CN117839958A - Perovskite coating device - Google Patents

Perovskite coating device Download PDF

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Publication number
CN117839958A
CN117839958A CN202311736190.9A CN202311736190A CN117839958A CN 117839958 A CN117839958 A CN 117839958A CN 202311736190 A CN202311736190 A CN 202311736190A CN 117839958 A CN117839958 A CN 117839958A
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CN
China
Prior art keywords
track
magnetic attraction
air bearing
coating
rail
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202311736190.9A
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Chinese (zh)
Inventor
请求不公布姓名
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangsu Hydrogen Guide Intelligent Equipment Co ltd
Original Assignee
Jiangsu Hydrogen Guide Intelligent Equipment Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jiangsu Hydrogen Guide Intelligent Equipment Co ltd filed Critical Jiangsu Hydrogen Guide Intelligent Equipment Co ltd
Priority to CN202311736190.9A priority Critical patent/CN117839958A/en
Publication of CN117839958A publication Critical patent/CN117839958A/en
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0208—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • B05B15/50—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1039—Recovery of excess liquid or other fluent material; Controlling means therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00—Means for manipulating or holding work, e.g. for separate articles
    • B05C13/02—Means for manipulating or holding work, e.g. for separate articles for particular articles
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/549—Organic PV cells

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  • Coating Apparatus (AREA)

Abstract

The present invention relates to a perovskite coating apparatus. The perovskite coating apparatus includes: the base assembly comprises a platform base and a first rail and a second rail which are both arranged on the platform base, wherein the first rail and the second rail are parallel; the motion assembly comprises two lifting mechanisms and a cross beam, wherein the two lifting mechanisms are respectively arranged on the first rail and the second rail, two ends of the cross beam are respectively arranged on the two lifting mechanisms, the two lifting mechanisms can move along the first rail and the second rail respectively, and the two lifting mechanisms can jointly drive the cross beam to lift in a controlled manner; the adsorption plate is arranged on the platform base and positioned between the first track and the second track, and is used for adsorbing and fixing a substrate to be coated; and the coating die head is arranged on the cross beam and used for coating the substrate on the adsorption plate in the process of moving along with the cross beam.

Description

Perovskite coating device
Technical Field
The invention relates to the technical field of perovskite coating, in particular to a perovskite coating device.
Background
The solar energy source is rich, the environment is protected, no pollution is caused, and the solar energy source is one of new energy sources which are hopeful to be applied in a large scale in the future. In the field of novel solar cells, rapid development of perovskite solar cells in recent years has received wide attention from the scientific research and industry. In the process of preparing the perovskite solar cell, perovskite slurry needs to be coated on a substrate (such as glass), and the coating process has high precision requirement on a coating device because of large coating breadth, thin coating and low viscosity of the slurry. However, the accuracy of the coating device in the prior art cannot meet the process requirements of perovskite coating.
Disclosure of Invention
In view of the above, it is necessary to provide a perovskite coating apparatus which can improve the above-mentioned defects, in order to solve the problem that the accuracy of the conventional coating apparatus cannot meet the process requirements for perovskite coating.
A perovskite coating apparatus comprising:
the base assembly comprises a platform base, a first track and a second track, wherein the first track and the second track are arranged on the platform base, and the first track and the second track are parallel;
the motion assembly comprises two lifting mechanisms and a cross beam, wherein the two lifting mechanisms are respectively arranged on the first rail and the second rail, two ends of the cross beam are respectively arranged on the two lifting mechanisms, the two lifting mechanisms are respectively movable along the first rail and the second rail, and the two lifting mechanisms can jointly drive the cross beam to lift in a controlled manner;
the adsorption plate is arranged on the platform base and positioned between the first track and the second track, and is used for adsorbing and fixing a substrate to be coated; and
And the coating die head is arranged on the cross beam and is used for coating the substrate on the adsorption plate in the process of following the movement of the cross beam.
In one embodiment, each lifting mechanism comprises a base and a lifting seat, wherein the base is arranged on the first track or the second track, and the lifting seat is connected to the base in a lifting manner;
and two ends of the cross beam are hinged with the lifting seats of the two lifting mechanisms respectively.
In one embodiment, the perovskite coating apparatus further comprises a wiping mechanism disposed on the platform base, the wiping mechanism being disposed on a moving path along which the coating die moves along the first rail and the second rail, the wiping mechanism being for wiping the coating die passing by.
In one embodiment, the perovskite coating apparatus further comprises a pre-coating mechanism disposed on the platform base, the pre-coating mechanism being disposed on a path of movement of the coating die along the first and second tracks;
the coating die is capable of pre-coating on the pre-coating mechanism as the coating die moves to the pre-coating mechanism.
