CN117913019A

CN117913019A - Pick-up head

Info

Publication number: CN117913019A
Application number: CN202410309647.6A
Authority: CN
Inventors: 唐秋明; 钟荣; 韩涛
Original assignee: Shengjisheng Intelligent Equipment Jiangsu Co ltd
Current assignee: Shengjisheng Intelligent Equipment Jiangsu Co ltd
Priority date: 2024-03-19
Filing date: 2024-03-19
Publication date: 2024-04-19
Anticipated expiration: 2044-03-19

Abstract

The invention discloses a pick-up head, and belongs to the technical field of chip production. The pick-up head comprises an outer cylinder and a guide sleeve seat, wherein an accommodating cavity is arranged in the outer cylinder, and a square guide cavity is arranged in the guide sleeve seat; the square ball bushing assembly is arranged in the square guide cavity; one end of the suction nozzle shaft is penetrated into the accommodating cavity and the square guide cavity, the square section of the suction nozzle shaft is abutted with the balls of the square ball bushing assembly, and the other end of the suction nozzle shaft is used for installing a suction nozzle; one end of the rotary joint is communicated with the accommodating cavity of the outer cylinder, the other end of the rotary joint is used for connecting an air source, and a proportional valve is arranged on the rotary joint; the rotary driving unit is in transmission connection with the outer cylinder, the guide sleeve seat or the suction nozzle shaft. In the process of picking up and mounting chips, the invention keeps the constant pressure of the absorption part to the substrate or the chips in the full compression stroke, avoids the excessive pressure to crush the chips or deform the substrate, ensures the stable absorption force of the absorption part to the chips when picking and placing the chips, and improves the position precision and the rotation angle precision of picking and placing the mounted chips.

Description

Pick-up head

Technical Field

The invention relates to the technical field of chip production, in particular to a pick-up head.

Background

An electronic device pick-and-place apparatus for the semiconductor package testing industry has one or more pick-and-place arms for bonding/mounting electronic devices (e.g., semiconductor die or semiconductor chip) or one or more pick-and-place arms for testing sort electronic devices (e.g., semiconductor die or semiconductor chip). Typically the pick arm requires rotation and vertical movement during pick and place operations.

In the prior art, as in the bonding head and chip bonding apparatus of the reference 1-CN117340922a, when the thickness of the substrate or chip is too large, the retraction of the bellows or spring is used to avoid the suction member from crushing the substrate or chip.

However, the bellows or spring is limited by the elastic coefficient of the elastic element itself, and the pressure is equal to the elastic coefficient multiplied by the compression. As the compression amount increases, the pressure increases, resulting in the inability of the adsorbent to achieve a constant pressure against the substrate or chip in the full compression stroke; and the adsorption piece adopts hold-in range, synchronizing wheel and drive arrangement's mode to realize the regulation of chip angle, owing to use the belt for a long time to have the tensioning force not enough for chip rotation angle's error is bigger, and stability is poor, leads to chip broken angle, bottom dark crack easily, influences the quality of product.

For this reason, it is desirable to provide a pickup head to solve the above-described problems.

Disclosure of Invention

The invention aims to provide a pick-up head, which can keep constant pressure of an absorption part to a substrate or a chip in a full compression stroke in the process of picking up and mounting the chip, avoid excessive pressure to crush the chip or deform the substrate, ensure stable absorption force of the absorption part to the chip when the chip is picked up and mounted, and improve the position precision and the rotation angle precision of the chip which is picked up and mounted.

In order to achieve the above object, the following technical scheme is provided:

a pick-up head comprising:

The device comprises an outer barrel and a guide sleeve seat which are coaxially arranged, wherein an accommodating cavity is arranged in the outer barrel, a square guide cavity is arranged in the guide sleeve seat, and the accommodating cavity is communicated with the square guide cavity;

the square ball bushing assembly is arranged in the square guide cavity;

The square section of the suction nozzle shaft is abutted with the balls of the square ball bushing assembly, and the other end of the suction nozzle shaft is used for installing a suction nozzle;

one end of the rotary joint is communicated with the accommodating cavity of the outer cylinder, the other end of the rotary joint is used for connecting an air source, and a proportional valve is arranged on the rotary joint;

And the rotary driving unit is in transmission connection with the outer cylinder, the guide sleeve seat or the suction nozzle shaft.

As an alternative scheme of the pickup head, the rotary driving unit comprises a rotary driving motor, and a rotor of the rotary driving motor is sleeved on the outer wall surface of the outer cylinder and is used for driving the outer cylinder to rotate.

As the alternative scheme of pick-up head, still include negative pressure suction unit, negative pressure suction unit includes annular vacuum seat, first air pipe joint and second air pipe joint, annular vacuum seat cover is located the uide bushing seat and with the stator fixed connection of rotation driving unit, the inner wall circumference of annular vacuum seat is equipped with the gas trough of walking, first air pipe joint inserts and locates on the annular vacuum seat and with the gas trough of walking communicates, the uide bushing seat radially is equipped with the through-hole along oneself, the second air pipe joint inserts and locates in the uide bushing seat and with the through-hole communicates, the through-hole with the gas trough of walking communicates all the time and is used for extracting the air in the suction nozzle.

As an alternative scheme of the pick-up head, at least two sealing grooves are arranged on the inner wall of the annular vacuum seat at intervals, the air flowing groove is positioned between two adjacent sealing grooves, and the sealing ring is embedded between the sealing grooves and the outer wall of the guide sleeve seat.

As an alternative scheme of the pick-up head, the negative pressure air suction unit further comprises a third air pipe connector, one end of the third air pipe connector is arranged on the suction nozzle shaft and is communicated with the interior of the hollow section of the suction nozzle shaft, and the other end of the third air pipe connector is communicated with the second air pipe connector through a connecting pipe.

As an alternative of the pickup head, the suction nozzle further comprises an adapter, wherein a threaded hole is formed in the hollow section of the suction nozzle shaft, one end of the adapter is connected with the suction nozzle, and the other end of the adapter is connected with the threaded hole.

As the alternative scheme of picking up the head, still include the fixing base, the first plate portion of fixing base is equipped with dodges opening and connecting hole, a plurality of connecting hole circumference interval set up in dodge the open-ended periphery, rotary drive motor's stator wears to locate dodge the opening, first fastener passes annular vacuum seat's first flange with rotary drive motor's second flange with the connecting hole is connected.

As an alternative scheme of the pick-up head, the guide sleeve seat is provided with a first assembly hole, the flange part of the outer cylinder is provided with a second assembly hole, the rotor of the rotary driving motor is provided with a third assembly hole, and a second fastener penetrates through the first assembly hole and the second assembly hole to be connected with the third assembly hole.

As an alternative scheme of the pick-up head, a first limiting surface is arranged on the inner wall surface of the accommodating cavity, and the top end of the suction nozzle shaft is stopped on the first limiting surface.

As an alternative scheme of the pick-up head, the inner wall surface of the accommodating cavity is provided with a second limiting surface, the periphery of the outer wall of the suction nozzle shaft is provided with a limiting protrusion, and the limiting protrusion is stopped in the second limiting surface and the guide sleeve seat in a reciprocating manner.

Compared with the prior art, the invention has the beneficial effects that:

According to the pick-up head provided by the invention, one end of the suction nozzle shaft is penetrated into the outer cylinder and the guide sleeve seat which are coaxially arranged, and the rotary driving unit is directly connected with the outer cylinder, the guide sleeve seat or the suction nozzle shaft in a transmission way, so that a belt transmission mechanism is replaced, and the rotation precision of a chip is improved. The square ball bushing assembly is arranged in the square guide cavity of the guide sleeve seat, the suction nozzle shaft is in point contact with the balls in the square ball bushing assembly, the friction force of z-direction movement of the suction nozzle shaft is reduced, and the square ball bushing assembly can also inhibit the suction nozzle shaft from rotating relative to the guide sleeve seat. One end of the rotary joint with the proportional valve is communicated with the accommodating cavity of the outer barrel, the air source is communicated with the other end of the rotary joint, constant compressed air is input into the accommodating cavity of the outer barrel, constant pressure of the absorbing part to the substrate or the chip in the full compression stroke is further kept, the chip is prevented from being crushed or deformed due to excessive pressure, stable absorption force of the absorbing part to the chip when the chip is taken and placed is ensured, and the position precision and the rotation angle precision of the chip are improved. Because the air film is adopted between the suction nozzle shaft and the accommodating cavity to replace the sealing ring to realize sealing, the friction force between the sealing ring and the shell is avoided, and further, the sealing ring is not required to be lubricated by additionally adding a lubricant, so that the suction nozzle shaft does not need to deliberately provide a lubrication mechanism, and the concern of polluting a chip is avoided.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following description will briefly explain the drawings needed in the description of the embodiments of the present invention, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to the contents of the embodiments of the present invention and these drawings without inventive effort for those skilled in the art.

FIG. 1 is an assembled schematic view of a pickup head according to a first view angle of an embodiment of the present invention (a proportional valve is not shown);

FIG. 2 is an assembled view of a pick-up head at a second view angle in accordance with an embodiment of the present invention;

FIG. 3 is an exploded view of a pick-up head according to an embodiment of the present invention;

FIG. 4 is a side view of a pick-up head in an embodiment of the invention;

FIG. 5 is a cross-sectional view taken along the direction A-A in FIG. 4;

FIG. 6 is a cross-sectional view taken along the direction B-B in FIG. 4;

fig. 7 is a cross-sectional view taken along the direction C-C in fig. 4.

Reference numerals:

1. An outer cylinder; 2. a guide sleeve seat; 3. square ball bushing assembly; 4. a suction nozzle shaft; 5. a swivel joint; 6. a rotary drive motor; 7. an annular vacuum seat; 8. a first air pipe joint; 9. a second tracheal joint; 10. a seal ring; 11. a third tracheal joint; 12. an adapter; 13. a fixing seat; 14. a suction nozzle;

101. a receiving cavity; 102. a second fitting hole; 103. a first limiting surface; 104. the second limiting surface;

201. a guide cavity; 202. a through hole; 203. a first fitting hole; 204. an avoidance groove;

401. a limit protrusion;

601. A rotor; 602. a stator; 603. a third fitting hole; 604. a second connection flange;

701. a first connection flange; 702. an air-passing groove; 703. sealing grooves;

1301. an avoidance opening; 1302. and a connection hole.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. The components of the embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.

In the description of the present invention, it should be noted that, directions or positional relationships indicated by terms such as "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., are directions or positional relationships based on those shown in the drawings, or are directions or positional relationships conventionally put in use of the inventive product, are merely for convenience of describing the present invention and simplifying the description, and are not indicative or implying that the apparatus or element to be referred to must have a specific direction, be configured and operated in a specific direction, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used merely to distinguish between descriptions and should not be construed as indicating or implying relative importance. In the description of the present invention, unless otherwise indicated, the meaning of "a plurality" is two or more.

In the description of the present invention, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed", "connected" and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected or integrally connected; either mechanically or electrically. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.

Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the invention.

In order to maintain a constant pressure of the suction member to the substrate or the chip in the full compression stroke, avoid excessive pressure to crush the chip or deform the substrate, ensure a stable suction force of the suction member to the substrate or the chip, and improve the accuracy of the rotation angle of the substrate or the chip, the present embodiment provides a pickup head, and details of the present embodiment are described in detail below with reference to fig. 1 to 7.

As shown in fig. 1 to 5, the pickup head includes an outer cylinder 1 and a guide bush housing 2 which are coaxially provided, a square ball bushing assembly 3, a suction nozzle shaft 4, a swivel joint 5, and a rotation driving unit.

Wherein, the outer cylinder 1 is provided with a containing cavity 101, the guide sleeve seat 2 is provided with a square guide cavity 201, and the containing cavity 101 is communicated with the square guide cavity 201. The square ball bushing assembly 3 is disposed in the square guiding cavity 201, wherein the balls in the square ball bushing assembly 3 are in point contact with the outer wall surface of the nozzle shaft 4 and the inner wall surface of the square guiding cavity 201.

One end of the suction nozzle shaft 4 is arranged in the accommodating cavity 101 and the square guide cavity 201 in a penetrating way, the square section of the suction nozzle shaft 4 is abutted with the balls of the square ball bushing assembly 3, and the other end of the suction nozzle shaft 4 is used for installing the suction nozzle 14. One end of the rotary joint 5 is communicated with the accommodating cavity 101 of the outer cylinder 1, the other end of the rotary joint 5 is used for being connected with an air source, and a proportional valve is arranged on the rotary joint 5. The rotary driving unit is in transmission connection with the outer cylinder 1, the guide sleeve seat 2 or the suction nozzle shaft 4.

