CN117870576A - Laser system with real-time correction function and working method - Google Patents
Laser system with real-time correction function and working method Download PDFInfo
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Abstract
The invention provides a real-time correction laser system and a correction method thereof, which adopt a common light path design to improve the imaging accuracy of the system, realize the matching of the laser scanning coordinate and the imaging coordinate of the optical coherence imaging system, rapidly image a sample through a camera, detect the positioning and/or shape of the sample by combining the optical coherence imaging system, analyze and correct the actual imaging position information and the scanning position information of the three-dimensional galvanometer laser scanning system, lead the laser scanning coordinate to be matched with the imaging coordinate of the optical coherence imaging system, and correct the laser focusing to the matched coordinate position in real time.
Description
Technical Field
The application relates to the technical field of optical detection, in particular to a laser system for real-time correction and a working method.
Background
In modern laser optical engineering practice, it is often necessary for the laser to penetrate the sample for internal focused scanning. In the prior art, an interface device is needed to ensure that a sample is always kept relatively fixed in the process of receiving the cutting, and the working distance of a laser focus is determined by the height of the interface.
Currently, the traditional measurement method commonly used in the optical industry is interferometry. The interferometry method can be classified into a common-path measurement method and a non-common-path measurement method according to the different forms of the test optical paths. The common-path interferometry system can effectively solve the problems of reduced measurement precision and stability and the like caused by the fact that the test light and the indicating light do not share the optical path in the traditional non-common-path measurement method. The common-path interferometry system adopts the same monochromatic laser source to generate one path of reference wave front and one path of measurement wave front, and the interference result of the two paths of wave fronts is received by the camera detector and causes the change of image stripes acquired on the camera detector chip. The surface shape data of the sample surface can be calculated by the phase difference between the two wave fronts, but the sample cannot be penetrated for internal focusing scanning, and the surface shape data is easily influenced by the environmental factors such as inconsistent beam paths, environmental vibration, temperature disturbance, air turbulence and the like, so that a larger system measurement error is introduced.
Disclosure of Invention
In view of this, it is necessary to provide a laser system and a working method capable of correcting laser focusing to a matched coordinate position in real time, aiming at the technical problem that the laser focusing position, scanning position and imaging position cannot be corrected in time according to the actual condition of a sample.
In order to solve the problems, the following technical scheme is adopted in the application:
the application provides a laser system of real-time correction, includes:
the device comprises a laser emission unit (1), an optical coherence tomography unit (2), an optical guiding unit (3), a three-dimensional galvanometer scanning unit (4), a high-speed camera (5), a data analysis processing unit (6) and a control unit (7), wherein the optical guiding unit (3) comprises a first dichroic spectroscope (31), an optical beam expanding lens group (32), a collimating lens (33), a second dichroic spectroscope (34) and a focusing lens (35); the laser emission unit (1) is electrically connected with the control unit (7), and the data analysis processing unit (6) is electrically connected with the optical coherence tomography unit (2), the three-dimensional galvanometer scanning unit (4) and the high-speed camera (5);
the laser emission unit (1) is controlled by the control unit (7) to generate a first laser beam with adjustable energy and phase, and the first laser beam is incident to the first two-way spectroscope (31); the imaging light beam emitted by the optical coherence tomography unit (2) enters the first dichroic beam splitter (31);
the first laser beam and the imaging beam are scanned by the first dichroic beam splitter (31) and then enter the optical beam expander group (32) by the three-dimensional galvanometer scanning unit (4), the optical beam expander group (32) expands the incident first laser beam and the imaging beam, the first laser beam and the imaging beam after being expanded enter the second dichroic beam splitter (34) after being collimated by the collimating lens (33), the second dichroic beam splitter (34) reflects the first laser beam and the imaging beam and focuses on a first sample position by the focusing lens (35) and generates sample reflected light, and the sample reflected light sequentially enters the three-dimensional galvanometer scanning unit (4) by the focusing lens (35), the second dichroic beam splitter (34), the collimating lens (33) and the optical beam expander group (32), and the three-dimensional galvanometer scanning unit (4) scans the sample reflected light and acquires the first sample reflected light with different depths, widths, axial positions and simultaneously records the first sample reflected light and the first sample reflected light to the first sample position coordinate information processing unit (6) and processes the first sample coordinate information and transmits the first sample coordinate information to the first sample scanning unit;
the optical coherence tomography unit (2) scans the position information and the first coordinate information of the first sample scanning point, collects sample reflected light of the first sample scanning point, acquires sample positioning and/or shape information and second coordinate information of the first sample scanning point, and transmits the sample positioning and/or shape information and the second coordinate information to the data analysis processing unit (6);
the high-speed camera (5) collects sample reflected light of the first sample scanning point, generates a photo and transmits the photo to the data analysis processing unit (6);
the data analysis processing unit (6) analyzes the photo of the first sample scanning point generated by the high-speed camera (5), the sample positioning and/or shape information of the first sample scanning point acquired by the optical coherence tomography imaging unit (2) and the position information of the first sample scanning point recorded by the three-dimensional laser galvanometer scanning unit (4), performs phase unwrapping data processing to obtain sample high-precision wavefront or surface shape image information, instantly generates first real-time image information, and matches the first coordinate information and the second coordinate information to generate a first scanning pattern of a sample target area;
the control unit (7) corrects the energy and phase of the laser beam emitted by the laser emitting unit (1) according to the first scanning pattern and the first real-time image information, and generates a second laser beam.
In some embodiments, the laser emission unit (1) comprises a laser (11), a laser energy corrector (12) and a spatial light modulator (13) which are sequentially connected through an optical fiber transmission line, wherein the laser (11) is an all-fiber laser, and the laser (11) emits laser beams under the control of the control unit (7), and the emitted laser beams can be continuous emitted parallel laser beams or pulse laser beams emitted by pulses; the laser energy corrector (12) is arranged at a light outlet of the laser (11) and is used for correcting the energy of the laser beam emitted by the laser (11); the spatial light modulator (12) is a reflective spatial light modulator, and is connected to a light outlet of the laser energy corrector (12) and used for modulating the wave front phase of the light incident on the first dichroic beam splitter (31).
In some of these embodiments, the optical coherence tomography imaging unit (2) has a z imaging range of 4mm-8mm, an imaging time of 0.01-0.1 seconds, a frame rate of 50-100 frames/second, and an imaging resolution of 5-7.5 μm.
In some of these embodiments, the scanning optical path of the three-dimensional galvanometer scanning unit (4), the optical coherence tomography unit (2), and the imaging optical path of the high-speed camera (5) are coaxial.
In some embodiments, the focusing lens (35) accurately focuses the laser beam emitted by the laser emission unit (1) on a sample and serves as an imaging lens of the optical coherence tomography unit (2) and a shooting lens of the high-speed camera (5).
In some embodiments, the three-dimensional laser galvanometer scanning unit (4), the optical coherence tomography imaging unit (2) and the high-speed camera (5) are coaxial, and the sample is simultaneously in the scanning range of the three-dimensional laser galvanometer scanning unit (4), the imaging range of the optical coherence tomography imaging unit (2) and the shooting range of the high-speed camera (5).
In some of these embodiments, the three-dimensional laser galvanometer scanning unit (2), the optical coherence tomography imaging unit (3) and the high-speed camera (10) are of coaxial design of the optical path.
In some embodiments, the photosensitive wave band of the high-speed camera (5) is a visible light near infrared wave band, and the imaging chip of the camera is CCD or CMOS.
In some of these embodiments, the second laser beam is focused to a second sample region using the same optical path as the first laser beam;
the three-dimensional galvanometer scanning unit (4) scans reflected light of a second sample scanning point with different depth, width and axial position inside a second sample, simultaneously records position information and third coordinate information of the second sample scanning point, and transmits the position information and the third coordinate information to the data analysis processing unit (6), the optical coherence tomography unit (2) scans the position information and the third coordinate information of the second sample scanning point, acquires sample reflected light of the second sample scanning point, acquires sample positioning and/or shape information and fourth coordinate information of the second sample scanning point, and transmits the sample positioning and/or shape information and the fourth coordinate information to the data analysis processing unit (6);
the data analysis processing unit (6) analyzes the photo of the second sample scanning point generated by the high-speed camera (5), the sample positioning and/or shape information of the second sample scanning point acquired by the optical coherence tomography imaging unit (2) and the position information of the second sample scanning point recorded by the three-dimensional laser galvanometer scanning unit (4), performs phase unwrapping data processing to obtain sample high-precision wavefront or surface shape image information, instantly generates second real-time image information, and matches the third coordinate information and the fourth coordinate information to generate a second scanning pattern of a sample target area;
the data analysis processing unit (6) is used for analyzing differences among the first real-time image information, the second real-time image information, the first real-time scanning pattern, the second real-time scanning pattern, sample positioning and/or shape information and displaying the determined differences;
the control unit (7) corrects the energy and phase of the second laser beam according to the determined difference of the analysis of the data analysis processing unit (6) to generate a third laser beam focus scan.
The application also provides a working method of the real-time correction laser system, which comprises the following steps:
the laser emission unit (1) is controlled by the control unit (7) to generate a first laser beam with adjustable energy and phase, and the first laser beam is incident to the first two-way spectroscope (31); the imaging light beam emitted by the optical coherence tomography unit (2) enters the first dichroic beam splitter (31);
the first laser beam and the imaging beam are scanned by the first dichroic beam splitter (31) and then enter the optical beam expander group (32) by the three-dimensional galvanometer scanning unit (4), the optical beam expander group (32) expands the incident first laser beam and the imaging beam, the first laser beam and the imaging beam after being expanded enter the second dichroic beam splitter (34) after being collimated by the collimating lens (33), the second dichroic beam splitter (34) reflects the first laser beam and the imaging beam and focuses on a first sample position by the focusing lens (35) and generates sample reflected light, and the sample reflected light sequentially enters the three-dimensional galvanometer scanning unit (4) by the focusing lens (35), the second dichroic beam splitter (34), the collimating lens (33) and the optical beam expander group (32), and the three-dimensional galvanometer scanning unit (4) scans the sample reflected light and acquires the first sample reflected light with different depths, widths, axial positions and simultaneously records the first sample reflected light and the first sample reflected light to the first sample position coordinate information processing unit (6) and processes the first sample coordinate information and transmits the first sample coordinate information to the first sample scanning unit;
the optical coherence tomography unit (2) scans the position information and the first coordinate information of the first sample scanning point, collects sample reflected light of the first sample scanning point, acquires sample positioning and/or shape information and second coordinate information of the first sample scanning point, and transmits the sample positioning and/or shape information and the second coordinate information to the data analysis processing unit (6);
the high-speed camera (5) collects sample reflected light of the first sample scanning point, generates a photo and transmits the photo to the data analysis processing unit (6);
the data analysis processing unit (6) analyzes the photo of the first sample scanning point generated by the high-speed camera (5), the sample positioning and/or shape information of the first sample scanning point acquired by the optical coherence tomography imaging unit (2) and the position information of the first sample scanning point recorded by the three-dimensional laser galvanometer scanning unit (4), performs phase unwrapping data processing to obtain sample high-precision wavefront or surface shape image information, instantly generates first real-time image information, and matches the first coordinate information and the second coordinate information to generate a first scanning pattern of a sample target area;
the control unit (7) corrects the energy and phase of the laser beam emitted by the laser emitting unit (1) according to the first scanning pattern and the first real-time image information, and generates a second laser beam.
By adopting the technical scheme, the application has the following beneficial effects:
according to the real-time correction laser system and the working method, the common light path design is adopted to improve the imaging accuracy of the system, the laser scanning coordinates are matched with the imaging coordinates of the optical coherence imaging system, the camera is used for rapidly imaging a sample, the optical coherence imaging system is combined to detect the positioning and/or shape of the sample, the actual imaging position information and the scanning position information of the three-dimensional galvanometer laser scanning system are analyzed and corrected, the laser scanning coordinates are matched with the imaging coordinates of the optical coherence imaging system, and the laser is corrected to be focused to the matched coordinate position in real time.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings used in the embodiments of the present application or the description of the prior art will be briefly described below, and it is obvious that the drawings described below are only some embodiments of the present application, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic structural diagram of a laser system with real-time correction according to an embodiment of the present invention.
Detailed Description
Embodiments of the present application are described in detail below, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and intended for the purpose of explaining the present application and are not to be construed as limiting the present application.
In the description of the present application, it should be understood that the terms "upper," "lower," "horizontal," "inner," "outer," and the like indicate an orientation or a positional relationship based on that shown in the drawings, and are merely for convenience of description and simplification of the description, and do not indicate or imply that the apparatus or element in question must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present application.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present application, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
In order to make the objects, technical solutions and advantages of the present application more apparent, the present application will be further described in detail with reference to the accompanying drawings and examples.
Referring to fig. 1, a schematic structural diagram of a laser system with real-time correction according to an embodiment of the present application includes: the device comprises a laser emission unit (1), an optical coherence tomography unit (2), an optical guiding unit (3), a three-dimensional galvanometer scanning unit (4), a high-speed camera (5), a data analysis processing unit (6) and a control unit (7). The connection relation of the respective components and the implementation manner thereof are described in detail below.
Specifically, the laser emission unit (1) is connected to the control unit (7) through an electric signal transmission line, and the laser emission unit (1) can generate a first laser beam with adjustable energy and phase under the control of the control unit (7).
In this embodiment, the laser emission unit (1) includes a laser (11), a laser energy corrector (12) and a spatial light modulator (13) sequentially connected through an optical fiber transmission line (8), where the laser (11) is an all-fiber laser, and emits a laser beam under the control of the control unit (7), where the emitted laser beam may be a continuous emitted parallel laser beam or a pulse laser beam emitted by a pulse; the laser energy corrector (12) is arranged at a light outlet of the laser (11) and is used for correcting the energy of the laser beam emitted by the laser (11); the spatial light modulator (12) is a reflective spatial light modulator, and is connected to a light outlet of the laser energy corrector (12) and used for modulating and transmitting the wave front phase of the light incident on the optical guiding unit (3).
Specifically, the optical coherence tomography unit (2) is electrically connected to the data analysis processing unit (6) through the electric signal transmission line (9), an imaging light beam emitted by the optical coherence tomography unit is led into the three-dimensional galvanometer scanning unit (4) through the optical guiding unit (3) and focuses on a sample, the position information and the first coordinate information of the first scanning point recorded by the three-dimensional laser galvanometer scanning unit (4) acquire sample positioning and/or shape information and the second coordinate information of the first sample scanning point, and the sample positioning and/or shape information and the second coordinate information are transmitted to the data analysis processing unit (6).
In some preferred embodiments, the optical coherence tomography imaging unit (2) has a z imaging range of 4mm-8mm, an imaging time of 0.01-0.1 seconds, a frame rate of 50-100 frames/second, and an imaging resolution of 5-7.5 μm.
It will be appreciated that the present invention provides fast imaging speeds and short imaging times, meaning that a timely and therefore useful feedback image can be generated that can be provided with respect to a sample, so that the system can correct the energy and phase of the femtosecond laser beam in response to the feedback, and can be viewed in real time during imaging.
It will be appreciated that the refresh rate typically used for live video images is about 24 frames/second. Thus, an imaging system that provides images at a refresh rate or frame rate of 50-100 frames/second may provide high resolution live images. While systems with frame rates or refresh rates much less than 20 to 25 frames/second may not be considered live video imaging, but rather as unstable, jumped images, do not provide real-time images to correct the energy and phase of the femtosecond laser beam in real-time.
It can be understood that the z imaging range of the optical coherence tomography imaging unit (2) is 4mm-8mm, imaging information of different depths, widths and axial positions of a sample can be provided, synchronization with scanning information of the three-dimensional galvanometer scanning unit (4) is realized, and matching of the laser scanning coordinates and the imaging coordinates of the optical coherence imaging system is realized.
The real-time corrected laser system provided by the invention has high imaging speed and short imaging time, which means that a timely and useful feedback image can be generated and provided for a sample, so that the system can respond to the feedback to correct the energy and the phase of the femtosecond laser beam and can be observed in real time in the imaging process. In addition, the optical paths of the embodiment of the invention are connected through optical fibers and are not connected through lenses, so that the optical paths are simpler and more flexible.
As an improvement, the optical guiding unit (3) comprises a first dichroic beam splitter (31), an optical beam expander group (32), a collimating lens (33), a second dichroic beam splitter (34) and a focusing lens (35) which are connected through an optical fiber transmission line and are sequentially arranged along an optical path.
Specifically, the first dichroic beam splitter (31) couples the imaging light beam of the optical coherence tomography unit (2) into a main light path, the optical beam expander group (32) expands the laser beam and the imaging light beam emitted by the three-dimensional galvanometer scanning unit (4) to improve a light spot focused on a sample, the collimating lens (33) collimates the expanded laser beam and the imaging light beam and then enters the second dichroic beam splitter (34), the second dichroic beam splitter (34) reflects the first laser beam and the imaging light beam, the first laser beam and the first laser beam are focused on the first sample through the focusing lens (35) and reflected light and infrared light of the sample are generated, and the reflected light and the infrared light are separated or combined through the focusing lens (35).
It can be understood that the focusing lens (35) accurately focuses the laser beam emitted by the laser emission unit (1) on a sample and serves as an imaging lens of the optical coherence tomography unit (2) and a photographing lens of the high-speed camera (5).
As an improvement, the optical paths of the three-dimensional laser galvanometer scanning unit (4), the optical coherence tomography imaging unit (2) and the high-speed camera (5) are coaxial, and a sample is simultaneously in the scanning range of the three-dimensional laser galvanometer scanning unit (4), the imaging range of the optical coherence tomography imaging unit (2) and the shooting range of the high-speed camera (5).
It can be appreciated that the real-time correction laser system uses the common light path as a system reference, so that adverse effects of non-common light path errors on the imaging precision of the system can be effectively reduced, and the imaging precision is improved.
It can be understood that by the coaxial design of the three-dimensional laser galvanometer scanning unit (2), the optical coherence tomography imaging unit (3) and the high-speed camera (10) optical path, the femtosecond laser emission unit and the optical coherence tomography imaging unit share one three-dimensional galvanometer scanning unit, so that the optical path structure is simplified, the optical path modulation is simplified, and the design cost of the whole device is saved.
As an improvement mode, the photosensitive wave band of the high-speed camera (5) is a visible light near infrared wave band, and the imaging chip of the camera is CCD or CMOS for collecting spot information reflected by a sample.
The working procedure of the laser system with real-time correction provided in the above embodiment of the present application is as follows:
the first laser beam and the imaging beam are scanned by the first dichroic beam splitter (31) and then enter the optical beam expander group (32) by the three-dimensional galvanometer scanning unit (4), the optical beam expander group (32) expands the incident first laser beam and the imaging beam, the first laser beam and the imaging beam after being expanded enter the second dichroic beam splitter (34) after being collimated by the collimating lens (33), the second dichroic beam splitter (34) reflects the first laser beam and the imaging beam and focuses on a first sample position by the focusing lens (35) and generates sample reflected light, and the sample reflected light sequentially enters the three-dimensional galvanometer scanning unit (4) by the focusing lens (35), the second dichroic beam splitter (34), the collimating lens (33) and the optical beam expander group (32), and the three-dimensional galvanometer scanning unit (4) scans the sample reflected light and acquires the first sample reflected light with different depths, widths, axial positions and simultaneously records the first sample reflected light and the first sample reflected light to the first sample position coordinate information processing unit (6) and processes the first sample coordinate information and transmits the first sample coordinate information to the first sample scanning unit;
the optical coherence tomography unit (2) scans the position information and the first coordinate information of the first sample scanning point, collects sample reflected light of the first sample scanning point, acquires sample positioning and/or shape information and second coordinate information of the first sample scanning point, and transmits the sample positioning and/or shape information and the second coordinate information to the data analysis processing unit (6);
the high-speed camera (5) collects sample reflected light of the first sample scanning point, generates a photo and transmits the photo to the data analysis processing unit (6);
the data analysis processing unit (6) analyzes the photo of the first sample scanning point generated by the high-speed camera (5), the sample positioning and/or shape information of the first sample scanning point acquired by the optical coherence tomography imaging unit (2) and the position information of the first sample scanning point recorded by the three-dimensional laser galvanometer scanning unit (4), performs phase unwrapping data processing to obtain sample high-precision wavefront or surface shape image information, instantly generates first real-time image information, and matches the first coordinate information and the second coordinate information to generate a first scanning pattern of a sample target area;
the control unit (7) corrects the energy and phase of the laser beam emitted by the laser emitting unit (1) according to the first scanning pattern and the first real-time image information, and generates a second laser beam.
As an improvement, the second laser beam is focused to a second sample area by adopting the same optical path as the first laser beam;
the three-dimensional galvanometer scanning unit (4) scans reflected light of a second sample scanning point with different depth, width and axial position inside a second sample, simultaneously records position information and third coordinate information of the second sample scanning point, and transmits the position information and the third coordinate information to the data analysis processing unit (6), the optical coherence tomography unit (2) scans the position information and the third coordinate information of the second sample scanning point, acquires sample reflected light of the second sample scanning point, acquires sample positioning and/or shape information and fourth coordinate information of the second sample scanning point, and transmits the sample positioning and/or shape information and the fourth coordinate information to the data analysis processing unit (6);
the data analysis processing unit (6) analyzes the photo of the second sample scanning point generated by the high-speed camera (5), the sample positioning and/or shape information of the second sample scanning point acquired by the optical coherence tomography imaging unit (2) and the position information of the second sample scanning point recorded by the three-dimensional laser galvanometer scanning unit (4), performs phase unwrapping data processing to obtain sample high-precision wavefront or surface shape image information, instantly generates second real-time image information, and matches the third coordinate information and the fourth coordinate information to generate a second scanning pattern of a sample target area;
the data analysis processing unit (6) is used for analyzing differences among the first real-time image information, the second real-time image information, the first real-time scanning pattern, the second real-time scanning pattern, sample positioning and/or shape information and displaying the determined differences;
the control unit (7) corrects the energy and phase of the second laser beam according to the determined difference of the analysis of the data analysis processing unit (6) to generate a third laser beam focus scan.
As an improvement, the data analysis processing unit (6) is configured to determine a difference between the first scan pattern and the first real-time image information before the second laser beam is emitted, and to display an indication of the determined difference; for determining a difference between the second scan pattern and the second real-time image information before emitting the third laser beam and displaying an indication of the determined difference; for displaying whether the second laser beam and the third laser beam require correction of energy and phase.
It should be noted that: the laser system with real-time correction provided in the embodiment of the application can be used for imaging industrial samples to realize detection of the samples, and can also be applied to imaging of human or animal tissues, so that the application is wide.
The laser system and the correction method thereof for real-time correction are provided, the imaging accuracy of the system is improved by adopting a common light path design, the laser scanning coordinate is matched with the imaging coordinate of the optical coherence imaging system, the sample is imaged rapidly through a camera, the positioning and/or shape of the sample is detected by combining the optical coherence imaging system, the actual imaging position information and the scanning position information of the three-dimensional galvanometer laser scanning system are analyzed and corrected, the laser scanning coordinate is matched with the imaging coordinate of the optical coherence imaging system, and the laser is corrected to be focused to the matched coordinate position in real time.
It will be understood that the technical features of the above-described embodiments may be combined in any manner, and that all possible combinations of the technical features in the above-described embodiments are not described for brevity, however, they should be considered as being within the scope of the description provided in the present specification, as long as there is no contradiction between the combinations of the technical features.
The foregoing description of the preferred embodiments of the present application has been provided for the purpose of illustrating the general principles of the present application and is not meant to limit the scope of the present application in any way. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present application, and other embodiments of the present application, which may occur to those skilled in the art without the exercise of inventive faculty, are intended to be included within the scope of the present application, based on the teachings herein.
Claims (10)
1. A real-time corrected laser system, comprising:
the device comprises a laser emission unit (1), an optical coherence tomography unit (2), an optical guiding unit (3), a three-dimensional galvanometer scanning unit (4), a high-speed camera (5), a data analysis processing unit (6) and a control unit (7), wherein the optical guiding unit (3) comprises a first dichroic spectroscope (31), an optical beam expanding lens group (32), a collimating lens (33), a second dichroic spectroscope (34) and a focusing lens (35); the laser emission unit (1) is electrically connected with the control unit (7), and the data analysis processing unit (6) is electrically connected with the optical coherence tomography unit (2), the three-dimensional galvanometer scanning unit (4) and the high-speed camera (5);
the laser emission unit (1) is controlled by the control unit (7) to generate a first laser beam with adjustable energy and phase, and the first laser beam is incident to the first two-way spectroscope (31); the imaging light beam emitted by the optical coherence tomography unit (2) enters the first dichroic beam splitter (31);
the first laser beam and the imaging beam are scanned by the first dichroic beam splitter (31) and then enter the optical beam expander group (32) by the three-dimensional galvanometer scanning unit (4), the optical beam expander group (32) expands the incident first laser beam and the imaging beam, the first laser beam and the imaging beam after being expanded enter the second dichroic beam splitter (34) after being collimated by the collimating lens (33), the second dichroic beam splitter (34) reflects the first laser beam and the imaging beam and focuses on a first sample position by the focusing lens (35) and generates sample reflected light, and the sample reflected light sequentially enters the three-dimensional galvanometer scanning unit (4) by the focusing lens (35), the second dichroic beam splitter (34), the collimating lens (33) and the optical beam expander group (32), and the three-dimensional galvanometer scanning unit (4) scans the sample reflected light and acquires the first sample reflected light with different depths, widths, axial positions and simultaneously records the first sample reflected light and the first sample reflected light to the first sample position coordinate information processing unit (6) and processes the first sample coordinate information and transmits the first sample coordinate information to the first sample scanning unit;
the optical coherence tomography unit (2) scans the position information and the first coordinate information of the first sample scanning point, collects sample reflected light of the first sample scanning point, acquires sample positioning and/or shape information and second coordinate information of the first sample scanning point, and transmits the sample positioning and/or shape information and the second coordinate information to the data analysis processing unit (6);
the high-speed camera (5) collects sample reflected light of the first sample scanning point, generates a photo and transmits the photo to the data analysis processing unit (6);
the data analysis processing unit (6) analyzes the photo of the first sample scanning point generated by the high-speed camera (5), the sample positioning and/or shape information of the first sample scanning point acquired by the optical coherence tomography imaging unit (2) and the position information of the first sample scanning point recorded by the three-dimensional laser galvanometer scanning unit (4), performs phase unwrapping data processing to obtain sample high-precision wavefront or surface shape image information, instantly generates first real-time image information, and matches the first coordinate information and the second coordinate information to generate a first scanning pattern of a sample target area;
the control unit (7) corrects the energy and phase of the laser beam emitted by the laser emitting unit (1) according to the first scanning pattern and the first real-time image information, and generates a second laser beam.
2. The real-time correction laser system according to claim 1, wherein the laser emission unit (1) comprises a laser (11), a laser energy corrector (12) and a spatial light modulator (13) which are sequentially connected through an optical fiber transmission line, the laser (11) is an all-fiber laser, and the laser (11) emits a laser beam under the control of the control unit (7), wherein the emitted laser beam can be a continuous emitted parallel laser beam or a pulse laser beam emitted by pulses; the laser energy corrector (12) is arranged at a light outlet of the laser (11) and is used for correcting the energy of the laser beam emitted by the laser (11); the spatial light modulator (12) is a reflective spatial light modulator, and is connected to a light outlet of the laser energy corrector (12) and used for modulating the wave front phase of the light incident on the first dichroic beam splitter (31).
3. A real-time corrected laser system according to claim 1, characterized in that the optical coherence tomography imaging unit (2) has a z imaging range of 4mm-8mm, an imaging time of 0.01-0.1 seconds, a frame rate of 50-100 frames/second and an imaging resolution of 5-7.5 μm.
4. The real-time corrected laser system according to claim 1, characterized in that the scanning light path of the three-dimensional galvanometer scanning unit (4), the optical coherence tomography unit (2) and the imaging light path of the high-speed camera (5) are coaxial.
5. The real-time corrected laser system according to claim 1, characterized in that the focusing lens (35) focuses the laser beam emitted by the laser emitting unit (1) precisely on a sample and serves as an imaging lens of the optical coherence tomography unit (2), a photographing lens of the high-speed camera (5).
6. The real-time corrected laser system according to claim 1, characterized in that the optical paths of the three-dimensional laser galvanometer scanning unit (4), the optical coherence tomography imaging unit (2) and the high-speed camera (5) are coaxial, and the sample is simultaneously within the scanning range of the three-dimensional laser galvanometer scanning unit (4), the imaging range of the optical coherence tomography imaging unit (2) and the shooting range of the high-speed camera (5).
7. The real-time corrected laser system according to claim 1, characterized by a coaxial design of the optical paths of the three-dimensional laser galvanometer scanning unit (2), the optical coherence tomography imaging unit (3) and the high-speed camera (10).
8. A real-time correction laser system according to claim 1, characterized in that the photosensitive band of the high-speed camera (5) is the near infrared band of visible light, and the imaging chip of the camera is a CCD or CMOS.
9. The real time corrected laser system of claim 1, wherein the second laser beam is focused to a second sample region using the same optical path as the first laser beam;
the three-dimensional galvanometer scanning unit (4) scans reflected light of a second sample scanning point with different depth, width and axial position inside a second sample, simultaneously records position information and third coordinate information of the second sample scanning point, and transmits the position information and the third coordinate information to the data analysis processing unit (6), the optical coherence tomography unit (2) scans the position information and the third coordinate information of the second sample scanning point, acquires sample reflected light of the second sample scanning point, acquires sample positioning and/or shape information and fourth coordinate information of the second sample scanning point, and transmits the sample positioning and/or shape information and the fourth coordinate information to the data analysis processing unit (6);
the data analysis processing unit (6) analyzes the photo of the second sample scanning point generated by the high-speed camera (5), the sample positioning and/or shape information of the second sample scanning point acquired by the optical coherence tomography imaging unit (2) and the position information of the second sample scanning point recorded by the three-dimensional laser galvanometer scanning unit (4), performs phase unwrapping data processing to obtain sample high-precision wavefront or surface shape image information, instantly generates second real-time image information, and matches the third coordinate information and the fourth coordinate information to generate a second scanning pattern of a sample target area;
the data analysis processing unit (6) is used for analyzing differences among the first real-time image information, the second real-time image information, the first real-time scanning pattern, the second real-time scanning pattern, sample positioning and/or shape information and displaying the determined differences;
the control unit (7) corrects the energy and phase of the second laser beam according to the determined difference of the analysis of the data analysis processing unit (6) to generate a third laser beam focus scan.
10. A method of operating a real-time corrected laser system as claimed in any one of claims 1 to 9, comprising:
the laser emission unit (1) is controlled by the control unit (7) to generate a first laser beam with adjustable energy and phase, and the first laser beam is incident to the first two-way spectroscope (31); the imaging light beam emitted by the optical coherence tomography unit (2) enters the first dichroic beam splitter (31);
the first laser beam and the imaging beam are scanned by the first dichroic beam splitter (31) and then enter the optical beam expander group (32) by the three-dimensional galvanometer scanning unit (4), the optical beam expander group (32) expands the incident first laser beam and the imaging beam, the first laser beam and the imaging beam after being expanded enter the second dichroic beam splitter (34) after being collimated by the collimating lens (33), the second dichroic beam splitter (34) reflects the first laser beam and the imaging beam and focuses on a first sample position by the focusing lens (35) and generates sample reflected light, and the sample reflected light sequentially enters the three-dimensional galvanometer scanning unit (4) by the focusing lens (35), the second dichroic beam splitter (34), the collimating lens (33) and the optical beam expander group (32), and the three-dimensional galvanometer scanning unit (4) scans the sample reflected light and acquires the first sample reflected light with different depths, widths, axial positions and simultaneously records the first sample reflected light and the first sample reflected light to the first sample position coordinate information processing unit (6) and processes the first sample coordinate information and transmits the first sample coordinate information to the first sample scanning unit;
the optical coherence tomography unit (2) scans the position information and the first coordinate information of the first sample scanning point, collects sample reflected light of the first sample scanning point, acquires sample positioning and/or shape information and second coordinate information of the first sample scanning point, and transmits the sample positioning and/or shape information and the second coordinate information to the data analysis processing unit (6);
the high-speed camera (5) collects sample reflected light of the first sample scanning point, generates a photo and transmits the photo to the data analysis processing unit (6);
the data analysis processing unit (6) analyzes the photo of the first sample scanning point generated by the high-speed camera (5), the sample positioning and/or shape information of the first sample scanning point acquired by the optical coherence tomography imaging unit (2) and the position information of the first sample scanning point recorded by the three-dimensional laser galvanometer scanning unit (4), performs phase unwrapping data processing to obtain sample high-precision wavefront or surface shape image information, instantly generates first real-time image information, and matches the first coordinate information and the second coordinate information to generate a first scanning pattern of a sample target area;
the control unit (7) corrects the energy and phase of the laser beam emitted by the laser emitting unit (1) according to the first scanning pattern and the first real-time image information, and generates a second laser beam.
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