CN117833014A - Cooling device of high-power blue light semiconductor laser with flow self-adaptive control - Google Patents

Abstract

The invention discloses a cooling device of a high-power blue light semiconductor laser with flow self-adaptive control. The device comprises: the temperature sensor is connected with the light source unit, the water-cooling base is tightly arranged on the back surface of the light source unit, the flow rate sensor is connected with the water-cooling base, and the flow rate control terminal is connected with the temperature sensor and the flow rate sensor; the water-cooling base comprises an incidence layer and an emergent layer which are arranged in a stacked manner from bottom to top, wherein an incidence pipeline is arranged in the incidence layer, the emergent pipeline is correspondingly arranged in the emergent layer, and the incidence pipeline is connected with the emergent pipeline through a micropore pipeline; the upper surface of the emergent pipeline is in a zigzag shape; the incident pipeline is connected with the reservoir and is used for introducing cooling water; the emergent pipeline is used for guiding cooling water into the incident pipeline to cool the light source unit, forming turbulent flow on the serrated upper surface, mixing cold and hot fluid and returning the cooling water after heat absorption to the reservoir; the flow rate control terminal adjusts the flow rate of the cooling water according to the temperature. The heat exchange effect is enhanced, and the working efficiency of the cooling device is improved.

Description

Cooling device of high-power blue light semiconductor laser with flow self-adaptive control

Technical Field

The invention belongs to the technical field of blue light semiconductor lasers, and particularly relates to a cooling device of a high-power blue light semiconductor laser with flow self-adaptive control.

Background

Compared with the common infrared band laser, the high-power blue light semiconductor laser with the wavelength of 450nm has obviously improved processing quality and processing efficiency, but a plurality of challenges such as reliability and temperature influence on power are faced for realizing high power and stable output. When the electronic component works, the power can be lost along with the working time, the temperature of the device is raised, and when the temperature cannot be conducted or the current is conducted by means of the cooling device, the performance of the device can be seriously affected. In the experiment, the beam combining technology (spatial beam combining, polarization beam combining and spectrum beam combining) and a self-designed water cooling device are used for solving the problems, so that the quality of the light beam is improved, and the output efficiency is improved.

In the prior art, a water cooling layer is added between the heat conducting layer and the shell or a separated water cooling device with a built-in straight-tube type water channel or a curved water channel is used as a common solution, and the separated water cooling device has good heat dissipation performance and simple and quick device processing and installation under certain conditions when stable power is achieved. However, not only the shape and structure of the water channel but also the overall sealing performance of the water cooling system are required to be considered in design. However, the straight-tube-type water channel is shorter in unit length, so that the effective heat dissipation area in the laser is smaller, the heat dissipation efficiency is lower, and the temperature difference of each light-emitting module is easily caused to be larger.

The curved water channel is more difficult to manufacture and has higher requirements on the heat transfer coefficient, ductility and other properties of the material. In addition, although the specific heat of water is larger, the heat dissipation effect is good, the fluctuation of water temperature also can have adverse effect on the uniformity of the temperature of the light-emitting module, and the stability of the output light frequency is indirectly influenced. In addition, turkerman and pease proposed microchannel cooling for the first time in 1981, and then scholars at home and abroad conducted many microchannel enhanced heat exchange studies. The micro-channel cooling has the advantages of light weight, compact structure, good integration level and the like. The cooling scheme better meets the heat dissipation requirement of the power device array in a narrow space compared with the traditional water cooling scheme. At present, size optimization and shape optimization are main optimization designs of micro-channels, but pressure drop is easy to be overlarge when enhanced heat transfer is obtained, and collaborative optimization designs of thermal resistance and flow resistance are difficult to realize.

However, aiming at the heat dissipation requirement of the high-power device array, the conventional separated water cooling device with a built-in straight-tube type water channel or a curved water channel has the problems of small heat dissipation area, low heat dissipation performance and poor overall sealing property; spray cooling devices are somewhat limited in their application to thermal control technology for high power device arrays where weight and space size are critical to control. Therefore, the cooling efficiency of the cooling device of the high-power blue semiconductor laser in the related art is low.

Disclosure of Invention

Aiming at the defects of the related art, the invention aims to provide a cooling device of a high-power blue light semiconductor laser with flow self-adaptive control, and aims to solve the problem of lower cooling efficiency of the high-power blue light semiconductor laser in the prior art.

In order to achieve the above object, in a first aspect, the present invention provides a cooling device for a flow-adaptively controlled high-power blue semiconductor laser, comprising: the device comprises a water-cooling base, a temperature sensor, a flow rate sensor and a flow rate control terminal;

the temperature sensor is connected with the light source unit, the water-cooling base is tightly attached to the back surface of the light source unit, the flow rate sensor is connected with the water-cooling base, and the flow rate control terminal is connected with the temperature sensor and the flow rate sensor;

the water cooling base comprises an incidence layer and an emergent layer which are arranged in a stacked manner from bottom to top, wherein an incidence pipeline is arranged in the incidence layer, the emergent layer is correspondingly provided with an emergent pipeline, and the incidence pipeline is connected with the emergent pipeline through a micropore pipeline; the incident pipeline and the emergent pipeline comprise a main pipeline and sub pipelines, and the main pipeline is sequentially connected with a plurality of sub pipelines; the upper surface of the emergent pipeline is serrated; the incidence pipeline is used for connecting the reservoir and guiding cooling water; the emergent pipeline is used for leading cooling water into the incident pipeline to cool the light source unit, forming turbulent flow on the serrated upper surface, mixing cold and hot fluid and returning the cooling water after heat absorption to the reservoir;

the flow rate sensor is used for monitoring the flow rate of the cooling water in the emergent pipeline;

the temperature sensor is used for monitoring the temperature of the light source unit;

the flow rate control terminal is used for adjusting the flow rate of the cooling water entering the incidence pipeline according to the temperature of the light source unit so as to adjust the flow rate of the cooling water in the emergent pipeline.

Optionally, the subducting in the incident duct and the emergent duct is multistage subducting, and the subducting is respectively cascaded to form a tree structure.

Optionally, the incident pipeline and the emergent pipeline respectively comprise two main pipelines, and the main pipelines are respectively arranged at two ends of the multistage subducting of the incident layer and the emergent layer.

Optionally, the microporous pipeline is disposed at a central position of the incident pipeline.

Optionally, the diameter of the microporous pipeline is 0.05mm, and the length is 1mm.

Optionally, the flow rate of the cooling water of the incident pipeline is 750ml/min.

Optionally, the cooling device further comprises a special glass water cooling module, a polarization beam combiner water cooling module, a cylindrical convex lens water cooling module, a first cylindrical concave lens water cooling module and a second cylindrical concave lens water cooling module, which are all composed of a water cooling shell and an internal water cooling pipeline.

Optionally, the cooling device further comprises a controllable water valve;

the controllable water valve is arranged at the water inlet of the incidence pipeline and is connected with the flow rate control terminal through a spring;

the flow rate control terminal is also used for generating a control signal according to the temperature of the light source unit to adjust the expansion and contraction of the spring, the spring is used for controlling the diameter of the water inlet of the controllable water valve, and the controllable water valve is used for adjusting the water flow speed and flow of the cooling water of the incident pipeline.

In a second aspect, the present invention further provides a cooling method of a flow-rate-adaptively-controlled high-power blue semiconductor laser, which is applied to the cooling device according to any one of the first aspects, and includes:

the flow rate control terminal obtains the flow rate of cooling water in an emergent pipeline of the water-cooling base which is tightly attached to the back surface of the light source unit through a flow rate sensor, and obtains the temperature of the light source unit through a temperature sensor;

the flow rate control terminal adjusts the diameter of a water inlet of the controllable water valve according to the temperature of the light source unit so as to adjust the flow rate of cooling water entering the incident pipeline, thereby adjusting the flow rate of the cooling water in the emergent pipeline.

Compared with the prior art, the technical scheme of the invention has the following beneficial effects:

1. the embodiment of the invention provides a cooling device of a high-power blue light semiconductor laser with flow self-adaptive control, which respectively uses a bionic structure for microtubes of an incident layer and an emergent layer, wherein a manifold structure is formed by a main pipeline and a plurality of sub-pipelines, the pipelines of the incident layer and the emergent layer are connected through microporous pipelines, so that water flow entering the emergent layer forms jet impact, the upper surface of the inside of the emergent pipeline is arranged in a zigzag shape, and when the jet impacts the zigzag structure, turbulent flow is formed, the mixing effect of cold and hot fluid is enhanced, and the convection heat exchange coefficient is improved; the microtube heat transfer structure design greatly increases the flow heat exchange area, solves the problem of uneven temperature distribution, and improves the heat exchange and cooling efficiency by the inner surface of the zigzag structure; through the advantages of the manifold structure, jet impact and bionic micro-channel, the heat exchange effect is enhanced, and the working efficiency of the cooling device is improved.

