CN117792005B - High-precision force measuring device and control method of linear reluctance motor - Google Patents
High-precision force measuring device and control method of linear reluctance motor Download PDFInfo
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Abstract
A high-precision force measuring device and a control method for a linear reluctance motor belong to the technical field of high-end equipment. The measuring device comprises a reluctance motor, a voice coil motor and a motion platform, wherein the linear reluctance motor comprises an E-type component, an I-type component and a motor base; the motion platform comprises a motion platform base, a guide sleeve, a guide rail, a platform body and a grating ruler; the E-shaped component is fixedly arranged on the motor base, the moving platform base, the guide sleeve and the voice coil motor stator are all fixed on the moving platform base, the guide rail slides out of the guide sleeve, the guide sleeve is arranged in the platform body, and the platform body is fixed on the guide rail; the two ends of the guide rail are respectively connected with an I-type electromagnet of the I-type assembly and a rotor of the voice coil motor, a magnet gap is arranged between the I-type electromagnet and a bipolar electromagnet of the E-type assembly, and the grating ruler is arranged at the bottom of one end of the guide rail, which is positioned at the voice coil motor. The control method comprises a magnetic flux control loop of the reluctance motor and a position control loop of the voice coil motor. The invention can realize high-precision force measurement of the linear reluctance motor.
Description
Technical Field
The invention belongs to the technical field of high-end equipment, and particularly relates to a high-precision force measuring device and a control method of a linear reluctance motor.
Background
Following moore's law in the semiconductor industry, the integration of integrated circuit chips grows at an exponential rate, which is directly manifested as an increase in the precision requirements of the high-end equipment required in the integrated circuit manufacturing process. With the increase of the requirements of the semiconductor industry on product quality and processing efficiency, higher requirements are put on the speed, acceleration and positioning accuracy of high-end equipment. At present, the voice coil motor is the most commonly used actuator in an ultra-precise motion system, has the advantages of light weight, small volume, good linearity, high bandwidth and the like, and is the best choice for ultra-precise control in high-end equipment technology. However, under the limitation of the conditions such as volume, mass and the like, the voice coil motor reaches the physical limit and cannot meet the higher requirements of high-end equipment, so that the research of a new actuator has important significance.
In order to replace the application of voice coil motors in high-end equipment, linear reluctance motors have been developed. Compared with a voice coil motor, the linear reluctance motor has the characteristics of small volume, small current, small gap and large output, and can meet the high requirements of high-end equipment on speed and acceleration. However, in comparison to the linear relationship between the output force of the voice coil motor and the current, the output force of the linear reluctance motor has complex nonlinear characteristics, including the nonlinearity of the linear reluctance motor in which the output force is proportional to the square of the current and the position dependence of the output force in which the output force is inversely proportional to the square of the displacement, and the hysteresis nonlinearity of the ferromagnetic material of the linear reluctance motor. In the high-end equipment high-precision positioning process, strict requirements are required for the output force precision of the linear reluctance motor under the condition of small gaps, so that the output force of the linear reluctance motor needs to be accurately measured and controlled.
At present, a force sensor is generally adopted for measuring the output force of a motor, the force sensor is used for measuring the force applied by an object to be measured according to the principle of Newton's law of motion, but the force sensor can only measure the total force applied by the object and can not independently measure the output force of the motor, so that the output force of the linear reluctance motor can not be accurately measured by using a force sensor measuring mode, and the output force of the linear reluctance motor must be measured or estimated by other measurable signals.
The invention discloses a magnetic force measuring device and a magnetic force measuring method for a magnet, which belong to the technical field of magnetic force testing, and are provided with a publication number of CN116718967A and a publication date of 2023, 9, 8 and are named as the magnetic force measuring device and the magnetic force measuring method. The device can measure the magnetic force of the magnets at small intervals, and can measure the magnetic force between the magnets at continuous intervals by changing gaskets with different thicknesses. The invention relates to a device and a method for measuring magnetic force, which belong to the field of contact measurement by using a force sensor, wherein the actual measurement result is resultant force, and the measurement period is long, so that the device and the method are not suitable for being applied to a high-precision positioning system.
