CN117943929B - Accidental injury prevention edging equipment for quartz wafer production - Google Patents
Accidental injury prevention edging equipment for quartz wafer production Download PDFInfo
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- CN117943929B CN117943929B CN202410345624.0A CN202410345624A CN117943929B CN 117943929 B CN117943929 B CN 117943929B CN 202410345624 A CN202410345624 A CN 202410345624A CN 117943929 B CN117943929 B CN 117943929B
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- 239000010453 quartz Substances 0.000 title claims abstract description 105
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 105
- 238000007688 edging Methods 0.000 title claims abstract description 42
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 23
- 208000014674 injury Diseases 0.000 title claims abstract description 20
- 208000012260 Accidental injury Diseases 0.000 title claims abstract description 18
- 230000002265 prevention Effects 0.000 title claims abstract description 13
- 230000002457 bidirectional effect Effects 0.000 claims abstract description 28
- 238000009434 installation Methods 0.000 claims description 11
- 230000035515 penetration Effects 0.000 claims description 11
- 239000013078 crystal Substances 0.000 claims description 8
- 238000001179 sorption measurement Methods 0.000 claims description 7
- 230000005540 biological transmission Effects 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 abstract description 113
- 230000033228 biological regulation Effects 0.000 description 11
- 238000000227 grinding Methods 0.000 description 11
- 238000005498 polishing Methods 0.000 description 10
- 230000033001 locomotion Effects 0.000 description 8
- 238000010521 absorption reaction Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 230000006378 damage Effects 0.000 description 4
- 230000000149 penetrating effect Effects 0.000 description 4
- 230000005684 electric field Effects 0.000 description 3
- 230000001360 synchronised effect Effects 0.000 description 3
- 208000027418 Wounds and injury Diseases 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 210000001503 joint Anatomy 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention relates to the technical field of edging equipment, in particular to accidental injury prevention edging equipment for quartz wafer production, which comprises an edging protection clamping device for protecting and clamping quartz wafers, wherein the edging protection clamping device comprises a bidirectional ball screw sliding table, a plurality of rotary driving seats are symmetrically arranged on the moving end of the bidirectional ball screw sliding table, a plurality of clamping wheels for clamping the quartz wafers are respectively arranged on the rotary driving seats, tightening brackets are arranged on the side parts of the rotary driving seats, protection belts for protecting the edges of the quartz wafers are respectively arranged on the tightening brackets and the plurality of clamping wheels, and a wafer positioning frame for limiting and supporting the quartz wafers is arranged below the plurality of clamping wheels.
Description
Technical Field
The invention relates to the technical field of edging equipment, in particular to accidental injury prevention edging equipment for quartz wafer production.
Background
Quartz crystals are an important electronic material. Quartz wafers cut in a certain direction will, when subjected to mechanical stress, generate an electric field or charge proportional to the stress, a phenomenon known as the positive piezoelectric effect. Conversely, when a quartz wafer is subjected to an electric field, a strain proportional to the electric field is generated, a phenomenon known as the inverse piezoelectric effect. The positive and negative effects are collectively referred to as piezoelectric effect. The quartz crystal has not only a piezoelectric effect but also excellent mechanical characteristics, electrical characteristics and temperature characteristics. The resonator, the oscillator, the filter and the like designed and manufactured by the method have outstanding advantages in the aspects of frequency stabilization and frequency selection.
Chinese patent CN214642411U discloses an edging machine for processing quartz wafer, belong to edging technical field, including the operation panel, the upper end rotation of operation panel is connected with the revolving board, the spout has been seted up to the upper end of revolving board, sliding connection has the slider in the spout, the upper end fixedly connected with installation base of slider, the right-hand member fixedly connected with third electric telescopic handle of slider, third electric telescopic handle is located the spout, the right-hand member and the right inner wall fixed connection of spout of third electric telescopic handle, the lower inner wall fixed connection second electric telescopic handle of installation base, the extension end fixedly connected with connecting plate of second electric telescopic handle, connecting plate sliding connection is between the front and back inner wall of installation base, the upper end fixedly connected with edging machine of connecting plate, the right-hand member fixedly connected with of revolving board lacks the conical gear, the upper end fixedly connected with servo motor of operation panel, can solve the unable adjustment position's of edging machine after fixed among the prior art problem.
According to the technical scheme, the polishing position of the edging equipment can be effectively adjusted, and the polishing wheel can be used for polishing for a long time, so that the heights of partial areas of the wrapping surface of the polishing wheel can be different, when the polishing angle of the edging equipment is adjusted for ensuring the polishing effect, the edging equipment is adjusted by manual control equipment, but polishing error can exist in the manual control polishing equipment, excessive polishing of the edge of a quartz wafer can be caused, and the product quality is influenced.
