CN107885036A - Sports platform drive device - Google Patents

Sports platform drive device Download PDF

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Publication number
CN107885036A
CN107885036A CN201610862123.5A CN201610862123A CN107885036A CN 107885036 A CN107885036 A CN 107885036A CN 201610862123 A CN201610862123 A CN 201610862123A CN 107885036 A CN107885036 A CN 107885036A
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CN
China
Prior art keywords
micropositioner
group
drive device
motors
sports platform
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201610862123.5A
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Chinese (zh)
Inventor
张霖
胡兵
季汉川
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Shanghai Micro Electronics Equipment Co Ltd
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Shanghai Micro Electronics Equipment Co Ltd
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Publication date
Application filed by Shanghai Micro Electronics Equipment Co Ltd filed Critical Shanghai Micro Electronics Equipment Co Ltd
Priority to CN201610862123.5A priority Critical patent/CN107885036A/en
Publication of CN107885036A publication Critical patent/CN107885036A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691Handling of masks or workpieces
    • G03F7/70716Stages
    • G03F7/70725Stages control

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Linear Motors (AREA)

Abstract

The invention provides a kind of sports platform drive device, for providing driving force to the sports platform.The sports platform drive device includes the long stroke group of motors of driving coarse motion platform motion and the short stroke group of motors of driving micropositioner motion;Also include reluctance motor group and micropositioner control module.The reluctance motor group is used to provide thrust for the micropositioner acceleration, deceleration degree;The micropositioner control module controls the short stroke group of motors to contribute and controls the reluctance motor group to contribute by an open-loop feed-forward passage by a closed loop feedback passage.Solve the problems, such as it is existing it is thick, micropositioner response speed is inadequate.

Description

Sports platform drive device
Technical field
The present invention relates to photoetching machine technique field, more particularly to sports platform drive device.
Background technology
For pursue litho machine yield lifting target, litho machine sports platform on the premise of positioning accuracy request is ensured, More stringent requirement constantly is proposed to motion index such as speed, acceleration.In the case where moving-mass is consistent, speed The lifting of the motion index such as degree, acceleration relies only on the realization of more large driving force.Usual litho machine sports platform is using thick micro- Dynamic form, coarse motion platform perform big stroke motion, and micropositioner depends on coarse motion platform and realizes high-precision positioning performance.Wherein coarse motion Platform is typically performed by linear motor direct-driven mode, and micropositioner is then driven by voice coil motor (Voice Coil Motor, VCM) It is dynamic to perform.Under the restriction of each side constraints such as space layout, power of motor, heat dissipation, the drive of micropositioner voice coil motor Motivation level has seemed awkward under the high requirement accelerated at a high speed.
A kind of drive form of reluctance motor was referred to later, and compared to VCM, reluctance motor has obvious in terms of driving force Advantage.Output by reluctance motor and alive square of proportional relation in coil, therefore compare VCM (VCM outputs It is linear with the electric current in coil) for have obvious driving force output advantage.But the advantage of only high thrust is Requirement of the litho machine sports platform to high position precision can not be met.Because reluctance motor make use of " magnetic resistance minimum principle " to produce Electromagnetic force, therefore the problem of hysteresis characteristic and remanent magnetism be present unavoidably so that the reluctance motor being driven using ferromagnetic material is deposited Response speed is inadequate the problem of.
The content of the invention
It is an object of the invention to provide sports platform drive device, to solve existing coarse motion platform and micropositioner response speed The problem of inadequate.
In order to solve the above technical problems, the present invention provides a kind of sports platform drive device, the sports platform includes coarse motion platform And micropositioner, the drive device include driving the long stroke group of motors of the coarse motion platform motion and drive the micropositioner motion Short stroke group of motors, the drive device also includes:
Reluctance motor group, for providing thrust for the micropositioner acceleration, deceleration degree;
And micropositioner control module, control the short stroke group of motors to contribute and pass through one by a closed loop feedback passage Open-loop feed-forward passage controls the reluctance motor group to contribute.
Specifically, the long stroke group of motors includes linear electric motors.
Specifically, the short stroke group of motors includes multigroup voice coil motor.
Specifically, the reluctance motor group includes at least one pair of reluctance motor, it is fixed that the pair of reluctance motor includes first Son, the second stator and mover, the pair of reluctance motor share a mover, and the mover is arranged on first stator and the The centre of two stators.
Specifically, coil is wound with respectively on first stator and second stator.
Specifically, first stator and second stator are fixedly connected with the coarse motion platform;The mover with it is described Micropositioner is fixedly connected.
Specifically, first stator and second stator are iron core, the mover is magnetic conductor.
Specifically, the micropositioner control module includes track setting value generator and alternator;
The open-loop feed-forward passage include be sequentially connected the track setting value generator, alternator, reluctance motor group And micropositioner, the track setting value generator provide acceleration information corresponding with the reference position information of micropositioner to described Alternator, the alternator by the acceleration information compared with default threshold range, according to comparative result determine plus, Deceleration exports situation, starts realize that the reluctance motor effect for the speed output that adds deduct is described micro- in the reluctance motor group afterwards Dynamic platform.
Specifically, the micropositioner control module also includes short stroke motor group controller and gain balance matrix;
The closed loop feedback passage includes the track setting value generator of head and the tail connection, the control of short stroke group of motors Device, gain balance matrix, short stroke group of motors, micropositioner and location measurement unit, the track setting value generator is by described in The reference position information of micropositioner is sent to the short stroke motor group controller, and the short stroke motor group controller is to described Error amount between the actual position information for the micropositioner that the reference position information and location measurement unit of micropositioner measure Calculating is corrected, the gain balance matrix decomposes the error amount after the correction each free degree of micropositioner, and phase Answer ground to start short stroke motor corresponding to each free degree in the short stroke group of motors and act on the micropositioner.
Specifically, the default threshold range is specially [- Δ, Δ], the acceleration information starts real when being more than Δ The reluctance motor of existing acceleration output;The acceleration information be less than-Δ when start realize deceleration output reluctance motor;Institute When stating acceleration information ∈ [- Δ, Δ], the reluctance motor group does not work.
Specifically, the short stroke group of motors includes at least three groups of voice coil motors, for realizing the level of the micropositioner To three-degree-of-freedom motion.
Specifically, the linear electric motors include magnet array, coil array and two-phase-region casting device, the coil array includes Multiple coils, one group of coil described in each two connection one two-phase-region casting device, the two-phase-region casting device drive the coil Array is interacted with the magnet array, and motive force is provided to the coarse motion platform.
Formed specifically, the magnet array is arranged by opposite polarity magnet interval.
In sports platform drive device provided by the invention, including drive the long stroke group of motors of coarse motion platform motion and drive micro- The short stroke group of motors of dynamic platform motion;The drive device also includes reluctance motor group and micropositioner control module.The magnetic resistance Group of motors is used to provide thrust for the micropositioner acceleration, deceleration degree;The micropositioner control module passes through a closed loop feedback passage Control the short stroke group of motors to contribute and control the reluctance motor group to contribute by an open-loop feed-forward passage, solve existing Slightly, the problem of micropositioner response speed is inadequate.The present invention is in coarse motion platform driver element, will by changing coil array format One group of coil described in each two two-phase-region casting device of connection one, so as to be lifted by the intensity of electric current in coil, so that coarse motion Platform driver element obtains bigger thrust.
Brief description of the drawings
Fig. 1 is sports platform driving device structure schematic diagram provided by the invention;
Fig. 2 is structure of the linear motion actuator schematic diagram;
Fig. 3 is DC motor Driver dispersing mode provided by the invention and the DC motor Driver dispersing mode of prior art Contrast schematic diagram;
Fig. 4 is the control strategy schematic diagram of micropositioner control module provided by the invention;
Fig. 5 is the operation principle schematic diagram of alternator in micropositioner control module shown in Fig. 4.
Embodiment
Sports platform drive device proposed by the present invention is described in further detail below in conjunction with the drawings and specific embodiments. According to following explanation and claims, advantages and features of the invention will become apparent from.It should be noted that accompanying drawing is using very Simplified form and non-accurately ratio is used, only for the purpose of facilitating and clarifying the purpose of the embodiments of the invention.
Fig. 1 is sports platform driving device structure schematic diagram provided by the invention, for providing driving power, institute to sports platform Stating sports platform includes coarse motion platform and micropositioner, and the sports platform drive device includes driving the long stroke electricity of the coarse motion platform motion Unit and the short stroke group of motors for driving the micropositioner motion, in addition to reluctance motor group, accelerate and subtract for the micropositioner Fast process provides required high thrust;And micropositioner control module, the short stroke electricity is controlled by a closed loop feedback passage Machine is contributed and controls the reluctance motor group to contribute by an open-loop feed-forward passage.
In the present embodiment, long stroke group of motors uses linear electric motors, and the linear electric motors include magnet array, coil array With two-phase-region casting device, the coil array is made up of multiple coils, and one group of coil described in each two connection one two-phase is driven Dynamic device, motive force is provided to the coarse motion platform.
Please continue to refer to Fig. 1, reluctance motor group includes a pair of reluctance motors, the pair of reluctance motor bag in the present embodiment Include the first stator 11a, the second stator 11b and mover 10;Coil 12a, second stator are wound with the first stator 11a Coil 12b is wound with 11b, the mover 10 is arranged on the first stator 11a and the second stator 11b centre.Institute State the first stator 11a and the second stator 11b is fixedly connected with the coarse motion platform;The mover 10 is fixed with the micropositioner Connection.
Preferably, in the present embodiment, the first stator 11a and the second stator 11b are iron core, the mover 10 For magnetic conductor.
Specifically, the short stroke group of motors includes multigroup voice coil motor, it is arranged in closed loop feedback passage, for conduct Control accuracy when the feedback actuator of the micropositioner is to ensure uniform motion and positioning;Short stroke motor described in this implementation Group includes three groups of voice coil motors, voice coil motor 13a, the voice coil motor 13c of specially equidirectional output and with above-mentioned two voice coil loudspeaker voice coil Motor goes out the orthogonal voice coil motor 13b of force direction.Combination between described voice coil motor 13a, 13b and 13c is contributed and can realized Relative three-degree-of-freedom motion between the coarse motion platform and the micropositioner.
Fig. 2 is structure of the linear motion actuator schematic diagram, and the direct current generator includes magnet array 21 and coil array 22, the magnetic Iron array 21 is arranged by opposite polarity magnet interval, in this embodiment it is assumed that the centre-to-centre spacing between adjacent two magnet claims For pole pitch τ.
Referring to Fig. 3, the position 31 in Fig. 3 is linear electric motors type of drive, position 32 are that the present invention carries in the prior art The linear electric motors type of drive of confession.Totally 9 coils in the position 31, the centre-to-centre spacing of adjacent two coil are 4 τ/3, every three lines Enclose one group of connection, one three-phase drive device and form a three-phase drive unit, totally 3 three-phase drive units, it is seen that linear electric motors Power is shared by 3 three-phase drive devices.Totally 8 coils in the position 32, the centre-to-centre spacing of adjacent two coil is 3 τ/2, One group of each two coil connection one two-phase-region casting device forms a two-phase-region casting unit, totally 4 two-phase-region casting units, it is seen that straight The power of line motor is now shared by 4 two-phase-region casting devices, compared to the straight line of the prior art shown in the position 31 Motor drive mode, the driving force of the type of drive of position 32 are bigger.And from the position 31 and the position 32 Structural representation contrast can see, and both share pole pitch parameter τ, i.e., need not change the structure design of the magnet array 21. Moreover, totally 9 coils shown in the position 31, τ/3 of adjacent windings spacing 4, the τ of 22 overall length of coil array 12;The position Totally 8 coils shown in 32, τ/2 of adjacent windings spacing 3, the overall length of coil array 22 are still 12 τ, that is, the coil array 22 Packing forms it is constant, do not influence its structure design.
As shown in figure 4, the control strategy schematic diagram for the present embodiment micropositioner control module.The micropositioner control module Including track setting value generator 401, short stroke motor group controller 402, gain balance matrix 403, the driving of short stroke motor Device group 404, alternator 408, reluctance machine drive group 409 (i.e. forward driver 4 and negative sense driver 5).Wherein described rail Mark setting value generator 401 provides the reference position information of micropositioner 407, and the reference position information of the micropositioner 407 can be with The actual position value of the micropositioner 407 obtained from the location measurement unit 406 shown in feedback channel is compared, so that will Error amount is conveyed to the short stroke motor group controller 402 and is corrected calculating.The track setting value generator 401 simultaneously The feedforward control that acceleration information corresponding with the reference position information of the micropositioner 407 is used for the micropositioner 407 is also provided System.It is to realize institute by three groups of voice coil motors (i.e. voice coil motor 13a, voice coil motor 13b and voice coil motor 13c) in the present embodiment The motion of the Three Degree Of Freedom of micropositioner 407 is stated, the corresponding short stroke motor driver group 404 (is driven including three drivers Dynamic device 1, driver 2 and driver 3).Therefore need to control the short stroke group of motors by the gain balance matrix 403 The three-degree-of-freedom motion in error amount after the correction of device 402 decomposes three actuator physical axis, the short stroke motor driving Each driver starts voice coil motor corresponding to each free degree in device group 404, described in the case where no feedforward path acts on The output action of short stroke group of motors 405 passes through institute's position measurement list that sensor is built to after on the micropositioner 407 The feedback of member 406, have been able to build a controlled closed-loop system, i.e., now system possesses the function of tracking response.Pass through Parameter adjustment to the short stroke motor group controller 402, can meet certain bandwidth requirement, so as to improve system response Ability.
But bandwidth of the bandwidth far away from feedforward current ring of feedback position closed-loop is on the one hand limited to, on the other hand The motor of voice coil motor in itself is contributed and also had under the restriction of each side constraints such as space layout, power of motor, heat dissipation Limit, can not realize higher Velocity-acceleration requirement.Therefore, the invention is intended to reluctance motor group is inserted in open-loop feed-forward passage 410, as shown in Figure 4, corresponding is the reluctance machine drive group 409.Because between the dynamic stator of reluctance motor only Suction be present and do not have repulsion, therefore to realize acceleration and retarded motion of the fine motion during a stepping, the magnetic resistance electricity Unit 410 includes a pair of reluctance motors (i.e. reluctance motor 1 and reluctance motor 2), and the pair of reluctance motor includes two stators, And a mover is shared, micropositioner plus/minus speed is realized by the suction between stator and mover, and use the alternator 408 Realize and accelerate and motor alternate in moderating process.
The operation principle of the alternator 408 is as shown in figure 5, wherein ACC is occurred from track setting value described in Fig. 4 Orbital acceleration signal caused by device 401, by compared with given threshold Δ, to determine being that forward drive passage is defeated Go out, negative sense driving passage exports or without output.The purpose for setting the threshold value Δ is in order to avoid in the ACC signals High frequency move within narrow limits caused by it is unnecessary frequently toggle, when the ACC signals are more than threshold value Δ, i.e. track setting When value exports positive signal for faster, the alternator 408 starts the forward driver 4 in the reluctance machine drive group 409 Export, the output forward direction electromagnetic force of the reluctance motor 1 in the reluctance motor group 410.Similarly, when ACC signals be less than threshold value- During Δ, i.e., when track setting value exports negative sense signal for faster, the alternator 408 starts the reluctance machine drive group 409 In negative sense driver 5 export, the output negative sense electromagnetic force of the reluctance motor 2 in the reluctance motor group 410, when ACC signals When belonging to [- Δ, Δ], the reluctance motor group 410 is without output.
Foregoing description is only the description to present pre-ferred embodiments, not to any restriction of the scope of the invention, this hair Any change, the modification that the those of ordinary skill in bright field does according to the disclosure above content, belong to the protection of claims Scope.

Claims (13)

1. a kind of sports platform drive device, the sports platform includes coarse motion platform and micropositioner, and the drive device includes driving institute State the long stroke group of motors of coarse motion platform motion and drive the short stroke group of motors of the micropositioner motion, it is characterised in that be described Drive device also includes:
Reluctance motor group, for providing thrust for the micropositioner acceleration, deceleration degree;
And micropositioner control module, the short stroke group of motors output is controlled by a closed loop feedback passage and passes through an open loop Feedforward path controls the reluctance motor group to contribute.
2. sports platform drive device as claimed in claim 1, it is characterised in that the long stroke group of motors includes straight-line electric Machine.
3. sports platform drive device as claimed in claim 1, it is characterised in that the short stroke group of motors includes multigroup voice coil loudspeaker voice coil Motor.
4. sports platform drive device as claimed in claim 1, it is characterised in that the reluctance motor group includes at least one pair of magnetic Motor is hindered, the pair of reluctance motor includes the first stator, the second stator and mover, and the pair of reluctance motor shares one and moved Son, the mover are arranged on the centre of first stator and the second stator.
5. sports platform drive device as claimed in claim 4, it is characterised in that on first stator and second stator Coil is wound with respectively.
6. sports platform drive device as claimed in claim 4, it is characterised in that first stator and second stator with The coarse motion platform is fixedly connected;The mover is fixedly connected with the micropositioner.
7. sports platform drive device as claimed in claim 4, it is characterised in that first stator and second stator are Iron core, the mover are magnetic conductor.
8. sports platform drive device as claimed in claim 1, it is characterised in that the micropositioner control module is set including track Constant value generator and alternator;
The track setting value generator that the open-loop feed-forward passage includes being sequentially connected, alternator, reluctance motor group and micro- Dynamic platform, the track setting value generator provide acceleration information corresponding with the reference position information of micropositioner to the rotation The acceleration information compared with default threshold range, acceleration, deceleration is determined according to comparative result by device, the alternator Output situation is spent, starts realize that the reluctance motor for the speed output that adds deduct acts on the fine motion in the reluctance motor group afterwards Platform.
9. sports platform drive device as claimed in claim 8, it is characterised in that the micropositioner control module also includes short row Journey motor group controller and gain balance matrix;
The closed loop feedback passage includes the track setting value generator, short stroke motor group controller, increasing of head and the tail connection Beneficial balancing matrix, short stroke group of motors, micropositioner and location measurement unit, the track setting value generator is by the micropositioner Reference position information be sent to the short stroke motor group controller, the short stroke motor group controller is to the micropositioner Reference position information and the actual position information of the micropositioner that measures of location measurement unit between error amount carry out school Positive to calculate, the gain balance matrix decomposes the error amount after the correction each free degree of micropositioner, and correspondingly opens Move short stroke motor corresponding to each free degree in the short stroke group of motors and act on the micropositioner.
10. sports platform drive device as claimed in claim 8, it is characterised in that the default threshold range be specially [- Δ, Δ], start the reluctance motor for realizing acceleration output when the acceleration information is more than Δ;The acceleration information be less than- Start the reluctance motor for realizing deceleration output during Δ.
11. sports platform drive device as claimed in claim 3, it is characterised in that the short stroke group of motors includes at least three Group voice coil motor, for realizing the horizontal to three-degree-of-freedom motion of the micropositioner.
12. sports platform drive device as claimed in claim 2, it is characterised in that the linear electric motors include magnet array, line Circle array and two-phase-region casting device, the coil array include multiple coils, one group of coil described in each two connection one described two Phase driver, the two-phase-region casting device drive the coil array to be interacted with the magnet array, carried to the coarse motion platform For motive force.
13. sports platform drive device as claimed in claim 12, it is characterised in that the magnet array is by opposite polarity magnetic Iron interval, which is arranged, to be formed.
CN201610862123.5A 2016-09-29 2016-09-29 Sports platform drive device Pending CN107885036A (en)

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CN201610862123.5A CN107885036A (en) 2016-09-29 2016-09-29 Sports platform drive device

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Application Number Priority Date Filing Date Title
CN201610862123.5A CN107885036A (en) 2016-09-29 2016-09-29 Sports platform drive device

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113885298A (en) * 2021-09-22 2022-01-04 哈尔滨工业大学 Magnetic suspension type mask table of photoetching machine
CN117792005A (en) * 2023-12-28 2024-03-29 哈尔滨工业大学 High-precision force measuring device and control method of linear reluctance motor

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101464634A (en) * 2007-12-19 2009-06-24 Asml荷兰有限公司 Lithographic apparatus, workbench system and its control method
CN101777821A (en) * 2010-04-12 2010-07-14 哈尔滨工业大学 Concentrated-winding multi-segment permanent magnet synchronous linear motor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101464634A (en) * 2007-12-19 2009-06-24 Asml荷兰有限公司 Lithographic apparatus, workbench system and its control method
CN101777821A (en) * 2010-04-12 2010-07-14 哈尔滨工业大学 Concentrated-winding multi-segment permanent magnet synchronous linear motor

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
N.H.VRIJSEN等: "Comparision of linear voice coil and reluctance actuators for high-precision applications", 《14TH INTERNATIONAL POWER ELECTRONICS AND MOTION CONFERENCE, EPE-PEMC 2010》 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113885298A (en) * 2021-09-22 2022-01-04 哈尔滨工业大学 Magnetic suspension type mask table of photoetching machine
CN117792005A (en) * 2023-12-28 2024-03-29 哈尔滨工业大学 High-precision force measuring device and control method of linear reluctance motor
CN117792005B (en) * 2023-12-28 2024-06-04 哈尔滨工业大学 High-precision force measuring device and control method of linear reluctance motor

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