The invention discloses an electromagnetic force measuring device based on a coil module and a measuring method thereof, which is disclosed in patent application with publication number of CN115524045A and publication date of 2022, 12 and 27, and adopts a plurality of three-dimensional force sensors, the sensor is calibrated by a least square method, and electromagnetic force measurement is carried out by means of the calibrated plurality of three-dimensional force sensors. The patent application aims at measuring the electromagnetic force of the electric suspension system, belongs to application in special scenes, and is not suitable for measuring high-precision force measurement of a linear reluctance motor.
Disclosure of Invention
The invention aims to provide a high-precision force measuring device of a linear reluctance motor, which aims to solve the problems that the existing magnetic force measuring device is difficult to measure the magnetic force of a magnet in a small gap, the application range is limited due to the adoption of contact measurement, the magnetic force is difficult to measure or the measurement precision is not high when the magnetic force changes with time, and the measurement precision is difficult to improve due to the adoption of a force sensor. The high-precision force measuring device of the linear reluctance motor does not adopt a force sensor, and utilizes a non-contact measurement and indirect measurement method to accurately measure dynamic force of magnetic force generated by the linear reluctance motor under different micro gaps.
The invention provides a control method of a high-precision force measuring device of a linear reluctance motor, which aims to solve the problems that a magnet gap is difficult to fix and the gap stabilizing time is slow when the measuring device is used for measuring. The control method of the high-precision force measuring device of the linear reluctance motor can accurately control the output force of the linear reluctance motor, and realizes the accurate and rapid control of the magnet gap of the linear reluctance motor by utilizing the voice coil motor to counteract the output force of the linear reluctance motor.
According to the high-precision force measuring device of the linear reluctance motor, the linear reluctance motor and the voice coil motor are used for jointly controlling a high-precision motion platform.
In order to achieve the above purpose, the technical scheme adopted by the invention is as follows:
A high-precision force measuring device of a linear reluctance motor comprises the linear reluctance motor, a voice coil motor and a motion platform; the linear reluctance motor comprises an E-type component, an I-type component and a motor base; the voice coil motor comprises a voice coil motor stator and a voice coil motor rotor; the motion platform comprises a motion platform base, a guide sleeve, a guide rail, a platform body and a grating ruler; the E-shaped component is used as a stator of the linear reluctance motor, the E-shaped component is fixedly arranged on the motor base, the motion platform base, the guide sleeve and the voice coil motor stator are all fixed on the motion platform base, the guide rail slides out of the guide sleeve, the guide sleeve is arranged in the platform body, the platform body is fixed on the guide rail, and the platform body moves along the X-axis direction along with the guide rail; one end of the guide rail is connected with an I-type electromagnet of the I-type assembly, the other end of the guide rail is connected with a voice coil motor rotor, the I-type electromagnet is oppositely arranged with a bipolar electromagnet of the E-type assembly, a magnet gap is arranged between the I-type electromagnet and the bipolar electromagnet, the grating ruler is arranged at the bottom of one end of the guide rail, which is positioned at the voice coil motor, of the guide rail, and the voice coil motor rotor is in sliding connection with a voice coil motor stator along the X-axis direction.
Further, the E-shaped component comprises a primary coil, an induction coil, a bipolar electromagnet and an E-shaped component shell; the E-shaped component shell is fixed on the motor base, a first through hole is formed in one side wall of the E-shaped component shell, the bipolar electromagnet is arranged in the E-shaped component shell, the induction coil is wound on the peripheral side face of the middle tooth of the bipolar electromagnet, the primary coil is wound on the peripheral side face of the induction coil and is concentric with the induction coil, and one side end face of the primary coil, one side end face of the induction coil and one side end face of the bipolar electromagnet are arranged at the first through hole.
Further, the I-shaped component is used as a rotor of the linear reluctance motor and comprises an I-shaped electromagnet and an I-shaped component shell; a second through hole is formed in one side wall of the I-shaped component shell, the I-shaped electromagnet is fixed in the I-shaped component shell, and one end of the I-shaped electromagnet is arranged at the second through hole.
Further, the table body is U-shaped, and the internal and external top surfaces of table body are the plane, and the table body both ends all are equipped with the horizontal outer edge, two outer edges of table body and guide rail up end fixed connection.
