CN117854914A - Process method for magnetic steel dysprosium terbium permeation - Google Patents
Process method for magnetic steel dysprosium terbium permeation Download PDFInfo
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- CN117854914A CN117854914A CN202410061866.7A CN202410061866A CN117854914A CN 117854914 A CN117854914 A CN 117854914A CN 202410061866 A CN202410061866 A CN 202410061866A CN 117854914 A CN117854914 A CN 117854914A
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- 229910000831 Steel Inorganic materials 0.000 title claims abstract description 44
- 239000010959 steel Substances 0.000 title claims abstract description 44
- 238000000034 method Methods 0.000 title claims abstract description 41
- MOSURRVHVKOQHA-UHFFFAOYSA-N [Tb].[Dy] Chemical compound [Tb].[Dy] MOSURRVHVKOQHA-UHFFFAOYSA-N 0.000 title claims abstract description 19
- 239000000843 powder Substances 0.000 claims abstract description 154
- 229910052692 Dysprosium Inorganic materials 0.000 claims abstract description 20
- 229910052771 Terbium Inorganic materials 0.000 claims abstract description 20
- KBQHZAAAGSGFKK-UHFFFAOYSA-N dysprosium atom Chemical compound [Dy] KBQHZAAAGSGFKK-UHFFFAOYSA-N 0.000 claims abstract description 18
- GZCRRIHWUXGPOV-UHFFFAOYSA-N terbium atom Chemical compound [Tb] GZCRRIHWUXGPOV-UHFFFAOYSA-N 0.000 claims abstract description 18
- 238000001755 magnetron sputter deposition Methods 0.000 claims abstract description 14
- 238000005245 sintering Methods 0.000 claims abstract description 7
- 238000003825 pressing Methods 0.000 claims abstract description 4
- 230000008595 infiltration Effects 0.000 claims abstract 2
- 238000001764 infiltration Methods 0.000 claims abstract 2
- 238000004544 sputter deposition Methods 0.000 claims description 58
- 210000004400 mucous membrane Anatomy 0.000 claims description 41
- 238000004806 packaging method and process Methods 0.000 claims description 13
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 12
- 239000001301 oxygen Substances 0.000 claims description 11
- 229910052760 oxygen Inorganic materials 0.000 claims description 11
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 10
- 239000013077 target material Substances 0.000 claims description 9
- 229910052786 argon Inorganic materials 0.000 claims description 6
- 239000012300 argon atmosphere Substances 0.000 claims description 6
- 238000007789 sealing Methods 0.000 claims description 3
- 238000002360 preparation method Methods 0.000 abstract description 3
- 229910001172 neodymium magnet Inorganic materials 0.000 description 6
- 229910052761 rare earth metal Inorganic materials 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- QJVKUMXDEUEQLH-UHFFFAOYSA-N [B].[Fe].[Nd] Chemical compound [B].[Fe].[Nd] QJVKUMXDEUEQLH-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 210000004877 mucosa Anatomy 0.000 description 3
- 150000002910 rare earth metals Chemical class 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910052779 Neodymium Inorganic materials 0.000 description 2
- 238000003723 Smelting Methods 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 238000000137 annealing Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 238000005324 grain boundary diffusion Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/20—Recycling
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Abstract
The invention discloses a process method for magnetic steel dysprosium terbium infiltration, and belongs to the technical field of magnet preparation. A process method for magnetic steel dysprosium terbium permeation comprises the following steps: the powder for preparing the magnetic steel is subjected to magnetron sputtering, and dysprosium or terbium elements are added into the powder; then pressing and sintering the magnetic steel powder sputtered with dysprosium or terbium elements to form magnetic steel; the purpose that dysprosium terbium is distributed more uniformly in the magnetic steel can be achieved.
Description
Technical Field
The invention belongs to the technical field of magnet preparation, and particularly relates to a process method for magnetic steel dysprosium terbium permeation.
Background
The magnetic steel, especially NdFeB magnetic steel, is a rare earth permanent magnet prepared by sintering materials containing rare earth neodymium, iron and boron. At present, a sintering method is often adopted in the industry to manufacture a neodymium-iron-boron permanent magnet material, and the microcrystalline structure of the magnet comprises a neodymium-rich phase, a boron-rich phase, nd2Fe14B phases and the like, wherein the more Nd2Fe14B phases are, the better the magnet performance is.
In the preparation process of neodymium iron boron, the crystal structure can be improved by doping heavy rare earth dysprosium or terbium, dy2Fe14B phase or Tb2Fe14B phase is formed, and the magnet performance is improved.
In general, heavy rare earth elements such as Dy and Tb are added in the formulation stage, and the intrinsic coercivity of the magnet can be remarkably improved through high-temperature smelting, hydrogen breaking, air flow grinding, powder mixing and high-temperature sintering, but the process flow is long, the residual magnetism of the magnet is greatly reduced, meanwhile, the consumption amount of the heavy rare earth elements such as Dy and Tb is large, and the manufacturing cost of the product is increased.
The sintered and processed magnetic steel can be subjected to magnetron sputtering to permeate dysprosium/terbium on the surface of the magnetic steel, and then the dysprosium/terbium is diffused into the magnetic steel body through a grain boundary diffusion annealing process (GBDP) so as to improve the performance of the sintered NdFeB product and reduce the cost. The magnetron sputtering technology only forms dysprosium/terbium films on the surfaces of the magnetic steel bodies, diffusion is carried out by using concentration gradients, and the diffusion capacity is limited (dysprosium/terbium is only permeated into the shallow layers of the surfaces of the magnetic steel bodies, the improvement of the performance is limited, and a large amount of dysprosium/terbium sputtered to the surfaces of the magnetic steel bodies is wasted by the subsequent surface treatment process.
Disclosure of Invention
The technical problem to be solved by the invention is to provide a process method for the dysprosium terbium permeation of magnetic steel, which can realize the purpose that the dysprosium terbium is distributed more uniformly in the magnetic steel.
The invention relates to a process method for magnetic steel dysprosium terbium permeation, which comprises the following steps:
the powder for preparing the magnetic steel is subjected to magnetron sputtering, and dysprosium or terbium elements are added into the powder; and then pressing and sintering the magnetic steel powder sputtered with dysprosium or terbium elements to form the magnetic steel.
As a further improvement of the invention, the magnetron sputtering of the powder is carried out in a sputtering zone under the condition of vacuum low oxygen and high purity argon atmosphere.
As a further improvement of the invention, before magnetron sputtering, the powder is paved on a powder boat in a split charging area under the conditions of vacuum low oxygen and high purity argon atmosphere, and is transported to a sputtering area under the conditions of vacuum low oxygen and high purity argon atmosphere; and transferring the powder in the powder boat to a packaging area under the conditions of vacuum low oxygen and high purity argon after magnetron sputtering, and sealing and packaging in the packaging area under the conditions of vacuum low oxygen and high purity argon.
As a further improvement of the invention, both the sputtering source and the arc source are operated intermittently.
As a further improvement of the invention, the powder is ultrafine powder.
As a further improvement of the invention, the powder is paved on the surface of the powder boat and then enters the sputtering zone; a plurality of targets are fixedly arranged in the sputtering zone; a conveyor belt for the powder boat to move at a constant speed is arranged at the lower side of the target; the sputtering range of the target material is partially overlapped with the moving path of the powder boat; the upper end face of the powder boat bulges, and the lower end face is placed on the surface of the conveyor belt; the upper end surface of the powder boat is adhered with a plurality of mucous membranes so as to be adhered to the surface of the powder boat; the powder is uniformly adhered to the surface of the mucous membrane; the powder on at least two mucous membranes is subject to different sputtering intensity after passing through the sputtering range of the target material.
As a further improvement of the invention, the powder boat is in a long arch shape; the targets are uniformly distributed on two sides of the powder boat; the power of the targets at two sides of the powder boat is different, and the power of the targets at the same side is the same; the surface of the powder boat is divided into a strong area and a weak area; at least one mucous membrane is covered on the surfaces of the powder boats corresponding to the strong area and the weak area; the mucous membranes corresponding to the strong area and the weak area are distributed along the surface of the powder boat in sequence from the lower edge to the upper edge.
As a further improvement of the invention, the powder boat is tower-shaped; covering a plurality of mucous membranes on the surface of the powder boat; the mucous membrane is distributed along the surface of the powder boat in sequence from the lower edge to the upper edge; the targets are fixedly arranged on the upper side of the powder boat and are uniformly distributed in an arc shape in the width direction of the conveyor belt, so that the sputtering ranges of at least two targets are overlapped.
As a further improvement of the invention, the outer side of the lower edge of the powder boat is fixedly provided with hobbing teeth; the interior of the boat body of the powder boat is hollow and is provided with a supporting shaft; the upper end of the supporting shaft is rotationally connected with the top end of the inner wall of the boat body, and the upper end of the supporting shaft is fixedly connected with the upper surface of the conveying belt; racks are fixedly arranged on the edges of the conveyor belt; the rack is meshed with the gear hobbing so as to drive the boat body to rotate; the targets are fixedly arranged on the upper side of the powder boat and are uniformly distributed in an arc shape in the width direction of the conveyor belt, so that the sputtering ranges of at least two targets are overlapped.
Compared with the prior art, the invention has the beneficial effects that:
the magnetic steel obtains dysprosium or terbium elements through magnetron sputtering in the powder stage, and can be directly sintered into blocks without the steps of high-temperature smelting, hydrogen breaking, air flow grinding, powder mixing and the like, so that the process cost is saved; in addition, dysprosium or terbium is added in the powder stage, so that the penetration degree of dysprosium or terbium in the magnetic steel is deeper and more uniform, and the magnetic steel performance is improved.
In addition, the powder boat is provided with a raised upper surface, and the number of targets is a plurality, so that different areas of the surface of the powder boat are sputtered to different degrees, because the sputtering ranges of the targets are overlapped or the strength of the targets is inconsistent; on the premise, the thickness of powder sputtered on different areas of the surface of the target is different, corresponding mucous membranes are adhered on the surfaces of powder boats in different areas, and the powder with different sputtered thicknesses can be obtained after the mucous membranes are torn off, so that the powder with different performance requirements can be produced, and the powder is suitable for various different production standards and requirements.
Drawings
FIG. 1 is a schematic view of a powder sputtering apparatus according to the present invention;
FIG. 2 is a schematic view showing a structure of a powder boat on a conveyor belt according to a first embodiment of the present invention;
FIG. 3 is a schematic view showing a structure of a powder boat according to a first embodiment of the present invention;
FIG. 4 is a schematic view showing a structure of a powder boat on a conveyor belt according to a second embodiment of the present invention;
FIG. 5 is a schematic view showing the distribution of the powder boat according to the second embodiment of the present invention;
FIG. 6 is a schematic view showing a structure of a powder boat on a conveyor belt according to a third embodiment of the present invention;
FIG. 7 is a schematic view showing a structure of a powder boat according to a third embodiment of the present invention;
FIG. 8 is a schematic view showing a powder boat according to a fourth embodiment of the present invention.
The reference numerals in the figures illustrate:
conveyor belt 1, powder boat 2, boat body 21, mucous membrane 22, back shaft 23, gear hobbing 24, target 3.
Detailed Description
A process method for magnetic steel dysprosium terbium permeation comprises the following steps:
s1, preparing superfine powder from powder for preparing magnetic steel (neodymium iron boron magnetic steel in the application); it is noted that the manner of preparing the ultra-fine powder belongs to the prior art, such as mechanical method of refining powder by mechanical shearing, milling and impact, etc., and the applicant will not be described in detail herein.
S2, adding dysprosium or terbium elements into the superfine powder through magnetron sputtering; specifically, the superfine powder is placed into a vacuum sputtering box, and the structure of the vacuum sputtering box is shown in fig. 1, wherein the vacuum sputtering box comprises a shell, a powder split charging area, a to-be-sputtered area, a to-be-packaged area and a sputtered powder packaging area; the powder sub-packaging area, the to-be-sputtered area, the to-be-packaged area and the sputtered powder packaging area are sequentially arranged in the shell, a closed space is formed in the shell, a vacuum low-oxygen state is maintained, and the powder is prevented from being oxidized and damaged during treatment; the powder sub-packaging area, the area to be sputtered, the sputtering area, the area to be packaged and the area to be sputtered to be packaged are communicated, argon is filled in the powder sub-packaging area, and the argon pressure is maintained at about 0.1Pa during sputtering. Wherein, in the powder sub-packaging area, the powder is paved on a powder boat 2; in the region to be sputtered, the powder boat 2 is moved onto a conveyor belt 1 leading to the sputtering region by a 6-axis robot, and is ready to enter the sputtering region for sputtering, wherein the specific means for moving the powder boat 2 by the 6-axis robot belongs to conventional means of the person skilled in the art, and is not repeated herein; in the sputtering zone, the powder on the surface of the powder boat 2 is sputtered by a target material, specifically, a sputtering method and a connecting mode of all parts belong to conventional means of a person skilled in the art, the characteristics are not specially improved, and reference can be made to a Chinese patent No. CN201610963465.6, namely a powder particle vibration type magnetron sputtering coating method, and the description is omitted herein; in the area to be packaged, the powder boat 2 is taken off from the conveyor belt 1 by a 6-axis robot; in the powder packaging area where sputtering is finished, the powder is taken down from the surface of the powder boat 2 and is packaged in a sealing way, so that oxidation is avoided.
S3, pressing and sintering the magnetic steel powder sputtered with dysprosium or terbium elements to form the magnetic steel.
Preferably, the sputtering source and the arc source are both intermittent, and the dysprosium or terbium penetration amount is realized by the sputtering time under a specific sputtering intensity (the sputtering power per unit target area in the application is 5-10 w/cm < 2 >).
First embodiment: referring to fig. 2-3, powder is paved on the surface of the powder boat 2 and then enters a sputtering zone; a conveyor belt 1 for conveying the powder boat 2 at a constant speed is arranged in the sputtering zone. The number of the targets 3 is a plurality, and the targets 3 are symmetrically and fixedly arranged at two sides of the conveyor belt 1, the power of the targets 3 at two sides is different, but the power of the targets 3 at the same side is the same; the sputtering range of the target 3 is partially overlapped with the moving path of the powder boat 2, so that the powder boat 2 can enter the sputtering range of the target 3 and then be moved out after moving on the conveyor belt 1.
The upper end surface of the powder boat 2 is raised, in particular to be in a strip arch shape, and the lower end surface is placed on the surface of the conveyor belt 1. The surface of the powder boat 2 is divided into a strong area and a weak area; the strong area corresponds to one side target material 3 with relatively higher power; the weaker region corresponds to the side target 3 of relatively lower power. At least one mucous membrane 22 is covered on the surface of the powder boat 2 corresponding to the strong area and the weak area; in this embodiment, the strong area and the weak area are respectively symmetrical two sides of the raised surface of the powder boat 2, and the strong area and the weak area are covered with a piece of mucous membrane 22, and the front side and the back side of the mucous membrane 22 are both sticky so as to adhere to the surface of the boat body 21 of the powder boat 2 and simultaneously adhere to the powder on the surface of the powder boat. The mucosa 22 of the strong and weak areas are of the same size, material, thickness and viscosity.
Since the conveyor belt 1 is conveyed along a straight line, after the powder boat 2 passes through the sputtering area of the target 3, the sputtering intensities on two sides are different, and different degrees of sputtering on the powder can be realized.
After the powder is taken off from the mucous membrane 22, the powder in the strong area and the powder in the weak area are stored separately, and the powder with different sputtering degrees can be produced in the primary sputtering process so as to adapt to the magnetic steel with different performance requirements.
It should be noted that, the powder is evenly distributed on the mucosa 22, and in the powder split charging area, a vibration motor can be arranged to vibrate the powder boat 2 on which the powder is sprayed, so as to vibrate down the powder in multiple layers, ensure that the powder only covers one layer on the surface of the powder boat 2, and improve the uniformity of subsequent sputtering.
Specific embodiment II: unlike the first embodiment, referring to fig. 4 to 5, the powder boat 2 is tower-shaped; the surface of the powder boat 2 is surrounded and covered with a plurality of mucous membranes 22 at different heights; the mucous membranes 22 are distributed along the surface of the powder boat 2 in sequence from the lower edge to the upper edge so as to cover the surface of the Man Fenliao boat 2.
The targets 3 are fixedly arranged on the upper side of the conveyor belt 1, and the power of the targets is the same. The targets 3 are uniformly distributed in an arc shape in the width direction of the conveyor belt 1 so that the sputtering ranges of at least two targets 3 overlap.
By this arrangement, it is ensured that the powder boat 2 passing through the sputtering area of the targets 3 is sputtered by at least two targets 3 on at least one mucous membrane 22, and the sputtering thickness is thicker.
For example, as shown in fig. 4, four mucous membranes 22 on the surface of the powder boat 2 are sequentially a first mucous membrane and a second mucous membrane from top to bottom. And the third mucous membrane and the fourth mucous membrane. The targets 3 are three, namely a first target, a second target and a third target in sequence from left to right. The first mucous membrane is sputtered by the first target, the second target and the third target; the second mucous membrane is sputtered by the first target, the second target and the third target; the third mucous membrane is sputtered by the first target material and the third target material; the fourth mucous membrane is sputtered by the first target and the third target. The first mucous membrane and the second mucous membrane are of a type, and are subjected to more sputtering, and the sputtering thickness is thicker; the third and fourth mucous membranes are of the type that are subject to less sputtering and have a thinner thickness. The greater the number of mucosa 22 and targets 3, the finer the classification, which is not exemplified in this application.
In order to ensure that sputtering is not wasted, the width of the base of the powder boat 2 is set to be consistent with the surface width of the conveyor belt 1, and a plurality of powder boats 2 are abutted back and forth, so that the whole surface of the conveyor belt 1 can be covered. Preferably, the powder boat 2 is cone tower type.
Third embodiment: unlike the second embodiment, referring to fig. 6 to 7, the outer side of the lower edge of the powder boat 2 is fixedly provided with a hobbing 24; the interior of the boat body 21 of the powder boat 2 is hollow and is provided with a supporting shaft 23; the upper end of the supporting shaft 23 is rotationally connected with the top end of the inner wall of the boat body 21, and the upper end of the supporting shaft 23 is fixedly connected with the upper surface of the conveyor belt 1; racks are fixedly arranged on the edge of the conveyor belt 1; the rack is meshed with the gear hobbing 24, so that the rack is meshed with the gear hobbing 24 to drive the boat body 21 to rotate when the conveyor belt 1 is conveyed.
On the premise that the width of the powder boat 2 is smaller than the width of the sputtering range, the surface of the powder boat 2 can be sputtered more fully by the arrangement, and sputtering dead angles are avoided.
Fourth embodiment: unlike the third embodiment, referring to fig. 8, several targets 3 are disposed on two sides of the conveyor belt 1, and the adjacent targets 3 on the same side have different power. The mucous membranes 22 on the surface of the powder boat 2 are arranged along the circumferential direction, and the mucous membranes 22 are arranged from the tower to the tower bottom, namely the boundary line of two adjacent mucous membranes 22 is a generatrix of the tower surface.
In this arrangement, when the powder boat 2 rotates while moving, the control mucous membrane 22 passing through each target 3 is different, and the corresponding sputtering intensity of the powder on the adjacent mucous membrane 22 is different. Powder with various sputtering thicknesses can be obtained in one production process.
Claims (9)
1. A process method for magnetic steel dysprosium terbium infiltration is characterized by comprising the following steps: the method comprises the following steps:
the powder for preparing the magnetic steel is subjected to magnetron sputtering, and dysprosium or terbium elements are added into the powder; and then pressing and sintering the magnetic steel powder sputtered with dysprosium or terbium elements to form the magnetic steel.
2. The process of dysprosium terbium magnetic steel according to claim 1, wherein the process is characterized in that: the magnetron sputtering of the powder is carried out in a sputtering zone under the condition of vacuum low oxygen and high purity argon atmosphere.
3. The process of dysprosium terbium magnetic steel according to claim 2, wherein the process is characterized in that: before magnetron sputtering, the powder is paved on a powder boat in a split charging area under the conditions of vacuum low oxygen and high purity argon atmosphere, and is transported to a sputtering area under the conditions of vacuum low oxygen and high purity argon atmosphere; and transferring the powder in the powder boat to a packaging area under the conditions of vacuum low oxygen and high purity argon after magnetron sputtering, and sealing and packaging in the packaging area under the conditions of vacuum low oxygen and high purity argon.
4. The process of dysprosium terbium magnetic steel according to claim 1, wherein the process is characterized in that: the sputtering source and the arc source work intermittently.
5. The process of dysprosium terbium magnetic steel according to claim 1, wherein the process is characterized in that: the powder is superfine powder.
6. The process of dysprosium terbium magnetic steel according to claim 1, wherein the process is characterized in that: the powder is paved on the surface of a powder boat (2) and then enters a sputtering zone; a plurality of targets (3) are fixedly arranged in the sputtering zone; a conveyor belt (1) for the powder boat (2) to move at a uniform speed is arranged at the lower side of the target material (3); the sputtering range of the target material (3) is partially overlapped with the moving path of the powder boat (2); the upper end surface of the powder boat (2) bulges, and the lower end surface is arranged on the surface of the conveyor belt (1); the upper end surface of the powder boat (2) is adhered with a plurality of mucous membranes (22) so as to be adhered to the surface of the powder boat (2); the powder is uniformly adhered to the surface of the mucous membrane (22); the powder on at least two mucous membranes (22) is subject to different sputtering intensity after passing through the sputtering range of the target material (3).
7. The process of dysprosium terbium magnetic steel according to claim 6, wherein the process is characterized in that: the powder boat (2) is in a long arch shape; the targets (3) are uniformly distributed on two sides of the powder boat (2); the power of the targets (3) at two sides of the powder boat (2) is different, and the power of the targets (3) at the same side is the same; the surface of the powder boat (2) is divided into a strong area and a weak area; at least one mucous membrane (22) is covered on the surface of the powder boat (2) corresponding to the strong area and the weak area; the mucous membranes (22) corresponding to the strong area and the weak area are distributed along the surface of the powder boat (2) in sequence from the lower edge to the upper edge.
8. The process of dysprosium terbium magnetic steel according to claim 6, wherein the process is characterized in that: the powder boat (2) is tower-shaped; the surface of the powder boat (2) is covered with a plurality of mucous membranes (22); the mucous membrane (22) is distributed along the surface of the powder boat (2) in sequence from the lower edge to the upper edge; the targets (3) are fixedly arranged on the upper side of the powder boat (2) and are uniformly distributed in an arc shape in the width direction of the conveyor belt (1), so that the sputtering ranges of at least two targets (3) are overlapped.
9. The process of dysprosium terbium magnetic steel according to claim 8, wherein the process is characterized in that: the outer side of the lower edge of the powder boat (2) is fixedly provided with a hobbing (24); the interior of the boat body (21) of the powder boat (2) is hollow, and is provided with a supporting shaft (23); the upper end of the supporting shaft (23) is rotationally connected with the top end of the inner wall of the boat body (21), and the upper end of the supporting shaft (23) is fixedly connected with the upper surface of the conveyor belt (1); racks are fixedly arranged on the edges of the conveyor belt (1); the rack is meshed with the gear hobbing (24) to drive the boat body (21) to rotate; the targets (3) are fixedly arranged on the upper side of the powder boat (2) and are uniformly distributed in an arc shape in the width direction of the conveyor belt (1), so that the sputtering ranges of at least two targets (3) are overlapped.
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| KR20150073638A (en) * | 2013-12-23 | 2015-07-01 | 현대자동차주식회사 | A method for manufacturing permanent magnet by using sputtering powder |
| CN106133181A (en) * | 2014-02-20 | 2016-11-16 | 因特瓦克公司 | Sputtering system and method for high magnetic material |
| CN114284057A (en) * | 2022-03-08 | 2022-04-05 | 山西金山磁材有限公司 | Neodymium iron boron particle continuous composite coating device and method for regulating and controlling depth of neodymium iron boron crystal boundary |
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| JP2014063792A (en) * | 2012-09-20 | 2014-04-10 | Hitachi Metals Ltd | METHOD OF MANUFACTURING SURFACE-MODIFIED R-Fe-B-BASED SINTERED MAGNET |
| US20150099104A1 (en) * | 2013-10-09 | 2015-04-09 | Ford Global Technologies, Llc | Grain Boundary Diffusion Process For Rare-Earth Magnets |
| KR20150073638A (en) * | 2013-12-23 | 2015-07-01 | 현대자동차주식회사 | A method for manufacturing permanent magnet by using sputtering powder |
| CN106133181A (en) * | 2014-02-20 | 2016-11-16 | 因特瓦克公司 | Sputtering system and method for high magnetic material |
| CN114284057A (en) * | 2022-03-08 | 2022-04-05 | 山西金山磁材有限公司 | Neodymium iron boron particle continuous composite coating device and method for regulating and controlling depth of neodymium iron boron crystal boundary |
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