CN117761887A - Three-degree-of-freedom quick reflection mirror based on drive of threaded piezoelectric actuator and working method thereof - Google Patents
Three-degree-of-freedom quick reflection mirror based on drive of threaded piezoelectric actuator and working method thereof Download PDFInfo
- Publication number
- CN117761887A CN117761887A CN202311814085.2A CN202311814085A CN117761887A CN 117761887 A CN117761887 A CN 117761887A CN 202311814085 A CN202311814085 A CN 202311814085A CN 117761887 A CN117761887 A CN 117761887A
- Authority
- CN
- China
- Prior art keywords
- driving unit
- driving
- piezoelectric ceramic
- signal
- ceramic plates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 8
- 239000000919 ceramic Substances 0.000 claims abstract description 67
- 239000002184 metal Substances 0.000 claims abstract description 54
- 239000011159 matrix material Substances 0.000 claims abstract description 31
- 230000033001 locomotion Effects 0.000 claims abstract description 13
- 239000000758 substrate Substances 0.000 claims description 8
- 230000010287 polarization Effects 0.000 claims description 7
- 239000002245 particle Substances 0.000 claims description 6
- 230000001105 regulatory effect Effects 0.000 claims description 6
- 238000005452 bending Methods 0.000 claims 1
- 229920006335 epoxy glue Polymers 0.000 claims 1
- 230000003287 optical effect Effects 0.000 abstract description 9
- 238000010586 diagram Methods 0.000 description 3
- 238000005457 optimization Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Abstract
The invention discloses a three-degree-of-freedom quick-reflecting mirror driven by a threaded piezoelectric actuator and a working method thereof, wherein the device comprises three driving units, an upper cover, a base, a spring and a reflecting mirror; the driving unit junction comprises a metal matrix, an adjusting stud, a driving ball, first to fourth piezoelectric ceramic plates and first to fourth lugs. The invention directly drives the reflecting mirror by using three driving units, so that the reflecting mirror can realize the motion of two degrees of rotation freedom, the requirement of adjusting the beam position of the quick reflecting mirror in a common optical system is met, and the reflecting mirror can also rise or fall along the axial direction, thereby realizing the adjustment of the focal length of the optical path. The invention has the advantages of large stroke, high precision and strong universality. The three-degree-of-freedom working mode has higher application value and good economic benefit in a space optical system.
Description
Technical Field
The invention relates to the field of piezoelectric driving, in particular to a three-degree-of-freedom quick reflection mirror driven by a threaded piezoelectric actuator and a working method thereof.
Background
The spatial optical system is extremely susceptible to various dynamic disturbances in the environment, environmental changes and mechanical vibrations, which affect the performance of the spatial optical system to varying degrees and even cause the system to fail to function properly. Spatial optical systems therefore typically require highly accurate, highly dynamic control of the light beam by a fast steering mirror. The driver of the fast-control reflecting mirror is mainly provided with a voice coil motor and a piezoelectric stack. The voice coil motor has the advantages of small motion lag, high speed, low driving voltage, no transmission gap and the like. However, the voice coil motor has the defects of complex structure and susceptibility to magnetic field influence. The fast reflecting mirror formed by the piezoelectric stack has the advantages of high resolution, fast response, no interference of electromagnetic field and the like. However, since the deformation amount of the piezoelectric ceramics is small, an additional displacement amplifying mechanism is usually required to be designed in the driver, the stroke is increased, and the complexity of the structure is increased. The angle at which a piezoelectric stack driven fast mirror with a magnifying mechanism can deflect is also typically only on the order of a micro-arc. Therefore, the small stroke characteristic of the piezoelectric stack driven fast reflecting mirror greatly limits the application of the piezoelectric stack driven fast reflecting mirror in the field of space optics.
Disclosure of Invention
The invention aims to solve the technical problem of providing a three-degree-of-freedom quick-reflecting mirror driven by a threaded piezoelectric actuator and a working method thereof aiming at the defects related to the background art.
