CN117590096B - Method, device, equipment and storage medium for compensating sensitivity of electrostatic sensor - Google Patents

Abstract

The application relates to a sensitivity compensation method, a device, equipment and a storage medium of an electrostatic sensor, belonging to the field of electric field detection, comprising the steps of acquiring the voltage change condition of an amplitude detection unit in the electrostatic sensor, wherein the amplitude detection unit is used for detecting the vibration amplitude of a vibration electrode in the electrostatic sensor; determining the vibration amplitude of the vibration electrode according to the voltage change condition; and calculating the voltage of the charged object to be measured according to the vibration amplitude of the vibration electrode. According to the application, the problem of poor drift compensation effect of the electrostatic sensor is solved by acquiring the vibration amplitude of the vibration electrode in the electrostatic sensor and calculating the voltage of the tested charged object according to the vibration amplitude.

Description

Method, device, equipment and storage medium for compensating sensitivity of electrostatic sensor

Technical Field

The present application relates to the field of electric field detection, and in particular, to a method, an apparatus, a device, and a storage medium for compensating sensitivity of an electrostatic sensor.

Background

Electric field monitoring is of great importance. According to the characteristic law of the change of the atmospheric electric field, the electrostatic sensor is used for monitoring the electric field intensity in the space region or around the equipment, and the method has very important application in the fields of aerospace, national defense, smart grids, weather, industrial production and the like. By means of the electrostatic sensor to monitor the change of the electrostatic field near the ground and the air atmosphere, accurate meteorological information can be obtained, so that important safety guarantee is provided for launching and lifting of aircrafts such as missiles, satellites and the like, and lightning early warning, forest fire prevention, earthquake prediction and the like can be performed.

In the use process of the electrostatic sensor, due to the change of factors such as temperature, humidity, air pressure and the like in the environment, the sensitivity of the sensor can drift to cause deviation of a measurement result, and the output accuracy of the electrostatic sensor is affected. In terms of the sensor temperature drift compensation method, there are various methods including building a compensation model, performing software compensation, and the like. However, the output of the electrostatic sensor has no good repeatability along with the temperature change, and irregular zero time drift exists, so that the current compensation method has poor effect on the drift compensation of the electrostatic sensor.

Disclosure of Invention

In order to solve the problem of poor effect on drift compensation of an electrostatic sensor, the application provides a sensitivity compensation method, device and equipment of the electrostatic sensor and a storage medium.

In a first aspect of the present application, a method of compensating for sensitivity of an electrostatic sensor is provided. The method comprises the following steps:

Acquiring the voltage change condition of an amplitude detection unit in the electrostatic sensor, wherein the amplitude detection unit is used for detecting the vibration amplitude of a vibration electrode in the electrostatic sensor;

Determining the vibration amplitude of the vibration electrode according to the voltage change condition;

and calculating the voltage of the charged object to be measured according to the vibration amplitude of the vibration electrode.

According to the technical scheme, the vibration amplitude of the vibration electrode can be obtained according to the voltage change condition of the amplitude detection unit, the influence of factors such as temperature and humidity in the environment on the vibration electrode can be known according to the vibration amplitude, the voltage of the charged object to be detected is calculated according to the vibration amplitude of the vibration electrode, the influence of the factors in the environment where the electrostatic sensor is located on the sensitivity of the electrostatic sensor can be reduced, the effect of drift compensation of the electrostatic sensor is further improved, and the accuracy of calculating the voltage of the charged object to be detected is improved.

In one possible implementation, determining the vibration amplitude of the vibration electrode according to the voltage change condition includes: according to the voltage change condition, the driving voltage of the vibrating electrode in the electrostatic sensor is regulated to enable the voltage change condition to be within a certain range; and determining the vibration amplitude of the vibration electrode according to the adjusted voltage change condition.

According to the technical scheme, the voltage change condition of the amplitude detection unit is obtained, and then the driving voltage of the vibrating electrode is regulated according to the voltage change condition, so that the vibration amplitude of the vibrating electrode is kept within a certain range, the influence of environmental factors on the vibration amplitude of the vibrating electrode is reduced, and the accuracy of the sensitivity of the electrostatic sensor is improved.

In one possible implementation, calculating the voltage of the measured charged object according to the vibration amplitude of the vibration electrode includes:

Acquiring the output voltage of the electrostatic sensor and the output current of the electrostatic sensor;

And constructing an equation according to the output voltage of the electrostatic sensor, the output current of the electrostatic sensor and the vibration amplitude of the vibration electrode, and calculating the voltage of the charged object to be measured.

In one possible implementation, constructing an equation and calculating a voltage of the measured charged object according to the output voltage of the electrostatic sensor, the output current of the electrostatic sensor, and the vibration amplitude of the vibration electrode, includes:

Constructing a current equation according to the output current of the electrostatic sensor and the vibration amplitude of the vibration electrode, wherein the current equation is used for reflecting the relation among the output current of the electrostatic sensor, the vibration amplitude of the vibration electrode and the voltage of the charged object to be tested;

Constructing a voltage equation according to the output voltage and the current equation of the electrostatic sensor, wherein the voltage equation is used for reflecting the relation among the output voltage of the electrostatic sensor, the vibration amplitude of the vibration electrode and the voltage of the charged object to be measured;

And calculating the voltage of the charged object to be measured according to the voltage equation.

In a second aspect of the application, an electrostatic sensor sensitivity compensation system is provided. The system comprises an electric field induction unit, an amplitude detection unit and a calculation unit, wherein the electric field induction unit comprises a vibration electrode and an induction electrode and is used for inducing an electric field of a charged object to be detected;

The amplitude detection unit is used for acquiring the amplitude of the vibrating electrode;

the computing unit is for performing the method as according to the first aspect of the application.

According to the technical scheme, the influence of the environment on the vibration amplitude of the vibration electrode can be obtained by obtaining the vibration amplitude of the vibration electrode, then the voltage of the tested charged object is obtained by calculating the vibration amplitude of the vibration electrode by using the calculating unit, the influence of the environment on the electrostatic sensor is reduced, and the accuracy of the sensitivity of the electrostatic sensor is improved.

In one possible implementation, the amplitude detection unit includes a reference electrode and an amplitude analysis subunit, the reference electrode and the vibration electrode forming a reference capacitance, the amplitude analysis subunit determining the amplitude of the vibration electrode based on a voltage change of the reference capacitance.

In one possible implementation, the amplitude detection unit includes a feedback piezoelectric ceramic plate disposed on the vibration electrode, and a voltage analysis subunit for determining the amplitude of the vibration electrode from the output voltage of the feedback piezoelectric ceramic plate.

In one possible implementation, the vibrating electrode is an electrode of tuning fork structure or a plate electrode.

In a third aspect of the application, an electronic device is provided. The electronic device includes: a memory and a processor, the memory having stored thereon a computer program, the processor implementing the method as described above when executing the program.

In a fourth aspect of the application, there is provided a computer readable storage medium having stored thereon a computer program which when executed by a processor implements a method as according to the first aspect of the application.

In summary, the present application includes at least one of the following beneficial technical effects:

The vibration amplitude of the vibration electrode can be obtained according to the voltage change condition of the amplitude detection unit, the influence of factors such as temperature and humidity in the environment on the vibration electrode can be known according to the vibration amplitude, the voltage of the charged object to be detected is calculated according to the vibration amplitude of the vibration electrode, the influence of the factors in the environment where the electrostatic sensor is located on the sensitivity of the electrostatic sensor can be reduced, the drift compensation effect of the electrostatic sensor is further improved, and the accuracy of calculating the voltage of the charged object to be detected is improved.

Drawings

Fig. 1 is a schematic structural diagram of an electrostatic sensor provided by the present application.

Fig. 2 is a block diagram of the electrostatic sensor sensitivity compensation device provided by the application.

Fig. 3 is a schematic circuit diagram of a sensitivity compensation device for an electrostatic sensor according to an embodiment of the present application.

Fig. 4 is a schematic structural diagram of a sensitivity compensation device for an electrostatic sensor according to an embodiment of the present application.

Fig. 5 is a schematic structural diagram of a sensitivity compensation device for an electrostatic sensor according to an embodiment of the present application.

Fig. 6 is a schematic structural diagram of a sensitivity compensation device for an electrostatic sensor according to an embodiment of the present application.

Fig. 7 is a schematic structural diagram of a sensitivity compensation device for an electrostatic sensor according to an embodiment of the present application.

Fig. 8 is a schematic structural diagram of a sensitivity compensation device for an electrostatic sensor according to an embodiment of the present application.

Fig. 9 is a schematic structural diagram of a sensitivity compensation device for an electrostatic sensor according to an embodiment of the present application.

Fig. 10 is a schematic structural diagram of a sensitivity compensation device for an electrostatic sensor according to an embodiment of the present application.

Fig. 11 is a flow chart of the electrostatic sensor sensitivity compensation method provided by the application.

Fig. 12 is a schematic circuit diagram of a sensitivity compensation device for an electrostatic sensor according to an embodiment of the present application.

Fig. 13 is a schematic circuit diagram of a sensitivity compensation device for an electrostatic sensor according to an embodiment of the present application.

Fig. 14 is a schematic structural diagram of an electronic device provided by the present application.

In the figure, 1, a charged object to be measured; 2. a shielding housing; 3. a shielding partition; 4. an induction electrode; 5. a vibrating electrode; 6. a reference electrode; 7. electric field lines; 8. driving the piezoelectric ceramic piece; 9. feeding back the piezoelectric ceramic piece; 10. an insulator; 201. an electric field induction unit; 202. an amplitude detection unit; 203. a calculation unit; 301. a CPU; 302. a ROM; 303. a RAM; 304. an I/O interface; 305. an input section; 306. an output section; 307. a storage section; 308. a communication section; 309. a driver; 310. removable media.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the embodiments of the present application more apparent, the technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application, and it is apparent that the described embodiments are some embodiments of the present application, but not all embodiments of the present application. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.

In addition, the term "and/or" herein is merely an association relationship describing an association object, and means that three relationships may exist, for example, a and/or B may mean: a exists alone, A and B exist together, and B exists alone. In this context, unless otherwise specified, the term "/" generally indicates that the associated object is an "or" relationship.

Embodiments of the application are described in further detail below with reference to the drawings.

At present, in the aspect of sensor temperature drift compensation methods, data analysis is mostly adopted for sensor sensitivity to complete compensation of an electrostatic sensor, for example, temperature and humidity fixed-point calibration is performed on the sensitivity of the electrostatic sensor, namely, under the condition that the electrostatic sensor is at different temperatures and different humidities, the sensitivity is what, then the relation between the sensitivity of the electrostatic sensor and the temperature and humidity is obtained through curve fitting, and further, the compensation on the sensitivity of the electrostatic sensor under the condition of different temperatures and humidities can be realized. However, the scheme is not strong in universality, when the production batches or models of the electrostatic sensors are different, the sensitivity is required to be recalibrated, and the relationship between the sensitivity and the temperature and humidity is not referential among the sensors in different batches or models, because the sensitivity and the temperature and humidity change are nonlinear, the compensation effect of the mode is not ideal.

Referring to fig. 1, fig. 1 is a vibrating capacitive electrostatic sensor, which includes a shielding shell 2, and an induction electrode 4 and a vibrating electrode 5 disposed inside the shielding shell 2, where an opening is further formed on the shielding shell 2, and a charged object 1 to be measured is placed at the opening, and at the same time, a driving voltage is applied to the vibrating electrode 5, so that the vibrating electrode 5 vibrates. The capacitance between the charged object 1 to be measured and the sensing electrode 4 can be changed according to the periodic vibration generated by the vibrating electrode 5, and a current or voltage proportional to the voltage of the charged object 1 to be measured is output from the sensing electrode 4. Since the charged object 1 to be measured generates an electric field and the vibrating electrode 5 vibrates periodically, the electric field distribution on the sensing electrode 4 changes, and the amount of electric charge on the sensing electrode 4 changes, thereby generating a current output proportional to the voltage of the charged object 1 to be measured.

The voltage of the charged object 1 to be measured can be obtained from the current output from the sensing electrode 4. In fig. 1, the electric field lines 7 are used to represent the electric field generated by the charged object to be measured, but the amplitude of the vibrating electrode 5 is related to the temperature and humidity of the environment in addition to the driving voltage, so that when the temperature and humidity change, the amplitude of the vibrating electrode 5 also changes accordingly, and the voltage of the charged object 1 to be measured finally changes according to the environment.

In order to reduce the influence of environmental factors on the electrostatic sensor, an embodiment of the present application provides an electrostatic sensor sensitivity compensation device, referring to fig. 2, the electrostatic sensor sensitivity compensation device includes an electric field sensing unit 201, an amplitude detecting unit 202 and a calculating unit 203, the electric field sensing unit 201 includes a vibrating electrode 5 and a sensing electrode 4, an output current of the sensing electrode 4 is proportional to a voltage of a charged object 1 to be measured, and the amplitude detecting unit 202 is configured to obtain an amplitude of the vibrating electrode 5; the above-described calculation unit 203 is configured to calculate the voltage of the charged object 1 to be measured from the amplitude of the vibrating electrode 5, the output voltage of the vibrating capacitor, and the output current. The specific calculation process of the calculation unit 203 described above refers to a specific process in the electrostatic sensor sensitivity compensation method.

It will be clear to those skilled in the art that, for convenience and brevity of description, the specific working process of the computing unit 203 described may refer to a corresponding process in the embodiment of the electrostatic sensor sensitivity compensation method described below, which is not described herein again.

In a possible implementation, the amplitude detection unit 202 includes a reference electrode 6 and an amplitude analysis subunit, where the reference electrode 6 and the vibration electrode 5 form a reference capacitance, and the amplitude analysis subunit determines the amplitude of the vibration electrode 5 according to a voltage change of the reference capacitance.

In a specific embodiment, referring to fig. 3, the reference electrode 6 and the sensing electrode 4 are located at two sides of the vibrating electrode 5, and the reference electrode 6 is located in the shielding shell 2 and is completely shielded by the shielding shell 2.

In a specific embodiment, referring to fig. 4, the reference electrode 6 is located on the same side of the vibrating electrode 5 as the sensing electrode 4, the reference electrode 6 is located at an end far from the opening of the shielding case 2, the sensing electrode 4 is located at an end near to the opening of the shielding case 2, and at the same time, a shielding partition 3 is disposed between the reference electrode 6 and the sensing electrode 4, and the reference electrode 6 is shielded by using the shielding partition 3, so that the reference electrode 6 is prevented from being affected by the charged object 1 to be measured. In fig. 4, a driving piezoelectric ceramic plate 8 is provided on the vibrating electrode 5, and the driving piezoelectric ceramic plate 8 drives the vibrating electrode 5 to vibrate according to the inverse piezoelectric effect. The inverse piezoelectric effect, also called electrostrictive effect, is a phenomenon in which when an electric field is applied in the polarization direction of dielectrics, the dielectrics are mechanically deformed or mechanically pressed in a certain direction, and when the applied electric field is removed, the deformation or stress is also eliminated. Therefore, when the electrostatic sensor is used, a voltage needs to be applied to the driving piezoelectric ceramic plate 8, and the driving piezoelectric ceramic plate 8 can drive the vibration electrode 5 to vibrate so as to realize the measurement of the voltage of the charged object 1 to be measured.

In the present embodiment, the shielding separator 3 is provided between the sensing electrode 4 and the reference electrode 6, and in other embodiments, if the distance between the reference electrode 6 and the sensing electrode 4 is sufficiently large, the electric field of the charged object 1 to be measured does not affect the reference electrode 6, the shielding separator 3 may not be provided between the reference electrode 6 and the sensing electrode 4.

In a specific embodiment, referring to fig. 5, using the vibrating electrode 5 of the tuning fork structure, the sensing electrode 4 and the reference electrode 6 are disposed between the two prongs of the vibrating electrode 5 and the sensing electrode 4 and the reference electrode 6 are parallel to the two prongs of the vibrating electrode 5. The reference electrode 6 is located at an end remote from the opening of the shielding housing 2 and the sensing electrode 4 is located at an end near the opening of the shielding housing 2.

In a specific embodiment, referring to fig. 6, the sensing electrode 4 is fixed to the side of the vibrating electrode 5 facing the opening of the shielding case 2 through the insulator 10, and the reference electrode 6 is disposed on the same side of the vibrating electrode 5 as the sensing electrode 4 and parallel to the vibrating electrode 5, and the vibrating electrode 5 is parallel to the charged object 1 to be measured. The reference electrode 6 is positioned at one end of the vibrating electrode 5 far away from the opening of the shielding shell 2, the sensing electrode 4 is positioned at one end of the shielding shell 2 near the opening of the shielding shell 2, and the reference electrode 6 is completely positioned inside the shielding shell 2 and is completely shielded by the shielding shell 2. With such a structure, a capacitance is formed between the sensing electrode 4 on the vibrating electrode 5 and the charged object 1 to be measured, the voltage of the capacitance formed by the sensing electrode 4 and the charged object 1 to be measured changes according to the vibration of the vibrating electrode 5, the voltage of the capacitance formed by the reference electrode 6 and the shielding case 2 changes, and the voltage of the charged object 1 to be measured is determined according to the changes of the two voltages.

In a specific embodiment, referring to fig. 7, the vibrating electrode 5 is a tuning fork structure, the sensing electrode 4 is fixedly connected to one side of the positive electrode of the vibrating electrode 5 near the outlet of the shielding case 2 through the insulator 10, the reference electrode 6 and the sensing electrode 4 are located on the same side of the vibrating electrode and the reference electrode 6 is parallel to the positive electrode of the vibrating electrode 5, and the vibrating electrode 5, the sensing electrode 4 and the reference electrode 6 are all parallel to the charged object 1 to be measured. The reference electrode 6 is positioned at one end of the vibrating electrode 5 far away from the opening of the shielding shell 2, the sensing electrode 4 is positioned at one end of the shielding shell 2 near the opening of the shielding shell 2, and the reference electrode 6 is completely positioned inside the shielding shell 2 and is completely shielded by the shielding shell 2. With such a structure, a capacitance is formed between the sensing electrode 4 on the vibrating electrode 5 and the charged object 1 to be measured, the voltage of the capacitance formed by the sensing electrode 4 and the charged object 1 to be measured changes according to the vibration of the vibrating electrode 5, the voltage of the capacitance formed by the reference electrode 6 and the shielding case 2 changes, and the voltage of the charged object 1 to be measured is determined according to the changes of the two voltages.

In a possible implementation, the amplitude detection unit 202 includes a feedback piezoelectric ceramic piece 9 and a voltage analysis subunit, where the feedback piezoelectric ceramic piece 9 is disposed on the vibration electrode 5, and the voltage analysis subunit is configured to determine the amplitude of the vibration electrode 5 according to the output voltage of the feedback piezoelectric ceramic piece 9.

In a specific implementation, referring to fig. 8, a plate electrode is used as the vibrating electrode 5, and then a feedback piezoelectric ceramic plate 9 and a driving piezoelectric ceramic plate 8 are disposed at an end of the vibrating electrode 5 away from the opening of the shielding case 2, the feedback piezoelectric ceramic plate 9 and the driving piezoelectric ceramic plate 8 are respectively disposed at both sides of the vibrating electrode 5, and based on the foregoing, the driving piezoelectric ceramic plate 8 operates according to the inverse piezoelectric effect, and the feedback piezoelectric ceramic plate 9 operates according to the positive piezoelectric effect, which is called the parapiezoelectric effect, which means that a polarization phenomenon is generated inside when it is deformed by applying a force thereto in a certain direction, and an electric charge is generated on a certain surface thereof, and a phenomenon of recovering an uncharged state is restored again after the external force is removed. When the direction of the applied force is changed, the polarity of the charge is also changed. Based on the positive piezoelectric effect, when the vibrating electrode 5 vibrates, the voltage generated by the feedback piezoelectric ceramic plate 9 also changes, and the amplitude of the vibrating electrode 5 can be obtained according to the corresponding relation between the voltage change of the feedback piezoelectric ceramic plate 9 and the vibration amplitude of the vibrating electrode 5.

In a specific implementation manner, referring to fig. 9, a vibrating electrode 5 with a tuning fork structure is used, an induction electrode 4 is arranged in parallel between two fork arms of the vibrating electrode 5, a plane of the vibrating electrode 5 is perpendicular to a plane of a charged object 1 to be tested, a driving piezoelectric ceramic piece 8 is arranged on any one fork arm, and a feedback piezoelectric ceramic piece 9 is arranged on at least one fork arm. If the feedback piezoelectric ceramic plates 9 are arranged on the two fork arms, the vibration conditions of the two fork arms can be judged according to the voltages of the two feedback piezoelectric ceramic plates 9, so that the amplitude of the vibration electrode 5 can be more accurately determined, and the voltage of the charged object 1 to be measured can be more accurately obtained.

In a specific embodiment, referring to fig. 10, a tuning fork structure of the vibrating electrode 5 is used, and an inductor 4 is adhered to one fork arm of the vibrating electrode 5 through an insulator 10, where the inductor 4 faces the opening of the shielding case 2. The plane of any fork arm in the vibrating electrode 5 is parallel to the plane of the charged object 1 to be measured, a driving piezoelectric ceramic plate 8 is arranged on any fork arm, and a feedback piezoelectric ceramic plate 9 is arranged on at least one fork arm. If the feedback piezoelectric ceramic plates 9 are arranged on the two fork arms, the vibration conditions of the two fork arms can be judged according to the voltages of the two feedback piezoelectric ceramic plates 9, so that the amplitude of the vibration electrode 5 can be more accurately determined, and the voltage of the charged object 1 to be measured can be more accurately obtained.

The embodiment of the application provides a sensitivity compensation method for an electrostatic sensor, and the main flow of the method is described as follows.

As shown in fig. 11:

step S101: the voltage change condition of the amplitude detection unit 202 in the electrostatic sensor is acquired.

Specifically, the voltage change of the amplitude detecting unit 202 in the electrostatic sensor sensitivity compensation device is detected, and the amplitude detecting unit 202 is used for detecting the vibration amplitude of the vibration electrode 5 in the electrostatic sensor. In different embodiments, the voltage change may be the voltage change of the reference electrode 6 or the voltage change of the feedback piezoelectric ceramic chip 9.

Step S102: the vibration amplitude of the vibration electrode 5 is determined according to the voltage change condition.

Specifically, in the aforementioned electrostatic sensor sensitivity compensation device, the voltage change condition of the vibration capacitor formed by the reference electrode 6 and the vibration electrode 5 can be monitored, and it can be understood that when the distance between the two electrode plates of the capacitor is changed, the corresponding voltage is also changed, so that the distance between the two motor plates has a corresponding relationship with the voltage, and when the voltage change condition of the vibration capacitor is known, the amplitude of the vibration electrode 5 is also known. However, since the amplitude at this time is an amplitude that varies due to environmental influences, the driving voltage of the vibrating electrode 5 is adjusted so that the voltage variation is within a certain range, and in other specific embodiments, the voltage variation of the amplitude detecting means 202 can be kept at a constant value by adjusting the driving voltage of the vibrating electrode 5, and when the voltage is at a constant value, the amplitude of the vibrating electrode 5 obtained is also at a constant value. By adjusting the driving voltage of the vibrating electrode 5, the amplitude of the vibrating electrode 5 keeps a constant value and cannot be influenced by factors such as temperature and humidity in the environment, so that the accuracy of the electrostatic sensor can be improved.

Step S103: the voltage of the charged object 1 to be measured is calculated from the vibration amplitude of the vibration electrode 5.

Specifically, an output voltage of the electrostatic sensor and an output current of the electrostatic sensor are obtained; according to the output voltage of the electrostatic sensor, the output current of the electrostatic sensor and the vibration amplitude of the vibration electrode 5, an equation is constructed and the voltage of the charged object 1 to be measured is calculated.

Further, a current equation is constructed based on the output current of the electrostatic sensor and the vibration amplitude of the vibration electrode 5, the current equation reflecting the relationship between the output current of the electrostatic sensor, the vibration amplitude of the vibration electrode 5, and the voltage of the charged object 1 to be measured; constructing a voltage equation reflecting a relationship among the output voltage of the electrostatic sensor, the vibration amplitude of the vibration electrode 5, and the voltage of the charged object 1 to be measured, based on the output voltage of the electrostatic sensor and the current equation; the voltage of the charged object 1 to be measured is calculated based on the voltage equation.

In a specific embodiment, referring to fig. 3, when measuring the external electrostatic field and the electrostatic charge, the potential difference between the object with a measured point and the reference ground is U, that is, the voltage of the object 1 to be measured, the vibration electrode 5 vibrates sinusoidally, the amplitude of the vibration electrode 5 is Δd, and the frequency is w. It will be appreciated that the driving voltage of the vibrating electrode 5 is known, so the frequency of the vibrating electrode 5 is also known. At this time, the output current of the induction electrode 4 is

I1＝U*k*(d1+Δd1)*sin(w*t)；

Wherein k is an electric field conversion proportionality coefficient under different distances, and when the distance between the charged object 1 to be measured and the electrostatic sensor is determined, k is a fixed value, and k changes according to the change of the distance between the charged object 1 to be measured and the electrostatic sensor. The output current of the sensing electrode 4 is subjected to IV conversion through a resistor R3 and is connected to the non-inverting end of the amplifier, the inverting end of the amplifier is grounded through a resistor R1, and meanwhile, the output current is connected to the output in a bridging way through a resistor R2. The final output voltage is

U1＝U*k*(d1+Δd1)*sin(w*t)*R3*(1+R2/R1)；

Since I1 is undetectable and U1 is detectable, the relationship between U1 and U is established by the known resistance and I1, and the values of R1, R2, R3 are known. Δd1 has been obtained in the foregoing, d1 being the initial distance between the sense electrode 4 and the vibrating electrode 5. Therefore, U, that is, the voltage of the charged object 1 to be measured can be calculated by the relation between U1 and U.

