CN117497506A - Semiconductor packaging - Google Patents

Semiconductor packaging Download PDF

Info

Publication number
CN117497506A
CN117497506A CN202310896462.5A CN202310896462A CN117497506A CN 117497506 A CN117497506 A CN 117497506A CN 202310896462 A CN202310896462 A CN 202310896462A CN 117497506 A CN117497506 A CN 117497506A
Authority
CN
China
Prior art keywords
substrate
die
integrated circuit
components
semiconductor package
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202310896462.5A
Other languages
Chinese (zh)
Inventor
陈威智
陈晞白
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MediaTek Inc
Original Assignee
MediaTek Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US18/215,830 external-priority patent/US20240038647A1/en
Application filed by MediaTek Inc filed Critical MediaTek Inc
Publication of CN117497506A publication Critical patent/CN117497506A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49838Geometry or layout
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49833Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers the chip support structure consisting of a plurality of insulating substrates

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Geometry (AREA)
  • Wire Bonding (AREA)

Abstract

The invention discloses a semiconductor package, comprising: a divided package substrate composed of a plurality of substrate parts arranged side by side; at least one integrated circuit die mounted on the first surface of the partitioned package substrate; and solder balls mounted on a second surface of the partitioned package substrate opposite to the first surface. The plurality of substrate components form the divided packaging substrate with larger size, and the integrated circuit die is arranged on the divided packaging substrate and can help the plurality of substrate components to be more stably adjacent together, so that the integrated circuit die and the divided packaging substrate are mutually matched, thereby not only improving the yield of substrate manufacture, but also remarkably improving the integral mechanical strength and mechanical stability of the semiconductor packaging structure.

Description

半导体封装Semiconductor packaging

技术领域Technical field

本发明涉及半导体技术领域,尤其涉及一种半导体封装。The present invention relates to the field of semiconductor technology, and in particular to a semiconductor package.

背景技术Background technique

随着越来越多的消费者拥抱智能设备,对网络数据中心、物联网、智能传感器等的需求不断增长。为了满足这些需求,半导体设计公司在较低几何尺寸(例如7nm、5nm和3nm)中遇到了芯片设计复杂性和PPA(power,performance,area,功率、性能、面积)因素方面的挑战。As more consumers embrace smart devices, demand for network data centers, IoT, smart sensors, and more continues to grow. To meet these demands, semiconductor design companies are encountering challenges with chip design complexity and PPA (power, performance, area) factors in lower geometries such as 7nm, 5nm and 3nm.

先进封装在整个半导体行业中发挥着越来越大的作用。网络设备、服务器和智能手机等应用均采用了先进封装。为了推进设计,IC供应商开发了ASIC(ApplicationSpecific Integrated Circuit,专用集成电路)。然后,供应商将每个节点的不同功能缩小并封装到ASIC上。但这种方法在每个节点都变得越来越复杂和昂贵。Advanced packaging plays an increasing role throughout the semiconductor industry. Applications such as network equipment, servers and smartphones use advanced packaging. In order to advance the design, IC suppliers developed ASIC (ApplicationSpecific Integrated Circuit, Application Specific Integrated Circuit). Vendors then shrink and package the different functions of each node onto an ASIC. But this approach becomes increasingly complex and expensive at each node.

例如,用于交换路由器或数据中心的ASIC可能包括大晶粒(die)并且封装的尺寸通常可能超过4500mm2,由于这种尺寸的封装基板(package substrate)的生产良率较低,这导致ASIC封装的成本上升。大晶粒的ASIC封装也会遇到翘曲问题。For example, ASICs used in switching routers or data centers may include large dies and package sizes may typically exceed 4500 mm 2 , which results in lower production yields for package substrates of this size. The cost of packaging increases. Large-die ASIC packages also encounter warpage issues.

发明内容Contents of the invention

有鉴于此,本发明提供一种使用基板块集成(substrate block integration,SBI)的改进的大晶粒半导体封装,以解决上述问题。In view of this, the present invention provides an improved large-die semiconductor package using substrate block integration (SBI) to solve the above problems.

根据本发明的第一方面,公开一种半导体封装,包括:According to a first aspect of the present invention, a semiconductor package is disclosed, including:

分隔式封装基板,由并排排列的多个基板部件组成;A divided packaging substrate consists of multiple substrate components arranged side by side;

至少一个集成电路晶粒,安装在所述分隔式封装基板的第一表面上;以及At least one integrated circuit die mounted on the first surface of the separated packaging substrate; and

焊球,安装在所述分隔式封装基板的与所述第一表面相对的第二表面上。Solder balls are mounted on a second surface of the separated packaging substrate opposite to the first surface.

进一步的,所述至少一个集成电路晶粒通过导电元件电连接到所述分隔式封装基板。从而将至少一个集成电路晶粒与分隔式封装基板电性连接,并且将至少一个集成电路晶粒与多个基板部件电性连接,至少一个集成电路晶粒机械及电性连接的基板部件的数量可以大于等于两个。Further, the at least one integrated circuit die is electrically connected to the separated packaging substrate through a conductive element. Thereby, at least one integrated circuit die is electrically connected to the separated packaging substrate, and at least one integrated circuit die is electrically connected to a plurality of substrate components, and the at least one integrated circuit die is mechanically and electrically connected to the number of substrate components. Can be greater than or equal to two.

进一步的,所述导电元件包括微凸块、铜凸块或铜柱。以更加稳定的机械和电性连接集成电路晶粒与多个基板部件。Further, the conductive elements include micro-bumps, copper bumps or copper pillars. Provides more stable mechanical and electrical connections between integrated circuit dies and multiple substrate components.

进一步的,所述多个基板部件彼此物理分离。由此由多个尺寸较小的基板部件相互拼接成为尺寸较大的分隔式封装基板。Further, the plurality of substrate components are physically separated from each other. As a result, a plurality of smaller substrate components are spliced together to form a larger separated packaging substrate.

进一步的,所述多个基板部件被重新布置并且邻接在一起,且所述多个基板部件之间具有间隙。由此由多个尺寸较小的基板部件相互拼接成为尺寸较大的分隔式封装基板。Further, the plurality of substrate components are rearranged and adjacent to each other with gaps between the plurality of substrate components. As a result, a plurality of smaller substrate components are spliced together to form a larger separated packaging substrate.

进一步的,所述多个基板部件通过使用填充到所述间隙中的粘合剂而邻接在一起。以此方式将分隔的多个基板部件进行拼接整合,形成较大的分隔式封装基板。Further, the plurality of substrate components are adjacent together by using an adhesive filled in the gap. In this way, multiple separated substrate components are spliced and integrated to form a larger separated packaging substrate.

进一步的,所述间隙的宽度范围为1-3mm。基板部件之间合适的间隙宽度不仅以保证基板部件之间粘合的稳固和机械稳定性,而且还可以防止基板部件之间的意外脱落等。Further, the width of the gap ranges from 1 to 3 mm. The appropriate gap width between the substrate components not only ensures the firmness and mechanical stability of the bonding between the substrate components, but also prevents accidental detachment between the substrate components.

进一步的,所述多个基板部件是同质基板或者异质基板。从而方便基板部件的制造以及提高拼接、组合的灵活性。Further, the plurality of substrate components are homogeneous substrates or heterogeneous substrates. This facilitates the manufacturing of substrate components and improves the flexibility of splicing and combination.

进一步的,所述多个基板部件具有相同的厚度或者不同的厚度。从而方便基板部件的制造以及提高拼接、组合的灵活性。Further, the plurality of substrate components have the same thickness or different thicknesses. This facilitates the manufacturing of substrate components and improves the flexibility of splicing and combination.

进一步的,还包括:Furthermore, it also includes:

至少一个晶粒,以倒装芯片方式安装在所述分隔式封装基板的第一表面上。从而提高设计的灵活性。At least one die is mounted on the first surface of the separated packaging substrate in a flip-chip manner. This increases design flexibility.

进一步的,所述至少一个晶粒是虚设晶粒或者存储器晶粒。从而提高设计的灵活性。Further, the at least one die is a dummy die or a memory die. This increases design flexibility.

进一步的,还包括:Furthermore, it also includes:

第二集成电路晶粒;以及the second integrated circuit die; and

电子装置,安装在所述分隔式封装基板的第一表面上。从而提高设计的灵活性。An electronic device is mounted on the first surface of the separated packaging substrate. This increases design flexibility.

进一步的,所述电子装置包括去耦电容器。从而提高设计的灵活性。Further, the electronic device includes a decoupling capacitor. This increases design flexibility.

进一步的,所述第二集成电路晶粒和所述电子装置不与所述间隙重叠。从而保证第二集成电路晶粒和电子装置的安装稳定性。Further, the second integrated circuit die and the electronic device do not overlap the gap. This ensures the installation stability of the second integrated circuit die and the electronic device.

进一步的,还包括:Furthermore, it also includes:

环形的框架,安装在所述分隔式封装基板的第一表面上。框架可以提高多个基板部件之间的连接稳定性,同时提高封装结构的整体机械强度。An annular frame is installed on the first surface of the separated packaging substrate. The frame improves connection stability between multiple substrate components while increasing the overall mechanical strength of the package structure.

进一步的,所述框架是金属框架。以为多个基板部件提供更加稳定的支撑结构。Further, the frame is a metal frame. To provide a more stable support structure for multiple substrate components.

进一步的,所述框架通过使用接合凸块或者粘合剂附接至所述分隔式封装基板的第一表面。使用接合凸块连接可以提高基板到框架的散热能力,并且方便制造和成形,连接也更加可靠和稳定。使用粘合剂连接会更加方便制造。Further, the frame is attached to the first surface of the separated packaging substrate using bonding bumps or adhesive. The use of bonding bump connections can improve the heat dissipation capacity from the substrate to the frame, facilitate manufacturing and forming, and make the connection more reliable and stable. Using adhesive connections will make manufacturing easier.

进一步的,所述框架包括用于容纳所述至少一个集成电路晶粒的开口。以保护集成电路晶粒并且提高整体结构的强度。Further, the frame includes an opening for accommodating the at least one integrated circuit die. To protect the integrated circuit die and improve the strength of the overall structure.

进一步的,还包括:Furthermore, it also includes:

盖子,安装在分隔式封装基板的第一表面上,其中,所述至少一个集成电路晶粒被所述盖子容纳并被模制帽封装。从而提高封装结构的散热以及机械强度。A cover is mounted on the first surface of the divided packaging substrate, wherein the at least one integrated circuit die is received by the cover and encapsulated by the mold cap. Thereby improving the heat dissipation and mechanical strength of the packaging structure.

进一步的,还包括:Furthermore, it also includes:

重分布层结构,位于所述分隔式封装基板的第一表面上,其中所述至少一个集成电路晶粒安装在所述重分布层结构上。以提高布局设计和晶粒安装的灵活性。A redistribution layer structure is located on the first surface of the separated packaging substrate, wherein the at least one integrated circuit die is mounted on the redistribution layer structure. To improve layout design and die installation flexibility.

本发明的半导体封装由于包括:分隔式封装基板,由并排排列的多个基板部件组成;至少一个集成电路晶粒,安装在所述分隔式封装基板的第一表面上;以及焊球,安装在所述分隔式封装基板的与所述第一表面相对的第二表面上。本发明中多个基板部件形成尺寸较大的分隔式封装基板,而集成电路晶粒安装在该分隔式封装基板并且可以帮助多个基板部件更加稳定邻接在一起,由此本发明中集成电路晶粒与分隔式封装基板相互配合从而不仅提高了基板制造的良率,而且显著提高了半导体封装结构的整体机械强度和机械稳定性。The semiconductor package of the present invention includes: a separated packaging substrate, which is composed of a plurality of substrate components arranged side by side; at least one integrated circuit die installed on the first surface of the divided packaging substrate; and a solder ball installed on on a second surface of the separated packaging substrate opposite to the first surface. In the present invention, multiple substrate components form a larger-sized separated packaging substrate, and the integrated circuit die is installed on the separated packaging substrate and can help the multiple substrate components to be more stably adjacent together. Therefore, the integrated circuit die in the present invention The cooperation between the particles and the separated packaging substrate not only improves the yield of substrate manufacturing, but also significantly improves the overall mechanical strength and mechanical stability of the semiconductor packaging structure.

附图说明Description of drawings

图1A是示出根据本发明实施例的示例性半导体封装的示意图;1A is a schematic diagram illustrating an exemplary semiconductor package according to an embodiment of the present invention;

图1B是沿图1A中的线I-I’截取的剖视图;Figure 1B is a cross-sectional view taken along line I-I' in Figure 1A;

图2A是示出根据本发明另一实施例的示例性半导体封装的示意图;2A is a schematic diagram illustrating an exemplary semiconductor package according to another embodiment of the present invention;

图2B是沿图2A中的线II-II’截取的剖视图;Figure 2B is a cross-sectional view taken along line II-II' in Figure 2A;

图3A是示出根据本发明又一实施例的示例性半导体封装的示意图;3A is a schematic diagram illustrating an exemplary semiconductor package according to yet another embodiment of the present invention;

图3B是沿图3A中的线III-III’截取的剖视图;以及Figure 3B is a cross-sectional view taken along line III-III' in Figure 3A; and

图4是示出本发明的另一个实施例的示意性截面图。4 is a schematic cross-sectional view showing another embodiment of the present invention.

具体实施方式Detailed ways

在下面对本发明的实施例的详细描述中,参考了附图,这些附图构成了本发明的一部分,并且在附图中通过图示的方式示出了可以实践本发明的特定的优选实施例。对这些实施例进行了足够详细的描述,以使本领域技术人员能够实践它们,并且应当理解,在不脱离本发明的精神和范围的情况下,可以利用其他实施例,并且可以进行机械,结构和程序上的改变。本发明。因此,以下详细描述不应被理解为限制性的,并且本发明的实施例的范围仅由所附权利要求限定。所描述的附图仅是示意性的而非限制性的。在附图中,为了说明的目的,一些元件的尺寸可能被放大而不是按比例绘制。在本发明的实践中,尺寸和相对尺寸不对应于实际尺寸。In the following detailed description of embodiments of the invention, reference is made to the accompanying drawings, which form a part hereof and which illustrate by way of illustration certain preferred embodiments in which the invention may be practiced. . These embodiments are described in sufficient detail to enable those skilled in the art to practice them, and it is to be understood that other embodiments may be utilized and mechanical, structural and structural changes may be made without departing from the spirit and scope of the invention. and procedural changes. this invention. Accordingly, the following detailed description is not to be construed as limiting, and the scope of embodiments of the invention is defined only by the appended claims. The drawings described are illustrative only and not restrictive. In the drawings, the dimensions of some elements may be exaggerated and not drawn to scale for illustrative purposes. In the practice of the invention, dimensions and relative dimensions do not correspond to actual dimensions.

将理解的是,尽管术语“第一”、“第二”、“第三”、“主要”、“次要”等在本文中可用于描述各种组件、组件、区域、层和/或部分,但是这些组件、组件、区域、这些层和/或部分不应受到这些术语的限制。这些术语仅用于区分一个组件、组件、区域、层或部分与另一区域、层或部分。因此,在不脱离本发明构思的教导的情况下,下面讨论的第一或主要组件、组件、区域、层或部分可以称为第二或次要组件、组件、区域、层或部分。It will be understood that, although the terms "first," "second," "third," "primary," "secondary," etc. may be used herein to describe various components, components, regions, layers and/or sections , but these components, components, regions, layers and/or portions shall not be limited by these terms. These terms are only used to distinguish one component, component, region, layer or section from another region, layer or section. Thus, a first or primary component, component, region, layer or section discussed below could be termed a secondary or secondary component, component, region, layer or section without departing from the teachings of the inventive concept.

此外,为了便于描述,本文中可以使用诸如“在...下方”、“在...之下”、“在...下”、“在...上方”、“在...之上”之类的空间相对术语,以便于描述一个组件或特征与之的关系。如图所示的另一组件或特征。除了在图中描述的方位之外,空间相对术语还意图涵盖设备在使用或运行中的不同方位。该设备可以以其他方式定向(旋转90度或以其他定向),并且在此使用的空间相对描述语可以同样地被相应地解释。另外,还将理解的是,当“层”被称为在两层“之间”时,它可以是两层之间的唯一层,或者也可以存在一个或多个中间层。In addition, for convenience of description, terms such as “below”, “under”, “below”, “above”, “between” may be used herein. Spatially relative terms such as "on" to describe the relationship of a component or feature to it. Another component or feature as shown in a figure. In addition to the orientation depicted in the figures, the spatially relative terms are intended to cover different orientations of the device in use or operation. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly. In addition, it will also be understood that when a "layer" is referred to as being "between" two layers, it can be the only layer between the two layers, or one or more intervening layers may also be present.

术语“大约”、“大致”和“约”通常表示规定值的±20%、或所述规定值的±10%、或所述规定值的±5%、或所述规定值的±3%、或规定值的±2%、或规定值的±1%、或规定值的±0.5%的范围内。本发明的规定值是近似值。当没有具体描述时,所述规定值包括“大约”、“大致”和“约”的含义。本文所使用的术语仅出于描述特定实施例的目的,并不旨在限制本发明。如本文所使用的,单数术语“一”,“一个”和“该”、“所述”也旨在包括复数形式,除非上下文另外明确指出。本文所使用的术语仅出于描述特定实施例的目的,并不旨在限制本发明构思。如本文所使用的,单数形式“一个”、“一种”和“该”、“所述”也旨在包括复数形式,除非上下文另外明确指出。The terms "about", "approximately" and "approximately" generally mean ±20% of the stated value, or ±10% of the stated value, or ±5% of the stated value, or ±3% of the stated value , or within the range of ±2% of the specified value, or ±1% of the specified value, or ±0.5% of the specified value. The values specified in this invention are approximate. When not specifically described, stated values include the meanings of "about," "approximately," and "approximately." The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular terms "a", "an" and "the" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the inventive concept. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.

将理解的是,当将“组件”或“层”称为在另一组件或层“上”、“连接至”、“耦接至”或“邻近”时,它可以直接在其他组件或层上、与其连接、耦接或相邻、或者可以存在中间组件或层。相反,当组件称为“直接在”另一组件或层“上”、“直接连接至”、“直接耦接至”或“紧邻”另一组件或层时,则不存在中间组件或层。It will be understood that when a "component" or "layer" is referred to as being "on," "connected to," "coupled to" or "adjacent" another component or layer, it can be directly on the other component or layer Intermediate components or layers may be present on, connected to, coupled to, or adjacent thereto. In contrast, when a component is referred to as being "directly on," "directly connected to," "directly coupled to" or "immediately adjacent" another component or layer, there are no intervening components or layers present.

注意:(i)在整个附图中相同的特征将由相同的附图标记表示,并且不一定在它们出现的每个附图中都进行详细描述,并且(ii)一系列附图可能显示单个项目的不同方面,每个方面都与各种参考标签相关联,这些参考标签可能会出现在整个序列中,或者可能只出现在序列的选定图中。Note: (i) like features will be designated by the same reference numerals throughout the Figures and will not necessarily be described in detail in every Figure in which they appear, and (ii) a series of Figures may show a single item Each aspect is associated with various reference labels that may appear throughout the sequence, or may appear only in selected plots of the sequence.

请参阅图1A及图1B。图1A是示出根据本发明实施例的示例性半导体封装的示意图。图1B是沿图1A中的线I-I’截取的剖视图。如图1A和图1B所示,半导体封装1包括分隔式(partitioned)封装基板10和安装在分隔式封装基板10的第一表面S1上的至少一个集成电路晶粒20。根据一个实施例,分隔式(或者分隔的、分区的、分区式)封装基板10的第一表面S1为平坦表面。根据一个实施例,例如,至少一个集成电路晶粒20可以以倒装芯片(flip-chip)方式安装在分隔式封装基板10的第一表面S1上。根据一个实施例,至少一个集成电路晶粒20通过诸如微凸块、铜凸块或铜柱的多个导电元件201电连接到分隔式封装基板10,但不限于此。底部填充物210可以被填充到至少一个集成电路晶粒20和分隔式封装基板10的第一表面S1之间的空间中。根据一个实施例,分隔式封装基板10可以具有例如在60毫米×60毫米和70毫米×70毫米的尺寸。Please refer to Figure 1A and Figure 1B. 1A is a schematic diagram illustrating an exemplary semiconductor package according to an embodiment of the present invention. Fig. 1B is a cross-sectional view taken along line I-I' in Fig. 1A. As shown in FIGS. 1A and 1B , the semiconductor package 1 includes a partitioned packaging substrate 10 and at least one integrated circuit die 20 mounted on a first surface S1 of the partitioned packaging substrate 10 . According to one embodiment, the first surface S1 of the separated (or separated, partitioned, partitioned) packaging substrate 10 is a flat surface. According to one embodiment, for example, at least one integrated circuit die 20 may be mounted on the first surface S1 of the separated packaging substrate 10 in a flip-chip manner. According to one embodiment, at least one integrated circuit die 20 is electrically connected to the separated packaging substrate 10 through a plurality of conductive elements 201 such as micro-bumps, copper bumps or copper pillars, but is not limited thereto. The underfill 210 may be filled into the space between the at least one integrated circuit die 20 and the first surface S1 of the separated package substrate 10 . According to one embodiment, the divided packaging substrate 10 may have dimensions of, for example, 60 mm x 60 mm and 70 mm x 70 mm.

根据本发明的实施例,分隔式封装基板10由以并排方式布置的至少两个较小的基板(下文中称为基板部件(或基板分区、基板部分))组成。例如,图1A中对共面的四个基板部件10a~10d进行说明。应当理解,基板部件10a-10d的数量和形状仅用于说明目的。本发明的实施例中由较小尺寸的基板部件10a-10d组合或拼接形成较大尺寸的分隔式封装基板。According to an embodiment of the present invention, the divided packaging substrate 10 consists of at least two smaller substrates (hereinafter referred to as substrate parts (or substrate partitions, substrate parts)) arranged side by side. For example, FIG. 1A illustrates four coplanar substrate members 10a to 10d. It should be understood that the number and shape of substrate components 10a-10d are for illustrative purposes only. In the embodiment of the present invention, smaller-sized substrate components 10a-10d are combined or spliced to form a larger-sized separated packaging substrate.

根据本发明的实施例,四个基板部件10a-10d在物理上彼此分离。根据一个实施例,四个基板部件10a-10d中的每一个可以具有例如在30mm×30mm和40mm×40mm之间的尺寸。通过采用尺寸较小的基板部件(或基板分区、基板部分),可以提高半导体封装结构的可靠性和设计灵活性,并降低生产成本。分隔式封装基板10还改善了封装翘曲问题。在一个实施例中,集成电路晶粒20的尺寸较大,这样需要大尺寸的基板以安装大尺寸的集成电路晶粒20。然而制造大尺寸的基板良率极低,且易发生翘曲等问题。本发明实施例中,将尺寸较小的至少两个基板部件邻接设置,形成尺寸较大的分隔式封装基板。这样制造的良率将会大幅度提升,并且这种方式可以减少应力集中,有效改善了翘曲。其中至少两个基板部件可以是封装基板。According to an embodiment of the present invention, the four substrate components 10a-10d are physically separated from each other. According to one embodiment, each of the four base plate components 10a-10d may have dimensions, for example, between 30 mm x 30 mm and 40 mm x 40 mm. By using smaller substrate components (or substrate partitions, substrate sections), the reliability and design flexibility of the semiconductor packaging structure can be improved, and production costs can be reduced. The separated package substrate 10 also improves package warpage issues. In one embodiment, the size of the integrated circuit die 20 is relatively large, which requires a large-size substrate to mount the large-size integrated circuit die 20 . However, the yield rate of manufacturing large-size substrates is extremely low, and problems such as warpage are prone to occur. In the embodiment of the present invention, at least two substrate components with smaller sizes are arranged adjacently to form a separated packaging substrate with larger sizes. The yield of manufacturing in this way will be greatly improved, and this method can reduce stress concentration and effectively improve warpage. At least two of the substrate components may be package substrates.

根据本发明的实施例,四个基板部件10a-10d重新布置并邻接在一起,其间具有间隙G。根据本发明的实施例,例如,可以通过使用填充到间隙G中的粘合剂或模塑料将四个基板部件10a-10d并排邻接或胶合在一起。例如,本发明实施例中,间隙G的宽度可以在1-3mm之间。在本发明一个实施例中,集成电路晶粒20跨越至少两个基板部件设置;或者,集成电路晶粒20横跨(或跨越)至少一个间隙G。采用这种方式,可以利用集成电路晶粒20来为基板部件之间的电性连接和机械连接,从而使分隔式封装基板更加稳固,不易发生开裂或脱落等问题。在一个实施例中,在俯视图中,集成电路晶粒20与至少两个基板部件重叠。本发明实施例中,至少两个基板部件形成尺寸较大的分隔式封装基板,而集成电路晶粒20安装在该分隔式封装基板并且可以帮助至少两个基板部件更加稳定邻接在一起,由此本发明实施例中集成电路晶粒20与分隔式封装基板相互配合从而不仅提高了基板制造的良率,而且显著提高了半导体封装结构的整体机械强度和机械稳定性。本发明实施例的上述方式特别适用于大尺寸的集成电路晶粒,较大尺寸的集成电路晶粒具有更高的强度,更容易将多个基板部件稳定的固定。在一个实施例中,在俯视图中,集成电路晶粒20可以与三个基板部件重叠,从而使得基板部件之间的受力更加均衡,保持半导体封装结构的受力平衡和稳定。在一个实施例中,在俯视图中,集成电路晶粒20可以与四个基板部件重叠,从而使得基板部件之间的受力更加均衡,保持半导体封装结构的受力平衡和稳定。在一个实施例中,集成电路晶粒20的中心位置可以与分隔式封装基板的中心位置大致相同,从而保证半导体封装结构的整体机械强度和稳固。此外,本发明实施例中,设计间隙G的宽度在1-3mm之间,以达到基板部分之间的粘合强度、相互之间结合稳定以及整体稳固性的平衡。若间隙G过小则可能会造成基板部件之间粘合不稳定,若间隙G过大则可能会造成分隔式封装基板整体机械强度不足。由此发明人设计为间隙G的宽度在1-3mm之间,以达到基板部件粘合强度足够以及粘合之后分隔式封装基板整体机械强度满足要求。因此,本发明实施例的上述方式从各方面优化了半导体封装结构的机械性能、电性连接、结构稳定性等,在提高生产良率的情况下提高了半导体封装结构的整体性能。According to an embodiment of the present invention, the four substrate components 10a-10d are rearranged and abutted together with a gap G therebetween. According to an embodiment of the present invention, the four substrate members 10a - 10d may be adjacent or glued together side by side by using an adhesive or molding compound filled into the gap G, for example. For example, in the embodiment of the present invention, the width of the gap G may be between 1-3 mm. In one embodiment of the present invention, the integrated circuit die 20 is disposed across at least two substrate components; or, the integrated circuit die 20 spans (or spans) at least one gap G. In this way, the integrated circuit die 20 can be used to provide electrical and mechanical connections between substrate components, thereby making the separated packaging substrate more stable and less prone to problems such as cracking or falling off. In one embodiment, integrated circuit die 20 overlaps at least two substrate components in a top view. In the embodiment of the present invention, at least two substrate components form a larger-sized separated packaging substrate, and the integrated circuit die 20 is installed on the separated packaging substrate and can help the at least two substrate components to be more stably adjacent together, thereby In the embodiment of the present invention, the integrated circuit die 20 and the separated packaging substrate cooperate with each other, thereby not only improving the yield rate of substrate manufacturing, but also significantly improving the overall mechanical strength and mechanical stability of the semiconductor packaging structure. The above methods of the embodiments of the present invention are particularly suitable for large-sized integrated circuit chips. Larger-sized integrated circuit chips have higher strength and are easier to stably fix multiple substrate components. In one embodiment, in a top view, the integrated circuit die 20 can overlap with three substrate components, thereby making the forces between the substrate components more balanced and maintaining the force balance and stability of the semiconductor packaging structure. In one embodiment, in a top view, the integrated circuit die 20 can overlap four substrate components, thereby making the forces between the substrate components more balanced and maintaining the force balance and stability of the semiconductor packaging structure. In one embodiment, the center position of the integrated circuit die 20 may be approximately the same as the center position of the separated packaging substrate, thereby ensuring the overall mechanical strength and stability of the semiconductor packaging structure. In addition, in the embodiment of the present invention, the width of the designed gap G is between 1 and 3 mm to achieve a balance between the bonding strength between the substrate parts, the stability of the mutual combination, and the overall stability. If the gap G is too small, the bonding between substrate components may be unstable. If the gap G is too large, the overall mechanical strength of the separated packaging substrate may be insufficient. Therefore, the inventor designed the width of the gap G to be between 1 and 3 mm, so as to achieve sufficient bonding strength of the substrate components and to meet the requirements for the overall mechanical strength of the separated packaging substrate after bonding. Therefore, the above-mentioned methods of the embodiments of the present invention optimize the mechanical properties, electrical connections, structural stability, etc. of the semiconductor packaging structure from all aspects, and improve the overall performance of the semiconductor packaging structure while improving the production yield.

根据本发明的实施例,四个基板部件10a-10d可以是均质(homogeneous)基底。例如,四个基板部件10a-10d可以由基本相同的基板材料(例如BT(Bismaleimide Triazine,双马来酰亚胺三嗪)基板或ABF(Aromatic Benzocyclobutene Film,芳香族苯并环丁烷薄膜)基板)组成。根据本发明的另一实施例,四个基板部件10a-10d可以是异质(heterogeneous)基底。例如,四个基板部件10a-10d可以由不同的基板材料构成,例如玻璃基板、陶瓷基板、BT基板、ABF基板等。根据本发明的实施例,四个基板部件10a-10d可以具有基本相同的厚度。根据本发明的实施例,四个基板部件10a-10d可以具有不同的厚度。According to embodiments of the present invention, the four substrate components 10a-10d may be homogeneous substrates. For example, the four substrate components 10a - 10d may be made of substantially the same substrate material (such as a BT (Bismaleimide Triazine) substrate or an ABF (Aromatic Benzocyclobutene Film) substrate). )composition. According to another embodiment of the present invention, the four substrate components 10a-10d may be heterogeneous substrates. For example, the four substrate components 10a-10d may be composed of different substrate materials, such as glass substrate, ceramic substrate, BT substrate, ABF substrate, etc. According to embodiments of the present invention, the four substrate members 10a-10d may have substantially the same thickness. According to embodiments of the present invention, the four substrate components 10a-10d may have different thicknesses.

根据本发明的实施例,四个基板部件10a-10d中的每一个可以包括互连结构101,互连结构101用于将集成电路晶粒20电连接到安装在分隔式封装基板10的第二表面S2上的相应的焊球SB。根据本发明的实施例,四个基板部件10a-10d的互连结构101可以彼此相同或相似。根据本发明的实施例,四个基板部件10a-10d的互连结构101可以彼此不同。According to embodiments of the present invention, each of the four substrate components 10a - 10d may include an interconnect structure 101 for electrically connecting the integrated circuit die 20 to a second die mounted on the divided package substrate 10 The corresponding solder ball SB on surface S2. According to embodiments of the present invention, the interconnection structures 101 of the four substrate components 10a - 10d may be the same or similar to each other. According to embodiments of the present invention, the interconnection structures 101 of the four substrate components 10a - 10d may be different from each other.

根据本发明的实施例,半导体封装件1还可以包括以倒装芯片方式安装在分隔式封装基板10的第一表面S1上的至少一个晶粒30。根据本发明的实施例,晶粒30可以与四个基板部件10a-10d中的至少两个重叠。例如,在图1A中,晶粒30a设置在基板部件10a和10b之间,并且晶粒30b设置在基板部件10c和10d之间。根据本发明的实施例,晶粒30可以是不包含有源集成电路元件的虚设晶粒(dummy die)。虚设晶粒用于桥接或互连两个相邻的基板部件。从而提高基板部件之间的信号传输效率。根据本发明的另一实施例,晶粒30可以包括诸如高带宽存储器(high bandwidth memory,HBM)晶粒之类的存储器晶粒。According to an embodiment of the present invention, the semiconductor package 1 may further include at least one die 30 mounted in a flip-chip manner on the first surface S1 of the divided package substrate 10 . According to embodiments of the present invention, die 30 may overlap at least two of the four substrate components 10a-10d. For example, in FIG. 1A , die 30 a is disposed between substrate members 10 a and 10 b, and die 30 b is disposed between substrate members 10 c and 10 d. According to embodiments of the present invention, die 30 may be a dummy die that does not contain active integrated circuit components. Dummy dies are used to bridge or interconnect two adjacent substrate components. This improves signal transmission efficiency between substrate components. According to another embodiment of the present invention, die 30 may include a memory die such as a high bandwidth memory (HBM) die.

根据一些实施例,半导体封装1还可以包括集成电路晶粒40和电子装置50,例如安装在分隔式封装基板10的第一表面S1上的去耦电容器。集成电路晶粒40和电子装置50可以不与间隙G重叠。从而提高集成电路晶粒40和电子装置50安装后的稳定性,保证整体结构的稳固。According to some embodiments, the semiconductor package 1 may further include an integrated circuit die 40 and an electronic device 50 such as a decoupling capacitor mounted on the first surface S1 of the separated package substrate 10 . Integrated circuit die 40 and electronic devices 50 may not overlap gap G. This improves the stability of the integrated circuit die 40 and the electronic device 50 after installation, ensuring the stability of the overall structure.

请参阅图2A及图2B。图2A是示出根据本发明另一实施例的示例性半导体封装的示意图,其中相似的区域、层或元件由相似的数字或标记来指定。图2B是沿图2A中的II-II’线截取的剖视图。如图2A和图2B所示,同样地,半导体封装2包括分隔式封装基板10和安装在分隔式封装基板10的第一表面S1上的至少一个集成电路晶粒20。分隔式封装基板10的第一表面S1为平坦表面。根据一个实施例,例如,至少一个集成电路晶粒20可以以倒装芯片方式安装在分隔式封装基板10的第一表面S1上。根据一个实施例,至少一个集成电路晶粒20通过诸如微凸块、铜凸块或铜柱的多个导电元件201电连接到分隔式封装基板10,但不限于此。底部填充物210可以被填充到至少一个集成电路晶粒20和分隔式封装基板10的第一表面S1之间的空间中。根据一个实施例,分隔式封装基板10可以具有例如在60毫米x 60毫米和70毫米x 70毫米。Please refer to Figure 2A and Figure 2B. 2A is a schematic diagram illustrating an exemplary semiconductor package according to another embodiment of the present invention, in which similar regions, layers or elements are designated by similar numbers or labels. Fig. 2B is a cross-sectional view taken along line II-II' in Fig. 2A. As shown in FIGS. 2A and 2B , similarly, the semiconductor package 2 includes a separated packaging substrate 10 and at least one integrated circuit die 20 mounted on the first surface S1 of the separated packaging substrate 10 . The first surface S1 of the separated packaging substrate 10 is a flat surface. According to one embodiment, for example, at least one integrated circuit die 20 may be flip-chip mounted on the first surface S1 of the separated packaging substrate 10 . According to one embodiment, at least one integrated circuit die 20 is electrically connected to the separated packaging substrate 10 through a plurality of conductive elements 201 such as micro-bumps, copper bumps or copper pillars, but is not limited thereto. The underfill 210 may be filled into the space between the at least one integrated circuit die 20 and the first surface S1 of the separated package substrate 10 . According to one embodiment, the divided packaging substrate 10 may have dimensions of, for example, 60 mm x 60 mm and 70 mm x 70 mm.

根据本发明的实施例,分隔式封装基板10由以并排方式布置的至少两个基板部件组成。例如,图2A中对共面的四个基板部件10a~10d进行说明。应当理解,基板10a-10d的数量和形状仅用于说明目的。According to an embodiment of the present invention, the divided packaging substrate 10 consists of at least two substrate components arranged side by side. For example, FIG. 2A illustrates four coplanar substrate members 10a to 10d. It should be understood that the number and shape of substrates 10a-10d are for illustrative purposes only.

根据本发明的实施例,四个基板部件10a-10d在物理上彼此分离。根据一个实施例,四个基板部件10a-10d中的每一个可以具有例如在30mm×30mm和40mm×40mm之间的尺寸。根据本发明的实施例,四个基板部件10a-10d被重新布置并邻接在一起,其间具有间隙G。根据本发明的实施例,例如,可以通过使用填充到间隙G中的粘合剂或模塑料将四个基板部件10a-10d并排邻接或胶合在一起。例如,本发明实施例中,间隙G的宽度可以在1-3mm之间。According to an embodiment of the present invention, the four substrate components 10a-10d are physically separated from each other. According to one embodiment, each of the four base plate components 10a-10d may have dimensions, for example, between 30 mm x 30 mm and 40 mm x 40 mm. According to an embodiment of the invention, the four substrate components 10a-10d are rearranged and abutted together with a gap G therebetween. According to an embodiment of the present invention, the four substrate members 10a - 10d may be adjacent or glued together side by side by using an adhesive or molding compound filled into the gap G, for example. For example, in the embodiment of the present invention, the width of the gap G may be between 1-3 mm.

根据本发明的实施例,四个基板部件10a-10d可以是同质(或均质)基底。例如,四个基板部件10a-10d可以由基本相同的基板材料(例如BT基板或ABF基板)组成。根据本发明的另一实施例,四个基板部件10a-10d可以是异质基底。例如,四个基板部件10a-10d可以由不同的基板材料构成,例如玻璃基板、陶瓷基板、BT基板、ABF基板等。根据本发明的实施例,四个基板部件10a-10d可以具有厚度基本相同。根据本发明的实施例,四个基板部件10a-10d可以具有不同的厚度。According to embodiments of the present invention, the four substrate components 10a-10d may be homogeneous (or homogeneous) substrates. For example, the four substrate components 10a-10d may be composed of substantially the same substrate material (eg, a BT substrate or an ABF substrate). According to another embodiment of the invention, the four substrate components 10a-10d may be heterogeneous substrates. For example, the four substrate components 10a-10d may be composed of different substrate materials, such as glass substrate, ceramic substrate, BT substrate, ABF substrate, etc. According to embodiments of the present invention, the four substrate members 10a-10d may have substantially the same thickness. According to embodiments of the present invention, the four substrate components 10a-10d may have different thicknesses.

根据本发明的实施例,四个基板部件10a_10d中的每一个可以包括互连结构101,用于将集成电路晶粒20电连接到安装在分隔式封装基板10的第二表面S2上的相应焊球SB。根据本发明的实施例,四个基板部件10a-10d的互连结构101可以彼此相同或相似。根据本发明的实施例,四个基板部件10a-10d的互连结构101可以彼此不同。According to embodiments of the present invention, each of the four substrate components 10a-10d may include an interconnect structure 101 for electrically connecting the integrated circuit die 20 to a corresponding solder mount mounted on the second surface S2 of the compartmentalized package substrate 10. Ball SB. According to embodiments of the present invention, the interconnection structures 101 of the four substrate components 10a - 10d may be the same or similar to each other. According to embodiments of the present invention, the interconnection structures 101 of the four substrate components 10a - 10d may be different from each other.

根据本发明的实施例,半导体封装件2还可以包括以倒装芯片方式安装在分隔式封装基板10的第一表面S1上的至少一个晶粒30。根据本发明的实施例,晶粒30可以与四个基板部件10a-10d中的至少两个重叠。例如,在图1A中,晶粒30a设置在基板部件10a和10b之间,并且晶粒30b设置在基板部件10c和10d之间。根据本发明的实施例,晶粒30可以是不包含有源集成电路元件的虚设晶粒。虚设晶粒用于桥接或互连两个相邻的基板部件。根据本发明的另一实施例,晶粒30可以包括存储器晶粒例如高带宽存储器(HBM)芯片。在一个实施例中,晶粒30a跨越至少两个基板部件(例如基板部件10a和10b),晶粒30a横跨基板部件10a和10b之间的间隙G。这样不仅可以使用晶粒30a用作功能晶粒或桥接晶粒,还可以使用晶粒30a作为基板部件10c和10d之间的机械连接部件,增加基板部件之间的连接可靠性和稳定性。在一个实施例中,晶粒30b跨越至少两个基板部件(例如基板部件10c和10d),晶粒30a横跨基板部件10c和10d之间的间隙G。这样不仅可以使用晶粒30a用作功能晶粒或桥接晶粒,还可以使用晶粒30a作为基板部件10c和10d之间的机械连接部件,增加基板部件之间的连接可靠性和稳定性。在一个实施例中,还可以设置其他的晶粒,例如横跨基板部件10a和10d之间的间隙G的晶粒、横跨基板部件10b和10c之间的间隙G的晶粒,等等。由此使用晶粒30将进一步的提高分隔式封装基板的稳固性和机械强度。According to an embodiment of the present invention, the semiconductor package 2 may further include at least one die 30 mounted in a flip-chip manner on the first surface S1 of the separated package substrate 10 . According to embodiments of the present invention, die 30 may overlap at least two of the four substrate components 10a-10d. For example, in FIG. 1A , die 30 a is disposed between substrate members 10 a and 10 b, and die 30 b is disposed between substrate members 10 c and 10 d. According to embodiments of the present invention, die 30 may be a dummy die that does not contain active integrated circuit elements. Dummy dies are used to bridge or interconnect two adjacent substrate components. According to another embodiment of the invention, die 30 may include a memory die such as a high bandwidth memory (HBM) chip. In one embodiment, die 30a spans at least two substrate components (eg, substrate components 10a and 10b), with die 30a spanning the gap G between substrate components 10a and 10b. In this way, not only can the die 30a be used as a functional die or a bridge die, but the die 30a can also be used as a mechanical connection component between the substrate components 10c and 10d, thereby increasing the connection reliability and stability between the substrate components. In one embodiment, die 30b spans at least two substrate components (eg, substrate components 10c and 10d) and die 30a spans the gap G between substrate components 10c and 10d. In this way, not only can the die 30a be used as a functional die or a bridge die, but the die 30a can also be used as a mechanical connection component between the substrate components 10c and 10d, thereby increasing the connection reliability and stability between the substrate components. In one embodiment, other dies may also be provided, such as dies across the gap G between the substrate components 10a and 10d, dies across the gap G between the substrate components 10b and 10c, and so on. Therefore, using the die 30 will further improve the stability and mechanical strength of the separated packaging substrate.

根据本发明的实施例,半导体封装件2还可以包括安装在分隔式封装基板10的第一表面Sl上的环形的框架60。根据本发明的实施例,框架60可以是金属框架,但不限于此,例如,框架60可以是树脂等非金属材料。根据本发明的实施例,框架60可以通过使用接合凸块601附着到分隔式封装基板10的第一表面S1。根据一些实施例,框架60可以通过使用粘合剂附着到分隔式封装基板10的第一表面S1。框架60可包括用于容纳集成电路晶粒20、晶粒30a和晶粒30b的开口60a。集成电路晶粒20、晶粒30a和晶粒30b可以被框架60包围。框架60可以通过使用接合凸块601与分隔式封装基板10连接,其中接合凸块601可以设置在每个基板部件上,每个基板部件上可以分别设置一个或多个接合凸块601。这种方式不仅方便制造和接合,而且框架60安装后还可以进一步提高基板部件之间的邻接稳定性和封装结构的整体机械强度,大大提高封装结构的整体稳固性。接合凸块601的设置还进一步提高了设计的灵活性,例如可以在分隔式封装基板10设置其他晶粒或电子装置(例如电容器、电阻器等)来通过接合凸块601进行电性和机械连接。接合凸块601易于制造,并且连接的便利性和连接的稳定性更佳,配合本发明实施例上述集成电路晶粒20与至少两个基板部件重叠的方式,可以极大的提高基板部件之间邻接的稳定和封装结构的机械强度,并且进一步改善翘曲。According to an embodiment of the present invention, the semiconductor package 2 may further include an annular frame 60 mounted on the first surface S1 of the divided package substrate 10 . According to the embodiment of the present invention, the frame 60 may be a metal frame, but is not limited thereto. For example, the frame 60 may be made of non-metallic materials such as resin. According to an embodiment of the present invention, the frame 60 may be attached to the first surface S1 of the separated package substrate 10 by using bonding bumps 601 . According to some embodiments, the frame 60 may be attached to the first surface S1 of the separated packaging substrate 10 using an adhesive. Frame 60 may include opening 60a for receiving integrated circuit die 20, die 30a, and die 30b. Integrated circuit die 20 , die 30 a and die 30 b may be surrounded by frame 60 . The frame 60 may be connected to the divided package substrate 10 by using bonding bumps 601 , wherein the bonding bumps 601 may be provided on each substrate part, and one or more bonding bumps 601 may be respectively provided on each substrate part. This method not only facilitates manufacturing and joining, but also can further improve the adjacency stability between substrate components and the overall mechanical strength of the packaging structure after the frame 60 is installed, greatly improving the overall stability of the packaging structure. The arrangement of the bonding bumps 601 further improves the design flexibility. For example, other dies or electronic devices (such as capacitors, resistors, etc.) can be provided on the separated packaging substrate 10 to perform electrical and mechanical connections through the bonding bumps 601 . The bonding bump 601 is easy to manufacture, and the connection convenience and connection stability are better. With the above-mentioned method of overlapping the integrated circuit die 20 and at least two substrate components in the embodiment of the present invention, the connection between the substrate components can be greatly improved. The adjacency stabilizes and mechanically strengthens the package structure and further improves warpage.

请参阅图3A及图3B。图3A是示出根据本发明又一实施例的示例性半导体封装的示意图,其中相似的区域、层或元件由相似的数字或标记来指定。图3B是沿图3A中的线III-III’截取的剖视图。如图3A和图3B所示,同样地,半导体封装3包括分隔式封装基板10和安装在分隔式封装基板10的第一表面S1上的至少一个集成电路晶粒20。分隔式封装基板10的S1是平坦表面。根据一个实施例,例如,至少一个集成电路晶粒20可以以倒装芯片方式安装在分隔式封装基板10的第一表面S1上。根据一个实施例,至少一个集成电路晶粒20通过诸如微凸块、铜凸块或铜柱的多个导电元件201电连接到分隔式封装基板10,但不限于此。底部填充物210可以被填充到至少一个集成电路晶粒20和分隔式封装基板10的第一表面S1之间的空间中。根据一个实施例,分隔式封装基板10可以具有例如在60毫米x 60毫米和70毫米x 70毫米。Please refer to Figure 3A and Figure 3B. 3A is a schematic diagram illustrating an exemplary semiconductor package according to yet another embodiment of the present invention, in which similar regions, layers or elements are designated by similar numbers or labels. Fig. 3B is a cross-sectional view taken along line III-III' in Fig. 3A. As shown in FIGS. 3A and 3B , similarly, the semiconductor package 3 includes a separated packaging substrate 10 and at least one integrated circuit die 20 mounted on the first surface S1 of the separated packaging substrate 10 . S1 of the divided package substrate 10 is a flat surface. According to one embodiment, for example, at least one integrated circuit die 20 may be flip-chip mounted on the first surface S1 of the separated packaging substrate 10 . According to one embodiment, at least one integrated circuit die 20 is electrically connected to the separated packaging substrate 10 through a plurality of conductive elements 201 such as micro-bumps, copper bumps or copper pillars, but is not limited thereto. The underfill 210 may be filled into the space between the at least one integrated circuit die 20 and the first surface S1 of the separated package substrate 10 . According to one embodiment, the divided packaging substrate 10 may have dimensions of, for example, 60 mm x 60 mm and 70 mm x 70 mm.

根据本发明的实施例,分隔式封装基板10由以并排方式布置的至少两个基板部件组成。例如,图3A中对共面的四个基板部件10a~10d进行说明。应当理解,基板10a-10d的数量和形状仅用于说明目的。According to an embodiment of the present invention, the divided packaging substrate 10 consists of at least two substrate components arranged side by side. For example, FIG. 3A illustrates four coplanar substrate members 10a to 10d. It should be understood that the number and shape of substrates 10a-10d are for illustrative purposes only.

根据本发明的实施例,四个基板部件10a-10d在物理上彼此分离。根据一个实施例,四个基板部件10a-10d中的每一个可以具有例如在30mm×30mm和40mm×40mm之间的尺寸。根据本发明的实施例,四个基板部件10a-10d被重新布置并邻接在一起,其间具有间隙G。根据本发明的实施例,例如,可以通过使用填充到间隙G中的粘合剂或模塑料将四个基板部件10a-10d并排邻接或胶合在一起。例如,本发明中,间隙G的宽度可以在1-3mm之间。According to an embodiment of the present invention, the four substrate components 10a-10d are physically separated from each other. According to one embodiment, each of the four base plate components 10a-10d may have dimensions, for example, between 30 mm x 30 mm and 40 mm x 40 mm. According to an embodiment of the invention, the four substrate components 10a-10d are rearranged and abutted together with a gap G therebetween. According to an embodiment of the present invention, the four substrate members 10a - 10d may be adjacent or glued together side by side by using an adhesive or molding compound filled into the gap G, for example. For example, in the present invention, the width of the gap G may be between 1-3 mm.

根据本发明的实施例,四个基板部件10a-10d可以是均质基底。例如,四个基板部件10a-10d可以由基本相同的基板材料(例如BT基板或ABF基板)组成。根据本发明的另一实施例,四个基板部件10a-10d可以是异质基底。例如,四个基板部件10a-10d可以由不同的基板材料构成,例如玻璃基板、陶瓷基板、BT基板、ABF基板等。根据本发明的实施例,四个基板部件10a-10d可以具有基本相同的厚度。根据本发明的实施例,四个基板部件10a-10d可以具有不同的厚度。According to embodiments of the present invention, the four substrate components 10a-10d may be homogeneous substrates. For example, the four substrate components 10a-10d may be composed of substantially the same substrate material (eg, a BT substrate or an ABF substrate). According to another embodiment of the invention, the four substrate components 10a-10d may be heterogeneous substrates. For example, the four substrate components 10a-10d may be composed of different substrate materials, such as glass substrate, ceramic substrate, BT substrate, ABF substrate, etc. According to embodiments of the present invention, the four substrate members 10a-10d may have substantially the same thickness. According to embodiments of the present invention, the four substrate components 10a-10d may have different thicknesses.

根据本发明的实施例,四个基板部件10a-10d中的每一个可以包括互连结构101,用于将集成电路晶粒20电连接到安装在分隔式封装基板10的第二表面S2上的相应焊球SB。根据本发明的实施例,四个基板部件10a-10d的互连结构101可以彼此相同或相似。根据本发明的实施例,四个基板部件10a-10d的互连结构101可以彼此不同。According to an embodiment of the present invention, each of the four substrate components 10a - 10d may include an interconnect structure 101 for electrically connecting the integrated circuit die 20 to the second surface S2 mounted on the divided package substrate 10 Corresponding solder ball SB. According to embodiments of the present invention, the interconnection structures 101 of the four substrate components 10a - 10d may be the same or similar to each other. According to embodiments of the present invention, the interconnection structures 101 of the four substrate components 10a - 10d may be different from each other.

根据本发明的实施例,半导体封装3还可以包括以倒装芯片方式安装在分隔式封装基板10的第一表面S1上的至少一个晶粒30。根据本发明的实施例,晶粒30可以与四个基板部件10a-10d中的至少两个重叠。例如,在图1A中,晶粒30a设置在基板部件10a和10b之间,并且晶粒30b设置在基板部件10c和10d之间。根据本发明的实施例,晶粒30可以是不包含有源集成电路元件的虚设晶粒。虚设晶粒用于桥接或互连两个相邻的基板部件。根据本发明的另一实施例,晶粒30可以包括诸如高带宽存储器(HBM)晶粒之类的存储器晶粒。According to an embodiment of the present invention, the semiconductor package 3 may further include at least one die 30 mounted in a flip-chip manner on the first surface S1 of the divided package substrate 10 . According to embodiments of the present invention, die 30 may overlap at least two of the four substrate components 10a-10d. For example, in FIG. 1A , die 30 a is disposed between substrate members 10 a and 10 b, and die 30 b is disposed between substrate members 10 c and 10 d. According to embodiments of the present invention, die 30 may be a dummy die that does not contain active integrated circuit elements. Dummy dies are used to bridge or interconnect two adjacent substrate components. According to another embodiment of the present invention, die 30 may include a memory die such as a high bandwidth memory (HBM) die.

根据一些实施例,半导体封装3还可以包括集成电路晶粒40和电子装置50,例如安装在分隔式封装基板10的第一表面Sl上的去耦电容器。集成电路晶粒40和电子装置50可以不与间隙G重叠。从而使得集成电路晶粒40和电子装置50安装的稳定性更好,集成电路晶粒40和电子装置50等装置更加稳固。According to some embodiments, the semiconductor package 3 may also include an integrated circuit die 40 and an electronic device 50 such as a decoupling capacitor mounted on the first surface S1 of the separated package substrate 10 . Integrated circuit die 40 and electronic devices 50 may not overlap gap G. Therefore, the installation stability of the integrated circuit die 40 and the electronic device 50 is better, and the devices such as the integrated circuit die 40 and the electronic device 50 are more stable.

根据本发明的实施例,半导体封装3还可以包括安装在分隔式封装基板10的第一表面S1上的盖子(lid)70。根据本发明的实施例,集成电路晶粒20、晶粒30a晶粒30b、集成电路晶粒40和电子装置50可以由盖子70容纳并且可以由模制帽(mold cap)80封装。According to an embodiment of the present invention, the semiconductor package 3 may further include a lid 70 mounted on the first surface S1 of the divided package substrate 10 . In accordance with embodiments of the invention, integrated circuit die 20 , die 30 a , die 30 b , integrated circuit die 40 and electronic device 50 may be received by cover 70 and may be encapsulated by mold cap 80 .

请参阅图4,图4为本发明另一实施例的剖面示意图。如图4所示,重分布层(re-distribution layer,RDL)结构90可以设置在分隔式封装基板10的第一表面S1上。集成电路晶粒20安装在RDL结构90上。集成电路晶粒20通过RDL结构90和分隔式封装基板10电连接到安装在分隔式封装基板10的第二表面S2上的各个焊球SB。Please refer to FIG. 4 , which is a schematic cross-sectional view of another embodiment of the present invention. As shown in FIG. 4 , a re-distribution layer (RDL) structure 90 may be disposed on the first surface S1 of the separated packaging substrate 10 . Integrated circuit die 20 is mounted on RDL structure 90 . The integrated circuit die 20 is electrically connected to each solder ball SB mounted on the second surface S2 of the separated package substrate 10 through the RDL structure 90 and the separated package substrate 10 .

虽然本发明已通过示例的方式并根据优选实施例进行了描述,但应理解本发明不限于所公开的实施例。相反,它旨在涵盖各种修改和类似的布置(如本领域技术人员显而易见的那样)。因此,所附权利要求的范围应给予最宽泛的解释,以涵盖所有此类修改和类似布置。While the invention has been described by way of example and in accordance with preferred embodiments, it is to be understood that the invention is not limited to the disclosed embodiments. On the contrary, it is intended to cover various modifications and similar arrangements as will be apparent to those skilled in the art. Therefore, the scope of the appended claims is to be given the broadest interpretation to cover all such modifications and similar arrangements.

Claims (11)

1.一种半导体封装,其特征在于,包括:1. A semiconductor package, characterized in that it includes: 分隔式封装基板,由并排排列的多个基板部件组成;A divided packaging substrate consists of multiple substrate components arranged side by side; 至少一个集成电路晶粒,安装在所述分隔式封装基板的第一表面上;以及At least one integrated circuit die mounted on the first surface of the separated packaging substrate; and 焊球,安装在所述分隔式封装基板的与所述第一表面相对的第二表面上。Solder balls are mounted on a second surface of the separated packaging substrate opposite to the first surface. 2.根据权利要求1所述的半导体封装,其特征在于,所述至少一个集成电路晶粒通过导电元件电连接到所述分隔式封装基板。2. The semiconductor package of claim 1, wherein the at least one integrated circuit die is electrically connected to the separated package substrate through a conductive element. 3.根据权利要求1所述的半导体封装,其特征在于,所述多个基板部件彼此物理分离,所述多个基板部件被重新布置并且邻接在一起,且所述多个基板部件之间具有间隙,所述多个基板部件通过使用填充到所述间隙中的粘合剂而邻接在一起。3. The semiconductor package of claim 1, wherein the plurality of substrate components are physically separated from each other, the plurality of substrate components are rearranged and adjacent to each other, and there is a gap between the plurality of substrate components. Gaps, the plurality of substrate components are abutted together using an adhesive filled in the gaps. 4.根据权利要求3所述的半导体封装件,其特征在于,所述间隙的宽度范围为1-3mm。4. The semiconductor package according to claim 3, wherein the width of the gap ranges from 1 to 3 mm. 5.根据权利要求1所述的半导体封装,其特征在于,所述多个基板部件是同质基板或者异质基板,所述多个基板部件具有相同的厚度或者不同的厚度。5. The semiconductor package according to claim 1, wherein the plurality of substrate components are homogeneous substrates or heterogeneous substrates, and the plurality of substrate components have the same thickness or different thicknesses. 6.根据权利要求1所述的半导体封装,其特征在于,还包括:6. The semiconductor package of claim 1, further comprising: 至少一个晶粒,以倒装芯片方式安装在所述分隔式封装基板的第一表面上;At least one die is mounted on the first surface of the separated packaging substrate in a flip-chip manner; 其中,所述至少一个晶粒跨越至少两个基板部件。Wherein, the at least one die spans at least two substrate components. 7.根据权利要求6所述的半导体封装,其特征在于,所述至少一个晶粒是虚设晶粒或者存储器晶粒。7. The semiconductor package of claim 6, wherein the at least one die is a dummy die or a memory die. 8.根据权利要求3所述的半导体封装,其特征在于,还包括:8. The semiconductor package of claim 3, further comprising: 第二集成电路晶粒;以及the second integrated circuit die; and 电子装置,安装在所述分隔式封装基板的第一表面上。An electronic device is mounted on the first surface of the separated packaging substrate. 9.根据权利要求8所述的半导体封装,其特征在于,所述第二集成电路晶粒和所述电子装置不与所述间隙重叠。9. The semiconductor package of claim 8, wherein the second integrated circuit die and the electronic device do not overlap the gap. 10.根据权利要求1所述的半导体封装,其特征在于,还包括:10. The semiconductor package of claim 1, further comprising: 框架,安装在所述分隔式封装基板的第一表面上。A frame is mounted on the first surface of the separated packaging substrate. 11.根据权利要求10所述的半导体封装,其特征在于,所述框架通过使用接合凸块或者粘合剂附接至所述分隔式封装基板的第一表面。11. The semiconductor package of claim 10, wherein the frame is attached to the first surface of the separated package substrate using bonding bumps or adhesive.
CN202310896462.5A 2022-08-01 2023-07-20 Semiconductor packaging Pending CN117497506A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US63/369,980 2022-08-01
US18/215,830 2023-06-29
US18/215,830 US20240038647A1 (en) 2022-08-01 2023-06-29 Semiconductor package using substrate block integration

Publications (1)

Publication Number Publication Date
CN117497506A true CN117497506A (en) 2024-02-02

Family

ID=89677073

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202310896462.5A Pending CN117497506A (en) 2022-08-01 2023-07-20 Semiconductor packaging

Country Status (1)

Country Link
CN (1) CN117497506A (en)

Similar Documents

Publication Publication Date Title
US20200303341A1 (en) Package integration for memory devices
US8531021B2 (en) Package stack device and fabrication method thereof
US8592952B2 (en) Semiconductor chip and semiconductor package with stack chip structure
US7091592B2 (en) Stacked package for electronic elements and packaging method thereof
US7948089B2 (en) Chip stack package and method of fabricating the same
US20130234320A1 (en) Chip stack structure and method for fabricating the same
US9847284B2 (en) Stacked wafer DDR package
US9034696B2 (en) Microelectronic assemblies having reinforcing collars on connectors extending through encapsulation
US9023691B2 (en) Microelectronic assemblies with stack terminals coupled by connectors extending through encapsulation
US9117698B2 (en) Fabrication method of semiconductor package
WO2020125155A1 (en) Fan-out encapsulation structure and encapsulation method for chip
US20130256915A1 (en) Packaging substrate, semiconductor package and fabrication method thereof
US20180068870A1 (en) Electronic package and method for fabricating the same
CN112397474A (en) Electronic package, combined substrate thereof and manufacturing method
CN115148611B (en) 2.5D packaging structure and preparation method
CN115332224A (en) 3D packaging structure and manufacturing method thereof
US20080179726A1 (en) Multi-chip semiconductor package and method for fabricating the same
TW202220125A (en) Semiconductor package and method of manufacturing the same
TWI723414B (en) Electronic package and manufacturing method thereof
CN115312490A (en) Electronic module, manufacturing method thereof and electronic packaging piece
CN117497506A (en) Semiconductor packaging
CN111799242A (en) Package stack structure, method for fabricating the same and carrier assembly
CN100369243C (en) Semiconductor package with heat dissipation structure
TW202347645A (en) Package substrate
CN117497507A (en) Semiconductor packaging

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination