CN117929633B - On-line detection method and system for uniformity of color paste for photoresist - Google Patents
On-line detection method and system for uniformity of color paste for photoresist Download PDFInfo
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- CN117929633B CN117929633B CN202311755442.2A CN202311755442A CN117929633B CN 117929633 B CN117929633 B CN 117929633B CN 202311755442 A CN202311755442 A CN 202311755442A CN 117929633 B CN117929633 B CN 117929633B
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- 229920002120 photoresistant polymer Polymers 0.000 title claims abstract description 75
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- 239000002245 particle Substances 0.000 claims abstract description 100
- 238000003756 stirring Methods 0.000 claims abstract description 56
- 238000000034 method Methods 0.000 claims abstract description 38
- 238000011156 evaluation Methods 0.000 claims abstract description 24
- 238000007790 scraping Methods 0.000 claims abstract description 18
- 238000002156 mixing Methods 0.000 claims abstract description 17
- 239000002904 solvent Substances 0.000 claims abstract description 15
- 238000011161 development Methods 0.000 claims description 72
- 238000001259 photo etching Methods 0.000 claims description 26
- 238000005457 optimization Methods 0.000 claims description 17
- 238000009826 distribution Methods 0.000 claims description 13
- 230000003749 cleanliness Effects 0.000 claims description 9
- 238000012216 screening Methods 0.000 claims description 5
- 230000000694 effects Effects 0.000 abstract description 7
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 238000004377 microelectronic Methods 0.000 abstract description 3
- 239000000975 dye Substances 0.000 description 52
- 230000008569 process Effects 0.000 description 18
- 238000012545 processing Methods 0.000 description 6
- 238000004458 analytical method Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
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- 230000036632 reaction speed Effects 0.000 description 1
- 239000000985 reactive dye Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000010023 transfer printing Methods 0.000 description 1
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/30—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring roughness or irregularity of surfaces
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- G01N11/10—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material
- G01N11/14—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material by using rotary bodies, e.g. vane
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/251—Colorimeters; Construction thereof
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- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/49—Scattering, i.e. diffuse reflection within a body or fluid
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/59—Transmissivity
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/28—Electrolytic cell components
- G01N27/30—Electrodes, e.g. test electrodes; Half-cells
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Abstract
The application discloses a method and a system for detecting uniformity of color paste for photoresist on line, belonging to the field of microelectronic manufacturing, wherein the method comprises the following steps: detecting dynamic roughness of a scraper for conveying dye particles to obtain real-time scraper roughness; if the real-time scraper roughness accords with the preset roughness threshold, a preset preparation scheme is called; stirring and mixing the solvent and the dye particles conveyed by the scraping plate based on a preset preparation scheme to obtain a color paste finished product; detecting preset evaluation characteristics of the color paste finished product to obtain characteristic parameters of the color paste finished product; and weighting the characteristic parameters of the color paste finished product to obtain a color paste uniformity index, wherein the color paste uniformity index is used for representing the uniformity performance of the color paste finished product. The application solves the technical problem that the uniformity performance cannot be monitored in real time in the preparation process of the photoresist color paste in the prior art, and achieves the technical effect of realizing the on-line detection of the uniformity of the color paste in the preparation process of the photoresist color paste.
Description
Technical Field
The invention relates to the field of microelectronic manufacturing, in particular to an online detection method and system for uniformity of color paste for photoresist.
Background
Microelectronic chips are used as a core product in the information age, and in integrated circuit fabrication, lithographic processes have the greatest impact on the cost of the microcircuit chip relative to other processes. In the photoetching process, the quality of the photoresist color paste directly influences the exposure transfer printing and pattern development effects, and solid particles in the color paste such as uneven distribution can cause defects in transferred patterns. Therefore, the uniformity of the photoetching color paste needs to be accurately detected in real time so as to ensure the quality of products. At present, the detection of the photoetching color paste mainly comprises manual sampling and off-line detection, and the method has a long detection period and cannot realize the closed-loop control of the quality of the photoetching color paste finished product; moreover, the quality problems caused by the preparation process and detection errors are difficult to distinguish in the traditional detection, and the process optimization is not facilitated.
Disclosure of Invention
The application provides a method and a system for detecting uniformity of color paste for photoresist on line, and aims to solve the technical problem that the uniformity performance cannot be monitored in real time in the preparation process of the color paste for photoresist in the prior art.
In view of the above problems, the application provides a method and a system for online detecting the uniformity of color paste for photoresist.
In a first aspect of the present disclosure, an online detection method for uniformity of color paste for photoresist is provided, the method comprising: detecting dynamic roughness of the scraper for conveying dye particles through a roughness measuring instrument to obtain real-time scraper roughness; if the real-time scraper roughness accords with the preset roughness threshold, a preset preparation scheme is called, wherein the preset preparation scheme is a scheme composed of preset preparation process characteristic parameters of preset preparation process characteristics; stirring and mixing the solvent and the dye particles conveyed by the scraping plate based on a preset preparation scheme to obtain a color paste finished product; detecting preset evaluation characteristics of the color paste finished product to obtain characteristic parameters of the color paste finished product; and weighting the characteristic parameters of the color paste finished product to obtain a color paste uniformity index, wherein the color paste uniformity index is used for representing the uniformity performance of the color paste finished product.
In another aspect of the disclosure, an on-line detection system for uniformity of color paste for photoresist is provided, the system comprising: the roughness detection module is used for detecting dynamic roughness of the scraper for conveying the dye particles through the roughness measuring instrument to obtain real-time scraper roughness; the preparation scheme calling module is used for calling a preset preparation scheme if the real-time scraping plate roughness accords with a preset roughness threshold value, wherein the preset preparation scheme is a scheme composed of preset preparation process characteristic parameters of preset preparation process characteristics; the color paste finished product obtaining module is used for stirring and mixing the solvent and the dye particles conveyed by the scraping plate based on a preset preparation scheme to obtain a color paste finished product; the finished product feature detection module is used for detecting preset evaluation features of the color paste finished product to obtain color paste finished product feature parameters; the uniformity index obtaining module is used for weighting characteristic parameters of the color paste finished product to obtain a color paste uniformity index, and the color paste uniformity index is used for representing uniformity performance of the color paste finished product.
One or more technical schemes provided by the application have at least the following technical effects or advantages:
Due to the adoption of the setting roughness measuring instrument, dynamic roughness detection is carried out on the scraper for conveying the dye particles, so that real-time scraper roughness is obtained, and the change of the scraper roughness of the dye particles is reflected to the uniformity degree of distribution; comparing the real-time scraper roughness with a preset roughness threshold, and if the real-time scraper roughness meets the preset roughness threshold, calling a preset preparation scheme to provide a foundation for preparing a color paste finished product; stirring the mixed solvent and dye particles conveyed by a scraper according to a preset preparation scheme to obtain a color paste finished product, and finishing the preparation of the color paste; the technical scheme of obtaining the uniformity index of the color paste by detecting the preset evaluation characteristics of the color paste finished product to obtain the characteristic parameters of the color paste finished product reflecting uniformity and carrying out weighted operation on the parameters is adopted, the technical problem that the uniformity performance cannot be monitored in real time in the preparation process of the photoresist color paste in the prior art is solved, and the technical effect of realizing the online detection of the uniformity of the color paste in the preparation process of the photoresist color paste is achieved.
The foregoing description is only an overview of the present application, and is intended to be implemented in accordance with the teachings of the present application in order that the same may be more clearly understood and to make the same and other objects, features and advantages of the present application more readily apparent.
Drawings
FIG. 1 is a schematic flow chart of a method for online detecting uniformity of color paste for photoresist according to an embodiment of the application;
FIG. 2 is a schematic flow chart of determining a predetermined roughness threshold in an online detection method for uniformity of a color paste for photoresist according to an embodiment of the present application;
fig. 3 is a schematic structural diagram of an online detection system for uniformity of color paste for photoresist according to an embodiment of the application.
Reference numerals illustrate: the device comprises a roughness detection module 11, a preparation scheme calling module 12, a color paste finished product acquisition module 13, a finished product characteristic detection module 14 and a uniformity index acquisition module 15.
Detailed Description
The technical scheme provided by the application has the following overall thought:
The embodiment of the application provides a method and a system for detecting uniformity of color paste for photoresist on line. Firstly, the scraper roughness of the uniformity degree of reactive dye particles is monitored in real time and is used as a key parameter of the quality of the color paste preparation process. And secondly, comparing the roughness of the scraping plate with a preset roughness threshold value, and automatically calling a preset preparation scheme of the color paste when the roughness meets the threshold value. And preparing a color paste finished product according to a preset preparation scheme. And finally, detecting the uniformity related characteristics of the color paste finished product to obtain the characteristic parameters of the color paste finished product, weighting to obtain the uniformity index of the color paste, and representing the uniformity performance of the color paste finished product to realize the on-line monitoring of the uniformity of the color paste.
Having described the basic principles of the present application, various non-limiting embodiments of the present application will now be described in detail with reference to the accompanying drawings.
Example 1
As shown in fig. 1, an embodiment of the present application provides an on-line detection method for uniformity of color paste for photoresist, the method comprising:
Detecting dynamic roughness of the scraper for conveying dye particles through a roughness measuring instrument to obtain real-time scraper roughness;
in an embodiment of the present application, first, a transporting device for transporting dye particles is provided, the transporting device including a scraper for scraping and transporting the dye particles in the transporting device. Meanwhile, a roughness measuring instrument connected with the conveying device is arranged and used for detecting the surface roughness of the scraping plate. In the working process of the conveying device, the dye particles generate scratches on the surface of the scraping plate, and the roughness of the surface of the scraping plate is changed in real time. The roughness measuring instrument dynamically monitors the surface roughness change of the scraper, and reflects the surface roughness value of the scraper in real time, namely the real-time scraper roughness, so as to judge the uniformity of the particle size distribution of dye particles and the loss condition of the surface of the scraper, and provide a basis for judging whether to call a preset preparation scheme.
If the real-time scraper roughness accords with a preset roughness threshold, a preset preparation scheme is called, wherein the preset preparation scheme is a scheme composed of preset preparation process characteristic parameters of preset preparation process characteristics;
In the embodiment of the application, firstly, a threshold value of the scratch roughness of the scratch board is preset to obtain a preset roughness threshold value, and the threshold value is used for judging whether the depth of the scratch on the surface of the scratch board is in an allowable range or not. When the measured real-time scraper roughness is lower than or equal to the preset roughness threshold, the scraper surface scratch depth is judged to be in a proper range, and the scraped dye particle size distribution is uniform, namely the real-time scraper roughness accords with the preset roughness threshold. At this time, a predetermined preparation scheme stored in a database is called, and the predetermined preparation scheme is composed of a set of predetermined preparation process characteristic parameters of predetermined preparation process characteristics and is used for guiding the preparation of the subsequent color paste finished product. Wherein, the preset preparation process characteristic parameters comprise parameters such as stirring speed, stirring temperature, solvent type, solvent dosage, standing time and the like. On the premise of determining that the scraping plate loss is in the allowable range, a preset preparation scheme of the prepared color paste is called, so that a foundation is provided for rapidly and high-quality preparation of the color paste.
Stirring and mixing a solvent and the dye particles conveyed by the scraping plate based on the preset preparation scheme to obtain a color paste finished product;
In the embodiment of the application, a stirring and mixing device is arranged to realize the mixing operation of the solvent and the dye particles, so as to obtain a color paste finished product. The stirring and mixing device is internally provided with a rotor, a plurality of scrapers are arranged on the rotor, and the scrapers are driven to rotate together when the rotor rotates at a high speed. The dye particles and the solvent which are conveyed by the scraping plate are added into the stirring and mixing device according to the dosage proportion in the called preset preparation scheme. Starting a stirring and mixing device, and carrying out mixing operation of the solvent and the dye particles according to stirring speed and temperature conditions required in a preset preparation scheme, wherein the mixing time is set in the preset preparation scheme, and after stirring and mixing are finished, obtaining a color paste finished product, and providing a material basis for subsequent color paste evaluation.
Detecting preset evaluation characteristics of the color paste finished product to obtain color paste finished product characteristic parameters;
further, the method comprises the following steps:
The predetermined evaluation characteristics include color, clarity, viscosity, pH, and cleanliness.
In the embodiment of the application, the preset evaluation characteristics refer to key indexes affecting the uniformity of color paste, including color, transparency, viscosity, pH value and cleanliness. The color paste evaluation unit is provided with a colorimeter, a transmissivity tester, a rotary viscometer, a pH meter and a turbidity meter. Placing the prepared color paste finished product into a sample cell of a color paste evaluating unit, starting a colorimeter, emitting light rays with different wavelengths to irradiate the color paste finished product, receiving a reflected light signal by a receiving sensor, obtaining color coordinate parameters of the color paste through spectroscopic analysis and calculation, and recording the color coordinate parameters into characteristic parameters of the color paste finished product to realize detection of color characteristics of the color paste finished product; starting a transmissivity tester, transmitting monochromatic light to penetrate through the color paste finished product, receiving a light propagation loss signal by a sensor, calculating to obtain a color paste transparency parameter, and recording the color paste transparency parameter into a color paste finished product characteristic parameter to realize detection of the color paste finished product transparency characteristic; starting a rotary viscometer, testing viscosity values of the color paste at different rotating speeds by rotating a rotor in the color paste to obtain viscosity parameters, and recording the viscosity parameters into characteristic parameters of a color paste finished product to realize detection of the viscosity characteristics of the color paste finished product; starting a pH meter, inserting a color paste finished product, detecting the pH value of the color paste solution through an electrode, converting and outputting a pH value parameter, and recording the pH value parameter into a characteristic parameter of the color paste finished product to realize detection of the pH value of the color paste finished product; starting a turbidity meter, emitting light to irradiate the sample, measuring error light to calculate turbidity value, obtaining a color paste cleanliness parameter, and recording the color paste cleanliness parameter into a color paste finished product characteristic parameter to realize detection of the color paste finished product cleanliness characteristic.
Five characteristic parameters of color, transparency, viscosity, pH value and cleanliness of the color paste finished product are obtained, so that a basis is provided for evaluating uniformity performance of the color paste.
And weighting the characteristic parameters of the color paste finished product to obtain a color paste uniformity index, wherein the color paste uniformity index is used for representing the uniformity performance of the color paste finished product.
In the embodiment of the application, an operation device is arranged for carrying out operation weighting treatment on each characteristic parameter of the obtained color paste finished product. The arithmetic device stores weighting coefficients of all parameters, and different weighting values are set for parameters of color, transparency, viscosity, pH and cleanliness according to the uniformity performance requirement of color paste. The arithmetic device calls each parameter measurement value and multiplies the parameter measurement value by the weighting coefficient of the corresponding parameter in sequence to obtain a plurality of weighting parameter values. And then, carrying out summation operation on the weighted parameter values, and finally merging the calculated color paste uniformity indexes. The color paste uniformity index comprehensively considers a plurality of aspect parameters influencing the uniformity of the color paste, and the larger the value is, the better the uniformity of the color paste is; on the contrary, the smaller the index value is, the uneven distribution of the components of the color paste finished product is indicated, and the uniformity is poor, so that the uniformity level of the color paste finished product is effectively reflected, and the on-line monitoring of the uniformity of the color paste for the photoresist is realized.
Further, the embodiment of the application further comprises:
transmitting first laser to the color paste finished product through a laser transmitter;
Receiving first scattered light of the color paste finished product to the first laser through a laser receiver;
Performing intensity detection on the first scattered light to obtain scattered light intensity information, wherein the scattered light intensity information comprises first scattered light intensity at a first position and second scattered light intensity at a second position;
obtaining color paste uniformity level according to the light intensity comparison information of the first scattered light intensity and the second scattered light intensity;
and verifying the color paste uniformity index based on the color paste uniformity level.
In a preferred embodiment, a laser detection device is provided for performing laser verification detection on the color paste finished product, and the laser detection device comprises a laser emitter and a laser receiver. Firstly, placing a prepared color paste finished product on a workbench of a laser detection device, starting a laser emitter, emitting a monochromatic continuous laser beam as first laser, and regulating and controlling the direction of the first laser by regulating the angle of the laser emitter so as to irradiate the surface of the color paste finished product in a vertical incidence mode. The first laser irradiates the surface of the color paste finished product vertically, enters the inside of the color paste finished product, interacts with color paste components, and changes the direction and energy, thereby generating a scattering phenomenon. Then, the angle of the laser receiver is adjusted to enable the laser receiver to be aligned to the first position and the second position of the surface of the color paste finished product, and first scattered light is obtained. Subsequently, the received first scattered light is subjected to photoelectric conversion, and an electrical parameter signal of the first scattered light is converted and output. The first position and the second position are any two points on the same height of the surface of the color paste finished product.
Next, a signal analysis device is provided, which is connected to the laser detection device and is used for analyzing and processing the first scattered light signal received by the laser receiver. The signal analysis device comprises an operational amplification circuit, a filter circuit and an operation processing unit. When the device works, the obtained electrical parameter signals of the first scattered light at the first position and the second position are input into the signal analysis device, the electrical signals are amplified by the operational amplification circuit, then are denoised by the filter circuit, and are sent into the operation processing unit. The operation processing unit samples and digitizes the waveform curve of the first scattered light, extracts characteristic points of the waveform curve, and obtains light intensity values corresponding to the first scattered light at different positions, namely first scattered light intensity at the first position and second scattered light intensity at the second position, so as to provide basic data support for judging color paste uniformity according to difference of the scattered light intensities at the two positions.
In the operation processing unit, a plurality of groups of comparison analysis models are set according to empirical data, and the corresponding color paste uniformity levels under the condition of different light intensity ratios are given, for example, the first-level uniformity is judged when the light intensity ratio is 1+/-0.05; and when the light intensity ratio is 1+/-0.1, judging that the second level is uniform, and the like. And then, the operation processing unit calculates a double-point light intensity ratio based on the obtained first scattered light intensity value and the second scattered light intensity value of the two positions, matches a corresponding color paste uniformity rating result, judges the uniformity degree of color paste component distribution, and obtains a color paste uniformity level.
Subsequently, a correspondence model between index values and uniformity levels is set, for example, when the uniformity index is 90 to 100 hours, the corresponding uniformity level is one-level uniformity. And then, acquiring the obtained color paste uniformity index value, acquiring the color paste uniformity level, and judging whether the color paste uniformity index value and the color paste uniformity level are matched and consistent according to the corresponding relation model. If the color paste uniformity index is too high and the color paste uniformity level is lower, determining that error deviation exists in the index result and correction is needed; if the two results are identical, the color paste uniformity index result is judged to be effective and accurate data, the index verification based on uniformity level is completed, and the accuracy and reliability of color paste uniformity detection are improved.
Further, as shown in fig. 2, the embodiment of the present application further includes:
calling first transaction information of first color paste preparation in a color paste preparation database, wherein the first transaction information comprises first dye particle size, first photoresist resolution and first development level;
if the first photoresist resolution meets a predetermined resolution threshold, adding the first dye particle size to a candidate particle size list;
Screening particle sizes meeting a preset development level threshold value from the candidate particle size list, and marking the particle sizes as target particle sizes;
and determining the preset roughness threshold according to the detected scratch roughness of the dye particles with the target particle size on the scratch board.
In a preferred embodiment, the color paste preparation database stores preparation records of color paste, and the record contains three parameters of corresponding dye particle size, photoresist resolution and development level as transaction information. Meanwhile, a threshold standard of photoresist resolution is set according to the requirement of a photoetching process and is used as a preset resolution threshold, and if the photoresist resolution in the transaction information is higher than the threshold, the corresponding dye particle size is added into a candidate particle size list to serve as a potential candidate target particle size. Meanwhile, a developing level threshold standard is set as a preset developing level threshold to screen out target particle sizes which meet the standard and are suitable for the current photoresist in the candidate particle size list.
In order to set an accurate preset roughness threshold, firstly, traversing a preparation record of color paste in a color paste preparation database, and obtaining transaction information of any color paste preparation as first transaction information of first color paste preparation, wherein the first transaction information comprises a first dye particle size, a first photoresist resolution and a first development level. Wherein, the first dye particle size refers to the particle size parameter of the dye used for preparing the first color paste; the first photoresist resolution refers to the minimum resolution of forming a photolithographic pattern using the photoresist of the first color paste; the first development level reflects a parameter of a development capability of the photoresist prepared from the first color paste. And then, reading the resolution of the first photoresist in the called first transaction information, and comparing the resolution of the first photoresist with a preset resolution threshold value, wherein when the resolution of the first photoresist is equal to or higher than the preset resolution threshold value, the resolution of the first photoresist meets the preset resolution threshold value. At this time, the first dye particle size used for the first color paste preparation is added to the candidate particle size list as one of the candidate parameters for the subsequent screening of the target particle size, providing basic data for obtaining the target particle size. If the first photoresist resolution does not meet the predetermined resolution threshold, no record is made to ensure that the selected dye particle size value matches the operating requirements of the fine process.
Then, traversing the candidate particle size list to obtain a first dye particle size, judging whether a first development level corresponding to the first dye particle size is larger than or equal to a preset development level threshold value, and when the first development level is larger than or equal to the preset development level threshold value, namely the particle size meeting the preset development level threshold value, marking the first dye particle size as a target particle size. Next, measurement and inspection tests were performed on the dye particles of the confirmed target particle diameter. And placing standardized dye particles with single particle size being the target particle size on the scraper, starting the scraper to carry out conveying operation, measuring the real-time dynamic roughness of the scraper in the process of scraping the dye particles with the target particle size, obtaining a corresponding relation curve between the real-time roughness of the scraper and the target particle size of the dye, analyzing the characteristic distribution range of the corresponding relation curve, selecting the characteristic roughness interval range, and determining the median value of the interval as a preset roughness threshold value.
Through double screening of resolution and development level, the dye particle size corresponding to the determined preset roughness threshold is not only adapted to the required process resolution, but also matched with the development effect index, so that the process stability and the product quality of the color paste preparation are improved.
Further, the embodiment of the application further comprises:
Acquiring a first photoetching development record which is stored in the first transaction information, wherein the first photoetching development record is a data record of photoetching development by using color paste prepared by dye with the first dye particle size;
obtaining a first photoresist layer thickness difference according to the first photoresist layer thickness before development and the first photoresist layer thickness after development in the first photoetching development record;
and matching the first development grade corresponding to the first photoresist layer thickness difference, wherein the first development grade is used for representing the development capability of the photoresist.
In a preferred embodiment, the color paste preparation database stores all trial-production and preparation information of the first color paste, and after the first color paste is prepared by using the dye with the first dye particle size, the first color paste is subjected to photoetching experiments to complete the processes of exposure, development and the like. In the process, the data such as exposure time, development time and the like are detected, collected and stored to form a first photoetching development record, and the first photoetching development record is stored in first transaction information of the first color paste. The first photoetching development record is data obtained after the first color paste actually participates in the photoetching process, and can effectively reflect the actual application effect of the color paste in the photoetching process. The obtained first photoetching development record comprises a first photoresist layer thickness before photoetching development and a first photoresist layer thickness after developing. Wherein the thickness of the photoresist layer before the first development represents the thickness of the photoresist layer before the development; the first post-development photoresist layer thickness represents the residual photoresist layer thickness after development.
And then, extracting the thickness of the photoresist layer before the first development and the thickness of the photoresist layer after the first development in the first photoetching development record, and obtaining a difference between the thickness of the photoresist layer before the first development and the thickness of the photoresist layer after the first development, so as to obtain a difference between the thickness of the photoresist layer. Then, a standard model of the photoresist layer thickness difference corresponding to the development level is called, the model divides the layer thickness difference into 1-5 levels, and the development level is higher as the thickness difference is larger. And determining a corresponding development level through the calculated first photoresist thickness difference matching standard model to obtain a first development level. And then, the obtained first development level is associated and bound with the first dye particle size and the first photoresist resolution, and is added into the first transaction information.
Further, the embodiment of the application further comprises:
the predetermined preparation process characteristics comprise stirring speed and preparation temperature;
Randomly acquiring a first stirring speed in a preset stirring speed threshold value, and randomly acquiring a first preparation temperature in a preset preparation temperature threshold value, wherein the preset stirring speed threshold value and the preset preparation temperature threshold value form an optimizing space;
Taking a first preparation scheme formed based on the first stirring speed and the first preparation temperature as an initial optimization term;
Taking the concentration uniformity index of the color paste finished product as an optimizing evaluation index;
And carrying out global optimization on the initial optimization item in the optimizing space based on the optimizing evaluation index to obtain the preset preparation scheme.
In a preferred embodiment, in the color paste preparation process, the stirring speed and the preparation temperature are key process parameters affecting the uniformity of the color paste, and the two parameters are set as the preset preparation process characteristics. Wherein, the stirring speed influences the mixing uniformity degree of the solvent and the dye particles; the preparation temperature influences the reaction speed of the solvent and the dye. Then, according to the process requirements and equipment conditions, determining a stirring speed interval as a preset stirring speed threshold value, and simultaneously determining a preparation temperature interval as a preset preparation temperature threshold value; the two variable intervals of the preset stirring speed threshold value and the preset preparation temperature threshold value form an optimizing space for global optimization searching. Then, randomly extracting data from the preset stirring speed threshold value and the preset preparation temperature threshold value to obtain a first stirring speed and a first preparation temperature. And then, adding the randomly obtained first stirring speed and first preparation temperature into a preparation process of the color paste to form a set of preparation process flow, wherein the set of preparation process flow is set as a first preparation method, and the first preparation method is used as an initial optimization term to provide a starting point for global optimization search for subsequent optimization iteration and promotion.
And then setting a concentration uniformity index as an optimizing evaluation index to evaluate the merits of the color paste preparation scheme in the iterative process. Aiming at the color paste preparation scheme in the iteration process, preparing a test color paste, detecting the component concentration at n positions in the test color paste, and calculating the variance of the n concentration values to be used as a color paste finished product concentration uniformity index, wherein the smaller the value is, the better the color paste preparation scheme in the iteration process is. Then, on the premise that the color paste concentration uniformity index is determined to be used as an optimizing evaluation index, taking the determined optimizing space as an initial optimizing item, gradually and iteratively searching based on a genetic algorithm to generate a new preparation scheme, measuring and calculating the corresponding color paste finished product concentration uniformity index, and storing the preparation scheme with the minimum index of each generation as a parent population to generate a next generation population. And finally searching out a preparation scheme with the minimum concentration uniformity index of the color paste finished product after multiple rounds of iterative computation, namely the preparation scheme.
Further, the embodiment of the application further comprises:
performing concentration distribution detection on the first color paste finished product obtained under the first preparation scheme to obtain a first concentration uniformity index;
sequentially extracting a first neighborhood stirring speed in a first speed neighborhood of the first stirring speed and a first neighborhood preparation temperature in a first temperature neighborhood of the first preparation temperature in the optimizing space;
Obtaining a first neighborhood preparation scheme based on the first neighborhood stirring speed and the first neighborhood preparation temperature;
Performing concentration distribution detection on the first neighborhood color paste finished product obtained under the first neighborhood preparation scheme to obtain a first neighborhood concentration uniformity index;
The predetermined preparation scheme is obtained by comparing the first concentration uniformity index with the first neighborhood concentration uniformity index.
In a preferred embodiment, first, a color paste is prepared according to a first preparation scheme to obtain a first color paste finished product, a plurality of sampling points are set in the obtained first color paste finished product, component concentration detection is performed point by point to obtain a plurality of concentration values, and a concentration value variance is calculated to obtain a first concentration uniformity index. Then, in the established optimizing space, extracting a first neighborhood stirring speed in a first speed neighborhood of the first stirring speed, and extracting a first neighborhood preparation temperature in a first temperature neighborhood of the first preparation temperature. Wherein the first speed neighborhood is a numerical surrounding area of the first stirring speed; the first temperature neighborhood is a surrounding area of the first preparation temperature. For example, the first stirring speed is 500 rpm, the first stirring speed is divided into a first speed neighborhood at + -50 rpm, and one value is randomly selected in the first speed neighborhood, for example, 525 rpm is divided into the first neighborhood stirring speed; and similarly, extracting the first neighborhood preparation temperature.
And then, carrying the extracted first neighborhood stirring speed and the first neighborhood preparation temperature into a color paste preparation process to form a new preparation process, so as to obtain a first neighborhood preparation scheme. And then, performing corresponding color paste trial production according to the determined first neighborhood preparation scheme, detecting the multipoint concentration value of the obtained first neighborhood color paste finished product, and calculating the concentration value variance to obtain a first neighborhood concentration uniformity index. Then, loading the obtained first concentration uniformity index and the obtained first neighborhood concentration uniformity index, comparing the magnitude relation of the first concentration uniformity index and the obtained first neighborhood concentration uniformity index, and taking a first neighborhood preparation scheme corresponding to the first neighborhood concentration uniformity index as a preset preparation scheme if the first concentration uniformity index is larger than the first neighborhood concentration uniformity index; and if the first concentration uniformity index is smaller than or equal to the first neighborhood concentration uniformity index, taking the first preparation scheme corresponding to the first concentration uniformity index as a preset preparation scheme. Repeating the iterative comparison judging process, and reserving preset preparation process characteristic parameters with smaller color paste uniformity indexes corresponding to the preparation scheme each time until the termination condition is met to obtain globally optimal preset preparation process characteristic parameters so as to form the preset preparation scheme.
In summary, the online detection method for uniformity of the color paste for photoresist provided by the embodiment of the application has the following technical effects:
The dynamic roughness detection is carried out on the scraper for conveying the dye particles through the roughness measuring instrument, so that the real-time scraper roughness is obtained, the particle size and uniformity degree of the dye particles are reflected, and a basis is provided for judging the uniformity of the color paste. If the real-time scraper roughness accords with the preset roughness threshold, a preset preparation scheme is called, wherein the preset preparation scheme is a scheme composed of preset preparation process characteristic parameters of preset preparation process characteristics, and support is provided for preparing the color paste finished product. And stirring and mixing the solvent and the dye particles conveyed by the scraping plate based on a preset preparation scheme to obtain a color paste finished product, and providing a finished product support for obtaining the uniformity index. Detecting preset evaluation characteristics of the color paste finished product to obtain color paste finished product characteristic parameters, weighting the color paste finished product characteristic parameters to obtain color paste uniformity indexes, wherein the color paste uniformity indexes are used for representing uniformity performance of the color paste finished product, and realizing on-line quality evaluation of the uniformity of the color paste finished product.
Example two
Based on the same inventive concept as the method for detecting the uniformity of the color paste for photoresist in the foregoing embodiment, as shown in fig. 3, an embodiment of the present application provides a system for detecting the uniformity of the color paste for photoresist, which includes:
The roughness detection module 11 is used for detecting dynamic roughness of the scraper for conveying the dye particles through a roughness measuring instrument to obtain real-time scraper roughness;
A preparation scheme calling module 12, configured to call a predetermined preparation scheme if the real-time blade roughness meets a predetermined roughness threshold, where the predetermined preparation scheme is a scheme composed of predetermined preparation process feature parameters of predetermined preparation process features;
The color paste finished product obtaining module 13 is used for stirring and mixing a solvent and the dye particles conveyed by the scraping plate based on the preset preparation scheme to obtain a color paste finished product;
the finished product feature detection module 14 is used for detecting preset evaluation features of the color paste finished product to obtain color paste finished product feature parameters;
The uniformity index obtaining module 15 is configured to weight the characteristic parameters of the color paste finished product to obtain a color paste uniformity index, where the color paste uniformity index is used to characterize uniformity performance of the color paste finished product.
Further, the embodiment of the application further comprises an index checking module, which comprises the following execution steps:
transmitting first laser to the color paste finished product through a laser transmitter;
Receiving first scattered light of the color paste finished product to the first laser through a laser receiver;
Performing intensity detection on the first scattered light to obtain scattered light intensity information, wherein the scattered light intensity information comprises first scattered light intensity at a first position and second scattered light intensity at a second position;
obtaining color paste uniformity level according to the light intensity comparison information of the first scattered light intensity and the second scattered light intensity;
and verifying the color paste uniformity index based on the color paste uniformity level.
Further, the preparation scheme retrieving module 12 includes the following steps:
calling first transaction information of first color paste preparation in a color paste preparation database, wherein the first transaction information comprises first dye particle size, first photoresist resolution and first development level;
if the first photoresist resolution meets a predetermined resolution threshold, adding the first dye particle size to a candidate particle size list;
Screening particle sizes meeting a preset development level threshold value from the candidate particle size list, and marking the particle sizes as target particle sizes;
and determining the preset roughness threshold according to the detected scratch roughness of the dye particles with the target particle size on the scratch board.
Further, the preparation scheme retrieving module 12 further comprises the following steps:
Acquiring a first photoetching development record which is stored in the first transaction information, wherein the first photoetching development record is a data record of photoetching development by using color paste prepared by dye with the first dye particle size;
obtaining a first photoresist layer thickness difference according to the first photoresist layer thickness before development and the first photoresist layer thickness after development in the first photoetching development record;
and matching the first development grade corresponding to the first photoresist layer thickness difference, wherein the first development grade is used for representing the development capability of the photoresist.
Further, the preparation scheme retrieving module 12 further comprises the following steps:
the predetermined preparation process characteristics comprise stirring speed and preparation temperature;
Randomly acquiring a first stirring speed in a preset stirring speed threshold value, and randomly acquiring a first preparation temperature in a preset preparation temperature threshold value, wherein the preset stirring speed threshold value and the preset preparation temperature threshold value form an optimizing space;
Taking a first preparation scheme formed based on the first stirring speed and the first preparation temperature as an initial optimization term;
Taking the concentration uniformity index of the color paste finished product as an optimizing evaluation index;
And carrying out global optimization on the initial optimization item in the optimizing space based on the optimizing evaluation index to obtain the preset preparation scheme.
Further, the preparation scheme retrieving module 12 further comprises the following steps:
performing concentration distribution detection on the first color paste finished product obtained under the first preparation scheme to obtain a first concentration uniformity index;
sequentially extracting a first neighborhood stirring speed in a first speed neighborhood of the first stirring speed and a first neighborhood preparation temperature in a first temperature neighborhood of the first preparation temperature in the optimizing space;
Obtaining a first neighborhood preparation scheme based on the first neighborhood stirring speed and the first neighborhood preparation temperature;
Performing concentration distribution detection on the first neighborhood color paste finished product obtained under the first neighborhood preparation scheme to obtain a first neighborhood concentration uniformity index;
The predetermined preparation scheme is obtained by comparing the first concentration uniformity index with the first neighborhood concentration uniformity index.
Further, the finished product feature detection module 14 includes the following:
The predetermined evaluation characteristics include color, clarity, viscosity, pH, and cleanliness.
Any of the steps of the methods described above may be stored as computer instructions or programs in a non-limiting computer memory and may be called by a non-limiting computer processor to identify any method for implementing an embodiment of the present application, without unnecessary limitations.
Further, the first or second element may not only represent a sequential relationship, but may also represent a particular concept, and/or may be selected individually or in whole among a plurality of elements. It will be apparent to those skilled in the art that various modifications and variations can be made to the present application without departing from the scope of the application. Thus, the present application is intended to include such modifications and alterations insofar as they come within the scope of the application or the equivalents thereof.
Claims (6)
1. The online detection method for the uniformity of the color paste for the photoresist is characterized by comprising the following steps of:
Detecting dynamic roughness of the scraper for conveying dye particles through a roughness measuring instrument to obtain real-time scraper roughness;
If the real-time scraper roughness accords with a preset roughness threshold, a preset preparation scheme is called, wherein the preset preparation scheme is a scheme composed of preset preparation process characteristic parameters of preset preparation process characteristics;
Stirring and mixing a solvent and the dye particles conveyed by the scraping plate based on the preset preparation scheme to obtain a color paste finished product;
Detecting preset evaluation characteristics of the color paste finished product to obtain color paste finished product characteristic parameters;
weighting the characteristic parameters of the color paste finished product to obtain a color paste uniformity index, wherein the color paste uniformity index is used for representing the uniformity performance of the color paste finished product;
if the real-time scraper roughness accords with a preset roughness threshold, a preset preparation scheme is called, and the method comprises the following steps:
calling first transaction information of first color paste preparation in a color paste preparation database, wherein the first transaction information comprises first dye particle size, first photoresist resolution and first development level;
if the first photoresist resolution meets a predetermined resolution threshold, adding the first dye particle size to a candidate particle size list;
Screening particle diameters satisfying a predetermined development level threshold value in the candidate particle diameter list, denoted as target particle diameters, comprising: traversing the candidate particle size list to obtain a first dye particle size, judging whether a first development level corresponding to the first dye particle size is greater than or equal to a preset development level threshold, and when the first development level is greater than or equal to the preset development level threshold, namely the particle size meeting the preset development level threshold, marking the first dye particle size as a target particle size;
determining the preset roughness threshold according to the detected scratch board roughness of the dye particles with the target particle size on the scratch board;
Calling first transaction information of first color paste preparation in a color paste preparation database, wherein the first transaction information comprises first dye particle size, first photoresist resolution and first development level, and the method comprises the following steps of:
Acquiring a first photoetching development record which is stored in the first transaction information, wherein the first photoetching development record is a data record of photoetching development by using color paste prepared by dye with the first dye particle size;
obtaining a first photoresist layer thickness difference according to the first photoresist layer thickness before development and the first photoresist layer thickness after development in the first photoetching development record;
and matching the first development grade corresponding to the first photoresist layer thickness difference, wherein the first development grade is used for representing the development capability of the photoresist.
2. The method according to claim 1, wherein the method further comprises:
transmitting first laser to the color paste finished product through a laser transmitter;
Receiving first scattered light of the color paste finished product to the first laser through a laser receiver;
Performing intensity detection on the first scattered light to obtain scattered light intensity information, wherein the scattered light intensity information comprises first scattered light intensity at a first position and second scattered light intensity at a second position;
obtaining color paste uniformity level according to the light intensity comparison information of the first scattered light intensity and the second scattered light intensity;
and verifying the color paste uniformity index based on the color paste uniformity level.
3. The method of claim 1, wherein if the real-time squeegee roughness meets a predetermined roughness threshold, invoking a predetermined recipe, the predetermined recipe being a recipe consisting of predetermined recipe characteristic parameters of a predetermined recipe characteristic, comprising:
the predetermined preparation process characteristics comprise stirring speed and preparation temperature;
Randomly acquiring a first stirring speed in a preset stirring speed threshold value, and randomly acquiring a first preparation temperature in a preset preparation temperature threshold value, wherein the preset stirring speed threshold value and the preset preparation temperature threshold value form an optimizing space;
Taking a first preparation scheme formed based on the first stirring speed and the first preparation temperature as an initial optimization term;
Taking the concentration uniformity index of the color paste finished product as an optimizing evaluation index;
And carrying out global optimization on the initial optimization item in the optimizing space based on the optimizing evaluation index to obtain the preset preparation scheme.
4. A method according to claim 3, wherein globally optimizing the initial optimization term in the optimization space based on the optimization evaluation index, to obtain the predetermined preparation scheme, comprises:
performing concentration distribution detection on the first color paste finished product obtained under the first preparation scheme to obtain a first concentration uniformity index;
sequentially extracting a first neighborhood stirring speed in a first speed neighborhood of the first stirring speed and a first neighborhood preparation temperature in a first temperature neighborhood of the first preparation temperature in the optimizing space;
Obtaining a first neighborhood preparation scheme based on the first neighborhood stirring speed and the first neighborhood preparation temperature;
Performing concentration distribution detection on the first neighborhood color paste finished product obtained under the first neighborhood preparation scheme to obtain a first neighborhood concentration uniformity index;
The predetermined preparation scheme is obtained by comparing the first concentration uniformity index with the first neighborhood concentration uniformity index.
5. The method of claim 1, wherein the predetermined evaluation characteristics include color, clarity, viscosity, pH, and cleanliness.
6. An on-line detection system for uniformity of a color paste for photoresist, characterized in that it is used for implementing the on-line detection method for uniformity of a color paste for photoresist according to any one of claims 1 to 5, said system comprising:
the roughness detection module is used for carrying out dynamic roughness detection on the scraper for conveying the dye particles through the roughness measuring instrument to obtain real-time scraper roughness;
The preparation scheme calling module is used for calling a preset preparation scheme if the real-time scraping plate roughness accords with a preset roughness threshold value, wherein the preset preparation scheme is a scheme composed of preset preparation process characteristic parameters of preset preparation process characteristics;
The color paste finished product obtaining module is used for stirring and mixing a solvent and the dye particles conveyed by the scraping plate based on the preset preparation scheme to obtain a color paste finished product;
The finished product feature detection module is used for detecting preset evaluation features of the color paste finished product to obtain color paste finished product feature parameters;
The uniformity index obtaining module is used for weighting characteristic parameters of the color paste finished product to obtain a color paste uniformity index, and the color paste uniformity index is used for representing uniformity performance of the color paste finished product.
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| CN111982761A (en) * | 2020-08-26 | 2020-11-24 | 攀钢集团重庆钒钛科技有限公司 | Method for detecting dispersibility of titanium dioxide in water-based color paste |
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| CN113881245B (en) * | 2020-07-03 | 2023-11-17 | 山东凯瑞尔光电科技有限公司 | Modified yellow pigment for photoresist, preparation method and application thereof |
| CN112898809A (en) * | 2021-02-25 | 2021-06-04 | 天长市嘉丰美术用品有限公司 | Production method of water-soluble oil painting pigment and digital information management method thereof |
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| CN113252612A (en) * | 2021-05-24 | 2021-08-13 | 中国农业大学 | Slurry uniformity detection device and method |
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