In one embodiment, the perovskite coating apparatus further comprises a collection mechanism disposed on the platform base, the collection mechanism being disposed on a path of movement of the coating die along the first and second tracks;
the collecting mechanism is used for collecting the coating liquid sprayed by the coating die head when the coating die head moves to the collecting mechanism.
In one embodiment, the perovskite coating apparatus further comprises a material ejection assembly, wherein the material ejection assembly comprises a plurality of material ejection rods, each material ejection rod is arranged through the platform base and the adsorption plate, and controllably penetrates out of one side surface of the adsorption plate away from the platform base.
In one embodiment, the motion assembly further comprises a first air bearing and a second air bearing, and the first air bearing and the second air bearing are respectively installed on the two lifting mechanisms;
the first air bearing is positioned between the first track and the corresponding lifting mechanism, is used for forming an air film between the first air bearing and the first track, and bears first air buoyancy for supporting the corresponding lifting mechanism on the first track; the second air bearing is positioned between the second track and the corresponding lifting mechanism, and is used for forming an air film between the second air bearing and the second track and bearing a second air buoyancy force for supporting the corresponding lifting mechanism on the second track.
In one embodiment, the motion assembly further comprises a first magnetic attraction unit, the first magnetic attraction unit comprises a first magnetic attraction piece and a first magnetic attraction matching piece, the first magnetic attraction piece is installed on the lifting mechanism provided with the first air bearing, the first magnetic attraction matching piece is installed on the platform base, and the first magnetic attraction piece and the first magnetic attraction matching piece generate magnetic attraction action so that the first magnetic attraction piece bears a first magnetic attraction force opposite to the direction of the first air bearing.
In one embodiment, the motion assembly further comprises a second magnetic attraction unit, the second magnetic attraction unit comprises a second magnetic attraction piece and a second magnetic attraction matching piece, the second magnetic attraction piece is installed on the lifting mechanism provided with the second air bearing, the second magnetic attraction matching piece is installed on the platform base, and the second magnetic attraction piece and the second magnetic attraction matching piece generate a magnetic attraction effect so that the second magnetic attraction piece bears a second magnetic attraction force opposite to the direction of the second air bearing.
In one embodiment, the motion assembly further comprises a third air bearing mounted on the lifting mechanism provided with the first air bearing, and a fourth air bearing mounted on the lifting mechanism provided with the second air bearing;
the third air bearing is positioned on one side of the first track facing the second track, is used for generating an air film between the third air bearing and the first track, and bears third air buoyancy force directed to the second track by the first track; the fourth air bearing is positioned on one side of the second track facing the first track, and is used for forming an air film between the fourth air bearing and the second track and bearing fourth air buoyancy force directed to the first track by the second track.
In one embodiment, the moving assembly further comprises a moving part and a pre-tightening elastic part, the moving part is movably connected to the lifting mechanism provided with the first air bearing, the third air bearing is installed on the moving part, and the pre-tightening elastic part is abutted between the moving part and the corresponding lifting mechanism and used for providing a pre-tightening force for enabling the moving part to have a movement trend of driving the third air bearing to move close to the first track.
In practical use, the perovskite coating device firstly loads the substrate to be coated onto the adsorption plate, and the adsorption plate is utilized to adsorb and fix the substrate. And then, the cross beam is driven to descend by the two lifting mechanisms together until the distance between the coating die head and the substrate on the adsorption plate meets the process requirement, and a stable liquid bridge is formed between the coating die head and the substrate. And then, the two lifting mechanisms are controlled to move along the first track and the second track which are parallel to each other respectively, so that the coating die head on the cross beam is driven to translate, and the coating die head coats the substrate on the adsorption plate. After coating is completed, the coating die head stops liquid discharge, and the beam is driven to ascend by the two lifting mechanisms together, so that the coating die head is far away from the substrate. The two lifting mechanisms are controlled to move along the first track and the second track which are parallel to each other respectively until the coating die head is driven to return to the initial position so as to prepare for the next coating. Then, the adsorption plate stops adsorbing the substrate, and the coated substrate is discharged from the adsorption plate.
So, adopt the mode that platform base is static, coating die head removes in this application, realize coating die head and base plate relative motion, and then realize the coating to the base plate, avoided needing to drive comparatively heavy platform base motion, only need drive comparatively light and handy coating die head motion, be favorable to the miniaturization of device, ensure that the velocity of movement and the motion precision of coating die head are better, the technological requirement of meeting perovskite coating that can be better.
Drawings
FIG. 1 is a schematic diagram of a perovskite coating apparatus according to an embodiment of the invention;
FIG. 2 is a cross-sectional view of the perovskite coating apparatus shown in FIG. 1 taken along the A-A direction;
FIG. 3 is an enlarged view of a portion of the perovskite coating apparatus shown in FIG. 1 at a first trajectory;
FIG. 4 is an enlarged view of a portion of the perovskite coating apparatus shown in FIG. 1 at a second trajectory;
fig. 5 is a cross-sectional view of the perovskite coating apparatus shown in fig. 1 along the B-B direction.
Detailed Description
In order that the above objects, features and advantages of the invention will be readily understood, a more particular description of the invention will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. The present invention may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the invention, whereby the invention is not limited to the specific embodiments disclosed below.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present invention, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.
In the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
In the present invention, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.
It will be understood that when an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like are used herein for illustrative purposes only and are not meant to be the only embodiment.
Referring to fig. 1, an embodiment of the present invention provides a perovskite coating apparatus, which includes a base assembly 10, a moving assembly 20, an adsorption plate 30 and a coating die 40.
The base assembly 10 includes a platform base 11, and a first rail 12 and a second rail 13, both disposed on the platform base 11. The first track 12 and the second track 13 are parallel. The moving assembly 20 comprises two lifting mechanisms 21 and a cross beam 22. Two lifting mechanisms 21 are respectively arranged on the first rail 12 and the second rail 13, and two ends of a cross beam 22 are respectively arranged on the two lifting mechanisms 21. The two lifting mechanisms 21 are movable along the first rail 12 and the second rail 13, respectively, so as to drive the cross beam 22 to move along the first rail 12 and the second rail 13. Two lifting mechanisms 21 can jointly drive the cross beam 22 to lift in a controlled manner. The adsorption plate 30 is disposed on the platform base 11 between the first rail 12 and the second rail 13. The adsorption plate 30 is used for adsorbing and fixing a substrate to be coated. A coating die 40 is provided on the cross member 22 for coating the substrate on the suction plate 30 while following the movement of the cross member 22.
In practical use, the perovskite coating apparatus described above first loads a substrate to be coated onto the adsorption plate 30, and adsorbs and fixes the substrate by the adsorption plate 30. Then, the beam 22 is driven to descend by the two lifting mechanisms 21 together until the distance between the coating die 40 and the substrate on the adsorption plate 30 meets the process requirements, and a stable liquid bridge is formed between the coating die 40 and the substrate. Then, the two lifting mechanisms 21 are controlled to respectively move along the first rail 12 and the second rail 13 which are parallel to each other, so that the coating die 40 on the cross beam 22 is driven to translate, and the coating die 40 coats the substrate on the adsorption plate 30. After coating is completed, the coating die 40 stops discharging liquid, and the beam 22 is driven to ascend by the two lifting mechanisms 21 together, so that the coating die 40 is far away from the substrate. The two lifting mechanisms 21 are controlled to move along the first rail 12 and the second rail 13 which are parallel to each other until the coating die 40 is driven to return to the initial position so as to prepare for the next coating. Then, the adsorption plate 30 stops adsorbing the substrate, and the coated substrate is discharged from the adsorption plate 30.
It should be noted that, in the prior art, a mode of static coating die head and moving platform base is adopted to realize the relative motion of the coating die head and the substrate, so as to realize the coating of the substrate. On the one hand, the size of the platform base is larger due to the large coating width; on the other hand, in order to improve the size precision and deformation resistance of the platform base, the platform base and the track are made of granite or marble, and the volume and the weight of the platform base are large, so that a driving mechanism with large specification is required to drive, the volume of the device is large, the movement speed and the movement precision of the platform base are low, and the process requirements of perovskite coating cannot be met.
So, adopt the mode that platform base 11 is static, coating die 40 removes in this application, realize coating die 40 and base plate relative motion, and then realize the coating to the base plate, avoided needing to drive comparatively heavy platform base 11 motion, only need drive comparatively light and handy coating die 40 motion, be favorable to the miniaturization of device's volume, ensure that the velocity of movement and the motion precision of coating die 40 are better, the technological requirement of meeting perovskite coating that can be better.
In particular, in the embodiment, each lifting mechanism 21 includes a base 211 disposed on the first rail 12 or the second rail 13, and a lifting base 212 liftably connected to the base 211. Both ends of the cross beam 22 are hinged with the lifting seats 212 of the two lifting mechanisms 21 respectively. In this way, the bases 211 of the two lifting mechanisms 21 can drive the cross beam 22 and the coating die 40 on the cross beam 22 to translate when moving along the first rail 12 and the second rail 13 respectively. When the lifting seats 212 of the two lifting mechanisms 21 are lifted, the cross beam 22 and the coating die head 40 on the cross beam 22 can be driven to lift. When the parallelism of the coating die head 40 and the adsorption plate 30 does not meet the process requirement, the lifting seats 212 of the two lifting mechanisms 21 are controlled to perform asynchronous lifting movement, so that the angle of the cross beam 22 can be adjusted (as the two ends of the cross beam 22 are respectively hinged with the two lifting seats 212) until the parallelism of the coating die head 40 and the adsorption plate 30 meets the process requirement.
Further, each lifting mechanism 21 further includes a first driving member 213, a screw 214, and a screw nut 215. The screw 214 is rotatably connected to the base 211, and an axial direction of the screw 214 is parallel to a vertical direction. The first driving member 213 is disposed on the base 211 and is in driving connection with the screw 214 to drive the screw 214 to rotate. The screw nut 215 is screwed on the screw 214 and is fixedly connected with the lifting seat 212, so that the screw nut 215 can be driven to ascend or descend when the screw 214 rotates, and the screw nut 215 can further drive the lifting seat 212 to ascend or descend. Alternatively, the first driving member 213 may employ a motor.
Referring to fig. 2, in the embodiment of the present application, the perovskite coating apparatus further includes a pre-coating mechanism 50 provided on the stage base 11. The pre-coating mechanism 50 is disposed on a moving path along which the coating die 40 moves along the first rail 12 and the second rail 13.
When the two lifting mechanisms 21 move along the first rail 12 and the second rail 13 and drive the coating die head 40 to move to the pre-coating mechanism 50, the coating die head 40 can perform pre-coating on the pre-coating mechanism 50. Thus, before coating the substrate, the two lifting mechanisms 21 move along the first rail 12 and the second rail 13 until the coating die 40 is driven to move to the pre-coating mechanism 50, and the coating die 40 coats (i.e., performs pre-coating) on the pre-coating mechanism 50. After the thickness of the coating meets the process requirement, the two lifting mechanisms 21 move along the first rail 12 and the second rail 13 to drive the coating die head 40 to move to the substrate, so that the substrate is coated.
In particular embodiments, the perovskite coating apparatus further includes a wiping mechanism 70 disposed on the platform base 11. The wiping mechanism 70 is arranged on a moving path along which the coating die 40 moves along the first rail 12 and the second rail 13. When the two lifting mechanisms 21 move along the first rail 12 and the second rail 13 and drive the coating die 40 to move to the wiping mechanism 70, the wiping mechanism 70 wipes the coating die 40 to avoid residual coating liquid on the coating die 40.
In particular embodiments, the perovskite coating apparatus further includes a collection mechanism 60 disposed on the platform base 11. The collecting mechanism 60 is arranged on a moving path along which the coating die 40 moves along the first rail 12 and the second rail 13. The collecting mechanism 60 serves to collect the coating liquid ejected from the coating die 40 when the coating die 40 moves to the collecting mechanism 60. Thus, when the coating liquid is failed, the two lifting mechanisms 21 move along the first rail 12 and the second rail 13 and drive the coating die 40 to move to the collecting mechanism 60, and at this time, the coating die 40 ejects the failed coating liquid to the collecting mechanism 60 for collection.
In particular embodiments, the perovskite coating apparatus further includes a liftout assembly including a plurality of liftout bars 80. Each ejector rod 80 is disposed through the platform base 11 and the adsorption plate 30, and controllably penetrates out of a side surface of the adsorption plate 30 facing away from the platform base 11.
Thus, when the substrate needs to be fed onto the adsorption plate 30, first, the ejector pins 80 are controlled to penetrate through the adsorption plate 30 to a certain height from the surface of one side of the platform base 11. Then, the substrate is fed onto each of the ejector pins 80. Then, each of the ejector pins 80 is controlled to retract into the suction plate 30 so that the substrate is supported on the suction plate 30. Finally, the adsorption plate 30 is controlled to adsorb the substrate thereon, so that the substrate is adsorbed and fixed on a side surface of the adsorption plate 30 facing away from the stage base 11.
When the substrate on the adsorption plate 30 needs to be fed, first, the adsorption plate 30 is controlled to stop adsorbing the substrate. Then, each of the ejector pins 80 is controlled to penetrate through the suction plate 30 at a certain height away from the surface of one side of the platform base 11, so that the ejector pins 80 lift the substrate together. Then, the substrates on the respective ejector pins 80 are transferred, thereby discharging the substrates.
Further, the ejector assembly further comprises a jacking seat and a jacking driving member, and one end of each ejector rod 80, which is away from the adsorption plate 30, is connected with the jacking seat. The driving end of the jacking driving piece is connected with the jacking seat, so that the jacking driving piece can drive the jacking seat to move, and the jacking seat drives each jacking rod 80 to penetrate out of one side surface of the adsorption plate 30, which is away from the platform base 11, or retract into the adsorption plate 30. Alternatively, the lift drive may employ an air cylinder.
In particular, in the embodiment, the base assembly 10 further includes a frame 14, and the platform base 11 is disposed on the frame 14, so that the frame 14 supports the platform base 11 and other components. Further, the jack is movably connected to the frame 14 in a vertical direction, and the jack driving member is also mounted to the frame 14.
Referring to fig. 3 and 4, in the embodiment of the present application, the motion assembly 20 further includes a first air bearing 23a and a second air bearing 23b. The first air bearing 23a and the second air bearing 23b are respectively mounted on the two lifting mechanisms 21. The first air bearing 23a is located between the first rail 12 and the corresponding lifting mechanism 21. The first air bearing 23a is configured to form an air film between the first air bearing 23a and the first rail 12, and to receive a first air buoyancy force for supporting the corresponding lifting mechanism 21 on the first rail 12. The second air bearing 23b is located between the second rail 13 and the corresponding lifting mechanism 21, and the second air bearing 23b is configured to form an air film between the second air bearing 23b and the second rail 13 and to bear a second air buoyancy force that supports the corresponding lifting mechanism 21 on the second rail 13. That is, the lifting mechanism 21 provided with the first air bearing 23a is supported on the first rail 12 by the first air buoyancy generated by the first air bearing 23a, and the lifting mechanism 21 provided with the second air bearing 23b is supported on the second rail 13 by the second air buoyancy generated by the second air bearing 23b.
In particular to the embodiment, the motion assembly 20 further includes a first magnetic attraction unit 24a, and the first magnetic attraction unit 24a includes a first magnetic attraction piece 241 and a first magnetic attraction mating piece 242. The first magnetic attraction piece 241 is mounted on the lifting mechanism 21 provided with the first air bearing 23a, and the first magnetic attraction mating piece 242 is mounted on the platform base 11. The first magnetic attraction piece 241 and the first magnetic attraction matching piece 242 generate magnetic attraction, so that the first magnetic attraction piece 241 bears a first magnetic attraction force opposite to the direction of the first air floatation force. In this way, the first magnetic attraction piece 241 and the first magnetic attraction matching piece 242 are utilized to generate a first magnetic attraction force opposite to the first air buoyancy force on the first magnetic attraction piece 241, so that the lifting mechanism 21 provided with the first air bearing 23a is tensioned towards the first track 12 under the action of the first magnetic attraction force, the air mould between the first air bearing 23a and the first track 12 is tensioned, the air film rigidity is greatly improved, and the impact resistance is further improved.
Compared with the scheme adopting the linear guide rail in the prior art, on one hand, the first air bearing 23a is not contacted with the first rail 12, and the first magnetic attraction piece 241 is not contacted with the first magnetic attraction matching piece 242, so that external vibration is prevented from being transmitted to the lifting mechanism 21 from the platform base 11; on the other hand, when the lifting mechanism 21 moves along the first rail 12, the process of converting static friction into dynamic friction does not exist, so that no impact is generated on the movement of the lifting mechanism 21 along the first rail 12; on the other hand, by utilizing the magnetic attraction effect between the first magnetic attraction piece 241 and the first magnetic attraction matching piece 242, the air film between the first air bearing 23a and the first track 12 is tensioned, so that the rigidity of the air film is greatly improved, the impact resistance of the lifting mechanism 21 is greatly improved, the moving precision of the lifting mechanism 21 along the first track 12 is ensured to be better, and the stability of a liquid bridge between the coating die head 40 and a substrate is facilitated to be kept when coating is carried out, so that the coating quality is improved.
Further, the first magnetic attraction unit 24a includes at least two sets, and each set of the first magnetic attraction unit 24a includes a first magnetic attraction piece 241 and a first magnetic attraction mating piece 242 that generate magnetic attraction effect with each other. At least one set of first magnetic attraction units 24a are arranged on both sides of the first track 12. In this way, the first magnetic attraction force for pulling the corresponding lifting mechanism 21 to the first track 12 is generated on both sides of the first track 12, so that on one hand, the tensioning of the lifting mechanism 21 is enhanced, and the air film between the first air bearing 23a and the first track 12 is more rigid; on the other hand, the corresponding lifting mechanism 21 is more stable in stress, and can be supported on the first rail 12 more stably, so that rollover is avoided.
In particular, in the embodiment, the first magnetic matching piece 242 extends along the longitudinal direction of the first rail 12, so that in the process that the first magnetic matching piece 241 follows the corresponding lifting mechanism 21 to move along the first rail 12, magnetic attraction can be kept between the first magnetic matching piece 242 and the corresponding lifting mechanism 21, that is, the corresponding lifting mechanism 21 is always kept to be pulled tightly towards the first rail 12, and stable operation of the corresponding lifting mechanism 21 is ensured. Alternatively, the first magnetic attraction piece 241 may be a magnet and the first magnetic attraction mating piece 242 may be an iron plate.
In particular to the embodiment, the kinematic assembly 20 further includes a second magnetic attraction unit 24b, the second magnetic attraction unit 24b including a second magnetic attraction member 243 and a second magnetic attraction mating member 244. The second magnetic attraction member 243 is mounted on the elevating mechanism 21 provided with the second air bearing 23b, and the second magnetic attraction mating member 244 is mounted on the platform base 11. The second magnetic attraction member 243 and the second magnetic attraction mating member 244 generate a magnetic attraction effect, so that the second magnetic attraction member 243 bears a second magnetic attraction force opposite to the direction of the second air floatation force. In this way, the second magnetic attraction piece 243 and the second magnetic attraction matching piece 244 are utilized to generate a second magnetic attraction force opposite to the second air buoyancy force on the second magnetic attraction piece 243, so that the lifting mechanism 21 provided with the second air bearing 23b is tensioned towards the second track 13 under the action of the second magnetic attraction force, the air model between the second air bearing 23b and the second track 13 is tensioned, the air film rigidity is greatly improved, and the impact resistance is further improved.
Further, the second magnetic attraction unit 24b includes at least two sets, and each set of the second magnetic attraction unit 24b includes a second magnetic attraction member 243 and a second magnetic attraction mating member 244 that generate magnetic attraction effects with each other. At least one set of second magnetic attraction units 24b are arranged on both sides of the second track 13. In this way, the second magnetic attraction force for pulling the corresponding lifting mechanism 21 to the second track 13 is generated on both sides of the second track 13, so that on one hand, the tensioning of the lifting mechanism 21 is enhanced, and the air film between the second air bearing 23b and the second track 13 is more rigid; on the other hand, the corresponding lifting mechanism 21 is enabled to be more stable in stress, and can be supported on the second rail 13 more stably, so that rollover is avoided.
In particular, in the embodiment, the second magnetic engaging member 244 extends along the longitudinal direction of the second rail 13, so that in the process that the second magnetic engaging member 243 follows the corresponding lifting mechanism 21 to move along the second rail 13, a magnetic action can be kept between the second magnetic engaging member 244 and the second magnetic engaging member 244 all the time, that is, the corresponding lifting mechanism 21 is kept taut towards the second rail 13 all the time, and smooth operation of the corresponding lifting mechanism 21 is ensured. Alternatively, the second magnetic attraction piece 243 may be a magnet and the second magnetic attraction mating piece 244 may be an iron plate.
Alternatively, the number of the first air bearing 23a is at least two, and the at least two first air bearings 23a are arranged at intervals along the longitudinal extending direction of the first rail 12.
Alternatively, the number of the second air bearing 23b is at least two, and the at least two second air bearings 23b are arranged at intervals along the lengthwise extending direction of the second rail 13.
In particular to the embodiment, the perovskite coating apparatus further includes a second driving member 28a, and the second driving member 28a is installed between the lifting mechanism 21 provided with the first air bearing 23a and the first rail 12, for driving the lifting mechanism 21 to move along the first rail 12. Alternatively, the second driving member 28a is a linear motor, the stator 281 of the second driving member 28a is mounted on the first rail 12, and the mover 282 of the first driving member 213 is mounted on the elevating mechanism 21.
In particular to the embodiment, the perovskite coating apparatus further comprises a third driving member 28b, and the third driving member 28b is installed between the lifting mechanism 21 provided with the second air bearing 23b and the second rail 13, and is used for driving the lifting mechanism 21 to move along the second rail 13. In this way, the second driving member 28a and the third driving member 28b are utilized to synchronously drive the two lifting mechanisms 21 to respectively move along the first rail 12 and the second rail 13, so that the translation of the beam 22 and the coating die 40 on the beam 22 is smoother. Alternatively, the third driving member 28b is a linear motor, the stator 283 of the third driving member 28b is mounted on the second rail 13, and the mover 284 of the third driving member 28b is mounted on the elevating mechanism 21.
In the embodiment of the present application, the motion assembly 20 further includes a third air bearing 25a and a fourth air bearing 25b respectively mounted on the two lifting mechanisms 21. The third air bearing 25a is located at a side of the first rail 12 facing the second rail 13, and the third air bearing 25a is configured to generate an air film between the third air bearing 25a and the first rail 12 and to receive a third air buoyancy force directed from the first rail 12 to the second rail 13. The fourth air bearing 25b is located at a side of the second rail 13 facing the first rail 12, and the fourth air bearing 25b is configured to form an air film between the fourth air bearing 25b and the second rail 13 and to bear a fourth air buoyancy force directed from the second rail 13 to the first rail 12.
As such, the third air buoyancy generated by the third air bearing 25a causes the lifting mechanism 21 provided with the first air bearing 23a and the third air bearing 25a to have a movement tendency from the first rail 12 to the second rail 13, thereby tightening the air film between the fourth air bearing 25b and the side surface of the second rail 13 to enhance the air film rigidity. Similarly, the fourth air buoyancy generated by the fourth air bearing 25b enables the lifting mechanism 21 provided with the second air bearing 23b and the fourth air bearing 25b to have a movement trend from the second rail 13 to the first rail 12, so that an air film between the third air bearing 25a and the side surface of the first rail 12 is tensioned, the air film rigidity is enhanced, and the whole formed by the two lifting mechanisms 21 and the cross beam 22 is bound between the first rail 12 and the second rail 13 under the combined action of the third air bearing 25a and the fourth air bearing 25b, so that the two lifting mechanisms 21, the cross beam 22 and the coating die head 40 on the cross beam 22 can translate along the first rail 12 and the second rail 13 more stably.
It will be appreciated that, during the coating operation, the third air buoyancy force and the fourth air buoyancy force are equal and opposite in direction, so that the whole of the two lifting mechanisms 21, the cross beam 22 and the coating die 40 on the cross beam 22 is in a state of being stressed in the left-right direction.
Referring to fig. 3 to 5, further, the moving assembly 20 further includes a movable member 26 and a pre-tightening elastic member 27. The movable member 26 is movably connected to the elevating mechanism 21 provided with a first air bearing 23a, and a third air bearing 25a is mounted on the movable member 26. The pre-tightening elastic piece 27 is abutted between the movable piece 26 and the corresponding lifting mechanism 21, and is used for providing a pre-tightening force for enabling the movable piece 26 to have a movement trend of driving the third air bearing 25a to move close to the first track 12.
In this way, the third air bearing 25a is pressed against the first track 12 by the elastic force generated by compressing the pre-tightening elastic member 27, so that the air film between the third air bearing 25a and the first track 12 is more rigid; on the other hand, the whole formed by the two lifting mechanisms 21 and the cross beam 22 is pressed against the second track 13, so that the air film between the fourth air bearing 25b and the second track 13 is stronger in rigidity, the shock resistance is further enhanced, and the movement precision of the whole formed by the two lifting mechanisms 21 and the cross beam 22 for driving the coating die head 40 to move along the first track 12 and the second track 13 is improved, so that the coating quality is improved.
It should be noted that, because of processing errors, assembly errors, thermal expansion and contraction of the first rail 12, the second rail 13, the lifting mechanism 21, the cross beam 22, etc., or because of poor synchronicity of the second driving member 28a and the third driving member 28b, when the movement of the coating die 40 deviates, the pre-tightening elastic member 27 can adaptively perform expansion and contraction adjustment to compensate the movement deviation of the coating die 40, thereby greatly reducing the movement deviation of the coating die 40, improving the movement precision of the coating die 40, and further improving the coating quality.
Specifically, the lifting mechanism 21 provided with the first air bearing 23a is provided with a mounting hole (not shown), and a guide sleeve (not shown) is sleeved in the mounting hole. The movable member 26 is disposed through the guide sleeve, and the movable member 26 is slidably engaged with the guide sleeve, so that the movable member 26 can move along the guide sleeve, and the third air bearing 25a is driven to approach or separate from the first track 12.
Referring to fig. 5, optionally, the number of third air bearings 25a is at least two, and the at least two third air bearings 25a are spaced apart along the longitudinal extension direction of the first track 12. Specifically, the number of third air bearing 25a is two.
Optionally, the number of the fourth air bearing 25b is at least two, and the at least two fourth air bearings 25b are arranged at intervals along the longitudinal extension direction of the second track 13. Specifically, the number of fourth air bearing 25b is two.
The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The above examples illustrate only a few embodiments of the invention, which are described in detail and are not to be construed as limiting the scope of the invention. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention. Accordingly, the scope of protection of the present invention is to be determined by the appended claims.

Claims (11)

1. A perovskite coating apparatus, comprising:
the base assembly comprises a platform base, a first track and a second track, wherein the first track and the second track are arranged on the platform base, and the first track and the second track are parallel;
the motion assembly comprises two lifting mechanisms and a cross beam, wherein the two lifting mechanisms are respectively arranged on the first rail and the second rail, two ends of the cross beam are respectively arranged on the two lifting mechanisms, the two lifting mechanisms are respectively movable along the first rail and the second rail, and the two lifting mechanisms can jointly drive the cross beam to lift in a controlled manner;
the adsorption plate is arranged on the platform base and positioned between the first track and the second track, and is used for adsorbing and fixing a substrate to be coated; and
And the coating die head is arranged on the cross beam and is used for coating the substrate on the adsorption plate in the process of following the movement of the cross beam.
2. The perovskite coating apparatus of claim 1, wherein each of the elevating mechanisms comprises a base disposed on the first rail or the second rail and an elevating seat liftably connected to the base;
and two ends of the cross beam are hinged with the lifting seats of the two lifting mechanisms respectively.
3. The perovskite coating apparatus of claim 1, further comprising a wiping mechanism disposed on the platform base, the wiping mechanism being disposed in a path of movement of the coating die along the first and second rails, the wiping mechanism for wiping the coating die routed.
4. The perovskite coating apparatus of claim 1, further comprising a pre-coating mechanism disposed on the platform base, the pre-coating mechanism disposed on a path of movement of the coating die along the first and second trajectories;
the coating die is capable of pre-coating on the pre-coating mechanism as the coating die moves to the pre-coating mechanism.
5. The perovskite coating apparatus of claim 1, further comprising a collection mechanism disposed on the platform base, the collection mechanism disposed on a path of movement of the coating die along the first and second trajectories;
the collecting mechanism is used for collecting the coating liquid sprayed by the coating die head when the coating die head moves to the collecting mechanism.
6. The perovskite coating apparatus of claim 1, further comprising a liftout assembly comprising a plurality of liftout bars, each of the liftout bars disposed through the platform base and the adsorption plate and controllably extending out of a side surface of the adsorption plate facing away from the platform base.
7. The perovskite coating apparatus of any one of claims 1 to 6, wherein the motion assembly further comprises a first air bearing and a second air bearing, the first air bearing and the second air bearing being mounted on two of the lift mechanisms, respectively;
the first air bearing is positioned between the first track and the corresponding lifting mechanism, is used for forming an air film between the first air bearing and the first track, and bears first air buoyancy for supporting the corresponding lifting mechanism on the first track; the second air bearing is positioned between the second track and the corresponding lifting mechanism, and is used for forming an air film between the second air bearing and the second track and bearing a second air buoyancy force for supporting the corresponding lifting mechanism on the second track.
8. The perovskite coating apparatus of claim 7, wherein the motion assembly further comprises a first magnetic attraction unit comprising a first magnetic attraction piece and a first magnetic attraction mating piece, the first magnetic attraction piece being mounted on the lifting mechanism provided with the first air bearing, the first magnetic attraction mating piece being mounted on the platform base, the first magnetic attraction piece and the first magnetic attraction mating piece generating a magnetic attraction effect such that the first magnetic attraction piece is subjected to a first magnetic attraction force opposite to the direction of the first air force.
9. The perovskite coating apparatus of claim 7, wherein the motion assembly further comprises a second magnetic attraction unit comprising a second magnetic attraction piece and a second magnetic attraction mating piece, the second magnetic attraction piece being mounted on the lifting mechanism provided with the second air bearing, the second magnetic attraction mating piece being mounted on the platform base, the second magnetic attraction piece and the second magnetic attraction mating piece generating a magnetic attraction effect such that the second magnetic attraction piece is subjected to a second magnetic attraction force in a direction opposite to the second air bearing direction.
10. The perovskite coating apparatus of claim 7, wherein the motion assembly further comprises a third air bearing mounted on the lift mechanism provided with the first air bearing, and a fourth air bearing mounted on the lift mechanism provided with the second air bearing;
the third air bearing is positioned on one side of the first track facing the second track, is used for generating an air film between the third air bearing and the first track, and bears third air buoyancy force directed to the second track by the first track; the fourth air bearing is positioned on one side of the second track facing the first track, and is used for forming an air film between the fourth air bearing and the second track and bearing fourth air buoyancy force directed to the first track by the second track.
11. The perovskite coating apparatus of claim 10, wherein the moving assembly further comprises a movable member and a pre-tightening elastic member, the movable member is movably connected to the lifting mechanism provided with the first air bearing, the third air bearing is mounted on the movable member, and the pre-tightening elastic member is abutted between the movable member and the corresponding lifting mechanism, so as to provide a pre-tightening force for enabling the movable member to have a movement trend of driving the third air bearing to move close to the first track.
CN202311736190.9A 2023-12-18 2023-12-18 Perovskite coating device Pending CN117839958A (en)

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Application Number Priority Date Filing Date Title
CN202311736190.9A CN117839958A (en) 2023-12-18 2023-12-18 Perovskite coating device

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Application Number Priority Date Filing Date Title
CN202311736190.9A CN117839958A (en) 2023-12-18 2023-12-18 Perovskite coating device

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CN117839958A true CN117839958A (en) 2024-04-09

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118649841A (en) * 2024-08-16 2024-09-17 德沪涂膜设备(苏州)有限公司 Coating equipment and coating method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118649841A (en) * 2024-08-16 2024-09-17 德沪涂膜设备(苏州)有限公司 Coating equipment and coating method

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