Disclosure of Invention
Aiming at the problems, the anti-accidental injury edging equipment for quartz wafer production is provided, and the edging protection clamping device can avoid the incorrect grinding of the quartz wafer during edging, thereby effectively improving the product quality.
In order to solve the problems in the prior art, the invention provides an accidental injury prevention edging device for quartz wafer production, which comprises an edging protection clamping device for protecting and clamping quartz wafers, wherein the edging protection clamping device comprises a bidirectional ball screw sliding table, a plurality of rotary driving seats are symmetrically arranged on the moving end of the bidirectional ball screw sliding table, multi-size clamping wheels for clamping the quartz wafers are arranged on the rotary driving seats, tightening brackets are arranged on the side parts of the rotary driving seats, protection belts for protecting the edges of the quartz wafers are arranged on the tightening brackets and the multi-size clamping wheels, and a wafer positioning frame for limiting and supporting the quartz wafers is arranged below the multi-size clamping wheels.
Preferably, the rotary driving seat comprises a bracket base arranged on the bidirectional ball screw sliding table, a rotary mounting wheel is arranged on the bracket base, a first rotary driver is further arranged on the bracket base, the output end of the first rotary driver is provided with a driving wheel, and a transmission chain is arranged between the driving wheel and the rotary mounting wheel.
Preferably, the multi-size clamping wheel comprises a limit clamping column arranged on the rotary mounting wheel, a multi-layer sliding adjusting sleeve is arranged on the outer side of the limit clamping column, one end, far away from the rotary mounting wheel, of the limit clamping column is provided with an abutting adsorption disc, and the side wall of the abutting adsorption disc is provided with a plurality of anti-slip strips.
Preferably, the inside of the spacing joint post is provided with a mounting cavity, a plurality of first spacing holes and second spacing holes are evenly distributed in the outside of the spacing joint post, the inside of the mounting cavity is provided with a linkage joint mechanism, and the working end of the linkage joint mechanism passes through the first spacing holes and the second spacing holes to extend outwards.
Preferably, the linkage joint mechanism includes the bulldozing adjustment post of installing on spacing joint post, bulldoze and adjust and install the bulldozing spring on the post and between the spacing joint post, bulldoze and adjust and still install expansion joint mechanism and expansion supporting mechanism on the post, expansion joint mechanism is including installing the first joint collar on bulldozing adjustment post, install a plurality of first expansion bars on the first joint collar, all install flexible joint post on the first expansion bar, flexible joint post upwards extends along first spacing hole, expansion supporting mechanism is including installing the second joint collar on bulldozing adjustment post, install a plurality of second expansion bars on the second joint collar, all install the sliding support pole on the second expansion bar, sliding support pole upwards extends along the second spacing hole, be equipped with the location butt joint groove on the sliding support pole.
Preferably, the outer wall of the sliding adjusting sleeve is provided with a first anti-slip groove, the outer wall of the sliding adjusting sleeve is also provided with an installation bayonet and a positioning hole, and the abutting end of the sliding adjusting sleeve is provided with an anti-slip ring.
Preferably, the tightening support comprises a sliding support arranged on the side part of the support base, a tightening spring is arranged between the sliding support and the support base, a rotating tightening wheel is further arranged on the sliding support, and a second anti-slip groove is arranged on the outer side of the rotating tightening wheel.
Preferably, the protection belt is arranged between the sliding adjusting sleeve and the rotating tightening wheel, the outer side of the protection belt is provided with an inclined protection edge, and the inner wall of the protection belt is provided with a limit convex ring.
Preferably, the wafer positioning frame comprises a mounting bracket arranged on the bidirectional ball screw sliding table, a limiting support device is arranged above the mounting bracket, and a first limiting guide post and a linear driver are arranged between the limiting support device and the mounting bracket.
Preferably, the limit supporting device comprises a mounting base arranged at the output end of the linear driver, a second limit guide post and a bidirectional ball screw are symmetrically arranged on the mounting base, a sliding mounting plate is symmetrically arranged on the second limit guide post and the bidirectional ball screw, a plurality of penetrating adjusting wheels are arranged on the sliding mounting plate, a plurality of penetrating holes are formed in the penetrating adjusting wheels, a conical surface is further arranged on the penetrating adjusting wheels, a second rotary driver is further arranged on the side portion of the mounting base, and the output end of the second rotary driver is in transmission connection with the bidirectional ball screw.
