CN117471633A - Adjusting mechanism of infrared laser optical mirror - Google Patents

Abstract

The invention discloses an adjusting mechanism of an infrared laser optical lens, which comprises a vacuum chamber, a translation adjusting unit, a rotation adjusting unit and a lens assembly, wherein the translation adjusting unit comprises a horizontal adjusting unit and a vertical adjusting unit, and the lens assembly, the rotation adjusting unit and the horizontal adjusting unit are all positioned in the vacuum chamber. In the invention, four-dimensional adjustment of the lens assembly can be completed through the arrangement of the translation adjusting unit and the rotation adjusting unit, the rotation assembly and the horizontal adjusting unit as well as the rotation assembly and the lens assembly are in rotary connection, and the rotation axis of the rotation assembly and the rotation axis of the lens assembly are crossed, namely, the two rotation axes of the angle casting and the glue rolling intersect at the center of the lens assembly, when in rotary adjustment, no additional translation is generated, the other rotation is not influenced, the center position of the lens surface is kept unchanged, the optical path length is kept unchanged, and the adjustment process is greatly simplified.

Description

Adjusting mechanism of infrared laser optical mirror

Technical Field

The invention relates to the technical field of optical equipment, in particular to an adjusting mechanism of an infrared laser optical mirror.

Background

When infrared light is transmitted in air, the infrared light is easy to be absorbed by the air, the transmission efficiency is low, and in general, the far-distance infrared light path is 10 ^-2 The optical path is transmitted in vacuum of the Pa order or in a dry nitrogen atmosphere, and thus each optical component of the optical path is installed in a vacuum vessel. The infrared light has longer wavelength and larger divergence in the propagation process for the purpose ofThe infrared laser transmission divergence is reduced, and a beam expansion and beam contraction transmission mode is generally adopted, namely, the beam diameter is properly enlarged by adopting a pair of off-axis parabolic mirrors at the front end of a light path, and the infrared light diameter is contracted to parallel light required by a test by arranging a pair of off-axis parabolic mirrors at the tail end of the light path; however, the transverse size of the light spot is larger after beam expansion, the model of the infrared optical lens is correspondingly larger, the large model can reach the order of 50 cm, and each optical element can realize automatic control remote adjustment in order to realize real-time on-line light path adjustment; for a planar mirror, two-angle driving is generally required to adjust the beam direction; the off-axis parabolic mirror group needs 1-3 translational adjustments besides two angular steering drives for adjusting the coincidence of the focuses of the two parabolic mirrors, wherein the translational adjustment means that X, Y, Z three translational motions are needed to align the center of the mirror with light, and then two rotational adjustments are used for adjusting the direction of the light.

The patent document with the prior patent publication number of CN215954841U discloses an optical lens adjusting mechanism suitable for ultra-high vacuum and strong magnetic stripe, which comprises a supporting plate, a radial rotary supporting seat and a traction piece, wherein a radial rotary shaft is rotationally connected to the radial rotary supporting seat, polar rotary supporting seats are arranged at two ends of the radial rotary shaft, and a plane lens is rotationally arranged on the polar rotary supporting seats; the traction piece is arranged on the plane mirror and the polar rotation support seat, the upper end of the traction piece extends upwards out of the antenna cavity, is connected with the driving mechanism arranged above the antenna cavity, and drives the plane mirror to rotate in the polar direction under the driving of the driving mechanism, or drives the polar rotation support seat to enable the plane mirror to rotate in the radial direction; the device can be suitable for the adjustment requirement of the optical mirror under the ultra-high vacuum and strong magnetic field environment, has the capability of keeping high vacuum, and can resist the influence of electromagnetic force caused by the change of the strong magnetic field environment on the steering structure of the plane mirror.

However, the translational adjustment can change the relative position between the rotating shaft and the center of the mirror surface, and the additional translational movement can affect the other rotation, so that the position of the center of the mirror surface is changed, and the optical path length is also changed, thereby greatly increasing the adjustment difficulty.

Disclosure of Invention

The technical problem to be solved by the invention is how to simplify the adjustment of the optical mirror.

The invention solves the technical problems by the following technical means: the utility model provides an infrared laser optical lens's adjustment mechanism, includes vacuum chamber, translation regulating element, rotation regulating element, light mirror subassembly, translation regulating element includes horizontal regulating element and vertical regulating element, light mirror subassembly, rotation regulating element, horizontal regulating element all are located the vacuum chamber, vertical regulating element locates the vacuum chamber, and its output is connected with horizontal regulating element transmission, rotation regulating element fixed connection is at horizontal regulating element's output, rotation regulating element includes the rotating assembly, the rotating assembly rotates with horizontal regulating element to be connected, the rotating assembly rotates with light mirror subassembly to be connected, and the rotation axis of rotating assembly is the cross with the rotation axis of light mirror subassembly, light mirror subassembly minor face and long limit's central line coincide with the rotation axis of rotating assembly and light mirror subassembly's rotation axis respectively, all be equipped with the range finder on the translation regulating element, the rotation regulating element.

Four-dimensional adjustment of the lens assembly can be completed through the arrangement of the translation adjusting unit and the rotation adjusting unit, the rotation assembly and the horizontal adjusting unit are rotationally connected with the rotation assembly and the lens assembly, and the rotation axis of the rotation assembly and the rotation axis of the lens assembly are crossed, so that the two rotation axes of the angle casting and the glue rolling are intersected at the center of the lens assembly, when the lens assembly is rotationally adjusted, additional translation is not generated, the other rotation is not influenced, the center position of the lens is unchanged, the optical path length is unchanged, and the adjusting process is greatly simplified.

As the preferable technical scheme, the rotating assembly comprises a rotating frame, a lower mirror seat support and a first adapting support, wherein the lower mirror seat support is fixedly connected to the top of the output end of the horizontal adjusting unit, the rotating frame is rotationally connected to the top of the lower mirror seat support, the lower mirror seat support is further connected with a roll angle linear driver through the first adapting support, the output end of the roll angle linear driver is in transmission connection with the rotating frame, and the rotating frame can be driven to rotate by taking the long-side central line of the rotating frame as a rotating shaft.

As the preferable technical scheme, the light mirror subassembly includes infrared light mirror, light mirror seat, support, light mirror seat and rotating frame rotate to be connected, light mirror seat one end fixedly connected with infrared light mirror, the other end rigid coupling has the support, the support links to each other with rotating frame through throwing angle linear drive, throw angle linear drive's output and rotate the subassembly transmission and be connected, and can drive light mirror seat and use its minor face central line to rotate as the pivot.

As the preferable technical scheme, the vacuum chamber comprises an upper flange, a lower flange, a vacuum chamber wall and a light path outlet, the vacuum chamber wall is T-shaped, the top and the bottom of a vertical section of the vacuum chamber wall are respectively fixedly connected with the upper flange and the lower flange, and the light path outlet is formed in a horizontal section of the vacuum chamber wall.

As the preferable technical scheme, vertical adjusting unit includes vertical drive assembly, vertical drive assembly includes roof, bottom plate, vertical platform, vertical driving motor, vertical platform fixed connection is in the roof bottom, vertical platform's output is connected with the bottom plate, the bottom plate passes through the vertical stand and links to each other with the horizontal adjusting unit, the roof is fixed in the vacuum chamber bottom, just the vertical stand runs through the roof, the one end package that vertical stand is located the vacuum chamber outside has the bellows.

As the preferable technical scheme, the horizontal adjusting unit comprises a horizontal driving assembly, the horizontal driving assembly comprises a horizontal top plate, a horizontal bottom plate and a horizontal driving motor, the horizontal top plate is slidably connected to the top of the horizontal bottom plate, one end of the horizontal bottom plate is fixed with the horizontal driving motor, and the output end of the horizontal driving motor is in transmission connection with the horizontal top plate and drives the horizontal top plate to move relative to the horizontal bottom plate.

As the preferable technical scheme, roll angle linear actuator includes roll angle step motor, travel switch driving lever, head elasticity pin, adaptation head, motor adaptation support, afterbody elasticity pin, first adaptation support rotates with motor adaptation support through afterbody elasticity pin and is connected, motor adaptation support one end fixedly connected with roll angle step motor, roll angle step motor's output transmission is connected with the adaptation head, be equipped with head elasticity pin on the adaptation head, be fixed with the second adaptation support on the rotating frame, the second adaptation support rotates with head elasticity pin to be connected, the one end that the motor adaptation support deviates from roll angle step motor has the third travel switch through third travel switch seat rigid coupling, be equipped with the third travel switch driving lever with third travel switch looks adaptation on the adaptation head.

As the preferable technical scheme, the both sides of the rotating frame are fixedly connected with second elastic pins, the second elastic pins are in running fit with the lower support of the mirror base, a fourth grating ruler is arranged on the lower support of the mirror base, and a fourth grating ruler plectrum matched with the fourth grating ruler is arranged on the rotating frame.

As the preferable technical scheme, the light mirror seat is rotationally connected with the rotating frame through two first elastic pins, a first grating ruler is fixedly connected on the outer wall of the light mirror seat, and a first grating ruler pulling sheet matched with the first grating ruler is arranged on the rotating frame.

As an optimal technical scheme, the infrared light mirror is obliquely arranged.

The invention has the advantages that:

(1) In the invention, four-dimensional adjustment of the lens assembly can be completed through the arrangement of the translation adjusting unit and the rotation adjusting unit, the rotation assembly and the horizontal adjusting unit as well as the rotation assembly and the lens assembly are in rotary connection, and the rotation axis of the rotation assembly and the rotation axis of the lens assembly are crossed, namely, the two rotation axes of the angle casting and the glue rolling intersect at the center of the lens assembly, when in rotary adjustment, no additional translation is generated, the other rotation is not influenced, the center position of the lens surface is kept unchanged, the optical path length is kept unchanged, and the adjustment process is greatly simplified.

(2) In the invention, the driving parts of the roll angle linear driver and the throw angle linear driver are arranged as the stepping linear motor, so that the compact adjustment of the lens assembly can be realized, the structure can be simplified, and the transmission return clearance of the driving system can be eliminated by utilizing the rebound force through arranging the elastic pins at all rotation positions and pre-twisting the elastic pins during installation.

Drawings

FIG. 1 is a schematic view of the internal structure of a vacuum chamber according to an embodiment of the present invention;

FIG. 2 is a schematic view of a vacuum chamber according to an embodiment of the present invention;

fig. 3 is a schematic top view of a mirror assembly according to an embodiment of the present invention;

fig. 4 is a schematic bottom view of a mirror assembly according to an embodiment of the present invention;

FIG. 5 is a schematic diagram of a horizontal driving assembly according to an embodiment of the present invention;

FIG. 6 is a schematic view of a vertical drive assembly according to an embodiment of the present invention;

fig. 7 is a schematic structural diagram of a projection angle linear driver according to an embodiment of the present invention;

FIG. 8 is a schematic diagram of a roll angle linear driver according to an embodiment of the present invention;

FIG. 9 is a schematic side view of a rotating assembly according to an embodiment of the present invention;

FIG. 10 is a schematic rear view of a rotating assembly according to an embodiment of the present invention;

FIG. 11 is a schematic top view of a rotating assembly according to an embodiment of the present invention;

fig. 12 is a schematic view of a rectangular frame structure according to an embodiment of the present invention;

FIG. 13 is a schematic view of a rotation angle according to an embodiment of the present invention;

FIG. 14 is a graph of experimental data provided by an embodiment of the present invention;

FIG. 15 is a schematic diagram of an absolute error curve provided by an embodiment of the present invention;

reference numerals:

1. a vacuum chamber; 101. an upper flange; 102. a lower flange; 103. a vacuum chamber wall; 104. an observation window; 105. an optical path outlet;

2. a light mirror assembly; 201. an infrared light mirror; 202. a light mirror base; 203. a first elastic pin; 204. pressing strips; 205. a set screw; 206. a bracket; 207. a first grating scale;

3. a horizontal drive assembly; 301. a horizontal bottom plate; 302. a horizontal top plate; 303. a cross ball linear guide; 304. a first travel switch; 305. a first travel switch lever; 306. a horizontal driving motor; 307. a gap eliminating nut; 308. an adapter; 309. a second grating scale; 310. a grating ruler fixing seat; 311. a second grating ruler pulling piece; 312. a motor adapter plate;

4. a vertical drive assembly; 401. a top plate; 402. a bottom plate; 403. a vertical platform; 404. a bellows; 405. a third grating scale; 406. a vertical column; 407. a vertical driving motor; 408. an electrode flange; 409. a target hole;

5. a throw angle linear driver; 501. an angle-casting stepping motor; 502. a second travel switch; 503. a second travel switch deflector rod; 504. the head rotates an elastic pin; 505. an adapter; 506. a second travel switch seat; 507. the motor is matched with the bracket; 508. a tail elastic pin;

6. a roll angle linear driver; 601. a roll angle stepper motor; 602. a third travel switch; 603. a third travel switch deflector rod; 604. a head elastic pin; 605. an adapter; 606. a third travel switch seat; 607. the motor is matched with the bracket; 608. a tail elastic pin;

7. a rotating assembly; 701. a rotating frame; 702. a mirror base lower support; 703. a second elastic pin; 704. a first adapter bracket; 705. a fourth grating ruler; 706. a fourth grating ruler pulling piece; 707. a first grating ruler pulling piece; 708. an adapter; 709. a second adapter stent.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions in the embodiments of the present invention will be clearly and completely described in the following in conjunction with the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

Referring to fig. 1, an adjusting mechanism of an infrared laser optical lens comprises a vacuum chamber 1, a translation adjusting unit, a rotation adjusting unit and a light mirror assembly 2, wherein the translation adjusting unit comprises a horizontal adjusting unit and a vertical adjusting unit, the light mirror assembly 2, the rotation adjusting unit and the horizontal adjusting unit are all positioned in the vacuum chamber 1, the vertical adjusting unit is arranged outside the vacuum chamber 1, the output end of the vertical adjusting unit is in transmission connection with the horizontal adjusting unit, the rotation adjusting unit is fixedly connected with the output end of the horizontal adjusting unit, the rotation adjusting unit comprises a rotation assembly 7, the rotation assembly 7 is in rotation connection with the horizontal adjusting unit, the rotation assembly 7 is in rotation connection with the light mirror assembly 2, the rotation axis of the rotation assembly 7 is crossed with the rotation axis of the light mirror assembly 2, the central lines of the short side and the long side of the light mirror assembly 2 are respectively overlapped with the rotation axis of the rotation assembly 7 and the rotation axis of the light mirror assembly 2, and distance measuring instruments are arranged on the adjustment unit and the rotation adjusting unit;

in this embodiment, the distancer can be the grating chi, can select for use sea de han grating chi, travel switch can select for use ohm dragon travel switch, the horizontal adjustment unit includes horizontal drive assembly 3, vertical adjustment unit includes vertical drive assembly 4, the mirror subassembly 2 is connected with rotating assembly 7 through throwing angle linear drive 5, throw angle linear drive 5 can drive mirror subassembly 2 and use the minor face central line of mirror subassembly 2 to rotate for rotating assembly 7 as the pivot, rotating assembly 7 can realize rotating for horizontal adjustment unit, the rotation junction all is provided with elastic pin, through pretwisting elastic pin when the installation, can utilize resilience force to eliminate driving system transmission return clearance.

Referring to fig. 3, the long side center line of the mirror assembly 2 is a Pitch axis, the short side center line is a Roll axis, the driving motors in this embodiment are all linear stepper motors, the motion resolution is 2 μm/step, and the resolution of 0.2 μm/step can be achieved by subdivision driving.

Referring to fig. 2, a vacuum chamber 1 includes an upper flange 101, a lower flange 102, a vacuum chamber wall 103, an observation window 104, and an optical path outlet 105, the vacuum chamber wall 103 is T-shaped, openings are respectively provided at the top and bottom of a vertical section of the vacuum chamber wall 103, the opening at the top is used for injecting light, the opening at the bottom is used for connecting a vertical driving component 4, the opening at the horizontal section is used for guaranteeing light to be injected, the top and bottom of the vertical section of the vacuum chamber wall 103 are fixedly connected with the upper flange 101 and the lower flange 102 respectively, the optical path outlet 105 is provided on the horizontal section of the vacuum chamber wall 103, the observation window 104 is further provided on the vacuum chamber wall 103, and a plurality of target holes 409 are provided on the lower flange 102 in the circumferential direction.

Referring to fig. 6, the vertical driving assembly 4 includes a top plate 401, a bottom plate 402, a vertical platform 403, a bellows 404, a third grating scale 405, a vertical column 406, a vertical driving motor 407, an electrode flange 408, and a target hole 409, where the vertical platform 403 is fixedly connected to the bottom of the top plate 401, and an output end of the vertical platform 403 is connected to the bottom plate 402, where the vertical platform 403 is a commercial vertical platform, and a vertical platform with model ZA10A-W202 of KOHZU corporation of japan may be selected, but is not limited thereto; the vertical driving motor 407 is a driving piece of the vertical platform 403, a butt flange and a sealing ring which are connected with the lower flange 102 are fixed on the top plate 401, the top plate 401 is fixed with the vacuum chamber 1 in a sealing way, the bottom plate 402 is connected with the horizontal adjusting unit (namely fixedly connected with the horizontal bottom plate 301) through four vertical columns 406, the vertical columns 406 penetrate through the top plate 401, one ends of the vertical columns 406, which are positioned outside the vacuum chamber 1, are wrapped with corrugated pipes 404 for guaranteeing the tightness of the whole vacuum chamber 1, four target holes 409 are formed in the circumference of the top plate 401, two electrode flanges 408 are fixedly connected to the bottom of the top plate 401, a third grating scale 405 is fixedly connected to the outer side of the bottom plate 402 and used for measuring the distance between the bottom plate 402 and the top plate 401, the vertical driving motor 407 drives the output end of the vertical platform 403 to move vertically, so that the bottom plate 402 is driven to move vertically, and the vertical adjusting unit is realized.

Referring to fig. 5, the horizontal driving assembly 3 includes a horizontal top plate 302, a horizontal bottom plate 301, a cross ball linear guide 303, a first travel switch 304, a first travel switch deflector rod 305, a horizontal driving motor 306, a backlash nut 307, a first adapting head 308, a second grating scale 309, a grating scale fixing seat 310, a grating scale pulling sheet 311, and a motor adapting plate 312, the horizontal top plate 302 is slidably connected to the top of the horizontal bottom plate 301 through the cross ball linear guide 303, one end of the horizontal bottom plate 301 is fixed with the horizontal driving motor 306, the output end of the horizontal driving motor 306 is in transmission connection with the horizontal top plate 302 and drives the horizontal top plate 302 to move relative to the horizontal bottom plate 301, one side of the horizontal top plate 302 is fixedly connected with the first travel switch deflector rod 304, the top of the horizontal bottom plate 301 is sequentially fixedly connected with the first travel switch deflector rod 305 adapted to the first travel switch 304, the other side of the horizontal top plate 302 is fixedly connected with a second grating scale pulling sheet 311, the other side of the top plate 301 is fixedly connected with the second grating scale pulling sheet 309 adapted to the second grating scale 311, the second grating scale 309 is fixedly connected to the top of the horizontal bottom plate 301 through the grating fixing seat 310, when the top plate 301 moves with the horizontal bottom plate 301, the top plate 302 reaches the set motion amount of the first travel switch 305, and reaches the corresponding motion amount, the first travel switch controller rod 306 is set to the actual motion of the first travel switch is triggered by the first travel switch controller, and the first travel switch controller rod is triggered by the actual motion system, and the actual motion of the closed-loop system is triggered by the first travel switch and reaches the actual motion control system, and the first travel control system is triggered by the trigger the position of the first travel switch 306, and reaches the corresponding position of the corresponding travel control stop position of the control stop of the control system (s 3;

the horizontal bottom plate 301 is fixed with the horizontal driving motor 306 through a motor adapting plate 312, the horizontal driving motor 306 is provided with a clearance eliminating nut 307, the clearance eliminating nut 307 is used for eliminating the return clearance of the driving screw pair, the output end of the horizontal driving motor 306 is fixedly connected with a first adapting head 308, and the first adapting head 308 is fixedly connected with the horizontal top plate 302 through a bolt.

Referring to fig. 3 and 4, the optical lens assembly 2 includes an infrared optical lens 201, an optical lens seat 202, a first elastic pin 203, a pressing strip 204, a set screw 205, a support 206, and a first grating scale 207, where the optical lens seat 202 is rotationally connected with a rotating frame 701, in this embodiment, the infrared optical lens 201 is obliquely disposed, the optical lens seat 202 is rectangular, one end of the optical lens seat 202 is fixedly connected with the pressing strip 204 through a plurality of set screws 205 and the infrared optical lens 201, the pressing strip 204 is located on a connection surface of the optical lens seat 202 and the infrared optical lens 201, the other end is fixedly connected with the support 206, the support 206 is connected with the rotating frame 701 through a projection angle linear driver 5, an output end of the projection angle linear driver 5 is in transmission connection with the rotating assembly 7, and is capable of driving the optical lens seat 202 to rotate with a short side center line thereof as a rotation axis, the optical lens seat 202 is rotationally connected with the rotating frame 701 through two first elastic pins 203, a first grating scale 707 is fixedly connected on an outer wall of the optical lens seat 202, and the rotating frame 701 is provided with a first grating scale 207 adapted to the first grating scale 707, and the first grating scale 207 is used for reading an axial relative motion and dividing a radius (length from a contact point to a first movement axis to a first elastic pin 203).

Referring to fig. 9 and 10, the rotating assembly 7 includes a rotating frame 701, an under-lens support 702, a second elastic pin 703, a first adapting bracket 704, a fourth grating scale 705, a fourth grating scale pulling sheet 706, a first grating scale pulling sheet 707, an adapting member 708, and a second adapting bracket 709, where the first adapting bracket 704 is fixedly connected with the under-lens support 702, the under-lens support 702 is fixedly connected with the top of the horizontal top plate 302, the rotating frame 701 is rotatably connected with the top of the under-lens support 702, two sides of the rotating frame 701 are fixedly connected with the second elastic pin 703, the second elastic pin 703 is rotatably matched with the under-lens support 702, the under-lens support 702 is provided with a fourth grating scale pulling sheet 706 matched with the fourth grating scale 705, the under-lens support 702 is further connected with a roll angle linear driver 6 through the first adapting bracket 704, and the output end of the roll angle linear driver 6 is in transmission connection with the rotating frame, and is capable of driving the rotating frame 701 to rotate with the long side center line of the roll angle linear driver as the rotating shaft, and the output end of the roll angle linear driver 6 is connected with the second bracket 709.

Referring to fig. 7 and 8, the roll angle linear driver 6 includes a roll angle stepping motor 601, a travel switch 602, a travel switch shift lever 603, a head elastic pin 604, an adapter 605, a motor adapter bracket 607, and a tail elastic pin 608, the first adapter bracket 704 is rotationally connected with the motor adapter bracket 607 through the tail elastic pin 608, one end of the motor adapter bracket 607 is fixedly connected with the roll angle stepping motor 601, the output end of the roll angle stepping motor 601 is in transmission connection with the adapter 605, the adapter 605 is provided with the head elastic pin 604, a rotating frame 701 is fixedly provided with a second adapter bracket 709, the second adapter bracket 709 is rotationally connected with the head elastic pin 604, one end of the motor adapter bracket 607 deviating from the roll angle stepping motor 601 is fixedly connected with a third travel switch 602 through a third travel switch seat 606, the adapter head 605 is provided with a third travel switch shift lever 603 matched with the third travel switch 602, and the roll angle stepping motor 601 is a linear stepping motor in the prior art, and can drive the adapter head 605 to move along the direction, thereby driving the whole rotating frame 701 to rotate around the lower support 702.

It should be noted that, the angle-projection linear driver 5 and the roll angle linear driver 6 have the same structure, referring to fig. 10, the difference is that the angle-projection linear driver 5 is used for driving the optical lens assembly 2 to rotate relative to the rotating frame 701, wherein the motor adapting bracket of the angle-projection linear driver 5 is rotationally connected with the bracket 206 through the tail elastic pin, while the head rotating elastic pin at the end of the adapting head of the angle-projection linear driver 5 is rotationally connected with the adapting piece 708, the two ends of the elastic pin can rotate relatively with the fastened components and have a certain resilience force, and the rigid fastening of the pin and the mounting hole can avoid the uncertainty of force and gap caused by the traditional rotary fastening; the spring back force may eliminate the return clearance of the drive system.

In this embodiment, a precise nut is integrated in the linear motor rotor, the precise screw is disposed in the center, the motor nose support prohibits the center screw from rotating, and when the nut rotates, the screw moves linearly in the axial direction and is guided with the motor nose. The motor tail is provided with a gap eliminating nut, compared with a common linear driver, the structure is simpler, the arc guide rail is installed in general rotary motion, the rotary driving is formed by the rotation of a motor shaft through speed reduction, and the device obtains rotary motion by using a driving triangle and linear driving. Referring to fig. 11, 12, 13, a, B, C, the three vertices represent the center point of the elastic pin; the AC side represents the rack; AB represents the mirror to be driven; the BC side represents a linear actuator, each side being capable of a certain rotation about the vertex due to the nature of the elastic pins, the AB side being capable of rotation when the length of the linear actuator changes, i.e. when the BC side length changes. In the figure, when the BC edge is shortened to B 'C, the AB edge is turned to AB', and the turning angle is theta

θ＝BB’/AB≈(BC-B’C)/AB

When the angle calculation change chord length BB 'is represented by the linear actuator length change amount (BC-B' C), a certain error occurs. When the rotation angle is within 1.5 degrees, the absolute error is smaller than 2.2 mu rad, and the relative error is smaller than 0.008 percent. In general, the precise adjustment range of the rotation of the infrared light mirror is between-1.5 degrees and +1.5 degrees, the minimum rotation step size is required to be 10 mu rad, and the error of 2.2 mu rad is far smaller than the minimum adjustment step size and can be ignored. When the adjusting angle is increased, the absolute error is increased, but the relative error percentage is smaller, for example, when the adjusting angle is adjusted from 0 degree to-5 degrees, the absolute error is 74.6 mu rad, and the relative error is 0.085 percent, and the invention can also be used as a combination of initial adjustment and fine adjustment.

In the embodiment, the whole device is connected to a vacuum flange, so that the debugging and the installation are convenient; the whole device is provided with 4 degrees of freedom, but can be flexibly applied in use. For example, two straight-line adjustment at the bottom can be omitted for a plane mirror, only two rotation adjustment are reserved, the mechanism can be simplified, the cost can be saved, and for an off-axis parabolic mirror group, 4-dimensional drive can be reserved for one parabolic mirror, and 3-dimensional drive (vertical drive is removed) can be reserved for the other parabolic mirror, so that the focus coincidence of the two parabolic mirrors can be sufficiently adjusted; the device is described as having a mirror surface obliquely upward, but can be used at any angle in practical applications. Not limited thereto.

The above embodiments are only for illustrating the technical solution of the present invention, and are not limiting; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims (10)

1. The utility model provides an adjustment mechanism of infrared laser optical mirror, its characterized in that includes vacuum chamber (1), translation regulating unit, rotation regulating unit, mirror subassembly (2), translation regulating unit includes horizontal regulating unit and vertical regulating unit, mirror subassembly (2), rotation regulating unit, horizontal regulating unit all are located vacuum chamber (1), vertical regulating unit locates vacuum chamber (1) outward, and its output and horizontal regulating unit transmission are connected, rotation regulating unit fixed connection is at the output of horizontal regulating unit, rotation regulating unit includes rotation subassembly (7), rotation subassembly (7) are connected with horizontal regulating unit rotation, rotation subassembly (7) are connected with mirror subassembly (2) rotation, and the rotation axis of rotation subassembly (7) are the cross with the rotation axis of mirror subassembly (2), the central line of mirror subassembly (2) minor face and long limit coincides with the rotation axis of rotation subassembly (7) and mirror subassembly (2) rotation axis respectively, all be equipped with the range finder on rotation regulating unit, the rotation regulating unit.

2. The adjusting mechanism of an infrared laser optical mirror according to claim 1, wherein the rotating assembly (7) comprises a rotating frame (701), a lower mirror base support (702) and a first adapting support (704), the lower mirror base support (702) is fixedly connected to the top of the output end of the horizontal adjusting unit, the rotating frame (701) is rotatably connected to the top of the lower mirror base support (702), the lower mirror base support (702) is further connected with a roll angle linear driver (6) through the first adapting support (704), and the output end of the roll angle linear driver (6) is in transmission connection with the rotating frame (701) and can drive the rotating frame (701) to rotate by taking the long-side central line of the rotating frame as a rotating shaft.

3. The adjusting mechanism of the infrared laser optical lens according to claim 2, wherein the optical lens assembly (2) comprises an infrared optical lens (201), an optical lens seat (202) and a support (206), the optical lens seat (202) is rotationally connected with a rotating frame (701), one end of the optical lens seat (202) is fixedly connected with the infrared optical lens (201), the other end of the optical lens seat is fixedly connected with the support (206), the support (206) is connected with the rotating frame (701) through an angle-throwing linear driver (5), and the output end of the angle-throwing linear driver (5) is in transmission connection with the rotating assembly (7) and can drive the optical lens seat (202) to rotate by taking a central line of a short side as a rotating shaft.

4. The adjusting mechanism of the infrared laser optical mirror according to claim 1, wherein the vacuum chamber (1) comprises an upper flange (101), a lower flange (102), a vacuum chamber wall (103) and an optical path outlet (105), the vacuum chamber wall (103) is of a T shape, the top and the bottom of a vertical section of the vacuum chamber wall (103) are fixedly connected with the upper flange (101) and the lower flange (102) respectively, and the optical path outlet (105) is formed in a horizontal section of the vacuum chamber wall (103).

5. The adjusting mechanism of an infrared laser optical mirror according to claim 1, wherein the vertical adjusting unit comprises a vertical driving assembly (4), the vertical driving assembly (4) comprises a top plate (401), a bottom plate (402), a vertical platform (403) and a vertical driving motor (407), the vertical platform (403) is fixedly connected to the bottom of the top plate (401), the output end of the vertical platform (403) is connected with the bottom plate (402), the bottom plate (402) is connected with the horizontal adjusting unit through a vertical column (406), the top plate (401) is fixed to the bottom of the vacuum chamber (1), the vertical column (406) penetrates through the top plate (401), and a corrugated pipe (404) is wrapped at one end of the vertical column (406) located outside the vacuum chamber (1).

6. The adjusting mechanism of an infrared laser optical mirror according to claim 1, wherein the horizontal adjusting unit comprises a horizontal driving assembly (3), the horizontal driving assembly (3) comprises a horizontal top plate (302), a horizontal bottom plate (301) and a horizontal driving motor (306), the horizontal top plate (302) is slidably connected to the top of the horizontal bottom plate (301), one end of the horizontal bottom plate (301) is fixedly provided with the horizontal driving motor (306), and an output end of the horizontal driving motor (306) is in transmission connection with the horizontal top plate (302) and drives the horizontal top plate (302) to move relative to the horizontal bottom plate (301).

7. The adjusting mechanism of an infrared laser optical mirror according to claim 2, wherein the roll angle linear driver (6) comprises a roll angle stepping motor (601), a travel switch (602), a travel switch deflector rod (603), a head elastic pin (604), an adapter (605), a motor adapter bracket (607) and a tail elastic pin (608), the first adapter bracket (704) is rotationally connected with the motor adapter bracket (607) through the tail elastic pin (608), one end of the motor adapter bracket (607) is fixedly connected with the roll angle stepping motor (601), an output end of the roll angle stepping motor (601) is in transmission connection with the adapter (605), the adapter (605) is provided with the head elastic pin (604), a second adapter bracket (709) is fixed on the rotating frame (701), one end of the motor adapter bracket (709) deviating from the roll angle stepping motor (601) is rotationally connected with the head elastic pin (604), the end of the motor adapter bracket (704) is fixedly connected with a third travel switch (607) through a third travel switch seat (606), and the adapter (605) is provided with a third travel switch (602) on the rotating frame (701).

8. The adjusting mechanism of the infrared laser optical mirror according to claim 2, wherein two sides of the rotating frame (701) are fixedly connected with second elastic pins (703), the second elastic pins (703) are in running fit with a lower mirror base support (702), a fourth grating ruler (705) is arranged on the lower mirror base support (702), and a fourth grating ruler pulling piece (706) matched with the fourth grating ruler (705) is arranged on the rotating frame (701).

9. An adjusting mechanism of an infrared laser optical lens according to claim 3, wherein the optical lens seat (202) is rotationally connected with the rotating frame (701) through two first elastic pins (203), a first grating ruler (207) is fixedly connected on the outer wall of the optical lens seat (202), and a first grating ruler pulling piece (707) matched with the first grating ruler (207) is arranged on the rotating frame (701).

10. An adjustment mechanism for an infrared laser optic according to claim 1, characterized in that the infrared mirror (201) is arranged obliquely.