CN1174469C - Method for preparing polarization-insensitive semiconductor optical amplifier - Google Patents
Method for preparing polarization-insensitive semiconductor optical amplifier Download PDFInfo
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- CN1174469C CN1174469C CNB011404558A CN01140455A CN1174469C CN 1174469 C CN1174469 C CN 1174469C CN B011404558 A CNB011404558 A CN B011404558A CN 01140455 A CN01140455 A CN 01140455A CN 1174469 C CN1174469 C CN 1174469C
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Abstract
The present invention relates to a preparation method for a polarization insensitive semiconductor optical amplifier, which comprises the following steps that a plasma chemical vapor deposition technique is used for growing a dielectric film on an InP substrate; a mask pattern desired by the semiconductor optical amplifier is etched by a conventional photoetching corrosion technique; a narrow strip width selection growth metal organic chemical vapor deposition technique is used for orderly growing an n-shaped InP buffer layer, an InGaAsP active layer and a p-shaped InP cover layer on the InP substrate after the photoetching; etching liquid is used for removing the dielectric layer; the p-shaped InP cover layer and a InGaAs contact layer doped with zinc are externally extended twice; the strip-shaped structure of the amplifier is etched by the photoetching; an InP window region is externally extended for three times; the strip-shaped structure of the amplifier is etched by the photoetching; chemical vapour deposition is used for growing a SiO2 insulation layer; a silicon dioxide window is opened; an electrode is manufactured; dielectric optical films are coated on both end surfaces of the amplifier for cleavage.
Description
Technical field
The invention belongs to technical field of semiconductors, relate to polarization-insensitive semiconductor photoelectric device (comprising semi-conductor optical amplifier, electroabsorption modulator) and a kind of active spot-size converter (spot-size-converter, SSC) integrated, the preparation method when particularly polarization-insensitive semiconductor optical amplifier is as optical switch.
Background technology
Along with people to the continually developing of fiber bandwidth (proving that now its theoretical limit is (1260-1620) nm) and people active demand to broadband networks, be that the optical-fiber network of information carrier progressively rises and develops with the photoelectron, the requirement of the opto-electronic device of emission, reception, amplification and light modulated is also progressively strengthened.Polarizability is one of photoelectronic important intrinsic property, but owing to material gain in the opto-electronic device is relevant with electric current, and the irrelevant characteristic of asymmetric waveguiding structure and electric current makes and realizes that the controlled opto-electronic device of polarization becomes a great problem.Particularly for passive opto-electronic device, as semi-conductor optical amplifier (SOA), detector and modulator, polarization-insensitive is one of main performance index.When these devices are used for DWDM (dense wave division multipurpose), OADM systems such as (road are multiplexing up and down for optics), require it in big wave-length coverage, to obtain polarization-insensitive more.Up to now, the method for design SOA polarization-insensitive comprises:
1) thick active area structure: this kind structure adopts thick body material active area, short cavity length can realize polarization-insensitive very effectively, but because its active area volume is big, thereby operating current is big, and heat dissipation is too big, and the functional reliability of device is poor, and energy consumption is also big.Can not become the desirable parts in all optical network.
2) connection in series-parallel of several devices: this kind mode adopts component-assembled to realize polarization-insensitive, but in several device connection in series-parallel process, the autoregistration between them is difficulty relatively, and this body structure of device be there is no any improvement.
3) strained quantum well active layer:, thereby can obtain low transparent carrier density, high differential quantum efficency and low noise factor and high saturated output because strained quantum well has the little stairstepping density of states.Particularly the importing of compressive strain material can improve the performance of semiconductor laser.But compressive strain causes the gain of TE mould to increase (the TE mould refers to that electric vector is parallel to the polarised light of junction plane).In order to increase TM mould gain (the TM mould refers to that magnetic vector is parallel to the polarised light of junction plane), will realize the compound transition between electronics and the light hole as far as possible, for this reason, the tensile strain quantum well is a kind of effective method.But, use tensile strain to be difficult near the gain material that realizes that 1.5 μ m are.For this reason, obtain the mqw active layer that the polarization-insensitive optical amplifier adopts following material and structure usually: the intersection mixed type quantum-well materials of (1) compressive strain and tensile strain; (2) low tensile strain amount quantum-well materials; (3) with the quantum-well materials of indium phosphorus (InP) lattice match structure with the potential barrier of tensile strain; (4) strain compensation between nothing coupling trap, the base; (5) coupling quantum well and counterdiffusion quantum well.Although these methods can a bit obtain splendid polarization-insensitive at certain by optimal design, but because the weight hole is bigger in the effective mass difference that is parallel and perpendicular to the direction of growth, make their responsiveness differences to injection current, and, the polarization properties of quantum well constantly changes with adding injection current, but, the polarizability of its waveguide geometry structure is but irrelevant with injection current, and the inconsistency that this material gain and light field restriction factor change makes modal gain obtain polarization-insensitive in being difficult on a large scale.Thereby be difficult to obtain polarization-insensitive in the big current margin by quantum well structure.In addition, for the 5th kind of method that adopts quantum well, Design Theory and material growth are all relatively more difficult.
4) utilize structure compensation to realize polarization-insensitive: this kind method is to utilize no response body material integrated for the SOA and the passive hot spot mapped structure (SSC) of active area, and the intrinsic polarization absorption by SSC compensates the polarization amplification among the SOA.With the made device polarization-insensitive of this method degree height, overcome simultaneously in order to realize that polarization-insensitive needs the wide weakness of fillet, the tolerant difference of bar is increased, can adopt traditional photoetching process, and the far-field characteristic that SSC can improve hot spot improves coupling efficiency, and dependable performance.But adopt butt-joint (butt joint) to realize the integrated of SOA and SSC in making, SOA is very difficult with docking fully of SSC waveguide core layer, and the crystal mass of docking site is difficult to guarantee that complex process needs five extensions simultaneously.In addition, even the device preparation quality is quite high, because the polarizability of SOA is dynamic change, and SSC is owing to be passive device, its can only static compensation a certain polarizability among a small circle, so the polarization-insensitive of device in being difficult to obtain on a large scale.Thereby limited its application in all optical network.
5) vertical cavity surface emitting structural: because the light output end of surface launching structure is circular, the polarization-sensitivity that does not have waveguide itself, thereby can utilize strain-compensated quantum well or body material to obtain interior polarization-insensitive on a large scale more easily, can obtain the far-field spot of circle simultaneously owing to it, thereby the coupling efficiency height.But because the vertical cavity surface emission is a micro-cavity structure, for the preparation travelling-wave amplifier, its gain can be very little, in addition, preparation vertical cavity surface emitting structural, need bottom distribution Bragg reflector (DBR) anti-reflection to pump light, high anti-to input light, for the opto-electronic device that is used for optical fiber communication, its input optical wavelength is all at 1.3-1.4,1.5-1.6 μ m, and the material that is used to prepare this wave band device is indium phosphorus (InP) base system row substantially, the material refringence of InP base system row is less, and the result is difficult to reach requirement with its reflectivity of its preparation DBR speculum, at present, employing GaAs (gallium arsenic) substrate is arranged, with the DBR speculum of GaAs/AlGaAs (gallium aluminium arsenic) as device, then with InGaAsP/indium phosphorus (InGaAsP/InP) active area bonding (bonding) to this DBR speculum, thereby realize high anti-to light in this scope.But for the bonding technology itself of InP series material and GaAs sill is also immature, therefore, the technical difficulty for preparing this kind device is bigger.
6) the material active area structure of nearly tetragonal body: this is a kind of method that generally adopts of the preparation optical switch semi-conductor optical amplifier (SOA) of rising in recent years.Owing to adopt the SOA of this kind method growth can utilize no response body material as active area, nearly tetragonal is adopted in waveguide again, can make material gain and waveguiding structure reach polarization-insensitive respectively like this and be independent of each other, therefore can make device in big current range and in the big wave-length coverage, obtain polarization-insensitive, and, the density of states of body material is big, effective mass is big, therefore can in big injection current scope, keep linear gain, can obtain simultaneously the short response time, these all are advantages for the SOA that uses as optical switch.But the wide selection growth of the fillet of NEC Corporation's employing at present SOA, because its deielectric-coating bar wide very narrow (0.75 μ m) must adopt electron beam exposure (e-beam), cost an arm and a leg, and simple SOA is wide very narrow owing to it, is difficult to be coupled and aligned with optical fiber, and it is few that it goes out luminous power.Usually the wide SOA of fillet two ends are all integrated with spot-size converter, adopt disposable SOA and SSC integrated morphology, in order to reduce the absorption in SSC district, big wave length shift must be obtained,, big tensile strain must be brought simultaneously according to the characteristics of the wide selection growth of fillet, make the crystal mass variation in proper material SSC district, and, needing to adopt normal pressure MOVPE growth pattern in order to obtain big wave length shift, this brings higher requirement to the MOVPE growth pattern.In addition, in order to obtain disposable integrated SOA+SSC device, the outer wedge type reticle in simple SSC district is also harsh especially to the requirement of plate-making.All these has increased difficulty and the device cost of disposable integrated SOA+SSC.
Summary of the invention
The objective of the invention is to, a kind of preparation method of polarization-insensitive semiconductor optical amplifier is provided, its key is to provide the new mask pattern of a kind of SOA+SSC, makes the lithography layout of SOA+SSC make easily, can reach higher accuracy; SSC partly adopts active structure, has both obtained the output of big optics, improves its far-field characteristic simultaneously again, and adopts the wide selection growth pattern of fillet of low pressure can obtain the integrated device of SOA+SSC, and technology is simple, function admirable.
The preparation method of a kind of polarization-insensitive semiconductor optical amplifier of the present invention is characterized in that, comprises the steps:
1) utilizes plasma chemical vapor deposition technique somatomedin film on indium phosphorus substrate;
2) utilize common lithography corrosion technology to carve the required mask pattern of semi-conductor optical amplifier; The deielectric-coating mask pattern is a wedge type, and its length can change according to actual needs, for physics limit and the suitable wedge type height of acquisition that overcomes optical exposure, wedge type and outer wedge type in must adopting simultaneously; Central strip is wide 1 micron, is utilizing common photoetching caustic solution to obtain not having the figure of deielectric-coating toothed edge, strict control gluing, exposure, develop,, adopt the buffered oxide etch agent then to obtain mask pattern clearly, select room temperature, erode away the medium mask pattern of no toothed edge;
3) adopt the wide selection growing metal of fillet organic chemical vapor deposition technology, growing n-type indium phosphorus resilient coating, InGaAsP active layer and p type indium phosphorus cap rock successively on the indium phosphorus substrate after the photoetching;
4) utilize corrosive liquid to remove deielectric-coating;
5) secondary epitaxy p type indium phosphorus cap rock and the indium gallium arsenic contact layer of mixing zinc;
6) photoetching corrosion goes out the device strip structure;
7) three extension indium phosphorus window regions;
8) photoetching corrosion goes out the device strip structure;
9) utilize the chemical vapor deposition growth silicon dioxide insulating layer;
10) open the silicon dioxide window;
11) make electrode;
12) cleavage is plated dielectric optical thin film on two end faces of device.
The deielectric-coating of growth can be that silicon dioxide, silicon nitride also can be silicon oxynitrides in its step 1, which kind of deielectric-coating no matter, and its growth thickness is no more than 150 nanometers.
Obtain big speed enhancer when utilizing the metal organic chemical vapor deposition growing n-type indium phosphorus resilient coating of the wide selection of fillet growth in its step 3, to form precipitous thickness type wedge type, when the growing indium-gallium-arsenic-phosphor active layer, adopt little speed enhancer, to reduce big strain differential in the wedge type growth district, and guarantee that non-wedge type district InGaAsP active area is no strain regions, its growing height and growth bar are wide consistent, form the bar shaped active area in nearly four directions; And the wedge type district is the tensile strain district, thereby guarantees that active area on the whole all can obtain the gain of polarization-insensitive.
In its step 4 in used corrosive liquid and the step 2 used corrosive liquid just the same.
In its step 5, can be p type indium phosphorus structure, also can carry out ion in these active area current barrier layer both sides and inject, to reduce leakage current.
The zone that photoetching corrosion falls in its step 6 is to be used to grow the zone of indium phosphorus window.
The indium phosphorus window region of growth is plain indium phosphorus layer in its step 7.
Insulating barrier can be a silicon dioxide in its step 9, also can be silicon nitride or silicon oxynitride.
Electrode preparation adopts directly band glue lift-off technology in its step 11, or etching electrode pattern technology.
The light-plated deielectric-coating plates anti-reflection film according to actual needs in its step 12, and its reflectivity must be below 0.01%.
This kind preparation method not only is suitable for preparing polarization-insensitive semiconductor optical amplifier, also is suitable for preparing the integrated of SOA and electroabsorption modulator, also comprises the integrated of (SOA+SSC+EA).
Description of drawings
For further specifying technology contents of the present invention, below in conjunction with embodiment and accompanying drawing the present invention is done a detailed description, wherein:
Fig. 1 is first lithography layout of such device of preparation;
Fig. 2 is once the outer integrated vertical view of delaying;
Fig. 3 is the profile that a bar shaped is delayed outward;
Fig. 4 is the vertical view of integrated device before the secondary epitaxy;
Fig. 5 is the profile of integrated device before the secondary epitaxy;
Fig. 6 is the schematic diagram of the whole active SSC integrated devices of SOA+;
Fig. 7 is the schematic diagram of the whole active SSC integrated devices of another SOA+;
Fig. 8 is the passive SSC+EA integrated device of a SOA+ schematic diagram.
Embodiment
Embodiment one: the whole active SSC of polarization-insensitive SOA+ are integrated
Polarization-insensitive semiconductor optical amplifier that the present invention is prepared and active SSC are integrated, and its preparation process comprises as follows:
1) the using plasma chemical vapour deposition technique layer thickness of growing is the SiO of 100-150 nanometer (nm) on n type indium phosphorus substrate
2Deielectric-coating;
2) adopt common reticle of uv-exposure technology preparation;
3) adopt substrate photoetching, the corrosion of reticle prepared in the step 2, obtain corresponding SiO step 1
2The deielectric-coating figure of mask, as shown in Figure 1;
4) adopt the wide growing technology of low pressure MOVPE fillet, to the substrate of step 3 gained growing n-type indium phosphorus (InP) resilient coating, the InGaAsP that undopes (InGaAsP) active layer and p type InP cap rock (as shown in Figures 2 and 3) successively;
5) adopt used corrosive liquid in the step 3 to erode SiO on the print
2(as shown in Figure 5);
6) indium gallium arsenic (InGaAs) contact layer of employing Planar Quadratic epitaxy technology growing p-type InP cap rock and heavily doped zinc;
7) photoetching corrosion is to form the device bar shaped;
8) utilize thermal oxidation chemical deposition technique growth SiO
2Insulating barrier;
9) open SiO
2Window;
10) utilize band glue lift-off technology to make electrode pattern;
11) at the identical anti-reflection film of device both ends of the surface plating, its chamber face reflectivity reaches (as Fig. 6) below 0.001%.
Deielectric-coating in its step 1 can be SiO
2, also can be silicon oxynitride (SiON) or silicon nitride (SiN); The width in the length in wedge type district and interior wedge type and outer wedge type district can design and the order of accuarcy that can make a plate and the order of accuarcy of photoetching corrosion design according to actual needs in the plate-making figure in the step 2.Photoetching corrosion in the step 3 must meet the technology of 1 μ m, makes that the deielectric-coating pattern edge that erodes away is smooth, no burr.Utilize in the step 3 in the wide selection growth of the low pressure fillet MOVPE technical process, during growth n-InP, adopt big speed enhancer, during growth InGaAsP, adopt little speed enhancer.
Embodiment two: active SSC is integrated for polarization-insensitive SOA+ part
This kind preparation of devices method and embodiment one are basic identical, just need further to strengthen wave length shift when the wide growth of a fillet InGaAsP quaternary layer, to reduce the absorption of passive SSC part; In addition, change electrode pattern, SSC is partly covered for electrode.
Embodiment three: the passive SSC+EA of the active SSC+ of polarization-insensitive SOA+ is integrated:
Owing to relate to the integrated of electroabsorption modulator here, its preparation process is different from preceding two examples slightly, and its concrete steps are as follows:
1, utilizes Fig. 1 reticle, the photoetching of n-InP substrate is eroded away the smooth smooth deielectric-coating mask pattern in edge;
2, the slice, thin piece behind the photoetching corrosion in the step 1 is made the wide extension of fillet, comprise the n-InP resilient coating, InGaAsP active passive ducting layer and part p-InP cap rock undope;
3, erode the mask medium with corrosive liquid; Deionized water rinsing erodes away the semiconductor unsalted surface with the concentrated sulfuric acid more then, uses a large amount of deionized water rinsings;
4, make the Planar Quadratic extension, comprise p-InP buried regions and InGaAs contact layer;
5, be etched away InGaAs contact layer between SOA district and the EA, and with selecting He
+Ion injects and forms electric isolating trenches;
6, evaporation dielectric insulating film, and carve electrode window through ray;
7, adopt band glue to peel off (lift-off) technology, make the p side electrode figure in SOA and EA district;
8, attenuate is done N face electrode;
9, last end face plating blooming at device.
Fig. 1 provides first lithography layout of such device of preparation, is the shared reticle of these devices, also is main core of the present invention place.In order to utilize no response body material preparation polarization-insensitive SOA, the bar of SOA is wide must not to surpass 1 μ m, we adopt the wide selection growing technology of fillet, the wide automatic growth of its active area bar is formed, and do not adopt the way of chemical corrosion, therefore, it selects the wide selection 1 μ m of bar of growth district, in order to obtain the particular rate enhancer, both sides mask width is 20 μ m, according to the rule of the wide selection growth of fillet, along with the minimizing of mask width, the growth rate of material is in continuous decline, thereby by the wide variation of mask strip, make growth district vertically form certain gradient, form thickness type taper, but owing to there is the limit of uv-exposure, when bar is wide when being 1 μ m magnitude, the mask width reduces up to vanishing because diffraction effect, bar wide will be very inaccurate.Can guarantee simultaneously the speed enhancer that needs for fear of the physics limit of this exposure, we have adopted interior wedge type and outer wedge type simultaneously, make when the mask strip reductions is few, the bar of growth district is wide in continuous increase, and mask strip is wide like this needn't reduce to the zero desirable speed enhancer that just can reach.And the window region of device all utilizes SiO on the whole in this piece version
2Shelter, avoided once the outer step of delaying out the InP window like this, also avoided simultaneously photoetching corrosion to the part of active area, help the improvement of device performance, in domain, adopt the S type to arrange each tube core, be convenient to delay outside way by photoetching corrosion InP to form the oblique angle window structure, help reducing chamber face reflectivity.
Fig. 2 and Fig. 3 provide extension trailing flank figure and profile, Yanzhong outside once, and growth n-InP layer 4 earlier, its thickness decide according to needed InGaAsP active layer 3, enough narrow of the width of the active layer 3 of assurance InGaAsP; Afterwards, the InGaAsP active layer 3 in the nearly four directions of growth needs in the growth to guarantee that the strain in SSC district can not be too big, to guarantee the crystal mass in SSC district, guarantees that simultaneously the SOA active area partly is no strain gauge material.Afterwards, growth p-InP cap rock 2 forms the pn knot.Here, the SOA active area partly is 400 μ m, and the SSC part is decided according to active area growth wavelength shift and taper shape mould spot change over condition.In a word, the length in SSC district will guarantee that the conversion of mould spot is suitable, and less far-field divergence angle is arranged.The SiO at two ends
2Mask 4 figures are according to the designs that will generate.Wherein, the oblique angle part is the InP window region, growth p-InP window when being used for secondary epitaxy, like this, avoid once the outer photoetching corrosion InP window region of delaying, reduced processing step, while has also reduced the damage of active area materials and has stained, and helps guaranteeing device performance.
Fig. 4 and Fig. 5 are once the outer schematic diagrames that erodes deielectric-coating with corrosive liquid of delaying.Wherein 1,2,3 indications are the same with Fig. 2 and Fig. 3.
Fig. 6 is the overall schematic of device.Among the figure, 1 is the p-InP layer, and the pn that buries that is used to form the BH structure ties and waveguiding structure; 2 is the Au/Ge/Ni alloy-layer, is used to form n face electrode; 3 is Zn heavy doping InGaAs contact layer, is used to form the ohmic contact of device, reduces series resistance and unnecessary loss; 4 is the SiO2 insulating barrier, is used to reduce leakage current; 5 is the Au/Zn/Au alloy-layer, is used to form p face electrode, and 6 is the InP window region; Can be the InP that undopes, can be p-Inp also, is used to increase scattering of light, reduces chamber face reflectivity; 7 is the n-InP substrate; 8 is wedge type tensile strain active area, and its effect mainly is to be used to improve the mould shape of spot, and simultaneously, adopting active structure is the strong absorption that causes for fear of this part; 9 is the nearly cubic active area of body material, is used for the optical gain that amplifier produces polarization-insensitive; 10 is the n-InP resilient coating, on the one hand is used for forming the pn knot, and being used on the other hand looking unfamiliar according to (111) B according to the wide selection growth of fillet, to be formed with the fillet of source region needs wide for long characteristics; 11 is chamber face antireflective coating, is used to reduce chamber face reflectivity, forms effective travelling-wave amplifier.Body material SOA active area provides the main region that SOA amplifies, and needs to form the waveguiding structure in nearly four directions, itself is no response body material simultaneously, so just can guarantee polarization-insensitive in big electric current and big wave-length coverage, simultaneously, the linearity is good, and is fast to the response of signal.SSC active area part further provides amplification to signal on the one hand, and its taper type waveguiding structure can be realized the conversion of mould spot simultaneously, improves its far-field characteristic, to guarantee output light higher coupling efficiency is arranged.Because the wide selection growth of fillet, the SSC part must be tensile strain, and along with the attenuation of body material growth thickness, it is big that the tensile strain in SSC district becomes, and therefore, although the SSC district no longer is the waveguiding structure in nearly four directions, still can obtain polarization-insensitive.Simultaneously, because there is certain wave length shift in the SSC district with respect to the SOA district, such active area structure can obtain polarization-insensitive in the larger context.The p-InP Window layer at oblique angle helps reducing chamber face reflectivity.And such oblique angle structure behind secondary epitaxy as long as can obtain to the InP photoetching corrosion, do not need to carry out fillet wide oblique angle growth, also can reach the effect of reaching the same goal by different routes.But the growth difficulty is little many.The 11st, chamber face anti-reflection film is used for further reducing reflectivity.By above measure, make chamber face reflectivity reach 10
-4Below.
Fig. 7 is the distortion of Fig. 6, and is oversize when the active area wave length shift, then needs SSC partly as active area, partly as passive wave guide, as long as change its electrode length.
Fig. 8 also is the distortion of Fig. 6, is the schematic diagram of SOA+SSC+EA.Wherein 1,2,3,4, the same with the front indication act on also identical, 5 are meant the p face electrode of EA electroabsorption modulator, because modulator will be considered the problem of modulation rate, therefore electrode must be made special pattern, reach the current channel that promptly can be formed with effect, can reduce parasitic capacitance again simultaneously; 6 are SOA district p face electrode, because it is a quiescent operation, therefore are not subjected to the influence of electric capacity, make large-area electrode pattern; 7 is the p-InP cap rock, is used to form pn knot and active waveguide structure on the one hand, also forms the buried regions of BH structure simultaneously; 8 is chamber face anti-reflection film, is used to reduce chamber surface launching rate, helps to form travelling-wave amplifier; 9 is oblique angle InP window region, is used to reduce chamber surface launching rate; 10 is the n-InP substrate; 11 is wedge type EA electroabsorption modulator part; 12 is passive wedge type part, and 11 and 12 optical transmission and the modulation of on the one hand the SOA active area being amplified also will improve the optical quality of exporting light simultaneously, makes it be more suitable for and the optical fiber coupling, reduces coupling loss; 13 is nearly tetragonal body material SOA active area part, is used to produce the polarization-insensitive gain of light; 14 is the n-InP resilient coating, is used to form on the one hand pn knot and waveguiding structure, more mainly is to look unfamiliar according to (111) B according to the wide selection growth of fillet that to be formed with the fillet that the source region needs wide for long characteristics; 15 is the helium ion implanted region, is between SOA and the EA, is used to strengthen the isolation of the two, reduces the influence of SOA active area parasitic capacitance to the EA High Speed Modulation.Because the EA district is partly served as by wedge type, certain wave-length coverage is arranged, and the wave-length coverage that therefore can modulate is big, and this is consistent greatly with the scalable wave-length coverage of front SOA, simultaneously, the waveguiding structure of the body material of tensile strain and flat also can make EA reach polarization-insensitive.In a word, the Collaboration of SOA and EA can obtain amplification and modulation, big extinction ratio and the big premium properties such as power output of polarization-insensitive in big wave-length coverage.And the SOA and the EA that are all the body material are short to the response time of signal, reduce dynamic dispersion and crosstalk.Simultaneously, the waveguiding structure of SSC type can reduce far-field divergence angle, improves the far-field characteristic of device, increases and the coupling efficiency of optical fiber and the tolerance that is coupled, thereby can obtain the gain of big fiber-to-fiber, increases luminous power.The InGaAs contact layer is dug up to form isolating trenches by the SSC district of EA and SOA mid portion, injects the He ion in this zone again, isolates with the electricity that increases SOA and EA district, reduces the parasitic capacitance in EA district, obtains high stability simultaneously.
The invention has the advantages that:
1, adopt simultaneously in wedge type and outer wedge type, overcome the inaccuracy that the physics limit of exposing in the plate-making process is brought, the while can be satisfied the big thickness enhancer of acquisition in the growth course again.
Adopt big speed enhancer when 2, in growth course, growing n-InP, to obtain big thickness enhancer, and when growth InGaAsP active area, adopt little speed enhancer, reducing wave length shift and strain variation, thus obtain based on refractive index wedge type (taper) be assist, the spot-size converter of thickness t aper and the disposable integrated morphology of SOA.
3, no taper district InGaAsP grows into strainless nearly tetragonal, and the taper district grows into the tensile strain district, can guarantee whole wave guide structure polarization-insensitive like this.
4, taper type wave guide zone adopts complete active or part active structure, reduced should the zone to the strong absorption of light, needn't adopt simultaneously normal pressure to select growth MOVPE technology in order to obtain big wave length shift, also needn't worry to cause the crystal mass variation owing to big wave length shift brings big strain.This taper structure equally also can be improved the far-field characteristic of hot spot simultaneously, improves coupling efficiency, increases the power output of SOA.
5, the nearly tetragonal body material of no strain is main body material active area, can make SOA obtain polarization-insensitive in big electric current injects scope and big wave-length coverage, and compare with the quantum well active area, it is short that charge carrier injects relaxation time, response is fast, and the density of states is big, the linearity height of device.
6, adopt the wide selection growing technology of fillet, nearly cubic table top is formed automatically, need not be to the active waveguide etching, reduced the defective of active area, thereby reduced non-radiative convergence, helped reducing the transparent electric current and the operating current of device, also helped reducing noise factor.
7, utilize SiO
2The medium mask obtains the oblique angle window region, has avoided like this reducing processing step to once delaying the photoetching corrosion of active waveguide outward, has also reduced the corrosion failure to active waveguide simultaneously, helps to guarantee the performance of device.And adopt the way of etching to obtain oblique angle structure at window region, avoided the oblique angle growth difficulty that crystal orientation effect sensitivity causes in the wide selection growth of fillet on the one hand, thereby utilized the blunt oblique angle InP window that obtains of photoetching corrosion crystal orientation effect on the other hand, and the InP window at oblique angle can very effective reduction chamber face reflectivity, thereby alleviate the difficulty of cavity surface film coating, the SOA that obtained performance is splendid.
8, SOA+SSC adopts disposable integrated morphology, the defective of having avoided the butt joint difficulty and having brought thus.Processing step is simple, and the uv-exposure technology is all adopted in the still photoetching of no matter making a plate, and technical difficulty is reduced, and device cost reduces.The polarization-insensitive SOA that obtained performance is good.
9, this kind structure, if reverse electrode is made in part SSC district, other parts still are the forward electrode, and carve isolating trenches between SOA and EA, select to inject with He then, and the EA electrode made pattern electrodes, and add forceful electric power and isolate, reduce parasitic capacitance, then this structure has become the structure of SOA+EA, and the SOA+EA integrated device of this kind structure preparation, can in big wave-length coverage, obtain amplification and modulation, big extinction ratio and the big premium properties such as power output of polarization-insensitive.And the SOA and the EA that are all the body material are short to the response time of signal, reduce dynamic dispersion and crosstalk.Simultaneously, the waveguiding structure of SSC type can reduce far-field divergence angle, improves the far-field characteristic of device, increases and the coupling efficiency of optical fiber and the tolerance that is coupled, thereby can obtain the gain of big fiber-to-fiber, increases luminous power.
Claims (10)
1, a kind of preparation method of polarization-insensitive semiconductor optical amplifier is characterized in that, comprises the steps:
1) utilizes plasma chemical vapor deposition technique somatomedin film on indium phosphorus substrate;
2) utilize common lithography corrosion technology to carve the required mask pattern of semi-conductor optical amplifier; The deielectric-coating mask pattern is a wedge type, and its length can change according to actual needs, for physics limit and the suitable wedge type height of acquisition that overcomes optical exposure, wedge type and outer wedge type in must adopting simultaneously; Central strip is wide 1 micron, is utilizing common photoetching caustic solution to obtain not having the figure of deielectric-coating toothed edge, strict control gluing, exposure, develop,, adopt the buffered oxide etch agent then to obtain mask pattern clearly, select room temperature, erode away the medium mask pattern of no toothed edge;
3) adopt the wide selection growing metal of fillet organic chemical vapor deposition technology, growing n-type indium phosphorus resilient coating, InGaAsP active layer and p type indium phosphorus cap rock successively on the indium phosphorus substrate after the photoetching;
4) utilize corrosive liquid to remove deielectric-coating;
5) secondary epitaxy p type indium phosphorus cap rock and the indium gallium arsenic contact layer of mixing zinc;
6) photoetching corrosion goes out the device strip structure;
7) three extension indium phosphorus window regions;
8) photoetching corrosion goes out the device strip structure;
9) utilize the chemical vapor deposition growth silicon dioxide insulating layer;
10) open the silicon dioxide window;
11) make electrode;
12) cleavage is plated dielectric optical thin film on two end faces of device.
2, the preparation method of polarization-insensitive semiconductor optical amplifier according to claim 1, it is characterized in that, the deielectric-coating of growth can be that silicon dioxide, silicon nitride also can be silicon oxynitrides in its step 1, which kind of deielectric-coating no matter, and its growth thickness is no more than 150 nanometers.
3, the preparation method of polarization-insensitive semiconductor optical amplifier according to claim 1, it is characterized in that, obtain big speed enhancer when utilizing the metal organic chemical vapor deposition growing n-type indium phosphorus resilient coating of the wide selection of fillet growth in its step 3, to form precipitous thickness type wedge type, when the growing indium-gallium-arsenic-phosphor active layer, adopt little speed enhancer, to reduce big strain differential in the wedge type growth district, and guarantee that non-wedge type district InGaAsP active area is no strain regions, its growing height and growth bar are wide consistent, form the bar shaped active area in nearly four directions; And the wedge type district is the tensile strain district, thereby guarantees that active area on the whole all can obtain the gain of polarization-insensitive.
4, the preparation method of polarization-insensitive semiconductor optical amplifier according to claim 1 is characterized in that, in its step 4 in used corrosive liquid and the step 2 used corrosive liquid just the same.
5, the preparation method of polarization-insensitive semiconductor optical amplifier according to claim 1 is characterized in that, in its step 5, can be p type indium phosphorus structure, also can carry out ion in these active area current barrier layer both sides and inject, to reduce leakage current.
6, the preparation method of polarization-insensitive semiconductor optical amplifier according to claim 1 is characterized in that, the zone that photoetching corrosion falls in its step 6 is to be used to grow the zone of indium phosphorus window.
7, the preparation method of polarization-insensitive semiconductor optical amplifier according to claim 1 is characterized in that, the indium phosphorus window region in its step 7 is plain indium phosphorus layer.
8, the preparation method of polarization-insensitive semiconductor optical amplifier according to claim 1 is characterized in that, its step 9 insulating barrier can be a silicon dioxide, also can be silicon nitride or silicon oxynitride.
9, the preparation method of polarization-insensitive semiconductor optical amplifier according to claim 1 is characterized in that, its step 11 electrode preparation can adopt direct band glue lift-off technology, or etching electrode pattern technology.
10, the preparation method of polarization-insensitive semiconductor optical amplifier according to claim 1 is characterized in that, the light-plated deielectric-coating plates anti-reflection film according to actual needs in its step 12, and its reflectivity must be below 0.01%.
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| CNB011404558A CN1174469C (en) | 2001-12-07 | 2001-12-07 | Method for preparing polarization-insensitive semiconductor optical amplifier |
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| CNB011404558A CN1174469C (en) | 2001-12-07 | 2001-12-07 | Method for preparing polarization-insensitive semiconductor optical amplifier |
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| CN100354701C (en) * | 2003-11-21 | 2007-12-12 | 中国科学院半导体研究所 | Manufacturing method of polarizing non sensitive semiconductor optical multiplier |
| CN1293399C (en) * | 2004-03-19 | 2007-01-03 | 中国科学院半导体研究所 | Method for realizing silicon based silicon dioxde waveguide polarization irrelevancy by employing non-planar process |
| CN1320711C (en) * | 2004-11-09 | 2007-06-06 | 中国科学院半导体研究所 | Method for producing semiconductor optical amplifier for wavelength conversion |
| JP7062358B2 (en) * | 2016-12-27 | 2022-05-06 | 古河電気工業株式会社 | Semiconductor laser module |
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