CN117805118A - A chip appearance detection device and method based on motion time correlation control - Google Patents

Abstract

The invention discloses a chip appearance detection device and method based on motion time association control, which relate to the technical field of defect detection in chip appearance optical detection and comprise a precision adjusting table, a microscopic imaging system, a micro-motion module, an imaging and image acquisition module, a motion control module, a synchronous time sequence trigger generation module and an information processing analysis module, wherein the imaging and image acquisition module is integrated in the micro-motion module, and the micro-motion module is arranged on the microscopic imaging system; the device structure of the invention carries out optical microscopic amplification on a chip sample through a microscopic imaging system with lower magnification and lower configuration, carries out data acquisition on a sample image amplified by the microscopic imaging system in cooperation with the accurate coding motion of an image acquisition module, carries out association calculation on the acquired image combined with coding information, carries out interpolation and pixel value redistribution on the image, and realizes the high-resolution imaging effect through a calculation imaging mode.

Description

A chip appearance detection device and method based on motion time correlation control

Technical field

The present invention relates to the technical field of chip appearance optical detection, specifically a chip appearance detection device and method based on motion time correlation control.

Background technique

With the continuous development of chip manufacturing technology, the size of chips is getting smaller and smaller, and the detection of chips has become more and more important. As an optical visual inspection technology, chip appearance inspection has the advantage of non-contact and rapid speed, and is widely used in the fields of semiconductor chips, integrated circuits, and electronic components. In chip appearance inspection, system hardware is an important factor affecting the inspection results. The parameter performance of the system hardware directly affects the quality of the chip appearance image and the accuracy of the detection results. Although the existing chip appearance inspection systems have made great progress in terms of resolution and inspection speed, there are still problems such as difficulty in manufacturing large field of view and high resolution system hardware and high cost, which limits chip appearance inspection to a certain extent. System development and application.

Contents of the invention

The purpose of the present invention is to provide a chip appearance detection device and method based on motion time correlation control, aiming to solve the limitations of the existing chip appearance detection system hardware on imaging resolution and field of view parameters, and to achieve high-resolution and large field of view imaging detection that can only be achieved with high-priced hardware configurations with low hardware configurations. The present invention introduces high-precision coded micro-motion in the image acquisition part, and obtains a preliminary surface image of the sample under test through synchronous timing triggering, and then interpolates the image and redistributes the pixel value after associating it with the coded motion information, so as to obtain a higher resolution image while maintaining the original field of view, showing more detailed information of the sample, thereby achieving an image effect that can only be achieved by a high magnification system.

To achieve the above object, the present invention provides the following technical solution: a chip appearance detection method based on motion time correlation control, comprising the following steps:

Step 1: Place the chip to be tested on the precision adjustment table, adjust the position and height of the precision adjustment table, and make precise three-dimensional adjustments to the position of the chip to be tested;

Step 2: Adjust the chip to be tested so that the microscopic imaging system and the imaging and image acquisition module can clearly image the chip, ensuring that the chip is at the focal plane of the microscopic imaging system, that is, on the sensor plane of the imaging and image acquisition module. The micro-imaging system performs optical microscopic magnification on the chip under test;

Step 3: Use the information processing and analysis module to set the encoding control mode of the motion control module for subsequent trigger output to realize motion control of the micro-motion module;

Step 4: Use the information processing and analysis module to set the exposure time parameters of the imaging and image acquisition module for subsequent triggering of image acquisition;

Step 5: using the information processing and analysis module to send a start instruction to the synchronous timing trigger generation module, the synchronous timing trigger generation module generates a single synchronous pulse trigger signal, and triggers the motion control module and the imaging and image acquisition module respectively at the same time;

Step six: Input the images collected by the imaging and image acquisition module to the information processing and analysis module, and perform correlation calculations between the collected images and the encoded information of the motion control module in step three to obtain higher-precision images. At the same time, based on the prediction Set up an algorithm to perform image processing and extract sample feature information;

Step 7: Output the corresponding detection results according to the processing and analysis results of the information processing and analysis module, and make corresponding alarm prompts based on the detection results to realize the detection and analysis of the chip appearance.

