CN117423541A - Manufacturing method of thin film inductor - Google Patents
Manufacturing method of thin film inductor Download PDFInfo
- Publication number
- CN117423541A CN117423541A CN202311591522.9A CN202311591522A CN117423541A CN 117423541 A CN117423541 A CN 117423541A CN 202311591522 A CN202311591522 A CN 202311591522A CN 117423541 A CN117423541 A CN 117423541A
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- magnetic
- magnetic material
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 27
- 239000010409 thin film Substances 0.000 title claims abstract description 24
- 239000000696 magnetic material Substances 0.000 claims abstract description 99
- 238000000034 method Methods 0.000 claims abstract description 14
- 239000002002 slurry Substances 0.000 claims abstract description 14
- 238000005520 cutting process Methods 0.000 claims abstract description 9
- 229910001004 magnetic alloy Inorganic materials 0.000 claims description 15
- 239000002131 composite material Substances 0.000 claims description 14
- 229910000859 α-Fe Inorganic materials 0.000 claims description 14
- 238000005530 etching Methods 0.000 claims description 4
- 238000001259 photo etching Methods 0.000 claims description 4
- 239000007921 spray Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 12
- 229910000519 Ferrosilicon Inorganic materials 0.000 description 3
- 238000010330 laser marking Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000005507 spraying Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 238000010923 batch production Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910000863 Ferronickel Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/0206—Manufacturing of magnetic cores by mechanical means
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Coils Or Transformers For Communication (AREA)
- Manufacturing Cores, Coils, And Magnets (AREA)
Abstract
The invention provides a method for manufacturing a thin film inductor, which comprises the following steps: tiling the first magnetic material to form a magnet underlayer; preparing a conductive coil group, wherein the conductive coil group comprises a plurality of conductive coils arranged in an array; the conductive coil groups are arranged on the first magnetic materials, and second magnetic materials which are in one-to-one correspondence with the conductive coils are vertically arranged; introducing magnetic slurry to cover the first magnetic material, the second magnetic material and the wire coil group to form an inductance group; cutting the inductance group to form a plurality of coil inductors, wherein each coil inductor comprises an inductance body and a magnet wrapping the inductance body; the inductor body comprises a first magnetic material, a conductive coil and a second magnetic material; the individual coil inductors are terminated.
Description
Technical Field
The invention relates to the field of inductor manufacturing, in particular to a method for manufacturing a thin film inductor.
Background
With the progress of semiconductor technology, light-weight and thin electronic devices have become an important point of development, and in order to satisfy the thinness and light-weight of products, various miniaturized passive components such as resistors, capacitors, or inductors have been required to be manufactured. A micro-molded choke is an integrally formed inductor, typically by winding a wire to form a conductive coil, and then packaging the conductive coil to obtain a final product, which then has a problem of low production efficiency.
Disclosure of Invention
The invention aims to provide a method for manufacturing a thin film inductor.
The invention aims to solve the problem that the production efficiency of the traditional coil inductor is low.
In order to solve the problems, the invention is realized by the following technical scheme:
a method for manufacturing a thin film inductor, comprising the steps of:
tiling the first magnetic material to form a magnet underlayer;
preparing a conductive coil group, wherein the conductive coil group comprises a plurality of conductive coils arranged in an array;
the conductive coil groups are arranged on the first magnetic materials, and second magnetic materials which are in one-to-one correspondence with the conductive coils are vertically arranged;
introducing magnetic slurry to cover the first magnetic material, the second magnetic material and the wire coil group to form an inductance group;
cutting the inductance group to form a plurality of coil inductors, wherein each coil inductor comprises an inductance body and a magnet wrapping the inductance body; the inductor body comprises a first magnetic material, a conductive coil and a second magnetic material;
the individual coil inductors are terminated.
Further, the first magnetic material is magnetic slurry, and the second magnetic material is soft magnetic alloy or soft magnetic composite material or soft magnetic ferrite.
Further, the first magnetic material and the second magnetic material are soft magnetic alloy or soft magnetic composite material, soft magnetic ferrite and other soft magnetic materials.
Further, the first magnetic material and the second magnetic material are integrally formed.
A method for manufacturing a thin film inductor, comprising the steps of:
tiling magnetic materials in an array;
preparing a conductive coil group to be placed on a magnetic material, wherein the conductive coil group comprises a plurality of conductive coils which are arranged in an array;
aligning the conductive coils with the magnetic material one by one;
introducing magnetic slurry to cover the magnetic material and the wire coil;
the secondary array is paved with magnetic materials and aligned with the conductive coils of the conductive coil group one by one;
introducing magnetic materials again to cover the magnetic materials which are tiled secondarily to form an inductance group;
cutting the inductance group to form a plurality of coil inductors, wherein each coil inductor comprises an inductance body and a magnet wrapping the inductance body; the inductor body comprises a magnetic material which is paved once, a conductive coil and a magnetic material which is paved twice;
the individual coil inductors are terminated.
Further, the magnetic material is a magnetic sheet formed by soft magnetic alloy or soft magnetic composite material or soft magnetic ferrite.
Further, before cutting the inductance group, the method further comprises:
after forming the inductance group, electrode marking of the inductance group in a full version is carried out;
and curing the inductance group marked by the electrode.
Further, the electrode mark comprises a spray code or a laser mark
Further, the forming method of the conductive coil group comprises the following steps: the conductive layers and the insulating layers are alternately paved along a first direction, and each paved layer is formed into a required pattern through photoetching and/or etching, so that a conductive coil comprising a plurality of array arrangements is formed; wherein adjacent conductive layers are electrically contacted by contacts extending through the insulating layer.
Compared with the prior art, the technical scheme of the invention has the following beneficial effects:
(1) According to the thin film inductor, the first magnetic materials are tiled through the array, the conductive coil groups are placed, the second magnetic materials are placed in batches, the lead-in magnets are wrapped to form the inductor groups, and the inductor groups are cut to form a plurality of coil inductors, so that batch production of the coil inductors is realized, and further the production efficiency is improved. Meanwhile, by changing the forms and materials of the first magnetic material and the second magnetic material, various thin film inductors can be produced.
(2) After the inductance group is formed, the inductance group is subjected to full-page electrode marking, the polarity of each coil inductor is marked at one time through code spraying or laser marking, and the subsequent re-marking after the test of a single coil inductor is avoided, so that the production and manufacturing efficiency is improved.
(3) According to the thin film inductor, the array is used for laying the magnetic sheets, placing the conductive coil groups, guiding the magnets, laying the magnetic sheets, guiding the magnets again to wrap the magnetic sheets to form the inductor groups, and the inductor groups are cut to form a plurality of coil inductors, so that batch production of the coil inductors is realized, and further the production efficiency is improved.
Drawings
FIG. 1 is a schematic illustration of a tiled first magnetic material provided in accordance with an embodiment of the present invention;
FIG. 2 is a schematic diagram of a prepared conductive coil set according to an embodiment of the present invention, wherein each conductive coil corresponds to a first magnetic material one by one;
fig. 3 is a schematic diagram of an inductor body set according to an embodiment of the present invention, in which second magnetic materials are in one-to-one correspondence with conductive coils;
fig. 4 is a schematic diagram of an inductance body group introduced with magnetic slurry according to an embodiment of the present invention;
fig. 5 is a schematic diagram of a cutting inductor assembly according to a first embodiment of the present invention;
FIG. 6 is a schematic diagram of a capping process for forming a thin film inductor for each coil inductor according to an embodiment of the present invention;
FIG. 7 is a schematic illustration of a tiled first magnetic material provided in accordance with a second embodiment of the present invention;
FIG. 8 is a schematic diagram of a second embodiment of the present invention for preparing a conductive coil set disposed on a first magnetic material;
fig. 9 is a schematic diagram of an inductance body set according to a second embodiment of the present invention, in which second magnetic materials are in one-to-one correspondence with conductive coils;
fig. 10 is a schematic diagram of an inductance body group introduced magnetic slurry according to a second embodiment of the present invention;
fig. 11 is a schematic diagram of capping each coil inductor to form a thin film inductor according to a second embodiment of the present invention;
FIG. 12 is a schematic illustration of tiling a first magnetic material provided by a third embodiment of the present invention;
FIG. 13 is a schematic diagram of a prepared conductive coil set according to a third embodiment of the present invention, wherein the conductive coil set is disposed on a first magnetic material;
FIG. 14 is a schematic view of a primary magnetic slurry provided in accordance with a third embodiment of the present invention;
FIG. 15 is a one-to-one correspondence of second magnetic material of an array tile and conductive coils provided in accordance with a third embodiment of the present invention;
FIG. 16 is a schematic illustration of a secondary magnetic slurry provided in accordance with a third embodiment of the present invention;
fig. 17 is a schematic diagram of a cutting inductor assembly according to a third embodiment of the present invention;
fig. 18 is a schematic diagram of capping each coil inductor to form a thin film inductor according to a third embodiment of the present invention.
Illustration of:
a first magnetic material-10; a conductive coil-20; second magnetic material-30; magnetic slurry-40; an inductor body-100.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Example 1
S1, the first magnetic material 10 is tiled by the array to form a bottom layer of magnets arranged in the array, as shown in FIG. 1. The first magnetic material may be soft magnetic alloy, soft magnetic composite material, soft magnetic ferrite or other soft magnetic material.
S2, preparing a conductive coil group, wherein the conductive coil group comprises a plurality of conductive coils 20 which are arranged in an array manner, as shown in fig. 2. The forming method of the conductive coil group comprises the following steps: the conductive layers and the insulating layers are alternately paved along a first direction, and each paved layer is formed into a required pattern through photoetching and/or etching, so that a conductive coil comprising a plurality of array arrangements is formed; wherein adjacent conductive layers are electrically contacted by contacts extending through the insulating layer.
S3, the conductive coil groups are placed on the bottom layer of the magnet, and second magnetic materials 30 which are in one-to-one correspondence with the conductive coils 20 are vertically placed, as shown in FIG. 3. In this embodiment, the second magnetic material may be a soft magnetic alloy, a soft magnetic composite material, a soft magnetic ferrite, or the like, and the second magnetic material may be integrally formed with the first magnetic material to form a T-core; the second magnetic material can also be manufactured separately from the first magnetic material, the second magnetic material can be a magnetic core of soft magnetic materials such as soft magnetic alloy, soft magnetic composite material, soft magnetic ferrite and the like, and the first magnetic material can be a magnetic sheet of soft magnetic materials such as soft magnetic alloy, soft magnetic composite material, soft magnetic ferrite and the like.
The second magnetic material is used as the magnetic core of the conductive coil, the first magnetic material is used as the bottom layer of the magnet, and the second magnetic material and the conductive coil together form an inductance body, namely, a plurality of inductance bodies 100 which are arranged in an array.
S4, referring to fig. 4, the magnetic paste 40 is introduced to cover all the inductor bodies 100, so as to form a plurality of inductor groups arranged in a coil inductor array. The magnetic paste may be formed from a mixture of magnetic alloy powders including, but not limited to, various soft magnetic metal alloys such as ferrosilicon, ferrosilicon chromium, ferronickel, ferrosilicon aluminum, and the like, and a binder.
S5, electrode marking of the whole plate is carried out on the inductance group, the polarity of each coil inductor is marked at one time through code spraying or laser marking, and the subsequent re-marking after testing of a single coil inductor is avoided, so that the production and manufacturing efficiency is improved.
S6, referring to FIG. 5, the inductance group after electrode marking is cured and then cut to form a plurality of coil inductors, so that mass production of the coil inductors is realized. Each coil inductor comprises an inductor body and a magnet wrapping the inductor body. It is also possible to perform a planarization operation on the surface of the magnet to improve the roughness of the surface roughened magnet surface after the soft medium compression, thereby improving the quality of the inductance.
S7, referring to FIG. 6, the single coil inductor is capped to form a thin film inductor.
Embodiment two.
The basic principle of this embodiment is the same as that of the first embodiment, except that in this embodiment, the first magnetic material is magnetic slurry, the second magnetic material may be soft magnetic materials such as soft magnetic alloy, soft magnetic composite material, soft magnetic ferrite, etc., that is, in this embodiment, the magnetic core of the conductive coil may be soft magnetic materials such as soft magnetic alloy, soft magnetic composite material, soft magnetic ferrite, etc., and the first magnetic material is formed by tiling the magnetic slurry and forms an inductance body together with the wire coil.
In this embodiment, the bottom layer of the magnet formed by tiling the magnetic paste is a single piece, as shown in fig. 7, so that when the conductive coil group is placed, the conductive coil 20 and the first magnetic material 10 do not need to be aligned intentionally, and only the conductive coil group needs to be placed on the bottom layer of the magnet, as shown in fig. 8. And then aligning the magnetic cores with the conductive coils, and placing the magnetic cores into each conductive coil to form a plurality of inductance bodies arranged in an array, as shown in fig. 9. And then, magnetic slurry is introduced to cover each inductor body to form an inductor group, as shown in fig. 10, a plurality of coil inductors are formed in batches, and the end caps are blocked to form a thin film inductor, as shown in fig. 11.
Example III
S1, the first magnetic material 10 is tiled in an array, and the first magnetic material in this embodiment may be a magnetic sheet of soft magnetic material such as soft magnetic alloy, soft magnetic composite material, soft magnetic ferrite, etc., as shown in FIG. 12.
S2, preparing a conductive coil group to be placed on the magnetic sheet, wherein the conductive coil group comprises a plurality of conductive coils 20 which are arranged in an array. The method for forming the electric coil assembly comprises the following steps: the conductive layers and the insulating layers are alternately paved along a first direction, and each paved layer is formed into a required pattern through photoetching and/or etching, so that a conductive coil comprising a plurality of array arrangements is formed; wherein adjacent conductive layers are electrically contacted by contacts extending through the insulating layer.
S3, the conductive coils 20 are aligned with the magnetic sheets one by one, as shown in FIG. 13, in S1, the array tiling of the magnetic sheets according to the array arrangement mode of the conductive coil groups is easy to form in modern industrial automation, and the placement of the conductive coils in the prepared conductive coil groups in one-to-one correspondence with the magnetic sheets is easy to realize.
S4, introducing magnetic slurry 40 to cover the first magnetic material 10 and the wire coil 20, as shown in FIG. 14.
S5, the second magnetic material 30 is tiled in an array and aligned with the conductive coils 20 of the conductive coil group one by one, and in this embodiment, the second magnetic material may be a magnetic sheet of soft magnetic material such as soft magnetic alloy, soft magnetic composite material, soft magnetic ferrite, etc., as shown in FIG. 15.
S6, reintroducing the magnetic material 40 to cover the second magnetic material 30 of the second tiling to form an inductance group, as shown in FIG. 16.
And S7, electrode marking of the whole plate of the inductance group is carried out, the polarity of each coil inductor is marked at one time through code spraying or laser marking, and the subsequent re-marking after testing of a single coil inductor is avoided, so that the production and manufacturing efficiency is improved.
S8, cutting the electrode marked inductance group to form a plurality of coil inductors, wherein each coil inductor comprises an inductance body and a magnet coating the inductance body, as shown in FIG. 17. The inductor body comprises magnetic materials which are paved at one time, a conductive coil and magnetic materials which are paved at the second time.
And S9, end capping the single coil inductor to form a thin film inductor, as shown in fig. 18.
While the foregoing description illustrates and describes the preferred embodiments of the present invention, it is to be understood that the invention is not limited to the forms disclosed herein, but is not to be construed as limited to other embodiments, but is capable of use in various other combinations, modifications and environments and is capable of changes or modifications within the scope of the inventive concept, either as described above or as a matter of skill or knowledge in the relevant art. And that modifications and variations which do not depart from the spirit and scope of the invention are intended to be within the scope of the appended claims.
Claims (9)
1. A method for manufacturing a thin film inductor, comprising the steps of:
tiling the first magnetic material to form a magnet underlayer;
preparing a conductive coil group, wherein the conductive coil group comprises a plurality of conductive coils arranged in an array;
the conductive coil groups are arranged on the bottom layer of the magnet, and second magnetic materials which are in one-to-one correspondence with the conductive coils are vertically arranged;
introducing magnetic slurry to cover the first magnetic material, the second magnetic material and the wire coil group to form an inductance group;
cutting the inductance group to form a plurality of coil inductors, wherein each coil inductor comprises an inductance body and a magnet wrapping the inductance body; the inductor body comprises a first magnetic material, a conductive coil and a second magnetic material;
the individual coil inductors are terminated.
2. The method of manufacturing a thin film inductor according to claim 1, wherein the first magnetic material is a magnetic paste, and the second magnetic material is a soft magnetic alloy or a soft magnetic composite material or a soft magnetic ferrite.
3. The method of manufacturing a thin film inductor according to claim 1, wherein the first magnetic material and the second magnetic material are soft magnetic alloy, soft magnetic composite material, soft magnetic ferrite, or other soft magnetic materials.
4. A method of manufacturing a thin film inductor as claimed in claim 3 wherein the first magnetic material and the second magnetic material are integrally formed.
5. A method for manufacturing a thin film inductor, comprising the steps of:
tiling magnetic materials in an array;
preparing a conductive coil group, wherein the conductive coil group comprises a plurality of conductive coils arranged in an array;
aligning the conductive coils with the magnetic material one by one;
introducing magnetic slurry to cover the magnetic material and the wire coil;
the secondary array is paved with magnetic materials and aligned with the conductive coils of the conductive coil group one by one;
introducing magnetic materials again to cover the magnetic materials which are tiled secondarily to form an inductance group;
cutting the inductance group to form a plurality of coil inductors, wherein each coil inductor comprises an inductance body and a magnet wrapping the inductance body; the inductor body comprises a magnetic material which is paved once, a conductive coil and a magnetic material which is paved twice;
the individual coil inductors are terminated.
6. The method of manufacturing a thin film inductor according to claim 5, wherein the magnetic material is a magnetic sheet formed of a soft magnetic alloy or a soft magnetic composite material or a soft magnetic ferrite.
7. The method of manufacturing a thin film inductor as claimed in any one of claims 1 to 6, further comprising, before dicing the inductor assembly:
after forming the inductance group, electrode marking of the inductance group in a full version is carried out;
and curing the inductance group marked by the electrode.
8. The method of claim 7, wherein the electrode mark comprises a spray code or a laser mark.
9. The method of manufacturing a thin film inductor according to any one of claims 1 to 6, wherein the method of forming the conductive coil group comprises: the conductive layers and the insulating layers are alternately paved along a first direction, and each paved layer is formed into a required pattern through photoetching and/or etching, so that a conductive coil comprising a plurality of array arrangements is formed; wherein adjacent conductive layers are electrically contacted by contacts extending through the insulating layer.
Priority Applications (1)
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CN202311591522.9A CN117423541A (en) | 2023-11-27 | 2023-11-27 | Manufacturing method of thin film inductor |
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CN202311591522.9A CN117423541A (en) | 2023-11-27 | 2023-11-27 | Manufacturing method of thin film inductor |
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105355409A (en) * | 2015-11-18 | 2016-02-24 | 韵升控股集团有限公司 | Surface mounting inductor manufacture method |
CN109036779A (en) * | 2018-09-04 | 2018-12-18 | 湖南创电子科技股份有限公司 | Die perfusion forms winding inductor and preparation method thereof |
CN114078620A (en) * | 2020-08-14 | 2022-02-22 | 乾坤科技股份有限公司 | Electric element and manufacturing method thereof |
CN115547657A (en) * | 2022-10-17 | 2022-12-30 | 横店集团东磁股份有限公司 | Power inductor and preparation method thereof |
CN115692006A (en) * | 2022-11-17 | 2023-02-03 | 深圳市信维通信股份有限公司 | Molded inductor and preparation method thereof |
CN116580940A (en) * | 2023-06-28 | 2023-08-11 | 英麦科(厦门)微电子科技有限公司 | Coil inductor and manufacturing method thereof |
-
2023
- 2023-11-27 CN CN202311591522.9A patent/CN117423541A/en active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105355409A (en) * | 2015-11-18 | 2016-02-24 | 韵升控股集团有限公司 | Surface mounting inductor manufacture method |
CN109036779A (en) * | 2018-09-04 | 2018-12-18 | 湖南创电子科技股份有限公司 | Die perfusion forms winding inductor and preparation method thereof |
CN114078620A (en) * | 2020-08-14 | 2022-02-22 | 乾坤科技股份有限公司 | Electric element and manufacturing method thereof |
CN115547657A (en) * | 2022-10-17 | 2022-12-30 | 横店集团东磁股份有限公司 | Power inductor and preparation method thereof |
CN115692006A (en) * | 2022-11-17 | 2023-02-03 | 深圳市信维通信股份有限公司 | Molded inductor and preparation method thereof |
CN116580940A (en) * | 2023-06-28 | 2023-08-11 | 英麦科(厦门)微电子科技有限公司 | Coil inductor and manufacturing method thereof |
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