CN117507008A - Temperature control device and method for mechanical arm - Google Patents
Temperature control device and method for mechanical arm Download PDFInfo
- Publication number
- CN117507008A CN117507008A CN202311627217.0A CN202311627217A CN117507008A CN 117507008 A CN117507008 A CN 117507008A CN 202311627217 A CN202311627217 A CN 202311627217A CN 117507008 A CN117507008 A CN 117507008A
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- heater
- main board
- pipeline
- temperature control
- heat dissipation
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- 238000000034 method Methods 0.000 title claims abstract description 17
- 238000009413 insulation Methods 0.000 claims abstract description 53
- 230000017525 heat dissipation Effects 0.000 claims abstract description 43
- 238000005452 bending Methods 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 21
- 238000001816 cooling Methods 0.000 abstract description 9
- 238000010438 heat treatment Methods 0.000 description 30
- 239000011324 bead Substances 0.000 description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000005489 elastic deformation Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000005457 ice water Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/0054—Cooling means
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Manipulator (AREA)
Abstract
The application relates to a temperature control device and a temperature control method for a mechanical arm, wherein the temperature control device comprises the mechanical arm and a heater, a heat insulation layer is arranged between the mechanical arm and the heater, the heat insulation layer comprises a main board and a heat insulation plate, grooves are formed in the main board and the heat insulation plate to form clamping grooves, a heat dissipation pipeline is arranged on the main board, the main board is arranged close to the heater, the heat dissipation pipeline is communicated with a compressed dry air system through a pipeline, a throttle valve is arranged in the pipeline, and the compressed dry air system can convey air to the heat dissipation pipeline; the heater is provided with a controller and a temperature sensor, and the controller, the heater, the throttle valve and the temperature sensor can form closed-loop control; according to the cooling device, the heat dissipation pipeline is arranged on the main board in the heat insulation layer, and the compressed dry air system which is arranged in most plants is recycled to ventilate the heat dissipation pipeline, so that the heater is cooled, and the vibration effect of the temperature is reduced, and meanwhile the cost is reduced.
Description
Technical Field
The present disclosure relates to the field of automation control, and in particular, to a temperature control device and method for a mechanical arm.
Background
In the use process of the mechanical arm, the temperature of a working target area of the mechanical arm needs to be controlled, so that a heater needs to be arranged on the mechanical arm for heating. After the heater is heated to a specified temperature, the heater is affected by factors such as a controller, heater performance, ambient temperature, heat dissipation conditions and the like, and the temperature of the heating zone cannot be always kept at the target temperature, so that the temperature of the heating zone can float up and down around the target temperature. When the temperature is lower than the target temperature, the heater can be used for continuously heating to enable the temperature to rise to the target temperature, and when the temperature is higher than the target temperature, the natural cooling is required to wait for the natural cooling to reach the target temperature, and the natural cooling usually takes a long time. Therefore, a heat dissipation mechanism is required to be additionally arranged to control the rising of the temperature, and then the temperature of the heating area is close to the target temperature as much as possible by reducing the rising and falling of the temperature by matching with the heater, so that the temperature control effect is achieved. The heat dissipation mechanism is commonly used in the industry as liquid nitrogen, a compressor, a refrigeration wafer and the like, but the heat dissipation mechanism used in the above has the problem of relatively high cost.
Disclosure of Invention
In order to reduce the temperature floating up and down, and reduce the cost while enabling the temperature of the heating area to be as close to the target temperature as possible, the application provides a temperature control device and a temperature control method of a mechanical arm.
The temperature control device and the method for the mechanical arm adopt the following technical scheme:
the temperature control device of the mechanical arm comprises the mechanical arm and a heater, wherein a heat insulation layer is arranged between the mechanical arm and the heater, and the heat insulation layer comprises a main board and a heat insulation plate.
Through adopting above-mentioned technical scheme, through setting up the thermal insulation layer, the thermal insulation layer includes mainboard and thermal insulation board, and the thermal insulation board can play the thermal insulation effect, and the mainboard can play the effect of heat dissipation cooling, helps controlling the temperature float of heating zone, reduces the scope that the heating zone temperature floats from top to bottom; the thermal insulation layer is arranged between the mechanical arm and the heater, and can be used for blocking heat transfer between the mechanical arm and the heater.
In a specific embodiment, the main board is fixedly connected with the thermal insulation board, the main board is arranged close to the heater, the thermal insulation board is arranged close to the mechanical arm, and the main board and the thermal insulation board are provided with grooves to form clamping grooves.
Through adopting the technical scheme, through setting up the draw-in groove, when installing mainboard and thermal insulation board, can be through draw-in groove and mounted position cooperation, reach the purpose that carries out spacing to mainboard and thermal insulation board to play auxiliary fixation's effect; the mainboard sets up to be close to the heater, can be convenient for dispel the heat to the zone of heating, and the thermal-insulated board sets up to be close to the arm, can separate the heat that the heater produced.
In a specific implementation manner, a heat dissipation pipeline is arranged at one end, close to the heater, of the main board, the heat dissipation pipeline comprises a main pipeline, and the main pipeline is a groove formed in the main board in a bending mode.
Through adopting the technical scheme, through setting up the mainboard, set up the heat dissipation pipeline on the mainboard, the heat dissipation pipeline can help the zone of heating to cool down to realize the purpose of cooling down to the zone of heating; the heat dissipation pipeline comprises a main pipeline, the main pipeline is bent to prolong the path of air flowing in the pipeline, so that the heat dissipation area is enlarged, more heat is taken away as much as possible when the main pipeline ventilates, and the heat dissipation efficiency is improved.
In a specific implementation mode, a through hole communicated with the main pipeline is formed in the main board, two positions of the through hole are arranged in the through hole, a through hole communicated with the through hole is formed in two side faces of the main board to form a hole and a hole, and the hole is connected with a compressed dry air system through a pipeline.
Through the technical scheme, through the arrangement of the through holes, two positions of the through holes are formed, and the air sent in can be guided into the main pipeline, so that the main pipeline is helped to realize the functions of heat dissipation and temperature reduction; by providing an access opening and an exit opening, the access opening is capable of guiding air from the compressed dry air system to the through opening; the setting of apopore can lead out the air in the mainboard to realize the inflow and the outflow of air in the heat dissipation pipeline, take out the heat that the heater was given out in the mainboard, thereby help realizing the function of heat dissipation cooling.
In a specific embodiment, a damper door is provided at the conduit communicating between the inlet opening and the compressed dry air system.
Through adopting above-mentioned technical scheme, through setting up the throttle valve, the throttle valve is connected with the controller electricity, and the controller can control the throttle valve to the realization is to the control of air input, with this can realize controlling the radiating effect, thereby can control the temperature of zone of heating, reaches the effect that reduces the zone of heating temperature and floats from top to bottom.
In a specific embodiment, the heat-insulating plate comprises a panel, the panel is fixedly connected with the main board, one end, away from the main board, of the panel is fixedly connected with a bottom plate, and the bottom plate and the panel form a cavity together.
Through adopting above-mentioned technical scheme, through the setting to panel and bottom plate, panel and bottom plate can constitute the cavity jointly, and the cavity structure can effectually separate the heat of heater transmission, and the cavity structure can also provide the space for the elastic deformation of bottom plate when the arm interferes the bottom plate to play the effect of buffering.
In a specific implementation manner, the two sides of the bottom plate far away from one end of the bottom plate are respectively provided with a bump, a plurality of division bars are arranged between the two bumps, a plurality of rubber columns are arranged between the division bars, and the rubber columns are in contact with the mechanical arm.
Through adopting above-mentioned technical scheme, through setting up to the lug, the lug can play the guard action to the parting bead fixed between the lug, when contacting with the arm, because the arm carries out relative motion when the work relative thermal insulation layer, can make arm and rubber post direct contact through setting up to the parting bead to thereby produce elastic deformation at the surface that contacts and avoid the arm to the wearing and tearing of parting bead.
In a specific embodiment, the heater includes a controller and a temperature sensor, the controller being electrically connected to the temperature sensor.
Through adopting above-mentioned technical scheme, through setting up heater, controller and temperature sensor, the controller can control the heater and heat, and temperature sensor can detect the temperature of zone of heating to make the controller can control the temperature of heater heating, consequently form a control closed loop between controller, heater, temperature sensor and throttle valve, can control the range of the upper and lower floating of zone of heating temperature, make the temperature trend that the zone of heating reciprocated the same with the target temperature.
In a specific embodiment, a temperature control device for a robotic arm is used, comprising the steps of: and a heat dissipation pipeline is arranged on the main board in the heat insulation layer, and air can be introduced between the heat insulation layer and the heater through the heat dissipation pipeline.
Through adopting above-mentioned technical scheme, the heat dissipation pipeline is offered on the mainboard of thermal insulation layer, because thermal insulation layer is conventional configuration on the arm, consequently offer the heat dissipation pipeline on thermal insulation layer mainboard can save the cost, realize carrying out radiating technological effect to the radiator to can control the temperature of zone of heating, reduce the upper and lower floating of temperature.
In a specific embodiment, the heat-dissipating line is connected to a compressed dry air system via a conduit, which is capable of introducing air into the heat-dissipating line.
By adopting the technical scheme, the compressed dry air system is used as a cooling means, and is the conventional configuration of the semiconductor factory building, so that the building cost does not need to be additionally increased, the compressed dry air system is communicated with the radiating pipeline, and air can be introduced between the heat insulation layer and the heater, thereby realizing the reduction of the temperature of the heater and achieving the radiating effect.
In summary, the present application includes at least one of the following beneficial technical effects:
1. by guiding the air in the compressed dry air system into the heat insulation layer, the temperature of the heating area can be reduced by adopting the method, the design is simple, and a heat dissipation pipeline is only required to be arranged on a main board in the heat insulation layer, and an additional heat dissipation pipeline can be also adopted; compared with the traditional liquid nitrogen, compressors and refrigerating wafers, the method has the advantages that the production cost is relatively low, the scheme does not need extra cost, the related matching of a compressed dry air system is very simple, an extra liquid nitrogen pipeline, a high-pressure refrigerant pipeline or an ice water pipeline is not needed, the improvement of the temperature control effect can be realized only by connecting a pipeline, and the obvious temperature control effect can be generated.
2. Through setting up the insulating layer, the insulating layer includes mainboard and heat insulating plate, and the mainboard is close to the radiator setting, can be convenient for set up the heat dissipation pipeline on the mainboard, and the heat insulating plate includes panel and bottom plate, and cavity can be constituteed jointly to panel and bottom plate, and cavity structure can effectually block the heat that the heater transmitted, has obvious thermal-insulated effect.
3. The controller, the heater, the temperature sensor and the throttle valve are arranged in the same way, closed-loop control can be formed through electric connection among the controller, the heater, the temperature sensor and the throttle valve, the up-and-down floating of the temperature of the heating area can be effectively controlled, and the floating amplitude of the temperature of the heating area is reduced.
Drawings
FIG. 1 is a schematic diagram of a temperature control device and method embodying a robot;
FIG. 2 is a schematic diagram showing a specific structure of a heat insulating layer;
FIG. 3 is a schematic diagram showing a specific structure of a motherboard;
FIG. 4 is a schematic diagram showing a specific structure of a thermal insulation plate;
FIG. 5 is a schematic diagram showing the specific structure of the division bar and the rubber column.
Reference numerals illustrate: 1. a mechanical arm; 2. a thermal insulation layer; 3. a heater; 4. a throttle valve; 21. a main board; 22. a thermal insulation plate; 23. a clamping groove; 211. a heat dissipation pipeline; 221. a panel; 222. a bottom plate; 223. a parting bead; 224. a rubber column; 225. a bump; 226. a cavity; 31. A controller; 32. a temperature sensor; 212. a main pipeline; 213. a hole is formed; 214. a hole is formed; 215. a through hole; 5. heating zone.
Detailed Description
The present application is described in further detail below in conjunction with fig. 1-5.
The embodiment of the application discloses a temperature control device and a temperature control method for a mechanical arm. Referring to fig. 1, a temperature control device of a mechanical arm comprises a mechanical arm 1 and a heater 3, wherein a thermal insulation layer 2 is fixedly arranged between the mechanical arm 1 and the heater 3, and the thermal insulation layer 2 can play a role in blocking heat transferred by the heater 3; the heat insulating layer 2 can also radiate heat from the heater 3. The heater 3 is provided with a controller 31 and a temperature sensor 32, the controller 31 is electrically connected with the temperature sensor 32, the controller 31 can control the heater 3 to heat the heating zone 5, the heating zone 5 is a region where a working target of the mechanical arm 1 is located, the temperature sensor 32 can detect the temperature of the heating zone 5 when the heater 3 heats the heating zone 5, when the temperature sensor 32 detects that the temperature of the heating zone 5 reaches a preset value, the temperature sensor 32 can transmit a signal to the controller 31, and the controller 31 can control the heater 3, so that the heater 3 stops heating.
Referring to fig. 2 and 3, the thermal insulation layer 2 includes a main board 21 and a thermal insulation board 22, two ends of the main board 21 and the thermal insulation board 22 are provided with grooves to form a clamping groove 23, the clamping groove 23 is matched with a protrusion arranged on the mechanical arm 1, and the main board 21 and the thermal insulation board 22 can be conveniently installed and fixed on the mechanical arm 1. The mainboard 21 sets up to be close to the heater 3, has seted up the heat dissipation pipeline 211 on the mainboard 21, and the heat dissipation pipeline 211 includes main pipeline 212, and main pipeline 212 sets up to the recess that main pipeline 21 is close to the crooked setup in heater 3 one side surface, and the air can pass through in the main pipeline 212, thereby main pipeline 212 crooked setting can increase the air flow area and increase the heat radiating area. The main pipe 212 may be a separate pipe provided on the main board 21. Two opposite sides of the main board 21 are respectively provided with a through hole forming inlet 213 and an outlet 214 which are communicated with the through hole 215, two ends of the main pipeline 212 are provided with the through hole 215 which is communicated with the main pipeline 212, the through hole 215 is vertically arranged relative to the main pipeline 212, and the through hole 215 can change the circulation direction of air and guide the air into the main pipeline 212. The inlet 213 is connected with the compressed dry air system through a pipeline, a throttle valve 4 is arranged at the pipeline communicated between the compressed dry air system and the inlet 213, the throttle valve 4 is electrically connected with the controller 31, the controller 31 can control the throttle valve 4, and accordingly the air inflow is regulated, the heat dissipation effect is controlled, and the temperature control effect is improved.
Referring to fig. 4 and 5, the thermal insulation plate 22 is disposed close to the mechanical arm 1, the thermal insulation plate 22 includes a panel 221 and a bottom plate 222, one end of the panel 221 is fixedly connected with the main board 21, the other end is fixedly connected with the bottom plate 222, a frame protrudes from the periphery of the bottom plate 222 to form a cavity 226 together with the panel 221, and the cavity 226 can effectively perform a thermal insulation function on the heater 3; the bottom plate 222 is arranged to be elastic material, can play the cushioning effect to the interference of arm 1, and the both sides that the bottom plate 222 kept away from panel 221 respectively are provided with lug 225, and the fixed many parting bead 223 that are provided with between two lug 225, parting bead 223 set up rectangular, and the height of parting bead 223 is than the height of boss 225, and lug 225 can play the guard action to parting bead 223, prevents that arm 1 from producing wearing and tearing to parting bead 223 in the operation in-process. A plurality of rubber columns 224 which are uniformly arranged are arranged in the parting bead 223, one ends of the rubber columns 224 are directly contacted with the mechanical arm 1, and the rubber columns 224 can generate elastic deformation on the surface contacted with the mechanical arm 1 by utilizing the elasticity of the rubber columns 224, so that a buffer effect is achieved, and the interference to other parts is reduced when the mechanical arm 1 operates.
The application also discloses a temperature control method of the mechanical arm, which comprises a temperature control device of the mechanical arm, wherein the temperature control method of the mechanical arm is specifically as follows: a heat dissipation pipeline 211 is arranged on the main board 21 in the heat insulation plate 2, air in the compressed dry air system is led between the heat insulation layer 2 and the heater 3 through the heat dissipation pipeline 211, and the air flow of the compressed dry air system is utilized to cool the heater 3, so that the temperature control effect is realized; the heat dissipation pipe 211 may be provided on the main board 21 in the heat insulation layer 2, or may be an independent pipe provided on the main board 21, so as to achieve a heat dissipation effect.
The implementation principle of the temperature control device and the method of the mechanical arm in the embodiment of the application is as follows: the heat dissipation pipeline 211 is arranged on the main board 21 in the heat insulation layer 2, and the heat dissipation pipeline 211 is used for cooling the heating zone 5, so that the control of the temperature is realized, and the up-and-down floating of the temperature is reduced; the controller 31 receives signals from the temperature sensor 32 and controls the heater 3 and the throttle valve 4 to form a control closed loop, thereby realizing the temperature control effect on the heating zone 5.
The foregoing are all preferred embodiments of the present application, and are not intended to limit the scope of the present application in any way, therefore: all equivalent changes in structure, shape and principle of this application should be covered in the protection scope of this application.
Claims (10)
1. A temperature control device of robotic arm, its characterized in that: the device comprises a mechanical arm (1) and a heater (3), wherein a heat insulation layer (2) is arranged between the mechanical arm (1) and the heater (3), and the heat insulation layer (2) comprises a main board (21) and a heat insulation plate (22).
2. The temperature control device of a robotic arm of claim 1, wherein: the main board (21) is fixedly connected with the heat insulation plate (22), the main board (21) is arranged to be close to the heater (3), the heat insulation plate (22) is arranged to be close to the mechanical arm (1), and the main board (21) and the heat insulation plate (22) are provided with grooves to form clamping grooves (23).
3. The temperature control device of a robotic arm of claim 1, wherein: one end of the main board (21) close to the heater (3) is provided with a heat dissipation pipeline (211), the heat dissipation pipeline (211) comprises a main pipeline (212), and the main pipeline (212) is a groove which is formed in the main board (21) in a bending mode.
4. A temperature control device for a robotic arm as claimed in claim 3, wherein: the novel compressed dry air system is characterized in that a through hole (215) communicated with a main pipeline (212) is formed in the main board (21), two positions of the through hole (215) are arranged, a through hole forming hole (213) and a through hole (214) communicated with the through hole (215) are formed in two side faces of the main board (21), and the hole (213) is connected with the compressed dry air system through a pipeline.
5. The temperature control device for a robotic arm of claim 4, wherein: a throttle valve (4) is arranged at a pipeline communicated between the inlet hole (213) and the compressed dry air system.
6. The temperature control device of a robotic arm of claim 1, wherein: the heat insulation plate (22) comprises a panel (221), the panel (221) is fixedly connected with the main board (21), one end, far away from the main board (21), of the panel (221) is fixedly connected with a bottom plate (222), and the bottom plate (222) and the panel (221) form a cavity (226) together.
7. The temperature control device of a robotic arm of claim 6, wherein: two sides of one end of the bottom plate (222) away from the bottom plate (221) are respectively provided with a bump (225), a plurality of parting strips (223) are arranged between the two bumps (225), a plurality of rubber columns (224) are arranged between the parting strips (223), and the rubber columns (224) are in contact with the mechanical arm (1).
8. The temperature control device of a robotic arm of claim 1, wherein: the heater (3) comprises a controller (31) and a temperature sensor (32), and the controller (31) is electrically connected with the temperature sensor (32).
9. A temperature control method of a mechanical arm is characterized by comprising the following steps: a temperature control device employing the robot arm of any one of claims 1-8, comprising the steps of: a heat dissipation pipeline (211) is arranged on a main board (21) in the heat insulation layer (2), and air can be introduced between the heat insulation layer (2) and the heater (2) through the heat dissipation pipeline (211).
10. The method for controlling the temperature of a mechanical arm according to claim 9, wherein: the heat dissipation pipeline (211) is connected with a compressed dry air system through a pipeline, and the compressed dry air system can lead air into the heat dissipation pipeline (211).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311627217.0A CN117507008B (en) | 2023-11-29 | 2023-11-29 | Temperature control device and method for mechanical arm |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311627217.0A CN117507008B (en) | 2023-11-29 | 2023-11-29 | Temperature control device and method for mechanical arm |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN117507008A true CN117507008A (en) | 2024-02-06 |
| CN117507008B CN117507008B (en) | 2024-08-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311627217.0A Active CN117507008B (en) | 2023-11-29 | 2023-11-29 | Temperature control device and method for mechanical arm |
Country Status (1)
| Country | Link |
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| CN (1) | CN117507008B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102039441A (en) * | 2010-12-28 | 2011-05-04 | 宁波君灵模具技术有限公司 | Auxiliary cooling device for machining |
| CN106891352A (en) * | 2015-12-17 | 2017-06-27 | 杨配媛 | A kind of robot gripper attemperating unit |
| CN107104214A (en) * | 2017-06-23 | 2017-08-29 | 宣城普益力能新能源科技有限公司 | The convenient electrokinetic cell of one kind cleaning |
| CN207255536U (en) * | 2017-05-31 | 2018-04-20 | 新昌县大市聚镇洪聚机械厂 | It is a kind of from cooling-down type welding manipulator |
| CN217620645U (en) * | 2022-04-20 | 2022-10-21 | 苏州芯图半导体有限公司 | Mechanical arm and constant temperature control device |
| CN220074723U (en) * | 2023-06-14 | 2023-11-24 | 上海创轲新材料科技有限公司 | Robot grabbing tool with infrared heating function |
-
2023
- 2023-11-29 CN CN202311627217.0A patent/CN117507008B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102039441A (en) * | 2010-12-28 | 2011-05-04 | 宁波君灵模具技术有限公司 | Auxiliary cooling device for machining |
| CN106891352A (en) * | 2015-12-17 | 2017-06-27 | 杨配媛 | A kind of robot gripper attemperating unit |
| CN207255536U (en) * | 2017-05-31 | 2018-04-20 | 新昌县大市聚镇洪聚机械厂 | It is a kind of from cooling-down type welding manipulator |
| CN107104214A (en) * | 2017-06-23 | 2017-08-29 | 宣城普益力能新能源科技有限公司 | The convenient electrokinetic cell of one kind cleaning |
| CN217620645U (en) * | 2022-04-20 | 2022-10-21 | 苏州芯图半导体有限公司 | Mechanical arm and constant temperature control device |
| CN220074723U (en) * | 2023-06-14 | 2023-11-24 | 上海创轲新材料科技有限公司 | Robot grabbing tool with infrared heating function |
Also Published As
| Publication number | Publication date |
|---|---|
| CN117507008B (en) | 2024-08-13 |
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