CN117679899A - Electric heating water-washing type tail gas treatment equipment and tail gas treatment process thereof - Google Patents
Electric heating water-washing type tail gas treatment equipment and tail gas treatment process thereof Download PDFInfo
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- CN117679899A CN117679899A CN202410008466.XA CN202410008466A CN117679899A CN 117679899 A CN117679899 A CN 117679899A CN 202410008466 A CN202410008466 A CN 202410008466A CN 117679899 A CN117679899 A CN 117679899A
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- 238000005406 washing Methods 0.000 title claims abstract description 58
- 238000005485 electric heating Methods 0.000 title claims abstract description 46
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 140
- 238000006243 chemical reaction Methods 0.000 claims abstract description 92
- 238000010438 heat treatment Methods 0.000 claims abstract description 23
- 239000007921 spray Substances 0.000 claims description 36
- 239000000498 cooling water Substances 0.000 claims description 34
- 239000004065 semiconductor Substances 0.000 claims description 25
- 239000002253 acid Substances 0.000 claims description 18
- 238000007789 sealing Methods 0.000 claims description 18
- 238000000926 separation method Methods 0.000 claims description 13
- 230000007306 turnover Effects 0.000 claims description 13
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Abstract
The invention provides electric heating water-washing type tail gas treatment equipment which comprises an air inlet pipe, a main cavity, a heating rod, a reaction cavity, a conical water collector, a front-section tee joint, a first downcomer, a tee joint connecting pipe, a second downcomer, a water tank, a rear-section tee joint and an exhaust cavity. The invention also provides an electric heating water-washing type tail gas treatment process. The electric heating water-washing type tail gas treatment equipment provided by the invention can prevent the blockage of the pipe bent pipe of the air inlet pipe, improves the treatment efficiency of tail gas, and is safe in process.
Description
Technical Field
The invention relates to the field of semiconductor tail gas treatment, in particular to electric heating water-washing type tail gas treatment equipment and a tail gas treatment process thereof.
Background
With the smooth promotion of new infrastructure such as 5G technology, internet of things, artificial intelligence, big data, cloud computing and the like, the semiconductor industry is developing at a high speed. The semiconductor industry is one of important sub-industries of electronic information manufacturing industry, belongs to high and new technology industry, is often misinterpreted as 'clean' industry, but in fact, a large amount of acid, alkali, organic solvents and various special gases are needed to be used in the processes of cleaning, photoetching, photoresist removing, drying and the like, and the tail gas yield in the whole production process is large and various. The entry of a large amount of volatile organic pollutants into the atmosphere not only can cause great damage to natural ecology, but also can cause serious threat to physical and mental health of people.
The untreated exhaust emission will cause pollution to the environment and greatly affect the advanced semiconductor process, so the treatment and control of the exhaust emission must be positively performed. The tail gas treatment device is an indispensable matching device in the semiconductor industry, and can purify toxic and harmful substances and smoke dust in tail gas discharged by a semiconductor factory or enable the tail gas to reach the discharge standard after treatment, thereby reducing the pollution to the environment and reducing the atmospheric pollution and the harm to the human health.
The thermal diffusion process of semiconductor is characterized by that at high temp. (800-1100 deg.C), the doping source (phosphane, arsine, boron trichloride, etc.) is reacted with silicon surface to release impurity atoms, and diffused from high-concentration zone of surface to internal low-concentration zone, and the final distribution tends to be uniform, belonging to chemical reaction process, in which SiH can be produced 2 Cl 2 、NH 3 、Si 2 Cl 6 、Si(OC 2 H 5 ) 4 、O 2 、N 2 O、(C 2 H 5 O) 3 B、C 3 H 9 B、C 6 H 14 O 3 、(C 2 H 5 O) 3 PO、PH 3 、B 2 H 6 、SiH 4 And tail gas. According to different tail gas treatment modes, the tail gas treatment devices are divided into combustion type, electric heating type, plasma type, adsorption type and other types, but the treatment effect is poor, the treatment efficiency is low, and the existing special needle is adopted at presentThere are few tail gas treatment devices for treating the tail gas produced by the semiconductor thermal diffusion process.
The existing tail gas treatment equipment is arranged in the pipeline of the air inlet pipe, and because the tail gas contains particles or SiH 4 The tail gas reacts with water or oxygen in the tail gas to generate precipitate, so that a pipe bent pipe of the air inlet pipe is easy to block, the temperature of the pipe wall is increased in a mode of preventing precipitate aggregation by heating an external electrothermal bag in the prior art, the problem of congestion of an exhaust pipeline in part of the process is solved, but the pipeline dredged by the mode is congested or blocked about 10 days, the problem of blockage cannot be fundamentally solved, the temperature of the electrothermal bag is not easy to control, and the operation is complex.
Therefore, the prior art needs to be solved.
Disclosure of Invention
The invention aims at overcoming the defects of the prior art and provides electric heating water-washing type tail gas treatment equipment. Based on the problems, the electric heating water-washing type tail gas treatment equipment provided by the invention can prevent the blockage of the pipe bent pipe of the air inlet pipe, improve the treatment efficiency of tail gas, enable the tail gas treatment to be more sufficient and ensure the process to be safe.
The technical scheme of the invention is realized as follows:
the utility model provides an electrical heating washing formula tail gas treatment facility, includes intake pipe, main cavity, heating rod, reaction chamber, toper water collector, anterior segment tee bend, first downcomer, tee bend connecting pipe, second downcomer, water tank, back end tee bend and exhaust chamber, the intake pipe is connected with the main cavity, the heating rod sets up on the main cavity and stretches into to the reaction chamber in, the main cavity is connected with the reaction chamber, the lower extreme and the toper water collector of reaction chamber are connected, toper water collector and anterior segment tee bend are connected, anterior segment tee bend's lower extreme and first downcomer connection, first downcomer stretches into in the water tank, one side of anterior segment tee bend is connected with the back end tee bend through tee bend connecting pipe, the lower extreme and the second downcomer of back end tee bend are connected, the second downcomer stretches into in the water tank, back end tee bend is connected to the exhaust chamber.
The electric heating water-washing type tail gas treatment equipment comprises the exhaust cavity, a first exhaust cavity, a second exhaust cavity and an acid discharge pipe; one end of the conical exhaust cavity is connected with the rear-section tee joint through a flange, and the other end of the conical exhaust cavity is fixedly connected with the first exhaust cavity through a flange; the first exhaust cavity is fixedly connected with the second exhaust cavity through a flange; the second exhaust cavity is fixedly connected with the acid exhaust pipe through a flange; the first exhaust cavity comprises a first filter screen, the first filter screen is arranged at the bottom end of the first exhaust cavity and is close to the conical exhaust cavity, the second exhaust cavity comprises a first annular filter screen, a first sleeve, a second annular filter screen and a second sleeve, the first annular filter screen is arranged between a shell of the second exhaust cavity 323 and the first sleeve 3232, the bottom of the first sleeve is a first baffle for blocking exhaust gas, the top of the first sleeve is abutted to the second annular filter screen, the second annular filter screen is arranged between a shell of the second exhaust cavity and the second sleeve, a first gap is reserved between the first sleeve and the shell of the second exhaust cavity, the bottom of the second sleeve is spaced from the first baffle, a second baffle for blocking exhaust gas is arranged at the top of the second sleeve, a second gap is reserved between the second baffle and the second annular filter screen, and a third gap is reserved between the second sleeve and the first sleeve.
The electric heating water-washing type tail gas treatment equipment is characterized in that the air inlet pipe is further provided with a scraper structure, the scraper structure comprises a scraper cylinder, a first nut, a piston rod connecting column, a gasket, a piston rod sealing cylinder, a fixing pin gasket, a spring fixing pin, a spring scraper joint, a scraper spring and a scraper pneumatic quick-connection joint, the scraper cylinder comprises a cylinder main body, a cylinder air inlet pipe and a cylinder air outlet pipe, the cylinder air inlet pipe is connected with the top of the cylinder main body, the cylinder air outlet pipe is connected with the bottom of the cylinder main body, a piston rod of the cylinder main body penetrates through the first nut and is fixedly connected with the piston rod connecting column, the gasket is arranged below the first nut, the piston rod connecting column is in clearance fit sliding connection with the piston rod sealing cylinder, the piston rod connecting column penetrates through the spring scraper joint and is fixedly connected with the spring fixing pin, and the piston rod connecting column is in clearance fit sliding connection with the spring scraper joint; the fixed pin gasket sets up between spring fixed pin and spring scraper joint, the one end fixed connection scraper spring that the spring fixed pin is close to the spring scraper joint's one end, the other end of scraper spring is the free end.
According to the electric heating water-washing type tail gas treatment equipment, the lower end of the piston rod sealing cylinder is obliquely provided with the scraper pneumatic quick-connection joint.
The electric heating water-washing type tail gas treatment equipment comprises the conical water collector, wherein the conical water collector comprises the mounting part, the lining part and the conical part, the water inlet is formed in the outer side of the mounting part, and the evenly distributed water falling openings are formed in the lining part.
The electric heating water-washing type tail gas treatment equipment comprises the reaction cavity and the outer reaction cavity, wherein a sealing cavity is formed between the inner reaction cavity and the outer reaction cavity, the outer reaction cavity is provided with a circulating cooling water inlet and a circulating cooling water outlet, the circulating cooling water outlet is connected with a cold heat exchanger, and circulating cooling water cooled by the cold heat exchanger is connected with the circulating cooling water inlet on the outer reaction cavity through a pipeline.
The electric heating water-washing type tail gas treatment equipment is characterized in that the upper supporting plate is arranged above the cold-heat exchanger, the lower supporting plate is arranged below the cold-heat exchanger, and the cold-heat exchanger is arranged between the upper supporting plate and the lower supporting plate and is fixedly connected with the upper supporting plate and the lower supporting plate respectively.
The electric heating water-washing type tail gas treatment equipment further comprises a turnover device, wherein the turnover device comprises a fixed plate, a vertical plate, a rotating shaft, a turnover frame and a fixing frame. The utility model discloses a reaction chamber, including upper supporting plate, fixed plate, pivot, fixed frame, reaction chamber, fixed frame and reaction chamber, there is the fixed plate to set up in the top of upper supporting plate, riser perpendicular to fixed plate just sets up in the both ends of fixed plate, pivot and riser fixed connection, the roll-over stand rotates to be connected on pivot (253), roll-over stand and fixed frame fixed connection, fixed frame and reaction chamber's reaction chamber fixed connection.
According to the electric heating water-washing type tail gas treatment equipment, the spray pipes are arranged at least two positions of the front-section tee joint, the tee joint connecting pipe, the rear-section tee joint and the first exhaust cavity.
Based on the same inventive concept, the invention also provides an electric heating water-washing type tail gas treatment process, which adopts the electric heating water-washing type tail gas treatment equipment, and specifically comprises the following steps:
s1, high-temperature decomposition of tail gas: the method comprises the steps that pretreated semiconductor tail gas enters a main cavity through an air inlet pipe and then enters a reaction cavity, a heating rod in the reaction cavity carries out electric heating and pyrolysis on the tail gas, a sealing cavity is formed between an inner reaction cavity and an outer reaction cavity, circulating cooling water enters the sealing cavity to cool down the reaction cavity under the action of a circulating pump, and then the warmed circulating cooling water flows to a cold-heat exchanger to be treated as cooled circulating cooling water for recycling the cooled circulating cooling water in the reaction cavity; after water enters from the water inlet of the conical water collector, the water uniformly flows into the water tank from the inner wall of the conical part along the water falling opening of the liner part, and the semiconductor tail gas decomposed at high temperature is further cooled, so that dust and particles are flushed into the water tank;
S2, washing tail gas: the tail gas after pyrolysis enters a front-stage tee joint and enters a water tank for water washing to remove water-soluble tail gas in the tail gas; the spray pipe sprays and washes the tail gas, so that on one hand, particulate matters in the tail gas are reduced, and on the other hand, the soluble tail gas is further absorbed; after the water in the water tank is full, the soluble tail gas is discharged along with the wastewater;
s3, water vapor separation of tail gas: the tail gas after washing enters a first exhaust cavity through a first filter screen; then flows through the first gap, the second gap, the third gap and the inner cavity of the second sleeve in sequence, the packing on the first annular filter screen and the second annular filter screen enable the tail gas to be cooled, the water vapor to be condensed and the air flow to be decelerated, the sufficient separation of water vapor and the tail gas in the tail gas is achieved, and the tail gas after water vapor separation reaches the standard is discharged to a factory central system for treatment through an acid discharge pipe.
Compared with the prior art, the invention has the following advantages and beneficial effects:
1. according to the electric heating water-washing type tail gas treatment equipment provided by the invention, the pretreated semiconductor tail gas enters the main cavity through the air inlet pipe, then enters the reaction cavity, the heating rod in the reaction cavity is used for heating and carrying out pyrolysis treatment on the tail gas, the tail gas is decomposed into powder or substances dissolved in water, then enters the conical water collector for flushing and cooling, enters the water tank through the first sewer pipe for water-soluble hydrolysis, the tail gas dissolved in water is discharged as wastewater, the tail gas discharged from the water tank enters the exhaust cavity through the second sewer pipe for water-vapor separation, then sequentially passes through the conical exhaust cavity and the first exhaust cavity for water-vapor separation, so that the water vapor is effectively prevented from entering the next treatment link, and finally, the tail gas is discharged through the acid discharge pipe. The electric heating water-washing type tail gas treatment equipment can be specially used for treating SiH which can be decomposed at high temperature after being heated 2 Cl 2 、NH 3 、Si 2 Cl 6 、Si(OC 2 H 5 ) 4 、O 2 、N 2 O、(C 2 H 5 O) 3 B、C 3 H 9 B、C 6 H 14 O 3 、(C 2 H 5 O) 3 PO、PH 3 、B 2 H 6 、SiH 4 And semiconductor tail gas. At the same time, some soluble corrosive gases such as Cl can be treated 2 、BCl 3 The electric heating water-washing type tail gas treatment equipment for the semiconductor tail gas such as HBr has high treatment efficiency and good treatment effect.
2. According to the electric heating water-washing type tail gas treatment equipment provided by the invention, the air inlet pipe is further provided with the scraper structure, the piston rod of the air cylinder is jacked under the action of the scraper air cylinder, the piston rod connecting column is driven by the piston rod to drive the spring fixing pin to jack downwards, so that the scraper spring is driven to slide in the pipe wall of the bent pipe of the air inlet pipe, and the pipe wall attachments at the bent pipe are scraped, so that the attachment of solid particles to the inner wall of the tail gas treatment device in the tail gas treatment process is avoided, and the pipeline of the air inlet pipe is blocked. The pneumatic quick plug connector of scraper is pulled down, lets in the inner chamber of blowing gas to piston rod seal tube, and the attachment that the blowing gas scraped the spring sweeps to the reaction chamber, and the setting of scraper has solved the easy jam problem of pipeline return bend department of intake pipe, has improved the efficiency of ventilation, guarantee technology safety.
3. The invention provides electric heating water-washing type tail gas treatment equipment, wherein the exhaust cavity comprises a conical exhaust cavity, a first exhaust cavity, a second exhaust cavity and an acid discharge pipe, and particularly the structure of the second exhaust cavity comprises a first annular filter screen, a first sleeve, a second annular filter screen, a second sleeve, a first baffle and a second baffle; the flow direction of the air flow is changed, the path of the air flow is prolonged, and the flow speed of the tail gas is gradually reduced, so that the condensation of water vapor can be ensured, and the water vapor in the tail gas and the tail gas are fully separated; the flow path is increased, so that the heat mass transfer rate of the tail gas after washing and the outside is enhanced, the damage of the exhaust cavity caused by high temperature is further avoided, and the service life of the exhaust cavity is prolonged.
4. The electric heating water-washing type tail gas treatment equipment provided by the invention is provided with a plurality of cooling structures, for example, a sealed cavity is formed between the inner reaction cavity and the outer reaction cavity, and circulating cooling water is introduced into the reaction cavity to cool the reaction cavity; the conical water collector is provided with a water inlet and a water outlet, so that cooling water uniformly flows down from the inner wall of the conical part, and the cooling effect is further achieved; the arrangement of the first spray pipe, the second spray pipe, the third spray pipe and the fourth spray is used for spraying, washing, cooling and the like the tail gas. Because the tail gas contains a large amount of corrosive gas, the corrosion to the reaction cavity, the exhaust cavity and pipelines thereof is serious, so that the corrosion can be effectively reduced through cooling, the service life is prolonged, and the overall stability and reliability of the tail gas treatment equipment are improved.
5. According to the electric heating water-washing type tail gas treatment process provided by the invention, electric energy is used for heating to carry out pyrolysis in the reaction cavity, and H is generated by reaction 2 O、CO 2 Harmless substances such as water and gas are treated by the water tank, the water vapor and the gas are separated by the discharge cavity, and the substances dissolved in the water tankAs the wastewater discharge, the gas reaching the treatment standard is directionally discharged to a factory central system through an acid discharge pipe, and the treatment can be applied to the semiconductor tail gas treatment industry and the general semiconductor industry such as liquid crystal manufacture, solar photovoltaic and the like.
Drawings
In order to more clearly illustrate the invention or the technical solutions of the prior art, the following description will be given simply with reference to the accompanying drawings, which are used in the description of the embodiments or the prior art, it being evident that the following description is only one embodiment of the invention, and that other drawings can be obtained from these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic perspective view of an electric heating water-washing type tail gas treatment device provided by the invention;
FIG. 2 is a left side view of an electric heating water-washing type tail gas treatment device provided by the invention;
FIG. 3 is a schematic diagram of the internal structure of an electric heating water-washing type tail gas treatment device provided by the invention;
FIG. 4 is a front view of the internal structure of an electric heating water-washing type tail gas treatment device provided by the invention;
FIG. 5 is a cross-sectional view A-A of FIG. 4;
FIG. 6 is a schematic view of a reaction chamber assembly according to the present invention;
FIG. 7 is a schematic view of a conical water collector according to the present invention;
FIG. 8 is a schematic diagram of a conical water collector according to the second embodiment of the present invention;
FIG. 9 is a schematic diagram of the position structure of the turnover structure according to the present invention;
FIG. 10 is a schematic diagram of a turnover structure according to the present invention;
FIG. 11 is a schematic diagram of an exhaust chamber assembly provided by the present invention;
FIG. 12 is a section B-B of FIG. 11;
FIG. 13 is a schematic view showing the internal structure of a second exhaust chamber according to the present invention;
FIG. 14 is a schematic diagram showing the internal structure of a second exhaust chamber according to the present invention;
FIG. 15 is a schematic view of a reaction chamber with a spring scraper according to the present invention;
FIG. 16 is a schematic view of a spring scraper according to the present invention;
fig. 17 is a C-C section view of fig. 16.
In the figure, 100-air inlet pipe, 110-air inlet, 120-air inlet straight pipe, 121-pressure detection pipe, 130-corrugated pipe, 140-scraper structure, 1401-scraper cylinder, 1401 a-cylinder main body, 1401 b-cylinder air inlet pipe, 1401 c-cylinder air outlet pipe, 1402-first nut, 1403-piston pipe connecting column, 1404-gasket, 1405-piston rod sealing cylinder, 1406-fixed pin gasket, 1407-spring fixed pin, 1408-spring scraper joint, 1409-scraper spring, 1410-scraper pneumatic quick-plug joint, 150-protective net, 160-heating rod, 170-main cavity, 180-reaction cavity, 181-inner reaction cavity, 182-outer reaction cavity, 190-conical water collector, 191-mounting part, 1911-water inlet, 192-gasket, 1921-water outlet, 193-cone, 200-circulation pump, 210-cooling water circulation line, 220-cold-heat exchanger, 230-upper support plate, 240-lower support plate, 250-turning device, 251-fixed plate, 252-vertical plate, 253-rotation shaft, 254-turning frame, 255-fixing frame, 260-front stage tee, 261-first shower pipe, 270-first downcomer, 280-tee connection pipe, 282-third shower pipe, 290-second downcomer, 300-water tank, 310-rear stage tee, 311-second shower pipe, 320-exhaust chamber, 321-cone-exhaust chamber, 322-first exhaust chamber, 3221-first filter screen, 3222-fourth shower pipe, 323-second exhaust chamber, 3231-first annular filter, 3232-first sleeve, 3233-second annular filter, 3234-second sleeve, 3235-first baffle, 3236-second baffle, 3237-first gap, 3238-second gap, 3239-third gap, 324-acid discharge tube, 330-top door, 340-front door, 350-front door panel, 351-alarm lamp, 352-manometer, 353-emergency stop button, 354-first switch button, 355-second switch button, 356-first flowmeter, 357-second flowmeter, 358-third flowmeter, 359-display screen, 360-right door, 370-left door, 380-rear door, 390-handle.
Detailed Description
In the following description, it should be understood that the terms "first," "second," and the like are used merely to distinguish one element from another element, and do not require or imply any actual relationship or order between the elements. Indeed the first element could also be termed a second element and vice versa. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a structure, apparatus, or device that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such structure, apparatus, or device. Without further limitation, an element defined by the phrase "comprising one does not exclude the presence of other like elements in a structure, apparatus or device comprising the element. Various embodiments are described herein in a progressive manner, each embodiment focusing on differences from other embodiments, and identical and similar parts between the various embodiments are sufficient to be seen with each other. The terms "longitudinal," "transverse," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like herein refer to an orientation or positional relationship based on that shown in the drawings, merely for ease of description herein and to simplify the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operate in a particular orientation, and thus are not to be construed as limiting the invention. In the description herein, unless otherwise specified and limited, the terms "mounted," "connected," and "coupled" are to be construed broadly, and may be, for example, mechanically or electrically coupled, may be in communication with each other within two elements, may be directly coupled, or may be indirectly coupled through an intermediary, as would be apparent to one of ordinary skill in the art. Herein, unless otherwise indicated, the term "plurality" means two or more.
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which are obtained without inventive effort by a person skilled in the art based on the embodiments of the present invention, are within the scope of the present invention.
Example 1:
as shown in fig. 1-2, an electric heating water-washing type tail gas treatment device comprises a housing, wherein the housing comprises a top door 330, a front door 340, a front door panel 350, a right door 360, a left door 370 and a rear door 380, the front door 340, the right door 360, the left door 370 and the rear door 380 are all provided with handles 390, and an alarm lamp 351, a pressure gauge 352, a display screen 359, an scram button 353, a first switch button 354, a second switch button 355, a first flowmeter 356, a second flowmeter 357 and a third flowmeter 358 are sequentially arranged on the front door panel 350 from top to bottom. The housing is compact and the handle 390 is conveniently configured for maintenance.
As shown in fig. 3 to 6, an electric heating water-washing type tail gas treatment apparatus further comprises an air inlet pipe 100, a main cavity 170, a heating rod 160, a reaction cavity 180, a conical water collector 190, a front-stage tee 260, a first downcomer 270, a tee connecting pipe 280, a second downcomer 290, a water tank 300, a rear-stage tee 310 and an exhaust cavity 320, wherein the air inlet pipe 100 is connected with the main cavity 170, the heating rod 160 is arranged on the main cavity 170 and extends into the reaction cavity 180, the main cavity 170 is connected with the reaction cavity 180, and the lower end of the reaction cavity 180 is connected with the conical water collector 190. The cone-shaped water collector 190 is connected with a front-section tee joint 260, the lower end of the front-section tee joint 260 is connected with a first sewer pipe 270, the first sewer pipe 270 extends into the water tank 300, one side of the front-section tee joint 260 is connected with a rear-section tee joint 310 through a tee joint connecting pipe 280, the lower end of the rear-section tee joint 310 is connected with a second sewer pipe 290, the second sewer pipe 290 extends into the water tank 300, and the rear-section tee joint 310 is connected with a gas discharge cavity 320; preferably, the length of the first sewer pipe 270 is longer than that of the second sewer pipe 290, so that the atmospheric pressure at both sides of the water tank 300 can be equal, the water level in the water tank 300 becomes the same height, and the effect of balancing the air pressure in the water tank 300 can be achieved.
As shown in fig. 7-8, preferably, the conical water collector 190 includes a mounting portion 191, a pad portion 192 and a conical portion 193, a water inlet 1911 is disposed on the outer side of the mounting portion 191, water falling openings 1921 uniformly distributed on the pad portion 192 are disposed on the pad portion 192, after water enters from the water inlet 1911, water uniformly flows down from the inner wall of the conical portion 193 along the water falling openings 1921 of the pad portion 192, and a water film is formed on the inner wall of the conical portion, so that adhesion of dust or particles can be effectively reduced, and meanwhile, the water flow can wash away part of the adhered dust or particles, and further cooling effect is achieved.
As shown in fig. 6, it is preferable to further include a circulation pump 200, wherein the circulation pump 200 is provided to circulate the circulating cooling water through the cooling water circulation line 210, and to supply tap water into the water tank 300, thereby discharging the waste water when the water tank 300 is full.
Referring again to fig. 3, a protective net 150 is preferably further disposed above the reaction chamber 180. Preferably, the air inlet pipe 100 sequentially comprises an air inlet 110, a corrugated pipe 130 and an air inlet straight pipe 120 from top to bottom, the air inlet 110 is connected with tail gas, and the air inlet straight pipe 120 is provided with a pressure detection pipe 121. The pressure sensing tube 121 serves to control the pressure of the air flow to maintain the air flow stable during the transportation process, and to balance the internal and external pressures. In order to know the exhaust pressure in the air inlet pipe 100 in real time, the pressure detecting pipe 121 is provided with a pressure sensor, and according to the display of the pressure sensor, the exhaust pressure can be obtained by accessing N 2 Or air to adjust the intake valve. The bellows 130 serves to compensate for thermal deformation of the inlet pipe 100 due to the high temperature of the reaction chamber 180.
Referring to fig. 5-6 again, the reaction chamber 180 includes an inner reaction chamber 181 and an outer reaction chamber 182, a sealed chamber is formed between the inner reaction chamber 181 and the outer reaction chamber 182, a circulating cooling water inlet and a circulating cooling water outlet are disposed on the outer reaction chamber 182, the circulating cooling water outlet is connected with the cold heat exchanger 220, the circulating cooling water cooled by the cold heat exchanger 220 is connected with the circulating cooling water inlet on the outer reaction chamber 182 through a pipeline, and the cold heat exchanger 220 changes the hot circulating cooling water into cold circulating cooling water for recycling. The internal temperature of the reaction chamber 180 reaches above 1000 ℃ to provide proper temperature conditions for the chemical reaction of the tail gas, but at such high temperature, in consideration of safety, circulating cooling water is arranged to cool the reaction chamber 180, the heating rod 160 in the reaction chamber 180 is cooled, and meanwhile, the conical water collector 190 cools the tail gas.
As shown in fig. 9 to 10, it is preferable that an upper support plate 230 is provided above the cold-heat exchanger 220, a lower support plate 240 is provided below the cold-heat exchanger 220, and the cold-heat exchanger 220 is disposed between the upper support plate 230 and the lower support plate 240 and is fixed to the upper support plate 230 and the lower support plate 240, respectively.
Preferably, the turnover device 250 is further included, and the turnover device 250 includes a fixing plate 251, a vertical plate 252, a rotation shaft 253, a turnover frame 254, and a fixing frame 255. The fixed plate 251 is disposed above the upper support plate 230, the vertical plate 252 is perpendicular to the fixed plate 251 and disposed at two ends of the fixed plate 251, the rotating shaft 253 is fixedly connected with the vertical plate 252, the roll-over stand 254 is rotatably connected to the rotating shaft 253, the roll-over stand 254 is fixedly connected with the fixed frame 255, and the fixed frame 255 is fixedly connected with the outer reaction cavity 182 of the reaction cavity 180. When the reaction chamber 180 needs to be cleaned, the reaction chamber 180 can be turned over along the rotating shaft 253 to facilitate cleaning.
As shown in fig. 11-14, the vent chamber 320 includes a tapered vent chamber 321, a first vent chamber 322, a second vent chamber 323, and an acid drain tube 324; one end of the conical exhaust cavity 321 is connected with the rear-section tee 310 through a flange, and the other end of the conical exhaust cavity is fixedly connected with the first exhaust cavity 322 through a flange; the first exhaust chamber 322 is fixedly connected with the second exhaust chamber 323 through a flange; the second exhaust chamber 323 is fixedly connected with the acid exhaust pipe 324 through a flange; the first exhaust cavity 322 includes a first filter screen 3221, the first filter screen 3221 is disposed at the bottom end of the first exhaust cavity 322 and is close to the tapered exhaust cavity 321, the second exhaust cavity 323 includes a first annular filter screen 3231, a first sleeve 3232, a second annular filter screen 3233 and a second sleeve 3234, the first annular filter screen 3231 is disposed between the first exhaust cavity 322 and the second exhaust cavity 323 and between the housing of the second exhaust cavity 323 and the first sleeve 3232, the bottom of the first sleeve 3232 is a first baffle 3235 for blocking exhaust gas, the top of the first sleeve 3232 is abutted to the second annular filter screen 3233, the second annular filter screen 3233 is disposed between the housing of the second exhaust cavity 323 and the second sleeve 3234, a first gap 3237 is provided between the housing of the first sleeve 3232 and the second exhaust cavity 323, a space is provided between the bottom of the second sleeve 3234 and the first baffle 3235, a second gap is provided between the second baffle 3236 for blocking exhaust gas from the top of the second sleeve 3234, and the second gap 3238 is provided between the second sleeve 3236 and the second baffle 3238. The tail gas after washing is firstly processed through the first filter screen 3221, preferably, a metal small ball filler is carried above the first filter screen 3221, the metal small ball filler is preferably a raschig ring or a pall ring made of metal materials such as 304, 316L, carbon steel, 201, 410, etc., and the height of the metal small ball filler is lower than that of the fourth spray pipe 3222. The metal ball filler above the first filter 3221 has the functions of increasing the contact area of the air flow, reducing the temperature of the air flow, returning the condensed water to the water tank 300, and increasing the resistance of the air flow to reduce the speed of the air flow. The air flow is blocked by the first baffle 3235, part of the water vapor is liquefied under the action of the first baffle 3235, the rest of the air is separated by the first baffle 3235 and passes through the first annular filter screen 3231 to continue to move upwards, in the process, the first baffle 3235 absorbs the impact force of the air flow, the resistance of the air flow is increased, the air flow is further decelerated, then passes through the first gap 3237, the first gap 3237 is filled with metal ball filler, passes through the second annular filter screen 3233 and then enters the second gap 3238, part of the water vapor is liquefied under the action of the second baffle 3236 under the blocking of the second baffle 3236, and the air flow passes through the second annular filter screen 3233 and then enters the third gap 3239, and is discharged through the acid discharge pipe 324 along the inner cavity of the second sleeve 3234 under the blocking of the first baffle 3235. The arrangement of the first annular filter screen 3231, the first sleeve 3232, the second annular filter screen 3233, the second sleeve 3234, the first baffle 3235 and the second baffle 3236 enables the air flow to flow along the inner cavities of the first gap 3237, the second gap 3238, the third gap 3239 and the second sleeve 3234, firstly, the impact force of the tail gas when the tail gas is discharged from the acid discharge pipe 324 is reduced, and noise is reduced; secondly, the air flow changes the flowing direction, the path of the air flow is prolonged, the speed of the tail gas is buffered, the flow speed of the tail gas is gradually reduced, and therefore condensation of water vapor can be ensured, and the water vapor in the tail gas and the tail gas are fully separated; in addition, as the airflow path is increased, the heat mass transfer rate of the tail gas after washing and the outside is enhanced, the damage of the exhaust cavity 320 caused by high temperature is further avoided, and the service life of the exhaust cavity 320 is prolonged.
Preferably, the front-stage tee 260 is provided with a first spray pipe 261, and a spray head of the first spray pipe 261 is opposite to the tail gas inlet of the tee connecting pipe 280. Preferably, the front-stage tee 260 is provided with a second spray pipe 311, and a nozzle of the second spray pipe 311 is opposite to the tail gas outlet of the tee connecting pipe 280. Preferably, a third spray pipe 282 is disposed at a middle position above the three-way connection pipe 280, and the third spray pipe 282 is perpendicular to the first spray pipe 261 and the second spray pipe 311, respectively. A fourth spray pipe 3222 is disposed in the first exhaust chamber 322, and the fourth spray pipe 3222 is disposed above the first filter screen 3221. The arrangement of the first spray pipe 261, the second spray pipe 311, the third spray pipe 282 and the fourth spray pipe 3222 improves the water washing effect on one hand, and further absorbs the soluble tail gas on the outflow pipeline of the tail gas subjected to high-temperature heating treatment, and flows into the water tank 300, and plays a role in cooling the tail gas on the other hand.
Preferably, the number of the heating rods 160 is six, and the heating rods are axially distributed on the top surface of the main cavity 170 and extend into the middle of the reaction cavity 180. Preferably, the number of the air inlet pipes 100 is six, and the air inlet pipes 100 are axially distributed on the side surface of the main cavity 170.
Preferably, the electric heating water-washing type exhaust gas treatment apparatus is further provided with a smoke detector (not shown), a leakage detector (not shown), and an overheat safety protection device (not shown), wherein the smoke detector (not shown) is disposed at the inner upper end of the top door 330, the leakage detector (not shown) is disposed on the water tank 300, the overheat safety protection device (not shown) is disposed at the outside of the outer reaction chamber 182, the smoke detector (not shown), the leakage detector (not shown), the overheat safety protection device (not shown) are on, if abnormality is detected, the alarm lamp 351 is turned on, and the scram button 353 can be pressed, so that the safety of the process is ensured.
The principle of the invention is as follows:
the pretreated semiconductor tail gas enters the main cavity 170 through the gas inlet pipe 100, then enters the reaction cavity 180, the heating rod 160 in the reaction cavity 180 heats the tail gas to carry out pyrolysis treatment, the tail gas is decomposed into powder or substances dissolved in water, then enters the conical water collector 190 to be washed and cooled, enters the water tank 300 through the first water down pipe 270 to be washed and hydrolyzed in water, the first spray pipe 261, the second spray pipe 311, the third spray pipe 282 and the fourth spray pipe 3222 spray and cool the tail gas dissolved in water as waste water, the tail gas discharged from the water tank 300 enters the exhaust cavity 320 through the second water down pipe 290 to carry out water-vapor separation, passes through the conical exhaust cavity 321, then sequentially passes through the first exhaust cavity 322 and the second exhaust cavity 323 to carry out water-vapor separation, the exceeding of humidity is prevented, the water vapor is effectively prevented from entering the next treatment link, and finally, the tail gas is discharged through the acid discharge pipe 324.
The electric heating water-washing type tail gas treatment equipment provided by the invention can be specially used for treating SiH which can be decomposed at high temperature after being heated 2 Cl 2 、NH 3 、Si 2 Cl 6 、Si(OC 2 H 5 ) 4 、O 2 、N 2 O、(C 2 H 5 O) 3 B、C 3 H 9 B、C 6 H 14 O 3 、(C 2 H 5 O) 3 PO、PH 3 、B 2 H 6 、SiH 4 And semiconductor tail gas. At the same time, some soluble corrosive gases such as Cl can be treated 2 、BCl 3 Semiconductor tail gases such as HBr.
SiH 2 Cl 2 +O 2 ＝SiO 2 (dust) +2HCl
4NH 3 +3O 2 ＝2N 2 +6H 2 O
Si 2 Cl 6 +4H 2 O＝2SiO 2 (dust) +6HCl+H 2
Si(OC 2 H 5 ) 4 +12O 2 ＝8CO 2 +SiO 2 (dust) +10H 2 O
2(C 2 H 5 O) 3 B+18O 2 ＝12CO 2 +B 2 O 3 +15H 2 O
2(C 2 H 5 O) 3 PO+18O 2 ＝12CO 2 +P 2 O 5 +15H 2 O
2PH 3 +4O 2 ＝P 2 O 5 +3H 2 O
B 2 H 6 +4O 2 ＝B 2 O 5 +3H 2 O
SiH 4 +2O 2 ＝SiO 2 (dust) +2H 2 O
Example 2:
15-17, it is preferable that the air intake pipe 100 is further provided with a doctor structure 140, the doctor structure 140 includes a doctor cylinder 1401, a first nut 1402, a piston rod connecting rod 1403, a gasket 1404, a piston rod sealing cylinder 1405, a fixed pin gasket 1406, a spring fixed pin 1407, a spring doctor joint 1408, a doctor spring 1409, and a doctor pneumatic quick connector 1410, the doctor cylinder 1401 includes a cylinder main body 1401a, a cylinder air intake pipe 1401b, and a cylinder air outlet pipe 1401c, the cylinder air intake pipe 1401b is connected to the top of the cylinder main body 1401a, the cylinder air outlet pipe 1401c is connected to the bottom of the cylinder main body 1401a, a piston rod of the cylinder main body 1401a is fixedly connected with the piston rod connecting rod 1403 through the first nut 1402, the gasket 1404 is disposed below the first nut 1402, the piston rod connecting rod 1403 is in clearance fit sliding connection with the piston rod sealing cylinder 1405, the piston rod connecting rod 1403 is fixedly connected with the spring fixed pin 1407 through the spring doctor joint 1408, and the piston rod connecting rod 1403 is in clearance fit sliding connection with the spring doctor joint. Preferably, two sealing rings are provided at the bottom of the cavity of the spring scraper joint 1408. The fixed pin spacer 1406 is disposed between the spring fixed pin 1407 and the spring scraper joint 1408, one end of the spring fixed pin 1407 near the spring scraper joint 1408 is fixedly connected with one end of the scraper spring 1409, and the other end of the scraper spring 1409 is a free end. The scraper spring 1409 is sleeved on a spring fixing pin 1407, and the spring fixing pin 1407 provides certain supporting force when the scraper spring 1409 cleans the pipe wall at the bent pipe. Preferably, the lower end of the piston rod sealing cylinder 1405 is obliquely provided with a scraper pneumatic quick connector 1410, and an axial included angle between the scraper pneumatic quick connector 1410 and the cylinder main body 1401a is 30-60 degrees, preferably 30 degrees, so that the bend of the air inlet pipe 100 can be cleaned more conveniently. During operation, the scraper structure 140 is obliquely arranged on the air inlet pipe 100, under the action of the scraper air cylinder 1401, the piston rod of the air cylinder is pushed, the piston rod connecting column 1403 is driven by the piston rod to drive the spring fixing pin 1407 to push downwards, so that the scraper spring 1409 is driven to slide in the pipe wall of the bent pipe of the air inlet pipe 100, and the pipe wall attachment of the bent pipe is scraped, so that the attachment of solid particles on the inner wall of the exhaust gas treatment device in the exhaust gas treatment process is avoided, or the pipeline of the air inlet pipe 100 is blocked. More preferably, the scraper pneumatic quick connector 1410 is pulled out, and purge gas is introduced into the inner cavity of the piston rod sealing cylinder 1405, and the purge gas purges attachments scraped by the spring into the reaction cavity 180. The scraper structure 140 thoroughly solves the problem that the pipe bent pipe of the air inlet pipe 100 is easy to block, improves the ventilation efficiency and ensures the process safety.
Example 3:
the embodiment provides an electric heating water-washing type tail gas treatment process, which specifically comprises the following steps:
s1, high-temperature decomposition of tail gas: the pretreated semiconductor tail gas enters the main cavity 170 through the air inlet pipe 100 and then enters the reaction cavity 180, the heating rod 160 in the reaction cavity 180 carries out electric heating and pyrolysis on the tail gas, and SiH is pyrolyzed in the reaction cavity 180 2 Cl 2 、NH 3 、Si 2 Cl 6 、Si(OC 2 H 5 ) 4 、O 2 、N 2 O、(C 2 H 5 O) 3 B、C 3 H 9 B、C 6 H 14 O 3 、(C 2 H 5 O) 3 PO、PH 3 、B 2 H 6 、SiH 4 The semiconductor tail gas, a sealed cavity is formed between the inner reaction cavity 181 and the outer reaction cavity 182, the circulating cooling water enters the sealed cavity to cool down the reaction cavity 180 under the action of the circulating pump 200, and then the circulating cooling water after temperature rise flows to the cold heat exchanger 220 to be treated as the circulating cooling water after temperature drop, and is reused for cooling down the reaction cavity 180. The semiconductor tail gas after pyrolysis flows to the water tank 300 through the diversion of the conical water collector 190, meanwhile, after water enters from the water inlet 1911 of the conical water collector 190, the water uniformly flows into the water tank 300 from the inner wall of the conical part 193 along the water outlet 1921 of the liner part 192, and the semiconductor tail gas after pyrolysis is further cooled, so that dust and particulate matters are washed to the water tank 300;
s2, washing tail gas: the tail gas after pyrolysis enters a front-stage tee joint 260 and enters a water tank 300 for water washing to remove water-soluble tail gas in the tail gas; the first spray pipe 261, the second spray pipe 311 and the third spray pipe 282 are used for spraying and washing the tail gas, so that on one hand, particulate matters in the tail gas are reduced, and on the other hand, the soluble tail gas is further absorbed; after the water in the water tank 300 is full, the soluble tail gas is discharged along with the wastewater;
S3, water vapor separation of tail gas: the tail gas after washing is filtered by the first filter screen 3221 and enters the first exhaust cavity 322, the fourth spray pipe 3222 sprays and washes the tail gas, and the spray water flows into the water tank 300; then flows through the first gap 3237, the second gap 3238, the third gap 3239 and the inner cavity of the second sleeve 3234 in sequence, the metal ball filler on the first annular filter screen 3231 and the second annular filter screen 3233 enable the tail gas to be cooled, water vapor to be condensed, the air flow is decelerated, the temperature of the whole exhaust cavity 320 is not higher than 45 ℃, sufficient separation of water vapor and tail gas in the tail gas can be achieved, and the tail gas after water vapor separation reaches the standard is discharged to a factory central system for treatment through the acid discharge pipe 324.
The invention provides an electric heating water-washing type tail gas treatment device which carries out pyrolysis in a reaction cavity 180 by electric energy heating and generates H by reaction 2 O、CO 2 And harmless substances are treated by the water tank 300, the water vapor and the gas are separated by the discharge cavity, the substances dissolved in water in the water tank 300 are discharged as wastewater, and the gas reaching the treatment standard is directionally discharged to a factory central system through the acid discharge pipe 324. The electric heating water washing tail gas treatment equipment provided by the invention can be used in the semiconductor tail gas treatment industry, and can also be used in the general semiconductor industries such as liquid crystal manufacturing and solar photovoltaic.
The foregoing is merely a preferred embodiment of the present invention and it should be noted that modifications and adaptations to those skilled in the art may be made without departing from the principles of the present invention, which are intended to be comprehended within the scope of the present invention.
Claims (10)
1. The utility model provides an electrical heating washing formula tail gas treatment facility, its characterized in that, including intake pipe (100), main cavity (170), heating rod (160), reaction chamber (180), toper water collector (190), anterior segment tee bend (260), first downcomer (270), tee bend connecting pipe (280), second downcomer (290), water tank (300), back end tee bend (310) and exhaust chamber (320), intake pipe (100) are connected with main cavity (170), heating rod (160) set up on main cavity (170) and stretch into in reaction chamber (180), main cavity (170) are connected with reaction chamber (180), the lower extreme of reaction chamber (180) is connected with toper water collector (190), toper water collector (190) are connected with anterior segment tee bend (260), the lower extreme of anterior segment tee bend (260) is connected with first downcomer (270), first downcomer (270) stretch into in water tank (300), one side of anterior segment tee bend (260) is connected with back end tee bend (310) through tee bend connecting pipe (280), back end (310) are connected with back end tee bend (310), the third downcomer (320) stretches into.
2. An electrically heated water scrubbing exhaust gas treating apparatus according to claim 1, wherein said exhaust gas plenum (320) comprises a conical exhaust gas plenum (321), a first exhaust gas plenum (322), a second exhaust gas plenum (323) and an acid drain (324); one end of the conical exhaust cavity (321) is connected with the rear-section tee joint (310) through a flange, and the other end of the conical exhaust cavity is fixedly connected with the first exhaust cavity (322) through a flange; the first exhaust cavity (322) is fixedly connected with the second exhaust cavity (323) through a flange; the second exhaust cavity (323) is fixedly connected with the acid exhaust pipe (324) through a flange; the first exhaust cavity (322) comprises a first filter screen (3221), the first filter screen (3221) is arranged at the bottom end of the first exhaust cavity (322) and is close to the conical exhaust cavity (321), the second exhaust cavity (323) comprises a first annular filter screen (3231), a first sleeve (3232), a second annular filter screen (3233) and a second sleeve (3234), the first annular filter screen (3231) is arranged between a shell of the second exhaust cavity (323) and the first sleeve 3232, the bottom of the first sleeve (3232) is a first baffle (3235) for blocking exhaust gas from the bottom of the first sleeve (3232), the top of the first sleeve (3232) is abutted to the second annular filter screen (3233), the second annular filter screen (3233) is arranged between the shell of the second exhaust cavity (323) and the second sleeve (3234), a first gap (37) is reserved between the shells of the first sleeve (3232) and the second exhaust cavity (323), the bottom of the second sleeve (3234) is provided with a first baffle (3235) for blocking exhaust gas from the bottom of the second sleeve (3232), and the second baffle (3236) is provided with a gap between the second sleeve (3236) and the second baffle (3236).
3. The electric heating water scrubbing exhaust gas treating apparatus according to claim 1, wherein the air inlet pipe (100) is further provided with a scraper structure (140), the scraper structure (140) comprises a scraper cylinder (1401), a first nut (1402), a piston rod connecting post (1403), a gasket (1404), a piston rod sealing cylinder (1405), a fixed pin gasket (1406), a spring fixed pin (1407), a spring scraper joint (1408), a scraper spring (1409) and a scraper pneumatic quick-connect joint (1410), the scraper cylinder (1401) comprises a cylinder body (1401 a), a cylinder air inlet pipe (1401 b) and a cylinder air outlet pipe (1401 c), the cylinder air inlet pipe (1401 b) is connected with the top of the cylinder body (1401 a), the cylinder air outlet pipe (1401 c) is connected with the bottom of the cylinder body (1401 a), a piston rod of the cylinder body (1401 a) passes through the first nut (1402) to be fixedly connected with the piston rod connecting post (1403), the gasket (1404) is arranged below the first nut (1402), the piston rod connecting post (1403) is in clearance fit sliding connection with the piston rod sealing cylinder (1405), the piston rod connecting post (1403) passes through the fixed pin (1405), the piston rod connecting column (1403) is in clearance fit sliding connection with the spring scraper joint (1408); the fixed pin spacer (1406) is arranged between the spring fixed pin (1407) and the spring scraper joint (1408), one end of the spring fixed pin (1407) close to the spring scraper joint (1408) is fixedly connected with one end of the scraper spring (1409), and the other end of the scraper spring (1409) is a free end.
4. An electrically heated water scrubbing exhaust gas treating apparatus according to claim 3, characterized in that the lower end of said piston rod sealing cylinder (1405) is provided with a scraper pneumatic quick connector (1410) in an inclined manner.
5. An electrically heated water-washable tail gas treatment facility according to claim 4, wherein,
the conical water collector (190) comprises a mounting portion (191), a gasket portion (192) and a conical portion (193), a water inlet (1911) is formed in the outer side of the mounting portion (191), and water falling openings (1921) which are uniformly distributed are formed in the gasket portion (192).
6. The electric heating water-washing type tail gas treatment equipment according to claim 5, wherein the reaction cavity (180) comprises an inner reaction cavity (181) and an outer reaction cavity (182), a sealing cavity is formed between the inner reaction cavity (181) and the outer reaction cavity (182), a circulating cooling water inlet and a circulating cooling water outlet are formed in the outer reaction cavity (182), the circulating cooling water outlet is connected with the cold heat exchanger (220), and circulating cooling water cooled by the cold heat exchanger (220) is connected with the circulating cooling water inlet in the outer reaction cavity (182) through a pipeline.
7. The electric heating water-washing type tail gas treatment equipment according to claim 6, wherein an upper support plate (230) is arranged above the cold-heat exchanger (220), a lower support plate (240) is arranged below the cold-heat exchanger (220), and the cold-heat exchanger (220) is arranged between the upper support plate (230) and the lower support plate (240) and fixedly connected with the upper support plate (230) and the lower support plate (240) respectively.
8. The electric heating water-washing type tail gas treatment equipment according to claim 7, further comprising a turnover device (250), wherein the turnover device (250) comprises a fixed plate (251), a vertical plate (252), a rotating shaft (253), a turnover frame (254) and a fixing frame (255), the fixed plate (251) is arranged above the upper supporting plate (230), the vertical plate (252) is perpendicular to the fixed plate (251) and is arranged at two ends of the fixed plate (251), the rotating shaft (253) is fixedly connected with the vertical plate (252), the turnover frame (254) is rotatably connected to the rotating shaft (253), the turnover frame (254) is fixedly connected with the fixing frame (255), and the fixing frame (255) is fixedly connected with an outer reaction cavity (182) of the reaction cavity (180).
9. An electrically heated water scrubbing exhaust gas treating apparatus according to claim 8, wherein at least two of said front tee (260), tee connection (280), rear tee (310) and first exhaust chamber (322) are provided with shower pipes.
10. An electric heating water-washing type tail gas treatment process, which is characterized by adopting the electric heating water-washing type tail gas treatment equipment as claimed in claim 9, and specifically comprising the following steps:
s1, high-temperature decomposition of tail gas: the pretreatment semiconductor tail gas enters a main cavity (170) through an air inlet pipe (100), then enters a reaction cavity (180), a heating rod (160) in the reaction cavity (180) carries out electric heating pyrolysis on the tail gas, a sealing cavity is formed between an inner reaction cavity (181) and an outer reaction cavity (182), circulating cooling water enters the sealing cavity to cool the reaction cavity (180) under the action of a circulating pump (200), and then the warmed circulating cooling water flows to a cold heat exchanger (220) to be treated as cooled circulating cooling water for recycling the cooled circulating cooling water in the reaction cavity (180); after entering from the water inlet (1911) of the conical water collector (190), water uniformly flows into the water tank (300) from the inner wall of the conical part (193) along the water outlet (1921) of the liner part (192);
S2, washing tail gas: the tail gas after pyrolysis enters a front-stage tee joint (260) and enters a water tank (300) for water washing to remove water-soluble tail gas in the tail gas; the spray pipe sprays and washes the tail gas, so that on one hand, particulate matters in the tail gas are reduced, and on the other hand, the soluble tail gas is further absorbed; after the water in the water tank (300) is full, the soluble tail gas is discharged along with the wastewater;
s3, water vapor separation of tail gas: the tail gas after washing enters a first exhaust cavity (322) through a first filter screen (3221); then flows through the first gap (3237), the second gap (3238), the third gap (3239) and the inner cavity of the second sleeve (3234) in sequence, the metal ball filler on the first annular filter screen (3231) and the second annular filter screen (3233) reduces the temperature of the tail gas, condenses water vapor, reduces the speed of air flow, realizes the sufficient separation of water vapor and the tail gas in the tail gas, and after the tail gas after the water vapor separation reaches the standard, is discharged to a factory central system for treatment through an acid discharge pipe (324).
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| Application Number | Priority Date | Filing Date | Title |
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| CN202410008466.XA CN117679899A (en) | 2024-01-03 | 2024-01-03 | Electric heating water-washing type tail gas treatment equipment and tail gas treatment process thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410008466.XA CN117679899A (en) | 2024-01-03 | 2024-01-03 | Electric heating water-washing type tail gas treatment equipment and tail gas treatment process thereof |
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| CN117679899A true CN117679899A (en) | 2024-03-12 |
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| CN202410008466.XA Pending CN117679899A (en) | 2024-01-03 | 2024-01-03 | Electric heating water-washing type tail gas treatment equipment and tail gas treatment process thereof |
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