CN117677818A - 倾斜推定系统、倾斜推定方法、倾斜推定程序、半导体检查系统及生物体观察系统 - Google Patents

倾斜推定系统、倾斜推定方法、倾斜推定程序、半导体检查系统及生物体观察系统 Download PDF

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Publication number
CN117677818A
CN117677818A CN202280050910.3A CN202280050910A CN117677818A CN 117677818 A CN117677818 A CN 117677818A CN 202280050910 A CN202280050910 A CN 202280050910A CN 117677818 A CN117677818 A CN 117677818A
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China
Prior art keywords
estimation
image
focus position
tilt
images
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Pending
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CN202280050910.3A
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English (en)
Chinese (zh)
Inventor
伊藤朱里
竹嶋智亲
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Hamamatsu Photonics KK
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Hamamatsu Photonics KK
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Publication of CN117677818A publication Critical patent/CN117677818A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/365—Control or image processing arrangements for digital or video microscopes
    • G02B21/367—Control or image processing arrangements for digital or video microscopes providing an output produced by processing a plurality of individual source images, e.g. image tiling, montage, composite images, depth sectioning, image comparison
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00—Machine learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00—Computing arrangements based on biological models
    • G06N3/02—Neural networks
    • G06N3/08—Learning methods
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0012—Biomedical image inspection
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/60—Analysis of geometric attributes
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/70—Determining position or orientation of objects or cameras
    • G06T7/73—Determining position or orientation of objects or cameras using feature-based methods
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/40—Extraction of image or video features
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/0016—Technical microscopes, e.g. for inspection or measuring in industrial production processes
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00—Computing arrangements based on biological models
    • G06N3/02—Neural networks
    • G06N3/04—Architecture, e.g. interconnection topology
    • G06N3/0464—Convolutional networks [CNN, ConvNet]
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/10—Image acquisition modality
    • G06T2207/10016—Video; Image sequence
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20081—Training; Learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20084—Artificial neural networks [ANN]
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30004—Biomedical image processing
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30148—Semiconductor; IC; Wafer
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30204—Marker
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30244—Camera pose

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Software Systems (AREA)
  • Multimedia (AREA)
  • Quality & Reliability (AREA)
  • Medical Informatics (AREA)
  • Mathematical Physics (AREA)
  • General Health & Medical Sciences (AREA)
  • Artificial Intelligence (AREA)
  • Data Mining & Analysis (AREA)
  • Evolutionary Computation (AREA)
  • Health & Medical Sciences (AREA)
  • Computing Systems (AREA)
  • General Engineering & Computer Science (AREA)
  • Geometry (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Molecular Biology (AREA)
  • Biomedical Technology (AREA)
  • Biophysics (AREA)
  • Computational Linguistics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Image Analysis (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
CN202280050910.3A 2021-07-19 2022-03-10 倾斜推定系统、倾斜推定方法、倾斜推定程序、半导体检查系统及生物体观察系统 Pending CN117677818A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021118847 2021-07-19
JP2021-118847 2021-07-19
PCT/JP2022/010674 WO2023002677A1 (ja) 2021-07-19 2022-03-10 傾斜推定システム、傾斜推定方法、傾斜推定プログラム、半導体検査システム及び生体観察システム

Publications (1)

Publication Number Publication Date
CN117677818A true CN117677818A (zh) 2024-03-08

Family

ID=84979881

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280050910.3A Pending CN117677818A (zh) 2021-07-19 2022-03-10 倾斜推定系统、倾斜推定方法、倾斜推定程序、半导体检查系统及生物体观察系统

Country Status (7)

Country Link
US (1) US20240282000A1 (https=)
EP (1) EP4336255A4 (https=)
JP (2) JP7229439B1 (https=)
KR (1) KR20240035945A (https=)
CN (1) CN117677818A (https=)
TW (1) TW202305659A (https=)
WO (1) WO2023002677A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7426575B1 (ja) 2023-07-13 2024-02-02 ダイトロン株式会社 外観検査装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11328408A (ja) * 1998-05-12 1999-11-30 Advantest Corp データ処理装置および方法、情報記憶媒体
JP5531883B2 (ja) * 2010-09-27 2014-06-25 セイコーエプソン株式会社 調整方法
CN108700411B (zh) 2016-03-09 2023-04-21 浜松光子学株式会社 测定装置、观察装置、及测定方法
JP2018132475A (ja) * 2017-02-17 2018-08-23 国立大学法人東京工業大学 角度測定装置、及び、角度測定方法
JPWO2019181053A1 (ja) * 2018-03-22 2021-04-08 富士フイルム株式会社 デフォーカス量測定装置、方法およびプログラム、並びに判別器
JP2021021637A (ja) * 2019-07-29 2021-02-18 コベルコ建機株式会社 建設機械の位置特定システム

Also Published As

Publication number Publication date
JPWO2023002677A1 (https=) 2023-01-26
US20240282000A1 (en) 2024-08-22
TW202305659A (zh) 2023-02-01
WO2023002677A1 (ja) 2023-01-26
JP7798821B2 (ja) 2026-01-14
EP4336255A1 (en) 2024-03-13
JP7229439B1 (ja) 2023-02-27
JP2023057119A (ja) 2023-04-20
EP4336255A4 (en) 2025-05-14
KR20240035945A (ko) 2024-03-19

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