Compared with the prior art, the invention has the beneficial effects that:
When the quartz wafer needs to be polished, the quartz wafer needing to be polished is placed between the multi-size clamping wheels through the industrial mechanical arm, the bottom of the quartz wafer and the bottom of the wafer positioning frame are supported and positioned, the wafer positioning frame can effectively ensure that the quartz wafer is placed at the axle center position of the multi-size clamping wheels, when the working end of the bidirectional ball screw sliding table is contracted synchronously, the rotary driving seat can drive the multi-size clamping wheels to carry out clamping movement, the multi-size clamping wheels can clamp and fix the quartz wafer, after the quartz wafer is clamped by the multi-size clamping wheels, the protection belt can be attached and abutted against the side wall of the quartz wafer, the wafer positioning frame can descend to be separated from the quartz wafer, the rotary driving seat can drive the multi-size clamping wheels and the protection belt to synchronously rotate, so that the clamped quartz wafer rotates along with the rotation of the wafer, the angle of the edge grinder can be adjusted to carry out edge grinding, and the protection belt can effectively protect the surface of the quartz wafer during edge grinding due to the need of adjusting the angle of the edge grinder, and the product quality is improved.
Drawings
Fig. 1 is a perspective view of a false injury preventing edging machine for quartz wafer production.
Fig. 2 is a side view of a accidental injury prevention edging machine for quartz wafer production.
Fig. 3 is a cross-sectional view taken at section A-A in fig. 2.
Fig. 4 is a schematic perspective view of a part of a structure of a false damage preventing edging machine for quartz wafer production.
Fig. 5 is a schematic perspective view of a part of a structure of a false damage preventing edging device for quartz wafer production.
Fig. 6 is a perspective view of a multi-sized clamping wheel in an anti-accidental injury edging machine for quartz wafer production.
Fig. 7 is an exploded view of a multi-sized clamping wheel in a damage-preventing edging machine for quartz wafer production.
Fig. 8 is a plan sectional perspective view of a multi-sized grip wheel in an anti-accidental injury edging machine for quartz wafer production.
Fig. 9 is a perspective view of a sliding adjusting sleeve in a false injury preventing edging machine for quartz wafer production.
Fig. 10 is a perspective view of a protection belt for a accidental injury prevention edging machine for quartz wafer production.
Fig. 11 is a perspective view of a wafer positioning frame in a accidental injury prevention edging machine for quartz wafer production.
Fig. 12 is a schematic perspective view of a limit supporting device in a accidental injury prevention edging device for quartz wafer production.
The reference numerals in the figures are:
1-a bidirectional ball screw sliding table; 2-a rotary driving seat; 21-a bracket base; 22-rotating the mounting wheel; 23-a first rotary drive; 24-driving wheel; 25-a drive chain; 3-multi-size clamping wheel; 31-limiting clamping columns; 32-a first limiting hole; 33-a second limiting hole; 34-a linkage clamping mechanism; 341-a first clamping mounting ring; 342-first expansion rod; 343-telescoping snap-in posts; 344-a second snap fit mounting ring; 345-second expansion rod; 346-sliding support bar; 347-push adjustment column; 348—push springs; 35-sliding adjusting sleeve; 351-a first cleat; 352-mount bayonet; 353-locating holes; 354-anti-slip ring; 36-abutting the adsorption disc; 37-anti-slip strips; 4-tightening the bracket; 41-a sliding bracket; 42-tightening the spring; 43-rotating the tightening wheel; 5-protecting the belt; 51-oblique guard edges; 52-limiting convex rings; 6-a wafer positioning frame; 61-mounting a bracket; 62-limiting and supporting devices; 621-mounting a base; 622-second limit guide posts; 623-a bi-directional ball screw; 624-sliding mounting plate; 625-a second rotary drive; 626-inserting an adjusting wheel; 627-inserting holes; 628-conical surface; 63-a linear drive; 64-a first limit guide post; 7-quartz wafer.
Detailed Description
The invention will be further described in detail with reference to the drawings and the detailed description below, in order to further understand the features and technical means of the invention and the specific objects and functions achieved.
Referring to fig. 1 to 12, an anti-accidental injury edging device for quartz wafer production comprises an edging protection clamping device for protecting and clamping a quartz wafer 7, wherein the edging protection clamping device comprises a bidirectional ball screw sliding table 1, a plurality of rotary driving seats 2 are symmetrically arranged on the moving end of the bidirectional ball screw sliding table 1, multi-size clamping wheels 3 for clamping the quartz wafer 7 are respectively arranged on the rotary driving seats 2, tightening brackets 4 are arranged on the side parts of the rotary driving seats 2, protection belts 5 for protecting the edge of the quartz wafer 7 are respectively arranged on the tightening brackets 4 and the multi-size clamping wheels 3, and a wafer positioning frame 6 for limiting and supporting the quartz wafer 7 is arranged below the multi-size clamping wheels 3.
The staff can carry out the size adjustment to multi-size clamping wheel 3 according to the diameter of axle of quartz wafer 7, after multi-size clamping wheel 3 adjusted the size, tight support 4 can promote protection belt 5 and the multi-size clamping wheel 3 of adjusted size conflict, simultaneously adjust wafer locating rack 6 position according to the thickness and the diameter of axle of quartz wafer 7, when needing to polish quartz wafer 7, place the quartz wafer 7 that needs to polish on multi-size clamping wheel 3 through industrial machinery hand, the bottom of quartz wafer 7 and wafer locating rack 6 bottom support location, wafer locating rack 6 can effectively guarantee that quartz wafer 7 is placed to multi-size clamping wheel 3's axle center position, when the work end synchronous shrink of two-way ball screw slip table 1, rotary driving seat 2 can drive multi-size clamping wheel 3 and carry out clamping motion, multi-size clamping wheel 3 clamping motion then can be with quartz wafer 7 centre gripping fixed, after the quartz wafer 7 is held by multi-size clamping wheel 3, protection belt 5 can be laminated with quartz wafer 7's lateral wall, wafer locating rack 6 can descend and break away from quartz wafer 7, rotary driving seat 2 can drive multi-size clamping wheel 3 and protection belt 5 and carry out the synchronous adjustment of the angle of edge grinding machine can be carried out to quartz wafer 7 along with the edge grinding machine, can be adjusted to the edge grinding machine edge grinding machine is because the quartz wafer 7 is required to the edge grinding machine is rotated to the edge grinding angle of edge grinding machine is adjusted effectively.
Referring to fig. 1 and 4, the rotary driving seat 2 includes a bracket base 21 mounted on the bidirectional ball screw sliding table 1, a rotary mounting wheel 22 is mounted on the bracket base 21, a first rotary driver 23 is further mounted on the bracket base 21, a driving wheel 24 is mounted at an output end of the first rotary driver 23, and a transmission chain 25 is mounted between the driving wheel 24 and the rotary mounting wheel 22.
The first rotary driver 23 is preferably a servo motor, the rotary driving seat 2 is mounted on the bidirectional ball screw sliding table 1, when the working end of the bidirectional ball screw sliding table 1 synchronously contracts, the bracket base 21 can drive the multi-size clamping wheel 3 to clamp and move, the multi-size clamping wheel 3 clamps and fixes the quartz wafer 7, after the quartz wafer 7 is clamped by the multi-size clamping wheel 3, the protection belt 5 can be attached to and abutted against the side wall of the quartz wafer 7, the wafer positioning frame 6 can descend to separate from the quartz wafer 7, when the quartz wafer 7 needs to be driven to rotate and polish, the servo motor can drive the driving wheel 24 to rotate, the driving wheel 24 can drive the rotation mounting wheel 22 to synchronously rotate when rotating, and the rotation mounting wheel 22 is fixedly connected with the multi-size clamping wheel 3, so that the multi-size clamping wheel 3 synchronously rotates when the rotation mounting wheel 22 rotates, and the quartz wafer 7 rotates along with the multi-size clamping wheel 3.
Referring to fig. 1 and 6, the multi-size clamping wheel 3 includes a limiting clamping column 31 mounted on a rotary mounting wheel 22, a multi-layer sliding adjusting sleeve 35 is mounted on the outer side of the limiting clamping column 31, an abutting adsorption disc 36 is mounted on one end, far away from the rotary mounting wheel 22, of the limiting clamping column 31, and a plurality of anti-slip strips 37 are arranged on the side wall of the abutting adsorption disc 36.
According to the diameter of the shaft of quartz wafer 7 size adjustment is carried out to multisize centre gripping wheel 3, a plurality of slip regulation cover 35 sizes of installation in spacing joint post 31 outside are all different, the slip regulation cover 35 of equidimension is used for adapting to the quartz wafer 7 of contradicting different dimensions, because protection belt 5 is installed in the outside of slip regulation cover 35, the staff is when adjusting the position of slip regulation cover 35, the staff is earlier with the protection belt 5 expansion of cover on slip regulation cover 35 through spacing joint post 31, tight support 4 can receive the extrusion when protection belt 5 expansion motion, make protection belt 5 separate with the slip regulation, simultaneously spacing joint post 31 is removed the fixed to slip regulation cover 35, the staff is according to the diameter of the shaft of quartz wafer 7 size slip adjustment slip regulation cover 35's position, when slip regulation cover 35 adjusts the position, spacing joint post 31 can cancel the expansion, can make protection belt 5 reset and the laminating of slip regulation cover 35 that adjusts, simultaneously spacing joint post 31 can fix a position the slip regulation cover 35 that the cover that is good, the absorption disk 36 of spacing joint post 31 lateral part is contradicted with quartz wafer 7 when the absorption disk is contradicted, the absorption disk 36 can effectively be fixed on the absorption disk 37, the effective absorption stability of the absorption disk is improved.
Referring to fig. 6 and 7, an installation cavity is provided in the limit clamping column 31, a plurality of first limit holes 32 and second limit holes 33 are uniformly distributed on the outer side of the limit clamping column 31, a linkage clamping mechanism 34 is installed in the installation cavity, and the working end of the linkage clamping mechanism 34 passes through the first limit holes 32 and the second limit holes 33 to extend outwards.
When the worker needs to adjust the position of the sliding adjusting sleeve 35 on the limiting clamping column 31, the worker pushes the linkage clamping mechanism 34, the linkage clamping mechanism 34 expands the protection belt 5 sleeved on the sliding adjusting sleeve 35, the protection belt 5 is separated from sliding adjustment, the linkage clamping mechanism 34 releases the sliding adjusting sleeve 35 from being fixed, the worker moves the proper sliding adjusting sleeve 35 to a designated position, the worker stops pushing the linkage clamping mechanism 34, the linkage clamping mechanism 34 resets, the protection belt 5 resets and is abutted against the adjusted sliding adjusting sleeve 35, and meanwhile, the limiting clamping column 31 positions and fixes the adjusted sliding adjusting sleeve 35.
Referring to fig. 6 to 8, the linkage clamping mechanism 34 includes a pushing adjustment column 347 mounted on the limiting clamping column 31, a pushing spring 348 is mounted between the pushing adjustment column 347 and the limiting clamping column 31, an expanding clamping mechanism and an expanding support mechanism are further mounted on the pushing adjustment column 347, the expanding clamping mechanism includes a first clamping mounting ring 341 mounted on the pushing adjustment column 347, a plurality of first expanding rods 342 are mounted on the first clamping mounting ring 341, telescopic clamping columns 343 are mounted on the first expanding rods 342, the telescopic clamping columns 343 extend upwards along the first limiting holes 32, the expanding support mechanism includes a second clamping mounting ring 344 mounted on the pushing adjustment column 347, a plurality of second expanding rods 345 are mounted on the second clamping mounting ring 344, sliding support rods 346 are mounted on the second expanding rods 346, the sliding support rods 346 extend upwards along the second limiting holes 33, and positioning abutting grooves are formed in the sliding support rods 346.
When the protection belt 5 is required to be expanded, and the fixation of the sliding adjusting sleeve 35 is released, a worker pushes the pushing adjusting column 347, the pushing adjusting column 347 moves towards the inside of the limiting clamping column 31, the pushing spring 348 is extruded, meanwhile, the pushing adjusting column 347 pushes the first clamping mounting ring 341 and the second clamping mounting ring 344 to move forward synchronously, the first clamping mounting ring 341 drives the first expansion rod 342 to move synchronously, when the first expansion rod 342 moves in a shrinking manner, the telescopic clamping column 343 is driven to retract and move towards the limiting clamping column 31 from the inside along the first limiting hole 32, the telescopic clamping column 343 is released from the fixation of the sliding adjusting sleeve 35 when being retracted, meanwhile, the second clamping mounting ring 344 drives the second expansion rod 345 to move synchronously and expand when moving forwards, the second expansion rod 345 pushes the sliding supporting rod 346 to extend outwards along the second limiting hole 33, the positioning butt groove is in contact with the inner wall of the protection belt 5 when moving outwards, the protection belt 5 is supported, the sliding adjusting sleeve 35 is enabled to be free to be separated from the sliding adjusting sleeve, the sliding adjusting rod 343 can be reset, and the sliding adjusting rod 343 is reset, and the sliding adjusting rod is reset to be pushed by the sliding adjusting rod is pushed to the sliding adjusting rod 343, and the sliding adjusting rod is reset by the sliding adjusting rod is pushed to be 35, and the sliding adjusting rod is reset by the sliding rod is pushed to be 35, and the sliding rod is reset to be pushed by the sliding rod 346 is pushed to be pushed to move the sliding rod 346 to the inner wall.
