CN117537794A - Four-mass micromechanical gyroscope with driving and amplifying coupling structure - Google Patents
Four-mass micromechanical gyroscope with driving and amplifying coupling structure Download PDFInfo
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- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
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- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
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Abstract
The invention relates to a four-mass micromechanical gyroscope with a driving amplification coupling structure. The gyroscope is a plane Z-axis gyroscope and comprises four mass blocks which are arranged in mirror symmetry about a X, Y axis, the mass blocks are respectively connected with detection frames on two sides of the mass blocks in the Y direction of a detection axis through driving decoupling beams, two detection frames which are symmetrical about an X axis are coupled through a coupling structure, and four orthogonal suppression electrodes are arranged on the mass blocks; the driving frame is arranged in the center and parallel to the Y axis, is connected with the detection decoupling beam in each mass block through the coupling amplifying structure, and is provided with a plurality of driving electrodes and four driving detection electrodes; the coupling amplifying structure realizes driving displacement amplification and equivalent quality improvement through lever-like mechanisms at two ends. The invention amplifies the driving displacement, increases the equivalent mass and realizes the improvement of mechanical sensitivity and mechanical thermal noise; the anti-interference capability is improved, and the electrostatic nonlinearity is improved.
Description
Technical Field
The invention belongs to the field of gyroscopes, and particularly relates to a four-mass micromechanical gyroscope with a driving amplification coupling structure.
Background
A gyro is a sensor for measuring angular velocity. The traditional gyroscopes mainly comprise an electrostatic gyroscope, a liquid floating air-floating gyroscope, a laser gyroscope and an optical fiber gyroscope, and the gyroscopes are widely applied to strategic nuclear submarines, strategic missiles and space ships for navigation and attitude control. However, these gyroscopes have the disadvantages of relatively large volume, high cost, inability to mass production, and the like. With the development of micro-electromechanical system (MEMS) technology, micromechanical vibrating gyroscopes based on the coriolis coupling effect have also been rapidly developed. The four-mass gyroscope is also based on the Coriolis force effect, converts the sensitive angular velocity into the vibration displacement of the mass blocks in the detection direction, adopts the symmetrical distribution mode of the four mass blocks, has the advantages of double difference, small volume, symmetrical structure, simple structure, shock resistance, overload resistance, low mass manufacturing cost and the like, and is widely applied to the fields of consumer electronics, unmanned driving, navigation of guided weapons and the like.
The four mass blocks of the existing four-mass gyroscope are positioned in the middle of the whole gyroscope structure, and the mass blocks are connected through driving coupling beams and detecting coupling beams so as to keep the same resonance frequency among the mass blocks. The mass block is connected with the driving frame and the detecting frame, the driving electrode is placed in the driving frame, and the detecting electrode is placed in the detecting frame. The driving and detecting frames are respectively connected with the driving or detecting lever through connecting beams. When the gyroscope works in a driving mode, opposite driving electrodes are applied with opposite phase voltage, and the opposite phase motion of four masses is realized through a lever structure. The performance of the existing four-mass micromechanical gyroscope does not reach the navigation level yet, and the performance of the gyroscope needs to be further improved.
The performance of a micromechanical gyroscope is mainly related to the equivalent mass, drive displacement, frequency, and quality factor of the gyroscope. Wherein, the sensitivity and mechanical noise performance of the gyro can be effectively improved by improving the driving displacement and equivalent mass of the gyro. Traditionally, a four-mass gyroscope has large equivalent mass and large driving displacement, and needs larger input driving voltage signals and layout area, so that the power consumption of the system, the feed-through noise of alternating current signals and the layout area are increased. In addition, the driving motion mode of the existing four-mass gyroscope adopts external lever coupling, and under the condition of large displacement, larger orthogonal rigidity coupling can be generated in the detection direction due to the rotation motion of the lever. Finally, when the existing four-mass gyroscope works in a closed-loop mode, an orthogonal suppression mode of orthogonal force is adopted, the suppression mode needs higher circuit demodulation phase precision, and a control circuit is complex.
Disclosure of Invention
The invention aims to provide a four-mass micromechanical gyroscope with a driving amplification coupling structure, which improves driving displacement and equivalent mass, improves orthogonal rigidity coupling under large displacement and improves anti-interference capability of the gyroscope by adopting the driving amplification structure, the detection reverse coupling structure and the orthogonal suppression electrode scheme.
The technical solution for realizing the purpose of the invention is as follows: the four-mass micromechanical gyroscope with the driving amplification coupling structure is a plane Z-axis gyroscope, and comprises four mass blocks which are arranged in mirror symmetry on a X, Y axis, wherein the mass blocks are respectively connected with detection frames on two sides of the mass blocks in the Y direction of a detection axis through driving decoupling beams, the two detection frames which are symmetrical on the X axis are coupled through the coupling structure, and four orthogonal suppression electrodes are arranged on the mass blocks;
the driving frame is arranged in the center and parallel to the Y axis, the driving frame is connected with the detection decoupling beams in each mass block through a coupling amplifying structure, a plurality of driving electrodes and four driving detection electrodes are arranged on the driving frame, and the four driving detection electrodes are distributed at the center of the gyroscope in a mirror symmetry mode about the X, Y axis respectively to form differential detection; the coupling amplifying structure realizes driving displacement amplification and equivalent quality improvement through lever-like mechanisms at two ends.
Further, the four mass blocks are a mass block I, a mass block II, a mass block III and a mass block IV, wherein the mass block I and the mass block III are symmetrically arranged about an X axis, and the mass block I and the mass block IV are symmetrically arranged about a Y axis; four orthogonal suppression electrodes on each mass block are distributed at the positions of four corners of the mass block;
the orthogonal suppression electrodes on the mass block I and the mass block III are the same, and the orthogonal suppression electrodes on the mass block II and the mass block IV are the same.
Further, the orthogonal suppression electrode comprises an orthogonal electrode movable comb tooth I and an orthogonal electrode movable comb tooth II which are connected to the mass block, and an orthogonal electrode fixed comb tooth I and an orthogonal electrode fixed comb tooth II which are connected to the anchor point.
Further, each detection frame is connected with an anchor point through a detection supporting beam and is anchored on the substrate through the anchor point.
Further, the coupling structure comprises an anchor point, and an upper oblique beam, a lower oblique beam and a folding beam which are on the X axis and are symmetrical with respect to the anchor point,
one end of the upper inclined beam is connected to the detection frame, and the other end of the upper inclined beam is connected to one point together with the folding beam and the lower inclined beam; one end of the lower inclined beam is connected to the detection frame, the other end of the lower inclined beam is connected to the same point together with the upper inclined beam and the folding beam, and the upper inclined beam and the lower inclined beam are in mirror symmetry about the X axis.
Further, each detection frame is provided with two sensitive detection electrodes which are mirror symmetrical with respect to a Y-axis (direction) center line of the mass block, a force feedback electrode is arranged between the two sensitive detection electrodes, and tuning electrodes are arranged at two sides of the sensitive detection electrodes;
sensitive detection electrodes in the detection frames at two sides of one mass block, and a force feedback electrode and a tuning electrode are arranged in mirror symmetry with respect to a center line of the mass block passing through a center point and being parallel to an X axis;
the outer side of the detection frame is connected with the detection lever through the elastic beam II, the detection lever is connected to the anchor point through the two elastic beams I, and the anchor point is anchored on the substrate.
Further, each tuning electrode consists of a tuning electrode movable comb tooth connected to the detection frame and a tuning electrode fixed comb tooth fixed on the substrate through an anchor point;
each sensitive detection electrode consists of a movable comb tooth of the sensitive detection electrode connected to the detection frame and a fixed comb tooth of the sensitive detection electrode fixed on the substrate through an anchor point;
each force feedback electrode is composed of a force feedback electrode movable comb connected to the detection frame and a force feedback electrode fixed comb connected to the anchor point and fixed on the substrate.
Further, the coupling amplifying structure comprises a transverse supporting beam, a longitudinal supporting beam and an oblique beam;
the center of a transverse supporting beam and the inclined beam which are respectively connected to the two ends of the driving frame are connected to the same point together, the middle part of the driving frame is connected and fixed to an anchor point through elastic beams which are arranged in a mirror symmetry mode around a Y axis, four mass blocks are connected to a longitudinal supporting beam in the X direction through detection decoupling beams, one end of the inclined beam is connected to the middle point of the transverse supporting beam, the other end of the inclined beam is connected to the middle point of the longitudinal supporting beam, the two ends of the transverse supporting beam are respectively connected and fixed to the anchor point, and the two ends of the longitudinal supporting beam are respectively connected and fixed to the anchor point.
Further, the driving electrodes on the driving frame comprise driving electrodes I and driving electrodes II, the driving electrodes I are distributed on two sides of the driving frame in a mirror symmetry mode about a Y axis, and the driving electrodes I and the driving electrodes II are in a mirror symmetry mode about an X axis.
Further, the driving electrode I consists of a movable comb tooth of the driving electrode I connected to the driving frame and a fixed comb tooth of the driving electrode I connected to the anchor point and anchored and fixed on the substrate through the anchor point;
the drive detection electrode is composed of a drive detection electrode movable comb connected to the drive frame and a drive detection electrode fixed comb connected to the anchor point 8 and fixedly anchored on the substrate by the anchor point.
Compared with the prior art, the invention has the remarkable advantages that:
(1) According to the invention, under the condition of not increasing power consumption noise and layout area, the driving displacement and equivalent quality are improved by the driving coupling amplifying structure, so that the mechanical sensitivity is improved and the mechanical thermal noise is reduced; and meanwhile, the anti-phase motion of four mass block driving modes is realized, the driving working mode is in the first-order mode, other interference modes are effectively restrained, and the anti-interference performance is improved.
(2) The driving amplification coupling structure of the invention simultaneously realizes the driving of four mass blocks, does not need a lever structure, and compared with the traditional four-mass gyroscope driving coupling mode which adopts a lever, the driving amplification coupling structure of the invention avoids the introduction of orthogonal rigidity coupling by the rotation of the lever under the condition of large driving displacement.
(3) According to the invention, the upper side and the lower side of the detection direction of each mass block are respectively provided with the large-capacitance comb tooth detection electrodes in a differential mode, so that the linear acceleration common-mode interference can be restrained by the sensitive detection of each mass block; the comb tooth detection electrode is adopted to replace the traditional flat detection electrode, so that the electrostatic nonlinearity of detection can be effectively improved; the detection sensitivity of the gyroscope is improved by adopting a large number of comb capacitors for each differential electrode.
(4) According to the invention, the novel detection coupling structure formed by the upper oblique beam, the lower oblique beam and the folding beam realizes that the opposite phase motion mode of two adjacent mass blocks is in the first-order mode under the detection mode because the in-phase motion rigidity is larger than the opposite phase motion rigidity. The interference of common-mode interference signals such as in-phase interference modes, linear acceleration and the like is inhibited; the novel detection coupling structure can greatly improve the sequence and frequency of the in-phase mode under the condition of keeping the sequence of the opposite-phase working mode unchanged, reduce the interference of the in-phase mode to the working mode, and improve the overall thermoelastic damping of the detection mode;
(5) According to the invention, 4 orthogonal suppression electrodes based on electrostatic negative rigidity are introduced on each mass block, and the four orthogonal suppression electrodes are arranged at the positions which are symmetrical to the center of each mass block and are close to four corners, so that the orthogonal translation of the mass block is effectively suppressed, and meanwhile, the orthogonal rotation of the mass block is also suppressed; the two masses at the left side are provided with the same orthogonal electrodes, the same orthogonal suppression voltage is applied, the other two masses are provided with the orthogonal electrodes which are in mirror symmetry, and the other same suppression voltage is applied.
(6) The invention respectively arranges a group of supporting elastic beams on the upper and lower sides of the detection lever beam, the elastic beams have larger rigidity in the Y-axis detection direction and smaller rigidity in the X-axis, thereby ensuring that the lever only rotates around the center, reducing the coupling error and improving the impact resistance of the lever.
Drawings
FIG. 1 is a schematic diagram of the overall structure of a top;
FIG. 2 is an enlarged view of a detection coupling structure;
FIG. 3 is a partial enlarged view of a detection frame;
FIG. 4 is an enlarged view of a portion of the drive frame;
FIG. 5 is an enlarged view of a portion of an orthogonal suppression electrode;
FIG. 6 is a diagram of the drive mode shape of the gyroscope;
FIG. 7 is a graph of detected mode shapes for gyroscopes;
fig. 8 is a schematic diagram of a driving coupling amplifying structure.
Description of the reference numerals
11-mass block I, 12-mass block II, 13-mass block III, 14-mass block IV, 21-detection frame, 31-sensitive detection electrode I, 32-sensitive detection electrode II, 33-sensitive detection electrode III, 34-sensitive detection electrode IV, 4-detection support beam, 41-force feedback electrode I, 42-force feedback electrode II, 5-detection coupling structure, 51-upper diagonal beam, 52-folded beam, 53-lower diagonal beam, 6-driven decoupling beam, 7-detection decoupling beam, 8-anchor point, 29-tuning electrode, 291-tuning electrode movable comb, 292-tuning electrode fixed comb, 311-sensitive detection electrode movable comb, 312-sensitive detection electrode fixed comb, 411-force feedback electrode movable comb, 412-force feedback electrode fixed comb teeth, 9-detection lever, 91-elastic beam I, 10-elastic beam II, 15-transverse supporting beam, 16-longitudinal supporting beam, 17-oblique beam, 18-driving frame, 181-elastic Liang, 19-driving electrode I, 191-driving electrode I movable comb teeth, 192-driving electrode I fixed comb teeth, 24-driving electrode II, 25-driving detection electrode, 251-driving detection electrode movable comb teeth, 252-driving detection electrode fixed comb teeth, 61-orthogonal suppression electrode I, 62-orthogonal suppression electrode II, 63-orthogonal suppression electrode III, 64-orthogonal suppression electrode IV, 611-orthogonal suppression electrode movable comb teeth I, 612-orthogonal suppression electrode fixed comb teeth I, 613-movable comb teeth II of orthogonal suppression electrodes, 614-fixed comb teeth II of orthogonal suppression electrodes.
Detailed Description
The invention is described in further detail below with reference to the accompanying drawings.
The high-sensitivity four-mass micromechanical gyroscope with a driving amplification structure mainly comprises a silicon substrate, a silicon structure, an insulating layer and a signal line layer, wherein an anchor point of the silicon structure is finally anchored with the substrate and led out through a signal line. The present invention is primarily directed to silicon structural components. The whole gyro silicon structure is symmetrical about the X axis and the Y axis, and common mode noise is restrained by setting electrode differential signals.
The main structure comprises four identical masses, each mass being connected to a detection frame 21 via a drive decoupling beam 6 and to a drive coupling amplifying structure via a detection decoupling beam 7, the drive coupling amplifying structure being connected to a drive frame 18. The driving displacement is amplified by the driving coupling amplifying structure, the equivalent mass is improved, and the four mass blocks in the X-axis direction are in opposite phase motion. More specifically, two parts of electrodes with opposite phases are respectively applied to the upper and lower mirror symmetry of the driving frame 18 to form a push-pull differential driving suppression 2-frequency multiplication interference signal, and the generated electrostatic force simultaneously drives 4 identical mass blocks to respectively perform opposite-phase simple harmonic vibration in the X direction to form a resonator. When angular velocity is input, based on the Ke's coupling effect, the four vibrating mass blocks generate a Golgi force perpendicular to the driving vibration direction in the Y-axis direction, so that opposite-phase detection motion displacement in opposite directions between adjacent mass blocks is generated in the detection direction, the displacement of the mass blocks in the Y direction is transmitted to the detection frame 21 by the driving decoupling beams 6, the change of capacitance of the detection comb teeth electrodes is caused, an output voltage signal is formed through the C/V conversion and amplification circuit, and as differential comb teeth electrodes with large capacitance are respectively arranged on the upper side and the lower side of each mass block, the detection sensitivity is improved, the linear acceleration common mode interference is restrained, and the electrostatic nonlinearity is improved. The drive decoupling beam 6 and the detection decoupling beam 7 realize decoupling between a drive mode and a detection mode, so that the drive and the detection are not affected. The detection mode realizes that the anti-phase motion mode is in the first-order mode through the detection coupling structure and the external lever, improves the vibration frequency of the in-phase interference mode, and inhibits common-mode interference such as linear acceleration. And 4 orthogonal suppression electrodes based on electrostatic negative stiffness are arranged on each mass block, so that orthogonal stiffness coupling is effectively suppressed.
The middle part of the gyroscope structure is the drive frame 18, the direction passing through the geometric center of the drive frame 18 and parallel to the drive frame teeth is defined as the Y-axis, and the direction passing through the geometric center of the drive frame 18 and perpendicular to the drive frame teeth is defined as the X-axis. The whole structure of the top is shown in fig. 1, and the top is a plane Z-axis top. The overall structure is mirror symmetric about the X, Y axis. The structural thickness of the gyroscope is 30-100 um, and a bulk silicon process based on 100 silicon and an epitaxial silicon process based on isotropy can be adopted.
Four identical driving masses I11, II 12, III 13 and IV 14 are respectively connected with the detecting frames 21 on the upper and lower sides of the masses through driving decoupling beams 6 in the Y direction of the detecting axis. Each detection frame 21 is connected to an anchor point 8 through a detection support beam 4, and is anchored to the substrate through the anchor point 8. The detection frames 21 of the four mass blocks are coupled together through the detection coupling structure 5.
As shown in fig. 2, the detection coupling structure 5 includes an upper oblique beam 51, a lower oblique beam 53, and a folded beam 52, and an anchor point 8, and the upper oblique beam 51, the lower oblique beam 53, and the folded beam 52 are mirror-symmetrically distributed on both sides of the anchor point. The upper diagonal member 51 is connected to the detection frame 21 at one end and is connected to a point together with the folding member 52 and the lower diagonal member 53 at the other end. The lower diagonal beam 53 is connected to the detection frame 21 at one end and is connected to the same point together with the upper diagonal beam 51 and the folded beam 52 at the other end. The upper and lower diagonal beams 51, 53 are mirror-symmetrical about the X-axis.
The upper detection frame of each mass comprises a sensitive detection electrode I31, a sensitive detection electrode II 32, a force feedback electrode I41 and a tuning electrode 29, and the lower detection frame comprises a sensitive detection electrode III 33, a sensitive detection electrode IV 34, a force feedback electrode II 42 and a tuning electrode 29.
The sensitive detection electrode I31, the sensitive detection electrode II 32, the force feedback electrode I41 and the tuning electrode 29 in the upper detection frame and the sensitive detection electrode III 33, the sensitive detection electrode IV 34, the force feedback electrode II 42 and the tuning electrode 29 in the lower detection frame are arranged in mirror symmetry with respect to a center line of the mass block passing through the center point and being parallel to the X axis.
As shown in fig. 3, each tuning electrode 29 is composed of a tuning electrode movable comb 291 connected to the detection frame 21 and a tuning electrode fixed comb 292 fixed to the substrate through an anchor point 8. Each sensitive detection electrode is composed of a movable comb 311 of the sensitive detection electrode connected to the detection frame and a fixed comb 312 of the sensitive detection electrode fixed on the substrate through an anchor point 8. Each force feedback electrode is constituted by a force feedback electrode movable comb 411 connected to the detection frame 21 and a force feedback electrode fixed comb 412 connected to the anchor point 8 and fixed to the substrate. The sensitive detection electrode I31 and the sensitive detection electrode II 32 are in mirror symmetry with respect to the left and right central lines of the mass block I, and the force feedback electrode I41 and the force feedback electrode II 42 are in mirror symmetry with respect to the upper and lower central lines of the mass block I. The outer side of the detection frame 21 outside each mass block is connected with the detection lever 9 through an elastic beam II 10. The detection lever 9 is connected to the anchor point 8 by two elastic beams i 91, anchored to the substrate.
At the same time, the four masses are connected to the longitudinal support beams 16 in the drive X direction by means of the detection decoupling beams 7. The diagonal beam 17 is connected at one end to the midpoint of the longitudinal support beam 16 and at the other end to the midpoint of the transverse support beam 15. The two ends of the longitudinal support beam 16 are respectively connected and fixed to the anchor points 8. The two ends of the transverse supporting beam 15 are respectively connected and fixed to the anchor points 8. The longitudinal supporting beams 16 play a role of supporting the mass blocks, and form a coupling amplifying structure together with the oblique beams 17 and the transverse supporting beams 15, so that driving displacement and equivalent mass amplification and anti-phase movement of four adjacent mass blocks are realized. The upper and lower ends of the driving frame 18 are connected to the centers of the upper and lower cross support beams 15, respectively, and the diagonal beams 17 are connected to the same point in common. The middle part of the drive frame 18 is fixed to the anchor point 8 by a left-right mirror symmetrically arranged elastic Liang-181 connection. The driving frame 18 includes a driving electrode I19, a driving electrode II 24, and a driving detection electrode 25. The driving electrode I19 is arranged on two sides in a mirror symmetry manner about the Y axis, and the driving electrode II 24 is arranged on two sides in a mirror symmetry manner about the Y axis, wherein the driving electrode I19 and the driving electrode II 24 are arranged in a mirror symmetry manner about the X axis. The 4 driving detection electrodes 25 are respectively distributed at the center of the gyroscope in a mirror symmetry mode about the X, Y axis to form differential detection. As shown in fig. 4, the drive electrode i 19 is composed of a drive electrode i movable comb 191 connected to the drive frame 18 and a drive electrode i fixed comb 192 connected to the anchor point 8 and anchored to the substrate by the anchor point. The drive detection electrode 25 is composed of a drive detection electrode movable comb 251 connected to the drive frame 18 and a drive detection electrode fixed comb 252 connected to the anchor point 8 and fixedly anchored to the substrate by the anchor point 8.
The principle analysis diagram of the driving coupling amplification structure is shown in fig. 8, and the equivalent rigidity of the driving frame 18 in the Y direction is thatDrive displacement is +.>. The driving frame 18 is subjected to an elastic force of +.>。/>A driving force generated at the driving frame for the applied driving voltage; equivalent stiffness and displacement of the mass in the X direction is +.>And->；/>And->The axial force of the left and right oblique beams is +.>。
From the force balance, it is possible to obtain:
（1）
（2）
simultaneous (1) (2) can be obtained:
(3)
from conservation of energy, it is possible to obtain:
(4)
according to (3) and (4), it is possible to obtain:
(5)
is provided withFormula (5) can be simplified to formula (6),>representing the displacement magnification ratio.
(6)
Solving (6) to obtain the displacement amplification ratio。
(7)
Assuming equivalent stiffness of the whole systemDegree ofFrom the definition of the equivalent stiffness and the conservation of energy, the formula (8) can be obtained, and the equivalent stiffness +.>As in formula (9).
(8)
(9)
According to equation (7), the displacement amplification ratioIs +.>Stiffness ratio->In connection with this, displacement amplification can be achieved by adjusting the tilt angle and the stiffness ratio. Because of->>1, equivalent stiffness according to formula (9)>. Therefore, amplification of stiffness is achieved, and the equivalent mass is increased because the frequency is unchanged.
The four identical driving masses I11, II 12, III 13 and IV 14 comprise four identical orthogonal suppression electrodes and are uniformly distributed at four positions of each mass close to the corners. Wherein the orthogonal suppression electrode I61 on the mass block I11 and the orthogonal suppression electrode II 62 on the mass block III 13 are identical and are distributed at the same positions of the mass block I11 and the mass block III 13 respectively. The orthogonal suppression electrode i 61 and the orthogonal suppression electrode iv 64 are mirror symmetric about the Y axis. The orthogonal suppression electrode III 63 and the orthogonal suppression electrode IV 64 are identical and are distributed at the same positions of the mass II 12 and the mass IV 14 respectively. As shown in fig. 5, which is a partial enlarged view of the orthogonal suppression electrode, the orthogonal suppression electrode i 61 is composed of an orthogonal suppression electrode movable comb tooth i 611 and an orthogonal suppression electrode movable comb tooth ii 613 connected to the mass block, and orthogonal suppression electrode fixed comb teeth i 612 and ii 614 connected to the anchor points, and the orthogonal suppression electrode movable comb tooth i 611 and the orthogonal suppression electrode movable comb tooth ii 613 are alternately distributed on both sides of the orthogonal suppression electrode fixed comb teeth i 612 and ii 614.
The working mode of the gyroscope is as follows:
in the driving mode, the driving frame 18 makes a reciprocating resonance motion in the Y-axis direction by applying an inverted driving voltage signal to the driving electrode i 19 and the driving electrode ii 24. The driving frame drives the four mass blocks I11, II 12, III 13 and IV 14 to do opposite phase motion in the X direction through the opposite phase coupling amplifying structure formed by the oblique beam 17, the longitudinal supporting beam 16 and the transverse supporting beam 15. The magnitude of the driving displacement is detected by the difference of the driving detection electrodes 25, and stable control of the driving displacement amplitude and frequency is achieved by an Automatic Gain Control (AGC) and a Phase Locked Loop (PLL) closed loop circuit. The driving frame 18 realizes the driving displacement amplifying function similar to a lever and the equivalent mass through an anti-phase coupling amplifying structure formed by the inclined beam 17, the transverse supporting beam 15 and the longitudinal supporting beam 16, realizes the anti-phase movement of four mass blocks in the X direction, realizes the first order of the working mode of the anti-phase movement, and realizes the inhibition of the interference such as linear acceleration, environmental vibration and the like. When driving motion, quadrature errors cannot be avoided due to machining errors. At this time, the same direct-current voltage is applied to the orthogonal suppressing electrode i 61 and the orthogonal suppressing electrode ii 62, and the same direct-current voltage is applied to the orthogonal suppressing electrode iii 63 and the orthogonal suppressing electrode iv 64, whereby the orthogonal stiffness coupling generated by the driving motion is suppressed as a whole based on the electrostatic negative stiffness principle. The arrangement mode that the movable orthogonal suppression electrode comb teeth I611 and the movable orthogonal suppression electrode comb teeth II 613 are arranged on two sides of the fixed orthogonal suppression electrode comb teeth I612 and the fixed orthogonal suppression electrode comb teeth II 614 in a staggered mode can eliminate interference negative stiffness except for the negative orthogonal suppression stiffness, which is generated by orthogonal voltages in the driving direction and the detection direction.
In a sensitive detection working mode, when angular speed is input, a mass block I11, a mass block II 12, a mass block III 13 and a mass block IV 14 which are driven to move in the X-axis direction generate Coriolis force in the vertical driving movement direction under the Ge coupling effect, the adjacent mass blocks generate sensitive detection displacement in opposite directions under the excitation of the Coriolis force, the sensitive detection displacement is transmitted to a detection frame 21 through a driving decoupling beam 6, a sensitive detection electrode I31 on the detection frame 21 is driven, and the movable comb teeth on a sensitive detection electrode II 32 move, so that capacitance changes. The novel coupling structure formed by the upper oblique beam 51, the lower oblique beam 53 and the folding beam 52 realizes that two adjacent mass blocks of the detection mode move in the opposite phase in the first-order mode because the in-phase motion stiffness is larger than the opposite phase motion stiffness. The change of capacitance of the sensitive detection electrode is converted into an electric signal to be output through circuit amplification and demodulation. The force balance control loop applies reverse force feedback voltage to the force feedback electrode I41 and the force feedback electrode II 42 according to the output of the sensitive detection electric signals, suppresses the sensitive detection displacement of the mass block, and realizes closed loop detection. According to the frequency difference between the detection mode and the driving mode, a direct current tuning voltage is applied to the tuning electrode 29, and mode matching between the detection mode and the driving mode is realized by utilizing the principle of electrostatic negative stiffness. The mode shapes of the gyro drive and detection modes are shown in fig. 6 and 7.
Claims (10)
1. The four-mass micromechanical gyroscope with the driving amplification coupling structure is characterized in that the gyroscope is a plane Z-axis gyroscope and comprises four mass blocks which are arranged in mirror symmetry about a X, Y axis, the mass blocks are respectively connected with detection frames on two sides of the mass blocks in the Y direction of a detection axis through driving decoupling beams, the two detection frames which are symmetrical about an X axis are coupled through the coupling structure, and four orthogonal suppression electrodes are arranged on the mass blocks;
the driving frame is arranged in the center and parallel to the Y axis, the driving frame is connected with the detection decoupling beams in each mass block through a coupling amplifying structure, a plurality of driving electrodes and four driving detection electrodes are arranged on the driving frame, and the four driving detection electrodes are distributed at the center of the gyroscope in a mirror symmetry mode about the X, Y axis respectively to form differential detection; the coupling amplifying structure realizes driving displacement amplification and equivalent quality improvement through lever-like mechanisms at two ends.
2. The gyroscope of claim 1, wherein the four masses are a mass i, a mass ii, a mass iii, a mass iv, the masses i and iii being symmetrically disposed about the X axis, the masses i and iv being symmetrically disposed about the Y axis; four orthogonal suppression electrodes on each mass block are distributed at the positions of four corners of the mass block;
the orthogonal suppression electrodes on the mass block I and the mass block III are the same, and the orthogonal suppression electrodes on the mass block II and the mass block IV are the same.
3. The gyroscope of claim 2, wherein the orthogonal suppression electrodes include orthogonal electrode movable combs i, ii connected to the mass, and orthogonal electrode fixed combs i, ii connected to the anchor.
4. A gyroscope according to claim 3, wherein each detection frame is connected to an anchor point by a detection support beam, respectively, by which it is anchored to the substrate.
5. The gyroscope of claim 4, wherein the coupling structure includes an anchor point, and upper, lower and folded beams in the X-axis and symmetrical about the anchor point,
one end of the upper inclined beam is connected to the detection frame, and the other end of the upper inclined beam is connected to one point together with the folding beam and the lower inclined beam; one end of the lower inclined beam is connected to the detection frame, the other end of the lower inclined beam is connected to the same point together with the upper inclined beam and the folding beam, and the upper inclined beam and the lower inclined beam are in mirror symmetry about the X axis.
6. The gyroscope of claim 5, wherein each sensing frame has two sensing electrodes mirror-symmetrical about a Y-axis centerline of the proof mass, a force feedback electrode disposed between the two sensing electrodes, and tuning electrodes disposed on opposite sides of the sensing electrodes;
sensitive detection electrodes in the detection frames at two sides of one mass block, and a force feedback electrode and a tuning electrode are arranged in mirror symmetry with respect to a center line of the mass block passing through a center point and being parallel to an X axis;
the outer side of the detection frame is connected with the detection lever through the elastic beam II, the detection lever is connected to the anchor point through the two elastic beams I, and the anchor point is anchored on the substrate.
7. The gyroscope of claim 6, wherein each tuning electrode is comprised of a tuning electrode movable comb attached to the sense frame and a tuning electrode fixed comb secured to the substrate by anchor points;
each sensitive detection electrode consists of a movable comb tooth of the sensitive detection electrode connected to the detection frame and a fixed comb tooth of the sensitive detection electrode fixed on the substrate through an anchor point;
each force feedback electrode is composed of a force feedback electrode movable comb connected to the detection frame and a force feedback electrode fixed comb connected to the anchor point and fixed on the substrate.
8. The gyroscope of claim 7, wherein the coupling amplification structure comprises a cross support beam, a longitudinal support beam, and a diagonal beam;
the center of a transverse supporting beam and the inclined beam which are respectively connected to the two ends of the driving frame are connected to the same point together, the middle part of the driving frame is connected and fixed to an anchor point through elastic beams which are arranged in a mirror symmetry mode around a Y axis, four mass blocks are connected to a longitudinal supporting beam in the X direction through detection decoupling beams, one end of the inclined beam is connected to the middle point of the transverse supporting beam, the other end of the inclined beam is connected to the middle point of the longitudinal supporting beam, the two ends of the transverse supporting beam are respectively connected and fixed to the anchor point, and the two ends of the longitudinal supporting beam are respectively connected and fixed to the anchor point.
9. The gyroscope of claim 8, wherein the plurality of drive electrodes on the drive frame include drive electrodes i and ii, the drive electrodes being mirror-symmetrical about the Y-axis on opposite sides of the drive frame, the drive electrodes i and ii being mirror-symmetrical about the X-axis.
10. The gyroscope of claim 9, wherein the drive electrode i consists of a drive electrode i movable comb connected to the drive frame and a drive electrode i fixed comb connected to the anchor point and anchored to the substrate by the anchor point;
the drive detection electrode is composed of a movable comb tooth of the drive detection electrode connected to the drive frame and a fixed comb tooth of the drive detection electrode connected to the anchor point and fixedly anchored on the substrate through the anchor point.
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