CN117631010A - X-ray generator and X-ray detection device - Google Patents
X-ray generator and X-ray detection device Download PDFInfo
- Publication number
- CN117631010A CN117631010A CN202311743545.7A CN202311743545A CN117631010A CN 117631010 A CN117631010 A CN 117631010A CN 202311743545 A CN202311743545 A CN 202311743545A CN 117631010 A CN117631010 A CN 117631010A
- Authority
- CN
- China
- Prior art keywords
- supporting
- length axis
- ray generator
- shell
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 11
- 230000008093 supporting effect Effects 0.000 claims abstract description 133
- 239000000110 cooling liquid Substances 0.000 claims description 29
- 238000001816 cooling Methods 0.000 claims description 16
- 239000002826 coolant Substances 0.000 claims description 9
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000011521 glass Substances 0.000 description 11
- 238000012423 maintenance Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 239000007769 metal material Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000014509 gene expression Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 208000036829 Device dislocation Diseases 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000012809 cooling fluid Substances 0.000 description 1
- 238000007496 glass forming Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Abstract
The disclosure provides an X-ray generator and an X-ray detection device, which can be applied to the technical field of ray detection. The X-ray generator has an annular running track, comprising: the shell comprises a first shell and a second shell which are detachably connected, and the first shell and the second shell jointly define an accommodating space; the X-ray tube is positioned in the accommodating space and comprises a first electrode end and a second electrode end which are oppositely arranged along the length axis of the X-ray tube, the first electrode end is in clamping connection with the inner wall of one side of the first shell, which is far away from the second shell, and the plane of an annular running track of the X-ray generator is vertical to the length axis; at least one supporting part is arranged in the second shell and is used for supporting the second electrode end, and the supporting resultant force of the at least one supporting part for supporting the second electrode end is counteracted with the external force applied to the second electrode end under the state that the X-ray generator moves circularly along the annular running track.
Description
Technical Field
The present disclosure relates to the field of radiation detection technology, and more particularly to an X-ray generator and an X-ray detection apparatus.
Background
The bulb tube in the X-ray generator comprises a cathode and an anode, wherein the anode is made of a metal material, the peripheral dimension precision is high, the bulb tube can bear larger clamping force, the cathode is made of glass, and the cathode is electrically connected with a power supply through lead migration. In the use process of the bulb, the bulb anode is clamped and fixed, and the cathode is in a free suspension state. In the use process, for example, when centrifugal force, equipment vibration, deflection or other external forces exist, uneven stress of the bulb tube is caused, for example, local stress is large, the situation that the glass bulb tube of the anode relative to the cathode breaks is caused, and finally, the problems of unstable operation, high maintenance cost and the like of the equipment are caused.
Disclosure of Invention
In view of the above, the present disclosure provides an X-ray generator and an X-ray detection apparatus, which can support an electrode end of an X-ray tube through a support portion, so as to effectively avoid the problem that the X-ray tube is damaged under complex stress conditions such as centrifugal force, vibration of the apparatus, offset or other external forces, improve the stability of operation of the apparatus, and reduce maintenance cost.
According to a first aspect of the present disclosure, there is provided an X-ray generator having an annular running track, comprising: the shell comprises a first shell and a second shell which are detachably connected, and the first shell and the second shell jointly define an accommodating space; the X-ray tube is positioned in the accommodating space and comprises a first electrode end and a second electrode end which are oppositely arranged along the length axis of the X-ray tube, the first electrode end is in clamping connection with the inner wall of one side, far away from the second shell, of the first shell, and the plane of an annular running track of the X-ray generator is perpendicular to the length axis; and at least one supporting part is arranged in the second shell and used for supporting the second electrode end, and the supporting resultant force of the at least one supporting part supporting the second electrode end is counteracted with the external force born by the second electrode end under the state that the X-ray generator moves circularly along the annular running track.
In some exemplary embodiments of the present disclosure, the second housing includes: the sleeve ring is used for being connected with the first shell, at least one sliding groove extending along the length axis is arranged on the inner wall of the sleeve ring, the sliding groove is used for installing the supporting part, and the top of the supporting part protrudes towards the length axis relative to the inner wall of the sleeve ring in the radial direction of the sleeve ring; and the cover plate is connected with the lantern ring to limit the support part to move along the extending direction of the sliding groove.
In some exemplary embodiments of the present disclosure, the chute includes a first chute end near the first electrode end and a second chute end distant from the first electrode end, a first distance of a chute bottom of the first chute end from the length axis is smaller than a second distance of a chute bottom of the second chute end from the length axis in a radial direction of the collar, and a distance of the chute bottom from the length axis in the radial direction of the collar varies linearly in a direction along the length axis.
In some exemplary embodiments of the present disclosure, the support part includes a first support end near the first electrode end and a second support end far from the first electrode end, a first height of the first support end is smaller than a second height of the second support end in a radial direction of the collar, and a height of the support part in the radial direction of the collar varies linearly in a direction along the length axis.
In some exemplary embodiments of the present disclosure, a surface of the support portion for contacting the second electrode tip is parallel to the length axis when the support portion is mounted within the chute.
In some exemplary embodiments of the present disclosure, one support part is disposed in the second housing, the X-ray generator is located at a side farther from a center of the circular running rail than the length axis in a state of circular movement along the circular running rail, and a supporting force of the one support part supporting the second electrode terminal is offset with a centrifugal force received by the second electrode terminal.
In some exemplary embodiments of the present disclosure, two supporting parts are disposed in the second housing, the X-ray generator is located at a side farther from a center of the circular running rail than the length axis in a state of circular movement along the circular running rail, and a resultant supporting force of the two supporting parts supporting the second electrode terminal is offset with a centrifugal force received by the second electrode terminal.
In some exemplary embodiments of the present disclosure, N support parts are disposed in the second housing, N is a positive integer greater than 2, and the N support parts are uniformly disposed at circumferential sides of the length axis in a state in which the X-ray generator performs a circular motion on the circular motion rail, so that a resultant force of support of the second electrode terminal by the N support parts is offset from a centrifugal force received by the second electrode terminal.
In some exemplary embodiments of the present disclosure, the second housing further includes: the support adjusting ring is located between the cover plate and the supporting portion, the support adjusting ring is inscribed in the lantern ring, the support adjusting ring comprises a first end face and a second end face which are oppositely arranged, the first end face is close to the supporting portion, the second end face is close to the cover plate, and the support adjusting ring is used for adjusting the moving distance of the supporting portion in the sliding groove relative to the cover plate.
In some exemplary embodiments of the present disclosure, the support adjustment ring includes: the adjusting hole is arranged in the supporting adjusting ring and extends along the direction of the length axis, and the projection of the adjusting hole on a plane perpendicular to the length axis is positioned in the projection of the supporting part on the plane perpendicular to the length axis; the adjusting jackscrew is arranged in the adjusting hole and is in threaded fit with the adjusting hole, and the moving distance of the supporting part in the sliding groove relative to the cover plate is adjusted through the extending length of the adjusting jackscrew relative to the first end face.
In some exemplary embodiments of the present disclosure, the X-ray generator further includes a cooling flow channel, the receiving cavity forming a portion of the cooling flow channel; the cooling flow passage includes: a coolant outflow passage provided on the first casing at a side close to the first electrode terminal; a coolant inlet passage provided on the second housing at a side away from the first electrode terminal; the accommodating cavity is communicated with the cooling liquid inlet channel and the cooling liquid outlet channel, so that cooling liquid enters the accommodating cavity through the cooling liquid inlet channel, cools the X-ray tube, and discharges the cooling liquid from the cooling liquid outlet channel after cooling the X-ray tube.
In some exemplary embodiments of the present disclosure, the coolant inlet channel includes: the first channel is arranged on one side of the cover plate, which is far away from the X-ray tube, and consists of a groove extending along the radial direction of the lantern ring and a shielding plate covered on one side of the cover plate, which is far away from the X-ray tube; and the second channel extends in the direction of the length axis and penetrates through the cover plate so as to communicate the first channel with the accommodating cavity, wherein the projection of the second channel on a plane perpendicular to the length axis is positioned in the projection of the shielding plate on the plane perpendicular to the length axis.
In another aspect of the disclosed embodiments, an X-ray detection apparatus is provided, including the X-ray generator described above.
According to the embodiment of the disclosure, as the first electrode end of the X-ray tube is clamped and connected with the inner wall of the first shell, at least one supporting part is arranged in the shell of the X-ray generator to support the second electrode end of the X-ray tube, so that the supporting resultant force of the at least one supporting part supporting the second electrode end is counteracted with the external force applied to the second electrode end, the problem that the tube breaks when the tube of the X-ray tube is subjected to centrifugal force, equipment vibration, deflection or other external forces is avoided, the running stability of the equipment is effectively improved, and the maintenance cost of the equipment is reduced.
Drawings
The foregoing and other objects, features and advantages of the disclosure will be more apparent from the following description of embodiments of the disclosure with reference to the accompanying drawings, in which:
FIG. 1 schematically illustrates a schematic cross-sectional structure of an X-ray generator of one embodiment of the present disclosure;
FIG. 2 schematically illustrates a side structural schematic view of an X-ray generator of one embodiment of the present disclosure;
FIG. 3 schematically shows a schematic cross-sectional view along the line A-A in FIG. 1;
FIG. 4 schematically illustrates a cross-sectional structural view of a collar of an X-ray generator according to one embodiment of the present disclosure;
FIG. 5 schematically illustrates a cross-sectional structural schematic view of an X-ray generator of another embodiment of the present disclosure;
FIG. 6 schematically shows a schematic cross-sectional structure along the line B-B in FIG. 5;
fig. 7 schematically illustrates a schematic cross-sectional structure of an X-ray generator according to still another embodiment of the present disclosure including two support portions.
It is noted that the dimensions of structures or regions may be exaggerated or reduced in the drawings for describing embodiments of the present disclosure for clarity, i.e., the drawings are not drawn to actual scale.
Detailed Description
Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. It should be understood that the description is only exemplary and is not intended to limit the scope of the present disclosure. In the following detailed description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the embodiments of the present disclosure. It may be evident, however, that one or more embodiments may be practiced without these specific details. In addition, in the following description, descriptions of well-known structures and techniques are omitted so as not to unnecessarily obscure the concepts of the present disclosure.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the disclosure. The terms "comprises," "comprising," and/or the like, as used herein, specify the presence of stated features, steps, operations, and/or components, but do not preclude the presence or addition of one or more other features, steps, operations, or components.
All terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art unless otherwise defined. It should be noted that the terms used herein should be construed to have meanings consistent with the context of the present specification and should not be construed in an idealized or overly formal manner.
Where expressions like at least one of "A, B and C, etc. are used, the expressions should generally be interpreted in accordance with the meaning as commonly understood by those skilled in the art (e.g.," a system having at least one of A, B and C "shall include, but not be limited to, a system having a alone, B alone, C alone, a and B together, a and C together, B and C together, and/or A, B, C together, etc.).
In the related art, an X-ray tube is arranged inside an X-ray generator and is used for generating X-rays, the X-ray tube comprises a cathode and an anode, the anode is made of metal and has higher dimensional accuracy and can be connected with the inside of a shell of the X-ray tube in a clamping way, the cathode end of the X-ray tube is used for being electrically connected with a filament, and the anode end of the X-ray tube is used for being electrically connected with a target material, so that the X-rays are generated at the middle position of the X-ray tube. The cathode terminal, the filament and the target are coated in a space with a certain vacuum degree through the glass structure, so that the normal generation of X-rays is ensured. Because the cathode end is made of glass materials, the problems of poor dimensional accuracy and low strength exist, and the metal materials of the anode end are generally fixed when the bulb tube is fixed. However, when the X-ray generator is operated on the endless running track, and the length axis of the X-ray tube is perpendicular to the plane in which the endless running track is located, the cathode of the X-ray tube is subjected to centrifugal force, which is offset in a direction away from the endless running track, and when the moving speed of the X-ray generator on the endless running track is greater or the track radius of the endless running track is greater, the centrifugal force to which the cathode of the X-ray tube is subjected is greater. Therefore, the cathode of the X-ray tube is possibly deviated from the fixed end of the anode, glass forming vacuum degree is broken in severe cases, and finally the X-ray generator is disabled, so that the stability of equipment operation is reduced, and meanwhile, the problem of high equipment maintenance cost is caused.
In order to solve the above technical problems, the present disclosure provides an X-ray generator, including but not limited to: the shell comprises a first shell and a second shell which are detachably connected, and the first shell and the second shell jointly define an accommodating space; the X-ray tube is positioned in the accommodating space and comprises a first electrode end and a second electrode end which are oppositely arranged along the length axis of the X-ray tube, the first electrode end is in clamping connection with the inner wall of one side, far away from the second shell, of the first shell, and the plane of an annular running track of the X-ray generator is perpendicular to the length axis; and at least one supporting part is arranged in the second shell and used for supporting the second electrode end, and the supporting resultant force of the at least one supporting part supporting the second electrode end is counteracted with the external force born by the second electrode end under the state that the X-ray generator moves circularly along the annular running track.
According to the embodiment of the disclosure, as the first electrode end of the X-ray tube is clamped and connected with the inner wall of the first shell, at least one supporting part is arranged in the shell of the X-ray generator to support the second electrode end of the X-ray tube, so that the supporting resultant force of the at least one supporting part supporting the second electrode end is counteracted with the external force applied to the second electrode end, the problem that the tube breaks when the tube of the X-ray tube is subjected to centrifugal force, equipment vibration, deflection or other external forces is avoided, the running stability of the equipment is effectively improved, and the maintenance cost of the equipment is reduced.
An X-ray generator according to an embodiment of the present disclosure will be described in detail with reference to the accompanying drawings.
Fig. 1 schematically shows a schematic cross-sectional structure of an X-ray generator of an embodiment of the present disclosure. Fig. 2 schematically illustrates a side structural view of an X-ray generator according to an embodiment of the present disclosure. Fig. 3 schematically shows a schematic cross-sectional structure along the line A-A in fig. 1. Fig. 4 schematically illustrates a cross-sectional structure of a collar of an X-ray generator according to an embodiment of the present disclosure.
In the embodiment of the present disclosure, the X-ray generator is mounted on the circular running rail, and when the X-ray is required to be generated, the X-ray generator performs a circular motion along the circular running rail, and since the X-ray generator performs a circular motion, components (for example, an X-ray tube) inside the X-ray generator may receive centrifugal force, and when the radius or diameter of the circular running rail of the X-ray generator is larger or the moving speed of the circular motion along the circular running rail is larger, the components inside the X-ray generator receive centrifugal force.
In some embodiments of the present disclosure, as shown in fig. 1, an X-ray generator 100 includes a housing 10 and an X-ray tube 20.
As shown in fig. 1, the housing 10 includes a first housing 11 and a second housing 12 detachably connected, and the first housing 11 and the second housing 12 together define an accommodating space M.
For example, the first housing 11 and the second housing 12 are connected by threads, an inner wall of one end of the first housing 11 is provided with an inner thread, an outer wall of one end of the second housing 12 is provided with an outer thread, and the inner thread on the first housing 11 is matched with the outer thread on the second housing 12, so that the first housing 11 is detachably sleeved on the second housing 12, thereby defining an accommodating space M together.
In alternative embodiments, the first housing and the second housing may be other removable connections, such as a snap-fit connection, a bayonet connection, or the like.
The X-ray tube 20 is positioned to receiveIn the space M, the X-ray tube has a length axis O 1 The length axis line O 1 Refers to an axis parallel to the length direction of the X-ray tube and passing through the symmetry center of the X-ray tube, and the dash-dot line in FIG. 1 is the length axis O 1 。
The X-ray tube 20 includes a first electrode terminal 21 and a second electrode terminal 22 disposed opposite each other along a length axis of the X-ray tube. The first electrode terminal 21 and the second electrode terminal 22 refer to both ends of the X-ray tube 20, respectively, for example, the first electrode terminal 21 may be an anode of the X-ray tube and the second electrode terminal 22 may be a cathode of the X-ray tube. The anode is made of a metal material, for example, the anode is made of a cylindrical metal. The X-ray tube comprises a tube wall part made of glass material, wherein a part of the tube wall is connected with the cylindrical metal of the anode, and a part of the cathode and a part of the anode are wrapped inside the tube wall made of glass material, so that a certain vacuum degree is provided in the tube wall to ensure that the cathode and the anode can work under the vacuum condition to generate X-rays.
The first electrode terminal 21 is engaged with the inner wall of the first casing 11 on the side away from the second casing 12. For example, a side of the first casing 11 remote from the second casing 12 is provided with a shape, such as a cylindrical inner contour, that engages with the first electrode tip 21. The first electrode terminal 21 is made of a metal material, has high dimensional accuracy, and can be engaged with the first housing 11, thereby fixing the first electrode terminal 21.
In some alternative embodiments, a fixing screw is further arranged on the first shell, and a screw hole matched with the fixing screw is further arranged on the first electrode end. When the first electrode end is fixed, the fixing screw can penetrate through the first shell and be matched with the screw hole on the first electrode end, so that the first electrode end is fixed on the inner wall of the first shell on the side far away from the second shell.
In an embodiment of the present disclosure, the plane and length axis O of the circular running rail of the X-ray generator 100 is 1 Vertical, i.e. the length direction of the X-ray tube 20 inside the X-ray generator 100 is perpendicular to the radial direction of the circular orbit. When X-ray generator100 are subjected to centrifugal forces away from the center of the circular orbit, the X-ray tube inside the X-ray generator is moved circumferentially along the circular orbit. Since the first electrode terminal 21 is fixedly connected to the inner wall of one side of the first housing 11, if the second electrode terminal is not fixed or supported, the second electrode terminal 22 is deflected relative to the first electrode terminal 21 by centrifugal force when the X-ray generator moves circumferentially along the circular running track, and since the first electrode terminal 21 and the second electrode terminal 22 are connected by a glass bulb wall, when the centrifugal force is large or external force such as vibration occurs to the device, the problem that the glass bulb wall is broken easily occurs, resulting in failure of the X-ray generator.
In order to avoid the above-mentioned problem, the embodiment of the present disclosure provides at least one supporting portion in the second housing for supporting the second electrode tip, and the resultant supporting force of the at least one supporting portion supporting the second electrode tip in the state of circular motion along the circular motion track of the X-ray generator is offset from the external force applied to the second electrode tip.
Illustratively, the support may be provided in any number of one, two, three, or more. When the supporting part is provided with one supporting part, the supporting force generated by the supporting part on the second electrode end is equal to the external force (such as centrifugal force) borne by the second electrode end in size and opposite in direction, so that the problem that the glass bulb wall is broken due to the fact that the second electrode end deflects relative to the first electrode end when the second electrode end is subjected to the external force is effectively avoided. When the supporting parts are arranged at two or more than two, each supporting part generates a supporting force on the second electrode end, so that a supporting resultant force is formed, and the supporting resultant force is equal to and opposite to an external force (such as centrifugal force) applied to the second electrode end, so that the problem that the glass bulb wall is broken due to deflection of the second electrode end relative to the first electrode end when the second electrode end is subjected to the external force can be effectively avoided.
In some preferred embodiments of the present disclosure, for example, the support portion may be provided with three or more, so that the second electrode terminal may be fixed from multiple angles, and when the X-ray generator performs a circular motion along the circular motion track, the influence of other external forces (such as forces caused by vibration or movement of the device) on the X-ray tube may be further avoided, thereby improving the stability of the operation of the device.
As shown in fig. 1 and 4, the second housing 12 includes a collar 121 and a cover plate 122.
A collar 121 is used to connect with the first housing 11. The collar 121 has an annular outer wall adapted to socket the first housing 11 over the outer wall of the collar 121, the collar 121 having an annular channel adapted to receive a cover plate 122 and to circulate a cooling fluid as described below.
The inner wall of the collar 121 is provided with a longitudinal axis O 1 At least one slide groove 40 extending, the slide groove 40 is used for installing the supporting part 30, and the top of the supporting part 30 faces the length axis O relative to the inner wall of the sleeve in the radial direction of the sleeve 121 1 Protruding. The top of the support portion 30 means the side of the support portion 30 for contacting and supporting the second electrode tip 22, i.e., directed toward the length axis O 1 Is a direction of (2).
For example, the number of the sliding grooves is the same as the number of the supporting parts, thereby being used for mounting the supporting parts in the sliding grooves.
As shown in fig. 3, the top of the support portion 30 faces the inner wall of the collar toward the length axis O 1 The protrusion, i.e., the support portion 30 is installed in the chute 40, has a height greater than the depth of the chute, so that the support portion 30 protrudes with respect to the inner wall of the collar 121 for supporting the second electrode tip 22 such that there is a space between the second electrode tip 22 and the inner wall of the collar 121, which facilitates the circulation of a cooling liquid, which will be described later, for cooling the X-ray tube. When the number of the support parts 30 is large, a passage through which the cooling liquid passes is narrowed, which is disadvantageous for cooling the X-ray tube, and therefore, when the number of the support parts 30 is large, it is necessary to secure the cooling ability of the cooling liquid.
As shown in fig. 1, the cover plate 122 is connected with the collar 121 to restrict the movement of the support portion 30 in the extending direction of the chute 40. For example, the cover plate 122 is disposed on the side of the collar 121 away from the first electrode end 21, and when the cover plate 122 is connected to the collar 121, the cover plate 122 abuts against the supporting portion 30 to limit the movement of the supporting portion 30 along the extending direction of the sliding groove 40, and the extending direction and length axis O of the sliding groove 40 1 Is the same.
In the embodiment shown in fig. 1, the cover plate 122 cooperates with an internal aperture of the collar 121, for example, to limit the support 30. In an alternative embodiment, the cover plate may, for example, cover the collar on a side remote from the first electrode end.
As shown in fig. 4, the chute 40 includes a first chute end 40A proximate the first electrode end 21 and a second chute end 40B distal from the first electrode end 21.
In the radial direction of the collar, the groove bottom of the first chute end 40A and the length axis O 1 Is smaller than the first distance H1 of the second chute end 40B from the bottom of the chute to the length axis O 1 And at a second distance H2 along the length axis O 1 In the radial direction of the sleeve ring, the distance between the bottom of the chute and the length axis line is linearly changed, namely the bottom of the chute is an inclined plane.
As shown in fig. 1, the support portion 30 includes a first support end 30A near the first electrode end 21 and a second support end 30B far from the first electrode end 21.
As shown in fig. 4, in the radial direction of the collar, the first height D1 of the first support end 30A is smaller than the second height D2 of the second support end 30B, and along the length axis O 1 The height of the support portion 30 in the radial direction of the collar 121 varies linearly, i.e. the bottom surface of the support portion, which contacts the groove bottom, is a slope.
When the support portion 30 is mounted in the chute 40, the surface of the support portion 30 for contact with the second electrode terminal 22 and the length axis O 1 Parallel, i.e. the linear variation of the height of the support part 30 in the radial direction of the collar 121 is the same as the linear variation of the distance of the groove bottom and the length axis O of the chute in the radial direction of the collar, so that the top of the support part 30 is brought into contact with the length axis O when the bottom of the support part 30 is in contact with the groove bottom of the chute 40 1 Parallel.
In the embodiment of the disclosure, since the second electrode end of the X-ray tube is made of glass material, the dimensional accuracy is poor, and when the second electrode end is supported by the supporting portion, there is a certain deviation in the dimensions of the second electrode end and the supporting portion. In order to ensure that the second electrode end and the supporting part have better matching, the bottom of the chute and the bottom of the supporting part are set to be inclined planes, and when the supporting part slides relative to the chute, the distance between the top of the supporting part and the length axis can be adjusted so as to adapt to the sizes of the second electrode ends of the X-ray tube with different sizes, and the problem of unstable support or clamping caused by size deviation between the second electrode ends and the supporting part is avoided.
Fig. 5 schematically illustrates a cross-sectional structural schematic view of an X-ray generator according to another embodiment of the present disclosure. Fig. 6 schematically shows a schematic cross-sectional structure along the line B-B in fig. 5.
As shown in fig. 5 and 6, in the present embodiment, one support portion 30 'is provided in the second housing 12'.
The X-ray generator 100' is in a state of circular motion along the circular motion track OB, and the axis of the circular motion track OB is O 2 Since the first electrode tip 21 is fixed to the inner wall of the first casing 11, the second electrode tip 22 is subjected to centrifugal force away from the axis O 2 In the direction of the position. One support part 30 'in the second housing 12' is arranged at a specific length axis O 1 A side farther from the center of the circular running rail, and a supporting force F1 of the supporting portion 30' supporting the second electrode terminal 22 is offset from a centrifugal force F0 to which the second electrode terminal is subjected. As shown in fig. 6, the supporting portion 30' is provided on the longitudinal axis O 1 With axis O 2 Is defined by a plane of the substrate.
According to the present embodiment, a supporting portion 30 'is disposed in the second housing 12', so that the second electrode 22 is supported, the influence of centrifugal force on the second electrode 22 is eliminated, and sufficient space between the second electrode 22 and the collar 121 is ensured for the cooling liquid to circulate, and the cooling capability of the cooling liquid to the X-ray tube 20 is ensured.
Fig. 7 schematically illustrates a schematic cross-sectional structure of an X-ray generator according to still another embodiment of the present disclosure including two support portions.
As shown in fig. 7, two support portions including a first support portion 301 and a second support portion 302 are provided in the second housing 12 ".
The first support 301 and the second support 302 are located at a specific length axis O in a state of circular motion along the circular motion track 1 And the supporting force generated by the first supporting part on the second electrode end 22 is F1, and the supporting force generated by the second supporting part 302 on the second electrode end 22 is F2, so that the supporting resultant force of the two supporting parts for supporting the second electrode end is equal to the centrifugal force F0 received by the second electrode end in a small way and opposite in direction, a counteracting effect is generated, and the balance of the forces is realized.
According to the embodiment, by arranging the two supporting parts, under the condition that the cooling liquid is ensured to have enough circulating space, the problem that the second electrode end is deviated relative to the supporting parts due to vibration can be avoided, and the supporting stability of the supporting parts is improved.
In other embodiments of the present disclosure, the support portions provided in the second housing may be three or more.
For example, in the embodiment shown in fig. 1 and 3, the number of the support portions 30 of the second housing 12 is three, and in a state where the X-ray generator makes a circular motion in the circular motion orbit, the three support portions 30 are uniformly arranged on the length axis O 1 For example, each supporting part supports the second electrode terminal to generate a supporting force (F1, F2 and F3), and the supporting resultant force of the three supporting parts is equal to and opposite to the centrifugal force F0 applied to the second electrode terminal, so that the supporting force is counteracted, and the problem of deviation between the supporting parts of the second electrode terminal can be effectively avoided, so that the second electrode terminal is more stable.
In this embodiment, by arranging three supporting parts in the second casing, a better fixing effect on the second electrode end can be achieved, and meanwhile, sufficient space for cooling liquid to circulate between the inner wall of the collar and the second electrode end can be ensured.
In other alternative embodiments, the number of the supporting parts may be set according to actual requirements, so as to have a good supporting effect on the second electrode end, and the supporting parts are spaced apart, so that a channel through which the cooling liquid can circulate is provided.
As shown in fig. 1, the second housing 12 further includes a support adjustment ring 123.
The support adjustment ring 123 is located between the cover plate 122 and the support portion 30, and the support adjustment ring 123 is inscribed with the collar 121, i.e. the support adjustment ring 123 is located inside the collar 121. The support adjusting ring 123 includes a first end face 123A and a second end face 123B disposed opposite to each other, the first end face 123A is close to the support portion 30, the second end face 123B is close to the cover 122, and the support adjusting ring 123 is used for adjusting a moving distance of the support portion 30 in the chute 40 relative to the cover 122.
The support adjustment ring 123 includes an adjustment aperture 1231 and an adjustment top wire 1232.
An adjustment hole 1231 is provided in the support adjustment ring 123 along the length axis O 1 In a direction perpendicular to the length axis O 1 Is located on the support 30 perpendicular to the length axis O 1 Is defined as a projection onto the plane of the lens. The adjusting screw 1232 is disposed in the adjusting hole 1231, the adjusting screw 1232 is in threaded engagement with the adjusting hole 1231, and the moving distance of the supporting portion 30 in the chute 40 relative to the cover 122 is adjusted by adjusting the extending length of the adjusting screw 1232 relative to the first end face 123A.
Illustratively, by adjusting the aperture 1231 perpendicular to the length axis O 1 Is located on the support 30 perpendicular to the length axis O 1 The adjusting jack 1232 in the adjusting hole 1231 can be supported by one end of the supporting portion 30, for example, the second supporting end 30B of the supporting portion 30 is abutted, so that the position of the adjusting jack 1232 in the adjusting hole 1231 is screwed, and the moving distance of the supporting portion 30 in the chute 40 relative to the cover plate 121 is controlled. The top of the support part 30 may support the second electrode terminals 22 of different sizes while the support part 30 moves in the chute 40. In addition, since the bottom of the supporting portion 30 and the bottom of the sliding groove 40 are both changed in linear slope, the fit supporting of the second electrode terminal size can be realized with stepless adjustment.
In an alternative embodiment, the first end surface of the supporting adjusting ring is abutted with the supporting part, the outer surface of the supporting adjusting ring is provided with external threads, the inner wall of the lantern ring is provided with internal threads, and the supporting adjusting ring is screwed to adjust the abutting position of the first end surface and the supporting part, so that the moving distance of the supporting part in the chute relative to the cover plate is controlled.
As shown in fig. 1, the X-ray generator further comprises a cooling flow channel, of which the receiving chamber M forms part. The cooling flow passage includes a cooling liquid outflow passage 50B and a cooling liquid inflow passage 50A. The coolant outflow channel 50B is provided on the side of the first casing 11 near the first electrode tip 21. The coolant inlet passage 50A is provided on the side of the second casing 12 remote from the first electrode terminal 21. The accommodating chamber M communicates the cooling liquid inlet passage 50A and the cooling liquid outlet passage 50B so that the cooling liquid enters the accommodating chamber M through the cooling liquid inlet passage 50A, cools the X-ray tube 20, and discharges the cooling liquid from the cooling liquid outlet passage 50B after cooling the X-ray tube 20.
As shown in fig. 1 and 2, a shielding plate 60 is also provided on the side of the cover plate remote from the X-ray tube.
The coolant inlet passage 50A includes a first passage 51 on the upstream side and a second passage 52 on the downstream side.
The first channel 51 is provided on a side of the cover plate 122 remote from the X-ray tube 20, and is formed by a groove extending in a radial direction of the collar 121 and a shielding plate 60 covering the side of the cover plate 122 remote from the X-ray tube. For example, a plurality of, e.g. three, grooves extending in the radial direction of the collar may be provided, so as to ensure a good cooling capacity of the cooling liquid flowing into the receiving chamber.
The second channel 52 has a length axis O 1 Extends in a direction and penetrates the cover plate 122 to communicate the first passage 51 with the accommodation chamber M. For example, the second channel 52 is disposed at a central position of the cover plate and penetrates the cover plate 122. The second channel is perpendicular to the length axis O 1 Is located in the projection of the shield plate on a plane perpendicular to the length axis. Since the X-ray tube is used for generating X-rays, the X-rays travel along a straight line, thereby leakage from the second channel exists after part of the X-rays are generatedIn order to avoid the damage to other components or personnel caused by X-ray leakage, the shielding plate is arranged on one side of the cover plate far away from the X-ray tube, so that the problem of X-ray leakage can be effectively restrained, and meanwhile, the projection of the second channel on the plane perpendicular to the length axis is positioned in the projection of the shielding plate on the plane perpendicular to the length axis, so that the shielding effect on X-rays in the X-ray tube can be completely realized.
Another aspect of the disclosed embodiments provides an X-ray detection apparatus comprising an X-ray generator as described above. The beneficial effects that can be achieved by the X-ray detection apparatus in the above embodiments of the present disclosure are the same as those that can be achieved by the above X-ray generator, and are not described here again.
Those skilled in the art will appreciate that the features recited in the various embodiments of the disclosure and/or in the claims may be provided in a variety of combinations and/or combinations, even if such combinations or combinations are not explicitly recited in the disclosure. In particular, the features recited in the various embodiments of the present disclosure and/or the claims may be variously combined and/or combined without departing from the spirit and teachings of the present disclosure. All such combinations and/or combinations fall within the scope of the present disclosure.
The embodiments of the present disclosure are described above. However, these examples are for illustrative purposes only and are not intended to limit the scope of the present disclosure. Although the embodiments are described above separately, this does not mean that the measures in the embodiments cannot be used advantageously in combination. The scope of the disclosure is defined by the appended claims and equivalents thereof. Various alternatives and modifications can be made by those skilled in the art without departing from the scope of the disclosure, and such alternatives and modifications are intended to fall within the scope of the disclosure.
Claims (13)
1. An X-ray generator having an annular orbit, comprising:
the shell comprises a first shell and a second shell which are detachably connected, and the first shell and the second shell jointly define an accommodating space;
the X-ray tube is positioned in the accommodating space and comprises a first electrode end and a second electrode end which are oppositely arranged along the length axis of the X-ray tube, the first electrode end is in clamping connection with the inner wall of one side, far away from the second shell, of the first shell, and the plane of an annular running track of the X-ray generator is perpendicular to the length axis;
and at least one supporting part is arranged in the second shell and used for supporting the second electrode end, and the supporting resultant force of the at least one supporting part supporting the second electrode end is counteracted with the external force born by the second electrode end under the state that the X-ray generator moves circularly along the annular running track.
2. The X-ray generator of claim 1, wherein,
the second housing includes:
the sleeve ring is used for being connected with the first shell, at least one sliding groove extending along the length axis is arranged on the inner wall of the sleeve ring, the sliding groove is used for installing the supporting part, and the top of the supporting part protrudes towards the length axis relative to the inner wall of the sleeve ring in the radial direction of the sleeve ring;
and the cover plate is connected with the lantern ring to limit the support part to move along the extending direction of the sliding groove.
3. The X-ray generator of claim 2, wherein,
the chute includes a first chute end proximate to the first electrode end and a second chute end distal to the first electrode end,
in the radial direction of the lantern ring, the first distance between the groove bottom of the first chute end and the length axis is smaller than the second distance between the groove bottom of the second chute end and the length axis, and in the direction along the length axis, the distance between the groove bottom of the chute and the length axis in the radial direction of the lantern ring is linearly changed.
4. The X-ray generator of claim 3, wherein,
the support portion includes a first support end proximate to the first electrode end and a second support end distal to the first electrode end,
the first height of the first support end is smaller than the second height of the second support end in the radial direction of the collar, and the height of the support portion in the radial direction of the collar linearly changes in the direction along the length axis.
5. The X-ray generator of claim 4, wherein,
when the supporting portion is installed in the sliding groove, a surface of the supporting portion for contacting the second electrode terminal is parallel to the length axis.
6. The X-ray generator according to any one of claims 1 to 5, wherein,
a supporting part is arranged in the second shell,
the X-ray generator is in a state of circular motion along the annular running track, the supporting part is positioned at one side far away from the circle center of the annular running track than the length axis,
and the supporting force of the supporting part supporting the second electrode terminal is counteracted with the centrifugal force received by the second electrode terminal.
7. The X-ray generator according to any one of claims 1 to 5, wherein,
two supporting parts are arranged in the second shell,
the X-ray generator is in a state of circular motion along the annular running track, the two supporting parts are positioned at one side far away from the circle center of the annular running track than the length axis,
and the resultant force of the supporting force of the two supporting parts for supporting the second electrode terminal is counteracted with the centrifugal force applied to the second electrode terminal.
8. The X-ray generator according to any one of claims 1 to 5, wherein,
n supporting parts are arranged in the second shell, N is a positive integer greater than 2,
the X-ray generator is in a circular motion state of the circular motion track, and the N supporting parts are uniformly arranged on the circumferential side of the length axis, so that the supporting resultant force of the N supporting parts for supporting the second electrode end is counteracted with the centrifugal force received by the second electrode end.
9. The X-ray generator of claim 2, wherein,
the second housing further includes:
a support adjusting ring is positioned between the cover plate and the supporting part and is inscribed with the lantern ring,
the support adjusting ring comprises a first end face and a second end face which are oppositely arranged, the first end face is close to the support part, the second end face is close to the cover plate,
the support adjusting ring is used for adjusting the moving distance of the support part in the sliding groove relative to the cover plate.
10. The X-ray generator of claim 9, wherein,
the support adjustment ring includes:
the adjusting hole is arranged in the supporting adjusting ring and extends along the direction of the length axis, and the projection of the adjusting hole on a plane perpendicular to the length axis is positioned in the projection of the supporting part on the plane perpendicular to the length axis;
the adjusting jackscrew is arranged in the adjusting hole and is in threaded fit with the adjusting hole, and the moving distance of the supporting part in the sliding groove relative to the cover plate is adjusted through the extending length of the adjusting jackscrew relative to the first end face.
11. The X-ray generator of claim 2, further comprising a cooling flow channel, the receiving cavity forming part of the cooling flow channel;
the cooling flow passage includes:
a coolant outflow passage provided on the first casing at a side close to the first electrode terminal;
a coolant inlet passage provided on the second housing at a side away from the first electrode terminal;
the accommodating cavity is communicated with the cooling liquid inlet channel and the cooling liquid outlet channel, so that cooling liquid enters the accommodating cavity through the cooling liquid inlet channel, cools the X-ray tube, and discharges the cooling liquid from the cooling liquid outlet channel after cooling the X-ray tube.
12. The X-ray generator of claim 11, wherein,
the coolant inlet passage includes:
the first channel is arranged on one side of the cover plate, which is far away from the X-ray tube, and consists of a groove extending along the radial direction of the lantern ring and a shielding plate covered on one side of the cover plate, which is far away from the X-ray tube;
a second channel extending in the direction of the length axis and penetrating through the cover plate to communicate the first channel with the accommodating cavity,
wherein, the projection of the second channel on the plane perpendicular to the length axis is positioned in the projection of the shielding plate on the plane perpendicular to the length axis.
13. An X-ray detection apparatus comprising the X-ray generator of any one of claims 1 to 12.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311743545.7A CN117631010A (en) | 2023-12-18 | 2023-12-18 | X-ray generator and X-ray detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311743545.7A CN117631010A (en) | 2023-12-18 | 2023-12-18 | X-ray generator and X-ray detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117631010A true CN117631010A (en) | 2024-03-01 |
Family
ID=90032183
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311743545.7A Pending CN117631010A (en) | 2023-12-18 | 2023-12-18 | X-ray generator and X-ray detection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117631010A (en) |
-
2023
- 2023-12-18 CN CN202311743545.7A patent/CN117631010A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5759177B2 (en) | Plasma processing apparatus, method for processing semiconductor substrate, and axis perpendicular displacement bellows unit | |
| KR101237653B1 (en) | X-ray tube and x-ray source including it | |
| KR20130047632A (en) | Sample observation apparatus and sample observation method | |
| CN104616951A (en) | Rotating-anode x-ray tube assembly | |
| US10923323B2 (en) | Plasma generating unit and plasma processing apparatus | |
| CN110838427A (en) | Electronic gun device for fuse wire additive manufacturing | |
| TWI792275B (en) | Mirror arrangement, in particular for a microlithographic projection exposure apparatus, and method for dissipating a heat flow from the region of a mirror arrangement | |
| JP2016018769A (en) | Plasma processing device and upper electrode assembly | |
| CN117631010A (en) | X-ray generator and X-ray detection device | |
| US11375603B2 (en) | Cyclotron | |
| JP2020202180A (en) | Charged particle source module | |
| TWI756241B (en) | Electron beam irradiation device | |
| US3794872A (en) | Moving target spring loaded x-ray tube | |
| CN116092902A (en) | Centering mechanism and scanning electron microscope with same | |
| CN112596249A (en) | Optical path adjusting device and method of optical fiber laser | |
| US6891321B2 (en) | Oil-free electron source having cathode and anode members adjustable with five degrees of freedom | |
| JP6920460B2 (en) | Tube furnace equipment for atomizing furnaces | |
| CN214623200U (en) | Optical path adjusting device of fiber laser | |
| US4622453A (en) | Electron beam gun mounting on a work chamber | |
| US20220165538A1 (en) | Plasma processing apparatus and plasma processing method | |
| CN111463090B (en) | Device for accurately sealing large-size and small-diameter photomultiplier | |
| CN116092903A (en) | Centering mechanism and scanning electron microscope with same | |
| US20080023642A1 (en) | Electron gun assembly | |
| US9360413B2 (en) | Positioning means for a measuring cell | |
| KR20240024613A (en) | Closed type x-ray generator with enhanced assembly and parallel target surface to x-ray exit window |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |