between the periphery of the photosensitive area and the pressure welding point of the wire on the pad. The present invention effectively blocks glare and noise light through double-sided light-shielding layers without increasing the size of the photosensitive chip itself and the size of the image sensor package, thereby improving the imaging quality of the product and the reliability of the product.

Description

图像传感器及其制作方法Image sensor and method for manufacturing the same

技术领域Technical Field

本发明属于图像传感器制造技术领域,具体涉及一种图像传感器及其制作方法。The present invention belongs to the technical field of image sensor manufacturing, and in particular relates to an image sensor and a manufacturing method thereof.

背景技术Background technique

图像传感器广泛地用于数字静态相机、蜂窝式电话、安全摄像机以及医学、汽车及其它应用中。一种图像传感器包括感光芯片,感光芯片封装在由基板和滤光片围合形成的腔体内。感光芯片上的焊垫与基板上的焊盘通过金丝电连接。对图像传感器进行高温可靠性测试,发现高温试验前,金丝与感光芯片上的焊垫的结合力以及金丝与基板上的焊盘的结合力均良好,但是在高温试验(例如高温下放置结合测试1000小时)后,金丝与焊垫和焊盘上的结合力均变差,严重时候金丝在焊垫和焊盘上的压焊点出现开裂现象,导致高温可靠性试验不合格,影响图像传感器产品的可靠性。Image sensors are widely used in digital still cameras, cellular phones, security cameras, as well as in medical, automotive and other applications. An image sensor includes a photosensitive chip, which is encapsulated in a cavity formed by a substrate and a filter. The pads on the photosensitive chip are electrically connected to the pads on the substrate through gold wires. A high-temperature reliability test was performed on the image sensor, and it was found that before the high-temperature test, the bonding strength between the gold wire and the pads on the photosensitive chip and the bonding strength between the gold wire and the pads on the substrate were good. However, after the high-temperature test (for example, the bonding test was placed at high temperature for 1000 hours), the bonding strength between the gold wire and the pads and the pads became worse. In severe cases, cracks appeared at the solder joints of the gold wire on the pads and the pads, resulting in failure of the high-temperature reliability test, affecting the reliability of the image sensor product.

发明内容Summary of the invention

本发明的目的在于提供一种图像传感器及其制作方法,本发明在不增大感光芯片自身尺寸以及不增大图像传感器整体封装尺寸的情况下,通过双面遮光层有效做到遮挡耀光和杂讯光,提高产品成像品质的同时又提高了产品可靠性。The purpose of the present invention is to provide an image sensor and a method for manufacturing the same. The present invention effectively blocks glare and noise light through a double-sided shading layer without increasing the size of the photosensitive chip itself or the overall package size of the image sensor, thereby improving product imaging quality while also improving product reliability.

本发明提供一种图像传感器,包括:The present invention provides an image sensor, comprising:

基板和感光芯片,所述感光芯片的背面固定于所述基板上;所述感光芯片的正面具有感光区和环绕所述感光区的焊垫区;所述焊垫区设置有若干焊垫;所述基板上设置有若干焊盘,所述焊盘与所述焊垫通过导线对应电连接;A substrate and a photosensitive chip, wherein the back of the photosensitive chip is fixed on the substrate; the front of the photosensitive chip has a photosensitive area and a pad area surrounding the photosensitive area; the pad area is provided with a plurality of pads; the substrate is provided with a plurality of pads, and the pads are electrically connected to the pads through wires;

滤光片,所述滤光片和所述基板围合成一容纳空间,所述感光芯片置于所述容纳空间内;A filter, wherein the filter and the substrate enclose a receiving space, and the photosensitive chip is placed in the receiving space;

所述滤光片远离所述感光芯片的一侧表面设置有第一遮光层;所述第一遮光层在所述基板上的投影覆盖所述感光区的周边与所述容纳空间侧壁之间的第一环形区域;A first light shielding layer is provided on a surface of the filter away from the photosensitive chip; a projection of the first light shielding layer on the substrate covers a first annular area between the periphery of the photosensitive area and the side wall of the accommodating space;

所述滤光片靠近所述感光芯片的一侧表面设置有第二遮光层;所述第二遮光层在所述感光芯片上的投影至少覆盖所述感光区的周边与所述导线在所述焊垫上的压焊点之间的第二环形区域。A second light-shielding layer is provided on the surface of one side of the filter close to the photosensitive chip; the projection of the second light-shielding layer on the photosensitive chip at least covers the periphery of the photosensitive area and the second annular area between the bonding point of the wire on the pad.

进一步的,所述第一遮光层和所述第二遮光层的材质均可包括黑光阻、塑料、金属以及黑漆中的至少一种。Furthermore, the material of the first light-shielding layer and the second light-shielding layer may include at least one of black photoresist, plastic, metal and black paint.

进一步的,所述基板包括印刷电路板或陶瓷电路板。Furthermore, the substrate includes a printed circuit board or a ceramic circuit board.

进一步的,所述基板包括底板和从所述底板周圈向上延伸的侧壁构成的一体结构,所述滤光片与所述基板的侧壁顶部接触围合成一容纳空间,所述基板的侧壁不透光。Furthermore, the substrate includes an integrated structure consisting of a bottom plate and side walls extending upward from the circumference of the bottom plate, the filter contacts the top of the side walls of the substrate to enclose a receiving space, and the side walls of the substrate are opaque.

进一步的,所述基板为平板结构,所述图像传感器还包括框架,所述框架匹配粘合于所述基板和所述滤光片之间,所述基板、所述框架和所述滤光片围合成一容纳空间;所述框架不透光。Furthermore, the substrate is a flat plate structure, and the image sensor also includes a frame, which is matched and bonded between the substrate and the filter, and the substrate, the frame and the filter enclose a receiving space; the frame is opaque.

进一步的,所述第一环形区域的中心和所述第二环形区域的中心均与所述感光区的中心重合。Furthermore, the center of the first annular area and the center of the second annular area both coincide with the center of the photosensitive area.

进一步的,所述滤光片的材质包括玻璃、塑料或蓝宝石中的任意一种。Furthermore, the material of the filter includes any one of glass, plastic or sapphire.

进一步的,所述滤光片沿自身厚度方向的两侧表面均镀上红外滤光膜和/或光学增透膜。Furthermore, both side surfaces of the filter along its thickness direction are coated with infrared filter film and/or optical anti-reflection film.

进一步的,所述导线包括金线、铜线、铝线、银线或合金线中的至少一种。Furthermore, the conductive wire includes at least one of a gold wire, a copper wire, an aluminum wire, a silver wire or an alloy wire.

本发明还提供一种图像传感器的制作方法,包括:The present invention also provides a method for manufacturing an image sensor, comprising:

提供基板和感光芯片,将所述感光芯片的背面固定于所述基板上;所述感光芯片的正面具有感光区和环绕所述感光区的焊垫区;所述焊垫区设置有若干焊垫;所述基板上设置有若干焊盘,所述焊盘与所述焊垫通过导线对应电连接;A substrate and a photosensitive chip are provided, and the back side of the photosensitive chip is fixed on the substrate; the front side of the photosensitive chip has a photosensitive area and a pad area surrounding the photosensitive area; the pad area is provided with a plurality of pads; a plurality of pads are provided on the substrate, and the pads are electrically connected to the pads through wires;

提供滤光片,在所述滤光片厚度方向的两表面分别形成第一遮光层和第二遮光层;Providing a filter, wherein a first light shielding layer and a second light shielding layer are respectively formed on two surfaces of the filter in a thickness direction;

将所述滤光片和所述基板围合成一容纳空间,所述感光芯片置于所述容纳空间内;所述第一遮光层在所述基板上的投影覆盖所述感光区的周边与所述容纳空间侧壁之间的第一环形区域;所述第二遮光层位于所述容纳空间内,所述第二遮光层在所述感光芯片上的投影至少覆盖所述感光区的周边与所述导线在所述焊垫上的压焊点之间的第二环形区域。The filter and the substrate are enclosed to form a accommodating space, and the photosensitive chip is placed in the accommodating space; the projection of the first light-shielding layer on the substrate covers a first annular area between the periphery of the photosensitive area and the side wall of the accommodating space; the second light-shielding layer is located in the accommodating space, and the projection of the second light-shielding layer on the photosensitive chip at least covers a second annular area between the periphery of the photosensitive area and the bonding point of the wire on the pad.

与现有技术相比,本发明具有如下有益效果:Compared with the prior art, the present invention has the following beneficial effects:

本发明提供一种图像传感器及其制作方法,图像传感器包括:基板和感光芯片,感光芯片的背面固定于基板上;感光芯片的正面具有感光区和环绕感光区的焊垫区;焊垫区设置有若干焊垫;基板上设置有若干焊盘,焊盘与焊垫通过导线对应电连接;滤光片,滤光片和基板围合成一容纳空间,感光芯片置于容纳空间内;滤光片远离感光芯片的一侧表面设置有第一遮光层;第一遮光层在基板上的投影覆盖感光区的周边与容纳空间侧壁之间的第一环形区域;滤光片靠近感光芯片的一侧表面设置有第二遮光层;第二遮光层在感光芯片上的投影至少覆盖感光区的周边与导线在焊垫上的压焊点之间的第二环形区域。本发明在不增大感光芯片自身尺寸以及不增大图像传感器封装尺寸的情况下,通过双面遮光层有效做到遮挡耀光和杂讯光,提高产品成像品质的同时又提高了产品可靠性。The present invention provides an image sensor and a manufacturing method thereof, wherein the image sensor comprises: a substrate and a photosensitive chip, wherein the back of the photosensitive chip is fixed on the substrate; the front of the photosensitive chip has a photosensitive area and a pad area surrounding the photosensitive area; the pad area is provided with a plurality of pads; a plurality of pads are provided on the substrate, and the pads are electrically connected to the pads through wires; a filter, wherein the filter and the substrate enclose a receiving space, and the photosensitive chip is placed in the receiving space; a first light shielding layer is provided on the surface of the filter away from the photosensitive chip; the projection of the first light shielding layer on the substrate covers the first annular area between the periphery of the photosensitive area and the side wall of the receiving space; a second light shielding layer is provided on the surface of the filter close to the photosensitive chip; the projection of the second light shielding layer on the photosensitive chip at least covers the second annular area between the periphery of the photosensitive area and the pressure welding point of the wire on the pad. The present invention effectively shields glare and noise light through a double-sided light shielding layer without increasing the size of the photosensitive chip itself and the size of the image sensor package, thereby improving the product imaging quality and the product reliability.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

图1为本发明实施例一的图像传感器结构示意图。FIG. 1 is a schematic diagram of the structure of an image sensor according to a first embodiment of the present invention.

图2为本发明实施例二的图像传感器结构示意图。FIG. 2 is a schematic diagram of the structure of an image sensor according to a second embodiment of the present invention.

图3为一种图像传感器结构示意图。FIG. 3 is a schematic diagram of the structure of an image sensor.

图4为另一种图像传感器结构示意图。FIG. 4 is a schematic diagram of another image sensor structure.

图5为本发明实施例的图像传感器的制作方法流程示意图。FIG. 5 is a schematic flow chart of a method for manufacturing an image sensor according to an embodiment of the present invention.

其中,附图标记如下:The reference numerals are as follows:

10-基板;10a-底板;10b-侧壁;11-焊盘;20-感光芯片;20a-感光区;20b-焊垫区;21-焊垫;30-滤光片;31-第一遮光层;32-第二遮光层;B-第一非功能避光区宽度;C-滤光片厚度;D-第二遮光层宽度;θ-最大入射角;W-导线;41-基板;42-框架;02-第二黑光阻层;01-第一黑光阻层;A-滤光片与感光芯片的间距;E-第二非功能避光区宽度。10-substrate; 10a-bottom plate; 10b-side wall; 11-solder pad; 20-photosensitive chip; 20a-photosensitive area; 20b-solder pad area; 21-solder pad; 30-filter; 31-first light-shielding layer; 32-second light-shielding layer; B-width of first non-functional light-shielding area; C-thickness of filter; D-width of second light-shielding layer; θ-maximum angle of incidence; W-wire; 41-substrate; 42-frame; 02-second black light-resistance layer; 01-first black light-resistance layer; A-distance between filter and photosensitive chip; E-width of second non-functional light-shielding area.

具体实施方式Detailed ways

以下结合附图和具体实施例对本发明进一步详细说明。根据下面说明,本发明的优点和特征将更清楚。需要说明的是,附图均采用非常简化的形式且使用非精准的比例,仅用以方便、明晰地辅助说明本发明实施例的目的。The present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. The advantages and features of the present invention will become more apparent from the following description. It should be noted that the accompanying drawings are in very simplified form and use non-precise proportions, which are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention.

为了便于描述,本申请一些实施例可以使用诸如“在…上方”、“在…之下”、“顶部”、“下方”等空间相对术语,以描述如实施例各附图所示的一个元件或部件与另一个(或另一些)元件或部件之间的关系。应当理解的是,除了附图中描述的方位之外,空间相对术语还旨在包括装置在使用或操作中的不同方位。例如若附图中的装置被翻转,则被描述为在其它元件或部件“下方”或“之下”的元件或部件,随后将被定位为在其它元件或部件“上方”或“之上”。下文中的术语“第一”、“第二”、等用于在类似要素之间进行区分,且未必是用于描述特定次序或时间顺序。要理解,在适当情况下,如此使用的这些术语可替换。For ease of description, some embodiments of the present application may use spatially relative terms such as "above", "below", "top", "below", etc. to describe the relationship between one element or component and another (or other) elements or components as shown in the various figures of the embodiments. It should be understood that in addition to the orientations described in the drawings, the spatially relative terms are also intended to include different orientations of the device in use or operation. For example, if the device in the drawings is turned over, the elements or components described as being "below" or "below" other elements or components will subsequently be positioned as being "above" or "above" other elements or components. The terms "first", "second", etc. below are used to distinguish between similar elements and are not necessarily used to describe a specific order or time sequence. It is to be understood that these terms used in this way are interchangeable where appropriate.

本发明实施例提供了一种图像传感器,如图1所示,包括:An embodiment of the present invention provides an image sensor, as shown in FIG1 , including:

基板10和感光芯片20,感光芯片20的背面固定于基板10上;感光芯片20的正面具有感光区20a和环绕感光区20a的焊垫区20b;焊垫区20b设置有若干焊垫21;基板10上设置有若干焊盘11,焊盘11与焊垫21通过导线W对应电连接;The substrate 10 and the photosensitive chip 20, the back of the photosensitive chip 20 is fixed on the substrate 10; the front of the photosensitive chip 20 has a photosensitive area 20a and a pad area 20b surrounding the photosensitive area 20a; the pad area 20b is provided with a plurality of pads 21; the substrate 10 is provided with a plurality of pads 11, and the pads 11 are electrically connected to the pads 21 through wires W;

滤光片30,滤光片30和基板10围合成一容纳空间,感光芯片20置于容纳空间内;The filter 30 and the substrate 10 enclose a receiving space, and the photosensitive chip 20 is placed in the receiving space;

滤光片30远离感光芯片20的一侧表面设置有第一遮光层31;第一遮光层31在基板10上的投影覆盖感光区20a的周边与容纳空间侧壁之间的第一环形区域;A first light shielding layer 31 is disposed on the surface of the filter 30 away from the photosensitive chip 20; the projection of the first light shielding layer 31 on the substrate 10 covers the periphery of the photosensitive area 20a and the first annular area between the side wall of the accommodating space;

滤光片30靠近感光芯片20的一侧表面设置有第二遮光层32;第二遮光层32在感光芯片20上的投影至少覆盖感光区20a的周边与导线W在焊垫21上的压焊点之间的第二环形区域。A second shading layer 32 is provided on the surface of the filter 30 close to the photosensitive chip 20 ; the projection of the second shading layer 32 on the photosensitive chip 20 at least covers the second annular area between the periphery of the photosensitive area 20 a and the bonding point of the wire W on the bonding pad 21 .

具体的,在实施例一中,如图1所示,基板10包括底板10a和从底板10a周圈向上延伸的侧壁10b一体构成的具有中间容纳腔体的结构。基板10例如为印刷电路板或陶瓷电路板。基板10上位于感光芯片20的周侧区域设置有焊盘11。导线W可通过压焊方式电连接焊盘11与焊垫21。感光芯片20封装在基板10上,感光芯片20例如通过陶瓷基板平面网格阵列封装或有机基板平面网格阵列封装。导线W包括金线、铜线、铝线、银线或合金线中的至少一种。滤光片30与基板10的侧壁10b顶部接触并围合成一容纳空间,感光芯片20的背面可与底板10a粘接固定,将感光芯片20固定于容纳空间内。形成容纳空间的侧壁不透光,本示例中,基板10的侧壁10b即为形成容纳空间的侧壁,基板10的侧壁10b不透光,防止光线从容纳空间的侧壁进入对感光芯片20引起干扰。Specifically, in the first embodiment, as shown in FIG1 , the substrate 10 includes a structure having an intermediate accommodating cavity integrally formed of a bottom plate 10a and a side wall 10b extending upward from the circumference of the bottom plate 10a. The substrate 10 is, for example, a printed circuit board or a ceramic circuit board. A pad 11 is provided on the substrate 10 in the peripheral area of the photosensitive chip 20. The wire W can electrically connect the pad 11 with the pad 21 by pressure welding. The photosensitive chip 20 is packaged on the substrate 10, and the photosensitive chip 20 is, for example, packaged by a ceramic substrate planar grid array or an organic substrate planar grid array. The wire W includes at least one of a gold wire, a copper wire, an aluminum wire, a silver wire or an alloy wire. The filter 30 contacts the top of the side wall 10b of the substrate 10 and encloses a accommodating space, and the back of the photosensitive chip 20 can be bonded and fixed to the bottom plate 10a to fix the photosensitive chip 20 in the accommodating space. The side wall forming the accommodation space is light-proof. In this example, the side wall 10 b of the substrate 10 is the side wall forming the accommodation space. The side wall 10 b of the substrate 10 is light-proof to prevent light from entering from the side wall of the accommodation space and causing interference to the photosensitive chip 20 .

在实施例二中,如图2所示,基板41为平板结构,基板41例如为印刷电路板或陶瓷电路板。图像传感器还包括框架42,框架42匹配粘合于基板41和滤光片30之间,基板41、框架42和滤光片30围合成一容纳空间;感光芯片20置于容纳空间内。形成容纳空间的侧壁不透光,本示例中,框架42形成容纳空间的侧壁,框架42不透光,防止光线从容纳空间的侧壁进入对感光芯片20引起干扰。框架42可由框胶固化形成或由其他不透光的合适材质形成。In the second embodiment, as shown in FIG. 2 , the substrate 41 is a flat structure, and the substrate 41 is, for example, a printed circuit board or a ceramic circuit board. The image sensor also includes a frame 42, and the frame 42 is matched and bonded between the substrate 41 and the filter 30. The substrate 41, the frame 42 and the filter 30 enclose a receiving space; the photosensitive chip 20 is placed in the receiving space. The side walls of the receiving space are opaque. In this example, the frame 42 forms the side walls of the receiving space. The frame 42 is opaque to prevent light from entering from the side walls of the receiving space and interfering with the photosensitive chip 20. The frame 42 can be formed by curing the frame glue or by other suitable opaque materials.

感光芯片20即图像传感器芯片,感光芯片20工作原理为:来自外部场景的图像光通常从感光区20a的正上方入射于感光芯片20上。感光芯片20包含多个像素单元,像素单元包括光敏元件,使得每一光敏元件吸收一部分入射图像光。感光芯片20中所包含的光敏元件各自在吸收图像光之后即刻产生图像电荷,所产生的图像电荷量与图像光的强度成比例,所产生的图像电荷可用于产生表示外部场景的图像。The photosensitive chip 20 is an image sensor chip. The working principle of the photosensitive chip 20 is as follows: the image light from the external scene is usually incident on the photosensitive chip 20 from directly above the photosensitive area 20a. The photosensitive chip 20 includes a plurality of pixel units, and the pixel unit includes a photosensitive element, so that each photosensitive element absorbs a portion of the incident image light. Each photosensitive element included in the photosensitive chip 20 generates an image charge immediately after absorbing the image light. The amount of the generated image charge is proportional to the intensity of the image light. The generated image charge can be used to generate an image representing the external scene.

如图1和图2所示,滤光片30的材质包括玻璃、塑料或蓝宝石中的任意一种。滤光片30沿自身厚度方向的两侧表面均可根据需要镀上红外滤光膜和/或光学增透膜。As shown in Figures 1 and 2, the material of the filter 30 includes any one of glass, plastic or sapphire. Both sides of the filter 30 along its thickness direction can be coated with infrared filter film and/or optical anti-reflection film as needed.

第一遮光层31和第二遮光层32的材质均可包括黑光阻、塑料、金属以及黑漆中的至少一种。第一遮光层31和第二遮光层32的材质例如均为黑光阻,黑光阻是具有感光效应且在固化后可以不透光的材料。对黑光阻进行曝光以形成预设尺寸,本实施例可采用曝光工艺形成第一遮光层31和第二遮光层32,工艺简单并且容易操控,第一遮光层31和第二遮光层32的形状和尺寸可以非常精确。当然,第一遮光层31和第二遮光层32的材质不限于是黑光阻,也可以是塑料或金属材料等,从而具有更强的耐磨性和稳定性;第一遮光层31和第二遮光层32的材质还可为黑漆,黑漆可通过喷涂和烘烤工艺形成。形成第一遮光层31和第二遮光层32的工艺也不限于是曝光工艺,还可以是涂布或溅射等工艺。The materials of the first light shielding layer 31 and the second light shielding layer 32 may include at least one of black photoresist, plastic, metal and black paint. The materials of the first light shielding layer 31 and the second light shielding layer 32 are, for example, both black photoresist, which is a material with a photosensitive effect and can be opaque after curing. The black photoresist is exposed to form a preset size. In this embodiment, the first light shielding layer 31 and the second light shielding layer 32 can be formed by an exposure process. The process is simple and easy to control, and the shape and size of the first light shielding layer 31 and the second light shielding layer 32 can be very precise. Of course, the material of the first light shielding layer 31 and the second light shielding layer 32 is not limited to black photoresist, but can also be plastic or metal materials, so as to have stronger wear resistance and stability; the material of the first light shielding layer 31 and the second light shielding layer 32 can also be black paint, which can be formed by spraying and baking processes. The process of forming the first light shielding layer 31 and the second light shielding layer 32 is not limited to the exposure process, but can also be a coating or sputtering process.

滤光片30远离感光芯片20的一侧表面设置有第一遮光层31;第一遮光层31在基板10上的投影覆盖感光区20a的周边与容纳空间侧壁之间的第一环形区域。示例性的,俯视看第一遮光层31呈矩形环或方形环。第一环形区域的中心和与感光区20a的中心重合。A first light shielding layer 31 is disposed on the surface of the filter 30 away from the photosensitive chip 20; the projection of the first light shielding layer 31 on the substrate 10 covers the first annular area between the periphery of the photosensitive area 20a and the side wall of the accommodation space. Exemplarily, the first light shielding layer 31 is a rectangular ring or a square ring when viewed from above. The center of the first annular area coincides with the center of the photosensitive area 20a.

滤光片30靠近感光芯片20的一侧表面设置有第二遮光层32;第二遮光层32在感光芯片20上的投影至少覆盖感光区20a的周边与导线W在焊垫21上的压焊点之间的第二环形区域。示例性的,俯视看第二遮光层32呈矩形环或方形环。俯视看感光区20a的周边作为第二环形区域的内圈边界,第二环形区域向远离感光区20a的中心的方向延伸至至少覆盖导线W在焊垫21上的压焊点,以防止例如入射光从滤光片30厚度范围内进入照射至非感光区(感光芯片20上感光区20a以外的区域)以及导线W上引起反射、杂讯光等干扰。第二环形区域的中心和与感光区20a的中心重合。A second light shielding layer 32 is provided on the surface of one side of the filter 30 close to the photosensitive chip 20; the projection of the second light shielding layer 32 on the photosensitive chip 20 at least covers the second annular area between the periphery of the photosensitive area 20a and the bonding point of the wire W on the pad 21. Exemplarily, the second light shielding layer 32 is a rectangular ring or a square ring when viewed from above. When viewed from above, the periphery of the photosensitive area 20a serves as the inner circle boundary of the second annular area, and the second annular area extends away from the center of the photosensitive area 20a to at least cover the bonding point of the wire W on the pad 21, so as to prevent, for example, incident light from entering the thickness range of the filter 30 and irradiating the non-photosensitive area (the area outside the photosensitive area 20a on the photosensitive chip 20) and the wire W, causing interference such as reflection and noise light. The center of the second annular area coincides with the center of the photosensitive area 20a.

图3为一种图像传感器结构示意图。图3中,滤光片30靠近感光芯片20的一侧表面(下表面)设置有第二黑光阻层02,滤光片30的上表面不设置黑光阻层。第二黑光阻层02设置在滤光片30的下表面,第二黑光阻层02被封装在基板10和滤光片30围合成的腔体内。第二黑光阻层02有效吸收和遮挡腔体内部的反光,耀光和杂讯光。耀光和杂讯光是指一些对成像品质影响的反射光和/或折射光;在图像传感器内部,不同材料例如金线、粘接胶水的镜面、玻璃棱角的反射光和/或折射光通常需要遮蔽。深入研究发现,因第二黑光阻层02的材质黑光阻有一定的吸湿性,湿气封在腔体内,在高温情况下析出或裂解出腐蚀气体,加速金丝W压焊点的开裂,会影响图像传感器可靠性(湿气在腔体内经过高温可靠性测试后会影响金丝W与焊垫21或焊盘11的结合力);而且第二黑光阻层02与侧壁10b之间有间隙,存在外边缘间隙处漏光缺点。第二黑光阻层02设置在滤光片30下表面的方案,有较好的耀光、杂讯光遮挡能力,但是高温可靠性较差,试验无法通过高温1000小时验证。FIG3 is a schematic diagram of the structure of an image sensor. In FIG3 , a second black photoresist layer 02 is provided on one side surface (lower surface) of the filter 30 close to the photosensitive chip 20, and no black photoresist layer is provided on the upper surface of the filter 30. The second black photoresist layer 02 is provided on the lower surface of the filter 30, and the second black photoresist layer 02 is encapsulated in a cavity surrounded by the substrate 10 and the filter 30. The second black photoresist layer 02 effectively absorbs and blocks the reflected light, glare and noise light inside the cavity. Glare and noise light refer to some reflected light and/or refracted light that affect the imaging quality; inside the image sensor, the reflected light and/or refracted light of different materials such as gold wire, mirror surface of bonding glue, and glass edges usually need to be shielded. In-depth research has found that because the material of the second black photoresist layer 02 is black photoresist, it has a certain degree of hygroscopicity. Moisture is sealed in the cavity, and corrosive gases are precipitated or decomposed under high temperature conditions, which accelerates the cracking of the gold wire W pressure solder joints and affects the reliability of the image sensor (moisture in the cavity will affect the bonding force between the gold wire W and the pad 21 or the pad 11 after high-temperature reliability testing); and there is a gap between the second black photoresist layer 02 and the side wall 10b, and there is a light leakage defect at the outer edge gap. The solution in which the second black photoresist layer 02 is set on the lower surface of the filter 30 has better glare and noise light shielding capabilities, but poor high-temperature reliability, and the test cannot pass the high-temperature 1000-hour verification.

图4为另一种图像传感器结构示意图。图4中,滤光片30远离感光芯片20的一侧表面(上表面)设置有第一黑光阻层01,滤光片30的下表面不设置黑光阻层。光线最大入射角同样为θ,tanθ=(A+C)/E(A为滤光片与感光芯片的非感光区的间距,C为滤光片厚度,E为第二非功能避光区宽度)。深入研究发现,相对图3中滤光片30下表面设置第二黑光阻层02,图4中滤光片30上表面设置第一黑光阻层01的设计,对感光芯片20的尺寸要求较高,滤光片厚度C范围内引起透光,导致第二非功能避光区宽度E尺寸更大。感光芯片20为矩形或方形,相应的,感光芯片20从感光区20a往前后左右四个方向均向外延伸,使感光芯片20自身尺寸以及图像传感器整体封装尺寸均需更大,整体成本更高。因此,滤光片30上表面设置第一黑光阻层01的方案,为了解决滤光片厚度C引起漏光问题势必增加感光芯片20非感光区的尺寸,导致感光芯片20产品最终尺寸变大。第一黑光阻层01设置在滤光片30的上表面的方案,耀光和杂讯光遮挡性能较差,需要更大的感光芯片20尺寸。因第一黑光阻层01不在基板10和滤光片30围合成的腔体内,第一黑光阻层01不受吸湿性以及高温的影响,该方案高温可靠性稳定,试验可以通过高温2000小时验证。FIG4 is a schematic diagram of another image sensor structure. In FIG4 , a first black photoresist layer 01 is provided on the side surface (upper surface) of the filter 30 away from the photosensitive chip 20, and no black photoresist layer is provided on the lower surface of the filter 30. The maximum incident angle of light is also θ, tanθ=(A+C)/E (A is the distance between the filter and the non-photosensitive area of the photosensitive chip, C is the thickness of the filter, and E is the width of the second non-functional light-shielding area). In-depth research has found that compared with the design of setting the second black photoresist layer 02 on the lower surface of the filter 30 in FIG3 , the design of setting the first black photoresist layer 01 on the upper surface of the filter 30 in FIG4 has higher requirements on the size of the photosensitive chip 20, causing light transmission within the range of the filter thickness C, resulting in a larger size of the second non-functional light-shielding area width E. The photosensitive chip 20 is rectangular or square, and accordingly, the photosensitive chip 20 extends outward from the photosensitive area 20a in four directions, front, back, left, and right, so that the size of the photosensitive chip 20 itself and the overall packaging size of the image sensor need to be larger, and the overall cost is higher. Therefore, the scheme of setting the first black photoresist layer 01 on the upper surface of the filter 30 will inevitably increase the size of the non-photosensitive area of the photosensitive chip 20 in order to solve the light leakage problem caused by the filter thickness C, resulting in a larger final size of the photosensitive chip 20 product. The scheme of setting the first black photoresist layer 01 on the upper surface of the filter 30 has poor glare and noise light shielding performance, and requires a larger photosensitive chip 20 size. Because the first black photoresist layer 01 is not in the cavity enclosed by the substrate 10 and the filter 30, the first black photoresist layer 01 is not affected by hygroscopicity and high temperature. The high-temperature reliability of this scheme is stable, and the test can be verified by 2000 hours of high temperature.

继续如图1和图2所示,本发明在滤光片30上表面设置第一遮光层31,且在滤光片30下表面设置第二遮光层32。滤光片30双面设置遮光层的设计,且大部分遮光层在滤光片30上表面,仅留少量的遮光层在滤光片30下表面,便于保持原有的遮光功能,这样的结构可以大大减少腔体内的湿气,满足产品高温可靠性的需求。Continuing with FIG. 1 and FIG. 2 , the present invention provides a first light shielding layer 31 on the upper surface of the filter 30, and a second light shielding layer 32 on the lower surface of the filter 30. The light shielding layer is designed to be provided on both sides of the filter 30, and most of the light shielding layer is on the upper surface of the filter 30, leaving only a small amount of light shielding layer on the lower surface of the filter 30, so as to maintain the original light shielding function. Such a structure can greatly reduce the moisture in the cavity and meet the high temperature reliability requirements of the product.

本发明第一遮光层31和第二遮光层32用于遮挡耀光和杂讯光对成像的干扰。在不改变感光芯片20自身尺寸和性能以及图像传感器整体封装尺寸的情况下,采用滤光片30上下表面均设置遮光层的设计,光线最大入射角为同样的θ,tanθ=C/D,(C为滤光片厚度,D为第二遮光层宽度)。第二遮光层宽度D相比图3中第二黑光阻层02的尺寸减小。The first light shielding layer 31 and the second light shielding layer 32 of the present invention are used to block the interference of glare and noise light on imaging. Without changing the size and performance of the photosensitive chip 20 itself and the overall packaging size of the image sensor, the design of setting light shielding layers on the upper and lower surfaces of the filter 30 is adopted, and the maximum incident angle of light is the same θ, tanθ=C/D, (C is the thickness of the filter, and D is the width of the second light shielding layer). The width D of the second light shielding layer is smaller than the size of the second black photoresist layer 02 in Figure 3.

本发明在滤光片30上表面设置第一遮光层31,且在滤光片30下表面设置第二遮光层32。第二遮光层32以较小尺寸设置在产品腔体内,吸湿较少,提高图像传感器产品封装体在高温条件下的可靠性,减少第二遮光层32析出或裂解的腐蚀气体对产品焊点的影响,从而提高产品的品质及性能。而且,因第一遮光层31设置在滤光片30上表面引起的滤光片厚度C范围内的漏光正好被第二遮光层32遮挡,从而保持遮光性能的同时,没有增加第一非功能避光区宽度B的尺寸。滤光片30下表面少量第二遮光层32来弥补滤光片30上表面第一遮光层31遮光的不足。本发明既有较好的耀光和杂讯光的遮挡特性,又兼顾下表面局部少量第二遮光层32设计,提高了产品可靠性。另外,由于第一遮光层31设置在滤光片30上表面,位于滤光片30和基板10围合成的容纳空间的外面,第一遮光层31的外边界不再受容纳空间侧壁的限制或干涉,第一遮光层31可以向外延伸,确保容纳空间的侧壁内壁处不漏光,获得更好的遮光性能。The present invention sets a first light shielding layer 31 on the upper surface of the filter 30, and sets a second light shielding layer 32 on the lower surface of the filter 30. The second light shielding layer 32 is set in a smaller size in the product cavity, absorbs less moisture, improves the reliability of the image sensor product package under high temperature conditions, reduces the influence of the corrosive gas precipitated or decomposed by the second light shielding layer 32 on the product solder joints, and thus improves the quality and performance of the product. Moreover, the light leakage within the filter thickness C range caused by the first light shielding layer 31 being set on the upper surface of the filter 30 is just blocked by the second light shielding layer 32, thereby maintaining the light shielding performance while not increasing the size of the width B of the first non-functional light-shielding area. A small amount of the second light shielding layer 32 on the lower surface of the filter 30 compensates for the lack of light shielding of the first light shielding layer 31 on the upper surface of the filter 30. The present invention has both good glare and noise light shielding characteristics, and takes into account the design of a small amount of the second light shielding layer 32 locally on the lower surface, thereby improving product reliability. In addition, since the first light-shielding layer 31 is arranged on the upper surface of the filter 30 and is located outside the storage space enclosed by the filter 30 and the substrate 10, the outer boundary of the first light-shielding layer 31 is no longer restricted or interfered by the side walls of the storage space. The first light-shielding layer 31 can extend outward to ensure that no light leaks from the inner wall of the side wall of the storage space, thereby obtaining better light-shielding performance.

本发明还提供一种图像传感器的制作方法,如图1和图5所示,包括:The present invention also provides a method for manufacturing an image sensor, as shown in FIG. 1 and FIG. 5 , comprising:

步骤S1、提供基板10和感光芯片20,将感光芯片20的背面固定于基板10上;感光芯片20的正面具有感光区20a和环绕感光区20a的焊垫区20b;焊垫区20b设置有若干焊垫21;基板10上设置有若干焊盘11,焊盘11与焊垫21通过导线W对应电连接;Step S1, providing a substrate 10 and a photosensitive chip 20, fixing the back side of the photosensitive chip 20 on the substrate 10; the front side of the photosensitive chip 20 has a photosensitive area 20a and a pad area 20b surrounding the photosensitive area 20a; the pad area 20b is provided with a plurality of pads 21; the substrate 10 is provided with a plurality of pads 11, and the pads 11 are electrically connected to the pads 21 through wires W;

步骤S2、提供滤光片30,在滤光片30厚度方向的两表面分别形成第一遮光层31和第二遮光层32;Step S2, providing a filter 30, and forming a first light shielding layer 31 and a second light shielding layer 32 on two surfaces of the filter 30 in a thickness direction, respectively;

步骤S3、将滤光片30和基板10围合成一容纳空间,感光芯片20置于容纳空间内;第一遮光层31在基板10上的投影覆盖感光区20a的周边与容纳空间侧壁之间的第一环形区域;第二遮光层32位于容纳空间内,第二遮光层32在感光芯片20上的投影至少覆盖感光区20a的周边与导线W在焊垫21上的压焊点之间的第二环形区域。Step S3, enclose the filter 30 and the substrate 10 to form a accommodating space, and place the photosensitive chip 20 in the accommodating space; the projection of the first light-shielding layer 31 on the substrate 10 covers the first annular area between the periphery of the photosensitive area 20a and the side wall of the accommodating space; the second light-shielding layer 32 is located in the accommodating space, and the projection of the second light-shielding layer 32 on the photosensitive chip 20 at least covers the second annular area between the periphery of the photosensitive area 20a and the bonding point of the wire W on the pad 21.

导线W包括金线、铜线、铝线、银线或合金线中的至少一种。导线W可通过热超声键合(或压焊)在焊盘11或焊垫21上。滤光片30和基板10可通过胶粘围合成一容纳空间。第一遮光层31和第二遮光层32的材质例如均为黑光阻,黑光阻是具有感光效应且在固化后可以不透光的材料。对黑光阻进行曝光以形成预设尺寸,本实施例可采用曝光工艺形成第一遮光层31和第二遮光层32,工艺简单并且容易操控,第一遮光层31和第二遮光层32的形状和尺寸可以非常精确。第一遮光层31和第二遮光层32的材质还可为黑漆,黑漆可通过喷涂和烘烤工艺形成。形成第一遮光层31和第二遮光层32的工艺也不限于是曝光工艺,还可以是涂布或溅射等工艺。The wire W includes at least one of a gold wire, a copper wire, an aluminum wire, a silver wire or an alloy wire. The wire W can be bonded (or pressure welded) on the pad 11 or the pad 21 by thermosonic bonding. The filter 30 and the substrate 10 can be enclosed by gluing to form a accommodating space. The material of the first light shielding layer 31 and the second light shielding layer 32 are, for example, black photoresist, which is a material with a photosensitive effect and can be opaque after curing. The black photoresist is exposed to form a preset size. In this embodiment, the first light shielding layer 31 and the second light shielding layer 32 can be formed by an exposure process. The process is simple and easy to control, and the shape and size of the first light shielding layer 31 and the second light shielding layer 32 can be very precise. The material of the first light shielding layer 31 and the second light shielding layer 32 can also be black paint, which can be formed by spraying and baking processes. The process of forming the first light shielding layer 31 and the second light shielding layer 32 is not limited to an exposure process, but can also be a coating or sputtering process.

综上所述,本发明提供一种图像传感器及其制作方法,图像传感器包括:基板和感光芯片,感光芯片的背面固定于基板上;感光芯片的正面具有感光区和环绕感光区的焊垫区;焊垫区设置有若干焊垫;基板上设置有若干焊盘,焊盘与焊垫通过导线对应电连接;滤光片,滤光片和基板围合成一容纳空间,感光芯片置于容纳空间内;滤光片远离感光芯片的一侧表面设置有第一遮光层;第一遮光层在基板上的投影覆盖感光区的周边与容纳空间侧壁之间的第一环形区域;滤光片靠近感光芯片的一侧表面设置有第二遮光层;第二遮光层在感光芯片上的投影至少覆盖感光区的周边与导线在焊垫上的压焊点之间的第二环形区域。本发明在不增大感光芯片自身尺寸以及不增大图像传感器封装尺寸的情况下,通过双面遮光层有效做到遮挡耀光和杂讯光,提高产品成像品质的同时又提高了产品可靠性。In summary, the present invention provides an image sensor and a manufacturing method thereof, wherein the image sensor comprises: a substrate and a photosensitive chip, wherein the back of the photosensitive chip is fixed on the substrate; the front of the photosensitive chip has a photosensitive area and a pad area surrounding the photosensitive area; the pad area is provided with a plurality of pads; a plurality of pads are provided on the substrate, and the pads are electrically connected to the pads through wires; a filter, wherein the filter and the substrate enclose a receiving space, and the photosensitive chip is placed in the receiving space; a first light shielding layer is provided on the surface of the filter away from the photosensitive chip; the projection of the first light shielding layer on the substrate covers the first annular area between the periphery of the photosensitive area and the side wall of the receiving space; a second light shielding layer is provided on the surface of the filter close to the photosensitive chip; the projection of the second light shielding layer on the photosensitive chip at least covers the second annular area between the periphery of the photosensitive area and the pressure welding point of the wire on the pad. The present invention effectively blocks glare and noise light through a double-sided light shielding layer without increasing the size of the photosensitive chip itself and the size of the image sensor package, thereby improving the product imaging quality and the product reliability.

本说明书中各个实施例采用递进的方式描述,每个实施例重点说明的都是与其他实施例的不同之处,各个实施例之间相同相似部分互相参见即可。对于实施例公开的方法而言,由于与实施例公开的器件相对应,所以描述的比较简单,相关之处参见方法部分说明即可。In this specification, each embodiment is described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the embodiments can be referred to each other. For the method disclosed in the embodiment, since it corresponds to the device disclosed in the embodiment, the description is relatively simple, and the relevant parts can be referred to the method part description.

上述描述仅是对本发明较佳实施例的描述,并非对本发明权利范围的任何限定,任何本领域技术人员在不脱离本发明的精神和范围内,都可以利用上述揭示的方法和技术内容对本发明技术方案做出可能的变动和修改,因此,凡是未脱离本发明技术方案的内容,依据本发明的技术实质对以上实施例所作的任何简单修改、等同变化及修饰,均属于本发明技术方案的保护范围。The above description is only a description of the preferred embodiment of the present invention, and is not any limitation on the scope of rights of the present invention. Any technical personnel in this field can make possible changes and modifications to the technical solution of the present invention by using the methods and technical contents disclosed above without departing from the spirit and scope of the present invention. Therefore, any simple modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention shall fall within the protection scope of the technical solution of the present invention.

Claims (10)

1. An image sensor, comprising:
The back of the photosensitive chip is fixed on the substrate; the front surface of the photosensitive chip is provided with a photosensitive area and a welding pad area surrounding the photosensitive area; the welding pad area is provided with a plurality of welding pads; the substrate is provided with a plurality of bonding pads, and the bonding pads are correspondingly and electrically connected with the bonding pads through wires;
the optical filter and the substrate enclose an accommodating space, and the photosensitive chip is arranged in the accommodating space;
A first shading layer is arranged on the surface of one side, far away from the photosensitive chip, of the optical filter; the projection of the first shading layer on the substrate covers a first annular area between the periphery of the photosensitive area and the side wall of the accommodating space; a second shading layer is arranged on the surface of one side, close to the photosensitive chip, of the optical filter; and the projection of the second shading layer on the photosensitive chip at least covers a second annular area between the periphery of the photosensitive area and the pressure welding point of the lead wire on the welding pad.
2. The image sensor of claim 1, wherein the first light shielding layer and the second light shielding layer each comprise at least one of black photoresist, plastic, metal, and black paint.
3. The image sensor of claim 1, wherein the substrate comprises a printed circuit board or a ceramic circuit board.
4. The image sensor of claim 1, wherein the substrate comprises an integral structure of a bottom plate and a side wall extending upward from a periphery of the bottom plate, the optical filter contacts a top of the side wall of the substrate to form an accommodating space, and the side wall of the substrate is opaque.
5. The image sensor of claim 1, wherein the substrate is a flat panel structure, the image sensor further comprising a frame matingly bonded between the substrate and the optical filter; the substrate, the frame and the optical filter are enclosed to form an accommodating space; the frame is opaque.
6. The image sensor of claim 1, wherein a center of the first annular region and a center of the second annular region each coincide with a center of the photosensitive region.
7. The image sensor of claim 1, wherein the filter comprises any one of glass, plastic, or sapphire.
8. The image sensor of claim 7, wherein both side surfaces of the optical filter in the thickness direction thereof are coated with an infrared filter film and/or an optical antireflection film.
9. The image sensor of claim 1, wherein the wire comprises at least one of gold wire, copper wire, aluminum wire, silver wire, or alloy wire.
10. A method for manufacturing an image sensor, comprising:
Providing a substrate and a photosensitive chip, and fixing the back surface of the photosensitive chip on the substrate; the front surface of the photosensitive chip is provided with a photosensitive area and a welding pad area surrounding the photosensitive area; the welding pad area is provided with a plurality of welding pads; the substrate is provided with a plurality of bonding pads, and the bonding pads are correspondingly and electrically connected with the bonding pads through wires;
Providing a light filter, and forming a first light shielding layer and a second light shielding layer on two surfaces of the light filter in the thickness direction;
Enclosing the optical filter and the substrate into an accommodating space, and placing the photosensitive chip in the accommodating space; the projection of the first shading layer on the substrate covers a first annular area between the periphery of the photosensitive area and the side wall of the accommodating space; the second shading layer is positioned in the accommodating space, and the projection of the second shading layer on the photosensitive chip at least covers a second annular area between the periphery of the photosensitive area and the pressure welding point of the lead wire on the welding pad.
CN202410253992.2A 2024-03-06 2024-03-06 Image sensor and method for manufacturing the same Pending CN118016686A (en)

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