Referring to fig. 6 to 9, the outer wall of the sliding adjustment sleeve 35 is provided with a first anti-slip groove 351, the outer wall of the sliding adjustment sleeve 35 is further provided with a mounting bayonet 352 and a positioning hole 353, and the abutting end of the sliding adjustment sleeve 35 is provided with an anti-slip ring 354.
The first anti-slip groove 351 on the sliding adjusting sleeve 35 is used for clamping and abutting against the inner wall of the protection belt 5, the positioning on the sliding adjusting sleeve 35 is convenient for the butt joint insertion of the telescopic clamping column 343, and the mounting bayonet 352 on the sliding adjusting sleeve 35 is convenient for the insertion and movement of the matched sliding supporting rod 346.
Referring to fig. 1 to 5, the tightening bracket 4 includes a sliding bracket 41 installed at a side portion of the bracket base 21, a tightening spring 42 installed between the sliding bracket 41 and the bracket base 21, a rotating tightening wheel 43 installed on the sliding bracket 41, and a second anti-slip groove provided at an outer side of the rotating tightening wheel 43.
The second anti-slip groove of the rotation tightening wheel 43 is used for limiting and guiding the protection belt 5 to rotate, when the multi-size clamping wheel 3 is adjusted, the protection belt 5 is pushed to expand, the rotation tightening wheel 43 is driven to shrink and move, when the rotation tightening wheel 43 shrinks and moves, the rotation sliding support 41 is driven to move towards the support base 21, the tightening spring 42 is extruded, when the multi-size clamping wheel 3 is adjusted, the protection belt 5 shrinks and resets, the protection belt 5 is attached to the multi-size clamping wheel 3, when the protection belt 5 resets, the tightening spring 42 pushes the sliding support 41 to move along with the protection belt 5, the protection belt 5 is effectively kept in a tightening state all the time, and the protection belt 5 is convenient to adapt to being abutted to the outer walls of the sliding adjusting sleeves 35 with different sizes.
Referring to fig. 1 and 10, a protection belt 5 is installed between the sliding adjusting sleeve 35 and the rotating tightening wheel 43, an inclined protection edge 51 is provided at the outer side of the protection belt 5, and a limit collar 52 is provided at the inner wall of the protection belt 5.
The protection belt 5 is used for being sleeved on the sliding adjusting sleeve 35 and the rotating tightening wheel 43, the limiting convex ring 52 on the inner wall of the protection belt 5 is used for being installed in the first anti-slip groove 351 and the second anti-slip groove in a limiting clamping mode, stability during rotation of the protection belt 5 is guaranteed conveniently, the inclined protection edge 51 on the outer side of the protection belt 5 is covered on the surface of the quartz wafer 7 conveniently, the inclined protection edge 51 can effectively guarantee the covered range, and meanwhile, the phenomenon that an edge grinder is blocked for effective polishing is avoided.
Referring to fig. 1 and 11, the wafer positioning frame 6 includes a mounting bracket 61 mounted on the bidirectional ball screw sliding table 1, a limit supporting device 62 is disposed above the mounting bracket 61, and a first limit guide post 64 and a linear driver 63 are mounted between the limit supporting device 62 and the mounting bracket 61.
The linear driver 63 is preferably an electric push rod, when the quartz wafer 7 is required to be placed at the axial position of the multi-size clamping wheel 3, a worker adjusts the holding distance of the clamping end of the limiting and supporting device 62 according to the thickness of the quartz wafer 7, then pushes the limiting and supporting device 62 to move to a proper height through the electric push rod according to the axial diameter size of the quartz wafer 7, when the quartz wafer 7 is required to be placed in a limiting manner, the quartz wafer 7 to be polished is placed between the multi-size clamping wheels 3 through an industrial manipulator, the bottom of the quartz wafer 7 is abutted against the working end of the limiting and supporting device 62, and the multi-size clamping wheels 3 can clamp and fix the quartz wafer 7 by synchronous shrinkage movement, so that the multi-size clamping wheel 3 and the quartz wafer 7 are kept coaxially arranged, and the adaptability of limiting placement is effectively improved.