2. The embodiment of the invention provides a cooling device of a high-power blue light semiconductor laser with flow self-adaptive control, which adopts a temperature sensor to monitor the temperature of a light source unit, adopts a flow rate sensor to monitor the flow rate of cooling water of an incident pipeline, synthesizes temperature data and flow rate data through a flow rate control terminal, regulates and controls the flow rate of the cooling water of the incident pipeline in real time, and particularly, can regulate the diameter of a water inlet of the pipeline through a controllable water valve, thereby regulating the water flow rate and the flow rate of the cooling water of the incident pipeline, further regulating the cooling power of the cooling device and stabilizing the working temperature of the high-power blue light semiconductor laser.

3. The embodiment of the invention provides a cooling device of a high-power blue light semiconductor laser with flow self-adaptive control, which adopts a topological bionic structure to optimize a micro-channel structure, designs a pipeline into a multi-stage forked microtube heat sink, aims at the heat dissipation requirement of a high-power device array, reduces the pressure drop of a water inlet and a water outlet, and avoids damaging an instrument.

Drawings

Fig. 1 is a schematic diagram of the overall structure of a cooling device of a high-power blue semiconductor laser with flow adaptive control according to an embodiment of the present invention;

fig. 2 is a schematic diagram of a partial structure of a cooling device of a high-power blue semiconductor laser with flow adaptive control according to an embodiment of the present invention;

fig. 3 is a schematic structural diagram of an exit pipeline according to an embodiment of the present invention;

FIG. 4 is a schematic diagram of a special glass cooling module according to an embodiment of the present invention;

FIG. 5 is a schematic diagram of a water cooling module of a polarization beam combiner according to an embodiment of the present invention;

fig. 6 is a schematic structural diagram of a cylindrical convex lens water cooling module according to an embodiment of the present invention;

fig. 7 is a control schematic diagram of a cooling device of a high-power blue semiconductor laser with flow adaptive control according to an embodiment of the present invention.

The meaning of the symbols in the drawings:

1. the device comprises a water cooling base, 2 parts of an emergent pipeline, 3 parts of a reflecting prism, 4 parts of a light source unit, 5 parts of a micropore pipeline, 6 parts of a jet flow, 7 parts of special glass, 8 parts of a special glass coating layer, 9 parts of a special glass hollow layer, 10 parts of a special glass water cooling shell, 11 parts of a special glass water cooling pipeline, 12 parts of a thin film interference type polarization beam combiner, 13 parts of a light-transmitting thin film of the polarization beam combiner, 14 parts of a polarization beam combiner water cooling shell, 15 parts of a polarization beam combiner water cooling pipeline, 16 parts of a cylindrical convex lens, 17 parts of a mirror surface of the cylindrical convex lens, 18 parts of a water cooling shell of the cylindrical convex lens, 19 parts of a water cooling pipeline of the cylindrical convex lens, 20 parts of a single 500W laser unit, 21 parts of a first cylindrical concave lens, 22 parts of a second cylindrical concave lens, 23 parts of a motor, 24 parts of a flow velocity sensor, 25 parts of a flow velocity control terminal, 26 parts of a temperature sensor, 27 parts of a saw-tooth structure.

Detailed Description

The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention. In addition, the technical features of the embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.

The description of the contents of the above embodiment will be given below in connection with a preferred embodiment.

Example 1

As shown in fig. 1, the present invention provides a cooling device for a high-power blue semiconductor laser with flow adaptive control, which comprises: the device comprises a water-cooling base 1, a temperature sensor, a flow rate sensor and a flow rate control terminal;

the temperature sensor is connected with the light source unit 4, the water-cooling base 1 is tightly attached to the back surface of the light source unit 4, the flow rate sensor is connected with the water-cooling base 1, and the flow rate control terminal is connected with the temperature sensor and the flow rate sensor;

