CN219495481U - Armored thermometer for cryogenic pump and cryogenic pump - Google Patents
Armored thermometer for cryogenic pump and cryogenic pump Download PDFInfo
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- CN219495481U CN219495481U CN202320101903.3U CN202320101903U CN219495481U CN 219495481 U CN219495481 U CN 219495481U CN 202320101903 U CN202320101903 U CN 202320101903U CN 219495481 U CN219495481 U CN 219495481U
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- thermometer
- armored
- cryopump
- sleeve
- temperature
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/30—Nuclear fission reactors
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Abstract
The utility model discloses an armored thermometer for a cryopump, which comprises a thermometer body and a fixing piece, wherein the fixing piece is arranged on a mechanism to be measured in temperature and is used for fixing the thermometer body; the thermometer body comprises a thermometer sensor and a thermometer lead, one end of the thermometer lead is connected with the thermometer sensor, and the other end of the thermometer lead is connected with an external temperature display; an insulating sleeve and an anti-corrosion sleeve are sleeved outside the thermometer lead in sequence; the fixing piece comprises a heat conduction area, the thermometer sensor is fixedly installed in the heat conduction area, and the heat conduction area is used for being connected with a temperature mechanism to be detected. The armored thermometer is suitable for working conditions with corrosive gas. The utility model also discloses a cryopump comprising the armored thermometer, which can detect the temperatures of the primary cold head and the secondary cold head of the cryopump at the same time.
Description
Technical Field
The utility model belongs to the technical field of temperature measurement, and particularly relates to an armored thermometer for a low-temperature pump and the low-temperature pump.
Background
The thermometer is an indispensable part on the cryopump and is used for detecting the temperatures of the primary cold head and the secondary cold head and recording the cooling time and the temperature relationship of the cryopump so as to intuitively reflect the performance effect of the cryopump. In the fields of semiconductor manufacturing, superconductivity and the like, the use environment of the thermometer usually has corrosive gas generation, which corrodes the lead wire of the thermometer, thereby affecting the stability of the whole structure of the thermometer. Therefore, designing a corrosion resistant armored thermometer is one of the problems to be solved. In addition, in the use environment with requirements on vacuum degree, the excessive air release amount of the material can damage the vacuum degree of the system, and the selection of the material with good corrosion performance and proper air release amount and economical and attractive appearance as the armor material of the thermometer is also one of the important concerns in the field.
Disclosure of Invention
In view of the above-described deficiencies of the prior art, the present utility model aims to: the armored thermometer has good corrosion resistance and heat conduction performance, and is suitable for working conditions with corrosive gas generation; the cryogenic pump comprising the armored thermometer is provided, and the temperatures of a first-stage cold head and a second-stage cold head of the cryogenic pump are detected.
In order to achieve all or part of the above objects, the present utility model provides the following technical solutions:
the utility model provides an armored thermometer for a cryopump, which comprises a thermometer body and a fixing piece, wherein the fixing piece is arranged on a mechanism to be measured in temperature and is used for fixing the thermometer body; the thermometer body comprises a thermometer sensor and a thermometer lead, one end of the thermometer lead is connected with the thermometer sensor, and the other end of the thermometer lead is connected with an external temperature display; an insulating sleeve and an anti-corrosion sleeve are sleeved outside the thermometer lead in sequence; the fixing piece comprises a heat conduction area, the thermometer sensor is fixedly arranged in the heat conduction area, and the heat conduction area is connected with the temperature mechanism to be measured. The technical scheme has the beneficial effects that the outer part of the thermometer lead is sleeved with the insulating sleeve, so that the conduction between the thermometer lead and the conductive substance is prevented; the outside of the insulating sleeve is sleeved with an anti-corrosion sleeve, so that corrosive gas is prevented from corroding the thermometer lead; the temperature of the temperature mechanism to be measured is transmitted to the thermometer sensor through the heat conduction area so as to detect the temperature.
The fixing piece is of a columnar structure with a cavity formed in the fixing piece, a heat conducting material is filled in the cavity to form the heat conducting area, and the heat conducting material is an electric insulating material; and at least one side of the cavity is opened to expose the heat conduction area and is used for fixing the thermometer sensor and connecting a temperature measuring mechanism. The heat conductive material is preferably a material having good adhesive strength to directly fix the thermometer sensor by its adhesion.
The cavity penetrates through two ends of the fixing piece and comprises a first cavity section and a second cavity section which are connected with each other, and the first cavity section is filled with the heat conducting material to form the heat conducting area; one end of the anti-corrosion sleeve is fixed in the cavity, and the thermometer lead, the insulating sleeve and the anti-corrosion sleeve extend to the outside of the fixing piece along the second cavity section.
The thermal conductivity of the thermally conductive material is greater than 0.5W/mK. The heat conducting material can be resin, for example, the resin has good heat conductivity, the temperature of the temperature mechanism to be measured can be transferred to the thermometer sensor of the thermometer body, accurate temperature measurement is realized, and meanwhile, the resin has good bonding strength, and can be directly fixed in the heat conducting area. In a more preferred embodiment, the resin is further selected to be an epoxy resin.
The air release amount of the anti-corrosion sleeve material is less than 8.5 multiplied by 10 -11 Pa‧m 3 ‧s -1 ‧cm -2 The heat transfer coefficient is less than 30W/(m ‧ ℃). The technical scheme has the advantages that when the air release amount is in the range, the vacuum environment of the low-temperature pump is not influenced by the air generated by the anti-corrosion sleeve; when the heat transfer coefficient is within the range, the corrosion-resistant sleeve can be prevented from causing larger heat loss, thereby affecting the detection temperatureDegree.
The anti-corrosion sleeve can be made of stainless steel hose, for example. The technical scheme has the beneficial effects that the stainless steel hose has good softness, corrosion resistance and abrasion resistance, and has bright and beautiful appearance.
The insulating sleeve can be, for example, a teflon (polytetrafluoroethylene) sleeve, and the teflon has good high-temperature resistance, corrosion resistance and excellent electrical characteristics. The insulating sleeve can also be a heat-shrinkable sleeve, for example, but not limited to a PVC heat-shrinkable sleeve, a PET heat-shrinkable sleeve and the like, and the heat-shrinkable sleeve has the characteristics of high-temperature shrinkage, softness, flame retardance, good corrosion resistance and the like.
The utility model also provides a cryogenic pump, which comprises an adapter and two armored thermometers, wherein the armored thermometers are used for the cryogenic pump in the technical scheme; two penetrating mounting holes are formed in the adapter piece, the anti-corrosion sleeves of the two armored thermometers are respectively fixed in the two mounting holes, and thermometer leads of the armored thermometers penetrate through the mounting holes and are connected with the temperature display; one end of the fixing piece of the armored thermometer, which is close to the heat transfer area, is connected with a first plug, the two first plugs are respectively connected with a temperature mechanism to be detected, and the temperature mechanism to be detected is a first-stage cold head and a second-stage cold head of the low-temperature pump. The beneficial effects of this technical scheme lie in, through setting up two armor thermometers, detect the temperature on the cold head of cryopump one-level and the second grade cold head simultaneously, thermometer lead wire connection temperature display to show the temperature on the cold head of one-level, the second grade.
The adapter is a flange, a second plug is fixedly arranged in the middle of the flange, and two mounting holes are formed in the second plug; the adapter is used for connecting an interface on the cryopump with a vacuum electric connector, the thermometer lead wire is welded on the vacuum electric connector, and the vacuum electric connector is connected with the temperature display.
Compared with the prior art, the utility model has at least the following beneficial effects:
(1) The insulating sleeve is sleeved outside the thermometer lead of the armored thermometer, so that the conduction between the thermometer lead and the conductive substance is prevented; the outside of the insulating sleeve is sleeved with an anti-corrosion sleeve, so that corrosive gas is prevented from corroding the thermometer lead; the temperature of the temperature mechanism to be measured is transmitted to the thermometer sensor through the heat conduction area so as to detect the temperature.
(2) The utility model further discloses that the heat conducting material is resin, the resin has good heat conductivity, the temperature of the temperature mechanism to be measured can be transferred to the thermometer sensor, accurate temperature measurement is realized, and meanwhile, the resin has good bonding strength, and the thermometer sensor can be directly fixed in the heat conducting area.
(3) The utility model further discloses that the anti-corrosion sleeve is a stainless steel hose, and the stainless steel hose has smaller air release amount, avoids influencing the vacuum environment, has good softness, corrosion resistance and wear resistance, and has bright and beautiful appearance.
(4) The utility model further discloses that the insulating sleeve is a teflon sleeve or a heat-shrinkable sleeve, has good corrosion resistance and high temperature resistance, has good economical efficiency, and is beneficial to controlling the cost.
(5) The utility model further discloses a cryogenic pump which comprises the armored thermometer in the technical scheme, and the temperature of the primary cold head and the temperature of the secondary cold head of the cryogenic pump can be monitored.
Drawings
In order to more clearly illustrate the technical solutions of specific embodiments of the present utility model, the drawings that are needed in the description of the embodiments will be briefly described below, and it is obvious that the drawings described below are only some embodiments of the present utility model, and other drawings may be obtained according to these drawings without inventive effort to a person of ordinary skill in the art.
FIG. 1 is a cross-sectional view of an armored thermometer in accordance with a first embodiment of the present utility model;
FIG. 2 is a schematic structural view of a fixing member according to a first embodiment of the present utility model;
FIG. 3 is a schematic structural view of an armored thermometer connecting adaptor in a second embodiment of the present utility model;
FIG. 4 is a schematic view of a flange structure in a second embodiment of the present utility model;
reference numerals: 1-thermometer body, 101-thermometer sensor, 102-thermometer lead, 2-insulating sleeve, 3-anticorrosive sleeve, 4-mounting, 401-first chamber section, 402-second chamber section, 5-adaptor, 501-second plug, 502-mounting hole, 6-first plug, 601-threaded hole, 7-heat transfer area.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and fully, and it is apparent that the embodiments described are only some, but not all, of the embodiments of the present utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Example 1
The utility model provides an armored thermometer for a cryopump, please refer to fig. 1 and 2 in combination, which comprises a thermometer body 1, wherein the thermometer body 1 comprises a thermometer lead 102 and a thermometer sensor 101, the thermometer lead 102 is used for being connected with a temperature display, an insulating sleeve 2 is sleeved outside the thermometer lead 102, and an anti-corrosion sleeve 3 is sleeved outside the insulating sleeve 2; the armored thermometer further comprises a fixing piece 4, the fixing piece 4 comprises a heat conduction area 7, the thermometer sensor 101 is fixedly installed in the heat conduction area 7, the heat conduction area 7 is connected with a temperature mechanism to be detected, and the temperature of the temperature mechanism to be detected is transmitted to the thermometer sensor 101 through the heat conduction area 7 to be detected.
The fixing piece 4 is a columnar structure with a cavity formed inside, a heat conduction area 7 is formed by filling heat conduction materials in the cavity, and at least one side of the cavity is opened to expose the heat conduction area 7 and used for fixing a thermometer sensor and connecting a temperature mechanism to be measured. Specifically, the cavity extends through both ends of the fixing member 4, and the cavity includes a first cavity section 401 and a second cavity section 402 that are connected to each other. The first cavity section 401 is filled with a thermally conductive material in which the thermometer sensor 101 is embedded to form the above-mentioned thermally conductive region 7; the thermometer lead 102 extends along the second cavity section 402 to the outside of the fixture 4, and one end of the corrosion barrier sleeve 3 is secured within the cavity of the fixture 4, as the thermometer lead 102 extends along the second cavity section 402 to the outside of the fixture 4. In this embodiment, as shown in fig. 1, one end of the anti-corrosion sleeve 3 is welded at the intersection of the second cavity section 402 and the first cavity section 401, so that the anti-corrosion sleeve 3 can maximally protect the thermometer lead 102, and in other embodiments, it is only necessary to ensure that one end of the anti-corrosion sleeve 3 is fixedly connected with the fixing member 4. In other embodiments, the anti-corrosion sleeve 3 may be fixed by other means than welding, such as bonding, clamping, etc. In this embodiment, the diameter of the first cavity section 401 is Φ3, the diameter of the second cavity section 402 is slightly smaller than the diameter of the first cavity section 401, and in other embodiments, the cavity size of the fixing member 4 may be determined according to practical situations.
In a preferred embodiment, the anti-corrosion sleeve 3 preferably has a gas release of less than 8.5X10 -11 Pa‧m 3 ‧s -1 ‧cm -2 To avoid damaging the vacuum environment of the cryopump. The air bleed amount means: after 30 min of operation of the cryopump system, the detected bleed air amount is less than 8.5X10 -11 Pa‧m 3 ‧s -1 ‧cm -2 . In a preferred embodiment, the anti-corrosion sleeve 3 is preferably made of a material with a heat transfer coefficient smaller than 30W/(m ‧ ℃) so as to avoid that the anti-corrosion sleeve 3 causes larger heat loss and further influences the detection temperature. In this embodiment, the anti-corrosion sleeve 3 is a stainless steel hose, which has good flexibility, corrosion resistance, abrasion resistance, and bright and beautiful appearance. The stainless steel hose may have a gauge of 2.6x0.3, for example, and in other embodiments, the gauge of the anti-corrosive sleeve 3 may be determined according to practical situations.
