CN108599738A - A kind of closed-loop driving circuit suitable for MEMS resonant formula sensor - Google Patents
A kind of closed-loop driving circuit suitable for MEMS resonant formula sensor Download PDFInfo
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- CN108599738A CN108599738A CN201810241026.3A CN201810241026A CN108599738A CN 108599738 A CN108599738 A CN 108599738A CN 201810241026 A CN201810241026 A CN 201810241026A CN 108599738 A CN108599738 A CN 108599738A
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K3/00—Circuits for generating electric pulses; Monostable, bistable or multistable circuits
- H03K3/01—Details
- H03K3/011—Modifications of generator to compensate for variations in physical values, e.g. voltage, temperature
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F1/00—Details of amplifiers with only discharge tubes, only semiconductor devices or only unspecified devices as amplifying elements
- H03F1/34—Negative-feedback-circuit arrangements with or without positive feedback
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K5/00—Manipulating of pulses not covered by one of the other main groups of this subclass
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K5/00—Manipulating of pulses not covered by one of the other main groups of this subclass
- H03K2005/00286—Phase shifter, i.e. the delay between the output and input pulse is dependent on the frequency, and such that a phase difference is obtained independent of the frequency
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- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Gyroscopes (AREA)
Abstract
The present invention relates to a kind of closed-loop driving circuits suitable for MEMS resonant formula sensor, when sensor is in resonant condition under the excitation of electrostatic force, induced current on detecting electrode is converted into voltage by I/V converters, resistance wherein on backfeed loop is for setting gain, capacitance in parallel is then used for loop phase compensation therewith, replace existing phase compensating circuit, reduces circuit cost and complexity.Next, two-stage amplifier is passed through in the output of I/V converters, further gain is obtained.Then the output of two-stage amplifier is divided into two-way, is used for detector all the way, and testing result generates gain-controlled voltage after being compared by comparing device with reference voltage, the gain for adjusting VGA；As the input of VGA, AC drive voltage then is generated after being adjusted into line amplitude according to gain-controlled voltage for another way.The present invention can reduce the cost and complexity of circuit.
Description
Technical field
The present invention relates to a kind of closed-loop driving circuits, more particularly to a kind of closed loop suitable for MEMS resonant formula sensor
Driving circuit.
Background technology
MEMS sensor is small because having as a kind of emerging sensor, light-weight, it is low in energy consumption and with it is traditional
Many advantages, such as IC process compatibles, has obtained extensive research.Many devices all use resonance principle to carry as far as possible at present
High sensitivity, such as resonance type pressure sensor, resonant mode magnetic field sensor and MEMS gyroscope.In order to enable micromechanics knot
Structure is operated in resonant condition, needs to apply certain exciting force.For electrostatic drive, the side of generally use open loop driving
Formula, i.e., generate alternating current drive signal by function signal generator, and regulated power supply provides necessary direct current biasing.But work as test
When environment changes, especially temperature change, the resonant frequency of device and suffered air damping will change therewith,
So that the stability of device output significantly reduces.For this problem, device resonant frequency drifts can be tracked and move and provide amplitude-variable
The close-loop driven of value seems very necessary.
In recent years, related scientific research personnel propose the scheme of many close-loop drivens, generally speaking mainly utilize phaselocked loop
(Phase-locked Loop, PLL) or two kinds of principles of self-oscillation track the resonant frequency of device and automatic gain control are added
Link processed stablizes the vibration amplitude of micro mechanical structure.It is high using the close-loop driven reliability row of PLL modes, but also have higher
Cost, and circuit is complicated, is not easy to debug, and the close-loop driven of self-oscillation mode is used to have circuit simple, realizes and holds
Easily, the advantages that at low cost.For the latter, basic component part includes：I/V converters, phase compensating circuit, detection ring
Section and variable gain amplifier (Variable Gain Amplifier, VGA).Wherein, detection link is for generating gain control
Voltage realizes the purpose of stable vibration amplitude to adjust the gain of VGA, thus the partial circuit play it is particularly significant
Effect.The specific implementation principle of detection link can be summarized as, and detects the amplitude of VGA input signal by wave detector first or has
Then measurement result is compared by valid value with reference voltage, result of the comparison then adjusts the increasing of VGA as gain-controlled voltage
Benefit.It is in order to ensure to obtain constant vibration amplitude in test warm area (such as -40 DEG C -80 DEG C), i.e., permanent when practical application
Fixed sensitivity needs wave detector to have higher temperature stability.But the detecting way of some low costs, such as two poles
Pipe detection makes it difficult to meet above-mentioned requirements since the variation to temperature is very sensitive.In addition, for phase above-mentioned
Compensation circuit, currently used scheme are to introduce active component and coordinate external RC links into horizontal phasing control, this undoubtedly increases
The cost and complexity of integrated circuit are added.
Invention content
Technical problem to be solved by the invention is to provide a kind of close-loop driven electricity suitable for MEMS resonant formula sensor
Road reduces the cost and complexity of circuit.
The technical solution adopted by the present invention to solve the technical problems is：It provides a kind of suitable for MEMS resonant formula sensor
Closed-loop driving circuit, including MEMS sensor, I/V converters, amplifier, wave detector, comparator and variable gain amplifier,
The input terminal of the output end and I/V converters of the MEMS sensor, the I/V converters are used for the detection of MEMS sensor
Since the induced current that resonance structure vibration generates is converted into voltage on electrode, amplifier is passed through in the output of the I/V converters
After be divided into two-way, pass through wave detector all the way and carry out detection, and the voltage of testing result and reference loop is carried out by comparing device
After generate gain-controlled voltage, the gain for adjusting variable gain amplifier, another way is as variable gain amplifier
Input, the output of the variable gain amplifier is connected with the input terminal of MEMS sensor, the output end of the I/V converters
Backfeed loop is also connected to form by the input terminal of a resistance and I/V converters, the resistance both ends are also in parallel, and there are one use
In the capacitance of loop phase compensation.
It is added with identical detecting element in the wave detector for compensation temperature to detection result in the reference loop
Influence.
The wave detector carries out detection by the way of diode halfwave rectifier, is in series in the reference loop and detection
The identical diode of device.
The wave detector carries out detection by the way of diode full-wave rectification, is in series in the reference loop and detection
The identical diode of device.
Advantageous effect
Due to the adoption of the above technical solution, compared with prior art, the present invention having the following advantages that and actively imitating
Fruit：The present invention in I/V converters by being arranged backfeed loop, and wherein the resistance on backfeed loop is for setting gain, with resistance
Capacitance in parallel is then used for loop phase and compensates, and replaces existing phase compensating circuit, reduces circuit cost and complexity.Separately
In external reference voltage circuit be added with wave detector have identical temperature characterisitic detecting element, be used for temperature-compensating, be easily by
The inexpensive detecting circuit that temperature influences provides a kind of effective application scheme.
Description of the drawings
Fig. 1 is the block diagram of the present invention；
Fig. 2 is the block diagram of one embodiment in the present invention；
Fig. 3 is the block diagram of another embodiment in the present invention.
Specific implementation mode
Present invention will be further explained below with reference to specific examples.It should be understood that these embodiments are merely to illustrate the present invention
Rather than it limits the scope of the invention.In addition, it should also be understood that, after reading the content taught by the present invention, people in the art
Member can make various changes or modifications the present invention, and such equivalent forms equally fall within the application the appended claims and limited
Range.
Embodiments of the present invention are related to a kind of closed-loop driving circuit suitable for MEMS resonant formula sensor, such as Fig. 1 institutes
Show, including MEMS sensor, I/V converters, amplifier, wave detector, comparator and variable gain amplifier, the MEMS sensings
The input terminal of the output end and I/V converters of device, the I/V converters be used for by the detecting electrode of MEMS sensor due to humorous
The induced current that structural vibration of shaking generates is converted into voltage, and the output of the I/V converters is divided into two-way after amplifier, and one
Road carries out detection by wave detector, and generates gain after testing result is compared with the voltage of reference loop by comparing device
Control voltage, the gain for adjusting variable gain amplifier, input of the another way as variable gain amplifier are described variable
The output of gain amplifier is connected with the input terminal of MEMS sensor, and the output end of the I/V converters also passes through a resistance
It is connected to form backfeed loop with the input terminal of I/V converters, the resistance both ends are also in parallel, and there are one compensated for loop phase
Capacitance.
MEMS sensor under the excitation of electrostatic force be in resonant condition when, I/V converters by detecting electrode due to humorous
The induced current that structural vibration of shaking generates is converted into voltage, and the wherein resistance on backfeed loop is in parallel therewith for setting gain
Capacitance then be used for loop phase compensate, replace existing phase compensating circuit.Next, the output of I/V converters passes through two
Grade amplifier, obtains further gain.Then the output of two-stage amplifier is divided into two-way, is used for detector, inspection all the way
It surveys after result is compared with reference voltage by comparing device and generates gain-controlled voltage, the gain for adjusting VGA；Another way
Then as the input of VGA, AC drive voltage is generated after being adjusted into line amplitude according to gain-controlled voltage.The close-loop driven circuit
Meet self-oscillation condition.
In view of the temperature characterisitic of detecting element itself in inexpensive wave detector, it is added in reference voltage circuit identical
Detecting element is used for temperature-compensating, for offsetting the inclined of gain-controlled voltage caused by detecting element is affected by temperature in wave detector
Difference.Specifically it may be interpreted as, when detecting element is affected by temperature the variation for making testing result generation ± Δ V in wave detector, ginseng
The variation of ± Δ V can be occurred due to adding identical detecting element also by examining voltage circuit, when by comparator, two input terminals
Identical voltage change is eliminated as common-mode signal, the influence so as to avoid temperature to wave detector.
As shown in Fig. 2, the signal amplitude for being input to VGA is detected in the present embodiment by the way of diode halfwave rectifier.
Influence for compensation temperature to diode conduction voltage drop, reference voltage circuit add identical diode.
As shown in figure 3, the signal amplitude for being input to VGA is detected in the present embodiment by the way of diode full-wave rectification.
Influence for compensation temperature to diode conduction voltage drop, reference voltage circuit add identical diode.
It is not difficult to find that the circuit of the present invention avoids influence of the temperature characterisitic to control effect of wave detector itself, utilize
Single phase compensation capacitance replaces existing phase compensating circuit, reduces the cost and complexity of circuit.
Claims (3)
1. a kind of closed-loop driving circuit suitable for MEMS resonant formula sensor, including MEMS sensor, I/V converters, amplification
Device, wave detector, comparator and variable gain amplifier, the input terminal of the output end and I/V converters of the MEMS sensor, institute
I/V converters are stated for electricity will to be converted into since resonance structure vibrates the induced current generated on the detecting electrode of MEMS sensor
Pressure, the output of the I/V converters are divided into two-way after amplifier, pass through wave detector all the way and carry out detection, and detection is tied
Fruit generates gain-controlled voltage after being compared by comparing device with the voltage of reference loop, for adjusting variable gain amplifier
Gain, input of the another way as variable gain amplifier, the output of the variable gain amplifier and MEMS sensor
Input terminal is connected, which is characterized in that the output end of the I/V converters also passes through the input terminal of a resistance and I/V converters
It is connected to form backfeed loop, the resistance both ends also capacitance in parallel there are one for loop phase compensation.
2. the closed-loop driving circuit according to claim 1 suitable for MEMS resonant formula sensor, which is characterized in that described
It is added in reference loop and is used for influence of the compensation temperature to detection result with identical detecting element in the wave detector.
3. the closed-loop driving circuit according to claim 2 suitable for MEMS resonant formula sensor, which is characterized in that described
Wave detector carries out detection by the way of diode halfwave rectifier, and two poles identical with wave detector are in series in the reference loop
Pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810241026.3A CN108599738A (en) | 2018-03-22 | 2018-03-22 | A kind of closed-loop driving circuit suitable for MEMS resonant formula sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810241026.3A CN108599738A (en) | 2018-03-22 | 2018-03-22 | A kind of closed-loop driving circuit suitable for MEMS resonant formula sensor |
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| CN108599738A true CN108599738A (en) | 2018-09-28 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112815934A (en) * | 2021-01-06 | 2021-05-18 | 东南大学 | High-voltage direct-current driving circuit with AGC (automatic gain control) for micro-hemispherical gyroscope |
| CN114646412A (en) * | 2022-03-23 | 2022-06-21 | 山东中科思尔科技有限公司 | Temperature self-compensation resonant pressure sensor control circuit and implementation method thereof |
| CN117590096A (en) * | 2023-11-10 | 2024-02-23 | 北京中科飞龙传感技术有限责任公司 | Method, device, equipment and storage medium for compensating sensitivity of electrostatic sensor |
| CN117590096B (en) * | 2023-11-10 | 2024-07-12 | 北京中科飞龙传感技术有限责任公司 | Method, device, equipment and storage medium for compensating sensitivity of electrostatic sensor |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0970349B1 (en) * | 1997-02-24 | 2005-08-10 | The Charles Stark Draper Laboratory, Inc. | Tuning fork gyro with split electrode |
| CN101860338A (en) * | 2010-06-03 | 2010-10-13 | 西北工业大学 | Closed-loop driving circuit for micromechanical resonance structure |
| CN102519444A (en) * | 2011-11-25 | 2012-06-27 | 上海交通大学 | Automatic gain control (AGG) self-excited oscillation driving circuit of micro-solid modal gyroscope |
| CN104901751A (en) * | 2015-05-07 | 2015-09-09 | 深圳市鼎阳科技有限公司 | Temperature compensation method and device for radio frequency equipment |
-
2018
- 2018-03-22 CN CN201810241026.3A patent/CN108599738A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0970349B1 (en) * | 1997-02-24 | 2005-08-10 | The Charles Stark Draper Laboratory, Inc. | Tuning fork gyro with split electrode |
| CN101860338A (en) * | 2010-06-03 | 2010-10-13 | 西北工业大学 | Closed-loop driving circuit for micromechanical resonance structure |
| CN102519444A (en) * | 2011-11-25 | 2012-06-27 | 上海交通大学 | Automatic gain control (AGG) self-excited oscillation driving circuit of micro-solid modal gyroscope |
| CN104901751A (en) * | 2015-05-07 | 2015-09-09 | 深圳市鼎阳科技有限公司 | Temperature compensation method and device for radio frequency equipment |
Non-Patent Citations (1)
| Title |
|---|
| 李锦明: "高信噪比电容式微机械陀螺的研究", 《中国优秀博硕士论文全文数据库（博士） 工程科技II辑》 * |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112815934A (en) * | 2021-01-06 | 2021-05-18 | 东南大学 | High-voltage direct-current driving circuit with AGC (automatic gain control) for micro-hemispherical gyroscope |
| CN112815934B (en) * | 2021-01-06 | 2024-04-02 | 东南大学 | From little hemisphere gyroscope high voltage direct current drive circuit of taking AGC |
| CN114646412A (en) * | 2022-03-23 | 2022-06-21 | 山东中科思尔科技有限公司 | Temperature self-compensation resonant pressure sensor control circuit and implementation method thereof |
| CN117590096A (en) * | 2023-11-10 | 2024-02-23 | 北京中科飞龙传感技术有限责任公司 | Method, device, equipment and storage medium for compensating sensitivity of electrostatic sensor |
| CN117590096B (en) * | 2023-11-10 | 2024-07-12 | 北京中科飞龙传感技术有限责任公司 | Method, device, equipment and storage medium for compensating sensitivity of electrostatic sensor |
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Application publication date: 20180928 |