the water cooling base 1 comprises an incidence layer and an emergent layer which are arranged in a stacked manner from bottom to top, wherein an incidence pipeline is arranged in the incidence layer, an emergent pipeline 2 is correspondingly arranged in the emergent layer, and the incidence pipeline is connected with the emergent pipeline 2 through a micropore pipeline 5; the incident pipeline and the emergent pipeline 2 comprise a main pipeline and a sub-pipeline, and the main pipeline is sequentially connected with a plurality of sub-pipelines; the upper surface of the emergent pipeline 2 is serrated; the incidence pipeline is used for connecting the reservoir and guiding cooling water; the emergent pipeline 2 is used for leading cooling water into the incident pipeline to cool the light source unit 4, forming turbulent flow on the serrated upper surface, mixing cold and hot fluid, and returning the cooling water after heat absorption to the reservoir;

the flow rate sensor is used for monitoring the flow rate of the cooling water in the emergent pipeline 2;

the temperature sensor is used for monitoring the temperature of the light source unit 4;

the flow rate control terminal is used for adjusting the flow rate of the cooling water entering the incidence pipeline according to the temperature of the light source unit 4 so as to adjust the flow rate of the cooling water in the emergent pipeline 2.

The scheme of the embodiment of the invention cools the light source unit 4 by means of an external high-power microtubule-jet water cooler, and the device designs the bionic microtubule radiator by utilizing the bionic flow channel structural design and referring to the human blood circulation system and the vein structure alike structures, so that the water cooling system has a stronger radiating function.

As shown in fig. 1 and 2, in this embodiment, for the light source unit 4, a water cooling base 1 is mounted on the back surface of the light source unit 4, and the water cooling base 1 is composed of two layers, namely an incident layer and an emergent layer. The upper surface of the incident layer is designed to have a plurality of longitudinally arranged micro-hole structures, cooling water generates high-speed jet flow 6 through micro-holes, the high-speed jet flow 6 enters the emergent pipeline 2 of the emergent layer through the micro-hole pipeline 5, and impacts the upper surface inside the emergent pipeline 2, and simultaneously, the axial flow direction is rapidly converted into the radial flow direction when contacting the surface of the emergent layer, and as the water flow speed is extremely fast, an extremely thin boundary layer is formed in the impact area, the heat transfer coefficient is extremely high, and the heat dissipation capacity is improved. An emergent pipeline 2 in the emergent layer is used as a heat dissipation microtube, the incident pipeline and the subducting in the emergent pipeline 2 are multi-stage subducting and are respectively cascaded, namely, two first-stage branch subducting are arranged on the main pipeline, two second-stage branch subducting are arranged on each first-stage branch subducting, and the like; the design of combining a bionic structure with a jet flow-micro channel structure is used, and a microtubule distribution structure is designed into a vein shape or a tree shape; the main pipeline is connected with a plurality of subducting, and the inside upper surface design of emergent microtube is the cockscomb structure, and cockscomb structure 27 is continuous periodic setting in inside upper surface, and the cooling water is penetrated into on the cockscomb structure 27 of emergent pipeline 2 through micropore pipeline 5, forms the vortex, mixes hot and cold fluid. The sawtooth-shaped structure 27 of the jet pipeline can not only increase the heat exchange area, but also increase the number of wall gasification cores, and can also increase the length of a three-phase contact line, thereby greatly improving the phase change heat exchange characteristic. According to the array heat source distribution characteristics, a manifold structure is designed, the problem of uneven distribution of fluid along a plurality of inlets and outlets is solved through connection of a main pipeline and a sub pipeline, the heat exchange characteristic of the emergent pipeline 2 is enhanced under the action of jet flow 6, the fluid from the manifold vertically impacts the upper sawtooth-shaped structure 27 of the emergent pipeline 2 through a slit jet flow structure arranged in an array, the jet flow 6 is formed, the fluid speed is high, and the heat exchange coefficient is high. The cooling water is connected to the incidence pipeline from the reservoir through the pipeline, enters the water-cooled base 1 through the inlet of the incidence pipeline, is injected into the emergent pipeline 2 connected with the incidence pipeline at high speed through the microporous pipeline 5, flows in the emergent pipeline 2, cools the attached light source unit 4, and flows out of the water-cooled base 1 from the outlet of the emergent pipeline 2 to be returned to the reservoir again for cooling.

Further, the diameter of the subducting is smaller than that of the main duct, aiming at the conditions of uneven temperature distribution and energy loss of the laser light source unit 4, the distribution density degree of the subducting microtubules is designed in a personalized way, the reasonable vein microtubules can improve the flow speed and flow of water flow, and meanwhile, the energy loss caused by a cooling system can be reduced, and the working efficiency of the water cooling system is improved.

