CN117904629A - Preparation method of high-temperature film sensor for aero-engine blade and sensor thereof - Google Patents
Preparation method of high-temperature film sensor for aero-engine blade and sensor thereof Download PDFInfo
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Abstract
The invention provides a preparation method of a high-temperature film sensor for an aero-engine blade, which comprises the following steps: s1, polishing an alloy substrate with the surface roughness of nanometer level; s2, depositing a NiCoCrAlY transition layer on the blade alloy substrate by adopting a magnetron sputtering method; s3, forming a thermally grown Al 2O3 diffusion layer on the NiCoCrAlY transition layer in an in-situ growth mode; s4, depositing an HfO 2 insulating layer on the thermally grown Al 2O3 diffusion layer, and realizing patterning by a mask sputtering method or a stripping method; the thin film sensor comprises a blade alloy substrate, a NiCoCrAlY transition layer, an Al 2O3 diffusion layer and an HfO 2 insulating layer, transition from the conductive alloy substrate to the thin film sensor is carried out through multi-layer thin film alternate deposition, holes and cracks in the front layer of thin film are sealed through the thin film deposited on the rear layer, the number of conductive paths in an insulating structure is reduced, and the problem of thermal stress mismatch in the multi-layer thin film structure can be effectively relieved through the Al 2O3 diffusion layer formed in situ, so that good insulation and binding force of the sensor on the conductive substrate at high temperature are realized.
Description
Technical Field
The invention relates to the technical field of aero-engine sensors, in particular to a preparation method of a high-temperature film sensor for an aero-engine blade and the sensor.
Background
The development of the modern aeronautical industry has driven the continual improvement and optimization of aero-engine designs. The research and development characteristics of the aeroengine are that the technical difficulty is high, the cost is high, the period is long, the decisive influence is exerted on the performance of the aircraft and the success and failure and progress of the development of the aircraft, the aeroengine is a core foundation of industrial development, and the aeroengine is an important mark for measuring the industrial level and capability of a country. Among them, the turbine blade of an aeroengine is used as a core key component of the engine, and works in the extreme environment of high temperature, high pressure and high airflow, so that the monitoring of the blade state parameters becomes particularly important. Monitoring of important parameters such as strain, temperature, heat flow, etc. requires a large number of sensors. The thin film sensor is considered as an ideal choice because of the advantages of direct preparation on the surface of a test part, quick response, small volume, negligible influence on the working environment and the like.
The Chinese patent with the publication number of CN104149416B discloses a metal-based high-temperature insulating layer and a preparation method thereof, wherein the metal-based high-temperature insulating layer comprises a six-layer structure, and an alloy substrate, a NiCrAlY alloy transition layer, an alpha-Al 2O3 layer, a crystalline YSZ layer, an amorphous YSZ layer and an Al 2O3 layer are sequentially arranged from bottom to top, wherein the alpha-Al 2O3 layer is obtained by adopting a thermal oxidation method, the crystalline YSZ layer and the amorphous YSZ layer are both obtained by adopting a sputtering method, and the Al 2O3 layer is prepared by adopting an electron beam evaporation method. The insulating layer can ensure good electrical insulation between the functional layer of the film sensor and the metal substrate at least at 800 ℃, and can meet the normal work of the film sensor in high temperature, high stress and other environments, but the preparation process is complex, and the heat resistance of the insulating layer needs to be improved.
At present, most of blades of an aeroengine are made of nickel-based superalloy materials, so that the normal operation of a sensor is guaranteed, the integration of the sensor and a blade structure is realized, good electrical insulation between the sensor and a blade substrate in a high-temperature extreme environment is guaranteed, and meanwhile, good binding force between the sensor and the substrate is guaranteed. Therefore, it is necessary to design a preparation method of a high-temperature film sensor of an aero-engine blade and a sensor thereof.
Disclosure of Invention
Aiming at the problems existing in the prior art, the invention provides a preparation method of a high-temperature film sensor of an aeroengine blade and a sensor thereof, transition from a conductive alloy substrate to the film sensor is carried out through alternate deposition of multiple layers of films, holes and cracks in the film of the previous layer are sealed through the film deposited on the next layer, and the number of conductive paths in an insulation structure is reduced, so that the overall insulation performance is improved. The Al 2O3 diffusion layer formed in situ can effectively relieve the problem of thermal stress mismatch in the multilayer film structure, so that the stability of the transition structure at high temperature is improved, the good insulation and binding force of the sensor on the conductive substrate at high temperature are realized, and the sensor has the characteristics of good insulation performance, wide application range, small thickness and small influence on a measured field.
The invention provides a preparation method of a high-temperature film sensor for an aero-engine blade, which comprises the following steps:
S1, polishing a blade alloy substrate by using an alumina polishing agent by adopting a mechanical polishing method to form a blade alloy substrate with nanoscale roughness, removing grease on the blade alloy substrate by adopting electrolytic degreasing, and fixedly mounting the blade alloy substrate on the surface of an aeroengine blade;
S2, depositing a NiCoCrAlY transition layer on the blade alloy substrate by adopting a magnetron sputtering method, wherein the transition layer comprises the following specific steps:
Placing a NiCoCrAlY alloy target in a vacuum chamber of a magnetic control device, starting a vacuum pump system to reduce the gas pressure in the vacuum chamber to within 10 -3～10-1 Pa sputtering pressure, sputtering and depositing NiCoCrAlY atoms in the vacuum chamber on a blade alloy substrate to form a NiCoCrAlY transition layer with the thickness of 20-30 micrometers;
S3, forming a thermally grown Al 2O3 diffusion layer on the NiCoCrAlY transition layer in an in-situ growth mode, carrying out high-temperature annealing treatment on the NiCoCrAlY transition layer under inert gas, wherein the annealing temperature is 600-1000 ℃, promoting the Al in the NiCoCrAlY transition layer to diffuse to the surface, and then reacting with oxygen in the air to form an Al 2O3 diffusion layer with the thickness of 1-1.5 mu m;
The CVD method is adopted to prepare the Al 2O3 diffusion layer, which comprises the following substeps:
S31, dissolving aluminum acetylacetonate into N-dimethylformamide to prepare formamide aluminum acetonate liquid with the concentration of 0.01mol.L -1;
s32, ultrasonically cleaning the blade alloy substrate with acetone and alcohol, and then air-drying for later use;
S33, performing a vapor deposition test on a CVD device, wherein the vapor deposition test comprises a solution output device, a high-pressure supply system, a heating and temperature control system and an exhaust gas discharge system, and the process parameters are as follows: the deposition temperature was 400 ℃, the input speed of the source solution to the CVD equipment was 50mLh-1, the concentration of the source solution was 0.03mol L -1, the distance between the nozzle and the blade alloy substrate was 55mm, and the voltage was 20CV;
S34, preserving heat of the film prepared by deposition at 800 ℃ for 2 hours, cooling along with a furnace, and testing the resistance of the prepared insulating layer to meet the requirement of insulating property;
S4, depositing an HfO 2 insulating layer on the thermally grown Al 2O3 diffusion layer, and realizing patterning by a mask sputtering method or a stripping method to obtain the high-temperature thin film sensor, wherein the method comprises the following substeps:
S41, cleaning a blade alloy substrate 1, fixing a mask plate on the surface of an aeroengine blade, and sputtering the shape of a film sensor;
S42, replacing the target material in the vacuum chamber of the magnetic control device with a Hf target material, and adjusting the magnetic control device;
S43, vacuum pumping is carried out again, a sputtering source is started, hfO 2 insulating layer with the thickness of 2.5-3 mu m is generated on the surface of the blade alloy substrate 1 through the reaction of Hf atoms and reaction gas, and the HfO 2 insulating layer is deposited on the Al 2O3 diffusion layer.
Preferably, in the step S2, the alloy proportions of Ni, co, cr and Al in the NiCoCrAlY transition layer are as follows: ni 45%, co 20%, cr 20% and Al 14%.
Preferably, the thicknesses of the NiCoCrAlY transition layer and the HfO 2 insulating layer are adjusted by controlling the sputtering power and time in the step S2 and the step S4.
Preferably, the sputtering power in the preparation of the NiCoCrAlY transition layer in the step S2 is 150W, the sputtering power in the preparation of the HfO 2 insulating layer in the step S4 is 200W, and the sputtering time is 2 hours.
In a second aspect of the present invention, there is also provided an aeroengine blade high temperature film sensor prepared according to the foregoing method, comprising a blade alloy substrate, a NiCoCrAlY transition layer deposited on the alloy substrate, an Al 2O3 diffusion layer formed on the NiCoCrAlY transition layer by annealing in an inert atmosphere and an air atmosphere, and an HfO 2 insulating layer deposited on the Al 2O3 diffusion layer.
Preferably, the blade alloy substrate is made of nickel-based alloy material, and has high temperature resistance of 1200 ℃.
Preferably, the test signal is led out by sintering or spraying the high-temperature conductive slurry and connecting the high-temperature conductive slurry with the wire leading-out wire.
Compared with the prior art, the invention has the following advantages:
1. according to the preparation method of the high-temperature film sensor for the aero-engine blade, the multilayer film is adopted as the transition layer structure, and the defects of cracks, holes and the like in the previous layer of film structure are closed by the later deposited ceramic film for insulation consideration, so that the conductive paths in the film structure are reduced, and the insulation performance is improved. And an Al 2O3 diffusion layer is formed on the surface of the NiCoCrAlY film in situ through twice annealing, so that the transition from the alloy substrate to the oxide film is realized, and the adhesiveness between the films is improved.
2. The high-temperature film sensor for the aeroengine blade adopts the film technology to realize the transition from an alloy substrate to an oxide insulating layer and the film sensor, improves the insulativity and the binding force of the sensor on a conductive substrate at high temperature, and has the characteristics of good insulativity, wide application range, small thickness, small influence on a measured field and the like.
Drawings
FIG. 1 is a schematic view of the overall structure of an aircraft engine blade high temperature film sensor of the present invention;
FIG. 2 is a flow chart of a method for manufacturing a high temperature film sensor for an aircraft engine blade according to the present invention;
FIG. 3 is a graph of the high temperature thermal output of the high temperature film sensor of the aircraft engine blade of the present invention;
FIG. 4 is an output diagram of the high temperature film sensor of the aircraft engine blade of the present invention during warm-up;
FIG. 5 is a graph of response time test results of a high temperature film sensor for an aircraft engine blade in accordance with the present invention;
FIG. 6 is a schematic diagram of real-time temperature test results of a high temperature film sensor for an aircraft engine blade according to the present invention;
The main reference numerals:
A blade alloy substrate 1, a NiCoCrAlY transition layer 2, an Al 2O3 diffusion layer 3 and an HfO 2 insulating layer 4.
Detailed Description
In order to make the technical content, the structural features, the achieved objects and the effects of the present invention more detailed, the following description will be taken in conjunction with the accompanying drawings.
As shown in figure 1, the high-temperature film sensor for the aeroengine blade comprises a blade alloy substrate 1, a NiCoCrAlY transition layer 2, an Al 2O3 diffusion layer 3 and an HfO 2 insulating layer 4, wherein the blade alloy substrate 1 is made of nickel-based alloy, the high temperature resistance reaches 1200 ℃ and is stable, the NiCoCrAlY transition layer 2 is deposited on the alloy substrate 1, an Al 2O3 diffusion layer 3 is formed on the NiCoCrAlY transition layer 2 through annealing in inert atmosphere and air atmosphere, the adhesiveness between an oxide film and the substrate is improved, the binding force is improved, holes and cracks exist in a sealing structure, the insulating performance is improved, the HfO 2 insulating layer 4 is deposited on the Al 2O3 diffusion layer 3, and the HfO 2 insulating layer 4 has the advantages of high melting point, good heat resistance, large dielectric constant, high breakdown electric field and the like. The high-temperature film sensor adopts high-temperature conductive paste sintering or high-temperature spraying to be connected with a metal wire outgoing line, so that reliable outgoing of test signals is realized.
As shown in fig. 2, the preparation method of the high-temperature film sensor for the aero-engine blade comprises the following steps:
s1, polishing a blade alloy substrate 1 by using an alumina polishing agent by adopting a mechanical polishing method to form a blade alloy substrate 1 with nanoscale roughness, removing grease on the blade alloy substrate 1 by adopting electrolytic degreasing, and fixedly mounting the blade alloy substrate 1 on the surface of an aeroengine blade;
S2, depositing a NiCoCrAlY transition layer 2 on the blade alloy substrate 1 by adopting a magnetron sputtering method, wherein the method specifically comprises the following steps:
Placing an alloy target material of NiCoCrAlY in a vacuum chamber of a magnetic control device, starting a vacuum pump system to reduce the gas pressure in the vacuum chamber to within 10 -3～10-1 Pa of sputtering pressure, sputtering and depositing NiCoCrAlY atoms in the vacuum chamber on a blade alloy substrate 1, wherein the sputtering power is 150W, forming a NiCoCrAlY transition layer with the thickness of 20-30 micrometers, wherein the proportion of each alloy in the NiCoCrAlY transition layer 2 is as follows: 45% Ni, 20% Co, 20% Cr, 14% Al, 0.2% other alloy,
S3, forming a thermally grown Al 2O3 diffusion layer on the NiCoCrAlY transition layer 2 in an in-situ growth mode, carrying out high-temperature annealing treatment on the NiCoCrAlY transition layer 2 under inert gas, wherein the annealing temperature is 600-1000 ℃, promoting Al in the NiCoCrAlY transition layer 2 to diffuse to the surface, and then reacting with oxygen in the air to form an Al 2O3 diffusion layer 3 with the thickness of 1-1.5 mu m;
the Al 2O3 diffusion layer 3 is prepared by CVD through a chemical vapor deposition method, and comprises the following substeps:
S31, dissolving aluminum acetylacetonate into N-dimethylformamide to prepare formamide aluminum acetonate liquid with the concentration of 0.01mol.L -1;
S32, ultrasonically cleaning the blade alloy substrate 1 with acetone and alcohol, and then air-drying for later use;
S33, performing a vapor deposition test on a CVD device, wherein the vapor deposition test comprises a solution output device, a high-pressure supply system, a heating and temperature control system and an exhaust gas discharge system, and the process parameters are as follows: the deposition temperature was 400 ℃, the input speed of the source solution to the CVD apparatus was 50mLh-1, the concentration of the source solution was 0.03mol L -1, the distance between the nozzle and the blade alloy substrate 1 was 55mm, and the voltage was 20CV;
S34, preserving heat of the film prepared by deposition at 800 ℃ for 2 hours, cooling along with a furnace, and testing the resistance of the prepared insulating layer to meet the requirement of insulating property;
S4, depositing an HfO 2 insulating layer on the thermally grown Al 2O3 diffusion layer, and realizing patterning by a mask sputtering method or a stripping method to obtain the high-temperature thin film sensor, wherein the method comprises the following substeps:
s41, cleaning a blade alloy substrate 1, fixing a mask plate on the surface of an aero-engine blade, and sputtering the shape of a film sensor;
S42, replacing the target material in the vacuum chamber of the magnetic control device with Hf, and adjusting the magnetic control device;
S43, vacuum pumping is carried out again, a sputtering source is started, the sputtering power is 200W, the sputtering time is 2 hours, hfO 2 insulating layer 4 with the thickness of 2.5-3 mu m is generated on the surface of the blade alloy substrate 1 through reaction of Hf atoms and reaction gas, the HfO 2 insulating layer 4 is deposited on the Al 2O3 diffusion layer 3, and the thicknesses of the NiCoCrAlY transition layer 2 and the HfO 2 insulating layer 4 are adjusted by controlling the sputtering power and the sputtering time in the step S2 and the step S4.
The following describes the preparation method of the high-temperature film sensor for the aero-engine blade according to the embodiment, and the performance of the high-temperature film sensor for the aero-engine blade prepared by the method:
After the preparation of the high-temperature film sensor is completed, a heat treatment experiment is carried out on the high-temperature film sensor, then a high-temperature silver paste butt joint point is adopted for wiring, a static test system suitable for the high-temperature film sensor is built, various performance indexes of the sensor are tested and analyzed, and service performance under a complex environment is tested.
Embodiment one: high temperature cycle test
As shown in fig. 3 and 4, the thin film sensor can output stable thermoelectric potential under the 1 st to 5 th times, especially 5 th times high temperature environment, and the thin film sensor prepared by the magnetron sputtering method stably works for a long time under the high temperature condition.
The repeatability test error is calculated, and the repeatability test error belongs to random errors, and specifically comprises the following steps:
Wherein: delta R is a repeatability error; σ max is the maximum standard deviation; y FS is the full scale value.
The standard deviation is calculated by using a range method, and specifically comprises the following steps:
Wherein: c is a range coefficient, and the value of the range coefficient is related to the measurement times n; r is the extreme difference, which is the maximum value minus the minimum value in the test results.
Table 1 shows the values of the range coefficient C and the degree of freedom v corresponding to different test times n.
TABLE 1 extremely bad coefficient and freedoms table
According to a formula of a pole difference method, the maximum standard deviation of 5 tests is calculated to be 3.27, and the repeatability error of the blade curved surface ITO/In2O3 film sensor prepared by magnetron sputtering at 100-850 ℃ is 3.1%, namely the repeatability of the sensor is 96.9%.
Embodiment two: response time test
As shown in FIG. 5, the dynamic laser is emitted at the thermal node of the film sensor, and the film sensor outputs thermal potential through rapid temperature rise, the test laser power is 2000W, the sampling frequency is 0.5M times/second, the sampling rate of 2-5 times is satisfied, the response time test result of the film sensor is 16us, and the prepared film sensor has high response speed and can realize rapid temperature measurement.
Embodiment III: real-time temperature test under high-temperature environment of aero-engine
In order to simulate the high-temperature environment in the engine, a real-time temperature test is carried out by means of a scaled engine test bed under the high-temperature environment, the flame used in the test bed is acetylene flame, and the highest temperature is 1500 ℃. In the measuring process, the engine test bed controls the spraying flame by adding or reducing fuel, so as to control the temperature of the position of the blade, the blade is fixed at a certain distance from the flame spraying port of the test bed in the measuring process, then a B-type standard thermocouple is placed at the thermocouple thermal node to collect the temperature of the hot end flame, meanwhile, a K thermocouple is placed at the cold end of the film sensor to measure the temperature of the cold end of the thermocouple, and the data of the film sensor are collected by a data collector.
As shown in FIG. 6, in FIG. 6A is fuel reduction, in FIG. 6B is fuel increase, flame injection temperature is 1067deg.C at maximum, there are two total temperature changes in the test process, one fuel reduction, one fuel increase, compared with the temperature data acquired by the B-type standard sensor, the film sensor prepared on the blade has the same output curve as the B-type standard sensor when the temperature changes, and the prepared film sensor has good temperature measurement capability.
According to the preparation method of the high-temperature film sensor for the aero-engine blade and the sensor, disclosed by the invention, the multilayer film is adopted as a gradient transition layer structure, so that the adhesiveness of the film is improved, the binding force of the gradient transition layer is improved, and the transition from an alloy substrate to an oxide insulating layer is realized. In addition, in view of insulation, the later deposited film layer can seal defects such as cracks and holes in the film structure of the previous layer, so that the conductive paths in the film structure are reduced, and the insulation performance of the system is improved. The invention can realize the good transition from the conductive substrate to the sensor at high temperature and has the advantages of good insulating property, high binding force, wide application range and small thickness.
The above examples are only illustrative of the preferred embodiments of the present invention and are not intended to limit the scope of the present invention, and various modifications and improvements made by those skilled in the art to the technical solution of the present invention should fall within the scope of protection defined by the claims of the present invention without departing from the spirit of the present invention.
Claims (7)
1. The preparation method of the high-temperature film sensor for the aero-engine blade is characterized by comprising the following steps of:
S1, polishing a blade alloy substrate by using an alumina polishing agent by adopting a mechanical polishing method to form a blade alloy substrate with nanoscale roughness, removing grease on the blade alloy substrate by adopting electrolytic degreasing, and fixedly mounting the blade alloy substrate on the surface of an aeroengine blade;
S2, depositing a NiCoCrAlY transition layer on the blade alloy substrate by adopting a magnetron sputtering method, wherein the transition layer comprises the following specific steps:
Placing a NiCoCrAlY alloy target in a vacuum chamber of a magnetic control device, starting a vacuum pump system to reduce the gas pressure in the vacuum chamber to within 10 -3～10-1 Pa sputtering pressure, sputtering and depositing NiCoCrAlY atoms in the vacuum chamber on a blade alloy substrate to form a NiCoCrAlY transition layer with the thickness of 20-30 micrometers;
S3, forming a thermally grown Al 2O3 diffusion layer on the NiCoCrAlY transition layer in an in-situ growth mode, carrying out high-temperature annealing treatment on the NiCoCrAlY transition layer under inert gas, wherein the annealing temperature is 600-1000 ℃, promoting the Al in the NiCoCrAlY transition layer to diffuse to the surface, and then reacting with oxygen in the air to form an Al 2O3 diffusion layer with the thickness of 1-1.5 mu m;
The CVD method is adopted to prepare the Al 2O3 diffusion layer, which comprises the following substeps:
S31, dissolving aluminum acetylacetonate into N-dimethylformamide to prepare formamide aluminum acetonate liquid with the concentration of 0.01mol.L -1;
s32, ultrasonically cleaning the blade alloy substrate with acetone and alcohol, and then air-drying for later use;
S33, performing a vapor deposition test on a CVD device, wherein the vapor deposition test comprises a solution output device, a high-pressure supply system, a heating and temperature control system and an exhaust gas discharge system, and the process parameters are as follows: the deposition temperature was 400 ℃, the input speed of the source solution to the CVD equipment was 50mLh-1, the concentration of the source solution was 0.03mol L -1, the distance between the nozzle and the blade alloy substrate was 55mm, and the voltage was 20CV;
S34, preserving heat of the film prepared by deposition at 800 ℃ for 2 hours, cooling along with a furnace, and testing the resistance of the prepared insulating layer to meet the requirement of insulating property;
S4, depositing an HfO 2 insulating layer on the thermally grown Al 2O3 diffusion layer, and realizing patterning by a mask sputtering method or a stripping method to obtain the high-temperature thin film sensor, wherein the method comprises the following substeps:
S41, cleaning a blade alloy substrate 1, fixing a mask plate on the surface of an aeroengine blade, and sputtering the shape of a film sensor;
S42, replacing the target material in the vacuum chamber of the magnetic control device with a Hf target material, and adjusting the magnetic control device;
S43, vacuum pumping is carried out again, a sputtering source is started, hfO 2 insulating layer with the thickness of 2.5-3 mu m is generated on the surface of the blade alloy substrate 1 through the reaction of Hf atoms and reaction gas, and the HfO 2 insulating layer is deposited on the Al 2O3 diffusion layer.
2. The method for preparing the high-temperature film sensor for the aeroengine blade according to claim 1, wherein the alloy proportions of Ni, co, cr and Al in the NiCoCrAlY transition layer in the step S2 are as follows: ni 45%, co 20%, cr 20% and Al 14%.
3. The method for manufacturing the high-temperature thin-film sensor for the aero-engine blade according to claim 1, wherein the thicknesses of the NiCoCrAlY transition layer and the HfO 2 insulating layer are adjusted by controlling the sputtering power and the sputtering time in the step S2 and the step S4.
4. The method for manufacturing the high-temperature film sensor for the aero-engine blade according to claim 1, wherein the sputtering power in the preparation of the NiCoCrAlY transition layer in the step S2 is 150W, the sputtering power in the preparation of the HfO 2 insulating layer in the step S4 is 200W, and the sputtering time is 2 hours.
5. An aeroengine blade high temperature film sensor prepared by the method of preparing an aeroengine blade high temperature film sensor according to any one of claims 1 to 4, comprising a blade alloy substrate, a NiCoCrAlY transition layer, an Al 2O3 diffusion layer and an HfO 2 insulating layer, wherein the NiCoCrAlY transition layer is deposited on the alloy substrate, the Al 2O3 diffusion layer is formed on the NiCoCrAlY transition layer by annealing in an inert atmosphere and an air atmosphere, and the HfO 2 insulating layer is deposited on the Al 2O3 diffusion layer.
6. The aircraft engine blade high temperature film sensor of claim 5, wherein the blade alloy substrate is a nickel-based alloy material, and is resistant to high temperatures up to 1200 ℃.
7. The high-temperature film sensor for the aeroengine blade according to claim 5, wherein the test signal is led out by adopting high-temperature conductive paste sintering or high-temperature spraying to be connected with a wire lead-out wire.
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