Preferably, the encoding control mode setting method in step three is to set the displacement sequence of the motion control module on the X-Y plane within the time period of the image sensor exposure cycle, set the distance of each step of displacement and the time to maintain the current position.

Preferably, the method for setting the exposure time parameters in step four is to set the image sensor exposure period to be consistent with the total encoding control displacement time in step three, and other parameters remain unchanged during this period.

Preferably, the method for extracting sample characteristic information in step 6 is:

Collect data from the sample image amplified by the microscopic imaging system to obtain the appearance image sample I0 of the detection chip;

Perform correlation calculations on the original image I0 and the matrix M corresponding to the encoding control method of the motion control module in step 3, thereby redistributing and interpolating the values of the pixels of the original image I0 to obtain a higher-level image;

Extract the characteristic information of the chip to be detected from the image sample obtained after the correlation calculation, and obtain the appearance characteristic information of the detection chip.

Compared with the prior art, the beneficial effects of the present invention are:

1. The device structure of the present invention uses a microscopic imaging system with a lower magnification and lower configuration to perform optical microscopic magnification on chip samples, cooperates with the precise coding movement of the image acquisition module, collects data on the sample image after being magnified by the microscopic imaging system, and combines the collected image with the coding information for correlation calculation, interpolates the image and redistributes the pixel values, and achieves high-resolution imaging effects through computational imaging. The introduction of motion time coding information and the use of algorithms to achieve high-resolution effects reduce the dependence of imaging resolution on system hardware configuration, and has simpler hardware requirements and lower system costs.

2. The present invention introduces motion time coding information and uses algorithms to achieve high-resolution effects. While achieving high resolution, it maintains the original field of view and has smaller amplification than systems with the same level of resolution. magnification and higher field of view, allowing the system to detect a larger chip surface area faster.

3. The present invention introduces motion time coding information and associated imaging to compare and judge the acquired chip sample features, determine whether the chip is abnormal, match the abnormal chip sample features for the abnormal chip, determine the abnormal category based on the matching parameters, and issue corresponding abnormal alarm prompts, so as to facilitate management personnel to make response plans in time and deal with abnormal chips in time, thereby improving processing efficiency and ensuring chip production quality.

BRIEF DESCRIPTION OF THE DRAWINGS

Figure 1 is a schematic diagram of the chip appearance detection device of the present invention;

Figure 2 is a schematic diagram of the imaging and image acquisition module of the present invention integrated on the micro-motion module;

FIG3 is a flow chart of a chip appearance detection method based on motion time correlation control of the present invention;

Figure 4 is an original graph of test results according to the embodiment of the present invention;

Figure 5 is a diagram of processed test results according to the embodiment of the present invention.

In the figure: 1. Precision adjustment stage; 2. Microscopic imaging system; 3. Micro-motion module; 4. Imaging and image acquisition module; 5. Motion control module; 6. Synchronous timing trigger generation module; 7. Information processing and analysis module.

Detailed ways

The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

Please refer to Figures 1-4. The present invention provides a technical solution: a chip appearance detection device based on motion time correlation control, including a precision adjustment table, a microscopic imaging system, a micro-motion module, an imaging and image acquisition module, and a motion control module, synchronization timing trigger generation module and information processing analysis module. Among them, the imaging and image acquisition module is integrated in the micro-motion module. The micro-motion module is installed on the microscopic imaging system. The micro-motion module, imaging and image acquisition module and microscopic imaging system are coaxially placed. The micro-motion module and the motion control module Electrically connected, the motion control module is electrically connected to the synchronous timing trigger generation module and the information processing analysis module respectively. The imaging and image acquisition module is electrically connected to the synchronous timing trigger generation module and the information processing analysis module respectively. The synchronous timing trigger generation module is electrically connected to the information processing analysis module. Module electrical connections.

It should be noted that the precision adjustment stage in the present invention is used to support and accurately adjust the position of the chip to ensure that accurate images are obtained during the detection process.