A control method of a high-precision force measuring device of a linear reluctance motor, the control method comprising the steps of:
step one: control of a position control loop of the voice coil motor;
Taking a reference position signal X d of the grating ruler as a position feedback variable, the position controller C X tracks a desired reference position signal X d and takes the voice coil motor as a position feedback actuator to apply force to the guide rail;
Step two: controlling a magnetic flux control loop of the linear reluctance motor;
The induction voltage U R of the linear reluctance motor is subjected to integral calculation to obtain output magnetic flux B, the obtained output magnetic flux B is used as a magnetic flux feedback variable, and a magnetic flux controller C B of the linear reluctance motor can track a desired reference magnetic flux signal B d to realize magnetic flux control of the linear reluctance motor;
Step three: controlling magnetic flux feedback force of the linear reluctance motor; the method comprises the following specific steps:
Step three: according to Maxwell's equation set, the expression of the theoretical output force F of the linear reluctance motor is deduced: Wherein A is the effective area of the magnet gap, B is the output magnetic flux of the linear reluctance motor 1, and g is the magnet gap; the expression/> of the output magnetic flux B of the linear reluctance motor is deduced from the above expression
Step three, two: the output force reference signal F d and the magnet gap g of the linear reluctance motor are taken as input to obtain the reference magnetic flux signal B d of the linear reluctance motor, namelyB d is taken as an input signal of a magnetic flux control loop;
And step three: the output magnetic flux B and the magnet gap g of the linear reluctance motor are used as input signals to obtain the actual output force F R of the linear reluctance motor, namely The F R acts on the guide rail, and the actual output force F R of the linear reluctance motor and the output force F vc of the voice coil motor act on the guide rail at the same time;
And step three, four: and between the magnetic flux control loop of the linear reluctance motor and the position control loop of the voice coil motor, the output force reference signal F d of the linear reluctance motor is used as a force feedforward signal, and after being multiplied by the inverse 1/K mvc of the output force coefficient of the voice coil motor, feedforward current I FF,IFF of the voice coil motor controller and the feedforward current I X are obtained, and the current I vc,IX of the voice coil motor is obtained and is used as the control quantity of the position controller, so that the force applied by the voice coil motor to the guide rail is counteracted by the voice coil motor.
Further, in the second step, the output magnetic flux B obtained by integrating the induced voltage U R of the linear reluctance motor is specifically:
The induction voltage U R of the induction coil of the linear reluctance motor is collected, and the output magnetic flux B and K R of the linear reluctance motor are obtained through integration according to the formula B= -K R∫UR dt and are constants.
Compared with the prior art, the invention has the beneficial effects that: the high-precision force measuring device of the linear reluctance motor can realize single-degree-of-freedom motion of a motion platform, actively adjust the magnet gap of the linear reluctance motor, improve the efficiency of magnetic force measurement, utilize non-contact measurement and indirect measurement, use the voice coil motor as a force sensor of the linear reluctance motor, eliminate the limitation of the force sensor and realize the dynamic measurement of the output force of the linear reluctance motor. According to the control method of the high-precision force measuring device of the linear reluctance motor, the accurate control of the gap is realized through the position control of the voice coil motor and the magnetic flux control of the linear reluctance motor.
In summary, the high-precision force measuring device and the control method for the linear reluctance motor can accurately measure and control the output force of the linear reluctance motor. The invention is used in an ultra-precise motion system.
Drawings
FIG. 1 is a schematic diagram of a high-precision force measuring device for a linear reluctance motor according to the present invention;
FIG. 2 is a schematic diagram of a linear reluctance motor structure of a high-precision force measuring device of a linear reluctance motor provided by the invention;
FIG. 3 is a schematic diagram of the E-type assembly of the linear reluctance motor of the high-precision force measuring device of the linear reluctance motor;
FIG. 4 is a schematic diagram of the structure of a linear reluctance motor I-type component of the high-precision force measuring device of the linear reluctance motor provided by the invention;
FIG. 5 is a schematic view of the voice coil motor structure of a high precision force measuring device for a linear reluctance motor according to the present invention;
FIG. 6 is a schematic diagram of a motion platform of a high-precision force measuring device of a linear reluctance motor provided by the invention;
fig. 7 is a block diagram of a control method of the linear reluctance motor of the present invention.
In the figure: 1-a linear reluctance motor; 1-1-E type assembly; 1-1-1-primary coil; 1-1-2-induction coils; 1-1-3-E type electromagnet; 1-1-4-E type module housing; a 1-2-type I module; 1-2-1-I type electromagnet; a 1-2-2-I type component housing; 1-3-linear reluctance motor base; 2-a voice coil motor; 2-1-voice coil motor stator; 2-2-voice coil motor mover; 3-a motion platform; 3-1-a motion platform base; 3-2-guiding sleeve; 3-3-guide rails; 3-4-stage body; 3-5-grating ruler.
Detailed Description
The first embodiment is as follows: as shown in fig. 1 to 6, the present embodiment provides a high-precision force measuring device of a linear reluctance motor, which is a high-precision motion platform jointly controlled by a linear reluctance motor 1 and a voice coil motor 2, and comprises the linear reluctance motor 1, the voice coil motor 2 and the motion platform 3; the linear reluctance motor 1 comprises an E-type component 1-1, an I-type component 1-2 and a motor base 1-3; the voice coil motor 2 comprises a voice coil motor stator 2-1 and a voice coil motor rotor 2-2; the moving platform 3 comprises a moving platform base 3-1, a guide sleeve 3-2, a guide rail 3-3, a platform body 3-4 and a grating ruler 3-5;
The E-shaped component 1-1 is used as a stator of the linear reluctance motor 1, the E-shaped component 1-1 is fixedly arranged on a motor base 1-3, a moving platform base 3-1 (used for fixing the position of the moving platform 3), a guide sleeve 3-2 and a voice coil motor stator 2-1 are all fixed on the moving platform base 3-1, a guide rail 3-3 slides out of the guide sleeve 3-2, the guide sleeve 3-2 is arranged in a platform body 3-4, the platform body 3-4 is fixed on the guide rail 3-3, and the platform body 3-4 moves along the X axis direction along with the guide rail 3-3 (five degrees of freedom of the moving platform 3 are restrained to realize linear movement of the moving platform 3 along the X axis in a single degree of freedom); one end of a guide rail 3-3 is connected with an I-type electromagnet 1-2-1 of an I-type assembly 1-2, the other end of the guide rail 3-3 is connected with a voice coil motor rotor 2-2, the I-type electromagnet 1-2-1 and a bipolar electromagnet 1-1-3 of an E-type assembly 1-1 are oppositely arranged and are provided with a magnet gap therebetween, a grating ruler 3-5 is arranged at the bottom of the end of the guide rail 3-3, which is positioned at the voice coil motor 2 (the grating ruler 3-5 is matched with a linear reluctance motor 1 and the voice coil motor 2 for accurately positioning the moving platform 3), a voice coil motor rotor 2-2 is in sliding connection with the voice coil motor stator 2-1 along the X-axis direction (the voice coil motor stator 2-1 is T-shaped, the lower end of the voice coil motor stator 2-1 is fixedly connected with the upper end of a moving platform base 3-1), side walls at two ends of the voice coil motor rotor 2-2 are correspondingly provided with sliding grooves along the X-axis direction, and the sliding grooves are in sliding connection with two ends of the voice coil motor stator 2-1 in the horizontal direction.
Further, the E-type component 1-1 comprises a primary coil 1-1-1, an induction coil 1-1-2, a bipolar electromagnet 1-1-3 and an E-type component shell 1-1-4; e-shaped component shell 1-1-4 is fixed on motor base 1-3, is equipped with through-hole I on E-shaped component shell 1-1-4 one side wall, and bipolar electromagnet 1-1-3 installs in E-shaped component shell 1-1-4, and induction coil 1-1-2 twines on the side around the intermediate tooth of bipolar electromagnet 1-1-3, and primary coil 1-1 twines on the side around induction coil 1-1-2 and concentric with induction coil 1-1-2, and primary coil 1-1-1, induction coil 1-1-2 and bipolar electromagnet 1-1-3 one side terminal surface set up in through-hole one department.
The output force of the voice coil motor 2 is regulated by controlling the input current of the voice coil motor 2; the output force of the linear reluctance motor 1 is regulated by controlling the magnitude of the input current of the primary coil 1-1-1 of the linear reluctance motor 1.
Further, the I-type component 1-2 is used as a rotor of the linear reluctance motor 1, and the I-type component 1-2 comprises an I-type electromagnet 1-2-1 and an I-type component shell 1-2-2; a second through hole is formed in one side wall of the I-shaped component shell 1-2-2, the I-shaped electromagnet 1-2-1 is fixed in the I-shaped component shell 1-2-2, and one end of the I-shaped electromagnet 1-2-1 is arranged at the second through hole (when the linear reluctance motor 1 works, a stator of the linear reluctance motor 1 is fixed, and a rotor of the linear reluctance motor 1 moves along the X-axis direction).
