CN117470921B - Signal acquisition method and system of MEMS gas sensor array - Google Patents
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Abstract
The invention discloses a signal acquisition method and a system of an MEMS gas sensor array, wherein the method acquires first environmental temperature and humidity data and second environmental temperature and humidity data in real time; adjusting the preset heating voltage based on the preset heating model so that the heating temperature reaches the preset heating temperature; when the heating temperature is in balance, acquiring signal voltage of a sensor to be detected in the gas sensor array to obtain first acquired signal voltage data; and compensating the first acquired signal voltage data based on a preset compensation model to obtain compensation signal voltage data. The invention can make the heating temperature at a stable temperature, so that the sensor array reaches an optimal working state; the device can also work at a fixed heating temperature to achieve an optimal working state; in order to enable the finally collected signal voltage to be more accurate, the first collected signal voltage data are compensated to obtain compensated signal voltage data, and the sensor to be tested only expresses response to the test gas.
Description
Technical Field
The invention relates to the technical field of sensor signal sampling, in particular to a signal acquisition method and system of an MEMS gas sensor array.
Background
Due to the increasing demands on the quality of ambient air, there is an increasing demand for gas detection. Conventional gas detection is basically performed by a single sensor. Because only one gas is not present in each environment, and the detection precision and detection range of a single gas sensor are not as good as those of a sensor array, the sensor array is mostly used for detecting complex gases in practical application.
One of the commonly used gas sensitive materials for gas sensor arrays is a metal oxide. Detection of gases with metal oxides requires the use of metal oxide materialsHeating to 100 o C-400 o C. Heaters generally consist of a heating resistor whose temperature is related to the heating voltage applied across it, the specific relationship being determined by the heating resistor material composition and the temperature range.
In the existing gas sensor array detection system based on metal oxide, two sets of temperature and humidity sensors are generally arranged, one set is located on a main board and used for monitoring the ambient temperature and the ambient humidity, and the other set is located on a sensor array and used for monitoring the temperature and the humidity of the sensor array. The temperature of the sensor array may affect the heating voltage, and the humidity, ambient humidity, and ambient temperature on the sensor array may affect the signal voltage to be collected later.
The temperature of the sensor array and the heating voltage are in a positive correlation nonlinear relation, and as the heating voltage is larger, the slope of a curve obtained by the positive correlation nonlinear relation is smaller and smaller, and finally the balance is trended, namely, the influence of the temperature of the sensor array on the heating voltage is larger under the condition that the heating voltage is smaller.
The average value of the ambient humidity and the sensor array humidity has a negative correlation nonlinear relation with the signal voltage. The problems existing at present are: the sensor array is not always in a stable temperature and humidity environment and is not always in an optimal working state; the sensor array needs to reach the optimal working state at a fixed heating temperature determined by the heating voltage and the temperature (namely, the second ambient temperature data) on the sensor array, but cannot be completely controlled at the fixed heating temperature at present; in addition, since the first environmental temperature and humidity data is variable, if it is required to accurately respond to only the test gas, it is necessary to determine the first environmental temperature and humidity data within a specific range, but if the first environmental temperature and humidity data is not within the range, the signal voltage finally output by the sensor array needs to be compensated according to the environmental temperature and humidity, so that the sensor array only expresses the response to the test gas, but at present, the response to the test gas by the sensor array is not very accurate.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides a signal acquisition method and a system of an MEMS gas sensor array.
Aiming at the technical problems, the invention is solved by the following technical scheme:
a signal acquisition method of a MEMS gas sensor array, comprising the steps of:
acquiring first environment temperature and humidity data and second environment temperature and humidity data in real time, wherein the second environment temperature and humidity data comprise second temperature data and second humidity data;
adjusting a preset heating voltage based on a preset heating model to enable the heating temperature to reach the preset heating temperature, wherein the preset heating model is constructed based on second environment temperature data and the heating voltage;
when the heating temperature is in balance, acquiring signal voltage of a sensor to be detected in the gas sensor array to obtain first acquired signal voltage data;
and compensating the first acquired signal voltage data based on a preset compensation model to obtain the compensation signal voltage data, wherein the compensation model is constructed based on the first environment temperature and humidity data, the second environment humidity data and the first acquired signal voltage data.
As an embodiment, the preset heating model is represented as follows:
wherein,and->Is a fixed constant->Indicating the heating temperature inside the sensor array, < >>J represents the number of second ambient temperature data, j represents the number of second temperature and humidity sensors, +.>Is a heating voltage.
As an implementation manner, the adjusting the preset heating voltage based on the preset heating model so that the heating temperature reaches the preset heating temperature includes the following steps:
based on the second environmental temperature and humidity data, obtaining an average value of the second environmental temperature data, and based on a preset heating model, obtaining real-time heating temperature;
and comparing the real-time heating temperature with the preset heating temperature, and if the real-time heating temperature reaches the preset heating temperature, adjusting the current heating voltage until the heating temperature reaches the preset heating temperature, so that the sensor array is in an optimal working state.
As an implementation manner, the collecting the signal voltage of the sensor to be measured in the gas sensor array includes the following steps:
acquiring the number of a current sensor to be detected and sampling parameters of the current sensor to be detected;
if the second environmental temperature and humidity threshold value is equal to the current second environmental temperature and humidity data;
setting an initial parameter and sampling time based on sampling parameters of a current sensor to be detected, wherein the sampling parameters comprise preset heating voltage and sampling time interval, and the initial parameter comprises initial heating voltage and initial sampling time;
and when the sampling time is reached, collecting the signal voltage output by the current sensor channel to be detected to obtain first sampling signal voltage data.
As an implementation manner, the compensating the first collected signal voltage data based on the preset compensation model to obtain compensated signal voltage data includes the following steps:
and constructing a compensation model based on the first environmental temperature and humidity data and the second environmental humidity data, and further obtaining a dynamic change value of the signal voltage data, wherein the compensation model is expressed as follows:
wherein,dynamic change value representing signal voltage data, +.>Representing i first ambient humidity data, < + >>Representing j second ambient humidity data, +.>And->Expressed as a fixed constant>The first environmental temperature data are represented, i represents the number of first temperature and humidity sensors, and j represents the number of second temperature and humidity sensors;
and compensating the first collected signal voltage data based on the dynamic change value of the signal voltage data to obtain compensated signal voltage data, wherein the compensated signal voltage data is expressed as follows:
wherein,representing the compensated signal voltage data,/v>Dynamic change value representing signal voltage data, +.>Representing first acquired signal voltage data.
As an implementation manner, the first environmental temperature and humidity data includes first environmental temperature data and first environmental humidity data, where the first environmental temperature data is an average value of at least one first environmental temperature data, and the first environmental humidity data is an average value of at least one first environmental humidity data;
the second ambient temperature data is an average of at least one second ambient temperature data, and the second ambient humidity data is an average of at least one second ambient humidity data.
As an embodiment, the method further comprises the steps of:
the sensors in the sensor array are divided into at least two groups based on the identification status of each sensor and the optimal sequence for gas identification, each group comprising at least two sensors, and each sensor in each group not operating simultaneously.
As an embodiment, the method further comprises the steps of:
setting a working time threshold for each sensor based on the identification conditions of the different sensors in each group and the optimal sequence of gas identification;
when the working time of a certain sensor reaches the working time threshold, the sensor is switched to other sensors in the same group, and the signal voltages of the other sensors are collected.
A signal acquisition system of MEMS gas sensor array comprises a data acquisition module, a first adjustment module, a data acquisition module and a data compensation module;
the data acquisition module is used for acquiring first environment temperature and humidity data and second environment temperature and humidity data in real time, wherein the second environment temperature and humidity data comprises second temperature data and second humidity data;
the first adjusting module adjusts preset heating voltage based on a preset heating model to enable the heating temperature to reach the preset heating temperature, wherein the preset heating model is constructed based on second environment temperature data and the heating voltage;
the data acquisition module acquires signal voltage of a sensor to be detected in the gas sensor array when the heating temperature is in balance, so as to obtain first acquired signal voltage data;
the data compensation module compensates the first collected signal voltage data based on a preset compensation model to obtain the compensated signal voltage data, wherein the compensation model is constructed based on the first environment temperature and humidity data, the second environment humidity data and the first collected signal voltage data.
As an embodiment, the preset heating model is represented as follows:
wherein,and->Is a fixed constant->Indicating the heating temperature inside the sensor array, < >>J represents the number of second ambient temperature data, j represents the number of second temperature and humidity sensors, +.>Is a heating voltage.
As an embodiment, the first adjusting module is configured to:
based on the second environmental temperature and humidity data, obtaining an average value of the second environmental temperature data, and based on a preset heating model, obtaining real-time heating temperature;
and comparing the real-time heating temperature with the preset heating temperature, and if the real-time heating temperature reaches the preset heating temperature, adjusting the current heating voltage until the heating temperature reaches the preset heating temperature, so that the sensor array is in an optimal working state.
As an embodiment, the data compensation module is configured to:
and constructing a compensation model based on the first environmental temperature and humidity data and the second environmental humidity data, and further obtaining a dynamic change value of the signal voltage data, wherein the compensation model is expressed as follows:
wherein,dynamic change value representing signal voltage data, +.>Representing i first ambient humidity data, < + >>And->Expressed as a fixed constant>Representing first ambient temperature data,/o>J pieces of second environmental humidity data are represented, i represents the number of the first temperature and humidity sensors, and j represents the number of the second temperature and humidity sensors;
and compensating the first collected signal voltage data based on the dynamic change value of the signal voltage data to obtain compensated signal voltage data, wherein the compensated signal voltage data is expressed as follows:
wherein,representing the compensated signal voltage data,/v>Dynamic change value representing signal voltage data, +.>Representing first acquired signal voltage data.
A computer readable storage medium storing a computer program which when executed by a processor performs the method of:
acquiring first environment temperature and humidity data and second environment temperature and humidity data in real time, wherein the second environment temperature and humidity data comprise second temperature data and second humidity data;
adjusting a preset heating voltage based on a preset heating model to enable the heating temperature to reach the preset heating temperature, wherein the preset heating model is constructed based on second environment temperature data and the heating voltage;
when the heating temperature is in balance, acquiring signal voltage of a sensor to be detected in the gas sensor array to obtain first acquired signal voltage data;
and compensating the first acquired signal voltage data based on a preset compensation model to obtain the compensation signal voltage data, wherein the compensation model is constructed based on the first environment temperature and humidity data, the second environment humidity data and the first acquired signal voltage data.
A signal acquisition device of a MEMS gas sensor array comprising a memory, a processor and a computer program stored in the memory and running on the processor, the processor implementing a method as follows when executing the computer program:
acquiring first environment temperature and humidity data and second environment temperature and humidity data in real time, wherein the second environment temperature and humidity data comprise second temperature data and second humidity data;
adjusting a preset heating voltage based on a preset heating model to enable the heating temperature to reach the preset heating temperature, wherein the preset heating model is constructed based on second environment temperature data and the heating voltage;
when the heating temperature is in balance, acquiring signal voltage of a sensor to be detected in the gas sensor array to obtain first acquired signal voltage data;
and compensating the first acquired signal voltage data based on a preset compensation model to obtain the compensation signal voltage data, wherein the compensation model is constructed based on the first environment temperature and humidity data, the second environment humidity data and the first acquired signal voltage data.
The invention has the remarkable technical effects due to the adoption of the technical scheme:
the invention can make the heating temperature at a stable temperature, so that the sensor array reaches an optimal working state; in addition, the sensor can work at a fixed heating temperature to achieve an optimal working state; in order to enable the finally collected signal voltage to be more accurate, the first collected signal voltage data are compensated to obtain compensated signal voltage data, so that the sensor to be tested only expresses the response to the test gas, and the influence of the first environmental temperature and humidity data on the collected signal voltage data is reduced.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions of the prior art, the drawings which are used in the description of the embodiments or the prior art will be briefly described, it being obvious that the drawings in the description below are only some embodiments of the invention, and that other drawings can be obtained according to these drawings without inventive faculty for a person skilled in the art.
FIG. 1 is a schematic flow chart of the method of the present invention;
FIG. 2 is a schematic diagram of the system of the present invention;
FIG. 3 is a schematic representation of sensor response implemented based on the method of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the following examples, which are illustrative of the present invention and are not intended to limit the present invention thereto.
Example 1:
a signal acquisition method of a MEMS gas sensor array, as shown in fig. 1, comprises the following steps:
s100, acquiring first environment temperature and humidity data and second environment temperature and humidity data in real time, wherein the second environment temperature and humidity data comprise second temperature data and second humidity data;
s200, adjusting a preset heating voltage based on a preset heating model to enable the heating temperature to reach the preset heating temperature, wherein the preset heating model is constructed based on second environment temperature data and the heating voltage;
s300, when the heating temperature is in balance, acquiring signal voltage of a sensor to be detected in the gas sensor array to obtain first acquired signal voltage data;
and S400, compensating the first acquired signal voltage data based on a preset compensation model to obtain the compensation signal voltage data, wherein the compensation model is constructed based on the first environment temperature and humidity data, the second environment humidity data and the first acquired signal voltage data.
The invention can make the heating temperature at a stable temperature, so that the sensor array reaches an optimal working state; in addition, the sensor can work at a fixed heating temperature to achieve an optimal working state; in order to make the finally collected signal voltage more accurate, the first collected signal voltage data needs to be compensated by combining the first environmental temperature and humidity data and the second environmental temperature data to obtain compensated signal voltage data, so that the sensor to be measured only expresses the response to the test gas, the influence of the first environmental temperature and humidity data on the collected signal voltage data is reduced, and the final response schematic diagram is shown in fig. 3.
The signal acquisition system based on the MEMS gas sensor array comprises a control module, an MEMS sensor array unit, a multi-channel multiplexing conversion module and a heating module, wherein the control module is respectively connected with the MEMS sensor array unit, the multi-channel multiplexer conversion module and the heating module, and the multi-channel multiplexing conversion module comprises a switching unit and a multi-channel unit; the switching unit is used for switching the to-be-detected sensor in the MEMS sensor array unit; the multichannel unit is used for outputting voltage signals corresponding to each sensor in the MEMS sensor array unit to the control module.
If the sensor is in the optimal working state, the environmental requirement is high, for example, the environment to be tested is 25 ℃ and the humidity is 40%. However, if the temperature suddenly increases or decreases, the power of the heating module heating the inside of the sensor may change; the humidity control is simpler, because the humidity of the gas to be tested can be blended and input, the humidity in the test environment is only slightly reduced along with the temperature rise, and when the humidity change reduction is monitored, the humidifying device is only controlled to be opened, so that the humidity is maintained at 40%.
In one embodiment, the test board is provided with a first temperature and humidity sensor (the number is not limited, and may be a plurality of temperature and humidity sensors, and a second temperature and humidity sensor (the number is not limited, and may be a plurality of temperature and humidity sensors) is also provided near the nearest point of the sensor array, so that the first environmental temperature and humidity data comprises first environmental temperature data and first environmental humidity data, the first environmental temperature data is an average value of at least one first environmental temperature data, the first environmental humidity data is an average value of at least one first environmental humidity data, that is, the first environmental temperature data may be an average value of the first environmental temperature data, and the first environmental humidity data may be an average value of the first environmental humidity data; the first environmental temperature and humidity data is an average value of at least one second environmental temperature data, that is, the second environmental temperature data may be an average value of the second environmental temperature data, and the second environmental humidity data may be an average value of the second environmental humidity data.
When the ambient temperature changes, how to make the sensors in the optimal working state is not needed, so that in order to make the sensors in the optimal working state, each sensor of the sensor array needs to work at a fixed heating temperature, for example, when the sensor array works at a preset heating temperature of 300 ℃, the second ambient temperature data can be monitored all the time, the heating voltage is adjusted according to the second ambient temperature data, and the heating temperature of the sensor is ensured to be maintained at 300 ℃, and then, a preset heating model can be adopted, which is represented as follows:
wherein,and->Is a fixed constant, e.g., M is 0.178 #>Other data would be adjusted based on the test data, 37.5,/for example>Indicating the heating temperature inside the sensor array, < >>J represents the number of second ambient temperature data, j represents the number of second temperature and humidity sensors, +.>Is a heating voltage.
In step S200, the preset heating voltage is adjusted based on the preset heating model so that the heating temperature reaches the preset heating temperature, including the steps of:
s210, obtaining an average value of second environmental temperature data based on the second environmental temperature and humidity data, and obtaining real-time heating temperature based on a preset heating model;
s220, comparing the real-time heating temperature with a preset heating temperature, and if the real-time heating temperature reaches the preset heating temperature, adjusting the current heating voltage until the heating temperature reaches the preset heating temperature, so that the sensor array is in an optimal working state.
In one embodiment, how to collect signal voltages of sensors to be measured in the gas sensor array until the heating temperature reaches a preset heating temperature so that the sensor array is in an optimal working state includes the following steps:
s310, acquiring the number of the current sensor to be detected and the sampling parameter of the current sensor to be detected;
s320, if the second environmental temperature and humidity threshold value is equal to the current second environmental temperature and humidity data;
s330, setting initial parameters and sampling time based on sampling parameters of a current sensor to be detected, wherein the sampling parameters comprise preset heating voltage and sampling time interval, and the initial parameters comprise initial heating voltage and initial sampling time;
and S340, when the sampling time is reached, collecting the signal voltage output by the current sensor channel to be detected, and obtaining first sampling signal voltage data.
If the first environmental temperature and humidity data is not always in a specific range, the output signal voltage is required to be compensated according to the environmental temperature and humidity, so that the sensor array only expresses the response to the test gas. In step S400, the compensating the first collected signal voltage data based on the preset compensation model to obtain compensated signal voltage data includes the following steps:
and constructing a compensation model based on the first environmental temperature and humidity data and the second environmental humidity data, and further obtaining a dynamic change value of the signal voltage data, wherein the compensation model is expressed as follows:
wherein,dynamic change value representing signal voltage data, +.>Representing i first ambient humidity data, < + >>And->Expressed as a fixed constant, such as in one embodiment,/->Can be 0.0003,/o>May be 0.0046, other data may be adjusted based on experimental data, and +.>Representing first ambient temperature data,/o>J pieces of second environmental humidity data are represented, i represents the number of the first temperature and humidity sensors, and j represents the number of the second temperature and humidity sensors;
and compensating the first collected signal voltage data based on the dynamic change value of the signal voltage data to obtain compensated signal voltage data, wherein the compensated signal voltage data is expressed as follows:
wherein,representing the compensated signal voltage data,/v>Dynamic change value representing signal voltage data, +.>Representing first acquired signal voltage data.
The compensated signal voltage data expresses the response to the test gas, so that the gas to which the test gas is the bottom can be accurately known, and a data basis is provided for subsequent data processing.
In order to maximize the utilization of each sensor, the sensors in the sensor array may also be divided into at least two groups, each group comprising at least two sensors, with each sensor in each group not operating simultaneously, based on the identification conditions of each sensor and the optimal sequence of gas identification.
For example, in a specific embodiment, the MEMS sensor array unit includes 16 sensors, and then the 16 sensors may be divided into 4 groups, each group having four sensors, and after one of the sensors is collected or tested, the next sensor may be switched.
Example 2:
the signal acquisition system of the MEMS gas sensor array, as shown in FIG. 2, comprises a data acquisition module 100, a first adjustment module 200, a data acquisition module 300 and a data compensation module 400;
the data acquisition module 100 is configured to acquire first environmental temperature and humidity data and second environmental temperature and humidity data in real time, where the second environmental temperature and humidity data includes second temperature data and second humidity data;
the first adjustment module 200 adjusts the preset heating voltage based on a preset heating model so that the heating temperature reaches the preset heating temperature, wherein the preset heating model is constructed based on the second environmental temperature data and the heating voltage;
the data acquisition module 300 acquires signal voltages of the sensors to be detected in the gas sensor array when the heating temperature is in balance, so as to obtain first acquired signal voltage data;
the data compensation module 400 compensates the first collected signal voltage data based on a preset compensation model to obtain the compensated signal voltage data, wherein the compensation model is constructed based on the first environmental temperature and humidity data, the second environmental humidity data and the first collected signal voltage data.
In one embodiment, the preset heating model is expressed as follows:
wherein,and->Is a fixed constant, e.g., M is 0.178 #>Other data would be adjusted based on the test data, 37.5,/for example>Indicating the heating temperature inside the sensor array, < >>J represents the number of second ambient temperature data, j represents the number of second temperature and humidity sensors, +.>Is a heating voltage.
In one embodiment, the first adjustment module is configured to:
and constructing a compensation model based on the first environmental temperature and humidity data and the second environmental humidity data, and further obtaining a dynamic change value of the signal voltage data, wherein the compensation model is expressed as follows:
wherein,representing i first ambient humidity data, < + >>And->Expressed as a fixed constant, such as in one embodiment,/->Can be 0.0003,/o>May be 0.0046, other data may be adjusted based on experimental data, and +.>Representing first ambient temperature data,/o>J pieces of second environmental humidity data are represented, i represents the number of the first temperature and humidity sensors, and j represents the number of the second temperature and humidity sensors;
and compensating the first collected signal voltage data based on the dynamic change value of the signal voltage data to obtain compensated signal voltage data, wherein the compensated signal voltage data is expressed as follows:
wherein,representing the compensated signal voltage data,/v>Dynamic change value representing signal voltage data, +.>Representing first acquired signal voltage data.
All changes and modifications that come within the spirit and scope of the invention are desired to be protected and all equivalent thereto are deemed to be within the scope of the invention.
In this specification, each embodiment is described in a progressive manner, and each embodiment is mainly described in a different manner from other embodiments, so that identical and similar parts of each embodiment are mutually referred to.
It will be apparent to those skilled in the art that embodiments of the present invention may be provided as a method, apparatus, or computer program product. Accordingly, the present invention may take the form of an entirely hardware embodiment, an entirely software embodiment or an embodiment combining software and hardware aspects. Furthermore, the present invention may take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, and the like) having computer-usable program code embodied therein.
The present invention is described with reference to flowchart illustrations and/or block diagrams of methods, terminal devices (systems), and computer program products according to the invention. It will be understood that each flow and/or block of the flowchart illustrations and/or block diagrams, and combinations of flows and/or blocks in the flowchart illustrations and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing terminal device to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing terminal device, create means for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing apparatus to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instruction means which implement the function specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
It should be noted that:
reference in the specification to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment of the invention. Thus, the appearances of the phrase "one embodiment" or "an embodiment" in various places throughout this specification are not necessarily all referring to the same embodiment.
In addition, the specific embodiments described in the present specification may differ in terms of parts, shapes of components, names, and the like. All equivalent or simple changes of the structure, characteristics and principle according to the inventive concept are included in the protection scope of the present invention. Those skilled in the art may make various modifications or additions to the described embodiments or substitutions in a similar manner without departing from the scope of the invention as defined in the accompanying claims.
Claims (10)
1. The signal acquisition method of the MEMS gas sensor array is characterized by comprising the following steps of:
acquiring first environment temperature and humidity data and second environment temperature and humidity data in real time, wherein the second environment temperature and humidity data comprise second temperature data and second humidity data, a first temperature and humidity sensor is arranged on a test board, and a second temperature and humidity sensor is further arranged at the nearest point close to a sensor array;
adjusting a preset heating voltage based on a preset heating model to enable the heating temperature to reach the preset heating temperature, wherein the preset heating model is constructed based on second environment temperature data and the heating voltage;
when the heating temperature is in balance, acquiring signal voltage of a sensor to be detected in the gas sensor array to obtain first acquired signal voltage data;
compensating the first acquired signal voltage data based on a preset compensation model to obtain compensation signal voltage data, wherein the compensation model is constructed based on first environment temperature and humidity data, second environment humidity data and the first acquired signal voltage data;
wherein, the preset heating model is expressed as follows:
wherein,and->Is a fixed constant->Indicating the heating temperature inside the sensor array, < >>Represents the j-th second ambient temperature data, m represents the number of second temperature and humidity sensors,/->Is a heating voltage;
the compensation for the first collected signal voltage data based on the preset compensation model to obtain the compensated signal voltage data includes the following steps:
and constructing a compensation model based on the first environmental temperature and humidity data and the second environmental humidity data, and further obtaining a dynamic change value of the signal voltage data, wherein the compensation model is expressed as follows:
wherein,dynamic change value representing signal voltage data, +.>Represents the ith first ambient humidity data, < +.>Represents the j-th second ambient humidity data, < >>And->Expressed as a fixed constant>The first environmental temperature data are represented, n represents the number of first temperature and humidity sensors, and m represents the number of second temperature and humidity sensors;
and compensating the first collected signal voltage data based on the dynamic change value of the signal voltage data to obtain compensated signal voltage data, wherein the compensated signal voltage data is expressed as follows:
wherein,representing the compensated signal voltage data,/v>Dynamic change value representing signal voltage data, +.>Representing first acquired signal voltage data.
2. The method for acquiring signals of the MEMS gas sensor array according to claim 1, wherein the adjusting the preset heating voltage based on the preset heating model so that the heating temperature reaches the preset heating temperature comprises the steps of:
based on the second environmental temperature and humidity data, obtaining an average value of the second environmental temperature data, and based on a preset heating model, obtaining real-time heating temperature;
and comparing the real-time heating temperature with the preset heating temperature, and if the real-time heating temperature does not reach the preset heating temperature, adjusting the current heating voltage until the heating temperature reaches the preset heating temperature, so that the sensor array is in an optimal working state.
3. The method for acquiring signals of a MEMS gas sensor array according to claim 1, wherein the step of acquiring signal voltages of sensors to be detected in the gas sensor array comprises the steps of:
acquiring the number of a current sensor to be detected and sampling parameters of the current sensor to be detected;
if the second environmental temperature and humidity threshold value is equal to the current second environmental temperature and humidity data, setting an initial parameter and sampling time based on the sampling parameter of the current sensor to be detected, wherein the sampling parameter comprises a preset heating voltage and a sampling time interval, and the initial parameter comprises an initial heating voltage and an initial sampling time;
and when the sampling time is reached, collecting the signal voltage output by the current sensor channel to be detected to obtain first sampling signal voltage data.
4. The method of claim 1, wherein the first environmental temperature and humidity data comprises first environmental temperature data and first environmental humidity data, the first environmental temperature data being an average of at least one first environmental temperature data, the first environmental humidity data being an average of at least one first environmental humidity data;
the second ambient temperature data is an average of at least one second ambient temperature data, and the second ambient humidity data is an average of at least one second ambient humidity data.
5. The method of signal acquisition for a MEMS gas sensor array of claim 1, further comprising the steps of:
the sensors in the sensor array are divided into at least two groups based on the identification status of each sensor and the optimal sequence for gas identification, each group comprising at least two sensors, and each sensor in each group not operating simultaneously.
6. The method of signal acquisition for a MEMS gas sensor array of claim 1, further comprising the steps of:
setting a working time threshold for each sensor based on the identification conditions of the different sensors in each group and the optimal sequence of gas identification;
when the working time of a certain sensor reaches the working time threshold, the sensor is switched to other sensors in the same group, and the signal voltages of the other sensors are collected.
7. The signal acquisition system of the MEMS gas sensor array is characterized by comprising a data acquisition module, a first adjustment module, a data acquisition module and a data compensation module;
the data acquisition module is used for acquiring first environment temperature and humidity data and second environment temperature and humidity data in real time, wherein the second environment temperature and humidity data comprise second temperature data and second humidity data, a first temperature and humidity sensor is arranged on the test board, and a second temperature and humidity sensor is further arranged at the nearest point close to the sensor array;
the first adjusting module adjusts preset heating voltage based on a preset heating model to enable the heating temperature to reach the preset heating temperature, wherein the preset heating model is constructed based on second environment temperature data and the heating voltage;
the data acquisition module acquires signal voltage of a sensor to be detected in the gas sensor array when the heating temperature is in balance, so as to obtain first acquired signal voltage data;
the data compensation module compensates the first acquired signal voltage data based on a preset compensation model to obtain compensation signal voltage data, wherein the compensation model is constructed based on first environment temperature and humidity data, second environment humidity data and the first acquired signal voltage data;
the preset heating model is expressed as follows:
wherein,and->Is a fixed constant->Indicating the heating temperature inside the sensor array, < >>Represents the j-th second ambient temperature data, m represents the number of second temperature and humidity sensors,/->Is a heating voltage;
the data compensation module is configured to:
and constructing a compensation model based on the first environmental temperature and humidity data and the second environmental humidity data, and further obtaining a dynamic change value of the signal voltage data, wherein the compensation model is expressed as follows:
wherein,dynamic change value representing signal voltage data, +.>Represents the ith first ambient humidity data, < +.>Represents the j-th second ambient humidity data, < >>And->Expressed as a fixed constant>The first environmental temperature data are represented, n represents the number of first temperature and humidity sensors, and m represents the number of second temperature and humidity sensors;
and compensating the first collected signal voltage data based on the dynamic change value of the signal voltage data to obtain compensated signal voltage data, wherein the compensated signal voltage data is expressed as follows:
wherein,representing the compensated signal voltage data,/v>Dynamic change value representing signal voltage data, +.>Representing first acquired signal voltage data.
8. The signal acquisition system of the MEMS gas sensor array of claim 7, wherein the first adjustment module is configured to:
based on the second environmental temperature and humidity data, obtaining an average value of the second environmental temperature data, and based on a preset heating model, obtaining real-time heating temperature;
and comparing the real-time heating temperature with the preset heating temperature, and if the real-time heating temperature does not reach the preset heating temperature, adjusting the current heating voltage until the heating temperature reaches the preset heating temperature, so that the sensor array is in an optimal working state.
9. A computer readable storage medium storing a computer program, which when executed by a processor implements the method of any one of claims 1 to 6.
10. A signal acquisition device of a MEMS gas sensor array comprising a memory, a processor and a computer program stored in the memory and running on the processor, wherein the processor implements the method of any one of claims 1 to 6 when executing the computer program.
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