CN117562572A - Heart sound sensing structure based on turtle ear bone bionic principle - Google Patents

Heart sound sensing structure based on turtle ear bone bionic principle Download PDF

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Publication number
CN117562572A
CN117562572A CN202311522419.9A CN202311522419A CN117562572A CN 117562572 A CN117562572 A CN 117562572A CN 202311522419 A CN202311522419 A CN 202311522419A CN 117562572 A CN117562572 A CN 117562572A
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China
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cantilever beam
heart sound
turtle
sensing structure
sound sensing
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臧俊斌
安琪
张志东
高立波
薛晨阳
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North University of China
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North University of China
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    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B7/00Instruments for auscultation
    • A61B7/02Stethoscopes
    • A61B7/04Electric stethoscopes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021Transducers for transforming electrical into mechanical energy or vice versa

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Medical Informatics (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Abstract

The invention relates to the technical field of heart sound sensing, in particular to a heart sound sensing structure based on a turtle ear bone bionic principle, which comprises bionic cilia, cantilever beams and a supporting frame. The cantilever beam is in a cross shape, the lengths of the four arms of the cantilever beam are equal, the supporting frame is square, the center of the cantilever beam and the center of the supporting frame are on the same straight line, the straight line is along the normal direction of the supporting frame, and the cantilever beam is fixedly connected with the inner wall of the supporting frame; the bionic cilia comprise a disc and a stand column, one end of the stand column is fixedly connected with the circle center of the disc, and the other end of the stand column is fixedly connected with the intersection point of the cantilever beam. The invention has higher sensitivity and better low-frequency response performance, and has good application prospect in the technical field of heart sound sensing.

Description

Heart sound sensing structure based on turtle ear bone bionic principle
Technical Field
The invention relates to the technical field of heart sound sensing, in particular to a heart sound sensing structure based on a turtle ear bone bionic principle.
Background
With the continuous development of society, the population is increasingly aged, the prevalence of cardiovascular diseases is continuously rising worldwide, and cardiovascular diseases are gradually one of the diseases with the highest prevalence in the world. It is important to enhance the assessment of cardiovascular health. Common cardiac diagnostic methods such as electrocardiography and echocardiography require specialized institutions, specialized equipment and personnel to complete, and restrict early diagnosis and treatment of heart diseases. Heart sound auscultation has been one of the important means of detecting cardiovascular disease since the first stethoscope in the 19 th century. The heart contraction and relaxation can generate heart sound signals, which contain a large amount of heart information, and the heart condition can be effectively judged through the heart sound signals, so that powerful support is provided for early noninvasive diagnosis of heart diseases. Traditional auscultation of heart sounds is easily affected by subjective experience of doctors, limitations of human ears and external environment, so that digitization and objectivity of heart sound signals are urgent.
Studies have shown that two important components of a normal heart sound signal are a first heart sound (S1) and a second heart sound (S2), where S1 is the beginning of systole and S2 is the beginning of diastole. Most heart sound signals are concentrated in the range of 50-150 Hz. Therefore, developing a high-performance low-frequency heart sound sensor has become a current research hotspot.
At present, researchers at home and abroad mainly use microphone sensors and piezoelectric sensors to detect and pick up heart sound signals. For example, document 1 (Development of a Multi-Channel Wearable Heart Sound Visualization System, j. Pers. Med., vol.12, no.12, pp.2011-2011, dec.2022) proposes a wearable multichannel heart sound visualization system using 72 microphone heart sound sensors; document 2 (Development of an Electronic Stethoscope and a Classification Algorithm for Cardiopulmonary Sounds, sensors, vol.22, no.11, pp.4263-4263, jun.2022) places a condenser microphone on the head of a conventional stethoscope to obtain cardiopulmonary sound signals; document 3 (Novel Design of aMultimodal Technology-Based Smart Stethoscope for Personal Cardiovascular Health Monitoring, sensors, vol.22, no.17, pp.6465-6465, aug.2022) proposes a mouse-shaped sensor for heart sound and heart rate detection, which uses a microphone sensor and a photo-electric blood flow recorder to achieve physiological signal detection; document 4 (A Novel Broadband Forcecardiography Sensor for Simultaneous Monitoring of Respiration, infrasonic Cardiac Vibrations and Heart Sounds, frontiers in Physiology, vol.12, no. pp.725716-725716, nov.2021) proposes a piezoelectric sensing structure based on PZT, which realizes simultaneous detection of heart sound signals and lung sound signals; document 5 (Low-Intensity Sensitive and High Stability Flexible Heart Sound Sensor Enabled by Hybrid Near-Field/Far-Field Electrospinning, AFM, vol.33, no.29, pp.2300666, jul.2023) prepared a heart sound sensor based on a composite piezoelectric nano-film using an electrospinning technique. However, microphone sensors are sensitive to ambient noise, often introducing interference, requiring an external power supply and signal processor to operate; piezoelectric sensors are relatively expensive, require high input impedance circuits or charge amplifiers to overcome the problem of poor dc response, and typically have low signal to noise, while the commonly used piezoelectric material PVDF is fragile. These all restrict the picking up of heart sound signals.
Microelectromechanical Systems (MEMS) sensors have the advantages of small size, high sensitivity, and good response. The MEMS heart sound sensor was developed by applying MEMS technology to hydrophones in literature 6 (Design, fabric, and preliminary characterization of a novel MEMS bionic vector hydrophone, microelectronics, vol.38, no.10-11, pp.1021-1026, oct.2007) and literature 7 (Package Optimization of the Cilium-Type MEMS Bionic Vector Hydrophone, "IEEE sens.j., vol.14, no.4, pp.1185-1192, jan.2014.), and using hydrophone models in literature 8 (Design of the MEMS Piezoresistive Electronic Heart Sound Sensor," Sensors, vol.16, no.11, pp.1728-1728, nov.2016). However, the MEMS sensors are all lever-type sensing structures, and when the MEMS sensors are used for heart sound sensors, the integrated packaging method is complex, and the sensitivity is low in the heart sound signal frequency range.
Disclosure of Invention
The invention aims to provide a heart sound sensing structure based on a turtle ear bone bionic principle, which comprises bionic cilia, cantilever beams and a supporting frame, aiming at the defects in the prior art and based on the bionic principle. The cantilever beam is in a cross shape, the lengths of the four arms of the cantilever beam are equal, the supporting frame is square, the center of the cantilever beam and the center of the supporting frame are on the same straight line, the straight line is along the normal direction of the supporting frame, and the cantilever beam is fixedly connected with the inner wall of the supporting frame; the bionic cilia comprise a disc and a stand column, one end of the stand column is fixedly connected with the circle center of the disc, and the other end of the stand column is fixedly connected with the intersection point of the cantilever beam.
Still further, the material of the bionic cilia is HTL resin.
Further, the bionic cilia are prepared by a 3D printing technique.
Further, the cantilever beam is made of silicon, and the supporting frame is made of silicon.
Further, the cantilever beam and the support frame are integrally formed.
Still further, the posts and cantilever beams are integrally bonded using a UV curable glue.
Further, the diameter of the disc is larger than 1.4mm and smaller than 1.6mm, and the thickness of the disc is larger than 0.09mm and smaller than 0.11mm.
Further, the diameter of the stand column is larger than 0.17mm and smaller than 0.18mm, and the height of the stand column is larger than 2mm and smaller than 4mm.
Still further, the cantilever beam has a length greater than 1.4mm and less than 1.5mm.
Still further, the four arms of the cantilever beam are perpendicular or parallel to the sides of the support frame.
The invention has the beneficial effects that:
the MEMS acceleration vibration mode is innovatively realized, so that the measuring range is wide, the detection can be carried out from weak signals to large vibration, and meanwhile, the mechanical strength is high and the environmental adaptability is good. Therefore, the invention has higher sensitivity and better low-frequency response performance, and has good application prospect in the technical field of heart sound sensing.
The present invention will be described in further detail with reference to the accompanying drawings.
Drawings
Fig. 1 is a schematic diagram of a heart sound sensing structure based on the turtle ear bone bionic principle.
Fig. 2 is an SEM image of the cantilever beam and the support frame.
Fig. 3 is a simulated graph of vibration characteristics of a cantilever structure: (a) a stress profile on the cantilever beam; (b) a displacement profile on the cantilever beam; (c) frequency response of cantilever vibration.
Fig. 4 is a schematic view of a sound transmission package structure.
Fig. 5 is a physical diagram of the entire structure of the sound transmission package.
Fig. 6 is an overall simulation result of auscultation structure: (a) a total sound pressure of the heart sound sensing structure; (b) sound pressure equivalent surface of the heart sound sensing structure.
Fig. 7 is an output waveform of the transient simulation: (a) inputting a heart sound waveform; (b) a voltage output waveform of the heart sound sensing structure.
Fig. 8 is a structural diagram of the heart sound platelet, the sensor chip, and the bionic cilia bond after bonding.
In the figure: 1. bionic cilia; 2. a cantilever beam; 3. and a supporting frame.
Detailed Description
For the purposes of making the objects, technical solutions and advantages of the present application more apparent, the present application will be described in further detail below with reference to the accompanying drawings and examples.
The invention provides a heart sound sensing structure based on a turtle ear bone bionic principle, which is shown in figure 1 and comprises bionic cilia 1, a cantilever beam 2 and a supporting frame 3. The material of the bionic cilia 1 is HTL resin. The cantilever beam 2 is made of silicon, and the supporting frame 3 is made of silicon. The cantilever beam 2 is cross-shaped, and the lengths of four arms of the cantilever beam 2 are equal. The supporting frame 3 is square, the center of the cantilever beam 2 and the center of the supporting frame 3 are on the same straight line, the straight line is along the normal direction of the supporting frame 3, and the cantilever beam 2 is fixedly connected with the inner wall of the supporting frame 3. The bionic cilia 1 comprises a disc and a stand column, one end of the stand column is fixedly connected with the circle center of the disc, and the other end of the stand column is fixedly connected with the intersection point of the cantilever beam 2. For the detailed description of the invention, the following sections are presented in sections:
(1) Cantilever beam 2 and carriage 3: the cantilever beam 2 and the supporting frame 3 are integrally formed, and four arms of the cantilever beam 2 are perpendicular to or parallel to the edges of the supporting frame 3. The length of the cantilever beam 2 is greater than 1.4mm and less than 1.5mm, preferably the cantilever beam2 is 1.46mm in length. The thickness of the cantilever beam 2 is 0.05mm, and the width of the cantilever beam 2 is 0.14mm. The cantilever beam 2 and the supporting frame 3 are prepared by adopting an MEMS process, and the processing process comprises the following steps: (a) Oxidizing the prepared SOI by PECVD to form a protective layer SiO 2 The method comprises the steps of carrying out a first treatment on the surface of the (b) performing photoetching and RIE etching to form a resistor bar window; (c) injecting low-concentration boron ions to form a piezoresistor; (d) Performing secondary oxidation, photoetching and etching to form an ohmic contact region, and implanting high-concentration boron ions; (e) Performing third oxidation, photoetching and etching to form oxidation holes, and forming metal leads by sputtering; (f) Reduction of SiO by Chemical Mechanical Polishing (CMP) 2 A layer; (g) Performing plasma etching (ICP), and releasing the cantilever structure through back cavity etching; (h) performing RIE front etching to form the cantilever structure. After dicing and photoresist removal, a single sensor chip structure is obtained. A field emission Scanning Electron Microscope (SEM) image of the cantilever beam 2 and the support frame 3 is shown in fig. 2. It can be found that the prepared cantilever beam has clear boundary and clean surface without stains. The method has the advantages of simple process, high process consistency and mass production.
(2) Bionic cilia 1: the bionic cilia 1 comprise a disc and a column. The bionic cilia 1 is prepared by a 3D printing technology, and the material of the bionic cilia 1 is HTL resin. The diameter of the disc is larger than 1.4mm and smaller than 1.6mm, and preferably the diameter of the disc is 1.55mm; the thickness of the disc is greater than 0.09mm and less than 0.11mm, preferably the thickness of the disc is 0.1mm. The diameter of the upright is greater than 0.17mm and less than 0.18mm, and preferably the diameter of the upright is 0.175mm; the height of the upright is greater than 2mm and less than 4mm, preferably the height of the upright is 3mm. The cilia size of the imitated turtle ear bone is only a few millimeters, the precision requirement is extremely high, and the traditional 3D printing technology cannot meet the current requirements. The invention adopts a 3D printing technology based on a projection micro-stereo lithography technology to prepare the bionic cilia 1.
After the cantilever beam 2, the supporting frame 3 and the bionic cilia 1 are finished, the following procedures are adopted for bonding integration: (a) Bonding the chip and the circuit board for the first time by using an adhesive, and bonding the lead wire for the second time by using a gold wire by using a press welder, so as to realize the electric connection of the chip and the circuit board; (b) The chip and the posts of the bionic cilia 1 are integrated together by an integration platform using an ultraviolet curable adhesive. After the integration is completed, the heart sound sensing device and the sound transmission package are integrated, and then the rear-end peripheral filtering and amplifying circuit is built and connected into the test system for testing.
Fig. 3 is a graph of simulation results of vibration characteristics of a cantilever structure: (a) a stress profile on the cantilever beam 2; (b) a displacement curve on cantilever beam 2; (c) the frequency response of the cantilever beam 2 vibration. From the stress profile, it can be seen that the left and right beams of the cantilever beam 2 have the same stress variation. From the displacement curve, larger displacement is generated at the intersection of the cantilever beam 2, and the displacement near the connection of the cantilever beam 2 and the support frame 3 is sharply reduced, so that the stable connection of the cantilever beam 2 and the support frame 3 is ensured. From the frequency response curve of the vibration of the cantilever beam 2, it can be seen that the natural frequency of the cantilever beam 2 is 7266.5Hz, which effectively covers the frequency range of heart sounds.
Furthermore, the invention applies the novel' microphone packaging structure to package the heart sound sensing structure. The "microphone" package is shown in fig. 4. The sound transmission packaging structure is designed according to the principle of a sound transmission tube and consists of a auscultation cavity, a sound transmission tube and a sensing cavity, wherein the auscultation cavity and the sensing cavity respectively correspond to two sound transmission receivers, and the sound transmission tube corresponds to a rope between the two sound transmission tubes. During packaging, the size of the sensing cavity is consistent with that of the heart sound small plate, and the heart sound small plate and the sensing chip bonded on the heart sound small plate can be fixed only by placing the heart sound small plate at the bayonet without damaging the sensing structure. In addition, place the overburden behind heart sound platelet back, protection heart sound platelet lead wire interface avoids making voltage etc. change such as people touching, leads to the inaccuracy of sampling. Fig. 5 is a physical diagram of the entire structure of the sound transmission package.
The application applies the acoustic-solid mechanics physical field in COMSOL finite element software to simulate the whole auscultation model so as to verify the auscultation effect of the sensing structure in the acoustic package. Fig. 6 is an overall simulation result of auscultation structure: (a) total sound pressure of the heart sound auscultation structure; (b) a sound pressure isosurface of the heart sound auscultation structure. The results of fig. 6 show that after the sound wave passes through the sound transmission packaging structure, the sound pressure at the sensing cavity is obviously increased compared with the sound pressure at the auscultation cavity, which is convenient for picking up weak heart sound signals.
Further, the invention adds a current circuit interface, carries out transient simulation by taking the heart sound signal shown in fig. 7 (a) as a load, then calculates the output voltage of the heart sound sensing structure within 0-1.5 s, and the result is shown in fig. 7 (b), and the result shows that the heart sound sensing structure effectively outputs the heart sound signal.
In addition, the invention also designs a peripheral circuit of the heart sound sensor, the peripheral circuit consists of two parts, the first part is a heart sound small plate and is only used for carrying out secondary bonding with a sensing structure to realize electric connection, and the bonding is completed by a press welder through a gold wire; the second part is a heart sound acquisition circuit, and mainly comprises a voltage stabilizing module, an amplifying module and a filtering module, wherein the amplifying module is realized by using an AD8226 instrument amplifier; the filtering module is implemented by AD 823. Fig. 8 is a structural diagram of the heart sound platelet, the sensor chip, and the bionic cilia bond after bonding.
The turtle appears to have no ear, but in fact only no concha, the turtle's "ear" is covered under the skin. The inspiration of the invention is derived from the bones of the sea turtle. The bones of the sea turtle are located beneath the surface of the skin, which can be considered a "receiver" of sound signals, which in turn are transmitted to the underlying fat and the external auditory canal. Around the ear post of the turtle there is a ossicle tube, which makes the ossicle move up and down, and the movement pattern is finally perceived by the vesicle in the turtle ear cavity, and finally the turtle receives the sound signal. Based on the turtle ear bone structure, the application designs a heart sound sensing structure based on the turtle ear bone bionic principle. The bionic cilia 1 imitates the design of the turtle ear bone, and realizes the mode form of the up-and-down vibration of the cantilever beam 2. The cantilever beam 2 is a sensitive unit, and mainly realizes the perception of sound as the action of vesicles in the ear cavity of a turtle.
The core sensing mechanism of the cantilever beam 2 is the piezoresistive effect. On the cantilever beam 2, a varistor is formed by a diffusion process. When the acoustic wave signal is transmitted to the MEMS sensor, the bionic cilia 1 vibrate up and down to sense the acoustic wave, and the cantilever beam 2 also vibrates accordingly. After the cantilever beam 2 is deformed, the resistance value of the piezoresistor on the beam is changed due to the piezoresistance effect, and the piezoresistor is converted into an electric signal to be output after passing through a Wheatstone bridge.
Compared with a lever type sensing structure (lever-type sensing structure), the MEMS sensor formed by the turtle ear bionic cilia 1 and the cantilever beam 2 provided by the invention realizes acceleration vibration mode, has the characteristics of an accelerometer, and has the characteristics of high sensitivity, wide measurable frequency range and the like due to the excellent performance of the acceleration sensor, such as high sensitivity, strong environmental adaptability and the like.
Preferably, square blocks are arranged at the intersections of the cantilever beams 2, and the square blocks are made of the same material as the cantilever beams 2. The four arms of the cantilever beam 2 are fixedly connected with the four sides of the direction block. The stand fixed connection is at square upper surface of piece. The square blocks are arranged at the intersections of the cantilever beams 2, so that the upright posts and the cantilever beams 2 are fixedly connected, the adhesive force is high, and the adhesive is convenient for preparation. In addition, the square block increases the mass at the center of the cantilever beam 2, reduces the natural vibration frequency of the cantilever beam 2, and is convenient for picking up heart sound signals. Further, for the four arms of the cantilever beam 2, the joints with the square blocks are wide, and the joints with the supporting frame 3 are narrow; therefore, the cantilever beam 2 and the square block are convenient to connect firmly, the whole mass of the cantilever beam 3 is increased, the natural vibration frequency of the cantilever beam 3 is reduced, and the heart sound signal is convenient to pick up.
In a word, the invention provides a heart sound sensing structure based on a turtle ear bone bionic principle, which comprises bionic cilia 1, a cantilever 2 beam and a supporting frame 3. The cantilever beam 2 is in a cross shape, the lengths of four arms of the cantilever beam 2 are equal, the supporting frame is square, the center of the cantilever beam 2 and the center of the supporting frame 3 are on the same straight line, the straight line is along the normal direction of the supporting frame 3, and the cantilever beam 2 is fixedly connected with the inner wall of the supporting frame 3; the bionic cilia 1 comprises a disc and a stand column, one end of the stand column is fixedly connected with the circle center of the disc, and the other end of the stand column is fixedly connected with the intersection point of the cantilever beam 2. The invention has higher sensitivity and better low-frequency response performance, and has good application prospect in the technical field of heart sound sensing.
The foregoing description of the preferred embodiments of the present invention is not intended to limit the invention to the precise form disclosed, and any modifications, equivalents, improvements and alternatives falling within the spirit and principles of the present invention are intended to be included within the scope of the present invention.

Claims (10)

1. The utility model provides a heart sound sensing structure based on sea turtle ear bone bionical principle, includes bionical cilia, cantilever beam, braced frame, its characterized in that: the cantilever beam is cross, the length of four arms of cantilever beam equals, the carriage is square, the center of cantilever beam with the center of carriage is on a straight line, the straight line is followed the normal direction of carriage, cantilever beam fixed connection the inner wall of carriage, bionical cilia includes disc and stand, the one end fixed connection of stand the centre of a circle of disc, the other end fixed connection of stand the intersection point of cantilever beam.
2. The heart sound sensing structure based on the turtle ear bone bionic principle as claimed in claim 1, wherein: the bionic cilia is made of HTL resin.
3. The heart sound sensing structure based on the turtle ear bone bionic principle as claimed in claim 2, wherein: the bionic cilia are prepared by a 3D printing technology.
4. The heart sound sensing structure based on the turtle ear bone bionic principle as claimed in claim 1, wherein: the cantilever beam is made of silicon, and the supporting frame is made of silicon.
5. The heart sound sensing structure based on the turtle ear bone bionic principle as claimed in claim 4, wherein: the cantilever beam and the supporting frame are integrally formed.
6. The heart sound sensing structure based on the turtle ear bone bionic principle as claimed in claim 1, wherein: the upright post and the cantilever beam are integrated and bonded by using UV (ultraviolet) curing glue.
7. The heart sound sensing structure based on the principles of turtle ear bone bionics as claimed in any one of claims 1-6, wherein: the diameter of the disc is larger than 1.4mm and smaller than 1.6mm, and the thickness of the disc is larger than 0.09mm and smaller than 0.11mm.
8. The heart sound sensing structure based on the principles of turtle ear bone bionics as claimed in claim 7, wherein: the diameter of the stand column is larger than 0.17mm and smaller than 0.18mm, and the height of the stand column is larger than 2mm and smaller than 4mm.
9. The heart sound sensing structure based on the turtle ear bone bionic principle as claimed in claim 8, wherein: the length of the cantilever beam is more than 1.4mm and less than 1.5mm.
10. The heart sound sensing structure based on the principles of turtle ear bone bionics as claimed in claim 9, wherein: the four arms of the cantilever beam are perpendicular to or parallel to the edges of the support frame.
CN202311522419.9A 2023-11-15 2023-11-15 Heart sound sensing structure based on turtle ear bone bionic principle Pending CN117562572A (en)

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CN202311522419.9A CN117562572A (en) 2023-11-15 2023-11-15 Heart sound sensing structure based on turtle ear bone bionic principle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202311522419.9A CN117562572A (en) 2023-11-15 2023-11-15 Heart sound sensing structure based on turtle ear bone bionic principle

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CN117562572A true CN117562572A (en) 2024-02-20

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