In the process of adjusting the driving voltage of the vibrating electrode 5, the output current and the output voltage of the reference electrode 6 are also required to be detected, the reference electrode 6 is electrically connected with the inverting terminal of the amplifier, the inverting terminal resistor R4 is connected to the output terminal of the amplifier, the same phase terminal of the amplifier is connected with the direct current 1V voltage, and when the sensor works, the output current of the reference electrode 6 is

I2＝k1*(d2+Δd2)*sin(w*t)；

Wherein k1 is an amplitude feedback conversion scaling factor, the signal is amplified by a resistor R4, and the output voltage is u2= -k1 (d2+Δd2) sin (w×t) R4;

When the temperature or other factors in the environment change to cause changes of Δd2 and Δd1, the sensitivity of the electrostatic sensor will drift, and the driving voltage of the vibrating electrode 5 is adjusted according to the monitored U2 to keep the value of U2 constant, so that d2+Δd2 and d1+Δd1 can be kept constant. Therefore, the I1 can be kept constant in different working condition environments, and the purpose of keeping the sensitivity of the sensor constant in different working condition environments is achieved.

The amplitude feedback conversion scaling factor is that the vibration electrode 5 and the reference electrode 6 form a vibration capacitor, and the vibration capacitor generates a current signal in a circuit, the current signal and the amplitude of the vibration electrode 5 are in a proportional relation, and the scaling factor corresponding to the proportional relation is the amplitude feedback conversion scaling factor.

In a specific embodiment, referring to fig. 5, unlike fig. 3, in fig. 5, a vibrating electrode of a tuning fork structure is used, and the vibration amplitudes of two prongs in the tuning fork structure can be obtained, so the calculation formula is adjusted as follows:

The output current of the sensing electrode is i1=uk11 (d1+Δd1+d11+Δd11) ×sin (w×t);

The output voltage of the sensing electrode is u1=uk11 (d1+Δd1+d11+Δd11) ×sin (w×t) r3 (1+r2/R1);

The output current of the reference electrode is i2=k22 (d2+Δd2+d22+Δd22) sin (w×t);

the output voltage of the reference electrode is u2= -k22 (d2+Δd2+d22+Δd22) sin (w×t) R4;

Where k11 is the electric field conversion scaling factor at different distances and k22 is the amplitude feedback conversion scaling factor.

In the same way as in the above embodiment, d2+Δd2+d22 can be obtained from the output voltage or the output current of the reference electrode, and then the value of U2 is constant according to the adjustment of the driving voltage of the vibrating electrode 5, and d1+Δd1+d11 can be ensured to be constant. Therefore, the I1 can be kept constant in different working condition environments, and the purpose of keeping the sensitivity of the sensor constant in different working condition environments is achieved.

In a specific embodiment, referring to fig. 12, the voltage applied to the charged object to be measured is U, if the electrode is vibrated sinusoidally, the amplitude of the vibrating electrode is Δd1, the frequency is w, and the output current of the sensing electrode is

I1＝U*k*Δd1*sin(w*t)；

Wherein k is the electric field conversion proportionality coefficient under different distances, and the current is connected with the inverting terminal of the amplifier and is connected with the output in a bridging way through a resistor R2. The in-phase end of the amplifier is grounded, and the output voltage of the sensing electrode can be finally obtained

U1＝-U*k*Δd1*sin(w*t)*R2；

The reference electrode is electrically connected with the inverting terminal of the amplifier, and the inverting terminal resistor R4 is connected to the output terminal of the amplifier, the same-phase terminal of the amplifier is connected with the direct current 1V voltage, and when the sensor works, the output current of the reference electrode is

I2＝k1*(d2+Δd2)*sin(w*t)；

Wherein k1 is an amplitude feedback conversion scaling factor, the signal is amplified by a resistor R4,

U2＝-k1*(d2+Δd2)*sin(w*t)*R4；

In the same way as in the above embodiment, when the temperature or other factors in the environment change to cause Δd2 and Δd1 to change, the sensitivity of the electrostatic sensor may drift, and the value of U2 is constant according to the obtained adjustment of Δd2 to the driving voltage of the vibrating electrode 5, so that d2+Δd2 and d1+Δd1 can be ensured to be constant. Therefore, the I1 can be kept constant in different working condition environments, and the purpose of keeping the sensitivity of the sensor constant in different working condition environments is achieved.

In a specific embodiment, referring to fig. 13, the vibrating electrode 5 is driven to perform resonance motion by driving the piezoelectric ceramic plate 8, and the vibrating direction of the vibrating electrode 5 is simultaneously close to the sensing electrode 4 and simultaneously far from the sensing electrode 4. Wherein the output current of the induction electrode 4 is

I1＝U*k*(d1+Δd1+d2+Δd2)*sin(w*t)；

The output voltage of the induction electrode 4 is

U1＝U*k*(d1+Δd1+d2+Δd2)*sin(w*t)*R3*(1+R2/R1)；

Where k is the electric field conversion proportionality coefficient at different distances, the same principle as the above embodiment is also adopted, except that the vibrating electrode 5 of tuning fork structure is used and the sensing electrode 4 and the reference electrode 6 are both disposed between two prongs, so that there is one amplitude of one prong, so the formula is adjusted as above.

In a specific embodiment, when the feedback piezoelectric ceramic sheet 9 is used for the amplitude detection unit 202, a circuit diagram of the electrostatic sensor is shown in fig. 12. Wherein the vibration electrode 5 vibrates sinusoidally, and the amplitude frequency of the vibration electrode 5 is w, the output current of the induction electrode 4 is

I1＝U*k*(d1+Δd1+d2+Δd1)*sin(w*t)；

Wherein k is the electric field conversion proportionality coefficient under different distances, the current is subjected to IV conversion through a resistor R3 and is connected to the same-phase end of the amplifier, the opposite-phase end of the amplifier is grounded through a resistor R1, and meanwhile, the current is connected to the output in a bridging way through a resistor R2. The output voltage of the sensing electrode 4 is u1=uk (d1+Δd1+d2+Δd1) sin (w t) r3 (1+r2/R1);

Referring to fig. 9, in the present embodiment, two feedback piezoelectric ceramic plates 9 and one driving piezoelectric ceramic plate 8 are used, the driving piezoelectric ceramic plate 8 applies a tunable sine wave voltage to resonate the vibrating electrode 5, and the two feedback piezoelectric ceramic plates 9 generate feedback output at the same frequency as the driving voltage due to the positive piezoelectric effect.

When the driving voltage of the vibrating electrode 5 is V, the output voltage of one feedback piezoelectric ceramic piece 9 is V1, and the output voltage of the other feedback piezoelectric ceramic piece 9 is V2, v1=vχ kV1 exists; v2=vχ2kv;

wherein, kV1 and kV2 are feedback coefficients, it is understood that when a driving voltage is applied to the vibrating electrode 5, the vibrating electrode 5 vibrates, and according to the difference of the driving voltages, the vibration conditions of the vibrating electrode 5 are different, and the vibration conditions of the feedback piezoelectric ceramic plates 9 fixed on the vibrating electrode 5 are different, and the voltages of the feedback piezoelectric ceramic plates 9 are different. The driving voltage and the voltage of the feedback piezoceramic wafer 9 are in a relationship, and the feedback coefficient is used to represent the relationship between the two voltages. On the premise that the amplitude of the vibrating electrode 5 is known to be influenced by the temperature, the humidity and other factors in the environment, the relation between the two voltages is also influenced by the temperature, the humidity and other factors in the environment, namely, the feedback coefficient is a fixed value under the condition of environment determination.

Displacement of the vibrating electrode Δd1, where kd1 is a voltage displacement conversion coefficient, Δd1=v1×kd1;

Displacement of the vibrating electrode Δd2, where kd2 is a voltage displacement conversion coefficient, Δd2=v2×kd2;

And detecting two paths of output signals of the two feedback piezoelectric ceramic plates 9, and adjusting the frequency and the amplitude of the driving voltage applied by the driving piezoelectric ceramic plates 8 according to the two paths of output signals, so that the output voltages V1 and V2 of the two feedback piezoelectric ceramic plates 9 are kept stable, and the values of d1+Δd1+d2+Δd1 are further stabilized, thereby achieving the purpose of keeping the sensitivity of the sensor constant.

The embodiment of the application discloses electronic equipment. Referring to fig. 14, the electronic apparatus includes a central processing unit (central processing unit, CPU) 301 that can perform various appropriate actions and processes according to a program stored in a read-only memory (ROM) 302 or a program loaded from a storage portion 307 into a random access memory (random access memory, RAM) 303. In the RAM 303, various programs and data required for the system operation are also stored. The CPU 301, ROM 302, and RAM 303 are connected to each other by a bus. An input/output (I/O) interface 304 is also connected to the bus.

The following components are connected to the I/O interface 304: an input section 305 including a keyboard, a mouse, and the like; an output section 306 including a Cathode Ray Tube (CRT), a Liquid Crystal Display (LCD), and the like, and a speaker, and the like; a storage portion 307 including a hard disk and the like; and a communication section 308 including a network interface card such as a local area network (local area network, LAN) card, modem, or the like. The communication section 308 performs communication processing via a network such as the internet. A driver 309 is also connected to the I/O interface 304 as needed. A removable medium 310 such as a magnetic disk, an optical disk, a magneto-optical disk, a semiconductor memory, or the like is installed on the drive 309 as needed, so that a computer program read out therefrom is installed into the storage section 307 as needed.

In particular, the process described above with reference to flowchart 11 may be implemented as a computer software program according to an embodiment of the application. For example, embodiments of the application include a computer program product comprising a computer program embodied on a machine-readable medium, the computer program comprising program code for performing the method shown in the flowcharts. In such embodiments, the computer program may be downloaded and installed from a network via the communication portion 308, and/or installed from the removable media 310. The above-described functions defined in the apparatus of the present application are performed when the computer program is executed by a Central Processing Unit (CPU) 301.

The computer readable medium shown in the present application may be a computer readable signal medium or a computer readable storage medium, or any combination of the two. The computer readable storage medium can be, for example, but not limited to, an electronic, magnetic, optical, electromagnetic, infrared, or semiconductor system, apparatus, or device, or a combination of any of the foregoing. More specific examples of the computer-readable storage medium may include, but are not limited to: an electrical connection having one or more wires, a portable computer diskette, a hard disk, a Random Access Memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (erasable programmable read only memory, EPROM), an optical fiber, a portable compact disc read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the foregoing. In the context of this document, a computer readable storage medium may be any tangible medium that can contain, or store a program for use by or in connection with an instruction execution system, apparatus, or device. In the present application, however, the computer-readable signal medium may include a data signal propagated in baseband or as part of a carrier wave, with the computer-readable program code embodied therein. Such a propagated data signal may take any of a variety of forms, including, but not limited to, electro-magnetic, optical, or any suitable combination of the foregoing. A computer readable signal medium may also be any computer readable medium that is not a computer readable storage medium and that can communicate, propagate, or transport a program for use by or in connection with an instruction execution system, apparatus, or device. Program code embodied on a computer readable medium may be transmitted using any appropriate medium, including but not limited to: wireless, wire, fiber optic cable, radio Frequency (RF), and the like, or any suitable combination of the foregoing.

The above description is only illustrative of the preferred embodiments of the present application and of the principles of the technology employed. It will be appreciated by persons skilled in the art that the scope of the application is not limited to the specific combinations of the features described above, but also covers other embodiments which may be formed by any combination of the features described above or their equivalents without departing from the spirit of the application. Such as the above-mentioned features and the technical features having similar functions (but not limited to) applied for in the present application are replaced with each other.

Claims (8)

1. A method for compensating sensitivity of an electrostatic sensor, comprising:

Acquiring the voltage change condition of an amplitude detection unit (202) in the electrostatic sensor, wherein the amplitude detection unit (202) is used for detecting the vibration amplitude of a vibration electrode (5) in the electrostatic sensor;

Determining the vibration amplitude of the vibration electrode (5) according to the voltage change condition;

-said determining the vibration amplitude of said vibrating electrode (5) according to said voltage variation conditions, comprising:

According to the voltage change condition, driving voltage of a vibrating electrode (5) in the electrostatic sensor is regulated to enable the voltage change condition to be within a certain range;

Determining the vibration amplitude of the vibration electrode (5) according to the adjusted voltage change condition;

According to the vibration amplitude of the vibration electrode (5), calculating the voltage of the charged object (1) to be measured;

The method for calculating the voltage of the charged object (1) to be measured according to the vibration amplitude of the vibration electrode (5) comprises the following steps:

Acquiring the output voltage of the electrostatic sensor and the output current of the electrostatic sensor;

；

Wherein I1 is the output current of the electrostatic sensor, U is the voltage of the charged object (1) to be detected, and the amplitude of the vibrating electrode (5) is The frequency is w, k is an electric field conversion proportionality coefficient under different distances, when the distance between the charged object (1) to be measured and the electrostatic sensor is determined, k is a fixed value, and k is changed according to the change of the distance between the charged object (1) to be measured and the electrostatic sensor;

；

Wherein U1 is the output voltage of the electrostatic sensor, and d1 is the initial distance between the induction electrode (4) and the vibration electrode (5);

and constructing an equation according to the output voltage of the electrostatic sensor, the output current of the electrostatic sensor and the vibration amplitude of the vibration electrode (5) and calculating the voltage of the tested charged object (1).

2. The electrostatic sensor sensitivity compensation method according to claim 1, wherein said constructing an equation and calculating the voltage of the measured charged object (1) from the output voltage of the electrostatic sensor, the output current of the electrostatic sensor, and the vibration amplitude of the vibration electrode (5) includes:

constructing a current equation according to the output current of the electrostatic sensor and the vibration amplitude of the vibration electrode (5), wherein the current equation is used for reflecting the relation among the output current of the electrostatic sensor, the vibration amplitude of the vibration electrode (5) and the voltage of the charged object (1) to be tested;

constructing a voltage equation according to the output voltage of the electrostatic sensor and the current equation, wherein the voltage equation is used for reflecting the relation among the output voltage of the electrostatic sensor, the vibration amplitude of the vibration electrode (5) and the voltage of the charged object (1) to be tested;

And calculating the voltage of the tested charged object (1) according to the voltage equation.

3. The electrostatic sensor sensitivity compensation device is characterized by comprising an electric field induction unit (201), an amplitude detection unit (202) and a calculation unit (203), wherein the electric field induction unit (201) comprises a vibrating electrode (5) and an induction electrode (4), and the electric field induction unit (201) is used for inducing an electric field of a charged object (1) to be detected;

the amplitude detection unit (202) is used for acquiring the amplitude of the vibrating electrode (5);

the computing unit (203) is configured to perform the method of claim 1 or 2.

4. A device according to claim 3, characterized in that the amplitude detection unit (202) comprises a reference electrode (6) and an amplitude analysis subunit, the reference electrode (6) and the vibrating electrode (5) constituting a reference capacitance, the amplitude analysis subunit determining the amplitude of the vibrating electrode (5) from the voltage variations of the reference capacitance.

5. A device according to claim 3, characterized in that the amplitude detection unit (202) comprises a feedback piezo-ceramic plate (9) and a voltage analysis subunit, the feedback piezo-ceramic plate (9) being arranged on the vibrating electrode (5), the voltage analysis subunit being arranged to determine the amplitude of the vibrating electrode (5) from the output voltage of the feedback piezo-ceramic plate (9).

6. Electrostatic sensor sensitivity compensation device according to any of claims 4 or 5, characterized in that the vibrating electrode (5) is an electrode of tuning fork structure or a plate electrode.

7. An electronic device comprising a memory and a processor, the memory having stored thereon a computer program capable of being loaded by the processor and performing the method according to any of claims 1 or 2.

8. A computer readable storage medium, characterized in that a computer program is stored which can be loaded by a processor and which performs the method according to any of claims 1 or 2.