The invention adopts the following technical scheme for solving the technical problems:
the three-degree-of-freedom quick-reflecting mirror driven by the threaded piezoelectric actuator comprises a first driving unit, a second driving unit, an upper cover, a base, a spring and a reflecting mirror;
the first driving unit and the third driving unit have the same structure and comprise a metal matrix, an adjusting stud, a driving ball, first piezoelectric ceramic plates, second piezoelectric ceramic plates, third piezoelectric ceramic plates, fourth piezoelectric ceramic plates and first ear plates;
the metal matrix is a regular quadrangular prism and comprises an upper end face, a lower end face and first to fourth side walls which are connected end to end in sequence, and a threaded through hole which is used for being matched with the adjusting bolt is formed in the upper end face along the axis;
the first piezoelectric ceramic plates and the fourth piezoelectric ceramic plates are symmetrically arranged and have the same polarization direction, and the second piezoelectric ceramic plates and the fourth piezoelectric ceramic plates are symmetrically arranged and have the same polarization direction;
the lower end of the adjusting stud is in threaded connection with a threaded through hole on the upper end face of the metal matrix, and the upper end of the adjusting stud is fixedly connected with the surface of the driving ball; the axis of the adjusting bolt passes through the sphere center of the driving sphere;
the first to fourth lugs are arranged at vibration nodes of the first to fourth side walls of the metal matrix in one-to-one correspondence and are positioned below the first to fourth piezoelectric ceramic plates;
the upper end face of the upper cover is fixedly connected with the back face of the reflecting mirror, and the lower end face is provided with first to third grooves which are used for being matched with the first to third driving units in a one-to-one correspondence manner; the first groove and the third groove are identical in structure and are in a sphere-like shape, wherein the first groove is positioned in the center of the lower end face of the upper cover;
the base is provided with first to third mounting holes for being matched with the first to third driving units;
the first to third driving units are vertically arranged between the upper cover and the base, wherein the first to fourth lugs of the first to third driving units are fixed on the base through bolts, so that the lower ends of the metal matrixes of the first to third driving units are arranged in the first to third mounting holes in a one-to-one correspondence manner; the driving balls of the first driving unit, the second driving unit and the third driving unit are arranged in the first groove, the second groove and the third groove in a one-to-one correspondence manner and are propped against the upper cover; the distance between the axes of the metal matrixes of the first driving unit and the second driving unit is equal to the distance between the axes of the metal matrixes of the first driving unit and the third driving unit, and the axes of the metal matrixes of the first driving unit, the second driving unit and the third driving unit are not coplanar;
the lower end face of the upper cover is provided with a first fixing seat between the first driving unit, the second driving unit and the third driving unit, and the base is provided with a second fixing seat between the first driving unit, the second driving unit and the third driving unit; one end of the spring is fixedly connected with the first fixing seat, and the other end of the spring is fixedly connected with the second fixing seat in a stretching state.
As a further optimization scheme of the three-degree-of-freedom quick reflection mirror based on the driving of the threaded piezoelectric actuator, the first piezoelectric ceramic plates to the fourth piezoelectric ceramic plates are glued on the first side wall to the fourth side wall in a one-to-one correspondence manner through epoxy resin glue.
As a further optimization scheme of the three-degree-of-freedom quick reflection mirror based on the drive of the threaded piezoelectric actuator, chamfers are arranged between the first side wall and the fourth side wall of the metal matrix.
As a further optimization scheme of the three-degree-of-freedom quick-reflection mirror based on the drive of the threaded piezoelectric actuator, the axes of the metal matrixes of the first, second and third driving units are respectively as followsl 1 、l 2 、l 3 ，l 1 、l 2 Plane of the planel 2 、l 3 The included angle of the plane is 90 degrees;
the axis of the springl 4 Parallel tol 1 And (2) andl 4 to the point ofl 1 、l 2 、l 3 Is equal in distance.
The invention also discloses a working method of the three-degree-of-freedom quick reflection mirror driven by the threaded piezoelectric actuator, which comprises the following steps:
order thel 1 The intersection point with the upper surface of the base is an origin and is perpendicular to the base through the originl 1 And point tol 2 Is in the direction ofxThe positive direction of the axis is perpendicular to the originl 1 And point tol 3 Is in the direction ofyThe positive direction of the axis passes through the originl 1 Upward direction iszAn axial positive direction;
if it is required to drive the mirror aroundyThe shaft performs forward rotation movement:
grounding the metal matrix in the first to third driving units, applying a first signal to the first and third piezoelectric ceramic plates in the second driving unit, and applying a second signal to the second and fourth piezoelectric ceramic plates in the second driving unit, wherein the first and second signals are sinusoidal voltage signals with pi/2 phase difference, so that particles on the metal matrix threads in the second driving unit vibrate in a high-frequency and micro-amplitude manner, and further the adjusting stud of the second driving unit is driven to rotate through friction; the driving ball of the second driving unit is driven by the adjusting stud to perform linear motion, and the driving ball is driven by the adjusting stud to perform linear motionUnder the cooperation of the second groove and the spring, the driving ball of the second driving unit pushes the upper cover to wind aroundyThe shaft performs forward rotation;
if a mirror wrap is requiredyThe shaft rotates reversely, and the phase difference of the first signal and the second signal is regulated to be minus pi/2;
if it is required to drive the mirror aroundxThe shaft performs forward rotation movement:
grounding the metal matrix in the first to third driving units, applying a third signal to the first and third piezoelectric ceramic plates in the third driving unit, and applying a fourth signal to the second and fourth piezoelectric ceramic plates in the third driving unit, wherein the third and fourth signals are sinusoidal voltage signals with pi/2 phase difference, so that particles on the metal matrix threads in the third driving unit vibrate in a high-frequency and micro-amplitude manner, and further the adjusting stud of the third driving unit is driven to rotate through friction; the driving ball of the third driving unit moves linearly under the drive of the adjusting stud, and under the cooperation of the third groove and the spring, the driving ball of the third driving unit pushes the upper cover to windxThe shaft performs forward rotation;
if a mirror wrap is requiredxThe shaft rotates reversely, and the phase difference of the third signal and the fourth signal is regulated to be minus pi/2;
if it is required to drive the mirror edgezThe shaft moves up:
the metal substrates in the first driving unit to the third driving unit are grounded at the same time, a fifth signal is applied to the first piezoelectric ceramic plate and the third piezoelectric ceramic plate in the first driving unit to the third driving unit, a sixth signal is applied to the second piezoelectric ceramic plate and the fourth piezoelectric ceramic plate in the first driving unit to the third driving unit, the fifth signal and the sixth signal are sine voltage signals with the phase difference of pi/2, so that high-frequency micro-amplitude vibration is carried out on mass points on the threads of the metal substrates in the first driving unit to the third driving unit, the adjusting studs of the first driving unit to the third driving unit are simultaneously driven to rotate through friction, the driving balls of the first driving unit to the third driving unit move upwards under the driving of the corresponding adjusting studs, and the upper cover is lifted under the cooperation of the first grooves, the third grooves and the springs;
if it is required to drive the mirror edgezThe shaft descends, and the phase difference of the fifth signal and the sixth signal is regulated to be minus pi/2。
Compared with the prior art, the technical scheme provided by the invention has the following technical effects:
1. according to the invention, the first driving unit and the third driving unit are utilized to directly drive the reflecting mirror, and the travel of the reflecting mirror depends on the lengths of the metal matrix and the adjusting stud in the first driving unit and the third driving unit, so that the driving unit and the adjusting stud can be matched and designed according to the requirements of different space optical systems, and the device has stronger applicability;
2. through adjusting first through third drive unit for the speculum not only can realize the motion of two degrees of freedom of rotation, satisfies the demand that the beam position was adjusted to the quick reflector in the ordinary optical system, and the speculum can also realize rising or decline along the axial direction moreover, realizes adjusting the focus of light path. Therefore, the invention has application potential of replacing the focusing mechanism in the space off-axis reflection optical system.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a schematic view showing the positional relationship between the first to third driving units and the springs of the base in the present invention;
FIG. 3 is a schematic view of another view of the present invention;
FIG. 4 is a schematic diagram showing the structure of the metal substrate, the first to fourth piezoelectric ceramic plates, and the first to fourth tabs of the first driving unit according to the present invention;
FIG. 5 is a schematic view of the polarization direction of piezoelectric ceramic plates and the application of driving voltage in the first driving unit of the invention;
FIG. 6 is a schematic diagram of the driving voltage signal of the present invention;
FIG. 7 is a schematic illustration of the second drive unit of the present invention being activated to "rock" motion;
FIGS. 8 (a) and 8 (b) are schematic views of the mirror of the present invention rotated forward and backward about the y-axis, respectively;
FIGS. 9 (a) and 9 (b) are schematic views of the mirror of the present invention rotated forward and backward about the x-axis, respectively;
fig. 10 (a) and 10 (b) are schematic views showing the mirror of the present invention ascending and descending along the z-axis, respectively.