Further, the table body 3-4 is U-shaped, the inner top surface and the outer top surface of the table body 3-4 are both planes, both ends of the table body 3-4 are provided with horizontal outer edges, and the two outer edges of the table body 3-4 are fixedly connected with the upper end face of the guide rail 3-3.
Through adjusting the output force of the voice coil motor 2, the movement and the positioning of the guide rail 3-3 in the single degree of freedom direction are realized by matching with the position information read by the grating ruler 3-5, namely, the adjustment and the fixation of the size of the magnet gap of the linear reluctance motor 1 are realized.
During measurement, the linear reluctance motor 1 is electrified, the voice coil motor 2 is used for fixing the size of a magnet gap of the linear reluctance motor 1, and when the output force of the voice coil motor 2 is equal to the output force of the linear reluctance motor 1, the magnet gap is fixed. According to the formula F vc＝KvcIvc, where F vc is the output force of the voice coil motor 2, I vc is the current of the voice coil motor 2, K vc is a constant (the value of which is related to the material and the size of the voice coil motor), and the output force of the voice coil motor 2 can be calculated by measuring the current control amount of the voice coil motor 2 when the magnet gap is fixed.
The second embodiment is as follows: as shown in fig. 1 to 7, the present embodiment provides a control method of a high-precision force measuring device of a linear reluctance motor, the control method including the steps of:
step one: control of a position control loop of the voice coil motor 2;
Taking the reference position signal X d of the grating ruler 3-5 as a position feedback variable, the position controller C X tracks the expected reference position signal X d and applies force to the guide rail 3-3 by taking the voice coil motor 2 as a position feedback actuator;
step two: control of a magnetic flux control circuit of the linear reluctance motor 1;
The induction voltage U R of the linear reluctance motor 1 is subjected to integral calculation to obtain output magnetic flux B, the obtained output magnetic flux B is used as a magnetic flux feedback variable, and a magnetic flux controller C B of the linear reluctance motor 1 can track a desired reference magnetic flux signal B d to realize magnetic flux control of the linear reluctance motor 1; the output magnetic flux B obtained by integrating the induced voltage U R of the linear reluctance motor 1 is specifically:
Collecting an induction voltage U R of an induction coil 1-1-2 of the linear reluctance motor 1, and obtaining an output magnetic flux B, K R of the linear reluctance motor 1 by integration according to a formula B= -K R∫UR dt, wherein the output magnetic flux B, K R is a constant (the value of the output magnetic flux B, K R is related to the number of turns of the induction coil and the cross section area of a middle tooth);
step three: magnetic flux feedback force control of the linear reluctance motor 1; the method comprises the following specific steps:
Step three: the expression of the theoretical output force F of the linear reluctance motor 1 is deduced from maxwell's equations: Wherein A is the effective area of the magnet gap, B is the output magnetic flux of the linear reluctance motor 1, and g is the magnet gap; the expression/>, of the output magnetic flux B of the linear reluctance motor 1 is deduced from the above expression
Step three, two: the output force reference signal F d and the magnet gap g of the linear reluctance motor 1 are taken as input to obtain the reference magnetic flux signal B d of the linear reluctance motor 1, namelyB d is taken as an input signal of a magnetic flux control loop;
And step three: the output magnetic flux B and the magnet gap g of the linear reluctance motor 1 are used as input signals to obtain the actual output force F R of the linear reluctance motor 1, namely F R acts on the guide rail 3-3, and the actual output force F R of the linear reluctance motor 1 and the output force F vc of the voice coil motor 2 act on the guide rail 3-3 at the same time;
And step three, four: the output force reference signal F d of the linear reluctance motor 1 is used as a force feedforward signal between the magnetic flux control loop of the linear reluctance motor 1 and the position control loop of the voice coil motor 2, and after being multiplied by the inverse 1/K mvc of the output force coefficient of the voice coil motor 2, the feedforward current I FF,IFF of the voice coil motor controller is obtained and added with the feedforward current I X to obtain the current I vc,IX of the voice coil motor 2, which is used as the control quantity of the position controller, so that the voice coil motor 2 is used for counteracting the force applied by the linear reluctance motor 1 to the guide rail 3-3 (the output force of the linear reluctance motor 1 is counteracted by the voice coil motor 2, and the control precision of the magnet gap is improved).
The output force of the voice coil motor 2 is regulated by controlling the input current of the voice coil motor 2; the output force of the linear reluctance motor 1 is regulated by controlling the input current of the primary coil 1-1-1 of the linear reluctance motor 1.
The method for realizing the high-precision force measurement of the linear reluctance motor by using the high-precision force measurement device comprises the following steps:
The first step: positioning the motion platform 3 by using the voice coil motor 2, determining a magnet gap g of the linear reluctance motor 1, and fixing the magnet gap g to ensure that the control quantity of the voice coil motor is zero, namely the output force is zero;
Through adjusting the output force of the voice coil motor 2, the movement and the positioning of the guide rail 3-3 in the single degree of freedom direction are realized by matching with the position information read by the grating ruler 3-5, and the adjustment and the fixation of the size of the magnet gap of the linear reluctance motor 1 are realized.
And a second step of: the linear reluctance motor 1 is electrified, the voice coil motor 2 is used for controlling the magnet gap g to be fixed, at the moment, the output force of the voice coil motor 2 is equal and opposite to the output force of the linear reluctance motor 1, the output force of the voice coil motor 2 is obtained by measuring the control quantity of the voice coil motor 2, and then the output force of the linear reluctance motor 1 is obtained, so that the high-precision force measurement of the linear reluctance motor 1 is realized.
The method comprises the following steps: the linear reluctance motor 1 is supplied with current, the voice coil motor 2 is used for fixing the size of a magnet gap g of the linear reluctance motor 1, and when the output force of the voice coil motor 2 is equal to the output force of the linear reluctance motor 1, the magnet gap is fixed. According to the formula F vc＝KIvc, F vc is the output force of the voice coil motor 2, I vc is the current of the voice coil motor, K is a constant, the output force of the voice coil motor 2 can be calculated by measuring the current control quantity of the voice coil motor 2 when the magnet gap is fixed, the voice coil motor 2 is used as a force sensor for outputting the force of the linear reluctance motor 1, and high-precision force measurement of the linear reluctance motor 1 is realized.
And a third specific embodiment: as shown in fig. 1 to 7, the present embodiment provides a control method of a high-precision force measuring device of a linear reluctance motor, which includes a control method of a position control circuit of a voice coil motor 2 and a control method of a magnetic flux control circuit of a linear reluctance motor 1.
In fig. 7, a dashed box is a position control loop of the voice coil motor 2, where X d is a reference position, C X is a position controller of the voice coil motor 2, I X is a control amount of the position controller, I vc is a current of the voice coil motor 2, G vc is an output force of the voice coil motor 2,F vc from the voice coil motor 2, G is a guide rail 3-3, X is an actual position read by the grating ruler 3-5, and when a position where the magnet gap G is zero is taken as an initial position, X represents a size of the magnet gap G.
The inside of the dashed-dotted line square frame is a magnetic flux control loop of the linear reluctance motor 1, wherein B d is a reference magnetic flux signal, C B is a magnetic flux controller of the linear reluctance motor 1, I R is an input current of the linear reluctance motor 1, G R is the linear reluctance motor 1, U R is an induced voltage of an induction coil 1-1-2 of the linear reluctance motor 1, 1/s is an integrator, and B is an output magnetic flux of the linear reluctance motor 1.
Between the magnetic flux control loop and the position control loop, F d is an output force reference signal of the linear reluctance motor 1, 1/K mvc is the inverse of the output coefficient of the voice coil motor 2, I FF is the feedforward current of the voice coil motor 2, B d(Fd, g) and F R (B, g) are the relations among the output force of the linear reluctance motor, the output magnetic flux and the magnet gap, and F R is the actual output force of the linear reluctance motor 1.
Step one: control of a position control loop of the voice coil motor 2;
The position controller C x of the voice coil motor 2 selects a PID controller, an input signal is a reference position X d of the guide rail 3-3, the position controller C X controls the current I vc of the voice coil motor 2, the output force F vc,Fvc of the voice coil motor 2 is applied to the guide rail 3-3 by controlling the current of the voice coil motor 2, the signal of the grating ruler 3-5, namely the actual position X of the guide rail 3-3, is used as a position feedback variable, and the position control loop of the voice coil motor 2 enables the position control precision of the guide rail 3-3 to reach the nm level.
Step two: control of a magnetic flux control circuit of the linear reluctance motor 1;
The magnetic flux controller C B of the linear reluctance motor 1 selects a PI controller, an input signal is a reference magnetic flux signal B d, the magnetic flux controller C B controls the input current I R of the linear reluctance motor 1, the induction voltage U R of the induction coil 1-1-2 of the linear reluctance motor 1 is collected, the output magnetic flux B of the linear reluctance motor 1 is obtained through integration of an integrator 1/s, and the output magnetic flux B is used as a magnetic flux feedback variable to realize magnetic flux control of the linear reluctance motor 1.
Step three: magnetic flux feedback force control of the linear reluctance motor 1;
from maxwell's equations, the expression of the theoretical output force F of the linear reluctance motor 1 can be deduced: Wherein A is the effective area of the magnet gap, B is the output magnetic flux of the linear reluctance motor 1, and g is the magnet gap; the expression/>, of the output magnetic flux B of the linear reluctance motor 1 is deduced from the above expression
The output force reference signal F d and the magnet gap g of the linear reluctance motor are taken as input to obtain the reference magnetic flux signal B d of the linear reluctance motor 1, namelyB d is used as an input signal to the flux control loop.
The output magnetic flux B and the magnet gap g of the linear reluctance motor 1 are used as input signals to obtain the actual output force F R of the linear reluctance motor 1, namelyF R acts on the guide rail 3-3, and the actual output force F R of the linear reluctance motor 1 and the output force F vc of the voice coil motor 2 act on the guide rail at the same time.
Between the position control loop and the magnetic flux control loop, the output force reference signal F d of the linear reluctance motor 1 is used as a force feedforward signal, and is multiplied by the inverse 1/K mvc of the output coefficient of the voice coil motor 2 to obtain the feedforward current I FF,IFF and I X of the voice coil motor 2, so that the current I vc of the voice coil motor 2 is obtained, the output force of the linear reluctance motor 1 is offset by the voice coil motor 2, and the control precision of the magnet gap is improved.
The foregoing is only a preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be able to apply equivalent substitutions or alterations to the technical solution and the inventive concept thereof according to the technical scope of the present invention disclosed herein.
Claims (4)
1. A high-precision force measuring device of a linear reluctance motor is characterized in that: comprises a linear reluctance motor (1), a voice coil motor (2) and a motion platform (3); the linear reluctance motor (1) comprises an E-type component (1-1), an I-type component (1-2) and a motor base (1-3); the voice coil motor (2) comprises a voice coil motor stator (2-1) and a voice coil motor rotor (2-2); the moving platform (3) comprises a moving platform base (3-1), a guide sleeve (3-2), a guide rail (3-3), a platform body (3-4) and a grating ruler (3-5); the E-type component (1-1) comprises a primary coil (1-1-1), an induction coil (1-1-2), a bipolar electromagnet (1-1-3) and an E-type component shell (1-1-4); the I-type component (1-2) is used as a rotor of the linear reluctance motor (1), and the I-type component (1-2) comprises an I-type electromagnet (1-2-1) and an I-type component shell (1-2-2);
The E-shaped component (1-1) is used as a stator of the linear reluctance motor (1), the E-shaped component (1-1) is fixedly arranged on the motor base (1-3), the motion platform base (3-1), the guide sleeve (3-2) and the voice coil motor stator (2-1) are all fixed on the motion platform base (3-1), the guide rail (3-3) slides out of the guide sleeve (3-2), the guide sleeve (3-2) is arranged in the platform body (3-4), the platform body (3-4) is fixed on the guide rail (3-3), and the platform body (3-4) moves along the X-axis direction along with the guide rail (3-3); one end of a guide rail (3-3) is connected with an I-type electromagnet (1-2-1), the other end of the guide rail (3-3) is connected with a voice coil motor rotor (2-2), the I-type electromagnet (1-2-1) and a bipolar electromagnet (1-1-3) are oppositely arranged, a magnet gap is arranged between the two electromagnets, a grating ruler (3-5) is arranged at the bottom of the end, located at the voice coil motor (2), of the guide rail (3-3), and the voice coil motor rotor (2-2) is in sliding connection with the voice coil motor stator (2-1) along the X-axis direction;
The E-shaped component shell (1-1-4) is fixed on the motor base (1-3), a first through hole is formed in one side wall of the E-shaped component shell (1-1-4), the bipolar electromagnet (1-1-3) is installed in the E-shaped component shell (1-1-4), the induction coil (1-1-2) is wound on the peripheral side face of the middle tooth of the bipolar electromagnet (1-1-3), the primary coil (1-1-1) is wound on the peripheral side face of the induction coil (1-1-2) and is concentric with the induction coil (1-1-2), and the primary coil (1-1-1), the induction coil (1-1-2) and one side end face of the bipolar electromagnet (1-1-3) are arranged at the first through hole;
A second through hole is formed in one side wall of the I-shaped component shell (1-2-2), the I-shaped electromagnet (1-2-1) is fixed in the I-shaped component shell (1-2-2), and one end of the I-shaped electromagnet (1-2-1) is arranged at the second through hole.
2. The high-precision force measurement device of a linear reluctance motor according to claim 1, wherein: the table body (3-4) is U-shaped, the inner top surface and the outer top surface of the table body (3-4) are both planes, the two ends of the table body (3-4) are both provided with horizontal outer edges, and the two outer edges of the table body (3-4) are fixedly connected with the upper end surface of the guide rail (3-3).
3. A control method of the high-precision force measuring device according to any one of claims 1 to 2, characterized in that: the control method comprises the following steps:
Step one: control of a position control loop of the voice coil motor (2);
Taking a reference position signal X d of the grating ruler (3-5) as a position feedback variable, the position controller C X tracks the expected reference position signal X d and takes the voice coil motor (2) as a position feedback actuator to apply force to the guide rail (3-3);
Step two: control of a magnetic flux control loop of a linear reluctance motor (1);
The induction voltage U R of the linear reluctance motor (1) is subjected to integral calculation to obtain output magnetic flux B, the obtained output magnetic flux B is used as a magnetic flux feedback variable, and a magnetic flux controller C B of the linear reluctance motor (1) can track a desired reference magnetic flux signal B d to realize magnetic flux control of the linear reluctance motor (1);
step three: controlling magnetic flux feedback force of the linear reluctance motor (1); the method comprises the following specific steps:
Step three: according to Maxwell's equation set, the expression of the theoretical output force F of the linear reluctance motor (1) is deduced: wherein A is the effective area of a magnet gap, B is the output magnetic flux of the linear reluctance motor (1), and g is the magnet gap; the expression/>, of the output magnetic flux B of the linear reluctance motor (1) is deduced from the expression
Step three, two: taking the output force reference signal F d and the magnet gap g of the linear reluctance motor (1) as inputs to obtain a reference magnetic flux signal B d of the linear reluctance motor (1), namelyB d is taken as an input signal of a magnetic flux control loop;
And step three: the output magnetic flux B and the magnet gap g of the linear reluctance motor (1) are used as input signals to obtain the actual output force F R of the linear reluctance motor (1), namely F R acts on the guide rail (3-3), and the actual output force F R of the linear reluctance motor (1) and the output force F vc of the voice coil motor (2) act on the guide rail (3-3) at the same time;
And step three, four: the output force reference signal F d of the linear reluctance motor (1) is used as a force feedforward signal between a magnetic flux control loop of the linear reluctance motor (1) and a position control loop of the voice coil motor (2), and the force feedforward signal is multiplied by the reciprocal 1/K mvc of the output force coefficient of the voice coil motor (2) to obtain feedforward current I FF,IFF of the voice coil motor controller and I X, and the current I vc,IX of the voice coil motor (2) is obtained by adding the feedforward current I FF,IFF and the feedforward current I X to be used as the control quantity of the position controller, so that the force applied by the voice coil motor (2) to the guide rail (3-3) by the linear reluctance motor (1) is counteracted.
4. A control method according to claim 3, characterized in that: in the second step, the output magnetic flux B obtained by integrating the induced voltage U R of the linear reluctance motor (1) is specifically:
The induction voltage U R of the induction coil (1-1-2) of the linear reluctance motor (1) is collected, and the output magnetic flux B and K R of the linear reluctance motor (1) are obtained through integration according to the formula B= -K R∫UR dt and are constant.
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