Referring to fig. 11 and 12, the limit supporting device 62 includes a mounting base 621 mounted at an output end of the linear driver 63, a second limit guide post 622 and a bidirectional ball screw 623 are symmetrically mounted on the mounting base 621, a sliding mounting plate 624 is symmetrically mounted on the second limit guide post 622 and the bidirectional ball screw 623, a plurality of penetration adjusting wheels 626 are mounted on the sliding mounting plate 624, a plurality of penetration holes 627 are formed in the penetration adjusting wheels 626, a conical surface 628 is further formed in the penetration adjusting wheels 626, a second rotary driver 625 is further mounted on a side portion of the mounting base 621, and an output end of the second rotary driver 625 is in transmission connection with the bidirectional ball screw 623.
The second rotary driver 625 is preferably a servo motor, when the operator knows the thickness of the quartz wafer 7, the operator drives the bidirectional ball screw 623 to rotate through the servo motor, the bidirectional ball screw 623 drives the sliding mounting plate 624 to move and adjust when rotating, and the sliding mounting plate 624 drives the penetration adjusting wheel 626 to penetrate and adjust when moving and adjusting, so that the distance between the conical surfaces 628 of the penetration adjusting wheel 626 is changed, the conical surfaces 628 can be adapted to guide the quartz wafer 7 to be placed at the middle position, the position of the quartz wafer 7 between the conical surfaces 628 can be controlled by adjusting the distance between the conical surfaces 628, and in order to prevent the penetration adjusting wheel 626 from blocking the edge surface of the quartz wafer 7 by the protection belt 5.
The specific working principle is as follows:
The staff can carry out size adjustment on the multi-size clamping wheel 3 according to the shaft diameter size of the quartz wafer 7, after the multi-size clamping wheel 3 is adjusted in size, the tightening support 4 can push the protection belt 5 to collide with the multi-size clamping wheel 3 with adjusted size, meanwhile, the position of the wafer positioning frame 6 is adjusted according to the thickness and the shaft diameter size of the quartz wafer 7, when the quartz wafer 7 needs to be polished, the quartz wafer 7 needing to be polished is placed between the multi-size clamping wheels 3 through the industrial manipulator, the bottom of the quartz wafer 7 is supported and positioned with the bottom of the wafer positioning frame 6, the wafer positioning frame 6 can effectively ensure that the quartz wafer 7 is placed at the axial center position of the multi-size clamping wheel 3, and when the working end of the bidirectional ball screw sliding table 1 is synchronously contracted, the rotary driving seat 2 can drive the multi-size clamping wheel 3 to carry out clamping movement, the clamping motion of the multi-size clamping wheel 3 can clamp and fix the quartz wafer 7, the quartz wafer 7 is clamped by the multi-size clamping wheel 3, the protection belt 5 can be attached and abutted against the side wall of the quartz wafer 7, the wafer positioning frame 6 can descend to separate from the quartz wafer 7, the rotary driving seat 2 can drive the multi-size clamping wheel 3 and the protection belt 5 to synchronously rotate, the clamped quartz wafer 7 rotates along with the multi-size clamping wheel, the angle of the edge grinder can be adjusted to grind edges of the quartz wafer 7, and the angle of the edge grinder needs to be adjusted to protect the surface of the quartz wafer 7 effectively when the edge grinder is adjusted, so that the error grinding is avoided when the edge grinder is adjusted, and meanwhile, the protection belt 5 can be prevented from being damaged when being contacted with the edge grinder.
The foregoing examples merely illustrate one or more embodiments of the invention, which are described in greater detail and are not to be construed as limiting the scope of the invention. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention. Accordingly, the scope of the invention should be assessed as that of the appended claims.
Claims (5)
1. The utility model provides an anti-accidental injury edging equipment for quartz crystal wafer production, including protecting edging protection clamping device who clamps quartz crystal wafer (7), a serial communication port, edging protection clamping device includes two-way ball screw slip table (1), a plurality of rotation driving seat (2) are installed to the symmetry on the mobile end of two-way ball screw slip table (1), all install multisize clamping wheel (3) of centre gripping quartz crystal wafer (7) on rotation driving seat (2), tensioning support (4) are installed to the lateral part of rotation driving seat (2), tensioning support (4) and multisize clamping wheel (3) are gone up and all are installed protection belt (5) at protection quartz crystal wafer (7) edge, spacing wafer locating rack (6) of supporting quartz crystal wafer (7) are installed to the below of multisize clamping wheel (3);
The rotary driving seat (2) comprises a bracket base (21) arranged on the bidirectional ball screw sliding table (1), a rotary mounting wheel (22) is arranged on the bracket base (21), a first rotary driver (23) is also arranged on the bracket base (21), a driving wheel (24) is arranged at the output end of the first rotary driver (23), and a transmission chain (25) is arranged between the driving wheel (24) and the rotary mounting wheel (22);
the multi-size clamping wheel (3) comprises a limiting clamping column (31) arranged on the rotary mounting wheel (22), a multi-layer sliding adjusting sleeve (35) is arranged on the outer side of the limiting clamping column (31), an abutting adsorption disc (36) is arranged at one end, far away from the rotary mounting wheel (22), of the limiting clamping column (31), and a plurality of anti-slip strips (37) are arranged on the side wall of the abutting adsorption disc (36);
The inside of the limiting clamping column (31) is provided with a mounting cavity, a plurality of first limiting holes (32) and second limiting holes (33) are uniformly distributed on the outer side of the limiting clamping column (31), a linkage clamping mechanism (34) is mounted in the mounting cavity, and the working end of the linkage clamping mechanism (34) penetrates through the first limiting holes (32) and the second limiting holes (33) to extend outwards;
The linkage clamping mechanism (34) comprises a pushing and pressing adjusting column (347) arranged on the limiting and pressing clamping column (31), a pushing and pressing spring (348) is arranged between the pushing and pressing adjusting column (347) and the limiting and pressing clamping column (31), an expanding and clamping mechanism and an expanding and supporting mechanism are further arranged on the pushing and pressing adjusting column (347), the expanding and pressing mechanism comprises a first clamping and pressing installation ring (341) arranged on the pushing and pressing adjusting column (347), a plurality of first expanding rods (342) are arranged on the first clamping and pressing installation ring (341), telescopic clamping columns (343) are arranged on the first expanding rods (342), the telescopic clamping columns (343) extend upwards along the first limiting holes (32), the expanding and supporting mechanism comprises a second clamping and pressing installation ring (344) arranged on the pushing and pressing adjusting column (347), a plurality of second expanding rods (345) are arranged on the second clamping and supporting ring (344), a plurality of sliding supporting rods (346) are arranged on the second expanding rods (345), the sliding supporting rods (346) extend upwards along the second limiting holes (33), and a positioning groove is formed in the sliding supporting rods (346);
The outer wall of the sliding adjusting sleeve (35) is provided with a first anti-slip groove (351), the outer wall of the sliding adjusting sleeve (35) is also provided with an installation bayonet (352) and a positioning hole (353), and the abutting end of the sliding adjusting sleeve (35) is provided with an anti-slip ring (354).
2. The accidental injury prevention edging equipment for quartz crystal wafer production according to claim 1, wherein the tightening support (4) comprises a sliding support (41) arranged on the side part of the support base (21), a tightening spring (42) is arranged between the sliding support (41) and the support base (21), a rotary tightening wheel (43) is further arranged on the sliding support (41), and a second anti-slip groove is arranged on the outer side of the rotary tightening wheel (43).
3. The accidental injury prevention edging equipment for quartz wafer production according to claim 2, characterized in that a protection belt (5) is arranged between the sliding adjusting sleeve (35) and the rotating tightening wheel (43), an inclined protection edge (51) is arranged on the outer side of the protection belt (5), and a limit convex ring (52) is arranged on the inner wall of the protection belt (5).
4. The accidental injury prevention edging equipment for quartz wafer production according to claim 1, wherein the wafer positioning frame (6) comprises a mounting bracket (61) mounted on the bidirectional ball screw sliding table (1), a limiting support device (62) is arranged above the mounting bracket (61), and a first limiting guide post (64) and a linear driver (63) are mounted between the limiting support device (62) and the mounting bracket (61).
5. The accidental injury prevention edging equipment for quartz wafer production according to claim 4, wherein the limit supporting device (62) comprises a mounting base (621) mounted at the output end of the linear driver (63), a second limit guide pillar (622) and a bidirectional ball screw (623) are symmetrically mounted on the mounting base (621), a sliding mounting plate (624) is symmetrically mounted on the second limit guide pillar (622) and the bidirectional ball screw (623), a plurality of penetration adjusting wheels (626) are mounted on the sliding mounting plate (624), a plurality of penetration holes (627) are formed in the penetration adjusting wheels (626), a conical surface (628) is further formed in the penetration adjusting wheels (626), a second rotary driver (625) is mounted on the side portion of the mounting base (621), and the output end of the second rotary driver (625) is in transmission connection with the bidirectional ball screw (623).
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| CN202410345624.0A CN117943929B (en) | 2024-03-26 | 2024-03-26 | Accidental injury prevention edging equipment for quartz wafer production |
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| CN202410345624.0A CN117943929B (en) | 2024-03-26 | 2024-03-26 | Accidental injury prevention edging equipment for quartz wafer production |
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|---|---|
| CN117943929A (en) | 2024-04-30 |
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