Microscopic imaging system: Provides high-resolution microscopic imaging function for observing the microscopic details of the chip. The microscopic imaging system includes an objective lens, an eyepiece, a light source, a focusing system, a sample stage, a detector, a filter, an image processing unit, and software. Objective lens: The objective lens is one of the core optical components of the microscopic imaging system, responsible for focusing light to form an enlarged image. Different objective lenses have different magnifications and working distances, which are used to achieve different degrees of microstructure observation. Eyepiece: The eyepiece is used for the observer to directly observe the sample, although in modern microscopic imaging systems, digital cameras and monitors are also often used for image display. Light source: The light source provides illumination, illuminating the sample to make it visible under the microscope. Common light sources include white light LEDs, halogen lamps, or mercury arc light sources, and the specific choice depends on the application requirements. Focusing system: The focusing system is used to adjust the focal length between the objective lens and the sample to obtain a clear image. This can be achieved by manual knobs, automatic focusing, or electric focusing. Sample stage: The sample stage supports and positions the sample to be observed. It has X, Y, and Z axis adjustments, allowing the user to position and observe the sample at different positions. Detector: The detector captures the light signal after it passes through the objective lens and the sample, and converts it into an electrical signal. Digital cameras are often used as detectors in modern microscopy systems. Filters: Filters are used to select specific wavelengths of light, which helps to enhance the observation of specific features of the sample, such as fluorescence filters in fluorescence microscopes. Image processing unit: The image processing unit is used to process, store, and display the images captured by the imaging system. This includes adjustments such as contrast, brightness, color balance, as well as digital image analysis and processing. Digital Cameras and Computers: Modern microscopy systems use digital cameras to capture images and use computers for real-time processing and display. The system allows digitized images for easy storage, sharing, and further analysis. Software: Microscopy systems come with specific software to control the system, acquire and process images, and include some image analysis tools.

Micro-motion module: placed coaxially with the microscopic imaging system, used for tiny motion control. It can be a micro-power stage or other equipment capable of achieving micro-motion.

Imaging and image acquisition module: integrated in the micro-motion module, responsible for real-time image acquisition during motion. This helps capture tiny details in motion.

Motion control module: Controls the movement of the micro-motion module to ensure precise positioning and movement of the chip. Including motion control of XYZ axis.

Synchronous timing trigger generation module: generates synchronous timing trigger signals to ensure that the micro-motion module, motion control module, and imaging and image acquisition module have synchronized timing when working together.

Information processing and analysis module: Process and analyze images obtained from the imaging and image acquisition module. This includes image recognition, feature extraction, defect detection and other algorithms to achieve effective detection and analysis of chip appearance.

The operation method of the above device is as follows: Placement of the chip to be tested: The chip to be tested is placed on the precision adjustment table and is located in the field of view of the microscopic imaging system, that is, the chip area to be tested. Adjust the distance between the precision adjustment stage and the microscope imaging system: By adjusting the distance between the precision adjustment stage and the microscope imaging system, ensure that the imaging system can obtain clear, high-resolution images. Preset motion control and imaging parameters: The information processing and analysis module presets the encoding control method of the motion control module and the parameters of the imaging and image acquisition module. This includes parameters such as displacement step size and imaging frequency. Send a synchronization trigger signal instruction: the information processing and analysis module sends an instruction to the synchronization timing trigger generation module, which triggers the synchronization timing trigger generation module to generate a synchronization trigger signal. Synchronous trigger signal transmission: The synchronous trigger signal generated by the synchronous timing trigger generation module is transmitted to the motion control module and imaging and image acquisition module. Displacement control and image acquisition start: After the motion control module receives the synchronous trigger signal, it starts to execute the preset displacement control work. At the same time, the imaging and image acquisition module also starts a single image acquisition triggered by the synchronization signal. Image acquisition and motion control information correlation calculation: the information processing and analysis module acquires the images collected by the imaging and image acquisition module. By combining the encoded control information of the motion control module, correlation calculation is performed to ensure that the image of each step is associated with the corresponding displacement information. Generate high-resolution images: Combining all acquired images, the information processing and analysis module generates a higher-resolution image of the sample appearance. This helps improve detection accuracy and clarity. Image recognition and analysis: Perform image recognition and analysis on the generated high-resolution images. This includes operations such as defect detection, feature extraction, shape analysis, and more. Output detection report: Based on the identification and analysis results, the information processing and analysis module generates a detection report. The report contains detailed information about the chip's appearance, such as defect location, shape, size, etc.

FIG. 2 shows the manner in which the imaging and image acquisition module of the present invention is integrated on the micro-motion module.

In order to better reflect the detection process of a chip appearance detection device based on motion time correlation control, as shown in Figure 3, the present invention proposes a chip appearance detection method based on motion time correlation control, which includes the following steps:

Step 1: Place the processed chip to be tested on the area to be tested on the upper surface of the precision adjustment table, and adjust the position and height of the precision adjustment table to achieve precise three-dimensional adjustment of the position of the chip to be tested;

It should be noted that in the above steps of the present invention, the chip to be tested is carefully placed on the upper surface of the precision adjustment table to ensure that the chip is located in the area to be tested. An adjustment device is used. The adjustment method can be a manual knob, an electric device or other adjustment mechanisms. Fine-tune the position of the precision adjustment stage to ensure that the chip under test is in the desired observation position. By making small adjustments on the X, Y, and Z axes to ensure that the chip is in the center of the field of view, and adjusting the height of the precision adjustment stage to ensure that the focal plane is on the surface of the chip under test, it is convenient to obtain clear and well-focused images. image.

Step 2: This step requires clear magnified imaging of the chip under test. The specific operation is to adjust the chip to be tested so that the microscopic imaging system and the imaging and image acquisition module can clearly image the chip, ensuring that the chip is at the focal plane of the microscopic imaging system, that is, on the sensor plane of the imaging and image acquisition module. The micro-imaging system performs optical microscopic magnification on the chip under test;

It should be noted that in the above steps of the present invention, the focus adjustment function of the microscope system is used to ensure that the chip to be tested is on the focal plane. This is achieved by manually or automatically adjusting the focus of the microscope. During the process of adjusting the focus, you can observe the change in image clarity to find the best focus; ensure that the light source fully illuminates the chip under test to obtain a clear image. The brightness and direction of the illumination can be adjusted to ensure that the light hits the chip surface evenly and brightly; during the adjustment process, the image under the microscope is observed in real time. Ensure that the microstructure of the chip is clearly visible to meet the requirements of subsequent analysis or detection; adjust the parameters of the imaging and image acquisition module according to the characteristics and imaging requirements of the chip to be tested, including exposure time, gain, etc.

Step 3: Use the information processing and analysis module to set the coding control mode of the motion control module, which is used for subsequent trigger output to realize motion control of the micro-motion module. Specifically, the displacement sequence of the motion control module on the X-Y plane, the distance of each step of displacement, and the holding time at the current position can be controlled by setting the exposure period of the image sensor.

It should be noted that in the above steps of the present invention, the exposure cycle of the image sensor is set by using the information processing and analysis module. The exposure cycle determines the time length of the light signal received by the image sensor during each imaging. Determine the distance of each step of displacement, that is, the step length of the micro-displacement. This step length can be adjusted according to specific application requirements. A smaller step length can improve the accuracy of position control; determine the length of time to stay at each position. This is the time to remain stable at the current position after a micro-displacement to ensure sufficient exposure and image acquisition; use the information processing and analysis module to send the setting instructions of the encoding control to the motion control module; the motion control module starts to perform micro-displacements on the X-Y plane according to the settings provided by the information processing and analysis module, and maintains the set time at each position; after performing micro-displacements at each position and maintaining them for a certain time, the imaging and image acquisition module performs image acquisition according to the set exposure cycle.

Step 4: Use the information processing and analysis module to set the exposure time parameters of the imaging and image acquisition module for subsequent triggering of image acquisition. Specifically, set the image sensor exposure period to be consistent with the total encoded control displacement time in step three, and other parameters remain unchanged during this period.

