CN117672951A

CN117672951A - Rotary jacking mechanism

Info

Publication number: CN117672951A
Application number: CN202311685284.8A
Authority: CN
Inventors: 魏猛; 张爽; 张佳男
Original assignee: Shenyang Tdsemi Co ltd
Current assignee: Shenyang Tdsemi Co ltd
Priority date: 2023-12-11
Filing date: 2023-12-11
Publication date: 2024-03-08

Abstract

The invention relates to the field of wafer production and discloses a rotary jacking mechanism, which comprises a bottom plate, wherein a base is arranged at the top end of the bottom plate, a wafer adsorption assembly is arranged in the base, a rotation driving assembly is arranged on one side of the base, a jacking driving assembly is arranged on the other side of the base, the wafer adsorption assembly comprises an inner cavity which is arranged in the base, a vacuum shaft is longitudinally arranged in the inner cavity, and the top end of the vacuum shaft penetrates through the base; according to the invention, the rotating motor is started to drive the first driving wheel to rotate, the first driving wheel and the first synchronous belt drive the first driven wheel to rotate, and the first driven wheel is connected with the vacuum shaft in a sliding way through the guide groove and the guide strip, so that the vacuum shaft and the wafer adsorption carrier disc are driven to rotate, the wafer at the top end of the wafer adsorption carrier disc is conveniently rotated, the position of the wafer is conveniently adjusted, and the problems that the existing device for conveying the wafer is complex in structure and large in size, and interference is easy to occur among a plurality of devices are solved.

Description

Rotary jacking mechanism

Technical Field

The invention belongs to the field of wafer production, and particularly relates to a rotary jacking mechanism.

Background

In the use process of wafer processing equipment and wafer detection equipment, a manipulator is generally adopted to lift a wafer from the bottom of the wafer for carrying, so when the manipulator places the wafer on a carrying platform or takes the wafer from the carrying platform, a lifting mechanism is needed to lift the wafer from the carrying platform, the manipulator can extend into the lower part of the wafer to lift the wafer, and meanwhile, during the wafer processing and detection, the rotation equipment and the lifting equipment are needed to carry out rotation lifting and other transmission on the wafer, and the devices for carrying out lifting, rotation and other transmission on the wafer are generally needed to be matched with a plurality of equipment for use, so that the following defects exist in the wafer production and processing process:

the existing device for transmitting the wafer has complex structure and large volume, even a plurality of transmission devices are needed to cooperate to realize the operations such as rotation and jacking of the wafer, and interference is easy to occur among the devices.

Disclosure of Invention

Aiming at the situation, in order to overcome the defects of the prior art, the invention provides a rotary jacking mechanism, which solves the problems that the prior device for conveying wafers is complex in structure, large in size and easy to interfere among a plurality of devices.

In order to achieve the above purpose, the present invention provides the following technical solutions: the rotary jacking mechanism comprises a bottom plate, wherein a base is arranged at the top end of the bottom plate, a wafer adsorption assembly is arranged in the base, a rotation driving assembly is arranged on one side of the base, and a jacking driving assembly is arranged on the other side of the base;

the wafer adsorption component comprises an inner cavity formed in the base, a vacuum shaft is longitudinally arranged in the inner cavity, the top end of the vacuum shaft penetrates through the upper portion of the base, a wafer adsorption carrying disc is mounted at the top end of the vacuum shaft, an adsorption hole is formed in the top end of the wafer adsorption carrying disc, the adsorption hole is communicated with the vacuum shaft, a flange is mounted at the bottom end of the wafer adsorption carrying disc, a bottom pipe is mounted at the bottom end of the vacuum shaft, the outer diameter of the bottom pipe is smaller than that of the vacuum shaft, a longitudinal joint pipe is mounted on the inner bottom wall of the inner cavity, the bottom pipe is located in the longitudinal joint pipe, the outer wall of the bottom pipe is tightly attached to the inner wall of the longitudinal joint pipe, a transverse joint pipe is mounted at the bottom end of the front of the longitudinal joint pipe and penetrates through the outer side of the base, a negative pressure pump is connected to one end of the transverse joint pipe, a sealing fixing component is mounted between the longitudinal joint pipe and the bottom pipe, and a guide strip is mounted at the outer side of the vacuum shaft in an equal angle.

Preferably, the rotation driving assembly comprises a rotation supporting seat arranged on one side of the base, a rotating motor is arranged at the bottom end of the rotation supporting seat, a first driving wheel is arranged at the output end of the rotating motor, the first driving wheel is arranged above the rotation supporting seat, a communication groove is formed in one side, close to the rotation supporting seat, of the base, the communication groove is communicated with the inner cavity, a first driven wheel is arranged on the outer side of the vacuum shaft and is annular, the first driving wheel, the communication groove and the first driven wheel are arranged at the same height, a first synchronous belt is arranged on the outer side of the first driving wheel and the outer side of the first driven wheel, a first tensioner is arranged on the outer side of the first synchronous belt, and the first tensioner is fixedly arranged on the top end of the rotation supporting seat.

Preferably, the guide way has been seted up to the upper and lower equal angle on the inner wall of first follow driving wheel, guide way and gib block sliding connection, and spacing annular has all been seted up to the top and the bottom of first follow driving wheel, and spacing annular sets up with the vacuum axle is coaxial, and the inside symmetry slidable mounting of spacing annular has spacing, and a plurality of spacing are all fixed mounting on the inside wall of inner chamber.

Preferably, the jacking driving assembly comprises a jacking supporting seat sleeved on the outer side of the base, wherein the jacking supporting seat is arranged in a U shape, two longitudinal sliding grooves are symmetrically formed in the outer wall of the base, longitudinal sliding blocks are symmetrically arranged on the side wall, close to the base, of the jacking supporting seat, the longitudinal sliding blocks are slidably arranged in the longitudinal sliding grooves, three jacking fixing seats are respectively arranged at the top ends of the jacking supporting seat, jacking rod bodies are connected with internal threads of the jacking fixing seats, jacking supporting blocks are arranged at the top ends of the jacking rod bodies, and the jacking supporting blocks are arranged in bullet shapes.

Preferably, the below of jacking supporting seat is equipped with second from driving wheel and second action wheel in proper order, the second hold-in range is installed in the outside from driving wheel and the outside of second action wheel, the pivot from driving wheel and the outer wall rotation of base are connected, the pivot and the output shaft fixed connection of jacking motor of second action wheel, jacking motor fixed mounting is on the base, the jacking connecting plate is installed to the bottom of jacking supporting seat, the jacking connecting plate is located one side of second hold-in range, jacking clamp splice is installed to one side bottom that the jacking connecting plate is close to the second hold-in range, jacking clamp splice fixed mounting is on the second hold-in range, the outside of second hold-in range is equipped with the second tensioning ware, the second tensioning ware is installed on the lateral wall of base, displacement detection unit is installed to the bottom of jacking supporting seat.

Preferably, the displacement detecting unit comprises an extending longitudinal plate arranged at the bottom end of the jacking supporting seat, the bottom end of the extending longitudinal plate is provided with a detecting piece, two sides of the extending longitudinal plate are symmetrically provided with fixed side plates, the fixed side plates are fixedly arranged on the side wall of the base, and one sides of the two fixed side plates, which are close to each other, are equally spaced with sensing pieces.

Preferably, the sealing fixing assembly comprises a sealing rubber ring arranged at the top end of the longitudinal joint pipe, the inner diameter of the sealing rubber ring is the same as that of the longitudinal joint pipe, a tensioning belt is sleeved on the outer side of the sealing rubber ring, two ends of the tensioning belt are connected together, the tensioning belt is completely tightly attached to the outer wall of the sealing rubber ring, and a tensioning driving unit is arranged on one side, close to the end part of the tensioning belt, of the sealing rubber ring.

Preferably, the tensioning driving unit comprises a clamping sleeve arranged on one side of the sealing rubber ring, two ends of the tensioning belt are arranged in the clamping sleeve, clamping screws are arranged on two sides of the clamping sleeve at equal intervals, the clamping screws on two sides clamp and fix the two ends of the tensioning belt in the clamping sleeve, a fixed box is arranged on one side of the clamping sleeve, which is far away from the sealing rubber ring, a movable block is movably arranged in the fixed box, a pull rod is arranged on one side of the movable block, which is close to the clamping sleeve, and is fixedly connected with the clamping sleeve, a first spring is arranged on one side of the movable block, which is far away from the clamping sleeve, a magnetic block is arranged on the movable block, an electromagnet is arranged on the inner wall of one end of the fixed box, which is far away from the sealing rubber ring, and the electromagnet is magnetically connected with the magnetic block, and a compressing unit at a bending part is arranged on the fixed box.

Preferably, the buckling part compressing unit comprises fixing rods symmetrically arranged on two sides of a fixing box respectively, side blocks are arranged at one end of the fixing rods, two side blocks are symmetrically arranged on one side, close to the collet, of the tensioning belt, two side blocks are respectively arranged at two bending positions of the tensioning belt, first limiting grooves are formed in the two side blocks, the first limiting grooves penetrate through one side, close to the tensioning belt, of the side blocks, first plate grooves are formed in one side, far from the tensioning belt, of the first limiting grooves, limiting clamping blocks are movably arranged in the first limiting grooves, the tensioning belt is clamped by the two limiting clamping blocks, a movable plate is arranged on one side, far from the tensioning belt, of the limiting clamping blocks, an end plate is arranged at one end of the movable plate, is arranged on one side, close to the side blocks, of the end plate, of the second spring is fixedly connected with the side blocks, side grooves are symmetrically arranged on two sides of the fixing box, side sliding blocks are arranged in the side blocks, the side blocks are hinged to one ends of the side grooves, the side blocks are hinged to one ends of the rotating rods, and the two end plates are hinged to the two auxiliary compressing units are arranged on two hinged side blocks respectively.

Preferably, the auxiliary pressing unit comprises a second limiting groove which is formed in one side, close to the sealing rubber ring, of the second limiting groove, a second plate groove is formed in one side, close to the sealing rubber ring, of the second limiting groove, a limiting block is movably mounted in the second limiting groove, the second plate groove is mounted on one side, close to the sealing rubber ring, of the limiting block, one end of the second plate groove tightly presses the tightening belt on the sealing rubber ring, a third spring is symmetrically mounted on one side, close to the clamping plate, of the limiting block, one end of the third spring is fixedly connected with one side, close to the second plate groove, of the limiting block, close to one side, close to the end plate, of the limiting block is symmetrically provided with an extrusion inclined plane, and the inclination angle of the extrusion inclined plane is identical with that of the compression inclined plane.

Compared with the prior art, the invention has the beneficial effects that:

(1) According to the invention, the rotating motor is started to drive the first driving wheel to rotate, the first driving wheel and the first synchronous belt drive the first driven wheel to rotate, and the first driven wheel is connected with the vacuum shaft in a sliding way through the guide groove and the guide strip, so that the vacuum shaft and the wafer adsorption carrier disc are driven to rotate, the rotation of the wafer at the top end of the wafer adsorption carrier disc is facilitated, and the position of the wafer is conveniently adjusted;

(2) According to the invention, the jacking motor is started to drive the second driving wheel to rotate, then the second synchronous belt is driven to move, the jacking clamping blocks are fixedly arranged on the second synchronous belt to drive the jacking supporting seat to longitudinally move, the wafer adsorption carrier plate is pushed to longitudinally move, the height of the wafer is adjusted, meanwhile, the jacking supporting seat is moved to drive the detecting piece to pass through sensing pieces with different heights, the longitudinal movement displacement of the jacking supporting seat is detected, and the height adjusting precision of the wafer is improved;

(3) After the wafer position is adjusted, the electromagnet is electrified to generate attractive force on the magnetic block, and the movable block is driven to move towards the side far away from the sealing rubber ring, so that the clamping sleeve generates tension on the tensioning belt, the sealing rubber ring is tightly pressed with the bottom pipe by the tensioning belt at the side far away from the clamping sleeve, the sealing effect between the bottom pipe and the longitudinal joint pipe is improved, and the fixing effect on the wafer is improved;

(4) According to the invention, in the moving process of the movable block, the rotating rod is driven to rotate, the two limiting clamping blocks are pushed to be close to each other, and the tensioning belts close to the two bending positions of the sealing rubber ring are tightly pressed, so that the tensioning belts sleeved on the outer sides of the sealing rubber ring are tensioned, the tensioning belts on the two sides of the sealing rubber ring are pressed towards the sealing rubber ring, the pressing effect of the sealing rubber ring and the bottom pipe is improved, the sealing effect between the bottom pipe and the longitudinal joint pipe is further improved, and the fixing effect on a wafer is improved;

(5) According to the invention, when the limiting clamp block moves towards the tightening belt, the limiting block is pushed to move towards the sealing rubber ring, so that the clamping plate generates pressure towards the sealing rubber ring on the tightening belt at one side of the sealing rubber ring close to the clamping sleeve, and therefore, the tightening belt can generate pressure on each side surface of the sealing rubber ring, the compacting sealing effect of the sealing rubber ring on the bottom pipe is improved, the wafer is ensured to be adsorbed and fixed, the clamping and fixing effect of the vacuum shaft is also improved, and the fixing stability of the wafer adsorption carrier disc is improved.

Drawings

The accompanying drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate the invention and together with the embodiments of the invention, serve to explain the invention.

In the drawings:

FIG. 1 is a schematic diagram of a rotary jacking mechanism according to the present invention;

FIG. 2 is a schematic side view of a base of the present invention;

FIG. 3 is a schematic view of the internal structure of the base of the present invention;

FIG. 4 is a schematic view of a wafer chuck assembly according to the present invention;

FIG. 5 is a schematic view of a rotary drive assembly according to the present invention;

FIG. 6 is a schematic view of a lift driving assembly according to the present invention;

FIG. 7 is a schematic diagram of a displacement detecting unit according to the present invention;

FIG. 8 is a schematic view of a seal and fixation assembly according to the present invention;

FIG. 9 is a schematic view of the structure of the tension driving unit of the present invention;

FIG. 10 is a schematic view of a compressing unit at a bending position according to the present invention;

in the figure: 1. a bottom plate; 2. a base; 3. a wafer adsorption assembly; 301. a wafer adsorption carrier; 302. a flange; 303. a vacuum shaft; 304. a guide bar; 305. a bottom tube; 306. a longitudinal joint pipe; 307. a transverse joint pipe; 308. an inner cavity; 4. a rotary drive assembly; 401. a rotary support base; 402. a rotating electric machine; 403. a first drive wheel; 404. a communication groove; 405. a first driven wheel; 406. a first synchronization belt; 407. a guide groove; 408. a limit ring groove; 409. a limiting frame; 410. a first tensioner; 5. a jacking driving assembly; 501. jacking the supporting seat; 502. a longitudinal chute; 503. a longitudinal slide block; 504. jacking the fixing seat; 505. a jacking rod main body; 506. a top support block; 507. jacking a motor; 508. a second driving wheel; 509. a second driven wheel; 510. a second timing belt; 511. a second tensioner; 512. jacking the clamping blocks; 513. jacking the connecting plate; 514. a displacement detection unit; 5141. extending the longitudinal plate; 5142. a detecting member; 5143. fixing the side plates; 5144. an induction member; 6. a seal-fixing assembly; 601. sealing the rubber ring; 602. tightening the belt; 603. tensioning the driving unit; 6031. a fixed box; 6032. a movable block; 6033. a pull rod; 6034. a jacket; 6035. clamping a screw; 6036. a first spring; 6037. a magnetic block; 6038. an electromagnet; 604. a bending part compressing unit; 6041. a fixed rod; 6042. a side block; 6043. a side groove; 6044. a side slider; 6045. a rotating lever; 6046. a first limit groove; 6047. a first plate groove; 6048. limiting clamping blocks; 6049. a moving plate; 60410. an end plate; 60411. a second spring; 605. an auxiliary pressing unit; 6051. the second limit groove; 6052. a second plate groove; 6053. a limiting block; 6054. a clamping plate; 6055. a third spring; 6056. extruding the inclined plane; 6057. a pressed inclined plane.

Detailed Description

The following description of the embodiments of the present invention will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the invention; all other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

In the embodiment, as shown in fig. 1-10, the invention comprises a bottom plate 1, a base 2 is arranged at the top end of the bottom plate 1, a wafer adsorption assembly 3 is arranged in the base 2, a rotation driving assembly 4 is arranged on one side of the base 2, and a jacking driving assembly 5 is arranged on the other side of the base 2.

In this embodiment, the wafer adsorption assembly 3 includes an inner cavity 308 formed in the base 2, a vacuum shaft 303 is longitudinally disposed in the inner cavity 308, the top end of the vacuum shaft 303 penetrates through to the upper side of the base 2, a wafer adsorption carrier 301 is mounted on the top end of the vacuum shaft 303, an adsorption hole is formed in the top end of the wafer adsorption carrier 301, the adsorption hole is communicated with the vacuum shaft 303, a flange 302 is mounted at the bottom end of the wafer adsorption carrier 301, a bottom tube 305 is mounted at the bottom end of the vacuum shaft 303, the outer diameter of the bottom tube 305 is smaller than the outer diameter of the vacuum shaft 303, a longitudinal joint tube 306 is mounted on the inner bottom wall of the inner cavity 308, the bottom tube 305 is located in the longitudinal joint tube 306, the outer wall of the bottom tube 305 is tightly attached to the inner wall of the longitudinal joint tube 306, a transverse joint tube 307 is mounted at the front bottom end of the longitudinal joint tube 306, the transverse joint tube 307 penetrates through to the outer side of the base 2, a negative pressure pump is connected to one end of the transverse joint tube 307, a sealing and fixing assembly 6 is mounted between the longitudinal joint tube 306 and the bottom tube 305, and the outer side of the vacuum shaft 303 is provided with an equiangular guide bar 304.

In this embodiment, the rotation driving component 4 includes a rotation supporting seat 401 installed on one side of the base 2, a rotating motor 402 is installed at the bottom end of the rotation supporting seat 401, a first driving wheel 403 is installed on the output end of the rotating motor 402, a guide groove 407 is formed in the upper portion of the rotation supporting seat 401 by the first driving wheel 403, a communicating groove 404 is formed in one side of the base 2 close to the rotation supporting seat 401, the communicating groove 404 is communicated with the interior of the inner cavity 308, a first driven wheel 405 is arranged on the outer side of the vacuum shaft 303, the first driving wheel 403, the communicating groove 404 and the first driven wheel 405 are in the same height, a first synchronous belt 406 is installed on the outer side of the first driving wheel 403 and the outer side of the first driven wheel 405, a first tensioner 410 is arranged on the outer side of the first synchronous belt 406, the first tensioner 410 is fixedly installed on the top end of the rotation supporting seat 401, a guide groove 407 is formed in the inner wall of the first driven wheel 405, the guide groove 407 is connected with the guide bar 304 in a sliding mode, a limit ring groove 408 is formed in the top end and the bottom end of the first driven wheel 405, the vacuum shaft 303 is coaxially arranged, the first driven wheel 405 is symmetrical to the inner side of the vacuum shaft 303, the first driven wheel 405 is arranged, the first driven wheel 405 is in the same height, the first synchronous belt 403 is arranged on the inner side of the guide groove, the first synchronous belt 403 is mounted on the first synchronous belt 403, and the first synchronous belt 406 is fixedly connected with the first driven wheel 301, and the first tensioner 405 is rotated, and the first synchronous belt 301 is rotated, and the first rotary carrier 303 is conveniently, and the first driven by the first driving the first driven and the first driven wheel 405 and the first rotary drive roller 405 and the first rotary drive device and the first driving wheel 403.

In this embodiment, the jacking driving assembly 5 includes a jacking supporting seat 501 sleeved on the outer side of the base 2, the jacking supporting seat 501 is U-shaped, two longitudinal sliding grooves 502 are symmetrically provided on the outer wall of the base 2, longitudinal sliding blocks 503 are symmetrically installed on the side wall of the jacking supporting seat 501 close to the base 2, the longitudinal sliding blocks 503 are slidably installed in the longitudinal sliding grooves 502, three jacking fixing seats 504 are respectively installed at the top ends of the jacking supporting seat 501, a jacking rod main body 505 is connected with the inner threads of the jacking fixing seats 504, a jacking block 506 is installed at the top ends of the jacking rod main body 505, the jacking block 506 is arranged in a bullet shape, a second driven wheel 509 and a second driving wheel 508 are sequentially provided below the jacking supporting seat 501, a second synchronous belt 510 is installed on the outer side of the second driven wheel 509 and the outer side of the second driving wheel 508, the rotating shaft of the second driven wheel 509 is rotationally connected with the outer wall of the base 2, the rotation shaft of the second driving wheel 508 is fixedly connected with the output shaft of the jacking motor 507, the jacking motor 507 is fixedly arranged on the base 2, the jacking connecting plate 513 is arranged at the bottom end of the jacking supporting seat 501, the jacking connecting plate 513 is positioned at one side of the second synchronous belt 510, the jacking clamping block 512 is arranged at the bottom end of one side of the jacking connecting plate 513 close to the second synchronous belt 510, the jacking clamping block 512 is fixedly arranged on the second synchronous belt 510, the second tensioner 511 is arranged at the outer side of the second synchronous belt 510, the second tensioner 511 is arranged on the side wall of the base 2, the displacement detecting unit 514 is arranged at the bottom end of the jacking supporting seat 501, the displacement detecting unit 514 comprises an extending longitudinal plate 5141 arranged at the bottom end of the jacking supporting seat 501, a detecting piece 5142 is arranged at the bottom end of the extending longitudinal plate 5141, fixed side plates 5143 are symmetrically arranged at two sides of the extending longitudinal plate 5141, the fixed side plates 5143 are fixedly arranged on the side wall of the base 2, the sensing piece 5144 is installed to the equal distance in one side that two fixed curb plates 5143 are close to each other, opens jacking motor 507, drives second action wheel 508 and rotates, drives second hold-in range 510 and removes then, and jacking clamp splice 512 fixed mounting is on second hold-in range 510, drives jacking supporting seat 501 and moves longitudinally, promotes the wafer and adsorbs carrier plate 301 and move longitudinally, adjusts the wafer height, and jacking supporting seat 501 removes simultaneously and drives detecting piece 5142 and pass through the sensing piece 5144 of different co-altitude, detects the longitudinal movement displacement of jacking supporting seat 501, improves wafer height adjustment precision.

In this embodiment, the seal fixing assembly 6 includes a seal rubber ring 601 mounted on the top end of the longitudinal joint pipe 306, the inner diameter of the seal rubber ring 601 is the same as the inner diameter of the longitudinal joint pipe 306, a tightening belt 602 is sleeved on the outer side of the seal rubber ring 601, two ends of the tightening belt 602 are combined together, the tightening belt 602 is completely tightly attached to the outer wall of the seal rubber ring 601, and a tightening driving unit 603 is arranged on one side of the seal rubber ring 601 close to the end of the tightening belt 602.

In this embodiment, the tensioning driving unit 603 includes a collet 6034 disposed on one side of the sealing rubber ring 601, two ends of the tensioning belt 602 are all mounted in the collet 6034, clamping screws 6035 are mounted on two sides of the collet 6034 at equal intervals, two ends of the tensioning belt 602 in the collet 6034 are clamped and fixed by the clamping screws 6035 on two sides, a fixed box 6031 is disposed on one side of the collet 6034 away from the sealing rubber ring 601, a movable block 6032 is movably mounted in the fixed box 6031, a pull rod 6033 is mounted on one side of the movable block 6032 close to the collet 6034, the pull rod 6033 is fixedly connected with the collet 6034, a first spring 6036 is mounted on one side of the movable block 6032 away from the collet 6034, a magnetic block 6037 is mounted on the movable block 6032, an electromagnet 6038 is magnetically connected with the magnetic block 6037, a pressing unit 604 at a bending part is mounted on the fixed box 6031, after the wafer position adjustment is finished, the electromagnet 6038 is electrified, attraction force is generated on the magnetic block 6037, one side of the movable block 6032 is driven to move towards the sealing rubber ring 6032, one side of the sealing rubber ring 602 is far away from the sealing rubber ring 602, a sealing rubber ring is made to be far from the sealing rubber ring 602, a sealing effect is improved, and a wafer sealing effect is improved, and a sealing effect is achieved between the wafer seat is achieved, and the sealing effect is improved.

In this embodiment, the bending part pressing unit 604 includes fixing rods 6041 symmetrically installed on both sides of the fixing case 6031, side blocks 6042 are installed at one end of the fixing rods 6041, the two side blocks 6042 are symmetrically installed on one side of the tightening strap 602 near the collet 6034, the two side blocks 6042 are respectively installed at two bending positions of the tightening strap 602, first limiting grooves 6046 are formed in the two side blocks 6042, the first limiting grooves 6046 penetrate to one side of the side blocks 6042 near the tightening strap 602, first plate grooves 6047 are formed in one side of the first limiting grooves 6046 far from the tightening strap 602, limiting clamping blocks 6048 are movably installed in the inner part of the first limiting grooves 6046, the two limiting clamping blocks 6048 clamp the tightening strap 602, a moving plate 6049 is installed on one side of the limiting clamping blocks 6048 far from the tightening strap 602, the moving plate 6049 is located in the inner part of the first plate grooves 6047, an end plate 60410 is installed at one side of the moving plate 6049, the end plate 60410 is located on one side of the side blocks 6042 far from the tightening strap 602, a second spring 60411 is symmetrically arranged on one side of the end plate 60410 close to the side block 6042, the second spring 60411 is fixedly connected with the side block 6042, side grooves 6043 are symmetrically arranged on two sides of the fixed box 6031, side sliding blocks 6044 are symmetrically arranged on two sides of the movable block 6032, the side sliding blocks 6044 are positioned in the side grooves 6043, the side sliding blocks 6044 are hinged with one ends of the rotating rods 6045, the other ends of the two rotating rods 6045 are respectively hinged with the two end plates 60410, auxiliary compressing units 605 are arranged on the side block 6042, in the moving process of the movable block 6032, the rotating rods 6045 are driven to rotate, the two limiting clamping blocks 6048 are pushed to be close to each other, the tightening belts 602 are compressed near two bending positions of the sealing rubber ring 601, so that the tightening belts 602 sleeved outside the sealing rubber ring 601 are tightened, the tightening belts 602 positioned on two sides of the sealing rubber ring 601 are pressed towards the sealing rubber ring 601, the compressing effect of the sealing rubber ring 601 and the bottom tube 305 is improved, the sealing effect between the bottom pipe 305 and the longitudinal joint pipe 306 is further improved, and the fixing effect on the wafer is improved.

In this embodiment, the auxiliary pressing unit 605 includes a second limiting groove 6051 provided on a side of the second limiting groove 6051 near the sealing rubber ring 601, a second plate groove 6052 provided on a side of the second limiting groove 6051 near the sealing rubber ring 601, a limiting block 6053 movably provided inside the second limiting groove 6051, a second plate groove 6052 provided on a side of the limiting block 6053 near the sealing rubber ring 601, a tightening belt 602 pressed on the sealing rubber ring 601 by one end of the second plate groove 6052, a third spring 6055 symmetrically provided on a side of the limiting block 6053 near the clamping plate 6054, one end of the third spring 6055 fixedly connected with an inner wall of a side of the second limiting groove 6051 near the second plate groove 6052, a pressed inclined surface 6057 provided on a side of the limiting block 6053 near the end plate 60410, the side of the limiting clamp block 6048, which is close to the tensioning belt 602, is symmetrically provided with the extrusion inclined surface 6056, the inclination angle of the extrusion inclined surface 6056 is the same as that of the pressed inclined surface 6057, when the limiting clamp block 6048 moves towards the tensioning belt 602, the limiting block 6053 is pushed to move towards the sealing rubber ring 601, so that the clamping plate 6054 generates pressure towards the sealing rubber ring 601 on the tensioning belt 602 at the side, which is close to the clamping sleeve 6034, of the sealing rubber ring 601, the tensioning belt 602 can generate pressure on each side surface of the sealing rubber ring 601, the compression sealing effect of the sealing rubber ring 601 on the bottom pipe 305 is improved, the adsorption fixation of a wafer is guaranteed, the clamping fixation effect of the vacuum shaft 303 is also guaranteed, and the fixation stability of the wafer adsorption carrier plate 301 is improved.

Working principle: when in use, a wafer is placed on the top end of the wafer adsorption carrier 301, so that the wafer seals the adsorption hole on the top end of the wafer adsorption carrier 301, and then the negative pressure pump is started, so that air in the vacuum shaft 303 is discharged, and negative pressure between the wafer and the wafer adsorption carrier 301 is fixed.

When the wafer needs to be rotated to realize angle adjustment, the rotating motor 402 is started, the output shaft of the rotating motor 402 drives the first driving wheel 403 to rotate, and then drives the first synchronous belt 406 to move, so as to drive the first driven wheel 405 to rotate, and the first driven wheel 405 is in sliding connection with the vacuum shaft 303 through the guide groove 407 and the guide strip 304, so that the vacuum shaft 303 and the wafer adsorption carrier 301 can be driven to rotate, and the wafer at the top end of the wafer adsorption carrier 301 can be conveniently rotated to perform position adjustment.

When the height of the wafer needs to be adjusted, the jacking motor 507 is started, the output shaft of the jacking motor 507 drives the second driving wheel 508 to rotate, thereby driving the second synchronous belt 510 to move, in the moving process of the second synchronous belt 510, as the jacking clamping blocks 512 are fixedly arranged on the second synchronous belt 510, thereby driving the jacking supporting seat 501 to longitudinally move, and the jacking blocks 506 at the top end of the jacking supporting seat 501 support the bottom wall of the wafer adsorption carrier 301, so that when the jacking supporting seat 501 longitudinally moves, the wafer adsorption carrier 301 is pushed to longitudinally move, thereby adjusting the height of the wafer, wherein the jacking fixing seat 504 is in threaded connection with the jacking rod main body 505, thereby conveniently adjusting the distance between the jacking blocks 506 and the jacking supporting seat 501, facilitating jacking, the jacking blocks 506 are arranged into bullet-shaped structures, so as to reduce the contact area between the jacking supporting blocks and the wafer adsorption carrier 301, and simultaneously in the longitudinal moving process of the jacking supporting seat 501, the detection pieces 5142 are driven to pass through the sensing pieces 5144 with different heights, thereby improving the accuracy of the longitudinal movement of the jacking supporting seat 501.

When the wafer position is adjusted, the electromagnet 6038 is in a power-off state, so that the clamping sleeve 6034 does not tightly press the tightening belt 602 and the sealing rubber ring 601, at the moment, the outer wall of the bottom tube 305 is tightly attached to the inner wall of the longitudinal joint tube 306, the adsorption effect on the wafer is guaranteed, when the wafer position is determined, the electromagnet 6038 is electrified, attractive force is generated on the magnetic block 6037, the movable block 6032 is driven to move towards the side far away from the sealing rubber ring 601, the clamping sleeve 6034 generates a pulling force on the tightening belt 602, and the sealing rubber ring 601 is tightly pressed with the bottom tube 305 by the tightening belt 602 at the side far away from the clamping sleeve 6034.

In the moving process of the movable block 6032, one end of the rotating rod 6045 is driven to move, the other end of the rotating rod 6045 moves towards the side block 6042, the two limiting clamping blocks 6048 are close to each other, the tightening strap 602 is pressed at two bending positions close to the sealing rubber ring 601, the tightening strap 602 sleeved on the outer side of the sealing rubber ring 601 is tightened, pressure towards the sealing rubber ring 601 is generated on the tightening strap 602 located on two sides of the sealing rubber ring 601, and the pressing effect of the sealing rubber ring 601 and the bottom tube 305 is improved.

When the limiting clamp block 6048 moves towards the tightening belt 602, the pressing inclined surface 6056 is enabled to generate pressure on the pressing inclined surface 6057 on the limiting block 6053, so that the limiting block 6053 is pushed to move towards the sealing rubber ring 601, the clamping plate 6054 is enabled to generate pressure towards the sealing rubber ring 601 on the tightening belt 602 positioned on one side of the sealing rubber ring 601 close to the clamping sleeve 6034, the tightening belt 602 is enabled to generate pressure on each side face of the sealing rubber ring 601, the compression sealing effect of the sealing rubber ring 601 and the bottom tube 305 is improved, the adsorption fixation of a wafer is guaranteed, meanwhile, the clamping fixation effect of the vacuum shaft 303 is achieved, and the fixation stability of the wafer adsorption carrier plate 301 is improved.

Claims

1. The utility model provides a rotatory climbing mechanism, includes bottom plate (1), its characterized in that: the wafer lifting device is characterized in that a base (2) is arranged at the top end of the bottom plate (1), a wafer adsorption assembly (3) is arranged in the base (2), a rotation driving assembly (4) is arranged on one side of the base (2), and a jacking driving assembly (5) is arranged on the other side of the base (2);

the wafer adsorption component (3) comprises an inner cavity (308) which is arranged in the base (2), a vacuum shaft (303) is longitudinally arranged in the inner cavity (308), the top end of the vacuum shaft (303) penetrates through the base (2), the top end of the vacuum shaft (303) is provided with a wafer adsorption carrying disc (301), the top end of the wafer adsorption carrying disc (301) is provided with an adsorption hole, the adsorption hole is communicated with the vacuum shaft (303), the bottom end of the wafer adsorption carrying disc (301) is provided with a flange (302), the bottom end of the vacuum shaft (303) is provided with a bottom pipe (305), the outer diameter of the bottom pipe (305) is smaller than the outer diameter of the vacuum shaft (303), the inner bottom wall of the inner cavity (308) is provided with a longitudinal joint pipe (306), the bottom pipe (305) is located in the longitudinal joint pipe (306), the outer wall of the bottom pipe (305) is tightly attached to the inner wall of the longitudinal joint pipe (306), the front bottom end of the longitudinal joint pipe (306) is provided with a transverse joint pipe (307), the transverse joint pipe (307) penetrates through the outer side of the base (2), one end of the transverse joint pipe (307) is connected with a negative pressure pipe (306), and an equiangular pump (6) is arranged between the longitudinal joint pipe (306) and the bottom pipe is provided with an equiangular guide pipe (6).

2. A rotary jacking mechanism as claimed in claim 1, wherein: the rotary driving assembly (4) comprises a rotary supporting seat (401) arranged on one side of the base (2), a rotary motor (402) is arranged at the bottom end of the rotary supporting seat (401), a first driving wheel (403) is arranged at the output end of the rotary motor (402), the first driving wheel (403) is arranged above the rotary supporting seat (401), a communication groove (404) is formed in one side, close to the rotary supporting seat (401), of the base (2), the communication groove (404) is communicated with the inside of the inner cavity (308), a first driven wheel (405) is arranged on the outer side of the vacuum shaft (303), the first driven wheel (405) is arranged in a ring shape, the first driving wheel (403), the communication groove (404) and the first driven wheel (405) are located at the same height, a first synchronous belt (406) is arranged on the outer side of the first driving wheel (403) and the outer side of the first driven wheel (405), and a first tensioner (410) is fixedly arranged on the top end of the rotary supporting seat (401).

3. A rotary jacking mechanism as claimed in claim 2, wherein: guide grooves (407) are formed in the inner wall of the first driven wheel (405) at equal angles, the guide grooves (407) are in sliding connection with the guide strips (304), limiting ring grooves (408) are formed in the top end and the bottom end of the first driven wheel (405), the limiting ring grooves (408) are coaxially arranged with the vacuum shaft (303), limiting frames (409) are symmetrically and slidably arranged in the limiting ring grooves (408), and a plurality of limiting frames (409) are fixedly arranged on the inner side wall of the inner cavity (308).

4. A rotary jacking mechanism as claimed in claim 1, wherein: jacking drive assembly (5) are including cover locate jacking supporting seat (501) in base (2) outside, jacking supporting seat (501) set up to be the U style of calligraphy, two vertical spouts (502) have been seted up to the symmetry on the outer wall of base (2), vertical slider (503) are installed to symmetry on the lateral wall that jacking supporting seat (501) is close to base (2), vertical slider (503) slidable mounting is in the inside of vertical spout (502), three jacking fixing base (504) are installed respectively on the top of jacking supporting seat (501), the inside threaded connection of jacking fixing base (504) has jacking pole main part (505), jacking piece (506) are installed on the top of jacking pole main part (505), jacking piece (506) set up to be bullet head form.

5. The rotary jacking mechanism of claim 4 wherein: the lifting support is characterized in that a second driven wheel (509) and a second driving wheel (508) are sequentially arranged below the lifting support seat (501), a second synchronous block (512) is arranged at the bottom end of one side of the lifting connection plate (513) close to the second synchronous belt (510), the lifting clamping block (512) is fixedly arranged on the second synchronous belt (510), a second tensioner (511) is arranged at the outer side of the second synchronous belt (510), the second tensioner (511) is arranged on the side wall of the base (2), the lifting connection plate (513) is arranged at the bottom end of the lifting support seat (501), and a displacement detection unit (514) is arranged at the bottom end of the lifting support seat (501).

6. The rotary jacking mechanism of claim 5 wherein: the displacement detection unit (514) comprises an extension vertical plate (5141) arranged at the bottom end of the jacking supporting seat (501), a detection piece (5142) is arranged at the bottom end of the extension vertical plate (5141), fixed side plates (5143) are symmetrically arranged on two sides of the extension vertical plate (5141), the fixed side plates (5143) are fixedly arranged on the side wall of the base (2), and sensing pieces (5144) are arranged on one sides, close to each other, of the two fixed side plates (5143) at equal intervals.

7. A rotary jacking mechanism as claimed in claim 1, wherein: the sealing fixing assembly (6) comprises a sealing rubber ring (601) arranged at the top end of the longitudinal joint pipe (306), the inner diameter of the sealing rubber ring (601) is identical to that of the longitudinal joint pipe (306), a tensioning belt (602) is sleeved on the outer side of the sealing rubber ring (601), two ends of the tensioning belt (602) are connected together, the tensioning belt (602) is tightly attached to the outer wall of the sealing rubber ring (601), and a tensioning driving unit (603) is arranged on one side, close to the end of the tensioning belt (602), of the sealing rubber ring (601).

8. The rotary jacking mechanism of claim 7 wherein: the tensioning drive unit (603) is including locating the collet (6034) of sealing rubber circle (601) one side, the inside of collet (6034) is all installed at the both ends of taut area (602), clamping screw (6035) are installed to the equal distance in both sides of collet (6034), clamping screw (6035) of both sides is tightly fixed with the inside taut area (602) both ends of collet (6034), one side that sealing rubber circle (601) was kept away from to collet (6034) is equipped with fixed box (6031), movable block (6032) are installed to the inside movable mounting of fixed box (6031), pull rod (6033) are installed to one side that movable block (6032) is close to collet (6034), first spring (6036) are installed to one side that collet (6034) was kept away from to movable block (6032), install magnetic block (6037) on the one end inner wall that sealing rubber circle (601) was kept away from to fixed box (6031), electro-magnet (6038) and magnetic block (6037) are connected with magnetic block (6031), install the clamp unit (6031) on buckling.

9. The rotary jacking mechanism of claim 8 wherein: the bending part compressing unit (604) comprises fixing rods (6041) which are symmetrically arranged at two sides of a fixing box (6031) respectively, one end of each fixing rod (6041) is provided with a side block (6042), the two side blocks (6042) are symmetrically arranged at one side of a tensioning belt (602) close to a jacket (6034), the two side blocks (6042) are respectively arranged at two bending positions of the tensioning belt (602), first limiting grooves (6046) are formed in the two side blocks (6042), the first limiting grooves (6046) penetrate through one side of each side block (6042) close to the tensioning belt (602), one side of each first limiting groove (6046) far away from the tensioning belt (602) is provided with a first plate groove (6047), the inside of each first limiting groove (6046) is movably provided with a limiting clamp block (6048), the tensioning belt (602) is clamped by the two limiting clamp blocks (6048), one side of each limiting clamp block (6048) far from the tensioning belt (602) is provided with a moving plate (6049), the moving plate (6049) is located in one side of each side of the first plate groove (6047) close to the tensioning belt (602), one side of each limiting clamp block (60411) is located at one side of each side of the first limiting clamp (6042) close to the tensioning belt (6042), one side of each side of the first limiting groove (6042) is located at one side of the first limiting block (6042) close to the end (6042) respectively, side grooves (6043) are symmetrically formed in two sides of the fixed box (6031), side sliding blocks (6044) are symmetrically arranged in two sides of the movable block (6032), the side sliding blocks (6044) are located in the side grooves (6043), the side sliding blocks (6044) are hinged to one ends of rotating rods (6045), the other ends of the two rotating rods (6045) are hinged to two end plates (60410) respectively, and auxiliary pressing units (605) are arranged on the side blocks (6042).

10. The rotary jacking mechanism of claim 9 wherein: the auxiliary pressing unit (605) comprises a second limiting groove (6051) which is formed in the side, close to the sealing rubber ring (601), of the second limiting groove (6051), a second plate groove (6052) is formed in the side, close to the sealing rubber ring (601), of the second limiting groove (6051), a limiting block (6053) is movably mounted in the side, close to the sealing rubber ring (601), of the limiting block (6053), the second plate groove (6052) is formed in the side, close to the sealing rubber ring (601), of the limiting block (6052), one end of the second plate groove (6052) presses the tightening belt (602) tightly on the sealing rubber ring (601), a third spring (6055) is symmetrically mounted on one side, close to the clamping plate (6054), of the limiting block (6055) is fixedly connected with one side inner wall, close to the second plate groove (6052), of the limiting block (6053) is provided with an inclined plane (6057), one side, close to the tightening belt (602), of the limiting block (6048) is symmetrically provided with an extrusion inclined plane (6056), and the inclination angle of the extrusion inclined plane (6056) is the same as the inclination angle of the compression inclined plane (6057).