CN117554185B - Method and system for monitoring mechanical properties of film material - Google Patents
Method and system for monitoring mechanical properties of film material Download PDFInfo
- Publication number
- CN117554185B CN117554185B CN202410038147.3A CN202410038147A CN117554185B CN 117554185 B CN117554185 B CN 117554185B CN 202410038147 A CN202410038147 A CN 202410038147A CN 117554185 B CN117554185 B CN 117554185B
- Authority
- CN
- China
- Prior art keywords
- monitoring
- creep
- aluminum metal
- metal film
- index
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000012544 monitoring process Methods 0.000 title claims abstract description 230
- 238000000034 method Methods 0.000 title claims abstract description 85
- 239000000463 material Substances 0.000 title claims abstract description 83
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 150
- 238000001228 spectrum Methods 0.000 claims abstract description 45
- 230000008569 process Effects 0.000 claims abstract description 33
- 239000011159 matrix material Substances 0.000 claims abstract description 24
- 230000008859 change Effects 0.000 claims abstract description 23
- 238000012937 correction Methods 0.000 claims abstract description 15
- 239000010408 film Substances 0.000 claims description 210
- 239000010409 thin film Substances 0.000 claims description 14
- 238000003062 neural network model Methods 0.000 claims description 12
- 238000004364 calculation method Methods 0.000 claims description 9
- 230000006870 function Effects 0.000 claims description 8
- 238000004590 computer program Methods 0.000 claims description 6
- 230000001174 ascending effect Effects 0.000 claims description 5
- 238000004422 calculation algorithm Methods 0.000 claims description 5
- 238000010606 normalization Methods 0.000 claims description 4
- 238000002844 melting Methods 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 abstract description 5
- 230000003595 spectral effect Effects 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000013528 artificial neural network Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000007373 indentation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000010297 mechanical methods and process Methods 0.000 description 2
- ORILYTVJVMAKLC-UHFFFAOYSA-N Adamantane Natural products C1C(C2)CC3CC1CC2C3 ORILYTVJVMAKLC-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/08—Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/02—Details
- G01N3/06—Special adaptations of indicating or recording means
- G01N3/068—Special adaptations of indicating or recording means with optical indicating or recording means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0058—Kind of property studied
- G01N2203/0069—Fatigue, creep, strain-stress relations or elastic constants
- G01N2203/0071—Creep
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/02—Details not specific for a particular testing method
- G01N2203/06—Indicating or recording means; Sensing means
- G01N2203/067—Parameter measured for estimating the property
- G01N2203/0676—Force, weight, load, energy, speed or acceleration
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention relates to the technical field of mechanical properties, and provides a method and a system for monitoring mechanical properties of a film material, wherein the method comprises the following steps: acquiring performance related data in the stress process of the aluminum metal film; determining the average thickness of the aluminum metal film according to the interference spectrum intensity, the incident angle of the light source and the refractive index; obtaining a film material creep index of the aluminum metal film according to a change rule of the performance related data; determining a creep performance interference index and a creep matching index of the aluminum metal film at each monitoring moment based on the creep index of the film material; constructing a performance monitoring matrix according to the performance related data, the creep index of the film material, the creep performance interference index and the creep matching index, and obtaining a correction thickness based on the performance monitoring matrix; and obtaining a mechanical property monitoring curve of the aluminum metal film based on the corrected thickness and the stress data of all the monitoring moments. The invention eliminates the optical error in the mechanical property test process by correcting the film thickness in the stress process.
Description
Technical Field
The invention relates to the technical field of mechanical properties of film materials, in particular to a method and a system for monitoring the mechanical properties of the film materials.
Background
The thin film material refers to a material layer with relatively thin thickness, generally in the range of nanometer to micrometer, has application in a plurality of fields such as semiconductor, optical device manufacturing, solar cells, integrated circuits and the like, plays a key role in modern science and engineering, and different application fields have different requirements on the mechanical properties of the thin film material, so that in order to ensure that the thin film material can perform the best performance in a specific field, the mechanical properties of the thin film material need to be monitored.
The traditional method for monitoring the mechanical properties of the film material mainly comprises a stretching method, a nano indentation method and the like, wherein the stretching method usually needs a large amount of materials to carry out experiments to obtain monitoring data, and for a very thin film, the sample can be damaged or destroyed in the placing process; the nano indentation method is difficult to overcome the influence of the substrate on the mechanical property of the film in the monitoring process, and an accurate monitoring result is difficult to obtain. The stretching method and the nanoindentation method can damage the film material to a certain extent, and the photodetection mechanics method overcomes the defects of the two methods, namely, a non-contact nondestructive measurement method is adopted, namely, when the mechanical property of the film material is monitored, no extra damage or abrasion is caused, the photodetection mechanics generally has higher monitoring precision, submicron-level surface displacement and strain can be monitored, the method is suitable for the precise measurement of the mechanical property of the film material, but the measuring range of the photodetection mechanics is generally limited by the wavelength and the resolution of an optical system, certain errors can occur when the mechanical property of the film material with different thicknesses is monitored, and the thickness of the film material can be changed due to the creep phenomenon in the process of being subjected to deformation of the pressure, so that certain errors occur when the mechanical property of the film material is monitored by the photodetection mechanics method.
Disclosure of Invention
The invention provides a method and a system for monitoring mechanical properties of a film material, which are used for solving the problem that errors exist in monitoring the mechanical properties of an aluminum metal film in the stress process by using a photodetection mechanical method, and the adopted technical scheme is as follows:
in a first aspect, an embodiment of the present invention provides a method for monitoring mechanical properties of a thin film material, the method comprising the steps of:
acquiring performance related data of each monitoring moment in the stress process of the aluminum metal film, wherein the performance related data comprise interference spectrum intensity, light source incidence angle, phase difference, refractive index and temperature;
determining the average thickness of the aluminum metal film at each monitoring moment according to the interference spectrum intensity, the light source incident angle, the phase difference and the refractive index at each monitoring moment; obtaining a creep index of a film material of the aluminum metal film at each monitoring moment according to a change rule of performance related data in the stress process of the aluminum metal film; determining a creep performance interference index of the aluminum metal film at each monitoring moment based on the film material creep index; obtaining the creep matching index of the aluminum metal film at each monitoring moment according to the creep performance interference index of the aluminum metal film at each monitoring moment;
constructing a performance monitoring matrix according to the performance related data, the creep index of the film material, the creep performance interference index and the creep matching index, and obtaining the correction thickness of the aluminum metal film at each monitoring moment based on the performance monitoring matrix by adopting a neural network model; and obtaining a mechanical property monitoring curve of the aluminum metal film based on the corrected thickness of the aluminum metal film at all monitoring moments and the stress data of the aluminum metal film.
Preferably, the method for determining the average thickness of the aluminum metal film at each monitoring time according to the interference spectrum intensity, the light source incident angle, the phase difference and the refractive index at each monitoring time comprises the following steps:
taking the product of the cosine value of the incident angle of the light source, the refractive index of the aluminum metal film at each monitoring moment and a preset parameter as a denominator, taking the product of the incident wavelength and the phase difference at each monitoring moment as a numerator, and taking the ratio of the numerator to the denominator as the average thickness of the aluminum metal film at each monitoring moment.
Preferably, the method for obtaining the creep index of the film material of the aluminum metal film at each monitoring moment according to the change rule of the performance related data in the stress process of the aluminum metal film comprises the following steps:
taking a natural constant as a base, and taking a calculation result taking the ratio of the temperature at each monitoring moment to the melting point temperature of the aluminum metal film as an index as a first change factor;
obtaining a calculation result taking a natural constant as a base number, taking the opposite number of the absolute value of the difference value between the average thickness of the aluminum metal film at each monitoring moment and the average thickness of the aluminum metal film at the previous monitoring moment as an index, and taking the sum of the calculation result and a preset parameter as a second change factor;
the creep index of the film material of the aluminum metal film at each monitoring moment is composed of a first change factor and a second change factor, wherein the creep index of the film material is in direct proportion to the first change factor, and the creep index of the film material is in inverse proportion to the second change factor.
Preferably, the method for determining the creep performance interference index of the aluminum metal film at each monitoring time based on the creep index of the film material comprises the following steps:
obtaining creep influence factors of each monitoring moment according to the variation of the interference spectrum intensity of the aluminum metal film at the adjacent monitoring moment;
taking the product of the creep index of the film material of the aluminum metal film at each monitoring moment and the creep influence factor as the input of a normalization function, and taking the output of the normalization function as the creep performance interference index of the aluminum metal film at each monitoring moment.
Preferably, the method for obtaining the creep influence factor at each monitoring time according to the variation of the interference spectrum intensity of the aluminum metal film at the adjacent monitoring time comprises the following steps:
taking each monitoring moment as a target moment, and taking a sequence formed by all monitoring moments from the monitoring starting moment to each target moment according to the time ascending order as a history influence set of each target moment;
taking the absolute value of the difference value between the interference spectrum intensities of the aluminum metal films corresponding to any two adjacent elements in the history influence set as a local variation;
and taking the average value of the accumulated values of the local variation on the history influence set of each target moment as a creep influence factor of each monitoring moment.
Preferably, the method for obtaining the creep matching index of the aluminum metal film at each monitoring time according to the creep performance interference index of the aluminum metal film at each monitoring time comprises the following steps:
taking the absolute value of the difference value between creep performance interference indexes corresponding to any two adjacent elements in the history influence set at each monitoring moment as a first difference value;
and taking the average value of the accumulated value of the reciprocal of the sum of the first difference value and the preset parameter on the history influence set of each monitoring moment as the creep matching index of the aluminum metal film at each monitoring moment.
Preferably, the method for constructing the performance monitoring matrix according to the performance related data, the creep index of the film material, the creep performance interference index and the creep matching index comprises the following steps:
respectively taking sequences consisting of interference spectrum intensity, refractive index, film material creep index, creep performance interference index and creep matching index at all monitoring moments in the monitoring process according to time ascending sequence as an interference spectrum intensity sequence, a refractive index sequence, a film material creep index sequence, a creep performance interference index sequence and a creep matching index sequence;
and taking a matrix consisting of an interference spectrum intensity sequence, a refractive index sequence, a film material creep index sequence, a creep performance interference index sequence and a creep matching index sequence as a performance monitoring matrix.
Preferably, the method for obtaining the corrected thickness of the aluminum metal film at each monitoring moment based on the performance monitoring matrix by using the neural network model comprises the following steps:
taking the performance monitoring matrix as input of a neural network model, and obtaining a correction spectrum sequence by using the neural network model; and obtaining the corrected thickness of the aluminum metal film at each monitoring moment based on the corrected spectrum sequence.
Preferably, the method for obtaining the mechanical property monitoring curve of the aluminum metal film based on the corrected thickness of the aluminum metal film and the stress data of the aluminum metal film at all monitoring moments comprises the following steps:
taking the ratio of the corrected thickness of the aluminum metal film at the monitoring starting moment to the corrected thickness of the aluminum metal film at each monitoring moment as a scale factor at each monitoring moment; taking the product of the initial area of the aluminum metal film and the scale factor of each monitoring moment as the area of the aluminum metal film at each monitoring moment;
taking the pressure value received by the aluminum metal film at each monitoring moment in the monitoring process as an abscissa, taking the area of the aluminum metal film at each monitoring moment as an ordinate, and taking a curve obtained by adopting a curve fitting algorithm based on the abscissa and the ordinate as a mechanical property monitoring curve of the aluminum metal film.
In a second aspect, an embodiment of the present invention further provides a system for monitoring mechanical properties of a thin film material, including a memory, a processor, and a computer program stored in the memory and running on the processor, where the processor implements the steps of any one of the methods described above when executing the computer program.
The beneficial effects of the invention are as follows: according to the invention, the creep index of the film material is constructed through the change characteristics of the aluminum metal film when creep occurs, and the creep performance interference index and the creep matching index are constructed through the change characteristics of the interference spectrum intensity, the refractive index and the creep index of the film material, wherein the creep performance interference index reflects whether the change of the thickness of the aluminum metal film has the synergetic characteristics or not under the conditions of the interference spectrum intensity, the refractive index and the creep phenomenon of the aluminum metal film in the stress process; constructing a performance monitoring matrix based on the interference spectrum intensity, the refractive index, the creep performance interference index and the creep matching index of the film material at all monitoring moments, and obtaining a correction thickness of the aluminum metal film and the area of the aluminum metal film at each monitoring moment in the stress process based on the performance monitoring matrix to obtain a film material pressure-area graph with higher precision; the invention solves the problem that errors exist when the mechanical properties of the film materials with different thicknesses are monitored by the optical measurement mechanical method, so that the monitoring result of the mechanical properties in the stress process of the aluminum metal film is more in line with the actual stress situation of the aluminum metal film.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions of the prior art, the drawings which are used in the description of the embodiments or the prior art will be briefly described, it being obvious that the drawings in the description below are only some embodiments of the invention, and that other drawings can be obtained according to these drawings without inventive faculty for a person skilled in the art.
FIG. 1 is a schematic flow chart of a method for monitoring mechanical properties of a thin film material according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of an aluminum metal film according to an embodiment of the present invention;
fig. 3 is a flowchart of an implementation of a method for monitoring mechanical properties of a thin film material according to an embodiment of the present invention.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1, a flowchart of a method for monitoring mechanical properties of a thin film material according to an embodiment of the invention is shown, the method includes the following steps:
and S001, acquiring performance related data of each monitoring moment in the stress process of the aluminum metal film.
The aluminum metal film is a film material commonly used in the industry and manufacturing industry at the present stage, so the aluminum metal film is used as a monitoring object, the stepping motor pushes the air cylinder to apply pressure to the film material, and the position relation between the stepping motor pushes the air cylinder and the aluminum metal film is shown in figure 2. In the continuous stress process of the aluminum metal film, pressure data applied by each monitoring moment stepping motor pushing the air cylinder, namely pressure values born by the film material, are collected through the pressure sensor, and the ambient temperature of the local space where the aluminum metal film is located at each monitoring moment is collected through the temperature sensor.
Further, the initial area of the aluminum metal film is set as follows by collecting the spectrum data of the film material through a Michelson laser interferometer，/>Size-checked value->The wavelength of the incident light wave is recorded as +.>Recording the incident angle as +.>The invention takes the experimental value of 0 DEG, namely, the Michelson laser interferometer is vertical to the upper part of the aluminum metal film, and because the collected spectral data has noise due to factors such as environmental interference and the like in the process of collecting the spectral data, the invention carries out denoising treatment on the obtained spectral data, and the invention uses the wavelet denoising technology to carry out denoising treatment on the obtained spectral data so as to adapt to different types of noise such as nonlinear noise, gaussian noise and the like, and obtains the interference spectrum intensity and the phase difference number of each monitoring moment through the denoised spectral dataAnd thus the refractive index. The wavelet denoising is a known technique, and the specific process is not repeated in the invention. The acquisition interval between two adjacent monitoring moments is T, the number of times of data acquisition in the monitoring process is N, the size of T, N in the invention is respectively taken as an empirical value of 1s and 300, and the interference spectrum intensity, the light source incident angle, the phase difference, the refractive index and the temperature acquired at each monitoring moment are taken as performance related data. It should be noted that the practitioner may select a suitable laser interferometer model and a suitable size of the film material according to the type of the monitoring film material.
So far, the performance related data of each monitoring moment is obtained and used for the characteristic analysis in the subsequent aluminum metal film stress process.
Step S002, the creep index of the film material of the aluminum metal film at each monitoring moment is obtained according to the change rule of the performance related data in the stress process of the aluminum metal film.
When the aluminum metal film is subjected to multi-wavelength interference during the pressure application to the aluminum metal film to acquire spectrum data, the aluminum metal film thickness is changed due to the fact that creep phenomenon possibly occurs in the aluminum metal film, and therefore the measurement result of the mechanical property of the aluminum metal film is affected. Therefore, the method evaluates the area change quantity of the aluminum metal film in the monitoring process by analyzing the change characteristics of the aluminum metal film in the stress process at different monitoring moments.
In the invention, firstly, the average thickness of the aluminum metal film at each monitoring moment is determined based on a film interference optical path difference formula and the phase difference and the refractive index obtained at each monitoring moment in the invention, and the calculation formula of the average thickness of the aluminum metal film at the ith monitoring moment is as follows:
in the method, in the process of the invention,for the i-th monitoring time, the average thickness of the aluminum metal film,/>Indicating the phase difference of the film material at the ith time point, etc.>Representing the magnitude of the incident angle, the incident angle is set to +.>，/>Indicating the refractive index of the film material at the ith time point,/-)>Representing the wavelength of the incident light wave, ">The size was examined at 600nm.
Secondly, because the aluminum metal film is subjected to continuous stress in the process of monitoring the mechanical property of the aluminum metal film, creep phenomenon, namely the phenomenon that the thickness of the aluminum metal film changes along with time, when the aluminum metal film has the creep phenomenon, the spectrum data obtained at each monitoring moment in the monitoring process changes, and compensation treatment is needed. The creep index of the film material is constructed, the creep degree of the aluminum metal film at each monitoring moment is reflected, and the creep index of the film material at the ith monitoring momentThe calculation formula of (2) is as follows:
in the method, in the process of the invention,is the creep index of the film material at the ith monitoring moment,/->T is the measured temperature of the aluminum metal film at the ith monitoring time, the melting point temperature of the aluminum metal film, +.>、/>The average thickness of the aluminum metal film at the ith and ith-1 monitoring time,/, respectively>Is an exponential function with a base of natural constant.
Wherein the creep phenomenon of the aluminum metal film has a larger relation with the temperature, the higher the measured temperature in the local space where the aluminum metal film is located at the ith monitoring moment, the higher the possibility of the creep phenomenon at the ith monitoring moment, the first change factorThe greater the value of (2); when creep occurs in the aluminum metal film, the average thickness of the two adjacent monitoring moments slightly changes, and in order to improve the sensitivity to the slight changes, the average thickness variation of the aluminum metal film at the two adjacent monitoring moments is +.>The treatment is carried out, the more obvious the variation of the average thickness of the aluminum metal film is at two adjacent monitoring moments, the second variation factor is +>The greater the value of (2).
Thus, the creep index of the film material of the aluminum metal film at each monitoring moment is obtained, so that the creep performance interference index of the aluminum metal film at each monitoring moment can be conveniently and subsequently determined.
And S003, determining the creep performance interference index of the aluminum metal film at each monitoring moment based on the creep indexes of the film material, and obtaining the creep matching index of the aluminum metal film at each monitoring moment according to the creep performance interference index.
In order to further reflect the measured data of adjacent monitoring moments of the aluminum metal film in the stress process and the correlation degree of the change of the interference spectrum intensity and the creep phenomenon of the aluminum metal film, for any one monitoring moment, marking each monitoring moment as a target moment, taking a sequence formed by all monitoring moments from the starting moment to each target moment according to the ascending order of time as a history influence set of each target moment, and recording the history influence set of the ith target moment as. And reflecting the influence degree of the creep phenomenon on each target moment according to the change of the interference spectrum intensity of each monitoring moment in the history influence set. Based on the above analysis, a creep performance interference index is constructed here, and the creep performance interference index +_for the ith monitoring time is calculated>：
In the method, in the process of the invention,is the creep influence factor at the ith monitoring instant,/->Is a history influence set->The number of elements in j is the history influence set +.>The j-th monitoring moment,/, of (a)>、/>The interference spectrum intensities at the ith and jth monitoring moments are respectively;
is the creep performance disturbance index at the ith monitoring time,/-)>Is the creep index of the film material at the ith monitoring instant,/-)>The normalization function is used for obtaining the creep performance interference index at each monitoring moment based on the creep influence factors at all monitoring moments and the creep indexes of the film material after calculating the creep influence factors at all monitoring moments and the creep indexes of the film material.
When creep occurs in the aluminum metal film at the ith monitoring time, the average thickness of the aluminum metal film is gradually reduced from thick to thin, i.e. the thickness of the aluminum metal film is gradually reduced along with the change of time, so that the difference between the interference peak and the interference valley is gradually reduced, i.e. the interference spectrum intensity is gradually weakened, and the smaller the difference between the interference spectrum intensities at adjacent monitoring times is, the local change amount isThe smaller the value of (2) the creep influence factor +.>The smaller the value of (2); when creep occurs in the aluminum metal film at the ith monitoring time, the average thickness of the aluminum metal film is less changed, corresponding to +.>The greater the value of (a), i.e. from a thin film of aluminum metalWhen the interference spectrum intensity changes due to the creep phenomenon, the calculated creep performance interference index changes more stably, and when the interference spectrum intensity changes due to other external reasons, the calculated creep performance interference index changes more severely.
According to the steps, the creep performance interference index of each monitoring moment is obtained respectively, and the creep matching index of each target moment is calculated based on the creep performance interference index of each monitoring moment in the history influence set of each target moment. Creep matching index at the ith monitoring timeThe calculation formula of (2) is as follows:
in the method, in the process of the invention,is the creep matching index at the ith monitoring instant, < +.>Is a history influence set->The number of elements in j, j+1 are the history influence sets +.>The j-th, j+1-th monitoring moment,/in (a) of (b)>、/>The creep performance interference indexes at the j-th and j+1-th monitoring moments are respectively.
Wherein the larger the creep performance interference index difference between adjacent monitoring moments is, namelyThe larger the more likely it is that the change in the interference spectrum is due to other external causes; the smaller the difference of the creep performance interference indexes at adjacent monitoring moments, the more likely the change of the interference spectrum is caused by the creep of the aluminum metal film, correspondingly, +.>The greater the value of (2).
So far, the creep matching index of the aluminum metal film at each monitoring moment is obtained and is used for constructing a subsequent performance monitoring matrix.
And S004, inputting the constructed performance monitoring matrix into a neural network model to obtain the area of the aluminum metal film, and obtaining a mechanical performance monitoring curve of the aluminum metal film based on the area of the aluminum metal film and stress data of the aluminum metal film.
According to the steps, the creep index, the creep performance interference index and the creep matching index of the film material at each monitoring moment are respectively obtained. The implementation flow of the mechanical property monitoring curve obtained based on the performance related data at each monitoring moment, the creep index of the film material, the creep performance interference index and the creep matching index is shown in figure 3. And secondly, respectively taking a sequence formed by the interference spectrum intensity, the refractive index, the creep index of the film material, the creep performance interference index and the creep matching index according to the time ascending sequence as an interference spectrum intensity sequence, a refractive index sequence, a film material creep index sequence, a creep performance interference index sequence and a creep matching index sequence in a data processing module of the mechanical property monitoring system at all monitoring moments in the monitoring process. Further, a matrix formed by an interference spectrum intensity sequence, a refractive index sequence, a film material creep index sequence, a creep performance interference index sequence and a creep matching index sequence is used as a performance monitoring matrix, and the interference spectrum intensity sequence, the refractive index sequence, the film material creep index sequence, the creep performance interference index sequence and the creep matching index sequence respectively correspond to one row of elements in the performance monitoring matrix.
Furthermore, the performance monitoring matrix is used as the input of a neural network model, the structure of the neural network model is an RNN (RNN-cycle neural network), the cross entropy function is used as a loss function, the Adam algorithm is used as an optimization algorithm, the neural network is a known technology, and the detailed process is not repeated. And taking the output of the neural network model as a correction spectrum sequence, wherein the correction spectrum sequence is a sequence consisting of correction refractive indexes at each monitoring moment, and substituting each element in the correction spectrum sequence into the calculation formula of the average thickness of the aluminum metal film at each monitoring moment to obtain the correction thickness of the aluminum metal film at each monitoring moment. In the invention, the ratio of the average thickness to the correction thickness of the aluminum metal film at each monitoring moment is taken as a scale factor, the magnitude of the scale factor reflects the affected degree of the mechanical property at each monitoring moment before and after correction, and the smaller the value of the scale factor is, the lower the affected degree of the mechanical property of the aluminum metal film at the corresponding monitoring moment is. The area of the aluminum metal film at each monitoring time is obtained based on the scale factor at each monitoring time and the initial area of the aluminum metal film. The calculation formula of the area of the aluminum metal film at the ith monitoring time is as follows:
in the method, in the process of the invention,is the i-th monitoring time aluminum metal film area, < >>Is the initial area of the aluminum metal film, +.>The size of (2) is checked by the check value +.>，/>、/>The average thickness and the corrected thickness at the ith monitoring time are respectively.
According to the steps, a correction module in the mechanical property monitoring system respectively acquires the area of the aluminum metal film at each monitoring moment, then takes the pressure value received by the aluminum metal film at each monitoring moment in the monitoring process as an abscissa, the area of the aluminum metal film at each monitoring moment as an ordinate, obtains a pressure-area performance curve based on the abscissa by utilizing a least square fitting algorithm, uploads the pressure-area performance curve as a mechanical property monitoring curve of the aluminum metal film to a performance analysis module of the mechanical property monitoring system, and a monitoring person evaluates the mechanical property of the aluminum metal film according to the extreme point distribution in the obtained mechanical property monitoring curve and stores the evaluation result of the mechanical property in a database of the mechanical property monitoring system.
Based on the same inventive concept as the method, the embodiment of the invention also provides a system for monitoring the mechanical properties of the film material, which comprises a memory, a processor and a computer program stored in the memory and running on the processor, wherein the processor realizes the steps of any one of the method for monitoring the mechanical properties of the film material when executing the computer program.
In this specification, each embodiment is described in a progressive manner, and identical and similar parts of each embodiment are all referred to each other, and each embodiment mainly describes differences from other embodiments. The foregoing description of the preferred embodiments of the present invention is not intended to be limiting, but rather, any modifications, equivalents, improvements, etc. that fall within the principles of the present invention are intended to be included within the scope of the present invention.
Claims (3)
1. The method for monitoring the mechanical properties of the film material is characterized by comprising the following steps of:
acquiring performance related data of each monitoring moment in the stress process of the aluminum metal film, wherein the performance related data comprise interference spectrum intensity, light source incidence angle, phase difference, refractive index and temperature;
determining the average thickness of the aluminum metal film at each monitoring moment according to the interference spectrum intensity, the light source incident angle, the phase difference and the refractive index at each monitoring moment; obtaining a creep index of a film material of the aluminum metal film at each monitoring moment according to a change rule of performance related data in the stress process of the aluminum metal film; determining a creep performance interference index of the aluminum metal film at each monitoring moment based on the film material creep index; obtaining the creep matching index of the aluminum metal film at each monitoring moment according to the creep performance interference index of the aluminum metal film at each monitoring moment;
constructing a performance monitoring matrix according to the performance related data, the creep index of the film material, the creep performance interference index and the creep matching index, and obtaining the correction thickness of the aluminum metal film at each monitoring moment based on the performance monitoring matrix by adopting a neural network model; acquiring a mechanical property monitoring curve of the aluminum metal film based on the corrected thickness of the aluminum metal film at all monitoring moments and the stress data of the aluminum metal film;
the creep index of the film material has the following expression:
in the method, in the process of the invention,is the creep index of the film material at the ith monitoring moment,/->T is the measured temperature of the aluminum metal film at the ith monitoring time, the melting point temperature of the aluminum metal film, +.>、/>The ith and the ith-1 th monitoring moments are respectively aluminumAverage thickness of metallic film->Is an exponential function with a natural constant as a base;
the creep influence factor is expressed as:
in the method, in the process of the invention,is the creep influence factor at the ith monitoring instant,/->Is a history influence set->The number of elements in j is the history influence set +.>The j-th monitoring moment,/, of (a)>、/>The interference spectrum intensities at the ith and jth monitoring moments are respectively;
the creep performance interference index is expressed as:
in the method, in the process of the invention,is the creep influence factor at the ith monitoring instant,/->Is the creep performance disturbance index at the ith monitoring time,/-)>Is the creep index of the film material at the ith monitoring instant,/-)>Is a normalization function
The creep matching index is expressed as:
in the method, in the process of the invention,is the creep matching index at the ith monitoring instant, < +.>Is a history influence set->The number of elements in j, j+1 are the history influence sets +.>The j-th, j+1-th monitoring moment,/in (a) of (b)>、/>Creep performance interference indexes at the j-th and j+1-th monitoring moments are respectively;
the method for constructing the performance monitoring matrix according to the performance related data, the creep index of the film material, the creep performance interference index and the creep matching index comprises the following steps:
respectively taking sequences consisting of interference spectrum intensity, refractive index, film material creep index, creep performance interference index and creep matching index at all monitoring moments in the monitoring process according to time ascending sequence as an interference spectrum intensity sequence, a refractive index sequence, a film material creep index sequence, a creep performance interference index sequence and a creep matching index sequence;
taking a matrix consisting of an interference spectrum intensity sequence, a refractive index sequence, a film material creep index sequence, a creep performance interference index sequence and a creep matching index sequence as a performance monitoring matrix;
the method for obtaining the correction thickness of the aluminum metal film at each monitoring moment based on the performance monitoring matrix by adopting the neural network model comprises the following steps:
taking the performance monitoring matrix as input of a neural network model, and obtaining a correction spectrum sequence by using the neural network model; substituting each element in the corrected spectrum sequence into a calculation formula of the average thickness of the aluminum metal film at each monitoring moment to obtain the corrected thickness of the aluminum metal film at each monitoring moment;
the method for acquiring the mechanical property monitoring curve of the aluminum metal film based on the corrected thickness of the aluminum metal film at all monitoring moments and the stress data of the aluminum metal film comprises the following steps:
taking the ratio of the average thickness of the aluminum metal film at the monitoring starting moment to the corrected thickness of the aluminum metal film at each monitoring moment as a scale factor at each monitoring moment; taking the product of the initial area of the aluminum metal film and the scale factor of each monitoring moment as the area of the aluminum metal film at each monitoring moment;
taking the pressure value received by the aluminum metal film at each monitoring moment in the monitoring process as an abscissa, taking the area of the aluminum metal film at each monitoring moment as an ordinate, and taking a curve obtained by adopting a curve fitting algorithm based on the abscissa and the ordinate as a mechanical property monitoring curve of the aluminum metal film.
2. The method for monitoring mechanical properties of a thin film material according to claim 1, wherein the method for determining the average thickness of the aluminum metal thin film at each monitoring time according to the interference spectrum intensity, the light source incident angle, the phase difference and the refractive index at each monitoring time comprises the following steps:
taking the product of the cosine value of the incident angle of the light source, the refractive index of the aluminum metal film at each monitoring moment and a preset parameter as a denominator, taking the product of the incident wavelength and the phase difference at each monitoring moment as a numerator, and taking the ratio of the numerator to the denominator as the average thickness of the aluminum metal film at each monitoring moment.
3. A system for monitoring mechanical properties of a thin film material, comprising a memory, a processor and a computer program stored in the memory and running on the processor, the processor implementing the steps of the method according to any one of claims 1-2 when the computer program is executed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410038147.3A CN117554185B (en) | 2024-01-11 | 2024-01-11 | Method and system for monitoring mechanical properties of film material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410038147.3A CN117554185B (en) | 2024-01-11 | 2024-01-11 | Method and system for monitoring mechanical properties of film material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN117554185A CN117554185A (en) | 2024-02-13 |
| CN117554185B true CN117554185B (en) | 2024-03-15 |
Family
ID=89820804
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202410038147.3A Active CN117554185B (en) | 2024-01-11 | 2024-01-11 | Method and system for monitoring mechanical properties of film material |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117554185B (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5682828A (en) * | 1979-12-10 | 1981-07-06 | Asahi Chem Ind Co Ltd | Preparation of polyethylene resin foamed article |
| EP1247752A1 (en) * | 2001-04-02 | 2002-10-09 | Rexam Beverage Can Company | Resealable closure for open end of beverage containers |
| CN1793824A (en) * | 2005-12-20 | 2006-06-28 | 西安交通大学 | Method of testing room temperature press-in creeping performance of metal film |
| CN1875447A (en) * | 2003-10-31 | 2006-12-06 | 皇家飞利浦电子股份有限公司 | Radio-frequency microelectromechanical systems and a method of manufacturing such systems |
| CN103210704A (en) * | 2010-11-15 | 2013-07-17 | 赛姆布兰特有限公司 | Method for reducing creep corrosion |
| CN105492938A (en) * | 2013-08-30 | 2016-04-13 | 富士胶片株式会社 | Stress display member and strain measurement method using stress display member |
| CN106756796A (en) * | 2017-03-09 | 2017-05-31 | 吉林大学 | A kind of preparation method of the nanocrystalline copper tantalum alloy for improving nanocrystalline copper mechanical property |
| JP2021088698A (en) * | 2019-11-22 | 2021-06-10 | 三菱ケミカル株式会社 | Adhesive sheet, layered sheet, flexible image display device member and flexible image display device |
-
2024
- 2024-01-11 CN CN202410038147.3A patent/CN117554185B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5682828A (en) * | 1979-12-10 | 1981-07-06 | Asahi Chem Ind Co Ltd | Preparation of polyethylene resin foamed article |
| EP1247752A1 (en) * | 2001-04-02 | 2002-10-09 | Rexam Beverage Can Company | Resealable closure for open end of beverage containers |
| CN1875447A (en) * | 2003-10-31 | 2006-12-06 | 皇家飞利浦电子股份有限公司 | Radio-frequency microelectromechanical systems and a method of manufacturing such systems |
| CN1793824A (en) * | 2005-12-20 | 2006-06-28 | 西安交通大学 | Method of testing room temperature press-in creeping performance of metal film |
| CN103210704A (en) * | 2010-11-15 | 2013-07-17 | 赛姆布兰特有限公司 | Method for reducing creep corrosion |
| CN105492938A (en) * | 2013-08-30 | 2016-04-13 | 富士胶片株式会社 | Stress display member and strain measurement method using stress display member |
| CN106756796A (en) * | 2017-03-09 | 2017-05-31 | 吉林大学 | A kind of preparation method of the nanocrystalline copper tantalum alloy for improving nanocrystalline copper mechanical property |
| JP2021088698A (en) * | 2019-11-22 | 2021-06-10 | 三菱ケミカル株式会社 | Adhesive sheet, layered sheet, flexible image display device member and flexible image display device |
Non-Patent Citations (9)
| Title |
|---|
| Artesunate Suppresses Choroidal Melanoma Vasculogenic Mimicry Formation and Angiogenesis via the Wnt/CaMKII Signaling Axis;Geng, BC;《FRONTIERS IN ONCOLOGY》;20210812;第11卷;1-4 * |
| Yang, SS .Characterisation of low-temperature creep deformation and primary creep stage of TA2 using small punch creep test.《ENGINEERING FRACTURE MECHANICS》.2019,第205卷1-9. * |
| 一种基于辐射制冷和太阳能制热的温度自适应双层薄膜（英文）;闵心喆;《Science Bulletin》;20230430;第68卷(第18期);2054-2062 * |
| 不同成分金属玻璃薄膜在纳米压入与划痕中的力学响应;马昕迪;《中国科学:物理学》;20230131;73-86 * |
| 基于ASME标准的高温阀门结构强度分析;陈时健;《流体机械》;20231030;第51卷(第10期);89-96 * |
| 电子元件、组件;《中国无线电电子学文摘》;20090225(第01期);77-84 * |
| 聚苯乙烯薄膜表面粘弹性行为的纳米压痕研究;张强;《 表面技术》;20180320;第47卷(第3期);237-243 * |
| 金属薄膜材料蠕变性能研究进展;马敏伟;罗迎社;;湘潭师范学院学报(自然科学版);20090325(第01期);76-78 * |
| 高温透波陶瓷材料研究进展;蔡德龙;陈斐;何凤梅;贾德昌;匡宁;苗蕾;邱海鹏;王洪升;徐念喜;杨治华;于长清;张俊武;张伟儒;周延春;;现代技术陶瓷;20190215(第Z1期);6-122 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN117554185A (en) | 2024-02-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US20080049214A1 (en) | Measuring Diffractive Structures By Parameterizing Spectral Features | |
| KR20040023604A (en) | Determining large deformations and stresses of layered and graded structures to include effects of body forces | |
| CN111208142B (en) | Crack damage quantitative detection method based on dynamic time warping correlation characteristics | |
| CN112629421B (en) | Film thickness measuring method based on fast Fourier transform | |
| Liu et al. | Machine learning aided solution to the inverse problem in optical scatterometry | |
| CN112304478B (en) | Residual stress testing method based on creep profile method | |
| CN115391726B (en) | Fitting optimization method and related device for ellipsometry system | |
| CN111351442A (en) | Film thickness control method, device and equipment and computer readable storage medium | |
| CN111895923A (en) | Method for fitting and measuring thickness of thin film | |
| CN117554185B (en) | Method and system for monitoring mechanical properties of film material | |
| CN117330521A (en) | Clinical laboratory uses blood smear system | |
| CN110672058B (en) | On-line calibration data sequence matching method and device of sensor for structure monitoring | |
| CN117112981A (en) | Optimal acquisition method for steel plate thickness measurement data | |
| CN117153298A (en) | Film parameter reverse optimization method based on ellipsometry | |
| KR20080105958A (en) | Method of nondestructive testing for periodic structure | |
| CN113267454A (en) | Thin film quality detection method, thin film quality detection device, electronic device, and storage medium | |
| CN108344698B (en) | Ellipsometry method for inverting rough surface optical constant based on electromagnetic first-order principle | |
| Harasim et al. | Accuracy improvement of Fiber Bragg Grating peak wavelength demodulation using wavelet transform and various center wavelength detection algorithms | |
| CN104880161A (en) | Method for measuring solid material surface roughness by using elliptical polarization parameter | |
| JP3293211B2 (en) | Laminate film evaluation method, film evaluation apparatus and thin film manufacturing apparatus using the same | |
| CN112949197B (en) | Flat convex lens curvature radius online measurement method based on deep learning | |
| CN117405686B (en) | Defect detection method and system combined with laser interference imaging | |
| CN117557574B (en) | Material parameter detection method and system based on image processing | |
| CN117685898B (en) | Data processing method and device for in-situ detection of curing and forming of composite material | |
| CN117249773B (en) | Film thickness and refractive index measuring method of near-withdrawal coherent thick film |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |