CN117590616A - Integrated alignment method and auxiliary device for micro-lens array and infrared detector - Google Patents
Integrated alignment method and auxiliary device for micro-lens array and infrared detector Download PDFInfo
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- CN117590616A CN117590616A CN202311613595.3A CN202311613595A CN117590616A CN 117590616 A CN117590616 A CN 117590616A CN 202311613595 A CN202311613595 A CN 202311613595A CN 117590616 A CN117590616 A CN 117590616A
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- 238000004806 packaging method and process Methods 0.000 claims description 3
- 238000010521 absorption reaction Methods 0.000 claims description 2
- 230000008569 process Effects 0.000 abstract description 6
- 238000004088 simulation Methods 0.000 abstract description 4
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/62—Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
The invention relates to an integrated alignment method and an auxiliary device of a micro-lens array and an infrared detector, which do not need to process alignment marks separately, so that the manufacturing cost is saved, and the defect of poor optical performance of the integrated detector caused by the processing error of the alignment marks between a lens and a chip is eliminated; the method performs alignment through light path simulation, has higher positioning precision, more accords with the optical performance requirement, and has more convenient operation, low repeated operation difficulty and quick adjustment.
Description
Technical Field
The invention relates to the field of infrared detection systems, in particular to an integrated alignment method and an auxiliary device for a micro-lens array and an infrared detector.
Background
The conception of the micro lens array is derived from a compound eye structure in bionics, and certain optical performance can be realized by adjusting the shape, focal length, arrangement structure mode, duty ratio and the like of the micro lenses in the micro lens array, so that the integration level and performance of an optical system are improved. With the continuous iterative development of the optical field, a micro-lens array lens is becoming an integral part of most optical systems, and is widely applied to the fields of digital projectors, HUD imaging systems, laser radar systems, illumination systems, infrared detection systems and the like. In the infrared detection system, the alignment (as shown in fig. 1) matching degree between the array subunit of the micro lens and the pixel of the infrared detector chip directly influences the optical performance of the integrated detector. By means of the traditional physical alignment method (as shown in fig. 2), the process is complex, alignment errors are large, and the existing precision requirements cannot be met. Therefore, it is necessary to develop a para-position method with more convenient operation and higher precision so as to ensure the optical performance of the infrared detection system.
Disclosure of Invention
The invention aims to provide an integrated alignment method and an auxiliary device for a micro-lens array and an infrared detector.
In order to achieve the above purpose, the technical scheme adopted by the invention is as follows: an integrated alignment method of a micro lens array and an infrared detector comprises the following steps:
s1, respectively selecting a lens replaceable bearing plate and a chip replaceable bearing plate which are matched with a micro lens array lens and a detector chip, and then arranging the lens replaceable bearing plate and the chip replaceable bearing plate in opposite directions and respectively fixing the lens replaceable bearing plate and the chip replaceable bearing plate on the lower side of a lens adjusting mechanism of an auxiliary device and the upper side of a chip adjusting mechanism of the auxiliary device;
s2, a standard block is placed between the lens replaceable bearing plate and the chip replaceable bearing plate, and the height of the lens replaceable bearing plate is adjusted to be in contact with the standard block;
s3, adjusting the inclination angle of the chip replaceable bearing plate, and adjusting the chip replaceable bearing plate and the lens replaceable bearing plate to be in a parallel state;
s4, adjusting the height of the lens replaceable bearing plate, taking out the standard block, and respectively placing the micro lens array lens and the detector chip on the lens replaceable bearing plate and the chip replaceable bearing plate and aligning with the positioning columns on the corresponding bearing plates;
s5, adjusting the position of the detector chip in the horizontal X, Y coordinate direction, and adjusting the XY coordinate positions of the detector chip and the micro lens array lens to be in a general alignment state;
s6, turning on a computer and an infrared light source emitter of the auxiliary device, and lighting up a detector chip, and adjusting the auxiliary device to enable the micro lens array lens to be accurately aligned with the detector chip by simulating the receiving state of an optical path image point formed between the infrared standard lens of the auxiliary device and the micro lens array lens on the detector chip;
and S7, after alignment is completed, packaging and fixing the micro lens array lens and the detector chip.
Further, in step S4, the microlens array lens is fixed to the underside of the lens replaceable support plate by the suction of the ineffective area around the array structure area.
Further, the adjustment of step S5 is performed only once when the support plate is replaced; and when the same type of microlens array lens and the detector chip are aligned again, the adjustment of the step S5 is not performed, the microlens array lens and the detector chip are directly aligned to the positioning columns on the corresponding bearing plates for quick positioning, and then the accurate alignment of the step S6 is performed.
Further, in step S6, the adjusting auxiliary device makes the microlens array lens and the detector chip perform accurate alignment, and specifically includes the following steps:
1) The heights of the infrared standard lens, the micro lens array lens and the detector chip are adjusted, and the focal lengths of the infrared standard lens and the micro lens array lens are adjusted until the image surfaces are concentrated;
2) Adjusting the inclination angle of the detector chip, and finely adjusting the parallelism between the detector chip and the lens of the micro-lens array;
3) And (3) carrying out XY coordinate position adjustment and rotation adjustment on the detector chip, and carrying out fine adjustment on plane position deviation between the detector chip and the micro-lens array lens, so as to realize accurate alignment of the micro-lens array lens and the detector chip.
The invention also provides an integrated alignment auxiliary device for realizing the integrated alignment method, which comprises a lens adjusting mechanism provided with an infrared standard lens, a lens adjusting mechanism, a chip adjusting mechanism, an infrared light source emitter, a computer and a vacuum generator, wherein the chip adjusting mechanism, the lens adjusting mechanism and the infrared light source emitter are sequentially arranged from bottom to top, and the lens adjusting mechanism can vertically move up and down;
the infrared light source emitter is used for emitting an infrared light source, and lighting the detector chip, so that the receiving state of an optical path image point formed between the infrared standard lens and the micro lens array lens on the detector chip is simulated;
the lens adjusting mechanism is used for connecting the lens replaceable bearing plate and the micro lens array lens and adjusting the vertical height of the lens replaceable bearing plate and the micro lens array lens;
the chip adjusting mechanism is used for connecting the chip replaceable bearing plate and the detector chip and adjusting the inclination angle of the chip replaceable bearing plate and the detector chip, the position in the horizontal X, Y coordinate direction and the rotation angle;
the computer is provided with light path simulation software to receive and display the receiving state of light path image points formed between the infrared standard lens and the micro lens array lens on the detector chip;
the vacuum generator is used for generating negative pressure and adsorbing the micro lens array lens on the lower side surface of the lens replaceable bearing plate.
Further, the lens adjusting mechanism is provided with a lens connecting plate which is connected with the Z-axis upright post, the center of the lens connecting plate is provided with a threaded hole which is connected with the infrared standard lens, the side surface of the lens connecting plate is provided with a lens Z-axis adjusting knob, the inner side of the lens connecting plate is provided with a gear which is connected with a Z-axis sliding tooth on the Z-axis upright post and used for adjusting the focal length between the infrared standard lens and the micro lens array lens;
the lens adjusting mechanism is provided with a lens connecting plate which is connected with the Z-axis upright post, the center of the lens connecting plate is provided with a light passing hole, the side surface of the lens connecting plate is provided with a lens Z-axis adjusting knob, the inner side of the lens connecting plate is provided with a gear which is connected with a Z-axis sliding tooth on the Z-axis upright post and used for adjusting the focal length between the infrared standard lens and the micro lens array lens; the lens connecting plate is provided with a threaded hole and is fixedly connected with the lens replaceable bearing plate; the lens replaceable bearing plate is provided with a positioning column for positioning the lens of the micro lens array, the lower side of the lens replaceable bearing plate is provided with an air suction hole, the side surface of the lens replaceable bearing plate is provided with an air suction joint, the air suction hole is communicated with the air suction joint through an internal air flow channel, and the air suction joint is connected with the vacuum generator and used for adsorbing and fixing the lens of the micro lens array;
the chip adjusting mechanism is provided with a bottom bearing plate which is fixedly connected with the workbench by using screws; the upper part of the bottom bearing plate is provided with a Z-axis adjusting device, the Z-axis adjusting device is provided with a Z-axis fine adjustment knob for accurate adjustment during focusing, and the side surface of the Z-axis adjusting device is provided with a Z-axis fixing knob for locking and fixing after focusing adjustment is completed; the upper part of the Z-axis adjusting device is provided with an inclination adjusting device, and an inclination adjusting knob-alpha and an inclination adjusting knob-beta are arranged on an inclination adjusting connecting plate of the Z-axis adjusting device and are used for adjusting the inclination angle between the lens of the micro lens array and the detector chip; an X/Y precise adjusting platform is arranged above the inclination adjusting device, and an X/Y adjusting knob, a Y axis adjusting knob and an X/Y axis fixing knob are arranged on an X/Y adjusting connecting plate and used for moving and fixing the X/Y position during alignment; the X/Y precise adjustment platform is provided with a C-axis rotation platform, and is provided with a C-axis adjustment knob and a C-axis fixing knob for plane rotation adjustment during alignment; the C-axis rotating platform is provided with a threaded hole and is fixedly connected with the chip replaceable bearing plate; and a positioning column is arranged on the chip replaceable bearing plate and used for positioning the detector chip.
Further, a plurality of air suction holes are formed in the lower side face of the replaceable lens bearing plate, and the positions of the air suction holes correspond to the positions of ineffective areas around the array structure area of the micro lens array lens.
Compared with the prior art, the invention has the following beneficial effects: compared with the traditional alignment method, the method does not need to process the alignment mark independently, thereby saving the manufacturing cost and eliminating the poor optical performance of the integrated detector caused by the processing error of the alignment mark between the lens and the chip; the method performs alignment through light path simulation, has higher physical positioning precision than the traditional method, meets the optical performance requirement, and has the advantages of more convenient operation, low repeated operation difficulty and quick adjustment. Therefore, the invention has strong practicability and wide application prospect.
Drawings
FIG. 1 is a schematic diagram of a prior art alignment of a microlens array with a detector pixel;
FIG. 2 is a schematic diagram of a conventional physical alignment method;
FIG. 3 is a schematic view of an auxiliary device according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of adjusting the chip replaceable support plate and the lens replaceable support plate to be parallel in an embodiment of the invention;
FIG. 5 is a schematic view of alignment of a microlens array lens, a detector chip, and positioning posts on corresponding support plates in an embodiment of the present invention;
FIG. 6 is a schematic diagram of an optical path simulation in an embodiment of the present invention;
FIG. 7 is a schematic diagram of a sub-unit on a shielded detector chip in an embodiment of the invention;
FIG. 8 is a schematic diagram of adjusting the focal length of an infrared standard lens to a lens of a micro lens array according to an embodiment of the present invention;
FIG. 9 is a schematic diagram of fine tuning of parallelism between a detector chip and a microlens array lens in an embodiment of the present invention;
FIG. 10 is a schematic diagram of fine tuning of the planar positional deviation between a detector chip and a microlens array lens in an embodiment of the present invention;
in the figure: 1-a screw; 2-a bottom carrier plate; 3-Z axis fixed knob; 4-a tilt adjustment connection plate; 5-tilt adjustment knob- α;6-X/Y axis fixing knob; 7-X axis adjusting knob; 8-tilt adjustment knob- β;9-X/Y adjusting connection plates; 10-Y axis adjusting knob; 11-C shaft fixing knob; a 12-C axis adjustment knob; 13-C axis rotating platform; 14-chip replaceable support plate; 15-a detector chip; a 16-Z axis upright post; 17-Z axis sliding teeth; 18-a microlens array optic; 19-a replaceable lens support plate; 20-lens Z-axis adjustment knob; 21-an air suction connector; 22-a lens connection plate; 23-a lens Z-axis adjusting knob; 24-infrared standard lens; 25-Z axis limit screws; 26-Z axis fine tuning knob; 27-a lens connecting plate.
Detailed Description
The invention will be further described with reference to the accompanying drawings and examples.
It should be noted that the following detailed description is exemplary and is intended to provide further explanation of the present application. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments in accordance with the present application. As used herein, the singular is also intended to include the plural unless the context clearly indicates otherwise, and furthermore, it is to be understood that the terms "comprises" and/or "comprising" when used in this specification are taken to specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof.
As shown in fig. 3, this embodiment provides an integrated alignment auxiliary device for a micro lens array and an infrared detector, which includes a lens adjusting mechanism provided with an infrared standard lens, a lens adjusting mechanism, a chip adjusting mechanism, an infrared light source emitter, a computer and a vacuum generator, wherein the chip adjusting mechanism, the lens adjusting mechanism and the infrared light source emitter are sequentially arranged from bottom to top, and the lens adjusting mechanism can move vertically. The infrared light source emitter is used for emitting infrared light sources, and lighting the detector chip, so that the receiving state of light path image points formed between the infrared standard lens and the micro lens array lens on the detector chip is simulated. The lens adjusting mechanism is used for connecting the lens replaceable bearing plate and the micro lens array lens and adjusting the vertical height of the lens replaceable bearing plate and the micro lens array lens. The chip adjusting mechanism is used for connecting the chip replaceable bearing plate and the detector chip and adjusting the inclination angle of the chip replaceable bearing plate and the detector chip, the position in the horizontal X, Y coordinate direction and the rotation angle. The computer is connected with the detector chip to receive and display the receiving state of the light path image point formed between the infrared standard lens and the micro lens array lens on the detector chip. The computer is connected with the imaging system of the infrared standard lens, the detector chip receives the state of the light path image point, and the receiving state of the light path formed between the infrared standard lens and the micro lens array lens and focused on the chip is transferred to the computer. The vacuum generator is used for generating negative pressure and adsorbing the micro lens array lens on the lower side surface of the lens replaceable bearing plate.
Specifically, the lens adjusting mechanism is provided with a lens connecting plate 27, which is connected with the Z-axis upright post 16, the center of the lens connecting plate 27 is provided with a threaded hole, which is connected with the infrared standard lens 24, the side surface of the lens connecting plate 27 is provided with a lens Z-axis adjusting knob 23, the inner side is provided with a gear, which is connected with the Z-axis sliding tooth 17 on the Z-axis upright post 16, and is used for adjusting the focal length between the infrared standard lens and the micro lens array lens.
The lens adjusting mechanism is provided with a lens connecting plate 22 which is connected with the Z-axis upright post 16, the center of the lens connecting plate 22 is provided with a light passing hole, the side surface of the lens connecting plate 22 is provided with a lens Z-axis adjusting knob 20, the inner side of the lens connecting plate is provided with a gear which is connected with a Z-axis sliding tooth 17 on the Z-axis upright post 16 and used for adjusting the focal length between an infrared standard lens and a micro lens array lens; the lens connecting plate 22 is provided with a threaded hole and is fixedly connected with the lens replaceable bearing plate 19; the lens replaceable bearing plate 19 is provided with a positioning column for positioning the lens of the micro lens array, the lower side of the lens replaceable bearing plate 19 is provided with a plurality of air suction holes, the side face of the lens replaceable bearing plate is provided with an air suction connector 21, the air suction holes are communicated with the air suction connector 21 through an internal air flow channel, and the air suction connector 21 is connected with a vacuum generator and used for adsorbing and fixing the lens of the micro lens array. Wherein, the position of the air suction hole corresponds to the position of an ineffective area around the array structure area of the micro lens array lens.
The chip adjusting mechanism is provided with a bottom carrier plate 2 which is fixedly connected with the workbench by using screws 1; the upper part of the bottom bearing plate 2 is provided with a Z-axis adjusting device, the Z-axis adjusting device is provided with a Z-axis fine adjustment knob 26 for accurate adjustment during focusing, and the side surface of the Z-axis adjusting device is provided with a Z-axis fixing knob 3 for locking and fixing after focusing adjustment is completed; the upper part of the Z-axis adjusting device is provided with an inclination adjusting device, and an inclination adjusting knob-alpha 5 and an inclination adjusting knob-beta 8 are arranged on an inclination adjusting connecting plate 4 and used for adjusting the inclination angle between the lens of the micro lens array and the detector chip; an X/Y precise adjusting platform is arranged above the inclination adjusting device, and an X/Y adjusting knob 7, a Y adjusting knob 10 and an X/Y fixing knob 6 are arranged on an X/Y adjusting connecting plate 9 and used for moving and fixing the X/Y position during alignment; the X/Y precise adjustment platform is provided with a C-axis rotation platform 13, and is provided with a C-axis adjustment knob 12 and a C-axis fixing knob 11 for plane rotation adjustment during alignment; the C-axis rotating platform 13 is provided with a threaded hole which is fixedly connected with the chip replaceable bearing plate 14; the replaceable chip support plate 14 is provided with positioning posts for positioning the detector chip.
Based on the auxiliary device, the integrated alignment method for the micro lens array and the infrared detector is realized, and specifically comprises the following steps:
s1, fixing an auxiliary device; and then the lens replaceable bearing plate and the chip replaceable bearing plate are oppositely arranged and respectively fixed on the lower side of a lens adjusting mechanism of the auxiliary device and the upper side of a chip adjusting mechanism of the auxiliary device.
S2, a standard block is placed between the lens replaceable bearing plate and the chip replaceable bearing plate, and the height of the lens replaceable bearing plate (the lens Z-axis adjusting knob is adjusted) is adjusted so that the lens replaceable bearing plate contacts with the standard block.
S3, adjusting the inclination angle of the chip replaceable bearing plate (adjusting the inclination adjusting knob alpha/beta), and adjusting the chip replaceable bearing plate and the lens replaceable bearing plate to be in a parallel state, as shown in fig. 4.
S4, adjusting the height of the lens replaceable bearing plate (adjusting the lens Z-axis adjusting knob), taking out the standard block, and then respectively placing the micro lens array lens and the detector chip on the lens replaceable bearing plate and the chip replaceable bearing plate and aligning with the positioning columns on the corresponding bearing plates, as shown in FIG. 5. Wherein, the micro lens array lens is fixed on the lower side of the lens replaceable bearing plate through the absorption of the ineffective area around the array structure area. The bottom of the detector chip is directly supported on the replaceable chip supporting plate, and no additional fixing is needed. Because the lower platforms of the replaceable support plates of the chips are all precise fine tuning knobs, the detector chips cannot deviate in the adjusting process.
S5, adjusting the position of the detector chip in the horizontal X, Y coordinate direction (adjusting an X/Y axis adjusting knob), and adjusting the XY coordinate positions of the detector chip and the micro lens array lens to be in a rough alignment state, namely adjusting the position deviation between the detector chip and the micro lens array lens to be within a set error range so as to further accurately adjust and position in the next step.
The adjustment of step S5 is performed only once when the support plate is replaced. And when the same type of microlens array lens and the detector chip are aligned again, the adjustment of the step S5 is not performed, the microlens array lens and the detector chip are directly aligned to the positioning columns on the corresponding bearing plates for quick positioning, and then the accurate alignment of the step S6 is performed.
S6, opening a computer and an infrared light source emitter of the auxiliary device, and lighting the detector chip, and adjusting each axis knob in the auxiliary device to enable the micro lens array lens to be accurately aligned with the detector chip through simulating the receiving state of light path image points formed between the infrared standard lens of the auxiliary device and the micro lens array lens on the detector chip. The schematic diagram of the optical path simulation is shown in fig. 6. The specific steps for adjusting the auxiliary device to accurately align the microlens array lens with the detector chip are as follows.
For ease of illustration, the following adjustment steps are illustrated in four small units. In the actual alignment process, if there are more subunits, the observation is inconvenient, and the sub-units on the chip can be blocked, and a small part of the sub-units are kept for alignment, as shown in fig. 7. But the shielding scheme is not limited to these three ways.
1) The heights of the infrared standard lens, the micro lens array lens and the detector chip (the Z-axis adjusting knob of the adjusting lens, the Z-axis adjusting knob of the lens and the Z-axis fine adjusting knob) are adjusted, and the focal length of the infrared standard lens on the micro lens array lens is adjusted until the image surface is concentrated, as shown in fig. 8. In the focusing process, the height of the infrared standard lens (different lenses and curvatures) is generally adjusted, and the heights of the micro lens array lens and the detector chip can be adjusted until focusing is realized.
2) The tilt angle of the detector chip is adjusted to fine tune the parallelism between the detector chip and the lens of the microlens array, as shown in fig. 9.
3) The XY coordinate position adjustment and the rotation adjustment are performed on the detector chip, and the plane position deviation between the detector chip and the microlens array lens is finely adjusted, as shown in fig. 10, so that the precise alignment of the microlens array lens and the detector chip is realized.
And S7, after alignment is completed, packaging and fixing the micro lens array lens and the detector chip.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the invention in any way, and any person skilled in the art may make modifications or alterations to the disclosed technical content to the equivalent embodiments. However, any simple modification, equivalent variation and variation of the above embodiments according to the technical substance of the present invention still fall within the protection scope of the technical solution of the present invention.
Claims (7)
1. The integrated alignment method of the micro-lens array and the infrared detector is characterized by comprising the following steps of:
s1, respectively selecting a lens replaceable bearing plate and a chip replaceable bearing plate which are matched with a micro lens array lens and a detector chip, and then arranging the lens replaceable bearing plate and the chip replaceable bearing plate in opposite directions and respectively fixing the lens replaceable bearing plate and the chip replaceable bearing plate on the lower side of a lens adjusting mechanism of an auxiliary device and the upper side of a chip adjusting mechanism of the auxiliary device;
s2, a standard block is placed between the lens replaceable bearing plate and the chip replaceable bearing plate, and the height of the lens replaceable bearing plate is adjusted to be in contact with the standard block;
s3, adjusting the inclination angle of the chip replaceable bearing plate, and adjusting the chip replaceable bearing plate and the lens replaceable bearing plate to be in a parallel state;
s4, adjusting the height of the lens replaceable bearing plate, taking out the standard block, and respectively placing the micro lens array lens and the detector chip on the lens replaceable bearing plate and the chip replaceable bearing plate and aligning with the positioning columns on the corresponding bearing plates;
s5, adjusting the position of the detector chip in the horizontal X, Y coordinate direction, and adjusting the XY coordinate positions of the detector chip and the micro lens array lens to be in a general alignment state;
s6, turning on a computer and an infrared light source emitter of the auxiliary device, and lighting up a detector chip, and adjusting the auxiliary device to enable the micro lens array lens to be accurately aligned with the detector chip by simulating the receiving state of an optical path image point formed between the infrared standard lens of the auxiliary device and the micro lens array lens on the detector chip;
and S7, after alignment is completed, packaging and fixing the micro lens array lens and the detector chip.
2. The method of claim 1, wherein in step S4, the lens of the microlens array is fixed to the underside of the lens replaceable support plate by the absorption of an ineffective area around the array structure area.
3. The method of integrated alignment of a microlens array and an infrared detector according to claim 1, wherein the adjustment of step S5 is performed only once when the support plate is replaced; and when the same type of microlens array lens and the detector chip are aligned again, the adjustment of the step S5 is not performed, the microlens array lens and the detector chip are directly aligned to the positioning columns on the corresponding bearing plates for quick positioning, and then the accurate alignment of the step S6 is performed.
4. The method for integrated alignment of a microlens array and an infrared detector according to claim 1, wherein in step S6, the adjustment assisting device makes the lens of the microlens array and the detector chip perform accurate alignment, and specifically comprises the following steps:
1) The heights of the infrared standard lens, the micro lens array lens and the detector chip are adjusted, and the focal lengths of the infrared standard lens and the micro lens array lens are adjusted until the image surfaces are concentrated;
2) Adjusting the inclination angle of the detector chip, and finely adjusting the parallelism between the detector chip and the lens of the micro-lens array;
3) And (3) carrying out XY coordinate position adjustment and rotation adjustment on the detector chip, and carrying out fine adjustment on plane position deviation between the detector chip and the micro-lens array lens, so as to realize accurate alignment of the micro-lens array lens and the detector chip.
5. An integrated alignment auxiliary device for realizing the integrated alignment method according to any one of claims 1-4, comprising a lens adjusting mechanism provided with an infrared standard lens, a lens adjusting mechanism, a chip adjusting mechanism, an infrared light source emitter, a computer and a vacuum generator, wherein the chip adjusting mechanism, the lens adjusting mechanism and the infrared light source emitter are sequentially arranged from bottom to top, and the lens adjusting mechanism can vertically move up and down;
the infrared light source emitter is used for emitting an infrared light source, and lighting the detector chip, so that the receiving state of an optical path image point formed between the infrared standard lens and the micro lens array lens on the detector chip is simulated;
the lens adjusting mechanism is used for connecting the lens replaceable bearing plate and the micro lens array lens and adjusting the vertical height of the lens replaceable bearing plate and the micro lens array lens;
the chip adjusting mechanism is used for connecting the chip replaceable bearing plate and the detector chip and adjusting the inclination angle of the chip replaceable bearing plate and the detector chip, the position in the horizontal X, Y coordinate direction and the rotation angle;
the computer is provided with light path simulation software to receive and display the receiving state of light path image points formed between the infrared standard lens and the micro lens array lens on the detector chip;
the vacuum generator is used for generating negative pressure and adsorbing the micro lens array lens on the lower side surface of the lens replaceable bearing plate.
6. The integrated alignment auxiliary device for the micro-lens array and the infrared detector according to claim 5, wherein the lens adjusting mechanism is provided with a lens connecting plate (27) which is connected with the Z-axis upright post (16), a threaded hole is formed in the center of the lens connecting plate (27) and is connected with an infrared standard lens (24), a lens Z-axis adjusting knob (23) is arranged on the side surface of the lens connecting plate (27), a gear is arranged on the inner side of the lens connecting plate and is connected with a Z-axis sliding tooth (17) on the Z-axis upright post (16) for adjusting the focal length between the infrared standard lens and a micro-lens array lens;
the lens adjusting mechanism is provided with a lens connecting plate (22) which is connected with the Z-axis upright post (16), the center of the lens connecting plate (22) is provided with a light passing hole, the side surface of the lens connecting plate (22) is provided with a lens Z-axis adjusting knob (20), the inner side of the lens connecting plate is provided with a gear which is connected with a Z-axis sliding tooth (17) on the Z-axis upright post (16) and used for adjusting the focal length between an infrared standard lens and a micro lens array lens; the lens connecting plate (22) is provided with a threaded hole and is fixedly connected with the lens replaceable bearing plate (19); the lens replaceable support plate (19) is provided with a positioning column for positioning the lens of the micro lens array, the lower side of the lens replaceable support plate (19) is provided with an air suction hole, the side surface of the lens replaceable support plate is provided with an air suction connector (21), the air suction hole is communicated with the air suction connector (21) through an internal air flow channel, and the air suction connector (21) is connected with a vacuum generator and used for adsorbing and fixing the lens of the micro lens array;
the chip adjusting mechanism is provided with a bottom carrier plate (2) which is fixedly connected with the workbench by using screws (1); the upper part of the bottom bearing plate (2) is provided with a Z-axis adjusting device, the Z-axis adjusting device is provided with a Z-axis fine-tuning knob (26) for accurate adjustment during focusing, and the side surface of the Z-axis adjusting device is provided with a Z-axis fixing knob (3) for locking and fixing after focusing adjustment is completed; the upper part of the Z-axis adjusting device is provided with an inclination adjusting device, and an inclination adjusting knob-alpha (5) and an inclination adjusting knob-beta (8) are arranged on an inclination adjusting connecting plate (4) for adjusting the inclination angle between the lens of the micro lens array and the detector chip; an X/Y precise adjusting platform is arranged above the inclination adjusting device, and an X/Y adjusting knob (7), a Y axis adjusting knob (10) and an X/Y axis fixing knob (6) are arranged on an X/Y adjusting connecting plate (9) for moving and fixing the X/Y position during alignment; a C-axis rotating platform (13) is arranged on the X/Y precise adjusting platform, and a C-axis adjusting knob (12) and a C-axis fixing knob (11) are arranged on the C-axis rotating platform and used for plane rotation adjustment during alignment; the C-axis rotating platform (13) is provided with a threaded hole and is fixedly connected with the chip replaceable bearing plate (14); and a positioning column is arranged on the chip replaceable bearing plate (14) and used for positioning the detector chip.
7. The integrated alignment auxiliary device for the micro-lens array and the infrared detector according to claim 6, wherein a plurality of air suction holes are formed in the lower side surface of the lens replaceable supporting plate, and the positions of the air suction holes correspond to the positions of ineffective areas around the array structure area of the micro-lens array lens.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311613595.3A CN117590616A (en) | 2023-11-29 | 2023-11-29 | Integrated alignment method and auxiliary device for micro-lens array and infrared detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311613595.3A CN117590616A (en) | 2023-11-29 | 2023-11-29 | Integrated alignment method and auxiliary device for micro-lens array and infrared detector |
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