CN117553690A - Displacement measurement precision improvement method and system based on resonance modulation - Google Patents
Displacement measurement precision improvement method and system based on resonance modulation Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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Abstract
The invention belongs to the technical field of displacement measurement, and particularly relates to a displacement measurement precision improving method and system based on resonance modulation, wherein the method comprises the following steps: calculating a modulated electric signal of the light source reaching the photoelectric detector through the whole system to remove a direct current signal, and expanding according to a first Bessel function; the modulation frequency of the resonant displacement vibrator is a reference signal, and the amplitude of the phase-locked amplified frequency-doubling, frequency-tripling and frequency-quadrupling signals is calculated; the displacement amplitude of the electric displacement driver is calculated, thereby calculating the measured displacement. The invention can eliminate the problem of displacement measurement accuracy reduction caused by laser light intensity fluctuation influence and unstable modulation amplitude of the resonant displacement vibrator by phase locking the frequency-doubling signal amplitude, the frequency-tripling signal amplitude and the frequency-quadrupling signal amplitude. The invention eliminates the problems of light intensity fluctuation of the light source, unstable displacement amplitude of the resonant displacement vibrator, various noises and the like, which reduce displacement measurement precision, and improves the displacement measurement precision.
Description
Technical Field
The invention belongs to the technical field of displacement measurement, and particularly relates to a displacement measurement precision improving method and system based on resonance modulation.
Background
With the development of high-end high-precision machining and manufacturing fields, the requirements on a high-precision displacement measurement system are higher and higher, and particularly, the displacement measurement with nm-level precision is more and higher. The optical type displacement measurement is most widely applied, mainly comprises optical interference type displacement measurement and grating type displacement measurement, the sensitivity of the optical type displacement measurement is mainly realized by optical subdivision and high-power electrical subdivision, but the precision of the optical type displacement measurement is easily influenced by light source fluctuation, environmental noise, circuit noise and the like.
Disclosure of Invention
Aiming at the problems that the high-power subdivision is sensitive to light intensity fluctuation of a light source, is influenced by noise, has limited measurement precision and the like in the existing displacement measurement, the invention provides a displacement measurement precision improving method and system based on resonance type modulation.
In order to solve the technical problems, the invention adopts the following technical scheme:
a displacement measurement precision improving method based on resonance modulation comprises the following steps:
s1, calculating that a light source reaches a photoelectric detector through the whole system to remove a modulated electric signal of a direct current signal, and expanding according to a Bessel function of a first type;
s2, calculating the amplitude of the phase-locked amplified frequency-doubling 1 omega, frequency-doubling 2 omega, frequency-tripling 3 omega and frequency-quadrupling 4 omega signals by taking the modulation frequency omega of the resonant displacement vibrator as a reference signal;
s3, calculating the displacement amplitude d of the electric displacement driver 0 Thereby calculating the measured position displacement d x 。
The method for calculating the modulated electric signal of the direct current signal which is transmitted by the light source to the photoelectric detector through the whole system in the S1 comprises the following steps:
V(d x )＝I in Kcos<A[d x -d 0 sin(ωt)]> (1)
wherein I is in Is incident lightStrong; k is a coefficient related to photoelectric detection response and a circuit of the optical path and is a determined value; d, d x For the measured position; a is a coefficient related to a displacement measurement mode, and the coefficient of A is different according to different modes such as grating displacement measurement, laser interference displacement measurement, prism beam splitting interference displacement measurement and the like and is a determined value; d, d 0 sin (ωt) is the modulation displacement of the resonant displacement vibrator, d 0 Modulation displacement amplitude, d, of a resonant displacement vibrator 0 The voltage of the resonant displacement vibrator can be used for realizing adjustment, omega is the modulation angular frequency of the resonant displacement vibrator, t is time, and d x For the measured position.
The method for expanding the S1 according to the Bessel function of the first type comprises the following steps:
wherein J is x Is a Bessel function of order x.
The method for calculating the amplitude of the phase-locked amplified frequency-doubling 1 omega, frequency-doubling 2 omega, frequency-tripling 3 omega and frequency-quadrupling 4 omega signal in the S2 comprises the following steps:
the modulation frequency omega of the resonant displacement vibrator is a reference signal, and the signal amplitudes of the frequency doubling 1 omega, the frequency doubling 2 omega, the frequency tripling 3 omega and the frequency quadrupling 4 omega are respectively as follows:
V 1ω ＝I in KJ 1 (Ad 0 )sin(Ad x ) (3)
V 2ω ＝I in KJ 2 (Ad 0 )cos(Ad x ) (4)
V 3ω ＝I in KJ 3 (Ad 0 )sin(Ad x ) (5)
V 4ω ＝I in KJ 4 (Ad 0 )cos(Ad x ) (6)。
calculating the displacement amplitude d of the electric displacement driver in the step S3 0 The method of (1) is as follows:
wherein,is->Is an inverse function of (c).
The measured position measurement d is calculated in the step S3 x The method of (1) is as follows:
any three amplitudes of the signal amplitudes of the frequency doubling 1 omega, the frequency doubling 2 omega, the frequency tripling 3 omega and the frequency quadrupling 4 omega of the detection circuit can be obtained through digital phase locking amplification, so that the measured position d can be accurately obtained x 。
The utility model provides a displacement measurement accuracy improves system based on resonance formula modulation, includes first light source, beam splitter prism, reflecting prism, first resonance formula displacement vibrator, first resonance formula displacement vibration controller, first lock-in is amplified, by the reflecting prism of displacement, first photoelectric detector, beam splitter prism sets up in the light path direction of first light source, be provided with reflecting prism on beam splitter prism's the reflection light path, reflecting prism's bottom and first resonance formula displacement vibrator fixed connection, first resonance formula displacement vibrator and first resonance formula displacement vibration controller electric connection, first resonance formula displacement vibration controller and first lock-in are amplified electric connection, by the reflecting prism of displacement setting on beam splitter prism's transmission light path, first lock-in is amplified and first photoelectric detector electric connection.
The reflection prism comprises a first reflection mirror and a second reflection mirror, wherein the first reflection mirror is arranged on a reflection light path of the beam splitter prism, the second reflection mirror is arranged on a reflection light path of the first reflection mirror, the beam splitter prism is arranged on a reflection light path of the second reflection mirror, a first photoelectric detector is arranged on a reflection light path of the beam splitter prism, the reflection prism comprises a third reflection mirror and a fourth reflection mirror, the third reflection mirror is arranged on a transmission light path of the beam splitter prism, the fourth reflection mirror is arranged on a reflection light path of the third reflection mirror, the beam splitter prism and the first photoelectric detector are sequentially arranged on a reflection light path of the fourth reflection mirror, and the first photoelectric detector is arranged on a transmission light path of the beam splitter prism.
The utility model provides a displacement measurement accuracy improves system based on resonance formula modulation, includes second light source, first grating, second resonance formula displacement vibrator, second resonance formula displacement vibration controller, second lock-in amplifier, second photoelectric detector, grid, second grating have been set gradually in the light path direction of second light source, be provided with second photoelectric detector on the transmission light way of second grating, second photoelectric detector electric connection has the second lock-in amplifier, second lock-in amplifier electric connection has the second resonance formula displacement vibration controller, second resonance formula displacement vibration controller electric connection has the second resonance formula displacement vibrator, second resonance formula displacement vibrator and second grating fixed connection.
The utility model provides a displacement measurement accuracy improves system based on resonance formula modulation, includes third light source, third grating, fourth grating, third resonance formula displacement vibrator, third resonance formula displacement vibration controller, third lock-in amplifier, third photoelectric detector, be provided with the third grating on the light path direction of third light source, be provided with the fourth grating on the transmission light way of third grating, be provided with third photoelectric detector on the reflection light way of fourth grating, third grating and third resonance formula displacement vibrator fixed connection, third resonance formula displacement vibrator and third resonance formula displacement vibration controller electric connection, third resonance formula displacement vibration controller and third lock-in amplifier electric connection, third lock-in amplifier and third photoelectric detector electric connection.
Compared with the prior art, the invention has the beneficial effects that:
the invention can eliminate the problem of displacement measurement accuracy reduction caused by laser light intensity fluctuation influence and unstable modulation amplitude of the resonant displacement vibrator by phase locking the frequency-doubling signal amplitude, the frequency-tripling signal amplitude and the frequency-quadrupling signal amplitude. The invention eliminates the problems of light intensity fluctuation of a light source, unstable displacement amplitude of a resonant displacement vibrator, decline of displacement measurement precision caused by various noises and the like, improves the displacement measurement precision, does not need to have high stability requirements on sine and cosine signals in traditional displacement measurement, and reduces the requirements of a system on the stability of the light source and the stability of the system.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below. It will be apparent to those skilled in the art from this disclosure that the drawings described below are merely exemplary and that other embodiments may be derived from the drawings provided without undue effort.
The structures, proportions, sizes, etc. shown in the present specification are shown only for the purposes of illustration and description, and are not intended to limit the scope of the invention, which is defined by the claims, so that any structural modifications, changes in proportions, or adjustments of sizes, which do not affect the efficacy or the achievement of the present invention, should fall within the scope of the invention.
FIG. 1 is a schematic diagram of a first embodiment of the present invention;
FIG. 2 is a schematic diagram of a second embodiment of the present invention;
fig. 3 is a schematic structural diagram of a third embodiment of the present invention.
Wherein: 1 is a first light source, 2 is a beam splitter prism, 3 is a reflecting prism, 301 is a first reflecting mirror, 302 is a second reflecting mirror, 4 is a first resonant displacement vibrator, 5 is a first resonant displacement vibration controller, 6 is a first lock-in amplifier, 7 is a reflecting prism to be displaced, 701 is a third reflecting mirror, 702 is a fourth reflecting mirror, 8 is a first photodetector, 9 is a second light source, 10 is a first grating, 11 is a second grating, 12 is a second resonant displacement vibrator, 13 is a second resonant displacement vibration controller, 14 is a second lock-in amplifier, 15 is a second photodetector, 16 is a third light source, 17 is a third grating, 18 is a fourth grating, 19 is a third resonant displacement vibrator, 20 is a third resonant displacement vibration controller, 21 is a third lock-in amplifier, and 22 is a third photodetector.
Detailed Description
For the purposes of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions in the embodiments of the present invention will be clearly and completely described below, and it is apparent that the described embodiments are only some embodiments of the present application, but not all embodiments, and these descriptions are only for further illustrating the features and advantages of the present invention, not limiting the claims of the present invention; all other embodiments, which can be made by one of ordinary skill in the art without undue burden from the present disclosure, are within the scope of the present disclosure.
The following describes in further detail the embodiments of the present invention with reference to the drawings and examples. The following examples are illustrative of the invention and are not intended to limit the scope of the invention.
The terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present application, unless otherwise indicated, the meaning of "a plurality" is two or more.
In the description of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art in a specific context.
The specific solution of this embodiment is as follows:
the modulated electric signal of the light source reaching the photoelectric detector through the whole system to remove the direct current signal is as follows:
V(d x )＝I in Kcos<A[d x -d 0 sin(ωt)]> (1)
wherein I is in Is the intensity of the incident light; k is a coefficient related to photoelectric detection response and a circuit of the optical path and is a determined value; d, d x For the measured position; a is a coefficient related to a displacement measurement mode, and the coefficient of A is different according to different modes such as grating displacement measurement, laser interference displacement measurement, prism beam splitting interference displacement measurement and the like and is a determined value; d, d 0 sin (ωt) is the modulation displacement of the resonant displacement vibrator, d 0 Modulation displacement amplitude, d, of a resonant displacement vibrator 0 The voltage of the resonant displacement vibrator can be used for realizing adjustment, omega is the modulation angular frequency of the resonant displacement vibrator, t is time, and d x For the measured position. The formula (1) is further developed according to a Bessel function of a first type:
wherein J is x Is a Bessel function of order x.
The modulation frequency omega of the resonant displacement vibrator is a reference signal, and the signal amplitudes of the frequency doubling 1 omega, the frequency doubling 2 omega, the frequency tripling 3 omega and the frequency quadrupling 4 omega are respectively as follows:
V 1ω ＝I in KJ 1 (Ad 0 )sin(Ad x ) (3)
V 2ω ＝I in KJ 2 (Ad 0 )cos(Ad x ) (4)
V 3ω ＝I in KJ 3 (Ad 0 )sin(Ad x ) (5)
V 4ω ＝I in KJ 4 (Ad 0 )cos(Ad x ) (6)
since any influence is considered in the high-precision displacement measurement, if the displacement amplitude d of the feedback resonant type displacement vibrator can be realized 0 The measurement accuracy of the whole system will be improved. Thus, the displacement amplitude d of the electric displacement driver can be obtained by dividing the formula (3) by the formula (5) or dividing the formula (4) by the formula (6) 0 :
Wherein,is->Is an inverse function of (c).
Further, the measured position can be obtained by dividing the formula (3) by the formula (4), or dividing the formula (3) by the formula (6), or dividing the formula (5) by the formula (2), or dividing the formula (5) by the formula (6) x :
From (7) and (8), it can be known that the detected displacement d can be accurately obtained as long as the digital phase-locked amplification obtains any three amplitudes of the signal amplitudes of the detection circuit phase-locked amplification frequency doubling 1 omega, frequency doubling 2 omega, frequency tripling 3 omega and frequency quadrupling 4 omega x . From the above derivation, the above solution can eliminate the light intensity I of the light source in Displacement amplitude d of wave and resonance type displacement vibrator 0 Unstable and other influences, the problems of reduced displacement measurement precision caused by environmental influence, light intensity fluctuation of a light source and unstable resonance type displacement vibrator can be solved, and the phase-locked amplification technology can be used for effectivelyEliminate the influence of noise and as can be seen from equation (8), the measured displacement d x Is in the form of arctangent arctan, which ensures the same linear sensitivity and high displacement measurement accuracy.
Example 1
In this embodiment, as shown in fig. 1, light emitted by the first light source 1 is divided into two beams of light with propagation directions perpendicular to each other by the beam splitting prism 2, wherein the reflected light is reflected by the first reflecting mirror 301 of the reflecting prism 3, and the reflecting prism 3 is fixed with the first resonant displacement vibrator 4, the first resonant displacement vibration controller 5 is used for controlling sinusoidal vibration of the first resonant displacement vibrator 4 and providing a reference signal frequency for the first phase-locked amplifier 6, the other beam of transmitted light is reflected by the third reflecting mirror 701 of the reflecting prism 7 transmitting the measured position, the two beams of reflected light are reflected by the second reflecting mirror 302 and the fourth reflecting mirror 702 respectively, and then interfere at the first photo-detector 8 by the beam splitting prism 2, and the first photo-detector 8 obtains a photoelectric signal after the interference signal to the first phase-locked amplifier 6, and further obtains the measured position d accurately through operation. Wherein the first resonant displacement vibrator 4 is used for modulating the displacement sinusoidal modulation of the reflecting prism 3.
Example two
In this embodiment, as shown in fig. 2, the light emitted by the second light source 9 passes through the second grating 11 by transmitting the first grating 10 to be displaced, and the second grating 11 is fixed with the second resonant displacement vibrator 12, and the second resonant displacement vibrator 13 is used for controlling sinusoidal vibration of the second resonant displacement vibrator 12, providing a reference signal frequency for the second lock-in amplifier 14, and finally being detected by the second photodetector 15, and the photoelectric signal obtained by the second photodetector 15 is sent to the second lock-in amplifier 14, so as to obtain the displaced d precisely through operation.
Example III
In this embodiment, as shown in fig. 3, the light emitted by the third light source 16 passes through the third grating 17, is reflected by the fourth grating 18 of the transmitted and detected displacement, and is detected by the third photodetector 22 after passing through the third grating 17, wherein the third grating 17 and the third resonant displacement vibrator 19 are fixed together, the third resonant displacement vibration controller 20 is used for controlling sinusoidal vibration of the third resonant displacement vibrator 19 and providing the reference signal frequency for the third lock-in amplification 21, and the third photodetector 22 detects the obtained photoelectric signal to the third lock-in amplification 21, thereby obtaining the detected displacement d accurately through operation.
The preferred embodiments of the present invention have been described in detail, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge of those skilled in the art without departing from the spirit of the present invention, and the various changes are included in the scope of the present invention.
Claims (10)
1. A displacement measurement accuracy improvement method based on resonance modulation is characterized in that: comprises the following steps:
s1, calculating that a light source reaches a photoelectric detector through the whole system to remove a modulated electric signal of a direct current signal, and expanding according to a Bessel function of a first type;
s2, calculating the amplitude of the phase-locked amplified frequency-doubling 1 omega, frequency-doubling 2 omega, frequency-tripling 3 omega and frequency-quadrupling 4 omega signals by taking the modulation frequency omega of the resonant displacement vibrator as a reference signal;
s3, calculating the displacement amplitude d of the electric displacement driver 0 Thereby calculating the measured position displacement d x 。
2. The displacement measurement accuracy improvement method based on resonance modulation according to claim 1, wherein: the method for calculating the modulated electric signal of the direct current signal which is transmitted by the light source to the photoelectric detector through the whole system in the S1 comprises the following steps:
V(d x )＝I in Kcos<A[d x -d 0 sin(ωt)]> (1)
wherein I is in Is the intensity of the incident light; k is a coefficient related to photoelectric detection response and a circuit of the optical path and is a determined value; d, d x For the measured position; a is a coefficient related to a displacement measurement mode and is based on grating displacement measurement, laser interference displacement measurement and prismDifferent modes such as light splitting interference displacement measurement, and the like, wherein the coefficient of A is different and is a determined value; d, d 0 sin (ωt) is the modulation displacement of the resonant displacement vibrator, d 0 Modulation displacement amplitude, d, of a resonant displacement vibrator 0 The voltage of the resonant displacement vibrator can be used for realizing adjustment, omega is the modulation angular frequency of the resonant displacement vibrator, t is time, and d x For the measured position.
3. The displacement measurement accuracy improvement method based on resonance modulation according to claim 1, wherein: the method for expanding the S1 according to the Bessel function of the first type comprises the following steps:
wherein J is x Is a Bessel function of order x.
4. A method for improving displacement measurement accuracy based on resonance modulation according to claim 3, wherein: the method for calculating the amplitude of the phase-locked amplified frequency-doubling 1 omega, frequency-doubling 2 omega, frequency-tripling 3 omega and frequency-quadrupling 4 omega signal in the S2 comprises the following steps:
the modulation frequency omega of the resonant displacement vibrator is a reference signal, and the signal amplitudes of the frequency doubling 1 omega, the frequency doubling 2 omega, the frequency tripling 3 omega and the frequency quadrupling 4 omega are respectively as follows:
V 1ω ＝I in KJ 1 (Ad 0 )sin(Ad x ) (3)
V 2ω ＝I in KJ 2 (Ad 0 )cos(Ad x ) (4)
V 3ω ＝I in KJ 3 (Ad 0 )sin(Ad x ) (5)
V 4ω ＝I in KJ 4 (Ad 0 )cos(Ad x ) (6)。
5. the method for improving the displacement measurement accuracy based on resonant modulation according to claim 4, wherein: calculating the displacement amplitude d of the electric displacement driver in the step S3 0 The method of (1) is as follows:
wherein,is->Is an inverse function of (c).
6. The method for improving the displacement measurement accuracy based on resonant modulation according to claim 4, wherein: the measured position measurement d is calculated in the step S3 x The method of (1) is as follows:
any three amplitudes of the signal amplitudes of the frequency doubling 1 omega, the frequency doubling 2 omega, the frequency tripling 3 omega and the frequency quadrupling 4 omega of the detection circuit can be obtained through digital phase locking amplification, so that the measured position d can be accurately obtained x 。
7. A system for improving the accuracy of displacement measurement based on resonance modulation, which is used for the method for improving the accuracy of displacement measurement based on resonance modulation according to any one of claims 1 to 6, characterized in that: the device comprises a first light source (1), a beam splitting prism (2), a reflecting prism (3), a first resonant type displacement vibrator (4), a first resonant type displacement vibration controller (5), a first phase-locked amplifying device (6), a reflected prism (7) to be measured and a first photoelectric detector (8), wherein the beam splitting prism (2) is arranged on the light path direction of the first light source (1), the reflecting prism (3) is arranged on the reflecting light path of the beam splitting prism (2), the bottom of the reflecting prism (3) is fixedly connected with the first resonant type displacement vibrator (4), the first resonant type displacement vibrator (4) is electrically connected with the first resonant type displacement vibration controller (5), the first resonant type displacement vibration controller (5) is electrically connected with the first phase-locked amplifying device (6), and the reflected prism (7) to be measured and displaced is arranged on the transmitting light path of the beam splitting prism (2), and the first phase-locked amplifying device (6) is electrically connected with the first photoelectric detector (8).
8. The displacement measurement accuracy improving system based on resonance modulation according to claim 1, wherein: the reflection prism (3) comprises a first reflection mirror (301) and a second reflection mirror (302), the first reflection mirror (301) is arranged on the reflection light path of the beam-splitting prism (2), the second reflection mirror (302) is arranged on the reflection light path of the first reflection mirror (301), the beam-splitting prism (2) is arranged on the reflection light path of the second reflection mirror (302), a first photoelectric detector (8) is arranged on the reflection light path of the beam-splitting prism (2), the reflection prism (7) comprises a third reflection mirror (701) and a fourth reflection mirror (702), the third reflection mirror (701) is arranged on the transmission light path of the beam-splitting prism (2), the fourth reflection mirror (702) is arranged on the reflection light path of the third reflection mirror (701), the beam-splitting prism (2) and the first photoelectric detector (8) are sequentially arranged on the reflection light path of the fourth reflection mirror (702), and the first photoelectric detector (8) is arranged on the transmission light path of the beam-splitting prism (2).
9. A system for improving the accuracy of displacement measurement based on resonance modulation, which is used for the method for improving the accuracy of displacement measurement based on resonance modulation according to any one of claims 1 to 6, characterized in that: including second light source (9), first grating (10), second grating (11), second resonance formula displacement vibrator (12), second resonance formula displacement vibration controller (13), second lock-in amplifier (14), second photoelectric detector (15), grating (10), second grating (11) have been set gradually on the light path direction of second light source (9), be provided with second photoelectric detector (15) on the transmission light way of second grating (11), second photoelectric detector (15) electric connection has second lock-in amplifier (14), second lock-in amplifier (14) electric connection has second resonance formula displacement vibration controller (13), second resonance formula displacement vibration controller (13) electric connection has second resonance formula displacement vibrator (12), second resonance formula displacement vibrator (12) and second grating (11) fixed connection.
10. A system for improving the accuracy of displacement measurement based on resonance modulation, which is used for the method for improving the accuracy of displacement measurement based on resonance modulation according to any one of claims 1 to 6, characterized in that: the novel high-speed high-precision phase-locked vibration sensor comprises a third light source (16), a third grating (17), a fourth grating (18), a third resonant displacement vibrator (19), a third resonant displacement vibration controller (20), a third phase-locked amplification (21) and a third photoelectric detector (22), wherein the third grating (17) is arranged on the light path direction of the third light source (16), the fourth grating (18) is arranged on the transmission light path of the third grating (17), the third photoelectric detector (22) is arranged on the reflection light path of the fourth grating (18), the third grating (17) is fixedly connected with the third resonant displacement vibrator (19), the third resonant displacement vibration controller (19) is electrically connected with the third resonant displacement vibration controller (20), the third resonant displacement vibration controller (20) is electrically connected with the third phase-locked amplification (21), and the third phase-locked amplification (21) is electrically connected with the third photoelectric detector (22).
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