It should be noted that in the above steps of the present invention, the total coding control displacement time is calculated based on the step length of the coding control displacement in step three, the displacement sequence and the time held at each position; the information processing and analysis module is used to calculate the total time of the coding control displacement. The exposure period is set to the calculated total encoded control displacement time. Ensure that the exposure cycle can cover the entire process of small displacement to obtain a clear image; when setting the exposure cycle, ensure that other parameters related to image acquisition remain unchanged. Including gain, frame rate, etc.; send setting instructions to the imaging and image acquisition module through the information processing and analysis module, and transfer the new exposure cycle parameters to the image sensor. When the exposure cycle parameters are set, the information processing and analysis module can trigger the imaging and image acquisition module to perform image acquisition operations. At this time, the image sensor will collect images according to the set exposure cycle.

Step 5: Use the information processing and analysis module to send a start instruction to the synchronous timing trigger generation module. After receiving the instruction, the synchronous timing trigger generation module generates a single synchronous pulse trigger signal and transmits it to the motion control module and the imaging and image acquisition module at the same time. After detecting the rising edge of the pulse, each module starts to run the corresponding preset work content.

It should be noted that in the above steps of the present invention, the parameters of the synchronous timing trigger generation module are set in the information processing and analysis module, including the frequency and start time of the trigger signal, etc.; ensure that these parameters match the requirements of the system; when the information processing and analysis module determines to start the synchronous operation, a start instruction is sent to the synchronous timing trigger generation module; after receiving the start instruction, the synchronous timing trigger generation module starts to generate a synchronous pulse trigger signal; this signal will be used to synchronize the operation of the motion control module and the imaging and image acquisition module; the synchronous pulse trigger signal generated by the synchronous timing trigger generation module is simultaneously transmitted to the motion control module and the imaging and image acquisition module; ensure that the signal can accurately reach each module; the motion control module and the imaging and image acquisition module respectively detect the rising edge of the synchronous pulse trigger signal; this rising edge is usually used as the time point to start executing the preset work content; the motion control module starts to execute the preset work content after detecting the rising edge of the synchronous pulse trigger signal, including the motion control of small displacements, and the imaging and image acquisition module starts to execute the preset work content, such as image acquisition, after detecting the rising edge of the synchronous pulse trigger signal; each module may generate a corresponding completion signal or status information after completing the preset work content, so that the information processing and analysis module or other modules can further process it.

Step 6: This step mainly includes first collecting the chip surface image, then obtaining the high-resolution image through correlation calculation, and finally processing and analyzing the high-resolution image. The steps are to input the images collected by the imaging and image acquisition module into the information processing and analysis module, and perform correlation calculations on the encoded information of the motion control module in step 3 to obtain higher-precision images, and at the same time perform image processing based on the preset algorithm , extract sample characteristic information. The specific method is: collecting data from the image of the sample to be tested that has been amplified by the microscopic imaging system, and obtaining the appearance image sample I0 of the chip to be tested. Then, the obtained original image I0 is correlated with the matrix M corresponding to the encoding control method of the motion control module in step 3, so as to realize the redistribution and interpolation of the pixel values of the original image I0 and obtain a higher-precision image. . The feature information of the chip to be detected is extracted based on the high-precision image sample obtained after the correlation calculation, and the appearance feature information of the chip to be detected is obtained. Determine the abnormal category of the chip sample characteristics based on the matching parameters, determine the corresponding abnormal alarm prompt based on the abnormal category of the chip sample characteristics, and issue an abnormal alarm.

It should be noted that in the above steps of the present invention, an imaging and image acquisition module is used to collect an image of the surface of the chip to be tested to obtain an original image sample I0. The image sample can be magnified by a microscopic imaging system. The original image I0 is associated with the matrix M corresponding to the coding control method of the motion control module in step three. The purpose of the association calculation is to redistribute and interpolate the pixel values in the original image to obtain a higher precision image. A high-precision image is generated by the result obtained by the association calculation. The image has higher resolution and accuracy, which helps to improve the ability to capture details of the chip to be tested. The information processing and analysis module is used to extract feature information from the high-precision image. It is used to identify and quantify the appearance features of the chip to be tested, such as shape, color, texture, etc. Based on the extracted feature information, matching parameters are used to determine the abnormal category of the chip sample feature, which is used to compare the extracted features with the expected features of the normal sample. Once the abnormal category of the chip sample feature is determined, the system can generate a corresponding abnormal alarm prompt. This includes displaying the abnormal area, providing a description of the abnormal type, and other information.

Step 7: This step is used to detect and analyze the appearance of the chip. The corresponding detection results are output according to the processing and analysis results of the information processing and analysis module, and based on the detection results and the set defect standards, it is judged whether the chip sample to be tested has excessive defects. If it exists, the defective area will be marked, corresponding alarm prompts will be made, and the inspection report will be output; if there are no excessive defects, the inspection report will be output directly.

It should be noted that in the above steps of the present invention, the information processing and analysis module outputs the detection results based on the previous image processing and analysis steps. Results include various quantitative and qualitative analyzes of chip appearance characteristics, such as shape, color, texture, etc. Based on the information processing and analysis results, the system determines whether the chip sample to be tested contains excessive defects. This can be achieved by comparison with preset defect standards. If the test results meet the exceedance conditions defined in the defect standards, it is determined that there is an exceedance defect. If there are out-of-standard defects, the system can mark the corresponding defective areas for display in the final inspection report. Display methods include markers or bounding boxes on the image to indicate where defects exist. In the case of excessive defects, the system can generate corresponding alarm prompts. Prompts can include textual descriptions, graphical markers, or other forms that remind the operator to pay attention to a specific area or take further action. The system outputs the final inspection report, which includes inspection results, whether there are excessive defects, marked defect areas and other information. Reports can be used to record the inspection process, provide visual feedback, and serve as a reference for quality control. If no excessive defects are detected in the chip sample to be tested, the system directly outputs the inspection report without marking the defective area or generating additional alarms. In this case, the report reflects the appearance of the sample tested in compliance with the expected standards.

According to the above embodiments, the final experimental system obtains the target detection results shown in Figures 4 and 5. The results of the embodiments show that the method and device of the present invention can easily and quickly achieve high-resolution image reconstruction with a low hardware configuration, while maintaining a high field of view, and ultimately achieve better and faster measurement results. The device and method of the present invention can be widely used in optical imaging and detection, and can also be used in biological sample detection and object type identification scenarios, providing a simple, feasible and low-cost detection method and device for improving the accuracy of detection results. It is convenient for management personnel to handle abnormal chips in a timely manner, improves processing efficiency, and ensures the production quality of chips.

Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art will understand that various changes, modifications, and substitutions can be made to these embodiments without departing from the principles and spirit of the invention. and modifications, the scope of the invention is defined by the appended claims and their equivalents.

Claims (9)

1. A chip appearance detection device based on motion time correlation control, including a precision adjustment table (1), a microscopic imaging system (2), a micro-motion module (3), an imaging and image acquisition module (4), and a motion control module (5), synchronous timing trigger generation module (6) and information processing analysis module (7), characterized in that: the imaging and image acquisition module (4) is integrated in the micro-motion module (3), and the micro-motion module (3) Installed on the microscopic imaging system (2), the micro-motion module (3), the imaging and image acquisition module (4) and the microscopic imaging system (2) are coaxially placed, and the motion control module (5) ) are electrically connected to the synchronous timing trigger generation module (6) and the information processing analysis module (7) respectively, and the imaging and image acquisition module (4) is respectively connected to the synchronous timing trigger generation module (6) and the information processing analysis module (7) Electrically connected, the synchronization timing trigger generation module (6) and the information processing analysis module (7) are electrically connected; The micro-motion module (3) is used to provide high-precision displacement; The imaging and image acquisition module (4) is used for acquiring a single image; The motion control module (5) is used to complete the encoded displacement within a specified period; The synchronization timing trigger generation module (6) is used to generate a synchronization trigger signal; The information processing and analysis module (7) is used for extracting and analyzing data. 2. A chip appearance detection device based on motion time correlation control according to claim 1, characterized in that: the micro-motion module (3) is composed of a high-precision piezoelectric ceramic displacement stage, the displacement accuracy of the piezoelectric ceramic displacement stage is in the nanometer level and the displacement range is in the micrometer level. 3. A chip appearance detection device based on motion time correlation control according to claim 2, characterized in that: the micro-motion module (3) is electrically connected to the motion control module (5), and the micro-motion module (5) 3) The displacement is encoded and controlled by the motion control module (5). The encoding control mode of the motion control module (5) is set in advance by the information processing analysis module (7). After triggering, the encoded displacement is completed within the specified period. 4. A chip appearance detection device based on motion time correlation control according to claim 3, characterized in that: the imaging and image acquisition module (4) and the motion control module (5) are triggered by a synchronous timing generation module ( 6) The generated synchronization trigger signal is controlled. When the synchronization pulse signal is received, the displacement control and single image acquisition work is started. 5. A chip appearance detection device based on motion time correlation control according to claim 4, characterized in that: the synchronization timing trigger generation module (6) only generates one synchronization trigger signal each time, and generates a synchronization trigger each time. The signal is initiated by the information processing and analysis module (7) sending instructions. 6. A chip appearance detection method based on motion time correlation control according to claim 5, characterized in that: it includes the following steps: Step 1: Place the chip to be tested on the precision adjustment table (1), adjust the position and height of the precision adjustment table (1), and perform precise three-dimensional adjustment of the position of the chip to be tested; Step 2: The chip to be tested is adjusted so that the microscopic imaging system (2) and the imaging and image acquisition module (4) can clearly image the chip, and the chip is ensured to be at the focal plane of the microscopic imaging system (2), that is, on the sensor plane of the imaging and image acquisition module (4), and the microscopic imaging system (2) performs optical microscopic magnification on the chip to be tested; Step 3: Use the information processing and analysis module (7) to set the coding control mode of the motion control module (5), which is used for subsequent trigger output to realize motion control of the micro-motion module (3); Step 4: Use the information processing and analysis module (7) to set the exposure time parameters of the imaging and image acquisition module (4) for subsequent triggering of image acquisition; Step 5: Use the information processing and analysis module (7) to send a start instruction to the synchronization timing trigger generation module (6). The synchronization timing trigger generation module (6) generates a single synchronization pulse trigger signal to trigger the motion control module (5) simultaneously. and imaging and image acquisition module (4); Step six: Input the image collected by the imaging and image acquisition module (4) to the information processing and analysis module (7), perform correlation calculation between the collected image and the encoded information of the motion control module (5) in step three, and obtain Higher-precision images, while performing image processing based on preset algorithms to extract sample feature information; Step 7: Output corresponding detection results according to the processing and analysis results of the information processing and analysis module (7), and make corresponding alarm prompts based on the detection results to realize detection and analysis of the chip appearance. 7. A chip appearance detection method based on motion time correlation control according to claim 6, characterized in that: the encoding control mode setting method in step three is to set motion control within the time period of the image sensor exposure cycle The displacement sequence of module (5) on the X-Y plane sets the distance of each step of displacement and the time to maintain the current position. 8. The chip appearance detection method based on motion time correlation control according to claim 6, characterized in that: The method for setting the exposure time parameters in step 4 is to set the exposure period of the image sensor to be consistent with the total encoding control displacement time in step 3, and other parameters remain unchanged during this period. 9. A chip appearance detection method based on motion time correlation control according to claim 6, characterized in that: the method for extracting sample feature information in step 6 is: Collect data from the sample image amplified by the microscopic imaging system (2) to obtain the appearance image sample I0 of the detection chip; The original image I0 is associated with the matrix M corresponding to the encoding control method of the motion control module (5) in step 3, so as to realize the redistribution and interpolation of the values of the pixels of the original image I0 and obtain a higher-level image. ; Extract the characteristic information of the chip to be detected from the image sample obtained after the correlation calculation, and obtain the appearance characteristic information of the detection chip.