CN117490557A

CN117490557A - Measuring force adjusting device

Info

Publication number: CN117490557A
Application number: CN202311706174.5A
Authority: CN
Inventors: 郭积健; 杨政; 林树锂; 徐凤龙; 张鹏
Original assignee: Chotest Technology Inc
Current assignee: Chotest Technology Inc
Priority date: 2023-10-09
Filing date: 2023-10-09
Publication date: 2024-02-02
Also published as: CN117073518A; CN117073518B; CN117516362A

Abstract

The present disclosure describes a measuring force adjusting device that controls a measuring force acting on a measured object generated by a stylus contacting the measured object, comprising a measuring rod, a supporting mechanism, a magnet, a magnetic conductor, at least one coil wound on the magnetic conductor, and a control module; the measuring needle and the magnet are fixedly arranged on the measuring rod, the measuring rod is rotatably arranged on the supporting mechanism and drives the magnet to move along a preset movement path when the measuring rod rotates, the magnetic conductor is fixedly arranged relative to the supporting mechanism and is configured to enable a magnetic field generated by the magnet to form a magnetic loop inside the magnetic conductor, a coil wound on the magnetic conductor forms a preset area covering the preset movement path of the magnet, and the control module is configured to control the measuring force; the magnetic conductor comprises a first part, a third part and a second part which are sequentially connected, and the magnet is positioned in a space formed by the first part, the second part and the third part. According to the measuring force adjusting device disclosed by the invention, more constant measuring force can be obtained.

Description

Measuring force adjusting device

The present application is a divisional application of patent application with application number 2023112999720 and constant force measuring device, whose application date is 2023, 10 and 9.

Technical Field

The present disclosure relates generally to the industry of intelligent manufacturing equipment, and more particularly to a measuring force adjusting device.

Background

A profile measuring instrument, which may also be referred to as a profilometer, is an instrument that measures the actual topography and the integrated properties of the surface profile of a measured object by means of a measuring needle. In practical applications, the stylus is generally made of diamond or other high-hardness materials, and in the measurement process, the stylus moves transversely on the surface of the measured object and generates vertical fluctuation motion along with fluctuation of the surface profile geometry of the measured object, and the sensor of the profiler can detect displacement of the stylus in the vertical direction and output an electrical signal matched with the profile of the measured object so as to obtain the surface profile parameters of the measured object.

In the measuring process of the profiler, the measuring force is an important factor affecting whether the contact between the measuring needle and the measured object is good. In order for the profiler to be able to measure deeper pits or grooves and to keep the stylus moving at a faster speed during actual measurement, the stylus should have a larger measuring force. However, if the measuring force is too large, the measuring needle may scratch the surface of the measured object, and at this time, the measuring needle with a large measuring force may not be suitable for the measured object with a soft material. If the measuring force is too small, the stylus may jump when it contacts the surface of the object to be measured (i.e., the stylus is separated from the surface of the object to be measured), thereby affecting the accuracy and precision of the measurement. As can be seen from this, it is necessary to use different measurement forces for the objects to be measured of different materials, and if the measurement force can be kept as constant as possible during the measurement, the jitter or distortion caused by the change in the measurement force can be reduced.

Therefore, there is a need to develop a constant force measurement device for a profiler.

Disclosure of Invention

The present disclosure has been made in view of the above-described conventional circumstances, and an object thereof is to provide a constant measuring force device capable of controlling a probe to contact a test object with a relatively constant measuring force based on a material of the test object, thereby reducing the occurrence of a scratch of the test object by the probe during a measurement process, and reducing the occurrence of a jump of the probe while keeping the probe in good contact with the test object.

To this end, the present disclosure provides a constant measuring force device that controls a measuring force acting on a measured object generated by a stylus contacting the measured object, including a stylus, a support mechanism, a magnet, a magnetic conductor, at least one coil wound on the magnetic conductor, and a control module; the measuring needle and the magnet are fixedly arranged on the measuring rod, the measuring rod is rotatably arranged on the supporting mechanism and drives the magnet to move along a preset movement path when the measuring rod rotates, meanwhile, the measuring needle is driven to contact a measured object, the magnetic conductor is fixedly arranged and configured to enable a magnetic field generated by the magnet to form a magnetic loop inside the magnetic conductor, the coil wound on the magnetic conductor forms a preset area covering the preset movement path of the magnet, and the control module is configured to control acting force generated by the coil and acting on the magnet according to the material of the measured object, so as to control the measuring force of the measuring needle on the measuring rod acting on the measured object.

In the method, a measuring needle and a magnet are fixedly arranged on a measuring rod, in the measuring process, the measuring rod can rotate on a supporting mechanism, so that the magnet can be driven to move along a preset moving path, meanwhile, the measuring needle is driven to contact a measured object, in the swinging process of the magnet along with the measuring rod, a magnetic field generated by the magnet can pass through a conductor of a coil and enter the magnetic conductor to form a closed magnetic loop, the magnetic conductor can guide a magnetic field, the situation that the magnetic field passes through the coil for a plurality of times is reduced, after the coil is electrified through a control module, the coil can generate controllable ampere force in the magnetic field of the magnet, the ampere force is related to a current value of the electrified coil, meanwhile, the magnet can be subjected to a reaction force (which can be called a first magnetic force), and the first magnetic force can be transmitted to the measuring needle through the measuring rod, so that the ampere force can be controlled by the control module to adjust the electrified current of the coil, the first magnetic force can be controlled more precisely, and the measuring force can be further controlled; in addition, since the coil wound on the magnetic conductor forms a preset area covering a preset movement path of the magnet, in other words, the magnetic field generated by the magnet can almost entirely pass through the conductor of the coil during the swing of the magnet along with the measuring rod, the magnetic field intensity of the conductor passing through the coil is almost unchanged during the swing of the magnet along with the measuring rod, thereby being beneficial to generating more constant ampere force and further being beneficial to obtaining more constant measuring force. Therefore, in the measuring process, the control module can output required constant current to the coil based on the material of the measured object so as to obtain more required constant measuring force, so that the more constant measuring force can be obtained in the measuring process, and the scratch condition of the measured object by the measuring needle and the jump condition of the measuring needle can be reduced.

Further, according to the constant force measuring device according to the present disclosure, optionally, the magnetic conductor includes a first portion, a third portion, and a second portion connected in this order, the magnet is located in a space formed by the first portion, the second portion, and the third portion, the first portion has a first inner surface adjacent to the magnet, and the second portion has a second inner surface adjacent to the magnet. In this case, the first part, the third part and the second part can be connected end to end in sequence, in series with each other, so that a magnetic circuit for guiding and concentrating the magnetic field can be formed; the magnetic field generated by the magnet can form a magnetic loop through the first part, the third part and the second part, specifically, taking the example that the first magnetic pole of the magnet is a north pole and the second magnetic pole is a south pole, the magnetic field lines can be sent out from the first magnetic pole to enter the interior of the magnetic conductor and sequentially return to the second magnetic pole along the first part, the third part and the second part, so that when the measuring rod is positioned at any position in the swinging process of the measuring rod, the magnetic field generated by the magnet can form a closed magnetic loop in the magnetic conductor as much as possible, and the magnetic field lines can return to the second magnetic pole along the designated magnetic loop as much as possible. In addition, the magnet can swing along a preset motion path in the first rotation surface in the space formed by the first part, the second part and the third part, so that the magnet can have a more abundant motion space, the larger swing amplitude of the measuring needle can be facilitated, the larger measuring range of the measuring needle can be facilitated, and the larger measuring range of the profiler can be facilitated.

In addition, according to the constant force measuring device related to the present disclosure, optionally, the coil includes a first coil wound around the first portion, the first coil forming a first conductor plane on the first inner surface, and a plane on which the preset movement path is located is parallel to the first conductor plane. In this case, the number of conductors on the first conductor surface covered by the magnetic field generated by the magnet is substantially constant during the measuring process when the measuring staff is in the swinging process, whereby the conductors on the first conductor surface can obtain a more constant ampere force and the constant measuring force device can obtain a more constant measuring force when the measuring staff is in different swinging positions.

In addition, according to the constant force measuring device related to the present disclosure, optionally, the coil further includes a second coil disposed at the second portion, the second coil forming a second conductor plane at the second inner surface, the preset motion path being parallel to the second conductor plane. In this case, the magnet can receive the first magnetic force by the combined action of the first coil and the second coil, whereby a larger first magnetic force can be obtained, so that the response speed of the spindle in response to the first magnetic force can be increased, and further, the stylus can be made to obtain a constant measuring force as soon as possible, so that the measuring speed of the profiler can be increased. In addition, the preset motion path is parallel to the second conductor surface, and in the measuring process, when the measuring rod swings, the number of conductors on the second conductor surface covered by the magnetic field generated by the magnet is approximately unchanged, so that more constant ampere force can be obtained, and further more constant measuring force can be obtained.

In addition, according to the constant force measuring device related to the disclosure, optionally, the magnetic conductor further includes a fourth portion connecting the first portion and the second portion, and the first portion, the third portion, the second portion, and the fourth portion are sequentially connected end to end. In this case, the first portion, the third portion, the second portion and the fourth portion can be sequentially connected end to end and sequentially connected in series, so that a closed magnetic conductor can be formed, and therefore the magnetic field lines can form a closed magnetic loop on the magnetic conductor, leakage of the magnetic field lines can be reduced, and risks caused by magnetic fields generated by the magnet and magnetic fields generated by the coils after the coils are electrified to magnetize other peripheral components are reduced.

In addition, according to the constant force measuring device according to the present disclosure, optionally, a magnetic axis where a magnetic pole of the magnet is located is perpendicular to the first conductor surface and/or the second conductor surface. In this case, the wire in the first conductor surface is taken as an example, since the magnetic axis is perpendicular to the first conductor surface, the magnetic field strength of the magnet received by the first conductor surface can be kept almost uniform during the swing of the magnet along with the spindle, so that the magnetic field strength of the conductor passing through the first coil is almost unchanged during the swing of the magnet along with the spindle, thereby being advantageous for generating a relatively constant ampere force and further being advantageous for obtaining a relatively constant measuring force. Similarly, since the magnetic axis is perpendicular to the first conductor surface and the second conductor surface, the magnetic field strengths of the magnets received by the first conductor surface and the second conductor surface can be kept almost uniform during the swinging of the magnets along with the measuring staff, so that the magnetic field strengths of the conductors passing through the first coil and the second coil are almost unchanged during the swinging of the magnets along with the measuring staff, thereby being beneficial to generating more constant ampere force and further being beneficial to obtaining more constant measuring force.

In addition, according to the constant force measuring device related to the present disclosure, optionally, when the control module inputs a preset current to the first coil and the second coil, a direction of the current flowing through the first conductor surface is the same as a direction of the current flowing through the second conductor surface. In this case, the ampere force applied to the conductor on the first conductor surface and the ampere force applied to the conductor on the second conductor surface can be the same, so that the direction of the first magnetic force applied to the magnet, which is generated by the magnetic field applied to the first conductor surface and the second conductor surface, is also the same, the first magnetic forces can be prevented from being offset, and the measuring force can be controlled advantageously, so that a relatively constant measuring force can be obtained.

In addition, according to the constant force measuring device related to the present disclosure, optionally, a distance from a geometric center of the magnet to the first conductor surface is the same as a distance from the second conductor surface. In this case, when the first coil and the second coil are energized, the first portion and the second portion of the magnetic conductor are magnetized and form a magnetic force to the magnet in a direction parallel to the magnetic axis of the magnet, the magnet being located at the middle of the first conductor surface and the second conductor surface, the magnetic force to the magnet in a direction parallel to the magnetic axis of the magnet can be kept balanced.

In addition, according to the constant force measuring device related to the present disclosure, optionally, the first inner surface and the second inner surface are fan-shaped ring-shaped matching the preset movement path. In this case, since the preset movement path in which the spindle drives the magnet to swing is a sector arc shape centering on the rotation center, the volume of the magnetic conductor can be reduced by setting the first inner surface and the second inner surface to be sector rings matching the preset movement path, and thus, the material of the magnetic conductor and the volume of the magnetic force control device can be saved, and further, the volume of the profiler can be reduced, thereby enabling the portability of the profiler to be increased.

In addition, according to the constant force measuring device related to the present disclosure, optionally, the stylus, the magnet and the magnetic conductor are located at one side or both sides of the supporting mechanism. In this case, when the stylus, the magnet and the magnetic conductor are located at one side of the supporting mechanism, there can be more free space at the other side of the supporting mechanism for placing other related devices of the profiler, thereby being beneficial to reducing the volume of the constant measuring force device, namely being beneficial to reducing the volume of the profiler and improving the portability of the profiler; when the measuring needle, the magnet and the magnetic conductor are positioned on two sides of the supporting mechanism, a lever mechanism formed by the measuring rod can be facilitated, and the sensitivity for controlling the measuring force is improved. In other words, by applying a smaller first magnetic force to the magnet, a larger measuring force can be obtained by the lever mechanism of the measuring staff.

According to the present disclosure, a constant measuring force device can be provided, which can control a probe to contact a measured object with a relatively constant measuring force based on the material of the measured object, thereby, in the measuring process, on the one hand, the occurrence of scratch of the measured object by the probe can be reduced, and on the other hand, the occurrence of runout can be reduced by keeping the probe in good contact with the measured object.

Drawings

The present disclosure will now be explained in further detail by way of example only with reference to the accompanying drawings.

Fig. 1 is a schematic diagram illustrating measured forces involved in examples of the present disclosure.

Fig. 2A is a schematic diagram illustrating a profiler to which examples of the present disclosure relate.

Fig. 2B is a block diagram illustrating a configuration of a profiler according to an example of the present disclosure.

Fig. 3A is a schematic diagram illustrating a measurement assembly according to an example of the present disclosure mated with a first slider.

Fig. 3B is a schematic diagram illustrating the static state of a constant force measurement device according to an example of the present disclosure.

Fig. 3C is a schematic diagram illustrating the constant force device dynamics involved in examples of the present disclosure.

Fig. 4 is a schematic diagram showing a support mechanism according to an example of the present disclosure.

Fig. 5A is a schematic diagram showing a first embodiment of a magnetic force control device according to an example of the present disclosure.

Fig. 5B shows a perspective view of a first embodiment of a magnetic force control device according to an example of the present disclosure.

Fig. 5C is a schematic diagram showing a magnetic circuit in which a magnetic conductor is employed by the magnetic force control device according to the example of the present disclosure.

Fig. 5D is a diagram showing force analysis of a magnet in the first embodiment according to the example of the present disclosure.

Fig. 5E is a schematic diagram illustrating magnetic field lines of a magnetic force control device according to an example of the present disclosure that do not employ magnetic conductors.

Fig. 5F is a schematic diagram illustrating magnetic field lines for which the magnetic conductor according to the examples of the present disclosure does not include a second portion.

Fig. 5G is a schematic diagram showing that the coil in the first embodiment related to the example of the present disclosure is not tightly wound on the magnetic conductor.

Fig. 6 is a schematic diagram showing a second embodiment of the magnetic force control device according to the example of the present disclosure.

Fig. 7A is a schematic diagram showing a third embodiment of the magnetic force control device according to the example of the present disclosure.

Fig. 7B is a schematic diagram showing magnetic field lines in a third embodiment of a magnetic force control device according to an example of the present disclosure.

Fig. 8A is a schematic diagram showing a fourth embodiment of a magnetic force control device according to an example of the present disclosure.

Fig. 8B is a perspective view showing a fourth embodiment of the magnetic force control device according to the example of the present disclosure.

Fig. 9A is a perspective view showing a fifth embodiment of the magnetic force control device according to the example of the present disclosure.

Fig. 9B is a side view showing a fifth embodiment of the magnetic force control device according to the example of the present disclosure.

Fig. 10 is a schematic diagram showing a positional relationship of a magnetic force control device and a support mechanism according to an example of the present disclosure.

Fig. 11A is a schematic diagram showing the centroid of a magnet in accordance with examples of the present disclosure lying on the axis of a spindle.

Fig. 11B is a force analysis diagram illustrating that the center of mass of the magnet according to the examples of the present disclosure is not located on the axis of the spindle.

Fig. 12 is a flowchart illustrating a calibration method of the constant force device according to an example of the present disclosure.

Fig. 13 is a schematic view showing a swing angle of a stylus according to an example of the present disclosure.

Detailed Description

The following description of the technical solutions in the embodiments of the present disclosure will be made clearly and completely with reference to the accompanying drawings in the embodiments of the present disclosure, and it is apparent that the described embodiments are only some embodiments of the present disclosure, not all embodiments. All other embodiments, which are filled by those of ordinary skill in the art without undue burden based on the embodiments in this disclosure, are within the scope of the present disclosure.

It should be noted that the terms "first," "second," "third," and "fourth," etc. in the description and claims of the present disclosure and in the above figures are used for distinguishing between different objects and not for describing a particular sequential order. Furthermore, the terms "comprise" and "have," as well as any variations thereof, are intended to cover a non-exclusive inclusion. For example, a process, method, system, article, or apparatus that comprises a list of steps or elements is not limited to only those listed or inherent to such process, method, article, or apparatus but may optionally include other steps or elements not listed. In the following description, the same members are denoted by the same reference numerals, and overlapping description thereof is omitted. In addition, the drawings are schematic, and the ratio of the sizes of the components to each other, the shapes of the components, and the like may be different from actual ones.

In the present disclosure, unless explicitly specified and limited otherwise, the term "connected" is to be construed broadly, e.g., the term "connected" may be a fixed connection, a removable connection, or an integral body; can be directly connected or indirectly connected through an intermediate medium.

The constant measuring force device provided by the disclosure can be suitable for a contact profile measuring instrument (which can be simply called a profile measuring instrument), and can provide more constant measuring force for a measuring needle of the profile measuring instrument. The constant measuring force device provided by the present disclosure may also be referred to as a measuring force adjusting device, a measuring force control system, a constant force measuring device, etc. The constant force measuring device provided by the present disclosure may also be applicable to other kinds of measuring instruments. The present disclosure describes a constant force measurement device using a profiler as an example.

It should be noted that the constant measuring force device provided by the present disclosure may provide a more constant measuring force, which is a measuring force that can meet the measurement requirements and does not require that the measuring force must be kept absolutely constant during the measurement process.

In some examples, the profiler may be a measuring instrument for measuring the surface profile and shape of the object under test, which may also be referred to as a stylus profilometer, surface topography measuring device. In some examples, the object under test may be a high precision part such as a long axis, a cylinder, a curved part, a screw, a thread, etc.

For a better description of the profiler and constant force device to which the present disclosure relates, the present disclosure defines an X-axis, a Y-axis, and a Z-axis, and defines a three-dimensional coordinate system based on the X-axis, the Y-axis, and the Z-axis.

The X axis, the Y axis and the Z axis can be in a mutually perpendicular relation, the direction of the X axis can be parallel to the sliding direction of the measuring needle along the surface of the measured object, the direction of the Z axis can be a vertical direction, namely can be a direction vertical to the X axis and the Y axis, and the direction of the Y axis can be a direction vertical to the X axis and the Z axis. The movement or sliding in the X-axis direction means that the movement or sliding can be performed in both directions along the X-axis, and the movement or sliding in the Z-axis direction means that the movement or sliding can be performed in both directions along the Z-axis.

In the present disclosure, a first direction and a second direction are defined, wherein the first direction may be parallel to the X-axis direction and the second direction may be parallel to the Z-axis.

Hereinafter, preferred embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. In the following description, the same members are denoted by the same reference numerals, and overlapping description thereof is omitted. In addition, the drawings are schematic, and the ratio of the sizes of the components to each other, the shapes of the components, and the like may be different from actual ones.

Fig. 1 is a schematic diagram showing a measurement force F1 related to an example of the present disclosure.

In the present disclosure, during the measurement, the stylus 121 of the profiler 10 slides on the surface of the measured object 20, referring to fig. 1, pushing the measured object 20 by the stylus 121 generates a contact force F acting on the measured object 20, and the direction of the contact force F is changed according to the change of the surface topography of the measured object 20, and for convenience of analysis and research, a component of the contact force F in the vertical direction is generally defined as a measurement force F1. As described in the background art, the measurement force F1 is an important factor affecting whether the contact between the stylus 121 and the measured object 20 is good or not during the measurement.

Fig. 2A is a schematic diagram illustrating a profiler 10 according to an example of the present disclosure. Fig. 2B is a block diagram illustrating a configuration of the profiler 10 according to an example of the present disclosure.

In some examples, referring to fig. 2A, profiler 10 may include a rail assembly 11, and rail assembly 11 may guide movement of measurement assembly 12 of profiler 10. In some examples, rail assembly 11 may guide movement of measurement assembly 12 of profiler 10 along the X-axis direction.

In some examples, the rail assembly 11 may include a first rail 112 and a first slider 111 slidable along the first rail 112. Thereby, the first slider 111 and the first rail 112 can form a first moving pair such that the first slider 111 can slide along the first rail 112.

In some examples, the length direction of the first rail 112 may be disposed to extend in a first direction. In some examples, profiler 10 may include a stage 13, and object 20 to be measured may be fixed to stage 13 by a clamp 15.

In some examples, measurement assembly 12 may include a stylus 121 (see fig. 2A). In some examples, the measurement assembly 12 may be fixedly coupled to the first slider 111 via the coupling 16. Thus, the first slider 111 can drive the probe 121 to slide along the first guide rail 112 in the first direction, so as to drive the probe 121 to slide along the surface of the object 20.

In some examples, the connection 16 may be fixedly connected to the first slider 111 and the measurement assembly 12, respectively, by a bolted connection.

In some examples, profiler 10 may include a post 14, post 14 may be disposed vertically to stage 13 along the second direction, and a second rail 141 and a second slider 142 forming a second kinematic pair with second rail 141 may be disposed on post 14. In some examples, the second slider 142 may slide along the second rail 141 in the second direction.

In some examples, the first rail 112 may be fixedly coupled to the second slider 142. In this case, when the second slider 142 slides on the second rail 141, the first rail 112 can be driven to slide in the second direction, and the probe 121 can be driven to move in the second direction by the first slider 111, whereby the position of the probe 121 in the second direction can be changed according to the size of the object 20 to be measured.

In some examples, referring to fig. 2B, profiler 10 may include a drive mechanism 17. In some examples, the drive mechanism 17 may drive the first slider 111 to slide on the first rail 112 in the first direction. In some examples, the drive mechanism 17 may drive the second slider 142 to slide on the second rail 141 in the second direction.

In some examples, profiler 10 may include a displacement sensor 18 (see fig. 2B). In some examples, the displacement sensor 18 may measure the displacement and angle of the stylus 121 as it measures the surface profile of the object 20 under test. In some examples, the displacement sensor 18 may be a grating sensor. In this case, by using the grating sensor, an electric signal representing the displacement of the stylus 121 generated when measuring the surface profile of the object 20 to be measured can be obtained with higher accuracy and higher resolution.

In some examples, measurement assembly 12 may include a constant measurement force device 122 (see fig. 2A), and constant measurement force device 122 may control the measurement force generated by stylus 121 contacting object 20 under test that acts on object 20 under test. Specifically, when the stylus 121 slides along the surface of the object 20 to be measured in the first direction, the constant force measuring device 122 may cause the stylus 121 to apply a constant measuring force F1 to act on the object 20 to be measured. In this case, on the one hand, a suitable measurement force F1 can be selected according to the material of the object 20 to be measured, and the scratch of the object 20 by the stylus 121 can be reduced; on the other hand, in the measurement process, the relatively constant measurement force F1 can be advantageously maintained, so that the occurrence of jumping of the stylus 121 when the stylus 121 contacts the surface of the measured object 20 can be reduced, and thus, the stylus 121 can smoothly slide on the surface of the measured object 20 along the first direction to obtain more accurate profile information.

Fig. 3A is a schematic diagram illustrating the cooperation of the measurement assembly 12 with the first slider 111 in accordance with examples of the present disclosure. Fig. 3B is a schematic diagram illustrating the static state of the constant force device 122 in accordance with examples of the present disclosure. Fig. 3C is a schematic diagram illustrating the dynamics of the constant force device 122 in accordance with examples of the present disclosure. Fig. 4 is a schematic diagram illustrating a support mechanism 1222 according to an example of the present disclosure.

In some examples, referring to fig. 3A, constant force device 122 may include a stylus 1221 and stylus 121 may be fixedly disposed on stylus 1221.

In some examples, referring to fig. 3A and 3B, constant force device 122 may include a support mechanism 1222, and a spindle 1221 may be rotatably disposed on support mechanism 1222 and may drive stylus 121 into contact with object 20 when spindle 1221 is rotated. In this case, during the measurement, when the stylus 121 slides in the first direction on the surface of the object 20, the stylus 121 can swing in the second direction along with the undulation of the surface of the object 20 (see fig. 3C), and the displacement sensor 18 can obtain the surface profile parameter of the object 20 by measuring the displacement of the stylus 121 in the second direction.

In some examples, referring to fig. 3A, the constant force device 122 may include a magnetic force control device 1223. The magnetic force control device 1223 may be used to apply a first magnetic force F3 (described later) that is relatively constant to the stylus 1221, and may be transferred to the stylus 121 through the stylus 1221 so that the stylus 121 contacts the object 20 to be measured with a relatively constant measurement force F1.

In some examples, the magnetic force control device 1223 may include a magnet 12231, a magnetic conductor 12232, at least one coil 12233 (described later) wound on the magnetic conductor 12232. In this case, when a constant current is input to at least one coil 12233 wound around the magnetic conductor 12232, it is possible to facilitate the application of a relatively constant first magnetic force F3 to the magnet 12231, and thus the first magnetic force F3 can be transmitted to the stylus 121 through the stylus 1221, and by adjusting the input current to the coil 12233, it is possible to facilitate the stylus 121 to obtain a relatively constant measuring force F1 based on the material of the object 20 to be measured, so as to facilitate the contact with the object 20 to be measured.

In some examples, the magnetic control device 1223 may also include a control module 12234. In this case, the control module 12234 can output a variable current to the at least one coil 12233, and thus can facilitate obtaining a relatively constant measurement force F1 by the stylus 121 based on the material of the object 20 to be measured, so as to contact the object 20 to be measured.

In some examples, referring to fig. 3A, the magnetic control device 1223 may include a housing 12235. In some examples, the housing 12235 may be an electromagnetic shield. Under the condition, the electromagnetic shielding cover can play a role in electromagnetic protection, and interference of an external electromagnetic field to the inside of the electromagnetic shielding cover is reduced, so that a more accurate first magnetic force F3 can be obtained, and further a more accurate measuring force F1 can be obtained. Meanwhile, the electromagnetic shielding cover can also reduce the interference and magnetization of the magnetic field inside the electromagnetic shielding cover to external equipment.

In some examples, referring to fig. 3A, the housing 12235 may be fixedly connected to the connector 16. In some examples, the support mechanism 1222 may be fixedly connected to the housing 12235. In some examples, the magnetic conductor 12232 may be fixedly connected to the housing 12235.

In some examples, referring to fig. 3C, the magnet 12231 may be fixedly disposed on the spindle 1221, and the spindle 1221 may be rotatably disposed on the support 1222 and may move the magnet 12231 along the predetermined movement path J when the spindle 1221 rotates.

In some examples, the magnetic conductor 12232 may be fixedly disposed relative to the support mechanism 1222. In some examples, the magnetic conductor 12232 may be fixedly coupled to the housing 12235, while the support mechanism 1222 may be fixedly coupled to the housing 12235. In this case, the magnet 12232 can be fixed relative to the support 1222, so that the measuring rod 1221 can pivot the magnet 12231 relative to the magnet 12232.

In some examples, the magnetic conductor 12232 may also be referred to as a yoke, and the magnetic conductor 12232 may be a soft magnetic conductor. In this case, the magnetic conductor 12232 is made of a material having high conductivity or magnetic permeability to a magnetic field, which enables the magnetic conductor 12232 to have high magnetic permeability, that is, high magnetic permeability, whereby the magnetic conductor 12232 can efficiently concentrate and guide a magnetic field line 122313 (described later) under the effect of the magnetic field, can guide the magnetic field to a desired position, and the magnetic field can form a closed magnetic loop inside the magnetic conductor 12232.

In some examples, the magnetic conductor 12232 may be configured such that the magnetic field generated by the magnet 12231 forms a magnetic circuit (i.e., a magnetic loop) within the magnetic conductor 12232, and the coil 12233 may be wound around the magnetic conductor 12232. In this case, during the oscillation of the magnet 12231 with the spindle 1221, the magnetic field generated by the magnet 12231 can pass through the conductor of the coil 12233 and can enter the magnetic conductor 12232 to form a closed magnetic loop, and the magnetic conductor 12232 can guide the magnetic field, reducing the situation that the magnetic field passes through the coil 12233 a plurality of times, when the coil 12233 is energized, the coil 12233 can generate a controllable ampere force F2 in the magnetic field of the magnet 12231, and the ampere force F2 is correlated with the current value of the energization of the coil 12233, while the magnet 12231 can receive the reaction force (which may be referred to as the first magnetic force F3) of the ampere force F2, the first magnetic force F3 can be transmitted to the stylus 121 through the spindle 1221, whereby the ampere force F2 can be controlled more precisely, and thus the first magnetic force F3 can be controlled, and further the measuring force F1 can be controlled, whereby the constant force device 122 can obtain a more constant measuring force F1 by inputting a constant current value to the coil 12233 during the measuring process. The ampere force F2 and the first magnetic force F3 described above will be described in detail later.

In some examples, the coil 12233 wound on the magnetic conductor 12232 may form a preset region covering a preset movement path J (described later) of the magnet 12231. In this case, since the coil 12233 wound on the magnetic conductor 12232 forms a preset area covering the preset movement path J of the magnet 12231, in other words, the magnetic field generated by the magnet 12231 can pass almost entirely through the conductor of the coil 12233 during the swinging of the magnet 12231 with the spindle 1221, the magnetic field strength of the conductor passing through the coil 12233 is almost unchanged during the swinging of the magnet 12231 with the spindle 1221, so that it is possible to facilitate the generation of a relatively constant ampere force F2, and it is further possible to facilitate the acquisition of a relatively constant measuring force F1.

In some examples, referring to fig. 4, the support mechanism 1222 may include a support base 12221, a support bearing 12222, and a support shaft 12223, the support shaft 12223 may be sleeved in the support bearing 12222, the support bearing 12222 may be fixedly connected to the support base 12221, and an axis D1 of the support shaft 12223 may overlap an axis D2 of the support bearing 12222. In this case, the support bearing 12222 enables the support shaft 12223 to rotate only in the support bearing 12222, that is, the support bearing 12222 can rotate only about the axis D1 of the support shaft 12223, with the support base 12221 kept stationary.

In the present disclosure, the direction of the axis D1 of the support shaft 12223 and the axis D2 of the support bearing 12222 may be parallel to the Y-axis direction.

In some examples, referring to fig. 4, the staff 1221 may be fixedly connected to the support shaft 12223, and the axis G1 of the staff 1221 is orthogonal to the axis D1 of the support shaft 12223, a point where the axis G1 of the staff 1221 intersects the axis D1 of the support shaft 12223 may be the rotation center P, wherein the axis G1 of the staff 1221 may be a geometric center line of the staff 1221. In this case, with the support base 12221 kept stationary, the spindle 1221 can and only can oscillate about the rotation center P in the first rotation plane, in other words, the spindle 1221 can oscillate only in a two-dimensional plane (i.e., the first rotation plane) parallel to the plane formed by the X axis and the Z axis, whereby, during measurement, the stylus 121 can be restricted from oscillating only in the first rotation plane, that is, only in the two-dimensional plane, when the surface of the object 20 slides in the first direction, so that the movement of the stylus 121 in the Y axis direction can be reduced, and further, the stylus 121 can be smoothly moved in the first direction on the surface of the object 20 to obtain accurate profile information.

In this disclosure, the axis G1 of the stylus 1221 may refer to an axis passing through the geometric center and centroid of the stylus 1221.

In some examples, the control module 12234 may be configured to control the force generated by the coil 12233 on the object 20 to be measured to act on the magnet 12231, thereby controlling the measured force F1 of the stylus 121 on the spindle 1221 to act on the object 20 to be measured. In this case, the required measuring force F1 can be determined based on the material of the measured object 20, for example, if the material of the measured object 20 is soft, a smaller measuring force F1 is selected, and then the control module 12234 outputs a current corresponding to the measuring force F1 to the coil 12233, so that the first magnetic force F3 can be applied to the magnet 12231 and transmitted to the stylus 121 through the stylus 1221, and thus, during the measurement, a required constant current can be outputted to the coil 12233 by the control module 12234 based on the material of the measured object 20 to obtain a more required and constant measuring force F1, so that during the measurement, a more constant measuring force F1 can be advantageously obtained, and the occurrence of scratches of the measured object 20 by the stylus 121 and the occurrence of jumping of the stylus 121 can be reduced.

In some examples, the power source of the control module 12234 may be an adjustable direct current power source that may output a preset current value.

Fig. 5A is a schematic diagram illustrating a first embodiment of a magnetic force control device 1223 according to an example of the present disclosure, and fig. 5A is a view of section line A-A in fig. 3B. Fig. 5B shows a schematic perspective view of a first embodiment of a magnetic force control device 1223 according to an example of the present disclosure. Fig. 5C is a schematic diagram showing a magnetic circuit of the magnetic force control device 1223 according to the example of the present disclosure using the magnetic conductor 12232. Fig. 5D is a diagram showing a force analysis of the magnet 12231 in the first embodiment according to the example of the present disclosure. Fig. 5E is a schematic diagram illustrating magnetic field lines 122313 of the magnetic force control device 1223 according to an example of the present disclosure that do not employ magnetic conductors 12232. Fig. 5F is a schematic diagram illustrating magnetic field lines for which the magnetic conductor 12232 according to the examples of the present disclosure does not include the second portion 122322. Fig. 5G is a schematic diagram showing that the coil 12233 in the first embodiment related to the example of the present disclosure is not tightly wound on the magnetic conductor 12232.

In some examples, referring to fig. 5A, the magnet 12231 may include a first pole 122311 and a second pole 122312.

In some examples, the first pole 122311 can be a north pole and the second pole 122312 can be a south pole. In some examples, the second pole 122312 may be a north pole and the first pole 122311 may be a south pole.

In the present disclosure, the polarities of the first magnetic pole 122311 and the second magnetic pole 122312 are not limited, and for convenience of description, in the present disclosure, the first magnetic pole 122311 is a north pole, and the second magnetic pole 122312 is a south pole.

In some examples, referring to fig. 5A and 5B, the magnetic conductor 12232 may include a first portion 122321, a third portion 122323, and a second portion 122322 connected in sequence. In this case, the first portion 122321, the third portion 122323 and the second portion 122322 are connected end to end in sequence and connected in series with each other, thereby forming a magnetic circuit for guiding and concentrating a magnetic field.

In some examples, the magnet 12231 may be located within the space formed by the first portion 122321, the second portion 122322, and the third portion 122323. In this case, the magnet 12231 can swing along the preset movement path J in the first rotation plane within the space formed by the first portion 122321, the second portion 122322 and the third portion 122323, so that it can be advantageous to make the magnet 12231 have a relatively abundant movement space, thereby being advantageous to implement a relatively large swing amplitude of the stylus 121, and thus being advantageous to implement a relatively large measurement range of the profiler 10.

In some examples, referring to fig. 5A, the first portion 122321 can have a first inner surface M1 proximate the magnet 12231 and the second portion 122322 can have a second inner surface M2 proximate the magnet 12231. In this case, the magnetic field generated by the magnet 12231 can form a magnetic loop through the first portion 122321, the third portion 122323 and the second portion 122322, specifically, referring to fig. 5C, taking the first pole 122311 of the magnet 12231 as the north pole and the second pole 122312 as the south pole as an example, the magnetic field line 122313 can be sent from the first pole 122311 into the magnetic conductor 12232, and sequentially returns to the second pole 122312 along the first portion 122321, the third portion 122323 and the second portion 122322, so that in the swinging process of the measuring rod 1221, when the measuring rod 1221 is located at any position, a closed magnetic loop can be formed in the magnetic conductor 12232 as much as possible, so that the magnetic field line 122313 can return to the second pole 122312 along the designated magnetic loop as much as possible, thereby, when the magnet 12231 is located at different swinging positions, the magnetic field generated by the magnet 12231 can be reduced to pass through the coil 12233 multiple times, thereby obtaining the measuring force F1 more precisely, and further analyzing the magnetic field line 12232 by the magnetic field which can pass through the second portion 12232 more precisely than the magnetic conductor 12232 (the magnetic field line 12233 can pass through the magnetic field line 12233 in the specific portion 3731, which can be more precisely when the magnetic field 12231 is not passed through the first portion 6731, and the magnetic field 12233 is more accurately shown in the case), and the magnetic field line 1223 can pass through the magnetic field 12233 can be more accurately than the magnetic field line 12231 is more than the magnetic field 12231 can be analyzed by the magnetic field 12231 as shown in the magnetic field line 1223.

In some examples, the coil 12233 may include a first coil 122331 wound around the first portion 122321, and the first coil 122331 may form a first conductor plane T1 at the first inner surface M1 (see fig. 5B). In practice, the conductors of the coil 12233 are closely spaced and have no gaps, and fig. 5B is for illustration and does not represent a practical application.

In some examples, referring to fig. 5A, the direction of extension of the conductors of the first coil 122331 on the first inner surface M1 can be perpendicular to the direction of the measured force F1, i.e., can be parallel to the first direction. In this case, taking the conducting wire Q (see fig. 5C) in the first conductor plane T1 as an example, referring to fig. 5D, when the coil 12233 is energized, taking the direction of the current on the conductor Q on the first conductor plane T1 as an example, which is perpendicular to and far from the paper surface, the energized conductor Q can generate an ampere force F2 parallel to the second direction, that is, the direction of the ampere force F2 is the vertical direction, and further the ampere force F2 can generate a reaction force on the magnet 12231, that is, the first magnetic force F3, and the direction of the first magnetic force F3 is also the vertical direction, and during the swinging of the measuring bar 1221, the first magnetic force F3 can have a component perpendicular to the measuring bar 1221, and further the first magnetic force F3 can be transmitted to the measuring needle 121 through the measuring bar 1221, thereby facilitating the control of the current input to the coil 12233, so as to more precisely control the ampere force F2, and further more precisely control the first magnetic force F3, and thus more precisely control the force F1.

In some examples, referring to fig. 5A, the magnetic axis C1 of the magnet 12231 where the magnetic pole is may be perpendicular to the first inner surface M1, in other words, the magnetic axis C1 may be perpendicular to the first conductor plane T1. In this case, since the magnetic axis C1 is perpendicular to the first conductor plane T1, the magnetic field strength of the magnet 12231 received by the first conductor plane T1 can be kept almost uniform during the oscillation of the magnet 12231 with the spindle 1221, so that the magnetic field strength of the conductor passing through the first coil 122331 is almost constant during the oscillation of the magnet 12231 with the spindle 1221, whereby it can be advantageous to generate a relatively constant ampere force F2, and further it can be advantageous to obtain a relatively constant measuring force F1.

In the present disclosure, the magnetic axis C1 on which the magnetic pole of the magnet 12231 is located may be a geometric center line of the magnet 12231 in the Y direction.

In some examples, the plane in which the preset motion path J lies (i.e., the first rotation plane) may be parallel to the first conductor plane T1. In this case, the number of conductors on the first conductor plane T1 covered by the magnetic field generated by the magnet 12231 is substantially constant during the measurement when the stylus 1221 is in the oscillation, whereby the conductors on the first conductor plane T1 can obtain a more constant ampere force F2 and thus the constant measurement force device 122 can obtain a more constant measurement force F1 when the stylus 1221 is in different oscillation positions.

Fig. 5E shows a schematic distribution of magnetic field lines 122313 without the use of magnetic conductors 12232. Fig. 5F shows that magnetic field lines 122313 may be present when magnetic conductor 12232 includes only first portion 122321 and third portion 122323 connected in sequence, and does not include second portion 122322.

Referring to fig. 5E and 5F, in the case where the magnetic conductor 12232 is not used or the second portion 122322 is not included, there may be a case where the magnetic field line 122313 passes through the first conductor plane T1 twice, and the directions of the magnetic field line 122313 each time passes through the first conductor plane T1 are opposite, and thus there may be a case where the ampere force F2 received by the conductor on the first conductor plane T1 is offset from each other, so that the measured force F1 cannot be controlled more precisely.

In addition, in some examples, the coil 12233 is wound on the magnetic conductor 12232, and the first conductor plane T1 and the first inner surface M1 may be not greater than a preset gap value. In this case, the coil 12233 is required to be tightly wound on the magnetic conductor 12232, facilitating the entry of the magnetic field generated by the magnet 12231 into the magnetic conductor 12232, and the return of the magnetic field lines 122313b from the first pole 122311 to the second pole 122312 through the magnetic circuit inside the magnetic conductor 12232. Assuming that the gap between the coil 12233 and the magnetic conductor 12232 is too large, there may be a case where a part of the magnetic field line 122313a leaks from the gap between the coil 12233 and the magnetic conductor 12232, a magnetic circuit is formed along the air path, so that there may be a case where the magnetic field line 122313a passes through the first conductor plane T1 twice, and the directions in which the magnetic field line 122313a passes through the first conductor plane T1 a plurality of times may be opposite, whereby there may be a case where the ampere force F2 received by the conductors on the first conductor plane T1 is cancelled out by each other (see fig. 5G).

Fig. 6 is a schematic diagram showing a second embodiment of a magnetic force control device 1223 according to an example of the present disclosure.

In some examples, the coil 12233 may further include a second coil 122332 (see fig. 6) disposed at the second portion 122322, and the second coil 122332 may form a second conductor plane T2 at the second inner surface M2. In this case, the magnet 12231 can receive the first magnetic force F3 acting in combination with the first coil 122331 and the second coil 122332, whereby a large first magnetic force F3 can be obtained, the response speed of the spindle 1221 in response to the first magnetic force F3 can be increased, and the needle 121 can be made to obtain a constant measuring force F1 as soon as possible, and the measuring speed of the profiler 10 can be increased.

In some examples, the control module 12234 may direct the current through the first conductor plane T1 in the same direction as the current through the second conductor plane T2 when the control module 12234 inputs the preset current to the first coil 122331 and the second coil 122332. In this case, the direction of the ampere force F2 received by the conductor on the first conductor plane T1 and the direction of the ampere force F2 received by the conductor on the second conductor plane T2 can be made the same, and thus the direction of the first magnetic force F3 received by the magnet 12231 by the magnetic field action of the first conductor plane T1 and the second conductor plane T2 is also the same, so that the first magnetic force F3 can be prevented from being cancelled out, and the measurement force F1 can be advantageously controlled.

In some examples, the direction of current flowing through the first conductor plane T1 and the direction of current flowing through the second conductor plane T2 may be adjusted by the first terminal 122333 and the second terminal 122334. Specifically, the series connection or parallel connection between the first coil 122331 and the second coil 122332 may be implemented by the first connection terminal 122333 and the second connection terminal 122334 to achieve that the current flowing through the first conductor plane T1 is in the same direction as the current flowing through the second conductor plane T2.

In some examples, the preset motion path J may be parallel to the second conductor plane T2. In this case, the number of conductors on the second conductor plane T2 covered by the magnetic field generated by the magnet 12231 is substantially constant during the measurement when the spindle 1221 is swinging, whereby a more constant ampere force F2 and thus a more constant measurement force F1 can be obtained.

In some examples, the direction of extension of the conductors of the second coil 122332 on the second inner surface M2 can be perpendicular to the direction of the measuring force F1, i.e., can be parallel to the first direction. Thus, during the swinging of the stylus 1221, the first magnetic force F3 generated by the second coil 122332 can have a component perpendicular to the stylus 1221, and thus the first magnetic force F3 can be transmitted to the stylus 121 through the stylus 1221, whereby the current input to the coil 12233 can be conveniently controlled to more precisely control the ampere force F2, and thus the first magnetic force F3, and further the measuring force F1 can be conveniently controlled more precisely, and the measuring force F1 can be more precisely obtained.

In some examples, the magnetic axis C1 of the magnet 12231 where the magnetic pole is may be perpendicular to the second inner surface M2 (see fig. 5A), in other words, the magnetic axis C1 may be perpendicular to the second conductor plane T2. In this case, since the magnetic axis C1 is perpendicular to the second conductor plane T2, the magnetic field strength of the magnet 12231 received by the second conductor plane T2 can be kept almost uniform during the oscillation of the magnet 12231 with the spindle 1221, so that the magnetic field strength of the conductor passing through the second coil 122332 is almost constant during the oscillation of the magnet 12231 with the spindle 1221, whereby it can be advantageous to generate a relatively constant ampere force F2, and further it can be advantageous to obtain a relatively constant measuring force F1.

In some examples, the magnetic axis C1 of the magnet 12231 where the poles lie may be perpendicular to the first and second inner surfaces M1, M2. In other words, the magnetic axis C1 may be perpendicular to the first conductor plane T1 and the second conductor plane T2. In this case, the magnetic field strength of the magnet 12231 received by the first and second conductor surfaces T1 and T2 can be kept almost uniform during the oscillation of the magnet 12231 with the stylus 1221, so that the magnetic field strength of the conductor passing through the first and second coils 122331 and 12232 is almost constant during the oscillation of the magnet 12231 with the stylus 1221, thereby being advantageous for generating a relatively constant ampere force F2, and further being advantageous for obtaining a relatively constant measured force F1.

In some examples, the distance from the geometric center O of the magnet 12231 to the first conductor plane T1 and the second conductor plane T2 may be the same. In other words, the magnet 12231 may be located directly intermediate the first conductor plane T1 and the second conductor plane T2. In this case, when the first coil 122331 and the second coil 122332 are energized, the first portion 122321 and the second portion 122322 of the magnetic conductor 12232 are magnetized and form a magnetic force parallel to the Y-axis direction (i.e., the direction of the magnetic axis C1 of the magnet 12231) to the magnet 12231, and the magnet 12231 is located at the middle between the first conductor plane T1 and the second conductor plane T2, so that the magnetic force parallel to the Y-axis direction formed to the magnet 12231 can be balanced.

In some examples, the distance of the first pole 122311 of the magnet 12231 to the first conductor plane T1 can be no greater than a first preset value. In this case, the magnetic field near the first magnetic pole 122311 is strong and uniformly distributed, and the first magnetic pole 122311 is as close to the first conductor plane T1 as possible, so that a relatively constant measurement force F1 can be obtained more quickly, thereby improving the response speed of the stylus 121 to obtain a constant measurement force F1, and thus, the measurement speed of the profiler 10 can be improved.

In some examples, the distance of the second pole 122312 of the magnet 12231 to the second conductor plane T2 may be no greater than a second preset value. In this case, the magnetic field near the second magnetic pole 122312 is strong and uniformly distributed, and the second magnetic pole 122312 is as close to the second conductor plane T2 as possible, so that a relatively constant measurement force F1 can be obtained more quickly, thereby improving the response speed of the stylus 121 to obtain a constant measurement force F1, and thus, the measurement speed of the profiler 10 can be improved.

In some examples, the first preset value may be any value between 1 millimeter and 10 millimeters. For example, the first preset value may be 1 mm, 3 mm, 5 mm, 7 mm, 9 mm, or 10 mm.

In some examples, the second preset value may be any value between 1 millimeter and 10 millimeters. For example, the second preset value may be 1 mm, 3 mm, 5 mm, 7 mm, 9 mm, or 10 mm.

In some examples, the first preset value may be equal to the second preset value.

Fig. 7A is a schematic diagram illustrating a third embodiment of a magnetic force control device 1223 according to an example of the present disclosure. Fig. 7B is a schematic diagram showing magnetic field lines 122313 in a third embodiment of a magnetic force control device 1223 according to an example of the present disclosure.

In some examples, referring to fig. 7A, the magnetic conductor 12232 may further include a fourth portion 122324 connecting the first portion 122321 and the second portion 122322, and the first portion 122321, the third portion 122323, the second portion 122322, and the fourth portion 122324 may be sequentially connected end-to-end. In this case, the first portion 122321, the third portion 122323, the second portion 122322, and the fourth portion 122324 can be sequentially connected end to end and sequentially connected in series to form a closed magnetic conductor 12232, so that the magnetic field lines 122313 can form a closed magnetic loop in the magnetic conductor 12232 (see fig. 7B), and the solution shown in fig. 7A can be advantageous in reducing the occurrence of leakage of the magnetic field lines 122313, compared to the solution shown in fig. 5A or fig. 6, so as to reduce the risk of magnetizing other peripheral components by the magnetic field generated by the magnet 12231 and the magnetic field generated after the coil 12233 is energized.

Fig. 8A is a schematic diagram showing a fourth embodiment of a magnetic force control device 1223 according to an example of the present disclosure. Fig. 8B is a perspective view showing a fourth embodiment of the magnetic force control device 1223 according to the example of the present disclosure.

In some examples, referring to fig. 8A and 8B, the magnetic conductor 12232 may include a first portion 122321, a third portion 122323, a second portion 122322, and a fourth portion 122324 connected in series end-to-end in order, the first coil 122331 may be wound around the first portion 122321, and the second coil 122332 may be wound around the second portion 122322.

Fig. 9A is a perspective view showing a fifth embodiment of the magnetic force control device 1223 according to an example of the present disclosure. Fig. 9B is a side view showing a fifth embodiment of the magnetic force control device 1223 according to the example of the present disclosure.

In some examples, referring to fig. 9A and 9B, the first and second inner surfaces M1 and M2 may be fanned rings that match the preset movement path J. In this case, since the preset movement path J along which the magnet 12231 is oscillated by the spindle 1221 is in a sector arc shape centered on the rotation center P (see fig. 4), by setting the first inner surface M1 and the second inner surface M2 to match the sector ring shape of the preset movement path J, the volume of the magnet 12232 can be reduced, whereby the material of the magnet 12232 and the volume of the magnetic force control device 1223 can be saved, and thus the volume of the profiler 10 can be reduced, and thus the portability of the profiler 10 can be increased.

In some examples, the projection of the rotation center P (see fig. 4) on the first conductor plane T1 may be made the first projection center P1. In some examples, the projection of the rotation center P on the second conductor plane T2 may be made to be the second projection center P2.

In some examples, referring to fig. 9A, the first portion 122321 can be a circular ring plate whose center can be the first projection center P1. In this case, the first portion 122321 can be a regularly shaped annular plate to facilitate manufacturing and winding of the coil 12233 around the first portion 122321.

In some examples, the second portion 122322 can be a circular ring plate whose center can be the second projection center P2. In this case, the second portion 122322 can be a regularly shaped annular plate to facilitate manufacturing and winding of the coil 12233 around the second portion 122322.

In some examples, referring to fig. 9A, the first coil 122331 can pass through the first projection center P1 in the extending direction of the first inner surface M1. In other words, the first coil 122331 can be wound around the first portion 122321 of the magnetic conductor 12232 about the first projected center P1 to form the fan-shaped first conductor plane T1. In this case, when the first coil 122331 is energized, the conductor on the first conductor plane T1 is subjected to the magnetic field of the magnet 12231, the direction of the generated ampere force F2 can be tangential to the preset movement path J of the magnet 12231, in other words, the first magnetic force F3 generated by the ampere force F2 acting on the magnet 12231 can be perpendicular to the spindle 1221, that is, there is almost no component in other directions of the first magnetic force F3 except for the component perpendicular to the spindle 1221, whereby the first magnetic force F3 can be more precisely transferred to the stylus 121 to obtain a more precise measuring force F1.

In some examples, the direction of extension of the second coil 122332 on the second inner surface M2 can pass through the second projection center P2. In other words, the second coil 122332 can be wound around the second portion 122322 of the magnetic conductor 12232 centered about the second projection center P2 to form the fan-shaped second conductor plane T2. Thus, as described above, the first magnetic force F3 generated by the second coil 122332 can be transmitted to the stylus 121 more accurately, so that a more accurate measurement force F1 can be obtained.

Fig. 10 is a schematic diagram showing a positional relationship between the magnetic force control device 1223 and the support mechanism 1222 according to an example of the present disclosure.

In some examples, the stylus 121 with the magnet 12231 and the magnetic conductor 12232 may be located on one side of the support mechanism 1222 (see fig. 10). In this case, there can be more free space on the other side of the support mechanism 1222 that can be used to place other relevant equipment of the profiler 10, thereby facilitating a reduction in the volume of the constant force measurement device 122, i.e., facilitating a reduction in the volume of the profiler 10, and improving portability of the profiler 10.

In some examples, referring to fig. 3A, stylus 121 with magnet 12231 and magnetic conductor 12232 may be located on both sides of support mechanism 1222. Thus, the lever mechanism formed by the stylus 1221 can be advantageously used, and the sensitivity of controlling the measurement force F1 can be improved. In other words, by applying a smaller first magnetic force F3 to the magnet 12231, a larger measuring force F1 can be obtained by the lever mechanism of the spindle 1221.

Fig. 11A is a schematic diagram showing that the centroid H of the magnet 12231 according to the example of the present disclosure is located on the axis G1 of the spindle 1221. Fig. 11B is a force analysis diagram illustrating that the centroid H of the magnet 12231 according to the example of the present disclosure is not located on the axis G1 of the spindle 1221.

In some examples, the magnet 12231 may be fixed to an upper portion (see fig. 3A or 10) of the stylus 1221 or a lower portion corresponding to the upper portion.

In some examples, referring to fig. 11A, the centroid H of the magnet 12231 may be located on the axis G1 of the staff 1221. In other words, the magnet 12231 may be located at an intermediate position of the spindle 1221 in a radial direction perpendicular to the length direction of the spindle 121. In this case, referring to fig. 11B, when the centroid H of the magnet 12231 is not located on the axis G1 of the spindle 1221 (i.e., the magnet 12231 is fixed to the upper portion of the spindle 1221 or the lower portion corresponding to the upper portion), the moment of the rotating spindle 1221 formed with respect to the rotation center P is actually the moment generated by the component F31 of the first magnetic force F3 to which the magnet 12231 is subjected, and thus, there is an error in the measurement force F1 obtained based on the first magnetic force F3. When the centroid H of the magnet 12231 is located on the axis G1 of the spindle 1221, the moment of the rotating spindle 1221 formed with respect to the rotation center P can be the moment entirely generated by the first magnetic force F3, so that the ineffective action of the first magnetic force F3 can be reduced, and the measurement force F1 can be controlled more precisely.

In some examples, the centroid H of the magnet 12231 and the geometric center O of the magnet 12231 may coincide. In this case, the magnet 12231 is symmetrical, uniform in shape, and uniform in mass distribution, whereby it can be advantageous to simplify the design of the magnetic force control device 1223.

In some examples, the magnet 12231 may be made of a hard magnetic material. Thus, a stable magnetic field can be maintained for a long period of time.

In some examples, the stylus 1221 may be made of a non-magnetic material. Thereby, occurrence of magnetization can be reduced to reduce interference with the magnet 12231, so that the measurement force F1 can be obtained more accurately.

Fig. 12 is a flowchart illustrating a calibration method of the constant force device 122 according to an example of the present disclosure. Fig. 13 is a schematic diagram showing a swing angle a of the stylus 1221 according to an example of the present disclosure.

In actual operation, when the staff 1221 is located at different swing angles a due to the gravity of the staff 1221 and the friction of the supporting mechanism 1222, the forces received by the staff 1221 are different, thereby affecting the accuracy of the measurement force F1. By calibrating the constant force measuring device 122, a more accurate measuring force F1 can be obtained.

In some examples, referring to fig. 12, the calibration method of the constant force device 122 may include: coupling the force sensor with the stylus 121 (step S100); swinging the stylus 1221 at different angles of swing a (see fig. 13), obtaining a compensation current value input to the control module 12234 when the stylus 121 is made to have a preset measurement force F1 (step S200); the swing angle a of the spindle 1221 is correlated with the corresponding current value (step S300). In this case, by this calibration method, it is possible to obtain the compensation required for the measurement force F1 when the lever 1221 is at different oscillation angles a, specifically, in the case where the known preset measurement force F1 has been obtained during measurement, the displacement sensor 18 (see fig. 3A) is able to measure the value of the oscillation angle a of the lever 1221 when the lever 1221 is oscillated, and based on the value of the oscillation angle a of the lever 1221, the control module 12234 is able to output the compensation current value to the coil 12233 to compensate for the measurement force F1, so that the influence of the disturbance to the measurement force F1 to which the lever 1221 is subjected during oscillation can be reduced, whereby a more accurate measurement force F1 can be obtained.

In some examples, in step S100, a force sensor may be coupled with stylus 121. In this case, in the calibration method, it can be facilitated to obtain the preset measurement force F1 by detection.

In some examples, in step S200, referring to fig. 13, the swing lever 1221 may be swung at different swing angles a, for example, the swing angle a of the swing lever 1221 may be between 1 degree and 10 degrees, and when the current is output to the coil 12233 by the control module 12234 so that the stylus 121 has a preset measurement force F1, a current value (may be referred to as a calibration current value) corresponding to the preset measurement force F1 input to the control module 12234 may be obtained. In this case, the input current value, which has been determined before uncalibrated, required to obtain the preset measurement force F1 is made an uncalibrated current value, so that the compensation current value can be obtained based on comparison of the calibrated current value with the uncalibrated current value.

In the present disclosure, the uncalibrated current value may be a current value determined by the profiler 10 to obtain a preset measurement force F1 before uncalibration, and typically, the uncalibrated current value is obtained by preliminary design calculation.

In some examples, in step S300, the oscillation angle a of the stylus 1221 may be corresponding to a corresponding compensation current value. Thus, in the actual measurement process, firstly, an uncalibrated current value required for obtaining the preset measurement force F1 is determined, the uncalibrated current value is output to the coil 12233 through the control module 12234, the measuring needle 121 is enabled to contact the measured object 20 with the preliminarily obtained measurement force F1, in the swinging process of the measuring rod 1221, the swinging angle a of the measuring rod 1221 can be measured through the displacement sensor 18, and further, based on the relation between the swinging angle a and the supplementary current value determined by the calibration method, the supplementary current value can be output to the coil 12233 through the control module 12234, so that the more accurate measurement force F1 can be obtained.

In summary, in the present disclosure, by fixedly disposing the stylus 121 and the magnet 12231 on the stylus 1221, during a measurement process, the stylus 1221 can rotate on the supporting mechanism 1222, so as to drive the magnet 12231 to move along a preset movement path J, and simultaneously drive the stylus 121 to contact the measured object 20, and during a swinging process of the magnet 12231 along with the stylus 1221, a magnetic field generated by the magnet 12231 can pass through a conductor of the coil 12233 and enter the magnetic conductor 12232 to form a closed magnetic loop, and the magnetic conductor 12232 can guide a magnetic field, so as to reduce a situation that the magnetic field passes through the coil 12233 multiple times, when the coil 12233 is energized by the control module, the coil 12233 can generate a controllable ampere force F2 in the magnetic field of the magnet 12231, and the ampere force F2 is related to a current value energized by the coil 12233, and meanwhile, the magnet 12231 can receive a reaction force (may be referred to as a first magnetic force F3) of the ampere force F2, and the first magnetic force F3 can be transferred to the stylus 121 by the magnet 1221, thereby, the current of the first magnetic force F2 can be controlled by the control module 34, and the first magnetic force F can be further controlled by the control of the current of the coil 12233; in addition, since the coil 12233 wound on the magnetic conductor 12232 forms a preset area covering the preset movement path J of the magnet 12231, in other words, the magnetic field generated by the magnet 12231 can almost entirely pass through the conductor of the coil 12233 during the swinging of the magnet 12231 with the spindle 1221, so that the magnetic field strength of the conductor passing through the coil 12233 is almost unchanged during the swinging of the magnet 12231 with the spindle 1221, thereby being capable of facilitating the generation of a relatively constant ampere force F2, and further being capable of facilitating the acquisition of a relatively constant measured force F1. Therefore, in the measurement process, the control module 12234 can output the required constant current to the coil 12233 based on the material of the measured object 20, so as to obtain the required constant measurement force F1, thereby being beneficial to obtaining the constant measurement force F2 in the measurement process, and reducing the occurrence of scratching the measured object 20 and the occurrence of jumping of the measuring needle 121.

While the disclosure has been described in detail in connection with the drawings and examples, it is to be understood that the foregoing description is not intended to limit the disclosure in any way. Those skilled in the art can make modifications and variations to the present disclosure as required without departing from the true spirit and scope of the disclosure, and such modifications and variations are within the scope of the disclosure.

Claims

1. A measuring force adjusting device for controlling a measuring force applied to a measured object generated by a measuring needle contacting the measured object, the measuring force adjusting device is characterized by comprising a measuring rod, a supporting mechanism, a magnet, a magnetic conductor, at least one coil wound on the magnetic conductor and a control module; the measuring needle and the magnet are fixedly arranged on the measuring rod, the measuring rod is rotatably arranged on the supporting mechanism and drives the magnet to move along a preset movement path when the measuring rod rotates, meanwhile, the measuring needle is driven to contact a measured object, the magnetic conductor is fixedly arranged relative to the supporting mechanism and is configured to enable a magnetic field generated by the magnet to form a magnetic loop inside the magnetic conductor, the coil wound on the magnetic conductor forms a preset area covering the preset movement path of the magnet, and the control module is configured to control the acting force generated by the coil and acting on the magnet according to the material of the measured object, so as to control the measuring force of the measuring needle on the measuring rod acting on the measured object; the magnetic conductor comprises a first part, a third part and a second part which are sequentially connected, and the magnet is positioned in a space formed by the first part, the second part and the third part.

2. The measurement force adjustment device of claim 1, wherein the first portion has a first inner surface proximate the magnet; the coil includes a first coil wound around the first portion, the first coil forming a first conductor plane at the first inner surface.

3. Measuring force adjusting device according to claim 2, characterized in that the direction of extension of the conductor of the first coil on the first inner surface is perpendicular to the direction of the measuring force.

4. Measuring force regulating device according to claim 2, characterized in that the magnetic axis of the magnet, where the poles of the magnet are located, is perpendicular to the first inner surface and/or perpendicular to the first conductor plane.

5. The measuring force adjustment device of claim 2, wherein the plane of the predetermined path of movement is parallel to the first conductor plane.

6. The measuring force adjustment device of claim 2, wherein the coil is wound on the magnetic conductor, the first conductor surface and the first inner surface not being greater than a predetermined gap value.

7. The measurement force adjustment device of claim 2, wherein the magnet comprises a first pole, the first pole being no more than a first predetermined distance from the first conductor surface.

8. The measurement force adjustment device of claim 1, wherein the second portion has a second inner surface proximate the magnet, the coil further comprising a second coil disposed at the second portion, the second coil forming a second conductor plane at the second inner surface.

9. The measurement force adjustment device of claim 8, wherein the magnet comprises a second magnetic pole, the second magnetic pole being no more than a second predetermined value from the second conductor surface.

10. The measurement force adjustment device of claim 1, wherein a center of mass of the magnet is located on an axis of the spindle.