CN117733281A - Cooling unit and vacuum welding furnace cooling cabin - Google Patents
Cooling unit and vacuum welding furnace cooling cabin Download PDFInfo
- Publication number
- CN117733281A CN117733281A CN202311767125.2A CN202311767125A CN117733281A CN 117733281 A CN117733281 A CN 117733281A CN 202311767125 A CN202311767125 A CN 202311767125A CN 117733281 A CN117733281 A CN 117733281A
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- cooling
- plate
- air
- flow
- cooling unit
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- 238000001816 cooling Methods 0.000 title claims abstract description 109
- 238000003466 welding Methods 0.000 title claims abstract description 13
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 33
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 16
- 239000007789 gas Substances 0.000 claims abstract description 10
- 230000017525 heat dissipation Effects 0.000 claims description 40
- 230000007704 transition Effects 0.000 claims description 25
- 238000007789 sealing Methods 0.000 claims description 18
- 230000005855 radiation Effects 0.000 claims 2
- 238000007664 blowing Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
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- Cooling Or The Like Of Electrical Apparatus (AREA)
Abstract
The invention provides a cooling unit and a cooling cabin of a vacuum welding furnace, and relates to the technical field of vacuum welding furnaces, wherein the cooling unit is provided with a cooling plate with a plurality of air outlets, a bottom plate with an air inlet, a flow guide assembly arranged between the cooling plate and the bottom plate, and a gas supply module for blowing nitrogen into the air inlet, wherein the nitrogen is blown into a cooling flow channel of the flow guide assembly from the air inlet, and then is blown to a module to be cooled arranged on the cooling plate through the air outlet on the cooling plate, so that the module to be cooled is cooled; compared with the prior art, the invention increases the contact area between the nitrogen and the module to be cooled in an air cooling mode, thereby improving the cooling efficiency.
Description
Technical Field
The invention relates to the technical field of vacuum welding furnaces, in particular to a cooling unit and a cooling cabin of a vacuum welding furnace.
Background
With the vigorous development of the semiconductor industry, a method for welding a semiconductor process module by a vacuum welding furnace is popular, and the semiconductor process module needs to be cooled in a cooling cabin after the welding is completed.
In the prior art, a cooling method of cooling pins is generally adopted, a plurality of cooling pins are additionally arranged at the bottom of a bottom plate for bearing the semiconductor process module, and the semiconductor process module is cooled by the bottom plate according to the principle of heat conduction, but the cooling efficiency is lower because the contact area between the cooling pins and the bottom plate is smaller.
Disclosure of Invention
In view of the above-mentioned drawbacks or shortcomings of the prior art, the present invention is directed to a cooling unit and a vacuum welding furnace cooling module.
In a first aspect, the present invention provides a cooling unit comprising:
at least one cooling module, each cooling module comprising:
the cooling device comprises a cooling plate, a cooling module and a cooling module, wherein the cooling plate is provided with a plurality of air outlets;
the bottom plate is provided with an air inlet;
the flow guide assembly is arranged between the heat dissipation plate and the bottom plate and comprises a plurality of cooling flow passages, and two ends of the cooling flow passages are respectively communicated with the air outlet and the air inlet;
the cooling unit further comprises a gas supply module, the gas supply module blows nitrogen into the air inlet, and the nitrogen is blown to the module to be cooled through the air outlet after passing through the cooling flow channel.
According to the technical scheme provided by the invention, the flow guide assembly comprises a plurality of flow guide plates, wherein the flow guide plates are distributed and arranged along a first direction, and sealing spaces are formed among the flow guide plates, the heat dissipation plates, the flow guide plates and the bottom plate; each sealed space comprises at least one cooling flow passage group, each cooling flow passage group comprises at least one branch flow passage, and each branch flow passage communicated with different sealed spaces forms the cooling flow passage.
According to the technical scheme provided by the invention, a plurality of transition air openings are arranged on each flow guide plate, and the number of the transition air openings on each flow guide plate or the number of the air outlets on the heat dissipation plate is the same as the number of the branch flow passages, adjacent to the air outlets, of the heat dissipation plate and far away from the sealed space on the heat dissipation plate side; one end of all branch flow passages of the same cooling flow passage group is communicated with the transition air port of the guide plate, or the air inlet of the bottom plate, of which the sealing space is far away from the side of the heat dissipation plate, and the other end of the branch flow passages is communicated with the transition air port, or the air outlet, of the guide plate, of which the sealing space is near the side of the heat dissipation plate.
According to the technical scheme provided by the invention, the corresponding positions of the bottom plate and the guide plates close to the bottom plate, the corresponding positions of the two guide plates close to the guide plates, and the corresponding positions of the heat dissipation plate and the guide plates close to the heat dissipation plate, which are close to the guide plates, are respectively provided with the runner grooves with the same structure, and the two corresponding runner grooves form the branch runners.
According to the technical scheme provided by the invention, the bottom plate and the end, close to the heat dissipation plate, of each guide plate are provided with a sealing structure.
According to the technical scheme provided by the invention, the air pressure of each air outlet is the same.
According to the technical scheme provided by the invention, the heat dissipation plate is provided with a plurality of air outlet groups in a second direction, each air outlet group comprises a plurality of air outlets distributed and arranged in a third direction, the second direction is perpendicular to the first direction, and the third direction is perpendicular to the first direction and the second direction.
According to the technical scheme provided by the invention, the bottom plate is rectangular, and the air inlet of the bottom plate is arranged on the central line along the length direction of the bottom plate and is close to any long side.
According to the technical scheme provided by the invention, the radiating plate, the guide plates and the bottom plate are connected through bolts.
In a second aspect, the invention provides a cooling module for a vacuum welding furnace, comprising the cooling unit described above.
In summary, the present invention provides a cooling unit, which comprises a heat dissipating plate having a plurality of air outlets, a bottom plate having an air inlet, a flow guiding assembly disposed between the heat dissipating plate and the bottom plate, and a gas supply module for blowing nitrogen into the air inlet, wherein the nitrogen is blown into a cooling flow channel of the flow guiding assembly from the air inlet, and then is blown to a module to be cooled disposed on the heat dissipating plate through the air outlet on the heat dissipating plate, so that the module to be cooled is cooled; compared with the prior art, the invention increases the contact area between the nitrogen and the module to be cooled in an air cooling mode, thereby improving the cooling efficiency.
Drawings
FIG. 1 is a schematic view of an external appearance of a cooling module according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a base plate according to an embodiment of the present invention;
FIG. 3 is an exploded view of a cooling module according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of the bottom of the first baffle according to an embodiment of the present invention;
FIG. 5 is a schematic view of a cooling module (without a top cover) according to an embodiment of the present invention;
fig. 6 is a schematic structural view of a cooling cabin bottom according to an embodiment of the present invention.
1. A cooling module; 11. a heat dissipation plate; 12. a bottom plate; 13. a deflector; 14. a sealing structure; 15. a flow channel groove; 21. an air outlet; 22. an air inlet; 23. an air inlet pipe; 24. a first transition tuyere; 25. a second transition tuyere; 31. a first branch flow passage; 32. a second branch flow passage; 33. a third branch flow passage; 4. a housing body; 41. a hatch opening; 42. a hatch; 5. and a cooling unit.
Detailed Description
The invention is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be noted that, for convenience of description, only the portions related to the invention are shown in the drawings.
It should be noted that, without conflict, the embodiments of the present invention and features of the embodiments may be combined with each other. The invention will be described in detail below with reference to the drawings in connection with embodiments.
Example 1
As mentioned in the background art, the present invention proposes a cooling unit comprising:
at least one cooling module 1, each cooling module 1 comprising:
a heat dissipation plate 11, wherein the heat dissipation plate 11 is provided with a plurality of air outlets 21, and a module to be cooled is placed on the heat dissipation plate 11;
a bottom plate 12, wherein the bottom plate 12 is provided with an air inlet 22;
the flow guiding component is arranged between the heat dissipation plate 11 and the bottom plate 12 and comprises a plurality of cooling flow passages, and two ends of the cooling flow passages are respectively communicated with the air outlet 21 and the air inlet 22;
the cooling unit further comprises a gas supply module, nitrogen is blown into the air inlet 22 by the gas supply module, and the nitrogen is blown into the module to be cooled by the air outlet 21 after passing through the cooling flow passage.
Referring to fig. 1 and 2, the air outlet 21 is a through hole formed in the heat dissipation plate 11, and the air inlet 22 is a through hole formed in the bottom plate 12; the cooling plate 11 is provided with a frame body, the module to be cooled is placed on the frame body, the bottom of the frame body is hollowed out, and all the air outlets 21 are exposed, wherein the number and distribution of the cooling modules 1 can be determined according to the shape of the module to be cooled and the part to be cooled; alternatively, as shown in fig. 5, two rows are provided, each row having 3 cooling modules 1 arranged in sequence; as shown in fig. 6, the air supply module includes an air inlet pipe 23 disposed at the end of the air inlet 22 away from the heat dissipation plate 11, and an air supply device connected to the air inlet pipe 23, where the air supply device has no special requirement and can introduce nitrogen into the air inlet pipe 23. According to the invention, the cooling is carried out on the module to be cooled in an air cooling mode, and compared with the cooling by the cooling needle in the prior art, the contact area between nitrogen and the module to be cooled is increased, so that the cooling efficiency is improved.
In a preferred embodiment, the flow guiding assembly includes a plurality of flow guiding plates 13, and the plurality of flow guiding plates 13 are arranged along a first direction in a distributed manner, and a sealed space is formed between the flow guiding plates 13 and the heat dissipation plate 11, between each flow guiding plate 13, and between the flow guiding plates 13 and the bottom plate 12; each sealed space comprises at least one cooling flow passage group, each cooling flow passage group comprises at least one branch flow passage, and each branch flow passage communicated with different sealed spaces forms the cooling flow passage.
Referring to fig. 3, the first direction is an up-down direction, and the bottom plate 12 and the end of each flow guide plate 13 near the heat dissipation plate 11 are provided with a sealing structure 14, where the sealing structure 14 includes a sealing channel groove disposed on top surfaces of the bottom plate 12 and each flow guide plate 13, and a sealing ring is disposed in the sealing channel groove, and when each flow guide plate 13, the bottom plate 12 and the heat dissipation plate 11 are connected, the sealing space is formed by the sealing structure.
Optionally, the flow guiding assembly comprises two flow guiding plates 13, namely a first flow guiding plate and a second flow guiding plate in sequence from bottom to top; therefore, the two guide plates 13, the heat dissipation plate 11 and the bottom plate 12 form three sealed spaces, namely a first sealed space, a second sealed space and a third sealed space from bottom to top. The branch flow passage of the first sealed space is a first branch flow passage 31, the branch flow passage of the second sealed space is a second branch flow passage 32, the branch flow passage of the third sealed space is a third branch flow passage 33, and the first branch flow passage 31, the second branch flow passage 32 and the third branch flow passage 33 which are mutually communicated form the cooling flow passage.
In a preferred embodiment, a plurality of transition air openings are formed in each of the air guide plates 13, and the number of the transition air openings in each of the air guide plates 13 or the number of the air outlets 21 in the heat dissipation plate 11 is the same as the number of the branch flow passages of the sealed space adjacent to the air guide plates and far from the heat dissipation plate 11; one end of all the branch flow passages of the same cooling flow passage group is communicated with the transition air port of the guide plate 13 of which the sealing space is far away from the side of the heat dissipation plate 11 or the air inlet 22 of the bottom plate 12, and the other end is respectively communicated with the transition air port of the guide plate 13 of which the sealing space is close to the side of the heat dissipation plate 11 or the air outlet 21.
In a preferred embodiment, the corresponding position of the bottom plate 12 and the adjacent end of the flow guide plate 13 near the bottom plate 12, the corresponding position of the adjacent end of the two flow guide plates 13, and the corresponding position of the heat dissipation plate 11 and the adjacent end of the flow guide plate 13 near the heat dissipation plate 11 are respectively provided with a runner groove 15 with the same structure, and the two corresponding runner grooves 15 form the branch runners.
Referring to fig. 3, the transition tuyere is a through hole formed in the baffle 13; the two runner grooves 15 of the same branch runner have the same structure, but the structures of different branch runners may be different, and may be in a long strip shape, an arc shape, or the like.
The first sealed space is internally provided with a cooling flow passage group comprising three first branch flow passages 31, so that the first guide plate is provided with three transition air passages, namely, a first transition air passage 24, the second sealed space is internally provided with three cooling flow passage groups, each cooling flow passage group comprises two second branch flow passages 32, so that the second guide plate is provided with six transition air passages, namely, a second transition air passage 25, the third sealed space is internally provided with six cooling flow passage groups, each cooling flow passage group comprises three third branch flow passages 33, and the number of air outlets 21 is 18.
One end of each of the three first branch flow passages 31 is communicated with the air inlet 22 of the bottom plate 12, the other end of each of the three first branch flow passages is communicated with the three first transition air inlets 24, one end of each of the two second branch flow passages 32 of each of the cooling flow passage groups of the second sealed space is communicated with the first transition air inlets 24, and the other end of each of the two second branch flow passages is communicated with each of the second transition air inlets 25; one end of each of the three third branch flow passages 33 of the cooling flow passage group of the third sealed space is communicated with the same second transition air port 25, and the other end is respectively communicated with each air outlet 21.
In a preferred embodiment, the air pressure of each air outlet 21 is the same.
The lengths, the smoothness and the like of the branch flow passages of the same sealing space can be adjusted to make the air pressure of the transition air port of the same guide plate 13 the same, so that the air pressure of the air outlet 21 of the heat dissipation plate 11 is the same, and the uniformity of nitrogen blown to the module to be cooled is improved.
In a preferred embodiment, the heat dissipation plate 11 is provided with a plurality of air outlet groups distributed along a second direction, each of the air outlet groups includes a plurality of air outlets 21 distributed and arranged along a third direction, the second direction is perpendicular to the first direction, and the third direction is perpendicular to the first direction and the second direction.
Referring to fig. 3, if the module to be cooled is in a regular shape, 18 air outlets 21 on the heat dissipation plate are uniformly distributed, the second direction is a left-right direction, the third direction is a front-back direction, six air outlet groups are uniformly distributed in the left-right direction, and each air outlet group includes three air outlets 21 uniformly distributed in the front-back direction.
In a preferred embodiment, the bottom plate 12 is rectangular, and the air inlet 22 of the bottom plate 12 is disposed on a central line along the length direction of the bottom plate 12, and is near any long side.
As shown in fig. 2, alternatively, the two first branch flow passages 31 are symmetrical in structure, so in order to ensure that the lengths of the two first branch flow passages 31 are the same, the air inlet 22 must be disposed on a central line along the length direction thereof, if the air inlet 22 is also disposed on a central line along the width direction of the bottom plate 12, that is, the air inlet 22 is disposed at a central position of the bottom plate 12, in order to ensure that the lengths of the first branch flow passage 31 whose extension direction is the width direction are the same as those of the other two first branch flow passages 31, since the limitation of the widths is that the first branch flow passage 31 whose extension direction is the width direction is provided with a plurality of corners, the flow resistance of nitrogen increases, so that the air pressure at the first transition air inlet 24 is different, the air inlet 22 is disposed at a position close to any long side, so that the curvature of the first branch flow passage 31 whose extension direction is the width direction of the bottom plate 12 is ensured is the same as that of the other two first branch flow passages 31, and the three branch flow passages 31 are ensured to be the same.
In a preferred embodiment, the heat dissipation plate 11, the flow guide plates 13 and the bottom plate 12 are connected by bolts.
Wherein, each baffle 13, each baffle 11 and the bottom plate 12 are rectangular, screw holes are arranged at corresponding positions of each side, and bolts penetrate through the screw holes at corresponding positions to fixedly connect the baffle 11, each baffle 13 and the bottom plate 12.
Example 2
On the basis of embodiment 1, the invention also provides a cooling cabin of a vacuum welding furnace, comprising the cooling unit 5 described above.
Referring to fig. 5 and 6, the cooling module includes:
the cooling device comprises a shell, a cooling unit 5 and a cooling device, wherein a closed first space is formed in the shell, the cooling unit 5 is arranged at the bottom of the first space, a hatch 41 and a hatch 42 are arranged on opposite surfaces of the shell, and a cabin door for opening or closing the hatch 41 or the hatch 42 is arranged at the hatch 41 and the hatch 42; the housing includes a housing body 4 and a top cover detachably connected to the housing body 4.
A transfer assembly penetrating the inlet port 41 and the outlet port 42 for transferring the rack and the module to be cooled placed on the rack to a position right above the cooling unit 5;
the air inlet pipe 23 penetrates through the bottom of the shell, one end of the air inlet pipe is communicated with the air inlet 22 of the bottom plate 12, and the other end of the air inlet pipe stretches out of the shell and can be communicated with the air supply equipment through a hose;
the casing body 4 is further provided with a gas release valve communicated with the first space, and nitrogen gas filled into the first space through the cooling unit 5 can be discharged through the gas release valve.
The above description is only illustrative of the preferred embodiments of the present invention and of the principles of the technology employed. It will be appreciated by persons skilled in the art that the scope of the invention referred to in the present invention is not limited to the specific combinations of the technical features described above, but also covers other technical features formed by any combination of the technical features described above or their equivalents without departing from the inventive concept. Such as the above-mentioned features and the technical features disclosed in the present invention (but not limited to) having similar functions are replaced with each other.
Claims (10)
1. A cooling unit, comprising:
at least one cooling module (1), each cooling module (1) comprising:
a heat dissipation plate (11), wherein the heat dissipation plate (11) is provided with a plurality of air outlets (21), and a module to be cooled is placed on the heat dissipation plate (11);
a bottom plate (12), wherein the bottom plate (12) is provided with an air inlet (22);
the flow guide assembly is arranged between the heat dissipation plate (11) and the bottom plate (12), and comprises a plurality of cooling flow passages, and two ends of the cooling flow passages are respectively communicated with the air outlet (21) and the air inlet (22);
the cooling unit further comprises a gas supply module, nitrogen is blown into the air inlet (22) by the gas supply module, and the nitrogen is blown to the module to be cooled by the air outlet (21) after passing through the cooling flow channel.
2. The cooling unit according to claim 1, wherein the flow guide assembly comprises a plurality of flow guide plates (13), the plurality of flow guide plates (13) being arranged in a distributed arrangement along a first direction, a sealed space being formed between the flow guide plates (13) and the heat dissipation plate (11), between each flow guide plate (13), and between the flow guide plates (13) and the bottom plate (12); each sealed space comprises at least one cooling flow passage group, each cooling flow passage group comprises at least one branch flow passage, and each branch flow passage communicated with different sealed spaces forms the cooling flow passage.
3. The cooling unit according to claim 2, characterized in that a plurality of transition tuyeres are provided on each of the guide plates (13), the number of the transition tuyeres on each of the guide plates (13) or the number of the air outlets (21) on the heat dissipation plate (11) being the same as the number of the branch flow passages of the sealed space adjacent thereto, which are away from the heat dissipation plate (11) side; one end of all branch flow channels of the same cooling flow channel group is communicated with the transition air port of the guide plate (13) of which the sealing space is far away from the side of the heat radiation plate (11), or the air inlet (22) of the bottom plate (12), and the other end of the branch flow channels is communicated with the transition air port of the guide plate (13) of which the sealing space is close to the side of the heat radiation plate (11), or the air outlet (21).
4. A cooling unit according to claim 3, characterized in that the base plate (12) and the guide plates (13) adjacent to the base plate (12) are provided with flow channel grooves (15) of the same structure in correspondence of the mutually adjacent ends, in correspondence of the mutually adjacent ends of the two guide plates (13) and in correspondence of the mutually adjacent ends of the heat radiating plate (11) and the guide plates (13) adjacent to the heat radiating plate (11), both corresponding flow channel grooves (15) forming the branching flow channel.
5. A cooling unit according to claim 2, characterized in that the bottom plate (12) and the flow guide plates (13) are provided with sealing structures (14) near the ends of the heat distribution plates (11).
6. A cooling unit according to claim 1, wherein the air pressure of each of the air outlets (21) is the same.
7. The cooling unit according to claim 1, wherein a plurality of air outlet groups are arranged on the heat dissipation plate (11) in a second direction, each of the air outlet groups includes a plurality of air outlets (21) arranged in a third direction, the second direction is perpendicular to the first direction, and the third direction is perpendicular to the first direction and the second direction.
8. The cooling unit according to claim 1, wherein the base plate (12) is rectangular, and the air inlet (22) of the base plate (12) is provided at a position near any one of the long sides on a center line along a length direction of the base plate (12).
9. A cooling unit according to claim 2, characterized in that the heat distribution plate (11), the flow guide plates (13) and the bottom plate (12) are connected by bolts.
10. A vacuum welding furnace cooling cabin, characterized by comprising a cooling unit (5) according to any one of claims 1-9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311767125.2A CN117733281A (en) | 2023-12-21 | 2023-12-21 | Cooling unit and vacuum welding furnace cooling cabin |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311767125.2A CN117733281A (en) | 2023-12-21 | 2023-12-21 | Cooling unit and vacuum welding furnace cooling cabin |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117733281A true CN117733281A (en) | 2024-03-22 |
Family
ID=90250545
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311767125.2A Pending CN117733281A (en) | 2023-12-21 | 2023-12-21 | Cooling unit and vacuum welding furnace cooling cabin |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117733281A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111883497A (en) * | 2020-09-09 | 2020-11-03 | 电子科技大学 | Liquid cooling heat abstractor and cooling system |
| CN112466809A (en) * | 2021-02-02 | 2021-03-09 | 北京中硅泰克精密技术有限公司 | Semiconductor process equipment and bearing device |
| CN216802214U (en) * | 2022-01-13 | 2022-06-24 | 诚联恺达科技有限公司 | Welding furnace cooling structure |
| CN218602546U (en) * | 2022-10-18 | 2023-03-10 | 北京车和家汽车科技有限公司 | Cooling plate, battery pack and vehicle |
| KR102585892B1 (en) * | 2022-04-14 | 2023-10-06 | 창원대학교 산학협력단 | semiconductor cooling device |
-
2023
- 2023-12-21 CN CN202311767125.2A patent/CN117733281A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111883497A (en) * | 2020-09-09 | 2020-11-03 | 电子科技大学 | Liquid cooling heat abstractor and cooling system |
| CN112466809A (en) * | 2021-02-02 | 2021-03-09 | 北京中硅泰克精密技术有限公司 | Semiconductor process equipment and bearing device |
| CN216802214U (en) * | 2022-01-13 | 2022-06-24 | 诚联恺达科技有限公司 | Welding furnace cooling structure |
| KR102585892B1 (en) * | 2022-04-14 | 2023-10-06 | 창원대학교 산학협력단 | semiconductor cooling device |
| CN218602546U (en) * | 2022-10-18 | 2023-03-10 | 北京车和家汽车科技有限公司 | Cooling plate, battery pack and vehicle |
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