CN117605842A - Manual regulating valve for semiconductor wet process and assembling method thereof - Google Patents
Manual regulating valve for semiconductor wet process and assembling method thereof Download PDFInfo
- Publication number
- CN117605842A CN117605842A CN202410032089.3A CN202410032089A CN117605842A CN 117605842 A CN117605842 A CN 117605842A CN 202410032089 A CN202410032089 A CN 202410032089A CN 117605842 A CN117605842 A CN 117605842A
- Authority
- CN
- China
- Prior art keywords
- valve
- adjusting
- rod
- wheel
- adjustment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001105 regulatory effect Effects 0.000 title claims abstract description 123
- 238000000034 method Methods 0.000 title claims description 62
- 239000004065 semiconductor Substances 0.000 title claims description 33
- 230000008569 process Effects 0.000 title claims description 31
- 238000003825 pressing Methods 0.000 claims description 43
- 238000004519 manufacturing process Methods 0.000 claims description 25
- 230000002093 peripheral effect Effects 0.000 claims description 14
- 230000001360 synchronised effect Effects 0.000 claims description 12
- 230000008859 change Effects 0.000 claims description 11
- 230000000903 blocking effect Effects 0.000 claims description 9
- 238000007142 ring opening reaction Methods 0.000 claims description 9
- 230000000630 rising effect Effects 0.000 claims description 6
- 230000002596 correlated effect Effects 0.000 claims description 3
- 230000033228 biological regulation Effects 0.000 abstract description 17
- 230000000694 effects Effects 0.000 abstract description 7
- 239000012530 fluid Substances 0.000 description 21
- 239000007788 liquid Substances 0.000 description 18
- 238000012937 correction Methods 0.000 description 17
- 230000000875 corresponding effect Effects 0.000 description 17
- 230000008878 coupling Effects 0.000 description 17
- 238000010168 coupling process Methods 0.000 description 17
- 238000005859 coupling reaction Methods 0.000 description 17
- 230000001174 ascending effect Effects 0.000 description 7
- 239000002033 PVDF binder Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 238000003780 insertion Methods 0.000 description 6
- 230000037431 insertion Effects 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 3
- 230000002441 reversible effect Effects 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 239000004696 Poly ether ether ketone Substances 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 229920002530 polyetherether ketone Polymers 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 125000003003 spiro group Chemical group 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/02—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with screw-spindle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/32—Details
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/32—Details
- F16K1/34—Cutting-off parts, e.g. valve members, seats
- F16K1/36—Valve members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/02—Construction of housing; Use of materials therefor of lift valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/18—Actuating devices; Operating means; Releasing devices actuated by fluid actuated by a float
- F16K31/30—Actuating devices; Operating means; Releasing devices actuated by fluid actuated by a float actuating a gate valve or sliding valve
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0008—Mechanical means
- F16K37/0016—Mechanical means having a graduated scale
Abstract
The manual regulating valve comprises a valve seat with an axle center valve port, a valve cover combined on the valve seat and internally provided with a regulating rod group, a diaphragm valve plate for closing the axle center valve port and a regulating wheel arranged on the valve cover. The diaphragm valve plate forms an axle center cone aligned with the axle center valve port below the valve head. The regulating wheel is provided with a rotating mode and a stopping mode, in the rotating mode, along with the rotation of the regulating wheel, each time the regulating inlet rod of the regulating rod group is regulated to descend or ascend by a first distance, the regulating outlet rod of the regulating rod group synchronously and reversely ascends or descends by a second distance, the ratio of the second distance to the first distance is between 0.8 and 0.95, and the manual regulating valve has the effects of nearly linear relation between the rotation circle number of the regulating wheel and the flow of the regulating valve during the regulation and stable supply of precise flow during the stopping after the regulation by combining the taper of the axis cone.
Description
The invention relates to a divisional application, which is based on application number 202311275936.0, application day 2023, month 09 and 28, and the invention name of a precise flow regulating valve and an assembling method thereof.
Technical Field
The invention relates to the technical field of regulating valves, in particular to a manual regulating valve for a semiconductor wet process and an assembly method thereof.
Background
Flow regulating valves are commonly used industrial valves, primarily for controlling the flow of fluids in a pipeline. In the semiconductor manufacturing industry, there is a higher demand for flow precision than in the conventional manufacturing industry. For example, the wet process of a semiconductor requires equipment such as wafer cleaning, spin coating, developing, etching, etc., and has severe precision requirements (in ML/min) for the addition and supply of liquids such as photoresist, electronic chemicals, ultra-pure water, etc., and stable supply. The key point of the equipment technical index is whether the valve setting precision and the setting stability of the precise flow regulating valve adopted on the pipeline system can meet the parameter requirements of the semiconductor manufacturing process or not in the equipment debugging and running stage. Therefore, the precise flow regulating valve belongs to an important part of semiconductor production equipment.
The main components of the precise flow regulating valve comprise a valve body connected with the inlet and outlet pipes, a diaphragm valve plate used for regulating flow in the valve body, an adjusting rod for driving the diaphragm valve plate to move up and down and an actuating mechanism for driving the adjusting rod. The actuating mechanism is positioned on the valve body, can be a hand wheel or a handle which is manually operated, can also be an electric, hydraulic or pneumatic driving wheel body, and can enable the diaphragm valve plate to move up and down through the operation of the adjusting rod, so that the flow of fluid is changed. The prior art has the technical difficulties that even if the flow can be precisely regulated to a proper supply flow value of the diaphragm valve plate, the higher the precision of the flow value is, the worse the supply stability is; in the actual production process, the mechanical vibration of the semiconductor production equipment, the flow vibration of the pipeline fluid and the like form micro-amplitude mechanical force, the lifting position of the diaphragm valve plate can be changed, the actual supply flow value cannot be kept stable for a long time, that is, the flow of the fluid just regulated under the accurate control can be gradually changed in the production process, and the precise flow regulating valve is easy to generate leakage flow or seepage along with the production process. At present, a method for detecting the flow value of a precise flow regulating valve in real time is adopted in the semiconductor production process, when the flow value exceeds a warning value, flow correction adjustment with relatively high frequency is carried out, more monitoring equipment is needed to be input and is frequently used, so that the monitoring cost is high and the energy consumption is improved. In addition, with high-frequency correction adjustment, the durability and reliability of the precise flow rate regulating valve are reduced, and the sealing performance is also reduced. How to enable a precise flow regulating valve to continuously supply stable fluid flow for a long time in the process of semiconductor production, such as initial regulation of flow value, so as to be suitable for semiconductor production equipment is a technical problem to be solved.
The invention patent publication number CN105190142a discloses a flow control valve for a flow control device, applicable to the field of semiconductor manufacturing, comprising a valve body having a valve chamber hole portion opened above a valve seat and a fluid inlet passage and a fluid outlet passage communicating therewith; an inverted dish-shaped metal diaphragm valve body disposed above the valve seat in a manner facing each other and having an outer peripheral edge fixed to a bottom surface of the valve chamber hole; a pressing screw screwed into the hole for the valve chamber and pressing and fixing the outer periphery of the metal diaphragm valve body; a lower support cylinder having a diaphragm presser below a bottom wall of a front end portion and having a rectangular slit extending from an upper end of a side wall to an intermediate portion, the slit being provided in a penetrating manner to face each other on the side wall by inserting the pressing screw into the valve chamber hole; a cylindrical upper support cylinder body screwed to the upper end of the lower support cylinder body to form a support cylinder body; a disc spring bearing table with a holding part which is arranged on the bottom wall of the lower supporting cylinder body; a disc spring mounted on the disc spring support table; a support rack which is horizontally arranged by being inserted through the notch of the lower support cylinder, has a disc spring bearing platform guide hole for holding the front end part of the disc spring holding part in the center, and is provided with bolt insertion holes at two end parts; a lower bearing table arranged above the disc spring bearing table guide hole of the supporting table frame; a piezoelectric element inserted into the support cylinder above the lower mount; a guide body which is provided with a guide tube and flange parts protruding from the lower end part thereof to both sides, and which is inserted into the guide tube so as to be movable in the up-down direction, and which is fixed to the valve body together with the support frame by fixing bolts, with the flange parts facing both end parts of the support frame; and a positioning nut screwed to the upper end of the upper support cylinder, wherein the support cylinder is pushed upward by extension of the piezoelectric element, and is separated from the valve seat by the elastic force of the metal diaphragm valve body. However, the inverted dish-shaped metal diaphragm valve body is used as the valve head, so that the valve is too hard and is easy to leak when the valve is closed, and the inverted dish-shaped metal diaphragm valve body is not easy to cause a linear-like relation between the stroke of mechanical adjustment and the flow. In addition, the related art considers that the flow control valve has extremely few components, and can achieve a significant reduction in manufacturing cost and a high degree of accuracy in valve opening control of the conventional normally-closed piezoelectric element-driven metal diaphragm control valve, but lacks a technical teaching for achieving the corresponding effects. Under the judgment of the conventional technical knowledge in the field, the opening control precision of the flow control valve depends on the precise control of the piezoelectric element at the height position, and an informationized numerical control mode is an essential ring for the accuracy of the opening control of the flow control valve, and is an inherent thinking.
The utility model patent CN218031473U discloses a semiconductor process device and a flow regulating valve thereof, wherein the flow regulating valve comprises a valve body, an adjusting rod and a sleeve, a liquid inlet and a liquid outlet are formed on the valve body, the liquid inlet comprises a guide section and a liquid inlet section which are mutually connected, one end of the liquid inlet section penetrates through the surface of the valve body to form a liquid inlet, one end of the liquid outlet is communicated with the guide section, and the other end of the liquid outlet penetrates through the surface of the valve body to form a liquid outlet; the adjusting rod comprises a guide part and a telescopic rod; the guide part can reciprocate along the guide section to drive the telescopic link to get into the guide section or withdraw from the guide section by the feed liquor section, the cross section size of feed liquor section is less than the guide section, and the cover tube is established and is fixed on the telescopic link and the external diameter corresponds, the internal diameter corresponds with the telescopic link with the feed liquor section, is formed with at least one axially extending feed liquor breach on it, and the width of feed liquor breach reduces gradually along being close to the guide part direction. In the related prior art, the flow regulating valve can continuously regulate the micro flow by using a simple technical means that the arrangement of the liquid inlet notch is as slender and easy to be obtained as possible. However, there is no technical suggestion how the minute flow rate stabilizes the supply after the adjustment.
