CN107885036A - Sports platform drive device - Google Patents
Sports platform drive device Download PDFInfo
- Publication number
- CN107885036A CN107885036A CN201610862123.5A CN201610862123A CN107885036A CN 107885036 A CN107885036 A CN 107885036A CN 201610862123 A CN201610862123 A CN 201610862123A CN 107885036 A CN107885036 A CN 107885036A
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- CN
- China
- Prior art keywords
- micropositioner
- group
- drive device
- motors
- sports platform
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
- G03F7/70725—Stages control
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Linear Motors (AREA)
Abstract
The invention provides a kind of sports platform drive device, for providing driving force to the sports platform.The sports platform drive device includes the long stroke group of motors of driving coarse motion platform motion and the short stroke group of motors of driving micropositioner motion；Also include reluctance motor group and micropositioner control module.The reluctance motor group is used to provide thrust for the micropositioner acceleration, deceleration degree；The micropositioner control module controls the short stroke group of motors to contribute and controls the reluctance motor group to contribute by an open-loop feed-forward passage by a closed loop feedback passage.Solve the problems, such as it is existing it is thick, micropositioner response speed is inadequate.
Description
Technical field
The present invention relates to photoetching machine technique field, more particularly to sports platform drive device.
Background technology
For pursue litho machine yield lifting target, litho machine sports platform on the premise of positioning accuracy request is ensured,
More stringent requirement constantly is proposed to motion index such as speed, acceleration.In the case where moving-mass is consistent, speed
The lifting of the motion index such as degree, acceleration relies only on the realization of more large driving force.Usual litho machine sports platform is using thick micro-
Dynamic form, coarse motion platform perform big stroke motion, and micropositioner depends on coarse motion platform and realizes high-precision positioning performance.Wherein coarse motion
Platform is typically performed by linear motor direct-driven mode, and micropositioner is then driven by voice coil motor (Voice Coil Motor, VCM)
It is dynamic to perform.Under the restriction of each side constraints such as space layout, power of motor, heat dissipation, the drive of micropositioner voice coil motor
Motivation level has seemed awkward under the high requirement accelerated at a high speed.
A kind of drive form of reluctance motor was referred to later, and compared to VCM, reluctance motor has obvious in terms of driving force
Advantage.Output by reluctance motor and alive square of proportional relation in coil, therefore compare VCM (VCM outputs
It is linear with the electric current in coil) for have obvious driving force output advantage.But the advantage of only high thrust is
Requirement of the litho machine sports platform to high position precision can not be met.Because reluctance motor make use of " magnetic resistance minimum principle " to produce
Electromagnetic force, therefore the problem of hysteresis characteristic and remanent magnetism be present unavoidably so that the reluctance motor being driven using ferromagnetic material is deposited
Response speed is inadequate the problem of.
The content of the invention
It is an object of the invention to provide sports platform drive device, to solve existing coarse motion platform and micropositioner response speed
The problem of inadequate.
In order to solve the above technical problems, the present invention provides a kind of sports platform drive device, the sports platform includes coarse motion platform
And micropositioner, the drive device include driving the long stroke group of motors of the coarse motion platform motion and drive the micropositioner motion
Short stroke group of motors, the drive device also includes：
Reluctance motor group, for providing thrust for the micropositioner acceleration, deceleration degree；
And micropositioner control module, control the short stroke group of motors to contribute and pass through one by a closed loop feedback passage
Open-loop feed-forward passage controls the reluctance motor group to contribute.
Specifically, the long stroke group of motors includes linear electric motors.
Specifically, the short stroke group of motors includes multigroup voice coil motor.
Specifically, the reluctance motor group includes at least one pair of reluctance motor, it is fixed that the pair of reluctance motor includes first
Son, the second stator and mover, the pair of reluctance motor share a mover, and the mover is arranged on first stator and the
The centre of two stators.
Specifically, coil is wound with respectively on first stator and second stator.
Specifically, first stator and second stator are fixedly connected with the coarse motion platform；The mover with it is described
Micropositioner is fixedly connected.
Specifically, first stator and second stator are iron core, the mover is magnetic conductor.
Specifically, the micropositioner control module includes track setting value generator and alternator；
The open-loop feed-forward passage include be sequentially connected the track setting value generator, alternator, reluctance motor group
And micropositioner, the track setting value generator provide acceleration information corresponding with the reference position information of micropositioner to described
Alternator, the alternator by the acceleration information compared with default threshold range, according to comparative result determine plus,
Deceleration exports situation, starts realize that the reluctance motor effect for the speed output that adds deduct is described micro- in the reluctance motor group afterwards
Dynamic platform.
Specifically, the micropositioner control module also includes short stroke motor group controller and gain balance matrix；
The closed loop feedback passage includes the track setting value generator of head and the tail connection, the control of short stroke group of motors
Device, gain balance matrix, short stroke group of motors, micropositioner and location measurement unit, the track setting value generator is by described in
The reference position information of micropositioner is sent to the short stroke motor group controller, and the short stroke motor group controller is to described
Error amount between the actual position information for the micropositioner that the reference position information and location measurement unit of micropositioner measure
Calculating is corrected, the gain balance matrix decomposes the error amount after the correction each free degree of micropositioner, and phase
Answer ground to start short stroke motor corresponding to each free degree in the short stroke group of motors and act on the micropositioner.
Specifically, the default threshold range is specially [- Δ, Δ], the acceleration information starts real when being more than Δ
The reluctance motor of existing acceleration output；The acceleration information be less than-Δ when start realize deceleration output reluctance motor；Institute
When stating acceleration information ∈ [- Δ, Δ], the reluctance motor group does not work.
Specifically, the short stroke group of motors includes at least three groups of voice coil motors, for realizing the level of the micropositioner
To three-degree-of-freedom motion.
Specifically, the linear electric motors include magnet array, coil array and two-phase-region casting device, the coil array includes
Multiple coils, one group of coil described in each two connection one two-phase-region casting device, the two-phase-region casting device drive the coil
Array is interacted with the magnet array, and motive force is provided to the coarse motion platform.
Formed specifically, the magnet array is arranged by opposite polarity magnet interval.
In sports platform drive device provided by the invention, including drive the long stroke group of motors of coarse motion platform motion and drive micro-
The short stroke group of motors of dynamic platform motion；The drive device also includes reluctance motor group and micropositioner control module.The magnetic resistance
Group of motors is used to provide thrust for the micropositioner acceleration, deceleration degree；The micropositioner control module passes through a closed loop feedback passage
Control the short stroke group of motors to contribute and control the reluctance motor group to contribute by an open-loop feed-forward passage, solve existing
Slightly, the problem of micropositioner response speed is inadequate.The present invention is in coarse motion platform driver element, will by changing coil array format
One group of coil described in each two two-phase-region casting device of connection one, so as to be lifted by the intensity of electric current in coil, so that coarse motion
Platform driver element obtains bigger thrust.
Brief description of the drawings
Fig. 1 is sports platform driving device structure schematic diagram provided by the invention；
Fig. 2 is structure of the linear motion actuator schematic diagram；
Fig. 3 is DC motor Driver dispersing mode provided by the invention and the DC motor Driver dispersing mode of prior art
Contrast schematic diagram；
Fig. 4 is the control strategy schematic diagram of micropositioner control module provided by the invention；
Fig. 5 is the operation principle schematic diagram of alternator in micropositioner control module shown in Fig. 4.
Embodiment
Sports platform drive device proposed by the present invention is described in further detail below in conjunction with the drawings and specific embodiments.
According to following explanation and claims, advantages and features of the invention will become apparent from.It should be noted that accompanying drawing is using very
Simplified form and non-accurately ratio is used, only for the purpose of facilitating and clarifying the purpose of the embodiments of the invention.
Fig. 1 is sports platform driving device structure schematic diagram provided by the invention, for providing driving power, institute to sports platform
Stating sports platform includes coarse motion platform and micropositioner, and the sports platform drive device includes driving the long stroke electricity of the coarse motion platform motion
Unit and the short stroke group of motors for driving the micropositioner motion, in addition to reluctance motor group, accelerate and subtract for the micropositioner
Fast process provides required high thrust；And micropositioner control module, the short stroke electricity is controlled by a closed loop feedback passage
Machine is contributed and controls the reluctance motor group to contribute by an open-loop feed-forward passage.
In the present embodiment, long stroke group of motors uses linear electric motors, and the linear electric motors include magnet array, coil array
With two-phase-region casting device, the coil array is made up of multiple coils, and one group of coil described in each two connection one two-phase is driven
Dynamic device, motive force is provided to the coarse motion platform.
Please continue to refer to Fig. 1, reluctance motor group includes a pair of reluctance motors, the pair of reluctance motor bag in the present embodiment
Include the first stator 11a, the second stator 11b and mover 10；Coil 12a, second stator are wound with the first stator 11a
Coil 12b is wound with 11b, the mover 10 is arranged on the first stator 11a and the second stator 11b centre.Institute
State the first stator 11a and the second stator 11b is fixedly connected with the coarse motion platform；The mover 10 is fixed with the micropositioner
Connection.
Preferably, in the present embodiment, the first stator 11a and the second stator 11b are iron core, the mover 10
For magnetic conductor.
Specifically, the short stroke group of motors includes multigroup voice coil motor, it is arranged in closed loop feedback passage, for conduct
Control accuracy when the feedback actuator of the micropositioner is to ensure uniform motion and positioning；Short stroke motor described in this implementation
Group includes three groups of voice coil motors, voice coil motor 13a, the voice coil motor 13c of specially equidirectional output and with above-mentioned two voice coil loudspeaker voice coil
Motor goes out the orthogonal voice coil motor 13b of force direction.Combination between described voice coil motor 13a, 13b and 13c is contributed and can realized
Relative three-degree-of-freedom motion between the coarse motion platform and the micropositioner.
Fig. 2 is structure of the linear motion actuator schematic diagram, and the direct current generator includes magnet array 21 and coil array 22, the magnetic
Iron array 21 is arranged by opposite polarity magnet interval, in this embodiment it is assumed that the centre-to-centre spacing between adjacent two magnet claims
For pole pitch τ.
Referring to Fig. 3, the position 31 in Fig. 3 is linear electric motors type of drive, position 32 are that the present invention carries in the prior art
The linear electric motors type of drive of confession.Totally 9 coils in the position 31, the centre-to-centre spacing of adjacent two coil are 4 τ/3, every three lines
Enclose one group of connection, one three-phase drive device and form a three-phase drive unit, totally 3 three-phase drive units, it is seen that linear electric motors
Power is shared by 3 three-phase drive devices.Totally 8 coils in the position 32, the centre-to-centre spacing of adjacent two coil is 3 τ/2,
One group of each two coil connection one two-phase-region casting device forms a two-phase-region casting unit, totally 4 two-phase-region casting units, it is seen that straight
The power of line motor is now shared by 4 two-phase-region casting devices, compared to the straight line of the prior art shown in the position 31
Motor drive mode, the driving force of the type of drive of position 32 are bigger.And from the position 31 and the position 32
Structural representation contrast can see, and both share pole pitch parameter τ, i.e., need not change the structure design of the magnet array 21.
Moreover, totally 9 coils shown in the position 31, τ/3 of adjacent windings spacing 4, the τ of 22 overall length of coil array 12；The position
Totally 8 coils shown in 32, τ/2 of adjacent windings spacing 3, the overall length of coil array 22 are still 12 τ, that is, the coil array 22
Packing forms it is constant, do not influence its structure design.
As shown in figure 4, the control strategy schematic diagram for the present embodiment micropositioner control module.The micropositioner control module
Including track setting value generator 401, short stroke motor group controller 402, gain balance matrix 403, the driving of short stroke motor
Device group 404, alternator 408, reluctance machine drive group 409 (i.e. forward driver 4 and negative sense driver 5).Wherein described rail
Mark setting value generator 401 provides the reference position information of micropositioner 407, and the reference position information of the micropositioner 407 can be with
The actual position value of the micropositioner 407 obtained from the location measurement unit 406 shown in feedback channel is compared, so that will
Error amount is conveyed to the short stroke motor group controller 402 and is corrected calculating.The track setting value generator 401 simultaneously
The feedforward control that acceleration information corresponding with the reference position information of the micropositioner 407 is used for the micropositioner 407 is also provided
System.It is to realize institute by three groups of voice coil motors (i.e. voice coil motor 13a, voice coil motor 13b and voice coil motor 13c) in the present embodiment
The motion of the Three Degree Of Freedom of micropositioner 407 is stated, the corresponding short stroke motor driver group 404 (is driven including three drivers
Dynamic device 1, driver 2 and driver 3).Therefore need to control the short stroke group of motors by the gain balance matrix 403
The three-degree-of-freedom motion in error amount after the correction of device 402 decomposes three actuator physical axis, the short stroke motor driving
Each driver starts voice coil motor corresponding to each free degree in device group 404, described in the case where no feedforward path acts on
The output action of short stroke group of motors 405 passes through institute's position measurement list that sensor is built to after on the micropositioner 407
The feedback of member 406, have been able to build a controlled closed-loop system, i.e., now system possesses the function of tracking response.Pass through
Parameter adjustment to the short stroke motor group controller 402, can meet certain bandwidth requirement, so as to improve system response
Ability.
But bandwidth of the bandwidth far away from feedforward current ring of feedback position closed-loop is on the one hand limited to, on the other hand
The motor of voice coil motor in itself is contributed and also had under the restriction of each side constraints such as space layout, power of motor, heat dissipation
Limit, can not realize higher Velocity-acceleration requirement.Therefore, the invention is intended to reluctance motor group is inserted in open-loop feed-forward passage
410, as shown in Figure 4, corresponding is the reluctance machine drive group 409.Because between the dynamic stator of reluctance motor only
Suction be present and do not have repulsion, therefore to realize acceleration and retarded motion of the fine motion during a stepping, the magnetic resistance electricity
Unit 410 includes a pair of reluctance motors (i.e. reluctance motor 1 and reluctance motor 2), and the pair of reluctance motor includes two stators,
And a mover is shared, micropositioner plus/minus speed is realized by the suction between stator and mover, and use the alternator 408
Realize and accelerate and motor alternate in moderating process.
The operation principle of the alternator 408 is as shown in figure 5, wherein ACC is occurred from track setting value described in Fig. 4
Orbital acceleration signal caused by device 401, by compared with given threshold Δ, to determine being that forward drive passage is defeated
Go out, negative sense driving passage exports or without output.The purpose for setting the threshold value Δ is in order to avoid in the ACC signals
High frequency move within narrow limits caused by it is unnecessary frequently toggle, when the ACC signals are more than threshold value Δ, i.e. track setting
When value exports positive signal for faster, the alternator 408 starts the forward driver 4 in the reluctance machine drive group 409
Export, the output forward direction electromagnetic force of the reluctance motor 1 in the reluctance motor group 410.Similarly, when ACC signals be less than threshold value-
During Δ, i.e., when track setting value exports negative sense signal for faster, the alternator 408 starts the reluctance machine drive group 409
In negative sense driver 5 export, the output negative sense electromagnetic force of the reluctance motor 2 in the reluctance motor group 410, when ACC signals
When belonging to [- Δ, Δ], the reluctance motor group 410 is without output.
Foregoing description is only the description to present pre-ferred embodiments, not to any restriction of the scope of the invention, this hair
Any change, the modification that the those of ordinary skill in bright field does according to the disclosure above content, belong to the protection of claims
Scope.
Claims (13)
1. a kind of sports platform drive device, the sports platform includes coarse motion platform and micropositioner, and the drive device includes driving institute
State the long stroke group of motors of coarse motion platform motion and drive the short stroke group of motors of the micropositioner motion, it is characterised in that be described
Drive device also includes：
Reluctance motor group, for providing thrust for the micropositioner acceleration, deceleration degree；
And micropositioner control module, the short stroke group of motors output is controlled by a closed loop feedback passage and passes through an open loop
Feedforward path controls the reluctance motor group to contribute.
2. sports platform drive device as claimed in claim 1, it is characterised in that the long stroke group of motors includes straight-line electric
Machine.
3. sports platform drive device as claimed in claim 1, it is characterised in that the short stroke group of motors includes multigroup voice coil loudspeaker voice coil
Motor.
4. sports platform drive device as claimed in claim 1, it is characterised in that the reluctance motor group includes at least one pair of magnetic
Motor is hindered, the pair of reluctance motor includes the first stator, the second stator and mover, and the pair of reluctance motor shares one and moved
Son, the mover are arranged on the centre of first stator and the second stator.
5. sports platform drive device as claimed in claim 4, it is characterised in that on first stator and second stator
Coil is wound with respectively.
6. sports platform drive device as claimed in claim 4, it is characterised in that first stator and second stator with
The coarse motion platform is fixedly connected；The mover is fixedly connected with the micropositioner.
7. sports platform drive device as claimed in claim 4, it is characterised in that first stator and second stator are
Iron core, the mover are magnetic conductor.
8. sports platform drive device as claimed in claim 1, it is characterised in that the micropositioner control module is set including track
Constant value generator and alternator；
The track setting value generator that the open-loop feed-forward passage includes being sequentially connected, alternator, reluctance motor group and micro-
Dynamic platform, the track setting value generator provide acceleration information corresponding with the reference position information of micropositioner to the rotation
The acceleration information compared with default threshold range, acceleration, deceleration is determined according to comparative result by device, the alternator
Output situation is spent, starts realize that the reluctance motor for the speed output that adds deduct acts on the fine motion in the reluctance motor group afterwards
Platform.
9. sports platform drive device as claimed in claim 8, it is characterised in that the micropositioner control module also includes short row
Journey motor group controller and gain balance matrix；
The closed loop feedback passage includes the track setting value generator, short stroke motor group controller, increasing of head and the tail connection
Beneficial balancing matrix, short stroke group of motors, micropositioner and location measurement unit, the track setting value generator is by the micropositioner
Reference position information be sent to the short stroke motor group controller, the short stroke motor group controller is to the micropositioner
Reference position information and the actual position information of the micropositioner that measures of location measurement unit between error amount carry out school
Positive to calculate, the gain balance matrix decomposes the error amount after the correction each free degree of micropositioner, and correspondingly opens
Move short stroke motor corresponding to each free degree in the short stroke group of motors and act on the micropositioner.
10. sports platform drive device as claimed in claim 8, it is characterised in that the default threshold range be specially [-
Δ, Δ], start the reluctance motor for realizing acceleration output when the acceleration information is more than Δ；The acceleration information be less than-
Start the reluctance motor for realizing deceleration output during Δ.
11. sports platform drive device as claimed in claim 3, it is characterised in that the short stroke group of motors includes at least three
Group voice coil motor, for realizing the horizontal to three-degree-of-freedom motion of the micropositioner.
12. sports platform drive device as claimed in claim 2, it is characterised in that the linear electric motors include magnet array, line
Circle array and two-phase-region casting device, the coil array include multiple coils, one group of coil described in each two connection one described two
Phase driver, the two-phase-region casting device drive the coil array to be interacted with the magnet array, carried to the coarse motion platform
For motive force.
13. sports platform drive device as claimed in claim 12, it is characterised in that the magnet array is by opposite polarity magnetic
Iron interval, which is arranged, to be formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610862123.5A CN107885036A (en) | 2016-09-29 | 2016-09-29 | Sports platform drive device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610862123.5A CN107885036A (en) | 2016-09-29 | 2016-09-29 | Sports platform drive device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107885036A true CN107885036A (en) | 2018-04-06 |
Family
ID=61769889
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610862123.5A Pending CN107885036A (en) | 2016-09-29 | 2016-09-29 | Sports platform drive device |
Country Status (1)
| Country | Link |
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| CN (1) | CN107885036A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113885298A (en) * | 2021-09-22 | 2022-01-04 | 哈尔滨工业大学 | Magnetic suspension type mask table of photoetching machine |
| CN117792005A (en) * | 2023-12-28 | 2024-03-29 | 哈尔滨工业大学 | High-precision force measuring device and control method of linear reluctance motor |
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| CN101464634A (en) * | 2007-12-19 | 2009-06-24 | Asml荷兰有限公司 | Lithographic apparatus, workbench system and its control method |
| CN101777821A (en) * | 2010-04-12 | 2010-07-14 | 哈尔滨工业大学 | Concentrated-winding multi-segment permanent magnet synchronous linear motor |
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2016
- 2016-09-29 CN CN201610862123.5A patent/CN107885036A/en active Pending
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101464634A (en) * | 2007-12-19 | 2009-06-24 | Asml荷兰有限公司 | Lithographic apparatus, workbench system and its control method |
| CN101777821A (en) * | 2010-04-12 | 2010-07-14 | 哈尔滨工业大学 | Concentrated-winding multi-segment permanent magnet synchronous linear motor |
Non-Patent Citations (1)
| Title |
|---|
| N.H.VRIJSEN等: "Comparision of linear voice coil and reluctance actuators for high-precision applications", 《14TH INTERNATIONAL POWER ELECTRONICS AND MOTION CONFERENCE, EPE-PEMC 2010》 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113885298A (en) * | 2021-09-22 | 2022-01-04 | 哈尔滨工业大学 | Magnetic suspension type mask table of photoetching machine |
| CN117792005A (en) * | 2023-12-28 | 2024-03-29 | 哈尔滨工业大学 | High-precision force measuring device and control method of linear reluctance motor |
| CN117792005B (en) * | 2023-12-28 | 2024-06-04 | 哈尔滨工业大学 | High-precision force measuring device and control method of linear reluctance motor |
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