CN117452544A - Linear polaroid based on super-surface optical structure - Google Patents

Linear polaroid based on super-surface optical structure Download PDF

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Publication number
CN117452544A
CN117452544A CN202311434288.9A CN202311434288A CN117452544A CN 117452544 A CN117452544 A CN 117452544A CN 202311434288 A CN202311434288 A CN 202311434288A CN 117452544 A CN117452544 A CN 117452544A
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China
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nano
axis direction
linear polarizer
refractive index
optical structure
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CN202311434288.9A
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Inventor
刘思扬
史坦
范鸿杰
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Suzhou Shanhe Photoelectric Technology Co ltd
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Suzhou Shanhe Photoelectric Technology Co ltd
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Priority to CN202311434288.9A priority Critical patent/CN117452544A/en
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/30Polarising elements
    • G02B5/3025Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
    • G02B5/3033Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state in the form of a thin sheet or foil, e.g. Polaroid
    • G02B5/3041Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state in the form of a thin sheet or foil, e.g. Polaroid comprising multiple thin layers, e.g. multilayer stacks
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/002Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Polarising Elements (AREA)

Abstract

The invention provides a linear polaroid based on a super-surface optical structure, which is defined as an X-axis direction along a polarization direction of the linear polaroid, is defined as a Y-axis direction along an orthogonal polarization direction perpendicular to the polarization direction, and is defined as a Z-axis direction along a direction perpendicular to an XY plane, wherein the linear polaroid comprises a substrate and a plurality of sub-wavelength-sized nano columns arranged on the substrate, the nano columns are periodically arranged at equal intervals along the X-axis direction, and the interval distance between the nano columns is smaller than the minimum applicable wavelength of the linear polaroid; along the Y-axis direction, the nano columns are continuously distributed and extend towards the two ends of the substrate; and along the Z-axis direction, the nano-pillars are alternately stacked and arranged by at least two reflecting layers with different refractive indexes to form a Bragg reflector structure. The linear polarizer operating band can cover almost all visible light bands, i.e., the 400-700 nm band range, and in this band range, the linear polarizer has a high peak transmittance and extinction ratio.

Description

Linear polaroid based on super-surface optical structure
Technical Field
The invention relates to the field of optical elements, in particular to a linear polaroid based on a super-surface optical structure.
Background
A linear polarizer is a pure optical element that can convert unpolarized light (including natural light) into linearly polarized light. Linear polarizers are widely used in a variety of applications, including miniature projectors and heads-up displays. Three common methods for obtaining polarized light by using a hot polarizer today are: based on brewster angle, based on birefringence and based on dichroism. The optical filter manufactured by taking the brewster angle as the principle needs a certain incident angle when in use, and the birefringence phenomenon only occurs in crystals with a certain thickness, and both have certain limitations in practical application, so that the dichroism polaroid is most widely used at present.
The dichroism polaroid mainly comprises an economic film polaroid, a nano particle polaroid, a metal wire grid and the like, but the polaroids are difficult to simultaneously meet three parameters which mainly measure the performance of the polaroid, namely high transmissivity, high extinction ratio and coverage of the whole visible light wave band (400 nm-700 nm) in a visible light wave band, and the two parameters have high manufacturing process difficulty and high manufacturing cost.
Disclosure of Invention
The invention aims to provide a linear polaroid based on a super-surface optical structure.
The invention provides a linear polaroid based on a super-surface optical structure, which is defined as an X-axis direction along a polarization direction of the linear polaroid, is defined as a Y-axis direction along an orthogonal polarization direction perpendicular to the polarization direction, is defined as a Z-axis direction along a direction perpendicular to an XY plane, and comprises a substrate and a plurality of sub-wavelength nano-columns arranged on the substrate, wherein the nano-columns are periodically arranged at equal intervals along the X-axis direction, and the interval distance between the nano-columns is smaller than the minimum applicable wavelength of the linear polaroid;
along the Y-axis direction, the nano columns are continuously distributed and extend to two ends of the substrate;
and along the Z-axis direction, the nano-pillars are alternately stacked and arranged by at least two reflecting layers with different refractive indexes to form a Bragg reflector structure.
As a further improvement of the present invention, the ratio of the width of the nano-pillars to the distance between the nano-pillars in the Y-axis direction ranges from 10 to 90%.
As a further improvement of the present invention, the nanopillar includes a first refractive index reflective layer and a second refractive index reflective layer alternately stacked and arranged, and the heights of the first refractive index reflective layer and the second refractive index reflective layer are adjusted according to the interval distance between the nanopillars and the nanopillar width and refractive index variation.
As a further improvement of the invention, the first refractive index reflecting layer material is single silicon, or polysilicon, or amorphous silicon, or TiO 2 Or Si(s) 3 N 4
As a further improvement of the invention, the second refractive index reflection layer material is SiO 2 Or spin-on glass, or polymethyl methacrylate, or polydimethylsiloxane, or polymethylpentene, or a composite of several of the foregoing materials.
As a further improvement of the present invention, the first refractive index reflective layer has a height ranging from 10 to 100nm and the first refractive index reflective layer has a height ranging from 100 to 400nm.
As a further improvement of the present invention, the number of reflective layers of the nanopillar stack ranges from 3 to 100 layers.
As a further improvement of the present invention, the spacing distance between the nanopillars is less than 400nm.
As a further improvement of the invention, the substrate material is SiO 2 Or spin-on glass, or polymethyl methacrylate, or polydimethylsiloxane, or polymethylpentene, or a composite of several of the foregoing materials.
As a further improvement of the present invention, the transmittance of the linear polarizer may be maintained above 80% with an extinction ratio of the blocked polarization state of greater than 1000:1.
The beneficial effects of the invention are as follows: the linear polaroid provided by the invention adopts the nano columns which are arranged at intervals in a periodic manner to form a super-surface structure, the nano columns are of a structure formed by alternately stacking and arranging materials with different refractive indexes, and the wire grid structure of the traditional polaroid is replaced by a Bragg reflector structure, so that the working wave band of the linear polaroid provided by the embodiment can almost cover all visible light wave bands, namely 400-700 nm wave bands, and the linear polaroid has higher peak transmittance and extinction ratio in the wave band range. In most optical systems, the requirements for polarization filtering in the visible range can be met by only a single piece of linear film positive, so that the optical system is simplified.
Drawings
Fig. 1 to 3 are schematic views of different view directions of a linear polarizer according to an embodiment of the present invention.
FIG. 4 is a graph showing the relationship between extinction ratio of a linear polarizer and the number of layers of material having different refractive indices of the nanopillars in accordance with an embodiment of the invention.
FIG. 5 is a graph showing the transmission spectrum versus extinction ratio for two polarization states of a linear polarizer in accordance with an embodiment of the invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below in conjunction with the detailed description of the present invention and the corresponding drawings. It will be apparent that the described embodiments are only some, but not all, of the embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present invention without making any inventive effort, are intended to fall within the scope of the present invention.
Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are exemplary only for explaining the present invention and are not to be construed as limiting the present invention.
The linear polaroid based on the super-surface optical structure is provided in the embodiment, the super-surface structure is adopted in the linear polaroid, and the wire grid structure of the traditional polaroid is replaced by the Bragg reflector structure, so that the working wave band of the linear polaroid provided in the embodiment can almost cover all visible light wave bands, namely the wave band range of 400-700 nm, and in the wave band range, the linear polaroid has higher peak transmittance and extinction ratio.
The supersurface optical structure is a two-dimensional plane or film with micro-nano structures that can be designed to manipulate the phase and amplitude of incident light. The micro-nano structure of the super surface is usually composed of periodic nano-scale elements, such as nano-pillars, nano-wires, or nano-holes, and the size and arrangement mode of the nano-pillars, the nano-wires, or the nano-holes can be accurately designed according to the required optical effect. The principle of operation of a supersurface depends on interference and scattering effects of micro-nano structures on light. By adjusting parameters of the micro-nano structure, the super surface can realize accurate control of light waves, including polarization, phase, propagation direction and the like.
As shown in fig. 1 to 3, the present embodiment provides a linear polarizer, in which the polarizing direction of the linear polarizer is the X-axis direction, the orthogonal polarizing direction perpendicular to the polarizing direction is the Y-axis direction, and the direction perpendicular to the XY plane is the Z-axis direction, for convenience of explanation.
The linear polaroid comprises a substrate 1 and a plurality of nanometer columns 2 with sub-wavelength sizes, wherein the nanometer columns 2 are arranged on the substrate 1 along the X-axis direction and are periodically arranged at equal intervals, and the interval distance between the nanometer columns 2 is smaller than the minimum applicable wavelength of the linear polaroid; along the Y-axis direction, the nano columns 2 are continuously distributed and extend towards the two ends of the substrate 1; along the Z-axis direction, the nanopillar 2 is formed by alternately stacking and arranging at least two reflective layers with different refractive indexes.
In the present embodiment, dichroism, that is, a phenomenon that a material generates different refractive indexes or light propagation behaviors to light of different polarization directions, is achieved by different structures of the sub-wavelength-sized nano-pillars 2 in the X-axis and Y-axis directions. When light passes through or reflects off of a refractive material, light of different polarization directions propagates at different speeds, resulting in a change in the phase and amplitude of the light, which causes a change in the polarization state.
The periodic structure of sub-wavelengths along the Y-axis allows light polarization components parallel to the Y-axis to pass through the supersurface. And at least two reflecting layers with different refractive indexes are alternately stacked and arranged along the X-axis direction to form a Bragg reflector structure, so that light polarization components parallel to the X-axis direction can be effectively reflected, when the wavelength of incident light meets the Bragg scattering condition, different layers in the reflector can generate constructive interference with the incident light wave, the amplitude of the reflected light wave is amplified, thus an obvious reflection peak is formed, the reflection peak corresponds to the light wave with a specific wavelength, and the light with other wavelengths is not amplified by the constructive interference, so that the reflection or absorption is realized.
Since the amplitude of the light wave will be significantly enhanced to resonate when the wavelength of the light wave is matched to a specific size or characteristic of the structure, in order to achieve the desired optical performance of the linear polarizer, the structural dimensions of the nanopillar 2 need to be adjusted based on the band range of the incident light to ensure that the incident light within the applicable band range does not resonate with the structure. In addition, since the periodically arranged nano-pillars 2 cause diffraction of incident light waves, in order to avoid diffraction, it is necessary to adjust the spacing distance of the nano-pillars 2 to eliminate diffraction effects. According to the grating equation:
d(sinθ m +sinθ i )=mλ,
it is known that the separation distance between the nano-pillars 2 needs to be less than or equal to the minimum wavelength in the applicable wavelength range of the polarizer at normal incidence of the incident light.
The structural dimensions and materials of the linear polarizer can be specifically designed according to the above conditions, and the parameters related to the linear polarizer in this embodiment will be specifically described below.
Since the wavelength range of visible light is 400-700 nm, the spacing distance between the nano-pillars 2 is designed to be less than 400nm, so that diffraction phenomenon can be effectively avoided.
Along the Y-axis direction, the ratio of the width of the nano-pillar 2 to the distance between the nano-pillars 2 is 10-90%, wherein the ratio is the duty ratio, and the specific duty ratio value can be adjusted according to the photoetching process parameters of the super-surface structure and different application scenes.
In the present embodiment, the nano-pillars 2 include the first refractive index reflection layers 21 and the second refractive index reflection layers 22 alternately stacked and arranged, and in order to satisfy the reflection condition of the bragg reflector, the heights of the first refractive index reflection layers 21 and the second refractive index reflection layers 22 are adjusted according to the interval distance between the nano-pillars 2 and the nano-pillar 2 width and refractive index variation.
The first refractive index reflection layer 21 is made of single silicon, or polysilicon, or amorphous silicon, or TiO 2 Or Si(s) 3 N 4, etc
The second refractive index reflection layer 22 is made of SiO 2 Or spin-on glass, or polymethyl methacrylate, or polydimethylsiloxane, or polymethylpentene, or a composite of several of the foregoing materials.
Further, according to the wavelength range of the incident light and the refractive index value range of the material, the height range of the first refractive index reflective layer 21 in the present embodiment is 10 to 100nm, and the height range of the first refractive index reflective layer 21 is 100 to 400nm.
The order between the first refractive index reflective layer 21 and the second refractive index reflective layer 22 may be interchanged, which is not particularly limited in this embodiment, and the materials used for the first refractive index reflective layer 21 and the second refractive index reflective layer 22 may be other common optical materials, or may form an alternate stacked arrangement structure of three or more layers of materials with different refractive indexes, as long as a bragg reflector structure is realized.
As shown in fig. 4, since the number of layers in the bragg reflector structure is larger, the reflection effect is better, that is, the extinction ratio is larger, wherein the extinction ratio is the ratio of the transmittances of two polarization states. In the present embodiment, the nano-pillar 2 structure may be realized by using a process of plating and photolithography, so it is preferable that the number of reflection layers of the nano-pillar 2 stack is in the range of 3 to 100 layers in view of the difficulty and cost of manufacturing the nano-pillar 2 structure that are increased when the number of layers is further increased. In other embodiments of the present invention, the number of reflective layers may also be adjusted according to the manufacturing process level and product requirements.
The substrate 1 is made of SiO2, spin-on glass, polymethyl methacrylate, polydimethylsiloxane, polymethylpentene or a composite material formed by a plurality of the materials.
As shown in fig. 5, the transmission spectrum and extinction ratio of the two polarization states are such that, in the operating wavelength range of the polarizer, most of the polarized light in the X direction is reflected after the incident light passes through the polarizer, and only the polarized light in the Y direction is transmitted. The transmission of the linear polarizer may be maintained above 80% over the target wavelength range, with the extinction ratio of the blocked polarization state being greater than 1000:1.
In summary, the present embodiment provides a linear polarizer based on a super-surface optical structure, where the linear polarizer adopts nano-pillars arranged at intervals to form the super-surface structure, and the nano-pillars are formed by alternately stacking and arranging materials with different refractive indexes, and the wire grid structure of the conventional polarizer is replaced by a bragg reflector structure, so that the working band of the linear polarizer provided by the present embodiment can almost cover all visible light bands, that is, 400-700 nm band range, and the linear polarizer has higher peak transmittance and extinction ratio in the band range. In most optical systems, the requirements of the optical systems on polarization filtering in the visible light range can be met by only using a single linear film positive film, and the optical systems are simplified.
It should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is for clarity only, and that the skilled artisan should recognize that the embodiments may be combined as appropriate to form other embodiments that will be understood by those skilled in the art.
The above list of detailed descriptions is only specific to practical embodiments of the present invention, and is not intended to limit the scope of the present invention, and all equivalent embodiments or modifications that do not depart from the spirit of the present invention should be included in the scope of the present invention.

Claims (10)

1. A linear polarizer based on a super-surface optical structure, wherein a polarization direction along the linear polarizer is defined as an X-axis direction, an orthogonal polarization direction perpendicular to the polarization direction is defined as a Y-axis direction, and a direction perpendicular to an XY plane is defined as a Z-axis direction,
the linear polaroid comprises a substrate and a plurality of nanometer columns with sub-wavelength dimensions, wherein the nanometer columns are arranged on the substrate periodically at intervals of the same distance along the X-axis direction, and the interval distance between the nanometer columns is smaller than the minimum applicable wavelength of the linear polaroid;
along the Y-axis direction, the nano columns are continuously distributed and extend towards the two ends of the substrate;
and along the Z-axis direction, the nano-pillars are alternately stacked and arranged by at least two reflecting layers with different refractive indexes to form a Bragg reflector structure.
2. The linear polarizer based on a super surface optical structure as claimed in claim 1, wherein a ratio of the width of the nano-pillars to the distance between the nano-pillars along the Y-axis direction is in a range of 10 to 90%.
3. The linear polarizer based on a super surface optical structure according to claim 2, wherein the nano-pillars comprise first refractive index reflective layers and second refractive index reflective layers alternately stacked and arranged, and heights of the first refractive index reflective layers and the second refractive index reflective layers are adjusted according to a separation distance between the nano-pillars and the nano-pillar width and refractive index variation.
4. The linear polarizer of claim 3, wherein the first refractive index reflective layer material is monolithic silicon, or polysilicon, or amorphous silicon, or TiO 2 Or Si(s) 3 N 4
5. The linear polarizer based on a super-surface optical structure as claimed in claim 1, wherein the second refractive index reflective layer material is SiO 2 Or spin-on glass or polymethyl methacrylateAn ester, or polydimethylsiloxane, or polymethylpentene, or a combination of several of the foregoing.
6. The linear polarizer based on a super surface optical structure as claimed in claim 1, wherein the first refractive index reflection layer has a height ranging from 10 to 100nm and the first refractive index reflection layer has a height ranging from 100 to 400nm.
7. The linear polarizer based on a super surface optical structure according to claim 1, wherein the number of reflection layers of the nano-pillar stack ranges from 3 to 100 layers.
8. The linear polarizer based on a super surface optical structure according to claim 1, wherein the separation distance between the nano-pillars is less than 400nm.
9. The linear polarizer based on a super surface optical structure as claimed in claim 1, wherein the base material is SiO 2 Or spin-on glass, or polymethyl methacrylate, or polydimethylsiloxane, or polymethylpentene, or a composite of several of the foregoing materials.
10. The linear polarizer based on a super surface optical structure according to claim 1, wherein the transmittance of the linear polarizer can be maintained at 80% or more, and the extinction ratio of the blocked polarization state is more than 1000:1.
CN202311434288.9A 2023-10-31 2023-10-31 Linear polaroid based on super-surface optical structure Pending CN117452544A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115039238A (en) * 2019-10-10 2022-09-09 太阳密度公司 Optical coating for spectral conversion

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115039238A (en) * 2019-10-10 2022-09-09 太阳密度公司 Optical coating for spectral conversion

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