The water cooling base 1 is integrated with the flow rate sensor, the temperature sensor and the flow rate control terminal, in actual work, the flow rate sensor monitors the flow rate of water flow, the temperature sensor monitors the temperature of the light emitting module, the flow rate control terminal synthesizes the flow rate data and the temperature data of water flow, the flow rate and the pressure of cooling water entering an incident pipeline are controlled, and the purposes of controlling the flow rate and monitoring the temperature are achieved.

Further, in the present embodiment, the microtube structure of the incident duct and the exit duct 2 is fabricated by a 3D printing method. By comparing with the conventional micro-channel, the heat dissipation performance of the micro-channel is improved by 49.7% compared with the heat dissipation performance index of the conventional micro-channel under the action of the impact jet flow, the pressure drop is reduced by 93.5%, and the temperature difference of the substrate is reduced by 88.6%. As shown in fig. 3, the manifold channels of the inlet and outlet ports are each designed in a tapered configuration to better control flow distribution and reduce pressure losses.

In the embodiment of the invention, the bionic micro-channel-jet flow composite heat dissipation structure fully utilizes the advantages of the three technologies of the manifold structure, jet flow impact and the bionic micro-channel, has good heat exchange enhancement effect and further improves boiling stability. Through experiments, the upper surface of the zigzag emergent pipeline 2 has flow and heat transfer characteristics similar to those of the topological microchannel, but the defect that the topological microchannel is difficult to manufacture and process is overcome, the application range is wider, and the cost is saved. The water-cooling base structure design greatly increases the flow heat exchange area, solves the problem of uneven temperature distribution, and improves the heat exchange and cooling efficiency.

On the basis of the above embodiment, further, the incident pipe and the outgoing pipe 2 respectively include two main pipes, which are respectively disposed at two ends of the multistage subducting of the incident layer and the outgoing layer.

As shown in fig. 2, the main pipes in the incident pipe and the exit pipe 2 include two main pipes which are respectively arranged at two ends of the multi-stage sub-pipe and extend from two ends of the incident layer and the exit layer; the inside of each tributary subducting is connected with the main pipe, and the end of the tributary subducting is connected with the water inlet/water outlet of the cooling system through two main pipes, namely the main pipe of the incident pipeline and the main pipe of the emergent pipeline 2 are respectively connected with the pipelines of the impounding reservoir, so that the cooling water is circulated back to the impounding reservoir to form a circulating system. By adopting the two main pipelines, cooling water can be respectively input or output from two ends of the multistage subducting, and the working efficiency of the cooling device is improved.

Optionally, the microporous pipeline 5 is disposed at a central position of the incident pipeline.

By arranging the microporous pipeline 5 at the central position of the incident pipeline, the incident water flow can be distributed more uniformly in the emergent pipeline 2, and the cooling effect is more uniform. The center temperature of the luminous unit is generally highest, so that the jet flow center is aligned to the center of the luminous unit, the center part of the luminous unit is optimally cooled, and poor local heat dissipation is avoided.

Further, the diameter of the microporous pipeline 5 is 0.05mm, and the length is 1mm; the flow rate of the cooling water of the incidence pipeline is 750ml/min.

Optionally, the cooling device further comprises a special glass water cooling module, a polarization beam combiner water cooling module, a cylindrical convex lens water cooling module, a first cylindrical concave lens water cooling module and a second cylindrical concave lens water cooling module, which are all composed of a water cooling shell and an internal water cooling pipeline.

The heat dissipation of the light source unit 4 may be performed by cooling the outside of the light source unit 4 in addition to the water-cooled base 1 that is tightly attached to the light source unit 4 provided in the above embodiment, and the heat dissipation of the special glass 7 outside the light source unit 4 may be performed by using the special glass water-cooled module in the present embodiment; as shown in fig. 4, after flowing out from the water outlets at the two ends of the exit pipeline 2, the cooling water also enters a special glass water cooling module, wherein the special glass water cooling module comprises a special glass water cooling shell 10 and special glass coating layers 8 arranged inside, a special glass hollow layer 9 is arranged between every two special glass coating layers 8, and the cooling water flows in a special glass water cooling pipeline 11 inside the special glass water cooling shell 10 to dissipate heat.

As shown in fig. 1, a single 500W laser unit 20 includes a light source unit 4, a water-cooled base 1, and the respective water-cooled modules described above.

Further, in the high-power blue semiconductor laser, not only the light source unit 4 but also other optical elements need to be cooled, and the thin film interference type polarization beam combiner 12, the cylindrical convex lens 16, the first cylindrical concave lens 21 and the second cylindrical concave lens 22 are cooled by adopting a polarization beam combiner water cooling module, a cylindrical convex lens water cooling module, a first cylindrical concave lens water cooling module and a second cylindrical concave lens water cooling module; as shown in fig. 5, the structure of the water-cooling module of the polarization beam combiner comprises a light-transmitting film 13 of the polarization beam combiner, a water-cooling shell 14 of the polarization beam combiner and a water-cooling pipeline 15 of the polarization beam combiner, wherein the water-cooling shell 14 of the polarization beam combiner is internally provided with the water-cooling pipeline 15 of the polarization beam combiner, and the light-transmitting film 13 of the polarization beam combiner is wrapped by the water-cooling shell 14 of the polarization beam combiner; as shown in fig. 6, the structure of the cylindrical convex lens water-cooling module comprises a mirror surface 17 of a cylindrical convex lens, a water-cooling shell 18 of the cylindrical convex lens and a water-cooling pipeline 19 of the cylindrical convex lens, wherein the water-cooling pipeline 19 of the cylindrical convex lens is arranged in the water-cooling shell 18 of the cylindrical convex lens, and the water-cooling shell 18 of the cylindrical convex lens wraps the mirror surface 17 of the cylindrical convex lens; as shown in fig. 1, the structures of the first cylindrical concave lens water-cooling module and the second cylindrical concave lens water-cooling module are similar to those of the polarizing beam combiner water-cooling module, and are not repeated here; the cooling principle of the cooling module is similar to that of a special glass water cooling module.

Further, on the basis of the above embodiment, the cooling device further comprises a controllable water valve;

the controllable water valve is arranged at the water inlet of the incidence pipeline and is connected with the flow rate control terminal through a spring;

the flow rate control terminal is also used for generating a control signal according to the temperature of the light source unit 4 to adjust the expansion and contraction of the spring, the spring is used for controlling the diameter of the water inlet of the controllable water valve, and the controllable water valve is used for adjusting the water flow speed and flow of the cooling water of the incident pipeline.

The water inlet of the incidence pipeline is provided with a controllable water valve for adjusting the water flow speed and the flow, each water valve is used for controlling the diameter of the water inlet by a spring device, and the spring is controlled to stretch and retract according to the rotation power of the motor under different conditions so as to achieve the purpose of changing the water flow speed. Each temperature sensor detects the temperature distribution condition of the light source unit 4 in real time, data are transmitted to the flow rate control terminal, the flow rate sensor transmits the incident cooling water flow rate data of the incident pipeline monitored in real time to the flow rate control terminal, and the flow rate control terminal synthesizes the temperature data and the flow rate data to control the controllable water valve to adjust the water flow rate and the flow rate in real time.

Specifically, the flow rate control terminal is comprehensively connected with the controllable water valve through the spring, when the temperature exceeds the ideal temperature, the temperature sensor generates a signal, the system can comprehensively adjust the clicking power according to the set instruction and the data of the flow rate sensor, so that the spring is contracted, the diameter of the water inlet is increased, the pressure is increased, the power of the cooling device is increased, and the water flow speed is increased. Integrating circuits of a flow velocity sensor, a controllable water valve and a temperature sensor to form a set of self-adaptive microtube-jet water cooling machine system, regulating the comprehensive temperature and flow velocity of the system and other data processing; furthermore, the flow rate and the temperature distribution of each water channel can be visually displayed on the operation panel, and the water cooling power can be automatically adjusted. According to setting, the theoretical heat dissipation condition is that the water source temperature of the water cooling machine is 20 ℃, four laser units with power of 150w are cooled respectively, the cooling effect is that the central temperature of the laser units is 25 ℃, and the temperature of the edge part exceeds thirty ℃, so that the experimental requirements are met.

Further, in a specific embodiment, referring to fig. 1 and 2, the cooling base body (length, width, height) of the light emitting unit is 40mm, 42mm, 5mm, the main pipe width of the microtube (the incident pipe and the exit pipe) is 2mm, the second branch sub-pipe is 1mm, and the third branch sub-pipe is 0.54mm; referring to fig. 3, the sawtooth-shaped structure 27 inside the exit duct 2 has a base length of 0.3mm, a height of 0.5mm, and a jet micropore 6 diameter of 0.05mm and a length of 1mm. The whole device is assembled by a welding process, and the saw-tooth-shaped structure is manufactured by an electric spark process. Referring to fig. 1, 2 and 7, each light emitting unit corresponds to a water cooling base 1, water cooling water is driven by a motor 23 to enter a channel, jet flow is formed under the action of pressure difference through a micro-pore pipeline 5, and then radial water flow is formed on the upper surface in an outgoing pipeline 2 of an outgoing layer, flows towards two ends along a multistage microtube, and cooling water flows along the zigzag structure due to the impact, so that the heat exchange area is increased, and the phase change heat exchange coefficient is greatly improved. After flowing out from the water outlets at the two ends of the outgoing pipeline 2, the cooling water can also cool the outside of the light source unit 4 through the special glass water cooling pipeline 11 inside the special glass water cooling shell 10, and finally flows into the reservoir. The laser power density after polarization beam combination by the cylindrical convex lens 16 and the thin film interference type polarization beam combiner 12 is improved, and the theoretical output power reaches 500W. The high-power blue laser is easy to heat the optical path device, so the embodiment of the invention also cools the optical path device. Because the heating degree is small, the conventional cooling mode is adopted to save the cost, and the water-cooled shell and the special glass water-cooled pipeline 11 are used for cooling. The brass cooling shell is coated on the side surface, cooling water enters the cooling shell from the lower part, and flows back to the water cooler from the lower part after bypassing the special glass around the cooling pipe for a circle, so that one-time circulation is completed, and the purpose of cooling the device is achieved.

When the laser is at 25 ℃, the output power is higher than that at 75 ℃, and similarly, the output voltage at the same current and low temperature is also higher, so that the ideal constant temperature set by the system is 25 ℃. The temperature of the input cooling water is 25 ℃, the pulsation flow of the cooling water is 750ml/min, the comprehensive treatment is carried out through the cooling water flow rate control terminal 25 according to the data fed back by the temperature sensor 26 and the data fed back by the flow rate sensor 24, the expansion and contraction condition of the water valve is reasonably regulated, the central temperature of the light-emitting unit is kept to be 25 ℃, the edge temperature is kept to be 30 ℃, and the fluctuation is not more than one degree.

In summary, in the embodiment of the invention, the micro-pipes of the incident layer and the emergent layer are respectively provided with the bionic structures, the main pipeline and the plurality of sub-pipelines form the manifold structure, and the pipelines of the incident layer and the emergent layer are connected through the micro-pore pipelines, so that water flow entering the emergent layer forms jet impact, the upper surface of the inner part of the emergent pipeline is arranged in a zigzag shape, and when the jet impacts the zigzag structure, turbulent flow is formed, the mixing effect of cold and hot fluid is enhanced, and the convection heat exchange coefficient is improved. The microtube heat transfer structure design greatly increases the flow heat exchange area, solves the problem of uneven temperature distribution, and improves the heat exchange and cooling efficiency by the inner surface of the zigzag structure; the problems of heat dissipation performance obstruction and unstable power of a cooling device of a high-power blue light semiconductor laser in the prior art are solved. The heat exchange effect is enhanced, the working efficiency of the cooling device is improved, and the output power, the beam quality and the spot size are stabilized.

Example two

The invention also provides a cooling method of the high-power blue light semiconductor laser with flow self-adaptive control, which is applied to the cooling device according to any one of the first embodiment, and comprises the following steps:

the flow rate control terminal obtains the flow rate of cooling water in an emergent pipeline of the water-cooling base which is tightly attached to the back surface of the light source unit through a flow rate sensor, and obtains the temperature of the light source unit through a temperature sensor;

the flow rate control terminal adjusts the diameter of a water inlet of the controllable water valve according to the temperature of the light source unit so as to adjust the flow rate of cooling water entering the incident pipeline, thereby adjusting the flow rate of the cooling water in the emergent pipeline.

Further, the flow rate control terminal is connected with the controllable water valve through a spring comprehensively, when the temperature exceeds the ideal temperature, the temperature sensor generates a signal, the system can adjust the clicking power according to the set instruction and the comprehensive flow rate sensor data, so that the spring is contracted, the diameter of the water inlet is increased, the pressure is increased, the power of the cooling device is increased, and the water flow speed is increased.

The embodiment of the invention improves the cooling device of the blue laser by the fine-branch flow self-adaptive control team, stabilizes the output power, the beam quality and the spot size, and effectively solves the problems of heat dissipation performance obstruction and unstable power of the device.

The cooling method of the high-power blue light semiconductor laser with the flow self-adaptive control provided by the embodiment is applied to the cooling device of the high-power blue light semiconductor laser with the flow self-adaptive control, and the same beneficial effects as the cooling device can be achieved.

It will be readily appreciated by those skilled in the art that the foregoing description is merely a preferred embodiment of the invention and is not intended to limit the invention, but any modifications, equivalents, improvements or alternatives falling within the spirit and principles of the invention are intended to be included within the scope of the invention.

Claims (9)

1. The cooling device of the high-power blue light semiconductor laser with the flow self-adaptive control is characterized by comprising the following components: the device comprises a water-cooling base, a temperature sensor, a flow rate sensor and a flow rate control terminal;

the temperature sensor is connected with the light source unit, the water-cooling base is tightly attached to the back surface of the light source unit, the flow rate sensor is connected with the water-cooling base, and the flow rate control terminal is connected with the temperature sensor and the flow rate sensor;

the water cooling base comprises an incidence layer and an emergent layer which are arranged in a stacked manner from bottom to top, wherein an incidence pipeline is arranged in the incidence layer, the emergent layer is correspondingly provided with an emergent pipeline, and the incidence pipeline is connected with the emergent pipeline through a micropore pipeline; the incident pipeline and the emergent pipeline comprise a main pipeline and sub pipelines, and the main pipeline is sequentially connected with a plurality of sub pipelines; the upper surface of the emergent pipeline is serrated; the incidence pipeline is used for connecting the reservoir and guiding cooling water; the emergent pipeline is used for leading cooling water into the incident pipeline to cool the light source unit, forming turbulent flow on the serrated upper surface, mixing cold and hot fluid and returning the cooling water after heat absorption to the reservoir;

the flow rate sensor is used for monitoring the flow rate of the cooling water in the emergent pipeline;

the temperature sensor is used for monitoring the temperature of the light source unit;

the flow rate control terminal is used for adjusting the flow rate of the cooling water entering the incidence pipeline according to the temperature of the light source unit so as to adjust the flow rate of the cooling water in the emergent pipeline.

2. The cooling device of claim 1, wherein the subducting in the entrance duct and the exit duct are multi-stage subducting, each cascading to form a tree structure.

3. The cooling device of claim 2, wherein the incident pipe and the outgoing pipe comprise two main pipes, respectively, disposed at two ends of the multi-stage sub-pipes of the incident layer and the outgoing layer, respectively.

4. The cooling device of claim 1, wherein the microporous tube is disposed at a central location of the incident tube.

5. The cooling device of claim 1, wherein the microporous conduit has a diameter of 0.05mm and a length of 1mm.

6. The cooling device of claim 1, wherein the flow rate of the cooling water of the incident piping is 750ml/min.

7. The cooling device of claim 1, further comprising a specialty glass water cooling module, a polarizing combiner water cooling module, a cylindrical convex lens water cooling module, a first cylindrical concave lens water cooling module, and a second cylindrical concave lens water cooling module, each comprising a water cooled housing and an internal water cooled conduit.

8. The cooling device of claim 1, further comprising a controllable water valve;

the controllable water valve is arranged at the water inlet of the incidence pipeline and is connected with the flow rate control terminal through a spring;

the flow rate control terminal is also used for generating a control signal according to the temperature of the light source unit to adjust the expansion and contraction of the spring, the spring is used for controlling the diameter of the water inlet of the controllable water valve, and the controllable water valve is used for adjusting the water flow speed and flow of the cooling water of the incident pipeline.

9. A cooling method of a flow-rate-adaptively-controlled high-power blue-light semiconductor laser, applied to a cooling device as set forth in any one of claims 1 to 8, comprising:

the flow rate control terminal obtains the flow rate of cooling water in an emergent pipeline of the water-cooling base which is tightly attached to the back surface of the light source unit through a flow rate sensor, and obtains the temperature of the light source unit through a temperature sensor;

the flow rate control terminal adjusts the diameter of a water inlet of the controllable water valve according to the temperature of the light source unit so as to adjust the flow rate of cooling water entering the incident pipeline, thereby adjusting the flow rate of the cooling water in the emergent pipeline.