In summary, the precision flow rate regulating valve in the prior art has a technical problem that the mechanical flow rate regulating valve cannot stably supply fluid on a flow rate precision development route, and has an inherent thought that the opening degree control precision of the electric control flow rate regulating valve can be realized only by a piezoelectric element.
Disclosure of Invention
The invention provides a manual regulating valve for a semiconductor wet process and an assembly method thereof, and mainly aims to solve the technical problem that the flow of the regulating valve is precise and cannot be stably supplied; meanwhile, the inherent thinking of realizing the opening accuracy of the flow control valve by using a simple technical means of arranging a piezoelectric element or a liquid inlet in an elongated way is broken.
The invention provides production equipment for a semiconductor wet process, which can solve the technical contradiction that the high requirement on the precision of the adjustment of the accurate liquid supply in the production process of the semiconductor wet process can cause the deterioration of the stability of the continuous liquid supply in the production process.
The invention provides an assembly method of a manual regulating valve for a semiconductor wet process, which has the effect of quickly assembling the regulating valve.
The main purpose of the invention is realized by the following technical scheme:
A manual regulating valve for a semiconductor wet process and an assembling method thereof are provided, comprising:
the valve seat is internally provided with a ring opening communicated with the first flow passage and an axle center valve port communicated with the second flow passage, and the axle center valve port is positioned in the ring opening;
the valve cover is combined on the valve seat, an adjusting rod group is connected in the valve cover, the valve cover can provide a movable space of the adjusting rod group, and the adjusting rod group comprises an adjusting inlet rod and an adjusting outlet rod which are mutually related;
the diaphragm valve plate is arranged at one end of the adjusting withdrawal rod of the adjusting rod group and is provided with a valve head positioned at the center and used for closing the axle center valve port, and an axle center cone aligned with the axle center valve port is formed below the valve head;
the adjusting wheel is arranged on the valve cover and connected with an adjusting inlet rod of the adjusting rod group and used for adjusting the lifting of the adjusting inlet rod in the valve cover; the regulating wheel is provided with a rotating mode and a stopping mode, in the rotating mode, along with the rotation of the regulating wheel, each time the regulating inlet rod is regulated to descend or ascend by a first distance, the regulating outlet rod synchronously and reversely ascends or descends by a second distance, the ratio of the second distance to the first distance is between 0.8 and 0.95, and the relation between the rotation circle number of the regulating wheel and the flow of the regulating valve is approximately linear in combination with the cone inclination of the axis cone.
The principle of implementing the basic structure example is that under the rotation mode of the adjusting wheel, the adjusting inlet rod is adjusted to descend or ascend, the adjusting outlet rod synchronously ascends or descends reversely, the distance of reverse retraction movement corresponding to the movement of the adjusting outlet rod is 0.8-0.95 of the distance of forward extension movement corresponding to the movement of the adjusting inlet rod, the flow adjusting precision is improved to 5-20 times (the reciprocal of 1 minus 0.8 is 5, and the reciprocal of 1 minus 0.95 is 20), so that the flow accuracy of the adjusting valve is realized. The diaphragm valve plate is combined with an axial cone which is not contacted with the valve seat in the flow regulation process, the cone inclination of the axial cone can enable the opening degree of the valve head and the axial valve port to be in linear relation with the height position of the valve head in the valve head lifting process, and the relation between the rotation number of the regulating wheel and the flow of the regulating valve is approximately linear. And by utilizing the stop mode of the regulating wheel, the flow is supplied and fixed after the regulation, and the flow stability is not influenced by external oscillating force which is possibly from equipment or fluid flow in the production process and influences the flow stability of the regulating valve, so the manual regulating valve for the semiconductor wet process and the assembly method thereof are provided.
In a preferred example, the invention may be further configured that the adjusting wheel has a synchronous rotating rod part located at the axle center, and is inserted into the coaxial hole of the adjusting inlet rod; the lower edge of the wheel body of the regulating wheel is provided with a plurality of limiting tooth buckles, and the end surface of the upper hole of the valve cover is provided with a plurality of limiting tooth grooves; the adjusting wheel is provided with a plurality of clamping pins at the periphery of the synchronous rotating rod part, and a rotating groove and a stop groove are formed in the inner wall of an upper hole of the valve cover; when the clamping pin is clamped in the rotary groove, the limiting tooth buckle is not combined with the limiting tooth groove, and the adjusting wheel is in a rotary mode; when the clamping pin is clamped in the stop groove, the limiting tooth buckle is combined with the limiting tooth groove, and the adjusting wheel is in a stop mode.
By adopting the preferable technical characteristics of the structure, the stop mode materialization structure is realized by utilizing the adjusting wheel, and the adjusting wheel can be prevented from rotating in the stop mode in a mechanical mode after the flow is precisely adjusted, so that the relative height position of the adjusting inlet rod in the valve cover is effectively fixed.
The present invention may be further configured in a preferred example, the number of the annular arrangement of the limit tooth grooves corresponds to a circle of adjustment scale number of the adjustment wheel.
Through adopting the preferable technical characteristics of above-mentioned structure, utilize the annular of valve gap is arranged spacing tooth's socket, corresponds the rotation scale of regulating wheel can push away the rotation angle of regulating wheel, and 360 degrees are rotatory one circle of regulating wheel wherein.
The present invention may be further configured in a preferred example such that the number of revolutions of the regulating wheel is operable to be between 10 and 50, at least two of the operable revolutions of the regulating wheel being in linear relationship to the regulating valve flow.
By adopting the preferable technical characteristics of the structure, the proper rotation number of the regulating wheel can be used for operating the numerical value, at least two circles are established to be in linear relation with the flow of the regulating valve, the rotation number of the regulating wheel and the rotation angle scale can be estimated to be the flow of the valve at a specific circle, and therefore high-precision flow regulation can be more easily executed.
The invention may in a preferred example be further configured such that the number of rotations of the adjustment wheel is operable between 15 and 25; preferably, the ratio of the second distance to the first distance is between 0.88 and 0.92; in a preferred example, the valve seat is formed with an outer bevel on the periphery of the axial valve port.
By adopting the preferable technical characteristics of the structure, the large scale teeth of the valve flow are determined by utilizing the operable numerical value of more reasonable rotation turns of the regulating wheel, and the rotation angle of the regulating wheel can be used as the small scale teeth of the valve flow; and the ratio of the second distance to the first distance is close to one and smaller than one, and under the same valve opening, when the ratio selected by the adjusting rod group is close to one, the valve flow scale teeth are thinned more and the operable rotation number of the adjusting wheel is larger.
In a preferred example, the adjusting retraction lever may be in the form of a screw having a retraction lever anti-rotation portion such that the adjusting retraction lever is relatively non-rotatable in the valve cover for lifting movement.
Through adopting the preferable technical characteristics of above-mentioned structure, utilize the pole anti-rotation portion that moves back of adjusting the pole, when the pole is moved back in the regulation is relatively non-rotatable, it is rotatable to adjust the pole that advances, and the spiro union relation between them can form synchronous but a little rise or a rise little decline of non-equal distance in the valve gap. One end of the adjusting retreating rod which does not rotate relative to the adjusting inlet rod is connected with the diaphragm valve plate, so that the durability of the diaphragm valve plate can be improved.
In a preferred example, the adjusting inlet rod is in a hollow screw sleeve shape, and is provided with an external thread at a first screw pitch and an internal screw hole at a second screw pitch, wherein the second screw pitch has a screw pitch difference slightly smaller than the first screw pitch, the external thread is used for being screwed with an internal screw joint part of the valve cover, and the internal screw hole is used for being screwed with an external screw joint part of the adjusting outlet rod; the external thread and the internal screw hole have the same thread direction, and the ratio of the second thread pitch to the first thread pitch is the same as the ratio of the second distance to the first distance; the adjusting inlet rod is in relative rotatable lifting movement in the valve cover, and the lifting height change of the adjusting inlet rod is positively correlated with the rotation number of the adjusting wheel.
Through adopting the preferred technical characteristics of above-mentioned structure, utilize the concrete structure of regulation feed rod, the round of rotation of regulating wheel is equivalent to regulation feed rod descends or rises a first pitch, simultaneously the regulation moves back the pole and rises or descend a second pitch, realizes the valve flow control of equal proportion fine setting.
The present invention may be further configured in a preferred example, that the manual adjustment valve for a semiconductor wet process and the assembling method thereof further include:
the support pressing block is limited in the valve cover in an anti-rotation way and is used for abutting against the peripheral ring part of the diaphragm valve plate and blocking the rotation of the adjusting withdrawal rod;
the elastic piece is arranged on the supporting pressing block and is used for providing the downward pressure of the supporting pressing block on the peripheral ring part of the diaphragm valve plate and providing the upward thrust of the adjusting retreating rod.
By adopting the preferable technical characteristics of the structure, the support pressing block is utilized to generate three effects of preventing the elastic piece from deflecting and abutting the peripheral ring part of the diaphragm valve plate and guiding the adjusting withdrawal rod to rise and fall, so that internal components are reduced, and the assembly of the precise adjusting valve is facilitated; the elastic piece simultaneously keeps upward elasticity of the adjusting retreating rod and downward elasticity of the supporting pressing block, so that clearance errors of threaded connection between the adjusting retreating rod and the adjusting inlet rod are eliminated, and better precise adjusting valve flow is achieved.
The present invention may be further configured in a preferred example, wherein the support ram has a ram anti-rotation portion such that the support ram is in a relatively non-rotatable and non-liftable limit relationship within the valve cover.
Through adopting the preferred technical characteristics of above-mentioned structure, utilize the briquetting anti-rotation portion of support briquetting, match in vertical guide slot in the valve gap makes support briquetting for the valve gap is non-rotatable, support briquetting has and moves back the pole and prevent changeing the hole, makes the regulation moves back the pole for support briquetting is non-rotatable.
The present invention may be further configured in a preferred example in which the support block further has a plurality of vent holes, one of which is aligned with the vent hole of the valve cover.
Through adopting the preferred technical characteristics of above-mentioned structure, utilize a plurality of air vents of support briquetting for support briquetting is in the installation of valve gap does not have the angle directionality, support briquetting all has a vent all the time with the exhaust hole of valve gap aligns, in order to balance the valve gap is in the upper portion of adjusting the pole with the internal and external pressure of inner chamber and outside atmospheric pressure before the diaphragm valve block, eliminate the inner chamber pressure difference that the pole lift was moved back in the regulation.
In a preferred example, the adjusting lever may further include a stopper ring portion, one end of the elastic member is biased against the stopper ring portion, and the other end of the elastic member is limited to the ring groove of the support pressing block.
By adopting the preferable technical characteristics of the structure, the retaining ring part of the adjusting withdrawal rod is utilized to receive the upward elastic force of the elastic piece.
The present invention may be further configured in a preferred example, in which the adjustment feed lever has a straightening portion, the valve cover has a first straightening hole for the straightening portion to axially slide in a spiral manner, and the valve cover further has a second straightening hole for the retainer portion to axially slide in a non-rotating manner, and the second straightening hole has a larger aperture than the first straightening hole so that a bottom edge of the first straightening hole can prevent the retainer portion of the adjustment withdrawal lever from rising.
By adopting the preferable technical characteristics of the structure, the outer diameter of the straightening part is exactly equal to the first straightening hole of the valve cover by utilizing the straightening part of the adjusting inlet rod positioned at the lower part, and the first straightening hole does not interfere the rotation of the straightening part; the valve cover is also provided with a second correction hole with a hole diameter larger than that of the first correction hole, the second correction hole is used for the baffle ring part to axially slide in the valve cover, and the second correction hole can interfere or not interfere the rotation of the baffle ring part. The aperture difference between the second correction hole and the first correction hole can prevent the baffle ring part of the adjusting and retreating rod from ascending, so when the baffle ring part of the adjusting and retreating rod ascends to touch the bottom edge of the first correction hole of the valve cover, the adjusting and retreating rod and the valve head of the diaphragm valve plate are synchronous height changes as the maximum ascending dead point, the valve is at the maximum opening, the length change of the adjusting and retreating rod extending out of the adjusting and retreating rod is smaller than the ascending height change of the adjusting and retreating rod, and the baffle ring part and the straightening part are the maximum adjusting distance; when the baffle ring of the adjusting and retreating rod descends to enable the adjusting and retreating rod to touch the supporting pressing block or the valve head to touch the periphery of the axle center valve port, the valve is at the minimum opening degree as a descending dead point, the length change of the adjusting and retreating rod retracted in the adjusting and advancing rod is smaller than the descending height change of the adjusting and advancing rod, and the minimum adjusting distance is formed between the baffle ring part and the straightening part; the distance between the baffle ring part and the straightening part is adjustable, and when the adjusting distance between the baffle ring part and the straightening part is smaller than the adjusting distance which can not be adjusted, the adjusting retreating rod is retracted to the maximum limit of the adjusting inlet rod, namely, the adjusting retreating rod is taken as the maximum descending dead point of the adjusting retreating rod.
The second main object of the present invention is achieved by the following technical solutions, and a production device for a semiconductor wet process is provided, which includes a manual control valve for a semiconductor wet process and an assembly method thereof, wherein the manual control valve can be implemented by any combination of features, and the manual control valve can meet the requirement of stability of fluid supply in the semiconductor wet process while pursuing flow control precision. The precisely adjusted flow rate produces a close linear relationship with the number of revolutions of the adjustment wheel or/and the same linear relationship with the number of partial turns.
The main purpose of the invention is realized by the following technical scheme: an assembly method for a manual regulator valve for a semiconductor wet process and an assembly method thereof, of any of the implementable feature combinations described above, comprising:
s1, associating an adjusting feed rod with an adjusting withdrawal rod to form an adjusting rod group;
s2, setting the adjusting rod group into the valve cover, wherein an adjusting inlet rod of the adjusting rod group is connected with an axle center hole of the valve cover until the adjusting outlet rod is in a state of maximum top dead center;
s3, setting a diaphragm valve plate at one end of the adjusting withdrawal rod of the adjusting rod group;
s4, combining the valve cover to a valve seat;
S5, setting an adjusting wheel on the valve cover, wherein the adjusting wheel is connected with an adjusting inlet rod of the adjusting rod group.
An exemplary implementation principle of this basic method is to manufacture a manual regulator valve using a series of assembly steps S1-S5; in addition, the operation of step S2 can prevent the adjustment feed lever from being disengaged from the adjustment return lever when the adjustment return lever is in the top dead center state.
The present invention may be further configured in a preferred example, the assembling method further includes: s6, rotating the adjusting wheel, synchronously rotating the adjusting inlet rod, rotating the adjusting inlet rod relative to the valve cover and descending a first distance, and reversely ascending the adjusting outlet rod relative to the adjusting inlet rod without rotating the adjusting outlet rod by a second distance; continuously rotating the adjusting wheel until the adjusting retreating rod is positioned at the lower dead point; the number of rotations of the regulating wheel during the course from the valve-open state to the valve-closed state is determined.
Through adopting the preferred technical characteristics of above-mentioned method, utilize step S6 to confirm in the equipment process the actual operable rotation number of circle of regulating wheel, in addition in step S2 can preset the ideal operable rotation number of circle of regulating wheel, two phase contrast, when actual operable rotation number of circle is close and be less than ideal operable rotation number of circle, can not have the opening to adjust little excessive regulation and cause the damage of axle center valve port to the valve head, can reduce to minimum to the valve head damage of diaphragm valve block when the valve is closed, manual governing valve and diaphragm valve block have better durability.
The present invention may be further configured in a preferred example such that, in the initial valve opening stage of step S6, the downward extension of the axial cone is sufficient to make the axial cone of the diaphragm valve plate incompletely separate from the axial valve port of the valve seat.
By adopting the preferable technical characteristics of the method, the axial cone of the diaphragm valve plate is not completely separated from the axial valve port in the valve opening stage, so that the fluid drainage effect from the valve opening to the valve closing is achieved; and in the valve closing stage, the valve head of the diaphragm valve plate presses the axle center valve port, specifically against the outer inclined groove.
In summary, the technical solutions of the present invention related to the structure or the method include at least one of the following technical effects contributing to the prior art:
1. the precise adjustment of the screw pitch of the flow regulating valve by taking millimeter as a unit (the unit adjusting value obtained by subtracting the screw pitch of the inner screw hole from the external screw pitch of the regulating inlet rod after one turn of the regulating wheel is mm/360 DEG) is realized through the combination of the regulating inlet rod and the regulating outlet rod, so that the requirement of the semiconductor wet equipment on the adjusting precision is met;
2. the combination of the screw pitch ratio (0.8-0.95) between the adjusting withdrawing rod and the adjusting feeding rod and the adjusting wheel with a specific stop mode realizes that the manual adjusting valve can meet the stability of fluid supply in the production process while pursuing precision through a mechanical structure;
3. The manual regulating valve has the convenience of assembly through the assembly step of the regulating rod group in the valve opening state;
4. through the combination of the ring opening and the axle center valve port positioned at the center, the diaphragm membrane and the inner cavity of the valve seat have no dead space for flowing, thereby meeting the requirement of no dead space for fluid supply in the semiconductor wet process;
5. the valve head of the diaphragm valve plate and the axial valve port of the valve seat can be statically sealed through an outer inclined groove formed on the periphery of the axial valve port, and the outer inclined groove is used as a convex waterline of the valve seat on the periphery of the axial valve port, so that fluid can not leak outwards in a valve closing state;
6. dynamic sealing of the valve and the valve seat is realized, and a circle of raised edges are arranged on the periphery of the annular opening of the valve seat, so that press fit sealing of the valve seat and the diaphragm valve plate is ensured.
Drawings
FIG. 1 is a schematic perspective view of a manual valve according to some embodiments of the invention;
FIG. 2 is a graph showing the relationship between the number of rotation of the manual valve and the flow rate of the manual valve according to some preferred embodiments of the present invention;
FIG. 3 is an exploded perspective view of a manual valve and a corresponding enlarged partial view of a diaphragm valve plate according to some preferred embodiments of the present invention;
FIG. 4 is a schematic cross-sectional view of a manual regulator according to some preferred embodiments of the present invention;
FIG. 5 is a schematic perspective view of a manual adjustment valve according to some embodiments of the present invention;
FIG. 6 is a schematic diagram showing steps in an assembly method of a manual valve according to some preferred embodiments of the invention;
FIG. 7 is a schematic perspective view of the adjusting lever and the adjusting lever in step S1 of the assembling method according to some preferred embodiments of the present invention;
FIG. 8 is a perspective view and another perspective view illustrating the assembly method of the present invention in step S2;
FIG. 9 is a perspective view and another perspective view illustrating the diaphragm valve plate disposed in the step S3 of the assembling method according to some preferred embodiments of the present invention;
FIG. 10 is a schematic perspective view showing the assembly method of the present invention in step S4;
fig. 11 is a schematic perspective view and another perspective partial perspective view of the adjusting wheel disposed on the valve cover in step S5 of the assembling method according to some preferred embodiments of the invention.
Reference numerals: 10. a valve seat; 11. a first flow passage; 12. a second flow passage; 13. a ring opening; 14. an axle center valve port; 15. an outer bevel; 16. a raised edge; 20. a valve cover; 21. limiting tooth grooves; 22. a rotary groove; 23. a stop groove; 24. an inner screw connection part; 25. an exhaust hole; 26. a first calibrated hole; 27. a second correction hole; 30. a diaphragm valve plate; 31. a valve head; 32. an axial cone; 33. a peripheral ring portion; 34. a soft film portion; 40. an adjusting wheel; 41. a synchronous rotating rod part; 42. limiting tooth buckles; 43. a bayonet lock; 44. a scale indication label; 50. an adjusting rod group; 51. adjusting the feed rod; 51a, coaxial holes; 51b, external threads; 51c, an inner screw hole; 51d, a straightening part; 52. adjusting the withdrawal rod; 52a, a rod-retreating anti-rotation part; 52b, an outer threaded portion; 52c, a baffle ring part; 52d, valve connection end; 60. supporting the pressing block; 61. a briquetting anti-rotation part; 62. a vent hole; 63. a rod-retreating anti-rotation hole; 70. an elastic member; 81. a first coupling sleeve; 82. a second coupling sleeve; 83. a coupling lever; 84. a coupling nut; 85. a first end plug; 86. a second end plug; 87. a gasket; 88. an elastic pad; 90. and (5) a base.
Description of the embodiments
The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is apparent that the described embodiments are only examples for understanding a part of the inventive concept of the present invention, and are not representative of all embodiments, nor are they to be construed as the only embodiments. All other embodiments, based on the embodiments of the present invention, which are obtained by those of ordinary skill in the art under the understanding of the inventive concept of the present invention, are within the scope of the present invention.
It should be noted that, if a directional indication (such as up, down, left, right, front, and rear … …) is involved in the embodiment of the present invention, the directional indication is merely used to explain the relative positional relationship, movement condition, etc. between the components in a specific posture, and if the specific posture is changed, the directional indication is correspondingly changed. In order to facilitate understanding of the technical solution of the present invention, the manual adjusting valve of the present invention is further described and explained in detail below, but is not intended to limit the scope of protection of the present invention.
Referring to fig. 1 to 5, some embodiments of the present invention firstly provide a manual adjustment valve, fig. 1 is a schematic perspective assembly diagram of the manual adjustment valve, fig. 2 is a schematic perspective exploded diagram of the manual adjustment valve when testing the rotation number and the flow rate of the adjustment valve, fig. 3 is a schematic cross-sectional diagram of the manual adjustment valve, fig. 4 is a schematic perspective diagram of an adjustment back rod used by the manual adjustment valve, fig. 5 is a schematic perspective diagram of an adjustment back rod 52, which is an important component of the adjustment rod set 50, and the adjustment back rod 52 and the adjustment inlet rod 51 together form the adjustment rod set 50 of the present invention. A manual adjustment valve comprising: a valve seat 10 providing a flow path, a valve cap 20 providing a moving space of the adjustment lever group 50, a diaphragm valve plate 30 as a valve switch, and an adjustment wheel 40 for adjusting a valve opening. Referring to fig. 2, the number of rotations of the regulating wheel 40 is approximately linear with the regulating valve flow. The manual adjusting valve of the present embodiment can predefine the number of rotation of the adjusting wheel 40, and when the upper limit value of the number of rotation (corresponding to the maximum top dead center of the adjusting withdrawal rod 52 of the adjusting rod group 50 relative to the middle height position of the valve cover 20) is exceeded, the adjusting rod group 50 will not disintegrate, i.e. no additional top dead center limiting component is required, and when the lower limit value of the number of rotation (corresponding to the maximum bottom dead center of the adjusting withdrawal rod 52 of the adjusting rod group 50 relative to the middle height position of the valve cover 20) is exceeded, the diaphragm valve plate 30 will not be damaged by the valve seat 10 due to excessive compression. In a specific example, the number of the operable rotations of the regulating wheel 40 is defined to be 0-20, the relation with the flow of the regulating valve is approximately linear (the flow change is 0-300 mL/min) in 2-17 circles, the linear relation with the flow of the regulating valve is the same (the flow change is 100-250 mL/min) in 7-12 circles, the linear regulation level of ML/min is met, and the regulating wheel is suitable for the production and use of the semiconductor wet process. In a specific example, the adjustment feed rod 51 is lowered or raised one millimeter (mm) in a height position relative to the valve cover 20, the adjustment return rod 52 is raised or lowered one millimeter (mm) or other equal ratio adjustment relationship in synchronism counter to the one rotation of the adjustment wheel 40 in an operable number of turns.
Referring to fig. 1, 3 and 4, and particularly fig. 4, with respect to the valve seat 10, a ring opening 13 communicating with the first flow passage 11 and an axial valve port 14 (as shown in fig. 4) communicating with the second flow passage 12 are provided in the valve seat 10, and the axial valve port 14 is located in the ring opening 13. In this example, the first flow channel 11 is a liquid inlet channel, and the valve outlet of the first flow channel 11 may be provided with a first combination pipe sleeve 81 to be detachably and tightly connected with the liquid inlet pipe; the second flow channel 12 is a liquid outlet channel, and a second combining pipe sleeve 82 can be arranged at the valve outlet of the second flow channel 12 so as to be detachably and tightly connected with the liquid outlet pipe. After entering the first flow channel 11, the fluid reaches the second flow channel 12 through the annular opening 13 and the axle center valve port 14, and is discharged from a valve outlet of the second flow channel 12. And the opening of the diaphragm valve plate 30 at the axial port 14 is used to adjust the discharge flow value. In a preferred embodiment, the valve seat 10 has an external bevel 15 (as shown in fig. 4) formed on the periphery of the axial valve port 14, so as to facilitate blocking the fluid communication between the annular opening 13 and the axial valve port 14 with a smaller valve closing force when the diaphragm valve plate 30 is in the valve closed state. The valve seat 10 may further be provided with a raised rim 16 (as shown in fig. 4) at the outer edge of the annular opening 13, so as to limit and fix the peripheral ring portion 33 of the diaphragm valve plate 30.
Referring to fig. 1, 3 and 4, referring to the valve cover 20, the valve cover 20 is combined with the valve seat 10, an adjusting rod set 50 is connected in the valve cover 20, the valve cover 20 can provide a moving space of the adjusting rod set 50, and the adjusting rod set 50 includes an adjusting inlet rod 51 and an adjusting outlet rod 52 which are associated with each other. The adjusting lever 51 moves downward or upward in the valve cover 20, and the associated portion of the adjusting lever 52 moves upward or downward in the adjusting lever 51 in the opposite direction. In this example, the valve cover 20 is mainly divided into a cylindrical upper cavity and a square seat lower cavity, wherein the upper cavity is provided with a first alignment hole 26 (as shown in fig. 4) to align the descending and ascending movements of the adjusting lever 51; the lower chamber provides a second alignment hole 27 (shown in fig. 4) to align the descending and ascending movements of the adjustment withdrawal lever 52, and the retainer portion 52c of the adjustment withdrawal lever 52 cannot enter the first alignment hole 26. The valve cover 20, the first coupling sleeve 81 and/or the second coupling sleeve 82 may be made of PVDF (polyvinylidene fluoride resin), the adjusting rod 51 may be made of PEEK (polyetheretherketone), and the adjusting rod 52 may be made of PVDF, wherein PVDF has better hardness and wear resistance.
Referring to fig. 1, 3 and 4, regarding the diaphragm valve plate 30, the diaphragm valve plate 30 is disposed at one end of the adjusting retraction rod 52 of the adjusting rod set 50, the diaphragm valve plate 30 has a central valve head 31, a peripheral ring portion 33 disposed at the periphery, and a soft film portion 34 (as shown in fig. 9) connecting the valve head 31 and the peripheral ring portion 33, the soft film portion 34 is relatively soft, can deform along with the lifting movement of the valve head 31, and can bear the lifting movement height, specifically, is more than 1.0 mm. The valve head 31 is used for closing the axial valve port 14, and an axial cone 32 aligned with the axial valve port 14 is formed below the valve head 31. The axial cone 32 improves the turbulence defect of the fluid at the axial valve port 14, and the arrangement of the axial cone 32 can play a role of cleaning a cavity, thereby being applicable to the cleaning requirement of the semiconductor wet process regulating valve. The diaphragm sheet 30 may be made of PTFE (polytetrafluoroethylene).
With respect to the adjusting wheel 40, referring to fig. 1, 3 and 4, the adjusting wheel 40 is disposed on the valve cover 20 and connected to an adjusting rod 51 of the adjusting rod set 50, for adjusting the lifting of the adjusting rod 51 in the valve cover 20; the adjusting wheel 40 has a rotation mode and a stop mode, in which each time the adjusting lever 51 is adjusted to descend or ascend a first distance relative to the valve cover 20 in accordance with the rotation of the adjusting wheel 40, the adjusting lever 52 is synchronously and reversely ascend or descend a second distance relative to the adjusting lever 51, the ratio of the second distance to the first distance is 0.8-0.95, and the taper of the axial cone 32 is combined. In this example, taking the first distance of 1.0mm as an example, the ratio of the second distance to the first distance is 0.9, that is, the adjusting wheel 40 is rotated once in the rotation mode, the adjusting lever 51 is adjusted to descend or ascend by a first distance (for example, 1.0 mm) with respect to the valve cover 20, the adjusting lever 52 is synchronously raised or descends reversely by 0.9 times the first distance (for example, 0.9 mm) with respect to the adjusting lever 51, so the adjusting lever 52 is adjusted to descend or ascend by 0.1 times by a first distance (for example, 0.1 mm) with respect to the valve cover 20, and the valve head 31 is also synchronously lowered or ascended by 0.1 times by a first distance (0.1 mm). In this example, the adjustment wheel 40 is a hand wheel, but the adjustment wheel 40 may be an electric wheel, or a hydraulically or pneumatically driven wheel.
One specific implementation principle of the foregoing structural example is that if the valve opening is expected to be reduced, the regulating wheel 40 is first put in a rotation mode, the regulating wheel 40 is rotated clockwise, the regulating feed rod 51 is regulated to descend relative to the valve cover 20, the regulating return rod 52 is synchronously and reversely ascended relative to the regulating feed rod 51, the distance of reverse retraction movement corresponding to the movement of the regulating return rod 52 is 0.8-0.95 of the distance of forward extension movement corresponding to the movement of the regulating feed rod 51, the slight descent of the regulating return rod 52 relative to the valve cover 20 is about 0.2-0.05 times of the descent amplitude of the regulating feed rod 51, that is, the flow regulating precision is improved to 5-20 times (the reciprocal of 1 minus 0.8 is 5, the reciprocal of 1 minus 0.95 is 20), so as to realize the flow precision of the regulating valve, and the valve opening is increased to be the opposite expression under the same mechanism. The combined diaphragm valve plate 30 is provided with an axle cone 32 which is not contacted with the valve seat 10 in the flow regulation process, the cone inclination of the axle cone 32 can enable the opening degree of the valve head 31 and the axle valve port 14 to be in a linear relation with the height position of the valve head 31 in more circles in the lifting process of the valve head 31, so that the relation between the rotation circle number of the regulating wheel 40 and the flow of the regulating valve is approximately linear. And by using the stopping mode of the regulating wheel 40, the flow supply is fixed after the regulation, and the flow stability will not be affected by external oscillating force which may be originally generated from equipment or fluid flow in the production process and affects the flow stability of the regulating valve.
Referring to fig. 3, fig. 4 and fig. 5 again, regarding a specific technical means for realizing "the adjusting retraction lever 52 is raised or lowered synchronously and reversely with respect to the adjusting insertion lever 51 by a second distance, wherein the ratio of the second distance to the first distance is between 0.8 and 0.95", in this example, as shown in fig. 5, the adjusting retraction lever 52 is in the form of a screw, and has a retraction lever rotation preventing portion 52a (specifically, an outer hexagon), an outer screw connection portion 52b for screwing the adjusting insertion lever 51, and a blocking ring portion 52c located between the retraction lever rotation preventing portion 52a and the outer screw connection portion 52b, and the adjusting retraction lever 52 is further formed as a valve connecting end 52d at one end of the retraction lever rotation preventing portion 52a for connecting the valve head 31 of the diaphragm valve plate 30. The retraction lever rotation preventing portion 52a is engaged with a retraction lever rotation preventing hole 63 (specifically, a hexagon hole) of the support pressing block 60, the support pressing block 60 is non-rotatable with respect to the valve cover 20, or the retraction lever rotation preventing portion 52a is engaged with a non-rotatable portion of the valve cover 20, or the blocking ring portion 52c of the adjustment retraction lever 52 is non-rotatably guided and slid in the second calibration hole 27 of the valve cover 20, and any one of the above three methods can make the adjustment retraction lever 52 move up and down relatively non-rotatably in the valve cover 20. The adjustment retraction lever 52 is relatively non-rotatable but movable up and down within the valve cover 20 by the retraction lever rotation prevention portion 52a of the adjustment retraction lever 52, for example, engagement of an outer hexagon and an inner hexagon, and the adjustment retraction lever 51 is relatively rotatable and movable up and down, and the threaded relationship between the adjustment retraction lever 51 and the adjustment retraction lever 52 can be changed by a small up and down or a small up and down movement within the valve cover 20 in synchronization but at a non-equal distance. One end of the adjustment withdrawal lever 52, which is non-rotatable with respect to the adjustment inlet lever 51, is connected to the diaphragm valve plate 30, so that the durability of the diaphragm valve plate 30 can be increased.
In addition, referring to fig. 3, 4 and 7, the adjusting rod 51 is in a hollow screw sleeve shape, and has an external thread 51b with a first thread pitch and an internal thread hole 51c with a second thread pitch (as shown in fig. 4), the adjusting rod 51 further has a coaxial hole 51a (specifically, an internal hexagonal hole) at one end and a straightening portion 51d at the other end, and the coaxial hole 51a is limited by the synchronous rotating rod portion 41 (specifically, an external hexagonal rod body) of the adjusting wheel 40, so as to realize synchronous rotation of the adjusting wheel 40 and the adjusting rod 51. In one aspect, the alignment portion 51d slides in the first alignment hole 26 of the valve cover 20 most of the time except for the valve closing, and the retainer portion 52c of the adjustment return lever 52 always slides in the second alignment hole 27 of the valve cover 20 (as shown in fig. 4). In another aspect, the second pitch has a pitch difference slightly less than the first pitch, in particular but not by way of limitation, the first pitch is 1.0mm and the second pitch is 0.9mm. The external thread 51b is used for screwing the internal screw portion 24 (as shown in fig. 4) of the valve cover 20, and the internal screw hole 51c is used for screwing the external screw portion 52b of the adjusting backing rod 52; the external thread 51b and the internal thread hole 51c have the same thread direction, for example, rotate downward clockwise when viewed from above the adjusting valve, and the ratio of the second thread pitch to the first thread pitch is the same as the ratio of the second distance to the first distance; the adjusting lever 51 is relatively rotatable in the valve cover 20, and the change of the lowering and raising height of the adjusting lever 51 is positively correlated with the number of rotations of the adjusting wheel 40. With the specific structure of the adjusting lever 51, one rotation of the adjusting wheel 40 clockwise corresponds to a first pitch of the descending movement of the adjusting lever 51, and the adjusting lever 52 is synchronously lifted up relative to the adjusting lever 51 by a second pitch, and the descending movement of the adjusting lever 52 relative to the valve cover 20 is a difference of the first pitch minus the second pitch, thereby realizing the valve flow adjustment of the equal ratio fine adjustment. Similarly, one counter-clock rotation of the adjustment wheel 40 corresponds to a first pitch of the upward movement of the adjustment feed lever 51, and simultaneously the adjustment return lever 52 is lowered relative to the adjustment feed lever 51 by a second pitch, and the upward movement of the adjustment return lever 52 relative to the valve cover 20 is a difference of the first pitch minus the second pitch.
In a preferred example, the number of revolutions of the regulating wheel 40 is operable to be between 10 and 50, and at least two of the operable revolutions of the regulating wheel 40 are in linear relationship with the regulating valve flow. With the appropriate number of turns of the regulating wheel 40 being operable to establish a linear relationship between at least two turns and the regulating valve flow, the number of turns of the regulating wheel 40 and the scale of the rotation angle can be estimated as the valve flow at a specific number of turns to more easily perform high-precision flow regulation. There is a better protection against coming off of the adjustment feed rod 51 of the adjustment rod group 50 beyond the upper limit of the operable number of turns of the adjustment wheel 40 from off to on, and a better protection against pressure losses of the valve head 31 of the diaphragm valve plate 30 beyond the lower limit of the operable number of turns of the adjustment wheel 40 from on to off. The principle of the protection mechanism of the upper limit of the operable number of the rotation turns of the adjusting wheel 40 from the closing to the opening is that, at the height position of the valve cover 20, the lifting movement of the adjusting feeding rod 51 inevitably drives the lifting of the adjusting withdrawing rod 52, even if the lifting amplitude of the adjusting withdrawing rod 52 is small, when the blocking ring part 52c of the adjusting withdrawing rod 52 is abutted against the upper edge of the second correcting hole 27 of the valve cover 20, the adjusting withdrawing rod 52 can not be moved to lift any more, and naturally, the adjusting feeding rod 51 can not lift any more, so that the anti-falling protection of the adjusting feeding rod 51 is generated, and the maximum operable upper limit of the adjusting wheel 40 is defined. The principle of the protection mechanism of the lower limit of the operable value of the rotation number of the adjusting wheel 40 from opening to closing is that, at the height position of the valve cover 20, the descending movement of the adjusting and advancing rod 51 inevitably drives the outer threaded portion 52b of the adjusting and advancing rod 52 to retract toward the inner screw hole 51c of the adjusting and advancing rod 51 until the retraction limit state, usually the blocking ring portion 52c of the adjusting and advancing rod 52 and the straightening portion 51d of the adjusting and advancing rod 51 approach each other to contact, at this time, the outer threaded portion 52b of the adjusting and advancing rod 52 does not retract into the space or length of the inner screw hole 51c any more, the adjusting and advancing rod 52 cannot be moved down any more, so as to achieve the effect that the valve head 31 of the diaphragm valve plate 30 is not excessively damaged by the axial valve port 14 of the valve seat 10, thereby defining the maximum operable value lower limit of the adjusting wheel 40. Both the upper and lower limits of the maximum operable value of the adjustment wheel 40 described above can be predefined during assembly (described in more detail below).
In a more preferred example, the number of rotations of the regulating wheel 40 is operable to be between 15 and 25; preferably, the ratio of the second distance to the first distance is between 0.88 and 0.92. Determining a large scale tooth of the valve flow rate by using an operable value of a more reasonable rotation number of the regulating wheel 40, wherein the rotation angle of the regulating wheel 40 can be used as a small scale tooth of the valve flow rate; and the ratio of the second distance to the first distance is close to or smaller than one, and under the same valve opening, when the ratio selected by the adjusting lever group 50 is close to one, the valve flow scale teeth are thinned more and the operable rotation number of the adjusting wheel 40 is larger. A scale indicating label 44 (shown in fig. 3) may be attached to the top surface of the adjustment wheel 40.
Referring to fig. 3, 4 and 11, regarding a specific means for implementing the rotation mode and the stop mode of the adjusting wheel 40, except that the adjusting wheel 40 has a synchronous rotating rod portion 41 at the axle center inserted into a coaxial shaft hole 51a of the adjusting rod 51, a plurality of limiting teeth 42 (as shown in fig. 4 and 11) are provided at the lower edge of the wheel body of the adjusting wheel 40, and a plurality of limiting tooth slots 21 are provided at the end surface of the upper hole of the valve cover 20. The regulating wheel 40 is provided with a plurality of blocking pins 43 at the periphery of the synchronous rotating rod part 41, and the inner wall of the upper hole of the valve cover 20 is provided with a rotating groove 22 and a stopping groove 23 (as shown in fig. 4); when the locking pin 43 is locked to the rotating groove 22, the limiting tooth buckle 42 is not combined with the limiting tooth groove 21, and the adjusting wheel 40 is in a rotating mode; when the locking pin 43 is engaged with the locking groove 23 by pushing the adjusting wheel 40 against the valve cover 20, the locking tooth buckle 42 is combined with the locking tooth slot 21, and the adjusting wheel 40 is in a locking mode. Thus, the adjustment wheel 40 can be mechanically adjusted to a stop mode after fine adjustment of the flow rate, such that it is not rotatable, to effectively fix the relative height position of the adjustment lever 51 in the valve cover 20. The height of the adjusting lever 51 in the valve cover 20 is fixed, and naturally the height of the adjusting lever 52 in the valve cover 20 is also fixed. The height of the adjusting retraction lever 52 in the valve cover 20 is fixed, and naturally the height of the valve head 31 of the diaphragm valve plate 30 in the valve seat 10 is also fixed. In the rotation mode, the adjustment wheel 40 may be maintained at a first height; in the stop mode, the adjustment wheel 40 may be maintained at a second height, and the first height may be greater than the second height. The material of the detent 43 may be PVDF (polyvinylidene fluoride resin). The upper edge of the rotating groove 22 may be flat to prevent the locking pin 43 from being separated; the upper edge of the stopping groove 23 may have a slope to facilitate the movement of the bayonet 43 from the stopping groove 23 to the rotating groove 22.
In a preferred example, the number of the annular arrangement of the limit grooves 21 corresponds to the number of one turn of the adjustment scale of the adjustment wheel 40. Since the annular arrangement of the limiting tooth grooves 21 of the valve cover 20 may correspond to the rotation scale of the adjusting wheel 40, the rotation angle of the adjusting wheel 40 may be calculated, wherein 360 degrees is one rotation of the adjusting wheel 40. The number of the annular arrangement of the limit tooth grooves 21 may be twelve, and each corresponding scale represents 30 degrees of rotation of the adjusting wheel 40.
In a preferred example, the manual adjustment valve further comprises a support block 60 and an elastic member 70, such as a compression spring in particular. The supporting pressing block 60 is located in the valve cover 20 in an anti-rotation manner, and is used for abutting against the peripheral ring part 33 of the diaphragm valve plate 30 and blocking the rotation of the adjusting withdrawing rod 52; preferably, the support pressing block 60 has a pressing block rotation preventing portion 61 (as shown in fig. 3 and 9), and is engaged by a corresponding guide groove of the valve cover 20, so that the support pressing block 60 is in a relatively non-rotatable and non-liftable limiting relationship in the valve cover 20. The elastic member 70 is disposed on the support pressing block 60, and is configured to provide a pressing force of the support pressing block 60 on the peripheral ring portion 33 of the diaphragm valve plate 30 and provide an ascending thrust of the adjustment retracting lever 52. The supporting block 60 has three non-rotatable functions of preventing the elastic member 70 from deflecting and abutting against the peripheral ring portion 33 of the diaphragm valve plate 30 and guiding the adjusting retraction rod 52 to lift, so that the internal components can be reduced, and the assembly of the precise adjusting valve is facilitated; the elastic member 70 simultaneously maintains the upward elastic force of the adjusting retraction rod 52 and the downward elastic force of the supporting pressing block 60, so as to eliminate the clearance error of the threaded connection between the adjusting retraction rod 52 and the adjusting feeding rod 51, and achieve better precise valve flow adjustment. The support pressing block 60 is matched with the longitudinal guide groove in the valve cover 20 by using the pressing block rotation preventing part 61 of the support pressing block 60, so that the support pressing block 60 is not rotatable relative to the valve cover 20, and the support pressing block 60 is provided with a withdrawal rod rotation preventing hole 63 (as shown in fig. 3 and 9) for the withdrawal rod rotation preventing part 52a of the adjustment withdrawal rod 52 to be engaged, so that the adjustment withdrawal rod 52 is not rotatable relative to the support pressing block 60.
In the preferred embodiment, the support block 60 also has a plurality of vent holes 62 (as shown in fig. 3 and 9), wherein one vent hole 62 is aligned with the vent hole 25 of the valve cover 20 when the support block 60 is assembled without requiring a rotation angle. The plurality of vent holes 62 of the supporting pressing block 60 are utilized, so that the supporting pressing block 60 is installed in the valve cover 20 without angular directivity, and the supporting pressing block 60 always has one vent hole 62 aligned with the vent hole 25 of the valve cover 20 so as to balance the internal and external pressure of the inner cavity of the valve cover 20 before the upper part of the adjusting withdrawing rod 52 and the diaphragm valve plate 30 and the external air pressure, and eliminate the inner cavity pressure difference caused by the lifting of the adjusting withdrawing rod 52.
In a preferred example, one end of the elastic member 70 is biased against the stop ring portion 52c of the adjustment withdrawal lever 52, and the other end of the elastic member 70 is limited to the ring groove of the support pressing block 60. The stopper ring portion 52c of the regulating withdrawal lever 52 is utilized to receive the upward elastic force of the elastic member 70.
In a preferred example, the adjustment feed rod 51 has an alignment portion 51d corresponding to the first alignment hole 26 of the valve cover 20 for the alignment portion 51d to axially slide in a screw-type manner, the valve cover 20 has a second alignment hole 27 for the stopper portion 52c to axially slide in a non-rotating manner, and the second alignment hole 27 has a larger diameter than the first alignment hole 26, so that a bottom edge of the first alignment hole 26 (corresponding to an upper edge of the second alignment hole 27) can block the stopper portion 52c of the adjustment withdrawal rod 52 from rising. With the alignment portion 51d of the adjustment feed rod 51 at the lower portion, the outer diameter of the alignment portion 51d is exactly equal to the first alignment hole 26 of the valve cover 20, and the first alignment hole 26 does not interfere with the rotation of the alignment portion 51 d; the valve cover 20 further has a second correction hole 27 having a larger diameter than the first correction hole 26 for the axial sliding of the baffle ring portion 52c in the valve cover 20, and the second correction hole 27 may or may not interfere with the rotation of the baffle ring portion 52 c. The difference between the aperture of the second calibration hole 27 and the aperture of the first calibration hole 26 can prevent the stop ring portion 52c of the adjustment withdrawal rod 52 from rising, so when the stop ring portion 52c of the adjustment withdrawal rod 52 rises to touch the bottom edge of the first calibration hole 26 of the valve cover 20, as the maximum rising dead point, the adjustment withdrawal rod 52 and the valve head 31 of the diaphragm valve plate 30 are synchronous height changes, so the valve is at the maximum opening, the length change of the adjustment withdrawal rod 52 extending out of the adjustment inlet rod 51 is smaller than the rising height change of the adjustment inlet rod 51, and at this time, the stop ring portion 52c and the calibration portion 51d are the maximum adjustment distance; when the retainer portion 52c of the adjusting and retracting rod 52 descends to make the adjusting and retracting rod 52 touch the supporting pressing block 60 or the valve head 31 touches the periphery of the axial valve port 14, the valve is at the minimum opening degree as a descending dead point, the length of the adjusting and retracting rod 52 retracted in the adjusting and retracting rod 51 is less than the descending height of the adjusting and retracting rod 51, and the retainer portion 52c and the straightening portion 51d are at the minimum adjusting distance; the distance between the stop ring portion 52c and the alignment portion 51d is adjustable, and when the adjustment distance between the stop ring portion 52c and the alignment portion 51d is smaller than the adjustment distance that cannot be adjusted, the adjustment retraction lever 52 is retracted to the maximum limit of the adjustment retraction lever 51, that is, as the maximum descent dead point of the adjustment retraction lever 52.
The invention also provides production equipment for the semiconductor wet process, which comprises the manual regulating valve, and can meet the requirement of stability of fluid supply in the semiconductor wet process while pursuing flow regulating precision. The precisely adjusted flow rate produces a close linear relationship with the number of revolutions of the adjustment wheel or/and the same linear relationship with the number of partial turns.
Referring to fig. 6 in combination, the present example also proposes a method of assembling a manual adjustment valve for manufacturing the manual adjustment valve as described above, the method comprising: the step S1 is used for associating the adjusting feed rod with the adjusting withdrawal rod so as to form an adjusting rod group, the step S2 is used for setting the adjusting rod group into the valve cover, the step S3 is used for setting the diaphragm valve plate at one end of the adjusting withdrawal rod of the adjusting rod group, the step S4 is used for combining the valve cover to the valve seat, the step S5 is used for setting the adjusting wheel on the valve cover, and the adjusting wheel is connected with the adjusting feed rod of the adjusting rod group. More specifically, the assembly method may further include determining the number of rotations of the regulating wheel from the valve-open state to the valve-closed state in step S6.
Referring to fig. 7, 3 and 4, referring to step S1, the adjusting lever 51 is associated with the adjusting lever 52 to form an adjusting lever set 50; in an example, the outer screw portion 52b of the adjusting retraction lever 52 is screwed into the inner screw hole 51c of the adjusting retraction lever 51; specifically, the degree of correlation between the adjusting retraction lever 52 and the adjusting insertion lever 51 reaches the bottom dead center state of the adjusting lever set 50, that is, the outer threaded portion 52b of the adjusting retraction lever 52 is screwed into the inner screw hole 51c of the adjusting insertion lever 51 to the maximum extent, so that the outer threaded portion 52b cannot be screwed any more, and the stop ring portion 52c of the adjusting retraction lever 52 and the alignment portion 51d of the adjusting insertion lever 51 reach the closest degree of mutual approaching. Further rotation of the adjustment retraction lever 52 can drive rotation of the adjustment retraction lever 51.
Referring to step S2, referring to fig. 8, 3 and 4, the adjusting rod assembly 50 is disposed in the valve cover 20, and the adjusting rod 51 of the adjusting rod assembly 50 is connected to the axial hole of the valve cover 20 until the adjusting rod 52 is located at the maximum top dead center; in an example, in a bottom dead center state, when the adjustment retreat lever 52 is rotated, the adjustment advancement lever 51 is also rotated, and the external thread 51b of the adjustment advancement lever 51 is screwed to the inner screw portion 24 of the valve cover. In the top dead center state of the adjustment lever set 50, the retainer ring portion 52c of the adjustment withdrawal lever 52 abuts against the lower edge of the first correction hole 26 (corresponding to the upper edge of the second correction hole 27). Before the adjusting retraction lever 52 is not limited, the adjusting retraction lever 52 can freely rotate and slide in the second correction hole 27. Based on the top dead center state and the bottom dead center state, if the adjusting withdrawal lever 52 is limited to the valve cover 20 in advance, the adjusting withdrawal lever 52 cannot freely rotate nor slide in the second correction hole 27. Therefore, after the adjusting rod set 50 reaches the top dead center state, the adjusting feed rod 51 may be fixed first, and then the adjusting return rod 52 is reversely rotated out, the number of reverse rotation of the adjusting return rod 52 is specifically 10-50, more specifically 15-25, and in this example 20, so as to define the precise adjusting valve in advance during the assembly process, and the number of rotation of the adjusting wheel 40 is an operable value.
Referring to step S3, referring to fig. 9, 3 and 4, a diaphragm valve plate 30 is disposed at one end of the adjusting retraction lever 52 of the adjusting lever set 50; the elastic member 70 and the support block 60 should be disposed before the diaphragm valve plate 30 is disposed. The pressing block rotation preventing portion 61 of the supporting pressing block 60 makes the supporting pressing block 60 not rotatable relative to the valve cover 20, and the withdrawal rod rotation preventing hole 63 of the supporting pressing block 60 is sleeved and limited by the withdrawal rod rotation preventing portion 52a of the adjusting withdrawal rod 52, so that the adjusting withdrawal rod 52 is not rotatable relative to the supporting pressing block 60. The valve connecting end 52d of the adjusting retreat rod 52 is coupled to a connecting hole of the diaphragm valve plate 30 to the valve head 31.
Referring to step S4, referring to fig. 10, 3 and 4, the valve cover 20 is coupled to the valve seat 10; in this example, the coupling of the valve cover 20 and the valve seat 10 may be accomplished by a plurality of coupling rods 83 (shown in fig. 3) passing through corresponding through holes of the valve cover 20, the valve seat 10 and the base 90 from top to bottom, and coupling to corresponding coupling nuts 84 (shown in fig. 3) that may be provided in the base 90. In this step S4, the axial cone 32 of the diaphragm valve plate 30 is already aligned in the axial port 14 of the valve seat 10. In more specific examples, as shown in fig. 3, the coupling rod 83 may pass through the elastic pad 88 and the washer 87 before passing through the corresponding through hole of the valve cover 20, so as to increase the coupling elastic force and avoid the occurrence of the coupling loosening. After the coupling rod 83 is used to couple the valve cover 20 with the valve seat 10, the coupling rod 83 may be provided with a first end plug 85 (shown in fig. 3) at the outer end of the head; the coupling nut 84 may be provided at its outer end with a second end plug 86 (as shown in fig. 3) to provide corrosion protection and valve body integrity to the first end plug 85 and the second end plug 86 to provide protection against acid gases at both ends of the coupling rod 83.
Referring to fig. 11, 3 and 4, an adjusting wheel 40 is disposed on the valve cover 20, and the adjusting wheel 40 is connected to the adjusting rod 51 of the adjusting rod set 50. In this step S5, the synchronizing lever portion 41 of the adjusting wheel 40 is slidably guided in the coaxial shaft hole 51a of the adjusting lever 51. In the rotation mode, the locking pin 43 of the adjusting wheel 40 is slidably locked in the rotation groove 22 of the valve cover 20; in the stop mode, the locking pin 43 of the adjusting wheel 40 is slidably engaged with the stop groove 23 of the valve cover 20, the stop tooth catch 42 of the adjusting wheel 40 is engaged with the stop tooth slot 21 of the valve cover 20, and the adjusting wheel 40 is non-rotatable relative to the valve cover 20. Specifically, the operation is switched to the stop mode by pressing the regulating wheel 40, and the operation is switched to the rotation mode by pulling out the regulating wheel 40.
The method of the invention is exemplified by the implementation principle that a manual regulating valve is manufactured by utilizing a series of assembling steps S1-S5; the operation of step S2 can prevent the adjustment feed lever 51 from being disengaged from the adjustment return lever 52 when the adjustment return lever 52 is in the top dead center state.
In a preferred example, the assembly method further comprises: step S6, firstly, the adjusting rod is adjusted to return to the upper dead point (the adjusting rod 51 rises to the maximum possible height), the adjusting wheel 40 is rotated, the adjusting rod 51 is synchronously rotated, the adjusting rod 51 rotates relative to the valve cover 20 and descends for a first distance, and the adjusting rod 52 does not rotate relative to the adjusting rod 51 and reversely rises for a second distance; continuously rotating the regulating wheel 40 until the regulating withdrawal lever 52 is positioned at the bottom dead center; the number of rotations of the regulating wheel 40 that can be actually operated during the course from the valve-open state to the valve-closed state is determined. Step S6 is a determination of the number of actually operated rotatable turns, step S2 is a theoretical predefining of the number of rotatable turns of the adjusting retraction lever 52 (corresponding to the adjusting wheel 40), the predefining value is slightly greater than or equal to the actual operation value, and if the actual operation value of step S6 is smaller than the predefining value of step S2, it may be determined that the precise adjusting valve has a larger error in assembly, and it is necessary to reassemble or redefine the predetermined value. In addition, in step S2, the number of actual operable rotations of the regulating wheel 40 may be preset, and in contrast, when the number of actual operable rotations is close to or less than the number of ideal operable rotations, the damage to the valve head 31 caused by the over-adjustment of the valve port 14 with a smaller opening degree does not occur, and the damage to the valve head 31 of the diaphragm valve plate 30 can be minimized when the valve is closed, and the manual regulating valve and the diaphragm valve plate 30 thereof have better durability.
In a preferred example, during the initial valve opening stage of step S6, the downward extension of the axial cone 32 is sufficient to not completely disengage the axial cone 32 of the diaphragm valve plate 30 from the axial port 14 of the valve seat 10. The axial cone 32 of the diaphragm valve plate 30 still does not completely separate from the axial valve port 14 in the valve opening stage, so that the fluid drainage effect from the valve opening to the valve closing is achieved; in the valve closing stage, the valve head 31 of the diaphragm valve plate 30 contacts the axial valve port 14, specifically, the valve head 31 abuts against the outer bevel 15. Since the adjusting rod set 50 has a self-stopping bottom dead center mechanism, the baffle ring portion 52c and the straightening portion 51d are close to each other and cannot rotate continuously, the outer bevel 15 does not damage the valve head 31 of the diaphragm valve plate 30 excessively, and the precise adjustment of the supply flow of the processing fluid in the semiconductor wet process can maintain a stable linear relationship for a long time.
The embodiments of the present invention are all preferred embodiments for easy understanding or implementation of the technical solution of the present invention, and are not limited in scope by the present invention, and all equivalent changes according to the structure, shape and principle of the present invention should be covered in the scope of the claimed invention.
Claims (10)
1. A manual regulator valve for a semiconductor wet process comprising:
the valve seat (10), the inside of the valve seat (10) is provided with a ring opening (13) communicated with the first flow passage (11) and an axle center valve port (14) communicated with the second flow passage (12), and the axle center valve port (14) is positioned in the ring opening (13);
the valve cover (20) is combined on the valve seat (10), an adjusting rod group (50) is connected in the valve cover (20), the valve cover (20) can provide a movable space of the adjusting rod group (50), and the adjusting rod group (50) comprises an adjusting inlet rod (51) and an adjusting outlet rod (52) which are mutually related;
the diaphragm valve plate (30) is arranged at one end of an adjusting withdrawal rod (52) of the adjusting rod group (50), the diaphragm valve plate (30) is provided with a valve head (31) positioned at the center and used for closing the axle center valve port (14), and an axle center cone (32) aligned with the axle center valve port (14) is formed below the valve head (31);
a support pressing block (60) which is limited in the valve cover (20) in an anti-rotation way and is used for abutting against the peripheral ring part (33) of the diaphragm valve plate (30) and blocking the rotation of the adjusting withdrawal rod (52);
An adjusting wheel (40) which is arranged on the valve cover (20) and is connected with an adjusting inlet rod (51) of the adjusting rod group (50) and is used for adjusting the lifting of the adjusting inlet rod (51) in the valve cover (20); the adjusting wheel (40) is a hand wheel, the adjusting wheel (40) is provided with a rotating mode and a stopping mode, in the rotating mode, along with the rotation of the adjusting wheel (40), each time the adjusting inlet rod (51) is adjusted to descend or ascend by a first distance, the adjusting outlet rod (52) synchronously and reversely ascends or descends by a second distance, the ratio of the second distance to the first distance is between 0.8 and 0.95, and the relation between the rotation number of the adjusting wheel (40) and the flow of the adjusting valve is close to linearity by combining the cone inclination of the axis cone (32);
in an initial valve opening stage, the downward extension of the axial cone (32) is sufficient to enable the axial cone (32) of the diaphragm valve plate (30) to be incompletely separated from the axial valve port (14) of the valve seat (10).
2. The manual adjustment valve according to claim 1, characterized in that the adjustment wheel (40) has a synchronous rotating rod portion (41) at the axis, inserted in a coaxial hole (51 a) of the adjustment feed rod (51); the lower edge of the wheel body of the adjusting wheel (40) is provided with a plurality of limit tooth buckles (42), and the end surface of the upper hole of the valve cover (20) is provided with a plurality of limit tooth grooves (21); the adjusting wheel (40) is provided with a plurality of clamping pins (43) at the periphery of the synchronous rotating rod part (41), and a rotating groove (22) and a stop groove (23) are formed in the inner wall of the upper hole of the valve cover (20); when the clamping pin (43) is clamped in the rotary groove (22), the limiting tooth buckle (42) is not combined with the limiting tooth groove (21), and the adjusting wheel (40) is in a rotary mode; when the clamping pin (43) is clamped in the stop groove (23), the limiting tooth buckle (42) is combined with the limiting tooth groove (21), and the regulating wheel (40) is in a stop mode; preferably, the annular arrangement number of the limit tooth grooves (21) corresponds to one circle of adjustment scale number of the adjustment wheel (40).
3. The manual adjustment valve according to claim 1, characterized in that the number of turns of the adjustment wheel (40) is operable between 10 and 50, at least two of the operable turns of the adjustment wheel (40) being in a linear relationship with the adjustment valve flow; more preferably, the number of rotations of the regulating wheel (40) is operable between 15 and 25; preferably, the ratio of the second distance to the first distance is between 0.88 and 0.92; preferably, the valve seat (10) is formed with an outer bevel (15) at the periphery of the axial valve port (14).
4. The manual adjustment valve according to claim 1, characterized in that the adjustment retraction lever (52) is in the form of a screw with a retraction lever anti-rotation portion (52 a) such that the adjustment retraction lever (52) is relatively non-rotatable lifting movement within the valve cover (20); preferably, the rod withdrawing and rotation preventing part (52 a) is clamped in a rod withdrawing and rotation preventing hole (63) of a support pressing block (60) arranged in the valve cover (20), and the support pressing block (60) is non-rotatable relative to the valve cover (20).
5. The manual adjustment valve according to claim 4, characterized in that the adjustment feed rod (51) is in the form of a hollow screw sleeve with an external screw thread (51 b) at a first screw pitch and an internal screw thread (51 c) at a second screw pitch, the second screw pitch having a screw pitch difference slightly smaller than the first screw pitch, the external screw thread (51 b) being for screwing the internal screw thread (24) of the valve cap (20), the internal screw thread (51 c) being for screwing the external screw thread (52 b) of the adjustment withdrawal rod (52); the external thread (51 b) and the internal thread hole (51 c) have the same thread direction, and the ratio of the second thread pitch to the first thread pitch is the same as the ratio of the second distance to the first distance; the adjusting inlet rod (51) is in relative rotatable lifting movement in the valve cover (20), and the lifting height change of the adjusting inlet rod (51) is positively correlated with the rotation circle number of the adjusting wheel (40).
6. Manual adjustment valve according to claim 1, characterized in that the valve seat (10) is provided with a raised rim (16) at the outer edge of the ring opening (13) to limit the peripheral ring portion (33) of the diaphragm valve plate (30).
7. The manual adjustment valve according to any one of claims 1-6, further comprising:
the elastic piece (70) is arranged on the supporting pressing block (60) and is used for providing the downward pressure of the supporting pressing block (60) on the peripheral ring part (33) of the diaphragm valve plate (30) and providing the upward thrust of the adjusting retreating rod (52).
8. The manual adjustment valve according to claim 7, characterized in that the support ram (60) has a ram anti-rotation portion (61) such that the support ram (60) is in a relatively non-rotatable and non-liftable limit relationship within the valve cap (20); preferably, the support block (60) also has a plurality of vent holes (62), one vent hole (62) being aligned with the vent hole (25) of the valve cover (20); preferably, the adjusting withdrawal lever (52) has a stop ring portion (52 c), one end of the elastic member (70) is applied to the stop ring portion (52 c), and the other end of the elastic member (70) is limited in a ring groove of the supporting press block (60); more preferably, the adjusting inlet rod (51) is provided with a straightening part (51 d), the valve cover (20) is provided with a first straightening hole (26) for the straightening part (51 d) to axially slide in a spiral mode, the valve cover (20) is also provided with a second straightening hole (27) for the baffle ring part (52 c) to axially slide in a non-rotating mode, and the aperture of the second straightening hole (27) is larger than that of the first straightening hole (26), so that the bottom edge of the first straightening hole (26) can prevent the baffle ring part (52 c) of the adjusting outlet rod (52) from rising.
9. A production facility for a semiconductor wet process comprising a manual regulator valve according to any one of claims 1-8.
10. A method of assembling a manual adjustment valve as claimed in any one of claims 1 to 8, comprising:
s1, associating an adjusting inlet rod (51) with an adjusting outlet rod (52) to form an adjusting rod group (50);
s2, setting the adjusting rod group (50) into the valve cover (20), wherein an adjusting inlet rod (51) of the adjusting rod group (50) is connected to an axle center hole of the valve cover (20) until the adjusting outlet rod (52) is positioned at the maximum top dead center;
s3, arranging a diaphragm valve plate (30) at one end of the adjusting withdrawal rod (52) of the adjusting rod group (50); before the diaphragm valve plate 30 is arranged, a supporting press block (60) is arranged in the valve cover (20), a press block rotation preventing part 61 of the supporting press block (60) enables the supporting press block (60) to be non-rotatable relative to the valve cover (20), a rod withdrawing rotation preventing hole (63) of the supporting press block (60) is sleeved and limited by a rod withdrawing rotation preventing part (52 a) of the adjusting withdrawing rod (52), and the adjusting withdrawing rod (52) is non-rotatable relative to the supporting press block (60);
S4, combining the valve cover (20) to the valve seat (10);
s5, setting an adjusting wheel (40) on the valve cover (20), wherein the adjusting wheel (40) is connected with an adjusting inlet rod (51) of the adjusting rod group (50), and the adjusting wheel (40) is a hand wheel;
s6, rotating the adjusting wheel (40), synchronously rotating the adjusting inlet rod (51), enabling the adjusting inlet rod (51) to rotate relative to the valve cover (20) and descend by a first distance, and enabling the adjusting outlet rod (52) to not rotate relative to the adjusting inlet rod (51) and reversely ascend by a second distance; continuously rotating the adjusting wheel (40) until the adjusting retreating lever (52) is positioned at the bottom dead center; determining the number of rotations of the regulating wheel (40) from a valve-open state to a valve-closed state;
in the initial valve opening stage of step S6, the downward extension of the axial cone (32) is sufficient to make the axial cone (32) of the diaphragm valve plate (30) not completely separate from the axial valve port (14) of the valve seat (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410032089.3A CN117605842A (en) | 2023-09-28 | 2023-09-28 | Manual regulating valve for semiconductor wet process and assembling method thereof |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311275936.0A CN116989147B (en) | 2023-09-28 | 2023-09-28 | Precise flow regulating valve and assembling method thereof |
| CN202410032089.3A CN117605842A (en) | 2023-09-28 | 2023-09-28 | Manual regulating valve for semiconductor wet process and assembling method thereof |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311275936.0A Division CN116989147B (en) | 2023-09-28 | 2023-09-28 | Precise flow regulating valve and assembling method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117605842A true CN117605842A (en) | 2024-02-27 |
Family
ID=88521808
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311275936.0A Active CN116989147B (en) | 2023-09-28 | 2023-09-28 | Precise flow regulating valve and assembling method thereof |
| CN202410032089.3A Pending CN117605842A (en) | 2023-09-28 | 2023-09-28 | Manual regulating valve for semiconductor wet process and assembling method thereof |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311275936.0A Active CN116989147B (en) | 2023-09-28 | 2023-09-28 | Precise flow regulating valve and assembling method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (2) | CN116989147B (en) |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4247386B2 (en) * | 2003-11-28 | 2009-04-02 | 旭有機材工業株式会社 | Flow control valve |
| JP4667964B2 (en) * | 2005-05-31 | 2011-04-13 | シーケーディ株式会社 | Flow control valve |
| CN101718369B (en) * | 2009-12-16 | 2011-01-26 | 黄幼华 | Valve knob |
| CN104728459A (en) * | 2015-02-12 | 2015-06-24 | 诸暨市亿霸电子阀门有限公司 | Numerical control flow valve adjusting structure and adjusting mode thereof |
| JP6676432B2 (en) * | 2016-03-28 | 2020-04-08 | 株式会社不二工機 | Electric valve and method of assembling the same |
| CN106438657A (en) * | 2016-12-07 | 2017-02-22 | 石文祥 | Thread pitch interference fit thread, threaded connector and corrected thread machining tool |
| CN209483960U (en) * | 2018-12-04 | 2019-10-11 | 西安石油大学 | A kind of needle valve quantitatively adjusted |
| CN209622098U (en) * | 2019-03-08 | 2019-11-12 | 侯阜国 | A kind of ball arm integrated valve |
| CN113280138A (en) * | 2021-07-09 | 2021-08-20 | 东莞市迈沃科技发展有限公司 | Throttle valve and electric throttle valve |
| CN219159685U (en) * | 2022-11-14 | 2023-06-09 | 泉州市里维斯精密五金有限公司 | Improved flow regulating valve |
-
2023
- 2023-09-28 CN CN202311275936.0A patent/CN116989147B/en active Active
- 2023-09-28 CN CN202410032089.3A patent/CN117605842A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| CN116989147B (en) | 2023-12-01 |
| CN116989147A (en) | 2023-11-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5439197A (en) | Flow rate control valve | |
| DE10349222B4 (en) | pumping device | |
| US8573247B2 (en) | Flow-rate controller, and regulator unit and valve unit used for the same | |
| US8104742B2 (en) | Flow control valve | |
| KR101013441B1 (en) | Pinch valve | |
| US8882078B2 (en) | Flow rate control valve and assembly method therefor | |
| KR101282925B1 (en) | Flow control valve | |
| US7070066B2 (en) | Liquid dispensing valve and method with improved stroke length calibration and fluid fittings | |
| US7464723B2 (en) | Non-return valve | |
| EP2527696B1 (en) | Flow control device | |
| WO2016104203A1 (en) | Fluid controller | |
| US20060197049A1 (en) | Fluid operating valve | |
| US20170002931A1 (en) | Electronic expansion valve | |
| US8205630B2 (en) | Low pressure relief valve and method of manufacturing same | |
| CN116989147B (en) | Precise flow regulating valve and assembling method thereof | |
| GB2324133A (en) | Suck back valve | |
| CN215408589U (en) | Adjustable water distributor | |
| JP4667964B2 (en) | Flow control valve | |
| KR101919678B1 (en) | Fluid controller | |
| US20070001137A1 (en) | Precision metering valve | |
| US6540205B1 (en) | Fine-adjustment flow control valve | |
| US6244566B1 (en) | Valve assembly | |
| CN104879541A (en) | Proportioning valve | |
| CN114658904B (en) | Gas pressure stabilizing valve | |
| CN212491137U (en) | Pressure-adjustable medical pressure retaining valve |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |