CN117959902A - Gas purification function early warning system and method based on data feedback - Google Patents
Gas purification function early warning system and method based on data feedback Download PDFInfo
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Abstract
The invention discloses a gas purification function early warning system and a method based on data feedback, which belong to the field of data processing.
Description
Technical Field
The invention belongs to the field of data processing, and particularly relates to a gas purification function early warning system and method based on data feedback.
Background
Gas purification is a process involving the purification and purification of a gas in order to obtain a gas of high purity or to remove certain specific gas impurities. This process is very important in many industrial and scientific fields, because impurities in the gas may adversely affect the quality of the product and the production process, and different techniques and methods may be used in the gas purification process, including physical adsorption, chemical adsorption, molecular sieve adsorption, catalytic reaction, ultra-low temperature adsorption, metal getter adsorption, etc., where physical adsorption and chemical adsorption are two common adsorption modes:
For example, in the semiconductor industry, gas purifiers are used for purifying nitrogen, hydrogen, argon, ammonia and other gases required by process equipment such as epitaxy, diffusion, MOCVD, ion implantation, plasma dry etching, photolithography, annealing, lapping, sintering and the like in the preparation process, in the optical fiber industry, purifiers are used for purifying protective gases such as nitrogen and helium at the end, and in the chemical industry, purifiers can be used for removing oxygen and water vapor in nitrogen, hydrogen, gas/liquid phase hydrocarbons;
however, in the gas purification process, comprehensive analysis cannot be performed on gas purification data and equipment operation data, so that the gas purification function early warning accuracy and early warning efficiency of the equipment are reduced;
For example, in the chinese patent with publication number CN209343155U, a control device for a gas purifier is disclosed, which includes a monitoring center CPU and a scene controller i, a scene controller ii, and a scene controller iii that interact with the monitoring center CPU, where the monitoring center CPU is respectively connected with the scene controller i, the scene controller ii, and the scene controller iii through a GPRS module i, a GPRS module ii, and a GPRS module iii, the scene controller i, the scene controller ii, and the scene controller iii respectively control the purifier i, the purifier ii, and the purifier iii, the purifier i, the purifier ii, and the purifier iii each include a purifier body, a heating device, a catalytic oxidation device, and a filtering device, the monitoring center CPU includes a control panel and an infrared control, the control panel is driven by mobile communication, and the infrared control is driven by a remote device;
The problems proposed in the background art exist in the above patents: the prior art cannot rapidly carry out comprehensive analysis on purification data and equipment operation data, so that the early warning accuracy and early warning efficiency of the gas purification function of equipment are reduced.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a gas purification function early warning system and a method based on data feedback, the invention fills gas into purification equipment to carry out purification operation, acquires equipment operation data in the gas purification process and gas data in the gas purification process, establishes a gas purification abnormality judgment model, guides the acquired gas data in the gas purification process into the established gas purification abnormality judgment model to carry out analysis of gas purification abnormality, establishes the equipment operation abnormality judgment model, guides the acquired equipment operation data in the gas purification process into the established equipment operation abnormality judgment model to carry out analysis of equipment operation abnormality, acquires the analysis result of the gas purification abnormality and the analysis result of the equipment operation abnormality to carry out judgment of the gas purification function abnormality, carries out gas purification abnormality early warning according to the analysis result of the gas purification function abnormality, calculates the gas purification data and the equipment operation data, and improves the gas purification function early warning accuracy and early warning efficiency of the equipment.
In order to achieve the above purpose, the present invention provides the following technical solutions:
a gas purification function early warning method based on data feedback comprises the following specific steps:
Filling gas into purifying equipment to perform purifying operation, and obtaining equipment operation data in the gas purifying process and gas data in the gas purifying process;
establishing a gas purification abnormality judgment model, and introducing the obtained gas data in the gas purification process into the established gas purification abnormality judgment model to analyze the gas purification abnormality;
establishing an equipment operation abnormality judgment model, and importing the acquired equipment operation data in the gas purification process into the established equipment operation abnormality judgment model to analyze the equipment operation abnormality;
acquiring a gas purification abnormality analysis result and an equipment operation abnormality analysis result to judge the gas purification function abnormality;
And carrying out gas purification abnormality early warning according to the gas purification function abnormality judgment result.
The method for purifying the gas by using the gas purification device comprises the following steps:
S11, filling the gas to be purified into purifying equipment to be monitored at a set flow rate for purifying treatment, collecting the component content of the gas to be purified, arranging a gas sensor at the tail end of each purifying step for collecting the component content to be removed in the gas flow, and simultaneously obtaining the variation of the gas flow rate when entering and exiting the equipment;
S12, collecting equipment operation data in the purification process in real time through an equipment data collection terminal, wherein the equipment operation data comprise equipment operation temperature, current, voltage and equipment internal air pressure data;
S13, storing the obtained content of the gas components to be removed and the change amount of the gas flow rate in and out of the equipment in the purification steps in a first storage module, and storing the obtained equipment operation data in the purification process in a second storage module.
The specific explanation is that the gas purification abnormality judgment model includes the following specific matters:
S21, extracting the gas component content of each purification step obtained by extraction, and calculating the variation of each component to be removed in the process of each purification step;
s22, introducing the obtained variation of each component in each purification step into a component variation abnormal value calculation formula to calculate a component variation abnormal value, wherein the component variation abnormal value calculation formula is as follows:
wherein n is the number of purification steps, m is the kind of gas component to be removed by the purification steps,/> Important coefficients for the j-th gas component species to be removed for the i-th purification step,/>For the standard variation of the kind of gas component to be removed by the jth purification step,/>For the content of the j-th gas component species to be removed at the end of the i-th purification step,/>The content of the gas component species to be removed for the jth at the beginning of the ith purification step; here, the important coefficient of the gas component species to be removed in the j-th purification step in the i-th purification step is obtained by: acquiring the set safe content ratio of each gas impurity after each purification step, and dividing the integral content ratio of each gas impurity by the set safe content ratio of each gas impurity to obtain an important coefficient of the gas component species;
S23, extracting the obtained variation of the gas flow rate and the calculated component variation abnormal value during the equipment entering and exiting, and introducing the obtained variation of the gas flow rate and the calculated component variation abnormal value during the equipment entering and exiting into a gas purification abnormal value calculation formula for calculating the gas purification abnormal value, wherein the gas purification abnormal value calculation formula is as follows:
Wherein/> Is the ratio coefficient of abnormal value of gas flow velocity,/>Is the ratio coefficient of abnormal value of gas component variation quantity,/>For the gas flow rate at entry into the apparatus,/>Is the gas flow rate when exiting the device, where/>；
It should be noted here that the following benefits are: the purification effect of the purification equipment and the filtering capacity of each subsystem in the purification equipment are comprehensively analyzed, so that the analysis capacity of the purification effect is improved;
The equipment operation abnormality judgment model specifically needs to be described, and comprises the following specific steps:
s31, acquiring temperature, current, voltage and internal air pressure data of equipment in the operation process of the purification equipment, and simultaneously acquiring a safe temperature range, a safe current range, a safe voltage range and an internal air pressure data range of the safety equipment for the operation of the purification equipment;
S32, acquiring temperature, current, voltage and internal air pressure data of equipment in the operation process of the purification equipment, and simultaneously acquiring a safe temperature range, a safe current range, a safe voltage range and an internal air pressure data range of the purification equipment, and importing the safe temperature range, the safe current range, the safe voltage range and the internal air pressure data range of the safety equipment into an equipment operation abnormal value calculation formula to calculate the equipment operation abnormal value, wherein the equipment operation abnormal value calculation formula is as follows:
wherein C is the data type in the equipment operation data, T is the operation time, dt is the time integral,/> For the duty factor of item c in the equipment operation data,/>For the value of item c in the equipment operation data at time t,/>Median value of security range of item c in equipment operation data,/>For the maximum value of the c-th safety range in the equipment operation data,/>Is the minimum value of the security range of the c-th item in the equipment operation data.
The method for judging the abnormal gas purification function by acquiring the analysis result of the abnormal gas purification and the analysis result of the abnormal operation of the equipment specifically comprises the following specific contents:
Obtaining the calculated abnormal value of equipment operation and the gas purification abnormal value, adding the obtained abnormal value of gas purification and the abnormal value of equipment operation to obtain a gas purification early warning judgment value, comparing the obtained gas purification early warning judgment value with a set gas purification early warning judgment threshold, judging that the gas purification process of the purification equipment is abnormal if the gas purification early warning judgment value is greater than or equal to the set gas purification early warning judgment threshold, and judging that the gas purification process of the purification equipment is normal if the obtained gas purification early warning judgment value is less than the set gas purification early warning judgment threshold.
The specific details of the gas purification abnormality pre-warning according to the gas purification abnormality determination result are as follows:
if the judgment result of the abnormality of the gas purification process of the purification equipment is obtained, the information transmission module is used for issuing an abnormal gas purification early warning to the management terminal to remind the management party of equipment maintenance.
It should be noted that, the ratio coefficient of the abnormal value of the gas flow velocity, the ratio coefficient of the abnormal value of the variation of the gas component, the gas purification early warning judgment threshold value and the ratio coefficient of the c-th item in the equipment operation data are as follows: acquiring 5000 groups of equipment operation data in the gas purification process and gas data in the gas purification process, classifying the purified gas into normal purified gas and abnormal purified gas, substituting the equipment operation data in the gas purification process and the gas data in the gas purification process into the equipment operation data and the gas data in the gas purification process to calculate a gas purification early warning judgment value, importing the calculated gas purification early warning judgment value and classification result into fitting software, and outputting the optimal gas flow velocity abnormal value proportion coefficient, the gas component variation abnormal value proportion coefficient, the gas purification early warning judgment threshold and the value of the proportion coefficient of the c-th item in the equipment operation data, which accord with judgment accuracy.
The gas purification function early warning system based on data feedback is realized based on the gas purification function early warning method based on data feedback, and comprises a data acquisition module, a gas purification abnormality judgment model building module, an equipment operation abnormality judgment model building module, a gas purification function abnormality judgment module, an abnormality early warning module and a control module, wherein the data acquisition module is used for filling gas into purification equipment to carry out purification operation, equipment operation data in the gas purification process and gas data in the gas purification process are obtained, the gas purification abnormality judgment model building module is used for building a gas purification abnormality judgment model, and the obtained gas data in the gas purification process is imported into the built gas purification abnormality judgment model to carry out analysis of gas purification abnormality.
The device operation abnormality judgment module is used for establishing a device operation abnormality judgment model, importing the obtained device operation data in the gas purification process into the established device operation abnormality judgment model to analyze the device operation abnormality, the gas purification function abnormality judgment module is used for obtaining a gas purification abnormality analysis result and a device operation abnormality analysis result to judge the gas purification function abnormality, and the abnormality early warning module is used for carrying out gas purification abnormality early warning according to the gas purification function abnormality judgment result.
The control module is used for controlling the operation of the data acquisition module, the gas purification abnormality judgment model building module, the equipment operation abnormality judgment model building module, the gas purification function abnormality judgment module and the abnormality early warning module.
An electronic device, comprising: a processor and a memory, wherein the memory stores a computer program for the processor to call;
The processor executes the gas purification function early warning method based on data feedback by calling the computer program stored in the memory.
A computer readable storage medium storing instructions that, when executed on a computer, cause the computer to perform a data feedback based gas purification function pre-warning method as described above.
Compared with the prior art, the invention has the beneficial effects that:
According to the invention, gas is filled into purification equipment to carry out purification operation, equipment operation data in the gas purification process and gas data in the gas purification process are obtained, a gas purification abnormality judgment model is established, the obtained gas data in the gas purification process is imported into the established gas purification abnormality judgment model to carry out analysis of gas purification abnormality, the equipment operation abnormality judgment model is established, the obtained equipment operation data in the gas purification process is imported into the established equipment operation abnormality judgment model to carry out analysis of equipment operation abnormality, the gas purification abnormality analysis result and the equipment operation abnormality analysis result are obtained to carry out judgment of gas purification function abnormality, gas purification abnormality early warning is carried out according to the gas purification function abnormality judgment result, the gas purification data and the equipment operation data are analyzed, and the gas purification function early warning accuracy and early warning efficiency of the equipment are improved.
Drawings
FIG. 1 is a schematic diagram of the overall flow of a gas purification function early warning method based on data feedback;
FIG. 2 is a schematic diagram of the whole frame of a gas purification function early warning system based on data feedback.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments.
Example 1
Referring to fig. 1, an embodiment of the present invention is provided: a gas purification function early warning method based on data feedback comprises the following specific steps:
Filling gas into purifying equipment to perform purifying operation, and obtaining equipment operation data in the gas purifying process and gas data in the gas purifying process;
specifically, the method for purifying the gas by filling the gas into the purifying device to perform the purifying operation includes the following steps:
S11, filling the gas to be purified into purifying equipment to be monitored at a set flow rate for purifying treatment, collecting the component content of the gas to be purified, arranging a gas sensor at the tail end of each purifying step for collecting the component content to be removed in the gas flow, and simultaneously obtaining the variation of the gas flow rate when entering and exiting the equipment;
S12, collecting equipment operation data in the purification process in real time through an equipment data collection terminal, wherein the equipment operation data comprise equipment operation temperature, current, voltage and equipment internal air pressure data;
S13, storing the obtained content of the gas components to be removed in each purification step and the change amount of the gas flow rate in and out of the equipment in a first storage module, and storing the obtained equipment operation data in the purification process in a second storage module;
establishing a gas purification abnormality judgment model, and introducing the obtained gas data in the gas purification process into the established gas purification abnormality judgment model to analyze the gas purification abnormality;
It should be specifically noted that the gas purification abnormality determination model includes the following specific matters:
S21, extracting the gas component content of each purification step obtained by extraction, and calculating the variation of each component to be removed in the process of each purification step;
s22, introducing the obtained variation of each component in each purification step into a component variation abnormal value calculation formula to calculate a component variation abnormal value, wherein the component variation abnormal value calculation formula is as follows:
wherein n is the number of purification steps, m is the kind of gas component to be removed by the purification steps,/> Important coefficients for the j-th gas component species to be removed for the i-th purification step,/>For the standard variation of the kind of gas component to be removed by the jth purification step,/>For the content of the j-th gas component species to be removed at the end of the i-th purification step,/>The content of the gas component species to be removed for the jth at the beginning of the ith purification step; here, the important coefficient of the gas component species to be removed in the j-th purification step in the i-th purification step is obtained by: acquiring the set safe content ratio of each gas impurity after each purification step, and dividing the integral content ratio of each gas impurity by the set safe content ratio of each gas impurity to obtain an important coefficient of the gas component species;
S23, extracting the obtained variation of the gas flow rate and the calculated component variation abnormal value during the equipment entering and exiting, and introducing the obtained variation of the gas flow rate and the calculated component variation abnormal value during the equipment entering and exiting into a gas purification abnormal value calculation formula for calculating the gas purification abnormal value, wherein the gas purification abnormal value calculation formula is as follows:
Wherein/> Is the ratio coefficient of abnormal value of gas flow velocity,/>Is the ratio coefficient of abnormal value of gas component variation quantity,/>For the gas flow rate at entry into the apparatus,/>Is the gas flow rate when exiting the device, where/>；
It should be noted here that the following benefits are: the purification effect of the purification equipment and the filtering capacity of each subsystem in the purification equipment are comprehensively analyzed, so that the analysis capacity of the purification effect is improved;
establishing an equipment operation abnormality judgment model, and importing the acquired equipment operation data in the gas purification process into the established equipment operation abnormality judgment model to analyze the equipment operation abnormality;
The equipment operation abnormality judgment model specifically needs to be described herein, and comprises the following specific steps:
s31, acquiring temperature, current, voltage and internal air pressure data of equipment in the operation process of the purification equipment, and simultaneously acquiring a safe temperature range, a safe current range, a safe voltage range and an internal air pressure data range of the safety equipment for the operation of the purification equipment;
S32, acquiring temperature, current, voltage and internal air pressure data of equipment in the operation process of the purification equipment, and simultaneously acquiring a safe temperature range, a safe current range, a safe voltage range and an internal air pressure data range of the purification equipment, and importing the safe temperature range, the safe current range, the safe voltage range and the internal air pressure data range of the safety equipment into an equipment operation abnormal value calculation formula to calculate the equipment operation abnormal value, wherein the equipment operation abnormal value calculation formula is as follows:
wherein C is the data type in the equipment operation data, T is the operation time, dt is the time integral,/> For the duty factor of item c in the equipment operation data,/>For the value of item c in the equipment operation data at time t,/>Median value of security range of item c in equipment operation data,/>For the maximum value of the c-th safety range in the equipment operation data,/>Is the minimum value of the security range of the c-th item in the equipment operation data.
Acquiring a gas purification abnormality analysis result and an equipment operation abnormality analysis result to judge the gas purification function abnormality;
performing gas purification abnormality early warning according to the gas purification function abnormality judgment result;
The method for judging the abnormal gas purification function by acquiring the analysis result of the abnormal gas purification and the analysis result of the abnormal operation of the equipment specifically comprises the following specific contents:
Obtaining the calculated abnormal value of equipment operation and the gas purification abnormal value, adding the obtained abnormal value of gas purification and the abnormal value of equipment operation to obtain a gas purification early warning judgment value, comparing the obtained gas purification early warning judgment value with a set gas purification early warning judgment threshold, judging that the gas purification process of the purification equipment is abnormal if the gas purification early warning judgment value is greater than or equal to the set gas purification early warning judgment threshold, and judging that the gas purification process of the purification equipment is normal if the obtained gas purification early warning judgment value is less than the set gas purification early warning judgment threshold.
The specific details of the gas purification abnormality pre-warning according to the gas purification abnormality determination result are as follows:
if the judgment result of the abnormality of the gas purification process of the purification equipment is obtained, the information transmission module is used for issuing an abnormal gas purification early warning to the management terminal to remind the management party of equipment maintenance.
It should be noted that, the ratio coefficient of the abnormal value of the gas flow velocity, the ratio coefficient of the abnormal value of the variation of the gas component, the gas purification early warning judgment threshold value and the ratio coefficient of the c-th item in the equipment operation data are as follows: acquiring 5000 groups of equipment operation data in the gas purification process and gas data in the gas purification process, classifying the purified gas into normal purified gas and abnormal purified gas, substituting the equipment operation data in the gas purification process and the gas data in the gas purification process into the equipment operation data and the gas data in the gas purification process to calculate a gas purification early warning judgment value, importing the calculated gas purification early warning judgment value and classification result into fitting software, and outputting the optimal gas flow velocity abnormal value proportion coefficient, the gas component variation abnormal value proportion coefficient, the gas purification early warning judgment threshold and the value of the proportion coefficient of the c-th item in the equipment operation data, wherein the judgment accuracy is met;
It should be noted that, in this embodiment, gas is filled into a purifying device to perform a purifying operation, device operation data in a gas purifying process and gas data in the gas purifying process are obtained, a gas purifying abnormality judging model is established, the obtained gas data in the gas purifying process is led into the established gas purifying abnormality judging model to perform analysis of gas purifying abnormality, the device operation abnormality judging model is established, the obtained device operation data in the gas purifying process is led into the established device operation abnormality judging model to perform analysis of device operation abnormality, a gas purifying abnormality analysis result and a device operation abnormality analysis result are obtained to perform judgment of gas purifying function abnormality, gas purifying abnormality early warning is performed according to the gas purifying function abnormality judging result, the gas purifying data and the device operation data are analyzed, and the gas purifying function early warning accuracy and the early warning efficiency of the device are improved.
Example 2
Referring to fig. 2, a data feedback-based gas purification function early warning system is implemented based on the above-mentioned data feedback-based gas purification function early warning method, and includes a data acquisition module, a gas purification abnormality determination model establishment module, an equipment operation abnormality determination model establishment module, a gas purification function abnormality determination module, an abnormality early warning module and a control module, where the data acquisition module is used to charge gas into a purification equipment to perform purification operation, obtain equipment operation data in a gas purification process and gas data in the gas purification process, and the gas purification abnormality determination model establishment module is used to establish a gas purification abnormality determination model, and introduce the obtained gas data in the gas purification process into the established gas purification abnormality determination model to perform analysis of gas purification abnormality;
The device operation abnormality judgment module is used for establishing a device operation abnormality judgment model, importing the obtained device operation data in the gas purification process into the established device operation abnormality judgment model to analyze the device operation abnormality, and the gas purification function abnormality judgment module is used for obtaining a gas purification abnormality analysis result and judging the gas purification function abnormality according to the device operation abnormality analysis result and carrying out gas purification abnormality early warning according to the gas purification function abnormality judgment result;
The control module is used for controlling the operation of the data acquisition module, the gas purification abnormality judgment model building module, the equipment operation abnormality judgment model building module, the gas purification function abnormality judgment module and the abnormality early warning module.
Example 3
The present embodiment provides an electronic device including: a processor and a memory, wherein the memory stores a computer program for the processor to call;
the processor executes the gas purification function early warning method based on data feedback by calling the computer program stored in the memory.
The electronic device may have a relatively large difference due to different configurations or performances, and may include one or more processors (Central Processing Units, CPU) and one or more memories, where at least one computer program is stored in the memories, and the computer program is loaded and executed by the processors to implement a gas purification function early warning method based on data feedback provided by the above method embodiments. The electronic device can also include other components for implementing the functions of the device, for example, the electronic device can also have wired or wireless network interfaces, input-output interfaces, and the like, for inputting and outputting data. The present embodiment is not described herein.
Example 4
The present embodiment proposes a computer-readable storage medium having stored thereon an erasable computer program;
when the computer program runs on the computer equipment, the computer equipment is caused to execute the gas purification function early warning method based on the data feedback.
For example, the computer readable storage medium can be Read-Only Memory (ROM), random access Memory (Random Access Memory, RAM), compact disk Read-Only Memory (Compact Disc Read-Only Memory, CD-ROM), magnetic tape, floppy disk, optical data storage device, and the like.
It should be understood that, in various embodiments of the present application, the sequence numbers of the foregoing processes do not mean the order of execution, and the order of execution of the processes should be determined by the functions and internal logic thereof, and should not constitute any limitation on the implementation process of the embodiments of the present application.
It should be understood that determining B from a does not mean determining B from a alone, but can also determine B from a and/or other information.
The above embodiments may be implemented in whole or in part by software, hardware, firmware, or any other combination. When implemented in software, the above-described embodiments may be implemented in whole or in part in the form of a computer program product. The computer program product comprises one or more computer instructions or computer programs. When the computer instructions or computer program are loaded or executed on a computer, the processes or functions in accordance with embodiments of the present invention are produced in whole or in part. The computer may be a general purpose computer, a special purpose computer, a computer network, or other programmable apparatus. The computer instructions may be stored in or transmitted from one computer-readable storage medium to another, for example, by way of wired or/and wireless networks from one website site, computer, server, or data center to another. Computer readable storage media can be any available media that can be accessed by a computer or data storage devices, such as servers, data centers, etc. that contain one or more collections of available media. Usable media may be magnetic media (e.g., floppy disks, hard disks, magnetic tape), optical media (e.g., DVD), or semiconductor media. The semiconductor medium may be a solid state disk.
The preferred embodiments of the invention disclosed above are intended only to assist in the explanation of the invention. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best understand and utilize the invention. The invention is limited only by the claims and the full scope and equivalents thereof.
Claims (10)
1. The gas purification function early warning method based on data feedback is characterized by comprising the following specific steps:
Filling gas into purifying equipment to perform purifying operation, and obtaining equipment operation data in the gas purifying process and gas data in the gas purifying process;
establishing a gas purification abnormality judgment model, and introducing the obtained gas data in the gas purification process into the established gas purification abnormality judgment model to analyze the gas purification abnormality;
establishing an equipment operation abnormality judgment model, and importing the acquired equipment operation data in the gas purification process into the established equipment operation abnormality judgment model to analyze the equipment operation abnormality;
acquiring a gas purification abnormality analysis result and an equipment operation abnormality analysis result to judge the gas purification function abnormality;
And carrying out gas purification abnormality early warning according to the gas purification function abnormality judgment result.
2. The method for early warning of a gas purification function based on data feedback according to claim 1, wherein the steps of filling the gas into the purification equipment to perform the purification operation, obtaining the equipment operation data in the gas purification process and the gas data in the gas purification process comprise the following specific steps:
S11, filling the gas to be purified into purifying equipment to be monitored at a set flow rate for purifying treatment, collecting the component content of the gas to be purified, arranging a gas sensor at the tail end of each purifying step for collecting the component content to be removed in the gas flow, and simultaneously obtaining the variation of the gas flow rate when entering and exiting the equipment;
S12, collecting equipment operation data in the purification process in real time through an equipment data collection terminal, wherein the equipment operation data comprise equipment operation temperature, current, voltage and equipment internal air pressure data;
S13, storing the obtained content of the gas components to be removed and the change amount of the gas flow rate in and out of the equipment in the purification steps in a first storage module, and storing the obtained equipment operation data in the purification process in a second storage module.
3. The method for early warning of a gas purification function based on data feedback according to claim 2, wherein the gas purification abnormality judgment model comprises the following specific contents:
S21, extracting the gas component content of each purification step obtained by extraction, and calculating the variation of each component to be removed in the process of each purification step;
s22, introducing the obtained variation of each component in each purification step into a component variation abnormal value calculation formula to calculate a component variation abnormal value, wherein the component variation abnormal value calculation formula is as follows:
wherein n is the number of purification steps, m is the kind of gas component to be removed by the purification steps,/> Important coefficients for the j-th gas component species to be removed for the i-th purification step,/>For the standard variation of the kind of gas component to be removed by the jth purification step,/>For the content of the j-th gas component species to be removed at the end of the i-th purification step,/>The content of the gas component species to be removed for the jth at the beginning of the ith purification step.
4. The method for early warning of a gas purification function based on data feedback as claimed in claim 3, wherein the gas purification abnormality judgment model further comprises the following specific contents:
S23, extracting the obtained variation of the gas flow rate and the calculated component variation abnormal value during the equipment entering and exiting, and introducing the obtained variation of the gas flow rate and the calculated component variation abnormal value during the equipment entering and exiting into a gas purification abnormal value calculation formula for calculating the gas purification abnormal value, wherein the gas purification abnormal value calculation formula is as follows:
Wherein/> Is the ratio coefficient of abnormal value of gas flow velocity,/>Is the ratio coefficient of abnormal value of gas component variation quantity,/>For the gas flow rate at entry into the apparatus,/>Is the gas flow rate when exiting the device, where/>。
5. The method for early warning of a gas purification function based on data feedback as claimed in claim 4, wherein the equipment operation abnormality judgment model comprises the following specific steps:
s31, acquiring temperature, current, voltage and internal air pressure data of equipment in the operation process of the purification equipment, and simultaneously acquiring a safe temperature range, a safe current range, a safe voltage range and an internal air pressure data range of the safety equipment for the operation of the purification equipment;
S32, acquiring temperature, current, voltage and internal air pressure data of equipment in the operation process of the purification equipment, and simultaneously acquiring a safe temperature range, a safe current range, a safe voltage range and an internal air pressure data range of the purification equipment, and importing the safe temperature range, the safe current range, the safe voltage range and the internal air pressure data range of the safety equipment into an equipment operation abnormal value calculation formula to calculate the equipment operation abnormal value, wherein the equipment operation abnormal value calculation formula is as follows:
wherein C is the data type in the equipment operation data, T is the operation time, dt is the time integral,/> For the duty factor of item c in the equipment operation data,/>For the value of item c in the equipment operation data at time t,/>Median value of security range of item c in equipment operation data,/>For the maximum value of the c-th safety range in the equipment operation data,/>Is the minimum value of the security range of the c-th item in the equipment operation data.
6. The method for early warning of gas purification function based on data feedback as claimed in claim 5, wherein the step of obtaining the analysis result of gas purification abnormality and the analysis result of equipment operation abnormality to judge the gas purification function abnormality comprises the following specific contents:
Obtaining the calculated abnormal value of equipment operation and the gas purification abnormal value, adding the obtained abnormal value of gas purification and the abnormal value of equipment operation to obtain a gas purification early warning judgment value, comparing the obtained gas purification early warning judgment value with a set gas purification early warning judgment threshold, judging that the gas purification process of the purification equipment is abnormal if the gas purification early warning judgment value is greater than or equal to the set gas purification early warning judgment threshold, and judging that the gas purification process of the purification equipment is normal if the obtained gas purification early warning judgment value is less than the set gas purification early warning judgment threshold.
7. The method for pre-warning gas purification function based on data feedback according to claim 6, wherein the pre-warning gas purification abnormality according to the determination result of gas purification abnormality comprises the following specific contents:
if the judgment result of the abnormality of the gas purification process of the purification equipment is obtained, the information transmission module is used for issuing an abnormal gas purification early warning to the management terminal to remind the management party of equipment maintenance.
8. The gas purification function early warning system based on data feedback is realized based on the gas purification function early warning method based on data feedback according to any one of claims 1-7, and is characterized by comprising a data acquisition module, a gas purification abnormality judgment model establishment module, a device operation abnormality judgment model establishment module, a gas purification function abnormality judgment module, an abnormality early warning module and a control module, wherein the data acquisition module is used for filling gas into purification devices for purification operation, acquiring device operation data in a gas purification process and gas data in the gas purification process, the gas purification abnormality judgment model establishment module is used for establishing a gas purification abnormality judgment model, and introducing the acquired gas data in the gas purification process into the established gas purification abnormality judgment model for analysis of gas purification abnormality.
9. The system for early warning of gas purification function based on data feedback according to claim 8, wherein the device operation abnormality judgment model building module is configured to build a device operation abnormality judgment model, and to conduct analysis of device operation abnormality by importing device operation data obtained in the gas purification process into the built device operation abnormality judgment model, the gas purification function abnormality judgment module is configured to obtain a gas purification abnormality analysis result and a device operation abnormality analysis result to conduct judgment of gas purification function abnormality, the abnormality early warning module is configured to conduct gas purification abnormality early warning according to the gas purification function abnormality judgment result, and the control module is configured to control operations of the data acquisition module, the gas purification abnormality judgment model building module, the device operation abnormality judgment model building module, the gas purification function abnormality judgment module, and the abnormality early warning module.
10. An electronic device, comprising: a processor and a memory, wherein the memory stores a computer program for the processor to call;
The method is characterized in that the processor executes a data feedback-based gas purification function early warning method according to any one of claims 1 to 7 by calling a computer program stored in the memory.
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