CN117451181A - Preparation method of calculation spectrometer based on electrochromic device - Google Patents
Preparation method of calculation spectrometer based on electrochromic device Download PDFInfo
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- CN117451181A CN117451181A CN202311466084.3A CN202311466084A CN117451181A CN 117451181 A CN117451181 A CN 117451181A CN 202311466084 A CN202311466084 A CN 202311466084A CN 117451181 A CN117451181 A CN 117451181A
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- 238000004364 calculation method Methods 0.000 title claims abstract description 14
- 238000002360 preparation method Methods 0.000 title claims abstract description 14
- 230000003287 optical effect Effects 0.000 claims abstract description 27
- 238000001228 spectrum Methods 0.000 claims abstract description 26
- 230000003595 spectral effect Effects 0.000 claims abstract description 24
- 238000000034 method Methods 0.000 claims abstract description 22
- 239000010445 mica Substances 0.000 claims abstract description 12
- 229910052618 mica group Inorganic materials 0.000 claims abstract description 12
- 238000001755 magnetron sputter deposition Methods 0.000 claims abstract description 7
- 239000000758 substrate Substances 0.000 claims abstract description 7
- 230000005540 biological transmission Effects 0.000 claims abstract description 4
- 238000005259 measurement Methods 0.000 claims description 12
- 229910000480 nickel oxide Inorganic materials 0.000 claims description 10
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 claims description 9
- 229910001930 tungsten oxide Inorganic materials 0.000 claims description 8
- 239000003792 electrolyte Substances 0.000 claims description 6
- MHCFAGZWMAWTNR-UHFFFAOYSA-M lithium perchlorate Chemical compound [Li+].[O-]Cl(=O)(=O)=O MHCFAGZWMAWTNR-UHFFFAOYSA-M 0.000 claims description 6
- 229910001486 lithium perchlorate Inorganic materials 0.000 claims description 6
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 claims description 6
- 238000005316 response function Methods 0.000 claims description 6
- RHZWSUVWRRXEJF-UHFFFAOYSA-N indium tin Chemical compound [In].[Sn] RHZWSUVWRRXEJF-UHFFFAOYSA-N 0.000 claims description 4
- 229910001887 tin oxide Inorganic materials 0.000 claims description 4
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 3
- 239000011159 matrix material Substances 0.000 claims description 3
- BYBLEWFAAKGYCD-UHFFFAOYSA-N Miconazole Chemical compound ClC1=CC(Cl)=CC=C1COC(C=1C(=CC(Cl)=CC=1)Cl)CN1C=NC=C1 BYBLEWFAAKGYCD-UHFFFAOYSA-N 0.000 claims description 2
- 238000004806 packaging method and process Methods 0.000 claims description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000000411 transmission spectrum Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
Abstract
The invention relates to the technical field of snapshot type calculation spectrometers, and discloses a preparation method of a calculation spectrometer based on an electrochromic device, which comprises the following steps: s1, preparation of an electrochromic device: preparing an electrochromic film on a mica substrate by adopting a pulse direct current reaction magnetron sputtering method to form an electrochromic device, and preparing an optical filter array; s2, spectrum calibration: the electrochromic device is irradiated by monochromatic light, the electrochemical workstation provides different voltages to drive the electrochromic device, and the transmission intensity is read out by the CMOS image camera; s3, spectrum reconstruction: unknown light enters the CMOS image camera through the electrochromic device, different voltages are applied, the unknown light is read out through the CMOS image camera, and a reconstruction algorithm calculates a spectrum. According to the preparation method of the calculation spectrometer based on the electrochromic device, the number of channels of the optical filter is increased through the electrically adjustable spectral response characteristic of the electrochromic principle, so that the spectral resolution of the calculation spectrometer is increased.
Description
Technical Field
The invention relates to the technical field of snapshot type calculation spectrometers, in particular to a preparation method of a calculation spectrometer based on an electrochromic device.
Background
Computational spectrometers are typically a novel spectral measurement technique that uses a post-reconstruction algorithm for spectral reconstruction through snapshot-type single-exposure measurements. Since a conventional spectroscopic device such as a prism or a grating is not used, the computation spectrometer can be designed as a compact-sized miniaturized measurement device suitable for portable or wearable applications, and thus is attracting attention in scientific research and spectroscopic applications. On-chip computing spectrometers are mostly based on complex millimeter-scale filter arrays, which are arranged with individually prepared filters in front of Charge Coupled Devices (CCDs) or complementary metal oxide semiconductor detectors (COMS), so that the spectral information can be encoded by pre-calibrated response functions and recorded in a snapshot by the detector array. By means of an appropriate algorithm, the spectral information can be accurately decoded and reconstructed. However, the spectral resolution and operating bandwidth of a computational spectrometer is typically limited by the number of integrated filter channels.
Electrochromic is a phenomenon that the optical properties of a material are reversibly changed under the drive of external voltage, has electrically tunable spectral response characteristics, and has high sensitivity and variability in a very wide spectral range. Combining electrochromic devices with a computational spectrometer can increase the number of filters by changing the voltage without increasing the size. Based on the background, the invention provides a computational spectrometer which can improve the number of optical filters by tuning voltage.
Disclosure of Invention
In order to solve the problems, the invention provides a preparation method of a calculation spectrometer based on an electrochromic device, and the number of channels of an optical filter is increased through the electrically tunable spectral response characteristic of an electrochromic principle, so that the spectral resolution of the calculation spectrometer is increased.
In order to achieve the above object, the present invention provides a method for preparing a computing spectrometer based on electrochromic devices, comprising the steps of:
s1, preparation of an electrochromic device: preparing an electrochromic film on a mica substrate by adopting a pulse direct current reaction magnetron sputtering method to form an electrochromic device, and preparing an optical filter array on the electrochromic device;
s2, spectrum calibration: illuminating the electrochromic device prepared in the step S1 by monochromatic light, providing different voltage driving electrochromic devices by an electrochemical workstation, and reading out transmission intensity by a CMOS image camera;
s3, spectrum reconstruction: unknown light enters the CMOS image camera through the electrochromic device prepared in the step S1, different voltages are applied, the unknown light is read out through the CMOS image camera, and the spectrum is calculated through a reconstruction algorithm.
Preferably, step S1 includes step S11 and step S12,
s11, preparing indium tin oxide, a tungsten oxide film and a nickel oxide film on a mica substrate by adopting a pulse direct current reaction magnetron sputtering method, and then packaging by taking the tungsten oxide film as an anode electrochromic layer, the nickel oxide film as a cathode electrochromic layer and lithium perchlorate of 1mol/L as electrolyte to prepare an electrochromic device;
s12, placing a polaroid on the back of the electrochromic device, placing 12 polaroids with different optical axis angles on the front, forming an optical filter array by respectively forming 0 DEG and 15 DEG … … DEG with the optical axis angles of the polaroids on the back, and placing the electrochromic device in front of the COMS image camera.
Preferably, the structure of the electrochromic device is expressed as mica/indium tin oxide/tungsten oxide/electrolyte/nickel oxide/indium tin oxide/mica.
Preferably, in step S2, the wavelength is tuned from 400nm to 800nm by using a monochromator, the electrochemical workstation provides different voltages to drive the electrochromic device to change color, and the spectral response function R of the filter array under different driving voltages is measured through single exposure i (lambda) read out by a CMOS image camera when the incident light changes.
Preferably, step S3 includes step S31 and step S32,
s31, measurement: unknown light enters a CMOS image camera through the electrochromic device prepared in the step S1, different voltages are applied to the electrochromic device by adopting the method in the step S2, and the unknown light is read out through the CMOS image camera;
s32, spectrum reconstruction: through a compressed sensing algorithm, an unknown incident light spectrum is obtained on an electrochromic spectrometer based on a spectral response matrix of an optical filter array coded by monochromatic light corresponding to different voltages in a calibration process and optical filter array response data corresponding to different voltages in a measurement process, wherein the formula is as follows:
wherein I is i Is the pixel of different units when the incident light is unknown, R i (lambda) is the spectral response function of the cell, lambda 1 And lambda (lambda) 2 Respectively a minimum wavelength and a maximum wavelength, n is the total number of measurement units and F (λ) is the reconstructed unknown spectrum.
Therefore, the preparation method of the calculation spectrometer based on the electrochromic device has the following beneficial effects:
(1) According to the invention, different voltages are applied to tune the spectrum through the electrochromic device to increase the sampling quantity, so that the problem that the spectrum resolution is limited by the quantity of optical filters can be solved, the physical size of the spectrometer is reduced, the reconstruction spectrum resolution is improved, and a thought is provided for on-chip integration of the micro-nano optical filtering structure and the detector.
(2) The invention can realize the reconstruction of unknown transmission spectrum of 400-800nm in visible light wave band, and the average peak wavelength difference of the reconstructed spectrum can be reduced from 4nm under one group of voltages to 0.2nm under three groups of voltages.
The technical scheme of the invention is further described in detail through the drawings and the embodiments.
Drawings
FIG. 1 is a flow chart of spectral reconstruction according to an embodiment of the present invention;
FIG. 2 is a schematic view of an electrochromic device according to an embodiment of the invention;
FIG. 3 is a schematic diagram of reconstructed spectra of different voltage sets according to an embodiment of the present invention.
Detailed Description
The technical scheme of the invention is further described below through the attached drawings and the embodiments.
Unless defined otherwise, technical or scientific terms used herein should be given the ordinary meaning as understood by one of ordinary skill in the art to which this invention belongs. The terms "first," "second," and the like, as used herein, do not denote any order, quantity, or importance, but rather are used to distinguish one element from another. The word "comprising" or "comprises", and the like, means that elements or items preceding the word are included in the element or item listed after the word and equivalents thereof, but does not exclude other elements or items. The terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. "upper", "lower", "left", "right", etc. are used merely to indicate relative positional relationships, which may also be changed when the absolute position of the object to be described is changed.
Examples
As shown in fig. 1, the preparation method of the electrochromic device-based computing spectrometer comprises the following steps:
s1: preparation of electrochromic device: as shown in fig. 2, the electrochromic device is composed of five layers of films, the electrochromic film is prepared on the mica substrate by adopting a pulse direct current reaction magnetron sputtering method to form the electrochromic device, and the optical filter array is prepared on the electrochromic device.
S11, sputtering transparent conductive film Indium Tin Oxide (ITO) on the mica substrate by adopting a pulse direct current reaction magnetron sputtering method, and then sputtering tungsten oxide (WO) 3 ) The film and the nickel oxide (NiOx) film are combined into the ITO/WO film with five layers by a glue-sandwiching method 3 Electrochromic device (ECD) of electrolyte/NiOx/ITO. Wherein, the tungsten oxide film is used as an anode electrochromic layer, the nickel oxide film is used as a cathode electrochromic layer, and 1mol/L of lithium perchlorate (LiClO) 4 ) Is thatElectrolyte, lithium perchlorate (LiClO) 4 ) The electrolyte and the ultraviolet solid glue are mixed according to the volume ratio of 2:1.
S12, preparing an optical filter structure, and preparing filter plates with different polarization axis included angles on the ECD. And placing a polaroid on the back of the electrochromic device, placing 12 polaroids with different optical axis angles on the front, wherein the optical axis angles between the polaroids and the back polaroid are respectively 0 degrees, 15 degrees … … degrees (the interval is 15 degrees), and forming an optical filter array. All 12 filters have unique responsivity and rich spectral characteristics, and the responses are generated by complex optical interference of mica with birefringent effect and polarizers with different included angles of optical axes. Finally, the electrochromic device is placed in front of the COMS image camera.
S2, spectrum calibration: the electrochromic device prepared in the step S1 is irradiated by tunable monochromatic light, the electrochemical workstation provides different voltages to drive the electrochromic device, and the transmission intensity is read out by the CMOS image camera.
Specifically, a xenon lamp is used as a light source, an adjustable spectrometer is used for generating output monochromatic light, the wavelength is tuned from 400nm to 800nm, and an electrochemical workstation provides a voltage driven electrochromic device. In the initial characterization measurement, the spectral responsivity of each cell at different drive voltages is measured separately and read out by a CMOS image camera as the incident light changes.
S3, spectrum reconstruction: unknown light enters the CMOS image camera through the electrochromic device prepared in the step S1, different voltages are applied, the unknown light is read out through the CMOS image camera, and the spectrum is calculated through a reconstruction algorithm.
S31, measurement: unknown light enters the CMOS image camera through the electrochromic device, and different voltages are applied to the unknown light and read out by the CMOS image camera.
S32, spectrum reconstruction:
as shown in fig. 3, by the compressed sensing algorithm, an unknown spectrum of incident light is obtained on the electrochromic spectrometer based on the spectral response matrix of the filter array encoded by monochromatic light corresponding to different voltages during the calibration process and the filter array response data corresponding to different voltages during the measurement process, where the formula is:
wherein I is i Is the pixel of different units when the incident light is unknown, R i (lambda) is the spectral response function of the cell, lambda 1 And lambda (lambda) 2 Respectively a minimum wavelength and a maximum wavelength, n is the total number of measurement units, and F (λ) is the unknown spectrum that needs to be reconstructed.
Therefore, the preparation method of the calculation spectrometer based on the electrochromic device improves the channel number of the optical filter through the electrically adjustable spectral response characteristic of the electrochromic principle, thereby improving the spectral resolution of the calculation spectrometer.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention and not for limiting it, and although the present invention has been described in detail with reference to the preferred embodiments, it will be understood by those skilled in the art that: the technical scheme of the invention can be modified or replaced by the same, and the modified technical scheme cannot deviate from the spirit and scope of the technical scheme of the invention.
Claims (5)
1. The preparation method of the calculation spectrometer based on the electrochromic device is characterized by comprising the following steps of: the method comprises the following steps:
s1, preparation of an electrochromic device: preparing an electrochromic film on a mica substrate by adopting a pulse direct current reaction magnetron sputtering method to form an electrochromic device, and preparing an optical filter array on the electrochromic device;
s2, spectrum calibration: illuminating the electrochromic device prepared in the step S1 by monochromatic light, providing different voltage driving electrochromic devices by an electrochemical workstation, and reading out transmission intensity by a CMOS image camera;
s3, spectrum reconstruction: unknown light enters the CMOS image camera through the electrochromic device prepared in the step S1, different voltages are applied, the unknown light is read out through the CMOS image camera, and the spectrum is calculated through a reconstruction algorithm.
2. The method for preparing the electrochromic device-based computing spectrometer, according to claim 1, is characterized in that: step S1 includes step S11 and step S12,
s11, preparing indium tin oxide, a tungsten oxide film and a nickel oxide film on a mica substrate by adopting a pulse direct current reaction magnetron sputtering method, and then packaging by taking the tungsten oxide film as an anode electrochromic layer, the nickel oxide film as a cathode electrochromic layer and lithium perchlorate of 1mol/L as electrolyte to prepare an electrochromic device;
s12, placing a polaroid on the back of the electrochromic device, placing 12 polaroids with different optical axis angles on the front, forming an optical filter array by respectively forming 0 DEG and 15 DEG … … DEG with the optical axis angles of the polaroids on the back, and placing the electrochromic device in front of the COMS image camera.
3. The method for preparing the electrochromic device-based computing spectrometer, according to claim 2, is characterized in that: the structure of the electrochromic device is expressed as mica/indium tin oxide/tungsten oxide/electrolyte/nickel oxide/indium tin oxide/mica.
4. The method for preparing the electrochromic device-based computing spectrometer, according to claim 1, is characterized in that: in step S2, the wavelength is tuned from 400nm to 800nm by using a monochromator, the electrochemical workstation provides different voltages to drive the electrochromic device to change color, and the spectral response function R of the filter array under different driving voltages is measured through single exposure i (lambda) read out by a CMOS image camera when the incident light changes.
5. The method for preparing the electrochromic device-based computing spectrometer, according to claim 1, is characterized in that: step S3 includes step S31 and step S32,
s31, measurement: unknown light enters a CMOS image camera through the electrochromic device prepared in the step S1, different voltages are applied to the electrochromic device by adopting the method in the step S2, and the unknown light is read out through the CMOS image camera;
s32, spectrum reconstruction: through a compressed sensing algorithm, an unknown incident light spectrum is obtained on an electrochromic spectrometer based on a spectral response matrix of an optical filter array coded by monochromatic light corresponding to different voltages in a calibration process and optical filter array response data corresponding to different voltages in a measurement process, wherein the formula is as follows:
wherein I is i Is the pixel of different units when the incident light is unknown, R i (lambda) is the spectral response function of the cell, lambda 1 And lambda (lambda) 2 Respectively a minimum wavelength and a maximum wavelength, n is the total number of measurement units and F (λ) is the reconstructed unknown spectrum.
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