CN117948513A - Three-dimensional platform based on piezoelectric ceramic parallel driving - Google Patents
Three-dimensional platform based on piezoelectric ceramic parallel driving Download PDFInfo
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- CN117948513A CN117948513A CN202410279088.9A CN202410279088A CN117948513A CN 117948513 A CN117948513 A CN 117948513A CN 202410279088 A CN202410279088 A CN 202410279088A CN 117948513 A CN117948513 A CN 117948513A
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Abstract
The invention relates to a three-dimensional platform based on piezoelectric ceramic parallel driving, which comprises a base, a moving table, a supporting frame, a detection unit and a piezoelectric driving unit, wherein the base is provided with a plurality of piezoelectric ceramic electrodes; the motion platform comprises an output platform, a guide rod, an operating disc, a ball socket bearing and a ball socket bearing fixing sleeve ring, wherein the guide rod is connected with the output platform and the operating disc; the support frame is used for connecting the ball-and-socket bearing fixing collar and the base; the output platform is connected with the support frame through a bias spring; the piezoelectric driving unit comprises a piezoelectric ceramic stack, a guide rail sliding block, a driving head, a pre-tightening spring, a magnetic component and a surrounding frame, wherein the magnetic component is fixed at the output end of the piezoelectric ceramic stack and abuts against the pre-tightening spring end; the detection unit comprises a laser displacement sensor and a measuring point device, wherein the laser displacement sensor is fixed on the base, and the measuring point device is fixed on the guide rail; the invention realizes macro-micro cross-scale precise motion of the motion platform.
Description
Technical Field
The invention belongs to the technical field of piezoelectric precision driving equipment, and particularly relates to a three-dimensional platform based on piezoelectric ceramic parallel driving.
Background
With the rapid development of the precision manufacturing field, the platform is required to move in a large range and simultaneously to be capable of being positioned with high precision. The macro-micro motion platform is studied by students at home and abroad and widely applied to important precise motion occasions such as microelectronic manufacturing, precise engineering, optical engineering and the like. Although the motion platform driven by the single stage of the traditional linear motor can realize high-speed and large-stroke motion, the platform has certain limitations in positioning precision and servo response bandwidth; meanwhile, piezoelectric ceramics can realize high-response bandwidth control and high-precision positioning performance, but the range of motion is generally limited to the micrometer scale. The existing macro-micro cross-scale motion platform for precision machining and manufacturing is mostly based on composite driving of a motor and piezoelectric ceramics, and the micro-motion system mainly only realizes plane motion, so that the application range of the platform is limited, the integration level of the system is reduced, the manufacturing cost and the volume of the platform are increased, and the improvement of output efficiency is not facilitated.
Disclosure of Invention
The invention provides a three-dimensional platform based on piezoelectric ceramic parallel driving, which has the following specific technical scheme:
a three-dimensional platform based on piezoelectric ceramic parallel driving comprises a base, a moving table, a supporting frame, a detection unit and a piezoelectric driving unit;
The motion platform comprises an output platform, a guide rod, an operating disc, a ball socket bearing and a ball socket bearing fixing collar;
The two ends of the guide rod are respectively and fixedly arranged at the centers of the output platform and the control disc, the inner ring of the ball socket bearing is sleeved on the guide rod, the outer ring of the ball socket bearing is embedded in the ball socket bearing fixing sleeve ring, and the output platform can rotate 360 degrees relative to the ball socket bearing fixing sleeve ring;
The support frame comprises three groups of sub-support units, each group of sub-support units consists of a plurality of transverse supports and a longitudinal support, and three transverse supports in the three groups of sub-support units are distributed at 120 degrees along the circumferential direction; the transverse support and the longitudinal support are fixedly connected by 90 degrees;
the longitudinal supports are respectively fixed on three symmetrically distributed branches a of the base; the transverse support is fixedly connected with the ball socket bearing fixing collar along the circumferential direction;
The edge of the output platform is fixedly connected with the support frame through a biasing spring; the other end of the biasing spring is fixedly connected to the center of the transverse bracket, and the biasing spring is in a pre-stretching state;
the piezoelectric driving unit comprises a piezoelectric ceramic stack, a guide rail, a sliding block, a driving head, a pre-tightening spring, a magnetic component and an enclosing frame;
the bottom surface of the surrounding frame is fixed on the base;
One end of the piezoelectric ceramic stack is fixed on the front wall of the surrounding frame, and the other end of the piezoelectric ceramic stack is fixed with the center of the magnetic assembly;
The pre-tightening spring is arranged between the rear wall of the surrounding frame and the magnetic component, and the centers of the pre-tightening spring, the magnetic component and the piezoelectric ceramic stack are positioned on the same horizontal axis;
The sliding block is fixed on the bottom surface of the surrounding frame, the driving head is fixed at the front end of the guide rail, the magnetic assembly is tightly attached to the upper part of the guide rail, and the guide rail is driven to move through friction;
The piezoelectric ceramic stack can drive the magnetic component to move bidirectionally, and the magnetic component drives the guide rail to realize bidirectional movement through friction;
The detection unit comprises 3 groups of guide rail displacement detection devices, each group of detection devices comprises a laser displacement sensor and a measurement point device, the laser displacement sensor is fixed on a base, the measurement point device is fixed at the rear end of a guide rail, and the laser displacement sensor and the measurement point device in each group of guide rail displacement detection devices are all arranged on the same radial axis; and calculating the rotation of the three-dimensional platform by detecting the linear output of the piezoelectric driving unit.
The three-dimensional platform based on piezoelectric ceramic parallel driving is characterized in that the base is of a radial structure, and all branches in the warp direction are symmetrically distributed at 60 degrees.
The three-dimensional platform based on the piezoelectric ceramic parallel driving is characterized in that the surrounding frame is in a hollow cuboid shape, the upper end of the cuboid is open, and the front wall of the surrounding frame and the rear arm of the surrounding frame are respectively provided with a groove; one end of the piezoelectric ceramic stack is fixed on the front wall of the surrounding frame, and the other end of the piezoelectric ceramic stack is fixed with the center of the magnetic assembly.
The three-dimensional platform based on piezoelectric ceramic parallel driving is characterized in that the magnetic component is composed of three square magnet patches which are magnetically attracted together, and the area of each square magnet patch is larger than the end face area of the connecting end of the piezoelectric ceramic stack.
The three-dimensional platform based on piezoelectric ceramic parallel driving is characterized in that three piezoelectric driving units are respectively fixed on base branches b which are 120 degrees away from each other, and control discs are driven in parallel.
The three-dimensional platform based on piezoelectric ceramic parallel driving is characterized in that the driving head main body is a columnar body formed by a 240-degree circular arc and a large-curvature concave circular arc.
Advantageous effects
According to the invention, three driving units based on the piezoelectric ceramic stack are arranged on the base, each driving unit realizes stick-slip movement through the piezoelectric ceramic stack, the pre-tightening spring, the magnetic component and the guide rail sliding block system, and the guide rail output end can move bidirectionally. The three piezoelectric driving units realize parallel driving of the platform, and the platform realizes space motion by taking the ball-and-socket bearing as an axle center. In the technical scheme, 3 piezoelectric driving units are driven in parallel, so that the motion freedom degree of an output platform is improved; the viscous-sliding motion of the piezoelectric driving unit has bidirectional controllability, so that macro-micro cross-scale motion capability of the platform is improved; the motion platform of the invention only depends on piezoelectric ceramics to realize large-stroke output and high-precision positioning, thereby improving the integration level and the output efficiency of the system. According to the invention, the rotation angle of the output platform can be calculated indirectly by detecting the output displacement of the driving head in the piezoelectric driving unit, and the influence of the contact sensor of the output platform on the motion performance of the platform can be greatly reduced by adopting an indirect measurement mode.
Drawings
FIG. 1 is a schematic structural diagram of a three-dimensional parallel platform based on piezoelectric ceramic parallel driving;
FIG. 2 is a schematic view of a base structure;
FIG. 3 is a schematic top view of a motion stage;
fig. 4 is a schematic structural view of the piezoelectric driving unit.
Wherein: the device comprises a base, a 2-moving table, a 3-supporting frame, a 4-detecting unit, a 5-ball-and-socket bearing fixing collar, a 6-driving head, a 7-piezoelectric driving unit, an 8-laser displacement sensor, a 9-measuring point device, a 10-guide rail, an 11-surrounding frame, a 12-sliding block 13-pre-tightening spring, a 14-magnetic component, a 15-piezoelectric ceramic stack, a 16-surrounding frame front wall, a 17-surrounding frame rear wall, a 18-branch a, a 19-branch b, a 20-operating disc, a 21-ball-and-socket bearing, a 22-guide rod, a 23-output platform and a 24-biasing spring.
Detailed Description
The invention will be further described with reference to the accompanying drawings in the present application, but it should not be construed that the scope of the invention is limited to the embodiments described below. Various substitutions and alterations are made by those skilled in the art without departing from the spirit and scope of the invention as defined by the appended claims.
A three-dimensional platform based on piezoelectric ceramic parallel driving comprises a base 1, a moving table 2, a supporting frame 3, a detection unit 4 and a piezoelectric driving unit 7;
the motion platform 2 comprises an output platform 23, a guide rod 22, a control disc 20, a ball-and-socket bearing 21 and a ball-and-socket bearing fixing collar 5;
the two ends of the guide rod 22 are respectively and fixedly arranged at the centers of the output platform 23 and the control disc 20, the inner ring of the ball-and-socket bearing 21 is sleeved on the guide rod 22, the outer ring of the ball-and-socket bearing 21 is embedded in the ball-and-socket bearing fixing collar 5, and the output platform 23 can rotate 360 degrees relative to the ball-and-socket bearing fixing collar 5;
The support frame 3 comprises three groups of sub-support units, each group of sub-support units consists of a plurality of transverse supports and a longitudinal support, and three transverse supports in the three groups of sub-support units are distributed at 120 degrees along the circumferential direction; the transverse support and the longitudinal support are fixedly connected by 90 degrees;
The longitudinal supports are respectively fixed on three symmetrically distributed branches a18 of the base 1; the transverse bracket is fixedly connected with the ball-and-socket bearing fixing collar 5 along the circumferential direction;
the edge of the output platform 23 is fixedly connected with the support frame 3 through a biasing spring 24; the other end of the biasing spring 24 is fixedly connected to the center of the transverse bracket, and the biasing spring 24 is in a pre-stretching state;
the piezoelectric driving unit 7 comprises a piezoelectric ceramic stack 15, a guide rail 10, a sliding block 12, a driving head 6, a pre-tightening spring 13, a magnetic component 14 and a surrounding frame 11;
the bottom surface of the surrounding frame 11 is fixed on the base 1;
One end of the piezoelectric ceramic stack 15 is fixed on the front wall 16 of the surrounding frame, and the other end is fixed with the center of the magnetic assembly 14;
The pre-tightening spring 13 is arranged between the rear wall 17 of the surrounding frame and the magnetic component 14, and the centers of the pre-tightening spring 13, the magnetic component 14 and the piezoelectric ceramic stack 15 are positioned on the same horizontal axis; the output displacement of the driving head 6 of the piezoelectric driving unit 7 can be detected through the laser displacement sensor 8, so that the rotation angle of the output platform is indirectly calculated, and the influence of the contact sensor with the output platform 23 on the motion performance of the platform can be greatly reduced by the indirect measurement mode.
The sliding block 12 is fixed on the bottom surface of the surrounding frame 11, the driving head 6 is fixed on the front end of the guide rail 10, the magnetic component 14 is tightly attached to the upper part of the guide rail 10, and the guide rail 10 is driven to move through friction;
The piezoelectric ceramic stack 15 can drive the magnetic component 14 to move bidirectionally, and the magnetic component 14 drives the guide rail 10 to move bidirectionally through friction;
The detection unit 4 comprises 3 groups of guide rail displacement detection devices, each group of detection devices comprises a laser displacement sensor 8 and a measuring point device 9, the laser displacement sensor 8 is fixed on the base 1, the measuring point device 9 is fixed at the rear end of a guide rail 10, and the laser displacement sensor 8 and the measuring point device 9 in each group of guide rail displacement detection devices are all arranged on the same radial axis; the rotation of the three-dimensional platform is calculated by detecting the linear output of the piezoelectric driving unit 7.
The base 1 is of a radial structure, and all branches in the warp direction are symmetrically distributed at 60 degrees.
The surrounding frame 11 is in a hollow cuboid shape, the upper end of the cuboid is open, and the front wall 16 of the surrounding frame and the rear arm 17 of the surrounding frame are respectively provided with grooves; the piezoceramic stack 15 is fixed at one end to the surrounding frame front wall 16 and at the other end to the center of the magnetic assembly 14.
The magnetic component 14 is composed of three square magnet patches which are magnetically attracted together, and the area of each square magnet patch is larger than the area of the end face of the connecting end of the piezoelectric ceramic stack 15.
The piezoelectric driving units 7 are three in total and are respectively fixed on branches b19 of the base 1 which are 120 degrees with each other, and the control discs 20 are driven in parallel.
The driving head 6 is a column body formed by a circular arc of 240 degrees and a concave circular arc with large curvature.
When the piezoelectric driving unit 7 is in operation, by applying triangular wave voltages with asymmetric ascending and descending stages to the piezoelectric ceramic stack 15, the piezoelectric ceramic stack 15 can drive the magnetic assembly 14 to move bidirectionally, and the magnetic assembly 14 drives the guide rail 10 to move bidirectionally through friction, so that large-stroke output of the piezoelectric driving unit 7 is realized through the viscous sliding movement mode. By adjusting the frequency of the triangular wave input voltage of the piezoelectric ceramic stack 15, different output speeds of the piezoelectric driving unit 7 can be achieved. The macro-micro cross-scale space motion of the platform can be realized based on the parallel driving steering wheel of the 3 piezoelectric driving units 7.
Claims (6)
1. The three-dimensional platform based on the piezoelectric ceramic parallel driving is characterized by comprising a base (1), a motion platform (2), a support frame (3), a detection unit (4) and a piezoelectric driving unit (7);
The motion platform (2) comprises an output platform (23), a guide rod (22), a control disc (20), a ball socket bearing (21) and a ball socket bearing fixing collar (5);
the two ends of the guide rod (22) are respectively and fixedly arranged at the centers of the output platform (23) and the control disc (20), the inner ring of the ball socket bearing (21) is sleeved on the guide rod (22), the outer ring of the ball socket bearing (21) is embedded in the ball socket bearing fixing collar (5), and the output platform (23) can rotate 360 degrees relative to the ball socket bearing fixing collar (5);
The support frame (3) comprises three groups of sub-support units, each group of sub-support units consists of a plurality of transverse supports and a longitudinal support, and three transverse supports in the three groups of sub-support units are distributed at 120 degrees along the circumferential direction; the transverse support and the longitudinal support are fixedly connected by 90 degrees;
the longitudinal supports are respectively fixed on three symmetrically distributed branches a (18) of the base (1); the transverse support is fixedly connected with the ball socket bearing fixing collar (5) along the circumferential direction;
The edge of the output platform (23) is fixedly connected with the support frame (3) through a biasing spring (24); the other end of the biasing spring (24) is fixedly connected to the center of the transverse bracket, and the biasing spring (24) is in a pre-stretching state;
the piezoelectric driving unit (7) comprises a piezoelectric ceramic stack (15), a guide rail (10), a sliding block (12), a driving head (6), a pre-tightening spring (13), a magnetic assembly (14) and a surrounding frame (11); the bottom surface of the surrounding frame (11) is fixed on the base (1);
One end of the piezoelectric ceramic stack (15) is fixed on the front wall (16) of the surrounding frame, and the other end of the piezoelectric ceramic stack is fixed with the center of the magnetic assembly (14);
The pre-tightening spring (13) is arranged between the rear wall (17) of the surrounding frame and the magnetic component (14), and the centers of the pre-tightening spring (13), the magnetic component (14) and the piezoelectric ceramic stack (15) are positioned on the same horizontal axis;
the sliding block (12) is fixed on the bottom surface of the surrounding frame (11), the driving head (6) is fixed at the front end of the guide rail (10), the magnetic assembly (14) is tightly attached to the upper part of the guide rail (10), and the guide rail (10) is driven to move through friction;
The piezoelectric ceramic stack (15) can drive the magnetic assembly (14) to move bidirectionally, and the magnetic assembly (14) drives the guide rail (10) to move bidirectionally through friction;
The detection unit (4) comprises 3 groups of guide rail displacement detection devices, each group of detection devices comprises a laser displacement sensor (8) and a measuring point device (9), the laser displacement sensor (8) is fixed on the base (1), the measuring point devices (9) are fixed at the rear ends of the guide rails (10), and the laser displacement sensor (8) and the measuring point devices (9) in each group of guide rail displacement detection devices are all arranged on the same radial axis; the rotation of the three-dimensional platform is calculated by detecting the linear output of the piezoelectric drive unit (7).
2. A three-dimensional platform based on parallel driving of piezoelectric ceramics according to claim 1, characterized in that the base (1) is of a radial structure and the branches in the warp direction are symmetrically distributed at 60 ° to each other.
3. The three-dimensional platform based on the parallel driving of the piezoelectric ceramics according to claim 1, wherein the surrounding frame (11) is in a hollow cuboid shape, the upper end of the cuboid is open, and the front wall (16) and the rear wall (17) of the surrounding frame are respectively provided with grooves; one end of the piezoelectric ceramic stack (15) is fixed on the front wall (16) of the surrounding frame, and the other end of the piezoelectric ceramic stack is fixed with the center of the magnetic assembly (14).
4. The three-dimensional platform based on piezoelectric ceramic parallel driving according to claim 1, wherein the magnetic component (14) is composed of three square magnet patches which are magnetically attracted together, and the area of each square magnet patch is larger than the area of the end face of the connecting end of the piezoelectric ceramic stack (15).
5. A three-dimensional platform based on parallel driving of piezoelectric ceramics according to claim 1, characterized in that the piezoelectric driving units (7) are three in total and are respectively fixed on the branches b (19) of the base (1) which are 120 degrees each other, and the control discs (20) are driven in parallel.
6. A three-dimensional platform based on parallel driving of piezoelectric ceramics according to claim 1, characterized in that the driving head (6) body is a column formed by a circular arc of 240 ° and a concave circular arc of large curvature.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410279088.9A CN117948513A (en) | 2024-03-12 | 2024-03-12 | Three-dimensional platform based on piezoelectric ceramic parallel driving |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202410279088.9A CN117948513A (en) | 2024-03-12 | 2024-03-12 | Three-dimensional platform based on piezoelectric ceramic parallel driving |
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| CN117948513A true CN117948513A (en) | 2024-04-30 |
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| CN202410279088.9A Pending CN117948513A (en) | 2024-03-12 | 2024-03-12 | Three-dimensional platform based on piezoelectric ceramic parallel driving |
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