In the figure, a 1-base, a 2-first driving unit, a 3-second driving unit, a 4-third driving unit, a 5-spring, a 6-upper cover, a 7-reflecting mirror, an 8-metal matrix, a 9-first piezoelectric ceramic plate, a 10-second piezoelectric ceramic plate, an 11-first lug and a 12-second lug.
Description of the embodiments
The technical scheme of the invention is further described in detail below with reference to the accompanying drawings:
this invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In the drawings, the components are exaggerated for clarity.
As shown in fig. 1, 2 and 3, the invention discloses a three-degree-of-freedom quick-reflecting mirror driven by a threaded piezoelectric actuator, which comprises a first driving unit, a second driving unit, a third driving unit, an upper cover, a base, a spring and a reflecting mirror;
the first driving unit and the third driving unit have the same structure and comprise a metal matrix, an adjusting stud, a driving ball, first piezoelectric ceramic plates, second piezoelectric ceramic plates, third piezoelectric ceramic plates, fourth piezoelectric ceramic plates and first ear plates;
the metal matrix is a regular quadrangular prism and comprises an upper end face, a lower end face and first to fourth side walls which are connected end to end in sequence, and a threaded through hole which is used for being matched with the adjusting bolt is formed in the upper end face along the axis, as shown in fig. 4;
the first piezoelectric ceramic plates and the fourth piezoelectric ceramic plates are identical in structure, are arranged on the first side wall and the fourth side wall in a one-to-one correspondence manner and are polarized in the thickness direction, wherein the first piezoelectric ceramic plates and the third piezoelectric ceramic plates are symmetrically arranged and have the same polarization direction, and the second piezoelectric ceramic plates and the fourth piezoelectric ceramic plates are symmetrically arranged and have the same polarization direction, as shown in fig. 5;
the lower end of the adjusting stud is in threaded connection with a threaded through hole on the upper end face of the metal matrix, and the upper end of the adjusting stud is fixedly connected with the surface of the driving ball; the axis of the adjusting bolt passes through the sphere center of the driving sphere;
the first to fourth lugs are arranged at vibration nodes of the first to fourth side walls of the metal matrix in one-to-one correspondence and are positioned below the first to fourth piezoelectric ceramic plates;
the upper end face of the upper cover is fixedly connected with the back face of the reflecting mirror, and the lower end face is provided with first to third grooves which are used for being matched with the first to third driving units in a one-to-one correspondence manner; the first groove and the third groove are identical in structure and are in a sphere-like shape, wherein the first groove is positioned in the center of the lower end face of the upper cover;
the base is provided with first to third mounting holes for being matched with the first to third driving units;
the first to third driving units are vertically arranged between the upper cover and the base, wherein the first to fourth lugs of the first to third driving units are fixed on the base through bolts, so that the lower ends of the metal matrixes of the first to third driving units are arranged in the first to third mounting holes in a one-to-one correspondence manner; the driving balls of the first driving unit, the second driving unit and the third driving unit are arranged in the first groove, the second groove and the third groove in a one-to-one correspondence manner and are propped against the upper cover; the distance between the axes of the metal matrixes of the first driving unit and the second driving unit is equal to the distance between the axes of the metal matrixes of the first driving unit and the third driving unit, and the axes of the metal matrixes of the first driving unit, the second driving unit and the third driving unit are not coplanar;
the lower end face of the upper cover is provided with a first fixing seat between the first driving unit, the second driving unit and the third driving unit, and the base is provided with a second fixing seat between the first driving unit, the second driving unit and the third driving unit; one end of the spring is fixedly connected with the first fixing seat, and the other end of the spring is fixedly connected with the second fixing seat in a stretching state.
The first piezoelectric ceramic plates, the second piezoelectric ceramic plates and the third piezoelectric ceramic plates are glued on the first side wall, the second side wall and the third side wall of the metal matrix respectively through epoxy resin glue in one-to-one correspondence, and chamfers are arranged between the first side wall and the fourth side wall of the metal matrix.
Let the length of the metal matrix be L, the length T of the first to fourth piezoelectric ceramic plates is preferably smaller than 0.75L.
The axes of the metal matrixes of the first, the second and the third driving units are respectivelyl 1 、l 2 、l 3 ，l 1 、l 2 Plane of the planel 2 、l 3 The included angle of the plane is 90 degrees; the axis of the springl 4 Parallel tol 1 And (2) andl 4 to the point ofl 1 、l 2 、l 3 Is equal in distance.
The invention also discloses a working method of the three-degree-of-freedom quick reflection mirror driven by the threaded piezoelectric actuator, which comprises the following steps:
order thel 1 The intersection point with the upper surface of the base is an origin and is perpendicular to the base through the originl 1 And point tol 2 Is in the direction ofxThe positive direction of the axis is perpendicular to the originl 1 And point tol 3 Is in the direction ofyThe positive direction of the axis passes through the originl 1 Upward direction iszAn axial positive direction;
if it is required to drive the mirror aroundyThe shaft performs forward rotation movement:
grounding the metal matrix in the first to third driving units, applying a first signal to the first and third piezoelectric ceramic plates in the second driving unit, and applying a second signal to the second and fourth piezoelectric ceramic plates in the second driving unit, wherein the first and second signals are sinusoidal voltage signals with pi/2 phase difference, as shown in fig. 6, so that particles on the metal matrix threads in the second driving unit vibrate in a high-frequency micro-amplitude manner, as shown in fig. 7, and further the adjusting stud of the second driving unit is driven to rotate through friction; the driving ball of the second driving unit moves linearly under the drive of the adjusting stud, and the driving ball of the second driving unit pushes the upper cover to wind under the cooperation of the second groove and the springyThe shaft performs a forward rotational movement as shown in fig. 8 (a);
if a mirror wrap is requiredyThe shaft rotates reversely, and the phase difference of the first signal and the second signal is adjusted to be pi/2, as shown in fig. 8 (b);
if it is required to drive the mirror aroundxThe shaft performs forward rotation movement:
grounding the metal matrix in the first to third driving units, applying a third signal to the first and third piezoelectric ceramic plates in the third driving unit, and applying a third signal to the third driving unitA fourth signal is applied to the second piezoelectric ceramic plate and the fourth piezoelectric ceramic plate in the element, and the third signal and the fourth signal are sinusoidal voltage signals with the phase difference of pi/2, so that particles on threads of a metal matrix in the third driving unit vibrate in a high-frequency and micro-amplitude manner, and further the adjusting stud of the third driving unit is driven to rotate through friction; the driving ball of the third driving unit moves linearly under the drive of the adjusting stud, and under the cooperation of the third groove and the spring, the driving ball of the third driving unit pushes the upper cover to windxThe shaft performs a forward rotational movement as shown in fig. 9 (a);
if a mirror wrap is requiredxThe shaft rotates reversely, and the phase difference of the third signal and the fourth signal is adjusted to be pi/2, as shown in fig. 9 (b);
if it is required to drive the mirror edgezThe shaft moves up:
the metal substrates in the first driving unit to the third driving unit are grounded at the same time, a fifth signal is applied to the first piezoelectric ceramic plate and the third piezoelectric ceramic plate in the first driving unit to the third driving unit, a sixth signal is applied to the second piezoelectric ceramic plate and the fourth piezoelectric ceramic plate in the first driving unit to the third driving unit, the fifth signal and the sixth signal are sine voltage signals with the phase difference of pi/2, so that mass points on the threads of the metal substrates in the first driving unit to the third driving unit vibrate at high frequency in a micro mode, and then the adjusting studs of the first driving unit to the third driving unit are simultaneously driven to rotate through friction, the driving balls of the first driving unit to the third driving unit move upwards under the driving of the corresponding adjusting studs, and the upper cover rises under the cooperation of the first grooves to the third grooves and the springs, as shown in fig. 10 (a);
if it is required to drive the mirror edgezThe shaft is moved downward, and the phase difference between the fifth and sixth signals is adjusted to be-pi/2, as shown in fig. 10 (b).
It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
While the foregoing is directed to embodiments of the present invention, other and further details of the invention may be had by the present invention, it should be understood that the foregoing description is merely illustrative of the present invention and that no changes, substitutions, or alterations herein fall within the spirit and principles of the invention.
Claims (5)
1. The three-degree-of-freedom quick reflection mirror driven by the threaded piezoelectric actuator is characterized by comprising a first driving unit, a third driving unit, an upper cover, a base, a spring and a reflection mirror;
the first driving unit and the third driving unit have the same structure and comprise a metal matrix, an adjusting stud, a driving ball, first piezoelectric ceramic plates, second piezoelectric ceramic plates, third piezoelectric ceramic plates, fourth piezoelectric ceramic plates and first ear plates;
the metal matrix is a regular quadrangular prism and comprises an upper end face, a lower end face and first to fourth side walls which are connected end to end in sequence, and a threaded through hole which is used for being matched with the adjusting bolt is formed in the upper end face along the axis;
the first piezoelectric ceramic plates and the fourth piezoelectric ceramic plates are symmetrically arranged and have the same polarization direction, and the second piezoelectric ceramic plates and the fourth piezoelectric ceramic plates are symmetrically arranged and have the same polarization direction;
the lower end of the adjusting stud is in threaded connection with a threaded through hole on the upper end face of the metal matrix, and the upper end of the adjusting stud is fixedly connected with the surface of the driving ball; the axis of the adjusting bolt passes through the sphere center of the driving sphere;
the first to fourth lugs are arranged at bending vibration nodes of the first to fourth side walls of the metal matrix in one-to-one correspondence and are positioned below the first to fourth piezoelectric ceramic plates;
the upper end face of the upper cover is fixedly connected with the back face of the reflecting mirror, and the lower end face is provided with first to third grooves which are used for being matched with the first to third driving units in a one-to-one correspondence manner; the first groove and the third groove are identical in structure and are in a sphere-like shape, wherein the first groove is positioned in the center of the lower end face of the upper cover;
the base is provided with first to third mounting holes for being matched with the first to third driving units;
the first to third driving units are vertically arranged between the upper cover and the base, wherein the first to fourth lugs of the first to third driving units are fixed on the base through bolts, so that the lower ends of the metal matrixes of the first to third driving units are arranged in the first to third mounting holes in a one-to-one correspondence manner; the driving balls of the first driving unit, the second driving unit and the third driving unit are arranged in the first groove, the second groove and the third groove in a one-to-one correspondence manner and are propped against the upper cover; the distance between the axes of the metal matrixes of the first driving unit and the second driving unit is equal to the distance between the axes of the metal matrixes of the first driving unit and the third driving unit, and the axes of the metal matrixes of the first driving unit, the second driving unit and the third driving unit are not coplanar;
the lower end face of the upper cover is provided with a first fixing seat between the first driving unit, the second driving unit and the third driving unit, and the base is provided with a second fixing seat between the first driving unit, the second driving unit and the third driving unit; one end of the spring is fixedly connected with the first fixing seat, and the other end of the spring is fixedly connected with the second fixing seat in a stretching state.
2. The three degree of freedom fast reflecting mirror driven by a threaded piezoelectric actuator according to claim 1, wherein the first to fourth piezoelectric ceramic plates are glued on the first to fourth side walls in a one-to-one correspondence through epoxy glue.
3. The three degree of freedom fast reflecting mirror driven by a threaded piezoelectric actuator according to claim 1, wherein chamfer angles are arranged between the first to fourth side walls of the metal base.
4. The three-degree-of-freedom quick reflection mirror driven by a threaded piezoelectric actuator according to claim 1, wherein the axes of the metal substrates of the first, second and third driving units are respectivelyl 1 、l 2 、l 3 ，l 1 、l 2 Plane of the planel 2 、l 3 The included angle of the plane is 90 degrees;
the axis of the springl 4 Parallel tol 1 And (2) andl 4 to the point ofl 1 、l 2 、l 3 Is equal in distance.
5. The working method of the three-degree-of-freedom quick reflection mirror driven by the threaded piezoelectric actuator as claimed in claim 4, which is characterized by comprising the following steps:
order thel 1 The intersection point with the upper surface of the base is an origin and is perpendicular to the base through the originl 1 And point tol 2 Is in the direction ofxThe positive direction of the axis is perpendicular to the originl 1 And point tol 3 Is in the direction ofyThe positive direction of the axis passes through the originl 1 Upward direction iszAn axial positive direction;
if it is required to drive the mirror aroundyThe shaft performs forward rotation movement:
grounding the metal matrix in the first to third driving units, applying a first signal to the first and third piezoelectric ceramic plates in the second driving unit, and applying a second signal to the second and fourth piezoelectric ceramic plates in the second driving unit, wherein the first and second signals are sinusoidal voltage signals with pi/2 phase difference, so that particles on the metal matrix threads in the second driving unit vibrate in a high-frequency and micro-amplitude manner, and further the adjusting stud of the second driving unit is driven to rotate through friction; the driving ball of the second driving unit moves linearly under the drive of the adjusting stud, and the driving ball of the second driving unit pushes the upper cover to wind under the cooperation of the second groove and the springyThe shaft performs forward rotation;
if a mirror wrap is requiredyThe shaft rotates reversely, and the phase difference of the first signal and the second signal is regulated to be minus pi/2;
if it is required to drive the mirror aroundxThe shaft performs forward rotation movement:
grounding the metal matrix in the first to third driving units, applying a third signal to the first and third piezoelectric ceramic plates in the third driving unit, and applying a fourth signal to the second and fourth piezoelectric ceramic plates in the third driving unit, wherein the third and fourth signals are sinusoidal voltage signals with pi/2 phase difference, so that particles on the metal matrix threads in the third driving unit vibrate in a high-frequency and micro-amplitude manner, and further the adjusting stud of the third driving unit is driven to rotate through friction; the driving ball of the third driving unit moves linearly under the drive of the adjusting stud, and under the cooperation of the third groove and the spring, the driving ball of the third driving unit pushes the upper cover to windxThe shaft performs forward rotation;
if a mirror wrap is requiredxThe shaft rotates reversely, and the phase difference of the third signal and the fourth signal is regulated to be minus pi/2;
if it is required to drive the mirror edgezThe shaft moves up:
the metal substrates in the first driving unit to the third driving unit are grounded at the same time, a fifth signal is applied to the first piezoelectric ceramic plate and the third piezoelectric ceramic plate in the first driving unit to the third driving unit, a sixth signal is applied to the second piezoelectric ceramic plate and the fourth piezoelectric ceramic plate in the first driving unit to the third driving unit, the fifth signal and the sixth signal are sine voltage signals with the phase difference of pi/2, so that high-frequency micro-amplitude vibration is carried out on mass points on the threads of the metal substrates in the first driving unit to the third driving unit, the adjusting studs of the first driving unit to the third driving unit are simultaneously driven to rotate through friction, the driving balls of the first driving unit to the third driving unit move upwards under the driving of the corresponding adjusting studs, and the upper cover is lifted under the cooperation of the first grooves, the third grooves and the springs;
if it is required to drive the mirror edgezThe shaft descends, and the phase difference of the fifth signal and the sixth signal is regulated to be-pi/2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311814085.2A CN117761887A (en) | 2023-12-26 | 2023-12-26 | Three-degree-of-freedom quick reflection mirror based on drive of threaded piezoelectric actuator and working method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311814085.2A CN117761887A (en) | 2023-12-26 | 2023-12-26 | Three-degree-of-freedom quick reflection mirror based on drive of threaded piezoelectric actuator and working method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117761887A true CN117761887A (en) | 2024-03-26 |
Family
ID=90314238
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311814085.2A Pending CN117761887A (en) | 2023-12-26 | 2023-12-26 | Three-degree-of-freedom quick reflection mirror based on drive of threaded piezoelectric actuator and working method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117761887A (en) |
-
2023
- 2023-12-26 CN CN202311814085.2A patent/CN117761887A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Liang et al. | A 2-DOF monolithic compliant rotation platform driven by piezoelectric actuators | |
| CN110262036B (en) | Two-dimensional large-angle quick deflection reflector | |
| JP4213690B2 (en) | Ultra-precision position control system | |
| US11342864B2 (en) | Three-degrees-of-freedom angle adjustment device driven by piezoelectric ceramics and adjusting method thereof | |
| Liu et al. | A flexure-based long-stroke fast tool servo for diamond turning | |
| CN109586609B (en) | Vibration wave actuator, imaging apparatus, and stage apparatus using the vibration wave actuator | |
| CN110065926B (en) | Two-degree-of-freedom scott-russell flexible micro-nano positioning platform | |
| Wang et al. | Design of a flexure-based parallel XY micropositioning stage with millimeter workspace and high bandwidth | |
| Mokbel et al. | Research on the mechanical design of two-axis fast steering mirror for optical beam guidance | |
| CN111624729B (en) | Fast reflector | |
| US6879758B2 (en) | Multi-degree-of-freedom of precision positioning device using spring-mounted electromechanical actuators | |
| CN110010190B (en) | Three-dimensional constant force parallel flexible micro-positioning platform | |
| US20030059194A1 (en) | Multi axis component actuator | |
| CN117761887A (en) | Three-degree-of-freedom quick reflection mirror based on drive of threaded piezoelectric actuator and working method thereof | |
| CN112327503B (en) | Light path pointing precision adjusting device | |
| JP5166545B2 (en) | Stage drive device | |
| US7990637B2 (en) | Autofocus lens module | |
| KR101443055B1 (en) | Flexure hinge-based monolithic piezo-driven stage and the method of manufacturing | |
| CN116073697A (en) | Four-foot multi-freedom-degree ultrasonic motor composited by longitudinal bending modes and excitation method thereof | |
| CN115128798A (en) | Two-dimensional rapid control reflector with large deflection angle and high vibration resistance | |
| CN114578504A (en) | Reaction force-free quick reflecting mirror based on flexible support | |
| Wang et al. | Development of a compact XYZ nanopositioner supporting optical scanning | |
| CN109921682B (en) | Multi-degree-of-freedom precise adjusting device for optical element in vacuum environment and control method | |
| CN117826392A (en) | Microscope object carrying platform driven by threaded piezoelectric actuator and method thereof | |
| Liao et al. | A New Flexure-based Parallel Laser Deflection Device for MicroLED Repair |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |