CN117477298A - Radio frequency connector and radio frequency connecting assembly for heating plate - Google Patents
Radio frequency connector and radio frequency connecting assembly for heating plate Download PDFInfo
- Publication number
- CN117477298A CN117477298A CN202311561155.8A CN202311561155A CN117477298A CN 117477298 A CN117477298 A CN 117477298A CN 202311561155 A CN202311561155 A CN 202311561155A CN 117477298 A CN117477298 A CN 117477298A
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- CN
- China
- Prior art keywords
- radio frequency
- connector
- frequency connector
- piston
- rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 37
- 239000004020 conductor Substances 0.000 claims abstract description 29
- 210000004907 gland Anatomy 0.000 claims description 8
- 239000004519 grease Substances 0.000 claims description 5
- 239000013307 optical fiber Substances 0.000 claims description 5
- 229920001296 polysiloxane Polymers 0.000 claims description 5
- 230000007704 transition Effects 0.000 claims description 4
- 238000003825 pressing Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 230000002035 prolonged effect Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 6
- 239000000758 substrate Substances 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000017525 heat dissipation Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 238000009529 body temperature measurement Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R24/00—Two-part coupling devices, or either of their cooperating parts, characterised by their overall structure
- H01R24/38—Two-part coupling devices, or either of their cooperating parts, characterised by their overall structure having concentrically or coaxially arranged contacts
- H01R24/40—Two-part coupling devices, or either of their cooperating parts, characterised by their overall structure having concentrically or coaxially arranged contacts specially adapted for high frequency
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/2039—Modifications to facilitate cooling, ventilating, or heating characterised by the heat transfer by conduction from the heat generating element to a dissipating body
Landscapes
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Constitution Of High-Frequency Heating (AREA)
Abstract
The invention relates to the technical field of semiconductor equipment, in particular to a radio frequency connector for a heating plate and a radio frequency connecting assembly for improving heat conduction performance. The invention provides a radio frequency connector for a heating plate, which comprises a radio frequency connector body and a radio frequency connector: and the bottom end of the inside of the radio frequency connector is filled with a heat conducting material, and is in contact with the radio frequency rod and conducts heat. According to the radio frequency connecting assembly and the radio frequency connector for the heating plate, provided by the invention, the heat conducting performance of the radio frequency connector is obviously enhanced by filling the heat conducting material in the connector structure, so that the radio frequency connector can stably work in a high-temperature environment, and meanwhile, the service life is prolonged.
Description
Technical Field
The invention relates to the technical field of semiconductor equipment, in particular to a radio frequency connector for a heating plate and a radio frequency connecting assembly for improving heat conduction performance.
Background
In semiconductor fabrication techniques, it is often desirable to plasma process a substrate. This process is typically performed in a semiconductor plasma processing apparatus, such as a PECVD (plasma enhanced chemical vapor deposition) process.
The main component of the plasma processing equipment is a vacuum reaction cavity, and a bearing table for bearing the substrate to be processed is arranged in the vacuum reaction cavity. The bearing table generally comprises a heating plate, and the radio frequency rod is arranged below the heating plate and is connected with the radio frequency connector. After the reaction gas is introduced into the vacuum reaction cavity, the reaction gas is ionized and generates plasma by the excitation of radio frequency current, so that the substrate is processed. During this process, the hotplate is responsible for heating the substrate.
However, in case the heating plate is applied at a temperature of 550 ℃ or 650 ℃, the temperature of the rf rod connected to the heating plate is high, and the heat generated by the rf current is added, so that the temperature of the rf rod and the rf connector connected thereto is increased, and may even exceed 300 ℃. This condition can lead to the connection being more prone to oxidation and blackening, further inducing high temperatures, eventually leading to failure of the rf connector and even sticking of the rf rod to the rf connector.
Disclosure of Invention
The invention aims to provide a radio frequency connector and a radio frequency connection assembly for a heating plate, which solve the problem that the radio frequency connector for the heating plate in the prior art fails due to high temperature.
In order to achieve the above object, the present invention provides a radio frequency connector for a heating plate, comprising a radio frequency connector body and a radio frequency connector head:
and the bottom end of the inside of the radio frequency connector is filled with a heat conducting material, and is in contact with the radio frequency rod and conducts heat.
In an embodiment, a through hole structure is arranged on the side wall of the bottom end of the radio frequency connector;
the outer side of the through hole structure is connected with one end of the connecting pipe;
and the connecting pipe is internally filled with a heat conducting material.
In one embodiment, the other end of the connecting tube is connected to a piston structure:
the piston wall of the piston structure is connected with the connecting pipe;
the piston of the piston structure is positioned in the hollow structure of the piston wall and is contacted with the heat conducting material inside the connecting pipe.
In one embodiment, the piston of the piston structure is connected with the base through a connecting rod;
an elastic structure is arranged between the base and the piston wall;
the elastic structure enables the piston to keep the pressing force in a certain stroke towards the hose direction.
In an embodiment, the elastic structure is a spring structure.
In an embodiment, a temperature sensor is arranged at the bottom end inside the radio frequency connector and is used for measuring the temperature of the heat conducting material;
and an optical fiber is arranged in the connecting pipe and is connected with the temperature sensor.
In one embodiment, the temperature sensor is a Bragg grating temperature sensor.
In one embodiment, the thermally conductive material is a thermally conductive silicone grease.
In order to achieve the above object, the present invention provides a radio frequency connection assembly for a heating plate, comprising a radio frequency rod and a radio frequency connector:
the head of the radio frequency rod is connected with the heating disc, and the bottom of the radio frequency rod is inserted into the radio frequency connector;
the radio frequency connector adopts any one of the radio frequency connectors;
wherein the radio frequency rod is in contact with the thermally conductive material.
In an embodiment, a gland structure is arranged at a position of the radio frequency rod close to the bottom:
the gland structure is in transition fit with the inner aperture of the radio frequency connector.
According to the radio frequency connecting assembly and the radio frequency connector for the heating plate, provided by the invention, the heat conducting performance of the radio frequency connector is obviously enhanced by filling the heat conducting material in the connector structure, so that the radio frequency connector can stably work in a high-temperature environment, and meanwhile, the service life is prolonged.
Drawings
The above and other features, properties and advantages of the present invention will become more apparent from the following description of embodiments taken in conjunction with the accompanying drawings in which like reference characters designate like features throughout the drawings, and in which:
FIG. 1 discloses a schematic structural view of a radio frequency connection assembly for a heating plate according to a first embodiment of the invention;
FIG. 2 discloses a schematic thermal contact of a radio frequency connection assembly for a hotplate according to a first embodiment of the invention;
FIG. 3 discloses a block diagram of a radio frequency connection assembly for a hotplate in accordance with a second embodiment of the invention;
fig. 4 discloses a structural view of a radio frequency connection assembly for a heating plate according to a third embodiment of the invention.
The meaning of the reference numerals in the figures is as follows:
a 100 radio frequency rod;
101 a gland structure;
200 radio frequency connectors;
201 a thermally conductive material;
202 via structures;
203 connecting pipes;
300 heating the disc;
400 piston structure;
401 piston wall;
402 pistons;
403 connecting rods;
404 a base;
405 a resilient structure;
501 a temperature sensor;
502 optical fibers.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
It should be noted that in this specification, like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.
Fig. 1 is a schematic structural view of a radio frequency connection assembly for a heating plate according to a first embodiment of the present invention, and as shown in fig. 1, a radio frequency connection assembly for a heating plate according to the present invention includes a radio frequency rod 100 and a radio frequency connector.
The rf connector includes an rf connector body and an rf connector 200.
The head of the radio frequency rod 100 is connected with the heating plate 300, and the bottom of the radio frequency rod is inserted into the radio frequency connector 200.
The bottom end of the interior of the rf connector 200 is filled with a heat conductive material 201, and is in contact with the rf rod 100 and conducts heat.
The thermally conductive material is used to enhance the conductive properties of thermal energy to transfer heat from one location to another. The selection of the appropriate thermally conductive material depends on factors such as the specific application requirements, the temperature range, the material cost, and the thermal conductivity.
In this embodiment, the heat conductive material is selected from heat conductive silicone grease. The heat conducting material is filled in a uniform distribution mode.
Considering that the heat conduction silicone grease can bear high temperature of 300 ℃, the heat conduction performance of the radio frequency connector is effectively enhanced by adding the heat conduction silicone grease which is uniformly distributed on the connector structure, so that the temperature of the joint of the radio frequency rod is lower.
In other embodiments, it may also be a thermally conductive paste, thermally conductive plastic, or the like.
To ensure the heat dissipation effect, the bottom end of the rf rod 100 should be inserted 1-10mm into the heat conductive material of the bottom end of the rf connector 200.
The invention provides a radio frequency connector and a radio frequency connecting assembly for a heating plate, which have excellent radio frequency conduction performance and heat conduction effect, can stably work in a high-temperature environment and have longer service life.
The temperature of the heating plate 300 may reach 550 to 650 c, and the connection area of the rf rod 100 and the rf connector 200 is a space-limited area, so that the temperature is easily high. Whereas the prior art only considers radio frequency conduction, the effect of heat conduction is not fully considered.
In the invention, the radio frequency connector and the radio frequency connecting component not only realize the radio frequency conduction function, but also have the function of ensuring heat conduction. The design can work stably under high-temperature environment and has long service life.
Fig. 2 shows a schematic thermal contact diagram of a radio frequency connection assembly for a heating plate according to a first embodiment of the present invention, as shown in fig. 2, in the radio frequency connection assembly for a heating plate of the first embodiment, the radio frequency rod 100 easily slides due to expansion and contraction during temperature rise and temperature drop, so that poor thermal contact with the heat conducting material 201 is caused, and therefore, a more efficient heat dissipation design is required to dissipate heat in a larger space.
Fig. 3 discloses a structural diagram of a radio frequency connection assembly for a heating plate according to a second embodiment of the present invention, which is the same as the first embodiment in the second embodiment shown in fig. 3, except that:
the radio frequency rod 100 is provided with a gland structure 101 at a position near the bottom:
the gland structure 101 is in transition fit with the internal aperture of the rf connector 200.
For the rf connector, a through hole structure 202 is disposed on the inner bottom sidewall of the rf connector 200;
the outer side of the through hole structure 202 is connected with one end of a connecting pipe 203;
the connection pipe 203 is filled with a heat conductive material 201.
In this embodiment, the connection tube 203 is a hose.
Still further, the other end of the connection pipe 203 is connected to a piston structure 400, and the piston structure 400 is disposed outside the chamber, i.e., outside the vacuum environment:
a piston wall 401 of the piston structure 400 is connected with the connection pipe 203;
the piston 402 of the piston structure 400 is located in the hollow structure of the piston wall 401 in contact with the heat conducting material inside the connection tube 203.
The piston 402 is a transition fit with a hollow structure located in the piston wall 401.
Further, the other end of the piston 402 of the piston structure is connected with the base 404 through the connecting rod 403;
an elastic structure 405 is arranged between the base 404 and the piston wall 401;
the elastic structure 405 keeps the piston 402 pressed for a certain stroke in the direction of the connection tube 203.
For example, the piston 402 maintains a pressing force of 0.5N for a stroke of 10mm in the direction of the connection pipe 203.
In this embodiment, the elastic structure 405 is a spring structure.
In this way, in the second embodiment, the piston 402 is pressed towards the direction of the connecting pipe 203 and is matched with the gland structure 101, so that the heat conducting materials inside the connecting pipe 203 and the radio frequency connector 200 can be fully contacted with the radio frequency rod 100, and effective heat dissipation is achieved.
Fig. 4 shows a structure of a radio frequency connection assembly for a heating plate according to a third embodiment of the present invention, which is the third embodiment shown in fig. 4, and is the same as the second embodiment in a non-described portion, except that:
a temperature sensor 501 is disposed at the bottom end of the rf connector 200, for measuring the temperature of the heat conductive material 201 and the rf rod 100;
an optical fiber 502 is provided inside the connection pipe 203 and connected to a temperature sensor 501.
In the third embodiment, by using the connection pipe 203 and the optical fiber 502 in combination, the temperature of the rf rod 100 can be accurately measured, and the temperature of the heat conductive material 201 near the bottom of the rf rod 100 can be measured.
In this embodiment, the temperature sensor 501 may be a bragg grating temperature sensor. A bragg grating temperature sensor is a fiber optic sensor that uses the physical characteristics of the bragg grating to make a temperature measurement. Bragg grating temperature sensors have many advantages such as high sensitivity, high accuracy, electromagnetic interference resistance, light weight, small size, etc. Furthermore, because of its non-invasive nature, it can be measured in a variety of harsh environments.
According to the radio frequency connecting assembly and the radio frequency connector for the heating plate, provided by the invention, the heat conducting performance of the radio frequency connector is obviously enhanced by filling the heat conducting material in the connector structure, so that the radio frequency connector can stably work in a high-temperature environment, and meanwhile, the service life is prolonged.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention.
As used in this application and in the claims, the terms "a," "an," "the," and/or "the" are not specific to the singular, but may include the plural, unless the context clearly dictates otherwise. In general, the terms "comprises" and "comprising" merely indicate that the steps and elements are explicitly identified, and they do not constitute an exclusive list, as other steps or elements may be included in a method or apparatus.
The terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present invention, unless otherwise specified, the meaning of "a plurality" is two or more, unless otherwise clearly defined.
Unless specifically stated or limited otherwise, the terms "mounted," "connected," "secured" and the like are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
The embodiments described above are intended to provide those skilled in the art with a full range of modifications and variations to the embodiments described above without departing from the inventive concept thereof, and therefore the scope of the invention is not limited by the embodiments described above, but is to be accorded the broadest scope consistent with the innovative features recited in the claims.
Claims (10)
1. A radio frequency connector for heating dish, includes radio frequency connector body and radio frequency connector, its characterized in that:
and the bottom end of the inside of the radio frequency connector is filled with a heat conducting material, and is in contact with the radio frequency rod and conducts heat.
2. The rf connector for a hotplate of claim 1, wherein the inner bottom side wall of the rf connector is provided with a through hole structure;
the outer side of the through hole structure is connected with one end of the connecting pipe;
and the connecting pipe is internally filled with a heat conducting material.
3. The rf connector for a heating plate of claim 2, wherein the other end of the connecting tube is connected to a piston structure:
the piston wall of the piston structure is connected with the connecting pipe;
the piston of the piston structure is positioned in the hollow structure of the piston wall and is contacted with the heat conducting material inside the connecting pipe.
4. A radio frequency connector for a heating plate as claimed in claim 3, wherein the piston of the piston structure is connected to the base by a connecting rod;
an elastic structure is arranged between the base and the piston wall;
the elastic structure enables the piston to keep pressing force in a certain stroke towards the connecting pipe direction.
5. The rf connector for a hotplate of claim 4, wherein the resilient structure is a spring structure.
6. A radio frequency connector for a heating pan as claimed in claim 3, wherein a temperature sensor is provided at the bottom end of the inside of the radio frequency connector for measuring the temperature of the heat conductive material;
and an optical fiber is arranged in the connecting pipe and is connected with the temperature sensor.
7. The rf connector for a heated plate of claim 6, wherein the temperature sensor is a bragg grating temperature sensor.
8. The rf connector for a hotplate of claim 1, wherein the thermally conductive material is thermally conductive silicone grease.
9. A radio frequency connection assembly for a heating plate comprising a radio frequency rod and a radio frequency connector:
the head of the radio frequency rod is connected with the heating disc, and the bottom of the radio frequency rod is inserted into the radio frequency connector;
the radio frequency connector employing the radio frequency connector as claimed in any one of claims 1 to 8;
wherein the radio frequency rod is in contact with the thermally conductive material.
10. The rf connection assembly for a heating plate of claim 9, wherein the rf rod is positioned near the bottom with a gland structure:
the gland structure is in transition fit with the inner aperture of the radio frequency connector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311561155.8A CN117477298A (en) | 2023-11-21 | 2023-11-21 | Radio frequency connector and radio frequency connecting assembly for heating plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311561155.8A CN117477298A (en) | 2023-11-21 | 2023-11-21 | Radio frequency connector and radio frequency connecting assembly for heating plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117477298A true CN117477298A (en) | 2024-01-30 |
Family
ID=89627457
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311561155.8A Pending CN117477298A (en) | 2023-11-21 | 2023-11-21 | Radio frequency connector and radio frequency connecting assembly for heating plate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117477298A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009170674A (en) * | 2008-01-16 | 2009-07-30 | Furukawa Electric Co Ltd:The | Optical module |
| US20150255934A1 (en) * | 2014-03-05 | 2015-09-10 | Advanced-Connectek Inc. | Micro Radio-Frequency Connector |
| CN107425379A (en) * | 2017-08-21 | 2017-12-01 | 深圳市沃尔新能源电气科技股份有限公司 | A kind of connector male terminal, female terminal and connector end sub-portfolio |
| CN114158147A (en) * | 2020-09-08 | 2022-03-08 | 苏州珂玛材料科技股份有限公司 | Ceramic heating disc leading-out electrode connecting structure and connecting method thereof |
| CN217479547U (en) * | 2020-09-08 | 2022-09-23 | 苏州珂玛材料科技股份有限公司 | Ceramic heating plate and chemical vapor deposition equipment |
| CN115394627A (en) * | 2022-08-26 | 2022-11-25 | 北京北方华创微电子装备有限公司 | Semiconductor processing equipment and lower electrode device thereof |
| CN115763315A (en) * | 2022-11-29 | 2023-03-07 | 拓荆科技股份有限公司 | Cooling structure of radio frequency connecting rod and processing equipment of semiconductor device |
| US20230268203A1 (en) * | 2022-02-21 | 2023-08-24 | Semes Co., Ltd. | Heating unit and substrate treating apparatus including the same |
-
2023
- 2023-11-21 CN CN202311561155.8A patent/CN117477298A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009170674A (en) * | 2008-01-16 | 2009-07-30 | Furukawa Electric Co Ltd:The | Optical module |
| US20150255934A1 (en) * | 2014-03-05 | 2015-09-10 | Advanced-Connectek Inc. | Micro Radio-Frequency Connector |
| CN107425379A (en) * | 2017-08-21 | 2017-12-01 | 深圳市沃尔新能源电气科技股份有限公司 | A kind of connector male terminal, female terminal and connector end sub-portfolio |
| CN114158147A (en) * | 2020-09-08 | 2022-03-08 | 苏州珂玛材料科技股份有限公司 | Ceramic heating disc leading-out electrode connecting structure and connecting method thereof |
| CN216982138U (en) * | 2020-09-08 | 2022-07-15 | 苏州珂玛材料科技股份有限公司 | Structure of ceramic heating disc leading-out electrode |
| CN217479547U (en) * | 2020-09-08 | 2022-09-23 | 苏州珂玛材料科技股份有限公司 | Ceramic heating plate and chemical vapor deposition equipment |
| US20230268203A1 (en) * | 2022-02-21 | 2023-08-24 | Semes Co., Ltd. | Heating unit and substrate treating apparatus including the same |
| CN115394627A (en) * | 2022-08-26 | 2022-11-25 | 北京北方华创微电子装备有限公司 | Semiconductor processing equipment and lower electrode device thereof |
| CN115763315A (en) * | 2022-11-29 | 2023-03-07 | 拓荆科技股份有限公司 | Cooling structure of radio frequency connecting rod and processing equipment of semiconductor device |
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