CN211527616U - Optical filter, imaging device and electronic equipment - Google Patents
Optical filter, imaging device and electronic equipment Download PDFInfo
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- CN211527616U CN211527616U CN202020124887.6U CN202020124887U CN211527616U CN 211527616 U CN211527616 U CN 211527616U CN 202020124887 U CN202020124887 U CN 202020124887U CN 211527616 U CN211527616 U CN 211527616U
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Abstract
The utility model provides an optical filter, an imaging device and an electronic device, which comprises a spacing body, a first electrode and a second electrode; a spacer disposed between the first and second electrodes, including a first surface, a second surface, and a fabry-perot interference layer disposed between the first and second surfaces; the first surface and the second surface comprise a high reflectivity film; the first electrode and the second electrode are used for being electrified to provide a potential difference between two ends of the Fabry-Perot interference layer, and the volume of the Fabry-Perot interference layer is changed according to the potential difference. The Fabry-Perot interference layer is expanded or contracted by providing potential difference through the adjustable wavelength optical filter designed based on the Fabry-Perot interference principle, so that the central wavelength of the optical filter is changed, the requirements on the flatness and the gradient of the upper reflecting surface and the lower reflecting surface are not high, errors are not easy to cause, the total thickness is only in the millimeter level, conventional production modes such as magnetron sputtering and the like are used, the production cost is low, and large-scale production is easy.
Description
Technical Field
The utility model relates to an optical imaging technical field especially relates to an optical filter, imaging device and electronic equipment.
Background
The spectral imaging technology is based on different absorption or radiation characteristics of different objects on different electromagnetic spectrums, obtains spatial graphic information and spectral characteristics of a target, obtains a data cube of the target, is beneficial to research, judgment and other work on the target, and is an important component in the optical detection technology. Common techniques for obtaining target spectral information include: dispersive spectral imaging, interference spectral imaging, computed tomography spectral imaging, and filtered spectral imaging. Among them, the dispersion type spectral imaging and the filter type spectral imaging are widely used.
The dispersive spectral imaging technology is to disperse the incident light passing through the slit according to wavelength by using a prism or a diffraction grating as a light splitting element, and then to image the light on a detector by an imaging system. In the shooting process, a sample needs to be continuously moved to carry out scanning shooting to obtain a complete data cube, and a collimating mirror needs to be arranged behind a slit to enable a light beam to enter a diffraction grating, so that the problems of large system volume, low scanning resolution and high cost are caused.
The filter type spectral imaging technology uses a filter as a light splitting element, and a liquid crystal tunable filter and a linear gradient filter are commonly used, and the mode needs spectral modulation to obtain a complete data cube. The linear gradient filter plates are formed by plating various optical films with different wavelengths on a wafer to form continuous spectrum channels, the coating operation difficulty is high, the yield is low, and the gradient filter plates are tightly attached to a detector to cause the spectrum aliasing phenomenon and reduce the spectrum resolution. The liquid crystal tunable filter can change the central wavelength of the filter by changing the input voltage, is formed by stacking a plurality of single-layer liquid crystal filters, is not easy to apply to a camera lens due to large thickness, and has high production cost.
In the prior art, the light splitting element has large volume, complex preparation process and high cost.
The above background disclosure is only provided to aid in understanding the concepts and technical solutions of the present invention, and it does not necessarily belong to the prior art of the present patent application, and it should not be used to assess the novelty and inventive step of the present application without explicit evidence that the above content has been disclosed at the filing date of the present patent application.
Disclosure of Invention
The utility model discloses a solve current problem, provide a light filter, image device and electronic equipment.
In order to solve the above problem, the utility model discloses a technical scheme as follows:
an optical filter includes a spacer, a first electrode, and a second electrode; a spacer disposed between the first and second electrodes, including a first surface, a second surface, and a fabry-perot interference layer disposed between the first and second surfaces; the first surface and the second surface comprise a high reflectivity film; the first electrode and the second electrode are used for being electrified to provide a potential difference between two ends of the Fabry-Perot interference layer, and the volume of the Fabry-Perot interference layer is changed according to the potential difference.
In an embodiment of the present invention, the fabry-perot interference layer comprises a piezoceramic material in a transparent or translucent state. The Fabry-Perot interference layer comprises at least one piezoceramic material and at least one transparent material which is formed by mixing, wherein the transparent material comprises silicon dioxide, aluminum oxide, titanium dioxide or niobium pentoxide. The Fabry-Perot interference layer expands or contracts according to the potential difference, and the central wavelength of the optical filter is changed along with the volume of the Fabry-Perot interference layer.
In another embodiment of the present invention, the fabry-perot interference layer is deposited by magnetron sputtering or wafer growth technology. The high-reflectance film is a metal reflective film, a dielectric reflective film, or a metal dielectric reflective film. The glass substrate comprises a first surface and a second surface, wherein the first surface is arranged on the first surface, and the second surface is arranged under the second surface.
The utility model also provides an imaging device, which comprises a lens unit, an optical filter and an image sensor; the lens unit comprises at least one group of lenses and is used for projecting the light beams of the target space onto the filter; the optical filter comprises the optical filter as described above, and is arranged on the image sensor and used for enabling light in a specific spectral range to be transmitted and incident on the image sensor, wherein the specific spectral range depends on the central wavelength of the optical filter; the image sensor is used for receiving incident light and acquiring a spectral image of the target space.
In an embodiment of the present invention, the specific spectral range includes: at least one of an ultraviolet spectral range, a visible spectral range, a near infrared spectral range, a mid-wavelength infrared spectral range, and a short-wavelength infrared spectral range.
The present invention further provides an electronic apparatus, including the imaging device as described above.
The utility model has the advantages that: the filter, the imaging device and the electronic equipment are provided, the potential difference is provided by the adjustable wavelength filter designed based on the Fabry-Perot interference principle, so that the Fabry-Perot interference layer expands or contracts, the central wavelength of the filter is changed, the requirements on the flatness and the gradient of an upper reflecting surface and a lower reflecting surface are not high, errors are not easy to cause, the total thickness is only millimeter level, conventional production modes such as magnetron sputtering and the like are used, the production cost is low, and large-scale production is easy.
The hyperspectral imaging device based on the design of the wavelength-tunable optical filter can realize the spectral imaging with high spectral resolution, can be integrated into other electronic equipment, is easy to miniaturize, and is easy to popularize and apply in a large quantity.
Drawings
Fig. 1 is a schematic structural diagram of an optical filter according to an embodiment of the present invention.
Fig. 2 is a schematic structural diagram of an image forming apparatus according to an embodiment of the present invention.
Detailed Description
In order to make the technical problem, technical scheme and beneficial effect that the embodiment of the present invention will solve more clearly understand, the following combines the drawings and embodiment, and goes forward the further detailed description of the present invention. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element. In addition, the connection may be for either a fixing function or a circuit connection function.
It is to be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in the orientation or positional relationship indicated in the drawings for convenience in describing the embodiments of the present invention and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be construed as limiting the invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the embodiments of the present invention, "a plurality" means two or more unless specifically limited otherwise.
Fig. 1 is a schematic structural diagram of an optical filter according to an embodiment of the present invention. The optical filter 10 includes a spacer 103, a first electrode 104, and a second electrode 105; the spacer 103 includes a first surface 101 and a second surface 102, and the first surface 101 and the second surface 102 include high-reflectivity optical films; the spacer 103 is disposed between the first electrode 104 and the second electrode 105, the spacer 103 including a fabry-perot interference layer; when the first electrode 104 and the second electrode 105 are energized, a potential difference exists between the two electrodes, and the volume of the spacer 103 can be changed by the potential difference, so that the central wavelength of the optical filter 10 is changed.
The spacer 103 includes a piezoceramic material in a transparent or translucent state, preferably, mixed from at least one piezoceramic material and at least one transparent material. The piezoelectric ceramic is an information functional ceramic material capable of converting mechanical energy and electric energy into each other, namely the piezoelectric effect, and the piezoelectric ceramic has dielectricity, elasticity and the like; the commonly used piezoelectric ceramics comprise barium titanate binary system and lead zirconate titanate binary system, and a third ABO added in the binary system3(A represents a divalent metal ion, B represents a tetravalent metal ion or a combination of ions having positive tetravalent) type compounds such as: pb (Mn)1/3Nb2/3)O3And Pb (Co)1/3Nb2/3)O3And the like. If a fourth or more compound is further added to the ternary system, a quaternary or multicomponent piezoelectric ceramic can be formed. In addition, there is a metaniobate-based piezoelectric ceramic such as potassium sodium metaniobate (Na)0.5·K0.5·NbO3) And barium strontium metaniobate (Ba)x·Sr1-x·Nb2O5) And the like, which do not contain toxic lead and are beneficial to environmental protection. The transparent material comprises silicon dioxide (SiO)2) Aluminum oxide (AL)2O3) Titanium dioxide (TiO)2) Niobium pentoxide (Nb)2O5) And the like. In some other embodiments, the spacer 103 may be any transparent material that changes volume when energized, and is not limited in the present disclosure.
After the first electrode 104 and the second electrode 105 are powered on, a potential difference exists between the two electrodes, and the potential difference causes the volume of the spacer 103 to change, that is, the fabry-perot interference layer expands or contracts. When the wavelength of the incident light corresponds to the central wavelength, the transmittance of the optical filter 10 is high, and the incident light exits through the optical filter 10. When the spacer 103 is gradually contracted in volume after the first electrode 104 and the second electrode 105 are energized, the center wavelength of the optical filter 10 gradually decreases; when the spacer 103 is gradually expanded in volume after the energization, the center wavelength of the optical filter 10 gradually increases. Each potential difference corresponds to a center wavelength, and setting a continuously varying potential difference allows a continuously varying center wavelength to be obtained. In some embodiments, the spacers 103 may be deposited by magnetron sputtering, wafer growth techniques, and the like.
The utility model provides an optical filter is based on the adjustable wavelength light filter that fabry-perot interfered the principle design, it makes fabry-perot interfere layer inflation or shrink to provide the potential difference through first electrode 104 and second electrode 105, the central wavelength that leads to the optical filter changes, it is not high to all requiring of roughness and the gradient of upper and lower plane of reflection, be difficult for arousing the error, and the totality thickness only is the millimeter rank, and can use conventional production methods such as magnetron sputtering, and manufacturing cost is lower, easily large-scale production. The filter is different from the existing Fabry-Perot filter or Fabry-Perot tunable filter, the flatness of the upper and lower reflecting surfaces is very high, and the upper and lower reflecting surfaces are designed in parallel, otherwise, errors are caused.
The first surface 101 and the second surface 102 include a material with high reflectivity, that is, the first surface 101 and the second surface 102 include a film with high reflectivity, which may be a metal reflective film, a dielectric reflective film, or a metal dielectric reflective film formed by combining the two films, and the specific material is not limited in the present invention. In some embodiments, the high reflectivity film may be plated on the spacer 103 by an object or chemical deposition method, such as electron beam thermal evaporation, magnetron sputtering, vapor deposition, and the like.
In some embodiments, the filter 10 ensures that light of a specific spectral range passes, the specific spectral range including: at least one of an ultraviolet spectral range, a visible spectral range, a near infrared spectral range, a mid-wavelength infrared spectral range, and a short-wavelength infrared spectral range.
In some embodiments, the optical filter 10 may further include a first glass substrate and a second glass substrate disposed on the first surface 101 and under the second surface 102, respectively, for protecting and fixing the high-reflectance film and the spacer 103 between the two glass substrates.
Fig. 2 is a schematic structural diagram of an image forming apparatus according to an embodiment of the present invention. The imaging device 20 includes a lens unit 201, an optical filter 202 as described above, and an image sensor 203.
Wherein, the lens unit 201 comprises at least one set of lenses for projecting the light beam onto the filter 202; the specific structure design of the optical filter 202 is as shown in fig. 1, and is disposed on the image sensor 203 for transmitting light with a specific wavelength and making the light incident on the image sensor 203; the image sensor 203 receives the incident light and acquires a spectral image of the target space.
In conjunction with the description of fig. 1, the filter 202 can obtain a continuously varying center wavelength by setting a continuously varying input voltage value. The optical filter has a central wavelength every time an input voltage value is set, light beams which meet the central wavelength in light beams reflected from a target space are incident on the image sensor through the optical filter to form a spectrum image, and the image sensor obtains complete spectrum information of the target after continuously setting variable voltage. It will be appreciated that the more center wavelengths are designed within a band, the higher the resolution.
The image sensor 203 is configured to receive light beams with different wavelengths to form spectral bands, and finally obtain not only spectral data of each point in the target space but also image information of any spectral band. In some embodiments, the image sensor 203 may be a CCD sensor, a CMOS sensor, an Avalanche Photodiode (APD), or the like.
The imaging device 20 may be integrated into an electronic device for spectral imaging. For example, in some embodiments, the imaging device 20 may be integrated into a cell phone camera, such as for use in the visible range (380nm-780nm), by providing the filter 202 with continuously varying center wavelengths, each corresponding to a spectral channel in the spectral dimension. The volume expansion and contraction range of the Fabry-Perot interference layer is-0.5 μm, so that the total thickness of the wavelength variable filter is within 0.5mm, the Fabry-Perot interference layer is integrated in a mobile phone camera to be easily miniaturized, for example, the volume is about 10 x 5mm, and the Fabry-Perot interference layer is easy to popularize in mobile phone application.
The utility model provides an imaging device is the high spectrum imaging device based on adjustable wavelength light filter design, realizes high spectral resolution's spectral imaging, and can integrate accomplish the miniaturization in other electronic equipment easily, easily a large amount of popularization and application.
The foregoing is a more detailed description of the present invention, taken in conjunction with the specific preferred embodiments thereof, and it is not intended that the invention be limited to the specific embodiments shown and described. To the technical field of the utility model belongs to the prerequisite of not deviating from the utility model discloses, can also make a plurality of equal substitution or obvious variants, performance or usage are the same moreover, all should regard as belonging to the utility model's scope of protection.
Claims (10)
1. An optical filter, comprising a spacer, a first electrode and a second electrode;
a spacer disposed between the first and second electrodes, including a first surface, a second surface, and a fabry-perot interference layer disposed between the first and second surfaces; the first surface and the second surface comprise a high reflectivity film;
the first electrode and the second electrode are used for being electrified to provide a potential difference between two ends of the Fabry-Perot interference layer, and the volume of the Fabry-Perot interference layer is changed according to the potential difference.
2. The filter of claim 1, wherein the fabry-perot interference layer comprises a piezoceramic material in a transparent or translucent state.
3. The filter of claim 2, wherein the fabry-perot interference layer comprises at least one piezoceramic material and at least one transparent material, and the transparent material comprises silicon dioxide, aluminum oxide, titanium dioxide or niobium pentoxide.
4. The filter of claim 1, wherein the fabry-perot interference layer expands or contracts according to the potential difference, and a center wavelength of the filter varies according to a volume of the fabry-perot interference layer.
5. The filter according to any of claims 1-4, wherein the Fabry-Perot interference layer is deposited by magnetron sputtering and wafer growth techniques.
6. The filter according to any one of claims 1 to 4, wherein the high-reflectance film is a metal reflective film, a dielectric reflective film, or a metal dielectric reflective film.
7. The filter according to any one of claims 1 to 4, further comprising a first glass substrate and a second glass substrate disposed on the first surface and under the second surface, respectively.
8. An imaging apparatus includes a lens unit, an optical filter, and an image sensor;
the lens unit comprises at least one group of lenses and is used for projecting the light beams of the target space onto the filter;
the optical filter, comprising the optical filter according to any one of claims 1 to 7, disposed on the image sensor for transmitting and impinging light of a specific spectral range on the image sensor, the specific spectral range depending on a center wavelength of the optical filter;
the image sensor is used for receiving incident light and acquiring a spectral image of the target space.
9. The imaging apparatus of claim 8, wherein the particular spectral range comprises: at least one of an ultraviolet spectral range, a visible spectral range, a near infrared spectral range, a mid-wavelength infrared spectral range, and a short-wavelength infrared spectral range.
10. An electronic device characterized by comprising the imaging apparatus according to any one of claims 8 to 9.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202020124887.6U CN211527616U (en) | 2020-01-19 | 2020-01-19 | Optical filter, imaging device and electronic equipment |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202020124887.6U CN211527616U (en) | 2020-01-19 | 2020-01-19 | Optical filter, imaging device and electronic equipment |
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| CN211527616U true CN211527616U (en) | 2020-09-18 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111174909A (en) * | 2020-01-19 | 2020-05-19 | 深圳奥比中光科技有限公司 | Optical filter, imaging device and electronic equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111174909A (en) * | 2020-01-19 | 2020-05-19 | 深圳奥比中光科技有限公司 | Optical filter, imaging device and electronic equipment |
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Address after: 518000 floor 12, United headquarters building, high tech Zone, No. 63, Gaoxin South 10th Road, Binhai community, Yuehai street, Nanshan District, Shenzhen, Guangdong Patentee after: Obi Zhongguang Technology Group Co.,Ltd. Address before: 12 / F, joint headquarters building, high tech Zone, 63 Xuefu Road, Nanshan District, Shenzhen, Guangdong 518000 Patentee before: SHENZHEN ORBBEC Co.,Ltd. |
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