CN117949086A - Multispectral near-field light spot detection device and detection method - Google Patents
Multispectral near-field light spot detection device and detection method Download PDFInfo
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- CN117949086A CN117949086A CN202311794188.7A CN202311794188A CN117949086A CN 117949086 A CN117949086 A CN 117949086A CN 202311794188 A CN202311794188 A CN 202311794188A CN 117949086 A CN117949086 A CN 117949086A
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- 238000001514 detection method Methods 0.000 title claims abstract description 36
- 238000003384 imaging method Methods 0.000 claims abstract description 25
- 230000003287 optical effect Effects 0.000 claims abstract description 16
- 230000005540 biological transmission Effects 0.000 claims abstract description 7
- 230000005499 meniscus Effects 0.000 claims description 26
- 230000003595 spectral effect Effects 0.000 claims description 7
- 230000009467 reduction Effects 0.000 claims description 6
- 238000001228 spectrum Methods 0.000 claims description 4
- 230000005494 condensation Effects 0.000 claims description 3
- 238000009833 condensation Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 238000011895 specific detection Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 229910001374 Invar Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000013080 microcrystalline material Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000011897 real-time detection Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
Abstract
The invention relates to the technical field of optical equipment, and particularly discloses a multispectral near-field light spot detection device and a detection method, wherein the multispectral near-field light spot detection device comprises a primary beam shrinking system, a spectroscope, a reflecting mirror, a secondary beam shrinking system and an imaging detector which are arranged on the same optical path; the method comprises the steps that incident laser composed of two laser beams with different wavelengths is subjected to beam shrinking through a primary beam shrinking system, light beams with two different wavelengths are obtained through transmission and reflection by utilizing spectroscope characteristics, then the light beams are subjected to beam shrinking through a secondary beam shrinking system and enter an imaging detector at the same time, and finally light spots with two different wavelengths can be obtained at the same time; the invention further discloses a specific detection method, and the simultaneous detection of the multispectral near-field light spots is effectively realized. The whole system is simpler and more convenient in structural design, more comprehensive in function and more advantageous in space distribution, and meanwhile, the manufacturing cost is saved.
Description
Technical Field
The invention relates to the technical field of optical equipment, in particular to a multispectral near-field light spot detection device and a detection method.
Background
In the detection of near-field light spots in a traditional optical system, an imaging detector is generally adopted to detect a path of light beams;
The method is only suitable for a single wave band, if the light beams in different spectral bands are to be detected, the optical filters are required to be added for switching so as to achieve the detection purpose, and the method is complex in structure, high in cost and incapable of achieving simultaneous detection of the light beams in all spectral bands.
Disclosure of Invention
The invention aims to solve the technical problem of providing a multispectral near-field light spot detection device and a detection method; the simultaneous detection of the multispectral near-field light spots is realized. The whole system is simpler and more convenient in structural design, more comprehensive in function and more advantageous in space distribution, and meanwhile, the manufacturing cost is saved.
The invention solves the technical problems by adopting the following solution:
A multispectral near-field light spot detection device comprises a primary beam shrinking system, a spectroscope, a reflecting mirror, a secondary beam shrinking system and an imaging detector which are arranged on the same optical path;
The incident laser composed of two laser beams with different wavelengths is condensed by a first-stage beam condensing system, the light beams with two different wavelengths are transmitted and reflected by utilizing the spectroscope characteristic, and then the incident laser is condensed by a second-stage beam condensing system and enters an imaging detector at the same time, and finally, light spots with two different wavelengths can be obtained at the same time.
In some of the possible embodiments of the present invention,
The primary beam shrinking system is a transmission beam shrinking system or a reflection beam shrinking system.
In some of the possible embodiments of the present invention,
The reflective beam shrinking system comprises an off-axis ellipsoidal primary mirror and an off-axis parabolic secondary mirror.
In some of the possible embodiments of the present invention,
The cone coefficient K= -0.999, the curvature radius-441.407 and the Y-direction off-axis amount of 100mm of the off-axis ellipsoidal main mirror;
The cone coefficient k= -1 and the curvature radius-67.053 of the off-axis parabolic secondary mirror, and the distance between the off-axis ellipsoidal main mirror and the off-axis parabolic secondary mirror is 187.25mm;
The distance between the spectroscope and the reflecting mirror is 30mm.
In some of the possible embodiments of the present invention,
The secondary beam shrinking system is a lens group, and the lens group is a spherical lens group, an aspherical lens group or a cylindrical lens group.
In some of the possible embodiments of the present invention,
The spherical lens group comprises a biconvex positive lens, a biconcave negative lens, a positive meniscus lens I, a negative meniscus lens II, and a positive meniscus lens II on the same optical path; the second positive meniscus lens is arranged on one side close to the imaging detector.
In some of the possible embodiments of the present invention,
The aperture of an incident beam of the secondary beam shrinking system is 16.2mm, and the aperture of an emergent beam is 2mm.
In some of the possible embodiments of the present invention,
The thickness of the center of the biconvex positive lens is 12mm, and the focal power is 0.0123;
The thickness of the center of the biconcave negative lens is 8mm, and the focal power is-0.017;
The center thickness of the first positive meniscus lens is 10mm, and the focal power is 0.0076;
the center thickness of the negative meniscus lens is 3mm, and the focal power is-0.0566;
the center thickness of the positive meniscus lens II is 3mm, and the focal power is 0.0061.
In some of the possible embodiments of the present invention,
The imaging detector is a CCD sensor or a CMOS sensor.
The detection method based on the multispectral near-field light spot detection device specifically comprises the following steps:
two laser beams with different wavelengths form incident laser, and the incident laser is condensed by a primary condensation system;
The emergent light of the primary beam-shrinking system is split by a spectroscope to realize beam splitting of different spectral bands so as to obtain a transmission beam and a reflection beam;
the transmitted light beam enters a secondary beam shrinking system, and the reflected light beam enters the secondary beam shrinking system after being emitted by a reflecting mirror;
The transmitted light beam and the reflected light beam enter the imaging detector after being condensed by the secondary beam condensing system, and light spots with different wavelengths are obtained.
Compared with the prior art, the invention has the beneficial effects that:
After the primary beam shrinking system shrinks beams, the beam splitters are used for carrying out beam division on beams in different spectral bands, reflected beams and transmitted beams with different wavelengths after beam division enter the detection unit simultaneously after passing through the same group of secondary beam shrinking systems, so that light spots with different wavelengths are obtained; the device realizes real-time detection of multispectral near-field light spots, makes up for the short plate for single-band detection in the traditional detection mode, has simple and convenient structural design and more comprehensive functions, and simultaneously saves the manufacturing cost.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a schematic structural diagram of embodiment 1 of the present invention;
FIG. 3 is a schematic diagram of a secondary beam shrinking system in embodiment 1 of the invention;
FIG. 4 is a schematic diagram of the photosensitive surface of the imaging detector and the actual light spot in embodiment 1 of the present invention;
FIG. 5 is a schematic diagram of simulation results of embodiment 1 of the present invention;
wherein: 1. an off-axis ellipsoidal primary mirror; 2. off-axis parabolic secondary mirrors; 3. a beam splitter; 4. a reflecting mirror; 5. a secondary beam shrinking system; 6. an imaging detector.
Detailed Description
In the present application, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. Reference to "first," "second," and similar terms herein do not denote any order, quantity, or importance, but rather are used to distinguish one element from another. Likewise, the terms "a" or "an" and the like do not denote a limitation of quantity, but rather denote the presence of at least one. In the implementation of the present application, "and/or" describes the association relationship of the association object, which means that there may be three relationships, for example, a and/or B may mean: a exists alone, A and B exist together, and B exists alone. In the description of the embodiments of the present application, unless otherwise indicated, the meaning of "a plurality" means two or more. For example, a plurality of positioning posts refers to two or more positioning posts. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art according to the specific circumstances.
The present invention will be described in detail below.
As shown in fig. 1-5:
a multispectral near-field light spot detection device comprises a primary beam shrinking system, a spectroscope 3, a reflecting mirror 4, a secondary beam shrinking system 5 and an imaging detector 6 which are arranged on the same optical path;
The incident laser composed of two laser beams with different wavelengths is condensed by a first-stage beam condensing system, the light beams with two different wavelengths are transmitted and reflected by utilizing the characteristics of a spectroscope 3, and then enter an imaging detector 5 at the same time after being condensed by a second-stage beam condensing system 5, and finally light spots with two different wavelengths can be obtained at the same time
The incident laser composed of two laser beams with different wavelengths is condensed by a primary beam condensing system to obtain beams with different spectral bands, the beams are split by a spectroscope 3 to obtain reflected beams and transmitted beams with different wavelengths, and the transmitted beams and the reflected beams reflected by a reflecting mirror 4 are condensed by a secondary beam condensing system 5 and enter an imaging detector 6 at the same time to obtain light spots with different wavelengths.
The reflecting mirror 4 is positioned in the reflecting direction of the spectroscope 3, the secondary beam shrinking system 5 is positioned in the emergent direction of the spectroscope 3 and the reflecting mirror 4, and is used for carrying out secondary beam shrinking on the reflected light beam and the transmitted light beam formed by the emergent light of the primary beam shrinking system after beam splitting, and enabling the reflected light beam and the transmitted light beam to enter the imaging detector 6, so that light spots with different wavelengths are obtained at the imaging detector 6;
the primary beam shrinking system is a transmission beam shrinking system or a reflection beam shrinking system.
The reflective beam shrinking system comprises an off-axis ellipsoidal main mirror 1 and an off-axis parabolic secondary mirror 2.
After the incident laser is condensed by a primary beam condensing system, the incident laser is subjected to multi-spectrum beam splitting by a spectroscope 3 to form a transmission beam and a reflection beam after the multi-spectrum beam splitting; the reflecting mirror 4 is used for reflecting the light path deflection of the light beam and optimizing the light path structure.
In some of the possible embodiments of the present invention,
The cone coefficient K= -0.999, the curvature radius-441.407 and the Y-direction off-axis amount of 100mm of the off-axis ellipsoidal main mirror 1;
the conical coefficient k= -1 and the curvature radius-67.053 of the off-axis parabolic secondary mirror 2, and the distance between the off-axis ellipsoidal main mirror 1 and the off-axis parabolic secondary mirror 2 is 187.25mm;
in some of the possible embodiments of the present invention,
The distance between the spectroscope 3 and the reflecting mirror 4 is 30mm.
In some possible embodiments, in order to effectively realize secondary beam shrinking, the size of the light spot after beam shrinking is matched with the caliber of the detection unit, and the light spot is omitted;
The secondary beam reduction system 5 is a lens group, and the lens group may be any one of a spherical lens group, an aspherical lens group, or a cylindrical lens group.
Further, the lens group is a spherical lens group and comprises a biconvex positive lens 51, a biconcave negative lens 52, a positive meniscus lens 53, a negative meniscus lens 54 and a positive meniscus lens II 55 on the same optical path; the second positive meniscus lens 55 is arranged on the side close to the imaging detector 6.
In some of the possible embodiments of the present invention,
The aperture of an incident beam of the secondary beam shrinking system 5 is 16.2mm, and the aperture of an emergent beam is 2mm.
In some of the possible embodiments of the present invention,
The center thickness of the biconvex positive lens 51 is 12mm, and the focal power is 0.0123;
the thickness of the center of the biconcave negative lens 52 is 8mm, and the focal power is-0.017;
The center thickness of the first positive meniscus lens 53 is 10mm, and the focal power is 0.0076;
The negative meniscus lens 54 has a center thickness of 3mm and an optical power of-0.0566;
The center thickness of the positive meniscus lens II 55 is 3mm, and the focal power is 0.0061.
In some possible embodiments, the imaging detector 6 is a CCD sensor or a CMOS sensor.
The detection method based on the multispectral near-field light spot detection device specifically comprises the following steps:
two laser beams with different wavelengths form incident laser, and the incident laser is condensed by a primary condensation system;
The emergent light of the primary beam-shrinking system is split by the spectroscope 3 to realize beam splitting of different spectral bands so as to obtain a transmission beam and a reflection beam;
The transmitted light beam enters a secondary beam shrinking system 5, and the reflected light beam enters the secondary beam shrinking system 5 after being emitted by a reflecting mirror 4;
The transmitted light beam and the reflected light beam enter the imaging detector 6 simultaneously after being condensed by the secondary beam condensing system 5, and light spots with different wavelengths are obtained.
Example 1:
in the embodiment, the input of the system is 110mm of incident caliber, the working wavelength is 1064nm &532nm, the incident view field is +/-2.14 mrad and +/-2.14 mrad;
in this embodiment, the aperture of the main beam is compressed to 16.2mm after the beam is contracted by 6.8 times by the off-axis ellipsoidal main mirror 1 and the off-axis parabolic secondary mirror 2.
The cone coefficient K= -0.999, the curvature radius-441.407 and the Y-direction off-axis amount of 100mm of the off-axis ellipsoidal main mirror 1;
The conic coefficient k= -1, the radius of curvature-67.053 of the off-axis parabolic secondary mirror 2;
The distance between the off-axis ellipsoidal main mirror 1 and the off-axis parabolic secondary mirror 2 is 187.25mm;
the off-axis ellipsoidal main mirror 1 and the off-axis parabolic secondary mirror 2 are made of microcrystalline materials with 0 expansion coefficient, and the supporting materials can use invar with low expansion coefficient to ensure that the distance between the off-axis ellipsoidal main mirror 1 and the off-axis parabolic secondary mirror 2 is not influenced by temperature change; the thermal expansion coefficient is 11.8X10-6 m/mK;
In this embodiment, the outgoing light of the primary beam-shrinking system is used as the incident light of the secondary beam-shrinking system, and beam splitting of different spectrum segments is realized through the spectroscope 3, wherein the transmitted light beam is 1064nm, and the reflected light beam is 532nm;
in the embodiment, the reflecting light beam is deflected by the reflecting mirror 4, and the distance between the spectroscope 3 and the reflecting mirror 4 is 30mm; the mirror 4 is used to optimize the light path structure,
In the embodiment, the spherical lens group is used for realizing secondary beam shrinkage, the caliber of an incident beam is 16.2mm, the caliber of an emergent beam is 2mm, the beam shrinkage is 8.1 times, and the beam shrinkage multiplying power is 55 times after the combination with a main system.
The center thickness of the biconvex positive lens 51 is 12mm, and the optical power is 0.0123;
The center thickness of the biconcave negative lens 52 is 8mm, and the focal power is-0.017;
the center thickness of the positive meniscus lens one 53 is 10mm, and the focal power is 0.0076;
The negative meniscus lens 54 has a center thickness of 3mm and an optical power of-0.0566;
The center thickness of the positive meniscus lens II 55 is 3mm, and the focal power is 0.0061;
In this embodiment, the difference in the heights of the central optical axes of the two light beams (the reflected light beam and the transmitted light beam) is 30mm, and the two light beams enter the imaging detector 6 through the same lens group 5 by being eccentric by 15mm each;
In this embodiment, the near-field detection is parallel light image spot sampling, the imaging detector 6 selects a CMOS sensor response wave band of 0.45 μm-1.1 μm, the pixel size is 4.5 μm, the pixel number is 2048×2048, and the image plane size is 9.216mm× 9.216mm.
The spherical lens group adopts aluminum material as temperature compensation material, and the thermal expansion coefficient is 23.5X10-6/. Degree.C.
Under the support of the materials, the maximum wave front conditions of each wavelength in different branches are shown in the following table 1, and the table 1 shows the wave front conditions of different branches when the temperature changes, so that the working under a wide temperature range suitable for minus 20 ℃ to plus 40 ℃ can be obtained;
Table 1 in this embodiment, example data of the system is shown in table 2 below:
TABLE 2
In table 2, S1 is an object plane, and S19 is a sphere of the second positive meniscus lens 55 far from the negative meniscus lens 54.
The invention is not limited to the specific embodiments described above. The invention extends to any novel one, or any novel combination, of the features disclosed in this specification, as well as to any novel one, or any novel combination, of the steps of the method or process disclosed.
Claims (10)
1. The multispectral near-field light spot detection device is characterized by comprising a primary beam shrinking system, a spectroscope, a reflecting mirror, a secondary beam shrinking system and an imaging detector which are arranged on the same optical path;
The incident laser composed of two laser beams with different wavelengths is condensed by a first-stage beam condensing system, the light beams with two different wavelengths are transmitted and reflected by utilizing the spectroscope characteristic, and then the incident laser is condensed by a second-stage beam condensing system and enters an imaging detector at the same time, and finally, light spots with two different wavelengths can be obtained at the same time.
2. The multi-band near field spot detection device of claim 1, wherein the primary beam reduction system is a transmissive beam reduction system or a reflective beam reduction system.
3. The apparatus of claim 2, wherein the reflective beam reduction system comprises an off-axis ellipsoidal primary mirror and an off-axis parabolic secondary mirror.
4. A multispectral near-field spot detection device according to claim 3, wherein the conic coefficient k= -0.999, the radius of curvature-441.407, and the y-axis off-axis amount of 100mm;
The cone coefficient k= -1 and the curvature radius-67.053 of the off-axis parabolic secondary mirror, and the distance between the off-axis ellipsoidal main mirror and the off-axis parabolic secondary mirror is 187.25mm; the distance between the spectroscope and the reflecting mirror is 30mm.
5. A multi-band near field spot detection device as defined in claim 1 wherein,
The secondary beam shrinking system is a lens group, and the lens group is a spherical lens group, an aspherical lens group or a cylindrical lens group.
6. The device of claim 5, wherein the spherical lens group comprises a biconvex positive lens, a biconcave negative lens, a positive meniscus lens I, a negative meniscus lens, and a positive meniscus lens II on the same optical path; the positive meniscus lens is disposed on a side proximate to the imaging detector.
7. The multi-spectrum near field spot detection device of claim 6, wherein the aperture of the incident beam of the secondary beam reduction system is 16.2mm, and the aperture of the emergent beam is 2mm.
8. The multi-spectral near-field spot detection device of claim 6, wherein the biconvex positive lens has a central thickness of 12mm and an optical power of 0.0123;
The thickness of the center of the biconcave negative lens is 8mm, and the focal power is-0.017;
The center thickness of the first positive meniscus lens is 10mm, and the focal power is 0.0076;
the center thickness of the negative meniscus lens is 3mm, and the focal power is-0.0566;
the center thickness of the positive meniscus lens II is 3mm, and the focal power is 0.0061.
9. A multi-band near field spot detection device as claimed in any one of claims 1 to 8 wherein the imaging detector is a CCD sensor or a CMOS sensor.
10. A detection method based on the multispectral near-field light spot detection device as claimed in any one of claims 1 to 9, characterized by comprising the following steps:
two laser beams with different wavelengths form incident laser, and the incident laser is condensed by a primary condensation system;
The emergent light of the primary beam-shrinking system is split by a spectroscope to realize beam splitting of different spectral bands so as to obtain a transmission beam and a reflection beam;
the transmitted light beam enters a secondary beam shrinking system, and the reflected light beam enters the secondary beam shrinking system after being emitted by a reflecting mirror;
The transmitted light beam and the reflected light beam enter the imaging detector after being condensed by the secondary beam condensing system, and light spots with different wavelengths are obtained.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202311794188.7A CN117949086A (en) | 2023-12-25 | 2023-12-25 | Multispectral near-field light spot detection device and detection method |
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| CN202311794188.7A CN117949086A (en) | 2023-12-25 | 2023-12-25 | Multispectral near-field light spot detection device and detection method |
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