CN117637605A - Conductive line printing method and device, electronic equipment and medium - Google Patents
Conductive line printing method and device, electronic equipment and medium Download PDFInfo
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- 238000007639 printing Methods 0.000 title claims abstract description 297
- 238000000034 method Methods 0.000 title claims abstract description 67
- 239000000758 substrate Substances 0.000 claims abstract description 88
- 230000000007 visual effect Effects 0.000 claims abstract description 44
- 230000009471 action Effects 0.000 claims description 25
- 230000008569 process Effects 0.000 claims description 24
- 230000003287 optical effect Effects 0.000 claims description 14
- 238000012876 topography Methods 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 13
- 230000002159 abnormal effect Effects 0.000 claims description 12
- 238000003860 storage Methods 0.000 claims description 12
- 238000001914 filtration Methods 0.000 claims description 11
- 238000004590 computer program Methods 0.000 claims description 4
- 239000010408 film Substances 0.000 description 11
- 230000006870 function Effects 0.000 description 10
- 238000005516 engineering process Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 7
- 238000004891 communication Methods 0.000 description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- 239000012530 fluid Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- 239000004332 silver Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 238000009877 rendering Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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Abstract
The embodiment of the specification discloses a conductive line printing method, a device, electronic equipment and a medium. The method comprises the steps of obtaining a current planned path of a conductive line on a substrate and setting printing parameters; establishing a substrate coordinate system, and determining the relative position relationship among the printing needle head, the vision sensor and the morphology sensor according to the substrate coordinate system; acquiring a visual sensor coordinate; based on the relative position relation, updating the coordinates of the printing needle head and the coordinates of the morphology sensor according to the coordinates of the vision sensor; scanning a current planning path through a morphology sensor based on the morphology sensor coordinates to obtain a current planning path coordinate set; and generating a needle printing path corresponding to the current planning path through the current planning path coordinate set. The embodiment of the specification has the advantages that the precision of the conductive circuit is high, and the stability and consistency of the printing quality are ensured.
Description
Technical Field
One or more embodiments of the present disclosure relate to the field of semiconductor technology, and in particular, to a method, an apparatus, an electronic device, and a medium for printing a conductive line.
Background
With the development of semiconductor design technology and process capability, microelectronic devices based on integrated circuit chips are rapidly iterating toward miniaturization, integration, high frequency, and high environmental resistance. In order to realize precise circuit control, a high-precision circuit pattern needs to be manufactured on a substrate, the conventional circuit manufacturing method mainly adopts a physical vapor deposition technology to deposit a required thin film layer on a substrate, and then adopts a photoetching technology to manufacture the required circuit pattern on the thin film, or directly ablates an unused metal film layer area through laser, so that the required circuit pattern is left. However, such methods can only produce circuits on relatively flat interfaces, and when the processes are carried out on interfaces with complex terrains or obvious height differences, the phenomena of lithography/laser defocusing, poor film formation, poor etching and the like often exist, so that the precision of the produced circuits is low, and the conductivity and the substrate performance are affected. In addition, in the existing conductive line printing method, the printing needle head needs to keep a certain contact force with the printing substrate to realize normal ink transfer in the printing process, however, the height of the printing needle head may be changed at any time due to surface unevenness of the printing substrate, abrasion of the needle head or other burst factors, so that the printing quality is reduced or printing cannot be performed normally.
Disclosure of Invention
The embodiment of the specification provides a conductive circuit printing method, a device, electronic equipment and a medium, and the technical scheme is as follows:
in a first aspect, embodiments of the present disclosure provide a conductive line printing method, including: acquiring a current planned path of a conductive line on a substrate and setting printing parameters; establishing a substrate coordinate system, and determining the relative position relationship among the printing needle head, the vision sensor and the morphology sensor according to the substrate coordinate system; acquiring a visual sensor coordinate, wherein the visual sensor coordinate is the coordinate of the visual sensor when the optical axis of the visual sensor reaches the first planning point of the current planning path; updating the coordinates of the printing needle head and the coordinates of the morphology sensor according to the coordinates of the visual sensor based on the relative position relation; scanning the current planning path through the morphology sensor based on the morphology sensor coordinates to obtain a current planning path coordinate set; and generating a pinhead printing path corresponding to the current planning path through the current planning path coordinate set, wherein the pinhead printing path is used for the printing pinhead to execute printing action based on the printing pinhead coordinates.
In a second aspect, embodiments of the present disclosure provide a conductive line printing apparatus, including: the path acquisition unit is used for acquiring the current planned path of the conductive circuit on the substrate and setting printing parameters; the coordinate establishing unit is used for establishing a substrate coordinate system and determining the relative position relationship among the printing needle head, the vision sensor and the morphology sensor according to the substrate coordinate system; the coordinate acquisition unit is used for acquiring the coordinate of the visual sensor, wherein the coordinate of the visual sensor is the coordinate of the visual sensor when the optical axis of the visual sensor reaches the first planning point of the current planning path; the scanning unit is used for scanning the current planning path through the morphology sensor based on the morphology sensor coordinates to obtain a current planning path coordinate set; and the path generation unit is used for generating a pinhead printing path corresponding to the current planning path through the current planning path coordinate set, and the pinhead printing path is used for the printing pinhead to execute printing action based on the printing pinhead coordinates.
In a third aspect, embodiments of the present disclosure provide an electronic device including a processor and a memory; the processor is connected with the memory; a memory for storing executable program code; the processor executes a program corresponding to the executable program code by reading the executable program code stored in the memory for performing the steps of the conductive line printing method of the first aspect of the above embodiment.
In a fourth aspect, embodiments of the present disclosure provide a computer storage medium storing a plurality of instructions adapted to be loaded by a processor and to perform the steps of the conductive line printing method of the first aspect of the embodiments described above.
The technical scheme provided by some embodiments of the present specification has the following beneficial effects:
according to the embodiment of the specification, based on a high-precision printing technology, the coordinates of the printing needle head and the coordinates of the morphology sensor are updated through the relative position relation among the printing needle head, the vision sensor and the morphology sensor, the current planning path is scanned through the morphology sensor, the current planning path coordinate set is obtained, and the needle head printing path corresponding to the current planning path is generated through the current planning path coordinate set. According to the embodiment of the specification, not only can the conducting circuit be accurately manufactured on the non-flat substrate, but also the conducting circuit is high in precision, and the current planning path coordinate set corresponding to the current planning path can be scanned out through the morphology sensor in the printing process, so that the height of the printing needle head is further adjusted and compensated in real time, and the stability and consistency of the printing quality are ensured.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present description, the drawings that are required in the embodiments will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present description, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic diagram of an application scenario of a conductive line printing system provided in the present specification.
Fig. 2 is a schematic flow chart of a printing method of a conductive line provided in the present specification.
FIG. 3 is a schematic view of a substrate with different shape step differences provided in the present specification.
Fig. 4 is a schematic flow chart of another printing method of a conductive line provided in the present specification.
Fig. 5a is a schematic representation of the original height data fitting curve provided in this specification.
Fig. 5b is a schematic diagram of a height data fitting curve after the filtering process provided in the present specification.
Fig. 6 is a schematic diagram of a printing process flow of a conductive line provided in the present specification.
Fig. 7 is a schematic structural diagram of a conductive line printing apparatus provided in the present specification.
Fig. 8 is a schematic structural diagram of an electronic device provided in the present specification.
Detailed Description
The technical solutions in the embodiments of the present specification will be clearly and completely described below with reference to the drawings in the embodiments of the present specification.
The terms first, second and the like in the description and in the claims and in the above-described figures are used for distinguishing between different objects and not necessarily for describing a sequential or chronological order. Furthermore, the term "include" and any variations thereof is intended to cover a non-exclusive inclusion. For example, a process, method, system, article, or apparatus that comprises a list of steps or elements is not limited to only those listed steps or elements but may include other steps or elements not listed or inherent to such process, method, article, or apparatus.
The present disclosure presents a scenario in which a conductive trace printing method is applied, prior to elaborating the conductive trace printing method in connection with one or more embodiments.
The embodiment of the specification provides a conductive line printing method, a device, electronic equipment and a medium. Specifically, the embodiment of the application provides a conductive line printing apparatus, which may be integrated in a computer device, and the computer device may include at least one of a terminal, a server, and the like. The terminal may be a smart phone, a tablet computer, a notebook computer or personal computer (Personal Computer, PC), an intelligent wearable device, or the like. The server may be an intercommunication server between a plurality of heterogeneous systems or a background server of a content interaction system, may be an independent physical server, may be a server cluster or a distributed system formed by a plurality of physical servers, and may be a cloud server for providing cloud services, cloud databases, cloud computing, cloud functions, cloud storage, network services, cloud communication, middleware services, domain name services, security services, basic cloud computing services such as big data and an artificial intelligent platform, and the like.
Referring to fig. 1, fig. 1 is a schematic view of a conductive trace printing system 100 according to an embodiment of the present invention, where the conductive trace printing system 100 may include a conductive trace printing apparatus 110, a printing device 120, and so on. The conductive line printing apparatus 110 is communicatively coupled to a printing device 120. The printing equipment comprises a motion control system, a sucker device, a height measurement and automatic following system, a fluid control system, a visual observation system and the like, wherein the motion control system is used for controlling a printing substrate circuit, the motion speed of a printing needle head, a printing receiving distance and the like; the sucking disc device is connected with the motion control system and comprises a sucking disc and the like for fixing a substrate; the height measurement and automatic following system comprises a sensor, a sensor controller and the like, wherein the sensor can comprise a shape sensor and the like, and the shape sensor can be used for measuring the shape of the surface of the substrate and the space coordinates of the substrate; the high-precision fluid control system comprises a printing needle head, a fluid control system and the like, and the fluid control system is used for providing preset air pressure for the printing needle head; the visual observation system comprises a lens barrel, a visual sensor, a lens barrel clamp and the like, wherein the visual sensor is a device or a system capable of sensing and capturing optical information and is used for observing a substrate, and the visual sensor can be a camera and the like.
In the embodiment of the present disclosure, the conductive line printing device 110 may be integrated on a computer device such as a terminal or a server, where the computer device may obtain a current planned path of the conductive line on the substrate and set printing parameters; establishing a substrate coordinate system, and determining the relative position relationship among the printing needle head, the vision sensor and the morphology sensor according to the substrate coordinate system; acquiring a visual sensor coordinate, wherein the visual sensor coordinate is the coordinate of the visual sensor when the optical axis of the visual sensor is opposite to a first planning point of a current planning path; based on the relative position relation, updating the coordinates of the printing needle head and the coordinates of the morphology sensor according to the coordinates of the vision sensor; scanning a current planning path through a morphology sensor based on the morphology sensor coordinates to obtain a current planning path coordinate set; and generating a pinhead printing path corresponding to the current planning path through the current planning path coordinate set, wherein the pinhead printing path is used for printing the pinhead to execute printing action and the like based on the printing pinhead coordinates.
It should be noted that, the schematic view of the scenario of the conductive line printing system shown in fig. 1 is merely an example, and the conductive line printing system and the scenario described in the embodiment of the present invention are for more clearly describing the technical solution of the embodiment of the present invention, and do not constitute a limitation on the technical solution provided by the embodiment of the present invention, and those skilled in the art can know that, with the evolution of the conductive line printing system and the appearance of a new scenario, the technical solution provided by the embodiment of the present invention is equally applicable to similar technical problems.
The following detailed description is given, respectively, of the embodiments, and the description sequence of the following embodiments is not to be taken as a limitation of the preferred sequence of the embodiments.
The embodiment of the present specification will be described from the perspective of the conductive line printing apparatus 110, and the conductive line printing apparatus 110 may be integrated into a computer device, which may be a server or a terminal.
Referring to fig. 2, an embodiment of the present disclosure provides a conductive line printing method, which specifically includes:
step 200, obtaining the current planned path of the conductive circuit on the substrate and setting printing parameters.
The printing parameters comprise printing speed, printing air pressure, needle pitch and the like.
In the present description, the conductive line may be a wire or a rail for transmitting current and signals in an electronic device or an electronic circuit. Conductive traces are circuit paths formed based on metal conductors on a substrate. The conductive circuit material includes, but is not limited to, silver, copper, and the like. The substrate may be a material that serves as a carrier or foundation in the manufacture of electronic components. For example, the base material may be a substrate, a combination of a substrate and a base film, or the like. The substrate may be a silicon substrate, a glass substrate, or the like, and the base film material includes, but is not limited to, a glass base, an organic material (FPC, PI film, or the like), a PCB board, a metal film layer, an oxide film layer, or the like.
In the embodiments of the present disclosure, the substrate may have a planar surface, and may also have a non-planar surface, which may be a variety of different shaped level differences, and the like. As shown in fig. 3, substrates having differently shaped level differences in some embodiments of the present disclosure include, but are not limited to, right angle level differences, trapezoid level differences, triangular level differences, arc level differences, any combination between differently shaped level differences, and the like.
In some embodiments of the present description, obtaining a current planned path of a conductive trace on a substrate includes: acquiring parameters of a conductive line; setting a plurality of planned paths of the conductive circuit on the substrate according to the conductive circuit parameters; when a certain planning path in a plurality of planning paths is preprinted, the certain planning path is used as the current planning path.
In the present embodiment, the conductive line parameters include, but are not limited to, line width, film thickness, line spacing, and the like of the line. The number of planned paths may include one planned route or more than one number of planned routes. The conductive lines on the substrate may be continuous lines, lines distributed at different locations on the substrate, or the like.
The embodiment of the specification can divide a continuous conductive line into a plurality of sections, and each section is a planned path; the lines distributed on different positions of the substrate can be used as a planned path and the like. In the embodiment of the present specification, parameters of a conductive line may be obtained first; setting a plurality of planned paths of the conductive circuit on the substrate according to the conductive circuit parameters; when a certain planned path of the several planned paths is ready to be printed, the certain planned path may be taken as the current planned path, i.e. the current planned path may be the planned path ready to be printed at the current moment.
And 210, establishing a substrate coordinate system, and determining the relative position relationship among the printing needle head, the vision sensor and the morphology sensor according to the substrate coordinate system.
In the embodiment of the present disclosure, the bottom left corner of the substrate may be used as an origin, and the length, width, and height directions of the substrate may be used as three-dimensional coordinate axes, so as to establish a substrate coordinate system.
In the embodiment of the specification, the vision sensor and the morphology sensor are respectively aligned to the preset point positions of the area near the printing needle according to the base material coordinate system, so that the respective coordinates of the printing needle, the vision sensor and the morphology sensor are determined, and the relative position relationship among the printing needle, the vision sensor and the morphology sensor is further determined.
Step 220, obtaining the vision sensor coordinates.
In this embodiment of the present disclosure, the coordinates of the vision sensor may be coordinates of the vision sensor when the optical axis pair of the vision sensor reaches the first planned point of the current planned path.
The current planned path according to the embodiment of the present disclosure may include a path planning direction and a plurality of planned points, where a first point in the plurality of planned points along the path planning direction is a first planned point.
And 230, updating the coordinates of the printing needle head and the coordinates of the morphology sensor according to the coordinates of the vision sensor based on the relative position relation.
In the embodiment of the specification, the vision sensor not only can be used for observing the real-time printing condition of the base material, but also can be used for calibrating the coordinates of the printing needle head and the coordinates of the morphology sensor. Because the vision sensor has moved to the corresponding print area of the current scan path after printing of the last scan path is completed, the position of the vision sensor changes, so that the positions of the print head and the morphology sensor need to be changed for the current scan path to calibrate the new print head coordinates and morphology sensor coordinates.
In some embodiments of the present description, updating the printing head coordinates according to the vision sensor coordinates based on the relative positional relationship includes: acquiring a first current coordinate, wherein the first current coordinate is the current coordinate of the printing needle head; when the fact that the relative position relation between the first current coordinate and the visual sensor coordinate is not met is detected, acquiring the coordinate when the printing needle head accords with the relative position relation; and moving the printing needle head from the first current coordinate to the coordinate when the printing needle head accords with the relative position relation.
In the present embodiment, the coordinates of the printing head can be calibrated by a visual sensor. When the relative position relation between the first current coordinate and the visual sensor coordinate is detected not to be satisfied, the printing needle head is moved from the current coordinate to the coordinate conforming to the relative position relation.
In some embodiments of the present description, updating the topography sensor coordinates from the vision sensor coordinates based on the relative positional relationship includes: acquiring a second current coordinate which is the current coordinate of the morphology sensor; when the fact that the second current coordinate and the vision sensor coordinate do not meet the relative position relation is detected, acquiring the coordinate when the morphology sensor meets the relative position relation; and moving the morphology sensor from the second current coordinate to a coordinate when the morphology sensor accords with the relative position relation.
In the embodiment of the specification, the coordinates of the morphology sensor can be calibrated through the vision sensor. And when the condition that the relative position relation between the second current coordinate and the visual sensor coordinate is not met is detected, the appearance sensor is moved from the current coordinate to the coordinate conforming to the relative position relation.
Step 240, scanning the current planning path through the morphology sensor based on the morphology sensor coordinates to obtain a current planning path coordinate set.
In the embodiment of the specification, the morphology sensor scans along the current planning path based on the morphology sensor coordinates, so as to obtain the current planning path coordinate set. The current planned path coordinate set may include coordinates of each print point in the current planned path, and the coordinates of each print point may include a height value.
Step 250, generating a needle printing path corresponding to the current planning path through the current planning path coordinate set.
In the embodiment of the specification, the needle printing path corresponding to the current planning path is adjusted through the current planning path coordinate set, and the needle printing path is used for printing the needle and executing printing action based on the printing needle coordinates. According to the embodiment of the specification, the height of the printing needle head can be adjusted and compensated in real time in the printing process, and the printing path of the needle head is automatically adjusted according to the real-time measurement result, so that the stability and consistency of the printing quality are ensured.
In some embodiments of the present disclosure, the generating, by the current planned path coordinate set, a needle print path corresponding to the current planned path further includes: fitting the current planning path coordinate set into a smooth morphology curve, and generating a corresponding pinhead printing path according to the morphology curve and the printing parameters.
In this embodiment, a fitting method may be used to fit the current planned path coordinate set to a smooth topography curve, and then generate a corresponding needle print path according to the topography curve and the print parameters. The printing parameters comprise printing speed, printing air pressure, needle pitch and the like.
For example, the present embodiment may find a best-fit polynomial curve by using a polynomial function to approximate a set of path coordinates, by least squares techniques, or the like; a spline curve, which is a smooth curve composed of a plurality of polynomial curves, can also be used to fit the set of path coordinates; the set of path coordinates may also be approximated using a bezier curve, which is a smooth curve determined by a series of control points; the set of path coordinates may also be fitted to a smooth topography curve by a method that minimizes the energy function, for example, minimizing the bending energy of the curve; interpolation algorithms may also be used to generate a smooth curve from a given set of path coordinates, for example using lagrangian interpolation or spline interpolation methods.
In some embodiments of the present disclosure, fitting the current planned path coordinate set to a smooth topography curve, generating a corresponding pinhead printing path according to the topography curve and the printing parameters, and further including: the current planning path coordinate set comprises normal coordinate data and abnormal coordinate data, and the abnormal coordinate data is filtered in the fitting process.
In this embodiment, due to the refractive index phenomenon or the device performance of some substrates, abnormal values, that is, abnormal coordinate data, may exist in the current planned path coordinate set obtained by scanning the current planned path by the morphology sensor, so that the embodiment may filter the abnormal coordinate data in the fitting process.
In some embodiments of the present disclosure, filtering the outlier coordinate data during the fitting process further includes: and carrying out median filtering on the current planning path coordinate set.
In this embodiment, a neighborhood window may be defined around each coordinate point in the current planned path coordinate set, and then the median value of the coordinates in the window may be taken to replace the original coordinate value. The embodiment can remove noise in the path coordinate set by median filtering on the current planning path coordinate set, so that the planning path is smoother and more continuous, the quality of the path can be further improved, and the printing needle head is more stable and reliable when printing is executed according to the path.
In some embodiments of the present description, fitting the current planned path coordinate set to a smoothed topography curve further comprises: and performing altitude compensation on the normal coordinate data in the current planning path coordinate set.
In this embodiment, the normal coordinate data in the coordinate set of the current planned path may be adjusted or corrected in height, so as to ensure continuity and consistency of the planned path in the vertical direction. According to the method and the device, the normal coordinate data in the planned path coordinate set are subjected to height compensation, so that the path planning is more suitable for actual terrain, and the feasibility and the stability of the path are improved.
In some embodiments of the present disclosure, after generating the needle print path corresponding to the current planned path through the current planned path coordinate set, the method further includes: based on the pinhead printing path, executing printing action based on the printing pinhead coordinates through the printing pinhead; when the fact that the printing needle head performs printing action based on the coordinates of the printing needle head and the current planned path is the last planned path of the conductive circuit on the base material is detected, printing of all planned paths of the conductive circuit on the base material is completed.
In the embodiment of the present disclosure, the printing needle performs a printing action along the needle printing path based on the coordinates of the printing needle, and when it is detected that the printing needle performs the printing action based on the coordinates of the printing needle and the current planned path is the last planned path of the conductive circuit on the substrate, it indicates that printing of all planned paths of the conductive circuit on the substrate has been completed.
In some embodiments of the present description, performing, by the print head, a print action based on the print head coordinates based on the head print path, includes: based on the print parameters, a print action is performed by the print head from the print head coordinates along the head print path.
The printing parameters comprise printing speed, printing air pressure, needle pitch and the like.
In this description embodiment, can be based on printing the parameter, follow the pinhead printing route through the pinhead of printing from the pinhead of printing coordinate and carry out the printing action, control the motion speed of pinhead of printing and the pressurization of giving vent to anger of point gum ware simultaneously, realize that the ejection of compact is stable, the line type is even.
According to the embodiment of the specification, based on a high-precision printing technology, the coordinates of the printing needle head and the coordinates of the morphology sensor are updated through the relative position relation among the printing needle head, the vision sensor and the morphology sensor, the current planning path is scanned through the morphology sensor, the current planning path coordinate set is obtained, and the needle head printing path corresponding to the current planning path is generated through the current planning path coordinate set. According to the embodiment of the specification, not only can the conducting circuit be accurately manufactured on the non-flat substrate, but also the conducting circuit is high in precision, and the current planning path coordinate set corresponding to the current planning path can be scanned out through the morphology sensor in the printing process, so that the height of the printing needle head is further adjusted and compensated in real time, and the stability and consistency of the printing quality are ensured.
Based on a high-precision printing technology, the coordinates of the printing needle head and the coordinates of the morphology sensor are updated through the relative position relation among the printing needle head, the vision sensor and the morphology sensor, the current planning path is scanned through the morphology sensor, a current planning path coordinate set is obtained, and the needle head printing path corresponding to the current planning path is generated through the current planning path coordinate set. According to the embodiment of the specification, not only can the conducting circuit be accurately manufactured on the non-flat substrate, but also the conducting circuit is high in precision, and the current planning path coordinate set corresponding to the current planning path can be scanned out through the morphology sensor in the printing process, so that the height of the printing needle head is further adjusted and compensated in real time, and the stability and consistency of the printing quality are ensured.
Referring to fig. 4, fig. 4 is a schematic flow chart of a conductive line printing method according to another embodiment of the present disclosure, and the method may be performed by the conductive line printing apparatus 110 shown in fig. 1, and the specific flow chart includes the following steps:
400. acquiring all planned paths of the conductive circuit on the substrate and setting printing parameters;
410. establishing a substrate coordinate system, and determining the relative position relationship among the printing needle head, the vision sensor and the morphology sensor according to the substrate coordinate system;
420. Acquiring a visual sensor coordinate, wherein the visual sensor coordinate is the coordinate of the visual sensor when the optical axis of the visual sensor reaches a substrate mark point;
430. based on the relative position relation, updating the coordinates of the printing needle head and the coordinates of the morphology sensor according to the coordinates of the vision sensor;
440. scanning all planned paths through the morphology sensor based on the morphology sensor coordinates to obtain height data sets corresponding to all planned paths;
450. and generating pinhead printing paths corresponding to all the planning paths through the height data sets corresponding to all the planning paths, wherein the pinhead printing paths are used for printing pinheads to execute printing actions based on the printing pinhead coordinates.
In this embodiment, step 450 further includes: fitting the acquired height data set into a smooth topography curve, and generating a corresponding pinhead printing path according to the topography curve and the printing parameters.
Aiming at the generation of the height data in step 440, due to the problems of common reflection, switching of different medium layers and the like at the landform change of the actual product, the scanning data of the position is often an abnormal value, and cannot be directly used for printing, or the position can be directly used for printing, which causes the firing pin of the printing pinhead to damage the printing pinhead or scratch the product; the embodiment of the invention utilizes data fitting, namely when abnormal jump points occur in the data, the segment data is not introduced into compensation, and normal segment data is used for fitting compensation of abnormal segments.
As shown in fig. 5a and fig. 5b, the present application may perform filtering processing on the original data corresponding to the generated height data, so that the obtained height data set is fitted to a smooth topography curve, so that the planned path is smoother and continuous, and the quality of the path may be further improved, so that the printing needle is more stable and reliable when printing is performed according to the path.
In the embodiment of the invention, for the composite topography formed by combining the photosensitive resin and the glass substrate, the scanned height data cannot be directly used for printing at the junction of two media and the resin reflection position; but after data fitting, scanning data more conforming to the product morphology can be obtained for printing; the problems of distortion of scanning data, overdetermination of needle pitch data and the like caused by the distortion of the scanning data can be avoided by combining the fitting data function of software.
In this embodiment, the substrate marking point may be a point marked on the substrate in advance, the substrate marking point may also be a first planned point of the planned path, or may be set to another point, which is not limited in this embodiment.
In this embodiment, all planned paths of the conductive lines on the substrate may be obtained first, then a substrate coordinate system may be established, and the relative positional relationship among the printing needle, the vision sensor, and the morphology sensor may be determined according to the substrate coordinate system. For example, the bottom left corner of the substrate is used as an origin, and the length, width and height directions of the substrate are respectively used as three-dimensional coordinate axes, so that a substrate coordinate system is established; and then, according to a base material coordinate system, the vision sensor and the morphology sensor are respectively aligned with preset points of the area near the printing needle head, so that the respective coordinates of the printing needle head, the vision sensor and the morphology sensor are determined, and the relative position relationship among the printing needle head, the vision sensor and the morphology sensor is further determined. Next, the present embodiment may acquire the vision sensor coordinates, where the vision sensor coordinates are coordinates of the vision sensor when the optical axis of the vision sensor is aligned to the substrate mark point. And based on the relative position relationship, directly updating the coordinates of the printing needle heads and the coordinates of the morphology sensor corresponding to each printing point on all the planned paths according to the coordinates of the vision sensor, so that the subsequent printing needle heads and the morphology sensor can move to the positions meeting the relative position relationship. Then, the embodiment directly scans all the planned paths through the morphology sensor based on the morphology sensor coordinates to obtain height data corresponding to all the planned paths, and generates needle head printing paths corresponding to all the planned paths through the height data corresponding to all the planned paths.
According to the embodiment, the positions of the vision sensors are moved once, namely, the vision sensors are moved to the coordinates of the vision sensors when the optical axis can be used for marking the points on the substrate, so that the coordinates of the printing needle heads corresponding to the printing points on all the planned paths and the coordinates of the morphology sensors are updated, all the planned paths are directly scanned by the morphology sensors based on the updated coordinates of the morphology sensors, the height data corresponding to all the planned paths are obtained, and then the needle head printing paths corresponding to all the planned paths are generated through the height data corresponding to all the planned paths. According to the embodiment, the height data of the planned path can be compensated to the height of the printing needle head in real time, the height of the printing needle head is adjusted and compensated, the printing path of the needle head can be adjusted according to the real-time measurement result, the printing efficiency is improved, and the stability and consistency of the printing quality are ensured.
For example, in the embodiment of the specification, on a miniLED display product, the line conduction is realized on a glass base substrate and a PI film substrate with the thickness of 100+/-15 mu m, and the section difference morphology is right angle. Conventional physical vapor deposition techniques plus photolithographic (or laser) schemes (high substrate flatness requirements, requiring 15 μm or less) and the like cannot cope with substrates having such height differences. By the technical scheme provided by the embodiment of the invention, the printing of the conductive circuit on the substrate with the height difference is realized, and as shown in fig. 6, the specific steps of the process flow are as follows:
Step 600, selecting conductive paste (silver paste, copper paste and the like) with proper viscosity and conductivity according to the height difference, line width and line distance of a miniLED display product and the resistance requirement; according to the embodiment of the specification, the dynamic viscosity of the silver paste which can be selected is 30000 to 50000cps, and after sintering at 150 ℃/30 minutes, the silver paste sheet resistance of the film thickness of 8 mu m is about 50mΩ/≡so that the conductive circuit has proper shape retention, conductivity and uniformity of line width and line distance in the printing process;
step 610, selecting a printing scheme according to the characteristics of the line width, the film thickness, the line spacing and the like of the conductive line, wherein the printing scheme comprises a plurality of planned paths, path planning directions, printing needle head sizes, starting coordinates of each planned path and the like;
step 620, fixing the substrate by using a vacuum chuck;
step 630, the conductive line printing apparatus performs steps 200 to 250 (or steps 400 to 450), for example, obtains the current planned path of the conductive line on the substrate and sets the printing parameters; establishing a substrate coordinate system, and determining the relative position relationship among the printing needle head, the vision sensor and the morphology sensor according to the substrate coordinate system; acquiring a visual sensor coordinate, wherein the visual sensor coordinate is the coordinate of the visual sensor when the optical axis of the visual sensor is opposite to a first planning point of a current planning path; based on the relative position relation, updating the coordinates of the printing needle head and the coordinates of the morphology sensor according to the coordinates of the vision sensor; scanning a current planning path through a morphology sensor based on the morphology sensor coordinates to obtain a current planning path coordinate set; generating a pinhead printing path corresponding to the current planning path through the current planning path coordinate set, wherein the pinhead printing path is used for printing the pinhead to execute printing action based on the printing pinhead coordinates;
Step 640, setting printing parameters: the printing speed is 6mm/s, the printing air pressure is 8psi, the needle pitch is 10 mu m, and the printing needle head executes printing action based on the printing parameters and the needle head printing path;
and 650, after printing the conductive lines, taking the printed substrate off the vacuum chuck, and placing the substrate into a thermosetting furnace to cure the printing paste, thereby completing the line printing process.
According to the embodiment of the specification, based on a high-precision printing technology, the coordinates of the printing needle head and the coordinates of the morphology sensor are updated through the relative position relation among the printing needle head, the vision sensor and the morphology sensor, the current planning path is scanned through the morphology sensor, the current planning path coordinate set is obtained, and the needle head printing path corresponding to the current planning path is generated through the current planning path coordinate set. According to the embodiment of the specification, not only can the conducting circuit be accurately manufactured on the non-flat substrate, but also the conducting circuit is high in precision, and the current planning path coordinate set corresponding to the current planning path can be scanned out through the morphology sensor in the printing process, so that the height of the printing needle head is further adjusted and compensated in real time, and the stability and consistency of the printing quality are ensured.
The foregoing describes specific embodiments of the present disclosure. Other embodiments are within the scope of the following claims. In some cases the actions or steps recited in the claims can be performed in a different order than in the embodiments and still achieve desirable results. In addition, the processes depicted in the accompanying figures do not necessarily require the particular order shown, or sequential order, to achieve desirable results. In some embodiments, multitasking and parallel processing are also possible or may be advantageous.
Referring to fig. 7, fig. 7 is a schematic structural diagram of a conductive line printing apparatus according to an embodiment of the present disclosure.
As shown in fig. 7, the conductive line printing apparatus may include at least a path acquisition unit 700, a coordinate establishment unit 710, a coordinate acquisition unit 720, a coordinate update unit 730, a scanning unit 740, and a path generation unit 750, wherein:
a path obtaining unit 700, configured to obtain a current planned path of the conductive line on the substrate;
a coordinate establishing unit 710, configured to establish a substrate coordinate system, and determine a relative positional relationship among the printing needle, the vision sensor, and the morphology sensor according to the substrate coordinate system;
A coordinate acquiring unit 720, configured to acquire a visual sensor coordinate, where the visual sensor coordinate is a coordinate of the visual sensor when the optical axis pair of the visual sensor reaches a first planning point of a current planning path;
a coordinate updating unit 730 for updating the coordinates of the printing head and the coordinates of the morphology sensor according to the coordinates of the vision sensor based on the relative positional relationship;
the scanning unit 740 is configured to scan the current planned path through the morphology sensor based on the morphology sensor coordinates, to obtain a current planned path coordinate set;
the path generating unit 750 is configured to generate, by using the current planned path coordinate set, a needle print path corresponding to the current planned path, where the needle print path is used to print a needle and perform a printing action based on the print needle coordinates.
In some embodiments of the present description, the path generating unit 750 further includes a fitting unit configured to: fitting the current planning path coordinate set into a smooth morphology curve, and generating a corresponding pinhead printing path according to the morphology curve and the printing parameters.
In some embodiments of the present description, the fitting unit further comprises a filtering unit for: the current planning path coordinate set comprises normal coordinate data and abnormal coordinate data, and the abnormal coordinate data is filtered in the fitting process.
In some embodiments of the present description, the filtering unit further comprises a median filtering unit for: and carrying out median filtering on the current planning path coordinate set.
In some embodiments of the present description, the fitting unit further comprises a height compensation unit for: and performing altitude compensation on the normal coordinate data in the current planning path coordinate set.
In some embodiments of the present specification, the conductive line printing apparatus may further include a printing unit to: executing a printing action based on the printing needle coordinates by the printing needle based on the needle printing path; the detection unit is used for: and when the fact that the printing needle head performs printing action based on the coordinates of the printing needle head and the current planned path is the last planned path of the conductive circuit on the base material is detected, printing of all planned paths of the conductive circuit on the base material is completed.
In some embodiments of the present description, the printing unit comprises a printing subunit for: and performing a printing action by the printing pinhead from the printing pinhead coordinates along the pinhead printing path based on printing parameters including printing speed, printing air pressure and pinhead distance.
Based on the content of the conductive line printing system in the embodiments of the present specification, it can be known that the embodiments of the present specification update the coordinates of the printing needle and the coordinates of the morphology sensor through the relative positional relationship among the printing needle, the vision sensor and the morphology sensor based on the high-precision printing technology, scan the current planned path through the morphology sensor to obtain the coordinate set of the current planned path, and generate the needle printing path corresponding to the current planned path through the coordinate set of the current planned path. According to the embodiment of the specification, not only can the conducting circuit be accurately manufactured on the non-flat substrate, but also the conducting circuit is high in precision, and the current planning path coordinate set corresponding to the current planning path can be scanned out through the morphology sensor in the printing process, so that the height of the printing needle head is further adjusted and compensated in real time, and the stability and consistency of the printing quality are ensured.
In this specification, each embodiment is described in a progressive manner, and identical and similar parts of each embodiment are mutually referred to, and each embodiment mainly describes differences from other embodiments. In particular, for the conductive line printing system embodiment, since it is substantially similar to the conductive line printing method embodiment, the description is relatively simple, and reference is made to the description of the method embodiment for relevant points.
Please refer to fig. 8, which illustrates a schematic structural diagram of an electronic device according to an embodiment of the present disclosure.
As shown in fig. 8, the electronic device 800 may include: at least one processor 801, at least one network interface 804, a user interface 803, memory 805, and at least one communication bus 802.
Wherein the communication bus 802 may be used to enable connectivity communication of the various components described above.
The user interface 803 may include keys, among other things, and the optional user interface may also include a standard wired interface, a wireless interface.
The network interface 804 may include, but is not limited to, a bluetooth module, an NFC module, a Wi-Fi module, and the like.
Wherein the processor 801 may include one or more processing cores. The processor 801 utilizes various interfaces and lines to connect various portions of the overall electronic device 800, perform various functions of the electronic device 800, and process data by executing or executing instructions, programs, code sets, or instruction sets stored in the memory 805, and invoking data stored in the memory 805. In the alternative, processor 801 may be implemented in at least one of the hardware forms DSP, FPGA, PLA. The processor 801 may integrate one or a combination of several of a CPU, GPU, modem, and the like. The CPU mainly processes an operating system, a user interface, an application program and the like; the GPU is used for rendering and drawing the content required to be displayed by the display screen; the modem is used to handle wireless communications. It will be appreciated that the modem may not be integrated into the processor 801 and may be implemented on a single chip.
The memory 805 may include RAM or ROM. Optionally, the memory 805 comprises a non-transitory computer readable medium. Memory 805 may be used to store instructions, programs, code, sets of codes, or instruction sets. The memory 805 may include a stored program area and a stored data area, wherein the stored program area may store instructions for implementing an operating system, instructions for at least one function (such as a touch function, a sound playing function, an image playing function, etc.), instructions for implementing the above-described respective method embodiments, etc.; the storage data area may store data or the like referred to in the above respective method embodiments. The memory 805 may also optionally be at least one storage device located remotely from the aforementioned processor 801. The memory 805, which is a type of computer storage medium, may include an operating system, a network communication module, a user interface module, and a conductive line printing application. The processor 801 may be used to invoke the conductive trace printing application stored in the memory 805 and perform the conductive trace printing steps mentioned in the previous embodiments.
Embodiments of the present disclosure also provide a computer-readable storage medium having instructions stored therein that, when executed on a computer or processor, cause the computer or processor to perform the steps of one or more of the embodiments shown in fig. 2 or 7 described above. The above-described constituent modules of the electronic apparatus may be stored in the computer-readable storage medium if implemented in the form of software functional units and sold or used as independent products.
In the above embodiments, it may be implemented in whole or in part by software, hardware, firmware, or any combination thereof. When implemented in software, may be implemented in whole or in part in the form of a computer program product. The computer program product includes one or more computer instructions. When loaded and executed on a computer, produces a flow or function in accordance with embodiments of the present description, in whole or in part. The computer may be a general purpose computer, a special purpose computer, a computer network, or other programmable apparatus. The computer instructions may be stored in or transmitted across a computer-readable storage medium. The computer instructions may be transmitted from one website, computer, server, or data center to another website, computer, server, or data center by a wired (e.g., coaxial cable, fiber optic, digital subscriber line (Digital Subscriber Line, DSL)), or wireless (e.g., infrared, wireless, microwave, etc.). The computer readable storage medium may be any available medium that can be accessed by a computer or a data storage device such as a server, data center, etc. that contains an integration of one or more available media. The usable medium may be a magnetic medium (e.g., a floppy Disk, a hard Disk, a magnetic tape), an optical medium (e.g., a digital versatile Disk (Digital Versatile Disc, DVD)), or a semiconductor medium (e.g., a Solid State Disk (SSD)), or the like.
Those skilled in the art will appreciate that implementing all or part of the above-described embodiment methods may be accomplished by way of a computer program, which may be stored in a computer-readable storage medium, instructing relevant hardware, and which, when executed, may comprise the embodiment methods as described above. And the aforementioned storage medium includes: various media capable of storing program code, such as ROM, RAM, magnetic or optical disks. The technical features in the present examples and embodiments may be arbitrarily combined without conflict.
The above-described embodiments are merely preferred embodiments of the present disclosure, and do not limit the scope of the disclosure, and various modifications and improvements made by those skilled in the art to the technical solutions of the disclosure should fall within the protection scope defined by the claims of the disclosure without departing from the design spirit of the disclosure.
Claims (10)
1. A method of printing a conductive line, comprising:
acquiring a current planned path of a conductive line on a substrate and setting printing parameters;
establishing a substrate coordinate system, and determining the relative position relationship among the printing needle head, the vision sensor and the morphology sensor according to the substrate coordinate system;
Acquiring a visual sensor coordinate, wherein the visual sensor coordinate is the coordinate of the visual sensor when the optical axis of the visual sensor reaches the first planning point of the current planning path;
updating the coordinates of the printing needle head and the coordinates of the morphology sensor according to the coordinates of the visual sensor based on the relative position relation;
scanning the current planning path through the morphology sensor based on the morphology sensor coordinates to obtain a current planning path coordinate set;
and generating a pinhead printing path corresponding to the current planning path through the current planning path coordinate set, wherein the pinhead printing path is used for the printing pinhead to execute printing action based on the printing pinhead coordinates.
2. The method of claim 1, the generating, by the current planned path coordinate set, a needle print path corresponding to the current planned path, further comprising:
fitting the current planning path coordinate set into a smooth morphology curve, and generating a corresponding pinhead printing path according to the morphology curve and the printing parameters.
3. The method of claim 2, the fitting the current planned path coordinate set to a smooth topography curve, generating a corresponding needle print path from the topography curve and the print parameters, further comprising:
The current planning path coordinate set comprises normal coordinate data and abnormal coordinate data, and the abnormal coordinate data is filtered in the fitting process.
4. The method of claim 3, the filtering the outlier coordinate data during the fitting, further comprising:
and carrying out median filtering on the current planning path coordinate set.
5. The method of claim 3, the fitting the current planned path coordinate set to a smoothed topography curve, further comprising:
and performing altitude compensation on the normal coordinate data in the current planning path coordinate set.
6. The method of claim 1, further comprising, after the generating, by the current planned path coordinate set, a needle print path corresponding to the current planned path:
executing a printing action based on the printing needle coordinates by the printing needle based on the needle printing path;
and when the fact that the printing needle head performs printing action based on the coordinates of the printing needle head and the current planned path is the last planned path of the conductive circuit on the base material is detected, printing of all planned paths of the conductive circuit on the base material is completed.
7. The method of claim 6, the performing, by the print pinhead, a print action based on the print pinhead coordinates based on the pinhead print path, comprising:
and performing a printing action by the printing pinhead from the printing pinhead coordinates along the pinhead printing path based on printing parameters including printing speed, printing air pressure and pinhead distance.
8. A conductive line printing apparatus comprising:
the path acquisition unit is used for acquiring the current planned path of the conductive circuit on the substrate and setting printing parameters;
the coordinate establishing unit is used for establishing a substrate coordinate system and determining the relative position relationship among the printing needle head, the vision sensor and the morphology sensor according to the substrate coordinate system;
the coordinate acquisition unit is used for acquiring the coordinate of the visual sensor, wherein the coordinate of the visual sensor is the coordinate of the visual sensor when the optical axis of the visual sensor reaches the first planning point of the current planning path;
the scanning unit is used for scanning the current planning path through the morphology sensor based on the morphology sensor coordinates to obtain a current planning path coordinate set;
and the path generation unit is used for generating a pinhead printing path corresponding to the current planning path through the current planning path coordinate set, and the pinhead printing path is used for the printing pinhead to execute printing action based on the printing pinhead coordinates.
9. An electronic device includes a processor and a memory;
the processor is connected with the memory;
the memory is used for storing executable program codes;
the processor runs a program corresponding to the executable program code by reading the executable program code stored in the memory for performing the method according to any one of claims 1 to 7.
10. A computer readable storage medium having stored thereon a computer program which, when executed by a processor, implements the method of any of claims 1-7.
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| CN202311608147.4A CN117637605A (en) | 2023-11-29 | 2023-11-29 | Conductive line printing method and device, electronic equipment and medium |
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