In short, according to the pickup head provided by the invention, one end of the suction nozzle shaft 4 is penetrated into the outer cylinder 1 and the guide sleeve seat 2 which are coaxially arranged, and the rotary driving unit is directly connected with the outer cylinder 1, the guide sleeve seat 2 or the suction nozzle shaft 4 in a transmission way, so that a belt transmission mechanism is replaced, and the rotary precision of a chip is improved. The square guide cavity 201 of the guide sleeve seat 2 is internally provided with the square ball bushing assembly 3, the suction nozzle shaft 4 is in point contact with balls in the square ball bushing assembly 3, the friction force of the suction nozzle shaft 4 moving in the z direction is reduced, and the square ball bushing assembly 3 can also inhibit the suction nozzle shaft 4 from rotating relative to the guide sleeve seat 2. One end of a rotary joint 5 with a proportional valve is communicated with a containing cavity 101 of the outer barrel 1, an air source is communicated with the other end of the rotary joint 5, constant compressed air is input into the containing cavity 101 of the outer barrel 1, constant pressure of an absorbing part to a substrate or a chip in a full compression stroke is further kept, the chip is prevented from being crushed or deformed due to overlarge pressure, stable absorbing force of the absorbing part to the chip when the chip is taken and placed is ensured, and the position precision and the rotation angle precision of the chip taking and placing and attaching device are improved. Because the sealing is realized by adopting the air film to replace the sealing ring between the suction nozzle shaft 4 and the accommodating cavity 101, the friction force between the sealing ring and the shell is avoided, and further, the sealing ring is not required to be lubricated by adding a lubricant, so that the suction nozzle shaft 4 does not need to deliberately provide a lubrication mechanism, and the concern of polluting a chip is avoided.

In this embodiment, the rotary joint 5, the outer cylinder 1 and the suction nozzle shaft 4 enclose together to form a sealed cavity, compressed air is introduced into the cavity through the rotary joint 5, and the pressure of the compressed air is adjusted according to different pick-up and mounting forces of different chips. The pressure of the compressed air is regulated by a regulating element (a proportional valve) to regulate the force (also called load) applied to the surface of the chip in the process of taking and placing. The traditional elastic element (spring or bellows) provides load, is limited by the elastic coefficient of the elastic element, the pressure is equal to the elastic coefficient multiplied by the compression amount, the pressure can be increased along with the increase of the compression amount, the full compression line Cheng Hengding pressure can not be achieved, and in addition, the pressure is difficult to achieve to be less than 0.05N (5 g force).

Specifically, square ball bush subassembly 3, uide bushing seat 2 and suction nozzle axle 4 constitute Z to rectilinear motion buffer gear, and the square guide cavity 201 surface of uide bushing seat 2 inside and the guide surface of the square section of suction nozzle axle 4 all adopt mirror finish, and the ball in square ball bush subassembly 3 becomes the point contact with between uide bushing seat 2 and suction nozzle axle 4, and square arranged ball makes the Z to vertical motion of suction nozzle axle 4 steady smooth and easy, has restricted the rotation of suction nozzle axle 4 simultaneously. The ball is in point contact with the transmission surface (mirror finish), and meanwhile, the resistance in linear motion is minimized in a rolling friction mode. The pre-pressing amount between the ball and the transmission surface is usually adjusted to be 2-3 microns, so that the rigidity and the straightness can be improved while the low friction force is ensured, the occurrence of impact, vibration and shaking is reduced, and the stable running and stable precision of the assembly are ensured.

As shown in fig. 6 and 7, the square ball bushing assembly 3 is installed in the guide cavity 201 of the guide sleeve seat 2, and avoidance grooves 204 are formed in four corners of the guide cavity 201, so that structural interference between the square bushing of the square ball bushing assembly 3 and four corners of the guide cavity 201 is avoided by adopting the four avoidance grooves 204, and the installation of the square ball bushing assembly 3 is facilitated.

Further, in the present embodiment, the rotation driving unit includes a rotation driving motor 6, and a rotor 601 of the rotation driving motor 6 is sleeved on an outer wall surface of the outer cylinder 1, for driving the outer cylinder 1 to rotate. The outer cylinder 1 is directly driven by the rotary driving motor 6, and the rotary driving motor 6 in the embodiment replaces a belt transmission mode, so that the control precision is higher and the use of parts is less. The rotary drive motor 6 may be a servo motor, for example. With the rotor 601 of the rotary drive motor 6, a high-speed rotary motion is performed. The guide sleeve seat 2 drives the suction nozzle shaft 4 to do rotary motion through square balls, and then the angle of the chip is adjusted according to the requirement.

Alternatively, in other embodiments, ball splines may be used instead of square ball bushing assemblies 3.

Further, the pick-up head further comprises a negative pressure air suction unit, the negative pressure air suction unit comprises an annular vacuum seat 7, a first air pipe joint 8 and a second air pipe joint 9, the annular vacuum seat 7 is sleeved on the guide sleeve seat 2 and fixedly connected with a stator 602 of the rotary driving motor 6, an air passing groove 702 is circumferentially formed in the inner wall of the annular vacuum seat 7, the first air pipe joint 8 is inserted on the annular vacuum seat 7 and communicated with the air passing groove 702, a through hole 202 is radially formed in the guide sleeve seat 2 along the self-body, the second air pipe joint 9 is inserted in the guide sleeve seat 2 and communicated with the through hole 202, and the through hole 202 is always communicated with the air passing groove 702 and used for extracting air in the suction nozzle 14. When the guide sleeve seat 2 rotates along with the suction nozzle shaft 4, the air passing groove 702 is circumferentially arranged on the inner wall of the annular vacuum seat 7, so that the through hole 202 on the guide sleeve seat 2 is always communicated with the air passing groove 702, and air is smoothly sucked out from the first air pipe joint 8 through the second air pipe joint 9, the through hole 202 and the air passing groove 702.

Preferably, as shown in fig. 5, at least two sealing grooves 703 are arranged on the inner wall of the annular vacuum seat 7 at intervals, the air-passing groove 702 is positioned between two adjacent sealing grooves 703, and the sealing ring 10 is embedded between the sealing grooves 703 and the outer wall of the guide sleeve seat 2. By arranging the sealing rings 10 above and below the air passing groove 702, the air tightness in the annular vacuum cavity where the air passing groove 702 is positioned is ensured, the air leakage is avoided, and the proper adsorption force of the suction nozzle 14 to the substrate or the chip is ensured.

Specifically, in this embodiment, the annular vacuum seat 7 is provided with two sealing grooves 703 and an air passing groove 702, and the vacuum cavity between the first air pipe joint 8 and the second air pipe joint 9 is realized by two sealing rings 10 on the guide sleeve seat 2. The sealing ring 10 is used for sealing the vacuum cavity, the air flowing groove 702 on the guide sleeve seat 2 is an annular vacuum cavity, the through holes 202 are respectively connected with the first air pipe joint 8 and the second air pipe joint 9, the first air pipe joint 8 is arranged on the vacuum rotating seat, when the angle of a chip is sucked and adjusted, the guide sleeve seat 2 rotates along with the rotation driving motor 6, the guide sleeve seat 2 rotates relative to the vacuum rotating seat, the position of the through holes 202 deflects relative to the first air pipe joint 8, vacuum is maintained through the annular vacuum cavity at the moment, and therefore the vacuum cannot be lost in the process of adjusting the angle of the chip.

Further, the negative pressure air suction unit further comprises a third air pipe joint 11, one end of the third air pipe joint 11 is arranged on the suction nozzle shaft 4 and is communicated with the interior of the hollow section of the suction nozzle shaft 4, and the other end of the third air pipe joint 11 is communicated with the second air pipe joint 9 through a connecting pipe. When in use, the suction nozzle 14 can be communicated with the inside of the hollow section of the suction nozzle shaft 4, so that the normal use of the suction nozzle 14 is ensured.

Still further, the pickup head further includes an adapter 12, the hollow section of the nozzle shaft 4 is provided with a screw hole, one end of the adapter 12 is connected to the nozzle 14, and the other end of the adapter 12 is connected to the screw hole. The adapter 12 and the suction nozzle 14 are adapted according to the type and the technological requirement of the chip, the suction nozzle 14 sucks the chip through vacuum, a flexible air pipe is connected between the second air pipe connector 9 and the second air pipe connector 9, the second air pipe connector 9 is arranged on the guide sleeve seat 2, and the second air pipe connector is communicated with the fourth air pipe connector through a through hole 202.

Further, as shown in fig. 3, the pickup head further includes a fixing seat 13, a first plate portion of the fixing seat 13 is provided with an avoidance opening 1301 and a connection hole 1302, a plurality of connection holes 1302 are circumferentially arranged at intervals on the periphery of the avoidance opening 1301, a stator 602 of the rotary driving motor 6 is arranged through the avoidance opening 1301, and a first fastener passes through a first connection flange 701 of the annular vacuum seat 7 and a second connection flange 604 of the rotary driving motor 6 to be connected with the connection hole 1302. The annular vacuum seat 7, the stator 602 of the rotary driving motor 6 and the fixed seat 13 keep a relatively static relationship, when the chip angle is adjusted, the outer cylinder 1 rotates along with the guide sleeve seat 2, one end of the rotary joint 5 is fixed on the outer cylinder 1, and the other end is fixed on the fixed seat 13. In practical use, the pick-up head is fixed on a moving mechanism of a mounting device such as a chip mounter or a die bonder through a fixing seat 13 to form a bonding head, and the chip is quickly bonded on a processed substrate after visual adjustment from a wafer. The pick-up head can also be fixed on a test handler through a fixing seat 13, packaged chips are placed from a Tray (such as a Tray) to a test position, and then the chips after the test are classified and placed in a corresponding blanking Tray.

Further, as shown in fig. 3, the guide housing holder 2 is provided with a first fitting hole 203, the flange portion of the outer cylinder 1 is provided with a second fitting hole 102, the rotor 601 of the rotary drive motor 6 is provided with a third fitting hole 603, and the second fastener passes through the first fitting hole 203 and the second fitting hole 102 to be connected with the third fitting hole 603. Wherein the first fastener and the second fastener may be, but are not limited to, bolts or fastening screws, etc.

Further, as shown in fig. 5, the inner wall surface of the accommodating chamber 101 is provided with a first stopper surface 103, and the tip of the nozzle shaft 4 is stopped at the first stopper surface 103. By adding the first limiting surface 103, the suction nozzle shaft 4 is prevented from falling out from the upper side of the accommodating cavity 101.

Further, as shown in fig. 5, the inner wall surface of the accommodating cavity 101 is provided with a second limiting surface 104, the outer wall of the suction nozzle shaft 4 is circumferentially provided with a limiting protrusion 401, and the limiting protrusion 401 is reciprocally stopped on the second limiting surface 104 and the guide sleeve seat 2. In actual use, the displacement of the suction nozzle shaft 4 in the Z direction is defined by designing the interval between the second limiting surface 104 and the guide sleeve holder 2.

Alternatively, the inner surface of the outer cylinder 1 is treated with a nano-coating layer having a film thickness of 10 μm, and the surface of the suction nozzle shaft 4 is treated with a nano-coating layer having a film thickness of 10 μm. The air film is adopted to replace the sealing ring, so that friction force between the sealing ring and the shell is avoided, and further, the sealing ring is lubricated without adding a lubricant additionally.

Note that the above is only a preferred embodiment of the present invention and the technical principle applied. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, while the invention has been described in connection with the above embodiments, the invention is not limited to the embodiments, but may be embodied in many other equivalent forms without departing from the spirit or scope of the invention, which is set forth in the following claims.

Claims

1. Pick-up head, characterized in that it comprises:

The device comprises an outer barrel (1) and a guide sleeve seat (2) which are coaxially arranged, wherein an accommodating cavity (101) is arranged in the outer barrel (1), a square guide cavity (201) is arranged in the guide sleeve seat (2), and the accommodating cavity (101) is communicated with the square guide cavity (201);

a square ball bushing assembly (3) arranged in the square guide cavity (201);

The suction nozzle shaft (4), one end of the suction nozzle shaft (4) is arranged in the accommodating cavity (101) and the square guide cavity (201) in a penetrating mode, the square section of the suction nozzle shaft (4) is abutted to the balls of the square ball bushing assembly (3), and the other end of the suction nozzle shaft (4) is used for installing a suction nozzle (14);

One end of the rotary joint (5) is communicated with the accommodating cavity (101) of the outer cylinder (1), the other end of the rotary joint is used for connecting an air source, and a proportional valve is arranged on the rotary joint (5);

the rotary driving unit is in transmission connection with the outer cylinder (1), the guide sleeve seat (2) or the suction nozzle shaft (4).

2. Pick-up head according to claim 1, characterized in that the rotary drive unit comprises a rotary drive motor (6), a rotor (601) of the rotary drive motor (6) being sleeved on the outer wall surface of the outer cylinder (1) for driving the outer cylinder (1) to rotate.

3. Pick-up head according to claim 2, further comprising a negative pressure suction unit comprising an annular vacuum seat (7), a first air pipe joint (8) and a second air pipe joint (9), wherein the annular vacuum seat (7) is sleeved in the guide sleeve seat (2) and fixedly connected with a stator (602) of the rotary driving motor (6), an air passing groove (702) is circumferentially arranged on the inner wall of the annular vacuum seat (7), the first air pipe joint (8) is inserted in the annular vacuum seat (7) and communicated with the air passing groove (702), a through hole (202) is formed in the guide sleeve seat (2) along the radial direction of the guide sleeve seat, the second air pipe joint (9) is inserted in the guide sleeve seat (2) and communicated with the through hole (202), and the through hole (202) and the air passing groove (702) are always communicated and used for extracting air in the suction nozzle (14).

4. A pick-up head according to claim 3, characterized in that the inner wall of the annular vacuum seat (7) is provided with at least two sealing grooves (703) at intervals, the air-passing groove (702) is positioned between two adjacent sealing grooves (703), and the sealing ring (10) is embedded between the sealing grooves (703) and the outer wall of the guide sleeve seat (2).

5. A pick-up head according to claim 3, characterized in that the negative pressure suction unit further comprises a third air tube connector (11), one end of the third air tube connector (11) is arranged on the suction nozzle shaft (4) and is communicated with the interior of the hollow section of the suction nozzle shaft (4), and the other end of the third air tube connector (11) is communicated with the second air tube connector (9) through a connecting tube.

6. Pick-up head according to claim 5, further comprising an adapter (12), the hollow section of the nozzle shaft (4) being provided with a threaded hole, one end of the adapter (12) being connected to the nozzle (14), the other end of the adapter (12) being connected to the threaded hole.

7. A pick-up head according to claim 3, further comprising a fixing seat (13), wherein a first plate portion of the fixing seat (13) is provided with an avoidance opening (1301) and a connection hole (1302), a plurality of connection holes (1302) are arranged at intervals on the periphery of the avoidance opening (1301), a stator (602) of the rotary driving motor (6) is arranged in the avoidance opening (1301) in a penetrating manner, and a first fastening piece penetrates through a first connection flange (701) of the annular vacuum seat (7) and a second connection flange (604) of the rotary driving motor (6) to be connected with the connection hole (1302).

8. Pick-up head according to any of claims 2-7, characterized in that the guiding sleeve holder (2) is provided with a first assembly hole (203), the flange part of the outer cylinder (1) is provided with a second assembly hole (102), the rotor (601) of the rotary drive motor (6) is provided with a third assembly hole (603), and a second fastening member passes through the first assembly hole (203) and the second assembly hole (102) to be connected with the third assembly hole (603).

9. Pick-up head according to any of claims 1-7, characterized in that the inner wall surface of the receiving cavity (101) is provided with a first limiting surface (103), the tip of the nozzle shaft (4) being stopped at the first limiting surface (103).

10. Pick-up head according to any of claims 1-7, characterized in that the inner wall surface of the receiving cavity (101) is provided with a second limiting surface (104), the outer wall circumference of the suction nozzle shaft (4) is provided with a limiting protrusion (401), and the limiting protrusion (401) is reciprocally stopped at the second limiting surface (104) and the guiding sleeve holder (2).