In this embodiment, the insulating sleeve 2 is directly sleeved on the outer part of the thermometer lead 102, so as to prevent the thermometer lead 102 from being in direct contact with the anti-corrosion sleeve 3 to cause conduction. The end of the insulating sleeve 2 located in the fixing element 4 may be provided as a free end or connected to the fixing element 4, in a preferred embodiment, in order to avoid a large displacement of this end of the insulating sleeve 2, this end of the insulating sleeve 2 is fixedly connected to the fixing element 4. In this embodiment, the insulating sleeve 2 is a teflon (polytetrafluoroethylene) sleeve, and has good high temperature resistance, corrosion resistance and excellent electrical characteristics. The specification of the teflon sleeve may be, for example, 1.8×0.2, and in other embodiments, the specification of the insulating sleeve 2 may be determined according to practical situations. In other embodiments, the insulating sleeve 2 may also be a heat-shrinkable sleeve, including but not limited to PVC heat-shrinkable sleeve, PET heat-shrinkable sleeve, and the like, which has the characteristics of high temperature shrinkage, softness, flame retardance, good corrosion resistance, and the like.
The thermally conductive material filled in the first cavity section 401 is preferably a material having a thermal conductivity greater than 0.5W/mK to have good thermal conductivity. And, the thermally conductive material is an electrically insulating material. In this embodiment, the filled thermally conductive material is a resin, which has a good adhesive strength, which is cured in the first cavity section 401 to directly fix the thermometer sensor 101, and which also has good chemical resistance. In a preferred embodiment, the thermally conductive material in the thermally conductive region 7 is selected to be epoxy.
Example two
Referring to fig. 3 and 4 in combination, the present embodiment provides a cryopump including an adapter 5 and two armoured thermometers described in the above technical scheme. Two penetrating mounting holes 502 are formed in the adapter piece 5, the anti-corrosion sleeves 3 of the two armored thermometers are respectively fixed in the two mounting holes 502, and the thermometer leads 101 penetrate through the mounting holes 502 to be connected with a thermometer display; one end of the fixing piece 4, which is close to the heat conduction area 7, is connected with a first plug 6, and the two first plugs 6 connected with the two armored thermometers are respectively connected with a temperature measuring mechanism to be measured. In this embodiment, the temperature measuring mechanism is a primary cold head and a secondary cold head of the cryopump. The diameter of the mounting hole 502 is sized to match the diameter of the anti-corrosion sleeve 3, for example, when the anti-corrosion sleeve 3 is 2.6x0.3 in specification, the aperture of the mounting hole 502 is correspondingly set to be phi 2.6. The anti-corrosion sleeve 3 may be fixed in the mounting hole 502 by welding, bonding, or other fixing structures commonly used in the art.
In this embodiment, one end of the first plug 6 directly contacts with the heat transfer area 7 on the fixing piece 4, the cold energy on the first-stage cold head and the second-stage cold head of the cryopump is transferred to the thermometer sensor 101 through the heat transfer area 7, and the cold energy information is transferred to the temperature display through the thermometer lead 102, and the temperature display is used for displaying the temperatures of the first-stage cold head and the second-stage cold head. The first plug 6 is provided with a threaded hole 601 for fixedly connecting with the primary cold head and the secondary cold head.
In this embodiment, the adaptor 5 is a flange, preferably a KF armored flange, the middle part of the flange is fixedly provided with a second plug 501, and the mounting hole 502 is opened on the second plug 501; the adapter 5 is used for connecting an interface on the cryopump with a vacuum electric connector, the thermometer lead 102 of the armored thermometer is welded on the vacuum electric connector, and the vacuum electric connector is used for connecting a temperature display. In this embodiment, the thermometer leads 102 of the two sheathed thermometers are respectively soldered to different pins on the same vacuum electrical connector.
The inventive principles of this patent application are described herein with reference to specific examples, the description of which is given above by way of illustration only to aid in understanding the method and core idea of the utility model. It should be noted that it will be apparent to those skilled in the art that various improvements and modifications can be made to the present utility model without departing from the principles of the utility model, and such improvements and modifications fall within the scope of the appended claims.
Claims (10)
1. An armored thermometer for a cryopump, characterized by comprising a thermometer body (1) and a fixing piece (4), wherein the fixing piece (4) is arranged on a mechanism to be measured in temperature and is used for fixing the thermometer body (1); the thermometer body (1) comprises a thermometer sensor (101) and a thermometer lead (102), one end of the thermometer lead (102) is connected with the thermometer sensor (101), and the other end of the thermometer lead is connected with an external temperature display; an insulating sleeve (2) and an anti-corrosion sleeve (3) are sleeved outside the thermometer lead (102) in sequence; the fixing piece (4) comprises a heat conduction area (7), the thermometer sensor (101) is fixedly arranged in the heat conduction area (7), and the heat conduction area (7) is connected with a temperature mechanism to be measured.
2. The armored thermometer for a cryopump of claim 1, wherein: the fixing piece (4) is of a columnar structure with a cavity formed in the fixing piece, a heat conducting material is filled in the cavity to form the heat conducting area (7), and the heat conducting material is an electric insulating material; the cavity is open at least on one side to expose the heat conduction area (7) and is used for fixing the thermometer sensor (101) and connecting a temperature measuring mechanism.
3. The armored thermometer for a cryopump of claim 2, wherein: the cavity penetrates through two ends of the fixing piece (4) and comprises a first cavity section (401) and a second cavity section (402) which are connected with each other, and the first cavity section (401) is filled with the heat conducting material to form the heat conducting area (7); one end of the anti-corrosion sleeve (3) is fixed in the cavity, and the thermometer lead (102), the insulating sleeve (2) and the anti-corrosion sleeve (3) extend to the outside of the fixing piece (4) along the second cavity section (402).
4. A sheathed thermometer for a cryopump according to claim 2 or 3, wherein: the thermal conductivity of the thermally conductive material is greater than 0.5W/mK.
5. The armored thermometer for a cryopump of claim 4, wherein: the heat conducting material is resin.
6. The armored thermometer for a cryopump of claim 1, wherein: the air release amount of the material of the anti-corrosion sleeve (3) is less than 8.5 multiplied by 10 -11 Pa‧m 3 ‧s -1 ‧cm -2 The heat transfer coefficient is less than 30W/(m ‧ ℃).
7. The armored thermometer for a cryopump of claim 6, wherein: the anti-corrosion sleeve (3) is made of stainless steel.
8. The armored thermometer for a cryopump of claim 1, wherein: the insulating sleeve (2) is a teflon sleeve or a heat-shrinkable sleeve.
9. A cryopump, characterized by comprising an adapter (5) and two armoured thermometers according to any of claims 1-8; two penetrating mounting holes (502) are formed in the adapter piece (5), the anti-corrosion sleeves (3) of the armored thermometer are respectively fixed in the two mounting holes (502), and the thermometer lead (102) of the armored thermometer passes through the mounting holes (502) to be connected with a temperature display; one end of a fixing piece (4) of the armored thermometer, which is close to the heat conduction area (7), is connected with a first plug (6), the two first plugs (6) are respectively connected with a temperature mechanism to be detected, and the temperature mechanism to be detected is a first-stage cold head and a second-stage cold head of a low-temperature pump.
10. The cryopump of claim 9, wherein the adapter is a flange, a second plug (501) is fixedly installed in the middle of the flange, and two mounting holes (502) are formed in the second plug (501); the adapter (5) is used for connecting an interface on the cryopump with a vacuum electric connector, the thermometer lead (102) is welded on the vacuum electric connector, and the vacuum electric connector is connected with the temperature display.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320101903.3U CN219495481U (en) | 2023-02-02 | 2023-02-02 | Armored thermometer for cryogenic pump and cryogenic pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320101903.3U CN219495481U (en) | 2023-02-02 | 2023-02-02 | Armored thermometer for cryogenic pump and cryogenic pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219495481U true CN219495481U (en) | 2023-08-08 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320101903.3U Active CN219495481U (en) | 2023-02-02 | 2023-02-02 | Armored thermometer for cryogenic pump and cryogenic pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219495481U (en) |
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2023
- 2023-02-02 CN CN202320101903.3U patent/CN219495481U/en active Active
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