CN117440228A

CN117440228A - Piezoelectric motor and camera module thereof

Info

Publication number: CN117440228A
Application number: CN202210774300.XA
Authority: CN
Inventors: 请求不公布姓名; 赵波杰
Original assignee: Ningbo Sunny Opotech Co Ltd
Current assignee: Ningbo Sunny Opotech Co Ltd
Priority date: 2022-07-01
Filing date: 2022-07-01
Publication date: 2024-01-23

Abstract

The piezoelectric motor comprises a base and a movable assembly, wherein the movable assembly is movably connected above the base and is in butt joint with a piezoelectric actuator, the movable assembly is supported on a fixed assembly through a plurality of balls arranged on one side of the movable assembly, the balls form at least one supporting plane, and a driving end of the piezoelectric actuator acts on the supporting plane formed by the balls so as to reduce the tilting moment of the piezoelectric actuator on the movable assembly.

Description

Piezoelectric motor and camera module thereof

Technical Field

The scheme relates to a piezoelectric motor and a camera module thereof, in particular to a piezoelectric motor capable of realizing multi-degree-of-freedom motion.

Background

As the demand for anti-shake photographing increases, users increasingly pay attention to the anti-shake performance of photographing in image photographing. Users desire an image capturing module having high pixels, small size, and anti-shake capability. However, in general, the number of pixels of the image capturing module increases with an increase in the image plane, and the total mechanical height (total track length, TTL) of the optical element increases with an increase in the image plane. The size of the optical element or the photosensitive device is increased, the stroke and driving force requirement of the motor matched with the optical element or the photosensitive device are also increased, and the size of the camera module is increased due to the increase of the size of the motor.

In the prior art, a voice coil type shrapnel motor is commonly used, but because of the problem of shrapnel bearing capacity, the shrapnel cannot well meet the requirements of large stroke and large weight of an optical element or a photosensitive device, and in the prior art, a ball motor is also used for realizing motor anti-shake, but the response frequency of the ball motor is lower, the requirements of high precision and high frequency anti-shake are difficult to respond, abnormal sound and the like are easy to cause. The above problems can be greatly improved by using a piezoelectric motor, but since the piezoelectric motor is used as a contact actuator, the piezoelectric motor needs to be in friction with a driven member, and in the design process of the piezoelectric motor, the problems of yield in the assembly process, reliability in the use process, product use performance, miniaturization and the like are particularly required to be paid attention, the scheme of the piezoelectric motor needs to be designed to achieve more performance.

Disclosure of Invention

In view of the above problems, the present invention provides a piezoelectric motor and an imaging module thereof, which can achieve at least one or more of the following advantages:

1. high-precision anti-shake effect is achieved;

2. the structural improvement optimizes and improves the installation yield of the piezoelectric motor;

3. product reliability is improved;

4. The product size is reduced.

Further objects and advantages of the present invention will become fully apparent from the following description and the accompanying drawings.

The present invention provides a piezoelectric motor, comprising:

a fixing assembly;

a movable assembly movably coupled to the fixed assembly;

the piezoelectric actuator is abutted to the movable assembly, the movable assembly is supported on the fixed assembly through a plurality of balls arranged on one side of the movable assembly, the balls form at least one supporting plane, and the driving end of the piezoelectric actuator acts on the balls to form the supporting plane.

In some embodiments, the present invention provides a piezoelectric motor, wherein the balls comprise side wall balls and end face balls, the driving direction of the driving end of the piezoelectric actuator is perpendicular to the supporting plane formed by the side wall balls, and the driving direction of the driving end of the piezoelectric actuator is parallel to the supporting plane formed by the end face balls.

In some embodiments, the present invention provides a piezoelectric motor, wherein the sidewall balls include a first height ball and a second height ball, and a position where the driving end of the piezoelectric actuator abuts the movable assembly is located at a middle region of a line connecting the first height ball and the second height ball in a side projection.

In some embodiments, the present invention provides a piezoelectric motor, wherein the number of the first height balls is one, the number of the second height balls is two, and in a projection in a certain direction, the position of the driving end of the piezoelectric actuator in the whole travel track is located in a triangular area where the first height balls and the second height balls are connected.

In some embodiments, the present invention provides a piezoelectric motor wherein the force provided by the drive end of the piezoelectric actuator to the movable assembly throughout the travel path is present at a level oblique to the ball connection line.

In some embodiments, the present invention provides a piezoelectric motor, wherein the first height ball and the second height ball are the same distance from each other, and in a projection in a certain direction, the first height ball and the second height ball form an equilateral triangle area.

In some embodiments, the present invention provides a piezoelectric motor, wherein the ball comprises at least two piezoelectric actuator ipsilateral balls disposed above the piezoelectric actuators, and two of the piezoelectric actuator ipsilateral balls are disposed outside the piezoelectric actuators.

In some embodiments, the present invention provides a piezoelectric motor, wherein in a projection in a certain direction, two balls on the same side of the piezoelectric actuator are located at the same height as two balls at the second height.

In some embodiments, the present invention provides a piezoelectric motor, wherein in a certain direction projection, two of the piezoelectric actuator ipsilateral balls are located between two of the second height balls.

In some embodiments, the present invention provides a piezoelectric motor, wherein the distance between each of the same-side balls of the piezoelectric actuator and the adjacent second-height balls is the same, and in a projection in a certain direction, the two same-side balls of the piezoelectric actuator and the two second-height balls form an isosceles trapezoid, and the piezoelectric actuator is near the narrower parallel side of the isosceles trapezoid.

In some embodiments, the present invention provides a piezoelectric motor, wherein the piezoelectric actuator includes a first piezoelectric actuator, a second piezoelectric actuator, and the movable assembly includes a first frame, a second frame movably connected to the first frame, the first piezoelectric actuator being fixedly mounted on one side of the base, the second piezoelectric actuator being fixedly mounted on one side of the first frame, and driving directions of the first piezoelectric actuator and the second piezoelectric actuator being orthogonal.

Compared with the prior art, the application has at least one of the following technical effects:

1. by designing the relative position relation between the ball connecting line area and the piezoelectric actuator, the driving structure design of the camera module is simplified.

2. By optimizing the structure of the balls, the tilting moment of the piezoelectric actuator is reduced.

3. By optimizing the structure of the piezoelectric actuator, the tilting moment of the piezoelectric actuator is reduced.

Additional embodiments and features are set forth in part in the description which follows and in part will become apparent to those skilled in the art upon examination of the specification or may be learned by practice of the disclosed subject matter. A further understanding of the nature and advantages of the present disclosure may be realized by reference to the remaining portions of the specification and the drawings which form a part of this application.

Drawings

Fig. 1 shows a cross-sectional view of the structure of an imaging module with a piezoelectric motor of the present application.

Fig. 2 shows a schematic exploded view of the structure of the piezoelectric motor in the present application.

Fig. 3 shows an exploded schematic view of the piezoelectric motor in the present application.

Fig. 4A shows a torque schematic of a piezoelectric actuator in a piezoelectric motor in the present application.

Fig. 4B shows a torque schematic of a piezoelectric actuator in a piezoelectric motor in the present application.

Fig. 5 shows a schematic structural view of a piezoelectric actuator in the piezoelectric motor in the present application.

Fig. 6 shows a schematic structural view of a piezoelectric actuator in the piezoelectric motor in the present application.

Fig. 7 shows a schematic structural view of a piezoelectric actuator in the piezoelectric motor in the present application.

Fig. 8 shows a schematic cross-sectional structure of the piezoelectric motor in the present application.

Fig. 9 shows a schematic exploded view of the structure of the piezoelectric motor in the present application.

Fig. 10 shows a schematic view of a frame of a piezoelectric motor in the present application.

Fig. 11 shows a schematic diagram of a circuit board structure of the piezoelectric motor in the present application.

The above and other objects, features and advantages of the present invention will become more apparent by describing embodiments of the present invention in more detail with reference to the attached drawings. The accompanying drawings are included to provide a further understanding of embodiments of the invention and are incorporated in and constitute a part of this specification, illustrate the invention and together with the embodiments of the invention, and not constitute a limitation to the invention. In the drawings, like reference numerals generally refer to like parts or steps.

Detailed Description

Hereinafter, exemplary embodiments according to the present invention will be described in detail with reference to the accompanying drawings. It should be apparent that the described embodiments are only some embodiments of the present invention and not all embodiments of the present invention, and it should be understood that the present invention is not limited by the example embodiments described herein.

In the description of the present invention, it should be noted that, for the azimuth words such as terms "center", "lateral", "longitudinal", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., the azimuth and positional relationships are based on the azimuth or positional relationships shown in the drawings, it is merely for convenience of describing the present invention and simplifying the description, and it is not to be construed as limiting the specific scope of protection of the present invention that the device or element referred to must have a specific azimuth configuration and operation.

It should be noted that the terms "first," "second," and the like in the description and in the claims of the present application are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order.

The terms "comprises" and "comprising," along with any variations thereof, in the description and claims of the present application are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements that are expressly listed or inherent to such process, method, article, or apparatus.

In the description of the present invention, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; either directly or indirectly through intermediaries, or both elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.

Summary of the application

As described in the background art, the piezoelectric motor is used as a contact actuator, the driving end of the piezoelectric motor and the carrier are required to be kept tight, but interference cannot occur during assembly and working, so that the piezoelectric motor and components of the piezoelectric motor are required to be optimally designed, and the piezoelectric motor components are required to meet the characteristics of being convenient for assembly, preventing component interference, improving driving performance, increasing product reliability and the like.

In addition, for miniaturization of motor size, it is always one of the core demands of manufacturers, and how to reduce the size of piezoelectric motor without affecting performance is also an important product improvement.

On the other hand, the need to achieve reduced size and improved assembly yields while satisfying functionality and reliability between piezoelectric motor components is a further challenge.

Referring to fig. 1, an exemplary camera module including a piezoelectric motor will be described, which includes a piezoelectric motor 1, a lens assembly 2, and a photosensitive assembly 3. The lens assembly 2 has an optical axis, the piezoelectric motor 1 is disposed outside the lens assembly 2, the photosensitive assembly 3 is disposed below the lens assembly 2, and the lens assembly 2 is held on a photosensitive path of the photosensitive assembly 3. The lens assembly 2 is used for collecting imaging light from a photographed object and transmitting the imaging light to the photosensitive assembly 3, and the photosensitive assembly 3 is used for receiving the light passing through the lens assembly 2 to generate image information.

Illustratively, the piezoelectric motor 1 can drive the lens assembly 2 to move along the optical axis direction so as to adjust the distance between the lens assembly 2 and the photosensitive assembly 3, thereby realizing a focusing function; the piezoelectric motor 1 can drive the lens assembly 2 to move in the direction perpendicular to the plane of the optical axis, so that the lens assembly 2 translates relative to the photosensitive assembly 3, thereby realizing the anti-shake function. The improvements in the present application relate to improvements in the combination technology of the piezoelectric motor 1, and in the description of the specific structural improvements of the piezoelectric motor described below, the specific names and positional relationships of the devices do not limit the technical solutions set forth in the present invention without changing the inventive concept and the technical effects achieved.

With reference to fig. 2-8, an exemplary piezoelectric motor 1 will be described. The application proposes a piezoelectric motor 1, which comprises a circuit board 10, a fixed component 20, a movable component 30, a piezoelectric actuator group 40, balls 50, an elastic support portion 60, and a position sensing component 70. Wherein the movable assembly 30 is accommodated in the fixed assembly 20, the driving end of the piezoelectric actuator group 40 is abutted against one end of the movable assembly 30, and the movable assembly 30 is movably supported in the fixed assembly 20 by the balls 50, so that the movable assembly 30 can move with small frictional resistance when being driven by the piezoelectric actuator group 40.

One part of the circuit board 10 is fixedly connected to the fixed assembly 20, the other part of the circuit board 10 is fixedly connected to the movable assembly 30, and the circuit board 10 is bent between the part of the fixed assembly 20 and the part of the circuit board 10 fixed to the movable assembly 30, so that the circuit board 10 has small motion blocking effect on the movable assembly 30 when the movable assembly 30 moves. At least one of the piezoelectric actuator groups 40 is disposed on and electrically connected to a side surface of the circuit board 10. In some alternative embodiments, at least a portion of the piezoelectric actuator group 40 is disposed on a side of the circuit board facing the movable assembly. Further, at least one of the position sensing assemblies 70 is disposed on and electrically connected to the same side surface of the circuit board 10 on which the piezoelectric actuator group 40 is mounted. The position sensing assembly 70 is used for detecting the relative position of the movable assembly 30 and the fixed assembly 20, so that the driving speed of the piezoelectric motor 1 is faster.

At least one of the elastic supporting portions 60 is disposed on the circuit board 10, and in some alternative embodiments, the elastic supporting portion 60 is disposed on a surface of the circuit board 10 opposite to the surface on which the piezoelectric actuator group 40 is disposed, in other words, the elastic supporting portion 60 is disposed on a surface of the circuit board 10 opposite to the optical axis. The elastic supporting portion 60 provides potential energy perpendicular to the driving direction of the piezoelectric actuator group 40, i.e. provides pre-pressure for the driving end of the piezoelectric actuator group 40 to abut against the movable assembly 30, so that the driving performance of the piezoelectric motor 1 is better and the response frequency is better.

The fixing assembly 20 includes a base 21 and a housing 22, the housing 22 being located on an upper side of the base 21. Wherein the base 21 and the housing 22 are fastened to each other to achieve a fixed connection, and a receiving cavity is formed in the housing 22 to receive the movable assembly 30, the circuit board 10, the piezoelectric actuator group 40, the balls 50, the elastic supporting portion 60, the position sensing assembly 70, and the like. The housing 22 prevents the internal components from being bumped from the outside and the components from being damaged.

Referring to fig. 3, the circuit board 10 fixed on the base 21 is electrically connected to the photosensitive assembly 3 in a lead-out manner of the lead 15, so as to realize signal control and the like of the piezoelectric motor 1 by the circuit board in the photosensitive assembly 3.

The lower end of the movable assembly 20 is movably coupled to the upper surface of the base 21 by at least one ball 50, and the movable assembly 20 is movably coupled to the housing 22 by a portion of the ball 50 disposed at the upper end of the movable assembly 20. In some alternative embodiments, at least three balls are provided between the lower end of the movable assembly 20 and the upper surface of the base 21 in order to maintain the stability of the movable interface. In some alternative embodiments, balls are disposed at the upper and lower ends of the movable assembly 30 and are movably connected with the base 21 and the housing 22, respectively, and the balls support the height of the gap between the movable assembly 30 and the base 21 and the housing 22, so that the movable assembly 30 is not easy to shake and tilt in the optical axis direction relative to the base 21 and the housing 22, thereby increasing shock resistance and improving product reliability.

In some alternative embodiments, the elastic supporting portion 60 includes a transverse elastic piece 61 and a longitudinal elastic piece 62, and the transverse elastic piece 61 and the longitudinal elastic piece 62 are in a sheet-like structure. The lateral spring 61 extends in a direction perpendicular to the optical axis plane and is disposed on the top side of the inner surface of the housing 22 to provide downward potential energy along the optical axis direction. The longitudinal spring plates 62 extend along the direction parallel to the mounting surface of the piezoelectric motor 1 and provide potential energy in the direction of the optical axis, and the plurality of longitudinal spring plates 62 are respectively attached to the plurality of piezoelectric actuators 40 disposed in different directions to provide potential energy in different directions, so that the integration of the piezoelectric motor 1 can be improved and the flatness of components in the piezoelectric motor 1 can be improved.

The upper surface of the transverse spring 61 is fixedly connected to the inner wall surface of the housing 22, and the lower surface of the transverse spring 61 is pre-pressed on the ball 50 between the movable assembly 30 and the housing 22, so that the movable assembly 20 is supported by the elastic force of the transverse spring 61. The lateral spring 61 provides potential energy in the direction of the optical axis, so that the movable assembly 20 is subjected to a pre-compression force downward in the direction of the optical axis. In some alternative embodiments, the lower surface of the transverse spring 61 is pre-pressed on at least three balls 50, so as to ensure that the movable assembly 20 can be assembled smoothly, which helps to improve the structural stability of the piezoelectric motor 1.

Specifically, the movable assembly 30 includes a first frame 31, a second frame 32, and a third frame 33, the first frame 31 is located on the upper side of the base 21, the first frame 31 and the base 20 are movably connected together by at least one ball 50, in some alternative embodiments, at least three balls 50 are disposed between the first frame 31 and the base 20, and the first frame 31 may have a degree of freedom to move along a first direction relative to the base 20. The second frame 32 is disposed inside the first frame 31, the second frame 32 and the first frame 31 are movably connected together by at least one ball 50, and the second frame 32 has a second degree of freedom of movement relative to the first frame 31.

Specifically, the piezoelectric actuator group 40 includes a first piezoelectric actuator 41, a second piezoelectric actuator 42, and a third piezoelectric actuator 43, wherein one end of the first piezoelectric actuator 41 is fixedly connected to the circuit board 10, and the other end of the first piezoelectric actuator 41 abuts against the first frame 31, so that the first frame 31 moves along the first direction under the driving of the first piezoelectric actuator 41.

One end of the second piezoelectric actuator 42 is fixed on the circuit board 10, and the other end of the second piezoelectric actuator 42 is abutted against the second frame 32, so that the second frame 32 moves along the second direction under the drive of the second piezoelectric actuator 41.

Specifically, the first direction of the movable degree of freedom of the second frame 32 relative to the first frame 31 is orthogonal to the second direction of the movable degree of freedom of the first frame 31 relative to the base 20, so that the second frame 32 has the ability to move in the direction perpendicular to the plane of the optical axis relative to the base 20 in the present application, and the second frame 32 can be driven to move in the plane direction relative to the base 20 when anti-shake is performed. Namely, the piezoelectric motor 1 can realize an optical anti-shake function.

The third frame 33 is disposed inside the second frame 32, the third frame 33 and the second frame 32 are movably connected together by a portion of the balls 50, and the third frame 33 has a movable degree of freedom in a third direction with respect to the second frame 32. The third direction is a direction parallel to the optical axis direction.

The driving direction of the second piezoelectric actuator 43 is orthogonal to the driving direction of the first piezoelectric actuator 41, the driving direction of the third piezoelectric actuator 43 is orthogonal to the driving direction of the first piezoelectric actuator 41 and the driving direction of the second piezoelectric actuator 42, respectively, so that the third frame 33 can realize anti-shake on a plane perpendicular to the optical axis and can also realize focusing along the optical axis, so in this embodiment, the imaging module 4 with the piezoelectric motor 1 can perform focusing processing of a picture in addition to satisfying the horizontal movement required for anti-shake imaging of the imaging module.

In the present application, the piezoelectric driving method requires a frictional connection between the driving end and the driven member, so that the resistance during movement is reduced, the loss of the frictional resistance of the piezoelectric motor 1 can be reduced, the ball is used as a motor holding device, the parallelism of movement can be improved, the friction force can be reduced by the ball in a point contact method, and the actuator friction loss can be reduced compared with the planar contact friction method, so that the service lives of the piezoelectric actuator 40 and the piezoelectric motor 1 can be prolonged.

For ease of understanding, referring to the schematic representation of fig. 2, the first direction may be an x-axis direction in a three-dimensional coordinate system, the second direction may be a y-axis direction perpendicular to the x-axis direction and forming a horizontal plane with the x-axis direction, and the third direction may be represented as a z-axis direction perpendicular to both the x-axis and the y-axis, the z-axis being parallel to the optical axis direction.

Referring to fig. 2, for convenience of illustration of the structure of the piezoelectric actuator group 40, an enlarged view of the piezoelectric actuator group 40 is shown in fig. 2 with a dotted line frame and arrow lines, while first, second and third piezoelectric actuators 41, 42 and 43 included in the piezoelectric actuator group 40 are enlarged and displayed.

In the present application, the first, second, and third piezoelectric actuators 41, 42, and 43 further include first, second, and third piezoelectric vibrators 410, 420, and 430, respectively, which are substrates having an inverse piezoelectric effect and contracting or expanding according to a polarization direction and an electric field direction, and can be used by polarizing the substrates in a thickness direction of a single crystal, polycrystalline ceramic, polymer, or the like. The inverse piezoelectric effect refers to the application of an electric field in the polarization direction of a dielectric that mechanically deforms when a potential difference is created. The piezoelectric vibrator has the function of ultrasonic oscillation, and can realize deflection reciprocating motion or elliptical motion on the electrode layer which is specially arranged so as to realize the effect of driving the driving end of the piezoelectric actuator. In the embodiment of the present application, the piezoelectric vibrator is made of piezoelectric material and is connected to the circuit board 10 to realize circuit conduction, so as to realize power supply excitation for the piezoelectric actuator 41.

First, second and third friction heads 411, 421 and 431 are fixedly connected to one surfaces of the first, second and third piezoelectric vibrators 410, 420 and 430, respectively, wherein the friction heads are influenced by deformation of the piezoelectric vibrators, so that a unit motion track reciprocating in an elliptical track or a deflection is realized.

Specifically, the second frame 32 has the same movement degree of freedom relative to the housing 22 and the second frame 32 has the same movement degree of freedom relative to the base 21, and the balls 50 disposed between the second frame 32 and the housing 60 can support the second frame 32 without obstructing the movement of the second frame 32.

The housing 22 further includes a platen 222 and a housing body 221. The upper surface of the transverse spring 61 is mounted on the lower surface of the pressing plate 222, and the housing body 221 is fixedly connected to the upper side of the pressing plate 222. Wherein the upper and lower surfaces of the platen 222 are provided with platen positioning structures 2221, such as positioning holes, grooves, etc., for better positioning connection with the housing body 221.

The upper surface of the second frame 32 is provided with at least three second frame upper ball grooves 3212, and in some alternative embodiments of the present application, the number of second upper ball grooves 3213 is four. The second frame 32 is movably coupled to the interior of the housing 22 by balls 50 retained in ball grooves 3212 in the second frame. When the number of the balls is more than 3, a rolling plane is formed by means of 3-point surface forming, so that the planeness of the moving piece during rolling can be ensured. Referring to fig. 7, four of the second frame upper ball grooves 3212 are located at the middle of four sides of the upper surface of the second frame 32 in a projection view. By providing the ball grooves in the middle portions of the four sides of the second frame, the focusing mechanism and the circuit element at the four corners can be avoided, and the size of the second frame 32 can be reduced, and the size of the piezoelectric motor 1 can be further reduced. One ball is placed in each ball groove 3212 on the second frame, so that the ball grooves are movably connected inside the shell 22 in a four-point supporting manner. In this application, the ball grooves 3212 on the second frame and the balls placed in the ball grooves 3212 on the second frame are ball groove connection, that is, the width and length of the ball grooves 3212 on the second frame are larger than the volume of the balls 50, so as to allow the balls in the ball grooves 3212 on the second frame to move in multiple directions, and meanwhile, the ball grooves structure enables at least a first and a second degree of freedom of movement between the second frame 32 and the housing 22, so that the second frame 32 has the same degree of freedom of movement as the second frame 32 relative to the housing 22.

The lateral spring 61 is connected to the lower side of the pressing plate 222, and the lower surface of the lateral spring 61 abuts against the balls of the ball groove 3212 on the second frame, so that the lateral spring 61 is used as a force application device to always provide a pre-compression force to the balls of the ball groove 3212 on the second frame, so as to ensure that the second frame 32, the first frame 31 and the base 20 are subjected to the pre-compression force of the lateral spring 61 for leveling correction after being assembled. For ease of illustration, the pre-compression force provided by the transverse spring 61 to the second frame 32 is indicated by stippling (labeled F2).

In more detail, the lateral spring 61 can provide downward potential energy to the second frame 32, and since the frame acted by the lateral spring 61 is the first frame 31 and the second frame 32, the lateral spring 61 provides potential energy to the direction perpendicular to the movement direction of the first frame 31 and the second frame 32, so that the second frame 32 is tightly assembled with the first frame 31, and the first frame and the second frame 32 are prevented from tilting relative to the base 20.

On the other hand, the pressing plate 222 provides a pre-pressing force to the lateral spring 61 downward along the optical axis when assembled from top to bottom, and the pressing plate 222 corrects the lateral spring 61 to be horizontal. The balls in the ball grooves 3212 of the second frame abut against the lower surface of the lateral elastic piece 61, so that the upper end of the second frame 32 is limited, the mounting strength of the housing 60 on the second frame 32 is increased, and meanwhile, the degree of freedom between the housing 22 and the second frame 32 does not hinder the movement of the second frame 32 relative to the base 20, so as to increase the reliability of the piezoelectric motor 1.

For convenience of understanding, the housing 22 in the present application provides a limiting function to the second frame 32 through the balls 50, that is, prevents the second frame 32 from being separated from the first frame 31 freely, and on the other hand, when the housing 22 is assembled from top to bottom, downward pressing force can be applied to the second frame 32 through the balls 50 during assembly, so as to correct the assembly levelness of the second frame 32 relative to the first frame 31. In addition, the pressing force can be transmitted to the first frame 31, so that the assembly levelness of the first frame 31 relative to the base 20 can be corrected. In general, the housing 22 serves as an upper end stopper for the movable assembly 30, and it can be further considered that the housing 22 serves as an upper end stopper for the first frame 31 and the second frame 32, and it can be said that the housing 22 provides an upper end holding function for the first frame 31 and the second frame 32.

Still referring to fig. 2, since the base 20 is movably disposed at the lower end of the first frame 31, both the first frame 31 and the second frame 32 are supported by the base 20. At the same time, movable support is achieved by the plurality of balls 50 provided to the base 20 and the first and second frames 31 and 32 so that the first and second frames 31 and 32 do not tilt in the direction of the optical axis, and driving of the first and second frames 31 and 32 on a plane perpendicular to the optical axis is not restricted.

The base 21 further includes a base body 211 and base side plates 213 extending upward from at least two sides of the base body 211, wherein the base body 211 is located at the bottom side of the base 21 and plays a role of base support, and the base body 211 and the housing body 221 are positioned and fixed. The base body 211 may provide a mounting reference for components disposed on the base 21. The base ball groove 212 is formed on the upper surface of the base body 211, and the base side plate 213 extends in the optical axis direction from both sides of the base body 211, and the base side plate 213 on one side is substantially in a flat plate shape as viewed from the side direction. One of the base side plates 213 is narrower than the other base side plate 213. At least two base ball grooves 212 are formed in the base body 211 on one side where the base side plate 213 on one side is located, at least 3 base side wall ball grooves 220 are formed in the side wall of the base side plate 213 on the other side, and the base side plate 213 and the movable assembly 30 are movably connected by the balls 50 arranged in the base ball grooves 212 and the base side wall ball grooves 220.

The base side plate 213 is fixedly connected with the circuit board 10. The circuit board 10 includes a first body 11, a second body 12, and a third body 13, wherein the first piezoelectric actuator 41 is electrically connected to the first body 11, the second piezoelectric actuator 42 is electrically connected to the second body 12, and the third piezoelectric actuator 43 is electrically connected to the third body 13.

The base side plate 213 further comprises a side plate mounting portion 2132, wherein the side plate mounting portion 2132 is provided on at least one side of the base side plate 213, wherein in one alternative embodiment of the present application the side plate mounting portion 2132 is provided on a relatively narrow base side plate 213. The side board mounting portion 2132 includes a set of positioning posts for positioning and assembling the first body 11 and the longitudinal spring plate 62 of the circuit board 10, and the side board mounting portion 2132 further includes a region on a side surface to which the first body 11 of the circuit board 10 is attached.

Referring to fig. 2, the base side plate 213 is formed with a base first through hole 2130 and a base second through hole 2131, wherein the base first through hole 2130 is formed at a middle portion of the base side plate, the base first through hole 2130 is substantially rectangular through hole shape, and the base first through hole 2130 is larger in size than the first piezoelectric actuator 41, so that the piezoelectric actuator 41 can be accommodated in the base first through hole 2130. The base second through hole 2131 is for receiving the first position sensor 72.

Wherein the base first through hole 2130 and the base second through hole 2131 are located on the same side of the base side plate 213, and the side plate mounting portion 2132 is located around the base first through hole 2130. In one embodiment of the present application, the side plate mounting portion 2132 is a set of mounting posts that provide a locating mounting area for the base 21 to assemble the circuit board 10. Referring to fig. 2, in one embodiment of the present application, the side plate mounting portion 2132 is disposed on the outer side of the base side plate 23, the side plate mounting portion 2132 is disposed on the same side of the base side plate 23 as the first through hole 2130 of the base and the second through hole 2132 of the base, and meanwhile, the first piezoelectric actuator 41 and the first position sensor 72 can be mounted on the same side of the circuit board 10 through the first through hole 2130 and the second through hole 2132 and the side plate mounting portion 2132 located on the outer side of the base side plate 213, so that the size required by the design of the piezoelectric motor 1 due to positioning and mounting of the base 20 can be reduced, and the overall size of the piezoelectric motor 1 can be reduced. In some alternative embodiments, the first position sensor 72 may detect the position of the first frame 31 relative to the base 20 by detecting the magnitude of the magnetic flux, and in this embodiment, the accuracy of the detection of the position sensor is improved by disposing the position sensor near the same side of the piezoelectric actuator 40, so as to increase the response frequency of the piezoelectric motor 1.

The position sensing assembly 70 includes a first magnet 71 and a first position sensor 72, wherein the first position sensor 72 is fixedly mounted on the first body 11, wherein the base second through hole 2131 has a larger size than the first position sensor 72, wherein the first magnet 71 is fixedly disposed at a side of the first frame 31, and the first position sensor 72 is capable of detecting a change in magnetic flux, thereby detecting a relative position of the first magnet 71 with respect to the first position sensor 72. When the first frame 31 moves in a predetermined direction relative to the base 21, the first frame 31 drives the first magnet 71 to move, and the magnetic field generated by the first magnet 71 changes. The magnetic flux received by the first position sensor 72 changes, and the magnetic flux of the first position sensor 72 is calibrated to obtain a position difference of the first magnet 71 relative to the position of the first position sensor 72.

The position sensing assembly further includes a second magnet 73 and a second position sensor 74, wherein the second position sensor 74 is fixedly mounted on the second body, the second magnet 73 is fixedly mounted on the second frame 32, and a first frame first through hole 3120 and a first frame second through hole 3121 are formed on one side of the first frame 31, wherein the second piezoelectric vibrator 420 is accommodated in the first frame first through hole 3120, and the second position sensor 74 is accommodated in the first frame second through hole 3120, similar to the first magnet 71, for a specific structural relationship referring to the contents of the first magnet 71 and the first position sensor 72 as described above.

The position sensing assembly further includes a third magnet 75 and a third position sensor 76, wherein the third position sensor 76 is fixedly mounted on the third body 30.

It will be appreciated that by arranging the position sensor near the piezoelectric actuator, the position sensor detects the change of the relative position of the piezoelectric actuator more accurately, and by accommodating the position sensor in the through hole and placing the magnet opposite to the position sensor, the position sensor can be more close to the magnet, the detected magnetic field intensity is larger, and the detection of the position sensor is more sensitive, so that the piezoelectric motor 1 has faster response frequency or control accuracy.

Referring to fig. 2, 5, and 6, the first frame 31 includes a first frame mounting portion 310 and a first frame ball groove 311 formed in the first frame. Wherein the first frame mounting part 310 is disposed on an outer surface of the first frame 31, and the first frame ball groove 311 is matched with the base ball groove 22 to form a single directional guide space of balls, so that a degree of freedom of movement along a first direction is provided between the first frame 31 and the base 20.

Referring to fig. 6, the first frame 31 further includes a first frame first through hole 3120 formed on one side wall of the first frame 31 and a first friction plate 314 provided on an adjacent side wall of the first frame 31, wherein the first frame first through hole 3120 is a rectangular through hole, and the first frame first through hole 3120 is larger in size than the second piezoelectric vibrator 420 such that the second piezoelectric actuator 42 is accommodated in the first frame first through hole 3120 facing the first frame first through hole 3120, wherein the first frame is further formed with a first frame second through hole 3121 on a side close to the second piezoelectric actuator 42, wherein the first frame second through hole 3121 is adjacent to the first frame first through hole 3120.

A first friction plate 314 is fixedly provided on a side wall of the first frame 31, the first friction plate 314 being disposed opposite to the first piezoelectric actuator 41, wherein the first friction plate 314 is received in a groove in a side surface of the first frame 31 to reduce the size of the piezoelectric motor 1. The first friction plate 314 is abutted against the first friction head 411 of the first piezoelectric actuator 41.

A second friction plate 324 is fixedly disposed on a side wall of the second frame 32, and the second friction plate 324 is disposed opposite to the second piezoelectric actuator 42, wherein the second friction plate 324 is accommodated in a groove on a side surface of the second frame 32 to reduce the size of the piezoelectric motor 1.

Wherein a third friction plate 333 is fixedly disposed at a corner of the third frame 33, the third friction plate 333 being disposed opposite the third piezoelectric actuator 43, wherein the third friction plate 333 is received at opposite corner side walls of the third frame 33 for better integration of the actuator structure and circuit elements outside for a more integrated product design.

The friction plate can be made of aluminum oxide materials, so that the loss of friction connection is reduced, the service life of the piezoelectric motor 1 can be prolonged, and on the other hand, the friction plate can provide good flatness, so that the piezoelectric actuator can be driven conveniently.

Referring to fig. 2, the first piezoelectric vibrator 410 has a rectangular elongated shape. The first piezoelectric vibrator 410 is fixedly coupled to the first body 11, and one side of the first body 11 is fixedly mounted to the side plate mounting portion 232. The first piezoelectric friction head 411 is fixedly connected to the inner surface of the first piezoelectric vibrator 410, and the first piezoelectric friction head 411 is fixedly disposed at the center of the inner surface of the first direction piezoelectric vibrator 410 in a protruding manner, so that the unit driving stroke of the first piezoelectric friction head 411 can be increased.

The first piezoelectric friction head 411 is abutted against the center of the first friction plate 413 in an initial state (i.e., when the motor is reset). When the first piezoelectric vibrator 410 is excited by the power signal, the first piezoelectric vibrator 410 vibrates or deforms, and the first piezoelectric vibrator 410 drives the first piezoelectric friction head 411 to vibrate or deflect. The first direction piezoelectric vibrator 410 and the first friction plate 413 are closely attached, so that the first piezoelectric friction head 411 can generate friction force against the first friction plate 413 to drive the first frame. The friction head may be considered the drive end of the piezoelectric actuator in this embodiment. Similarly, in the initial state, the second piezoelectric friction head 421 and the second friction plate 324, and the third piezoelectric friction head 431 and the third friction plate 333 are connected in this way.

The longitudinal spring plate 62 further comprises a first spring plate 621, a second spring plate 622 and a third spring plate 623, wherein the first spring plate 621 is preloaded on the outer side of the first body 11, the second spring plate 622 is preloaded on the outer side of the second body 12, and the second spring plate 623 is preloaded on the outer side of the third body 13. The first elastic piece 621, the second elastic piece 622, and the third elastic piece 623 respectively provide potential energy perpendicular to the driving directions of the first piezoelectric actuator 41, the second piezoelectric actuator 42, and the third piezoelectric actuator 43, so as to provide a pre-pressing force for the driving end of the piezoelectric actuator group 40 to abut against the movable component 30, so that the movement performance of the piezoelectric motor 1 is better, and the response frequency is better.

The first-direction piezoelectric vibrator 410 is accommodated in the base first through hole 2130, reducing the size increase due to the external arrangement of the piezoelectric vibrator 410, and reducing the size of the piezoelectric motor 1. By providing the first direction piezoelectric vibrator 410 in a housing manner, the outer surface of the first direction piezoelectric vibrator 410 is fixed on the first body 11, the inner surface of the first direction piezoelectric vibrator 410 is used as the deformation driving surface of the first direction friction head 411, and the potential energy of the first elastic sheet 621 can increase the gap margin of the piezoelectric motor 1, that is, the piezoelectric actuator is abutted against the movable frame relatively more tightly, so that the deformation range of the deformation driving surface design is increased.

Referring to fig. 2, the first body 11 of the circuit board 10 has a plate shape, and the first body 11 further includes a first mounting portion 110, a first connection arm 112, and a first positioning portion 113. The first mounting portion 110 is annular, a first through hole 111 with a rectangular opening is formed in the middle, the first piezoelectric vibrator 410 can be attached to the annular solid portion of the first mounting portion 110, the rectangular opening of the first mounting portion 110 is arranged on the back surface of the first piezoelectric vibrator 410 in a clearance mode, reliability of the piezoelectric motor 1 can be improved, risk of falling off caused by vibration or resonance is reduced, deformation generated on the back surface of the first piezoelectric vibrator 410 is avoided by the first through hole 111 of the first mounting portion 110, and mounting reliability is improved.

The first positioning portion 113 is fixedly connected to the base side plate mounting portion 2132, and the first positioning portion 113 serves as a positioning attachment for the first body 11. The first positioning portion 113 is provided in a plate-like structure having a positioning hole, the first positioning portion 113 is provided outside the first mounting portion 110, the two first connecting arms 112 have flexibility, and the first mounting portion 110 is connected to the first positioning portion 113 of the first main body 11 by extending the first connecting arms 112 on both sides. The first main body 11 is connected to the outer surface positioning post of the base side plate 23 through the positioning hole provided by the first positioning portion 113, so that the assembly accuracy of the camera module is improved, the first connecting arm 112 can enable a certain installation allowance to be adjusted when the first main body 11 is assembled with the first piezoelectric actuator 41, and the reliability risk caused by tight fitting assembly and vibration of the piezoelectric actuator is reduced.

Further, since the first mounting portion 110 has the first extending portion 114 along the optical axis direction, the first mounting portion 110 has a degree of freedom along the optical axis direction in addition to the degrees of freedom along the extending directions of the two connection arms with respect to the first main body 11, and therefore the first mounting portion 110 can have a degree of freedom at least perpendicular to the optical axis direction with respect to the first positioning portion 113, thereby satisfying a required movable margin of rotational deflection generated by the friction head when the piezoelectric vibrator is operated.

Similarly, the second mounting portion 120 may also be provided with a second extension portion 124 in the optical axis direction, which may also be considered as the height direction, so that the first and second main bodies in this application further include first and second extension portions, respectively, wherein the first and second extension portions extend along the height direction, and the first and second extension portions are perpendicular to the first and second connection arms, respectively, so that the circuit board can provide a movable space in two directions for each piezoelectric actuator.

Referring to fig. 7 and 9, the first elastic piece 621 includes a first elastic piece pre-pressing portion 6210, wherein the first elastic piece pre-pressing portion 6210 is disposed in the middle of the first elastic piece 621, the first elastic piece pre-pressing portion 6210 is disposed at the back of the first piezoelectric vibrator 410, the first elastic piece pre-pressing portion 6210 provides the pre-pressing force at the back of the first piezoelectric vibrator 410, a first elastic piece first through hole 6211 is formed in the middle of the first elastic piece pre-pressing portion 6210, wherein the first elastic piece pre-pressing portion 6210 surrounds four first elastic piece connecting arms 6212, the four first elastic piece connecting arms 6212 provide support in the plane direction of the first piezoelectric vibrator 410, the first through hole 6211 is at the back of the corresponding first piezoelectric vibrator 410, the first through hole 6211 plays a role of avoiding the back deformation of the first piezoelectric vibrator 410, and prevents the first piezoelectric vibrator 410 from interfering with the first elastic piece 621 during operation, so as to increase the operation reliability of the piezoelectric motor.

In addition, the first spring plate connecting arm 6212 includes a pair of first spring plate longitudinal connecting arms 62120 extending along the optical axis direction and a pair of first spring plate transverse connecting arms 62121 extending perpendicular to the optical axis direction, wherein the first spring plate longitudinal connecting arms 62120 and the first spring plate transverse connecting arms 62121 extend integrally with each other to form a first body of the circuit board 10 for supporting a mouth-shaped frame pre-compression, so as to provide a mouth-shaped pre-compression force to the back surface of the first piezoelectric vibrator 410 for supporting the back surface of the first piezoelectric vibrator 410, and ensure that the first piezoelectric friction head 411 on the first piezoelectric vibrator 410 always abuts against the first friction plate 314.

The two sides of the first spring pre-pressing portion 6210 integrally extend with a first spring side portion 6213, wherein two first spring side portions 6213 are respectively formed with a first spring second through hole 6214 and a first spring third through hole 6215, and the first spring second through hole 6214 and the first spring third through hole 6215 have the same size. The first elastic piece side portion 6213 is provided with a mounting hole, so that the first elastic piece 621 can be fixed on the base side plate 213 through the mounting hole of the first elastic piece side portion 6213, and on the other hand, the movement allowance of the first elastic piece pre-pressing portion 6210 can be improved by providing the first elastic piece second through hole 6214 and the first elastic piece third through hole 6215 on two sides of the first elastic piece pre-pressing portion 6210.

The first elastic piece 621 has elasticity, the first elastic piece longitudinal connecting arm 62120 divides the first elastic piece second through hole 6214, the first elastic piece third through hole 6215 and the first elastic piece first through hole 6211, the through hole reduces the deformation of the elastic piece, and correspondingly increases the elastic potential energy of the first elastic piece longitudinal connecting arm 62120.

It will be appreciated that the piezoelectric vibrator is subject to deformation after being excited by an electrical signal, in some embodiments, the piezoelectric vibrator is formed by stacking a plurality of electrode layers, and after signals are respectively input to the plurality of electrode layers, the piezoelectric vibrator integrally vibrates to drive the friction head to move, and the deformation of the middle area of the piezoelectric vibrator is generally largest, so that the stroke of the friction head is also large, and sometimes, in order to increase the unit stroke of the piezoelectric vibrator, the deformation of the middle area of the inner surface and the outer surface of the piezoelectric vibrator is designed to have larger vibration amplitude, so that pre-compression force is needed to be larger, and the situation of assembly interference is reduced. In this application, the first elastic piece of the first elastic piece 621 has the first through hole 6211, the first elastic piece has the second through hole 6214, and the first elastic piece has the third through hole 6215, so as to avoid the collision and interference between the circuit board and the piezoelectric vibrator, thereby improving the working reliability of the piezoelectric motor 1. The larger the elastic deformation stroke provided by the spring plate is, the more the working efficiency of the piezoelectric motor 1 can be improved relatively.

It can be understood that the pre-compression force provided by the first elastic piece 621 is perpendicular to the driving direction of the first piezoelectric actuator 41, so that the piezoelectric actuator 41 can freely move and always receive the pre-compression force of the first elastic piece 621, and the abutting state required by the driving of the first piezoelectric actuator 41 is maintained.

Specifically, the area of the first elastic piece first through hole 6211 is greater than or equal to 2 times the area of the first elastic piece second through hole 6214 and the first elastic piece third through hole 6215, so that the elastic restoring force of the first elastic piece 621 can be increased, and the abutting state required for driving the first piezoelectric actuator 41 can be maintained all the time.

The four corners of the first spring plate side portion 6213 are respectively formed with a first spring plate positioning hole 62130, and the first spring plate positioning holes 62130 are through hole structures, so that the first spring plate 621 is convenient to be mounted on the base side plate mounting portion 2132. The first elastic piece 621 is directly fixed to the base side plate 213. In addition, the first positioning hole 62130 for fixing the first elastic piece 621 is separated from the positioning hole on the first positioning portion 113 of the circuit board 10, so that the fixing relationship between the first elastic piece 621 and the base side plate 213 is not affected by the assembly of the circuit board 10, and the dimensional variation generated by the working vibration of the first piezoelectric actuator 41 does not affect the stability of the assembly of the first elastic piece 621, so as to ensure a relatively stable connection relationship between the first elastic piece 621 and the base side plate 23.

In summary, the first elastic piece 621 in the present application can perform fixing and limiting functions on the first piezoelectric vibrator 410, and can provide a certain pre-pressing force.

For ease of illustration of the embodiments of the present application, the ball 50 may further include at least one first ball 51, at least one second ball 52, and at least one third ball 53. Wherein the first ball 51 is disposed in a ball groove between the first frame 31 and the base 21, and the first ball 51 mainly serves to movably connect the first frame 31 and the base 21 to move the first frame 31 along the first direction relative to the base 21. Wherein the second balls 52 are disposed in the ball grooves between the first frame 31 and the first frame 32, the second balls 52 are further disposed between the second frame 32 and the housing 22, the second balls 52 mainly serve to movably connect the first frame 31 and the second frame 32, and the second balls 52 also serve to movably connect the second frame 32 and the housing 22. Wherein the third balls 53 are disposed in ball grooves between the second frame 32 and the third frame 33, the third balls 53 mainly serve to movably connect the second frame 32 and the third frame 33 to move the third frame 33 along a third direction relative to the second frame 32.

Referring to fig. 2, the base ball groove 212 further includes a base side wall ball groove 2120 and at least one set of base end face ball grooves 2121, wherein the base side wall ball groove 2120 is formed on the inner wall of the base side plate 213, and the number of the three base side wall ball grooves 2120 is three, wherein at least two of the three base side wall ball grooves 2120 are disposed at a height direction along the optical axis direction of the base side plate 213, so that when the first frame 31 is supported by the balls 50 disposed at the three base side wall ball grooves 2120, both of the connected sides take balls of different heights as supporting points, so that moment generated by supporting force is more dispersed and planarized, and a situation that rotation is easy due to single ball or single row ball support is not easy to occur, thereby ensuring flatness between frames during operation of the piezoelectric motor 1.

On the other hand, the base end surface ball grooves 2121 are disposed on the upper surface of the base body 211 at two corner positions of the base body 21, the first ball 51 further comprises first side wall balls 510 and first end surface balls 511, wherein the first side wall balls 510 are disposed in the base side wall ball grooves 220, the first end surface balls 511 are disposed in the base end surface ball grooves 221, the number of the first side wall balls 510 is three, one first side wall ball 510 is disposed in each base side wall ball groove 220, one first end surface ball 511 is disposed in each base end surface ball groove 221, that is, one ball is disposed in each ball groove between the first frame 31 and the base 20, thereby reducing friction force between the first frame 31 and the base 20.

As shown in fig. 7 and 8 and 9, the top side of the first end ball 511 is supported against and movably rubs against the bottom side of the first frame 31, and the first side wall ball 510 and the outer side wall of the first frame 31 are movably rubs against each other. In one embodiment of the present application, the side wall of the first frame 31 extends outwards to form a first frame top side extension 315 and at least two first frame side wall extensions 316, and the first side wall balls 510 located at a relatively high position movably rub against the lower surfaces of the top side extension 315 of the first frame 31, and the first side wall balls 510 located at a relatively low position movably rub against the lower surfaces of the bottom side two first frame side wall extensions 316 of the first frame 31. Meanwhile, a width of the escape groove preset above the base sidewall ball groove 220 with a relatively low height is slightly greater than that of the sidewall extension 316, for limiting the movable stroke of the first frame 31.

In one embodiment of the present application, the first sidewall ball 510 and the first end ball 511 are the same volume, thereby facilitating assembly of a universal model ball. The depth of the base end face ball groove 2121 is smaller than the depth of the base side wall ball groove 2120, so that the wall thickness in some places can be reduced, the thickness of the base can be reduced, and the size of the piezoelectric motor can be reduced. The two first side wall balls 510 and the two first end face balls 511 at the same height are the same in height, so that the bottom surface of the first frame 31 and the base 20 are planarly supported by the four balls at the same height, ensuring the flatness between the first frame 31 and the base 20. Meanwhile, the depth of the side wall ball groove 2120 at the same height is greater than that of the base end face ball groove 2121, so that the first side wall ball 510 disposed in the side wall ball groove 2120 at the same height simultaneously rubs against both the outer side wall of the first frame 31 and the bottom side of the first frame side wall extension 316, and the overall size can be reduced.

As shown in fig. 3, in one embodiment of the present application, the inwardly extending width of the base side wall ball groove 2120 is smaller than the diameter of the first side wall ball 510, and the width of the base end face ball groove 2121 is larger than the diameter of the first end face ball 511, so that the balls are supported as points when the first frame 31 is assembled to the base 21, and the first side wall ball 510 can be adjusted when the first frame 31 is assembled to the base 21, so that both the top and side surfaces of the first side wall ball 510 can be supported against the first frame 31 without interference. The base end ball groove 2121 is larger in width and length than the diameter of the first end ball 511, allowing free movement of the first end ball 511 in the base end ball groove 2121, and is adjustable in the first frame 31 assembled to the base 21 by the movable play margin of the first end ball 511 in the base end ball groove 2121, so that the apex and sides of the first end ball 511 can bear against the first frame 31 without interference. The width of the base side wall ball groove 2120 is illustrated as 0.9mm in one embodiment of the present application, the width and length of the base end face ball groove 2121 is 1.5mm, and the diameter of the first side wall ball 510 is 1mm, thereby enabling the first end face ball 511 to have an adjustment space of 0.5mm in the base end face ball groove 2121.

The first side wall balls 510 are disposed at opposite sides of the first piezoelectric actuator 41, and preferably, the number of the first side wall balls 510 is 3 (for convenience of illustration, only one is shown in the figure), and the connecting line of the first side wall balls 510 is formed in a triangle shape, wherein at least one of the first side wall balls 510 is located at the upper portion of the base side plate 23 and on the axis of the connecting line of the centers of the other two first side wall balls 510.

Referring to fig. 5, wherein the first elastic piece 621 provides the lateral pre-compression force of the first piezoelectric actuator 41, the first piezoelectric friction head 411 of the first piezoelectric actuator 41 provides the lateral pre-compression force of the first frame 31, the pre-compression force is shown by an arrow dotted line (reference F1) in fig. 5, wherein the first frame 31 is connected to the base 20 through three first side wall balls 510. On the opposite side of the first piezoelectric actuator 41, there is a gap between the first frame 31 and the base side plate 23 that is no greater than the diameter of the side wall ball 510, as shown by the symbol (1) in fig. 3, so that the first frame 31 and the base side plate 23 can be always supported by the ball, without causing excessive friction caused by interference or surface friction between the first frame 31 and the base side plate 23, which ensures smoother movement of the first piezoelectric actuator 41 during operation, reduced friction, and no high work load required by the first piezoelectric actuator 41, and increases the service life of the piezoelectric actuator.

Referring to fig. 2 and 3, in a preferred embodiment of the present application, similarly, the downward potential energy provided by the upper elastic sheet 611 is transferred to the first frame 31 via the balls disposed between the second frame 32 and the first frame 31, so that the first frame 31 can be tightly assembled with respect to the base 20, and the lower potential energy is provided by the upper elastic sheet 611 at a specific position of the movable assembly 30 in the piezoelectric motor 1, and the vertical elastic sheet 62 disposed outside the piezoelectric actuator 40 provides horizontal potential energy to perform pre-compression of elastic potential energy, thereby increasing the assembly yield of the piezoelectric motor 1 and improving the reliability of the piezoelectric motor 1.

On the other hand, specifically, when the first frame 31 and the second frame 32 of the movable assembly 30 are pre-pressed by the upper elastic sheet 611, the housing 22 serves as an upper holding device, when the housing 22 is assembled from top to bottom, the piezoelectric motor 1 can be flattened, the first frame 31 is subjected to the action of the left and right potential energy of the elastic sheet of the piezoelectric actuator 41, so that the positions between the first frame 31 and the second frame 32 are subjected to the action of the elastic sheet potential energy, the movable assembly 30 is easier to assemble in a plane, the motor assembly yield is higher, and the stability of the assembled product is higher.

A detailed advantage will be exemplified, the balls acting as supporting elements, acting to connect the upper dome 611 and the first frame 31 and/or the second frame 32. When the housing 22 is assembled to the base 21, the base 21 defines the lower end position of the piezoelectric motor 1, and the upper end position of the second frame 32 is held by balls, and if the first frame 31, the second frame 32 and the base 21 deviate in size from the set values due to the problem of manufacturing assembly, a correction level effect can be performed. For example, when the first frame 31 and the second frame 32 are slightly higher than designed, the rigidity of the upper spring 611 itself still contacts the balls, so that the upper spring 611 is deformed upward, but the restoring force of the spring itself can provide the force of the balls downward, so that the second frame 32 can be held inside the housing 22 and on the base 21.

In another case, when the actual height of the second frame 32 is slightly lower than the designed height, the pre-compression process of the upper spring plate 611 and the pressing plate 222 is actually caused, and although the height of the second frame 32 is slightly lower than the designed height, the rigidity of the upper spring plate 611 itself still contacts the balls, and the restoring force of the upper spring plate 611 itself still can provide the downward force of the balls, so that the second frame 32 can be maintained inside the housing 22 and on the base 21.

Referring to fig. 4A, the number of the first side wall balls 510 disposed on the base side plate 213 is 3, and the connection structures are distributed in an isosceles triangle, and the isosceles triangle area formed by the first side wall balls 510 corresponds to the opposite side of the first piezoelectric friction head 411. The first piezoelectric vibrator 410 stretches or deforms in a motion stroke, so that the first piezoelectric friction head 411 can realize elliptical inclination in the stretching process of the first piezoelectric vibrator 410, and further the first piezoelectric friction head 411 generates an inclination moment applied to the inner side wall of the base in a stroke track, and the inclination moment can be dispersed by the arrangement of a plurality of first side wall balls, so that the whole structure is more stable.

Fig. 4A shows the piezoelectric motor 1 of the present application in a projection view along a certain plane, the three base side wall ball grooves 221 are provided on one side surface of the base side plate 23. The supporting pressure of the side surface of the first frame 31 and the base 20 can be uniformly transferred to the horizontal plane formed by the first side wall balls 510 when the first side wall balls 510 are connected, so that the problem of reliability caused by overlarge supporting pressure to single ball pressure is avoided, and the problem of material deformation caused by overlarge supporting pressure can affect various performance performances of the piezoelectric device 1.

Still as shown in fig. 4A, the piezoelectric motor 1 of the present application is shown in a projection view along a certain plane, and in one embodiment of the present application, the adopted piezoelectric motor 1 will generate a plane or further an elliptical unit track on a plane parallel to a third plane is represented by an elliptical track line with an arrow on the figure. Referring to the projection view of X-X in fig. 4A, it is shown that the first piezoelectric actuator 41 of the piezoelectric motor 1 has a force that is not a perpendicular force to the side of the first frame 31 throughout the stroke, and that the abutment force of the piezoelectric motor 1 against the first frame 31 is inclined throughout the elliptical trajectory.

In order to reduce the risk of tilting and to improve the reliability of the motor operation, it is necessary to improve the parallelism of the movement of the piezoelectric motor 1 throughout the entire stroke to prevent tilting, and in order to reduce this phenomenon, the pressing force of the driving end of the piezoelectric motor 1 in the instantaneous state of the entire movement locus and the pressing force locus throughout the entire stroke are shown with reference to the upper and lower portions of the projection view of Y-Y in fig. 4A. Specifically, in one embodiment of the present application, in a certain projection view, in the present application, the driving movement track 9A of the piezoelectric motor 1 in the driving stroke of the piezoelectric motor 1 is always in the connection area 19A of the base side wall ball groove 2120, and on the other hand, the driving movement track 9A may also be considered as the driving track of the first piezoelectric friction head 411, so that the abutment force of the first friction head 411 on the first frame 31 in the whole movement process of the piezoelectric motor 1 can be ensured to be always dispersed by the plane formed by the three first side wall balls 510, so that the first frame 31 can be always kept stable in the movement process, and the reliability of the operation of the piezoelectric motor 1 is ensured.

As shown in fig. 4A, the piezoelectric motor 1 of the present application is shown in a projection view along a certain side, the first piezoelectric actuator 41 is mounted on the opposite side base side plate 213 of the base side plate 213 mounted with the base side wall ball groove 2120, wherein more specifically, the first piezoelectric actuator 41 is located in the middle of the ball grooves located at the upper and lower positions of the base side wall ball groove 2120 in a projection view along the opposite side of the base side plate 213, so that the ball support area formed by the base side wall ball groove 2120 at the upper position and the base side wall ball grooves 2120 at the lower positions is always larger than the driving area 9A of the first piezoelectric actuator 41 when the first piezoelectric actuator 41 is moving, the generation of tilting moment is reduced, and tilting of the outer side of the base 21 and the first frame 31 due to the application of force of the piezoelectric actuator 40 after the application of force of the piezoelectric actuator 40 exceeds the ball support area is prevented.

As fig. 4B shows another variant of the piezoelectric motor 1 according to the present application, in one embodiment of the present application, the piezoelectric motor 1 may be a reciprocating stick-slip type piezoelectric motor 1, which may have a plurality of displacements relative to the original state, in a certain projection view. Referring to the upper and lower parts of the projection view of Z-Z in fig. 4B, the instantaneous position of the driving end of the piezoelectric motor 1 is shown, and the driving end of the piezoelectric motor 1 may tilt the pressing force of the first frame 31 in a unit cycle throughout the range of the motion trajectory, so that a tilting moment may easily occur, and a tilting of the relative position of the first frame 31 with respect to the base 20 may easily occur. Since the piezoelectric motor 1 reciprocates to drive the first frame 31 to move, although the reciprocating motion is performed, the deformation of the piezoelectric material always does not occur uniformly, and since the problem of the inclination angle always exists when the stick-slip motor moves upward away from the driven member, the force of the first piezoelectric actuator 41 to the first frame 31 not only deflects but also moves more forcefully in the whole motion track, and in order to reduce the occurrence of the phenomenon, in this embodiment, the distance between the first piezoelectric actuator 41 and the base side wall ball groove 220 at a higher position and the distance between the first piezoelectric actuator 41 and the base side wall ball groove 220 at two lower positions are the same, that is, the sides of the three base side wall ball grooves 220 are in an equilateral triangle shape, and the upper diagram of the projection view of Y-Y in fig. 4B shows that the driving end of the piezoelectric motor 1 using the stick-slip motor 1 in the whole motion track 9B shows that the total stroke of the piezoelectric motor 1 is larger than the actual extrusion force of the piezoelectric motor 1 and has a certain inclination.

Referring to a plurality of broken lines of the driving end of the stick-slip type piezoelectric motor 1 in the entire movement locus 9B, the driving movement locus 9B may also be regarded as a locus of abutment of the first piezoelectric friction head 411 against the first frame 31. When the pressing force exceeds the three connecting line areas 19B of the base side wall ball grooves 2120, the pressing force is easily caused to tilt the first frame 31. Referring to the projection view of Y-Y in fig. 4B, the base side wall ball grooves 2120 form an equilateral triangle, the center of gravity and the center of which coincide, so that the state of abutment of the first piezoelectric friction head 411 against the first frame 31 can be considered as a circle of different size at a point of a certain range of distances from the center of the equilateral triangle, and the equilateral triangle makes it easier to disperse the tilting moment of the first piezoelectric friction head 411 against the first frame 31 with respect to each ball in the three base side wall ball grooves 2120 regardless of the abutment state.

That is, in a certain projection, the side wall ball connecting line forms an isosceles or equilateral triangle area, the piezoelectric actuator 40 of the piezoelectric motor 1 is in a transient state of a stick-slip type pressing force, the moment of the pressing force is easier to disperse and uniform relative to the support of each ball wherever the pressing force is, and the tilting moment can be more easily reduced by adopting an equilateral triangle mode in the projection view of Y-Y in FIG. 4B.

To summarize, the piezoelectric actuator driving requires the friction head to abut against, and the friction head is inevitably separated from the abutted piece in the vibration process of the piezoelectric vibrator, so that the friction head is inclined to the abutted piece, therefore, the situation of reducing the inclination is to improve the stability of the piezoelectric actuator in operation, and is the key of improving the reliability of the piezoelectric motor, and the above technical scheme can be summarized, wherein the housing 22 and the base 21 can be used as fixed components, and the first, second and third frames can be used as movable components 30. The invention proposes a piezoelectric motor 1 comprising a fixed assembly 20, a movable assembly 30 movably connected to the fixed assembly, a piezoelectric actuator 40 abutting against the movable assembly 30, the movable assembly 30 being supported on the fixed assembly by a ball 50 provided on one side of the movable assembly 30, the ball 50 constituting at least one plane, and the piezoelectric actuator 40 being located on the plane, in such a way that the tilting moment of the piezoelectric actuator 40 on the movable assembly 30 can be reduced.

On the other hand, the ball 50 includes a side wall ball disposed between the outer side surface of the movable assembly 30 and the inner side surface of the fixed assembly 20, and the piezoelectric actuator 40 abuts on the movable assembly 30 and is located on the opposite side of the side wall ball.

On the other hand, referring to the foregoing portion of the present application, the force provided by the driving end of the piezoelectric actuator 40 to the movable assembly 30 in the entire travel track is inclined to the plane of the ball connecting line, so that the side wall balls provided in the present application have an effect of effectively reducing the inclination, referring to fig. 4A-4B, when the driving end of the piezoelectric motor 40 is provided to the vertical frame of the extrusion force of the frame 30, the inclination moment of the driving end to the balls cannot occur, so that the force provided by the driving end of the piezoelectric actuator 40 to the movable assembly 30 in the entire travel track is inclined to the plane of the ball connecting line, thereby reducing the moment inclination generated by the driving end of the piezoelectric actuator 40 to the movable assembly 30.

In summary, the above description can be summarized as the preferred arrangement of the piezoelectric actuator 40 and the balls, wherein the piezoelectric actuator 40 is abutted against the movable assembly 30, the movable assembly 30 is supported on the fixed assembly 20 by the balls disposed on one side of the movable assembly 30, the balls form at least one supporting plane, and the driving end of the piezoelectric actuator 40 acts on the balls to form the supporting plane.

In detail, the movable assembly 30 is supported on the base by the balls disposed on one side of the movable assembly 30, the balls form at least one plane, and the piezoelectric actuator 40 is disposed on a projection of a plane area of the balls, which means that by disposing the piezoelectric actuator 40 on the plane area of the balls, a tilting moment of the piezoelectric actuator pair 40 with respect to the base 21 can be reduced.

Referring to fig. 5, 6 and 7, the first frame mounting part 310 includes a first frame first mounting structure 3100, wherein the first frame first mounting structure 3100 is provided on an outer side surface of the first frame, the first frame first mounting structure 3100 is specifically a pair of mounting posts, the first frame second mounting structure 3101 is provided on an upper surface of the first frame 31, the first frame second mounting structure 3101 is a set of mounting posts, the first frame first mounting structure 3100 is used for fixing the second piezoelectric actuator 42 or the circuit board 10 and/or the second spring plate 622 to which the second piezoelectric actuator 42 is mounted, and the first frame second mounting structure 3101 is used for fixing the circuit board 10. The first frame first mounting structure 3100 is disposed on the upper surface of the first frame 31, the first frame second mounting structure 3101 is disposed on the side surface of the first frame 31, the first frame first mounting structure 3100 and the first frame second mounting structure 3101 are a set of mounting posts, wherein the first frame first mounting structure 3100 is in shaft hole positioning connection with the second body shaft hole of the circuit board 10, and the first frame second mounting structure 3101 is in shaft hole positioning connection with the hinge body 14 of the circuit board 10 to fix the second body 12 of the circuit board 10.

The first frame ball groove 311 further includes a first frame outer ball groove 3110 and a first frame inner ball groove 3111, wherein the first frame outer ball groove 3110 is formed on an outer surface of the first frame 31, the first frame inner ball groove 3111 is provided on an inner surface of the first frame 31, wherein the first frame outer ball groove 3110, the base ball groove 212 and the ball 50 are engaged with each other, so that the first frame 31 and the base 21 have a first degree of freedom of movement under the action of the first piezoelectric actuator 41. The first outer ball groove 3110 further includes a first outer ball groove 31100 formed at a bottom side of at least the first frame 31 and a second outer ball groove 31101 formed at a top side of the extension 315, wherein the first outer ball groove 31101 is disposed at a height of the first frame 31 higher than the first outer ball groove 31100, so that the ball groove in the first frame 31 can move more smoothly after being put into the ball, and a rotation moment is not easily generated, and the specific function is to reduce a tilting moment by the planar ball as described with reference to fig. 4A-4B, which will not be repeated herein.

The mode that includes lateral wall ball and terminal surface ball in this piezomotor setting can be drawn in this application the drive direction of piezoactuator's drive end is perpendicular the supporting plane that the lateral wall ball constitutes, the drive direction of piezoactuator's drive end is parallel to the supporting plane that the terminal surface ball constitutes to can guarantee that this piezomotor drive is smoother, can reduce the tilting moment, can guarantee again that the motion plane nature is better.

The first frame 31 further has a first frame first through hole 312 and a first frame second through hole 313, wherein the first frame first through hole 312 is formed on one side of the first frame 31, and the first frame second through hole 313 is formed in the vicinity of the first frame first through hole 312. The first frame first through hole 312 is disposed in the middle of the first frame 31, and in one embodiment of the present application, the first through hole 312 is used to enable the second piezoelectric actuator 42 mounted on the first frame 31 to extend into the first frame 31 and the second piezoelectric friction head 421 of the second piezoelectric actuator 42 can extend into the first frame 31 to abut against the second frame 32.

In one embodiment of the present application, the first frame second through hole 313 is configured to receive the second position sensor 74 or magnet, and in some embodiments, the second position sensor 74 senses the magnitude of the magnetic flux to thereby sense the relative position of the second frame 32.

Referring to fig. 7, in the present embodiment, the first frame first-height outer ball grooves 31100 are formed at the lower end of the first frame 31, and four first frame first-height outer ball grooves 31100 having the same height are preferable in the present embodiment. Wherein, two first-frame first-height outer ball grooves 31100 are formed at both corners of the bottom side of the first frame 31, and two first-height outer ball grooves 31100 are formed at the bottom side of the sidewall extension 316 of one side of the first frame 31. The first frame second height outer ball groove 31101 is formed at the top side extension 315 of the first frame 31, the first frame second height outer ball groove 31101 and at least two first frame first height outer ball grooves 31100 are formed at the same side of the first frame in such a way that the two first frame first height outer ball grooves 31100 and one first frame first height outer ball groove 31100 on the same side form a triangle supporting way, and when the bottom plate side plate 23 and the first frame 31 are supported by balls, the triangle supporting way provides a rolling plane, so that the movement is more stable, the rotation moment is not easy to generate, and the specific function is that the plane balls described with reference to fig. 4A-4B reduce the content of the tilting moment, which is not repeated herein.

Referring to fig. 7, in an embodiment of the present application, the first frame first height outer ball groove 31100 is one, the first frame first height outer ball groove 31100 is disposed between two first frame second height outer ball grooves 31101 on the same side and on the third projection, and further, the first frame first height outer ball groove 31100 is the same distance from the adjacent first frame second height outer ball groove 31101, so that the supporting pressure of the side surface can be uniformly transferred to the surface when the first frame 31 and the base 20 are connected by the balls, and the reliability problem, the deformation problem and the like caused by the excessive supporting pressure to the single ball groove pressure are avoided. The specific effect is that the planar ball reduces the tilting moment as described with reference to fig. 4A-4B, and will not be described here.

Referring to fig. 7, the first in-frame ball groove 3111 is connected to the second frame 32, wherein the first in-frame ball groove 3111 further includes a first in-frame ball groove 31110 and a first in-frame ball groove 31111, and the first in-frame ball groove 31111 is disposed at a higher level than the first in-frame ball groove 31110, so that after the first frame 31 is connected to the second frame 32, the ball grooves of different heights have different moments after the balls are placed, the movement is smoother, and the rotational moment is not easily generated. The specific effect is that the planar ball reduces the tilting moment as described with reference to fig. 4A-4B, and will not be described here.

One ball may be provided in each of the first-frame first-height inner ball groove 31110 and the first-frame second-height inner ball groove 31111, thereby preventing two balls from interfering with each other during movement because the number of balls in the single ball groove is greater than or equal to two. The specific effect is that the planar ball reduces the tilting moment as described with reference to fig. 4A-4B, and will not be described here.

Referring to fig. 7, the first frame has three or more first frame second height inner ball grooves 31111, and in some embodiments, four first frame second height inner ball grooves 31111 are formed on one side inner wall of the first frame 31, and the remaining second height inner ball grooves 31111 are formed on the opposite side inner wall of the first frame 31. In an embodiment of the present application, the manner of combining four balls into one rolling plane can increase the flatness during rolling, and when the number of ball grooves is greater than 3, one rolling plane can be formed by three balls, so as to ensure the rolling flatness.

The first frame first height inner ball groove 31110 is one, the first frame first height inner ball groove 31110 is disposed in the middle of the line of the third projection of the first frame second height inner ball groove 31111 and lower than the first frame second height inner ball groove 31111, further, the distance between the first frame first height inner ball groove 31110 and the adjacent first frame second height inner ball groove 31111 is the same, so that the supporting pressure of the side surface can be uniformly transmitted when the first frame 31 and the second frame 32 are connected, and the occurrence of reliability problem, deformation problem and the like caused by overlarge supporting pressure to the single ball groove pressure can be avoided.

Referring to fig. 6, the second frame 32 further has a second frame mounting portion 320 and a second frame top side extension portion 325, the second frame mounting portion 320 being provided on a side wall surface of the second frame 32 for mounting the third piezoelectric actuator 43 or the third elastic piece 623 and/or the wiring board 10. The second frame mount 320 includes a second frame first mount structure 3200, wherein the second frame first mount structure 3200 is disposed on an outer side surface of the second frame 32, and in some embodiments, at an outer corner position of the second frame 32, and the second frame first mount structure 3200 is used to fix the third piezoelectric actuator 43 or the third elastic sheet 623 and the circuit board 10. The second frame second mounting structure 3201 is disposed on a top surface of the second frame 32, specifically, at least one mounting post for fixing the third body 13 of the circuit board 10.

Referring to fig. 6, the second frame ball grooves 321 are further divided into a second frame outer ball groove 3210, a second frame inner ball groove 3211, and a second frame upper ball groove 3212, wherein the second frame outer ball groove 3210 is provided at an outer surface of the second frame, the second frame inner ball groove 3211 is provided at an inner surface of the second frame 32, and the second frame upper ball groove 3212 is provided at an upper surface of the second frame 32. The ball grooves arranged on different surfaces can reduce the size increase caused by single-side stacking of balls, and can also utilize injection molding spaces on different surfaces, so that the ball grooves cannot shrink seriously due to aggregation during injection molding, and on the other hand, different ball stresses can enable the second frame 32 to be installed more firmly.

Referring to fig. 8, the second frame outer ball groove 3210 cooperates with the first frame inner ball groove 3111 and balls so that a second degree of freedom of movement is provided between the second frame 32 and the first frame 31. The second outer ball groove 3210 also includes a first outer ball groove 32100 and a second outer ball groove 32101, wherein the second outer ball groove 32101 is disposed at a higher level than the first outer ball groove 32100 of the second outer ball groove 32 of the first outer ball groove 31, so that the balls with different heights can make the movement smoother and more planar after the balls are placed in the balls grooves, and the rotation moment is not easy to generate. The specific effect is that the planar ball reduces the tilting moment as described with reference to fig. 4A-4B, and will not be described here.

At least three second-frame second-height outer ball grooves 32101 are formed at the outer side of the second frame 32, and four second-frame second-height outer ball grooves 32101 at the same height are preferable in this embodiment. Two of the second-frame second-height outer ball grooves 32101 are formed at one side outer surface of the second frame 32, and the other two of the second-frame second-height ball grooves 32101 are formed at the other side outer surface of the second frame 32. The specific effect is that the planar ball reduces the tilting moment as described with reference to fig. 4A-4B, and will not be described here.

For ease of understanding, in one embodiment of the present application, the distances between the left and right second-height outer ball grooves 32101 of the second frame adjacent to the second piezoelectric actuator 42 and the second-height outer ball grooves 32101 of the opposite left and right second frames are the same, so as to form an isosceles trapezoid, ensure that the supporting pressure can be uniformly transmitted when the second-height outer ball grooves 32101 of the second frame are supported, and avoid reliability problems, deformation problems, etc. caused by excessive pressure of the single ball groove due to the supporting pressure. On the other hand, the distance between the two second outside-frame ball grooves 3210 adjacent to the second piezoelectric actuator 42 is longer than the length of the second piezoelectric actuator, so that the deformation caused by the overall vibration is always supported by the two second outside-frame ball grooves 3210 located outside the piezoelectric actuator when the second piezoelectric actuator 42 is operated, and it is not easy to occur that the vibration amplitude of the piezoelectric actuator is longer than the supporting distance between the two second outside-frame ball grooves 3210, resulting in the occurrence of vibration warpage in the edge portion of the second frame 32. The specific effect is that the planar ball reduces the tilting moment as described with reference to fig. 4A-4B, and will not be described here.

For convenience of overview, the balls arranged on the outer side of the piezoelectric actuator can be summarized as balls on the same side of the piezoelectric actuator, and the balls on the same side of the piezoelectric actuator are arranged on the upper side of the piezoelectric actuator, so that the running flatness of the piezoelectric actuator in driving can be increased.

Similarly, the side wall balls between the first frame 31 and the base 20 are also provided between the first frame 31 and the second frame 32, wherein the side wall balls between the first frame 31 and the second frame 32 are provided in the first-frame first-height inner ball groove 31110 and the first-frame second-height inner ball groove 31111, and have functions and effects consistent with those of the foregoing. The specific effect is that the planar ball reduces the tilting moment as described with reference to fig. 4A-4B, and will not be described here.

Referring to fig. 8, the second frame first height outer ball grooves 32100 are one, the second frame first height outer ball grooves 32100 are disposed in the middle of the connecting line of the third projection of the two second frame second height outer ball grooves 32101 on the same side, and further, the second frame first height outer ball grooves 32100 are the same distance from the adjacent second frame second height outer ball grooves 32101, so that the supporting pressure of the side surface can be uniformly transferred to the surface when the first frame 31 and the second frame 32 are connected through the balls, and the problem that the supporting pressure causes reliability and deformation problem to the overlarge pressure of the single ball groove is avoided. The specific effect is that the planar ball reduces the tilting moment as described with reference to fig. 4A-4B, and will not be described here.

The second in-frame ball grooves 3211 are two ball grooves extending in the optical axis direction provided at opposite corner positions inside the second frame 32. The third frame is movably connected to the inside of the second frame 32 by the ball grooves 3211 in the second frame 32 and the balls accommodated in the ball grooves 3211 under the driving action of the third piezoelectric actuator 43, and the third frame 33 has a third degree of freedom of movement, i.e., a degree of freedom of movement in the optical axis direction, with respect to the second frame 32.

Referring to fig. 8, the second frame 322 further has a second frame first through hole 322, wherein the second frame first through hole 322 is disposed at a corner of the second frame 32, and the second frame first mounting structure 3200 is located around the second frame first through hole 322. In one embodiment of the present application, the second frame first through hole 322 is used for extending the third actuator 43 mounted on the second frame 32, and the second piezoelectric friction head 421 of the second piezoelectric actuator 42 can extend into the second frame 32 to abut against the third friction plate 333 disposed on the outer side wall of the third frame 43.

Referring to fig. 11, a circuit board 10 for fixing a frame of an anti-shake motor will be described, and referring to fig. 11, a circuit board 10 includes a first body 11, a second body 12, and a third body 13. The plane of the second body 12 is orthogonal to the plane of the first body 11; a third body 13, the plane of the third body 13 is not parallel to the planes of the first body 11 and the second body 12; a hinge 140, the hinge 14 being disposed between at least two of the bodies to provide planar extension between the different bodies. The hinge 14 includes a first hinge 140 and a second hinge 141, the first hinge 140 connects the first main body 11 and the second main body 12, the second hinge 141 connects the second main body 12, the second hinge 14 is mounted on the upper surface of the second frame 32, the second hinge 141 is folded in at least 2 different directions, so that the upper surface of the second hinge 141 has at least 2 degrees of freedom with respect to the side surface of the second main body 12.

Referring to fig. 6, the third frame 33 further includes a third frame ball groove 330, a third frame escape portion 331, a third friction plate 333 disposed on a sidewall of the third frame 33, and a third frame mounting portion 332, wherein the third frame ball groove 330 is formed on opposite side corner sidewalls of the third frame 33, and the third frame ball groove 330 extends along a third direction, i.e., along an optical axis direction, so that the third frame 33 can be movably connected inside the second frame 32 through the third frame ball groove 330 and ball action, and an inclination moment occurring due to a single-side ball support can be prevented through the ball groove disposed on opposite sides, so that the third frame maintains a vertical performance when moving along the optical axis direction. The third frame avoidance portion 331 is formed on a corner side wall of the third frame, in one embodiment of the present application, the third frame avoidance portion 331 is a groove disposed on a side wall of the third frame 33, and a third position sensor 76 is disposed in the third frame avoidance portion 331 to detect a position change of the third frame relative to the second frame 32. The third frame mounting portion 332 is disposed on a top side surface of the third frame 33, and in one embodiment of the present application, the third frame mounting portion 332 is embodied as a set of positioning holes or grooves for assembling the circuit board 10, particularly the circuit board third body 30.

The driving position of the first piezoelectric actuator 41 is determined by the first position sensor 72, the first position sensor 72 is located at one side of the first piezoelectric vibrator 410, and the first position sensor 72 can serve to sense displacement of the movable assembly.

Further, the second piezoelectric actuator 42 includes a second piezoelectric vibrator 420 and a second piezoelectric friction head 421. The second piezoelectric vibrator 420 is rectangular and long, and the rectangular long side of the second piezoelectric vibrator 420 is perpendicular to the optical axis. The second piezoelectric vibrator 420 is disposed on the second frame 32, and the second piezoelectric vibrator 420 is disposed on the second frame 32. One surface of the second piezoelectric vibrator 420 facing the lens assembly is a first surface of the second piezoelectric vibrator 420, and one surface of the second piezoelectric vibrator 420 away from the lens assembly is a second surface of the second piezoelectric vibrator 420, wherein the first surface and the second surface are opposite to each other.

Referring to fig. 5, fig. 6 and fig. 8, the first surface of the second piezoelectric vibrator 420 has a second piezoelectric friction head 421, the second piezoelectric friction head 421 is located at the center of the first surface of the second piezoelectric vibrator 420, a second friction plate 324 is disposed on the other side of the second piezoelectric friction head 421, the second friction plate 324 is in a rectangular plate structure, and the second friction plate 324 is disposed parallel to the first surface of the second piezoelectric vibrator 420, and the second piezoelectric friction head 421 is located at the center of the second friction plate 324, so that the stress of the second friction head 421 and the second friction plate 324 is more uniform. The second piezoelectric friction head 421 is in close contact with the second piezoelectric vibrator 420 and the second friction plate 324, and generates friction force to drive the same. The second surface of the second piezoelectric vibrator 420 is attached to the second main body 12 of the circuit board 10, and the second surface of the second piezoelectric vibrator 420 corresponds to the second through hole 120 of the second main body 12, and the second through hole 120 can prevent the second piezoelectric vibrator 420 from interfering.

Referring to fig. 2, in one embodiment of the present application, the housing 22 further includes a housing body 221 and a platen 222. Wherein the pressing plate 222 is mounted at the lower end of the housing body 221, wherein the upper and lower surfaces of the pressing plate 222 are provided with positioning portions, such as positioning holes, grooves, etc., for better connection with the housing body 221, the lateral spring 61 comprises an upper spring 611, the upper spring 611 is connected at the lower side of the pressing plate 222, the lower surface of the upper spring 611 abuts against the balls provided in the ball grooves 3212 on the second frame, so that the lateral spring always provides a pre-pressing force to the balls provided in the ball grooves 3212 on the second frame as a force application device, thereby ensuring that the second frame 32, the first frame and the base 20 are assembled with the spring pre-pressing force and gravity as a whole at a third supporting force, ensuring that the assembled height can be maintained at all times, and preventing the first frame 31 and the second frame 32 from tilting relative to the base 20.

In other embodiments, the lateral spring 61 further comprises a lower spring solution, wherein the lower spring may be mounted on the lower side of the planar ball between the first frame 31 and the base 21, so as to provide a greater elastic potential energy and position of the movable assembly 30 in the fixed assembly 20 under the combined action of the upper and lower springs, thereby realizing a mid-set solution of the movable assembly 30.

Referring to fig. 2, a second spring 622 is disposed in the area of the second body 12 corresponding to the second piezoelectric actuator 42, the second spring 622 includes a second spring pre-pressing portion 6220, the second spring pre-pressing portion 6220 is disposed in the middle of the second spring 622, the second spring pre-pressing portion 6220 is disposed at the back of the second piezoelectric vibrator 420, the second spring pre-pressing portion 6220 provides pre-pressing force on the back of the second piezoelectric vibrator 420, a second spring first through hole 6221 is formed in the middle of the second spring pre-pressing portion 6220, the second spring pre-pressing portion 6220 surrounds the four second spring connecting arms 6222, the four second spring connecting arms 6222 provide support in the plane direction of the second piezoelectric vibrator 420, the first through hole 6221 of the second spring is disposed at the back of the second piezoelectric vibrator 420, the first through hole 6221 plays a role of avoiding deformation of the back of the second piezoelectric vibrator 420, and the second piezoelectric vibrator 420 is prevented from interfering with the first 622 during operation, so as to increase the reliability of the motor.

In addition, the second spring plate connecting arm 6222 includes a pair of second spring plate longitudinal connecting arms 62220 extending along the optical axis direction and a pair of second spring plate transverse connecting arms 62221 extending perpendicular to the optical axis direction, wherein the second spring plate longitudinal connecting arms 62220 and the second spring plate transverse connecting arms 62221 extend integrally with each other to form a mouth frame for pre-pressing the second main body 12 of the circuit board 10, so as to provide a mouth pre-pressing force to the back surface of the second piezoelectric vibrator 420 to support the back surface of the second piezoelectric vibrator 420, and ensure that the second piezoelectric friction head 421 on the second piezoelectric vibrator 420 is always abutted on the second friction plate 324.

The two sides of the second spring pre-pressing portion 6220 integrally extend with second spring side portions 6223, wherein two second spring side portions 6223 are respectively formed with a second spring second through hole 6224 and a second spring third through hole 6225, and the second spring second through hole 6224 and the second spring third through hole 6225 have the same size. The second elastic piece side portion 6223 is provided with a mounting hole, so that the second elastic piece 622 can be fixed on the first frame 31 through the mounting hole of the second elastic piece side portion 6223, and on the other hand, the movement margin of the second elastic piece pre-pressing portion 6210 can be improved by providing through holes on both sides of the second elastic piece pre-pressing portion 6220.

The second elastic piece 622 has elasticity, the second elastic piece longitudinal connecting arm 62220 divides the second elastic piece second through hole 6224, the second elastic piece third through hole 6225 and the portion between the second elastic piece first through hole 6221, the through hole reduces the deformation coefficient of the elastic piece, and correspondingly increases the elastic enabling of the second elastic piece longitudinal connecting arm 62220.

It can be understood that the pre-compression provided by the second elastic piece 622 can enable the piezoelectric actuator 41 to move freely, but always receives the pre-compression of the first elastic piece 622 in the direction perpendicular to the movement, and maintains the abutting state required by the driving of the first piezoelectric actuator 41.

Specifically, the area of the first through hole 6221 of the second elastic piece is at least 2 times larger than that of the second through hole 6224 of the first elastic piece, so that the restoring force of the second elastic piece can be increased, and the abutting state required by driving the second piezoelectric actuator 42 can be maintained all the time.

The four corners of the second spring side portion 6223 are respectively formed with a second spring positioning hole 62230, and the second spring positioning hole 62230 is a through hole structure, so that the second spring 622 is convenient to be mounted on the first frame 31. In addition, the connecting hole fixed by the second elastic piece 622 and the positioning hole on the second positioning portion 123 of the circuit board 10 are separated from each other, so that the fixed relationship between the second elastic piece 622 and the first frame 31 is not affected by the assembly of the circuit board 10, and the dimensional variation generated by the working vibration of the first piezoelectric vibration actuator 41 also does not affect the stability of the assembly of the second elastic piece 622, so as to ensure that the second elastic piece 622 and the base side plate 23 are in a relatively stable connection relationship.

In summary, the second elastic piece 622 in the present application can play a role of fixing and limiting the second piezoelectric vibrator 420, and can provide a certain pre-pressing force.

To omit the description, similarly, the third piezoelectric vibrator 430 is rectangular and elongated, and the long edge of the third piezoelectric vibrator 430 extends in the optical axis direction. The third piezoelectric vibrator 430 is disposed on the third main body 13 of the circuit board 10, the third elastic piece 623 is disposed on the upper side of the third elastic piece 623, and the third elastic piece 623 is disposed on the side wall of the second frame 32. The surface of the third piezoelectric vibrator 430 facing the lens assembly or the third frame 33 is the first surface of the third piezoelectric vibrator 430, the surface of the third piezoelectric vibrator 430 away from the lens assembly or the third frame 33 is the second surface of the third piezoelectric vibrator 430, and the first surface and the second surface of the third piezoelectric vibrator 430 are opposite to each other, as shown in fig. 7, fig. 8 and fig. 9, the first surface of the third piezoelectric vibrator 430 has a third piezoelectric friction head 431, the third piezoelectric friction head 431 is located at the center of the first surface of the third piezoelectric vibrator 430, a third friction plate 333 is disposed in an area where a corner side wall of the third frame 33 faces the third piezoelectric friction head 431, and extends along the optical axis direction, the third friction plate 333 is in a rectangular plate structure, and the third friction plate 333 is disposed parallel to the first surface of the third piezoelectric vibrator 430, and the third piezoelectric friction head 431 faces the center area of the third friction plate 333, so that the third friction head 431 and the third friction plate 333 are stressed more uniformly. The third piezoelectric friction head 431 is closely contacted with the third friction plate 333, so that friction force is generated to drive the third piezoelectric friction head 431. The second surface of the third piezoelectric vibrator 430 abuts against the second frame 623, and in some alternative embodiments, the second surface of the third piezoelectric vibrator 430 is mounted on the third elastic sheet 623, and the third elastic sheet 623 is further disposed at an outer corner position of the second frame 32. The third friction plate 333 may be mounted on the third frame mounting part 332.

Similar to the first spring plate 621 and the second spring plate 622, the third spring plate 623 also includes a third spring plate pre-pressing portion 6230, a third spring plate first through hole 6231, a third spring plate connecting arm 6232, a third spring plate side portion 6233, a third spring plate second through hole 6234, a third spring plate third through hole 6235, and a third spring plate pre-pressing portion 6230, wherein the relationship of these elements can be described with reference to the first spring plate 621 and the second spring plate 622.

Taking the first piezoelectric actuator 41 as an example, after the power/voltage excitation is provided to the first piezoelectric actuator 41, the first piezoelectric vibrator 410 performs different surface types of standing waves or traveling waves on the first piezoelectric vibrator, so as to drive the first piezoelectric friction head 411 to reciprocate along the first deflection or move in an elliptical manner, and further drive the first friction plate 314 to move due to the friction contact between the first piezoelectric friction head 411 and the first friction plate 314. Specifically, when the first piezoelectric actuator 41 is excited by a power source, the first piezoelectric vibrator 410 generates a motion along a first telescopic shape, and the first piezoelectric friction head 411 is driven by the first piezoelectric vibrator 410 to reciprocate along a first direction, so as to drive the first friction plate 314 to move along the first direction; when the first piezoelectric actuator 41 is excited by another power source/voltage, the first piezoelectric vibrator 410 generates a movement pattern along a first extension shape and a movement pattern along a second extension shape, and the first piezoelectric friction head 411 generates an elliptical movement on a first plane under the driving of the first piezoelectric vibrator 410, so as to drive the first friction plate 314 to move along a first direction. Therefore, the first, second and third piezoelectric actuators (41, 42, 43) have degrees of freedom on the first, second and third surfaces, respectively, and can drive the movable assembly 30 to move on the first, second and third surfaces so as to adjust the relative position relationship between the lens assembly and the photosensitive assembly, thereby realizing optical anti-shake. Each spring piece of each piezoelectric actuator also plays a certain supporting role, as shown in fig. 2, a pre-compression force in a vertical driving direction is provided for the first piezoelectric actuator 41, and a pre-compression force in a vertical driving direction is provided for the second piezoelectric actuator 42, so that the stability of the motion of the piezoelectric actuator in the optical anti-shake process can be improved, and the imaging quality is improved.

Referring to fig. 11, the present application proposes a circuit for connecting different driving frames of an anti-shake motor, and the circuit board 10 in one embodiment of the present application is provided with different main bodies of the circuit board 10, so that the circuit board 10 can be installed on different frames of the motor after being bent/turned for many times, the turning process of the circuit board 10 can increase the movable stroke of the circuit board 10, and meanwhile, the turning body 140 of the circuit board 10 can play a role of resetting a bit.

Referring to fig. 11, the first body 11, the second body 12 and the third body 13 of the circuit board 10 are respectively fixed on different surfaces of the motor frame, and the different circuit boards 10 provide a mounting base for the anti-shake motor and are electrically connected with the anti-shake motor.

In the following description, the hinge 14 includes a first hinge 140 and a second hinge 141, the first hinge 140 connects the first body 11 and the second body 12, the second hinge 141 connects the second body 12, the second hinge 14 is mounted on the upper surface of the second frame 32, and the second hinge 141 is folded in at least 2 different directions, so that the upper surface of the second hinge 141 has at least 2 degrees of freedom with respect to the side surface of the second body 12. Referring to fig. 7 and 8, the hinge 140 includes a first hinge 140 and a second hinge 141, wherein the first hinge 140 is disposed between the first body 11 and the second body 12, i.e. the first body 11 is turned over in a direction perpendicular to a plane of the first body to form the second body 12.

The second hinge 141 is folded in at least 2 different directions such that the upper surface of the third hinge 13 is mounted to the upper surface of the second frame 32, and the second hinge 141 has at least 2 degrees of freedom with respect to the second body 12, i.e., the second body 12 is flipped to the upper surface of the second frame 32 in two and/or three directions. Specifically, the second turning body 141 includes a first turning portion 1410, a second turning portion 1411, and a third turning portion 1412, wherein the first turning portion 1410, the second turning portion 1411, and the third turning portion 1412 are respectively subjected to flexible bending processing, so as to buffer the main body of the circuit board 10, and have a certain restoring force, so as to provide the movable degree of freedom for the movable component 30.

In one embodiment of the present application, the second hinge 141 is connected to the upper surface of the second frame 32, wherein the second hinge 141 further comprises a first hinge 1410, a second hinge 1411 and a third hinge 1412, wherein the first hinge 1410 is orthogonal to the second hinge 1411, wherein the first hinge 1410 is disposed proximate to the second body 12, and the second hinge 1411 is disposed proximate to the third body 13 to provide a planar extension between the second body 12 and the third body 13.

Referring to fig. 11, the second hinge 141 includes a second hinge mounting portion 143, the second hinge mounting portion 143 is mounted on the upper surface of the second frame 32, a plane of the second hinge mounting portion 143 is parallel to a plane of the second main body, and the second hinge mounting portion 143 is fixedly connected to the upper surface of the second main body 12 and can provide the adjustment margin, thereby increasing the movable stroke of the movable assembly 30.

Referring to fig. 11, the second body 12 and the third body 13 are respectively formed with a second through hole 121 and a third through hole 131, wherein the second, third bodies 11, 12 are plate-shaped, and the first body 11 further includes a second mounting portion 120, a second connecting arm 122 and a second positioning portion 123. The second mounting portion 110 is attached to an outer side surface of the first piezoelectric actuator 41, and a first through hole 111 having a rectangular opening is formed in the middle of the first mounting portion 110. The first mounting portion 110 is annular, the first piezoelectric vibrator 410 can be attached to the annular solid portion of the first mounting portion 110, the rectangular opening of the first mounting portion 110 is spaced from the back surface of the first piezoelectric vibrator, so that the reliability of the piezoelectric motor 1 can be increased, the situation that the piezoelectric motor is impacted and the movement vibration is separated from each other can be prevented, the deformation of the back surface of the first piezoelectric vibrator 410 is avoided by a rectangular opening formed in the middle of the first mounting portion 110, and the first piezoelectric vibrator 410 can be firmly fixed on the first main body 11.

The first positioning portion 113 is fixedly connected to the base side plate mounting portion 2132, and the first positioning portion 113 serves as an attachment for the first body 11. The first positioning portion 113 is provided in a plate-like structure having a positioning hole, the first positioning portion 113 is provided outside the first mounting portion 110, the two first connections 112 are flexible, and the first mounting portion 110 is integrally connected to the first positioning portion 113 of the first main body 11 through the first connection arms 112 on both sides. The first mounting portion 110 extends to the first positioning portion through the connecting arms 112 on both sides, the first main body 11 is connected to the outer surface positioning post of the base side plate 23 through the positioning hole, so as to improve the assembly accuracy of the camera module, and the connecting arms 112 can enable a certain margin adjustment when the first main body 11 is assembled with the first piezoelectric actuator 41.

Specifically, the first mounting portion 110 does not extend integrally with the first main plate 11 along the optical axis direction, and it is understood that the first mounting portion 110 extends to the first main plate only by the two connecting arms 112 on the outer side, and therefore the first mounting portion 110 has a degree of freedom along the optical axis direction in addition to the degree of freedom in the extending directions of the two connecting arms with respect to the first main plate, and therefore the first mounting portion 110 can have a degree of freedom at least perpendicular to the optical axis direction with respect to the first positioning portion, thereby satisfying a required movable margin of rotational deflection generated by the friction head when the first piezoelectric vibrator is operated.

The first elastic sheet 621 includes a first elastic sheet pre-pressing portion 6210, wherein the first elastic sheet pre-pressing portion 6210 is disposed in the middle of the first elastic sheet 621, the first elastic sheet pre-pressing portion 6210 is disposed at the back of the first piezoelectric vibrator 410, the first elastic sheet pre-pressing portion 6210 provides a back pre-pressing force of the first piezoelectric vibrator 410, a first elastic sheet first through hole 6211 is formed in the middle of the first elastic sheet pre-pressing portion 6210, the first elastic sheet pre-pressing portion 6210 surrounds the four first elastic sheet connecting arms 6212, the four first elastic sheet connecting arms 6212 provide support for the plane direction of the first piezoelectric vibrator 410, the first elastic sheet first through hole 6211 is disposed at the back of the corresponding first piezoelectric vibrator 410, the first elastic sheet first through hole 6211 plays a role of avoiding the back deformation of the first piezoelectric vibrator 410, so as to prevent the first piezoelectric vibrator 410 from interfering with the first elastic sheet 621 when working, so as to increase the working reliability of the piezoelectric motor.

Referring to fig. 11, the first mounting portion 110, the second mounting portion 120, and the third mounting portion 131. The first, second and third mounting portions 110, 120 and 131 are fixed to the base side plate 213, the first and second frames 31 and 32, respectively, through positioning holes.

Referring to fig. 11, the first through hole 111 and the second through hole 121 are respectively rectangular through holes, and the symmetry line of each rectangular through hole is consistent with the center line of the adjacent connecting arm, for example, the center line of the first through hole 111 is consistent with the center line of the first connecting arm, so as to increase the restoring force of the circuit board.

The first through hole 110 and the second through hole 120 can prevent the piezoelectric vibrator from interfering with each other when the piezoelectric vibrator moves in a telescopic manner, and the above-described case is also applied to the third body 13.

In an embodiment of the present application, the circuit board 10 further includes a adapting portion 16, the adapting portion 16 is mounted on the upper surface of the second frame 32, the circuit board 10 further includes a set of notches 162, the adapting portion 16 further includes a plurality of soldering holes 161, and the adapting portion soldering holes 161 are symmetrically disposed with respect to a center line of the second body 12. The adaptor welding holes 161 are distributed on both sides of at least one of the notches 162, thereby reducing the size of the circuit board and the size of the piezoelectric motor. The plurality of adapting portion welding holes 161 are located on a single side of the adapting portion 16, the first welding holes 161 are used for welding a communication circuit board, in this application, after the second turning body 141 turns to the upper side of the second frame 32, the second turning body 141 is welded and conducted with the adapting portion 16 through the welding holes, one side of the adapting portion 16 is electrically connected with the third main body 13, so that an internal circuit of the piezoelectric motor 1, for example, a circuit of the third main body 13 is all adapted through the adapting portion 16, the adapting portion 16 is connected to the second main body 13, and finally the whole circuit is conducted by one circuit.

Referring to fig. 11, further, the first body 11 and the second body 12 further include a first connecting arm 112 and a second connecting arm 122, and the first connecting arm 112 and the second connecting arm 122 respectively extend inward from two ends of the first body 11 and the second body 12 to the first mounting portion 110 and the second mounting portion 120, so as to form a pair of arm structures, which have an anti-torsion function, so that the first connecting arm 112 and the second connecting arm 122 can reduce the reactive force of the main body of the circuit board 10.

The first connecting arm 112 and the second connecting arm 122 are symmetrically disposed with respect to the first through hole 111 and the second through hole 121. By the mode, the flexibility of the circuit board can be enhanced, and meanwhile, the piezoelectric motor is not easy to interfere in the assembly process.

Claims

1. A piezoelectric motor, comprising:

a fixing assembly;

a movable assembly movably coupled to the fixed assembly;

2. The piezoelectric motor according to claim 1, wherein the balls include side wall balls and end face balls, a driving direction of the driving end of the piezoelectric actuator is perpendicular to a supporting plane constituted by the side wall balls, and a driving direction of the driving end of the piezoelectric actuator is parallel to the supporting plane constituted by the end face balls.

3. The piezoelectric motor according to claim 2, wherein the side wall balls include a first height ball and a second height ball, and a position where the driving end of the piezoelectric actuator abuts the movable assembly in a side projection is located in a middle region of a line connecting the first height ball and the second height ball.

4. The piezoelectric motor according to claim 2, wherein the number of the first height balls is one, the number of the second height balls is two, and the driving end of the piezoelectric actuator is located in a triangular area where the first height balls and the second height balls are connected in a projection in a certain direction.

5. A piezoelectric motor according to claim 3, wherein the force provided by the drive end of the piezoelectric actuator to the movable assembly throughout the path of travel is present at an angle to the plane of the ball connection.

6. A piezoelectric motor according to claim 3, wherein the first and second height balls are equidistant from each other, and wherein the first and second height balls form an equilateral triangle shaped area in a projection in a certain direction.

7. The piezoelectric motor according to claim 3, wherein the ball includes at least two piezoelectric actuator-ipsilateral balls provided above the piezoelectric actuators, and two of the piezoelectric actuator-ipsilateral balls are provided on an upper side of the piezoelectric actuators.

8. The piezoelectric motor according to claim 7, wherein, in a projection in a certain direction, the two same-side balls of the piezoelectric actuator are located at the same height as the two second-height balls.

9. The piezoelectric motor according to claim 8, wherein, in a certain directional projection, two of the piezoelectric actuator ipsilateral balls are located between two of the second height balls.

10. The piezoelectric motor according to claim 9, wherein the distance between each of said piezoelectric actuator ipsilateral ball and said second elevation ball adjacent thereto is the same, and in a projection in a certain direction, two of said piezoelectric actuator ipsilateral balls and two of said second elevation balls form an isosceles trapezoid, said piezoelectric actuator being in the vicinity of a narrower parallel side of said isosceles trapezoid.

11. The piezoelectric motor according to claim 10, wherein the piezoelectric actuator includes a first piezoelectric actuator, a second piezoelectric actuator, the movable assembly includes a first frame, a second frame movably connected to the first frame, the first piezoelectric actuator is fixedly mounted on one side of the base, the second piezoelectric actuator is fixedly mounted on one side of the first frame, and driving directions of the first piezoelectric actuator and the second piezoelectric actuator are orthogonal.